TWI903150B - Surface-treated copper foil, copper-clad laminates, and printed circuit boards - Google Patents
Surface-treated copper foil, copper-clad laminates, and printed circuit boardsInfo
- Publication number
- TWI903150B TWI903150B TW112112270A TW112112270A TWI903150B TW I903150 B TWI903150 B TW I903150B TW 112112270 A TW112112270 A TW 112112270A TW 112112270 A TW112112270 A TW 112112270A TW I903150 B TWI903150 B TW I903150B
- Authority
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- Prior art keywords
- copper foil
- treated copper
- treated
- layer
- substrate
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
- C25D5/14—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/16—Electroplating with layers of varying thickness
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2311/00—Metals, their alloys or their compounds
- B32B2311/12—Copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Laminated Bodies (AREA)
- Electroplating Methods And Accessories (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
本發明提供一種表面處理銅箔,其電路加工性優異,不易產生傳輸損失和發生異物的情形。當依據ISO25178規定的方法來測定表面處理銅箔(30)的表面處理層(20)的表面(20a)的光學式粗糙度時,算術平均粗糙度Sa為0.04μm以上且0.30μm以下。在表面處理銅箔(30)的表面處理層(20)上貼合樹脂製構件(40)後,藉由蝕刻去除表面處理銅箔(30),對於剩餘的樹脂製構件(40)的貼合過表面處理銅箔(30)之表面即轉印表面(40a),依據JIS R3257:1999規定的固著液滴法來測定蒸餾水的接觸角θ 1。對於與表面處理銅箔(30)貼合前的樹脂製構件(40)的之後要與表面處理銅箔(30)貼合之表面即非轉印表面,依據固著液滴法來測定蒸餾水的接觸角θ 0。接觸角θ 0與θ 1的差值θ 0-θ 1為5°以上且35°以下。 This invention provides a surface-treated copper foil with excellent circuit machinability and is not prone to transmission loss or foreign matter formation. When the optical roughness of the surface (20a) of the surface-treated layer (20) of the surface-treated copper foil (30) is measured according to the method specified in ISO25178, the arithmetic mean roughness Sa is ≥0.04 μm and ≤0.30 μm. After a resin component (40) is bonded to the surface treatment layer (20) of a surface-treated copper foil (30), the surface-treated copper foil (30) is removed by etching. The remaining surface of the resin component (40) that was bonded to the surface-treated copper foil (30), i.e., the transfer surface (40a), is used to measure the contact angle θ1 of the distilled water according to the fixation drop method specified in JIS R3257:1999. The non-transfer surface is used to measure the contact angle θ0 of the distilled water according to the fixation drop method. The difference between the contact angles θ0 and θ1 , θ0 - θ1, is greater than 5° and less than 35°.
Description
本發明有關一種表面處理銅箔、以及使用了該表面處理銅箔之覆銅積層板及印刷線路板,該表面處理銅箔能夠適合用於印刷線路板等的製造。The present invention relates to a surface-treated copper foil, and copper-clad laminates and printed circuit boards using the surface-treated copper foil, which is suitable for use in the manufacture of printed circuit boards and the like.
近年來訊號的高頻化進展,對於電子機器中搭載的印刷線路板傳輸高頻訊號的情形正在增加。因此,關於作為印刷線路板的材料使用的表面處理銅箔,正在研究將表面製成低粗糙度,以減少高頻訊號的傳輸損失(例如參照專利文獻1)。 又,伴隨印刷線路板的高密度構裝化、多功能化,電路的微細線路化亦正在進展。為了形成微細配線而要求電路加工性良好的表面處理銅箔,正在研究表面製成低粗糙度,以提升電路加工性(例如參照專利文獻2)。又,此外,亦正在研究對銅箔進行表面處理之金屬的設計(例如參照專利文獻3)、及轉印至樹脂的表面之凹凸的形狀的設計(例如參照專利文獻4、5)等要因。 [先前技術文獻] (專利文獻) Recent advancements in signal transmission speed have led to an increase in the use of printed circuit boards (PCBs) in electronic devices to transmit high-frequency signals. Therefore, research is underway to develop low-roughness surfaces for surface-treated copper foil used in PCBs to reduce high-frequency signal transmission losses (see, for example, Patent 1). Furthermore, with the increasing density and multifunctionality of PCBs, the miniaturization of circuits is also progressing. Research is being conducted on surface-treated copper foils requiring good circuit machinability for forming fine wiring, aiming to improve circuit machinability (see, for example, Patent 2). Furthermore, the design of the metal used for surface treatment of copper foil (e.g., see Patent 3) and the design of the uneven shape of the surface transferred to the resin (e.g., see Patents 4 and 5) are also being studied. [Prior Art Documents] (Patent Documents)
專利文獻1:日本國專利公開公報2019年第210521號 專利文獻2:日本國專利公開公報2017年第20117號 專利文獻3:日本國專利公開公報2019年第81913號 專利文獻4:日本國專利公報第6945523號 專利文獻5:國際公開第2020/105289號 Patent Document 1: Japanese Patent Publication No. 210521, 2019 Patent Document 2: Japanese Patent Publication No. 20117, 2017 Patent Document 3: Japanese Patent Publication No. 81913, 2019 Patent Document 4: Japanese Patent Publication No. 6945523 Patent Document 5: International Publication No. 2020/105289
[發明所欲解決的問題][The problem the invention aims to solve]
然而,即使減少表面處理銅箔的表面粗糙度,有時仍無法獲得目標的微細線路。以往,作為表示電路加工性的指標,廣泛使用了由電路的底部寬度、頂部寬度及高度求得的蝕刻因子,但是已知除此之外,電路的底部端部的切線的角度亦很重要。亦即,即使蝕刻因子以往是被評估為良好之數值,如果電路的底部端部的切線的角度較小(亦即,電路的底部寬度大於頂部寬度,電路的剖面成為下端擴大之形狀),則有時會發生遷移,而有電路的底部端部的切線的角度越小越容易發生遷移的傾向,該遷移預計是以微觀來看時的電路的端部的界面的蝕刻不良所造成。However, even with reduced surface roughness of the surface-treated copper foil, it is sometimes impossible to obtain the desired fine lines. Previously, the etching factor, derived from the bottom width, top width, and height of the circuit, was widely used as an indicator of circuit machinability. However, it is now known that the angle of the tangent at the bottom edge of the circuit is also important. That is, even if the etching factor was previously considered a good value, migration can sometimes occur if the angle of the tangent at the bottom edge of the circuit is small (i.e., the bottom width of the circuit is greater than the top width, resulting in a cross-section that widens at the bottom). The smaller the angle of the tangent at the bottom edge of the circuit, the more prone it is to migration, which is expected to be caused by poor etching at the interface of the circuit's ends when viewed microscopically.
進一步,在本發明人的研究中減少了表面處理銅箔的表面粗糙度,結果發現下述新的問題:對覆銅積層板的表面處理銅箔進行蝕刻並加以去除後,在將樹脂製基材加以積層來製造印刷線路板之步驟中,構成覆銅積層板的樹脂製基材與之後積層的樹脂製基材之間變得容易發生異物。 本發明的目的在於提供一種表面處理銅箔、覆銅積層板、及印刷線路板,該等的電路加工性優異,並且不易產生傳輸損失及發生異物的情形。 [解決問題的技術手段] Furthermore, in the inventors' research, the surface roughness of the surface-treated copper foil was reduced. However, a new problem was discovered: after etching and removing the surface-treated copper foil from the copper-clad laminate, during the step of manufacturing a printed circuit board by laminating a resin substrate, foreign matter easily forms between the resin substrate constituting the copper-clad laminate and the subsequently laminated resin substrate. The purpose of this invention is to provide a surface-treated copper foil, a copper-clad laminate, and a printed circuit board, which exhibit excellent circuit machinability and are less prone to transmission loss and foreign matter formation. [Technical Means for Solving the Problem]
依據本發明的一態樣的表面處理銅箔的要點在於,具有:銅箔基體;及,表面處理層,其形成於銅箔基體的至少一面;其中,表面處理層由粗糙化處理層和防鏽處理層的一者或兩者所構成,當依據ISO25178規定的方法來測定表面處理層的表面的光學式粗糙度時,算術平均粗糙度Sa為0.04μm以上且0.30μm以下,在表面處理銅箔的表面處理層上貼合樹脂製構件後,藉由蝕刻去除表面處理銅箔,對於剩餘的樹脂製構件的與表面處理銅箔貼合過的表面即轉印表面,依據JIS R3257:1999規定的固著液滴法來測定蒸餾水的接觸角θ 1,並且對於與表面處理銅箔貼合前的樹脂製構件的之後要與表面處理銅箔貼合之表面即非轉印表面,依據固著液滴法來測定蒸餾水的接觸角θ 0時,接觸角θ 0與θ 1的差值θ 0-θ 1為5°以上且35°以下。 The key features of one aspect of the surface-treated copper foil according to the present invention are: a copper foil substrate; and a surface treatment layer formed on at least one side of the copper foil substrate; wherein the surface treatment layer is composed of one or both of a roughening treatment layer and a rust-proof treatment layer, and when the optical roughness of the surface of the surface treatment layer is measured according to the method specified in ISO 25178, the arithmetic mean roughness Sa is 0.04 μm or more and 0.30 μm or less; after a resin component is bonded to the surface treatment layer of the surface-treated copper foil, the surface-treated copper foil is removed by etching, and the remaining surface of the resin component that was bonded to the surface-treated copper foil is the transfer surface, according to JIS... R3257:1999 specifies the fixed droplet method for determining the contact angle θ1 of distilled water. For the surface of a resin component to be bonded to the surface-treated copper foil before bonding, i.e., the non-transfer surface, when the contact angle θ0 of distilled water is determined by the fixed droplet method, the difference between the contact angle θ0 and θ1 , θ0 - θ1 , is greater than 5° and less than 35°.
依據本發明的另一態樣的覆銅積層板的要點在於,具備:依據上述一態樣的表面處理銅箔;及,樹脂製基材,其貼合於表面處理銅箔的表面處理層上。 依據本發明的又一態樣的印刷線路板的要點在於,具備依據上述另一態樣的表面處理銅箔。 [發明的功效] The key feature of another aspect of the copper-clad laminate according to the invention is that it comprises: a surface-treated copper foil according to the first aspect described above; and a resin substrate bonded to the surface-treated layer of the surface-treated copper foil. The key feature of yet another aspect of the printed circuit board according to the invention is that it comprises a surface-treated copper foil according to the second aspect described above. [Effects of the Invention]
根據本發明,電路加工性優異,並且不易產生傳輸損失及發生異物的情形。According to the present invention, the circuit has excellent processability and is not prone to transmission loss or foreign object occurrence.
說明本發明的一實施形態。再者,以下說明的實施形態是示出本發明的一例。又,能夠對本實施形態施加各種變更或改良,施加這樣的變更或改良而得的形態亦能夠包括在本發明內。 為了解決上述問題,本發明人著眼於製造覆銅積層板和印刷線路板時使用的樹脂製基材的表面的溼潤性,並專心實行研究。一面參照圖1、2、3一面於下文進行詳細説明。 This section describes one embodiment of the invention. Furthermore, the embodiment described below is an example illustrating the invention. Also, various modifications or alterations can be made to this embodiment, and forms obtained by such modifications or alterations can also be included within the scope of the invention. To solve the above problems, the inventors focused on the surface wettability of resin-based substrates used in the manufacture of copper-clad laminates and printed circuit boards, and conducted focused research. This will be described in detail below with reference to Figures 1, 2, and 3.
印刷線路板60的製造步驟中具有:貼合步驟,將表面處理銅箔30與樹脂製基材40加以貼合來製造覆銅積層板50(參照圖3的(b));及,蝕刻步驟,藉由使用了蝕刻液之蝕刻來去除覆銅積層板50的表面處理銅箔30之中的作為電路31的部分以外的不需要的部分(參照圖3的(c))。在貼合步驟中,將樹脂製基材40貼合在表面處理銅箔30的表面處理層20上(參照圖3的(a))。The manufacturing steps of the printed circuit board 60 include: a bonding step, in which a surface-treated copper foil 30 is bonded to a resin substrate 40 to manufacture a copper-clad laminate 50 (see FIG. 3(b)); and an etching step, in which unwanted portions of the surface-treated copper foil 30 of the copper-clad laminate 50 other than those used as circuits 31 are removed by etching with an etching solution (see FIG. 3(c)). In the bonding step, the resin substrate 40 is bonded to the surface-treated layer 20 of the surface-treated copper foil 30 (see FIG. 3(a)).
此時,在蝕刻後剩餘的樹脂製基材40的表面之中的與表面處理銅箔30貼合過的表面上轉印有貼合過的表面處理銅箔30的表面處理層20的表面20a的形狀。亦即,樹脂製基材40的與表面處理銅箔30貼合過的表面成為貼合過的表面處理銅箔30的表面的轉印表面(replica)40a。At this time, the shape of the surface treatment layer 20a of the surface-treated copper foil 30 is transferred onto the surface of the resin substrate 40 remaining after etching, on the surface that was bonded to the surface-treated copper foil 30. That is, the surface of the resin substrate 40 that was bonded to the surface-treated copper foil 30 becomes the transfer surface (replica) 40a of the surface of the surface-treated copper foil 30.
根據本發明人的研究,發現隨著表面處理銅箔30的表面粗糙度變小,樹脂製基材40的轉印表面40a的表面粗糙度亦變小,轉印表面40a的溼潤性變低。認為如果樹脂製基材40的表面的溼潤性較低,則蝕刻過程中蝕刻液變得不易遍及到樹脂製基材40上的電路31(藉由蝕刻而殘留的表面處理銅箔30)的端部(電路31的線路寬度方向的端部),因此電路加工性下降。蝕刻液是否遍及到電路31的端部,尤其對於電路31的底部端部31b(電路31的端部之中的與樹脂製基材40鄰接的部分(參照圖2))的加工性而言是重要因素。According to the inventors' research, it was found that as the surface roughness of the surface-treated copper foil 30 decreases, the surface roughness of the transfer surface 40a of the resin substrate 40 also decreases, and the wettability of the transfer surface 40a decreases. It is believed that if the surface wettability of the resin substrate 40 is low, the etching solution becomes less likely to reach the ends (the ends in the line width direction of the circuit 31) of the circuit 31 (the surface-treated copper foil 30 remaining after etching) on the resin substrate 40 during the etching process, thus reducing the circuit machinability. Whether the etching solution reaches the ends of the circuit 31, especially the bottom end 31b of the circuit 31 (the portion of the end of the circuit 31 adjacent to the resin substrate 40 (see Figure 2)), is an important factor for the machinability.
又,印刷線路板60的製造步驟中具有清洗步驟,該清洗步驟是在蝕刻步驟後以清洗液對於具有電路31之樹脂製基材40進行清洗,如果樹脂製基材40的表面的溼潤性較低,則清洗液不易遍及樹脂製基材40的整個表面,因而可能無法以清洗液對於存在於樹脂製基材40或電路31上的異物100充分地進行清洗(參照圖3的(c))。然後,清洗步驟後在具有電路31之樹脂製基材40的形成有電路31的面貼合另一樹脂製基材41來製造印刷線路板60,如果清洗步驟中的異物100的清洗不充分,則所貼合的2個樹脂製基材40、41之間會有異物100殘留(參照圖3的(d))。Furthermore, the manufacturing process of the printed circuit board 60 includes a cleaning step, which involves cleaning the resin substrate 40 containing the circuit 31 with a cleaning solution after the etching step. If the surface wettability of the resin substrate 40 is low, the cleaning solution may not be able to cover the entire surface of the resin substrate 40, and thus the foreign matter 100 present on the resin substrate 40 or the circuit 31 may not be able to be adequately cleaned with the cleaning solution (see Figure 3(c)). Then, after the cleaning step, another resin substrate 41 is bonded to the side of the resin substrate 40 with the circuit 31 to manufacture the printed circuit board 60. If the foreign matter 100 is not cleaned sufficiently in the cleaning step, there will be foreign matter 100 residue between the two bonded resin substrates 40 and 41 (see Figure 3(d)).
亦即,本發明人的研究發現,如果樹脂製基材40的表面的溼潤性較低,則印刷線路板60上容易產生異物100。再者,作為異物100,存在有:貼合前已附著於表面處理銅箔30或樹脂製基材40上的附著物、蝕刻液中含有的鹽的凝固物等。In other words, the inventors' research found that if the surface wettability of the resin substrate 40 is low, foreign matter 100 is easily generated on the printed circuit board 60. Furthermore, foreign matter 100 includes: deposits that were already attached to the surface-treated copper foil 30 or the resin substrate 40 before bonding, and solidified salts contained in the etching solution.
如以上所述,本發明人發現蝕刻步驟後的樹脂製基材40的轉印表面40a的溼潤性在印刷線路板60的製造中是非常重要的因素。又,本發明人發現能夠藉由依據日本工業標準(JIS)R3257:1999規定的固著液滴法(sessile drop method)所測得的蒸餾水的接觸角來評估蝕刻步驟後的樹脂製基材40的轉印表面40a的溼潤性。As described above, the inventors have discovered that the wettability of the transfer surface 40a of the resin substrate 40 after the etching step is a very important factor in the manufacture of the printed circuit board 60. Furthermore, the inventors have discovered that the wettability of the transfer surface 40a of the resin substrate 40 after the etching step can be evaluated by measuring the contact angle of distilled water according to the sessile drop method specified in Japanese Industrial Standard (JIS) R3257:1999.
亦即,依據本實施形態的表面處理銅箔30具有:銅箔基體10;及,表面處理層20,其形成於銅箔基體10的至少一面;其中,表面處理層20由粗糙化處理層21和防鏽處理層22的一者或兩者所構成(參照圖1)。再者,圖1中示出表面處理銅箔30的例,其中,僅在銅箔基體10的其中一面形成有表面處理層20,並且表面處理層20由粗糙化處理層21和防鏽處理層22的兩者所構成。 而且,當依據ISO25178規定的方法來測定表面處理銅箔30的表面處理層20的表面20a的光學式粗糙度時,算術平均粗糙度Sa為0.04μm以上且0.30μm以下。 That is, the surface-treated copper foil 30 according to this embodiment has: a copper foil substrate 10; and a surface treatment layer 20 formed on at least one side of the copper foil substrate 10; wherein the surface treatment layer 20 is composed of one or both of a roughening treatment layer 21 and a rust-proof treatment layer 22 (see FIG. 1). Furthermore, FIG. 1 shows an example of the surface-treated copper foil 30, wherein the surface treatment layer 20 is formed only on one side of the copper foil substrate 10, and the surface treatment layer 20 is composed of both the roughening treatment layer 21 and the rust-proof treatment layer 22. Furthermore, when the optical roughness of the surface 20a of the surface treatment layer 20 of the surface-treated copper foil 30 is measured according to the method specified in ISO 25178, the arithmetic mean roughness Sa is 0.04 μm or more and 0.30 μm or less.
又,將製造覆銅積層板50和印刷線路板60時使用的樹脂製基材40(相當於作為本發明的構成要件的「樹脂製構件」)貼合在表面處理銅箔30的表面處理層20上之後,藉由蝕刻去除表面處理銅箔30,對於剩餘的樹脂製基材40的轉印表面40a,測定蒸餾水的接觸角θ 1(以下亦有時記載為「銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1」)。樹脂製基材40的轉印表面40a是樹脂製基材40的表面之中與表面處理銅箔30貼合過的表面。 Furthermore, after the resin substrate 40 (equivalent to the "resin component" that is a constituent element of the present invention) used in manufacturing the copper-clad laminate 50 and the printed circuit board 60 is bonded to the surface treatment layer 20 of the surface-treated copper foil 30, the surface-treated copper foil 30 is removed by etching, and the contact angle θ1 of the distilled water on the remaining transfer surface 40a of the resin substrate 40 is measured (hereinafter sometimes referred to as "the contact angle θ1 of the distilled water on the transfer surface after copper foil etching"). The transfer surface 40a of the resin substrate 40 is the surface of the resin substrate 40 that has been bonded to the surface-treated copper foil 30.
進一步,對於與表面處理銅箔30貼合前的樹脂製基材40的非轉印表面,測定蒸餾水的接觸角θ 0(以下亦有時記載為「銅箔貼合前的非轉印表面的蒸餾水接觸角θ 0」)。樹脂製基材40的非轉印表面是與表面處理銅箔30貼合前的樹脂製基材40的表面之中的之後要與表面處理銅箔30貼合之表面。 Furthermore, the contact angle θ0 of the distilled water is measured on the non-transfer surface of the resin substrate 40 before it is bonded to the surface-treated copper foil 30 (hereinafter sometimes referred to as "the contact angle θ0 of the distilled water on the non-transfer surface before bonding with the copper foil"). The non-transfer surface of the resin substrate 40 is the surface of the resin substrate 40 before it is bonded to the surface-treated copper foil 30.
依據JIS R3257:1999規定的固著液滴法來測定蒸餾水的接觸角θ 0和θ 1。此時,在依據本實施形態的表面處理銅箔30中,接觸角θ 0與接觸角θ 1的差值θ 0-θ 1為5°以上35°以下。亦即,所謂接觸角θ 0與接觸角θ 1的差值θ 0-θ 1是表示樹脂的表面的溼潤性因與銅箔貼合而改變了多少之尺度。 The contact angles θ0 and θ1 of distilled water are determined according to the fixed droplet method specified in JIS R3257:1999. In this case, in the surface-treated copper foil 30 according to this embodiment, the difference between contact angles θ0 and θ1 , θ0 - θ1, is 5° to 35°. That is, the difference between contact angles θ0 and θ1 , θ0 - θ1 , is a measure of how much the wettability of the resin surface changes due to adhesion to the copper foil.
若使用這樣的表面處理銅箔30來製造覆銅積層板50和印刷線路板60,則覆銅積層板50和印刷線路板60的製造中使用的樹脂製基材40的轉印表面40a的溼潤性變高。因此,所獲得的覆銅積層板50和印刷線路板60除了不易發生傳輸損失之外,電路加工性優異,進一步,構成覆銅積層板50的樹脂製基材40與為了製造印刷線路板60而在之後積層的另一樹脂製基材41之間不易產生異物。If copper foil 30 with such surface treatment is used to manufacture copper-clad laminate 50 and printed circuit board 60, the wettability of the transfer surface 40a of the resin substrate 40 used in the manufacture of copper-clad laminate 50 and printed circuit board 60 becomes higher. Therefore, the obtained copper-clad laminate 50 and printed circuit board 60 are not only less prone to transmission loss, but also have excellent circuit processability. Furthermore, foreign matter is less likely to be generated between the resin substrate 40 constituting the copper-clad laminate 50 and another resin substrate 41 subsequently laminated for the manufacture of printed circuit board 60.
亦即,藉由將接觸角的差值θ 0-θ 1設在上述數值範圍內,能夠使樹脂製基材40的表面的溼潤性保持良好,因而蝕刻過程中蝕刻液容易遍及到樹脂製基材40上的電路31的底部端部31b,並且在蝕刻步驟後的清洗步驟中清洗液容易遍及樹脂製基材40的整個表面。其結果,能夠製造一種覆銅積層板50和印刷線路板60,其能夠兼具優異的電路加工性和異物抑制,並且不易產生傳輸損失。 That is, by setting the contact angle difference θ0 - θ1 within the aforementioned range, the surface wettability of the resin substrate 40 can be maintained well. Therefore, during the etching process, the etching solution easily reaches the bottom end 31b of the circuit 31 on the resin substrate 40, and during the cleaning step after etching, the cleaning solution easily reaches the entire surface of the resin substrate 40. As a result, a copper-clad laminate 50 and a printed circuit board 60 can be manufactured, which possesses both excellent circuit processing performance and foreign matter suppression, and is less prone to transmission loss.
如上所述,依據本實施形態的表面處理銅箔30能夠適合用於覆銅積層板、印刷線路板等的製造。亦即,依據本實施形態的覆銅積層板50具備:依據本實施形態的表面處理銅箔30;及,樹脂製基材40,其貼合於該表面處理銅箔30的表面處理層20上。又,依據本實施形態的印刷線路板60具備依據本實施形態的覆銅積層板50。As described above, the surface-treated copper foil 30 according to this embodiment is suitable for manufacturing copper-clad laminates, printed circuit boards, etc. That is, the copper-clad laminate 50 according to this embodiment includes: the surface-treated copper foil 30 according to this embodiment; and a resin substrate 40, which is adhered to the surface-treated layer 20 of the surface-treated copper foil 30. Furthermore, the printed circuit board 60 according to this embodiment includes the copper-clad laminate 50 according to this embodiment.
以下進一步詳細說明依據本實施形態的表面處理銅箔30、覆銅積層板50、印刷線路板60。 (A)關於表面處理銅箔 作為依據本實施形態的表面處理銅箔30的原料的銅箔基體10較佳是:在對於表面施以粗糙化處理等處理前的時候,兩面的十點平均粗糙度Rzjis皆為2μm以下。能夠依照JIS B0601:2001所規定的方法,使用接觸式表面粗糙度測定機來測定此十點平均粗糙度Rzjis。若表面的十點平均粗糙度Rzjis為2μm以下,則與樹脂製基材40的密接力容易變得良好。 又,施以粗糙化處理等處理前的時候的銅箔基體10的厚度取決於粗糙化處理後的銅箔基體10的厚度的目標值,較佳是5μm以上且40μm以下。 The following provides a more detailed description of the surface-treated copper foil 30, copper-clad laminate 50, and printed circuit board 60 according to this embodiment. (A) Regarding the surface-treated copper foil The copper foil substrate 10, which serves as the raw material for the surface-treated copper foil 30 according to this embodiment, preferably has a ten-point average roughness Rzjis of both surfaces that is 2 μm or less before surface roughening treatment or similar processes. This ten-point average roughness Rzjis can be measured using a contact surface roughness measuring machine according to the method specified in JIS B0601:2001. If the ten-point average roughness Rzjis of the surface is 2 μm or less, the adhesion to the resin substrate 40 is easily improved. Furthermore, the thickness of the copper foil substrate 10 before roughening treatment depends on the target thickness of the copper foil substrate 10 after roughening treatment, and is preferably 5 μm or more and 40 μm or less.
對於作為原料的銅箔基體10的至少一面施以表面處理來形成表面處理層20,而製造依據本實施形態的表面處理銅箔30。作為表面處理,實施將表面加以粗糙化之粗糙化處理和防鏽處理的一者或兩者。亦即,表面處理層20由藉由粗糙化處理所形成的粗糙化處理層21和藉由防鏽處理所形成的防鏽處理層22的一者或兩者所構成。當表面處理層20由粗糙化處理層21和防鏽處理層22的兩者所構成時,在銅箔基體10的面上形成粗糙化處理層21,並在其上形成防鏽處理層22。進一步,可在防鏽處理後施以使用了矽烷偶合劑等化學密接劑之化學密接劑處理,來在防鏽處理層22上形成矽烷偶合劑層等化學密接劑層。關於這些表面處理,將於下文詳述。A surface-treated copper foil 30 according to this embodiment is manufactured by applying a surface treatment to at least one side of a copper foil substrate 10, which serves as the raw material, to form a surface-treated layer 20. As the surface treatment, one or both of a roughening treatment and a rust-preventive treatment are performed. That is, the surface-treated layer 20 is composed of one or both of a roughening treatment layer 21 formed by the roughening treatment and a rust-preventive treatment layer 22 formed by the rust-preventive treatment. When the surface-treated layer 20 is composed of both the roughening treatment layer 21 and the rust-preventive treatment layer 22, the roughening treatment layer 21 is formed on the surface of the copper foil substrate 10, and the rust-preventive treatment layer 22 is formed thereon. Furthermore, after the rust-proofing treatment, a chemical adhesive treatment using a silane coupling agent or similar chemical adhesive can be applied to form a silane coupling agent layer or similar chemical adhesive layer on the rust-proofing layer 22. These surface treatments will be described in detail below.
製造依據本實施形態的表面處理銅箔30時,為了提升前述溼潤性的目的,在一般的粗糙化處理前或後對於銅箔基體10的至少一面施以凹凸形成處理。然後,藉由這些一般的粗糙化處理和凹凸形成處理來形成粗糙化處理層21。此凹凸形成處理是以下處理:在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀。作為此凹凸形成處理的例子,可列舉:膠囊鍍覆處理及蝕刻凹凸處理。When manufacturing the surface-treated copper foil 30 according to this embodiment, for the purpose of improving the aforementioned wettability, at least one side of the copper foil substrate 10 is subjected to an uneven forming process before or after a general roughening process. Then, a roughening layer 21 is formed by these general roughening processes and uneven forming processes. This uneven forming process is a process in which fine uneven shapes are formed on the surface of the copper foil substrate 10 to a degree that does not affect transmission loss. Examples of this uneven forming process include: capsule coating and etching uneven forming.
首先,說明膠囊鍍覆處理的一例。在一般的粗糙化處理前施以膠囊鍍覆處理。藉由使用網格狀的陰極遮蔽板來在銅箔基體10的表面施以平滑的鍍銅(膠囊鍍覆),從而在銅箔基體10的表面形成微細的凹凸形狀。藉由使用網格狀的陰極遮蔽板,能夠在銅箔基體10的表面形成具有均勻的偏差之凹凸形狀。First, an example of capsule coating treatment will be explained. Capsule coating treatment is applied before general roughening treatment. By using a mesh-like cathode shield to apply smooth copper plating (capsule coating) to the surface of the copper foil substrate 10, a fine unevenness is formed on the surface of the copper foil substrate 10. By using a mesh-like cathode shield, an unevenness with uniform deviation can be formed on the surface of the copper foil substrate 10.
此時,藉由控制網格狀的陰極遮蔽板的開口率和電流密度、通電時間等鍍覆條件,能夠在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀。其結果,能夠良好地控制樹脂製基材40的轉印表面40a的溼潤性。At this time, by controlling the opening ratio of the mesh-like cathode shield and the coating conditions such as current density and energizing time, it is possible to form a fine uneven shape on the surface of the copper foil substrate 10 to a degree that will not affect transmission loss. As a result, the wettability of the transfer surface 40a of the resin substrate 40 can be well controlled.
作為鍍覆液,能夠使用一般使用的硫酸銅的鍍覆液。作為用於形成陰極遮蔽板的原材料,較理想是具有耐化學藥品性和絕緣性之材料,例如,較佳是氯乙烯、聚乙烯、聚對苯二甲酸丁二酯等樹脂。網格部分的開口面積較佳是1μm 2以上且100μm 2以下,更佳是10μm 2以上且100μm 2以下。又,網格部分的開口率較佳是5%以上且15%以下。若開口面積和開口率在上述數值範圍內,則能夠在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀,樹脂製基材40的轉印表面40a的溼潤性變得良好。 As the coating solution, a commonly used copper sulfate coating solution can be used. As the raw material for forming the cathode shielding plate, it is ideally a material with chemical resistance and insulation properties, such as vinyl chloride, polyethylene, polybutylene terephthalate, etc. The open area of the mesh portion is preferably 1 μm² or more and 100 μm² or less, more preferably 10 μm² or more and 100 μm² or less. Furthermore, the open area ratio of the mesh portion is preferably 5% or more and 15% or less. If the opening area and opening ratio are within the above-mentioned range, a fine uneven shape can be formed on the surface of the copper foil substrate 10 to a degree that will not affect the transmission loss, and the wettability of the transfer surface 40a of the resin substrate 40 becomes good.
繼而,說明蝕刻凹凸處理的一例。在一般的粗糙化處理後且防鏽處理前施以蝕刻凹凸處理。粗糙化處理後,在高電流密度且極短時間這樣的條件下,電沉積鎳(Ni)、鈷(Co)等具有耐化學藥品性之防鏽金屬,然後短時間浸漬於蝕刻液中來進行蝕刻,藉此在銅箔基體10的表面形成微細的凹凸形狀。 鎳的電沉積中能夠使用含有硫酸鎳、胺磺酸鎳等之一般的電解浴。又,電流密度例如能夠設為1.0A/dm 2以上,通電時間例如能夠設為0.5秒以上且2.0秒以下。 Next, an example of etching and protrusion treatment will be explained. Etching and protrusion treatment is applied after general roughening treatment and before rust prevention treatment. After roughening treatment, rust-resistant metals such as nickel (Ni) and cobalt (Co) with chemical resistance are electrodeposited under conditions of high current density and extremely short time. The substrate is then briefly immersed in an etching solution for etching, thereby forming fine unevenness on the surface of the copper foil substrate 10. A typical electrolytic bath containing nickel sulfate or nickel sulfonate can be used for nickel electrodeposition. Furthermore, the current density can be set to, for example, 1.0 A/dm² or higher , and the energizing time can be set to, for example, 0.5 seconds or higher and 2.0 seconds or less.
藉由以高電流密度且短時間電沉積防鏽金屬,能夠將防鏽金屬僅電沉積在藉由一般的粗糙化處理所形成的粗糙化粒子的頂部。因此,銅箔基體10的表面之中的粗糙化粒子的頂部以外的區域被蝕刻,而在銅箔基體10的表面之中的粗糙化粒子的頂部以外的區域形成微細的凹凸形狀。 又,藉由控制在蝕刻液中的浸漬時間等條件,能夠在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀。其結果,能夠良好地控制樹脂製基材40的轉印表面40a的溼潤性。 By electrodepositing the rust-resistant metal with high current density and a short time, the rust-resistant metal can be deposited only on the tops of the roughened particles formed by conventional roughening treatment. Therefore, the area on the surface of the copper foil substrate 10 other than the tops of the roughened particles is etched, forming a fine unevenness in that area. Furthermore, by controlling conditions such as the immersion time in the etching solution, a fine unevenness that does not affect transmission loss can be formed on the surface of the copper foil substrate 10. As a result, the wettability of the transfer surface 40a of the resin substrate 40 can be well controlled.
作為蝕刻液,例如能夠使用硫酸-過氧化氫水的混合液和鹽酸等一般的銅蝕刻液。在蝕刻液中的浸漬時間例如能夠設為2秒以上且10秒以下。若在蝕刻液中的浸漬時間在上述數值範圍內,則能夠在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀,樹脂製基材40的轉印表面40a的溼潤性變得良好,並且在之後的防鏽處理和化學密接劑處理的步驟中能夠對銅箔基體10的表面施以均勻的處理,能夠賦予良好的密接性和耐腐蝕性。As an etching solution, common copper etching solutions such as a mixture of sulfuric acid and hydrogen peroxide or hydrochloric acid can be used. The immersion time in the etching solution can be set to, for example, more than 2 seconds and less than 10 seconds. If the immersion time in the etching solution is within the above-mentioned range, fine unevenness can be formed on the surface of the copper foil substrate 10 to a degree that will not affect transmission loss. The wettability of the transfer surface 40a of the resin substrate 40 becomes good, and the surface of the copper foil substrate 10 can be uniformly treated in subsequent rust prevention and chemical adhesive treatment steps, thus giving it good adhesion and corrosion resistance.
藉由如上所述的凹凸形成處理,能夠獲得一種銅箔基體10,該銅箔基體10具有使所貼合的樹脂製基材40的轉印表面40a的溼潤性變得良好之表面。如前所述,能夠藉由依據固著液滴法所測得的蒸餾水的接觸角來評估樹脂製基材40的轉印表面40a的溼潤性,銅箔貼合前的非轉印表面的蒸餾水接觸角θ 0與銅箔蝕刻後的轉印表面40a的蒸餾水接觸角θ 1的差值θ 0-θ 1必須為5°以上且35°以下。 By means of the uneven forming process described above, a copper foil substrate 10 can be obtained, which has a surface that improves the wettability of the transfer surface 40a of the resin substrate 40 to which it is bonded. As mentioned earlier, the wettability of the transfer surface 40a of the resin substrate 40 can be evaluated by measuring the contact angle of distilled water using the fixation droplet method. The difference between the distilled water contact angle θ0 of the non-transfer surface before copper foil bonding and the distilled water contact angle θ1 of the transfer surface 40a after copper foil etching , θ0 - θ1, must be 5° or more and 35° or less.
其中,較佳是:當依據ISO25178規定的方法來測定轉印表面40a的光學式粗糙度時,算術平均粗糙度Sa為0.020μm以上且0.070μm以下,芯部的空間的容積Vvc為0.030mL/m 2以上且0.110mL/m 2以下。若轉印表面40a的算術平均粗糙度Sa和芯部的空間的容積Vvc在上述數值範圍內,則即使表面處理銅箔30的表面處理層20的表面粗糙度較小,轉印表面40a的溼潤性亦變得更良好,並且能夠進一步良好地保持電路的加工形狀。雖然不清楚其理由,但是被認為原因在於能夠良好地控制樹脂-銅箔界面部分的蝕刻量。 Preferably, when the optical roughness of the transfer surface 40a is measured according to the method specified in ISO 25178, the arithmetic mean roughness Sa is ≥0.020 μm and ≤0.070 μm, and the core space volume Vvc is ≥0.030 mL/ m² and ≤0.110 mL/ m² . If the arithmetic mean roughness Sa and the core space volume Vvc of the transfer surface 40a are within the above-mentioned value range, even if the surface roughness of the surface treatment layer 20 of the surface-treated copper foil 30 is small, the wettability of the transfer surface 40a becomes better, and the processing shape of the circuit can be maintained better. Although the reason is unclear, it is believed that the reason lies in the ability to better control the etching amount at the resin-copper foil interface.
進一步,更佳是:當依據ISO25178規定的方法來測定轉印表面40a的光學式粗糙度時,算術平均粗糙度Sa為0.020μm以上且0.051μm以下,芯部的空間的容積Vvc為0.030mL/m 2以上且0.071mL/m 2以下。若轉印表面40a的算術平均粗糙度Sa和芯部的空間的容積Vvc在上述數值範圍內,則能夠進一步抑制異物的發生。雖然不清楚其理由,但是被認為原因在於能夠限制異物進入的間隙。 Furthermore, and more preferably, when the optical roughness of the transfer surface 40a is measured according to the method specified in ISO 25178, the arithmetic mean roughness Sa is ≥0.020 μm and ≤0.051 μm, and the volume Vvc of the core space is ≥0.030 mL/ m² and ≤0.071 mL/ m² . If the arithmetic mean roughness Sa of the transfer surface 40a and the volume Vvc of the core space are within the above-mentioned value range, the occurrence of foreign matter can be further suppressed. Although the reason is unclear, it is believed that the reason lies in the gap that can limit the entry of foreign matter.
如以上所述,藉由對於銅箔基體10的至少一面,施以為了提升溼潤性的目的而進行的凹凸形成處理和一般的粗糙化處理,能夠獲得依據本實施形態的表面處理銅箔30。所獲得的表面處理銅箔30的表面處理層20的表面粗糙度必須如以下所述。亦即,當依據ISO25178規定的方法來測定表面處理層20的表面20a的光學式粗糙度時,算術平均粗糙度Sa必須為0.04μm以上且0.30μm以下。為了更減少傳輸損失,表面處理層20的表面20a的算術平均粗糙度Sa較佳是0.04μm以上且0.20μm以下,更佳是0.04μm以上且0.150μm以下。As described above, by applying an uneven forming process and a general roughening process to at least one side of the copper foil substrate 10 for the purpose of improving wettability, a surface-treated copper foil 30 according to this embodiment can be obtained. The surface roughness of the surface treatment layer 20 of the obtained surface-treated copper foil 30 must be as described below. That is, when the optical roughness of the surface 20a of the surface treatment layer 20 is measured according to the method specified in ISO 25178, the arithmetic mean roughness Sa must be 0.04 μm or more and 0.30 μm or less. In order to further reduce transmission loss, the arithmetic mean roughness Sa of the surface 20a of the surface treatment layer 20 is preferably 0.04 μm or more and 0.20 μm or less, and more preferably 0.04 μm or more and 0.150 μm or less.
繼而,說明依據本實施形態的表面處理銅箔30的製造方法。能夠藉由依所記載的順序實行下述(1)~(5)的步驟來製造依據本實施形態的表面處理銅箔30。製造表面處理銅箔30時,為了提升溼潤性而實施凹凸形成處理,作為凹凸形成處理,列舉以下2個具體例來進行說明:使用膠囊鍍覆處理之例子、及使用蝕刻凹凸處理之例子。Next, a method for manufacturing the surface-treated copper foil 30 according to this embodiment will be described. The surface-treated copper foil 30 according to this embodiment can be manufactured by performing the steps (1) to (5) as described below in the order described. When manufacturing the surface-treated copper foil 30, an unevenness forming process is performed to improve wettability. As an unevenness forming process, the following two specific examples will be given for explanation: an example using capsule coating process and an example using etching unevenness forming process.
[使用膠囊鍍覆處理之例子] (1)銅箔基體的製造 在依據本實施形態的表面處理銅箔30的製造中,較佳是使用具有不存在有粗大的凹凸的平滑且有光澤的表面之電解銅箔或軋製銅箔來作為銅箔基體10。其中,從生產性和成本的觀點來看,較佳是使用電解銅箔,尤其,更佳是使用一般稱為「雙面光澤箔」之雙面平滑的電解銅箔。 [Example of Capsule Coating Treatment] (1) Manufacturing of Copper Foil Substrate In manufacturing the surface-treated copper foil 30 according to this embodiment, it is preferable to use electrolytic copper foil or rolled copper foil with a smooth and glossy surface free of roughness or unevenness as the copper foil substrate 10. From a production and cost perspective, electrolytic copper foil is preferred, and more particularly, double-sided smooth electrolytic copper foil, commonly referred to as "double-sided gloss foil," is even more preferable.
在通常的電解銅箔中,平滑且有光澤的表面是光面(S面)。在雙面光澤箔中,平滑且有光澤的表面是光面和毛面(M面)的雙面,但是更平滑且有光澤的面是毛面。在本實施形態中,更佳是:當使用任一電解銅箔時,皆對更平滑且有光澤的面施以下述粗糙化處理。In conventional electrolytic copper foil, the smooth and glossy surface is the polished surface (S-side). In double-sided polished foil, the smooth and glossy surface is both a polished surface and a matte surface (M-side), but the smoother and glossier surface is the matte surface. In this embodiment, it is preferable that, when using any electrolytic copper foil, the smoother and glossier surface is subjected to the following roughening treatment.
(2)膠囊鍍覆處理 為了提升溼潤性的目的而實行膠囊鍍覆處理,在銅箔基體10的至少一表面形成微細的凹凸形狀。膠囊鍍覆處理的內容如前所述,能夠藉由使用網格狀的陰極遮蔽板來對銅箔基體10的表面部分地施以鍍銅(膠囊鍍覆)。 將鍍覆液的組成和鍍覆條件的具體例示於下文。藉由適當地設定電流密度來僅對網格部分的開口部施以平滑的鍍銅(膠囊鍍覆)。其結果,能夠在不改變銅箔的表面整體的表面粗糙度的情形下形成微細的凹凸。 (2) Capsule Coating Treatment A capsule coating treatment is performed to improve wettability, forming a fine unevenness on at least one surface of the copper foil substrate 10. As described above, the capsule coating treatment allows for partial copper plating (capsule coating) of the surface of the copper foil substrate 10 using a mesh-like cathode shield. Specific examples of the composition of the plating solution and the plating conditions are illustrated below. By appropriately setting the current density, a smooth copper plating (capsule coating) is applied only to the openings of the mesh portion. As a result, a fine unevenness can be formed without altering the overall surface roughness of the copper foil.
<鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為50~65g/L 硫酸的濃度・・・80~170g/L <鍍覆處理的條件> 處理速度・・・5~18m/分鐘 電流密度・・・1~5A/dm 2 <Composition of the Coating Solution> Copper sulfate pentahydrate concentration: 50-65 g/L (in copper atoms) Sulfuric acid concentration: 80-170 g/L <Coating Conditions> Processing speed: 5-18 m/min Current density: 1-5 A/ dm²
(3)粗糙化處理層的形成 較佳是實行例如如下述所示的二階段的鍍覆處理作為粗糙化處理。再者,可根據需要而不實行第二階段的固定鍍覆處理。 第一階段的粗糙化鍍覆處理在銅箔基體10的施以膠囊鍍覆處理後的表面上形成粗糙化粒子之處理。例如能夠藉由使用硫酸銅浴的鍍覆處理來實行第一階段的粗糙化鍍覆處理。將鍍覆液的組成和鍍覆條件的具體例示於下文。 (3) Formation of the Roughening Layer Preferably, a two-stage plating process, as shown below, is performed as the roughening treatment. Alternatively, the second-stage fixed plating process may be omitted if necessary. The first-stage roughening plating process involves forming roughening particles on the surface of the copper foil substrate 10 after capsule plating. For example, the first-stage roughening plating process can be performed using a copper sulfate bath. Specific examples of the composition of the plating solution and the plating conditions are shown below.
硫酸銅浴中可為了防止粗糙化粒子的脫落、亦即「粉末掉落」的目的而添加含有鉬(Mo)、砷(As)、銻(Sb)、鉍(Bi)、硒(Se)、碲(Te)、鎢(W)等之添加劑,特佳是添加含有鉬之添加劑。In order to prevent the shedding of roughened particles, i.e. "powder shedding", additives containing molybdenum (Mo), arsenic (As), antimony (Sb), bismuth (Bi), selenium (Se), tellurium (Te), tungsten (W) can be added to the copper sulfate bath. Additives containing molybdenum are particularly preferred.
<鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為5~15g/L 硫酸的濃度・・・120~250g/L 鉬酸銨的濃度・・・以鉬(原子)換算為500~1000mg/L <Composition of the Coating Solution> Concentration of copper sulfate pentahydrate: 5-15 g/L (in copper atoms) Concentration of sulfuric acid: 120-250 g/L Concentration of ammonium molybdate: 500-1000 mg/L (in molybdenum atoms)
<鍍覆處理的條件> 處理速度・・・8~22m/分鐘 電流密度・・・15~55A/dm 2處理時間・・・0.5~5.0秒 浴溫・・・8~20℃ <Conditions for Coating Treatment> Treatment speed: 8-22 m/min; Current density: 15-55 A/dm² ; Treatment time: 0.5-5.0 seconds; Bath temperature: 8-20℃
第二階段的固定鍍覆處理是對施以第一階段的粗糙化鍍覆處理後的銅箔基體10實施平滑的覆蓋鍍覆之處理。藉此,在銅箔基體10的表面形成粗糙化處理層21。例如能夠藉由使用硫酸銅浴之鍍覆處理來實行第二階段的固定鍍覆處理。將鍍覆液的組成和鍍覆條件的具體例示於下文。The second-stage fixation coating process involves applying a smooth coating to the copper foil substrate 10 after the roughening coating process of the first stage. This forms a roughening layer 21 on the surface of the copper foil substrate 10. For example, the second-stage fixation coating process can be performed using a copper sulfate bath. Specific examples of the composition of the coating solution and the coating conditions are given below.
通常,此固定鍍覆處理是為了防止粗糙化粒子的脫落、亦即為了將粗糙化粒子固定化而實行。例如在覆銅積層板的製造中,當將使用了聚醯亞胺樹脂等較硬的樹脂之可撓基板與依據本實施形態的表面處理銅箔30加以組合時等,藉由對粗糙化面施以固定鍍覆處理,能夠防止粗糙化粒子的脫落。Typically, this fixation coating process is performed to prevent the roughening particles from falling off, that is, to fix the roughening particles. For example, in the manufacture of copper-clad laminates, when a flexible substrate using a harder resin such as polyimide resin is combined with a surface-treated copper foil 30 according to this embodiment, the roughening particles can be prevented from falling off by applying a fixation coating process to the roughened surface.
<鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為50~65g/L 硫酸的濃度・・・90~160g/L <鍍覆處理的條件> 處理速度・・・5~20m/分鐘 電流密度・・・1~7A/dm 2 <Composition of the Coating Solution> Concentration of copper sulfate pentahydrate: 50-65 g/L (in copper atoms) Concentration of sulfuric acid: 90-160 g/L <Coating Conditions> Processing speed: 5-20 m/min Current density: 1-7 A/ dm²
(4)防鏽處理層的形成 可在粗糙化處理層21上直接或隔著中間層進一步形成矽烷偶合劑層。作為中間層,可列舉:含有鎳之基底層、含有鋅(Zn)之耐熱處理層、及鉻(Cr)之防鏽處理層22等。再者,中間層和矽烷偶合劑層由於其厚度非常薄,因此不會對表面處理銅箔30的粗糙化面中的粗糙化粒子的粒子形狀造成影響。表面處理銅箔30的粗糙化面中的粗糙化粒子的粒子形狀實質上是由與粗糙化面相對應的粗糙化處理層21的表面中的粗糙化粒子的粒子形狀所決定。 (4) Formation of the anti-rust treatment layer A silane coupling agent layer can be further formed directly on or through an intermediate layer on the roughening treatment layer 21. Examples of intermediate layers include: a nickel-containing base layer, a zinc (Zn) heat-resistant treatment layer, and a chromium (Cr) anti-rust treatment layer 22. Furthermore, because the intermediate layer and the silane coupling agent layer are very thin, they do not affect the particle shape of the roughened particles in the roughened surface of the surface-treated copper foil 30. The particle shape of the roughened particles in the roughened surface of the surface-treated copper foil 30 is essentially determined by the particle shape of the roughened particles on the surface of the roughening treatment layer 21 corresponding to the roughened surface.
例如在有時銅箔基體10或粗糙化處理層21中的銅(Cu)擴散至樹脂製基材40側並發生銅害而密接性下降的情況下,基底層較佳是形成於粗糙化處理層21與矽烷偶合劑層之間。基底層較佳是以選自鎳、鎳-磷(P)、鎳-鋅、鎳-鉬之中的至少1種形成。For example, in cases where copper (Cu) in the copper foil substrate 10 or roughening layer 21 diffuses to the resin substrate 40 and causes copper damage, resulting in decreased adhesion, the base layer is preferably formed between the roughening layer 21 and the silane coupling agent layer. The base layer is preferably formed of at least one material selected from nickel, nickel-phosphorus (P), nickel-zinc, and nickel-molybdenum.
耐熱處理層較佳是在需要提升表面處理銅箔30的耐熱性的情況下形成。例如,耐熱處理層較佳是以鋅或含有鋅之合金形成。作為含有鋅之合金,可列舉:鋅-錫(Sn)合金、鋅-鎳合金、鋅-鈷合金、鋅-銅合金、鋅-鉬合金、鋅-鉻合金、鋅-釩(V)合金。The heat-resistant coating is preferably formed when it is necessary to improve the heat resistance of the surface-treated copper foil 30. For example, the heat-resistant coating is preferably formed of zinc or a zinc-containing alloy. Examples of zinc-containing alloys include: zinc-tin (Sn) alloy, zinc-nickel alloy, zinc-cobalt alloy, zinc-copper alloy, zinc-molybdenum alloy, zinc-chromium alloy, and zinc-vanadium (V) alloy.
防鏽處理層22較佳是在需要進一步提升耐腐蝕性的情況下形成。作為防鏽處理層22,可列舉例如:藉由鍍鉻所形成的鉻層、藉由鉻酸鹽處理所形成的鉻酸鹽層。 當形成基底層、耐熱處理層、及防鏽處理層22的全部三層時,較佳依該順序形成於粗糙化處理層21上。又,亦可根據用途或目標的特性而僅形成基底層、耐熱處理層、及防鏽處理層22之中的任一層或二層。 The rust-resistant treatment layer 22 is preferably formed when further enhanced corrosion resistance is required. Examples of rust-resistant treatment layers 22 include, for example, a chromium layer formed by chromium plating and a chromate layer formed by chromate treatment. When forming all three layers—the base layer, the heat-resistant treatment layer, and the rust-resistant treatment layer 22—it is preferable to form them on the roughening treatment layer 21 in this order. Alternatively, depending on the application or intended use, only one or two of the base layer, the heat-resistant treatment layer, and the rust-resistant treatment layer 22 may be formed.
(5)矽烷偶合劑層的形成 作為矽烷偶合劑層的形成方法,可列舉例如以下方法:在表面處理銅箔30的粗糙化處理層21的凹凸表面上直接或隔著中間層塗佈矽烷偶合劑溶液後,加以風乾(自然乾燥)或加熱乾燥來形成。只要所塗佈的偶合劑溶液中的水蒸發,則會形成矽烷偶合劑層。如果以50~180℃的溫度進行加熱乾燥,則會促進矽烷偶合劑與銅箔的反應,因此較佳。 (5) Formation of the silane coupling agent layer As a method for forming the silane coupling agent layer, examples include the following: applying a silane coupling agent solution directly or through an intermediate layer to the roughened surface 21 of the surface-treated copper foil 30, followed by air drying (natural drying) or heat drying. The silane coupling agent layer will form as soon as the water in the applied coupling agent solution evaporates. Heating at a temperature of 50–180°C is preferred as it promotes the reaction between the silane coupling agent and the copper foil.
矽烷偶合劑層較佳是含有環氧系矽烷偶合劑、胺基系矽烷偶合劑、乙烯基系矽烷偶合劑、甲基丙烯酸系矽烷偶合劑、丙烯酸系矽烷偶合劑、唑系矽烷偶合劑、苯乙烯基系矽烷偶合劑、脲基系矽烷偶合劑、巰基系矽烷偶合劑、硫醚系矽烷偶合劑、異氰酸酯系矽烷偶合劑中的任1種以上。The silane coupling agent layer preferably contains one or more of the following: epoxy silane coupling agent, amino silane coupling agent, vinyl silane coupling agent, methacrylic acid silane coupling agent, acrylic acid silane coupling agent, azole silane coupling agent, styryl silane coupling agent, urea silane coupling agent, methyl methacrylate silane coupling agent, thioether silane coupling agent, and isocyanate silane coupling agent.
[使用蝕刻凹凸處理之例子] (1)銅箔基體的製造 與使用膠囊鍍覆處理之例子的情況相同。 (2)粗糙化處理層的形成 與使用膠囊鍍覆處理之例子的情況相同。 [Example of using etching and protrusion processing] (1) Manufacturing of the copper foil substrate Same as the example using capsule coating. (2) Formation of the roughening layer Same as the example using capsule coating.
(3)蝕刻凹凸處理 為了提升溼潤性的目的而實行蝕刻凹凸處理,在銅箔基體10的表面形成微細的凹凸形狀。蝕刻凹凸處理的內容如前所述,進一步詳細說明處理條件等。使用含有硫酸鎳且鎳濃度為30~150g/L之電解浴,將電流密度設為1.0~4.0A/dm 2並將通電時間設為0.5~2.0秒來實行電沉積,然後短時間浸漬於蝕刻液中來進行蝕刻,藉此能夠在銅箔基體10的表面形成不會對傳輸損失造成影響之程度的微細的凹凸形狀。 (3) Etching and protrusion treatment: Etching and protrusion treatment is performed to improve wettability, forming fine uneven shapes on the surface of the copper foil substrate 10. The content of etching and protrusion treatment is as described above, and the treatment conditions are further explained in detail. An electrolytic bath containing nickel sulfate with a nickel concentration of 30 to 150 g/L is used. Electrodeposition is performed by setting the current density to 1.0 to 4.0 A/ dm² and the current application time to 0.5 to 2.0 seconds. Then, the substrate is briefly immersed in the etching solution for etching, thereby forming fine uneven shapes on the surface of the copper foil substrate 10 that do not affect transmission loss.
藉由此蝕刻凹凸處理來在藉由粗糙化處理所形成的粗糙化粒子的表面形成凹凸,作為其他的蝕刻方法,可列舉在含有鹽酸、硫酸、磷酸等無機酸之溶液中的浸漬處理。藉由將銅箔基體10浸漬於規定濃度的無機酸水溶液中數秒至數十秒左右,來在粗糙化粒子的表面形成微細的凹凸。例如若是在使用了鹽酸的情況下,則藉由在濃度5~20體積%的鹽酸中浸漬2秒以上,來在粗糙化粒子的表面形成微細的凹凸。This etching process creates unevenness on the surface of the roughened particles formed by the roughening treatment. Other etching methods include immersion treatment in solutions containing inorganic acids such as hydrochloric acid, sulfuric acid, and phosphoric acid. By immersing the copper foil substrate 10 in an aqueous solution of an inorganic acid of a specified concentration for several seconds to tens of seconds, fine unevenness is formed on the surface of the roughened particles. For example, if hydrochloric acid is used, fine unevenness is formed on the surface of the roughened particles by immersing in hydrochloric acid with a concentration of 5-20% by volume for more than 2 seconds.
又,作為其他的蝕刻方法,除了在含有上述無機酸之溶液中的浸漬處理之外,亦能夠使用:在含有乙酸、甲酸等有機酸之溶液中的浸漬處理、在含有氯化鐵、氯化銅之溶液中的浸漬處理、藉由陽極氧化進行的電解蝕刻處理。這些方法可將2種以上加以組合來實行。Furthermore, as other etching methods, in addition to immersion treatment in solutions containing the aforementioned inorganic acids, the following can also be used: immersion treatment in solutions containing organic acids such as acetic acid and formic acid; immersion treatment in solutions containing ferric chloride and copper chloride; and electrolytic etching by anodic oxidation. Two or more of these methods can be combined to perform the etching.
(4)防鏽處理層的形成 與使用膠囊鍍覆處理之例子的情況相同。 (5)矽烷偶合劑層的形成 與使用膠囊鍍覆處理之例子的情況相同。 (4) Formation of the anti-rust coating Same as in the example using capsule coating. (5) Formation of the silane coupling agent layer Same as in the example using capsule coating.
(B)關於轉印表面的溼潤性 繼而,說明轉印表面40a的溼潤性的評估方法。製造覆銅積層板50和印刷線路板60時貼合在表面處理銅箔30上的樹脂製基材40的轉印表面40a的溼潤性,能夠藉由依據JIS R3257:1999規定的固著液滴法所測得的蒸餾水的接觸角來進行評估。 (B) Regarding the wettability of the transfer surface Next, the method for evaluating the wettability of the transfer surface 40a will be explained. The wettability of the transfer surface 40a of the resin substrate 40, which is bonded to the surface-treated copper foil 30 during the manufacture of the copper-clad laminate 50 and the printed circuit board 60, can be evaluated by measuring the contact angle of distilled water using the fixation droplet method as specified in JIS R3257:1999.
對於與表面處理銅箔30貼合前的樹脂製基材40的表面之中的之後要與表面處理銅箔30貼合的表面,依據上述固著液滴法來測定蒸餾水的接觸角θ 0。測定了銅箔貼合前的非轉印表面的蒸餾水接觸角θ 0之表面是未轉印有表面處理銅箔30的表面的形狀之非轉印表面。 For the surface of the resin substrate 40 before it is bonded to the surface-treated copper foil 30, the contact angle θ0 of the distilled water is measured according to the above-described fixation droplet method. The surface for which the contact angle θ0 of the distilled water on the non-transfer surface before bonding to the copper foil is measured is the non-transfer surface whose shape has not been transferred with the surface-treated copper foil 30.
又,在表面處理銅箔30的表面處理層20上貼合樹脂製基材40後,藉由蝕刻去除表面處理銅箔30,對於剩餘的樹脂製基材40的表面之中的作為與表面處理銅箔30貼合過的表面之表面,依據上述固著液滴法來測定蒸餾水的接觸角θ 1。測定了銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1之表面是轉印有貼合過的表面處理銅箔30的表面的形狀之轉印表面40a。 然後,藉由接觸角θ 0與接觸角θ 1的差值θ 0-θ 1來評估樹脂製基材40的轉印表面40a的溼潤性。若接觸角θ 0與接觸角θ 1的差值θ 0-θ 1為5°以上且35°以下,則轉印表面40a的溼潤性良好。 Furthermore, after the resin substrate 40 is bonded to the surface treatment layer 20 of the surface-treated copper foil 30, the surface-treated copper foil 30 is removed by etching. The contact angle θ1 of distilled water on the remaining surface of the resin substrate 40, which was previously bonded to the surface-treated copper foil 30, is measured using the aforementioned fixed droplet method. The surface on which the distilled water contact angle θ1 of the transferred surface after copper foil etching was measured is the transfer surface 40a, which has the shape of the bonded surface-treated copper foil 30. Then, the wettability of the transfer surface 40a of the resin substrate 40 is evaluated by the difference between the contact angle θ0 and the contact angle θ1 , θ0 - θ1 . If the difference between the contact angle θ0 and the contact angle θ1 , θ0 - θ1, is greater than 5° and less than 35°, then the wettability of the transfer surface 40a is good.
如上所述,測定接觸角θ 0、接觸角θ 1時使用的樹脂製構件可以是與製造覆銅積層板50和印刷線路板60時使用的樹脂製基材40相同種類,亦可使用不同種類來測定接觸角θ 0、接觸角θ 1。亦即,所謂製造覆銅積層板50和印刷線路板60時使用的樹脂製基材40,可使用樹脂的種類和形狀、尺寸等不同的構件作為樹脂製構件。 As described above, the resin components used to measure the contact angles θ0 and θ1 can be the same type as the resin substrate 40 used in manufacturing the copper-clad laminate 50 and the printed circuit board 60, or different types can be used to measure the contact angles θ0 and θ1 . That is, the resin substrate 40 used in manufacturing the copper-clad laminate 50 and the printed circuit board 60 can use components with different types, shapes, and sizes of resin as resin components.
用於形成測定接觸角θ 0、接觸角θ 1時使用的樹脂製構件之樹脂的種類可以是熱硬化性樹脂等硬化性樹脂,亦可以是熱塑性樹脂。在硬化性樹脂的情況下,是使樹脂製構件硬化後測定接觸角θ 0和接觸角θ 1。亦即,在接觸角θ 1的情況下,將硬化前的樹脂製構件貼合在表面處理銅箔30的表面處理層20上,使樹脂製構件硬化後,藉由蝕刻去除表面處理銅箔30。然後,對於樹脂製構件的表面之中的轉印表面,依據上述固著液滴法來測定蒸餾水的接觸角θ 1。 The resin used to form the resin component for measuring the contact angles θ0 and θ1 can be a heat-curing resin or a thermoplastic resin. In the case of a heat-curing resin, the contact angles θ0 and θ1 are measured after the resin component has hardened. That is, in the case of a contact angle θ1 , the uncured resin component is bonded to the surface treatment layer 20 of the surface-treated copper foil 30, and after the resin component has hardened, the surface-treated copper foil 30 is removed by etching. Then, the contact angle θ1 of the distilled water is measured on the transfer surface of the resin component according to the above-described fixed droplet method.
(C)關於覆銅積層板 依據本實施形態的覆銅積層板50的構成並無特別限定,其具備表面處理銅箔30及樹脂製基材40。而且,樹脂製基材40被貼合於表面處理銅箔30的表面處理層20上。此覆銅積層板50例如能夠用於印刷線路板60的製造。 再者,作為用於形成樹脂製基材40的樹脂,可列舉例如:環氧樹脂、聚苯醚、酚樹脂、雙(苯氧基苯氧基)苯、聚醯亞胺、液晶聚合物、氟樹脂(例如聚四氟乙烯)。 (C) Regarding Copper-Clad Laminates The copper-clad laminate 50 according to this embodiment is not particularly limited in its composition, and it includes a surface-treated copper foil 30 and a resin substrate 40. Furthermore, the resin substrate 40 is bonded to the surface-treated layer 20 of the surface-treated copper foil 30. This copper-clad laminate 50 can be used, for example, in the manufacture of a printed circuit board 60. Furthermore, examples of resins used to form the resin substrate 40 include: epoxy resins, polyphenylene ether, phenolic resins, bis(phenoxyphenoxy)benzene, polyimide, liquid crystal polymers, and fluoropolymers (e.g., polytetrafluoroethylene).
(D)關於印刷線路板 依據本實施形態的印刷線路板60的構成並無特別限定,其具備依據本實施形態的覆銅積層板50。例如,只要對覆銅積層板50的表面處理銅箔30進行蝕刻來形成電路31後,以覆蓋電路31的方式貼合另一樹脂製基材41,就能夠獲得印刷線路板60(參照圖3的(d))。以覆蓋電路31的方式貼合的樹脂製基材41可以是與覆銅積層板50的樹脂製基材40相同種類,亦可以是不同種類。 (D) Regarding the Printed Circuit Board The configuration of the printed circuit board 60 according to this embodiment is not particularly limited, and it includes the copper-clad laminate 50 according to this embodiment. For example, as long as the surface-treated copper foil 30 of the copper-clad laminate 50 is etched to form the circuit 31, and another resin substrate 41 is bonded over the circuit 31, the printed circuit board 60 can be obtained (see FIG. 3(d)). The resin substrate 41 bonded over the circuit 31 can be the same type as the resin substrate 40 of the copper-clad laminate 50, or it can be a different type.
[實施例] 以下示出實施例及比較例來進一步具體說明本發明。首先,比較例7的表面處理銅箔是根據專利文獻1所記載之製造方法來製得。以下同樣,比較例8的表面處理銅箔是根據專利文獻2所記載之製造方法來製得,比較例9的表面處理銅箔是根據專利文獻3所記載之製造方法來製得,比較例10的表面處理銅箔是根據專利文獻4所記載之製造方法來製得,比較例11的表面處理銅箔根據專利文獻5所記載之製造方法來製得。 [Examples] The following examples and comparative examples further illustrate the present invention. First, the surface-treated copper foil of Comparative Example 7 is manufactured according to the manufacturing method described in Patent Document 1. Similarly, the surface-treated copper foil of Comparative Example 8 is manufactured according to the manufacturing method described in Patent Document 2, the surface-treated copper foil of Comparative Example 9 is manufactured according to the manufacturing method described in Patent Document 3, the surface-treated copper foil of Comparative Example 10 is manufactured according to the manufacturing method described in Patent Document 4, and the surface-treated copper foil of Comparative Example 11 is manufactured according to the manufacturing method described in Patent Document 5.
繼而,實施例1~23及比較例1~6、12~14的表面處理銅箔是根據以下說明的順序來製得。 (i)銅箔基體 製作厚度18μm的卷狀的電解銅箔(雙面光澤箔),來作為用以製造實施例1~23及比較例1~6、12~14的表面處理銅箔的原料即銅箔基體。用於電解銅箔的製作之陰極是藉由#1000~#2000的拋光研磨來調整表面粗糙度後的鈦製的旋轉筒,陽極是尺寸穩定性陽極DSA(註冊商標)。將電解液的組成、電解條件示於下文。 Subsequently, the surface-treated copper foils of Examples 1-23 and Comparative Examples 1-6, 12-14 were manufactured according to the following description: (i) Copper Foil Substrate A roll of electrolytic copper foil (double-sided glossy foil) with a thickness of 18 μm was prepared as the raw material, i.e., the copper foil substrate, for manufacturing the surface-treated copper foils of Examples 1-23 and Comparative Examples 1-6, 12-14. The cathode used in the manufacture of the electrolytic copper foil was a titanium rotating cylinder with its surface roughness adjusted by polishing with #1000 to #2000 steel. The anode was a dimensionally stable anode, DSA (registered trademark). The composition of the electrolyte and the electrolysis conditions are shown below.
<電解液的組成> 銅:75g/L 硫酸:65g/L 氯:20mg/L 3-巰基-1-丙磺酸鈉:2mg/L 羥乙基纖維素:10mg/L 低分子量膠(分子量3000):50mg/L <電解條件> 浴溫:50℃ 電流密度:45A/dm 2 <Electrolyte Composition> Copper: 75g/L Sulfuric Acid: 65g/L Chlorine: 20mg/L Sodium 3-Pyro-1-propanesulfonate: 2mg/L Hydroxyethyl Cellulose: 10mg/L Low Molecular Weight Gel (Molecular Weight 3000): 50mg/L <Electrolysis Conditions> Bath Temperature: 50℃ Current Density: 45A/ dm²
繼而,對於以上述方式製作的銅箔基體,施以前述一般的粗糙化處理和為了提升溼潤性的目的之凹凸形成處理。關於實施例1~8、17~23及比較例2、3、6,對於銅箔基體施以為了提升溼潤性的目的之凹凸形成處理即膠囊鍍覆處理後,施以一般的粗糙化處理。關於實施例9~16及比較例4、5,對於銅箔基體施以一般的粗糙化處理後,施以為了提升溼潤性的目的之凹凸形成處理即蝕刻凹凸處理。以下說明一般的粗糙化處理、膠囊鍍覆處理、蝕刻凹凸處理。Next, the copper foil substrate produced in the above manner is subjected to the aforementioned general roughening treatment and the raised surface treatment for improving wettability. Regarding Examples 1-8, 17-23 and Comparative Examples 2, 3, and 6, after applying the raised surface treatment for improving wettability (i.e., capsule plating) to the copper foil substrate, a general roughening treatment is applied. Regarding Examples 9-16 and Comparative Examples 4 and 5, after applying the general roughening treatment to the copper foil substrate, an raised surface treatment for improving wettability (i.e., etching raised surface treatment) is applied. The general roughening treatment, capsule plating treatment, and etching raised surface treatment will be explained below.
(ii)一般的粗糙化處理 對於銅箔基體的毛面以卷對卷方式施以粗糙化處理。此粗糙化處理是二階段的電鍍處理。將第一階段的電鍍處理的鍍覆液的組成和鍍覆條件示於下文。又,將第二階段的電鍍處理(固定鍍覆處理)的鍍覆液的組成和鍍覆條件示於下文。藉由變更第一階段的電鍍處理的電流密度和通電時間如表1、2所示,來在銅箔的表面上形成具有不同的高度、形狀之粗糙化粒子。 (ii) General Roughening Treatment The rough surface of the copper foil substrate is roughened using a roll-to-roll method. This roughening treatment is a two-stage electroplating process. The composition of the plating solution and plating conditions for the first-stage electroplating process are shown below. The composition of the plating solution and plating conditions for the second-stage electroplating process (fixed plating) are also shown below. By varying the current density and energizing time of the first-stage electroplating process, as shown in Tables 1 and 2, roughening particles of different heights and shapes are formed on the surface of the copper foil.
<第一階段的電鍍處理的鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為10g/L 硫酸的濃度・・・150g/L 鉬酸銨的濃度・・・以鉬(原子)換算為600mg/L <第一階段的電鍍處理的條件> 處理速度・・・15m/分鐘 電流密度・・・15~55A/dm 2浴溫・・・15℃ 通電時間・・・4~6秒 <Composition of the plating solution for the first stage of electroplating> Concentration of copper sulfate pentahydrate: 10 g/L (copper atoms only) Concentration of sulfuric acid: 150 g/L Concentration of ammonium molybdate: 600 mg/L (molybdenum atoms only) <Conditions for the first stage of electroplating> Processing speed: 15 m/min Current density: 15–55 A/dm² Bath temperature: 15℃ Current application time: 4–6 seconds
<第二階段的電鍍處理的鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為55g/L 硫酸的濃度・・・120g/L <第二階段的電鍍處理的條件> 處理速度・・・15m/分鐘 電流密度・・・2A/dm 2通電時間・・・3秒 <Composition of the plating solution for the second-stage electroplating treatment> Concentration of copper sulfate pentahydrate: 55 g/L (in copper atoms) Concentration of sulfuric acid: 120 g/L <Conditions for the second-stage electroplating treatment> Processing speed: 15 m/min Current density: 2 A/dm² Irradiation time: 3 seconds
(iii)膠囊鍍覆處理 對於銅箔基體以卷對卷方式施以作為凹凸形成處理的膠囊鍍覆處理。將開口面積為50μm 2且開口率為5~15%的網格狀陰極遮蔽板設置於電解浴內的銅箔基體的附近,使用下述組成的鍍覆液來在下述鍍覆條件下實行電鍍處理。藉由變更陰極遮蔽板的開口率、電鍍的電流密度和通電時間如表1、2所示,來製成具有不同表面凹凸之銅箔基體。 (iii) Capsule Coating Treatment: A capsule coating treatment, which forms an uneven surface, is applied to the copper foil substrate in a roll-to-roll manner. A mesh-shaped cathode shield with an opening area of 50 μm² and an opening ratio of 5–15% is placed near the copper foil substrate in an electrolytic bath, and electroplating is performed using a coating solution with the following composition under the following coating conditions. Copper foil substrates with different surface unevenness are produced by varying the opening ratio of the cathode shield, the electroplating current density, and the energizing time, as shown in Tables 1 and 2.
<鍍覆液的組成> 硫酸銅五水合物的濃度・・・以銅(原子)換算為60g/L 硫酸的濃度・・・150g/L <鍍覆處理的條件> 處理速度・・・18m/分鐘 <Composition of the Coating Solution> Concentration of copper sulfate pentahydrate: 60 g/L (in copper atoms) Concentration of sulfuric acid: 150 g/L <Concentration of Coating Treatment> Processing speed: 18 m/min
(iv)蝕刻凹凸處理 對於經施以粗糙化處理的銅箔基體的經施以粗糙化處理的面,施以作為凹凸形成處理的蝕刻凹凸處理。蝕刻凹凸處理是電沉積鎳後浸漬於蝕刻液中加以蝕刻之處理,將用於電沉積的電解液的組成、電沉積的條件、蝕刻的條件示於下文。藉由變更電沉積的電流密度和通電時間、及蝕刻的處理時間如表1、2所示,來製成具有不同表面凹凸之銅箔基體。 (iv) Etching and Roughening Treatment An etching and roughening treatment is applied to the roughened surfaces of a copper foil substrate to create an uneven surface. This treatment involves electrodepositing nickel and then immersing the substrate in an etching solution for etching. The composition of the electrolyte used for electrodeposition, the electrodeposition conditions, and the etching conditions are shown below. Copper foil substrates with different surface roughness are fabricated by varying the electrodeposition current density and current-carrying time, as shown in Tables 1 and 2.
<電解液的組成> 鎳的濃度・・・60g/L 硼酸(H 3BO 3)的濃度・・・15g/L 浴溫・・・20℃ pH・・・3.5 <Electrolyte Composition> Nickel concentration: 60 g/L; Boric acid ( H₃BO₃ ) concentration: 15 g/L ; Bath temperature: 20℃; pH: 3.5
<電沉積的條件> 電流密度・・・1~2.5A/dm 2通電時間・・・1~3秒 <蝕刻的條件> 蝕刻液・・・濃度10體積%的鹽酸 浴溫・・・30℃ 處理時間・・・0.5~2秒 <Electrodeposition Conditions> Current density: 1–2.5 A/dm² ; Current application time: 1–3 seconds. <Etching Conditions> Etching solution: 10% hydrochloric acid concentration; Bath temperature: 30°C; Processing time: 0.5–2 seconds.
(v)防鏽處理 繼而,對經以上述方式施以粗糙化處理和凹凸形成處理的銅箔基體的經施以該處理的表面施以防鏽處理,來形成防鏽處理層。防鏽處理是依序施以鍍鎳、鍍鋅、鍍鉻之處理。示出鍍鎳、鍍鋅、鍍鉻的條件。 (v) Rust Prevention Treatment Subsequently, a rust prevention treatment is applied to the surface of the copper foil substrate that has undergone roughening and unevenness forming as described above, to form a rust prevention layer. The rust prevention treatment involves sequentially applying nickel plating, zinc plating, and chromium plating. The conditions for nickel plating, zinc plating, and chromium plating are shown.
<鎳鍍覆液的組成> 鎳的濃度・・・45g/L 硼酸的濃度・・・20g/L 浴溫・・・20℃ pH・・・3.5 <鍍鎳的條件> 電流密度:0.4A/dm 2處理時間:8秒 <Composition of Nickel Plating Solution> Nickel concentration: 45 g/L; Boric acid concentration: 20 g/L; Bath temperature: 20℃; pH: 3.5 <Nickel Plating Conditions> Current density: 0.4 A/ dm²; Processing time: 8 seconds
<鋅鍍覆液的組成> 鋅的濃度・・・2.5g/L 氫氧化鈉(NaOH)的濃度・・・25g/L 浴溫・・・20℃ <鍍鋅的條件> 電流密度:0.7A/dm 2處理時間:4秒 <Composition of Zinc Plating Bath> Zinc concentration: 2.5 g/L Sodium hydroxide (NaOH) concentration: 25 g/L Bath temperature: 20℃ <Zinc Plating Conditions> Current density: 0.7 A/ dm² Processing time: 4 seconds
<鉻鍍覆液的組成> 鉻的濃度・・・8g/L 浴溫・・・30℃ pH・・・2.4 <鍍鉻的條件> 電流密度:5A/dm 2處理時間:4秒 <Composition of Chromium Plating Solution> Chromium Concentration: 8 g/L Bath Temperature: 30℃ pH: 2.4 <Chromium Plating Conditions> Current Density: 5 A/ dm² Processing Time: 4 seconds
(vi)矽烷偶合劑處理 最後,施以矽烷偶合劑處理,在防鏽處理層的最外表面的鍍鉻層上形成矽烷偶合劑層。藉由塗佈濃度0.2質量%的3-胺基丙基三甲氧基矽烷水溶液並以100℃加以乾燥來實行矽烷偶合劑層的形成。 (vi) Silane Coupling Agent Treatment Finally, a silane coupling agent treatment is applied to form a silane coupling agent layer on the chromium plating layer at the outermost surface of the rust-proof layer. The silane coupling agent layer is formed by applying a 0.2% by mass aqueous solution of 3-aminopropyltrimethoxysilane and drying it at 100°C.
[表1] [Table 1]
[表2] [Table 2]
對於以上述方式獲得的實施例1~23及比較例1~14的表面處理銅箔實行各種評估。以下說明評估項目和評估方法。又,評估結果示於表1、2。 <蒸餾水的接觸角> 在表面處理銅箔的表面處理層(亦即矽烷偶合劑層)上貼合樹脂製構件來製成覆銅積層板。作為樹脂製構件,使用下述之物。亦即,關於實施例1~20及比較例1~11,使用將2片低介電聚苯醚系樹脂基材膜(Panasonic股份有限公司製造的超低傳輸損失/高耐熱多層基板材料MEGTRON7N(商品名),厚度60μm)重疊並加以貼合而得者來作為樹脂製構件。 Various evaluations were performed on the surface-treated copper foils of Examples 1-23 and Comparative Examples 1-14 obtained in the manner described above. The evaluation items and methods are explained below. The evaluation results are shown in Tables 1 and 2. <Contact Angle of Distilled Water> A copper-clad laminate was manufactured by bonding a resin component to the surface-treated layer (i.e., the silane coupling agent layer) of the surface-treated copper foil. The following material was used as the resin component. That is, in Examples 1-20 and Comparative Examples 1-11, the resin components were made by overlapping and bonding two low-dielectric polyphenylene ether resin substrate films (MEGTRON7N (trade name), ultra-low transmission loss/high heat resistance multilayer substrate material manufactured by Panasonic Corporation, 60 μm thick).
又,關於實施例21及比較例12,是使用台燿科技股份有限公司製造的ThunderClad3+(商品名),關於實施例22及比較例13,是使用NIPPON STEEL Chemical & Material股份有限公司製造的ESPANEX(註冊商標),關於實施例23及比較例14,是使用可樂麗股份有限公司製造的液晶聚合物膜Vecstar(註冊商標)。 再者,表面處理銅箔與樹脂製構件的貼合是在遵照各樹脂的製程指南之條件下實行。 Furthermore, in Embodiment 21 and Comparative Example 12, ThunderClad3+ (trade name) manufactured by Tai-Yao Technology Co., Ltd. was used; in Embodiment 22 and Comparative Example 13, ESPANEX (registered trademark) manufactured by NIPPON STEEL Chemical & Material Co., Ltd. was used; and in Embodiment 23 and Comparative Example 14, Vecstar (registered trademark) liquid crystal polymer film manufactured by Kuraray Co., Ltd. was used. Furthermore, the bonding of the surface-treated copper foil to the resin-made components was performed in accordance with the process guidelines for each resin.
使用作為蝕刻液的氯化銅與鹽酸之混合液來對此覆銅積層板進行蝕刻,將表面處理銅箔全部去除。對剩餘的樹脂製構件充分進行水洗後,對於樹脂製構件的貼合過表面處理銅箔之表面(轉印表面),根據JIS R3257:1999規定的固著液滴法來測定蒸餾水的接觸角θ 1。 The copper-clad laminate was etched using a mixture of copper chloride and hydrochloric acid as the etching solution to remove all the surface-treated copper foil. After thoroughly washing the remaining resin components with water, the contact angle θ1 of the distilled water on the surface of the resin components where the surface-treated copper foil was bonded (transfer surface) was measured according to the fixation droplet method specified in JIS R3257: 1999 .
另一方面,另外準備與接合於表面處理銅箔的表面處理層上的樹脂製構件相同種類的樹脂製構件,對於此另一樹脂製構件,在不貼合表面處理銅箔的情形下,實行與製作覆銅積層板時的上述順序相同的操作,對於其表面(非轉印表面)依據上述固著液滴法來測定蒸餾水的接觸角θ 0。然而,計算接觸角θ 0與接觸角θ 1的差值θ 0-θ 1。 On the other hand, another resin component of the same type as the resin component bonded to the surface treatment layer of the surface-treated copper foil is prepared. For this other resin component, without adhering to the surface-treated copper foil, the same operation as described above when manufacturing the copper-clad laminate is performed, and the contact angle θ0 of the distilled water on its surface (non-transfer surface) is measured using the aforementioned fixed droplet method. However, the difference between the contact angle θ0 and the contact angle θ1 , θ0 - θ1 , is calculated.
<表面處理銅箔的算術平均粗糙度Sa及樹脂製構件的算術平均粗糙度Sa、芯部的空間的容積Vvc> 使用基恩斯股份有限公司製造的雷射共軛焦顯微鏡VK-X1050和VK-X1000,依照ISO25178來測定表面處理銅箔的表面處理層(亦即矽烷偶合劑層)的表面的算術平均粗糙度Sa、及測定銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1後的樹脂製構件的轉印表面的算術平均粗糙度Sa、芯部的空間的容積Vvc。 <Arithmetic mean roughness Sa of surface-treated copper foil and arithmetic mean roughness Sa of resin components, and volume Vvc of the core space> Using laser confocal microscopes VK-X1050 and VK-X1000 manufactured by Keynes Corporation, the arithmetic mean roughness Sa of the surface treatment layer (i.e., silane coupling agent layer) of surface-treated copper foil and the arithmetic mean roughness Sa of the transfer surface of resin components after etching the copper foil at a distilled water contact angle θ1 were measured in accordance with ISO25178.
再者,雷射共軛焦顯微鏡的物鏡倍率為100倍,掃描模式是雷射共軛焦,測定尺寸為2048×1536,測定品質為高精度(High Precision),間距(pitch)為0.08μm。 又,算術平均粗糙度Sa、芯部的空間的容積Vvc的演算是依以下所示的濾波器處理和演算條件實行。 Furthermore, the laser confocal microscope has an objective magnification of 100x, a scanning mode of laser confocal, a measurement size of 2048 × 1536, a measurement quality of high precision, and a pitch of 0.08 μm. Also, the arithmetic mean roughness Sa and the core space volume Vvc are calculated according to the filter processing and calculation conditions shown below.
圖像處理:平滑化處理、3×3、中值(median) S濾波器:無 F-操作(F-operation):平面傾斜補正 L濾波器:0.025μm 演算對象面積:100μm×100μm 負載曲線的負載面積率:10%和90% Image Processing: Smoothing, 3×3, Median S-Filter: None F-Operation: Plane Tilt Correction L-Filter: 0.025μm Calculated Object Area: 100μm×100μm Load Area Ratio of Load Curve: 10% and 90%
<電路加工性> 在為了測定銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1而製作者相同的覆銅積層板的表面處理銅箔上,藉由減去法形成線距和間距(L&S)為50/50μm的阻劑圖案。然後,實行表面處理銅箔的蝕刻,而形成具有線路圖案之電路。作為阻劑,是使用乾蝕膜,作為蝕刻液,是使用含有氯化銅和鹽酸之混合液。 <Circuit Processability> On a surface-treated copper foil of the same type used to measure the distilled water contact angle θ1 of the transfer surface after copper foil etching, a resist pattern with a line spacing and pitch (L&S) of 50/50 μm was formed by subtraction. Then, the surface-treated copper foil was etched to form a circuit with the circuit pattern. A dry etching film was used as the resist, and a mixture containing copper chloride and hydrochloric acid was used as the etching solution.
然後,測定所獲得的電路的蝕刻因子(Ef)。所謂蝕刻因子,是將銅箔的厚度設為H,將所形成的電路的底部寬度設為B,將所形成的電路的頂部寬度設為T時以式Ef=2H/(B-T)表示的值。 切割形成有電路的覆銅積層板,來露出與樹脂製構件的表面正交之剖面,利用掃描式電子顯微鏡觀察電路的剖面。然後,測定圖2所示的剖面上的角度X和角度Y。角度X是連結電路31的頂部端部31a與底部端部31b之直線與樹脂製構件的表面所成之角度。角度Y是電路31的底部端部31b的切線與樹脂製構件的表面所成之角度。 Then, the etching factor (Ef) of the obtained circuit is measured. The etching factor is a value expressed by the formula Ef = 2H/(B-T) when the copper foil thickness is set to H, the bottom width of the formed circuit is set to B, and the top width of the formed circuit is set to T. The copper-clad laminate with the circuit is cut to expose a cross-section orthogonal to the surface of the resin component. The cross-section of the circuit is observed using a scanning electron microscope. Then, angles X and Y on the cross-section shown in Figure 2 are measured. Angle X is the angle between the straight line connecting the top end 31a and the bottom end 31b of circuit 31 and the surface of the resin component. Angle Y is the angle between the tangent of the bottom end 31b of circuit 31 and the surface of the resin component.
更詳細定義電路31的底部端部31b的切線。在從樹脂製構件的底部側的表面起算高度為1.5μm的位置畫出與樹脂製構件的表面平行的直線,將連接該直線與電路31的側面的交點31c與底部端部31b之直線定義為「電路31的底部端部31b的切線」,將此切線與樹脂製構件的表面所成之角度定義為角度Y。The tangent at the bottom end 31b of circuit 31 is defined in more detail. A straight line parallel to the surface of the resin component is drawn at a height of 1.5 μm from the bottom side surface of the resin component. The straight line connecting the intersection point 31c of this line and the side surface of circuit 31 with the bottom end 31b is defined as the "tangent at the bottom end 31b of circuit 31". The angle between this tangent and the surface of the resin component is defined as angle Y.
對於1個電路觀察任意5個剖面,分別測定角度X和角度Y。然後,對於角度X、角度Y皆計算5個測定值的平均值。將結果示於表1、2。在表1、2中,Ef為2.5以上且角度Y比角度X更大者表示為「A」,Ef為2.0以上但小於2.5且角度Y比角度X更大者表示為「B」,除此以外者表示為「C」。再者,圖2的(a)是示出角度Y比角度X更小之電路31的例子的圖,圖2的(b)是示出角度Y比角度X更大之電路31的例子的圖。For a single circuit, observe any five cross-sections and measure angles X and Y respectively. Then, calculate the average of the five measured values for both angle X and angle Y. The results are shown in Tables 1 and 2. In Tables 1 and 2, circuits with Ef greater than 2.5 and angle Y larger than angle X are denoted as "A", circuits with Ef greater than 2.0 but less than 2.5 and angle Y larger than angle X are denoted as "B", and all others are denoted as "C". Furthermore, Figure 2(a) shows an example of circuit 31 where angle Y is smaller than angle X, and Figure 2(b) shows an example of circuit 31 where angle Y is larger than angle X.
<傳輸損失> 使用與為了測定銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1而製作者相同的覆銅積層板來製作形成有帶狀線路之印刷線路板,評估傳輸特性。形成於此印刷線路板上的帶狀線路的電路寬度設為140μm,電路長度設為76mm。 <Transmission Loss> A printed circuit board with strip lines was fabricated using the same copper-clad laminate used to measure the distilled water contact angle θ1 of the transfer surface after copper foil etching, and the transmission characteristics were evaluated. The circuit width of the strip lines formed on this printed circuit board was set to 140 μm, and the circuit length was set to 76 mm.
使用Keysight Technologies公司製造的網路分析儀N5291A(商品名)來對形成於此印刷線路板上的電路傳輸高頻訊號,測定傳輸損失。特性阻抗設為50Ω。傳輸損失的測定值意指絕對值越小,傳輸損失越少(亦即能夠良好地傳輸高頻訊號)。將結果示於表1、2。在表1、2中,當40GHz時的傳輸損失的絕對值小於3.0dB/76mm時表示為「A」,當為3.0dB/76mm以上且小於3.6dB/76mm時表示為「B」,當為3.6dB/76mm以上時表示為「C」。A Keysight Technologies N5291A network analyzer was used to measure the transmission loss of high-frequency signals transmitted on this printed circuit board. The characteristic impedance was set to 50Ω. The measured transmission loss value means that the smaller the absolute value, the less the transmission loss (i.e., the better the transmission of high-frequency signals). The results are shown in Tables 1 and 2. In Tables 1 and 2, an absolute value of transmission loss at 40GHz less than 3.0dB/76mm is represented as "A", a value greater than or equal to 3.0dB/76mm but less than 3.6dB/76mm is represented as "B", and a value greater than or equal to 3.6dB/76mm is represented as "C".
<異物的發生> 使用作為蝕刻液的氯化銅與鹽酸之混合液來對與為了測定銅箔蝕刻後的轉印表面的蒸餾水接觸角θ 1而製作者相同的覆銅積層板進行蝕刻,將表面處理銅箔全部去除。對剩餘的樹脂製構件充分進行水洗後,對樹脂製構件的貼合過表面處理銅箔之表面(轉印表面)依序重疊用於製作上述覆銅積層板的樹脂製構件相同種類的樹脂製構件及表面處理銅箔來加以貼合,進一步依與上述相同的順序進行蝕刻來將面處理銅箔全部去除。藉此,獲得由2個樹脂製構件貼合而成之樹脂製試料。 <Foreign Object Occurrence> A mixture of copper chloride and hydrochloric acid was used as the etching solution to etch a copper-clad laminate identical to those used to measure the distilled water contact angle θ1 of the transfer surface after copper foil etching, removing all surface-treated copper foil. After thoroughly washing the remaining resin components, the surface of the resin components with the surface-treated copper foil (transfer surface) was sequentially overlapped with a resin component and surface-treated copper foil of the same type used to make the aforementioned copper-clad laminate, and then etched again in the same order to remove all surface-treated copper foil. In this way, a resin sample consisting of two resin components bonded together was obtained.
繼而,裁切所獲得的樹脂製試料,製程單邊為5cm的正方形。然後,利用顯微鏡以放大35倍的方式觀察所裁切的樹脂製試料,測定直徑為1mm以上的黑點的數量。此黑點是由產生於所貼合的2個樹脂製構件之間的異物所引起。顯微鏡的觀察是用以下方式實行:從後來貼合的樹脂製構件的一側觀察最初構成覆銅積層板的樹脂製構件的轉印表面。將結果示於表1、2。在表1、2中,當每1個所裁切的樹脂製試料的黑點的個數為2個以下時表示為「A」,當為3個以上且5個以下時表示為「B」,當超過5個時表示為「C」。Next, the obtained resin sample was cut into squares with each side measuring 5 cm. The cut resin sample was then observed under a microscope at 35x magnification to determine the number of black spots with a diameter greater than 1 mm. These black spots were caused by foreign matter generated between the two bonded resin components. Microscopic observation was performed by observing the transfer surface of the resin component that initially formed the copper-clad laminate from the side of the later-bonded resin component. The results are shown in Tables 1 and 2. In Tables 1 and 2, when the number of black spots in each cut resin sample is 2 or less, it is represented as "A"; when it is 3 or more but less than 5, it is represented as "B"; and when it is more than 5, it is represented as "C".
由表1、2可知,實施例1~23的表面處理銅箔儘管表面處理層的表面的算術平均粗糙度Sa被控制在0.04μm以上且0.30μm以下之間,但用於表示樹脂製基材的轉印表面的溼潤性之接觸角θ 0與接觸角θ 1的差值θ 0-θ 1得到良好的控制,因此電路加工性優異,並且不易產生傳輸損失及發生異物的情形。 As shown in Tables 1 and 2, although the arithmetic mean roughness Sa of the surface treatment layer of the surface-treated copper foil in Examples 1 to 23 is controlled between 0.04 μm and 0.30 μm, the difference θ0 - θ1 between the contact angle θ0 and the contact angle θ1, which is used to represent the wettability of the transfer surface of the resin substrate, is well controlled. Therefore, the circuit processing performance is excellent, and transmission loss and foreign matter are not easily generated.
又,其中,實施例1~4、10~14、17、18、21~23的表面處理銅箔由於樹脂製基材的轉印表面的算術平均粗糙度Sa和芯部的空間的容積Vvc得到良好的控制,因此電路加工性進一步優異,並且進一步不易產生發生異物的情形。 相對於此,比較例1~14的表面處理銅箔由於樹脂製基材的轉印表面的溼潤性較低,因此電路加工性、傳輸損失、及異物的發生之中的任一特性皆不充分。 Furthermore, in Examples 1-4, 10-14, 17, 18, and 21-23, the surface-treated copper foils exhibit superior circuit processability and are less prone to foreign matter formation due to well-controlled arithmetic mean roughness Sa of the resin-based transfer surface and Vvc of the core space. In contrast, the surface-treated copper foils in Comparative Examples 1-14 suffer from lower wettability of the resin-based transfer surface, resulting in insufficient circuit processability, transmission loss, and foreign matter formation.
10:銅箔基體 20:表面處理層 20a:表面處理層的表面 21:粗糙化處理層 22:防鏽處理層 30:表面處理銅箔 31:電路 31a:頂部端部 31b:底部端部 40:樹脂製基材(樹脂製構件) 40a:轉印表面 41:樹脂製基材 50:覆銅積層板 60:印刷線路板 100:異物 10: Copper foil substrate 20: Surface treatment layer 20a: Surface of the surface treatment layer 21: Roughening treatment layer 22: Rust-proof treatment layer 30: Surface-treated copper foil 31: Circuit 31a: Top end 31b: Bottom end 40: Resin substrate (resin component) 40a: Transfer surface 41: Resin substrate 50: Copper-clad laminate 60: Printed circuit board 100: Foreign object
圖1是說明依據本發明的一實施形態的表面處理銅箔的構成之剖面圖。 圖2是說明樹脂製基材的轉印表面的溼潤性之圖。 圖3是說明依據本發明的一實施形態的覆銅積層板及印刷線路板的製造方法之圖。 Figure 1 is a cross-sectional view illustrating the structure of a surface-treated copper foil according to an embodiment of the present invention. Figure 2 is a diagram illustrating the wettability of the transfer surface of a resin-based substrate. Figure 3 is a diagram illustrating a method for manufacturing a copper-clad laminate and a printed circuit board according to an embodiment of the present invention.
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20a:表面處理層的表面 30:表面處理銅箔 31:電路 40:樹脂製基材(樹脂製構件) 40a:轉印表面 41:樹脂製基材 50:覆銅積層板 60:印刷線路板 100:異物 20a: Surface of the surface treatment layer 30: Surface-treated copper foil 31: Circuit 40: Resin substrate (resin component) 40a: Transfer surface 41: Resin substrate 50: Copper-clad laminate 60: Printed circuit board 100: Foreign matter
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| WO2020105289A1 (en) | 2018-11-19 | 2020-05-28 | 三井金属鉱業株式会社 | Surface-treated copper foil, carrier-attached copper foil, copper-clad laminate, and printed wiring board |
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| CN107113982A (en) * | 2014-12-25 | 2017-08-29 | 住友电气工业株式会社 | Printing distributing board substrate, the method for making printing distributing board substrate, printing distributing board, the method and resin base material for making printing distributing board |
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