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TWI907940B - Active mirror device, light collector and laser pumping system - Google Patents

Active mirror device, light collector and laser pumping system

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Publication number
TWI907940B
TWI907940B TW113102908A TW113102908A TWI907940B TW I907940 B TWI907940 B TW I907940B TW 113102908 A TW113102908 A TW 113102908A TW 113102908 A TW113102908 A TW 113102908A TW I907940 B TWI907940 B TW I907940B
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light
collector
layer
laser crystal
laser
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TW113102908A
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Chinese (zh)
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TW202530752A (en
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黃衍介
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雷大光電股份有限公司
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Publication of TWI907940B publication Critical patent/TWI907940B/en

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Abstract

一種集光器,包括兩個光反射件。該二光反射件在一端夾一角度地彼此連接以形成漸寬的楔形結構,在另一端形成漸開式出光口。該二光反射件中至少一者係主動鏡裝置,其包括具有平滑反射表面之基板,及設置在該平滑反射表面上之發光元件。藉由集光器的發光元件發射之光,經反射、放大及聚集朝向漸開式出光口發出,泵浦一晶體而產生雷射輻射。該集光器的漸寬的楔形結構可填充有亮光材料,以將來自該等發光元件的一波長的光轉換成用於泵浦晶體的另一波長的發射光。A light collector includes two light reflectors. The two reflectors are connected at one end at an angle to form a gradually widening wedge structure, and at the other end form a gradually opening light exit port. At least one of the two reflectors is an active mirror device, including a substrate with a smooth reflective surface and a light-emitting element disposed on the smooth reflective surface. Light emitted by the light-emitting element of the light collector is reflected, amplified, and focused towards the gradually opening light exit port to pump a crystal and generate laser radiation. The gradually widening wedge structure of the light collector can be filled with a bright material to convert light of one wavelength from the light-emitting elements into emitted light of another wavelength for pumping the crystal.

Description

主動鏡裝置、集光器及雷射泵浦系統Active mirror device, light collector and laser pumping system

本發明是有關一種用於泵浦雷射的集光器,且更特別地,是關於一種可將光集中並使光通過一漸開式出光口輸出的漸寬的楔形集光器,及一種包括該漸寬的楔形集光器的雷射泵浦系統。The present invention relates to a light collector for pumping a laser, and more particularly, to a gradually widened wedge-shaped light collector capable of concentrating light and outputting the light through a gradually opening light outlet, and a laser pumping system including the gradually widened wedge-shaped light collector.

光學雷射泵浦係一種利用光來泵浦活性介質而將該活性介質中的原子從一低能量位準提升至一較高者的程序。當原子受到周遭的光子刺激後,發射更多具有與周遭光子相同特性之光子,隨即返回較低能量位準。此即為藉由受激放射的方式使雷射光或輻射增強的程序。舉例來說,固態雷射通常利用閃光燈或雷射二極體發射泵浦光,來對雷射晶體進行光學雷射泵浦而產生雷射光束。通常,雷射光束是非常準直的,不像泵浦光,泵浦光有時在空間中散射得較寬廣。雷射泵浦是否能有效運作,是取決於該泵浦光進入該雷射晶體中的有效集中來使得該泵浦光在該雷射晶體中轉換成雷射輻射。然而,當泵浦光源產生的光線類似於閃光燈或發光二極體所發出的那樣發散時,有效集中泵浦光是一大挑戰。Optical laser pumping is a process that uses light to pump an active medium, raising the atoms in that medium from a low energy level to a higher one. When the atoms are stimulated by surrounding photons, they emit more photons with the same properties as the surrounding photons, and then return to a lower energy level. This is the process of enhancing laser light or radiation through stimulated emission. For example, solid-state lasers typically use flash lamps or laser diodes to emit pump light to optically pump the laser crystal and produce a laser beam. Typically, the laser beam is very collimated, unlike the pump light, which is sometimes more widely scattered in space. The effectiveness of laser pumping depends on the effective concentration of the pump light within the laser crystal, allowing it to be converted into laser radiation within the crystal. However, effectively focusing the pump light is a major challenge when the light produced by the pump source is diffused in a manner similar to that emitted by a flash or light-emitting diode.

美國公開第2016/0322775 A1號專利申請案揭露一種使用多個雷射二極體堆疊體的側向泵浦雷射放大器,其中漸窄的楔形結構意圖使光從大的輸入孔(鄰近於雷射二極體堆疊體)經引導且集中到小的輸出孔(鄰近於一雷射介質)而發射出。在這情況下,當光通過窄縮的楔形結構,大部分的光不是穿透介電質楔形體之側壁而散逸,就是經反射往回走而從該大的輸入孔離開。只有有限的光可確實地送達並泵浦該雷射晶體。U.S. Patent Application Publication No. 2016/0322775 A1 discloses a side-pumped laser amplifier using multiple laser diode stacks, wherein a tapered wedge structure is intended to guide and concentrate light from a large input aperture (proximate to the laser diode stack) to a small output aperture (proximate to a laser dielectric). In this case, as light passes through the narrow wedge structure, most of the light either penetrates the sidewalls of the dielectric wedge and dissipates, or is reflected back and leaves through the large input aperture. Only a limited amount of light is reliably delivered to and pumps the laser crystal.

因此,本發明的其中一目的,即在於提供一種可克服習知缺點的集光器。Therefore, one of the objectives of this invention is to provide a light collector that overcomes the shortcomings of conventional methods.

本發明集光器包括兩個光反射件,該二光反射件夾一交角彼此連接,形成一個一端封閉、漸寬而在另一端形成漸開式出光口的楔形結構。該等光反射件中之每一者具有入射其上以產生反射光之表面。該等光反射件中之至少一者係一主動鏡裝置,其包括一具有一平滑的反射表面之基板,及設置在該基板之平滑反射表面上的複數個發光元件。各該發光元件包括設置於該基板上之一底部反射層、及設置於該底部反射層上之一作用層。各該作用層遠離該底部反射層的一面為平面。當施加一電流時,該作用層主動地產生主動發射光。The light collector of this invention includes two light reflectors connected to each other at an angle, forming a wedge-shaped structure that is closed at one end, gradually widens, and forms a gradually opening light outlet at the other end. Each of the light reflectors has a surface on which reflected light is incident to generate reflected light. At least one of the light reflectors is an active mirror device, which includes a substrate having a smooth reflective surface and a plurality of light-emitting elements disposed on the smooth reflective surface of the substrate. Each light-emitting element includes a bottom reflective layer disposed on the substrate and an active layer disposed on the bottom reflective layer. The side of each active layer away from the bottom reflective layer is planar. When a current is applied, the active layer actively generates actively emitted light.

因此,該基板之該反射表面及該等發光元件皆反射入射光而產生反射光。特別是,對於各該發光元件來說,當入射光由該底部反射層反射而進入該作用層,會產生增強反射光。也就是,每當光穿出該作用層會被放大。前述之該主動發射光、該反射光、該放大反射光中之一者及其任何組合被定義為聚集光,該聚集光通過該漸開式出光口而離開該漸寬的楔形集光器。Therefore, the reflective surface of the substrate and the light-emitting elements both reflect incident light to generate reflected light. In particular, for each light-emitting element, when incident light is reflected from the bottom reflective layer and enters the active layer, enhanced reflected light is generated. That is, light is amplified whenever it passes through the active layer. The aforementioned active emitted light, the reflected light, the amplified reflected light, and any combination thereof are defined as focused light, which exits the gradually widening wedge-shaped light collector through the gradually widening light exit port.

本發明的另一目的,在於提供上述主動鏡裝置。Another objective of this invention is to provide the aforementioned active mirror device.

本發明的再一目的,在於提供一種雷射泵浦系統。本發明雷射泵浦系統包括一雷射晶體及至少一前述之集光器。該至少一集光器中的漸開式出光口鄰接該雷射晶體。從該集光器之漸開式出光口離開的聚集光,進入該雷射晶體以提供雷射增益。Another object of the present invention is to provide a laser pumping system. The laser pumping system of the present invention includes a laser crystal and at least one of the aforementioned light collectors. An aperimeter-opening exit port of the at least one light collector is adjacent to the laser crystal. Focused light exiting from the aperimeter-opening exit port of the light collector enters the laser crystal to provide laser gain.

本發明之功效在於:聚集光經由漸開式出光口有效地集中進入雷射晶體,實現高效的雷射泵浦。The advantage of this invention is that the focused light is effectively concentrated into the laser crystal through the gradually opening light outlet, thereby achieving high-efficiency laser pumping.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。Before this invention is described in detail, it should be noted that similar elements are represented by the same designation in the following description.

為便於說明,全文所使用之空間相對用語,諸如「頂部」、「底部」、「上」、「下」、「右」、「左」、「向下」、「向上」及其類似者,係同時參考圖式所例示之特徵。但本發明特徵可以不同方式定向(例如,旋轉90度或處於其他定向),且本文中所使用之空間相對用語可相應地進行解釋。For ease of explanation, the spatial relative terms used throughout this document, such as "top," "bottom," "up," "down," "right," "left," "downward," "upward," and similar terms, refer simultaneously to the features illustrated in the diagrams. However, the features of this invention may be oriented in different ways (e.g., rotated 90 degrees or in other orientations), and the spatial relative terms used herein may be interpreted accordingly.

如圖1及圖2所示,本揭露內容之集光器1000a的實施例包括二個光反射件,該二個光反射件如圖1中所例示在左端夾一交角α彼此連接,形成一個漸寬的楔形結構以將光導引朝向集光器1000a之右端的漸開式出光口800。特別說明的是,本文所述「漸開式」係指光在漸寬的楔形結構中傳播的通道逐漸開闊。在一些實施例中,該交角α的範圍是大於0度且小於90度。具體來說,該等光反射件可直接地,或者透過中介物而間接地在左端連接。該楔形結構兩側的面可被兩個反光層300a分別覆蓋,該等反光層300a的材料諸如介電或金屬。As shown in Figures 1 and 2, an embodiment of the light collector 1000a disclosed herein includes two light reflectors. These two light reflectors, as illustrated in Figure 1, are connected to each other at their left ends at an angle α, forming a gradually widening wedge structure to guide light towards the gradually widening light outlet 800 at the right end of the light collector 1000a. Specifically, "gradually widening" as used herein refers to a path in which light propagates gradually widening within the wedge structure. In some embodiments, the angle α ranges from greater than 0 degrees to less than 90 degrees. Specifically, these light reflectors may be connected directly or indirectly at the left end via an intermediary. The two sides of the wedge-shaped structure can be covered by two reflective layers 300a respectively, the reflective layers 300a being made of materials such as dielectric or metal.

在本實施例中,該二個光反射件其中之一者(例如在下方者)係如圖3及4中所示的主動鏡裝置200,而其中另一(例如在上方者)係鏡面反射器500。該鏡面反射器500包括具有平滑表面(例如朝下的表面)諸如玻璃板之一基礎層501,及塗佈在該基礎層501之平滑表面上之一高反射層300。該高反射層300及前述的反光層300a之材料可包括介電質、鋁(Al)、銀(Ag)或金(Au)薄膜等中的至少一者。在一實施例中,該主動鏡裝置200附接於一冷卻板(圖未示)以用於將發光元件230的熱移除。In this embodiment, one of the two light reflectors (e.g., the lower one) is the active mirror device 200 as shown in Figures 3 and 4, while the other (e.g., the upper one) is a mirror reflector 500. The mirror reflector 500 includes a base layer 501 having a smooth surface (e.g., a downward-facing surface), such as a glass plate, and a high-reflectivity layer 300 coated on the smooth surface of the base layer 501. The materials of the high-reflectivity layer 300 and the aforementioned reflective layer 300a may include at least one of dielectric, aluminum (Al), silver (Ag), or gold (Au) thin films. In one embodiment, the active mirror device 200 is attached to a cooling plate (not shown) for heat removal from the light-emitting element 230.

具體來說,該主動鏡裝置200包括一基板(其包括一基層210及在基層210上之一反射層220),及設置且接合於該反射層220上的呈陣列排列的多個發光元件230。如圖3中所示,該主動鏡裝置200相當於一平面光源。透過適當的佈線而由電源(未示出)供電時,該等發光元件230發射出光線,所發出的光於下文中也被稱作「主動發射光290(見圖4)」。Specifically, the active mirror device 200 includes a substrate (which includes a base layer 210 and a reflective layer 220 on the base layer 210) and a plurality of light-emitting elements 230 arranged in an array disposed on and bonded to the reflective layer 220. As shown in FIG3, the active mirror device 200 is equivalent to a planar light source. When powered by a power source (not shown) through appropriate wiring, the light-emitting elements 230 emit light, which is referred to below as "actively emitted light 290 (see FIG4)".

在此實施例中,該基層210具有高導熱性,用於使該等發光元件230發出的熱快速消散。反射層220具有平滑反射表面,且可為兼具高導熱性及高反射率的金屬膜,諸如銀或金製成的薄膜。各該發光元件230可包括設置於該反射層220上且使光向上發射的嵌入式(built-in)一底部反射層238,以及設置於該底部反射層238上的一作用層233。各該作用層233遠離該底部反射層的一面為平面。在一些實施例中,該作用層233可包括但不限於P型半導體層、N型半導體層及形成於P型半導體層與N型半導體層之間的作用區。當施加電流時,該作用層233主動地產生主動發射光290。該作用層233之材料可包括導體或半導體材料,諸如Al、In、Ga、As、Ze、Se、P或其任何組合,也就是增益介質。底部反射層238可包括一材質為金(Au)的層、一分散式布拉格反射器(DBR)及其等之組合中之任一者。值得一提的是,圖4係未按比例繪製之圖式,其為了清楚說明而放大了發光元件230相對於該基層210之大小;事實上,該等發光元件230極薄且可在數百奈米與幾微米之間。須說明的是,在一些實施例中,該基板的基層210本身具有平滑反射表面,該等發光元件設置且接合至該基層210的平滑反射表面上,因此不需要反射層220。In this embodiment, the substrate 210 has high thermal conductivity to rapidly dissipate the heat emitted by the light-emitting elements 230. The reflective layer 220 has a smooth reflective surface and may be a metal film with both high thermal conductivity and high reflectivity, such as a thin film made of silver or gold. Each light-emitting element 230 may include a built-in bottom reflective layer 238 disposed on the reflective layer 220 and emitting light upwards, and an action layer 233 disposed on the bottom reflective layer 238. The side of each action layer 233 away from the bottom reflective layer is planar. In some embodiments, the action layer 233 may include, but is not limited to, a P-type semiconductor layer, an N-type semiconductor layer, and an action region formed between the P-type semiconductor layer and the N-type semiconductor layer. When an electric current is applied, the active layer 233 actively generates actively emitted light 290. The material of the active layer 233 may include conductive or semiconductor materials, such as Al, In, Ga, As, Ze, Se, P, or any combination thereof, i.e., gain media. The bottom reflective layer 238 may include a layer of gold (Au), a distributed Bragg reflector (DBR), or any combination thereof. It is worth noting that Figure 4 is a diagram not drawn to scale, which enlarges the size of the light-emitting element 230 relative to the substrate 210 for clarity; in fact, these light-emitting elements 230 are extremely thin and can range from hundreds of nanometers to several micrometers. It should be noted that in some embodiments, the substrate 210 itself has a smooth reflective surface, and the light-emitting elements are disposed and bonded to the smooth reflective surface of the substrate 210, so a reflective layer 220 is not required.

以圖1所示之集光器1000a舉例來說,該集光器1000a之漸開式出光口800是位在右端處。基於反射定律(亦即,反射角度等於入射角),當位於下方的該主動鏡裝置200之其中一發光元件230垂直向上發射光線(標記為L1),光線(L1)以Z字形路徑行進至該漸開式出光口800。在多次的反射過程中,光線(L1)在該二光反射件之表面上的入射角及反射角會是漸大的。當光線朝向右上方發射(標記為L2),光線(L2)直接行進通過該漸開式出光口800,或在該二光反射件之表面上經過一次或幾次反射之後從該漸開式出光口800發出。當光線朝向左上方發射(標記為L3),入射角及反射角在多次的反射過程中會逐漸變小,直到光線(L3)轉向而朝右行進,最終從該漸開式出光口800發出。Taking the light collector 1000a shown in Figure 1 as an example, the gradually opening light outlet 800 of the light collector 1000a is located at the right end. Based on the law of reflection (that is, the angle of reflection equals the angle of incidence), when one of the light-emitting elements 230 of the active mirror device 200 located below emits light (marked as L1 ) vertically upward, the light ray ( L1 ) travels to the gradually opening light outlet 800 in a zigzag path. During multiple reflections, the angle of incidence and the angle of reflection of the light ray ( L1 ) on the surfaces of the two reflectors gradually increase. When light is emitted towards the upper right (marked L2 ), the light ( L2 ) travels directly through the apertured light exit port 800, or is emitted from the apertured light exit port 800 after one or more reflections on the surface of the two reflectors. When light is emitted towards the upper left (marked L3 ), the angle of incidence and the angle of reflection gradually decrease during multiple reflections until the light ( L3 ) turns and travels to the right, eventually emitting from the apertured light exit port 800.

如此一來,自該等發光元件230發射之光最終都會、且只會通過該集光器1000a之右端的漸開式出光口800而發出。因此,本揭露內容之集光器1000a可說是單向導光及集光器。而且,在該集光器1000a將聚集光導向該漸開式出光口800的方向上,其楔形結構是漸寬的。也就是說,內部的光總是會集中且往該楔形結構漸寬的方向行進。In this way, the light emitted from the light-emitting elements 230 will ultimately be emitted only through the gradually widening light-emitting port 800 at the right end of the light collector 1000a. Therefore, the light collector 1000a disclosed herein can be described as a unidirectional light guide and collector. Moreover, in the direction in which the light collector 1000a directs the focused light towards the gradually widening light-emitting port 800, its wedge-shaped structure is gradually widening. That is to say, the internal light will always be concentrated and travel in the direction of the gradually widening wedge-shaped structure.

參看圖1及圖4,來自其中一發光元件230的主動發射光290可成為該集光器1000a之高反射層300或該反射層220上的入射光270。以主動鏡裝置200的反射層220來說,其反射入射光270以產生反射光280。在某些情況下,入射光270入射到其中一個發光元件230且反射穿過該作用層233。然後,由於該作用層233是用於產生更多光的增益介質,因此作用層233會放大反射光以形成增強反射光285。因此,該主動鏡裝置200可作為光發射體、光反射件及光放大器的結合。前述之主動發射光290、反射光280、放大反射光285及其任何之組合,亦即聚集光,被引導通過該漸開式出光口800而離開該集光器1000a。Referring to Figures 1 and 4, the actively emitted light 290 from one of the light-emitting elements 230 can become the incident light 270 on the high-reflectivity layer 300 or the reflective layer 220 of the light collector 1000a. The reflective layer 220 of the active mirror device 200 reflects the incident light 270 to generate reflected light 280. In some cases, the incident light 270 is incident on one of the light-emitting elements 230 and reflected through the active layer 233. Then, since the active layer 233 is a gain medium used to generate more light, it amplifies the reflected light to form enhanced reflected light 285. Therefore, the active mirror device 200 can serve as a combination of a light emitter, a light reflector, and a light amplifier. The aforementioned active emission light 290, reflected light 280, amplified reflected light 285, and any combination thereof, i.e. focused light, are guided through the gradually opening light outlet 800 and leave the light collector 1000a.

參看圖5,在一實施例中,集光器1000b的兩個光反射件都是主動鏡裝置200。也就是說,圖1中的集光器1000a之鏡面反射器500被另一主動鏡裝置200取代。在此實施例中,當光反射件均為主動鏡裝置200時,光的發射、反射及放大的量都會增加。也就是說,離開集光器1000b之漸開式出光口800的光的強度倍增。Referring to Figure 5, in one embodiment, both light reflectors of the light collector 1000b are active mirror devices 200. That is, the mirror reflector 500 of the light collector 1000a in Figure 1 is replaced by another active mirror device 200. In this embodiment, when both light reflectors are active mirror devices 200, the amount of light emission, reflection, and amplification all increase. In other words, the intensity of the light leaving the gradually opening light outlet 800 of the light collector 1000b is multiplied.

參看圖6,在一個實施例中,集光器1000c包括二個光反射件及位於該二光反射件之間的介電楔450。集光器1000c之二個光反射件分別係一個主動鏡裝置200(位於下方者)及塗佈在該介電楔450之上表面的一個高反射層300(位於上方者)。高反射層300之材料可包括用於反射來自該主動鏡裝置200發射的光的以下至少一種:鋁(Al)、銀(Ag)、金(Au)、或介電質等。該介電楔450填充在兩個光反射件之間的空間中。該介電楔450可以由諸如玻璃或塑膠等光可穿透的介電材料製成。此外,集光器1000c進一步包括塗佈在該介電楔450之底面的一抗反射層350,以便使該介電楔450與主動鏡裝置200之間的反射損耗最小化而增強光的透射。Referring to Figure 6, in one embodiment, the light collector 1000c includes two light reflectors and a dielectric wedge 450 located between the two light reflectors. The two light reflectors of the light collector 1000c are an active mirror device 200 (located below) and a high-reflectivity layer 300 (located above) coated on the upper surface of the dielectric wedge 450. The material of the high-reflectivity layer 300 may include at least one of the following for reflecting light emitted from the active mirror device 200: aluminum (Al), silver (Ag), gold (Au), or a dielectric. The dielectric wedge 450 fills the space between the two light reflectors. The dielectric wedge 450 may be made of a light-permeable dielectric material such as glass or plastic. Furthermore, the light collector 1000c further includes an anti-reflection layer 350 coated on the bottom surface of the dielectric wedge 450 in order to minimize reflection loss between the dielectric wedge 450 and the active mirror device 200 and enhance light transmission.

參看圖7,在一個實施例中,集光器1000d包括兩個光反射件(與上述集光器1000c相同)、一亮光楔460,及塗佈在該亮光楔460之底面的一抗反射層350。亦即,圖6中之集光器1000c的介電楔450由亮光楔460取代後可獲得圖7之集光器1000d。具體來說,亮光楔460包括一類似於介電楔450的楔形體並摻雜入亮光元件600,諸如螢光、磷光染料或量子點等。該等亮光元件600將來自該主動鏡裝置200的某種波長的該主動發射光290,轉換成另一種波長的發射光。然後該另一種波長的發射光被引導並集中朝向該漸開式出光口800發出。例如,該主動鏡裝置200可發射藍光,而包括摻鈰之釔鋁石榴石(Ce:YAG)之亮光元件600可受藍光激發而產生黃橙紅色光譜的發射光。接著,藉由集光器1000d將黃橙紅色光引導朝向該漸開式出光口800。Referring to Figure 7, in one embodiment, the light collector 1000d includes two light reflectors (same as those in the light collector 1000c described above), a bright wedge 460, and an anti-reflection layer 350 coated on the bottom surface of the bright wedge 460. That is, the light collector 1000d of Figure 7 can be obtained by replacing the dielectric wedge 450 of the light collector 1000c in Figure 6 with the bright wedge 460. Specifically, the bright wedge 460 includes a wedge-shaped body similar to the dielectric wedge 450 and is doped with bright light elements 600, such as fluorescent, phosphorescent dyes, or quantum dots. These bright light elements 600 convert the actively emitted light 290 of one wavelength from the active mirror device 200 into emitted light of another wavelength. Then, the emitted light of another wavelength is guided and focused toward the apertured light outlet 800. For example, the active mirror device 200 can emit blue light, while the luminescent element 600, which includes cerium-doped yttrium aluminum garnet (Ce:YAG), can be excited by blue light to produce emitted light in the yellow-orange-red spectrum. Then, the yellow-orange-red light is guided toward the apertured light outlet 800 by the light collector 1000d.

參看圖8,在一個實施例中,集光器1000e包括兩個光反射件,以及如上所述之亮光楔460。在此實施例中,兩個光反射件均為主動鏡裝置200。為了使反射所致的光損失最小化且增強光透射,二抗反射層350可分別塗覆在該亮光楔460的底面及頂面。Referring to Figure 8, in one embodiment, the light collector 1000e includes two light reflectors and a light-emitting wedge 460 as described above. In this embodiment, both light reflectors are active mirror devices 200. To minimize light loss due to reflection and enhance light transmission, two anti-reflective layers 350 may be coated on the bottom and top surfaces of the light-emitting wedge 460, respectively.

上文所提及之集光器1000a、1000b、1000c、1000d及1000e中之每一者(下文稱為「集光器1000」)極為適合對雷射晶體進行泵浦。參看圖9及圖10,在一個實施例中,一單側雷射泵浦系統100a包括一具有矩形橫截面之雷射晶體700、一集光器1000,及用於散熱之冷卻箱750(圖9中未顯示)。圖10為圖9之截面示意圖,其顯示橫切雷射晶體700之矩形截面且進一步顯示出該冷卻箱750。雷射晶體700及集光器1000安裝於該冷卻箱750中以用於散熱。Each of the concentrators 1000a, 1000b, 1000c, 1000d, and 1000e mentioned above (hereinafter referred to as "concentrator 1000") is well-suited for pumping laser crystals. Referring to Figures 9 and 10, in one embodiment, a single-sided laser pumping system 100a includes a laser crystal 700 having a rectangular cross-section, a concentrator 1000, and a cooling box 750 for heat dissipation (not shown in Figure 9). Figure 10 is a schematic cross-sectional view of Figure 9, showing the rectangular cross-section of the laser crystal 700 and further showing the cooling box 750. The laser crystal 700 and the concentrator 1000 are mounted in the cooling box 750 for heat dissipation.

雷射晶體700具有四個側表面,以下以前側、後側、頂側及底側表面稱之,且該雷射晶體700安裝在由兩個空腔反射鏡910及920所形成之一雷射空腔中。集光器1000之漸開式出光口800鄰近該雷射晶體700之其中一個側表面,例如,前側表面。該集光器1000將泵浦光(亦即,上文所提到的聚集光)透過該漸開式出光口800輸出至該雷射晶體700內,且該雷射空腔中之該雷射晶體700吸收泵浦光,藉由受激發射而產生雷射輻射930。在此實施例中,該單側雷射泵系統100a進一步包括塗覆於雷射晶體700之前側表面的抗反射層350及塗覆於後側表面的高反射層300。該抗反射層350係用於在該泵浦光穿透它而進入到雷射晶體700時增強光透射,而該高反射層300係用以將未吸收的泵浦光反射回該雷射晶體700中繼續使用。The laser crystal 700 has four side surfaces, hereinafter referred to as the front, rear, top, and bottom surfaces, and is mounted in a laser cavity formed by two cavity mirrors 910 and 920. The aperipheral exit port 800 of the light collector 1000 is adjacent to one of the side surfaces of the laser crystal 700, for example, the front surface. The light collector 1000 outputs pump light (i.e., the focused light mentioned above) through the aperipheral exit port 800 into the laser crystal 700, and the laser crystal 700 in the laser cavity absorbs the pump light, generating laser radiation 930 through stimulated emission. In this embodiment, the single-sided laser pumping system 100a further includes an antireflective layer 350 coated on the front surface of the laser crystal 700 and a high-reflective layer 300 coated on the rear surface. The antireflective layer 350 is used to enhance light transmission when the pump light passes through it and enters the laser crystal 700, while the high-reflective layer 300 is used to reflect unabsorbed pump light back into the laser crystal 700 for continued use.

該雷射晶體700可為以下其中之一:摻釹之釔鋁石榴石晶體(Nd:YAG)、摻鐿之釔鋁石榴石晶體(Yb:YAG)、鈥-鉻-銩三摻雜之釔鋁石榴石晶體(Ho:Cr:Tm:YAG)、摻釹釩酸釔晶體(Nd:YVO4)、摻鉺之釔鋁石榴石晶體(Er:YAG)、摻鉻氟鋁鈣鋰石晶體(Cr:LiSAF)、摻鈦藍寶石晶體(Ti:sapphire)、鉻晶體、鉺:釔鈧鎵石榴石晶體(Cr, Er:YSGG)、變石晶體、摻鉺磷酸鹽玻璃晶體(Er:glass)等。The laser crystal 700 can be one of the following: neodymium-doped yttrium aluminum garnet (Nd:YAG), yttrium-doped yttrium aluminum garnet (Yb:YAG), holmium-chromium-thulium tridoped yttrium aluminum garnet (Ho:Cr:Tm:YAG), yttrium neodymium vanadate-doped crystal (Nd: YVO4 ), erbium-doped yttrium aluminum garnet (Er:YAG), chromium-fluorine-aluminum-calcium-lithium lithium garnet (Cr:LiSAF), titanium-doped sapphire crystal (Ti:sapphire), chromium crystal, erbium:yttrium-carbyl gallium garnet crystal (Cr, Er:YSGG), alexandrite crystals, erbium phosphate glass crystals (Er:glass), etc.

雷射泵浦能力可藉由使用多個集光器1000來增強。參看圖11,針對一個實施例之截面圖,雙側雷射泵浦系統100b包括具有矩形橫截面之該雷射晶體700、兩個集光器1000及用於散熱之冷卻箱750。該二集光器1000設置在雷射晶體700之兩個相鄰側。例如,安排該二集光器1000以其漸開式出光口800鄰近於且面向該雷射晶體700的前側表面及頂側表面。該雙側雷射泵浦系統100b進一步包括兩個分別是塗覆在雷射晶體700的前側表面及頂側表面的抗反射層350,以及兩個分別是塗覆在雷射晶體700的後側表面及底側表面的高反射層300。該抗反射層350係用於在該泵浦光進入到雷射晶體700時增強光透射,而該高反射層300係用以將未吸收的泵浦光反射回該雷射晶體700中繼續使用。各該集光器1000使泵浦光(亦即,上文所提到的聚集光)透過其漸開式出光口800輸出至該雷射晶體700內,且該雷射空腔中之該雷射晶體700吸收泵浦光,藉由受激發射而產生雷射輻射930(圖9)。Laser pumping capability can be enhanced by using multiple light collectors 1000. Referring to Figure 11, a cross-sectional view for one embodiment, the dual-sided laser pumping system 100b includes a laser crystal 700 having a rectangular cross-section, two light collectors 1000, and a cooling box 750 for heat dissipation. The two light collectors 1000 are disposed on two adjacent sides of the laser crystal 700. For example, the two light collectors 1000 are arranged with their gradually opening light exit ports 800 adjacent to and facing the front and top surfaces of the laser crystal 700. The dual-sided laser pumping system 100b further includes two anti-reflective layers 350 coated on the front and top surfaces of the laser crystal 700, respectively, and two high-reflective layers 300 coated on the rear and bottom surfaces of the laser crystal 700, respectively. The anti-reflective layers 350 are used to enhance light transmission when the pump light enters the laser crystal 700, while the high-reflective layers 300 are used to reflect unabsorbed pump light back into the laser crystal 700 for continued use. Each of the light collectors 1000 outputs pump light (i.e., the focused light mentioned above) through its gradually opening light output port 800 into the laser crystal 700, and the laser crystal 700 in the laser cavity absorbs the pump light and generates laser radiation 930 by stimulated emission (Figure 9).

在另一實施例中,兩個集光器1000相向的對準且是設置在該雷射晶體700之兩個相對側。舉例來說,如圖12所示,其例示一實施例之截面圖。安排該二集光器1000以其漸開式出光口800分別面向該雷射晶體700的前側表面及後側表面,使該二集光器1000發射的泵浦光皆被引導來激發該雷射晶體700。In another embodiment, two light collectors 1000 are aligned facing each other and disposed on two opposite sides of the laser crystal 700. For example, as shown in Figure 12, which illustrates a cross-sectional view of an embodiment, the two light collectors 1000 are arranged with their gradually opening light exit ports 800 facing the front and rear surfaces of the laser crystal 700, respectively, so that the pump light emitted by the two light collectors 1000 is guided to excite the laser crystal 700.

參看圖13、14及15,針對一些實施例之截面圖,一雷射泵浦系統100c包括具有一圓形截面之一雷射晶體700'、兩個集光器1000,及用以消散來自該等主動鏡裝置的熱的冷卻箱750。在一個實施例中,雷射泵浦系統100c可進一步包括具有冷卻液體560流動其中的透明管550,冷卻液體560用於以將該雷射晶體700'的熱移除。該雷射晶體700'可藉由例如橡膠環來設置固定於該透明管550中。該等集光器1000之漸開式出光口800係鄰近於該雷射晶體700',特別是分別附接至透明管550之圓周表面的一第一部分及一第二部分。該第一部分及該第二部分可如圖13所示各自構成該透明管550之圓周表面的三分之一(例如但不限於),或如圖14及圖15所示,構成該透明管550之圓周表面的一半。在如圖15所示之一實施例中,該等集光器1000中,底部之光反射件位在相同平面上。Referring to Figures 13, 14, and 15, cross-sectional views of some embodiments show a laser pumping system 100c including a laser crystal 700' having a circular cross-section, two light collectors 1000, and a cooling box 750 for dissipating heat from the active mirror assembly. In one embodiment, the laser pumping system 100c may further include a transparent tube 550 having a cooling liquid 560 flowing therein for removing heat from the laser crystal 700'. The laser crystal 700' may be disposed and fixed in the transparent tube 550 by, for example, a rubber ring. The gradually opening light-emitting ports 800 of the light collectors 1000 are adjacent to the laser crystal 700', and are particularly attached to a first portion and a second portion of the circumferential surface of the transparent tube 550. The first portion and the second portion may each constitute one-third (e.g., but not limited to) of the circumferential surface of the transparent tube 550, as shown in FIG. 13, or constitute half of the circumferential surface of the transparent tube 550, as shown in FIGS. 14 and 15. In one embodiment shown in FIG. 15, the light reflectors at the bottom of the light collectors 1000 are located on the same plane.

參看圖16,針對一個實施例之橫截面圖,多側雷射泵浦系統100d包括一具有圓形橫截面的雷射晶體700'、多於兩個的集光器1000、一具有冷卻液體560流動其中以將該雷射晶體700'的熱移除的透明管550,及一用以消散來自該等主動鏡裝置的熱的冷卻箱750。該等集光器1000之漸開式出光口800附接至該透明管550之圓周表面,且該等集光器1000所發射之泵浦光皆導引至該雷射晶體700'。Referring to Figure 16, in a cross-sectional view of one embodiment, the multi-sided laser pumping system 100d includes a laser crystal 700' with a circular cross-section, more than two light collectors 1000, a transparent tube 550 in which a cooling liquid 560 flows to remove heat from the laser crystal 700', and a cooling box 750 for dissipating heat from the active mirror devices. The gradually opening light outlets 800 of the light collectors 1000 are attached to the circumferential surface of the transparent tube 550, and the pump light emitted by the light collectors 1000 is directed to the laser crystal 700'.

綜上所述,利用形成漸寬之楔形結構的具有主動鏡裝置200的該集光器1000,其結構中所有光經由漸開式出光口800有效地集中進入雷射晶體700,藉此實現高效的雷射泵浦。In summary, the light collector 1000 with an active mirror device 200 forming a gradually widening wedge structure effectively concentrates all light into the laser crystal 700 through the gradually widening light outlet 800, thereby achieving efficient laser pumping.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above description is merely an example of the present invention and should not be used to limit the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification shall still fall within the scope of the present invention.

1000、1000a~e:集光器100a~d:雷射泵浦系統200:主動鏡裝置210:基層220:反射層230:發光元件233:作用層238:底部反射層270:入射光280:反射光290:增強反射光300:高反射層300a:反光層350:抗反射層450:介電楔460:亮光楔500:鏡面反射器501:基礎層550:透明管560:冷卻液體600:亮光元件700:雷射晶體750:冷卻箱800:漸開式出光口910:空腔反射鏡α:夾角L1、L2、L3:光線1000, 1000a~e: Concentrator; 100a~d: Laser pump system; 200: Active mirror device; 210: Substrate; 220: Reflective layer; 230: Light-emitting element; 233: Actual layer; 238: Bottom reflective layer; 270: Incident light; 280: Reflected light; 290: Enhanced reflected light; 300: High reflectivity layer; 300a: Reflective layer; 350: Anti-reflection layer; 450: Dielectric wedge; 460: Bright light wedge; 500: Mirror reflector; 501: Substrate layer; 550: Transparent tube; 560: Cooling liquid; 600: Bright light element; 700: Laser crystal; 750: Cooling box; 800: Gradient light outlet; 910: Cavity mirror; α: Angles L1 , L2 , L3. Light

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一示意圖,例示說明根據本揭露內容之一集光器的實施例;圖2是一集光器之分解示意圖,其例示說明兩個光反射件當中的上方者分解且向上移開;圖3是一俯視圖,其例示說明根據本揭露內容的一主動鏡裝置之一實施例包括在一基層上的一反射層上之發光元件的陣列;圖4是一橫截面圖,例示說明根據本揭露內容之一個實施例的其中一發光元件;圖5至8係示意圖,例示說明根據本揭露內容的各種實施例的集光器;圖9及10係示意圖,例示說明根據本揭露內容的採用一個集光器的雷射泵浦系統的實施例。圖11至16係截面圖,例示說明根據本揭露內容之採用多個集光器的雷射泵浦系統的各種其他實施例。Other features and effects of the present invention will be clearly shown in the embodiments with reference to the drawings, wherein: Figure 1 is a schematic diagram illustrating an embodiment of a light collector according to the present disclosure; Figure 2 is an exploded schematic diagram illustrating that the upper of two light reflectors is exploded and moved upward; Figure 3 is a top view illustrating an embodiment of an active mirror device according to the present disclosure including an array of light-emitting elements on a reflective layer on a substrate; Figure 4 is a cross-sectional view illustrating one of the light-emitting elements according to an embodiment of the present disclosure; Figures 5 to 8 are schematic diagrams illustrating various embodiments of light collectors according to the present disclosure; Figures 9 and 10 are schematic diagrams illustrating embodiments of a laser pumping system employing a light collector according to the present disclosure. Figures 11 to 16 are cross-sectional views illustrating various other embodiments of a laser pumping system employing multiple light collectors according to this disclosure.

1000a:集光器 200:主動鏡裝置 210:基層 220:反射層 230:發光元件 300:高反射層 500:鏡面反射器 501:基礎層 800:漸開式出光口 α:夾角 L 1、L 2、L 3:光線 1000a: Concentrator; 200: Active mirror assembly; 210: Substrate; 220: Reflective layer; 230: Light-emitting element; 300: High-reflectivity layer; 500: Specular reflector; 501: Substrate; 800: Gradient light outlet; α: Angles L1 , L2 , L3 : Light rays.

Claims (15)

一種主動鏡裝置,包含:一基板,具有一平滑反射表面;以及複數個發光元件,設置於該基板之該平滑反射表面上,各該發光元件包括設置於該基板上的一底部反射層,以及設置於該底部反射層上的一作用層,各該作用層遠離該底部反射層的一面為平面,當施加一電流時,該作用層主動地產生主動發射光;其中,該基板之該平滑反射表面反射入射其上的光以產生反射光,且各該發光元件的該底部反射層將入射其上的光反射到該作用層中,該作用層放大該反射到其中的光而產生增強反射光。An active mirror device includes: a substrate having a smooth reflective surface; and a plurality of light-emitting elements disposed on the smooth reflective surface of the substrate. Each light-emitting element includes a bottom reflective layer disposed on the substrate and an active layer disposed on the bottom reflective layer. The side of each active layer away from the bottom reflective layer is planar. When a current is applied, the active layer actively generates active light emission. The smooth reflective surface of the substrate reflects light incident thereon to generate reflected light, and the bottom reflective layer of each light-emitting element reflects the light incident thereon into the active layer, whereby the active layer amplifies the reflected light to generate enhanced reflected light. 如請求項1所述的主動鏡裝置,其中,該底部反射層包括以下任一:一材質為金(Au)的層、一分散式布拉格反射器(DBR)及其等之組合。The active mirror device as claimed in claim 1, wherein the bottom reflective layer comprises any one of the following: a layer made of gold (Au), a dispersed Bragg reflector (DBR), and a combination thereof. 如請求項1所述的主動鏡裝置,其中,該作用層包括用以產生光之一增益介質。The active mirror device as claimed in claim 1, wherein the active layer includes a gain medium for generating light. 如請求項1所述的主動鏡裝置,其中,該基板包括一基層,及在該基層上之一反射層,該反射層具有該平滑反射表面,該基層具有高熱導率用以使該等發光元件散熱。The active mirror device as claimed in claim 1, wherein the substrate includes a base layer and a reflective layer on the base layer having the smooth reflective surface, and the base layer has high thermal conductivity for dissipating heat from the light-emitting elements. 一種集光器,其包含:兩個光反射件,在該集光器之一端夾一角度地彼此連接以形成一漸寬的楔形結構,且在該集光器之另一端形成漸開式出光口,各該光反射件具有使入射其上的光反射而產生反射光的一表面;其中,該等光反射件中之至少一者為如請求項1至4中任一項所述的主動鏡裝置,且包括該主動發射光、該反射光、該增強反射光及其任何組合中之一者的聚集光被引導通過該漸開式出光口而離開該集光器。A light collector comprising: two light reflectors connected at an angle at one end of the light collector to form a gradually widening wedge structure, and forming an apertured light exit at the other end of the light collector, each light reflector having a surface that reflects incident light to produce reflected light; wherein at least one of the light reflectors is an active mirror device as described in any one of claims 1 to 4, and focused light including the actively emitted light, the reflected light, the enhanced reflected light, and any combination thereof is guided through the apertured light exit and leaves the light collector. 如請求項5所述之集光器,其中該等光反射件中之一者係該主動鏡裝置,且該等光反射件中之另一者為一鏡面反射器,其包括具有光滑表面之基礎層及一塗佈在該基礎層上之高反射層。The light collector as described in claim 5, wherein one of the light reflectors is the active mirror device, and the other of the light reflectors is a mirror reflector comprising a base layer having a smooth surface and a highly reflective layer coated on the base layer. 如請求項5所述之集光器,其進一步包含:一介電楔,其係由光可穿透的介電材料製成,且填充在該二光反射件之間的空間中。The light collector as described in claim 5 further comprises: a dielectric wedge made of a light-permeable dielectric material and filling the space between the two light reflectors. 如請求項7之集光器,其進一步包含一抗反射層,其被塗佈在該介電楔之一與該主動鏡裝置相鄰接的表面上。The light collector of claim 7 further includes an anti-reflective layer coated on one of the dielectric wedges adjacent to the active mirror device. 如請求項7之集光器,其中該介電楔進一步摻雜入許多亮光元件,該等亮光元件將一波長之主動發射光轉換成另一不同波長之發射光。As in claim 7, the light collector further incorporates a plurality of light-emitting elements that convert actively emitted light of one wavelength into emitted light of another different wavelength. 一種雷射泵浦系統,其包含:一雷射晶體;以及至少一集光器,各包括:兩個光反射件,在該集光器之一端夾一角度地彼此連接以形成一漸寬的楔形結構,且在該集光器之另一端形成漸開式出光口,該漸開式出光口鄰近於該雷射晶體,各該光反射件具有使入射其上的光反射而產生反射光的一表面;其中,該二光反射件中之至少一者為如請求項1至4中任一項所述之主動鏡裝置,且包括該主動發射光、該反射光、該增強反射光及其任何組合中之一者的聚集光被引導通過該漸開式出光口而離開該集光器並進入該雷射晶體。A laser pumping system includes: a laser crystal; and at least one light collector, each comprising: two light reflectors connected at an angle at one end of the light collector to form a gradually widening wedge structure, and forming an aperimeter-opening light exit at the other end of the light collector, the aperimeter-opening light exit being adjacent to the laser crystal, each light reflector having a surface that reflects incident light to generate reflected light; wherein at least one of the two light reflectors is an active mirror device as described in any one of claims 1 to 4, and focused light including the actively emitted light, the reflected light, the enhanced reflected light, and any combination thereof is guided through the aperimeter-opening light exit to leave the light collector and enter the laser crystal. 如請求項10之雷射泵浦系統,其進一步包含一抗反射層,其塗覆在該雷射晶體之一表面上,其中該聚集光係穿透該抗反射層進入該雷射晶體。The laser pumping system of claim 10 further includes an antireflective layer coated on one surface of the laser crystal, wherein the focused light penetrates the antireflective layer into the laser crystal. 如請求項11之雷射泵浦系統,其進一步包含一高反射層,其塗覆在該雷射晶體之另一表面上,該另一表面係與該塗覆有該抗反射層之表面彼此相對,用於使未吸收的聚集光反射回該雷射晶體中繼續使用。The laser pumping system of claim 11 further includes a highly reflective layer coated on another surface of the laser crystal, the other surface being opposite to the surface coated with the antireflective layer, for reflecting unabsorbed focused light back into the laser crystal for continued use. 如請求項10之雷射泵浦系統,其中該雷射晶體為一具有一圓形截面之雷射晶體;該雷射泵浦系統進一步包含一具有冷卻液體流動其中的透明管,其中該雷射晶體係設置固定於該透明管中,該冷卻液體用以將該雷射晶體產生的熱移除。The laser pumping system of claim 10, wherein the laser crystal is a laser crystal having a circular cross-section; the laser pumping system further includes a transparent tube having a cooling liquid flowing therethrough, wherein the laser crystal is disposed and fixed in the transparent tube, the cooling liquid being used to remove heat generated by the laser crystal. 如請求項13之雷射泵浦系統,其中各該集光器之該漸開式出光口係附接至該透明管之一圓周表面的一部分。As in claim 13, the laser pumping system wherein the gradually opening light outlet of each light collector is attached to a portion of the circumferential surface of the transparent tube. 如請求項10之雷射泵浦系統,其中對於各該集光器,該漸開式出光口是以以下方式被安排為面向該雷射晶體:使得由該集光器所發射的聚集光被引導至該雷射晶體內。As in claim 10, the laser pumping system wherein, for each of the light collectors, the gradually opening light outlet is arranged to face the laser crystal in such a way that the focused light emitted by the light collector is guided into the laser crystal.
TW113102908A 2024-01-25 Active mirror device, light collector and laser pumping system TWI907940B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058173A1 (en) 2001-01-22 2005-03-17 Jan Vetrovec Side-pumped solid-state disk laser for high-average power

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058173A1 (en) 2001-01-22 2005-03-17 Jan Vetrovec Side-pumped solid-state disk laser for high-average power

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