TWI906398B - Pigment dispersion composition for black matrix, resist composition for black matrix and black matrix - Google Patents
Pigment dispersion composition for black matrix, resist composition for black matrix and black matrixInfo
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Abstract
本發明提供一種黑矩陣用顏料分散組成物,其能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化。 本發明之黑矩陣用顏料分散組成物含有黑色著色劑、銅酞青之磺化物、及環氧化合物。 This invention provides a pigment dispersion for black matrices, which can be used to obtain a photoresist composition for black matrices. This photoresist composition forms a black matrix whose surface resistivity does not decrease even after high-temperature and prolonged baking, and whose breakpoints do not change with storage time. The pigment dispersion for black matrices of this invention contains a black colorant, a sulfonated copper phthalocyanine, and an epoxy compound.
Description
本發明係關於一種黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及黑矩陣。This invention relates to a pigment dispersion composition for a black matrix, a photoresist composition for a black matrix, and a black matrix.
於使用液晶或電漿等之影像顯示裝置中,於畫面之顯示區域內之著色圖案之間隙或顯示區域周邊部分之邊緣設置有遮光膜(黑矩陣),又,於使用TFT之液晶顯示器中,於TFT之外界光側等處設置有遮光膜(黑矩陣)。 而且,關於遮光膜之作用,於液晶顯示裝置中主要防止自背光源之漏光映入至畫面中,又,於電漿顯示裝置中主要防止因各色光之混濁所引起之滲色映入至畫面中,從而提昇顯示特性(對比度及色純度)。 In image display devices using liquid crystal or plasma displays, a light-shielding film (black matrix) is provided between the colored patterns within the display area of the screen or at the edge of the display area. Furthermore, in liquid crystal displays using TFTs, a light-shielding film (black matrix) is provided on the outer light side of the TFT. Moreover, regarding the function of the light-shielding film, in liquid crystal displays, it primarily prevents light leakage from the backlight from entering the screen. In plasma displays, it primarily prevents color bleeding caused by the mixing of different colors of light from entering the screen, thereby improving display characteristics (contrast and color purity).
例如,關於用以將液晶顯示裝置之背光源之白色光轉換為著色光之濾色片,通常利用下述方法製造,即,於形成有黑矩陣之玻璃或塑膠片等透明基板表面,以條狀或馬賽克狀等圖案依序形成紅、綠、藍之不同色相之像素。For example, a color filter used to convert white light from the backlight of a liquid crystal display device into colored light is usually manufactured by forming pixels of different hues, such as red, green, and blue, in a striped or mosaic pattern on the surface of a transparent substrate such as glass or plastic sheet on which a black matrix is formed.
又,於將影像顯示裝置與位置輸入裝置組合而成之觸控面板中,亦同樣地利用形成有黑矩陣作為遮光膜之濾色片,迄今,一般隔著覆蓋玻璃形成於與感測器基板相反之側。然而,隨著對觸控面板之輕量化之要求提高,正積極開發將遮光膜與觸控感測器同時形成於覆蓋玻璃之相同側之技術,以便能夠實現更輕量化。Furthermore, in touch panels that combine image display devices and position input devices, a color filter with a black matrix forming a light-shielding film is also used. Until now, this filter has generally been formed on the side opposite to the sensor substrate, separated by a covering glass. However, with increasing demands for lightweight touch panels, there is active development of technology that simultaneously forms the light-shielding film and the touch sensor on the same side of the covering glass to achieve even greater weight reduction.
作為形成此種黑矩陣之方法,例如利用:使用顏料之光微影法(顏料法)。 此種顏料法中,有時會使用銅酞青之磺酸衍生物,以提高顏料之分散性。 One method for forming such a black matrix is, for example, photolithography using pigments (pigment method). In this pigment method, sulfonic acid derivatives of copper phthalocyanine are sometimes used to improve the dispersibility of the pigment.
例如,於專利文獻1中揭示有一種黑矩陣用顏料分散組成物,其特徵在於:於溶劑中,分散有吸油量為10~150 ml/100 g且pH處於大於9之範圍內之碳黑、具有聚酯鏈之含鹼性基之胺酯(urethane)系高分子顏料分散劑、及作為含酸基之顏料衍生物之具有磺酸基之酞青衍生物。For example, Patent Document 1 discloses a pigment dispersion composition for black matrix, characterized in that: carbon black with an oil absorption of 10-150 ml/100 g and a pH greater than 9 is dispersed in the solvent, an urethane-based polymeric pigment dispersant with an alkaline group having a polyester chain, and a phthalocyanine derivative with a sulfonic acid group as an acidic pigment derivative.
近年來,影像顯示裝置逐漸用於行動用途等各種場合。 隨著此種影像顯示裝置之用途擴大,逐漸要求更穩固之黑矩陣。 In recent years, image display devices have been increasingly used in various applications, including mobile devices. As the applications of these image display devices expand, there is a growing demand for more robust black matrices.
作為使黑矩陣更穩固之方法,有時使用進行高溫且長時間之後烘烤之方法。 然而,於專利文獻1中,並未針對因進行高溫且長時間之後烘烤導致表面電阻值下降進行充分研究,仍有進一步改良之餘地。 As a method to make the black matrix more stable, baking at high temperatures for a long time is sometimes used. However, Patent 1 does not fully investigate the decrease in surface resistivity caused by baking at high temperatures for a long time, leaving room for further improvement.
另一方面,對於黑矩陣用顏料分散光阻組成物,需要斷點(顯影步驟中未曝光部分溶解、剝離而開始出現顯影圖案之時間)不會隨著保存時間發生變化之性能。 因此,尋求一種能夠獲得此種黑矩陣用顏料分散光阻組成物之黑矩陣用顏料分散組成物,但專利文獻1中並未進行充分研究,仍有進一步改良之餘地。 [先前技術文獻] [專利文獻] On the other hand, for black matrix pigment-dispersed photoresist compositions, it is necessary to ensure that the breakpoint (the time from which the unexposed portion dissolves and peels off during the developing step, and the developed pattern begins to appear) does not change over storage time. Therefore, a black matrix pigment dispersion composition capable of producing such a black matrix pigment-dispersed photoresist composition is sought. However, Patent 1 has not conducted sufficient research on this, and there is still room for further improvement. [Prior Art Documents] [Patent Documents]
[專利文獻1]國際公開第2008/066100號[Patent Document 1] International Publication No. 2008/066100
[發明所欲解決之課題][The problem the invention aims to solve]
因此,本發明之目的在於提供一種黑矩陣用顏料分散組成物,其能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化。 [解決課題之技術手段] Therefore, the purpose of this invention is to provide a pigment dispersion composition for black matrices, which can yield a photoresist composition for black matrices. This photoresist composition can form a black matrix whose surface resistivity does not decrease even after high-temperature and prolonged baking, and whose breakpoints do not change with storage time. [Technical Means for Solving the Problem]
本發明人等發現,含有黑色著色劑、銅酞青之磺化物、及環氧化合物之黑矩陣用顏料分散組成物能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化,從而完成本發明。The inventors have discovered that a black matrix pigment dispersion containing a black colorant, a copper phthalocyanine sulfonate, and an epoxy compound can produce a black matrix photoresist composition that can form a black matrix whose surface resistance does not decrease even after baking at high temperatures for a long time, and whose breakpoints do not change with storage time, thus completing the present invention.
即,本發明係一種黑矩陣用顏料分散組成物,其含有黑色著色劑、銅酞青之磺化物、及環氧化合物。 上述環氧化合物較佳為具有雙酚骨架。 又,本發明之黑矩陣用顏料分散組成物較佳為,進而含有分子量300以下之胺化合物,且上述分子量300以下之胺化合物係自胺基之氮原子起算3原子以內具有二級以上之碳原子之胺化合物及/或胺基經由碳數3以下之烴基連接於1個以上芳香環之胺化合物。 上述分子量300以下之胺化合物較佳為選自3-苯基丙基胺、1,1,3,3-四甲基丁基胺、及三異丁基胺中之至少1種。 又,上述銅酞青之磺化物於分子中較佳為具有0.5~3個磺酸基,更佳為具有0.5~1.5個磺酸基。 又,上述黑色著色劑較佳為含有碳黑。 又,上述碳黑較佳為酸性碳黑。 又,本發明亦為一種黑矩陣用光阻組成物,其係由上述黑矩陣用顏料分散組成物所獲得。 又,本發明亦為一種黑矩陣,其係由上述黑矩陣用光阻組成物所形成。 [發明之效果] That is, the present invention is a black matrix pigment dispersion comprising a black pigment, a sulfonated copper phthalocyanine, and an epoxy compound. The epoxy compound preferably has a bisphenol backbone. Furthermore, the black matrix pigment dispersion of the present invention preferably further comprises an amine compound with a molecular weight of 300 or less, wherein the amine compound with a molecular weight of 300 or less is an amine compound having at least three secondary carbon atoms counting from the nitrogen atom of the amine group and/or an amine compound in which the amine group is linked to one or more aromatic rings via an hydrocarbon group having three or fewer carbon atoms. The amine compound with a molecular weight of 300 or less is preferably selected from at least one of 3-phenylpropylamine, 1,1,3,3-tetramethylbutylamine, and triisobutylamine. Furthermore, the sulfonated copper phthalocyanine molecule preferably has 0.5 to 3 sulfonic acid groups, more preferably 0.5 to 1.5 sulfonic acid groups. Furthermore, the aforementioned black pigment preferably contains carbon black. Furthermore, the aforementioned carbon black is preferably acidic carbon black. Furthermore, this invention is also a photoresist composition for black matrices, obtained from the aforementioned pigment dispersion composition for black matrices. Furthermore, this invention is also a black matrix, formed from the aforementioned photoresist composition for black matrices. [Effects of the Invention]
根據本發明,可提供一種黑矩陣用顏料分散組成物,其能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化。According to the present invention, a black matrix pigment dispersion composition can be provided, which can obtain a black matrix photoresist composition that can form a black matrix whose surface resistance does not decrease even after baking at high temperature for a long time, and whose breakpoints do not change with storage time.
<黑矩陣用顏料分散組成物> 本發明之黑矩陣用顏料分散組成物含有黑色著色劑、銅酞青之磺化物、及環氧化合物,且滿足下述條件(A)或(B)。 (A)不含分子量300以下之胺化合物。 (B)進而含有分子量300以下之胺化合物,且上述分子量300以下之胺化合物係自胺基之氮原子起算3原子以內具有二級以上之碳原子之胺化合物及/或胺基經由碳數3以下之烴基連接於1個以上芳香環之胺化合物。 以下,對各成分進行說明。 <Black Matrix Pigment Dispersion Composition> The black matrix pigment dispersion composition of this invention contains a black colorant, a sulfonated copper phthalocyanine, and an epoxy compound, and satisfies either condition (A) or (B) below. (A) It does not contain amine compounds with a molecular weight of 300 or less. (B) It further contains amine compounds with a molecular weight of 300 or less, wherein the aforementioned amine compounds with a molecular weight of 300 or less are amine compounds having at least three secondary carbon atoms counting from the nitrogen atom of the amine group and/or amine compounds in which the amine group is linked to one or more aromatic rings via an hydrocarbon group having three or fewer carbon atoms. The components are described below.
(黑色著色劑) 本發明之黑矩陣用顏料分散組成物含有黑色著色劑。 作為上述黑色著色劑,較佳為含有碳黑,更佳為上述碳黑為酸性碳黑。 作為上述碳黑,較佳為平均一次粒徑20~60 nm,其中更佳為平均一次粒徑20~60 nm之中性碳黑及/或平均一次粒徑20~60 nm之酸性碳黑。 於上述黑色著色劑之一次粒徑小於20 nm之情形、或大於60 nm之情形時,存在不具有足夠之遮光性、或保存穩定性欠佳之情況。 再者,上述平均一次粒徑係藉由電子顯微鏡觀察所得之算術平均徑之值。 (Black Pigment Agent) The black matrix pigment dispersion of this invention contains a black pigment. Preferably, the black pigment contains carbon black, and more preferably, the carbon black is acidic carbon black. The carbon black preferably has an average primary particle size of 20–60 nm, and more preferably, it is neutral carbon black and/or acidic carbon black with an average primary particle size of 20–60 nm. When the primary particle size of the black pigment is less than 20 nm or greater than 60 nm, it may lack sufficient light-blocking properties or have poor storage stability. Furthermore, the aforementioned average primary particle size is the arithmetic mean diameter obtained by electron microscopy.
基於良好地賦予表面電阻值之觀點而言,上述黑色著色劑較佳為僅含有酸性碳黑。 另一方面,於併用上述中性碳黑與酸性碳黑之情形時,相對於中性碳黑與酸性碳黑之合計質量而言,上述中性碳黑較佳為85質量%以下,更佳為75質量%以下。 於上述碳黑之中性碳黑之含量多於85質量%之情形時,存在密封強度下降之情況。 From the perspective of effectively imparting surface resistivity, the aforementioned black colorant preferably contains only acidic carbon black. On the other hand, when using both neutral and acidic carbon black, the amount of neutral carbon black is preferably 85% by mass or less, and more preferably 75% by mass or less, relative to the total mass of neutral and acidic carbon black. When the content of neutral carbon black exceeds 85% by mass, a decrease in sealing strength may occur.
對上述酸性碳黑與中性碳黑進行說明。 根據表面結構,碳黑可大致分為酸性碳黑與中性碳黑。酸性碳黑係指原本或人工氧化之碳質物質,當其與蒸餾水混合煮沸時表現出酸性。另一方面,中性碳黑於與蒸餾水混合煮沸時表現出中性或較其更高之pH。 The above-mentioned acidic carbon black and neutral carbon black will be explained. Based on surface structure, carbon black can be broadly classified into acidic carbon black and neutral carbon black. Acidic carbon black refers to carbonaceous substances, either naturally occurring or artificially oxidized, which exhibit acidity when mixed with distilled water and boiled. On the other hand, neutral carbon black exhibits a neutral or higher pH when mixed with distilled water and boiled.
關於上述中性碳黑,pH較佳為8.0~10.0之範圍,具體可列舉:Orion Engineered Carbons公司製造之PRINTEX 25(平均一次粒徑56 nm,pH9.5)、PRINTEX 35(平均一次粒徑31 nm,pH9.5)、PRINTEX 65(平均一次粒徑21 nm,pH9.5);Mitsubishi Chemical公司製造之MA#20(平均一次粒徑40 nm,pH8.0)、MA#40(平均一次粒徑40 nm,pH8.0)、MA#30(平均一次粒徑30 nm,pH8.0)等。Regarding the aforementioned neutral carbon black, the optimal pH range is 8.0–10.0. Specific examples include: PRINTEX 25 (average primary particle size 56 nm, pH 9.5), PRINTEX 35 (average primary particle size 31 nm, pH 9.5), and PRINTEX 65 (average primary particle size 21 nm, pH 9.5) manufactured by Orion Engineered Carbons; and MA#20 (average primary particle size 40 nm, pH 8.0), MA#40 (average primary particle size 40 nm, pH 8.0), and MA#30 (average primary particle size 30 nm, pH 8.0) manufactured by Mitsubishi Chemical.
關於上述酸性碳黑,pH較佳為2.0~4.0之範圍,具體可列舉:Columbia Chemical公司製造之Raven 1080(平均一次粒徑28 nm,pH2.4)、Raven 1100(平均一次粒徑32 nm,pH2.9);Mitsubishi Chemical公司製造之MA-8(平均一次粒徑24 nm,pH3.0)、MA-100(平均一次粒徑22 nm,pH3.5);Orion Engineered Carbons公司製造之SPECIAL BLACK 250(平均一次粒徑56 nm,pH3.0)、SPECIAL BLACK 350(平均一次粒徑31 nm,pH3.0)、SPECIAL BLACK 550(平均一次粒徑25 nm,pH4.0)、NEROX 305(平均一次粒徑28 nm左右,pH約2.8)等。Regarding the aforementioned acidic carbon blacks, the optimal pH range is 2.0–4.0. Specific examples include: Raven 1080 (average primary particle size 28 nm, pH 2.4) and Raven 1100 (average primary particle size 32 nm, pH 2.9) manufactured by Columbia Chemical; MA-8 (average primary particle size 24 nm, pH 3.0) and MA-100 (average primary particle size 22 nm, pH 3.5) manufactured by Mitsubishi Chemical; and SPECIAL BLACK 250 (average primary particle size 56 nm, pH 3.0), SPECIAL BLACK 350 (average primary particle size 31 nm, pH 3.0), SPECIAL BLACK 550 (average primary particle size 25 nm, pH 4.0), and NEROX 305 (average primary particle size 28 nm, pH 4.0) manufactured by Orion Engineered Carbons. (approximately nm, pH approximately 2.8), etc.
基於良好地賦予顏料分散性或表面電阻值之觀點而言,上述黑色著色劑較佳為SPECIAL BLACK 250或NEROX 305。From the perspective of effectively imparting pigment dispersibility or surface resistivity, the aforementioned black colorant is preferably SPECIAL BLACK 250 or NEROX 305.
再者,關於上述pH,可向去除了碳酸之蒸餾水(pH7.0)20 ml添加碳黑1 g,利用磁攪拌器進行混合,製備水性懸濁液,並使用玻璃電極於25℃進行測定(德國工業品標準規格 DIN ISO 787/9)。Furthermore, regarding the pH mentioned above, 1 g of carbon black can be added to 20 ml of distilled water (pH 7.0) after carbonation has been removed, and the mixture can be stirred using a magnetic stirrer to prepare an aqueous suspension. The pH can then be measured using a glass electrode at 25°C (German Industrial Standard DIN ISO 787/9).
作為上述黑色著色劑之含量,以相對於本發明之黑矩陣用顏料分散組成物之總固形物成分之質量分率計,較佳為3~70質量%,更佳為10~50質量%。 若上述黑色著色劑之含量未達3質量%,則存在形成黑矩陣時之遮光性降低之情況,若上述黑色著色劑之含量超過70質量%,則存在顏料難以分散之情況。 The content of the aforementioned black colorant, based on the mass fraction of the total solids content of the black matrix pigment dispersion of the present invention, is preferably 3-70% by mass, more preferably 10-50% by mass. If the content of the aforementioned black colorant is less than 3% by mass, the opacity during black matrix formation may be reduced; if the content of the aforementioned black colorant exceeds 70% by mass, the pigment may be difficult to disperse.
(銅酞青之磺化物) 本發明之黑矩陣用顏料分散組成物含有銅酞青之磺化物。 上述銅酞青之磺化物於上述黑色著色劑之微粒子化或分散之步驟中,基本骨架之部分吸附於顏料表面,磺酸基提高與有機溶劑或顏料分散劑之親和力,藉此具有提昇上述黑色著色劑分散時之微細化、或分散後之分散穩定性等之效果。 (Sulfonated Copper Phthalocyanine) The black matrix pigment dispersion of this invention contains a sulfonated copper phthalocyanine. In the micronization or dispersion step of the aforementioned black pigment, the basic skeleton of the sulfonated copper phthalocyanine is adsorbed onto the pigment surface. The sulfonic acid groups increase the affinity with organic solvents or pigment dispersants, thereby improving the micronization during dispersion or the dispersion stability of the aforementioned black pigment.
關於上述銅酞青之磺化物中之銅酞青,並無特別限定,若為具有銅酞青骨架之結構即可,例如可於銅酞青骨架中具有烷基或鹵素原子等公知之取代基,但基於導入磺酸基之容易性之觀點而言,較佳為不具有取代基之結構。There are no particular limitations on the copper phthalocyanine in the aforementioned copper phthalocyanine sulfonates. It is acceptable to have a structure with a copper phthalocyanine skeleton, such as alkyl or halogen atoms, which are known substituents. However, from the perspective of ease of introducing sulfonic acid groups, it is preferable to have a structure without substituents.
上述銅酞青之磺化物於分子中較佳為具有0.5~3個磺酸基。 藉由如此般於分子中具有0.5~3個磺酸基,可製成能夠獲得表面電阻值優異之塗膜之黑矩陣用組成物。 上述銅酞青之磺化物於分子中更佳為具有0.5~1.5個磺酸基,進而較佳為具有0.7~1.5個磺酸基。 再者,上述分子中所具有之磺酸基之數量可基於由元素分析得出之硫原子與銅原子之比率計算出。 The aforementioned sulfonated copper phthalocyanine preferably has 0.5 to 3 sulfonic acid groups in its molecule. By having 0.5 to 3 sulfonic acid groups in the molecule in this way, a black matrix composition capable of obtaining a coating film with excellent surface resistivity can be manufactured. More preferably, the aforementioned sulfonated copper phthalocyanine has 0.5 to 1.5 sulfonic acid groups in its molecule, and even more preferably, 0.7 to 1.5 sulfonic acid groups. Furthermore, the number of sulfonic acid groups in the above molecule can be calculated based on the ratio of sulfur atoms to copper atoms obtained from elemental analysis.
作為上述銅酞青之磺化物,亦可使用市售品,例如可列舉:Solsperse 12000(均為日本Lubrizol公司製造)或VALIFAST BLUE 1605之脫鈉物等。As sulfonates of the aforementioned copper phthalocyanine, commercially available products can also be used, such as: desodium derivatives of Solsperse 12000 (both manufactured by Lubrizol Corporation of Japan) or VALIFAST BLUE 1605, etc.
相對於上述黑色著色劑100質量份而言,上述銅酞青之磺化物之含量較佳為0.1~20質量份,更佳為1~15質量份。The content of the copper phthalocyanine sulfonate is preferably 0.1 to 20 parts by weight, and more preferably 1 to 15 parts by weight, relative to 100 parts by weight of the black colorant mentioned above.
(環氧化合物) 本發明之黑矩陣用顏料分散組成物含有環氧化合物。 藉由含有上述環氧化合物,上述多官能環氧樹脂與上述碳黑之表面所存在之官能基良好地相互作用,由此推定可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣。 但是,本發明本發明亦可不限於上述機制地進行解釋。 (Epoxy Compounds) The pigment dispersion composition for the black matrix of this invention contains epoxy compounds. By containing the aforementioned epoxy compounds, the functional groups present on the surface of the multifunctional epoxy resin and the carbon black interact well, thereby presumably forming a black matrix whose surface resistivity does not decrease even after high-temperature and long-term baking. However, this invention can also be interpreted in ways not limited to the above mechanism.
作為上述環氧化合物,可列舉:Epolight 4000、Epolight 3002(均為共榮社化學公司製造);DENACOL DLC-101、DENACOL DLC-202、DENACOL EX-141、DENACOL EX-142、DENACOL EX-145、DENACOL EX-146、DENACOL EX-147(均為長瀨化成公司製造);GAN、GOT、NC2000-L、NC3000、NC3000-L、NC3000-H、NC3000-FH-75M、NC3100、CER3000-L、XD1000、NC7000L、NC7300L、EPPN-201、EPPN-501H、EPPN-501HY、EPPN502H、EOCN-1020、EOCN-102S、EOCN-103S、EOCN-104S、CER-1020、RE303S-L、RE310S(均為日本化藥公司製造);jER157S70、jER828、jER1002、jER1032H60、jER1750、jER1007、YX8100-BH30、E1256、E4250、E4275(均為Mitsubishi Chemical公司製造);EPICLON EXA-9583、EPICLON N695、HP4032、HP5000、HP7200L(均為DIC公司製造);VG3101(三井化學公司製造);Epotohto YH-434L(東都化成公司製造);VG3101L(AIR WATER公司製造)等。Examples of the aforementioned epoxides include: Epolight 4000 and Epolight 3002 (both manufactured by Kyoei Chemicals); DENACOL DLC-101, DENACOL DLC-202, DENACOL EX-141, DENACOL EX-142, DENACOL EX-145, DENACOL EX-146, and DENACOL... EX-147 (all manufactured by Nagase Kasei Corporation); GAN, GOT, NC2000-L, NC3000, NC3000-L, NC3000-H, NC3000-FH-75M, NC3100, CER3000-L, XD1000, NC7000L, NC7300L, EPPN-201, EPPN-501H, EPPN-501HY, EPPN502H, EOCN-102 0, EOCN-102S, EOCN-103S, EOCN-104S, CER-1020, RE303S-L, RE310S (all manufactured by Nippon Kayaku Co., Ltd.); jER157S70, jER828, jER1002, jER1032H60, jER1750, jER1007, YX8100-BH30, E1256, E4250, E4275 (all manufactured by Mitsubishi). (Manufactured by Chemical Company); EPICLON EXA-9583, EPICLON N695, HP4032, HP5000, HP7200L (all manufactured by DIC Company); VG3101 (manufactured by Mitsui Chemicals); Epotohto YH-434L (manufactured by Toto Chemicals); VG3101L (manufactured by Air Water), etc.
上述環氧化合物較佳為選自由下述(式1)~(式7)所組成之群中之至少1種。 上述環氧化合物之中,基於形成表面電阻值及密封強度尤其優異之黑矩陣之觀點而言,更佳為具有雙酚骨架,進而較佳為下述(式2)之結構。 The epoxy compound is preferably selected from at least one of the groups consisting of (Formula 1) to (Formula 7) below. Among the epoxy compounds mentioned above, from the viewpoint of forming a black matrix with particularly excellent surface resistance and sealing strength, it is more preferably to have a bisphenol backbone, and even more preferably to have the structure of (Formula 2) below.
以相對於本發明之黑矩陣用顏料分散組成物之總固形物成分之質量分率計,上述環氧化合物之含量較佳為1質量%以上,更佳為2質量%以上,進而較佳為3質量%以上。又,以相對於本發明之黑矩陣用顏料分散組成物之總固形物成分之質量分率計,上述環氧樹脂之含量較佳為12.0質量%以下,更佳為10.0質量%以下,進而較佳為9.0質量%以下。Based on the mass fraction of the total solids content of the black matrix pigment dispersion of the present invention, the content of the aforementioned epoxy compound is preferably 1% by mass or more, more preferably 2% by mass or more, and even more preferably 3% by mass or more. Furthermore, based on the mass fraction of the total solids content of the black matrix pigment dispersion of the present invention, the content of the aforementioned epoxy resin is preferably 12.0% by mass or less, more preferably 10.0% by mass or less, and even more preferably 9.0% by mass or less.
(分子量300以下之胺化合物) 基於形成表面電阻值較高且即便進行高溫且長時間之後烘烤仍可維持表面電阻值之黑矩陣之觀點而言,本發明之黑矩陣用顏料分散組成物進而含有分子量300以下之胺化合物,且上述分子量300以下之胺化合物較佳為自胺基之氮原子起算3原子以內具有二級以上之碳原子之胺化合物及/或胺基經由碳數3以下之烴基連接於1個以上芳香環之胺化合物。 (Amine compounds with a molecular weight of 300 or less) Based on the viewpoint of forming a black matrix with a high surface resistivity that can be maintained even after high-temperature and long-term baking, the pigment dispersion composition of the black matrix of the present invention contains an amine compound with a molecular weight of 300 or less. Preferably, the amine compound with a molecular weight of 300 or less is an amine compound having at least three secondary carbon atoms counting from the nitrogen atom of the amine group and/or an amine compound in which the amine group is linked to one or more aromatic rings via an hydrocarbon group having three or fewer carbon atoms.
上述分子量300以下之胺化合物係自胺基之氮原子起算3原子以內具有二級以上之碳原子之胺化合物及/或胺基經由碳數3以下之烴基連接於1個以上芳香環之胺化合物。 藉由含有此種胺化合物,氮原子上之電子對被大體積之取代基所埋入,結果於上述胺化合物與銅酞青磺化物之中和中,離子性變得適度,因此認為可抑制因該離子性引起之通電。又,認為藉由大體積之取代基所產生之立體阻礙會抑制顏料粒子彼此靠近。 但是,本發明亦可不限於上述機制地進行解釋。 The aforementioned amine compounds with a molecular weight of 300 or less are amine compounds having at least three secondary carbon atoms counting from the nitrogen atom of the amine group, and/or amine compounds in which the amine group is linked to one or more aromatic rings via an hydrocarbon group having three or fewer carbon atoms. By containing such amine compounds, the electron pair on the nitrogen atom is buried by a large substituent. As a result, in the neutralization of the aforementioned amine compound and copper phthalocyanine sulfonate, the ionicity becomes moderate, thus suppressing the electrophoresis caused by this ionicity. Furthermore, it is believed that the steric hindrance generated by the large substituent inhibits the proximity of pigment particles. However, the invention can also be interpreted in ways not limited to the above mechanism.
關於上述自胺基之氮原子起算3原子以內具有二級以上之碳原子之胺化合物,較佳為自胺化合物中所存在之所有胺基之氮原子起算3原子以內具有二級以上之碳原子,具體可列舉:1,1,3,3-四甲基丁基胺、二異丙基胺、三異丙基胺、二異丁基胺、三異丁基胺、二異戊基胺、三異戊基胺、三(2-乙基己基)胺等。 再者,所謂自胺基之氮原子起算3原子以內,係將與胺基之氮原子鄰接之原子算作1,將鄰接於上述與氮原子鄰接之原子的原子算作2,將與上述鄰接於與氮原子鄰接之原子的原子鄰接之原子算作3。 Regarding the aforementioned amine compounds having secondary or higher carbon atoms within three atoms of the nitrogen atom of the amine group, preferably those having secondary or higher carbon atoms within three atoms of the nitrogen atom of all amine groups present in the amine compound, examples include: 1,1,3,3-tetramethylbutylamine, diisopropylamine, triisopropylamine, diisobutylamine, triisobutylamine, diisopentylamine, triisopentylamine, tri(2-ethylhexyl)amine, etc. Furthermore, the term "within three atoms of the nitrogen atom of the amine group" refers to the atom adjacent to the nitrogen atom of the amine group as 1, the atom adjacent to the aforementioned atom adjacent to the nitrogen atom as 2, and the atom adjacent to the aforementioned atom adjacent to the atom adjacent to the nitrogen atom as 3.
作為上述胺基經由碳數3以下之烴基連接於1個以上芳香環之胺化合物,可列舉:3-苯基丙基胺、2-苯基丙基胺、1-苯基丙基胺、2-苯基乙基胺、1-苯基乙基胺、苯基甲基胺、三苯基甲基胺等。Examples of amine compounds in which the above-mentioned amino group is linked to one or more aromatic rings via an amino group having three or fewer carbon atoms include: 3-phenylpropylamine, 2-phenylpropylamine, 1-phenylpropylamine, 2-phenylethylamine, 1-phenylethylamine, phenylmethylamine, triphenylmethylamine, etc.
作為上述分子量300以下之胺化合物,基於良好地提昇表面電阻值之觀點而言,較佳為選自3-苯基丙基胺、1,1,3,3-四甲基丁基胺、及三異丁基胺中之至少1種。As for the amine compound with a molecular weight of less than 300, from the viewpoint of effectively improving the surface resistance, it is preferably selected from at least one of 3-phenylpropylamine, 1,1,3,3-tetramethylbutylamine, and triisobutylamine.
相對於上述銅酞青之磺化物100質量份而言,上述分子量300以下之胺化合物較佳為5~100質量份,更佳為20~60質量份。Compared to 100 parts by mass of the aforementioned copper phthalocyanine sulfonate, the aforementioned amine compound with a molecular weight of less than 300 is preferably 5 to 100 parts by mass, and more preferably 20 to 60 parts by mass.
(有機溶劑) 本發明之黑矩陣用顏料分散組成物較佳為含有機溶劑。 作為上述有機溶劑,適宜使用以往於液晶黑矩陣光阻領域中所使用之有機溶劑。 (Organic Solvent) The pigment dispersion composition for the black matrix of this invention preferably contains an organic solvent. As the aforementioned organic solvent, organic solvents conventionally used in the field of liquid crystal black matrix photoresists are suitable.
作為上述有機溶劑,具體為於常壓(1.013×10 2kPa)之沸點為100~250℃之酯系有機溶劑、醚系有機溶劑、醚酯系有機溶劑、酮系有機溶劑、芳香族烴系有機溶劑、含氮系有機溶劑等。 若含有大量上述沸點超過250℃之有機溶劑,則存在下述情況,即,當對塗佈由本發明之黑矩陣用顏料分散組成物所獲得之黑矩陣用光阻組成物而形成之塗膜進行預烤時,有機溶劑不充分蒸發而殘留於乾燥塗膜內,導致乾燥塗膜之耐熱性下降。 又,若含有大量上述沸點未達100℃之有機溶劑,則存在下述情況,即,難以無不均地塗佈均勻,導致無法獲得表面平滑性優異之塗膜。 Specifically, the aforementioned organic solvents include ester-based organic solvents, ether-based organic solvents, ether-ester-based organic solvents, ketone-based organic solvents, aromatic hydrocarbon-based organic solvents, and nitrogen-containing organic solvents with a boiling point of 100–250°C at atmospheric pressure (1.013 × 10² kPa). If a large amount of the aforementioned organic solvents with a boiling point exceeding 250°C is contained, the following situation occurs: when a coating film formed by applying a black matrix photoresist composition obtained from the black matrix pigment dispersion composition of the present invention is pre-baked, the organic solvents do not evaporate sufficiently and remain in the dried coating film, resulting in a decrease in the heat resistance of the dried coating film. Furthermore, if the coating contains a large amount of organic solvents with a boiling point below 100°C, it will be difficult to apply the coating evenly without unevenness, resulting in the inability to obtain a coating film with excellent surface smoothness.
作為上述有機溶劑,具體可例示:乙二醇單甲醚、乙二醇單乙醚、乙二醇單異丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單丁醚、二乙二醇二乙醚、二乙二醇二甲醚、二乙二醇甲基乙基醚等醚系有機溶劑;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等醚酯系有機溶劑;甲基異丁基酮、環己酮、2-庚酮、δ-丁內酯等酮系有機溶劑;2-羥基丙酸甲酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、3-甲基-3-甲氧基丁基丙酸酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、甲酸正戊酯等酯系有機溶劑;甲醇、乙醇、異丙醇、丁醇等醇系溶劑;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等含氮系有機溶劑等。該等可單獨使用,或混合2種以上使用。Specific examples of the aforementioned organic solvents include: ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, etc., which are ether-based organic solvents; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc., which are ether-ester organic solvents; methyl isobutyl ketone, cyclohexanone, 2-heptanone. Ketone solvents such as δ-butyrolactone; ester solvents such as methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, 3-methyl-3-methoxybutylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxypropionate, ethyl hydroxypropionate, and n-pentyl formate; alcohol solvents such as methanol, ethanol, isopropanol, and butanol; and nitrogen-containing organic solvents such as N-methylpyrrolidone, N,N-dimethylformamide, and N,N-dimethylacetamide. These can be used alone or in combination of two or more.
上述有機溶劑之中,基於溶解性、分散性、塗佈性等觀點而言,較佳為二乙二醇二甲醚、二乙二醇甲基乙基醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、環己酮、2-庚酮、2-羥基丙酸乙酯、3-甲基-3-甲氧基丁基丙酸酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、甲酸正戊酯等,更佳為丙二醇單甲醚、丙二醇單甲醚乙酸酯。Among the aforementioned organic solvents, based on considerations of solubility, dispersibility, and coatability, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, 2-heptanone, ethyl 2-hydroxypropionate, 3-methyl-3-methoxybutylpropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, and n-pentyl formate are preferred, with propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate being even more preferred.
(顏料分散劑) 本發明之黑矩陣用顏料分散組成物較佳為含有顏料分散劑。 上述顏料分散劑係含鹼性基之顏料分散劑,可使用:陰離子性界面活性劑、含鹼性基之聚酯系顏料分散劑、含鹼性基之丙烯酸系顏料分散劑、含鹼性基之胺酯系顏料分散劑、含鹼性基之碳二醯亞胺系顏料分散劑、含酸性基之高分子顏料分散劑等。 該等含鹼性基之顏料分散劑可單獨使用,又,亦可組合2種以上使用。其中,基於獲得良好之顏料分散性之方面而言,較佳為含鹼性基之高分子顏料分散劑。 (Pigment Dispersant) The pigment dispersion composition for black matrices of this invention preferably contains a pigment dispersant. The aforementioned pigment dispersant is a basic-group pigment dispersant, and can include: anionic surfactants, basic-group polyester-based pigment dispersants, basic-group acrylic-based pigment dispersants, basic-group amine ester-based pigment dispersants, basic-group carbodiimide-based pigment dispersants, and acidic polymeric pigment dispersants, etc. These basic-group pigment dispersants can be used alone, or in combination of two or more. Among these, basic-group polymeric pigment dispersants are preferred for obtaining good pigment dispersibility.
作為上述含鹼性基之高分子顏料分散劑之具體例,可列舉: (1)聚胺化合物(例如,聚烯丙胺、聚乙烯胺、聚乙烯聚亞胺等聚(低級伸烷基胺)等)之胺基及/或亞胺基與選自由具有游離羧基之聚酯、聚醯胺及聚酯醯胺所組成之群中之至少1種之反應產物(日本特開2001-59906號公報); (2)聚(低級)伸烷基亞胺、甲基亞胺基雙丙基胺等低分子胺基化合物與具有游離羧基之聚酯之反應產物(日本特開昭54-37082號公報、日本專利特開平01-311177號公報); (3)使聚異氰酸酯化合物之異氰酸基依序與甲氧基聚乙二醇等醇類或己內酯聚酯等具有1個羥基之聚酯類、具有2~3個異氰酸基反應性官能基之化合物、以及具有異氰酸基反應性官能基及三級胺基之脂肪族或雜環式烴化合物進行反應而成之反應產物(日本特開平02-612號公報); (4)使具有醇性羥基之丙烯酸酯之聚合物與聚異氰酸酯化合物及具有胺基之烴化合物進行反應而成之化合物; (5)在低分子胺基化合物上加成聚醚鏈而成之反應產物; (6)使具有異氰酸基之化合物與具有胺基之化合物進行反應而成之反應產物(日本特開平04-210220號公報); (7)使多環氧化合物與具有游離羧基之線性聚合物及具有1個二級胺基之有機胺化合物進行反應而成之反應產物(日本特開平09-87537號公報); (8)單末端具有可與胺基進行反應之官能基之聚碳酸酯化合物與聚胺化合物之反應產物(日本特開平09-194585號公報); (9)選自甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丙酯、甲基丙烯酸丁酯、甲基丙烯酸硬脂酯、甲基丙烯酸苄酯、丙烯酸甲酯、丙烯酸乙酯、丙烯酸丙酯、丙烯酸丁酯、丙烯酸硬脂酯、丙烯酸苄酯等甲基丙烯酸酯或丙烯酸酯中之至少1種、丙烯醯胺、甲基丙烯醯胺、N-羥甲基醯胺、乙烯基咪唑、乙烯基吡啶、具有胺基及聚己內酯骨架之單體等含鹼性基之聚合性單體之至少1種、以及苯乙烯、苯乙烯衍生物、其他聚合性單體之至少1種之共聚物(日本特開平01-164429號公報); (10)含鹼性基之碳二醯亞胺系顏料分散劑(國際公開WO04/000950號公報); (11)由具有三級胺基、四級銨鹽基等鹼性基之嵌段及不具有官能基之嵌段所構成之嵌段共聚物(參照日本特開2005-55814號公報之記載); (12)使聚烯丙胺與聚碳酸酯化合物發生麥可加成反應而獲得之顏料分散劑(日本特開平09-194585號公報); (13)具有至少1個聚丁二烯鏈及至少1個含鹼性氮之基之碳二醯亞胺系化合物(日本特開2006-257243號公報); (14)分子內具有至少1個具有醯胺基之側鏈、及至少1個含鹼性氮之基之碳二醯亞胺系化合物(日本特開2006-176657號公報); (15)具有含有環氧乙烷鏈及環氧丙烷鏈之結構單元且具有藉由四級化劑而四級化之胺基之聚胺酯系化合物(日本特開2009-175613號公報); (16)分子內具有異氰尿酸酯環之異氰酸酯化合物之異氰酸基與分子內具有活性氫基且具有咔唑環及/或偶氮苯骨架之化合物之活性氫基進行反應而獲得之化合物,該化合物之分子內,相對於源自具有異氰尿酸酯環之異氰酸酯化合物之異氰酸基和由異氰酸基與活性氫基之反應而產生之胺酯鍵及脲鍵之合計而言,咔唑環與偶氮苯骨架之數量為15~85%(日本特願2009-220836); (17)向具有胺基之丙烯酸酯聚合物中導入聚醚或聚酯側鏈而成之接枝共聚物等。 Specific examples of the above-mentioned polymeric pigment dispersants containing alkaline groups include: (1) A reaction product of an amino and/or imine group of a polyamine compound (e.g., poly(lower alkylamines) such as polyallylamine, polyethyleneamine, and polyethylene polyimide) with at least one of a group consisting of polyesters, polyamides, and polyesteramides having free carboxyl groups (Japanese Patent Application Publication No. 2001-59906); (2) A reaction product of a low-molecular-weight amino compound such as poly(lower)alkylimide or methyliminodipropylamine with a polyester having free carboxyl groups (Japanese Patent Application Publication No. Sho 54-37082, Japanese Patent Application Publication No. Hei 01-311177); (3) A reaction product obtained by sequentially reacting the isocyanate group of a polyisocyanate compound with an alcohol such as methoxy polyethylene glycol or a polyester such as caprolactone polyester having one hydroxyl group, a compound having two to three isocyanate reactive functional groups, and an aliphatic or heterocyclic hydrocarbon compound having an isocyanate reactive functional group and a tertiary amine group (Japanese Patent Application Publication No. 02-612); (4) A compound obtained by reacting a polymer of acrylate having an alcoholic hydroxyl group with a polyisocyanate compound and a hydrocarbon compound having an amine group; (5) A reaction product obtained by adding a polyether chain to a low molecular weight amine compound; (6) A reaction product obtained by reacting a compound having an isocyanate group with a compound having an amine group (Japanese Patent Application Publication No. 04-210220); (7) A reaction product formed by reacting a polyepoxide compound with a linear polymer having a free carboxyl group and an organic amine compound having one secondary amine group (Japanese Patent Application Publication No. 09-87537); (8) A reaction product formed by reacting a polycarbonate compound having a single-terminal functional group capable of reacting with an amine group with a polyamine compound (Japanese Patent Application Publication No. 09-194585); (9) A copolymer selected from at least one of the following methacrylates or acrylates: methyl methacrylate, ethyl methacrylate, propyl methacrylate, butyl methacrylate, stearyl methacrylate, benzyl methacrylate, methyl acrylate, ethyl acrylate, propyl acrylate, butyl acrylate, stearyl acrylate, benzyl acrylate, etc.; at least one of the following polymerizable monomers containing an alkaline group: acrylamide, methacrylamide, N-hydroxymethylamide, vinylimidazole, vinylpyridine, monomers having an amino group and a polycaprolactone backbone; and at least one of the following polymerizable monomers: styrene, styrene derivatives, etc. (Japanese Patent Application Publication No. 01-164429); (10) A carbodiimide pigment dispersant containing an alkaline group (International Publication No. WO04/000950); (11) A block copolymer composed of blocks having basic groups such as tertiary amine groups and quaternary ammonium salt groups, and blocks without functional groups (see Japanese Patent Application Publication No. 2005-55814); (12) A pigment dispersant obtained by reacting polyallylamine with a polycarbonate compound via a macoric addition reaction (Japanese Patent Application Publication No. Hei 09-194585); (13) A carbodiimide compound having at least one polybutadiene chain and at least one basic nitrogen-containing group (Japanese Patent Application Publication No. 2006-257243); (14) A carbodiamide compound having at least one side chain containing a amide group and at least one basic nitrogen group (Japanese Patent Application Publication No. 2006-176657); (15) A polyurethane compound having structural units containing ethylene oxide and propylene oxide chains and having amine groups quaternized by a quaternizing agent (Japanese Patent Application Publication No. 2009-175613); (16) A compound obtained by reacting the isocyanate group of an isocyanate compound having an isocyanate ring within its molecule with the active hydrogen group of a compound having an active hydrogen group and a carbazole ring and/or an azobenzene skeleton within its molecule, wherein the amount of carbazole ring and azobenzene skeleton in the molecule of the compound is 15-85% relative to the sum of the isocyanate group derived from the isocyanate compound having an isocyanate ring and the amine ester bonds and urea bonds generated by the reaction of the isocyanate group with the active hydrogen group (Japanese Patent Application 2009-220836); (17) Graft copolymers, etc., formed by introducing polyether or polyester side chains into an acrylate polymer having an amino group.
上述含鹼性基之高分子顏料分散劑之中,更佳為含鹼性基之胺酯系高分子顏料分散劑、含鹼性基之聚酯系高分子顏料分散劑、含鹼性基之丙烯酸系高分子顏料分散劑,進而較佳為含胺基之胺酯系高分子顏料分散劑、含胺基之聚酯系高分子顏料分散劑、含胺基之丙烯酸系高分子顏料分散劑。上述含鹼性基之高分子顏料分散劑之中,特佳為具有選自由聚酯鏈、聚醚鏈、及聚碳酸酯鏈所組成之群中之至少1種之含鹼性基(胺基)之高分子顏料分散劑。Among the aforementioned alkaline-containing polymeric pigment dispersants, more preferably are alkaline-containing amine ester-based polymeric pigment dispersants, alkaline-containing polyester-based polymeric pigment dispersants, and alkaline-containing acrylic polymeric pigment dispersants; even more preferably are amine ester-based polymeric pigment dispersants, amine-containing polyester-based polymeric pigment dispersants, and amine-containing acrylic polymeric pigment dispersants. Among the aforementioned alkaline-containing polymeric pigment dispersants, particularly preferably are polymeric pigment dispersants having at least one alkaline-containing (amine) group selected from the group consisting of polyester chains, polyether chains, and polycarbonate chains.
作為上述顏料分散劑之含量,相對於上述黑色著色劑100質量份而言,較佳為1~200質量份,更佳為5~100質量份。The content of the above-mentioned pigment dispersant is preferably 1 to 200 parts by weight, and more preferably 5 to 100 parts by weight, relative to 100 parts by weight of the above-mentioned black colorant.
(黏合劑樹脂) 本發明之黑矩陣用顏料分散組成物較佳為含有黏合劑樹脂。 (Adhesive Resin) The pigment dispersion composition for the black matrix of this invention preferably contains an adhesive resin.
作為上述黏合劑樹脂,可列舉:熱硬化性樹脂、熱塑性樹脂、光聚合性化合物、鹼可溶性樹脂等。該等可單獨使用,或混合2種以上使用。Examples of such adhesive resins include: thermosetting resins, thermoplastic resins, photopolymerizable compounds, and alkali-soluble resins. These can be used alone or in combination of two or more.
作為上述熱硬化性樹脂或熱塑性樹脂,例如可列舉:丁醛樹脂、苯乙烯-順丁烯二酸共聚物、氯化聚乙烯、氯化聚丙烯、聚氯乙烯、氯乙烯-乙酸乙烯酯共聚物、聚乙酸乙烯酯、聚胺酯系樹脂、酚樹脂、聚酯樹脂、丙烯酸系樹脂、醇酸樹脂、苯乙烯樹脂、聚醯胺樹脂、橡膠系樹脂、環化橡膠、環氧樹脂、纖維素類、聚丁二烯、聚醯亞胺樹脂、苯并胍胺樹脂、三聚氰胺樹脂、脲樹脂等。Examples of the aforementioned thermosetting or thermoplastic resins include: butyraldehyde resin, styrene-butadiene copolymer, chlorinated polyethylene, chlorinated polypropylene, polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, polyvinyl acetate, polyurethane resin, phenolic resin, polyester resin, acrylic resin, alkyd resin, styrene resin, polyamide resin, rubber resin, cyclic rubber, epoxy resin, cellulose resin, polybutadiene, polyimide resin, benzoguanamine resin, melamine resin, urea resin, etc.
作為上述光聚合性化合物,可列舉:分子內具有1個或2個以上光聚合性不飽和鍵之單體、具有光聚合性不飽和鍵之低聚物等。Examples of photopolymerizable compounds include monomers having one or more photopolymerizable unsaturated bonds in their molecules, and oligomers having photopolymerizable unsaturated bonds.
作為上述分子內具有1個光聚合性不飽和鍵之單體,例如可使用:甲基丙烯酸甲酯、甲基丙烯酸丁酯、甲基丙烯酸2-乙基己酯、丙烯酸甲酯、丙烯酸丁酯、丙烯酸2-乙基己酯等甲基丙烯酸烷基酯或丙烯酸烷基酯;甲基丙烯酸苄酯、丙烯酸苄酯等甲基丙烯酸芳烷基酯或丙烯酸芳烷基酯;甲基丙烯酸丁氧基乙酯、丙烯酸丁氧基乙酯等甲基丙烯酸烷氧基烷基酯或丙烯酸烷氧基烷基酯;甲基丙烯酸N,N-二甲基胺基乙酯、丙烯酸N,N-二甲基胺基乙酯等甲基丙烯酸胺基烷基酯或丙烯酸胺基烷基酯;二乙二醇單乙醚、三乙二醇單丁醚、二丙二醇單甲醚等聚伸烷基二醇單烷基醚之甲基丙烯酸酯或丙烯酸酯;六乙二醇單苯醚等聚伸烷基二醇單芳基醚之甲基丙烯酸酯或丙烯酸酯;甲基丙烯酸異莰酯或丙烯酸異莰酯;甘油甲基丙烯酸酯或甘油丙烯酸酯;甲基丙烯酸2-羥基乙酯或丙烯酸2-羥基乙酯等。As monomers possessing one photopolymerizable unsaturated bond within the aforementioned molecules, examples include: methyl methacrylate, butyl methacrylate, 2-ethylhexyl methacrylate, methyl acrylate, butyl acrylate, 2-ethylhexyl acrylate, and other alkyl methacrylates or alkyl acrylates; benzyl methacrylate, benzyl acrylate, and other aralkyl methacrylates or aralkyl acrylates; butoxyethyl methacrylate, butoxyethyl acrylate, and other alkoxyalkyl methacrylates or alkoxyalkyl acrylates; N,N-methacrylate - Dimethylaminoethyl ester, N,N-dimethylaminoethyl acrylate and other aminoalkyl methacrylates or aminoalkyl acrylates; diethylene glycol monoethyl ether, triethylene glycol monobutyl ether, dipropylene glycol monomethyl ether and other polyalkylene glycol monoalkyl ethers of methacrylate or acrylate; hexaethylene glycol monophenyl ether and other polyalkylene glycol monoaryl ethers of methacrylate or acrylate; isocamphene methacrylate or isocamphene acrylate; glycerol methacrylate or glycerol acrylate; 2-hydroxyethyl methacrylate or 2-hydroxyethyl acrylate, etc.
作為上述分子內具有2個以上光聚合性不飽和鍵之單體,例如可使用:雙酚A二甲基丙烯酸酯、1,4-丁二醇二甲基丙烯酸酯、1,3-丁二醇二甲基丙烯酸酯、二乙二醇二甲基丙烯酸酯、甘油二甲基丙烯酸酯、新戊二醇二甲基丙烯酸酯、聚乙二醇二甲基丙烯酸酯、聚丙二醇二甲基丙烯酸酯、四乙二醇二甲基丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、新戊四醇三甲基丙烯酸酯、新戊四醇四甲基丙烯酸酯、二新戊四醇四甲基丙烯酸酯、二新戊四醇六甲基丙烯酸酯、二新戊四醇五甲基丙烯酸酯、環氧甲基丙烯酸酯、雙酚A二丙烯酸酯、1,4-丁二醇二丙烯酸酯、1,3-丁二醇二丙烯酸酯、二乙二醇二丙烯酸酯、甘油二丙烯酸酯、新戊二醇二丙烯酸酯、聚乙二醇二丙烯酸酯、聚丙二醇二丙烯酸酯、四乙二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、新戊四醇三丙烯酸酯、新戊四醇四丙烯酸酯、二新戊四醇四丙烯酸酯、二新戊四醇六丙烯酸酯、二新戊四醇五丙烯酸酯、環氧丙烯酸酯等。As monomers possessing two or more photopolymerizable unsaturated bonds within the aforementioned molecules, examples include: bisphenol A dimethacrylate, 1,4-butanediol dimethacrylate, 1,3-butanediol dimethacrylate, diethylene glycol dimethacrylate, glycerol dimethacrylate, neopentyl glycol dimethacrylate, polyethylene glycol dimethacrylate, polypropylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, trimethylolpropane trimethacrylate, neopentyl tetramethyl acrylate, neopentyl tetramethyl acrylate, dine ... Hexamethacrylate, dinepentylenetetroxide pentamethacrylate, epoxy methacrylate, bisphenol A diacrylate, 1,4-butanediol diacrylate, 1,3-butanediol diacrylate, diethylene glycol diacrylate, glycerol diacrylate, neopentylene glycol diacrylate, polyethylene glycol diacrylate, polypropylene glycol diacrylate, tetraethylene glycol diacrylate, trimethylolpropane triacrylate, neopentylenetetroxide triacrylate, neopentylenetetroxide tetraacrylate, dinepentylenetetroxide tetraacrylate, dinepentylenetetroxide hexaacrylate, dinepentylenetetroxide pentaacrylate, epoxy acrylate, etc.
作為上述具有光聚合性不飽和鍵之低聚物,可使用使上述單體適當聚合而獲得之低聚物。 上述黏合劑樹脂可單獨使用,或組合2種以上使用。 As the oligomers possessing the aforementioned photopolymerizable unsaturated bonds, oligomers obtained by appropriately polymerizing the aforementioned monomers can be used. The aforementioned adhesive resins can be used alone or in combination of two or more.
作為上述黏合劑樹脂,基於耐熱性與顯影性之觀點而言,較佳為環氧丙烯酸酯樹脂。From the perspective of heat resistance and development properties, epoxy acrylate resin is preferred as the aforementioned adhesive resin.
關於上述鹼可溶性樹脂,將於後文中進行說明。The above-mentioned alkali-soluble resins will be explained later.
以相對於本發明之黑矩陣用顏料分散組成物之總固形物成分之質量分率計,上述黏合劑樹脂之含量較佳為3~50質量%。The content of the above-mentioned adhesive resin is preferably 3 to 50% by mass relative to the total solids content of the black matrix pigment dispersion of the present invention.
(黑矩陣用顏料分散組成物之製造方法) 作為本發明之黑矩陣用顏料分散組成物之製造方法,可藉由添加上述各種成分,並進行混合及碾磨而獲得。 作為上述碾磨之方法,並無特別限定,例如只要使用珠磨機(bead mill)、預磨機(ready Mill)、超音波均質機、高壓均質機、塗料振盪機(paint shaker)、球磨機、輥磨機、碾砂機(sand mill)、砂磨機(sand grinder)、動力磨機(dyno-mill)、分散器(Dispermat)、SC磨機、奈米化機(nanomizer)等,並利用公知之方法進行碾磨即可。 (Manufacturing Method of Pigment Dispersion for Black Matrix) The pigment dispersion for black matrix of this invention can be obtained by adding the aforementioned components and then mixing and milling them. The milling method is not particularly limited; for example, any bead mill, ready mill, ultrasonic homogenizer, high-pressure homogenizer, paint shaker, ball mill, roller mill, sand mill, sand grinder, dyno-mill, dispermat, SC mill, nanorizer, etc., can be used, and milling can be performed using known methods.
<黑矩陣用光阻組成物> 本發明亦為一種黑矩陣用光阻組成物,其係由本發明之黑矩陣用顏料分散組成物所獲得。 <Photoresist Composition for Black Matrix> This invention is also a photoresist composition for black matrix, obtained from the pigment dispersion composition for black matrix of this invention.
(黑矩陣用顏料分散組成物) 本發明之黑矩陣用光阻組成物含有上述本發明之黑矩陣用顏料分散組成物。 作為上述黑矩陣用顏料分散組成物之含量,以本發明之黑矩陣用光阻組成物之總質量為基準,較佳為30~80質量%,更佳為40~75質量%。 (Black Matrix Pigment Dispersion) The black matrix photoresist composition of the present invention contains the aforementioned black matrix pigment dispersion composition. The content of the aforementioned black matrix pigment dispersion composition, based on the total mass of the black matrix photoresist composition of the present invention, is preferably 30-80% by mass, more preferably 40-75% by mass.
(光聚合起始劑) 本發明之黑矩陣用光阻組成物較佳為含有光聚合起始劑。 作為上述光聚合起始劑,並無特別限定,只要為可藉由照射紫外線或電子束等活性能量線而產生自由基或陽離子者即可,例如可列舉:1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)乙酮、二苯甲酮、N,N'-四乙基-4,4'-二胺基二苯甲酮、4-甲氧基-4'-二甲基胺基二苯甲酮、2,2-二乙氧基苯乙酮、安息香、安息香甲醚、安息香異丁醚、苯偶醯二甲基縮酮、α-羥基異丁基苯酮、9-氧硫 、2-氯9-氧硫 、1-羥基環己基苯基酮、第三丁基蒽醌、1-氯蒽醌、2,3-二氯蒽醌、3-氯-2-甲基蒽醌、2-乙基蒽醌、1,4-萘醌、1,2-苯并蒽醌、1,4-二甲基蒽醌、2-苯基蒽醌、2-甲基-1[4-(甲硫基)苯基]-2- 啉基丙烷-1-酮等二苯甲酮系、9-氧硫 系、蒽醌系、三 系等之光聚合起始劑等。 上述光聚合起始劑可單獨使用,或組合2種以上使用。 (Photopolymerization Initiator) The photoresist composition for the black matrix of this invention preferably contains a photopolymerization initiator. The photopolymerization initiator is not particularly limited, as long as it can generate free radicals or cations by irradiation with active energy lines such as ultraviolet light or electron beams. Examples include: 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-1-(O-acetylgoxymeta-ethyl ketone), benzophenone, N,N'-tetraethyl-4,4'-diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 2,2-diethoxyacetophenone, benzoin, benzoin methyl ether, benzoin isobutyl ether, benzene Photopolymerization initiators include azodimethyl ketone, α-hydroxyisobutyl benzophenone, 9-oxosulfur, 2-chloro-9-oxosulfur, 1-hydroxycyclohexylphenyl ketone, tributylanthraquinone, 1-chloroanthraquinone, 2,3-dichloroanthraquinone, 3-chloro-2-methylanthraquinone, 2-ethylanthraquinone, 1,4-naphthoquinone, 1,2-benzanthraquinone, 1,4-dimethylanthraquinone, 2-phenylanthraquinone, 2-methyl-1[4-(methylthio)phenyl]-2-linylpropane-1-one, and other benzophenone-based, 9-oxosulfur-based, anthraquinone-based, and tri-based photopolymerization initiators. The above photopolymerization initiators can be used alone or in combination of two or more.
以相對於本發明之黑矩陣用光阻組成物之總固形物成分之質量分率計,上述光聚合起始劑之含量較佳為1~20質量%。The content of the above photopolymerization initiator is preferably 1 to 20% by mass relative to the total solids content of the photoresist composition for black matrix of the present invention.
(光聚合性化合物) 本發明之黑矩陣用光阻組成物較佳為含有光聚合性化合物。 作為上述光聚合性化合物,可適當選擇上述黑矩陣用顏料分散組成物中所記載之光聚合性化合物使用。 (Photopolymerizable Compound) The photoresist composition for black matrices of this invention preferably contains a photopolymerizable compound. As the aforementioned photopolymerizable compound, a photopolymerizable compound described in the aforementioned pigment dispersion composition for black matrices may be appropriately selected.
以相對於本發明之黑矩陣用光阻組成物之總固形物成分之質量分率計,上述光聚合性化合物之含量較佳為0.1~50質量%。The content of the above-mentioned photopolymerizable compound is preferably 0.1 to 50% by mass relative to the total solids content of the photoresist composition for black matrix of the present invention.
(鹼可溶性樹脂) 本發明之黑矩陣用光阻組成物較佳為含有鹼可溶性樹脂。 作為上述鹼可溶性樹脂,較佳為對上述黑色著色劑作為黏合劑發揮作用,且於製造黑矩陣時對其顯影處理步驟中所使用之顯影液、尤其是鹼性顯影液具有可溶性。 (Alkali-soluble resin) The photoresist composition for the black matrix of this invention preferably contains an alkaline-soluble resin. Preferably, this alkaline-soluble resin acts as a binder for the aforementioned black pigment and is soluble in the developing solution, especially an alkaline developing solution, used in the developing process during the manufacture of the black matrix.
作為上述鹼可溶性樹脂,亦可設為嵌段共聚物。藉由採用嵌段共聚物,顏料分散能相較於其他共聚物提昇,可賦予於PGMEA或鹼性顯影液中之溶解性。 該嵌段共聚物之中,較佳為具有下述嵌段之嵌段共聚物:由具有1個以上羧基之乙烯性不飽和單體所構成之嵌段、及由其他可共聚合之乙烯性不飽和單體所構成之嵌段。 The aforementioned alkaline-soluble resin can also be configured as a block copolymer. By using block copolymers, pigment dispersion is improved compared to other copolymers, thus imparting solubility in PGMEA or alkaline developing solutions. Preferably, the block copolymer is a block copolymer having blocks composed of ethylene unsaturated monomers having one or more carboxyl groups, and blocks composed of other copolymerizable ethylene unsaturated monomers.
作為上述嵌段共聚物,並無特別限定,可使用以往所使用之嵌段共聚物。其中,具體可列舉丙烯酸、甲基丙烯酸等具有羧基之乙烯性不飽和單體與能夠與具有羧基之乙烯性不飽和單體共聚合之至少1種乙烯性不飽和單體之共聚物,上述能夠與具有羧基之乙烯性不飽和單體共聚合之至少1種乙烯性不飽和單體係選自苯乙烯、丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、丙烯酸苄酯、甲基丙烯酸苄酯、丙烯酸環己酯、甲基丙烯酸環己酯、甘油單丙烯酸酯、甘油甲基丙烯酸酯、N-苯基順丁烯二醯亞胺、聚苯乙烯巨單體、聚甲基丙烯酸甲酯巨單體、二丙烯酸碳醯環氧酯等單體、低聚物類之群中。 其中,較理想為不使用N-乙烯基吡咯啶酮、含硫元素之單體。 作為上述嵌段共聚物,可採用藉由活性自由基聚合、陰離子聚合所合成之嵌段樹脂。 上述嵌段共聚物之一部分嵌段部位亦可由無規共聚物所構成。 There are no particular limitations on the block copolymers mentioned above, and conventionally used block copolymers can be used. Specifically, copolymers of carboxyl-containing ethylene unsaturated monomers such as acrylic acid and methacrylic acid, and at least one ethylene unsaturated monomer capable of copolymerizing with the carboxyl-containing ethylene unsaturated monomer, are selected from the group consisting of styrene, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, allyl acrylate, allyl methacrylate, benzyl acrylate, benzyl methacrylate, cyclohexyl acrylate, cyclohexyl methacrylate, glyceryl monoacrylate, glyceryl methacrylate, N-phenylcis-diimide, polystyrene macromonomer, polymethyl methacrylate macromonomer, diacrylate carboacrylate epoxy ester, and oligomers. Ideally, N-vinylpyrrolidone and sulfur-containing monomers should not be used. The block copolymers described above can be synthesized using block resins synthesized through living radical polymerization or anionic polymerization. Some of the block sites in the aforementioned block copolymers can also be composed of random copolymers.
作為上述鹼可溶性樹脂,亦可採用鹼可溶性卡多(Cardo)樹脂。 作為上述鹼可溶性卡多樹脂,可列舉作為茀環氧(甲基)丙烯酸衍生物與二羧酸酐及/或四羧酸二酐之加成產物之具有茀骨架之環氧(甲基)丙烯酸酯酸加成物等。 又,本鹼可溶性樹脂亦可具有光聚合性之官能基。 As the aforementioned alkali-soluble resin, alkali-soluble cardo resin can also be used. Examples of alkali-soluble cardo resins include epoxy (meth)acrylate adducts with a rudimentary skeleton, which are addition products of epoxy (meth)acrylate derivatives and dicarboxylic anhydrides and/or tetracarboxylic dianhydrides. Furthermore, this alkali-soluble resin may also possess photopolymerizable functional groups.
作為上述鹼可溶性樹脂之酸值,基於顯影特性之觀點而言,較佳為5~300 mgKOH/g,更佳為5~250 mgKOH/g,進而較佳為10~200 mgKOH/g,特佳為60~150 mgKOH/g。 再者,於本說明書中,上述酸值係理論酸值,其係根據具有羧基之乙烯性不飽和單體及其含量算術地求出之值。 From a developmental perspective, the acid value of the aforementioned alkaline-soluble resin is preferably 5–300 mgKOH/g, more preferably 5–250 mgKOH/g, further preferably 10–200 mgKOH/g, and particularly preferably 60–150 mgKOH/g. Furthermore, in this specification, the above acid values are theoretical acid values, calculated arithmetically based on the content of carboxyl-containing unsaturated ethylene monomers.
基於顯影特性或於有機溶劑中之溶解性之觀點而言,上述鹼可溶性樹脂之重量平均分子量較佳為1,000~100,000,更佳為3,000~50,000,進而較佳為5,000~30,000。 再者,於本發明中,上述重量平均分子量係基於GPC所獲得之聚苯乙烯換算之重量平均分子量。 於本說明書中,使用Water 2690(沃特斯公司製造)作為測定上述重量平均分子量之裝置,使用PLgel 5 μm MIXED-D(Agilent Technologies公司製造)作為管柱。 Based on the viewpoint of developing properties or solubility in organic solvents, the weight-average molecular weight of the aforementioned alkaline-soluble resin is preferably 1,000 to 100,000, more preferably 3,000 to 50,000, and even more preferably 5,000 to 30,000. Furthermore, in this invention, the aforementioned weight-average molecular weight is based on the weight-average molecular weight of polystyrene obtained by GPC. In this specification, a Water 2690 (manufactured by Waters Corporation) is used as the apparatus for determining the aforementioned weight-average molecular weight, and a PLgel 5 μm MIXED-D (manufactured by Agilent Technologies) is used as the column.
相對於上述黑色著色劑100質量份而言,上述鹼可溶性樹脂之含量較佳為1~200質量份,進而較佳為10~150質量份。 於該情形時,若上述鹼可溶性樹脂之含量未達1質量份,則存在顯影特性下降之情況,若上述鹼可溶性樹脂之含量超過200質量份,則上述黑色著色劑之濃度相對性地下降,因此存在難以達成作為薄膜時之目標色濃度之情況。 Relative to 100 parts by weight of the aforementioned black colorant, the content of the aforementioned alkali-soluble resin is preferably 1 to 200 parts by weight, and more preferably 10 to 150 parts by weight. In this case, if the content of the aforementioned alkali-soluble resin is less than 1 part by weight, the developing properties may decrease; if the content of the aforementioned alkali-soluble resin exceeds 200 parts by weight, the concentration of the aforementioned black colorant will relatively decrease, thus making it difficult to achieve the target color concentration for use as a film.
作為上述鹼可溶性樹脂,較佳為不含一級胺基、二級胺基及三級胺基中之任一胺基,進而亦不含四級銨基。進而,更佳為不含鹼性基。 再者,亦可於不損及本發明所實現之效果之範圍內,摻合具有嵌段共聚物以外之結構之鹼可溶性樹脂。 The aforementioned alkali-soluble resin is preferably free of any of the primary, secondary, and tertiary amino groups, and further free of quaternary ammonium groups. More preferably, it is free of alkaline groups. Furthermore, alkali-soluble resins with structures other than block copolymers may be incorporated, without impairing the effects achieved by the present invention.
(有機溶劑) 作為上述有機溶劑,可適當選擇上述黑矩陣用顏料分散組成物中所記載之有機溶劑來使用。 (Organic Solvent) As the aforementioned organic solvent, any organic solvent described in the above-mentioned black matrix pigment dispersion composition may be appropriately selected.
作為上述有機溶劑之含量,以本發明之黑矩陣用光阻組成物之總質量為基準,較佳為1~40質量%,更佳為5~35質量%。The content of the aforementioned organic solvent is based on the total mass of the photoresist composition for the black matrix of the present invention, preferably 1 to 40% by mass, more preferably 5 to 35% by mass.
(其他添加劑) 本發明之黑矩陣用光阻組成物可視需要適當使用熱聚合抑制劑、紫外線吸收劑、抗氧化劑等各種添加劑。 (Other Additives) The photoresist composition for the black matrix of this invention can be appropriately supplemented with various additives such as thermal polymerization inhibitors, ultraviolet absorbers, and antioxidants, as needed.
(斷點) 本發明之黑矩陣用顏料分散光阻組成物於剛製作完後及於60℃保存1週後之斷點變化較佳為±3秒以內,更佳為±2秒以內,進而較佳為±1.5秒以內,尤佳為±1.0秒以內,最佳為±0.5秒以內。 若上述斷點變化為±3秒以內,則可判斷充分具備斷點不會隨著保存時間發生變化之性質。 再者,上述斷點變化可利用以下方法進行測定。 利用旋轉塗佈機,將黑矩陣用顏料分散光阻組成物以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤。 其後,使用具有5 μm、8 μm、10 μm、15 μm、20 μm、30 μm之線圖案之光罩,利用高壓水銀燈以UV累計光量50 mJ/cm 2進行曝光,製成包含曝光部(硬化部)之光阻膜。 繼而,使用0.05%氫氧化鉀水溶液(顯影液),於23℃、1.0 kgf/cm 2之噴淋壓力之條件,測定開始出現顯影圖案之時間斷點。 利用上述方法,測定剛製作完後之斷點(BP1)、及於60℃保存1週後之斷點(BP2),並根據以下之式可求出ΔBP(斷點變化)。 ΔBP=BP2-BP1 (Breakpoint) The breakpoint change of the black matrix pigment-dispersed photoresist composition of this invention, immediately after fabrication and after storage at 60°C for one week, is preferably within ±3 seconds, more preferably within ±2 seconds, further preferably within ±1.5 seconds, even more preferably within ±1.0 second, and most preferably within ±0.5 seconds. If the breakpoint change is within ±3 seconds, it can be determined that it sufficiently possesses the property that the breakpoint will not change with storage time. Furthermore, the above-mentioned breakpoint change can be measured using the following method. Using a rotary coating machine, the black matrix pigment-dispersed photoresist composition is coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm, and pre-baked at 100°C for 2 minutes. Subsequently, photomasks with line patterns of 5 μm, 8 μm, 10 μm, 15 μm, 20 μm, and 30 μm were exposed using a high-pressure mercury lamp at a UV cumulative light intensity of 50 mJ/ cm² , to fabricate a photoresist film containing the exposed (cured) portion. Next, using a 0.05% potassium hydroxide aqueous solution (developer), at 23°C and a spray pressure of 1.0 kgf/ cm² , the time breakpoint at which the developing pattern begins to appear was measured. Using the above method, the breakpoint immediately after fabrication (BP1) and the breakpoint after storage at 60°C for one week (BP2) were measured, and ΔBP (change in breakpoint) can be calculated using the following formula: ΔBP = BP2 - BP1
(黑矩陣用光阻組成物之製造方法) 作為本發明之黑矩陣用光阻組成物之製造方法,例如可藉由下述方式製作,即,製作本發明之黑矩陣用顏料分散組成物,其後,加入剩餘材料並使用攪拌裝置等進行攪拌混合。 上述攪拌、混合之方法並無特別限定,可使用:超音波分散機、高壓乳化機、珠磨機、三輥研磨機、碾砂機、捏合機等公知之方法。 又,亦可於上述攪拌、混合後利用過濾器進行過濾。 再者,於製作本發明之黑矩陣用光阻組成物時,亦可視需要添加本發明之黑矩陣用顏料分散組成物中所記載之上述黑色著色劑、上述環氧樹脂、上述 化合物等。 (Manufacturing Method of Photoresist Component for Black Matrix) As a method for manufacturing the photoresist component for black matrix of the present invention, it can be manufactured, for example, by producing the pigment dispersion component for black matrix of the present invention, then adding the remaining material and mixing it using a stirring device or the like. The above-mentioned stirring and mixing method is not particularly limited, and known methods such as ultrasonic dispersers, high-pressure emulsifiers, bead mills, three-roll mills, granulators, and kneaders can be used. Furthermore, the mixture can also be filtered using a filter after the above-mentioned stirring and mixing. Furthermore, when manufacturing the photoresist composition for the black matrix of this invention, the aforementioned black colorant, epoxy resin, and compound described in the pigment dispersion composition for the black matrix of this invention may be added as needed.
<黑矩陣> 本發明之黑矩陣係由本發明之黑矩陣用光阻組成物所形成。 <Black Matrix> The black matrix of this invention is formed using photoresist.
本發明之黑矩陣之形成方法並無特別限定,例如可利用下述等方法形成黑矩陣,即,於透明基板上塗佈本發明之黑矩陣用光阻組成物並進行乾燥,形成塗膜之後,於上述塗膜上放置光罩,介隔該光罩進行影像曝光、顯影,並視需要進行光硬化。The method for forming the black matrix of the present invention is not particularly limited. For example, the black matrix can be formed by the following method: coating a photoresist composition of the black matrix of the present invention on a transparent substrate and drying it to form a coating film; then placing a photomask on the coating film; exposing and developing images through the photomask; and photocuring as needed.
對本發明之黑矩陣用光阻組成物進行塗佈、乾燥、曝光及顯影之方法等可適當選擇公知之方法。 又,作為上述透明基板,可適當選擇玻璃基板、塑膠基板等公知之透明基板來使用。 The methods for coating, drying, exposing, and developing the photoresist composition of the black matrix of this invention can be appropriately selected from known methods. Furthermore, as the aforementioned transparent substrate, known transparent substrates such as glass substrates and plastic substrates can be appropriately used.
作為上述塗膜之厚度,以乾燥後之膜厚計,較佳為0.2~10 μm,更佳為0.5~6 μm,進而較佳為1~4 μm。 藉由設為上述厚度之範圍,從而可良好地顯影出規定之圖案,且可良好地賦予規定之光學濃度。 The thickness of the coating, measured after drying, is preferably 0.2–10 μm, more preferably 0.5–6 μm, and even more preferably 1–4 μm. By setting the thickness within the above range, the specified pattern can be well displayed, and the specified optical concentration can be well imparted.
關於本發明之黑矩陣,利用旋轉塗佈機以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤之後,利用高壓水銀燈進行曝光(UV累計光量50 mJ/cm 2),進而於230℃進行3小時後烘烤,製成僅由固體部所形成之黑色光阻圖案,此時之表面電阻值較佳為1.0×10 14Ω/□以上,更佳為3.0×10 14Ω/□以上,進而較佳為5.0×10 14Ω/□以上,尤佳為9.0×10 14Ω/□以上,最佳為1.0×10 15Ω/□以上。 若上述表面電阻值為1.0×10 14Ω/□以上,則可良好地防止短路或電流洩漏。 再者,上述表面電阻值可藉由本體:微小電流計 R8340、選項:屏蔽箱 R12702A(均為ADVANCE公司製造)進行測定。 Regarding the black matrix of this invention, it is coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm using a rotary coating machine. After pre-baking at 100°C for 2 minutes, it is exposed using a high-pressure mercury lamp (UV cumulative light intensity 50 mJ/ cm2 ) and then baked at 230°C for 3 hours to produce a black photoresist pattern formed only by the solid portion. The surface resistivity at this time is preferably 1.0×10 14 Ω/□ or higher, more preferably 3.0×10 14 Ω/□ or higher, further preferably 5.0×10 14 Ω/□ or higher, even more preferably 9.0×10 14 Ω/□ or higher, and most preferably 1.0×10 15 Ω/□ or higher. If the surface resistance value is 1.0 × 10¹⁴ Ω/□ or higher, short circuits or current leakage can be effectively prevented. Furthermore, the surface resistance value can be measured using either the main body: a micro current meter R8340, or the option: a shielded box R12702A (both manufactured by ADVANCE).
關於本發明之黑矩陣,利用旋轉塗佈機以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤之後,利用高壓水銀燈進行曝光(UV累計光量50 mJ/cm 2),進而於230℃進行3小時後烘烤,其後於250℃進行1小時後烘烤,製成僅由固體部所形成之黑色光阻圖案,此時之表面電阻值較佳為1.0×10 14Ω/□以上,更佳為2.0×10 14Ω/□以上,進而較佳為5.0×10 14Ω/□以上,尤佳為9.0×10 14Ω/□以上,最佳為1.0×10 15Ω/□以上。 若上述表面電阻值為1.0×10 14Ω/□以上,則即便進行高溫且長時間之後烘烤亦可具有優異之表面電阻值。 Regarding the black matrix of this invention, it is coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm using a rotary coating machine. After pre-baking at 100°C for 2 minutes, it is exposed using a high-pressure mercury lamp (UV cumulative light intensity 50 mJ/ cm² ), then baked at 230°C for 3 hours, followed by baking at 250°C for 1 hour, to produce a black photoresist pattern formed solely by the solid portion. The surface resistivity at this stage is preferably 1.0 × 10¹⁴ Ω/□ or higher, more preferably 2.0 × 10¹⁴ Ω/□ or higher, further preferably 5.0 × 10¹⁴ Ω/□ or higher, particularly preferably 9.0 × 10¹⁴ Ω/□ or higher, and most preferably 1.0 × 10¹⁵ Ω/□ or higher. Ω/□ or higher. If the surface resistance value is 1.0×10 14 Ω/□ or higher, it can still have an excellent surface resistance value even after baking at high temperature for a long time.
本發明之黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及黑矩陣由於具有上述特性,因此適宜用作影像顯示裝置或觸控面板等之黑矩陣。 [實施例] The black matrix pigment dispersion, black matrix photoresist composition, and black matrix of this invention, due to the aforementioned characteristics, are suitable for use as black matrices in image display devices or touch panels, etc. [Example]
以下,使用實施例,對本發明具體地進行說明,只要不脫離本發明之主旨及適用範圍,本發明便不限於該等實施例。再者,於本實施例中,只要無特別說明,「份」及「%」便分別表示「質量份」及「質量%」。The present invention will be specifically described below using embodiments. However, the present invention is not limited to these embodiments as long as they do not depart from the spirit and scope of the present invention. Furthermore, in the present embodiments, unless otherwise specified, "parts" and "%" respectively represent "parts by mass" and "% by mass".
以下實施例、比較例中所使用之各種材料如下所述。 <黑色著色劑> 碳黑(商品名「NEROX 305」,平均一次粒徑28 nm左右,pH約2.8,Orion Engineered Carbons公司製造) <顏料分散劑> LPN22102(具有胺基之嵌段型顏料分散劑,固形物成分40質量%,BYK-Chemie公司製造) <環氧化合物> VG3101L(上述(式2)之結構之環氧化合物,商品名「TECHMORE VG3101L」,Printec公司製造) <胺化合物> 3-苯基丙基胺(東京化成工業公司製造) 1,1,3,3-四甲基丁基胺(東京化成工業公司製造) 三異丁基胺(東京化成工業公司製造) <黏合劑樹脂> ZCR-1569H(環氧丙烯酸酯樹脂,固形物成分70質量%,日本化藥公司製造) <有機溶劑> PM(丙二醇單甲醚) PGMEA(丙二醇單甲醚乙酸酯) <光聚合起始劑> OXE 02(製品名「Irgacure OXE 02」,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)乙酮,BASF公司製造) <光聚合性化合物> DPHA(二新戊四醇六丙烯酸酯) <鹼可溶性樹脂> WR-301(製品名「WR-301」,卡多系樹脂,酸值100 mgKOH/g,固形物成分45質量%、ADEKA公司製造) The various materials used in the following embodiments and comparative examples are described below. <Black Pigment> Carbon Black (trade name "NEROX 305", average primary particle size approximately 28 nm, pH approximately 2.8, manufactured by Orion Engineered Carbons) <Pigment Dispersant> LPN22102 (block type pigment dispersant with amine groups, solids content 40% by mass, manufactured by BYK-Chemie) <Epoxides> VG3101L (epoxide compound with the structure of (Formula 2) above, trade name "TECHMORE VG3101L", manufactured by Printec) <Amines> 3-Phenylacetylamine (manufactured by Tokyo Chemical Industry Co., Ltd.) 1,1,3,3-Tetramethylbutylamine (manufactured by Tokyo Chemical Industry Co., Ltd.) Triisobutylamine (manufactured by Tokyo Chemical Industry Co., Ltd.) <Adhesive Resins> ZCR-1569H (Epoxy acrylate resin, solids content 70% by weight, manufactured by Nippon Kayaku Co., Ltd.) <Organic Solvent> PM (Propylene Glycol Monomethyl Ether) PGMEA (Propylene Glycol Monomethyl Ether Acetate) <Photopolymerization Initiator> OXE 02 (Product name "Irgacure OXE 02", 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-1-(O-acetylatedoxime) acetone, manufactured by BASF) <Photopolymerizable Compound> DPHA (Dipentaerythritol Hexaacrylate) <Alkali-Soluble Resin> WR-301 (Product name "WR-301", calorie resin, acid value 100) (mgKOH/g, solids content 45% by weight, manufactured by ADEKA)
<分散用組成物之製作> (分散用組成物1) 將Solsperse 12000(銅酞青之磺化物(1分子中含有約0.9個磺酸基),日本Lubrizol公司製造)與3-苯基丙基胺以質量比25:8進行混合,獲得分散用組成物1。 (分散用組成物2) 將Solsperse 12000(銅酞青之磺化物(1分子中含有約0.9個磺酸基),日本Lubrizol公司製造)與1,1,3,3-四甲基丁基胺以質量比10:3進行混合,獲得分散用組成物2。 (分散用組成物3) 將Solsperse 12000(銅酞青之磺化物(1分子中含有約0.9個磺酸基),日本Lubrizol公司製造)與三異丁基胺以質量比25:11進行混合,獲得分散用組成物3。 <Preparation of Dispersion Compounds> (Dispersion Compound 1) Solsperse 12000 (a sulfonated copper phthalocyanine compound (containing approximately 0.9 sulfonic acid groups per molecule), manufactured by Lubrizol Corporation, Japan) and 3-phenylpropylamine were mixed at a mass ratio of 25:8 to obtain Dispersion Compound 1. (Dispersion Compound 2) Solsperse 12000 (a sulfonated copper phthalocyanine compound (containing approximately 0.9 sulfonic acid groups per molecule), manufactured by Lubrizol Corporation, Japan) and 1,1,3,3-tetramethylbutylamine were mixed at a mass ratio of 10:3 to obtain Dispersion Compound 2. (Dispersion Component 3) Solsperse 12000 (a sulfonated copper phthalocyanine compound (containing approximately 0.9 sulfonic acid groups per molecule), manufactured by Lubrizol Corporation, Japan) was mixed with triisobutylamine at a mass ratio of 25:11 to obtain dispersion component 3.
<分散用材料> Solsperse 12000(銅酞青之磺化物(1分子中含有約0.9個磺酸基),日本Lubrizol公司製造) Solsperse 5000(銅酞青之磺化物之四級銨鹽、(1分子中含有約0.9個磺酸基),日本Lubrizol公司製造) VALIFAST BLUE 1605(VB 1605,銅酞青之磺化物之鈉中和物,Orient Chemical Industries,Ltd.製造) <Dispersion Materials> Solsperse 12000 (Sulfonated copper phthalocyanine (approximately 0.9 sulfonic acid groups per molecule), manufactured by Lubrizol Corporation, Japan) Solsperse 5000 (A quaternary ammonium salt of sulfonated copper phthalocyanine (approximately 0.9 sulfonic acid groups per molecule), manufactured by Lubrizol Corporation, Japan) VALIFAST BLUE 1605 (VB 1605, Sodium neutralized sulfonated copper phthalocyanine, manufactured by Orient Chemical Industries, Ltd.)
<黑矩陣用顏料分散組成物之製作> 將各材料以成為表1之組成之方式進行混合,並利用珠磨機混練一晝夜,製成黑矩陣用顏料分散組成物。 <Preparation of Pigment Dispersion for Black Matrix> The materials were mixed as shown in Table 1, and then kneaded overnight using a bead mill to produce a pigment dispersion for black matrix.
[表1]
<黑矩陣用光阻組成物之製作> 使用高速攪拌機,將上述黑矩陣用顏料分散組成物與其他材料(光聚合性化合物、鹼可溶性樹脂、光聚合起始劑及有機溶劑)以成為表2之組成之方式均勻地混合之後,利用孔徑3 μm之過濾器進行過濾,獲得實施例及比較例之黑矩陣用光阻組成物。 <Preparation of Photoresist Components for Black Matrix Applications> Using a high-speed mixer, the above-mentioned black matrix pigment dispersion composition was uniformly mixed with other materials (photopolymerizable compound, alkaline soluble resin, photopolymerization initiator, and organic solvent) as shown in Table 2. The mixture was then filtered using a 3 μm pore size filter to obtain the black matrix photoresist compositions of the embodiments and comparative examples.
<評價試驗> (表面電阻值1) 利用旋轉塗佈機,將實施例及比較例之各黑矩陣用顏料分散光阻組成物以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤之後,利用高壓水銀燈進行曝光(UV累計光量50 mJ/cm 2),進而於230℃進行3小時後烘烤,製成僅由固體部所形成之黑色光阻圖案(黑矩陣)。 藉由本體:微小電流計 R8340、選項:屏蔽箱 R12702A(均為ADVANCE公司製造),對所製成之各黑色光阻圖案之表面電阻值進行測定。將其結果示於表2中。 <Evaluation Test> (Surface Resistance Value 1) Using a rotary coating machine, the pigment-dispersed photoresist compositions of the black matrices of the embodiments and comparative examples were coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm. After pre-baking at 100°C for 2 minutes, they were exposed using a high-pressure mercury lamp (UV cumulative light intensity 50 mJ/ cm² ), and then baked at 230°C for 3 hours to produce black photoresist patterns (black matrices) formed only by the solid portion. The surface resistance values of the produced black photoresist patterns were measured using a micro-current meter R8340 (body) and a shielded box R12702A (optional, both manufactured by ADVANCE). The results are shown in Table 2.
(表面電阻值2) 利用旋轉塗佈機,將實施例及比較例之各黑矩陣用顏料分散光阻組成物以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤之後,利用高壓水銀燈進行曝光(UV累計光量50 mJ/cm 2),進而於230℃進行3小時後烘烤,其後於250℃進行1小時後烘烤,製成僅由固體部所形成之黑色光阻圖案(黑矩陣)。 藉由本體:微小電流計 R8340、選項:屏蔽箱 R12702A(均為ADVANCE公司製造),對所製成之各黑色光阻圖案之表面電阻值進行測定。將其結果示於表2中。 (Surface Resistance Value 2) Using a rotary coating machine, the pigment-dispersed photoresist compositions of each black matrix in the embodiments and comparative examples were coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm. After pre-baking at 100°C for 2 minutes, they were exposed using a high-pressure mercury lamp (UV cumulative light intensity 50 mJ/ cm² ), then baked at 230°C for 3 hours, followed by baking at 250°C for 1 hour, to produce black photoresist patterns (black matrices) formed only by the solid portion. The surface resistance values of each black photoresist pattern were measured using a micro-current meter R8340 (body) and a shielded box R12702A (optional, both manufactured by ADVANCE). The results are shown in Table 2.
(斷點變化) 對於實施例及比較例之各黑矩陣用顏料分散光阻組成物,利用以下方法測定剛製作完後、及於60℃保存1週後之斷點。 利用旋轉塗佈機,將各黑矩陣用顏料分散光阻組成物,以膜厚成為1 μm之方式塗佈於玻璃基板(EAGLE XG)上,於100℃進行2分鐘預烤。 其後,使用具有5 μm、8 μm、10 μm、15 μm、20 μm、30 μm之線圖案之光罩,利用高壓水銀燈以UV累計光量50 mJ/cm 2進行曝光,製成包含曝光部(硬化部)之光阻膜。 繼而,使用0.05%氫氧化鉀水溶液(顯影液),於23℃、1.0 kgf/cm 2之噴淋壓力之條件,測定開始出現顯影圖案之時間斷點。 以剛製作完後之斷點(BP1)、及於60℃保存1週後之斷點(BP2),根據以下之式求出ΔBP(斷點變化)。將其結果示於表2中。 ΔBP=BP2-BP1 (Breakpoint Variation) For the black matrix pigment-dispersed photoresist compositions of the embodiments and comparative examples, the breakpoints were measured immediately after fabrication and after storage at 60°C for one week using the following method. Using a rotary coating machine, each black matrix pigment-dispersed photoresist composition was coated onto a glass substrate (EAGLE XG) with a film thickness of 1 μm, and pre-baked at 100°C for 2 minutes. Subsequently, photomasks with line patterns of 5 μm, 8 μm, 10 μm, 15 μm, 20 μm, and 30 μm were used for exposure using a high-pressure mercury lamp with a UV cumulative light dose of 50 mJ/ cm² , to fabricate a photoresist film including the exposed portion (cured portion). Next, using a 0.05% potassium hydroxide aqueous solution (developer), at a spray pressure of 1.0 kgf/ cm² , the time breakpoint at which the developing pattern began to appear was determined. Using the breakpoint immediately after fabrication (BP1) and the breakpoint after storage at 60°C for one week (BP2), ΔBP (change in breakpoint) was calculated using the following formula. The results are shown in Table 2. ΔBP = BP2 - BP1
[表2]
於使用含有黑色著色劑、銅酞青之磺化物、及環氧化合物之黑矩陣用顏料分散組成物之實施例中,可確認能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化。 又,可確認,藉由滿足上述條件(B),能夠形成表面電阻值較高且即便進行高溫且長時間之後烘烤,其表面電阻值仍不會下降之黑矩陣。 [產業上之可利用性] In an embodiment using a black matrix pigment dispersion containing a black colorant, a copper phthalocyanine sulfonate, and an epoxy compound, it has been confirmed that a black matrix photoresist composition can be obtained that forms a black matrix whose surface resistivity does not decrease even after high-temperature and prolonged baking, and whose breakpoints do not change with storage time. Furthermore, it has been confirmed that by satisfying the above condition (B), a black matrix with a high surface resistivity that does not decrease even after high-temperature and prolonged baking can be formed. [Industrial Applicability]
根據本發明,可提供一種黑矩陣用顏料分散組成物,其能夠獲得一種黑矩陣用光阻組成物,該黑矩陣用光阻組成物可形成即便進行高溫且長時間之後烘烤,其表面電阻值亦不會下降之黑矩陣,並且斷點不會隨著保存時間發生變化。According to the present invention, a black matrix pigment dispersion composition can be provided, which can obtain a black matrix photoresist composition that can form a black matrix whose surface resistance does not decrease even after baking at high temperature for a long time, and whose breakpoints do not change with storage time.
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