TWI909823B - Projector and sensing system used therefor - Google Patents
Projector and sensing system used thereforInfo
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本發明是有關於一種電子裝置,且特別是關於一種光投射器與搭配光投射器使用的感測系統。This invention relates to an electronic device, and more particularly to a light projector and a sensing system used in conjunction with the light projector.
隨著科技發展,電子產品對環境物體或使用者的定位功能越來越重要(例如擴增實境(AR)、虛擬實境(VR)與混合實境(MR)追蹤使用者的手部位置、智慧家電或自動駕駛感測環境待測物的三維訊息等)。然而,隨著市場對電子產品的應用越來越廣,現有的感測系統要進一步降低重量、體積和成本以應用在不同的電子產品中(如頭戴式顯示器或手持式行動裝置等)也越來越困難。如何解決上述問題仍有待相關廠商克服。With technological advancements, the positioning capabilities of electronic products for environmental objects or users are becoming increasingly important (e.g., augmented reality (AR), virtual reality (VR), and mixed reality (MR) tracking of user hand positions, smart home appliances, or autonomous vehicles sensing 3D information of objects in their environment). However, as the market expands the application of electronic products, it is becoming increasingly difficult to further reduce the weight, size, and cost of existing sensing systems for use in various electronic products (such as head-mounted displays or handheld mobile devices). Solving these problems remains a challenge for manufacturers.
本發明提供一種光投射器,可以降低成本以及裝置的體積及重量,並且光投射器的泛用性佳。This invention provides a light projector that reduces costs, device size and weight, and has good versatility.
本發明提供一種感測系統,可以降低光投射器的使用數量,進一步降低成本以及裝置的體積及重量。除了有利提升感測效果之外,還可以提升感測系統的泛用性,並且降低感測系統的運算負擔。This invention provides a sensing system that reduces the number of light projectors required, further reducing costs, device size, and weight. In addition to improving sensing performance, it also enhances the versatility of the sensing system and reduces its computational burden.
本發明的一實施例的光投射器包括光源和繞射光學元件,光源具有第一發光區以及第二發光區,繞射光學元件設置在光源上。繞射光學元件具有第一繞射結構和第二繞射結構,分別重疊第一發光區和第二發光區,第一繞射結構不同於第二繞射結構。An embodiment of the present invention includes a light projector comprising a light source and a diffractive optical element. The light source has a first light-emitting region and a second light-emitting region, and the diffractive optical element is disposed on the light source. The diffractive optical element has a first diffraction structure and a second diffraction structure, which overlap the first light-emitting region and the second light-emitting region, respectively. The first diffraction structure is different from the second diffraction structure.
本發明的一實施例的感測系統包括光源、繞射光學元件和攝像機。光源具有第一發光區以及第二發光區,繞射光學元件設置在光源上。繞射光學元件具有第一繞射結構和第二繞射結構,分別重疊第一發光區和第二發光區,第一繞射結構不同於第二繞射結構。攝像機用於接收被待測物反射的光束。An embodiment of the sensing system of the present invention includes a light source, a diffractive optical element, and a camera. The light source has a first emitting region and a second emitting region, and the diffractive optical element is disposed on the light source. The diffractive optical element has a first diffraction structure and a second diffraction structure, which overlap the first emitting region and the second emitting region, respectively, and the first diffraction structure is different from the second diffraction structure. The camera is used to receive the light beam reflected by the object to be measured.
基於上述,本發明的光投射器以及感測系統中,由於繞射光學元件(Diffractive Optical Element, DOE)包括不同圖案的光學繞射結構。當同一光源發出的光束通過不同圖案的光學繞射結構時,即可以產生不同的繞射圖案。不同的繞射圖案可以適用於感測不同的距離,因此本發明可以單顆光投射器產生多種繞射圖案,相較於多顆光投射器產生多種繞射圖案的架構,可以有效節省成本以及裝置的使用空間;進一步可以為不同的感測距離(例如待測物為使用者的臉部或手指、待測物為使用者周圍的環境、待測物為使用者所處的空間等)量身打造所需的光學繞射結構,可以大大提升感測系統的建模精準度。Based on the above, in the light projector and sensing system of this invention, the diffractive optical element (DOE) includes optical diffraction structures with different patterns. When a light beam emitted from the same light source passes through optical diffraction structures with different patterns, different diffraction patterns can be generated. Different diffraction patterns can be applied to sensing different distances. Therefore, this invention can generate multiple diffraction patterns with a single light projector. Compared to the structure of generating multiple diffraction patterns with multiple light projectors, this can effectively save costs and device space. Furthermore, it can tailor the required optical diffraction structure for different sensing distances (e.g., the object being measured is the user's face or finger, the object being measured is the user's surrounding environment, the object being measured is the space where the user is located, etc.), which can greatly improve the modeling accuracy of the sensing system.
進一步來說,當光投射器或感測系統應用於近眼顯示裝置(例如擴增實境(AR)、虛擬實境(VR)與混合實境(MR))、來做三角定位進行深度運算時,裝置的中心位置是兩顆相機覆蓋率最高的地方,因此通常也覆蓋最多的光學元件。若將光投射器拆成多顆擺放,會影響相機深度計算的覆蓋率,也大幅增加感測系統中固態處理器(Central Processing Unit, CPU)所需的運算量。相反地,本發明的光投射器或感測系統由於以單顆光投射器即可以產生各種不同的繞射圖案,據此可以應用於各種不同的感測空間,且可達到最佳的空間覆蓋率,使近眼顯示裝置的效能提升且有利於輕量化,大幅提升產品的競爭力。Furthermore, when light projectors or sensing systems are used in near-eye display devices (such as augmented reality (AR), virtual reality (VR), and mixed reality (MR)) for triangulation and depth calculation, the center of the device is where the coverage of the two cameras is highest, and therefore usually also where the most optical elements are covered. If the light projector is split into multiple units, it will affect the coverage of the camera depth calculation and significantly increase the computational load required by the solid-state processing unit (CPU) in the sensing system. Conversely, the light projector or sensing system of this invention can generate various diffraction patterns with a single light projector, thereby being applicable to various sensing spaces and achieving optimal spatial coverage. This improves the performance of near-eye display devices, facilitates weight reduction, and significantly enhances product competitiveness.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。To make the above features and advantages of this invention more apparent and understandable, specific examples are given below, and detailed explanations are provided in conjunction with the accompanying drawings.
本文使用的「約」、「近似」、「本質上」、或「實質上」包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,「約」可以表示在所述值的一個或多個標準偏差內,或例如±30%、±20%、±15%、±10%、±5%內。再者,本文使用的「約」、「近似」、「本質上」、或「實質上」可依量測性質、切割性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, “about,” “approximately,” “essentially,” or “substantially” includes the value and the average of the values within an acceptable range of deviation from a particular value as determined by a person of ordinary skill in the art, taking into account the measurement under discussion and a particular number of errors associated with the measurement (i.e., limitations of the measurement system). For example, “about” may mean within one or more standard deviations of the value, or, for example, within ±30%, ±20%, ±15%, ±10%, ±5%. Furthermore, as used herein, “about,” “approximately,” “essentially,” or “substantially” may be used to select a more acceptable range of deviations or standard deviations depending on the nature of the measurement, the cutting nature, or other properties, and may not require a single standard deviation to apply to all properties.
在附圖中,為了清楚起見,放大了層、膜、面板、區域等的厚度。應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件「上」或「連接到」另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為「直接在另一元件上」或「直接連接到」另一元件時,不存在中間元件。如本文所使用的,「連接」可以指物理及/或電性連接。再者,「電性連接」可為二元件間存在其它元件。In the accompanying figures, the thicknesses of layers, films, panels, areas, etc., are enlarged for clarity. It should be understood that when a component such as a layer, film, area, or substrate is referred to as being "on" or "connected to" another component, it may be directly on or connected to the other component, or an intermediate component may also be present. Conversely, when a component is referred to as being "directly on" or "directly connected to" another component, no intermediate component exists. As used herein, "connection" can refer to physical and/or electrical connection. Furthermore, "electrical connection" may mean the presence of other components between two components.
現將詳細地參考本發明的示範性實施方式,示範性實施方式的實例說明於所附圖式中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made to the exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same element symbols are used in the drawings and description to denote the same or similar parts.
圖1是本發明一實施例的一種光投射器的結構示意圖,以及光投射器產生的繞射圖案示圖。請參照圖1,光投射器10包括光源100、繞射光學元件110、光阻擋層120、透鏡陣列130以及框體140。光源100可以包括第一發光區101、第二發光區102以及第三發光區103。但本發明並不限於此。在其他實施例中,光源100可以包括至少兩個發光區,如第一發光區101和第二發光區102。光源100用於提供光束,例如第一發光區101、第二發光區102以及第三發光區103可以分別發出相同波長範圍或不同波長範圍的第一光束L1、第二光束L2以及第三光束L3。第一光束L1、第二光束L2以及第三光束L3的波長範圍可以包括可見光波段(例如波長介於380nm至750nm)或者是包括紅外光波段(例如波長在750nm以上或者波長在1054nm以上之近紅外光波段),本發明並不限於此。Figure 1 is a schematic diagram of the structure of a light projector according to an embodiment of the present invention, and a diagram of the diffraction pattern generated by the light projector. Referring to Figure 1, the light projector 10 includes a light source 100, a diffractive optical element 110, a light blocking layer 120, a lens array 130, and a frame 140. The light source 100 may include a first emitting region 101, a second emitting region 102, and a third emitting region 103. However, the present invention is not limited thereto. In other embodiments, the light source 100 may include at least two emitting regions, such as a first emitting region 101 and a second emitting region 102. The light source 100 is used to provide a light beam; for example, the first emitting region 101, the second emitting region 102, and the third emitting region 103 may respectively emit a first light beam L1, a second light beam L2, and a third light beam L3 within the same wavelength range or different wavelength ranges. The wavelength range of the first beam L1, the second beam L2, and the third beam L3 may include the visible light band (e.g., wavelengths between 380 nm and 750 nm) or the infrared light band (e.g., wavelengths above 750 nm or near-infrared light bands above 1054 nm), but the invention is not limited thereto.
光源100可以是發光二極體(Light Emitting Diode, LED)、雷射發光二極體(Laser Diode, LD)或是垂直腔面射型雷射器(Vertical-Cavity Surface-Emitting Laser, VCSEL)等不同光源。進一步來說,光源100可以包括點狀垂直共振腔面射型雷射、線狀垂直共振腔面射型雷射、邊緣發射型雷射以及隨機點垂直共振腔面射型雷射中的至少一者,本發明並不限於此。舉例來說,在本實施例中光源100 可以是VCSEL,並且第一發光區101、第二發光區102以及第三發光區103的結構可以由半導體製程中磊晶出不同區塊的VCSEL來製作而成,本發明也並不限於此。The light source 100 can be a light-emitting diode (LED), a laser-emitting diode (LD), or a vertical-cavity surface-emitting laser (VCSEL), etc. Furthermore, the light source 100 can include at least one of a point-shaped VCSEL, a linear VCSEL, an edge-emitting laser, and a random-point VCSEL; however, this invention is not limited to these. For example, in this embodiment, the light source 100 can be a VCSEL, and the structures of the first emitting region 101, the second emitting region 102, and the third emitting region 103 can be fabricated by epitaxially layering different blocks of VCSELs during semiconductor manufacturing; this invention is also not limited to these.
繞射光學元件110設置在光源100上。詳細而言,繞射光學元件110是設置在光源100的出光方向上。繞射光學元件110 (DOE)為利用半導體製程,在表面製作具備使光束繞射的微結構所得的光學元件。當第一光束L1、第二光束L2以及第三光束L3照射至繞射光學元件110上時,即可以因微結構的繞射作用,在特定位置或空間產生所需的繞射圖案或結構光(structured light)。此繞射圖案可以是一維的線條、一維點狀光斑、二維隨機分布的光斑或二維規則排列的光班,本發明並不限於此。A diffusing optical element 110 is disposed on the light source 100. More specifically, the diffusing optical element 110 is disposed in the light-emitting direction of the light source 100. The diffusing optical element 110 (DOE) is an optical element obtained by fabricating a microstructure on its surface using semiconductor processes, which allows light beams to diffract. When the first light beam L1, the second light beam L2, and the third light beam L3 irradiate the diffusing optical element 110, the desired diffraction pattern or structured light can be generated at a specific location or space due to the diffraction effect of the microstructure. This diffraction pattern can be a one-dimensional line, a one-dimensional dotted light spot, a two-dimensional randomly distributed light spot, or a two-dimensional regularly arranged light spot; the invention is not limited to these.
值得一提的是,在本實施例中繞射光學元件110還具有第一繞射結構111、第二繞射結構112以及第三繞射結構113,分別重疊第一發光區101、第二發光區102和第三發光區103,其中第一繞射結構111不同於第二繞射結構112。It is worth mentioning that, in this embodiment, the diffractive optical element 110 also has a first diffraction structure 111, a second diffraction structure 112 and a third diffraction structure 113, which overlap the first light-emitting region 101, the second light-emitting region 102 and the third light-emitting region 103 respectively, wherein the first diffraction structure 111 is different from the second diffraction structure 112.
由於第一繞射結構111和第二繞射結構112可以具有不同的表面微結構,因此第一光束L1和第二光束L2分別通過第一繞射結構111和第二繞射結構112時,即可以產生不同的繞射圖案。例如第一發光區101發出的第一光束L1通過第一繞射結構111後可以生成第一繞射圖案DP1,第二發光區102發出的第二光束L2通過第二繞射結構112後可以生成第二繞射圖案DP2。而進一步來說,第一繞射圖案DP1可以包括多個高密度的點狀光斑,第二繞射圖案DP2可以包括多個條紋光斑(如圖1繪示)或是多個密度較低的點狀光斑(未繪示)。Since the first diffraction structure 111 and the second diffraction structure 112 can have different surface microstructures, the first beam L1 and the second beam L2 can produce different diffraction patterns when they pass through the first diffraction structure 111 and the second diffraction structure 112, respectively. For example, the first beam L1 emitted from the first emitting region 101 can generate a first diffraction pattern DP1 after passing through the first diffraction structure 111, and the second beam L2 emitted from the second emitting region 102 can generate a second diffraction pattern DP2 after passing through the second diffraction structure 112. Furthermore, the first diffraction pattern DP1 can include multiple high-density dot-shaped light spots, and the second diffraction pattern DP2 can include multiple striped light spots (as shown in Figure 1) or multiple low-density dot-shaped light spots (not shown).
在感測領域為了感測不同距離的物體的三維訊息,例如可以採用結構光技術由光投射器10對不同距離的物體發出特定繞射圖案的光束,再經由立體深度攝影機(Stereo Depth Camera)來接收物體表面上的繞射圖案以比對與原始投射光斑的差異,或比對左右二顆攝影機影像,並利用三角測量原理即可計算出物體的三維座標或表面輪廓。舉例來說,第一繞射圖案DP1可以是多個高密度且視場角(FOV)小的點狀光斑,適合用於感測近距離的第一待測物OB1的三維空間訊息(例如表面輪廓、深度或三維座標),例如使用者的手指位置、手部移動、眼球追蹤等。而第二繞射圖案DP2可以是視場角(FOV)較廣的多個條紋光斑,適合用於感測中距離的第二待測物OB2的三維空間訊息(例如表面輪廓或三維座標),例如使用者周圍的家具或障礙物等。因此,單個光投射器10可以為特定的待測物的感測距離量身打造所需的繞射圖案,感測不同物件、不同距離的待測物時,大幅提升了光投射器10的泛用性和建模精準度。而相較於以不同光投射器提供不同繞射圖案的實施方式,光投射器10也進一步簡化了裝置架構以及達成裝置的輕量化,在應用於穿戴式裝置時可以有效提升產品的競爭力。In the field of sensing, to sense three-dimensional information of objects at different distances, structured light technology can be used. A light projector emits beams with specific diffraction patterns to objects at different distances. A stereo depth camera then receives the diffraction patterns on the object's surface and compares them with the original projected light spots, or compares the images from two cameras. Using triangulation principles, the object's three-dimensional coordinates or surface contours can be calculated. For example, the first diffraction pattern DP1 can be multiple high-density point-like light spots with a small field of view (FOV), suitable for sensing three-dimensional spatial information (such as surface contours, depth, or three-dimensional coordinates) of a first object OB1 at close range, such as the user's finger position, hand movement, or eye tracking. The second diffraction pattern DP2 can be multiple striped light spots with a wide field of view (FOV), suitable for sensing the three-dimensional spatial information (such as surface contours or three-dimensional coordinates) of a second object OB2 at a medium distance, such as furniture or obstacles around the user. Therefore, a single light projector 10 can tailor the required diffraction pattern for the sensing distance of a specific object, greatly improving the versatility and modeling accuracy of the light projector 10 when sensing different objects and objects at different distances. Compared to the implementation of providing different diffraction patterns with different light projectors, the light projector 10 also further simplifies the device architecture and achieves device lightweighting, which can effectively enhance the competitiveness of the product when applied to wearable devices.
進一步地,繞射光學元件110還包括第三繞射結構113重疊於第三發光區103,其中第一繞射結構111、第二繞射結構112以及第三繞射結構113可以彼此皆不同。舉例來說,第三光束L3通過第三繞射結構113後形成的第三繞射圖案DP3,可以不同於第一繞射圖案DP1以及第二繞射圖案DP2,例如第三繞射圖案DP3包括多個點狀光斑,而第三繞射圖案DP3的多個點狀光斑的密度,可以小於第一繞射圖案DP1的多個點狀光斑的密度。而在本實施例中,第三繞射圖案DP3的多個點狀光斑可以是呈矩陣排列,而第一繞射圖案DP1的點狀光斑可以是呈亂數排列,本發明也不限於此。Furthermore, the diffractive optical element 110 also includes a third diffraction structure 113 overlapping the third light-emitting region 103, wherein the first diffraction structure 111, the second diffraction structure 112, and the third diffraction structure 113 may all be different from each other. For example, the third diffraction pattern DP3 formed by the third beam L3 after passing through the third diffraction structure 113 may be different from the first diffraction pattern DP1 and the second diffraction pattern DP2. For example, the third diffraction pattern DP3 includes multiple point-like light spots, and the density of the multiple point-like light spots in the third diffraction pattern DP3 may be less than the density of the multiple point-like light spots in the first diffraction pattern DP1. In this embodiment, the multiple point-like spots of the third diffraction pattern DP3 can be arranged in a matrix, while the point-like spots of the first diffraction pattern DP1 can be arranged randomly. This invention is not limited to this.
當第三繞射圖案DP3為多個低密度且視場角(FOV)小的點狀光斑時,其適合用於低解析度感測的空間,可以降低立體空間建模時所需的計算量。例如用於感測相較使用者有較遠距離的第三待測物OB3的三維空間訊息,例如所處室內的大小、房間家具擺設建模等。因此光投射器10可以應用在更多不同的領域。值得一提的是,在未繪示的實施例中,光投射器可以僅包括第一發光區101和第二發光區102,對應地繞射光學元件110可以僅包括第一繞射結構111和第二繞射結構112分別重疊第一發光區101和第二發光區102。在其他實施例中,光投射器也可以包括更多個發光區以及對應設置更多不同的繞射結構,本發明並不限於此。When the third diffraction pattern DP3 consists of multiple low-density point-like light spots with a small field of view (FOV), it is suitable for low-resolution sensing spaces, reducing the computational load required for three-dimensional spatial modeling. For example, it can be used to sense three-dimensional spatial information of a third object OB3 located at a greater distance from the user, such as the size of the room or modeling the furniture arrangement. Therefore, the light projector 10 can be applied in a wider range of fields. It is worth noting that in embodiments not shown, the light projector may consist only of a first emitting area 101 and a second emitting area 102, and correspondingly, the diffractive optical element 110 may consist only of a first diffraction structure 111 and a second diffraction structure 112 overlapping the first emitting area 101 and the second emitting area 102, respectively. In other embodiments, the light projector may also include more light-emitting zones and correspondingly more different diffraction structures, but the invention is not limited thereto.
另一方面,光阻擋層120設置在第一繞射結構111和第二繞射結構112之間,以及設置在第二繞射結構112和第三繞射結構113之間。光阻擋層120可以包括但不限於深色的遮光材料(如黑色)、高光學密度(例如光學密度(optical delnsity)OD值>0.5) 的遮光材料、對第一光束L1、第二光束L2以及第三光束L3具有低穿透率(例如穿透率小於等於30%)的遮光材料或是對第一光束L1、第二光束L2以及第三光束L3具有高吸收率的遮光材料組成。經由光阻擋層120的設置,第一光束L1照射至鄰近的第二繞射結構112的比例可以降低、第二光束L2照射至鄰近的第一繞射結構111和第三繞射結構113的比例可以降低、以及第三光束L3照射至鄰近的第二繞射結構112的比例也可以降低。也就是說光阻擋層120可以降低第一繞射圖案DP1、第二繞射圖案DP2、以及第三繞射圖案DP3彼此串擾的比例和降低雜散光的生成,用於感測領域時可以進一步提升結構光的清晰度和感測的靈敏度。On the other hand, the photoblocking layer 120 is disposed between the first diffraction structure 111 and the second diffraction structure 112, and between the second diffraction structure 112 and the third diffraction structure 113. The photoblocking layer 120 may include, but is not limited to, a dark-colored light-blocking material (such as black), a light-blocking material with high optical density (e.g., optical density OD value > 0.5), a light-blocking material with low transmittance (e.g., transmittance less than or equal to 30%) to the first beam L1, the second beam L2, and the third beam L3, or a light-blocking material with high absorption to the first beam L1, the second beam L2, and the third beam L3. By using the photoblocking layer 120, the proportion of the first beam L1 illuminating the adjacent second diffraction structure 112 can be reduced, the proportion of the second beam L2 illuminating the adjacent first diffraction structure 111 and third diffraction structure 113 can be reduced, and the proportion of the third beam L3 illuminating the adjacent second diffraction structure 112 can also be reduced. In other words, the photoblocking layer 120 can reduce the crosstalk between the first diffraction pattern DP1, the second diffraction pattern DP2, and the third diffraction pattern DP3 and reduce the generation of stray light. When used in sensing applications, this can further improve the clarity of structured light and the sensitivity of sensing.
此外,透鏡陣列130設置在光源100和繞射光學元件110之間,用於進一步將光源100所發出的光束匯聚,以提升光源100的光能利用率以及所生成的繞射圖案亮度。進一步來說,透鏡陣列130包括第一透鏡131、第二透鏡132以及第三透鏡133,第一透鏡131第二透鏡132以及第三透鏡133可以皆為聚光透鏡。在本實施例中,第一透鏡131設置於第一發光區101和第一繞射結構111之間,第二透鏡132設置於第二發光區102和第二繞射結構112之間,第三透鏡133設置於第三發光區103和第三繞射結構113之間。此外,第一透鏡131的屈光度可以小於第二透鏡132的屈光度,第二透鏡132的屈光度可以大於第三透鏡133的屈光度。Furthermore, the lens array 130 is disposed between the light source 100 and the diffractive optical element 110 to further focus the light beam emitted by the light source 100, thereby improving the light energy utilization rate of the light source 100 and the brightness of the generated diffraction pattern. More specifically, the lens array 130 includes a first lens 131, a second lens 132, and a third lens 133, all of which can be focusing lenses. In this embodiment, a first lens 131 is disposed between a first light-emitting area 101 and a first diffraction structure 111, a second lens 132 is disposed between a second light-emitting area 102 and a second diffraction structure 112, and a third lens 133 is disposed between a third light-emitting area 103 and a third diffraction structure 113. Furthermore, the refractive power of the first lens 131 may be less than that of the second lens 132, and the refractive power of the second lens 132 may be greater than that of the third lens 133.
經由透鏡陣列130具有不同聚光能力的透鏡,可以將第一發光區101、第二發光區102和第三發光區103所發出的光束進行各別聚焦,讓不同區塊的光能夠聚焦在所希望使用的距離。例如第三透鏡133的屈光度可以最小,應用於遠距離感測時,可以有效提升照射至第三待測物OB3的第三繞射圖案DP3的銳利度和清晰度。在其他實施例中,如果光源100所發出的光束平行度高,也可以省略透鏡陣列130的設置以進一步降低光投射器的體積、重量以及成本,本發明並不限於此。By using lenses with different focusing capabilities in the lens array 130, the light beams emitted from the first light-emitting area 101, the second light-emitting area 102, and the third light-emitting area 103 can be focused separately, allowing the light energy from different areas to be focused at the desired distance. For example, the refractive power of the third lens 133 can be minimized, which can effectively improve the sharpness and clarity of the third diffraction pattern DP3 illuminating the third object OB3 when applied to long-distance sensing. In other embodiments, if the parallelism of the light beam emitted by the light source 100 is high, the lens array 130 can be omitted to further reduce the size, weight, and cost of the light projector; however, the invention is not limited to this.
另一方面,框體140可以具有容置空間,使得光源100、繞射光學元件110、光阻擋層120和透鏡陣列130設置在框體140中。框體140可以是對第一光束L1、第二光束L2以及第三光束L3具有高吸收率的材質,以進一步降低光源100所發出的光束的漏光比例、提升光能利用率。在一些實施例中,框體140可以具有開口(未繪示)以使光源100的電路引腳伸出框體140外,以提供光源100所需的控制訊號或電源訊號,本發明並不限於此。On the other hand, the frame 140 may have accommodating space, allowing the light source 100, diffractive optical element 110, photoresist barrier layer 120, and lens array 130 to be disposed within the frame 140. The frame 140 may be made of a material with high absorption rate for the first beam L1, the second beam L2, and the third beam L3, to further reduce the light leakage ratio of the beam emitted by the light source 100 and improve the light energy utilization rate. In some embodiments, the frame 140 may have an opening (not shown) to allow the circuit pins of the light source 100 to extend outside the frame 140 to provide the control signals or power signals required by the light source 100; however, the invention is not limited to this.
圖2A至圖2C是本發明一實施例的繞射光學元件以及其對應生成的繞射圖案的示意圖。請參照圖2A,繞射光學元件110的第一繞射結構111可以包括多個高密度排列的第一微結構MS1,藉此當第一光束L1通過第一繞射結構111時可以產生對應的第一繞射圖案DP1(例如呈亂數分布的多個點狀光斑)。或者如圖2B所示,繞射光學元件110的第三繞射結構113可以包括多個低密度排列的第三微結構MS3,藉此當第三光束L3通過第三繞射結構113時可以產生對應的第三繞射圖案DP3(例如呈矩陣排列的多個點狀光斑)。類似地,如圖2C所示,繞射光學元件110的第二繞射結構112可以包括多個低密度排列的第二微結構MS2,藉此當第二光束L2通過第二繞射結構112時可以產生對應的第二繞射圖案DP2(例如呈規則的多個條紋光斑)。據此,不同感測領域可以對應使用不同的繞射結構以生成不同的繞射圖案,藉此提升光投射器10的泛用性。Figures 2A to 2C are schematic diagrams of a diffractive optical element and the corresponding diffraction pattern generated according to an embodiment of the present invention. Referring to Figure 2A, the first diffraction structure 111 of the diffractive optical element 110 may include a plurality of high-density arranged first microstructures MS1, thereby generating a corresponding first diffraction pattern DP1 (e.g., a plurality of randomly distributed dot-shaped light spots) when the first beam L1 passes through the first diffraction structure 111. Alternatively, as shown in Figure 2B, the third diffraction structure 113 of the diffractive optical element 110 may include a plurality of low-density arranged third microstructures MS3, thereby generating a corresponding third diffraction pattern DP3 (e.g., a plurality of dot-shaped light spots arranged in a matrix) when the third beam L3 passes through the third diffraction structure 113. Similarly, as shown in Figure 2C, the second diffraction structure 112 of the diffraction optical element 110 may include a plurality of low-density arranged second microstructures MS2, thereby generating a corresponding second diffraction pattern DP2 (e.g., a regular plurality of striped light spots) when the second beam L2 passes through the second diffraction structure 112. Accordingly, different diffraction structures can be used for different sensing applications to generate different diffraction patterns, thereby improving the versatility of the light projector 10.
圖3A至圖3H是本發明一實施例的繞射光學元件以及光阻擋層的製造流程示意圖。請先參照圖3A以及圖3B,製造繞射光學元件110的方法例如是採用微影蝕刻製程。例如首先提供基板GS(例如是玻璃基板,但不限於此),並塗佈第一光阻液PR1在基板GS上。塗佈第一光阻液PR1的方法例如是採用旋轉塗佈法,本發明並不限於此。Figures 3A to 3H are schematic diagrams illustrating the manufacturing process of a diffractive optical element and a photoresist blocking layer according to an embodiment of the present invention. Referring first to Figures 3A and 3B, the method for manufacturing the diffractive optical element 110 is, for example, a photolithography process. For example, a substrate GS (e.g., a glass substrate, but not limited thereto) is first provided, and a first photoresist PR1 is coated on the substrate GS. The method for coating the first photoresist PR1 is, for example, a spin coating method, but the present invention is not limited thereto.
接著參照圖3C至圖3D,首先對塗佈好的第一光阻液PR1進行曝光,以對應在基板GS上生成欲形成的圖形P。接著再利用顯影製程以及蝕刻製程,將對應的圖形P製作成微結構MSA、微結構MSB以及微結構MSC。微結構MSA、微結構MSB以及微結構MSC例如可以分別對應前述實施例第一繞射結構111、第二繞射結構112以及第三繞射結構113,本發明並不限於此。Referring to Figures 3C to 3D, the first photoresist PR1 is first exposed to generate the desired pattern P on the substrate GS. Then, using a developing process and an etching process, the corresponding pattern P is fabricated into microstructures MSA, MSB, and MSC. The microstructures MSA, MSB, and MSC can, for example, correspond to the first diffraction structure 111, the second diffraction structure 112, and the third diffraction structure 113 of the aforementioned embodiments, respectively; however, the invention is not limited thereto.
接著參照圖3E至圖3F,在微結構MSA、微結構MSB以及微結構MSC上塗佈第二光阻液PR2。塗佈第二光阻液PR2的方法可以相同或不同於塗佈第一光阻液PR1的方法,本發明並不限於此。接著如圖3F所示,再對第二光阻液PR2進行顯影製程以及蝕刻製程,以形成微結構MSA、微結構MSB和微結構MSC兩兩之間的溝槽G。此時即初步完成繞射光學元件110的製作,以及定義出第一繞射結構111、第二繞射結構112以及第三繞射結構113。Next, referring to Figures 3E to 3F, a second photoresist PR2 is coated onto the microstructures MSA, MSB, and MSC. The method of coating the second photoresist PR2 can be the same as or different from the method of coating the first photoresist PR1, and the invention is not limited thereto. Then, as shown in Figure 3F, a developing process and an etching process are performed on the second photoresist PR2 to form the grooves G between each pair of microstructures MSA, MSB, and MSC. At this point, the fabrication of the diffractive optical element 110 is initially completed, and the first diffraction structure 111, the second diffraction structure 112, and the third diffraction structure 113 are defined.
繼續參照圖3G至圖3H,接著可以塗佈第三光阻液PR3至溝槽G中,並對第三光阻液PR3進行曝光製程及顯影製程,最後即利用第三光阻液PR3以形成光阻擋層120,據此完成光阻擋層120的設置。Continuing with Figures 3G to 3H, the third photoresist PR3 can then be applied to the groove G, and an exposure and development process can be performed on the third photoresist PR3. Finally, the third photoresist PR3 is used to form the photoresist block layer 120, thereby completing the setup of the photoresist block layer 120.
圖4是本發明一實施例的一種感測系統的結構示意圖和產生的繞射圖案示意圖。請參照圖4,感測系統1可以用於感測待測物的三維訊息(例如深度、表面輪廓或三維座標)。感測系統1可以包括前述的光投射器10、第一攝像機20A和第二攝像機20B。當光投射器10發出的結構光(如圖4中所示的第二繞射圖案DP2)照射至待測物(例如圖4中所示的第二待測物OB2)時,反射的光束即可以被第一攝像機20A和第二攝像機20B感測到,第一攝像機20A和第二攝像機20B中的光學感測器(未繪示)即可將所接收到的光訊號轉變為電訊號。感測系統1還可以包括固態處理器(未繪示),可以接收此電訊號用以判斷第二待測物OB2的三維資訊。固態處理器例如是包括微控制器單元(Microcontroller Unit,MCU)、中央處理單元(central processing unit,CPU)、微處理器(microprocessor)、數位訊號處理器(digital signal processor,DSP)、可程式化控制器、可程式化邏輯裝置(programmable logic device,PLD)或其他類似裝置或這些裝置的組合,本發明並不加以限制。此外,在一實施例中固態處理器的各功能可被實作為多個程式碼。這些程式碼會被儲存在一個記憶體中,由固態處理器來執行這些程式碼。或者,在一些實施例中,固態處理器的各功能可被實作為一或多個電路。本發明並不限制用軟體或硬體的方式來實作固態處理器的各功能。Figure 4 is a schematic diagram of the structure of a sensing system and a schematic diagram of the generated diffraction pattern according to an embodiment of the present invention. Referring to Figure 4, the sensing system 1 can be used to sense three-dimensional information (e.g., depth, surface contour, or three-dimensional coordinates) of the object to be measured. The sensing system 1 may include the aforementioned light projector 10, a first camera 20A, and a second camera 20B. When the structured light emitted by the light projector 10 (such as the second diffraction pattern DP2 shown in Figure 4) illuminates the object to be measured (e.g., the second object to be measured OB2 shown in Figure 4), the reflected light beam can be sensed by the first camera 20A and the second camera 20B. The optical sensors (not shown) in the first camera 20A and the second camera 20B can convert the received light signal into an electrical signal. The sensing system 1 may also include a solid-state processor (not shown) that can receive this electrical signal to determine the three-dimensional information of the second test object OB2. The solid-state processor may include, for example, a microcontroller unit (MCU), a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a programmable controller, a programmable logic device (PLD), or other similar devices or combinations thereof, and the invention is not limiting. Furthermore, in one embodiment, the functions of the solid-state processor may be implemented as multiple code snippets. These code snippets are stored in memory and executed by the solid-state processor. Alternatively, in some embodiments, the functions of the solid-state processor may be implemented as one or more circuits. This invention does not limit the implementation of solid-state processor functions in terms of software or hardware.
而如同前文所述,經由光投射器10具備多個發光區以對應發出不同的繞射圖案(如圖1所示的第一繞射圖案DP1、第二繞射圖案DP2以及第三繞射圖案DP3),固態處理器也可以控制光投射器10,因應不同感測距離或應用場合對應生成不同的繞射圖案,大幅提升感測系統1的泛用性。此外,當感測系統1應用於近眼顯示裝置(例如擴增實境(AR)、虛擬實境(VR)與混合實境(MR))來做三角定位進行深度運算時,近眼顯示裝置的中心位置是第一攝像機20A和第二攝像機20B覆蓋率最高的地方,因此通常也覆蓋最多的光學元件。若將光投射器拆成多顆擺放,會影響相機深度計算的覆蓋率,也增加了固態處理器的運算負擔。對應地,本發明的感測系統1由於以單顆光投射器10即可以產生不同的繞射圖案,因此可以設置在近眼顯示裝置的中心且可達到最佳的空間覆蓋率,使近眼顯示裝置的效能提升且有效降低產品重量、體積以及成本。As mentioned above, since the light projector 10 has multiple light-emitting areas to emit different diffraction patterns (such as the first diffraction pattern DP1, the second diffraction pattern DP2, and the third diffraction pattern DP3 shown in Figure 1), the solid-state processor can also control the light projector 10 to generate different diffraction patterns according to different sensing distances or application scenarios, greatly improving the versatility of the sensing system 1. In addition, when the sensing system 1 is applied to near-eye display devices (such as augmented reality (AR), virtual reality (VR), and mixed reality (MR)) for triangulation and depth calculation, the center position of the near-eye display device is the area with the highest coverage of the first camera 20A and the second camera 20B, and therefore usually has the most optical elements covered. If the light projector is split into multiple units, it will affect the coverage of the camera depth calculation and increase the computational burden on the solid-state processor. In contrast, the sensing system 1 of this invention can generate different diffraction patterns with a single light projector 10. Therefore, it can be placed at the center of the near-eye display device and achieve the best spatial coverage, thereby improving the performance of the near-eye display device and effectively reducing the product weight, size and cost.
綜上所述,本發明的光投射器以及感測系統中,由於繞射光學元件(Diffractive Optical Element, DOE)包括不同圖案的光學繞射結構。當同一光源發出的光束通過不同圖案的光學繞射結構時,即可以產生不同的繞射圖案。不同的繞射圖案可以適用於感測不同的距離,因此本發明可以單顆光投射器產生多種繞射圖案,相較於多顆光投射器產生多種繞射圖案的架構,可以有效節省成本以及裝置的使用空間;進一步可以為不同的感測距離(例如待測物為使用者的臉部或手指、待測物為使用者周圍的環境、待測物為使用者所處的空間等)量身打造所需的光學繞射結構,可以大大提升感測系統的建模精準度。In summary, in the light projector and sensing system of this invention, the diffractive optical element (DOE) includes optical diffraction structures with different patterns. When a light beam emitted from the same light source passes through optical diffraction structures with different patterns, different diffraction patterns can be produced. Different diffraction patterns can be applied to sensing different distances. Therefore, this invention can generate multiple diffraction patterns with a single light projector. Compared with the structure of generating multiple diffraction patterns with multiple light projectors, it can effectively save costs and device space. Furthermore, it can tailor the required optical diffraction structure for different sensing distances (such as the object being measured being the user's face or fingers, the object being measured being the user's surrounding environment, the object being measured being the space where the user is located, etc.), which can greatly improve the modeling accuracy of the sensing system.
進一步來說,當光投射器或感測系統應用於近眼顯示裝置(例如擴增實境(AR)、虛擬實境(VR)與混合實境(MR))、來做三角定位進行深度運算時,裝置的中心位置是兩顆相機覆蓋率最高的地方,因此通常也覆蓋最多的光學元件。若將光投射器拆成多顆擺放,會影響相機深度計算的覆蓋率,也大幅增加感測系統中固態處理器(Central Processing Unit, CPU)所需的運算量。相反地,本發明的光投射器或感測系統由於以單顆光投射器即可以產生各種不同的繞射圖案,據此可以應用於各種不同的感測空間,且可達到最佳的空間覆蓋率,使近眼顯示裝置的效能提升且有利於輕量化,大幅提升產品的競爭力。Furthermore, when light projectors or sensing systems are used in near-eye display devices (such as augmented reality (AR), virtual reality (VR), and mixed reality (MR)) for triangulation and depth calculation, the center of the device is where the coverage of the two cameras is highest, and therefore usually also where the most optical elements are covered. If the light projector is split into multiple units, it will affect the coverage of the camera depth calculation and significantly increase the computational load required by the solid-state processing unit (CPU) in the sensing system. Conversely, the light projector or sensing system of this invention can generate various diffraction patterns with a single light projector, thereby being applicable to various sensing spaces and achieving optimal spatial coverage. This improves the performance of near-eye display devices, facilitates weight reduction, and significantly enhances product competitiveness.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above by way of embodiments, it is not intended to limit the present invention. Anyone with ordinary skill in the art may make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended patent application.
1:感測系統 10:光投射器 20A:第一攝像機 20B:第二攝像機 100:光源 101:第一發光區 102:第二發光區 103:第三發光區 110:繞射光學元件 111:第一繞射結構 112:第二繞射結構 113:第三繞射結構 120:光阻擋層 130:透鏡陣列 131:第一透鏡 132:第二透鏡 133:第三透鏡 140:框體 L1:第一光束 L2:第二光束 L3:第三光束 DP1:第一繞射圖案 DP2:第二繞射圖案 DP3:第三繞射圖案 G:溝槽 GS:基板 MS1:第一微結構 MS2:第二微結構 MS3:第三微結構 MSA, MSB, MSC:微結構 OB1:第一待測物 OB2:第二待測物 OB3:第三待測物 P:圖形 PR1:第一光阻液 PR2:第二光阻液 PR3:第三光阻液 1: Sensing System 10: Light Projector 20A: First Camera 20B: Second Camera 100: Light Source 101: First Light-Emitting Area 102: Second Light-Emitting Area 103: Third Light-Emitting Area 110: Diffraction Optical Element 111: First Diffraction Structure 112: Second Diffraction Structure 113: Third Diffraction Structure 120: Optical Blocking Layer 130: Lens Array 131: First Lens 132: Second Lens 133: Third Lens 140: Frame L1: First Beam L2: Second Beam L3: Third Beam DP1: First Diffraction Pattern DP2: Second Diffraction Pattern DP3: Third Diffraction Pattern G: Groove GS: Substrate MS1: First Microstructure MS2: Second Microstructure MS3: Third Microstructure MSA, MSB, MSC: Microstructures OB1: First Analyte OB2: Second Analyte OB3: Third Analyte P: Pattern PR1: First Photoresist PR2: Second Photoresist PR3: Third Photoresist
圖1是本發明一實施例的一種光投射器的結構示意圖,以及光投射器產生的繞射圖案示意圖。 圖2A至圖2C是本發明一實施例的繞射光學元件以及其對應生成的繞射圖案的示意圖。 圖3A至圖3H是本發明一實施例的繞射光學元件以及光阻擋層的製造流程示意圖。 圖4是本發明一實施例的一種感測系統的結構示意圖和產生的繞射圖案示意圖。 Figure 1 is a schematic diagram of the structure of a light projector according to an embodiment of the present invention, and a schematic diagram of the diffraction pattern generated by the light projector. Figures 2A to 2C are schematic diagrams of a diffractive optical element according to an embodiment of the present invention and the corresponding diffraction pattern generated therefrom. Figures 3A to 3H are schematic diagrams of the manufacturing process of the diffractive optical element and the photoblocking layer according to an embodiment of the present invention. Figure 4 is a schematic diagram of the structure of a sensing system according to an embodiment of the present invention and a schematic diagram of the diffraction pattern generated therefrom.
10:光投射器 10: Light Projector
100:光源 100: Light source
101:第一發光區 101: First Lighting Zone
102:第二發光區 102: Second Illumination Zone
103:第三發光區 103: Third Illumination Zone
110:繞射光學元件 110: Diffractive optical components
111:第一繞射結構 111: First Diffraction Structure
112:第二繞射結構 112: Second Diffraction Structure
113:第三繞射結構 113: Third Diffraction Structure
120:光阻擋層 120: Photoresist barrier layer
130:透鏡陣列 130: Lens Array
131:第一透鏡 131: First Lens
132:第二透鏡 132: Second Lens
133:第三透鏡 133: Third Lens
140:框體 140: Frame
L1:第一光束 L1: First beam
L2:第二光束 L2: Second beam
L3:第三光束 L3: Third Beam
DP1:第一繞射圖案 DP1: First Diffraction Pattern
DP2:第二繞射圖案 DP2: Second Diffraction Pattern
DP3:第三繞射圖案 DP3: Third Diffraction Pattern
OB1:第一待測物 OB1: First Analyte
OB2:第二待測物 OB2: Second analyte
OB3:第三待測物 OB3: Third analyte
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