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TWI838227B - Dynamic rigidity and deflection monitoring system of linear slide rail carrier - Google Patents

Dynamic rigidity and deflection monitoring system of linear slide rail carrier Download PDF

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Publication number
TWI838227B
TWI838227B TW112115018A TW112115018A TWI838227B TW I838227 B TWI838227 B TW I838227B TW 112115018 A TW112115018 A TW 112115018A TW 112115018 A TW112115018 A TW 112115018A TW I838227 B TWI838227 B TW I838227B
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distance
axis angle
sensing
platform
module
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TW112115018A
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TW202443123A (en
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陳志明
張惠玲
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國立勤益科技大學
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Abstract

本發明係揭露一種線性滑軌載台動態剛性與偏移監測系統,其包括驅動模組、X軸角度偏差感測模組、Y軸角度偏差感測模組、Z軸角度偏差感測模組及資訊處理模組。X軸角度偏差感測模組用以二第一距離感測訊號。Y軸角度偏差感測模組用以感測二第二距離感測訊號。Z軸角度偏差感測模組用以感測二第三距離感測訊號。資訊處理模組透過訊號傳輸模組接收X、Y及Z等軸距離感測訊號,並依序將轉換處理為二個第一距離值、二個第二距離值及二個第三距離值。資訊處理模組依序進行差值計算,以得到第一距離差值、第二距離差值及第三距離差值,再判斷相應的X、Y及Z等軸之第一距離差值、第二距離差值及第三距離差值是否高於基準距離差值,判斷結果為是,則輸出載台於該滑軌組件運行時相對應於X、Y及Z軸角度的角度偏移警示資訊,俾能藉由多軸角度偏移的感測機能設置,以感測出載台多軸的角度偏移量,藉以得到載台於該滑軌組件運行時的動態剛性與角度偏移狀態資訊。 The present invention discloses a linear slide platform dynamic rigidity and offset monitoring system, which includes a driving module, an X-axis angle deviation sensing module, a Y-axis angle deviation sensing module, a Z-axis angle deviation sensing module and an information processing module. The X-axis angle deviation sensing module is used for two first distance sensing signals. The Y-axis angle deviation sensing module is used for sensing two second distance sensing signals. The Z-axis angle deviation sensing module is used for sensing two third distance sensing signals. The information processing module receives the X-axis, Y-axis and Z-axis distance sensing signals through the signal transmission module, and converts and processes them into two first distance values, two second distance values and two third distance values in sequence. The information processing module performs difference calculations in sequence to obtain the first distance difference, the second distance difference and the third distance difference, and then determines whether the first distance difference, the second distance difference and the third distance difference of the corresponding X, Y and Z axes are higher than the reference distance difference. If the determination result is yes, the angle deviation warning information corresponding to the X, Y and Z axis angles when the platform is running on the slide assembly is output, so that the angle deviation of the multi-axis of the platform can be sensed by the multi-axis angle deviation sensing function setting, so as to obtain the dynamic rigidity and angle deviation status information of the platform when the slide assembly is running.

Description

線性滑軌載台動態剛性與偏移監測系統 Linear slide platform dynamic rigidity and deviation monitoring system

本發明係有關一種線性滑軌載台動態剛性與偏移監測系統,尤指一種可以藉由多軸角度偏移的感測機能設置以感測出載台多軸角度偏移量以判斷出載台運行時之動態剛性與角度偏移資訊的線性滑軌載台動態剛性偏移監測技術。 The present invention relates to a linear slide rail platform dynamic rigidity and offset monitoring system, and in particular to a linear slide rail platform dynamic rigidity offset monitoring technology that can sense the multi-axis angle offset of the platform through a multi-axis angle offset sensing function to determine the dynamic rigidity and angle offset information of the platform during operation.

按,線性滑軌主要是藉由如鋼珠或滾柱等滾動件在滑塊與軌道之間的循環滾動,讓滑塊得以沿著滑軌進行高精度與高速度的直線往復運動。然而在高速的線性往復運動過程中,由於滾動件與滑軌之間的摩擦和碰撞,使得線性滑軌非常容易產生振動,以致容易造成加工品質及使用壽命降低的情事產生,所以須對線性滑軌做各項檢測以符合品質要求。再者,線性滑軌具有結構扎實、動摩擦係數小、承載能力大、安裝簡便、定位精度高、傳動平穩等優勢,所以已然愈來愈廣泛地應用於數位控制機床的技術領域當中。此外,會影響到線性滑軌精度的其中一個關鍵因子即是線性滑軌本身的剛性表現,因此,透過對線性滑軌的剛性監測與檢驗,勢必可以有效提升線性滑軌位移性能的精度。 According to the market, linear slides mainly use rolling parts such as steel balls or rollers to circulate between the slide and the track, allowing the slide to perform high-precision and high-speed linear reciprocating motion along the slide. However, during the high-speed linear reciprocating motion, due to the friction and collision between the rolling parts and the slide, the linear slide is very easy to vibrate, which can easily cause the processing quality and service life to decrease. Therefore, various tests must be performed on the linear slide to meet the quality requirements. In addition, linear slides have the advantages of solid structure, small dynamic friction coefficient, large load-bearing capacity, simple installation, high positioning accuracy, and smooth transmission, so they have been increasingly widely used in the technical field of digital control machine tools. In addition, one of the key factors that affects the accuracy of the linear slide is the rigidity of the linear slide itself. Therefore, by monitoring and inspecting the rigidity of the linear slide, the accuracy of the linear slide displacement performance will inevitably be effectively improved.

依據所知,倘若有外部負荷力(例如載台所負荷的載重;或是工具機於加工過程產生的切削作用力等)施加於載台時,線性滑軌內部的滾動件則會產生微小的彈性變形現象,但此彈性變形現象非為永久變形, 當所施加的負荷力消失後,滾動件則會回復至原本的形狀,所以負荷力一旦隨著時間的變化;或負荷力大小不一時,滾動件的彈性變形變化過程中,則會影響到線性滑軌的精度表現,因而導致製程上較為不便與困擾的情事產生。為解決此一技術缺失,相關之線性滑軌技術領域業者大多會提高線性滑軌的剛性來解決此一技術缺失,主要是從降低滾動件的彈性變形來著手,具體的技術手段則是改變滾動件的幾何尺寸、數量、相對配置以及滾動件的預壓等方式來實現。其次,是提升線性滑軌的阻尼,透過阻尼設置以降低滾動件的彈性變形,具體的技術手段是在滑塊與導軌之間增加數個微小面接觸滑動零件。雖然上述習知具體技術手段可以提高線性滑軌的剛性與減少線性滑軌的彈性變形;惟,上述習知具體技術手段並無一種線性滑軌載台動態剛性與偏移監測系統,以致於目前習用的線性滑軌無法被有效地檢測出其動態剛性及以多軸偏移狀態,致使較無法有效提升工作載台於加工時的精密度,因此,如何開發出一種可以感測出載台多軸之角度偏移量而得到載台於該滑軌組件運行時之動態剛性與角度偏移資訊的線性滑軌剛性與偏移監測技術,實已成為相關產學業者所亟欲解決與挑戰的技術課題。 As far as we know, if an external load (such as the load on the platform or the cutting force generated by the machine tool during the processing) is applied to the platform, the rolling element inside the linear slide will produce a slight elastic deformation phenomenon, but this elastic deformation phenomenon is not a permanent deformation. When the applied load force disappears, the rolling element will return to its original shape. Therefore, once the load force changes over time; or when the load force is of different sizes, the elastic deformation of the rolling element will affect the precision performance of the linear slide, thereby causing more inconvenience and trouble in the process. To solve this technical deficiency, most of the relevant linear slide technology field companies will improve the rigidity of the linear slide to solve this technical deficiency, mainly from the reduction of the elastic deformation of the rolling parts, the specific technical means are to change the geometric size, number, relative configuration and pre-stressing of the rolling parts to achieve this. Secondly, it is to improve the damping of the linear slide, through the damping setting to reduce the elastic deformation of the rolling parts, the specific technical means is to add several small surface contact sliding parts between the slider and the guide rail. Although the above-mentioned specific technical means can improve the rigidity of the linear slide and reduce the elastic deformation of the linear slide, the above-mentioned specific technical means do not have a linear slide platform dynamic rigidity and offset monitoring system, so that the currently used linear slide cannot be effectively detected in terms of its dynamic rigidity and multi-axis offset state, which makes it difficult to effectively improve the precision of the working platform during processing. Therefore, how to develop a linear slide rigidity and offset monitoring technology that can sense the multi-axis angular offset of the platform and obtain the dynamic rigidity and angular offset information of the platform when the slide assembly is running has become a technical issue that the relevant industry and academics are eager to solve and challenge.

有鑑於此,上述習知技術手段確實於動態剛性與以多軸偏移檢測上皆未臻完善,仍有再改善的必要性,而且基於相關產業的迫切需求之下,本發明人等乃經不斷的努力研發之下,終於研發出一套有別於上述習知技術與前揭專利的本發明。 In view of this, the above-mentioned known technical means are indeed not perfect in terms of dynamic rigidity and multi-axis offset detection, and there is still a need for further improvement. In addition, based on the urgent needs of the relevant industries, the inventors of the present invention have made continuous efforts to develop and finally developed a set of the present invention that is different from the above-mentioned known technology and the aforementioned patent.

本發明第一目的,在於提供一種線性滑軌載台動態剛性與偏移監測系統,主要是可以藉由多軸角度偏移的感測機能設置,以感測出 載台多軸的角度偏移量,藉以得到載台於該滑軌組件運行時的動態剛性與角度偏移資訊,因而具有可減少線性滑軌之變形而增加剛性以及提升線性滑軌的位移精密度等特點。達成前述第一目的之技術手段,係包括驅動模組、X軸角度偏差感測模組、Y軸角度偏差感測模組、Z軸角度偏差感測模組及資訊處理模組。X軸角度偏差感測模組用以二第一距離感測訊號。Y軸角度偏差感測模組用以感測二第二距離感測訊號。Z軸角度偏差感測模組用以感測二第三距離感測訊號。資訊處理模組透過訊號傳輸模組接收X、Y及Z等軸距離感測訊號,並依序將轉換處理為二個第一距離值、二個第二距離值及二個第三距離值。資訊處理模組依序進行差值計算,以得到第一距離差值、第二距離差值及第三距離差值,再判斷相對應X、Y及Z等軸的第一距離差值、第二距離差值及第三距離差值是否高於基準距離差值,判斷結果為是,則輸出載台於該滑軌組件運行時相對應於X、Y及Z軸角度的角度偏移警示資訊。 The first purpose of the present invention is to provide a linear slide platform dynamic rigidity and offset monitoring system, which can mainly sense the angle offset of the multi-axis of the platform through the multi-axis angle offset sensing function setting, so as to obtain the dynamic rigidity and angle offset information of the platform when the slide assembly is running, thereby having the characteristics of reducing the deformation of the linear slide and increasing the rigidity and improving the displacement precision of the linear slide. The technical means for achieving the above-mentioned first purpose include a drive module, an X-axis angle deviation sensing module, a Y-axis angle deviation sensing module, a Z-axis angle deviation sensing module and an information processing module. The X-axis angle deviation sensing module is used for two first distance sensing signals. The Y-axis angle deviation sensing module is used for sensing two second distance sensing signals. The Z-axis angle deviation sensing module is used to sense two third distance sensing signals. The information processing module receives the X, Y and Z axis distance sensing signals through the signal transmission module, and converts and processes them into two first distance values, two second distance values and two third distance values in sequence. The information processing module performs difference calculations in sequence to obtain the first distance difference, the second distance difference and the third distance difference, and then determines whether the first distance difference, the second distance difference and the third distance difference corresponding to the X, Y and Z axes are higher than the reference distance difference. If the judgment result is yes, the output is the angle deviation warning information corresponding to the X, Y and Z axis angles when the slide assembly is running.

本發明第二目的,在於提供一種可由選擇所需的負荷重心點位與負荷狀態來模擬線性滑軌載台實際載重運行下求出更精確之各軸距離差值的線性滑軌載台動態剛性與偏移監測系統。達成前述第二目的之技術手段,係包括驅動模組、X軸角度偏差感測模組、Y軸角度偏差感測模組、Z軸角度偏差感測模組及資訊處理模組。X軸角度偏差感測模組用以二第一距離感測訊號。Y軸角度偏差感測模組用以感測二第二距離感測訊號。Z軸角度偏差感測模組用以感測二第三距離感測訊號。資訊處理模組透過訊號傳輸模組接收X、Y及Z等軸距離感測訊號,並依序將轉換處理為二個第一距離值、二個第二距離值及二個第三距離值。資訊處理模組依序進行差值計算,以得到第一距離差值、第二距離差值及第三距離差值,再判斷X、 Y及Z等軸的第一距離差值、第二距離差值及第三距離差值是否高於基準距離差值,判斷結果為是,則輸出載台於該滑軌組件運行時相對應於X、Y及Z軸角度的角度偏移警示資訊。其中,更包含一負荷施加裝置,該載台頂部的一承載面劃分設有複數負荷區域,該負荷施加裝置用以分別對該載台的該複數負荷區域逐次地施予負荷力,以模擬該載台相對該滑軌組件做往復移動時,依序於每一該負荷區域負載施予該負荷力的狀況下,以依序求出各該負荷區域之該載台於該滑軌組件運行時相對應X、Y及Z軸的該第一距離差值、該第二距離差值及該第三距離差值。 The second purpose of the present invention is to provide a dynamic rigidity and offset monitoring system for a linear slide platform that can simulate the actual load operation of the linear slide platform by selecting the required load center of gravity point and load state to obtain more accurate distance differences of each axis. The technical means for achieving the aforementioned second purpose include a drive module, an X-axis angle deviation sensing module, a Y-axis angle deviation sensing module, a Z-axis angle deviation sensing module and an information processing module. The X-axis angle deviation sensing module is used for two first distance sensing signals. The Y-axis angle deviation sensing module is used for sensing two second distance sensing signals. The Z-axis angle deviation sensing module is used for sensing two third distance sensing signals. The information processing module receives the distance sensing signals of the X, Y and Z axes through the signal transmission module, and converts and processes them into two first distance values, two second distance values and two third distance values in sequence. The information processing module performs difference calculation in sequence to obtain the first distance difference value, the second distance difference value and the third distance difference value, and then determines whether the first distance difference value, the second distance difference value and the third distance difference value of the X, Y and Z axes are higher than the reference distance difference value. If the judgment result is yes, the output is the angle deviation warning information corresponding to the X, Y and Z axis angles when the slide assembly is running. The load applying device further comprises a load surface on the top of the platform, which is divided into a plurality of load areas. The load applying device is used to sequentially apply load forces to the plurality of load areas of the platform to simulate the reciprocating movement of the platform relative to the slide assembly. When the load force is applied to each load area in sequence, the first distance difference, the second distance difference and the third distance difference of the platform in each load area corresponding to the X, Y and Z axes when the slide assembly is running are sequentially obtained.

本發明第三目的,在於提供一種可由選擇所需的負荷重心點位與負荷狀態來模擬線性滑軌載台實際載重運行下求出更精確之各軸距離差值的線性滑軌載台動態剛性與偏移監測系統。達成前述第三目的之技術手段,係包括驅動模組、X軸角度偏差感測模組、Y軸角度偏差感測模組、Z軸角度偏差感測模組及資訊處理模組。X軸角度偏差感測模組用以二第一距離感測訊號。Y軸角度偏差感測模組用以感測二第二距離感測訊號。Z軸角度偏差感測模組用以感測二第三距離感測訊號。資訊處理模組透過訊號傳輸模組接收X、Y及Z等軸距離感測訊號,並依序將轉換處理為二個第一距離值、二個第二距離值及二個第三距離值。資訊處理模組依序進行差值計算,以得到第一距離差值、第二距離差值及第三距離差值,再判斷X、Y及Z等軸的第一距離差值、第二距離差值及第三距離差值是否高於基準距離差值,判斷結果為是,則輸出載台於該滑軌組件運行時相對應於X、Y及Z軸角度的角度偏移警示資訊。其中,更包含一測試參數調變模組及一負荷施加裝置;該測試參數調變模組用以調變該驅動模組驅動該載台於該滑軌組件做線性的往復移動的一測試速度參數,及用以調變該負荷施加裝置 對該載台之一測試負荷力參數;該資訊處理模組處理該第一距離差值、該第二距離差值及該第三距離差值差值及相對應的該測試速度參數與該測試負荷力參數,並輸出與該第一距離差值、該第二距離差值及該第三距離差值差值,相對應的該測試速度參數與該測試負荷力參數及相對應於X、Y及Z軸角度的角度偏移警示資訊。 The third purpose of the present invention is to provide a linear slide platform dynamic rigidity and offset monitoring system that can simulate the actual load operation of the linear slide platform by selecting the required load center of gravity point and load state to obtain more accurate distance differences of each axis. The technical means for achieving the aforementioned third purpose include a drive module, an X-axis angle deviation sensing module, a Y-axis angle deviation sensing module, a Z-axis angle deviation sensing module and an information processing module. The X-axis angle deviation sensing module is used for two first distance sensing signals. The Y-axis angle deviation sensing module is used for sensing two second distance sensing signals. The Z-axis angle deviation sensing module is used for sensing two third distance sensing signals. The information processing module receives the distance sensing signals of the X, Y and Z axes through the signal transmission module, and converts and processes them into two first distance values, two second distance values and two third distance values in sequence. The information processing module performs difference calculation in sequence to obtain the first distance difference value, the second distance difference value and the third distance difference value, and then determines whether the first distance difference value, the second distance difference value and the third distance difference value of the X, Y and Z axes are higher than the reference distance difference value. If the determination result is yes, the output is the angle deviation warning information corresponding to the X, Y and Z axis angles when the slide assembly is running. The system further comprises a test parameter modulation module and a load applying device; the test parameter modulation module is used to modulate a test speed parameter of the driving module to drive the carrier to perform linear reciprocating movement on the slide rail assembly, and is used to modulate a test load force parameter of the load applying device on the carrier; the information processing module processes the first distance difference, the second distance difference and the third distance difference and the corresponding test speed parameter and the test load force parameter, and outputs the test speed parameter and the test load force parameter corresponding to the first distance difference, the second distance difference and the third distance difference, and the angle deviation warning information corresponding to the angles of the X, Y and Z axes.

10:驅動模組 10:Drive module

20:X軸角度偏差感測模組 20: X-axis angle deviation sensing module

21:第一雷射測距儀 21: The first laser rangefinder

22,32,42:反射片 22,32,42: reflective sheet

30:Y軸角度偏差感測模組 30: Y-axis angle deviation sensing module

31:第二雷射測距儀 31: Second laser rangefinder

40:Z軸角度偏差感測模組 40: Z-axis angle deviation sensing module

41:第三雷射測距儀 41: The third laser rangefinder

50:訊號傳輸模組 50:Signal transmission module

60:資訊處理模組 60: Information processing module

70:載台 70: Carrier

71:滑軌組件 71: Slide rail assembly

72:移載機構 72:Transfer mechanism

73:固定基座 73:Fixed base

730:側板 730: Side panels

731:頂板 731: Top plate

80:負荷施加裝置 80: Load applying device

81:負荷位置調整機構 81: Load position adjustment mechanism

82:加壓頭 82: Pressure head

90:測試參數調變模組 90: Test parameter modulation module

A1~A5:負荷區域 A1~A5: Load area

L1:虛擬寬度方向延伸線 L1: Virtual width direction extension line

L2,L3:虛擬長度方向延伸線 L2, L3: Virtual length extension line

O1~O5:中心點 O1~O5: Center point

圖1係本發明載台對應X、Y及Z等軸的感測應用實施示意圖。 Figure 1 is a schematic diagram of the sensing application implementation of the platform of the present invention corresponding to the X, Y and Z axes.

圖2係本發明載台於滑軌組件運作的感測實施示意圖。 Figure 2 is a schematic diagram of the sensing implementation of the platform of the present invention in the operation of the slide rail assembly.

圖3係本發明載台於滑軌組件運作的剖面感測實施示意圖。 Figure 3 is a schematic diagram of the cross-sectional sensing implementation of the platform of the present invention in operation on the slide rail assembly.

圖4係本發明載台於滑軌組件運作的另一種剖面感測實施示意圖。 Figure 4 is a schematic diagram of another cross-sectional sensing implementation of the platform of the present invention in operation on the slide rail assembly.

圖5係本發明於載台劃分負荷區域的實施示意圖。 Figure 5 is a schematic diagram of the present invention in dividing the load area on the carrier.

圖6係本發明於各負荷區域所施加負荷強度的X、Y及Z等軸的基準距離差值對照示意圖。 Figure 6 is a schematic diagram comparing the baseline distance differences of the X, Y and Z axes of the load intensity applied in each load area of the present invention.

圖7係本發明具體架構的功能方塊實施示意圖。 Figure 7 is a schematic diagram of the functional block implementation of the specific architecture of the present invention.

為讓 貴審查委員能進一步瞭解本發明整體的技術特徵與達成本發明目的之技術手段,玆以具體實施例並配合圖式加以詳細說明: In order to allow the Honorable Review Committee to further understand the overall technical features of the present invention and the technical means for achieving the purpose of the present invention, a specific embodiment is provided with accompanying drawings for detailed description:

請配合參看圖1~2及圖7所示,為達成本發明第一目的之第一具體實施例,係包括一驅動模組10(如控制器;控制器與驅動電路的組合;但不以此為限)、一X軸角度偏差感測模組20、一Y軸角度偏差感測模組30、一Z軸角度偏差感測模組40、一訊號傳輸模組50及一資訊處理模組60。該驅 動模組10用以驅動一載台70於滑軌組件71做線性的往復移動。該X軸角度偏差感測模組20用以感測載台70往X軸角度方向之二個第一感測點的距離而產生二個第一距離感測訊號。該Y軸角度偏差感測模組30用以感測載台70往Y軸角度方向之二個第二感測點的距離而產生二個第二距離感測訊號。該Z軸角度偏差感測模組40用以感測載台70往Z軸角度方向之二個第三感測點的距離而產生二個第三距離感測訊號。該資訊處理模組60係透過有線或無線訊號傳輸模組50來接收二個第一距離感測訊號、二個第二距離感測訊號及二個第三距離感測訊號,並依序將二個第一距離感測訊號、二個第二距離感測訊號及二個第三距離感測訊號轉換處理為相應的二個第一距離值、二個第二距離值及二個第三距離值,該資訊處理模組60依序將二個第一距離值、二個第二距離值及二個第三距離值進行差值計算,以得到一第一距離差值、一第二距離差值及一第三距離差值,再判斷相對應於X、Y及Z軸的第一距離差值、第二距離差值及第三距離差值是否高於一基準距離差值,判斷結果為是,則輸出載台70於線性滑軌運行時相對應於X、Y及Z軸角度(Rolling、Pitching及Yawing)的角度偏移警示資訊。具體的,該位移偏移警示資訊可由顯示幕;或是警示裝置來顯示或輸出;或是透過有線或無線之訊號傳輸模組50將位移偏移警示資訊傳輸至遠端的監控資訊裝置(如伺服器、電腦或是智慧型手機等),以讓近端或遠端的使用者知悉,以對線性滑軌的製程或應用進行因應的改善運作處理。具體地,X、Y及Z軸的交點為一原點係位於該載台的一中心點。 Please refer to FIG. 1-2 and FIG. 7 , a first specific embodiment for achieving the first object of the present invention includes a driving module 10 (such as a controller; a combination of a controller and a driving circuit; but not limited thereto), an X-axis angle deviation sensing module 20, a Y-axis angle deviation sensing module 30, a Z-axis angle deviation sensing module 40, a signal transmission module 50 and an information processing module 60. The driving module 10 is used to drive a carrier 70 to perform linear reciprocating movement on a slide rail assembly 71. The X-axis angle deviation sensing module 20 is used to sense the distance of the carrier 70 to two first sensing points in the X-axis angle direction to generate two first distance sensing signals. The Y-axis angle deviation sensing module 30 is used to sense the distance from the stage 70 to two second sensing points in the Y-axis angle direction to generate two second distance sensing signals. The Z-axis angle deviation sensing module 40 is used to sense the distance from the stage 70 to two third sensing points in the Z-axis angle direction to generate two third distance sensing signals. The information processing module 60 receives two first distance sensing signals, two second distance sensing signals and two third distance sensing signals through the wired or wireless signal transmission module 50, and sequentially converts the two first distance sensing signals, the two second distance sensing signals and the two third distance sensing signals into two corresponding first distance values, two second distance values and two third distance values. The information processing module 60 sequentially converts the two first distance values, the two second distance values and the two third distance values. and two third distance values are used for difference calculation to obtain a first distance difference, a second distance difference and a third distance difference, and then it is determined whether the first distance difference, the second distance difference and the third distance difference corresponding to the X, Y and Z axes are higher than a reference distance difference. If the determination result is yes, an angle deviation warning message corresponding to the X, Y and Z axis angles (Rolling, Pitching and Yawing) of the output stage 70 when the linear slide rail is running is output. Specifically, the displacement warning information can be displayed or output by a display screen or a warning device, or transmitted to a remote monitoring information device (such as a server, computer or smart phone) through a wired or wireless signal transmission module 50, so that the near-end or remote user can be informed and the process or application of the linear slide can be improved accordingly. Specifically, the intersection of the X, Y and Z axes is an origin located at a center point of the carrier.

請配合參看圖3~4所示為基於第一具體實施例的第一應用實施例,本實施主要是將各軸位移偏差感測模組具體界定設於移載機構72上的實施形態,本實施例更包含一可受驅動模組10驅動而與載台70同步做線 性往復移動的移載機構72及一設於移載機構72上的固定基座73,該X軸角度偏差感測模組20、Y軸角度偏差感測模組30及Z軸角度偏差感測模組40設於固定基座73上,以於載台70之每一往復移動行程中的至少一預定位置感測載台70之二個第一距離感測訊號、二個第二距離感測訊號及二個第三距離感測訊號。 Please refer to Figures 3 and 4, which are the first application embodiments based on the first specific embodiment. This embodiment mainly defines the implementation form of each axis displacement deviation sensing module being specifically defined and arranged on the transfer mechanism 72. This embodiment further includes a transfer mechanism 72 that can be driven by the driving module 10 and synchronously perform linear reciprocating movement with the carrier 70, and a fixed base 73 arranged on the transfer mechanism 72. The X-axis angle deviation sensing module 20, the Y-axis angle deviation sensing module 30, and the Z-axis angle deviation sensing module 40 are arranged on the fixed base 73 to sense two first distance sensing signals, two second distance sensing signals, and two third distance sensing signals of the carrier 70 at at least one predetermined position in each reciprocating movement stroke of the carrier 70.

請配合參看圖3~4所示,本實施例係為基於第一應用實施例的具體實施例,本實施例主要是將固定基座73的具體構造與安裝位置予以界定,該固定基座73略呈ㄇ型且包含二平行並置的側板730及一介置於二側板730頂緣的頂板731,該二側板730與載台70之二側面平行,該頂板731與載台70之頂面平行,其一側板730內面設置可相對於Z軸角度方向之二個第三感測點的Z軸角度偏差感測模組40,該頂板731內面分別設置可相對於Y軸角度方向之二個第二感測點與可相對於X軸角度方向之二個第一感測點的Y軸角度偏差感測模組30及X軸角度偏差感測模組20。 Please refer to FIGS. 3 and 4 . This embodiment is a specific embodiment based on the first application embodiment. This embodiment mainly defines the specific structure and installation position of the fixed base 73. The fixed base 73 is slightly U-shaped and includes two parallel side plates 730 and a top plate 731 disposed between the top edges of the two side plates 730. The two side plates 730 are parallel to the two side surfaces of the carrier 70. The top plate 731 is disposed between the two side plates 730 and the two side surfaces of the carrier 70. 1 is parallel to the top surface of the carrier 70, and a Z-axis angle deviation sensing module 40 with two third sensing points in the Z-axis angle direction is disposed on the inner surface of one side plate 730, and a Y-axis angle deviation sensing module 30 and an X-axis angle deviation sensing module 20 with two second sensing points in the Y-axis angle direction and two first sensing points in the X-axis angle direction are disposed on the inner surface of the top plate 731.

請配合參看圖1~4及圖7所示,本實施例係為基於第一應用實施例的具體實施例,本實施例主要是將各軸位移偏差感測模組具體界定為雷射測距儀,該X軸角度偏差感測模組20係為可分別正對載台70頂面之相對於X軸角度方向(Rolling)之二個第一感測點的二個第一雷射測距儀21,該Y軸角度偏差感測模組30係為可分別正對載台70頂面之相對於Y軸角度方向(Pitching)之二個第二感測點的二個第二雷射測距儀31,該Z軸角度偏差感測模組40係為可分別正對載台70一側面之相對於Z軸角度方向(Yawing)之二個第三感測點的二個第三雷射測距儀41。 Please refer to FIGS. 1 to 4 and 7 . This embodiment is a specific embodiment based on the first application embodiment. This embodiment mainly defines the displacement deviation sensing module of each axis as a laser rangefinder. The X-axis angle deviation sensing module 20 is two first laser rangefinders 21 that can respectively face two first sensing points on the top surface of the carrier 70 relative to the X-axis angle direction (Rolling). The Y-axis angle deviation sensing module 30 includes two second laser rangefinders 31 that can respectively face two second sensing points on the top surface of the carrier 70 relative to the Y-axis angle direction (Pitching), and the Z-axis angle deviation sensing module 40 includes two third laser rangefinders 41 that can respectively face two third sensing points on one side surface of the carrier 70 relative to the Z-axis angle direction (Yawing).

請配合參看圖1~4所示,本實施例係為基於第一應用實施例的具體實施例,本實施主要是將每一二感測點具體界定為設置反射片,相 對於X軸角度方向之二個第一感測點、相對於Y軸角度方向之二個第二感測點及相對於Z軸角度方向之二個第三感測點皆設有二用以反射二第一雷射測距儀21、二第二雷射測距儀31及二第三雷射測距儀41之發射訊號而產生二個第一距離感測訊號、二個第二距離感測訊號及二個第三距離感測訊號的反射片22,32,42,各軸之雷射測距儀主要是以反射發射訊號的時間來分別測量與反射片22,32,42之間的距離。 Please refer to Figures 1 to 4. This embodiment is a specific embodiment based on the first application embodiment. This embodiment mainly defines each of the two sensing points as a reflector. The two first sensing points relative to the X-axis angle direction, the two second sensing points relative to the Y-axis angle direction, and the two third sensing points relative to the Z-axis angle direction are all provided with two reflectors 22, 32, 42 for reflecting the transmission signals of the two first laser rangefinders 21, the two second laser rangefinders 31, and the two third laser rangefinders 41 to generate two first distance sensing signals, two second distance sensing signals, and two third distance sensing signals. The laser rangefinders of each axis mainly measure the distances to the reflectors 22, 32, 42 respectively based on the time of reflecting the transmission signals.

請配合參看圖1~2所示,本實施例係為基於第一應用實施例的具體實施例,本實施例主要是將每一二感測點具體位置予以界定,相對於X軸角度方向之二個第一感測點位於載台70頂面之虛擬寬度方向延伸線L1的二端上。相對於Y軸角度方向之二個第二感測點位於通過載台70頂面中心位置之虛擬長度方向延伸線L2的二端上。相對於Z軸角度方向之二個第三感測點位於通過載台70一側面之虛擬長度方向延伸線L3的二端上。 Please refer to Figures 1 and 2. This embodiment is a specific embodiment based on the first application embodiment. This embodiment mainly defines the specific positions of each two sensing points. The two first sensing points relative to the X-axis angle direction are located at the two ends of the virtual width direction extension line L1 of the top surface of the carrier 70. The two second sensing points relative to the Y-axis angle direction are located at the two ends of the virtual length direction extension line L2 passing through the center position of the top surface of the carrier 70. The two third sensing points relative to the Z-axis angle direction are located at the two ends of the virtual length direction extension line L3 passing through one side of the carrier 70.

請配合參看圖1~5及圖7所示為基於第一具體實施例的第二應用實施例,本實施主要是透過相對應之X、Y及Z軸的角度偏移量來計算出線性滑軌的動態剛性資訊,該資訊處理模組60係分別將第一距離差值、第二距離差值及第三距離差值轉換為相對應之X、Y及Z軸的角度偏移量,再將已知載台70的負荷力除以相對應之X、Y及Z軸的角度偏移量,以得到載台70於線性滑軌運行時X、Y及Z等軸動態的剛性資訊。 Please refer to Figures 1 to 5 and 7 for a second application embodiment based on the first specific embodiment. This embodiment mainly calculates the dynamic rigidity information of the linear slide rail through the corresponding angular offsets of the X, Y and Z axes. The information processing module 60 converts the first distance difference, the second distance difference and the third distance difference into the corresponding angular offsets of the X, Y and Z axes respectively, and then divides the known load of the carrier 70 by the corresponding angular offsets of the X, Y and Z axes to obtain the dynamic rigidity information of the carrier 70 on the X, Y and Z axes when the linear slide rail is running.

請配合參看圖4~7所示,為達成本發明第二目的之第二具體實施例,除了包括上述第一具體實施例的整體技術內容之外,更包含一負荷施加裝置80,該載台70頂部的一承載面劃分設有複數負荷區域A1~A5,該負荷施加裝置80用以分別對複數負荷區域A1~A5之中心點O1~O5逐次地施予負荷力,以模擬載台70相對滑軌組件71做往復移動 時,依序於每一負荷區域A1~A5負載施予負荷力的狀況下,以依序求出各該負荷區域A1~A5之載台70於滑軌組件71運行時相對應X、Y及Z軸的第一距離差值、第二距離差值及第三距離差值。 Please refer to FIGS. 4 to 7 for a second specific embodiment for achieving the second object of the present invention. In addition to the overall technical content of the first specific embodiment, a load applying device 80 is further included. A load surface on the top of the carrier 70 is divided into a plurality of load areas A1 to A5. The load applying device 80 is used to apply a load to the center point O of the plurality of load areas A1 to A5. 1~O5 are applied successively to simulate the reciprocating movement of the platform 70 relative to the slide assembly 71. When the load force is applied in each load area A1~A5, the first distance difference, second distance difference and third distance difference of the platform 70 corresponding to the X, Y and Z axes of each load area A1~A5 when the slide assembly 71 is running are obtained in sequence.

請配合參看圖4、7所示,該負荷施加裝置80更包含一負荷位置調整機構81,該負荷位置調整機構81用以將負荷施加裝置80之一加壓頭82抵接於該載台70的其中一個負荷區域A1~A5上。 Please refer to Figures 4 and 7. The load applying device 80 further includes a load position adjustment mechanism 81. The load position adjustment mechanism 81 is used to place a pressure head 82 of the load applying device 80 against one of the load areas A1-A5 of the carrier 70.

較佳地,本發明較佳實施更包括有一測試參數調變模組90及一負荷施加裝置80;該測試參數調變模組90用以調變驅動模組10驅動該載台70於該滑軌組件71做線性的往復移動的一測試速度參數,及用以調變該負荷施加裝置80對該載台70之一測試負荷力參數;該資訊處理模組60處理該第一距離差值、該第二距離差值及該第三距離差值差值及相對應的測試速度參數與測試負荷力參數,並輸出、第一距離差值、第二距離差值及第三距離差值差值,相對應的測試速度參數與測試負荷力參數及相對應於X、Y及Z軸角度的角度偏移警示資訊。 Preferably, the preferred embodiment of the present invention further comprises a test parameter modulation module 90 and a load applying device 80; the test parameter modulation module 90 is used to modulate a test speed parameter of the driving module 10 driving the carrier 70 to perform linear reciprocating movement on the slide assembly 71, and is used to modulate a test load force parameter of the load applying device 80 on the carrier 70; the data The signal processing module 60 processes the first distance difference, the second distance difference, and the third distance difference, and the corresponding test speed parameters and test load force parameters, and outputs the first distance difference, the second distance difference, and the third distance difference, and the corresponding test speed parameters and test load force parameters and the angle deviation warning information corresponding to the X, Y, and Z axis angles.

因此,經由上述具體實施例的詳細說明后,本發明確實具有下列所述的特點: Therefore, after the detailed description of the above specific embodiments, the present invention does have the following characteristics:

1.本發明確實可以藉由多軸角度偏移的感測機能設置,以感測出載台多軸的角度偏移量,藉以得到載台於該滑軌組件運行時的動態剛性與角度偏移資訊,因而具有可減少線性滑軌之變形而增加剛性以及提升線性滑軌的位移精密度等點。 1. The present invention can indeed sense the angular offset of the multi-axis of the platform through the multi-axis angular offset sensing function, so as to obtain the dynamic rigidity and angular offset information of the platform when the slide rail assembly is running, thereby reducing the deformation of the linear slide rail, increasing the rigidity and improving the displacement precision of the linear slide rail.

2.本發明確實是可由選擇所需的負荷重心點位與負荷狀態來模擬線性滑軌載台實際載重運行下,以求出更精確之各軸距離差值的線性滑軌載台動態剛性與偏移資訊。 2. The present invention can indeed simulate the actual load operation of the linear slide platform by selecting the required load center of gravity point and load state, so as to obtain more accurate dynamic rigidity and offset information of the linear slide platform for the distance difference of each axis.

以上所述,僅為本發明一種較為可行的實施例,並非用以限定本發明之專利範圍,凡舉依據下列請求項所述之內容、特徵以及其精神而為之其他變化的等效實施,皆應包含於本發明之專利範圍內。本發明所具體界定於請求項之結構特徵,未見於同類物品,且具實用性與進步性,已符合發明專利要件,爰依法具文提出申請,謹請 鈞局依法核予專利,以維護本申請人合法之權益。 The above is only a feasible implementation example of the present invention and is not intended to limit the patent scope of the present invention. Any equivalent implementation based on the content, features and spirit described in the following claims shall be included in the patent scope of the present invention. The structural features of the present invention specifically defined in the claims are not seen in similar articles and are practical and progressive. They have met the requirements for invention patents. Therefore, we hereby submit an application in accordance with the law and sincerely request the Jun Bureau to grant the patent in accordance with the law to protect the legitimate rights and interests of the present applicant.

20:X軸角度偏差感測模組 20: X-axis angle deviation sensing module

21:第一雷射測距儀 21: The first laser rangefinder

30:Y軸角度偏差感測模組 30: Y-axis angle deviation sensing module

31:第二雷射測距儀 31: Second laser rangefinder

40:Z軸角度偏差感測模組 40: Z-axis angle deviation sensing module

41:第三雷射測距儀 41: The third laser rangefinder

70:載台 70: Carrier

L1:虛擬寬度方向延伸線 L1: Virtual width direction extension line

L2,L3:虛擬長度方向延伸線 L2, L3: Virtual length extension line

Claims (9)

一種線性滑軌載台動態剛性與偏移監測系統,其包括:一驅動模組,其用以驅動一載台於一滑軌組件做線性的往復移動;一X軸角度偏差感測模組,其用以感測該載台上對應於該X軸角度方向之二個第一感測點的距離而產生二個第一距離感測訊號;一Y軸角度偏差感測模組,其用以感測該載台上對應於該Y軸角度方向之二個第二感測點的距離而產生二個第二距離感測訊號;一Z軸角度偏差感測模組,其用以感測該載台上對應於該Z軸角度方向二個第三感測點的距離而產生二個第三距離感測訊號;一訊號傳輸模組;及一資訊處理模組,其透過該訊號傳輸模組接收該二第一距離感測訊號、該二第二距離感測訊號及該二第三距離感測訊號,並依序將轉換處理為相應的二個第一距離值、二個第二距離值及二個第三距離值,該資訊處理模組依序將該二個第一距離值、該二個第二距離值及Z軸距離值進行差值計算,以得到一第一距離差值、一第二距離差值及一第三距離差值,再判斷該第一距離差值、該第二距離差值及該第三距離差值差值其中之一是否高於一基準距離差值,當判斷結果為是,則輸出該載台於該滑軌組件運行時相對應於X、Y及Z軸角度的角度偏移警示資訊;其中,更包含一可受該驅動模組驅動而與該載台同步做線性往復移動的移載機構及一設於該移載機構上的固定基座,該X軸角度偏差感測模組、該Y軸角度偏差感測模組及該Z軸角度偏差感測模組設於該固定基座上,以於該載台之每一往復移動行程中的至少一預定位置分別感測該載台之該二個第一距離感測訊號、該二個第二距離感測訊號及該二個第三距離感測訊號。 A linear slide platform dynamic rigidity and deviation monitoring system includes: a driving module, which is used to drive a platform to perform linear reciprocating movement on a slide assembly; an X-axis angle deviation sensing module, which is used to sense the distance between two first sensing points on the platform corresponding to the X-axis angle direction to generate two first distance sensing signals; a Y-axis angle deviation sensing module, which is used to sense the distance between two second sensing points on the platform corresponding to the Y-axis angle direction to generate two second distance sensing signals. a Z-axis angle deviation sensing module, which is used to sense the distance between two third sensing points on the carrier corresponding to the Z-axis angle direction to generate two third distance sensing signals; a signal transmission module; and an information processing module, which receives the two first distance sensing signals, the two second distance sensing signals and the two third distance sensing signals through the signal transmission module, and sequentially converts and processes the signals into two corresponding first distance values, two second distance values and two third distance values. The information processing module sequentially calculates the difference between the two first distance values, the two second distance values and the Z-axis distance value to obtain a first distance difference, a second distance difference and a third distance difference, and then determines whether one of the first distance difference, the second distance difference and the third distance difference is higher than a reference distance difference. When the determination result is yes, the angle deviation warning information corresponding to the X, Y and Z axis angles of the carrier when the slide assembly is running is output; wherein, It further comprises a transfer mechanism that can be driven by the driving module and synchronously perform linear reciprocating movement with the carrier, and a fixed base disposed on the transfer mechanism. The X-axis angle deviation sensing module, the Y-axis angle deviation sensing module, and the Z-axis angle deviation sensing module are disposed on the fixed base to respectively sense the two first distance sensing signals, the two second distance sensing signals, and the two third distance sensing signals of the carrier at at least one predetermined position in each reciprocating movement stroke of the carrier. 如請求項1所述之線性滑軌載台動態剛性與偏移監測系統,其中,該固定基座略呈ㄇ型且包含二平行並置的側板及一介置於該二側板頂緣的頂板,該二側板與該載台之二側面平行,該頂板與該載台之一頂面平行,其一該側板內面設置相對於該Z軸角度方向之二個第三感測點的該Z軸角度偏差感測模組,該頂板內面分別設置相對於該Y軸角度方向之該二個第二感測點與相對於該X軸角度方向之該二個第一感測點的該Y軸角度偏差感測模組及該Y軸角度偏差感測模組。 The linear slide platform dynamic rigidity and offset monitoring system as described in claim 1, wherein the fixed base is slightly U-shaped and includes two parallel side plates and a top plate disposed between the top edges of the two side plates, the two side plates are parallel to the two side surfaces of the platform, the top plate is parallel to one top surface of the platform, the Z-axis angle deviation sensing module for the two third sensing points relative to the Z-axis angle direction is disposed on the inner surface of one of the side plates, and the Y-axis angle deviation sensing module and the Y-axis angle deviation sensing module for the two second sensing points relative to the Y-axis angle direction and the two first sensing points relative to the X-axis angle direction are disposed on the inner surface of the top plate. 如請求項2所述之線性滑軌載台動態剛性與偏移監測系統,其中,該X軸角度偏差感測模組係為可分別正對該載台頂面之相對於該X軸角度方向之該二個第一感測點的二第一雷射測距儀,該Y軸角度偏差感測模組係為分別正對該載台頂面之相對於該Y軸角度方向之該二個第二感測點的二第二雷射測距儀,該Z軸角度偏差感測模組係為可分別正對該載台一側面之相對於該Z軸角度方向之該二個第三感測點的二第三雷射測距儀。 The linear slide platform dynamic rigidity and deviation monitoring system as described in claim 2, wherein the X-axis angle deviation sensing module is two first laser rangefinders that can respectively face the two first sensing points on the top surface of the platform relative to the X-axis angle direction, the Y-axis angle deviation sensing module is two second laser rangefinders that can respectively face the two second sensing points on the top surface of the platform relative to the Y-axis angle direction, and the Z-axis angle deviation sensing module is two third laser rangefinders that can respectively face the two third sensing points on one side surface of the platform relative to the Z-axis angle direction. 如請求項3所述之線性滑軌載台動態剛性與偏移監測系統,其中,相對於該X軸角度方向之該二個第一感測點、相對於該Y軸角度方向之該二個第二感測點及相對於該Z軸角度方向之該二個第三感測點皆設有二用以反射該二第一雷射測距儀、該二第二雷射測距儀及該二第三雷射測距儀之發射訊號而產生該二個第一距離感測訊號、該二個第二距離感測訊號及該二個第三距離感測訊號的反射片。 The linear slide platform dynamic rigidity and offset monitoring system as described in claim 3, wherein the two first sensing points relative to the X-axis angle direction, the two second sensing points relative to the Y-axis angle direction, and the two third sensing points relative to the Z-axis angle direction are all provided with two reflectors for reflecting the transmission signals of the two first laser rangefinders, the two second laser rangefinders, and the two third laser rangefinders to generate the two first distance sensing signals, the two second distance sensing signals, and the two third distance sensing signals. 如請求項1、2、3或4所述之線性滑軌載台動態剛性與偏移監測系統,其中,相對於該X軸角度方向之該二個第一感測點位於通過該載台頂面中心位置之虛擬寬度方向延伸線的二端上;相對於該Y軸角度方向之該二個第二感測點位於通過該載台頂面中心位置之虛擬長度方向延伸線的二 端上;相對於該Z軸角度方向之二個第三感測點位於通過該載台一側面中心位置之虛擬長度方向延伸線的二端上。 A linear slide platform dynamic rigidity and offset monitoring system as described in claim 1, 2, 3 or 4, wherein the two first sensing points relative to the X-axis angle direction are located at the two ends of a virtual width direction extension line passing through the center position of the platform top surface; the two second sensing points relative to the Y-axis angle direction are located at the two ends of a virtual length direction extension line passing through the center position of the platform top surface; the two third sensing points relative to the Z-axis angle direction are located at the two ends of a virtual length direction extension line passing through the center position of one side surface of the platform. 如請求項1所述之線性滑軌載台動態剛性與偏移監測系統,其中,該資訊處理模組係分別將該第一距離差值、該第二距離差值及該第三距離差值轉換為相對應之X、Y及Z軸的角度偏移量,再將已知該載台的負荷力除以相對應之X、Y及Z軸的角度偏移量,以得到該載台於該滑軌組件運行時相對應之X、Y及Z軸的動態剛性資訊。 The linear slide platform dynamic rigidity and offset monitoring system as described in claim 1, wherein the information processing module converts the first distance difference, the second distance difference and the third distance difference into the corresponding angular offsets of the X, Y and Z axes respectively, and then divides the known load force of the platform by the corresponding angular offsets of the X, Y and Z axes to obtain the dynamic rigidity information of the platform corresponding to the X, Y and Z axes when the slide assembly is running. 如請求項1或6所述之線性滑軌載台動態剛性與偏移監測系統,其更包含一負荷施加裝置,該載台頂部的一承載面劃分設有複數負荷區域,該負荷施加裝置用以分別對該複數負荷區域之中心點逐次地施予負荷力,以模擬該載台相對該滑軌組件做往復移動時,依序於每一該負荷區域施予該負荷力的狀況下,以依序求出各該負荷區域之該載台於該滑軌組件運行時相對應X、Y及Z軸的該第一距離差值、該第二距離差值及該第三距離差值。 The linear slide platform dynamic rigidity and deflection monitoring system as described in claim 1 or 6 further comprises a load applying device, wherein a bearing surface on the top of the platform is divided into a plurality of load areas, and the load applying device is used to sequentially apply load forces to the center points of the plurality of load areas respectively, so as to simulate the reciprocating movement of the platform relative to the slide assembly, and sequentially apply the load force to each load area, so as to sequentially obtain the first distance difference, the second distance difference and the third distance difference of the platform in each load area corresponding to the X, Y and Z axes when the slide assembly is running. 如請求項7所述之線性滑軌載台動態剛性與偏移監測系統,其中,該負荷施加裝置更包含一負荷位置調整機構,該負荷位置調整機構用以將該負荷施加裝置之一加壓頭抵接於該載台的其中一個該負荷區域上。 The linear slide platform dynamic rigidity and deflection monitoring system as described in claim 7, wherein the load applying device further comprises a load position adjustment mechanism, and the load position adjustment mechanism is used to abut a pressure head of the load applying device against one of the load areas of the platform. 如請求項1或6所述之線性滑軌載台動態剛性與偏移監測系統,其更包括有一測試參數調變模組及一負荷施加裝置;該測試參數調變模組用以調變該驅動模組驅動該載台於該滑軌組件做線性的往復移動的一測試速度參數,及用以調變該負荷施加裝置對該載台之一測試負荷力參數;該資訊處理模組處理該第一距離差值、該第二距離差值及該第三距離差值差 值及相對應的該測試速度參數與該測試負荷力參數,並輸出與該第一距離差值、該第二距離差值及該第三距離差值差值,相對應的該測試速度參數與該測試負荷力參數及相對應於X、Y及Z軸角度的角度偏移警示資訊。 The linear slide rail platform dynamic rigidity and deflection monitoring system as described in claim 1 or 6 further includes a test parameter modulation module and a load application device; the test parameter modulation module is used to modulate a test speed parameter of the drive module driving the platform to perform linear reciprocating movement on the slide rail assembly, and is used to modulate a test load force parameter of the load application device on the platform; the information The processing module processes the first distance difference, the second distance difference and the third distance difference and the corresponding test speed parameter and the test load parameter, and outputs the first distance difference, the second distance difference and the third distance difference, the corresponding test speed parameter and the test load parameter and the angle deviation warning information corresponding to the X, Y and Z axis angles.
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Citations (3)

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Publication number Priority date Publication date Assignee Title
WO2012092734A1 (en) * 2011-01-06 2012-07-12 三一电气有限责任公司 Blade static loading platform and blade static testing system
CN104075886A (en) * 2014-06-24 2014-10-01 西安理工大学 Modularized rolling linear guide rail pair combination part static rigidity test method and device
TW201704920A (en) * 2015-07-24 2017-02-01 國立勤益科技大學 Linear slide bearing monitoring system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012092734A1 (en) * 2011-01-06 2012-07-12 三一电气有限责任公司 Blade static loading platform and blade static testing system
CN104075886A (en) * 2014-06-24 2014-10-01 西安理工大学 Modularized rolling linear guide rail pair combination part static rigidity test method and device
TW201704920A (en) * 2015-07-24 2017-02-01 國立勤益科技大學 Linear slide bearing monitoring system

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