TWI835267B - Probe device for high frequency signal testing - Google Patents

Abstract

A probe device for high-frequency signal testing, including a signal shielding shell and at least two probes, wherein at least two cylindrical accommodation spaces are provided in the signal shielding shell at parallel intervals, and the two adjacent cylindrical accommodation spaces are Communicated with each other and set at least a distance, each cylindrical accommodation space forms a through hole with respect to the two opposite surfaces of the signal shielding housing, so that one test end and a telescopic end of the two ends of each probe pass through respectively. These perforations are made, and an air gap is set between each probe and the inner wall of the cylindrical accommodation space. Changing the distance and the size of the air gap can adjust the required matching impedance; accordingly, these tests The end and the retractable ends are respectively in contact with an object under test and an electrical connection socket to transmit high-frequency signals, and shield interference during transmission to reduce detection errors.

Description

Probe device for high frequency signal testing

This invention belongs to the field of semiconductor electrical testing equipment, especially a probe device for high-frequency signal testing installed in an electrical test socket for detecting signal sources that require high-speed computing such as the Internet of Things or 5G mobile networks. signal, and can adjust the required matching impedance during manufacturing, and will not be interfered by signals during detection and cause detection errors.

Generally speaking, semiconductors are electrically tested through electrical testing equipment with an electrical connection socket. Within the electrical connection socket, there are a plurality of electrical probes arranged at equal intervals to correspond to the electrical soldering points that contact the semiconductor to be tested. Pad, through the signal transmission after contact, the correctness of its electrical signal is analyzed to obtain the detection result.

However, with the advancement of integrated circuit technology, the size of semiconductor chips has also become smaller. In addition to the smaller spacing between the probes, the measurement frequency must also be increased to meet the needs of the chip, especially with the To meet the needs of some high-speed networks, such as detecting signal sources that require high-speed computing such as the Internet of Things or 5G mobile network signals, it is necessary to use electrical testing equipment that can detect high-frequency signals. Traditional electrical probes are no longer sufficient. , then you will need to use a high-frequency probe card. The high-speed probe card contains a substrate and a plurality of probes. It is used in the same way as a general electrical probe. It generates uniform deformation and stress when contacting the pads. To accurately transmit test signals from electrical test equipment; such as U.S. Invention Patent No. US7,656,175 "Inspection unit" and US4,724,180 "Electrically shielded connectors" both propose a high-frequency probe card structure with a substrate, both of which have Alignment issues when assembling substrates, in high-frequency signal detection, for The assembly alignment requires very high accuracy. For assemblers, the above two high-frequency probe card structures are quite time-consuming and labor-intensive to assemble. For example, the substrate using a flexible circuit board has a dissipation factor (DF). High disadvantages. Therefore, most of the current high-frequency probe cards still transmit high-frequency signals in a vertical manner. High-frequency signals are prone to large losses during the transmission process, resulting in high-frequency signals that can be transmitted over a shorter distance and are easily attenuated. In addition to the above problems, interference problems during general electrical signal transmission and probe matching impedance problems during measurement are factors that cause errors in detection; in addition, probes used in high-frequency signal detection are finger It can transmit signals with frequencies higher than 1GHz. In order to reduce the signal degradation rate, so-called short probes have also appeared. However, the reduction in probe length also limits the self-inductance phenomenon during connection. Therefore, how to overcome the limitations and shortcomings of today's high-speed probe cards, how to transmit high-frequency signals without increasing signal noise, avoid external interference, and ensure their normal operation when contacting the solder pads, significantly reducing the cost of the probe. and damage to the welding pads are all problems that need to be solved at present.

In view of this, the author has accumulated many years of experience in researching and manufacturing this kind of electrical testing equipment, and carefully designed a probe device for high-frequency signal testing. By using a specially designed signal shielding shell, it can be quickly installed on the The electrical connection base is convenient for installation, maintenance and replacement. When testing, the signal shielding shell can ensure that the probes inside will not be interfered by general electrical signals, and the signal shielding shell is used to connect the probes to each other. Its spacing and air gap design can adjust its matching impedance to further ensure the accuracy of its detection. It is especially suitable for detecting signal sources that require high-speed computing such as the Internet of Things or high-frequency signals such as 5G mobile network signals.

One purpose of this invention is to provide a probe device for high-frequency signal testing, which has a signal shielding shell and at least two probes movably installed in it, so that through the signal shielding The housing is provided with a spacing and an air gap relative to the probes. Accordingly, during the process of manufacturing the signal shielding housing, changing the spacing and the size of the air gap can adjust the required matching impedance; accordingly, the required matching impedance can be adjusted The test end and the retractable ends are respectively in contact with an object under test and an electrical connection socket to transmit high-frequency signals, and shield interference during transmission to reduce detection errors; moreover, the signal shielding shell is designed to be quickly installed It is placed in the electrical connection base for easy installation, maintenance and replacement. When testing, the signal shielding shell can ensure that the probe inside will not be interfered by general electrical signals, ensuring the accuracy of its testing.

In order to achieve the above purpose, the probe device for high-frequency signal testing of this invention is used to be quickly installed in an electrical test socket to specifically detect high-frequency signals in electrical signals. The interior of the electrical connection socket is coaxially parallel. A plurality of electrical probes are arranged at intervals, including: a signal shielding shell, the shape of which corresponds to the shape of one of the installation slots of the electrical test socket, so that the signal shielding shell can be directly installed therein, and the signal shielding shell There are at least two cylindrical accommodating spaces spaced parallelly inside the body. The two adjacent cylindrical accommodating spaces are connected to each other and set at least a distance apart. In addition, each cylindrical accommodating space corresponds to the signal shielding shell. The two opposite surfaces respectively form a through hole; and at least two probes, the two ends of each probe are respectively a test end and a telescopic end, and each probe is correspondingly accommodated in each cylindrical container. space, so that the test end and the telescopic end of each probe penetrate the two opposite through holes respectively, so that part of the test ends and the telescopic ends are located outside the signal shielding shell, and each of the An air gap is set between a probe and the inner wall of the cylindrical accommodation space; during testing, the test ends and the telescopic ends are respectively in contact with an object under test and the electrical connection socket, so that high-frequency signals Transmission is carried out through the two probes, and in the process of making the signal shielding case, the distance and the size of the air gap are set to adjust the matching impedance required by the two probes, and the signal shielding case is used to shield the high These electrical probes outside the probe device for high-frequency signal testing cause errors in high-frequency signal detection, that is, when testing, the signal is The shielding shell can ensure that the internal probe will not be interfered by the electrical signal of the external probe, ensuring the accuracy of its detection.

In one embodiment, the signal shielding shell of the invention includes a body and two covers. The system has an open top surface and a bottom surface, and the cylindrical accommodation spaces are connected to the top surface respectively. and the bottom surface, and the two covers are respectively closed and disposed on the top surface and the bottom surface.

Furthermore, in another embodiment, according to different usage types, the invention has different shape structures, for example: each cover is an oblong shape when viewed from above, and the cross-section of the main body is also an oblong shape, the main body is provided with the two cylindrical accommodating spaces, and the two covers are respectively provided with the two through holes at intervals, and the spacing distance between the two adjacent through holes corresponds to the distance between the electrical probes inside the electrical connector. For another example: the cover is L-shaped when viewed from above, and the cross-section of the main body is also L-shaped, the main body is provided with the three cylindrical accommodating spaces, and the two adjacent cylindrical accommodating spaces are connected, and the three through holes are respectively spaced apart on the two covers, and the spacing distance between the two adjacent through holes corresponds to the distance between the electrical probes inside the electrical connector. Or, for example, the cover is rectangular when viewed from above, and the cross section of the body is also rectangular, the body is provided with the four cylindrical accommodation spaces, and the two adjacent cylindrical accommodation spaces are connected, and the four through holes are respectively provided on the two covers at intervals, and the interval distance between the two adjacent through holes corresponds to the distance between the electrical probes inside the electrical connector; furthermore, the body is composed of two relatively symmetrical blocks, and the two blocks are connected by the probes. The diameter direction of the probe is relatively set, so that the cylindrical accommodation spaces are located inside the joint surface of the two blocks; or as follows: the body is composed of two symmetrical blocks, the two blocks are relatively set in the axial direction of the probes, so that the two cylindrical accommodation spaces are symmetrically spaced on the joint surface of the two blocks, and a corresponding plug hole and a plug post are respectively provided on the two blocks, and the plug holes and the plug posts are correspondingly arranged at the positions where the two cylindrical accommodation spaces are connected. Based on this, a shaped structure that meets the requirements can be made for quick installation, and it can ensure that when testing, the probe inside is protected by the body and will not be disturbed by general electrical signals, so as to achieve the purpose of ensuring the accuracy of the detection.

1: Probe device for high frequency signal testing

11: Signal shielding shell

111:Ontology

1111:Top surface

1112: Bottom surface

1113: Cylindrical storage space

1114:Block

1115:Block

11151:Jack

11152:insertion post

112: Cover

1121:Perforation

12:Probe

121:Test end

122:Telescopic end

2: Electrical connection socket

21: Electrical probe

22:Installation slot

Figure 1 is an exploded three-dimensional view of the first preferred embodiment of this invention.

Figure 2 is a schematic structural diagram of the first preferred embodiment of the present invention after assembly.

Figure 3 is a cross-sectional view of the first preferred embodiment of the present invention after assembly.

Figure 4 is an exploded three-dimensional view of the second preferred embodiment of this invention.

Figure 5 is a schematic structural diagram of the second preferred embodiment of the present invention after assembly.

Figure 6 is a cross-sectional view of the second preferred embodiment of the present invention after assembly.

Figure 7 is an exploded three-dimensional view of the third preferred embodiment of this invention.

Figure 8 is a schematic structural diagram of the third preferred embodiment of the present invention after assembly.

Figure 9 is a cross-sectional view of the third preferred embodiment of the present invention after assembly.

Figure 10 is an exploded perspective view of the fourth preferred embodiment of this invention.

Figure 11 is a schematic structural diagram of the fourth preferred embodiment of the present invention after assembly.

Figure 12 is a graph (1) of the detection data changes after adjusting different spacings for this creation.

Figure 13 is a graph (2) of the detection data changes after adjusting different spacings for this creation.

Figure 14 is a graph (3) of the detection data changes after adjusting different spacings in this creation.

Figure 15 is a graph (4) of the detection data changes after adjusting different spacings in this creation.

Figure 16 is a graph (5) of the detection data changes after adjusting different spacings in this creation.

Figure 17 is a graph (6) of the detection data changes after adjusting different spacings in this creation.

In order for your review committee to clearly understand the content of this creation, only the following description is used together with the diagram, please refer to it.

Please refer to Figures 1, 2 and 3, which are an exploded three-dimensional view of the first preferred embodiment of the present invention, as well as a schematic structural diagram and a cross-sectional view of the assembled structure. As shown in the above figures, the probe device 1 for high-frequency signal testing of this invention is used to be quickly installed in an electrical test socket 2 to specifically detect high-frequency signals in electrical signals. The electrical connection socket 2 A plurality of electrical probes 21 are arranged coaxially and parallelly spaced inside. The probe device 1 for high-frequency signal testing includes a signal shielding shell 11 and a pair of probes 12 .

The shape of the signal shielding shell 11 corresponds to the shape of one of the mounting slots 22 of the electrical test socket 2. As shown in Figure 1, the signal shielding shell 11 includes a body 111 and two covers 112. The body 111 It has an open top surface 1111 and a bottom surface 1112, and there are two parallel cylindrical accommodation spaces 1113 spaced inside the body 111. The two adjacent cylindrical accommodation spaces 1113 are connected to each other and set at a distance. , the two cylindrical accommodation spaces 1113 are respectively connected to the top surface 1111 and the bottom surface 1112; and the two covers 112 are respectively closed and disposed on the top surface 1111 and the bottom surface 1112. It should be noted that each cover 112 is oblong when viewed from above, and the cross section of the body 111 is also oblong, and each cover 112 corresponds to the two cylindrical volumes. The space 1113 is provided with two through holes 1121 at intervals, and the distance between the two adjacent through holes 1121 corresponds to the distance between the electrical probes inside the electrical connection base. Therefore, the signal insulation shell can Easy to install directly in the installation slot.

The two ends of each probe 12 are respectively a test end 121 and a telescopic end 122, and each probe 12 is correspondingly accommodated in each cylindrical accommodation space 1113, so that each probe 12 The test end 121 and the telescopic end 122 respectively pass through the two opposite through holes 1121, so that part of the test ends 121 and the telescopic ends 122 are located outside the signal shielding housing 11, and each probe An air gap is set between the needle 12 and the inner wall of the cylindrical accommodation space 1113 .

Please also refer to Figures 12 to 16, which are diagrams of the detection data changes after adjusting different spacings in this creation. Among them, IM is impedance, the abbreviation of Impedance; IL is insertion loss, the abbreviation of Insertion Loss; RL is return loss, the abbreviation of Return Loss. The vertical axis is the specification range, and the horizontal axis is the transmission speed. Therefore, as can be seen from the following diagram, it can be seen that there is an obvious linear difference between the change in spacing and the impedance when the signal is turned on. That is, the larger the spacing, the greater the impedance when the signal is turned on, and when transmitting The faster the speed, especially the insertion loss and return loss in a certain range will decrease.

Please refer to Figures 4, 5 and 6, which are an exploded three-dimensional view of the second preferred embodiment of the present invention, as well as a schematic structural diagram and a cross-sectional view of the assembled structure. In order to meet the actual testing situation, different numbers of the probes 12 are sometimes needed. As shown in the above figures, it is the second preferred embodiment of the present invention, in which the probe device for high-frequency signal testing System 1 includes a signal shielding shell 11 and three probes 12. The difference is that the cover 112 is L-shaped when viewed from above, and the cross-section of the body 111 is also L-shaped. Therefore, the main body 111 has an L-shaped cross-section. The three cylindrical accommodation spaces 1113 are provided inside the 111, and the two adjacent cylindrical accommodation spaces 1113 are connected, and each cover 112 is provided with the three through holes 1121 at intervals, and The spacing distance between the two adjacent through holes 1121 corresponds to the distance between the electrical probes inside the electrical connection base.

Please refer to Figures 7, 8 and 9, which are a three-dimensional exploded view of the third preferred embodiment of the present invention, as well as a schematic structural diagram and a cross-sectional view of the assembled structure. As shown in the above figures, it is the third preferred embodiment of the present invention, in which the probe device 1 for high-frequency signal testing includes a signal shielding shell 11 and four probes 12, which is similar to the first two embodiments. The difference is that the cover 112 is rectangular when viewed from above, and the cross-section of the body 111 is also rectangular. The body 111 is provided with the four cylindrical accommodation spaces 1113 and the two adjacent cylinders. The accommodation spaces 1113 are connected, and four through holes 1121 are respectively provided on the two covers 112, and the distance between the two adjacent through holes 1121 corresponds to the distance inside the electrical connection base 2. The distance between the electrical probes 21 is, in addition, In order to facilitate manufacturing, the body 111 of the present invention is composed of two symmetrical blocks 1114. The two blocks 1114 are arranged oppositely in the radial direction of the probes 12, so that the cylindrical containers The placement space 1113 is located inside the joint surface of the two blocks 1114.

Please refer to Figures 10 and 11, which are an exploded perspective view of the fourth preferred embodiment of the present invention and a schematic diagram of its assembled structure. As shown in the figure, the body 111 is composed of two symmetrical blocks 1115. The two blocks 1115 are arranged oppositely in the axial direction of the probes 12, so that the two cylindrical accommodation spaces 1113 are respectively The two blocks 1115 are symmetrically spaced at the joint surface; and, for convenience during assembly, a corresponding jack 11151 and a plug 11152 are respectively provided on the two blocks 1115. The jacks 11151 And the insertion posts 11152 are correspondingly located at positions where the two cylindrical storage spaces 1113 are connected.

Accordingly, during testing, the test terminals 121 and the retractable terminals 122 are respectively in contact with an object under test and the electrical connection socket, so that high-frequency signals are transmitted through the two probes 12, and during the production of the In the process of shielding the signal housing 11, the distance and the size of the air gap are set to adjust the matching impedance required for the two probes 12, and the signal shielding housing 11 is used to shield the probe device except for the high-frequency signal test. These electrical probes cause errors in high-frequency signal detection. That is, when testing, the signal shielding shell can ensure that the internal probes will not be interfered by the electrical signals of the external probes, ensuring that they are accurate during detection. Correctness; Moreover, the signal shielding shell 11 is designed to be quickly installed in the electrical connection socket to facilitate installation, maintenance and replacement. When testing, the signal shielding shell 11 can be used to ensure that the internal probe will not It is interfered by general electrical signals to achieve the purpose of ensuring the accuracy of detection.

However, the above are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. Therefore, those who have ordinary knowledge in the technical field or are familiar with this technology can make equivalent or easily Any changes and modifications made without departing from the spirit and scope of this creation shall be covered by the patent scope of this creation.

1: Probe device for high frequency signal testing

11: Signal shielding shell

111:Ontology

1111:Top surface

1112: Bottom surface

1113: Cylindrical storage space

112: Cover

1121:Perforation

12:Probe

121:Test end

122:Telescopic end

2: Electrical connection socket

21: Electrical probe

22:Installation slot

Claims (8)

A probe device for high-frequency signal testing, which is used to be quickly installed in an electrical test socket to specifically detect high-frequency signals in electrical signals. A plurality of electrical probes are arranged coaxially and parallelly spaced inside the electrical connection socket. needles, including: A signal shielding shell, the shape of which corresponds to the shape of one of the installation slots of the electrical test socket, so that the signal shielding shell can be directly installed therein, and the inside of the signal shielding shell is provided with at least two cylindrical shapes that are parallel and spaced apart. Accommodation space, the two adjacent cylindrical accommodation spaces are interconnected and at least set at a distance, and each cylindrical accommodation space is formed with a through hole corresponding to the two opposite surfaces of the signal shielding housing; and At least two probes, the two ends of each probe are respectively a test end and a telescopic end, and each probe is correspondingly accommodated in each cylindrical accommodation space, so that each probe The test end and the telescopic end respectively pass through the two opposite through holes, so that part of the test ends and the telescopic ends are located outside the signal shielding shell, and each probe is accommodated in the cylindrical shape. An air gap is set between the inner walls of the space; during testing, the test ends and the telescopic ends are respectively in contact with an object under test and the electrical connection base, so that high-frequency signals are transmitted through the two probes, and In the process of making the signal shielding shell, the distance and the size of the air gap are set to adjust the matching impedance required for the two probes, and the signal shielding shell is used to shield the probe device except for the high-frequency signal test. These electrical probes cause errors in high-frequency signal detection. The probe device for high-frequency signal testing described in claim 1, wherein the signal shielding shell includes a body and two cover bodies, the system has an open top surface and a bottom surface, and the cylindrical volumes The placement space is connected to the top surface and the bottom surface respectively, and the two covers are respectively closed and disposed on the top surface and the bottom surface. The probe device for high-frequency signal testing described in claim 2, wherein each cover is in an oblong shape when viewed from above, and the cross-section of the body is also in an oblong shape, and the body is provided with the two There is a cylindrical accommodation space, and the two through holes are respectively spaced on the two covers, and the distance between the two adjacent through holes corresponds to the distance between the electrical probes inside the electrical connection base. . The probe device for high-frequency signal testing described in claim 2, wherein the cover is L-shaped when viewed from above, and the cross-section of the body is also L-shaped, and the body is provided with the three cylindrical containers. The storage space is connected with the two adjacent cylindrical storage spaces, and the three perforations are respectively spaced on the two covers, and the spacing distance between the two adjacent perforations corresponds to the electrical connection. The distance between the electrical probes inside the socket. The probe device for high-frequency signal testing described in claim 2, wherein the cover is rectangular when viewed from above, and the cross-section of the body is also rectangular, and the body is provided with the four cylindrical accommodation spaces. , and the two adjacent cylindrical accommodation spaces are connected, and the four perforations are respectively spaced on the two covers, and the spacing distance between the two adjacent perforations corresponds to the inside of the electrical connection base the distance between the electrical probes. The probe device for high-frequency signal testing described in claim 5, wherein the system is composed of two symmetrical blocks, and the two block systems are arranged oppositely in the radial direction of the probes, so that the cylinders The shaped accommodation space is located inside the joint surface of the two blocks. The probe device for high-frequency signal testing described in claim 1, wherein the system is composed of two symmetrical blocks, and the two-block system is arranged oppositely in the axial direction of the probes, so that the two cylinders The shaped accommodation spaces are respectively arranged at symmetrical intervals on the joint surface of the two blocks. The probe device for high-frequency signal testing described in claim 7, wherein the two blocks are respectively provided with a corresponding jack and a plug, and the jacks and the plugs are correspondingly provided on the The location where two cylindrical configuration spaces are connected.