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TWI839974B - A heat dissipation module for heat exchange between two phase flow circulation vapor chamber and cold liquid fuild - Google Patents

A heat dissipation module for heat exchange between two phase flow circulation vapor chamber and cold liquid fuild Download PDF

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Publication number
TWI839974B
TWI839974B TW111145655A TW111145655A TWI839974B TW I839974 B TWI839974 B TW I839974B TW 111145655 A TW111145655 A TW 111145655A TW 111145655 A TW111145655 A TW 111145655A TW I839974 B TWI839974 B TW I839974B
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heat
steam chamber
phase flow
heat dissipation
flow circulation
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TW111145655A
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Chinese (zh)
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TW202420532A (en
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陳振賢
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大陸商廣州力及熱管理科技有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20318Condensers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20309Evaporators
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20327Accessories for moving fluid, for connecting fluid conduits, for distributing fluid or for preventing leakage, e.g. pumps, tanks or manifolds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20336Heat pipes, e.g. wicks or capillary pumps
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

A heat dissipation module for heat exchange between two phase flow circulation vapor chamber and cold liquid fluid includes a heat exchanger and a vapor chamber with two-phase flow circulation. The heat exchanger includes a case, an inlet, an outlet and a heat exchanging chamber. The case has a below hole. The inlet and the outlet are respectively connected through the heat exchanging chamber. The vapor chamber includes a condenser end and an evaporator end. The condenser end is set inside the heat exchanging chamber that penetrate the case through the below hole. The evaporator end is set outside the heat exchanging chamber for contacting with a heat source. Compared with the prior art, the heat dissipation module using two phase flow circulation vapor chamber and cold liquid fluid for heat exchange of the invention provides an excellent heat-dissipating efficiency.

Description

一種利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組 A heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid

本發明係關於一種水冷板式散熱技術的散熱模組,尤其是指一種高效利用兩相流循環蒸氣腔與冷液態流體進行熱交換之液冷式散熱模組。 The present invention relates to a heat dissipation module using a water-cooled plate heat dissipation technology, and more particularly to a liquid-cooled heat dissipation module that efficiently utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange.

隨著數據中心服務器及車載自動駕駛人工智能的半導體晶片發展,晶片朝著更高運算力和更高積集度的方向發展,這意味著電子晶片在單位體積或面積內的發熱功耗將會急遽升高。傳統的風冷強迫對流技術將難以滿足某些IC電子元件的散熱需求,而水冷散熱技術成為解決高熱流密度散熱的主流。 With the development of semiconductor chips for data center servers and in-vehicle autonomous driving artificial intelligence, chips are moving towards higher computing power and higher integration, which means that the heat dissipation of electronic chips per unit volume or area will increase sharply. Traditional air-cooled forced convection technology will find it difficult to meet the heat dissipation requirements of some IC electronic components, and water-cooled heat dissipation technology has become the mainstream solution for high heat flux density heat dissipation.

請參閱圖1,圖1為習知水冷板散熱裝置9之示意圖。習知水冷板散熱裝置9包含一具有熱交換腔體91的水冷板金屬殼體90。發熱電子元件94接觸水冷板金屬殼體90。水冷板金屬殼體90內設置有金屬板塊93以增加散熱面積。而發熱電子元件94通過熱傳導將熱量經過水冷板金屬殼體90傳遞至金屬板塊93,同時金屬板塊93設計有不同結構的流道。冷卻液通過熱交換腔體91內的流道與金屬板塊93之間形成對流換熱,從而間接帶走電 子元件94的發熱功耗。 Please refer to FIG. 1, which is a schematic diagram of a conventional water-cooled plate heat dissipation device 9. The conventional water-cooled plate heat dissipation device 9 includes a water-cooled plate metal shell 90 having a heat exchange cavity 91. A heat-generating electronic component 94 contacts the water-cooled plate metal shell 90. A metal plate 93 is disposed in the water-cooled plate metal shell 90 to increase the heat dissipation area. The heat-generating electronic component 94 transfers heat to the metal plate 93 through the water-cooled plate metal shell 90 by heat conduction, and the metal plate 93 is designed with flow channels of different structures. The cooling liquid forms convection heat exchange between the flow channel in the heat exchange cavity 91 and the metal plate 93, thereby indirectly taking away the heat consumption of the electronic component 94.

習知水冷板散熱裝置9主要是以熱傳導方式將高能量密度的熱量透過鋁金屬殼或銅金屬殼傳導給熱交換腔體91內的金屬板塊93,再與熱交換腔體91內的冷卻液進行熱交換。由於高強度運算的晶片功率越來越高,產業界對於降低熱傳導路徑熱阻的水冷板散熱裝置9的需求恐急,需要有更有效率的水冷板式散熱器技術以解決高功率高運算力晶片降溫及散熱的問題。 It is known that the water-cooled plate heat sink 9 mainly conducts high energy density heat through the aluminum metal shell or copper metal shell to the metal plate 93 in the heat exchange cavity 91 by heat conduction, and then exchanges heat with the cooling liquid in the heat exchange cavity 91. As the power of high-intensity computing chips is getting higher and higher, the industry is in urgent need of water-cooled plate heat sinks 9 that reduce the thermal resistance of the heat conduction path. A more efficient water-cooled plate heat sink technology is needed to solve the problem of cooling and dissipating high-power and high-computing chips.

有鑑於此,本發明提供一種利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,以解決先前技術的問題。 In view of this, the present invention provides a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange to solve the problems of the prior art.

本發明提供一種利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組包含熱交換器以及一具有兩相流循環的蒸氣腔元件。熱交換器包含一殼體、一輸入管、一輸出管以及一熱交換腔體。殼體具有一下開孔洞,並且輸入管以及輸出管連通熱交換腔體。蒸氣腔元件對應熱交換器的殼體的下開孔洞並且包含一冷凝端以及一吸熱端。冷凝端透過下開孔洞貫穿殼體,使得冷凝端設置於熱交換腔體內。吸熱端設置於熱交換腔體的外部並且用以接觸一發熱源。 The present invention provides a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, including a heat exchanger and a steam chamber element with a two-phase flow circulation. The heat exchanger includes a shell, an input pipe, an output pipe, and a heat exchange chamber. The shell has a lower opening hole, and the input pipe and the output pipe are connected to the heat exchange chamber. The steam chamber element corresponds to the lower opening hole of the shell of the heat exchanger and includes a condensation end and a heat absorption end. The condensation end penetrates the shell through the lower opening hole, so that the condensation end is arranged in the heat exchange chamber. The heat absorption end is arranged outside the heat exchange chamber and is used to contact a heat source.

其中,熱交換腔體、輸入管以及輸出管中均設置有冷卻液,並且冷卻液用以與蒸氣腔元件的冷凝端進行熱交換。 Among them, cooling liquid is provided in the heat exchange cavity, the input pipe and the output pipe, and the cooling liquid is used to exchange heat with the condensation end of the steam cavity element.

其中,冷卻液為水、丙酮、氨、甲醇、四氯乙烷以及氫氟烴類化學制冷劑之其中一者。 The cooling liquid is one of water, acetone, ammonia, methanol, tetrachloroethane and hydrofluorocarbon chemical refrigerants.

其中,蒸氣腔元件包含至少一個散熱鰭片耦接冷凝端。 Wherein, the steam chamber element includes at least one heat sink fin coupled to the condensation end.

進一步地,每一散熱鰭片具有複數個微流道,並且該等微流道的延伸方向係平行於輸入管的延伸方向。 Furthermore, each heat sink fin has a plurality of microchannels, and the extension direction of the microchannels is parallel to the extension direction of the inlet pipe.

其中,蒸氣腔元件為三維蒸氣腔元件,其進一步包含有一上蓋、一下蓋、一毛細結構以及一工作流體。上蓋具有一管體、一上外表面以及一上內表面。管體具有管體空腔以及一管體內表面。下蓋匹配上蓋並且具有一下外表面以及一下內表面。當下蓋封合於上蓋時,管體空腔形成密閉氣腔。毛細結構連續設置於上內表面、管體內表面以及下內表面。工作流體設置於密閉氣腔中。 The steam chamber element is a three-dimensional steam chamber element, which further includes an upper cover, a lower cover, a capillary structure and a working fluid. The upper cover has a tube, an upper outer surface and an upper inner surface. The tube has a tube cavity and a tube inner surface. The lower cover matches the upper cover and has a lower outer surface and a lower inner surface. When the lower cover is sealed to the upper cover, the tube cavity forms a closed air cavity. The capillary structure is continuously arranged on the upper inner surface, the tube inner surface and the lower inner surface. The working fluid is arranged in the closed air cavity.

其中,管體係一體成型於上外表面並且自上外表面向外突出,並且下蓋具有下蓋空腔。當下蓋封合於上蓋時,管體空腔以及下蓋空腔形成密閉氣腔。 The tube body is integrally formed on the upper outer surface and protrudes outward from the upper outer surface, and the lower cover has a lower cover cavity. When the lower cover is sealed to the upper cover, the tube body cavity and the lower cover cavity form a closed air cavity.

其中,工作流體為水、丙酮、氨、甲醇、四氯乙烷以及氫氟烴類化學制冷劑之其中一者。 The working fluid is one of water, acetone, ammonia, methanol, tetrachloroethane and hydrofluorocarbon chemical refrigerants.

其中,相對於管體的下內表面上所設置的毛細結構的厚度大於其餘下內表面上所設置的毛細結構的厚度。 Wherein, the thickness of the capillary structure arranged on the lower inner surface relative to the tube body is greater than the thickness of the capillary structure arranged on the remaining lower inner surfaces.

其中,管體的長度和下蓋與上蓋封合後的厚度的比值大於10。 Among them, the ratio of the length of the tube body to the thickness after the lower cover and the upper cover are sealed is greater than 10.

綜上所述,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組可透過具兩相流循環的蒸氣腔元件的冷凝端直接與熱交換腔體中的冷卻液接觸,不需再透過冷凝端與熱交換器的外殼之間熱傳導的層層熱阻,進而提升散熱效率。並且,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的蒸氣腔元件可透過散熱鰭片以及 設置於散熱鰭片上的微流道增加冷凝端與冷卻液之間的接觸面積,進而提升散熱效率。再者,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組可透過的三維蒸氣腔元件的完整且連續的毛細結構,因此液相工作流體能夠順利且快速地回流至吸熱端以再次吸取發熱源所產生的熱能,進而提升散熱效率。此外,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組也可透過多個蒸氣腔元件分別接觸多個發熱源並且於同一個熱交換器中進行散熱,並且也可透過多個蒸氣腔元件接觸多個發熱源並且於同一個熱交換器中進行散熱。 In summary, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can directly contact the cooling liquid in the heat exchange chamber through the condensation end of the steam chamber element with two-phase flow circulation, and no longer needs to pass through the layers of thermal resistance of heat conduction between the condensation end and the outer shell of the heat exchanger, thereby improving the heat dissipation efficiency. In addition, the steam chamber element of the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can increase the contact area between the condensation end and the cooling liquid through the heat dissipation fins and the microchannels arranged on the heat dissipation fins, thereby improving the heat dissipation efficiency. Furthermore, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can pass through the complete and continuous capillary structure of the three-dimensional steam chamber element, so that the liquid phase working fluid can smoothly and quickly flow back to the heat absorption end to absorb the heat energy generated by the heat source again, thereby improving the heat dissipation efficiency. In addition, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can also contact multiple heat sources through multiple steam chamber elements and dissipate heat in the same heat exchanger, and can also contact multiple heat sources through multiple steam chamber elements and dissipate heat in the same heat exchanger.

1、3、4、4’、4”:利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組 1, 3, 4, 4’, 4”: Heat dissipation module that uses two-phase flow circulation to exchange heat between the steam chamber and the cold liquid fluid

11、31、41、41’:熱交換器 11, 31, 41, 41’: heat exchanger

110:殼體 110: Shell

1102、3102:下開孔洞 1102, 3102: Bottom opening hole

111、311、91:輸入管 111, 311, 91: input tube

112、312、92:輸出管 112, 312, 92: output tube

121:冷凝端 121: Condensation end

122:吸熱端 122: Heat absorbing end

1231、3231:微流道 1231, 3231: Microchannel

221.上蓋 221. Upper cover

2211、2211’、2211”、4211:管體 2211, 2211’, 2211”, 4211: Tube body

2212、2212’、2212”:管體空腔 2212, 2212’, 2212”: Tube cavity

2213:管體內表面 2213: Inner surface of tube body

2214:上外表面 2214: Upper outer surface

1101、3101、4101’、91:熱交換腔體 1101, 3101, 4101’, 91: heat exchange chamber

12、22、22’、22”、32、42、42’、42”:蒸氣腔元件 12, 22, 22’, 22”, 32, 42, 42’, 42”: steam chamber components

123、323、423、423’、423”:散熱鰭片 123, 323, 423, 423’, 423”: heat sink fins

2215:上內表面 2215: Upper inner surface

222、222”:下蓋 222, 222”: Lower cover

2221:下外表面 2221: Lower outer surface

2222、2222’、2222”:下內表面 2222, 2222’, 2222”: lower inner surface

2223:下蓋空腔 2223: Lower cover cavity

224、224’、224”:毛細結構 224, 224’, 224”: capillary structure

7:發熱源 7: Heat source

8:均溫板 8: Temperature balancing board

9:水冷板散熱裝置 9: Water cooling plate heat dissipation device

90:水冷板金屬殼體 90: Water cooling plate metal shell

93:金屬板塊 93:Metal plate

94:電子元件 94: Electronic components

圖1係繪示習知技術的一種液冷散熱裝置的結構示意圖。 FIG1 is a schematic diagram showing the structure of a liquid cooling device according to the prior art.

圖2A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的結構示意圖。 FIG2A is a schematic diagram showing the structure of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange in a specific embodiment of the present invention.

圖2B係根據圖2A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的分解圖。 FIG2B is an exploded view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange based on FIG2A.

圖3係根據圖2A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的剖面圖。 FIG3 is a cross-sectional view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange based on FIG2A.

圖4A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的剖面結構示意圖。 FIG4A is a schematic cross-sectional view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange according to a specific embodiment of the present invention.

圖4B係繪示圖4A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組於另一視角的結構示意圖。 FIG. 4B is a schematic diagram showing the structure of the heat dissipation module of FIG. 4A that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid from another viewing angle.

圖5A係繪示本發明一具體實施例的兩相流循環蒸氣腔元件的剖面結構示意 圖。 FIG5A is a schematic diagram showing the cross-sectional structure of a two-phase flow circulation steam chamber element of a specific embodiment of the present invention.

圖5B係根據圖5A的兩相流循環蒸氣腔元件於運作時的示意圖。 FIG5B is a schematic diagram of the two-phase flow circulation steam chamber element in FIG5A during operation.

圖6A係繪示本發明一具體實施例的蒸氣腔元件的剖面結構示意圖。 FIG6A is a schematic diagram showing the cross-sectional structure of a vapor chamber element of a specific embodiment of the present invention.

圖6B係繪示本發明另一具體實施例的蒸氣腔元件的剖面結構示意圖。 FIG6B is a schematic diagram showing the cross-sectional structure of a vapor chamber element of another specific embodiment of the present invention.

圖7A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的分解圖。 FIG. 7A is a disassembled diagram of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange according to a specific embodiment of the present invention.

圖7B係根據圖7A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的剖面圖。 FIG. 7B is a cross-sectional view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid according to FIG. 7A .

圖7C係根據圖7A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組於另一視角的剖面圖。 FIG. 7C is a cross-sectional view of the heat dissipation module of FIG. 7A that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid at another viewing angle.

圖8A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的結構示意圖。 FIG8A is a schematic diagram showing the structure of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange in a specific embodiment of the present invention.

圖8B係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的分解圖。 FIG8B is an exploded view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange based on FIG8A.

圖8C係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的剖面圖。 FIG8C is a cross-sectional view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange based on FIG8A.

圖8D係繪示本發明一具體實施例的蒸氣腔元件以及發熱源的分布示意圖。 FIG8D is a schematic diagram showing the distribution of the steam chamber element and the heat source of a specific embodiment of the present invention.

圖8E係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組於另一視角的剖面圖。 FIG8E is a cross-sectional view of the heat dissipation module of FIG8A that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid at another viewing angle.

圖9係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的剖面示意圖。 FIG9 is a schematic cross-sectional view of a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange according to a specific embodiment of the present invention.

圖10係繪示本發明另一具體實施例的利用兩相流循環蒸氣腔與冷液態流體 進行熱交換之散熱模組的剖面示意圖。 FIG. 10 is a cross-sectional schematic diagram showing another specific embodiment of the present invention, which is a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange.

為了讓本發明的優點,精神與特徵可以更容易且明確地了解,後續將以具體實施例並參照所附圖式進行詳述與討論。需注意的是,這些具體實施例僅為本發明代表性的具體實施例,其中所舉例的特定方法、裝置、條件、材質等並非用以限定本發明或對應的具體實施例。又,圖中各元件僅係用於表達其相對位置且未按其實際比例繪述,本發明之步驟編號僅為區隔不同步驟,並非代表其步驟順序,合先敘明。 In order to make the advantages, spirit and features of the present invention easier and clearer to understand, the following will be described and discussed in detail with reference to the attached drawings using specific embodiments. It should be noted that these specific embodiments are only representative specific embodiments of the present invention, and the specific methods, devices, conditions, materials, etc. cited therein are not used to limit the present invention or the corresponding specific embodiments. In addition, the components in the figure are only used to express their relative positions and are not drawn according to their actual proportions. The step numbers of the present invention are only used to separate different steps and do not represent the order of the steps, which should be explained first.

請一併參閱圖2A、2B以及圖3。圖2A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1的結構示意圖。圖2B係根據圖2A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1的分解圖。圖3係根據圖2A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1的剖面圖。如圖2A、圖2B及圖3所示,在本具體實施例中,利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1包含熱交換器11以及具兩相流循環的蒸氣腔元件12。熱交換器11包含殼體110、輸入管111、輸出管112以及容置冷卻液的熱交換腔體1101。殼體110具有下開孔洞1102,並且輸入管111、輸出管112以及下開孔洞1102連通熱交換腔體1101。具兩相流循環的蒸氣腔元件12對應熱交換器11的殼體110的下開孔洞1102並且包含冷凝端121以及吸熱端122。冷凝端121透過下開孔洞1102貫穿殼體110,使得冷凝端121設置於熱交換腔體1101內,並且吸熱端122設置於熱交換腔體1101的外部以接觸發熱源7。其中,發熱源7可為電子產品的晶片或晶片封裝外殼。 Please refer to Figures 2A, 2B and 3 together. Figure 2A is a structural schematic diagram of a heat dissipation module 1 that uses a two-phase flow circulation steam chamber to perform heat exchange with a cold liquid fluid according to a specific embodiment of the present invention. Figure 2B is an exploded view of the heat dissipation module 1 that uses a two-phase flow circulation steam chamber to perform heat exchange with a cold liquid fluid according to Figure 2A. Figure 3 is a cross-sectional view of the heat dissipation module 1 that uses a two-phase flow circulation steam chamber to perform heat exchange with a cold liquid fluid according to Figure 2A. As shown in Figures 2A, 2B and 3, in this specific embodiment, the heat dissipation module 1 that uses a two-phase flow circulation steam chamber to perform heat exchange with a cold liquid fluid includes a heat exchanger 11 and a steam chamber element 12 with a two-phase flow circulation. The heat exchanger 11 includes a housing 110, an input pipe 111, an output pipe 112, and a heat exchange chamber 1101 containing a cooling liquid. The housing 110 has a lower opening hole 1102, and the input pipe 111, the output pipe 112, and the lower opening hole 1102 are connected to the heat exchange chamber 1101. The steam chamber element 12 with two-phase flow circulation corresponds to the lower opening hole 1102 of the housing 110 of the heat exchanger 11 and includes a condensation end 121 and a heat absorption end 122. The condensation end 121 penetrates the housing 110 through the lower opening hole 1102, so that the condensation end 121 is arranged in the heat exchange chamber 1101, and the heat absorption end 122 is arranged outside the heat exchange chamber 1101 to trigger the heat source 7. The heat source 7 may be a chip or chip packaging shell of an electronic product.

於實務中,熱交換器11的輸入管111及輸出管112相對設置於熱交換器11的兩端。在一具體實施例中,輸入管111及輸出管112亦可設置於熱交換器11的殼體110的同一面。於實際應用時,熱交換器11的熱交換腔體1101、輸入管111及輸出管112皆設置有冷卻液。當熱交換器11運作時,冷卻液可自輸入管111流至熱交換腔體1101中,並且自熱交換腔體1101流至輸出管112(如圖3A中的箭頭所示)。於實務中,冷卻液可為水、丙酮、氨、甲醇、四氯乙烷或氫氟烴類化學制冷劑,但不限於此,冷卻液也可為其他具有吸熱且帶走熱能的流體。 In practice, the input pipe 111 and the output pipe 112 of the heat exchanger 11 are disposed at opposite ends of the heat exchanger 11. In a specific embodiment, the input pipe 111 and the output pipe 112 can also be disposed on the same surface of the shell 110 of the heat exchanger 11. In actual application, the heat exchange chamber 1101, the input pipe 111 and the output pipe 112 of the heat exchanger 11 are all provided with cooling liquid. When the heat exchanger 11 is in operation, the cooling liquid can flow from the input pipe 111 to the heat exchange chamber 1101, and from the heat exchange chamber 1101 to the output pipe 112 (as shown by the arrows in FIG. 3A ). In practice, the coolant can be water, acetone, ammonia, methanol, tetrachloroethane or hydrofluorocarbon chemical refrigerants, but is not limited thereto. The coolant can also be other fluids that absorb heat and carry away heat energy.

在本具體實施例中,具兩相流循環的蒸氣腔元件12的冷凝端121的尺寸可對應熱交換器11的下開孔洞1102的尺寸,並且包含一兩相流工作流體。當兩相流循環的蒸氣腔元件12設置於熱交換器11上時,兩相流循環的蒸氣腔元件12的冷凝端121可嵌入甚至緊配於熱交換器11的殼體110,以使冷凝端121位於殼體110的熱交換腔體1101中並且接觸熱交換腔體1101中的冷卻液。於實務中,當冷凝端121嵌入於熱交換器11的殼體110後,位於殼體110的外部的吸熱端122可透過黏合、焊接等方式與殼體110互相貼合固定連接,以防止熱交換器11中的冷卻液自下開孔洞1102流出,但不限於此。殼體110與吸熱端122之間也可設置防水墊,以防止熱交換器11中的冷卻液自下開孔洞1102流出。 In this specific embodiment, the size of the condensation end 121 of the steam chamber element 12 with two-phase flow circulation can correspond to the size of the lower opening hole 1102 of the heat exchanger 11, and contains a two-phase flow working fluid. When the steam chamber element 12 with two-phase flow circulation is set on the heat exchanger 11, the condensation end 121 of the steam chamber element 12 with two-phase flow circulation can be embedded in or even tightly fitted in the shell 110 of the heat exchanger 11, so that the condensation end 121 is located in the heat exchange chamber 1101 of the shell 110 and contacts the coolant in the heat exchange chamber 1101. In practice, after the condensing end 121 is embedded in the shell 110 of the heat exchanger 11, the heat absorbing end 122 located outside the shell 110 can be fixedly connected to the shell 110 by bonding, welding, etc. to prevent the coolant in the heat exchanger 11 from flowing out from the lower opening hole 1102, but it is not limited thereto. A waterproof pad can also be provided between the shell 110 and the heat absorbing end 122 to prevent the coolant in the heat exchanger 11 from flowing out from the lower opening hole 1102.

如圖3所示,當利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1運作時,接觸發熱源7的吸熱端122會吸取發熱源7所產生的熱能。此時,位於吸熱端122的毛細結構中的液相工作流體會吸取熱能而轉變為氣相工作流體,並且氣相工作流體將熱能帶至冷凝端121,再與熱交 換腔體1101中的冷卻液進行熱交換,自熱交換器11的輸入管111流入的冷卻液將會從冷凝端121吸取熱能。此時,兩相流循環蒸氣腔元件12中的氣相工作流體在冷凝端121轉變為液相工作流體,並且液相工作流體再藉由毛細結構回流至吸熱端122。接著,吸收熱能的冷卻液再從熱交換器11的輸出管112流出,以帶走發熱源7的熱能進而達到散熱的功能。因此,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組可透過具兩相流循環的蒸氣腔元件的冷凝端直接與熱交換器的冷卻液接觸,不需再透過冷凝端與熱交換器的外殼之間熱傳導的層層熱阻,進而提升散熱效率。 As shown in FIG3 , when the heat dissipation module 1 that utilizes the two-phase flow circulation steam chamber to exchange heat with the cold liquid fluid operates, the heat absorption end 122 that contacts the heat source 7 absorbs the heat energy generated by the heat source 7. At this time, the liquid phase working fluid in the capillary structure at the heat absorption end 122 absorbs the heat energy and changes into the gas phase working fluid, and the gas phase working fluid brings the heat energy to the condensation end 121, and then exchanges heat with the cooling liquid in the heat exchange chamber 1101, and the cooling liquid flowing in from the inlet pipe 111 of the heat exchanger 11 absorbs heat energy from the condensation end 121. At this time, the gas phase working fluid in the two-phase flow circulation steam chamber element 12 changes into the liquid phase working fluid at the condensation end 121, and the liquid phase working fluid flows back to the heat absorption end 122 through the capillary structure. Then, the cooling liquid that absorbs the heat energy flows out from the output pipe 112 of the heat exchanger 11 to take away the heat energy of the heat source 7 and achieve the function of heat dissipation. Therefore, the heat dissipation module of the present invention that uses a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange can directly contact the cooling liquid of the heat exchanger through the condensation end of the steam chamber element with a two-phase flow circulation, and no longer needs to pass through the layers of thermal resistance of heat conduction between the condensation end and the outer shell of the heat exchanger, thereby improving the heat dissipation efficiency.

請一併參閱圖4A及圖4B。圖4A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1的剖面結構示意圖。圖4B係繪示圖4A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組1於另一視角的結構示意圖。如圖4A及圖4B所示,在本具體實施例中,具兩相流循環的蒸氣腔元件12包含散熱鰭片123設置於冷凝端121。於實務中,散熱鰭片123可包含開孔(圖未示)並且可透過開孔套設於冷凝端121上,以使散熱鰭片123位於熱交換器11的熱交換腔體1101中並且接觸冷卻液。當位於吸熱端122因吸取熱能所形成的氣相工作流體流至冷凝端121時,氣相工作流體中的熱能不僅會傳導至冷凝端121,並且也會傳導至散熱鰭片123。因此,熱交換器11的冷卻液可同時從冷凝端121以及散熱鰭片123吸取熱能。也就是說,具兩相流循環的蒸氣腔元件12可透過散熱鰭片123增加冷凝端121與冷卻液之間的接觸面積,進而提升散熱效率。值得注意的是,設置於冷凝端的散熱鰭片的數量不限於圖中的4個,於實務中,散熱鰭片的數量也可為1個、2個、3個或5個以上,並且也可根據設計或需求 而決定。 Please refer to FIG. 4A and FIG. 4B together. FIG. 4A is a cross-sectional structural schematic diagram of a heat dissipation module 1 that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid in a specific embodiment of the present invention. FIG. 4B is a structural schematic diagram of the heat dissipation module 1 that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid in FIG. 4A from another viewing angle. As shown in FIG. 4A and FIG. 4B, in this specific embodiment, the steam chamber element 12 with two-phase flow circulation includes a heat dissipation fin 123 disposed at the condensation end 121. In practice, the heat sink 123 may include an opening (not shown) and may be sleeved on the condensation end 121 through the opening, so that the heat sink 123 is located in the heat exchange chamber 1101 of the heat exchanger 11 and contacts the cooling liquid. When the gas phase working fluid formed by absorbing heat energy at the heat absorption end 122 flows to the condensation end 121, the heat energy in the gas phase working fluid is not only transferred to the condensation end 121, but also transferred to the heat sink 123. Therefore, the cooling liquid of the heat exchanger 11 can absorb heat energy from the condensation end 121 and the heat sink 123 at the same time. In other words, the vapor chamber element 12 with two-phase flow circulation can increase the contact area between the condensation end 121 and the cooling liquid through the heat sink 123, thereby improving the heat dissipation efficiency. It is worth noting that the number of heat sink fins installed at the condensing end is not limited to 4 as shown in the figure. In practice, the number of heat sink fins can be 1, 2, 3 or more than 5, and can also be determined according to the design or requirements.

在本具體實施例中,散熱鰭片123可進一步包含複數個微流道1231,並且微流道1231的延伸方向平行於輸入管111的延伸方向。於實務中,複數個微流道1231互相平行排列,並且每一個微流道1231的延伸方向與輸入管111及輸出管112的連線方向相同,也就是說,微流道1231的延伸方向與冷卻液於輸入管111及輸出管112的流動方向相同。當熱交換器11帶走位於冷凝端121的熱能時,自輸入管111輸入的冷卻液可沿著散熱鰭片123的微流道1231流動,接著再順利地流至輸出管112,使得冷卻液不會在熱交換器11的熱交換腔體1101中產生紊流,以減少包含熱能的冷卻液位於熱交換腔體1101中的時間,進而提升散熱效率。進一步地,由於散熱鰭片123包含複數個微流道1231,因此也可增加散熱鰭片123與冷卻液之間的接觸面積,亦可提升散熱效率。此外,微流道1231也可設置於散熱鰭片123的上、下兩平面上(如圖4B所示),以提升散熱效率。 In this specific embodiment, the heat sink 123 may further include a plurality of microchannels 1231, and the extension direction of the microchannels 1231 is parallel to the extension direction of the input pipe 111. In practice, the plurality of microchannels 1231 are arranged in parallel with each other, and the extension direction of each microchannel 1231 is the same as the connection direction of the input pipe 111 and the output pipe 112, that is, the extension direction of the microchannel 1231 is the same as the flow direction of the coolant in the input pipe 111 and the output pipe 112. When the heat exchanger 11 takes away the heat energy at the condensation end 121, the cooling liquid input from the input pipe 111 can flow along the microchannel 1231 of the heat sink fin 123, and then smoothly flow to the output pipe 112, so that the cooling liquid will not generate turbulence in the heat exchange chamber 1101 of the heat exchanger 11, so as to reduce the time that the cooling liquid containing heat energy is in the heat exchange chamber 1101, thereby improving the heat dissipation efficiency. Furthermore, since the heat sink fin 123 includes a plurality of microchannels 1231, the contact area between the heat sink fin 123 and the cooling liquid can also be increased, and the heat dissipation efficiency can also be improved. In addition, the microchannel 1231 can also be disposed on the upper and lower planes of the heat sink fin 123 (as shown in FIG. 4B ) to improve the heat dissipation efficiency.

請一併參閱圖3、圖5A及圖5B。圖5A係繪示本發明一具體實施例的兩相流循環蒸氣腔元件22的剖面結構示意圖。圖5B係根據圖5A的兩相流循環蒸氣腔元件22於運作時的示意圖。如圖3、圖5A所示,在本具體實施例中,前述的具兩相流循環的兩相流循環蒸氣腔元件22為三維蒸氣腔元件。三維蒸氣腔元件包含上蓋221、下蓋222、毛細結構224以及工作流體(圖未示)。上蓋221具有管體2211、上外表面2214以及上內表面2215。管體2211具有管體空腔2212以及管體內表面2213,並且管體2211係一體成型於上外表面2214並且自上外表面2214向外突出。於實務中,管體2211係藉由沖壓的方式拉伸上蓋221而形成,並且管體2211的高度遠大於上蓋221的厚 度。下蓋222匹配上蓋221並且具有下外表面2221、下內表面2222以及下蓋空腔2223。當下蓋222封合於上蓋221時,管體空腔2212以及下蓋空腔2223形成一密閉氣腔。值得注意的是,在本具體實施例中,上蓋221的管體2211為前述的冷凝端121,並且下蓋222為前述的吸熱端122。管體2211用以貫穿殼體110的下開孔洞1102以設置於熱交換器11的熱交換腔體1101中,而下蓋222的下外表面2221用以接觸發熱源7。 Please refer to FIG. 3, FIG. 5A and FIG. 5B together. FIG. 5A is a schematic diagram showing a cross-sectional structure of a two-phase flow circulation steam chamber element 22 of a specific embodiment of the present invention. FIG. 5B is a schematic diagram of the two-phase flow circulation steam chamber element 22 in operation according to FIG. 5A. As shown in FIG. 3 and FIG. 5A, in this specific embodiment, the two-phase flow circulation steam chamber element 22 with two-phase flow circulation is a three-dimensional steam chamber element. The three-dimensional steam chamber element includes an upper cover 221, a lower cover 222, a capillary structure 224 and a working fluid (not shown). The upper cover 221 has a tube 2211, an upper outer surface 2214 and an upper inner surface 2215. The tube body 2211 has a tube body cavity 2212 and a tube body inner surface 2213, and the tube body 2211 is integrally formed on the upper outer surface 2214 and protrudes outward from the upper outer surface 2214. In practice, the tube body 2211 is formed by stretching the upper cover 221 by stamping, and the height of the tube body 2211 is much greater than the thickness of the upper cover 221. The lower cover 222 matches the upper cover 221 and has a lower outer surface 2221, a lower inner surface 2222 and a lower cover cavity 2223. When the lower cover 222 is sealed to the upper cover 221, the tube body cavity 2212 and the lower cover cavity 2223 form a closed air cavity. It is worth noting that in this specific embodiment, the tube body 2211 of the upper cover 221 is the aforementioned condensation end 121, and the lower cover 222 is the aforementioned heat absorption end 122. The tube body 2211 is used to penetrate the lower opening hole 1102 of the shell 110 to be set in the heat exchange cavity 1101 of the heat exchanger 11, and the lower outer surface 2221 of the lower cover 222 is used to contact the heat source 7.

毛細結構224連續設置於上內表面2215、管體內表面2213以及下內表面2222上。於實務中,毛細結構224可由舖設銅粉經燒結形成,亦可用漿料分別塗佈於上內表面2215、管體內表面2213以及下內表面2222並且經烘乾、裂解、燒結過程而形成。由於上蓋221以及管體2211係為一體成型,因此,上內表面2215以及管體內表面2213將會形成連續的毛細結構224。進一步地,當下蓋222透過焊接等方式封合於上蓋221後,上內表面2215以及下內表面2222的毛細結構224將會充分的接觸與連接,進而使三維蒸氣腔元件22具有完整且連續的毛細結構224。而工作流體用以設置於密閉氣腔中,並且工作流體可為水、丙酮、氨、甲醇、四氯乙烷或氫氟烴類化學制冷劑。 The capillary structure 224 is continuously disposed on the upper inner surface 2215, the inner surface 2213 of the tube body, and the lower inner surface 2222. In practice, the capillary structure 224 can be formed by laying copper powder and sintering, or by coating slurry on the upper inner surface 2215, the inner surface 2213 of the tube body, and the lower inner surface 2222, and then drying, cracking, and sintering. Since the upper cover 221 and the tube body 2211 are integrally formed, the upper inner surface 2215 and the inner surface 2213 of the tube body will form a continuous capillary structure 224. Furthermore, when the lower cover 222 is sealed to the upper cover 221 by welding or other methods, the capillary structures 224 of the upper inner surface 2215 and the lower inner surface 2222 will be fully in contact and connected, so that the three-dimensional vapor chamber element 22 has a complete and continuous capillary structure 224. The working fluid is used to be placed in the closed air cavity, and the working fluid can be water, acetone, ammonia, methanol, tetrachloroethane or hydrofluorocarbon chemical refrigerants.

如圖3、圖5A及圖5B所示,當利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組運作時,三維蒸氣腔元件22的下蓋222會吸取發熱源7所產生的熱能。此時,位於下蓋空腔2223以及下內表面2222的毛細結構224的工作流體亦會吸取熱能而轉變為氣相工作流體,並且氣相工作流體流至管體2211的管體空腔2212(如圖5B中較大的箭頭所示)。進一步地,氣相工作流體中的熱能將會傳導至管體2211,並且自熱交換器11的輸入管111 流入熱交換腔體1101的冷卻液將會從管體2211吸取熱能。此時,氣相工作流體轉變為液相工作流體,並且液相工作流體依序自管體內表面2213的毛細結構224流經上內表面2215的毛細結構224,接著再經由支撐柱的毛細結構(圖未示)回流至下蓋222的下內表面2222的毛細結構224(如圖5B中較小的箭頭所示)。最後,包含熱能的冷卻液再從熱交換器11的輸出管112流出,以帶走發熱源7的熱能進而達到高效散熱的功能。由於三維蒸氣腔元件22具有完整且連續的毛細結構224,因此液相工作流體能夠順利且快速地回流至吸熱端以再次吸取發熱源所產生的熱能,使得兩相流循環順暢,進而提升散熱效率。 As shown in FIG. 3 , FIG. 5A and FIG. 5B , when the heat dissipation module using the two-phase flow circulation steam cavity and the cold liquid fluid for heat exchange is in operation, the lower cover 222 of the three-dimensional steam cavity element 22 will absorb the heat energy generated by the heat source 7. At this time, the working fluid located in the capillary structure 224 of the lower cover cavity 2223 and the lower inner surface 2222 will also absorb heat energy and transform into a gas phase working fluid, and the gas phase working fluid flows to the tube cavity 2212 of the tube 2211 (as shown by the larger arrow in FIG. 5B ). Further, the heat energy in the gas phase working fluid will be transferred to the tube 2211, and the cooling liquid flowing into the heat exchange cavity 1101 from the input pipe 111 of the heat exchanger 11 will absorb heat energy from the tube 2211. At this time, the gas phase working fluid is transformed into the liquid phase working fluid, and the liquid phase working fluid sequentially flows from the capillary structure 224 on the inner surface 2213 of the tube body through the capillary structure 224 on the upper inner surface 2215, and then flows back to the capillary structure 224 on the lower inner surface 2222 of the lower cover 222 through the capillary structure of the support column (not shown) (as shown by the smaller arrow in FIG. 5B ). Finally, the cooling liquid containing heat energy flows out from the output pipe 112 of the heat exchanger 11 to take away the heat energy of the heat source 7 and achieve the function of efficient heat dissipation. Since the three-dimensional vapor chamber element 22 has a complete and continuous capillary structure 224, the liquid phase working fluid can smoothly and quickly flow back to the heat absorption end to absorb the heat energy generated by the heat source again, making the two-phase flow circulation smooth, thereby improving the heat dissipation efficiency.

此外,在一較佳的具體實施例中,三維蒸氣腔元件22的上蓋221的管體2211的長度和下蓋222與上蓋221封合後的厚度的比值大於10。也就是說,管體空腔2212的體積大於下蓋空腔2223的體積。於實務中,由於管體2211設置於熱交換器11的熱交換腔體1101中,即管體空腔2212位於熱交換器11的殼體110的熱交換腔體1101中,並且下蓋空腔2223位於熱交換腔體1101外部。因此,當位於下蓋空腔2223以及下內表面2222的毛細結構224的工作流體因吸取熱能而轉變為氣相工作流體時,氣相工作流體能夠很快地進入熱交換器11的熱交換腔體1101中以進行高效熱交換,進而提升散熱效率。 In addition, in a preferred specific embodiment, the ratio of the length of the tube 2211 of the upper cover 221 of the three-dimensional vapor chamber element 22 to the thickness of the lower cover 222 after being sealed with the upper cover 221 is greater than 10. In other words, the volume of the tube cavity 2212 is greater than the volume of the lower cover cavity 2223. In practice, since the tube 2211 is disposed in the heat exchange cavity 1101 of the heat exchanger 11, that is, the tube cavity 2212 is located in the heat exchange cavity 1101 of the shell 110 of the heat exchanger 11, and the lower cover cavity 2223 is located outside the heat exchange cavity 1101. Therefore, when the working fluid in the capillary structure 224 of the lower cover cavity 2223 and the lower inner surface 2222 is converted into a gas phase working fluid due to absorbing heat energy, the gas phase working fluid can quickly enter the heat exchange cavity 1101 of the heat exchanger 11 to perform efficient heat exchange, thereby improving the heat dissipation efficiency.

本發明的具兩相流循環的蒸氣腔元件除了可為前述具體實施例的樣態之外,也可為其他樣態。請參閱圖6A。圖6A係繪示本發明一具體實施例的蒸氣腔元件22’的剖面結構示意圖。如圖6A所示,本具體實施例與前述具體實施例的不同之處,是在於相對於管體2211’的下內表面2222’ 上所設置的毛細結構224’的厚度大於其餘下內表面2222’上所設置的毛細結構224的厚度。如圖中所示,管體2211’以及相對於管體2211’的下內表面2222’厚度較大的毛細結構224’可位於蒸氣腔元件22’的中間位置。一般來說,發熱源的中間位置的熱能最大。進一步地,由於位於蒸氣腔元件22’的中間位置的下內表面2222’的毛細結構224’的厚度較大,因此,該處的毛細結構224’可儲存較多的液相工作流體。當蒸氣腔元件22’接觸發熱源7時,位於蒸氣腔元件22’的中間位置毛細結構224’的液相工作流體可經相變吸收更多的熱量,以快速轉換成氣相工作流體並流至管體空腔2212’中以進行熱交換,進而提高散熱效率。 The steam chamber element with two-phase flow circulation of the present invention can be in other forms in addition to the form of the aforementioned specific embodiment. Please refer to FIG. 6A. FIG. 6A is a schematic diagram showing the cross-sectional structure of a steam chamber element 22' of a specific embodiment of the present invention. As shown in FIG. 6A, the difference between the present specific embodiment and the aforementioned specific embodiment is that the thickness of the capillary structure 224' provided on the lower inner surface 2222' relative to the tube body 2211' is greater than the thickness of the capillary structure 224 provided on the remaining lower inner surface 2222'. As shown in the figure, the tube body 2211' and the capillary structure 224' with a larger thickness relative to the lower inner surface 2222' of the tube body 2211' can be located in the middle of the steam chamber element 22'. Generally speaking, the heat energy of the middle position of the heat source is the largest. Furthermore, since the capillary structure 224' on the lower inner surface 2222' located in the middle of the steam chamber element 22' is thicker, the capillary structure 224' there can store more liquid working fluid. When the steam chamber element 22' contacts the heat source 7, the liquid working fluid in the capillary structure 224' located in the middle of the steam chamber element 22' can absorb more heat through phase change, so as to be quickly converted into gaseous working fluid and flow into the tube cavity 2212' for heat exchange, thereby improving the heat dissipation efficiency.

請參閱圖6B。圖6B係繪示本發明另一具體實施例的蒸氣腔元件22”的剖面結構示意圖。本具體實施例與前述具體實施例的不同之處,是在於下蓋222”係為一平板而未包含前述的下蓋空腔。當蒸氣腔元件22”接觸發熱源並且下內表面2222”的毛細結構224”的工作流體因吸取熱能而轉變為氣相工作流體時,氣相工作流體能夠很快地進入管體2211”的管體空腔2212”中,以與熱交換器中的冷卻液以進行熱交換,進而提升散熱效率。 Please refer to FIG. 6B. FIG. 6B is a schematic diagram of the cross-sectional structure of the steam chamber element 22" of another specific embodiment of the present invention. The difference between this specific embodiment and the aforementioned specific embodiment is that the lower cover 222" is a flat plate and does not include the aforementioned lower cover cavity. When the steam chamber element 22" contacts the heat source and the working fluid of the capillary structure 224" on the lower inner surface 2222" absorbs heat energy and is converted into a gas phase working fluid, the gas phase working fluid can quickly enter the tube cavity 2212" of the tube 2211" to exchange heat with the cooling liquid in the heat exchanger, thereby improving the heat dissipation efficiency.

本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組除了可為前述的樣態之外,也可為其他樣態。請一併參閱圖7A、圖7B以及圖7C。圖7A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組3的分解圖。圖7B係根據圖7A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組3的剖面圖。圖7C係根據圖7A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組3於另一視角的剖面圖。本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱 交換之散熱模組3也可透過多個蒸氣腔元件分別接觸多個發熱源並且於同一個熱交換腔體中進行熱交換。進一步地,由於發熱源的設置位置不盡相同,因此以下將以圖7A至圖7C為一實施例加以說明。 The heat dissipation module of the present invention that utilizes a two-phase flow circulation steam cavity to exchange heat with a cold liquid fluid can be in other forms in addition to the aforementioned forms. Please refer to Figures 7A, 7B and 7C. Figure 7A is an exploded view of a heat dissipation module 3 that utilizes a two-phase flow circulation steam cavity to exchange heat with a cold liquid fluid in a specific embodiment of the present invention. Figure 7B is a cross-sectional view of the heat dissipation module 3 that utilizes a two-phase flow circulation steam cavity to exchange heat with a cold liquid fluid according to Figure 7A. Figure 7C is a cross-sectional view of the heat dissipation module 3 that utilizes a two-phase flow circulation steam cavity to exchange heat with a cold liquid fluid according to Figure 7A at another viewing angle. The heat dissipation module 3 of the present invention that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange can also contact multiple heat sources through multiple steam chamber elements and perform heat exchange in the same heat exchange chamber. Furthermore, since the location of the heat source is not always the same, the following will be described using Figures 7A to 7C as an example.

如圖7A、圖7B及圖7C所示,本具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組3的熱交換器31包含二個輸入管311以及二個輸出管312,殼體310具有三個下開孔洞3102,並且包含三個蒸氣腔元件32。二個輸入管311以及二個輸出管312併排設置並且分別互相相對以形成第一排以及第二排。而冷卻液可自第一排的輸入管311流至第一排的輸出管312,並且冷卻液也可自第二排的輸入管311流至第二排的輸出管312。一個下開孔洞3102位於第一排,並且二個下開孔洞3102位於第二排。一個蒸氣腔元件32位於第一排,並且二個蒸氣腔元件32位於第二排。而三個蒸氣腔元件32可分別接觸三個發熱源7。 As shown in FIG. 7A , FIG. 7B and FIG. 7C , the heat exchanger 31 of the heat dissipation module 3 for heat exchange between the two-phase circulation steam chamber and the cold liquid fluid of the present specific embodiment comprises two input pipes 311 and two output pipes 312, the shell 310 has three lower opening holes 3102, and comprises three steam chamber elements 32. The two input pipes 311 and the two output pipes 312 are arranged in parallel and opposite to each other to form a first row and a second row. The cooling liquid can flow from the input pipe 311 of the first row to the output pipe 312 of the first row, and the cooling liquid can also flow from the input pipe 311 of the second row to the output pipe 312 of the second row. One lower opening hole 3102 is located in the first row, and two lower opening holes 3102 are located in the second row. One steam chamber element 32 is located in the first row, and two steam chamber elements 32 are located in the second row. The three steam chamber elements 32 can contact three heat sources 7 respectively.

當利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組3運作時,自熱交換器31的第一排的輸入管311流入的冷卻液主要吸取第一排的蒸氣腔元件32的熱能,接著,包含熱能的冷卻液再從熱交換器31的第一排的輸出管312流出;相同的,自熱交換器31的第二排的輸入管311流入的冷卻液同時吸取第二排的二個蒸氣腔元件32的熱能,接著,包含熱能的冷卻液再從熱交換器31的第二排的輸出管312流出。 When the heat dissipation module 3 that utilizes two-phase flow circulation to exchange heat between the steam chamber and the cold liquid fluid operates, the cooling liquid flowing in from the first row of input pipes 311 of the heat exchanger 31 mainly absorbs the heat energy of the first row of steam chamber components 32, and then the cooling liquid containing the heat energy flows out from the first row of output pipes 312 of the heat exchanger 31; similarly, the cooling liquid flowing in from the second row of input pipes 311 of the heat exchanger 31 simultaneously absorbs the heat energy of the two steam chamber components 32 in the second row, and then the cooling liquid containing the heat energy flows out from the second row of output pipes 312 of the heat exchanger 31.

此外,三個蒸氣腔元件32可分別包含至少一個散熱鰭片323,並且散熱鰭片323也可包含複數個微流道3231。而第一排的蒸氣腔元件32的散熱鰭片323的微流道3231的延伸方向與冷卻液於第一排的輸入管311及輸出管312的流動方向相同,並且第二排的蒸氣腔元件32的散熱鰭片 323的微流道3231的延伸方向與冷卻液於第二排的輸入管311及輸出管312的流動方向相同。因此,分別自第一排及第二排的輸入管311輸入的冷卻液可沿著散熱鰭片323的微流道3231流動,接著再順利地分別流至第一排及第二排的輸出管312,減少冷卻液在熱交換器31的熱交換腔體3101中產生紊流,以減少包含熱能的冷卻液位於熱交換腔體3101中的時間,進而提升散熱效率。值得注意的是,每一個蒸氣腔元件的散熱鰭片的尺寸可為不同,也可根據發熱源的發熱功率而決定。 In addition, the three vapor chamber elements 32 may respectively include at least one heat sink fin 323, and the heat sink fin 323 may also include a plurality of microchannels 3231. The extension direction of the microchannels 3231 of the heat sink fin 323 of the vapor chamber element 32 in the first row is the same as the flow direction of the cooling liquid in the first row of input pipes 311 and output pipes 312, and the extension direction of the microchannels 3231 of the heat sink fin 323 of the vapor chamber element 32 in the second row is the same as the flow direction of the cooling liquid in the second row of input pipes 311 and output pipes 312. Therefore, the cooling liquid input from the first and second rows of input pipes 311 can flow along the microchannels 3231 of the heat sink fins 323, and then smoothly flow to the first and second rows of output pipes 312, respectively, to reduce the turbulence of the cooling liquid in the heat exchange chamber 3101 of the heat exchanger 31, thereby reducing the time that the cooling liquid containing heat energy is in the heat exchange chamber 3101, thereby improving the heat dissipation efficiency. It is worth noting that the size of the heat sink fins of each vapor chamber element can be different, and can also be determined according to the heat power of the heat source.

請一併參閱圖8A至圖8E。圖8A係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4的結構示意圖。圖8B係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4的分解圖。圖8C係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4的剖面圖。圖8D係繪示本發明一具體實施例的蒸氣腔元件42以及發熱源7的分布示意圖。圖8E係根據圖8A的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4於另一視角的剖面圖。本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組也可透過多個蒸氣腔元件接觸多個發熱源並且於同一個熱交換器中進行散熱。 Please refer to Figures 8A to 8E together. Figure 8A is a structural schematic diagram of a heat dissipation module 4 that uses a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid according to a specific embodiment of the present invention. Figure 8B is an exploded view of the heat dissipation module 4 that uses a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid according to Figure 8A. Figure 8C is a cross-sectional view of the heat dissipation module 4 that uses a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid according to Figure 8A. Figure 8D is a distribution schematic diagram of a steam chamber element 42 and a heat source 7 according to a specific embodiment of the present invention. Figure 8E is a cross-sectional view of the heat dissipation module 4 that uses a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid according to Figure 8A at another viewing angle. The heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange can also contact multiple heat sources through multiple steam chamber elements and dissipate heat in the same heat exchanger.

如圖8A至8E所示,本具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4包含五個蒸氣腔元件42,並且應用於二十五個發熱源7以進行散熱。於實務中,當電子產品包含緊密排列的發熱源7(晶片)時,每一個蒸氣腔元件42可接觸多個發熱源7,使得多個發熱源7同時共用一個蒸氣腔元件42於熱交換器41的熱交換腔體中進行散熱。在本具體實施例中,蒸氣腔元件42係以田字型的方式排列(如圖8D所示),以確保 所有蒸氣腔元件42皆能夠接觸發熱源7以進行散熱。於實務中,蒸氣腔元件42的形狀不限於圖中所示,蒸氣腔元件42的形狀也可根據設計或需求而設計。進一步地,由於位於中間位置的發熱源7會受到周圍的發熱源的影響,並且位於中間位置的發熱源7所產生的熱能最大。因此,如圖中所示,位於中間位置的蒸氣腔元件42的管體4211的尺寸可大於其他的蒸氣腔元件42的管體4211的尺寸,以提升散熱效率。此外,設置於蒸氣腔元件42上的散熱鰭片423的形狀也可對應蒸氣腔元件42的形狀。並且,散熱鰭片423也可包含前述的微流道。 As shown in FIGS. 8A to 8E , the heat dissipation module 4 of the present embodiment that utilizes a two-phase flow circulation vapor chamber to exchange heat with a cold liquid fluid comprises five vapor chamber elements 42 and is applied to twenty-five heat sources 7 for heat dissipation. In practice, when the electronic product comprises closely arranged heat sources 7 (chips), each vapor chamber element 42 can contact multiple heat sources 7, so that multiple heat sources 7 can simultaneously share one vapor chamber element 42 in the heat exchange chamber of the heat exchanger 41 for heat dissipation. In the present embodiment, the vapor chamber elements 42 are arranged in a field-shaped manner (as shown in FIG. 8D ) to ensure that all vapor chamber elements 42 can contact the heat source 7 for heat dissipation. In practice, the shape of the steam chamber element 42 is not limited to that shown in the figure, and the shape of the steam chamber element 42 can also be designed according to the design or demand. Furthermore, since the heat source 7 located in the middle position will be affected by the surrounding heat sources, and the heat energy generated by the heat source 7 located in the middle position is the largest. Therefore, as shown in the figure, the size of the tube 4211 of the steam chamber element 42 located in the middle position can be larger than the size of the tube 4211 of other steam chamber elements 42 to improve the heat dissipation efficiency. In addition, the shape of the heat dissipation fin 423 provided on the steam chamber element 42 can also correspond to the shape of the steam chamber element 42. And, the heat dissipation fin 423 can also include the aforementioned microchannel.

本發明的蒸氣腔元件的散熱鰭片除了可為前述的樣態之外,也可為其他樣態。請參閱圖9及圖10。圖9係繪示本發明一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4’的剖面示意圖。圖10係繪示本發明另一具體實施例的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4”的剖面示意圖。如圖9所示,所有蒸氣腔元件42’上的散熱鰭片423’的形狀也可對應熱交換器41’的熱交換腔體4101’的形狀。如圖10所示,利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組4”也可包含複數個散熱鰭片423”,並且每一個散熱鰭片423”設置於多個蒸氣腔元件42”上。 The heat dissipation fins of the steam chamber element of the present invention can be in other forms in addition to the above-mentioned forms. Please refer to Figures 9 and 10. Figure 9 is a cross-sectional schematic diagram of a heat dissipation module 4' that uses a two-phase flow circulation steam chamber and a cold liquid fluid to perform heat exchange in a specific embodiment of the present invention. FIG10 is a cross-sectional schematic diagram of a heat dissipation module 4" for heat exchange between a two-phase circulating steam chamber and a cold liquid fluid according to another specific embodiment of the present invention. As shown in FIG9, the shape of the heat dissipation fins 423' on all steam chamber elements 42' may also correspond to the shape of the heat exchange chamber 4101' of the heat exchanger 41'. As shown in FIG10, the heat dissipation module 4" for heat exchange between a two-phase circulating steam chamber and a cold liquid fluid may also include a plurality of heat dissipation fins 423", and each heat dissipation fin 423" is disposed on a plurality of steam chamber elements 42".

綜上所述,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組可透過具兩相流循環的蒸氣腔元件的冷凝端直接與熱交換腔體中的冷卻液接觸,不需再透過冷凝端與熱交換器的外殼之間的熱傳導以降低熱阻,進而提升散熱效率。並且,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組的蒸氣腔元件可透過散熱鰭片以 及設置於散熱鰭片上的微流道增加冷凝端與冷卻液之間的接觸面積,進而提升散熱效率。再者,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組可透過的三維蒸氣腔元件的完整且連續的毛細結構,因此液相工作流體能夠順利且快速地回流至吸熱端以再次吸取發熱源所產生的熱能,進而提升散熱效率。此外,本發明的利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組也可透過多個蒸氣腔元件分別接觸多個發熱源並且於同一個熱交換器中進行散熱,並且也可透過多個蒸氣腔元件接觸多個發熱源並且於同一個熱交換器中進行散熱。 In summary, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can directly contact the cooling liquid in the heat exchange chamber through the condensation end of the steam chamber element with two-phase flow circulation, and no longer needs to conduct heat between the condensation end and the outer shell of the heat exchanger to reduce thermal resistance, thereby improving the heat dissipation efficiency. In addition, the steam chamber element of the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can increase the contact area between the condensation end and the cooling liquid through the heat dissipation fins and the microchannels disposed on the heat dissipation fins, thereby improving the heat dissipation efficiency. Furthermore, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can pass through the complete and continuous capillary structure of the three-dimensional steam chamber element, so that the liquid phase working fluid can smoothly and quickly flow back to the heat absorption end to absorb the heat energy generated by the heat source again, thereby improving the heat dissipation efficiency. In addition, the heat dissipation module of the present invention that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid can also contact multiple heat sources through multiple steam chamber elements and dissipate heat in the same heat exchanger, and can also contact multiple heat sources through multiple steam chamber elements and dissipate heat in the same heat exchanger.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。因此,本發明所申請之專利範圍的範疇應該根據上述的說明作最寬廣的解釋,以致使其涵蓋所有可能的改變以及具相等性的安排。 The above detailed description of the preferred specific embodiments is intended to more clearly describe the features and spirit of the present invention, rather than to limit the scope of the present invention by the preferred specific embodiments disclosed above. On the contrary, the purpose is to cover various changes and arrangements with equivalents within the scope of the patent application for the present invention. Therefore, the scope of the patent application for the present invention should be interpreted in the broadest sense based on the above description, so as to cover all possible changes and arrangements with equivalents.

1:利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組 1: A heat dissipation module that uses a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid

11:熱交換器 11: Heat exchanger

110:殼體 110: Shell

1101:熱交換腔體 1101: Heat exchange chamber

111:輸入管 111: Input pipe

112:輸出管 112: Output tube

12:蒸氣腔元件 12: Steam chamber components

121:冷凝端 121: Condensation end

122:吸熱端 122: Heat absorbing end

7:發熱源 7: Heat source

Claims (10)

一種利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,包含有: A heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange, comprising: 一熱交換器,包含一殼體、N個輸入管以及M個輸出管,該殼體具有一熱交換腔體以及P個下開孔洞,該N個輸入管以及該M個輸出管連通該熱交換腔體;以及 A heat exchanger, comprising a shell, N input tubes and M output tubes, the shell having a heat exchange cavity and P lower opening holes, the N input tubes and the M output tubes being connected to the heat exchange cavity; and P個具兩相流循環的蒸氣腔元件,分別對應該P個下開孔洞,每一蒸氣腔元件包含一冷凝端以及一吸熱端,該冷凝端透過對應的該下開孔洞貫穿該殼體,使得該冷凝端設置於該熱交換腔體內,並且該吸熱端設置於該熱交換腔體的外部並用以接觸一發熱源; P steam chamber elements with two-phase flow circulation correspond to the P lower opening holes respectively, and each steam chamber element includes a condensation end and a heat absorption end. The condensation end passes through the shell through the corresponding lower opening hole, so that the condensation end is arranged in the heat exchange cavity, and the heat absorption end is arranged outside the heat exchange cavity and is used to contact a heat source; 其中,N、M以及P均為大於等於1的自然數。 Among them, N, M and P are all natural numbers greater than or equal to 1. 如申請專利範圍第1項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中於該熱交換腔體、該N個輸入管以及該M個輸出管中均設置有一冷卻液,該冷卻液用以與該蒸氣腔元件的該冷凝端進行熱交換。 As described in item 1 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein a cooling liquid is disposed in the heat exchange chamber, the N input pipes, and the M output pipes, and the cooling liquid is used to exchange heat with the condensation end of the steam chamber element. 如申請專利範圍第2項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中該冷卻液為水、丙酮、氨、甲醇、四氯乙烷以及氫氟烴類化學制冷劑之其中一者。 As described in item 2 of the patent application scope, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein the cooling liquid is one of water, acetone, ammonia, methanol, tetrachloroethane, and hydrofluorocarbon chemical refrigerants. 如申請專利範圍第1項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中每一該蒸氣腔元件包含有Q個散熱鰭片耦接該冷凝端,並且Q為大於等於1的自然數。 As described in Item 1 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein each of the steam chamber elements includes Q heat dissipation fins coupled to the condensation end, and Q is a natural number greater than or equal to 1. 如申請專利範圍第4項所述之利用兩相流循環蒸氣腔與冷液態流體進行 熱交換之散熱模組,其中每一散熱鰭片具有複數個微流道,該等微流道的延伸方向係平行於該輸入管的延伸方向。 As described in Item 4 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange, wherein each heat dissipation fin has a plurality of microchannels, and the extension direction of the microchannels is parallel to the extension direction of the inlet pipe. 如申請專利範圍第1項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中每一蒸氣腔元件為一三維蒸氣腔元件,其進一步包含有: As described in Item 1 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber and a cold liquid fluid for heat exchange, wherein each steam chamber element is a three-dimensional steam chamber element, which further includes: 一上蓋,具有一管體、一上外表面以及一上內表面,該管體具有一管體空腔以及一管體內表面; A top cover having a tube body, an upper outer surface and an upper inner surface, wherein the tube body has a tube body cavity and a tube body inner surface; 一下蓋,匹配該上蓋並且具有一下外表面以及一下內表面,當該下蓋封合於該上蓋時,該管體空腔形成一密閉氣腔; A lower cover matches the upper cover and has a lower outer surface and a lower inner surface. When the lower cover is sealed to the upper cover, the tube cavity forms a closed air cavity; 一毛細結構,連續設置於該上內表面、該管體內表面以及該下內表面;以及 A capillary structure is continuously disposed on the upper inner surface, the inner surface of the tube body and the lower inner surface; and 一工作流體,設置於該密閉氣腔中。 A working fluid is disposed in the closed air cavity. 如申請專利範圍第6項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中該管體係一體成型於該上外表面並且自該上外表面向外突出,並且該下蓋具有一下蓋空腔,當該下蓋封合於該上蓋時,該管體空腔以及該下蓋空腔形成該密閉氣腔。 As described in item 6 of the patent application scope, a heat dissipation module that utilizes a two-phase flow circulation steam cavity to exchange heat with a cold liquid fluid, wherein the tube body is integrally formed on the upper outer surface and protrudes outward from the upper outer surface, and the lower cover has a lower cover cavity, and when the lower cover is sealed to the upper cover, the tube body cavity and the lower cover cavity form the closed air cavity. 如申請專利範圍第6項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中該工作流體為水、丙酮、氨、甲醇、四氯乙烷以及氫氟烴類化學制冷劑之其中一者。 As described in Item 6 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein the working fluid is one of water, acetone, ammonia, methanol, tetrachloroethane, and hydrofluorocarbon chemical refrigerants. 如申請專利範圍第7項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中相對於該管體的該下內表面上所設置的該毛細結構的厚度大於其餘該下內表面上所設置的該毛細結構的厚度。 As described in Item 7 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein the thickness of the capillary structure disposed on the lower inner surface relative to the tube body is greater than the thickness of the capillary structure disposed on the remaining lower inner surfaces. 如申請專利範圍第7項所述之利用兩相流循環蒸氣腔與冷液態流體進行熱交換之散熱模組,其中該管體的長度和該下蓋與該上蓋封合後的厚度的比值大於10。 As described in Item 7 of the patent application, a heat dissipation module that utilizes a two-phase flow circulation steam chamber to exchange heat with a cold liquid fluid, wherein the ratio of the length of the tube body to the thickness of the lower cover and the upper cover after sealing is greater than 10.
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