TWI903691B - wafer box and its frame - Google Patents

Abstract

A wafer cassette, adapted for housing multiple substrates and for closing a door, includes a recessed housing with an accommodating space, and a frame. The frame is disposed within the housing and adapted for mounting the door, and includes a frame body and at least one abutment. The frame defines an opening that connects the accommodating space to the external environment and accommodates the door. The frame body is mounted on the housing and for stopping the door, and the frame body has at least one retaining groove. The abutment is detachably assembled into the retaining groove and abuts against the door. By detachably assembling the abutment into the corresponding retaining groove, the abutment can be quickly replaced if damaged by impact, thus ensuring the safety of substrate transportation and reducing replacement costs, thereby reducing transportation costs.

Description

wafer box and its frame

This invention relates to a frame, and more particularly to a structurally impact-resistant frame and a wafer housing having the frame.

Substrates used in semiconductor manufacturing processes (such as semiconductor crystal wafers, or simply wafers) need to be kept in a highly clean environment. Therefore, wafer cases used for transporting or storing substrates must not only be able to prevent the substrates from being contaminated by external air, but also have sufficient structural strength to prevent the wafer cases from being damaged in the event of an impact.

In today's semiconductor industry, to ensure wafer cassettes are heavy-duty and impact-resistant, and to prevent contamination from airborne particles, moisture, or other impurities, injection molding is often used to create one-piece wafer cassettes. The interior of the wafer cassette can hold multiple substrates, and a frame at the front of the casing is designed to house a door. This door seals off a space defined by the casing, preventing airborne particles, moisture, or other impurities from entering and securing the substrates inside the casing to prevent them from sliding out through a connection between the space and the outside of the casing.

However, wafer cassettes are frequently subjected to collisions during transport, or occasionally fall. The frame is most susceptible to impacts with other wafer cassettes, walls, floors, etc., causing cracks or even breakage of the frame and door. Besides the impact force potentially damaging the substrate, the fine debris from the cracked frame and door falling onto the substrate can also affect its quality, potentially leading to complete substrate damage. Furthermore, a broken frame requires replacement of the entire assembly, increasing transportation costs.

Therefore, ensuring the safety of substrate transportation, preventing the substrate from being affected by impurities, and reducing transportation costs have become important issues.

Therefore, one of the objectives of this invention is to provide a framework that can overcome at least one of the shortcomings of the prior art.

Therefore, the frame of the present invention is adapted to be disposed in a shell and for mounting a door, and includes a frame and at least one abutment. The frame is used to be mounted on the shell and to stop the door, and the frame is formed with at least one retaining groove. The at least one abutment is detachably assembled into the retaining groove and used to abut against the door.

In some embodiments, the frame includes four corner portions spaced apart from each other, and the frame includes four abutments that are detachably assembled to the corner portions.

In some embodiments, each of the abutting members has an engagement plate engaged with the corresponding corner portion, and a plurality of abutting blocks protruding from the engagement plate for abutting against the door body.

In some embodiments, the connecting plate has a flat plate, a vertical plate, and a curved plate. The flat plate extends in a left-right direction and has a flat inner plate surface. The vertical plate extends in a vertical direction perpendicular to the left-right direction and has a vertical inner plate surface. The curved plate is integrally connected between the flat plate and the vertical plate. The abutment blocks are integrally protruding from the flat inner plate surface and the vertical inner plate surface, respectively.

In some embodiments, each of the abutting blocks extends in a front-back direction perpendicular to the up-down direction and has an abutting ramp for abutting against the door body, the abutting ramp extending obliquely from front to back and away from the joint plate.

In some embodiments, each of the corner portions is a retaining groove, and each of the abutments has a connecting plate for engaging with the corresponding corner portion.

In some embodiments, the connecting plate has a flat plate, a vertical plate, and a curved plate. The flat plate extends in a left-right direction and has a first slot for engaging the frame. The vertical plate extends in a right-up direction perpendicular to the left-right direction and has a second slot for engaging the frame. The curved plate is integrally connected between the flat plate and the vertical plate.

In some embodiments, the frame has four side plates spaced apart from each other, two of which are spaced apart along the left-right direction, and the other two are spaced apart along a vertical direction perpendicular to the left-right direction. The first slot and the second slot are respectively for engaging the corresponding side plate.

In some embodiments, the frame also has a front panel and a rear panel, which are spaced apart along a front-to-back direction perpendicular to the vertical direction. The rear panel is used to block the door. The front panel, the rear panel, and two adjacent side panels together define the corresponding corner.

In some embodiments, the frame also includes a plurality of screws, the connecting plate having a locking hole, and the rear plate having a through hole corresponding to the locking hole, with each screw passing through the corresponding through hole and screwed into the corresponding locking hole.

In some embodiments, the frame is made of metal and the abutment is made of plastic.

Another objective of this invention is to provide a wafer cassette that overcomes at least one of the shortcomings of the prior art.

Therefore, the wafer case of the present invention is adapted to provide a door cover and includes a housing and a frame as described above. The housing is recessed to form an accommodating space. The frame is mounted on the housing and defines an opening that connects the accommodating space to the external environment and serves to accommodate the door.

The present invention has the following advantages: by detachably assembling the at least one abutment member into the corresponding retaining groove, the abutment member can be quickly replaced when it is damaged by collision, so as to ensure the safety of the substrate transportation and reduce the replacement cost, thereby reducing the transportation cost.

Referring to Figures 1 and 2, an embodiment of the wafer cassette 100 of the present invention is shown, which is suitable for housing multiple substrates 92 and for closing a door 91.

For ease of subsequent explanation, a left-right direction X, a vertical direction Y perpendicular to the left-right direction X, and a front-back direction Z perpendicular to both the left-right direction X and the vertical direction Y are defined in the wafer cell of this invention. In Figure 1, the left-right direction X is defined as right (pointed to the right) and left (opposite to the left). The vertical direction Y is defined as up (pointed to the up) and down (opposite to the down). The front-back direction Z is defined as forward (pointed to the forward) and backward (opposite to the backward).

Each of the substrates 92 is, for example, a semiconductor crystal wafer, or simply a wafer, but is not limited thereto. Each of the substrates 92 may also be, for example, a silicon wafer, a gallium nitride wafer, or a silicon carbide wafer, but is not limited thereto.

In this embodiment, the door 91 is made of plastic material, but is not limited thereto. The door 91 is used to close the wafer cassette 100 to prevent the substrates 92 from sliding out and to block external impurities from entering the wafer cassette 100.

The wafer pod 100 is a front-opening unified pod (FOUP) and includes a housing 1 and a frame 2 disposed on the housing 1.

The shell 1 is recessed to form an accommodating space 3 suitable for placing the substrates 92.

Referring to Figures 2, 3, and 4, the frame 2 is disposed on the housing 1 and adapted for mounting the door 91. The frame 2 includes a frame body 4, four abutment members 5, and multiple screws 6. The frame 2 defines an opening 7 that connects the receiving space 3 to the external environment and serves to accommodate the door 91. In this embodiment, the frame 2 is fixedly connected to the front end of the housing 1, for example, by welding. In other embodiments, the frame 2 may also be integrally formed with the housing 1, and the manner in which the frame 2 is disposed on the housing 1 is not limited to this embodiment.

The frame 4 is made of metal and is installed on the shell 1 to block the door 91. The frame 4 is made of metal to enhance its impact resistance and will not produce fine debris when the frame 4 is impacted, thereby improving the safety of transporting the substrates 92 and preventing the substrates 92 from being affected by impurities. The frame 4 has a front panel 41, a rear panel 42, four side panels 43 spaced apart from each other, and four corner panels 44 spaced apart from each other.

The front panel 41 and the rear panel 42 are spaced apart along the front-rear direction Z. The rear panel 42 is used to block the door body 91. The side panels 43 are connected between the front panel 41 and the rear panel 42 and are spaced apart from each other. Two of the side panels 43 are spaced apart along the left-right direction X. The other two side panels 43 are spaced apart along the up-down direction Y. The front panel 41, the rear panel 42, and the two adjacent side panels 43 together define the corresponding corner portions 44. Each corner portion 44 is a retaining groove. The area enclosed by the front panel 41 in the plane perpendicular to the front-rear direction Z is larger than the door body 91, so that an operator can use the front panel 41 to align the door body 91 and insert the door body 91 into the opening 7 along the front panel 41.

Referring to Figures 2, 4, and 5, the rear plate portion 42 has an upper plate segment 421, a lower plate segment 422 opposite to and spaced from the upper plate segment 421, a right plate segment 423 connecting the right end of the upper plate segment 421 and the right end of the lower plate segment 422, a left plate segment 424 connecting the left end of the upper plate segment 421 and the left end of the lower plate segment 422 and spaced from the right plate segment 423, a first protrusion 425 protruding downward from the bottom end of the upper plate segment 421, and a plurality of second protrusions 426 protruding to the left from the right plate segment 423 and to the right from the left plate segment 424, spaced apart from each other. The first protrusion 425 is located at the center of the upper plate segment 421 in the left-right direction X. The number of the second protrusions 426 is four for example. Two of the second tabs 426 are connected to the right plate segment 423 at intervals and are located near the center of the right plate segment 423 in the vertical direction Y. The other two of the second tabs 426 are connected to the left plate segment 424 at intervals and are located near the center of the left plate segment 424 in the vertical direction Y. The upper plate segment 421 is connected to the upper side of the shell 1, and the first tab 425 is connected to a recess on the upper side of the shell 1. The lower plate segment 422 is connected to the lower side of the shell 1. The right plate segment 423 is connected to the right side of the shell 1, and the second tabs 426 connected to the right plate segment 423 are connected to two recesses on the right side of the shell 1. The left plate segment 424 is connected to the left side of the shell 1, and the second protrusions 426 connected to the left plate segment 424 are connected to two recesses on the left side of the shell 1. The rear plate portion 42 is used to block the door 91, so that the door 91 can be placed in the opening 7 without entering the receiving space 3. The first protrusion 425 and the second protrusions 426 are used to match the shape of the shell 1, so that the frame 4 can be completely fitted to the shell 1, which facilitates welding the frame 4 to the shell 1 or makes it easier to integrally form the frame 4 and the shell 1, thereby reducing the difficulty of assembling or manufacturing the shell 1 and the frame 4.

Referring to Figures 4 and 6, the rear plate portion 42 has two through holes 427 corresponding to each of the corner portions 44. Specifically, the upper plate portion 421 has two through holes 427 corresponding to one of the adjacent corner portions 44, and the upper plate portion 421 has two more through holes 427 corresponding to another adjacent corner portion 44. The lower plate portion 422 has two through holes 427 corresponding to one of the adjacent corner portions 44, and the lower plate portion 422 has two through holes 427 corresponding to another adjacent corner portion 44.

Referring to Figures 2 and 4, the side panels 43 can restrict the up, down, left, and right movement of the door 91, and prevent the door 91 from separating from the frame 2 along a plane perpendicular to the front-back direction Z when the frame 2 is hit.

Referring to Figures 2, 4, and 6, the abutment members 5 are detachably assembled to the corner portions 44 (i.e., the retaining grooves). The abutment members 5 are made of plastic and are used to abut against the door body 91. Each abutment member 5 has an engaging plate 51 that engages with the corresponding corner portion 44, and two abutment blocks 52 protruding from the engaging plate 51 for abutting against the door body 91.

When the door 91 closes onto the wafer cassette 100, the door 91 is placed inside the opening 7 and abuts against the abutting members 5. Since the door 91 is made of plastic, if the abutting members 5 are made of non-plastic material (e.g., metal), and the door 91 abuts against the abutting members 5, when the wafer cassette 100 encounters, for example, shaking or slight vibration during transportation, the door 91 and the abutting members 5 will rub against each other due to the different materials, resulting in wear and tear. This will create gaps and fine impurities. These fine impurities, airborne particles, moisture, or other impurities can easily enter the receiving space 3 through the gaps created by the wear of the door 91 and the abutting members 5, thus affecting the quality of the substrates 92. Therefore, the abutment 5 is made of plastic material, which can effectively reduce the wear caused by friction between the abutment 5 and the door body 91, and prevent the substrate 92 from being affected by impurities.

Referring to Figures 6 and 7, each of the connecting plates 51 is fitted into the corresponding corner portion 44. Each connecting plate 51 has a flat plate 53, a vertical plate 54, and a curved plate 55. The flat plate 53 extends along the left-right direction X and has a flat inner plate surface 531. The flat plate 53 forms a first slot 532 for engaging with the frame 4 and two locking holes 56. Each locking hole 56 communicates with a corresponding through hole 427. The vertical plate 54 extends along the up-down direction Y and has a vertical inner plate surface 541. The vertical plate 54 forms a second slot 542 for engaging with the frame 4. The curved plate 55 is integrally connected between the flat plate 53 and the vertical plate 54.

The first slot 532 and the second slot 542 are respectively engaged with the corresponding side plate portion 43. Each of the screws 6 passes through the corresponding through hole 427 and is screwed into the corresponding locking hole 56 to lock each of the abutment members 5 to the frame body 4 so that the abutment member 5 can be securely and detachably disposed at the corresponding corner portion 44.

Referring to Figures 2 and 7, the abutting blocks 52 of each abutting member 5 are integrally protruding from the flat inner plate surface 531 and the vertical inner plate surface 541, respectively. Each abutting block 52 extends along the front-rear direction Z and has an abutting slope 57 for abutting against the door body 91. The abutting slope 57 extends obliquely from front to back and in a direction away from the connecting plate 51.

Specifically, each of the abutment blocks 52 protrudes gradually from front to back and away from the flat inner panel 531 or the vertical inner panel 541, forming the abutment slope 57. This allows the door 91 to move along the abutment slope 57 and be guided into position when inserted into the opening 7, thereby positioning the door 91 at the rear end of the abutment slope 57 and abutting against the rear panel 42. This improves the ease and stability of assembling the door 91, as well as the sealing between the door 91 and the wafer cassette 100, thereby protecting the substrates 92 from impurities and maintaining their quality.

In summary, by detachably assembling each of the abutment members 5 to the corresponding corner portion 44, when one of the abutment members 5 is damaged by a collision, the frame 2 can continue to be used by quickly replacing the other abutment member 5 without replacing the entire frame 2. This ensures the safe transport of the substrates 92 and reduces replacement costs, thereby reducing transport costs. Therefore, the purpose of this cost-effective invention is indeed achieved.

However, the above description is merely an example of the present invention and should not be used to limit the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification shall still fall within the scope of the present invention.

100: Wafer Case 1: Casing 2: Frame 3: Reception Space 4: Frame 41: Front Panel 42: Rear Panel 421: Upper Panel 422: Lower Panel 423: Right Panel 424: Left Panel 425: First Protrusion 426: Second Protrusion 427: Through Hole 43: Side Panel 44: Corner 5: Abutting Member 51: Connecting Plate 52: Abutting Block 53: Flat Plate 531: Flat Inner Plate Surface 532: First Slot 54: Vertical Plate 541: Vertical Inner Plate Surface 542: Second Slot 55: Curved Plate 56: Lock Hole 57: Abutting Surface 6: Screw 7: Opening X: Left/Right Direction Y: Up/Down Direction Z: Front/Back Direction 91: Door Body 92: Base Plate

Other features and effects of the present invention will be clearly shown in the embodiments with reference to the drawings, wherein: Figure 1 is a perspective view of an embodiment of the wafer cassette of the present invention; Figure 2 is an exploded perspective view illustrating the assembly relationship between a housing, a frame, and a door body of the embodiment; Figure 3 is a perspective view of the frame of the embodiment; Figure 4 is an exploded perspective view of the frame of the embodiment, illustrating the assembly relationship between a frame body, a front panel, a side panel, a rear panel, and four abutting members of the frame body; Figure 5 is a front view of the frame of the embodiment, illustrating that the rear panel has a first tab and a plurality of second tabs; Figure 6 is an incomplete exploded perspective view of the frame of the embodiment, illustrating the relative relationship between one of the abutting members and a corresponding corner portion; and Figure 7 is an incomplete exploded perspective view of the frame of this embodiment, illustrating the assembly relationship between one of the abutment members and the frame.

100: Wafer Box

1: Shell

2: Framework

4: Frame

41: Front panel section

43: Side panel

5: Attachment

X: Left/Right direction

Y: Up/Down direction Y: Up/Down direction ...

Z: Forward/Backward Direction

91: Door Body

Claims (7)

A frame suitable for mounting on a housing and for mounting a door, the frame comprising: a frame body for mounting on the housing and for stopping the door, the frame body including four spaced-apart corner portions, each corner portion being a retaining groove; and Four abutment members are detachably assembled at the corner portions and used to abut against the door body. Each abutment member has a connecting plate engaged with the corresponding corner portion and multiple abutment blocks protruding from the connecting plate for abutting against the door body. The connecting plate has a flat plate, a vertical plate, and a curved plate. The flat plate extends in a left-right direction and has a flat inner surface. The vertical plate extends in a vertical direction perpendicular to the left-right direction and has a vertical inner surface. The curved plate is integrally connected between the flat plate and the vertical plate. The abutment blocks are integrally protruding from the flat inner surface and the vertical inner surface, respectively. The frame as described in claim 1, wherein each of the abutment blocks extends in a front-back direction perpendicular to the up-down direction and has an abutment ramp for abutting against the door body, the abutment ramp extending obliquely from front to back and away from the joint plate. A frame suitable for mounting on a housing and for mounting a door, the frame comprising: a frame body for mounting on the housing and for stopping the door, the frame body including four spaced-apart corner portions, each corner portion being a retaining groove; and Four abutments are detachably assembled at the corner portions and used to abut against the door body. Each abutment has a connecting plate for engaging with the corresponding corner portion. The connecting plate has a flat plate, a vertical plate, and a curved plate. The flat plate extends in a left-right direction and has a first slot for engaging with the frame. The vertical plate extends in a vertical direction perpendicular to the left-right direction and has a second slot for engaging with the frame. The curved plate is integrally connected between the flat plate and the vertical plate. The frame has four side plates spaced apart from each other. Two of the side plates are spaced apart in the left-right direction, and the other two are spaced apart in a vertical direction perpendicular to the left-right direction. The first slot and the second slot are each for engaging with the corresponding side plate. The frame as described in claim 3, wherein the frame further has a front panel and a rear panel, the front panel and the rear panel being spaced apart along a front-to-back direction perpendicular to the up-down direction, the rear panel being used to block the door, and the front panel, the rear panel and two adjacent side panels together defining the corresponding corner portion. The frame as described in claim 4, wherein the frame further includes a plurality of screws, the connecting plate having a locking hole, the rear plate having a through hole corresponding to the locking hole, and each screw passing through the corresponding through hole and screwed into the corresponding locking hole. The frame as described in any one of claims 1 to 5, wherein the frame body is made of metal and the abutment is made of plastic. A wafer enclosure adapted for closing a door, the wafer enclosure comprising: a housing with a recess forming a receiving space; and a frame as described in any one of claims 1 to 6, the frame having a body disposed within the housing, the frame defining an opening that communicates the receiving space with an external environment and serves to receive the door.