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TWI828581B - Mass transfer method and device of micro-luminescent diodes - Google Patents

Mass transfer method and device of micro-luminescent diodes Download PDF

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TWI828581B
TWI828581B TW112117157A TW112117157A TWI828581B TW I828581 B TWI828581 B TW I828581B TW 112117157 A TW112117157 A TW 112117157A TW 112117157 A TW112117157 A TW 112117157A TW I828581 B TWI828581 B TW I828581B
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temperature
led chips
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TW202445883A (en
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吳智孟
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創新服務股份有限公司
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Abstract

一種微發光二極體之巨量轉移方法,包括:驅使一溫控黏附板貼附一暫時載板,其中,該溫控黏附板具有多個冷減黏膠部,該暫時載板黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒;驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上;驅使該溫控黏附板貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層;以及驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上。A mass transfer method of micro-luminescent diodes, including: driving a temperature-controlled adhesive plate to adhere to a temporary carrier plate, wherein the temperature-controlled adhesive plate has a plurality of cold adhesive parts, and the temporary carrier plate adheres to a plurality of LED chips, and the cold-reduced adhesive parts are in contact with the LED chips; driving a heating device to perform a heating operation on the temporary carrier plate to increase the distance between the LED chips and the temperature-controlled adhesion plate The viscosity allows the LED chips to adhere to the temperature-controlled adhesive plate; driving the temperature-controlled adhesive plate to adhere to a circuit board so that the LED chips correspond to a plurality of contact pads of the circuit board, wherein, Each contact pad is coated with a flux layer; and a cooling device is driven to perform a cooling operation on the temperature-controlled adhesion board to reduce the viscosity between the LED chips and the temperature-control adhesion board and increase the temperature of the LED chips. The viscosity between the temperature control adhesive plate and the circuit board causes the LED chips to separate and the LED chips to adhere to the circuit board.

Description

微發光二極體之巨量轉移方法及裝置Mass transfer method and device of micro-luminescent diodes

本發明係關於一種轉移電子元件的方法及裝置,特別是關於一種巨量轉移微發光二極體的方法及裝置。The present invention relates to a method and device for transferring electronic components, and in particular to a method and device for transferring micro-light emitting diodes in large quantities.

隨著電子產品的功能不斷提昇,許多顯示面板之發光元件黏裝會涉及將一晶圓上之巨量的微發光二極體轉移到一電路載板上。As the functionality of electronic products continues to improve, the attachment of light-emitting components in many display panels involves transferring a huge number of micro-light-emitting diodes on a wafer to a circuit carrier board.

一般的微發光二極體轉移方法主要包括:對一晶圓之背面研磨;在該背面貼上一藍膜;對該晶圓之正面上之多個微發光二極體進行雷射切割以及利用一分離擴片機對該藍膜進行一擴片操作以擴大該些微發光二極體的間距;以及利用一機器手臂或人工將該些微發光二極體一一夾到一電路載板之對應連接墊上。The general micro-light emitting diode transfer method mainly includes: grinding the back side of a wafer; affixing a blue film on the back side; laser cutting and utilizing multiple micro-light emitting diodes on the front side of the wafer. A separation and expansion machine performs an expansion operation on the blue film to expand the spacing of the micro-light emitting diodes; and uses a robot arm or manual clamping of the micro-light emitting diodes one by one to the corresponding connections on a circuit carrier board Pad.

然而,當一晶圓上之微發光二極體的數目隨晶片製程的進步大幅增加時,現有轉移方法之轉移效率就會明顯不足。However, when the number of micro-light emitting diodes on a wafer increases significantly with the advancement of wafer manufacturing processes, the transfer efficiency of existing transfer methods will be significantly insufficient.

為解決上述的問題,本領域亟需一新穎的微發光二極體的巨量轉移方案。In order to solve the above-mentioned problems, a novel mass transfer solution of micro-light emitting diodes is urgently needed in this field.

本發明之一目的在於提供一種微發光二極體的巨量轉移方法,其可藉由改變接觸面的溫度使一暫時載板上之多個LED晶粒經由一溫控黏附板轉移到一電路板上,以大幅縮短LED晶粒的巨量轉移時間,從而提高一顯示器的生產效率。One object of the present invention is to provide a mass transfer method of micro-light emitting diodes, which can transfer multiple LED dies on a temporary carrier to a circuit via a temperature-controlled adhesive plate by changing the temperature of the contact surface. on the board to significantly shorten the huge transfer time of LED dies, thereby improving the production efficiency of a display.

本發明之另一目的在於提供一種微發光二極體的巨量轉移裝置,其可藉由上述的方法大幅縮短LED晶粒的巨量轉移時間以提高一顯示器的生產效率。Another object of the present invention is to provide a mass transfer device for micro-light emitting diodes, which can significantly shorten the mass transfer time of LED dies through the above method to improve the production efficiency of a display.

為達成上述目的,一種微發光二極體之巨量轉移方法乃被提出,其係由一控制電路執行一程式實現且其包括以下步驟: 驅使一溫控黏附板之一貼附面貼附一暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒; 驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上; 驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層;以及 驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上。 In order to achieve the above purpose, a mass transfer method of micro-light emitting diodes is proposed, which is implemented by a control circuit executing a program and includes the following steps: Driving an attachment surface of a temperature-controlled adhesive board to adhere to a component surface of a temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold adhesive parts, and the component of the temporary carrier board A plurality of LED chips are adhered to the surface, and the cold-reduced adhesive parts are in contact with the LED chips; Driving a heating device to perform a heating operation on the temporary carrier plate to increase the viscosity between the LED chips and the temperature-controlled adhesion plate, so that the LED chips adhere to the temperature-controlled adhesion plate; The attachment surface of the temperature-controlled adhesive board is driven to adhere to a circuit board so that the LED dies correspond to a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer; and Driving a cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making the temperature-controlled The adhesive board is detached from the LED chips and adheres the LED chips to the circuit board.

在一實施例中,該暫時載板係藉由一藍膜黏附該些LED晶粒。In one embodiment, the temporary carrier adheres the LED dies through a blue film.

在可能的實施例中,該助焊劑層包含氯化銨和松香中之至少其一。In a possible embodiment, the flux layer includes at least one of ammonium chloride and rosin.

在可能的實施例中,該電路板之基材可為BT基板、ABF基板或MIS基板。In a possible embodiment, the substrate of the circuit board may be a BT substrate, an ABF substrate or an MIS substrate.

為達成上述目的,本發明進一步揭露一種微發光二極體之巨量轉移裝置,其具有一控制電路、一加熱裝置、一冷卻裝置、一溫控黏附板及一暫時載板以執行一微發光二極體之巨量轉移程序,該程序包括: 該控制電路驅使該溫控黏附板之一貼附面貼附該暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒; 該控制電路驅使該加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上; 該控制電路驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層;以及 該控制電路驅使該冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上。 In order to achieve the above object, the present invention further discloses a mass transfer device of micro-luminescence diodes, which has a control circuit, a heating device, a cooling device, a temperature-controlled adhesive plate and a temporary carrier plate to perform a micro-luminescence The mass transfer procedure of diodes includes: The control circuit drives an attachment surface of the temperature-controlled adhesive board to adhere to a component surface of the temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold viscosity-reducing adhesive parts, and the temporary carrier board A plurality of LED chips are adhered to the surface of the component, and the cold viscosity-reducing adhesive portions are in contact with the LED chips; The control circuit drives the heating device to perform a heating operation on the temporary carrier board to increase the viscosity between the LED chips and the temperature-controlled adhesive plate, so that the LED chips adhere to the temperature-controlled adhesive plate; The control circuit drives the attachment surface of the temperature-controlled adhesive plate to attach to a circuit board so that the LED chips are in contact with a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer; and The control circuit drives the cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making The temperature control adhesive plate is separated from the LED chips and adheres the LED chips to the circuit board.

在一實施例中,該暫時載板係藉由一藍膜黏附該些LED晶粒。In one embodiment, the temporary carrier adheres the LED dies through a blue film.

在可能的實施例中,該助焊劑層包含氯化銨和松香中之至少其一。In a possible embodiment, the flux layer includes at least one of ammonium chloride and rosin.

在可能的實施例中,該電路板之基材可為BT(Bismaleimide Triazine;亞胺-三氮雜苯)基板、ABF(Ajinomoto Build-up Film;味之素積層膜)基板或MIS(Molded Interconnect Substrate;模封基材)基板。In a possible embodiment, the substrate of the circuit board may be a BT (Bismaleimide Triazine) substrate, an ABF (Ajinomoto Build-up Film; Ajinomoto laminated film) substrate or an MIS (Molded Interconnect) Substrate; molding substrate) substrate.

為使 貴審查委員能進一步瞭解本發明之結構、特徵及其目的,茲附以圖式及較佳具體實施例之詳細說明如後。In order to enable the review committee to further understand the structure, characteristics and purpose of the present invention, drawings and detailed descriptions of preferred embodiments are attached as follows.

請參照圖1,其繪示本發明之微發光二極體之巨量轉移裝置之一實施例之方塊圖。如圖1所示,一微發光二極體之巨量轉移裝置100具有一控制電路110、一加熱裝置120、一冷卻裝置130、一溫控黏附板140及一暫時載板150,其中,該控制電路110係用以執行一程式以控制加熱裝置120、冷卻裝置130、溫控黏附板140及暫時載板150之操作以實現一微發光二極體之巨量轉移程序,從而將巨量的微發光二極體轉移到一電路板10上。Please refer to FIG. 1 , which illustrates a block diagram of an embodiment of a mass transfer device for micro-light emitting diodes of the present invention. As shown in Figure 1, a micro-light emitting diode mass transfer device 100 has a control circuit 110, a heating device 120, a cooling device 130, a temperature-controlled adhesive plate 140 and a temporary carrier plate 150, wherein the The control circuit 110 is used to execute a program to control the operations of the heating device 120, the cooling device 130, the temperature-controlled adhesion plate 140 and the temporary carrier plate 150 to realize a mass transfer process of micro-light emitting diodes, thereby transferring a huge amount of The micro-light emitting diodes are transferred to a circuit board 10 .

加熱裝置120係用以對暫時載板150加熱。 The heating device 120 is used to heat the temporary carrier 150 .

冷卻裝置130係用以對溫控黏附板140降溫。 The cooling device 130 is used to cool down the temperature-controlled adhesion plate 140 .

請參照圖2,其為溫控黏附板140之一剖面示意圖。如圖2所示,溫控黏附板140具有一貼附面具有多個冷減黏膠部141,其中,該些冷減黏膠部141之黏度係與溫度成正比,亦即,當該些冷減黏膠部141之溫度增加時,其黏度增加;當該些冷減黏膠部141之溫度降低時,其黏度隨之降低。 Please refer to FIG. 2 , which is a schematic cross-sectional view of the temperature control adhesive plate 140 . As shown in Figure 2, the temperature-controlled adhesive plate 140 has an adhesion surface with a plurality of cold viscosity-reducing adhesive parts 141, wherein the viscosity of these cold viscosity-reducing adhesive parts 141 is proportional to the temperature, that is, when these cold viscosity-reducing adhesive parts 141 When the temperature of the cold viscosity-reducing adhesive parts 141 increases, the viscosity increases; when the temperature of the cold viscosity-reducing adhesive parts 141 decreases, the viscosity decreases accordingly.

請參照圖3,其為暫時載板150之一剖面示意圖。如圖3所示,暫時載板150之元件面具有一藍膜151及黏貼於藍膜151上之多個LED(light emitting diode;發光二極體)晶粒20。 Please refer to FIG. 3 , which is a schematic cross-sectional view of the temporary carrier board 150 . As shown in FIG. 3 , the component surface of the temporary carrier board 150 has a blue film 151 and a plurality of LED (light emitting diode; light emitting diode) dies 20 adhered to the blue film 151 .

請參照圖4,其為電路板10之一剖面示意圖。如圖4所示,電路板10具有多個接觸墊11,且各接觸墊11上均塗覆有一助焊劑層11a。 Please refer to FIG. 4 , which is a schematic cross-sectional view of the circuit board 10 . As shown in FIG. 4 , the circuit board 10 has a plurality of contact pads 11 , and each contact pad 11 is coated with a flux layer 11 a.

詳細而言,該微發光二極體之巨量轉移程序包括:(一)控制電路110驅使溫控黏附板140之所述貼附面貼附暫時載板150之所述元件面,以使該些冷減黏膠部141對應抵接該些LED晶粒20,其情形請參照圖5;(二)控制電路110驅使加熱裝置120對暫時載板150進行一加熱操作以增加該些LED晶粒20與該些冷減黏膠部141間之黏度,從而使該些LED晶粒20黏附在溫控黏附板140上,其情形請參照圖6;(三)控制電路110驅使溫控黏附板140之所述貼附面貼附電路板10以使該些LED晶粒20對應抵接電路板10之該些接觸墊11上之助焊劑層11a,其情形請參照圖7;以及(四)控制電路110驅使冷卻裝置130對溫控黏附板140進行一降溫操作以降低該些LED晶粒20與該些冷減黏膠部141間之黏度及增加該些LED晶粒20與該些助焊劑層11a間之黏度,從而使溫控黏附板140脫離該些LED晶粒20並使該些LED晶粒20黏附在電路板10上,其情形請參照圖8。In detail, the mass transfer process of the micro-light emitting diodes includes: (1) The control circuit 110 drives the attachment surface of the temperature-controlled adhesive board 140 to adhere to the component surface of the temporary carrier board 150, so that the The cold viscosity-reducing adhesive parts 141 are in contact with the LED chips 20. Please refer to Figure 5 for the situation; (2) The control circuit 110 drives the heating device 120 to perform a heating operation on the temporary carrier board 150 to increase the number of LED chips. 20 and the cold-reduced adhesive parts 141, so that the LED chips 20 adhere to the temperature-controlled adhesion plate 140. Please refer to Figure 6 for the situation; (3) The control circuit 110 drives the temperature-control adhesion plate 140 The attachment surface is attached to the circuit board 10 so that the LED chips 20 correspond to the flux layer 11a on the contact pads 11 of the circuit board 10. Please refer to Figure 7 for the situation; and (4) control The circuit 110 drives the cooling device 130 to perform a cooling operation on the temperature-controlled adhesive plate 140 to reduce the viscosity between the LED chips 20 and the cold-reduced adhesive parts 141 and to increase the viscosity between the LED chips 20 and the flux layers. The viscosity between 11a causes the temperature control adhesive plate 140 to separate from the LED chips 20 and make the LED chips 20 adhere to the circuit board 10. Please refer to FIG. 8 for the situation.

由上述的說明可知,本發明揭露了一種微發光二極體之巨量轉移方法。請參照圖9,其繪示本發明之微發光二極體之巨量轉移方法之一實施例之流程圖,其係由一控制電路執行一程式實現。如圖9所示,該方法包括以下步驟:驅使一溫控黏附板之一貼附面貼附一暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒(步驟a);驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上(步驟b);驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層(步驟c);以及驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上(步驟d)。As can be seen from the above description, the present invention discloses a mass transfer method of micro-light emitting diodes. Please refer to FIG. 9 , which illustrates a flow chart of one embodiment of the mass transfer method of micro-light emitting diodes of the present invention, which is implemented by a control circuit executing a program. As shown in Figure 9, the method includes the following steps: driving an attachment surface of a temperature-controlled adhesive plate to attach to a component surface of a temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive plate has a plurality of cold Adhesion-reducing glue part, a plurality of LED chips are adhered to the component surface of the temporary carrier board, and the cold viscosity-reducing glue parts are correspondingly contacted with the LED chips (step a); driving a heating device to the temporary carrier board The board undergoes a heating operation to increase the viscosity between the LED chips and the temperature-controlled adhesion board, thereby causing the LED chips to adhere to the temperature-control adhesion board (step b); driving the temperature-control adhesion board Attach a circuit board to the attachment surface so that the LED chips correspond to a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer (step c); and driving a cooling device Perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, so that the temperature-controlled adhesive plate is separated from the Some LED chips are attached to the circuit board (step d).

在上述的步驟中,該暫時載板係藉由一藍膜黏附該些LED晶粒;該助焊劑層包含氯化銨和松香中之至少其一;以及該電路板之基材可為BT基板、ABF基板或MIS基板。In the above steps, the temporary carrier board adheres the LED chips through a blue film; the flux layer contains at least one of ammonium chloride and rosin; and the base material of the circuit board can be a BT substrate , ABF substrate or MIS substrate.

由上述的說明可知,本發明可提供以下優點: (1) 本發明之微發光二極體的巨量轉移方法可藉由改變接觸面的溫度使一暫時載板上之多個LED晶粒經由一溫控黏附板轉移到一電路板上,以大幅縮短LED晶粒的巨量轉移時間,從而提高一顯示器的生產效率;以及 (2) 本發明之微發光二極體的巨量轉移裝置可藉由上述的方法大幅縮短LED晶粒的巨量轉移時間以提高一顯示器的生產效率。 As can be seen from the above description, the present invention can provide the following advantages: (1) The mass transfer method of micro-light emitting diodes of the present invention can transfer multiple LED dies on a temporary carrier board to a circuit board through a temperature-controlled adhesive plate by changing the temperature of the contact surface. Significantly shortens the mass transfer time of LED dies, thereby improving the production efficiency of a display; and (2) The mass transfer device of micro-light emitting diodes of the present invention can significantly shorten the mass transfer time of LED chips through the above method to improve the production efficiency of a display.

本案所揭示者,乃較佳實施例,舉凡局部之變更或修飾而源於本案之技術思想而為熟習該項技藝之人所易於推知者,俱不脫本案之專利權範疇。What is disclosed in this case is a preferred embodiment. Any partial changes or modifications derived from the technical ideas of this case and easily inferred by those familiar with the art will not deviate from the scope of the patent rights of this case.

綜上所陳,本案無論目的、手段與功效,皆顯示其迥異於習知技術,且其首先發明合於實用,確實符合發明之專利要件,懇請 貴審查委員明察,並早日賜予專利俾嘉惠社會,是為至禱。To sum up, regardless of the purpose, means and effects of this case, it shows that it is completely different from the conventional technology, and that the invention is practical first, and indeed meets the patent requirements for inventions. I sincerely ask the review committee to take a clear look and grant the patent as soon as possible for your benefit. Society is a prayer for the Supreme Being.

10:電路板 11:接觸墊 11a:助焊劑層 20:LED晶粒 100:微發光二極體之巨量轉移裝置 110:控制電路 120:加熱裝置 130:冷卻裝置 140:溫控黏附板 141:冷減黏膠部 150:暫時載板 151:藍膜 步驟a:驅使一溫控黏附板之一貼附面貼附一暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒 步驟b:驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上 步驟c:驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層 步驟d:驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上 10:Circuit board 11:Contact pad 11a: Flux layer 20:LED die 100: Micro-luminescent diode mass transfer device 110:Control circuit 120:Heating device 130: Cooling device 140:Temperature control adhesive plate 141:Cold viscosity reduction department 150: Temporary carrier board 151: blue film Step a: Driving an attachment surface of a temperature-controlled adhesive board to adhere to a component surface of a temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold adhesive parts, and the temporary carrier board A plurality of LED chips are adhered to the surface of the component, and the cold-reduced adhesive parts are in contact with the LED chips. Step b: Driving a heating device to perform a heating operation on the temporary carrier board to increase the viscosity between the LED chips and the temperature-controlled adhesion plate, so that the LED chips adhere to the temperature-control adhesion plate. Step c: Driving the attachment surface of the temperature control adhesive board to attach to a circuit board so that the LED dies correspond to a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer Step d: Drive a cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making The temperature-controlled adhesive plate separates from the LED chips and adheres the LED chips to the circuit board

圖1繪示本發明之微發光二極體之巨量轉移裝置之一實施例之方塊圖。 圖2為圖1之微發光二極體之巨量轉移裝置之溫控黏附板之一剖面示意圖。 圖3為圖1之微發光二極體之巨量轉移裝置之暫時載板之一剖面示意圖。 圖4為圖1之微發光二極體之巨量轉移裝置所採用之電路板之一剖面示意圖。 圖5為圖1之微發光二極體之巨量轉移裝置使溫控黏附板對應抵接暫時載板之示意圖。 圖6為圖1之微發光二極體之巨量轉移裝置藉由一加熱操作使暫時載板上之多個LED晶粒黏附在溫控黏附板上之示意圖。 圖7為圖1之微發光二極體之巨量轉移裝置使溫控黏附板貼附電路板而使該些LED晶粒各對應抵接電路板之一接觸墊上之一助焊劑層之示意圖。 圖8為圖1之微發光二極體之巨量轉移裝置使溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在電路板上之示意圖。 圖9繪示本發明之微發光二極體之巨量轉移方法之一實施例之流程圖。 FIG. 1 is a block diagram illustrating an embodiment of a mass transfer device for micro-light emitting diodes of the present invention. FIG. 2 is a schematic cross-sectional view of the temperature-controlled adhesive plate of the mass transfer device of micro-light emitting diodes in FIG. 1 . FIG. 3 is a schematic cross-sectional view of a temporary carrier plate of the mass transfer device for micro-light emitting diodes in FIG. 1 . FIG. 4 is a schematic cross-sectional view of a circuit board used in the mass transfer device of micro-light emitting diodes in FIG. 1 . FIG. 5 is a schematic diagram of the mass transfer device of micro-light emitting diodes in FIG. 1 so that the temperature-controlled adhesive plate contacts the temporary carrier plate accordingly. FIG. 6 is a schematic diagram of the mass transfer device of micro-light emitting diodes in FIG. 1 using a heating operation to adhere multiple LED dies on the temporary carrier board to the temperature-controlled adhesion board. 7 is a schematic diagram of the mass transfer device of micro-light emitting diodes in FIG. 1 so that the temperature-controlled adhesive plate is attached to the circuit board so that each of the LED chips contacts a flux layer on one of the contact pads of the circuit board. FIG. 8 is a schematic diagram of the mass transfer device of micro-light emitting diodes in FIG. 1 to separate the temperature-controlled adhesion plate from the LED chips and adhere the LED chips to the circuit board. FIG. 9 is a flow chart illustrating an embodiment of a mass transfer method of micro-light emitting diodes according to the present invention.

步驟a:驅使一溫控黏附板之一貼附面貼附一暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒 Step a: Driving an attachment surface of a temperature-controlled adhesive board to adhere to a component surface of a temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold adhesive parts, and the temporary carrier board A plurality of LED chips are adhered to the surface of the component, and the cold-reduced adhesive parts are in contact with the LED chips.

步驟b:驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上 Step b: Driving a heating device to perform a heating operation on the temporary carrier board to increase the viscosity between the LED chips and the temperature-controlled adhesion plate, so that the LED chips adhere to the temperature-control adhesion plate.

步驟c:驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層 Step c: Driving the attachment surface of the temperature control adhesive board to attach to a circuit board so that the LED dies correspond to a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer

步驟d:驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上 Step d: Drive a cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making The temperature-controlled adhesive plate separates from the LED chips and adheres the LED chips to the circuit board

Claims (8)

一種微發光二極體之巨量轉移方法,係由一控制電路執行一程式實現且其包括以下步驟: 驅使一溫控黏附板之一貼附面貼附一暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒; 驅使一加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上; 驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層;以及 驅使一冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上。 A mass transfer method of micro-luminescent diodes is implemented by a control circuit executing a program and includes the following steps: Driving an attachment surface of a temperature-controlled adhesive board to adhere to a component surface of a temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold adhesive parts, and the component of the temporary carrier board A plurality of LED chips are adhered to the surface, and the cold-reduced adhesive parts are in contact with the LED chips; Driving a heating device to perform a heating operation on the temporary carrier plate to increase the viscosity between the LED chips and the temperature-controlled adhesion plate, so that the LED chips adhere to the temperature-controlled adhesion plate; The attachment surface of the temperature-controlled adhesive board is driven to adhere to a circuit board so that the LED dies correspond to a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer; and Driving a cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making the temperature-controlled The adhesive board is detached from the LED chips and adheres the LED chips to the circuit board. 如請求項1所述之微發光二極體之巨量轉移方法,其中,該暫時載板係藉由一藍膜黏附該些LED晶粒。The mass transfer method of micro-light emitting diodes as described in claim 1, wherein the temporary carrier board adheres the LED dies through a blue film. 如請求項1所述之微發光二極體之巨量轉移方法,其中,該助焊劑層包含由氯化銨和松香所組成群組所選擇的至少一種材料。The mass transfer method of micro-light emitting diodes as claimed in claim 1, wherein the flux layer contains at least one material selected from the group consisting of ammonium chloride and rosin. 如請求項1所述之微發光二極體之巨量轉移方法,其中,該電路板之基材係由BT基板、ABF基板和MIS基板所組成群組所選擇的一種基材。The mass transfer method of micro-light emitting diodes as described in claim 1, wherein the substrate of the circuit board is a substrate selected from the group consisting of BT substrate, ABF substrate and MIS substrate. 一種微發光二極體之巨量轉移裝置,其具有一控制電路、一加熱裝置、一冷卻裝置、一溫控黏附板及一暫時載板以執行一微發光二極體之巨量轉移程序,該程序包括: 該控制電路驅使該溫控黏附板之一貼附面貼附該暫時載板之一元件面,其中,該溫控黏附板之該貼附面具有多個冷減黏膠部,該暫時載板之該元件面黏附有多個LED晶粒,且該些冷減黏膠部對應抵接該些LED晶粒; 該控制電路驅使該加熱裝置對該暫時載板進行一加熱操作以增加該些LED晶粒與該溫控黏附板間之黏度,從而使該些LED晶粒黏附在該溫控黏附板上; 該控制電路驅使該溫控黏附板之該貼附面貼附一電路板以使該些LED晶粒對應抵接該電路板之多個接觸墊,其中,各該接觸墊上均塗覆有一助焊劑層;以及 該控制電路驅使該冷卻裝置對該溫控黏附板進行一降溫操作以降低該些LED晶粒與該溫控黏附板間之黏度及增加該些LED晶粒與該電路板間之黏度,從而使該溫控黏附板脫離該些LED晶粒並使該些LED晶粒黏附在該電路板上。 A mass transfer device of micro-light emitting diodes, which has a control circuit, a heating device, a cooling device, a temperature-controlled adhesive plate and a temporary carrier plate to perform a mass transfer process of micro-light emitting diodes. The program includes: The control circuit drives an attachment surface of the temperature-controlled adhesive board to adhere to a component surface of the temporary carrier board, wherein the attachment surface of the temperature-controlled adhesive board has a plurality of cold viscosity-reducing adhesive parts, and the temporary carrier board A plurality of LED chips are adhered to the surface of the component, and the cold viscosity-reducing adhesive portions are in contact with the LED chips; The control circuit drives the heating device to perform a heating operation on the temporary carrier board to increase the viscosity between the LED chips and the temperature-controlled adhesive plate, so that the LED chips adhere to the temperature-controlled adhesive plate; The control circuit drives the attachment surface of the temperature-controlled adhesive plate to attach to a circuit board so that the LED chips are in contact with a plurality of contact pads of the circuit board, wherein each contact pad is coated with a flux layer; and The control circuit drives the cooling device to perform a cooling operation on the temperature-controlled adhesive plate to reduce the viscosity between the LED chips and the temperature-controlled adhesive plate and increase the viscosity between the LED chips and the circuit board, thereby making The temperature control adhesive plate is separated from the LED chips and adheres the LED chips to the circuit board. 如請求項5所述之微發光二極體之巨量轉移裝置,其中,該暫時載板係藉由一藍膜黏附該些LED晶粒。The mass transfer device of micro-light emitting diodes as described in claim 5, wherein the temporary carrier board adheres the LED dies through a blue film. 如請求項5所述之微發光二極體之巨量轉移裝置,其中,該助焊劑層包含由氯化銨和松香所組成群組所選擇的至少一種材料。The mass transfer device of micro-light emitting diodes according to claim 5, wherein the flux layer contains at least one material selected from the group consisting of ammonium chloride and rosin. 如請求項5所述之微發光二極體之巨量轉移裝置,其中,該電路板之基材係由BT基板、ABF基板和MIS基板所組成群組所選擇的一種基材。The mass transfer device of micro-light emitting diodes according to claim 5, wherein the substrate of the circuit board is a substrate selected from the group consisting of BT substrate, ABF substrate and MIS substrate.
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Publication number Priority date Publication date Assignee Title
TW202115742A (en) * 2019-10-02 2021-04-16 財團法人工業技術研究院 Conductive composition and method for fabricating micro light emitting diode display
US20220238766A1 (en) * 2019-10-15 2022-07-28 Lumileds Llc Forming a multicolor phosphor-converted led array

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202115742A (en) * 2019-10-02 2021-04-16 財團法人工業技術研究院 Conductive composition and method for fabricating micro light emitting diode display
US20220238766A1 (en) * 2019-10-15 2022-07-28 Lumileds Llc Forming a multicolor phosphor-converted led array

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