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TWI825798B - Elastic probe and circuit test device - Google Patents

Elastic probe and circuit test device Download PDF

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Publication number
TWI825798B
TWI825798B TW111123157A TW111123157A TWI825798B TW I825798 B TWI825798 B TW I825798B TW 111123157 A TW111123157 A TW 111123157A TW 111123157 A TW111123157 A TW 111123157A TW I825798 B TWI825798 B TW I825798B
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TW
Taiwan
Prior art keywords
elastic
section
test
fixed
probe
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Application number
TW111123157A
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Chinese (zh)
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TW202401605A (en
Inventor
吳俊杰
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吳俊杰
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Application filed by 吳俊杰 filed Critical 吳俊杰
Priority to TW111123157A priority Critical patent/TWI825798B/en
Priority to CN202310742247.XA priority patent/CN117269566A/en
Application granted granted Critical
Publication of TWI825798B publication Critical patent/TWI825798B/en
Publication of TW202401605A publication Critical patent/TW202401605A/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2896Testing of IC packages; Test features related to IC packages

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A circuit testing device includes a base, a fixing seat, an elastic probe, and a detection electrode. The base includes a test opening. The fixing base includes a fixing groove. The elastic probe includes a fixed section, a first elastic section, a second elastic section, an extension section, and a contact section in sequence. The fixing section is disposed in the fixing slot and protrudes into the testing slot. The first spring segment is bent in a direction opposite to the test opening. The second elastic segment is bent in the direction of the test opening. The extension extends to the test opening. The contact segment protrudes outwardly from the test opening. The detection electrode is arranged in the base and is electrically connected with the elastic probe. The contact section can supply power to the test electrode of the circuit to be tested and abut and make the test electrode and the test electrode electrically connected.

Description

彈性探針及電路測試裝置Flexible probe and circuit test device

本發明是有關於一種電路測試裝置,尤其是一種設置在測試機台上並使其偵測積體電路之電性的電路測試裝置。 The present invention relates to a circuit testing device, in particular to a circuit testing device installed on a testing machine and configured to detect the electrical properties of an integrated circuit.

積體電路在封裝後會進行電性測試,以判斷晶片中包含電子元件的電路是否正常,封裝後積體電路會在外部設置接觸電極(包含金屬接腳),以提供測試機台進行積體電路的電性測試。 After the integrated circuit is packaged, electrical testing will be performed to determine whether the circuit containing electronic components in the chip is normal. After packaging, the integrated circuit will have contact electrodes (including metal pins) set up on the outside to provide a testing machine for integrated circuit testing. Electrical testing of circuits.

請參閱圖1,及圖2,為中華民國專利號M340580,說明一種電路測試裝置,包含一殼體11、一固定體12、一定位塊13、一定位彈性膠條14、一減壓彈性膠條15、複數負載板16,及複數彈性電觸接點17,該殼體11之複數第一槽縫111,及第二槽縫112中固定該複數彈性電觸接點17的位置並使該複數彈性電觸接點17彼此間隔,該固定體12固定該定位彈性膠條14以使其與該複數彈性電觸接點17抵接,用以提供該複數彈性電觸接點17彈力以使該複數彈性電觸接點17分別抵接該複數負載板16,該定位塊13固定該減壓彈性膠條15以使其與該複數彈性電觸接點17接觸,該減壓彈性膠條15提供該複數彈性電觸接點17彈力,用以緩衝該複數彈性電觸接點17被一受測元件18壓抵的力量。 Please refer to Figure 1 and Figure 2, which is the Patent No. M340580 of the Republic of China, describing a circuit testing device, including a housing 11, a fixed body 12, a positioning block 13, a positioning elastic strip 14, and a pressure-reducing elastic glue. The strips 15, the plurality of load plates 16, and the plurality of elastic electrical contact points 17 are fixed in the plurality of first slots 111 and the second slots 112 of the housing 11 to fix the positions of the plurality of elastic electrical contact points 17 and enable the The plurality of elastic electrical contact points 17 are spaced apart from each other. The fixed body 12 fixes the positioning elastic rubber strip 14 so that it is in contact with the plurality of elastic electrical contact points 17 to provide the elastic force of the plurality of elastic electrical contact points 17 to enable The plurality of elastic electrical contact points 17 are respectively in contact with the plurality of load plates 16. The positioning block 13 fixes the decompression elastic rubber strip 15 so that it is in contact with the plurality of elastic electrical contact points 17. The decompression elastic rubber strip 15 The elastic force of the plurality of elastic electrical contact points 17 is provided to buffer the force of the plurality of elastic electrical contact points 17 being pressed by a component under test 18 .

雖然習知技術揭露了一種可以偵測積體電路的電路測試裝置,但是實際使用時仍具有下列缺點: Although the prior art discloses a circuit testing device that can detect integrated circuits, it still has the following shortcomings in actual use:

一、測試電極的間距無法縮小: 1. The distance between test electrodes cannot be reduced:

隨著科技的進步,單位體積中積體電路所設置的電子元件數量越來越多,導電路徑也越來越小,導致積體電路外部的接觸電極,不僅體積縮小,其彼此的間距越來越小,但是習知偵測裝置之第一槽111與第二槽縫112的設置只能固定一個彈性電觸接點17,以避免與彈性觸接點17接觸而造成短路,由於每一彈性電觸接點17必須具有一定的線徑,並且該複數第一槽111與第二槽縫112必須彼此間隔,導致測試裝置的設置尺寸受到限制,難以縮小該複數彈性電觸接點17的間距,可以測試的積體電路種類有所限制。 With the advancement of science and technology, the number of electronic components installed in integrated circuits per unit volume is increasing, and the conductive paths are getting smaller and smaller. As a result, the contact electrodes outside the integrated circuits not only shrink in size, but also become increasingly spaced apart from each other. The smaller, but the setting of the first slot 111 and the second slot 112 of the conventional detection device can only fix one elastic electrical contact 17 to avoid contact with the elastic contact 17 and cause a short circuit. The electrical contact 17 must have a certain wire diameter, and the plurality of first slots 111 and the second slots 112 must be spaced apart from each other. As a result, the installation size of the test device is limited, and it is difficult to reduce the spacing between the plurality of elastic electrical contacts 17. , the types of integrated circuits that can be tested are limited.

二、必須另外設置緩衝彈力體: 2. An additional buffer elastomer must be installed:

習知的彈性電觸接點17的形狀為V型,該彈性電觸接點17的左側用於承接該受測元件18下向壓抵的力量,當該彈性電觸接點17的左側被下壓後會使的右側向上抬起,為了使該彈性電觸接點17可以緩衝該受測元件18下壓的力量,必須另外於該彈性電觸接點17右側端點上設置該減彈性膠條15,來避免該彈性電觸接點17的左側端點產生過大的磨耗。 The shape of the conventional elastic electrical contact 17 is V-shaped. The left side of the elastic electrical contact 17 is used to bear the downward pressing force of the component under test 18. When the left side of the elastic electrical contact 17 is After being pressed down, the right side of the element will be lifted upward. In order for the elastic electrical contact 17 to buffer the force of pressing down on the component under test 18, an elastic reduction element must be provided on the right end of the elastic electrical contact 17. The rubber strip 15 is used to prevent the left end point of the elastic electrical contact 17 from excessive wear.

三、會發生接觸不良的狀況: 3. Poor contact may occur:

習知設置於該第一槽111與第二槽縫112中之彈性電觸接點17的位置並未被固定,當該彈性電觸接點17左側端點受到該受測元件18下向壓抵時會向使該彈性電觸接點17右滑動,而當該受測元件18離開該彈性電觸接點17左側端點時,該減壓彈性膠條15所提供的彈力會使該彈性電觸接點17向左滑動,由於該彈性電觸接點17的底部是與該負載板16的上表面抵接在一起,當該彈性電觸接點17發生左右滑動的狀況時,該彈性電觸接點17與該負載板16彼此之間會產生摩擦,不僅會影響該彈性電觸接點17與該負載板16的壽命,還會發生電性接觸不良的狀況,造成訊號的傳輸受到影響,因此習知電路測試裝置無法執行更為精密的電性量測。 It is known that the position of the elastic electrical contact 17 disposed in the first slot 111 and the second slot 112 is not fixed. When the left end of the elastic electrical contact 17 is pressed downward by the component under test 18 When the elastic electrical contact point 17 is reached, the elastic electrical contact point 17 will slide to the right, and when the component under test 18 leaves the left end point of the elastic electrical contact point 17, the elastic force provided by the decompression elastic rubber strip 15 will make the elastic The electrical contact 17 slides to the left. Since the bottom of the elastic electrical contact 17 is in contact with the upper surface of the load plate 16, when the elastic electrical contact 17 slides left and right, the elastic Friction will occur between the electrical contact 17 and the load board 16, which will not only affect the lifespan of the elastic electrical contact 17 and the load board 16, but also cause poor electrical contact, causing signal transmission to be affected. Therefore, the conventional circuit testing device cannot perform more precise electrical measurements.

因此,如何使該電路測試裝置可以偵測電極間距更小之積體電路的電性,並且可以執行較為精密的電性量測,更可以減少金屬探針的磨耗,是相關技術人員亟需努力的目標。 Therefore, how to make the circuit test device detect the electrical properties of integrated circuits with smaller electrode spacing, and perform more precise electrical property measurements, and reduce the wear of metal probes, is an urgent need for relevant technical personnel. goal.

有鑑於此,本發明之目的是在提供一種彈性探針。 In view of this, the object of the present invention is to provide an elastic probe.

該彈性探針設置於一測試裝置中,該測試裝置中設置有一固定座及一測試開口。 The elastic probe is installed in a testing device, and the testing device is provided with a fixed seat and a testing opening.

該彈性探針包含一固定段、一第二彈性段、一彈性延伸段,及一接觸段。 The elastic probe includes a fixed section, a second elastic section, an elastic extension section, and a contact section.

該固定段固設於該固定座。 The fixed section is fixed on the fixed base.

該第二彈性段與該固定座連接,該第二彈性段的結構是朝向該測試開口的方向進行彎曲。 The second elastic section is connected to the fixed seat, and the structure of the second elastic section is bent toward the direction of the test opening.

該彈性延伸段與該第二彈性段連接並延伸至該測試開口。 The elastic extension section is connected to the second elastic section and extends to the test opening.

該接觸段與該彈性延伸段連接並從該測試開口向外突出。 The contact segment is connected to the elastic extension segment and protrudes outward from the test opening.

本發明的又一技術手段,是在於上述之彈性探針更包含一第一彈性段,該第一彈性段設置於該固定段與該第二彈性段之間,該第一彈性段的結構是朝著相反該測試開口的方向進行彎曲。 Another technical means of the present invention is that the above-mentioned elastic probe further includes a first elastic section, the first elastic section is arranged between the fixed section and the second elastic section, and the structure of the first elastic section is Bend in the direction opposite to the test opening.

本發明的另一技術手段,是在於上述之該第一彈性段彎曲的曲率是大於該第二彈性段彎曲的曲率,該第一彈性段彎曲的弧度為角度20度到角度90度,該第二彈性段彎曲的弧度為角度180度到角度270度。 Another technical means of the present invention is that the curvature of the first elastic segment is greater than the curvature of the second elastic segment. The curvature of the first elastic segment is from an angle of 20 degrees to an angle of 90 degrees. The curvature of the two elastic segments is from an angle of 180 degrees to an angle of 270 degrees.

本發明的再一技術手段,是在於上述之彈性探針更包含一套設於該彈性探針的絕緣套。 Another technical means of the present invention is that the above-mentioned elastic probe further includes an insulating sleeve provided on the elastic probe.

本發明的又一技術手段,是在於上述之絕緣套是套設於該彈性探針之固定段、第一彈性段、第二彈性段、彈性延伸段、接觸段、其中之一及其組合。 Another technical means of the present invention is that the above-mentioned insulating sleeve is sleeved on the fixed section, the first elastic section, the second elastic section, the elastic extension section, the contact section, one of the fixed section, the first elastic section, the second elastic section, the contact section, and a combination thereof of the elastic probe.

本發明的另一目的是提供一種電路測試裝置。 Another object of the present invention is to provide a circuit testing device.

該電路測試裝置適用於取得一待測電路之至少一待測電極的電性。 The circuit testing device is suitable for obtaining the electrical properties of at least one electrode to be tested of a circuit to be tested.

該電路測試裝置包括一基座、至少一固定座、至少一彈性探針,及至少一檢測電極。 The circuit testing device includes a base, at least one fixed base, at least one elastic probe, and at least one detection electrode.

該基座包括至少一由該基座圍繞界定之測試槽,及至少一設置於該基座並與該測試槽連接之測試開口。 The base includes at least one test slot surrounded by the base, and at least one test opening provided on the base and connected to the test slot.

該固定座設置於該基座之測試槽中,該固定座包括至少一由該固定座圍繞界定之固定槽,該固定槽與該測試槽連接。 The fixing base is disposed in the test slot of the base. The fixing base includes at least one fixing slot surrounded by the fixing base, and the fixing slot is connected to the test slot.

該彈性探針依序包括一固定段、一第一彈性段、一第二彈性段、一彈性延伸段,及一接觸段,該彈性探針之固定段設置於該固定座之固定槽並突出於該測試槽中,該第一彈性段朝著相反該測試開口的方向進行彎曲,該第二彈性段朝向該測試開口的方向進行彎曲,並由該彈性延伸段延伸至該測試開口,該接觸段由該測試開口向外突出並且設置位置與該待測電極的位置相配合,該待測電路之待測電極壓抵該接觸段並使該接觸段回縮於該測試開口,該第二彈性段可提供該接觸段抵接該待測電路之待測電極的彈力。 The elastic probe includes a fixed section, a first elastic section, a second elastic section, an elastic extension section, and a contact section in sequence. The fixed section of the elastic probe is disposed in the fixing groove of the fixing base and protrudes. In the test slot, the first elastic section bends in a direction opposite to the test opening, the second elastic section bends in a direction opposite to the test opening, and extends from the elastic extension section to the test opening, and the contact The segment protrudes outward from the test opening and is set in a position that matches the position of the electrode to be tested. The electrode to be tested of the circuit to be tested presses against the contact segment and causes the contact segment to retract in the test opening. The second elasticity The segment can provide elastic force for the contact segment to contact the electrode to be tested of the circuit to be tested.

該檢測電極與設置於該基座中之彈性探針電性連接,該彈性探針之接觸段提供該待測電路之待測電極接觸以使該檢測電極與該待測電極電性連接。 The detection electrode is electrically connected to an elastic probe disposed in the base. The contact section of the elastic probe provides contact with the electrode under test of the circuit under test so that the detection electrode is electrically connected to the electrode under test.

本發明的再一技術手段,是在於上述之測試開口的開口方向與該固定槽的開口方向相反。 Another technical means of the present invention is that the opening direction of the above-mentioned test opening is opposite to the opening direction of the fixing groove.

本發明的又一技術手段,是在於上述之彈性探針更包括一套設於該彈性探針表面的絕緣套。 Another technical means of the present invention is that the above-mentioned elastic probe further includes an insulating sleeve arranged on the surface of the elastic probe.

本發明的另一技術手段,是在於上述之絕緣套套設於該固定段的表面,該固定座之固定槽固定複數個彈性探針之固定段,該複數彈性探針藉由設置之絕緣套而彼此絕緣。 Another technical means of the present invention is that the above-mentioned insulating sleeve is placed on the surface of the fixed section, and the fixing groove of the fixing base fixes the fixed sections of a plurality of elastic probes. The plurality of elastic probes are secured by the insulating sleeve. Insulated from each other.

本發明的再一技術手段,是在於上述之絕緣套套設於該接觸段的表面,該基座之測試開口中容置複數個彈性探針之接觸段,該複數彈性探針藉由設置之絕緣套而彼此絕緣。 Another technical means of the present invention is that the above-mentioned insulating sleeve is set on the surface of the contact segment, and the contact segments of a plurality of elastic probes are accommodated in the test opening of the base. The plurality of elastic probes are insulated by the provided set and insulated from each other.

本發明之有益功效在於,該固定座將該彈性探針之固定段進行固定,用於穩固該彈性探針在該測試裝置中的位置,該第一彈性段朝著相反該測試開口的方向進行彎曲,用於讓該第二彈性段的彎曲的弧度更大,以使該第二彈性段可以有效緩衝該接觸段被待測電路之待測電極抵壓的力量,並提供該接觸段抵接該待測電極的彈力。 The beneficial effect of the present invention is that the fixing base fixes the fixed section of the elastic probe to stabilize the position of the elastic probe in the test device, and the first elastic section moves in the direction opposite to the test opening. Bending is used to make the curvature of the second elastic segment larger, so that the second elastic segment can effectively buffer the force of the contact segment being pressed by the electrode to be tested of the circuit to be tested, and provide the contact segment with contact The elasticity of the electrode to be measured.

11:殼體 11: Shell

12:固定體 12: Fixed body

13:定位塊 13: Positioning block

14:定位彈性膠條 14: Positioning elastic strip

15:減壓彈性膠條 15: Pressure reducing elastic strip

16:負載板 16:Load board

17:彈性電觸接點 17: Elastic electrical contact

18:受測元件 18: Component under test

21:待測電路 21: Circuit to be tested

22:待測電極 22: Electrode to be tested

3:基座 3: base

301:底板 301: Base plate

302:側壁 302:Side wall

303:上蓋 303: Upper cover

304:下隔板 304:Lower partition

305:上隔板 305: Upper partition

306:開口 306:Open your mouth

31:測試槽 31:Test slot

32:測試開口 32: Test opening

33:填充物 33: Filling

4:固定座 4: Fixed seat

41:固定槽 41:Fixed slot

5:彈性探針 5: Elastic probe

51:固定段 51: Fixed segment

52:第一彈性段 52: First elastic section

53:第二彈性段 53: Second elastic section

54:彈性延伸段 54: Elastic extension section

55:接觸段 55: Contact section

551:平緩延伸部 551: gentle extension

56:絕緣套 56:Insulation sleeve

6:檢測電極 6: Detection electrode

61:電極絕緣套 61:Electrode insulation sleeve

圖1是一結構分解示意圖,說明台灣專利M340580,一種電路測試裝置的局部結構分解;圖2是一剖面示意圖,說明台灣專利M340580之電路測試裝置的局部剖面;圖3是一側視示意圖,為本發明彈性探針及電路測試裝置之一第一較佳實施例,說明該彈性探針的外觀; 圖4是一剖面示意圖,說明於該第一較佳實施例中,設有該彈性探針之電路測試裝置;圖5是一結構分解示意圖,說明於該第一較佳實施例中,該電路測試裝置之局部結構分解狀態;圖6是一剖面示意圖,為本發明彈性探針及電路測試裝置之一第二較佳實施例,說明一待測電路與該電路測試裝置的剖面;圖7是一剖面示意圖,為本發明彈性探針及電路測試裝置之一第三較佳實施例,說明一待測電路與該電路測試裝置的剖面;圖8是一側視示意圖,為本發明彈性探針及電路測試裝置之一第四較佳實施例,說明該彈性探針的外觀;圖9是一剖面示意圖,說明於該第四較佳實施例中,該彈性探針設置於一固定座及一基座的局部剖面態樣;圖10是一結構分解示意圖,說明於該第四較佳實施例中,該電路測試裝置之局部結構分解狀態;圖11是一側視示意圖,為本發明彈性探針及電路測試裝置之一第五較佳實施例,說明該彈性探針的外觀;圖12是一局部立體示意圖,說明於該第五較佳實施例中,一測試開口突伸出複數測試探針的狀態;圖13是一局部立體示意圖,為本發明彈性探針及電路測試裝置之一第六較佳實施例,說明一測試開口中同時容置二測試探針的接觸段;及圖14是一側視示意圖,為本發明彈性探針及電路測試裝置之一第七較佳實施例,說明該彈性探針的外觀。 Figure 1 is a structural decomposition schematic diagram illustrating the partial structural decomposition of a circuit test device of Taiwan Patent M340580; Figure 2 is a cross-sectional schematic diagram illustrating a partial cross-section of the circuit test device of Taiwan Patent M340580; Figure 3 is a side view schematic diagram. A first preferred embodiment of the elastic probe and circuit testing device of the present invention illustrates the appearance of the elastic probe; Figure 4 is a cross-sectional schematic diagram illustrating a circuit testing device equipped with the elastic probe in the first preferred embodiment; Figure 5 is a structural exploded schematic diagram illustrating the circuit in the first preferred embodiment. The partial structural exploded state of the testing device; Figure 6 is a schematic cross-sectional view, which is a second preferred embodiment of the elastic probe and circuit testing device of the present invention, illustrating a circuit to be tested and the cross-section of the circuit testing device; Figure 7 is A cross-sectional schematic diagram is a third preferred embodiment of the elastic probe and circuit testing device of the present invention, illustrating the cross-section of a circuit to be tested and the circuit testing device; Figure 8 is a schematic side view of the elastic probe of the present invention. and a fourth preferred embodiment of a circuit testing device, illustrating the appearance of the elastic probe; Figure 9 is a schematic cross-sectional view illustrating that in the fourth preferred embodiment, the elastic probe is disposed on a fixed seat and a A partial cross-sectional view of the base; Figure 10 is a structural exploded schematic diagram illustrating the partial structural exploded state of the circuit testing device in the fourth preferred embodiment; Figure 11 is a side schematic diagram of the elastic probe of the present invention. A fifth preferred embodiment of the needle and circuit testing device illustrates the appearance of the elastic probe; Figure 12 is a partial perspective view illustrating that in the fifth preferred embodiment, a test opening protrudes from a plurality of test probes. The state of the needle; Figure 13 is a partial perspective view, which is a sixth preferred embodiment of the elastic probe and circuit testing device of the present invention, illustrating the contact section of a test opening that accommodates two test probes at the same time; and Figure 14 This is a schematic side view, which is a seventh preferred embodiment of the elastic probe and circuit testing device of the present invention, illustrating the appearance of the elastic probe.

有關本發明之相關申請專利特色與技術內容,在以下配合參考圖式之六個較佳實施例的詳細說明中,將可清楚地呈現。在進行詳細說明前應注意的是,類似的元件是以相同的編號來做表示。 The relevant patented features and technical content of the present invention will be clearly presented in the following detailed description of the six preferred embodiments with reference to the drawings. Before proceeding to the detailed description, it should be noted that similar components are designated with the same number.

參閱圖3、圖4,及圖5,為本發明一種彈性探針及電路測試裝置之一第一較佳實施例,該電路測試裝置適用於取得一待測電路21之複數待測電極22的電性,其中,該複數待測電極22為設置於該待測電路21側邊的針腳結構,實際實施時,該待測電路21可以是球柵陣列封裝(英語:Ball Grid Array,BGA)、覆晶技術(英語:Flip Chip)等的半導體結構,該電路測試裝置可以偵測設置於該待測電路21底部之複數待測電極22的電性,不應以此為限。 Referring to Figures 3, 4, and 5, a first preferred embodiment of a flexible probe and circuit testing device of the present invention is shown. The circuit testing device is suitable for obtaining a plurality of electrodes 22 under test of a circuit 21 under test. Electrically, the plurality of electrodes to be tested 22 is a pin structure disposed on the side of the circuit to be tested 21. In actual implementation, the circuit to be tested 21 may be a ball grid array package (English: Ball Grid Array, BGA), For semiconductor structures such as flip chip technology, the circuit test device can detect the electrical properties of the plurality of electrodes 22 under test provided at the bottom of the circuit under test 21, and should not be limited to this.

該電路測試裝置包括一基座3、複數固定座4、複數彈性探針5,及複數檢測電極6,實際實施時,該固定座4、該彈性探針5,及該檢測電極6的設置數量是配合該待測電路21之複數待測電極22,不應以此為限。 The circuit test device includes a base 3, a plurality of fixed bases 4, a plurality of elastic probes 5, and a plurality of detection electrodes 6. In actual implementation, the number of the fixed base 4, the elastic probes 5, and the detection electrodes 6 It is a plurality of electrodes 22 to be tested that match the circuit 21 to be tested, and should not be limited to this.

該基座3包括複數由該基座3圍繞界定之測試槽31,及複數設置於該基座3並與該測試槽31連接之測試開口32,該複數測試開口32的設置位置與該複數待測電極22的位置相配合。 The base 3 includes a plurality of test slots 31 defined by the base 3, and a plurality of test openings 32 provided on the base 3 and connected to the test slots 31. The plurality of test openings 32 are located in the same position as the plurality of test slots 31. The position of measuring electrode 22 matches.

於該第一較佳實施例,該基座3是由一底板301、複數圍繞該底板301之側壁302,及一設置於該複數側壁302上的上蓋303所構成,該底板301上方設有複數間隔設置之下隔板304,該上蓋303下方設有複數間隔設置之上隔板305,該複數上隔板305分別抵接該複數下隔板304並界定出該複數測試槽31,該複數測試開口32設置於該上蓋303並與該複數測試槽31相連通,每一測試槽31中設置一彈性探針5。 In the first preferred embodiment, the base 3 is composed of a bottom plate 301, a plurality of side walls 302 surrounding the bottom plate 301, and an upper cover 303 provided on the plurality of side walls 302. A plurality of bottom plates are provided above the bottom plate 301. There are lower partitions 304 arranged at intervals, and a plurality of upper partitions 305 arranged at intervals below the upper cover 303. The plurality of upper partitions 305 respectively abut the plurality of lower partitions 304 and define the plurality of test slots 31. The opening 32 is provided on the upper cover 303 and communicates with the plurality of test slots 31 . Each test slot 31 is provided with an elastic probe 5 .

該複數固定座4設置於該基座3之測試槽31中,並包括複數由該固定座4圍繞界定之固定槽41,其中,該固定槽41與該測試槽31相連通, 實際實施時,可以於每一測試槽31設置一固定座4,並且該固定座4設置一固定槽41,不應以此為限。 The plurality of fixing seats 4 are disposed in the test slot 31 of the base 3 and include a plurality of fixing slots 41 surrounded by the fixing seats 4, wherein the fixing slots 41 are connected with the test slot 31, In actual implementation, a fixing base 4 can be provided in each test slot 31, and the fixing base 4 is provided with a fixing groove 41, and should not be limited to this.

該彈性探針5為長條形狀並具有彈性的導電材料,並依序包括一固定段51、一第一彈性段52、一第二彈性段53、一彈性延伸段54,及一接觸段55,該彈性探針5之固定段51設置於該固定座4之固定槽41並突出至該測試槽31中,該第一彈性段52朝著相反該測試開口32的方向進行彎曲,該第二彈性段53朝向該測試開口32的方向進行彎曲,並由該彈性延伸段54將該彈性探針5延伸至該測試開口32。 The elastic probe 5 is a long strip of conductive material with elasticity, and sequentially includes a fixed section 51, a first elastic section 52, a second elastic section 53, an elastic extension section 54, and a contact section 55 , the fixed section 51 of the elastic probe 5 is disposed in the fixed groove 41 of the fixed base 4 and protrudes into the test groove 31, the first elastic section 52 bends in the direction opposite to the test opening 32, and the second The elastic section 53 bends toward the test opening 32 , and the elastic extension section 54 extends the elastic probe 5 to the test opening 32 .

其中,該固定座4是一種夾持結構,用以夾住該彈性探針5的固定段51,可以固定該彈性探針5之固定段51在該測試槽31中的位置,舉例來說,該固定座4於該固定槽41中設有彈力夾片,所述彈力夾片可以緊緊夾住伸入該固定槽41之彈性探針5的固定段51,實際實施時,該固定槽41可使用其他的探針固定結構,不應以此為限,由於探針固定結構為習知技術,非本案之重點,於此不再詳加贅述。 Among them, the fixed seat 4 is a clamping structure used to clamp the fixed section 51 of the elastic probe 5 and can fix the position of the fixed section 51 of the elastic probe 5 in the test slot 31. For example, The fixing base 4 is provided with an elastic clip in the fixing groove 41. The elastic clip can tightly clamp the fixing section 51 of the elastic probe 5 extending into the fixing groove 41. In actual implementation, the fixing groove 41 Other probe fixing structures can be used and should not be limited to this. Since the probe fixing structure is a common technology and is not the focus of this case, it will not be described in detail here.

另外,位於該基座3左側之彈性探針5中,該第一彈性段52從該固定段51向下延伸後於該測試槽31中向左彎曲約角度60度(彎曲的弧度約為1/3 π),該第二彈性段53從該第一彈性段52延伸後於該測試槽31中向下並向右彎曲約角度225度(彎曲的弧度約為5/4 π),位於該基座3右側的彈性探針5為左側的鏡像設置,實際實施時,該第一彈性段52彎曲的弧度可介於角度20度到角度90度,該第二彈性段53彎曲的弧度可介於角度180度到角度270度,不應以此為限。 In addition, in the elastic probe 5 located on the left side of the base 3, the first elastic section 52 extends downward from the fixed section 51 and then bends to the left in the test slot 31 at an angle of approximately 60 degrees (the arc of the bend is approximately 1 /3 π), the second elastic section 53 extends from the first elastic section 52 and then bends downward and to the right in the test slot 31 at an angle of about 225 degrees (the arc of the bend is about 5/4 π), located at the The elastic probe 5 on the right side of the base 3 is a mirror image of the left side. In actual implementation, the curvature of the first elastic section 52 can range from an angle of 20 degrees to an angle of 90 degrees, and the curvature of the second elastic section 53 can range from 20 degrees to 90 degrees. From an angle of 180 degrees to an angle of 270 degrees, it should not be limited to this.

於該第一較佳實施例,該第一彈性段52彎曲的曲率是大於該第二彈性段53彎曲的曲率,曲線的曲率(curvature)為曲線上某個點的切線方向角對弧長的轉動率,曲率越大表示曲線的彎曲的程度越大,因此位 於該基座3左側之彈性探針5由該測試槽31向外突出後是藉由該第一彈性段52以較大的曲率快速向左彎曲,接著再以該第二彈性段53以較小的曲率慢慢向下並向右彎曲至該測試開口32的方向,可使該第二彈性段53呈現較大的圓弧彎曲形狀,由於該第二彈性段53具有較大的彎曲角度及較小的彎曲曲率,因此可以使該彈性探針5提供更好的彈性。 In the first preferred embodiment, the curvature of the first elastic segment 52 is greater than the curvature of the second elastic segment 53. The curvature of the curve is the tangent direction angle of a certain point on the curve to the arc length. Rotation rate. The greater the curvature, the greater the degree of curvature of the curve. Therefore, the position The elastic probe 5 on the left side of the base 3 protrudes outward from the test slot 31 and is quickly bent to the left with a larger curvature by the first elastic section 52, and then is bent to the left with a larger curvature by the second elastic section 53. The small curvature slowly bends downward and to the right toward the direction of the test opening 32, allowing the second elastic section 53 to assume a larger arc bend shape, because the second elastic section 53 has a larger bending angle and The smaller bending curvature allows the elastic probe 5 to provide better elasticity.

該彈性延伸段54支撐著該接觸段55以使該接觸段55由該測試開口32向外突出,並且該接觸段55的設置位置與該待測電極22的位置相配合,以使該待測電路21接近該基座3時,可使該複數待測電極22抵壓該複數彈性探針5的接觸段55,較佳地,該彈性探針5之接觸段55靠近該彈性延伸段54具有一平緩延伸部551,該平緩延伸部551用以使該彈性探針5之接觸段55設置於對應的測試開口32的位置,舉例來說,該複數測試開口32於該上蓋303上呈矩陣排列時,不同的平緩延伸部551可將彈性探針5之接觸段55設置在正確的測試開口32中,實際實施時,該接觸段55可不需要設置該平緩延伸部551,不應以此為限。 The elastic extension section 54 supports the contact section 55 so that the contact section 55 protrudes outward from the test opening 32, and the position of the contact section 55 matches the position of the electrode to be tested 22, so that the contact section 55 is When the circuit 21 is close to the base 3, the plurality of electrodes to be measured 22 can be pressed against the contact segments 55 of the plurality of elastic probes 5. Preferably, the contact segments 55 of the elastic probe 5 are close to the elastic extension segment 54. A gently extending portion 551 is used to dispose the contact section 55 of the elastic probe 5 at the position of the corresponding test opening 32. For example, the plurality of test openings 32 are arranged in a matrix on the upper cover 303. Different gentle extensions 551 can set the contact section 55 of the elastic probe 5 in the correct test opening 32. In actual implementation, the contact section 55 does not need to be provided with the gentle extension 551, and should not be limited to this. .

較佳地,位於該上蓋303之複數測試開口32的開口方向朝上,可使該彈性探針5之接觸段55向上伸出,位於該固定座4之固定槽41的開口方向朝下,以使該彈性探針5之固定段51向下伸出,該彈性探針5由該固定槽41向下突出後,藉由該第一彈性段52的彎曲可使該彈性探針5與該檢測電極6接觸,再藉由該第二彈性段53轉向該測試開口32的方向並由該彈性延伸段54延伸至該測試開口32,最後利用該接觸段55從該測試開口32向外突出,由於該測試開口32的開口方向與該固定槽41的開口方向相反,並藉由該第二彈性段53之大角度圓弧形狀,可提供該彈性探針5提供絕佳的彈性力,其中,該固定段51與該接觸段55是設置於該第二彈性段53的同一 側邊,並且與該第二彈性段53連接之固定段51伸入該固定槽41之方向,是相同於該接觸段55從該測試開口32向外突出之方向。 Preferably, the opening direction of the plurality of test openings 32 located in the upper cover 303 is upward, so that the contact section 55 of the elastic probe 5 can be extended upward, and the opening direction of the fixing groove 41 located in the fixing base 4 is downward, so that the contact section 55 of the elastic probe 5 can be extended upward. The fixed section 51 of the elastic probe 5 is extended downward. After the elastic probe 5 protrudes downward from the fixed groove 41, the elastic probe 5 can be connected to the detection through the bending of the first elastic section 52. The electrode 6 contacts, and then turns to the direction of the test opening 32 through the second elastic section 53 and extends from the elastic extension section 54 to the test opening 32, and finally uses the contact section 55 to protrude outward from the test opening 32, because The opening direction of the test opening 32 is opposite to the opening direction of the fixing groove 41, and the large-angle arc shape of the second elastic section 53 can provide the elastic probe 5 with excellent elastic force, wherein the The fixed section 51 and the contact section 55 are arranged on the same section of the second elastic section 53 The side and the direction in which the fixing section 51 connected to the second elastic section 53 protrudes into the fixing groove 41 is the same as the direction in which the contact section 55 protrudes outward from the test opening 32 .

該複數檢測電極6設置於該基座3中並分別與設置於該基座3中之複數彈性探針5電性連接,該複數彈性探針5之接觸段55提供該待測電路21之待測電極22接觸以使該複數檢測電極6分別與該複數待測電極22電性連接,於該第一較佳實施例中,該複數檢測電極6是設置於該基座3之複數側壁302上,彎曲的第一彈性段52可使該第二彈性段53的側緣抵觸該檢測電極6之表面,並且提供該第二彈性段53壓抵該檢測電極6的彈力,實際實施時,該複數檢測電極6可以設置於該基座3的其他位置,例如可將該複數檢測電極6設置於該底板301的上表面,以使該第二彈性段53的底緣可以抵觸該檢測電極6的表面,不應以此為限。 The plurality of detection electrodes 6 are disposed in the base 3 and are electrically connected to a plurality of elastic probes 5 disposed in the base 3 respectively. The contact segments 55 of the plurality of elastic probes 5 provide the circuit to be tested 21 . The measuring electrodes 22 are in contact so that the plurality of detection electrodes 6 are electrically connected to the plurality of electrodes to be measured 22 respectively. In the first preferred embodiment, the plurality of detection electrodes 6 are disposed on the plurality of side walls 302 of the base 3 , the curved first elastic section 52 can make the side edge of the second elastic section 53 contact the surface of the detection electrode 6, and provide the elastic force for the second elastic section 53 to press against the detection electrode 6. In actual implementation, the plurality of The detection electrode 6 can be disposed at other positions of the base 3 . For example, the plurality of detection electrodes 6 can be disposed on the upper surface of the bottom plate 301 so that the bottom edge of the second elastic section 53 can contact the surface of the detection electrode 6 , should not be limited to this.

請參閱圖6,為本發明一種彈性探針及電路測試裝置之一第二較佳實施例,該第二較佳實施例與該第一較佳實施例大致相同,相同之處不再詳述,不同之處在於該複數測試槽31中充滿填充物33,較佳地,該填充物33為矽膠,實際實施時,可填充其他具有彈性的絕緣材料,不應以此為限。 Please refer to Figure 6, which is a second preferred embodiment of a flexible probe and circuit testing device of the present invention. The second preferred embodiment is substantially the same as the first preferred embodiment, and the similarities will not be described in detail. , the difference is that the plurality of test slots 31 are filled with filler 33. Preferably, the filler 33 is silicone. In actual implementation, it can be filled with other elastic insulating materials and should not be limited to this.

其中,該待測電路21是一種球柵陣列封裝(英語:Ball Grid Array,BGA)的封裝結構,該複數待測電極22為設置於該待測電路21底面的錫球,設置於該複數測試開口32中之彈性探針5之接觸段55的位置對應該複數待測電路21的位置,該底板301上開設有複數開口306,該複數開口306可供該彈性探針5之第二彈力段53底緣向外突出,用以與測試平台(圖式未示出)之複數檢測電極6電性接觸,該電路測試裝置可組裝在該測試平台上,藉此可使該測試平台取得該複數待測電路21的電性。 The circuit to be tested 21 is a ball grid array (BGA) package structure, and the plurality of electrodes 22 to be tested are solder balls disposed on the bottom surface of the circuit to be tested 21 and are disposed on the plurality of test electrodes 22 . The position of the contact section 55 of the elastic probe 5 in the opening 32 corresponds to the position of the plurality of circuits 21 to be tested. The bottom plate 301 is provided with a plurality of openings 306, and the plurality of openings 306 can be used for the second elastic section of the elastic probe 5. The bottom edge of 53 protrudes outward for electrical contact with the plurality of detection electrodes 6 of the test platform (not shown in the figure). The circuit test device can be assembled on the test platform, whereby the test platform can obtain the plurality of detection electrodes 6. The electrical properties of the circuit 21 under test.

請參閱圖7,為本發明一種彈性探針及電路測試裝置之一第三較佳實施例,該第三較佳實施例與該第二較佳實施例大致相同,相同之處不再詳述,不同之處在於該複數測試槽31中充滿填充物33並未填滿該測試槽31的整個空間。 Please refer to Figure 7, which is a third preferred embodiment of a flexible probe and circuit testing device of the present invention. The third preferred embodiment is substantially the same as the second preferred embodiment, and the similarities will not be described in detail. , the difference is that the plurality of test grooves 31 are filled with fillers 33 and do not fill the entire space of the test grooves 31 .

較佳地,該填充物33包覆該固定座4,並藉由該填充物33固定該固定座4在該測試槽31中的位置,除此之外,該填充物33與該彈性探針5之接觸段55接觸,可固定該接觸段55的位置而提供絕緣的效果,也可以提供彈力給該接觸段55。 Preferably, the filler 33 covers the fixed base 4 and fixes the position of the fixed base 4 in the test slot 31 through the filler 33. In addition, the filler 33 and the elastic probe The contact section 55 of 5 can fix the position of the contact section 55 to provide an insulation effect, and can also provide elastic force to the contact section 55 .

請參閱圖8、圖9,及圖10,為本發明一種彈性探針及電路測試裝置之一第四較佳實施例,該第四較佳實施例與該第一較佳實施例大致相同,相同之處不再詳述,不同之處在於該彈性探針5更包含一套設於該固定段51表面的絕緣套56,其中,設置於該固定段51表面的絕緣套56延伸至該第一彈性段52的表面,較佳地,該絕緣套56軟性絕緣塑膠(聚醯亞胺,Polyimide,PI),實際實施時,該絕緣套56可使用其他的絕緣材料,並且不需要延伸至該第一彈性段52的表面,不應以此為限。 Please refer to Figure 8, Figure 9, and Figure 10, which is a fourth preferred embodiment of a flexible probe and circuit testing device of the present invention. The fourth preferred embodiment is substantially the same as the first preferred embodiment. The similarities will not be described in detail. The difference is that the elastic probe 5 further includes an insulating sleeve 56 provided on the surface of the fixed section 51 , wherein the insulating sleeve 56 provided on the surface of the fixed section 51 extends to the first On the surface of an elastic segment 52, the insulating sleeve 56 is preferably made of soft insulating plastic (Polyimide, PI). In actual implementation, the insulating sleeve 56 can use other insulating materials and does not need to extend to the The surface of the first elastic section 52 should not be limited to this.

該固定座4上設置一個固定槽41,該固定槽41可同時容置六條彈性探針5之固定段51並加以固定,該複數彈性探針5的彈性延伸段54再以扇形的方式分別延伸至對應的測試開口32,其中,該基座3之側壁302上可設置複數絕緣溝槽(圖式未示出)的結構,每一絕緣溝槽之底部設置一檢測電極6,該複數絕緣溝槽分別容置該複數第二彈性段53,以使該第二彈性段53分別與複數檢測電極6電性接觸。 A fixing slot 41 is provided on the fixing base 4. The fixing slot 41 can accommodate and fix the fixing sections 51 of six elastic probes 5 at the same time. The elastic extension sections 54 of the plurality of elastic probes 5 are divided in a fan-shaped manner. Extending to the corresponding test opening 32, a structure of a plurality of insulating trenches (not shown) can be provided on the side wall 302 of the base 3, and a detection electrode 6 is provided at the bottom of each insulating trench. The grooves respectively accommodate the plurality of second elastic sections 53 so that the second elastic sections 53 are in electrical contact with the plurality of detection electrodes 6 respectively.

於該第四較佳實施例中,藉由該彈性探針5之固定段51及第一彈性段52之表面設置的絕緣套56,可使一個固定槽41中固定複數彈性探 針5的位置,該固定座4的結構相較該第一較佳實施例之固定座4較為簡單,藉此縮小該固定座4的體積,進一步縮減該電路測試裝置的體積。 In the fourth preferred embodiment, through the insulating sleeve 56 provided on the surface of the fixed section 51 and the first elastic section 52 of the elastic probe 5, multiple elastic probes can be fixed in one fixing groove 41. The position of the pin 5 and the structure of the fixing base 4 are simpler than the fixing base 4 of the first preferred embodiment, thereby reducing the size of the fixing base 4 and further reducing the size of the circuit testing device.

請參閱圖10,為本發明一種彈性探針及電路測試裝置之一第五較佳實施例,該第五較佳實施例與該第四較佳實施例大致相同,相同之處於此不再詳述,不同之處在於,該複數彈性探針5之固定段51、第一彈性段52、第二彈性段53、彈性延伸段54及接觸段55的外側皆包覆該絕緣套56,其中,該彈性探針5之接觸段55的端部突出該絕緣套56一段長度。 Please refer to Figure 10, which is a fifth preferred embodiment of a flexible probe and circuit testing device of the present invention. The fifth preferred embodiment is substantially the same as the fourth preferred embodiment, and the similarities will not be detailed here. As mentioned above, the difference is that the outer sides of the fixed section 51, the first elastic section 52, the second elastic section 53, the elastic extension section 54 and the contact section 55 of the plurality of elastic probes 5 are all covered with the insulating sleeve 56, wherein, The end of the contact section 55 of the elastic probe 5 protrudes from the insulating sleeve 56 for a certain length.

於該第五較佳實施例,該複數檢測電極6分別為連接該彈性探針5之固定段51端部的電線,並且該複數檢測電極6的外側也分別包複一電極絕緣套61,該複數檢測電極6可將該複數彈性探針5之電訊號傳輸至一訊號分析裝置(圖式未示出),用以分析該待測電路21的電路特性。 In the fifth preferred embodiment, the plurality of detection electrodes 6 are wires connected to the end of the fixed section 51 of the elastic probe 5, and the outer sides of the plurality of detection electrodes 6 are also respectively covered with an electrode insulating sleeve 61. The plurality of detection electrodes 6 can transmit the electrical signals of the plurality of elastic probes 5 to a signal analysis device (not shown) for analyzing the circuit characteristics of the circuit to be tested 21 .

請配合參閱圖12,藉由設置於該複數彈性探針5之絕緣套56,可使該複數彈性探針5彼此靠緊而不會產生短路狀況,不僅能使複數彈性探針5之固定段51固設於同一個固定槽41中,更可以使該複數彈性探針5之接觸段55同時設置在同一個測試開口32中,於該第五較佳實施例,該複數接觸段55是以橫向排列的方式設置在該測試開口32中,該複數彈性探針5之接觸段55由該測試開口32向外突出以供該待測電路21之待測電極22電性接觸,較佳地,該電路測試裝置中設置的每一條彈性探針5都包覆著該絕緣套56,實際實施時,可以將有包覆該絕緣套56之彈性探針5與未包覆該絕緣套56之彈性探針5交錯並排列設置,不應以本較佳實施例的舉例為限。 Please refer to Figure 12 together. Through the insulating sleeve 56 provided on the plurality of elastic probes 5, the plurality of elastic probes 5 can be brought close to each other without causing a short circuit. Not only can the fixed sections of the plurality of elastic probes 5 be 51 is fixed in the same fixing groove 41, and the contact segments 55 of the plurality of elastic probes 5 can be disposed in the same test opening 32 at the same time. In the fifth preferred embodiment, the plurality of contact segments 55 are They are arranged in the test opening 32 in a transverse arrangement, and the contact segments 55 of the plurality of elastic probes 5 protrude outward from the test opening 32 to provide electrical contact with the electrodes 22 to be tested of the circuit to be tested 21. Preferably, Each elastic probe 5 provided in the circuit testing device is covered with the insulating sleeve 56. In actual implementation, the elastic probe 5 covered with the insulating sleeve 56 and the elastic probe 5 not covered with the insulating sleeve 56 can be used. The probes 5 are staggered and arranged, which should not be limited to the example of this preferred embodiment.

值得一提的是,由於複數彈性探針5之接觸段55共用同一個測試開口32,因此該複數彈性探針5之接觸段55彼此的間距不會受到複數測試開口32的結構限制,適用於取得具有較小間距之複數待測電極22的電性,實際實施時,該複數彈性探針5中可以只有該接觸段55設置有絕緣套 56而彼此靠緊,該複數彈性探針5以扇形展開而使該固定段51、該第一彈性段52、該第二彈性段53及該彈性延伸段54彼此間隔,並且該複數固定段51分設於複數固定槽41中,不應以此為限。 It is worth mentioning that since the contact segments 55 of the plurality of elastic probes 5 share the same test opening 32, the spacing between the contact segments 55 of the plurality of elastic probes 5 will not be limited by the structure of the plurality of test openings 32, which is suitable for To obtain the electrical properties of a plurality of electrodes 22 to be measured with a small spacing, in actual implementation, only the contact segment 55 of the plurality of elastic probes 5 may be provided with an insulating sleeve. 56 and are close to each other, the plurality of elastic probes 5 are spread out in a fan shape to space the fixed section 51, the first elastic section 52, the second elastic section 53 and the elastic extension section 54 from each other, and the plurality of fixed sections 51 They are provided in a plurality of fixed grooves 41 and should not be limited to this.

請配合參閱圖13,為本發明一種彈性探針及電路測試裝置之一第六較佳實施例,該第六較佳實施例與該第五較佳實施例大致相同,相同之處於此不再詳述,不同之處在於,該測試開口32中設置二彈性探針5之接觸段55,且該二接觸段55是以橫向排列的方式設置在該測試開口32中,實際實施時,複數接觸段55可以不同的排列方式設置在該試開口32中,舉例離說,可以矩陣的方式將複數接觸段55設置在該試開口32中,不應以此為限。 Please refer to Figure 13, which is a sixth preferred embodiment of a flexible probe and circuit testing device of the present invention. The sixth preferred embodiment is substantially the same as the fifth preferred embodiment, and the similarities will not be repeated here. To elaborate, the difference is that two contact sections 55 of the elastic probe 5 are provided in the test opening 32, and the two contact sections 55 are arranged in the test opening 32 in a transverse arrangement. In actual implementation, multiple contacts The segments 55 can be arranged in the test opening 32 in different arrangements. For example, a plurality of contact segments 55 can be arranged in the test opening 32 in a matrix manner, and should not be limited to this.

請參閱圖14,為本發明一種彈性探針及電路測試裝置之一第七較佳實施例,該彈性探針5包括一固定段51、一與該固定段51連接之第二彈性段53、一與該第二彈性段53連接之彈性延伸段54,及一與該彈性延伸段54連接之接觸段55。 Please refer to Figure 14, which is a seventh preferred embodiment of an elastic probe and circuit testing device of the present invention. The elastic probe 5 includes a fixed section 51, a second elastic section 53 connected to the fixed section 51, An elastic extension section 54 is connected to the second elastic section 53 , and a contact section 55 is connected to the elastic extension section 54 .

該固定座4與該上蓋303連接,該固定座4上設置有一朝下的固定槽41,該上蓋303設置有一開口32,該彈性探針5之固定段51設置於該固定座4之固定槽41,該第二彈性段53由該固定段51向下延伸後向該開口32轉向,該彈性延伸段54將轉向後的第二彈性段53延伸到該開口32處,在藉由該接觸段55由該開口32處向上突出。 The fixed base 4 is connected to the upper cover 303. The fixed base 4 is provided with a downward fixing groove 41. The upper cover 303 is provided with an opening 32. The fixed section 51 of the elastic probe 5 is arranged in the fixed groove of the fixed base 4. 41. The second elastic section 53 extends downward from the fixed section 51 and then turns toward the opening 32. The elastic extension section 54 extends the turned second elastic section 53 to the opening 32. Through the contact section 55 protrudes upward from the opening 32 .

由該開口32處向上突出之接觸段55可供待測電路21之待測電極22接觸,該第二彈性段53底部用於接觸檢測電極6,以使該彈性探針5可以傳輸該待測電極22及該檢測電極6的電性訊號,並且可以緩衝該待測電路21的下壓力,其中,設置於該上蓋303的底部空間中可以填充矽膠。 The contact section 55 protruding upward from the opening 32 can be contacted by the electrode 22 of the circuit 21 to be tested. The bottom of the second elastic section 53 is used to contact the detection electrode 6 so that the elastic probe 5 can transmit the electrode 22 to be tested. The electrode 22 and the electrical signal of the detection electrode 6 can buffer the downward force of the circuit to be tested 21 , wherein the space at the bottom of the upper cover 303 can be filled with silicone.

由上述說明可知,本發明一種彈性探針及電路測試裝置確實具有下列功效: From the above description, it can be seen that the elastic probe and circuit testing device of the present invention indeed have the following effects:

一、可以檢測間距較小的電極: 1. Can detect electrodes with small spacing:

設置於該固定段51表面的絕緣套56可使該固定槽41同時固定複數彈性探針5之固定段51,或是設置於該接觸段55表面的絕緣套56可使該測試開口32可以容置複數彈性探針5之接觸段55,用以縮小該複數彈性探針5的間距甚至達到靠緊的程度來不會發生短路的狀況,藉此可以用於檢測複數具有較小間距之待測電極22的電性。 The insulating sleeve 56 provided on the surface of the fixed section 51 can enable the fixing groove 41 to simultaneously fix the fixed sections 51 of the plurality of elastic probes 5, or the insulating sleeve 56 provided on the surface of the contact section 55 can enable the test opening 32 to accommodate The contact segments 55 of the plurality of elastic probes 5 are arranged to reduce the spacing between the plurality of elastic probes 5 or even to a close degree so that short circuits will not occur. This can be used to detect a plurality of objects to be tested with smaller spacing. The electrical properties of electrode 22.

二、可以不需要另外設置緩衝彈力體: 2. There is no need to set up additional buffer elastomers:

由於該彈性探針5之第一彈性段52彎曲的曲率是大於第二彈性段53彎曲的曲率,並且該第二彈性段53彎曲的弧度可介於角度180度到角度270度,可使該第二彈性段53提供該彈性探針5更好的彈性,以使該電路測試裝置中可以不需要另外設置緩衝彈力體。 Since the curvature of the first elastic section 52 of the elastic probe 5 is greater than the curvature of the second elastic section 53, and the curvature of the second elastic section 53 can be between an angle of 180 degrees and an angle of 270 degrees, the The second elastic section 53 provides the elastic probe 5 with better elasticity, so that there is no need to provide an additional buffer elastic body in the circuit testing device.

三、不會發生接觸不良的狀況: 3. Poor contact will not occur:

該固定座4之固定槽41可以將該彈性探針5固定於該測試槽31中,以使該彈性探針5不會在該測試槽31中產生滑動的狀況,並且該第一彈性段52朝著相反該測試開口32的方向進行彎曲,可使該第二彈性段53的側緣抵觸該檢測電極6,並且可提供該第二彈性段53壓抵該檢測電極6的彈力,由於該第二彈性段53的側緣緊緊抵觸該檢測電極6並且不會產生滑動的狀況,因此該彈性探針5與該檢測電極6的電性接觸良好,不會發生接觸不良的狀況。 The fixing slot 41 of the fixing base 4 can fix the elastic probe 5 in the test slot 31 so that the elastic probe 5 will not slide in the test slot 31, and the first elastic section 52 Bending in the direction opposite to the test opening 32 can make the side edge of the second elastic section 53 contact the detection electrode 6 and provide elastic force for the second elastic section 53 to press against the detection electrode 6. The side edges of the two elastic sections 53 are in tight contact with the detection electrode 6 and will not slip. Therefore, the elastic probe 5 has good electrical contact with the detection electrode 6 and no poor contact will occur.

綜上所述,該第一彈性段52向該檢測電極6的方向彎曲,可使該第二彈性段53的側緣與該檢測電極6抵接,該固定座4固定該彈性探針5之固定段51的位置,可使該第二彈性段53與該檢測電極6之間不會產生滑 動,該第二彈性段53向該測試開口32的方向彎曲,以使該彈性延伸段54朝著該測試開口32方向延伸並將該接觸段55由該測試開口32向外突出,該第二彈性段53具有較大的彎曲及弧度及較小的彎曲曲率可以有效緩衝該待測電極22抵壓該接觸段55的壓力,設置於彈性探針5之絕緣套56可以使複數彈性探針5彼此靠緊並彼此絕緣,藉此提供更小的電極測試間距,故確實可以達成本發明之目的。 To sum up, the first elastic section 52 is bent in the direction of the detection electrode 6, so that the side edge of the second elastic section 53 can contact the detection electrode 6, and the fixing base 4 fixes the elastic probe 5. The position of the fixed section 51 can prevent slippage between the second elastic section 53 and the detection electrode 6. When moving, the second elastic section 53 bends toward the direction of the test opening 32 , so that the elastic extension section 54 extends towards the direction of the test opening 32 and the contact section 55 protrudes outward from the test opening 32 . The elastic section 53 has a large bend and radian and a small curvature, which can effectively buffer the pressure of the electrode to be measured 22 against the contact section 55 . The insulating sleeve 56 provided on the elastic probe 5 can make the plurality of elastic probes 5 They are close to each other and insulated from each other, thereby providing a smaller electrode testing distance, so the purpose of the present invention can indeed be achieved.

惟以上所述者,僅為本發明之六個較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above are only six preferred embodiments of the present invention, and should not be used to limit the scope of the present invention. That is, any simple equivalent changes made in accordance with the patent scope of the present invention and the description of the invention are Modifications are still within the scope of the patent of this invention.

21:待測電路 21: Circuit to be tested

22:待測電極 22: Electrode to be tested

3:基座 3: base

301:底板 301: Base plate

302:側壁 302:Side wall

303:上蓋 303: Upper cover

31:測試槽 31:Test slot

32:測試開口 32: Test opening

4:固定座 4: Fixed seat

41:固定槽 41:Fixed slot

5:彈性探針 5: Elastic probe

6:檢測電極 6: Detection electrode

Claims (10)

一種彈性探針,設置於一測試裝置中,該測試裝置中設置有一固定座及一測試開口,該固定座設有一固定槽,其包含:一固定段,固設於該固定座之固定槽;一第二彈性段,與該固定座及該固定段連接,該第二彈性段的結構是朝向該測試開口的方向進行彎曲;一彈性延伸段,與該第二彈性段連接並延伸至該測試開口;及一接觸段,與該彈性延伸段連接並從該測試開口向外突出;其中,該固定段與該接觸段是設置於該第二彈性段的同一側邊,並且與該第二彈性段連接之固定段伸入該固定槽的方向,是相同於該接觸段從該測試開口向外突出之方向。 An elastic probe is provided in a test device. The test device is provided with a fixed seat and a test opening. The fixed seat is provided with a fixed groove, which includes: a fixed section fixed in the fixed groove of the fixed seat; A second elastic section is connected to the fixed seat and the fixed section. The structure of the second elastic section is to bend in the direction of the test opening; an elastic extension section is connected to the second elastic section and extends to the test opening; and a contact section connected to the elastic extension section and protruding outward from the test opening; wherein the fixed section and the contact section are arranged on the same side of the second elastic section and are connected to the second elastic section. The direction in which the fixed section of the segment connection extends into the fixing groove is the same as the direction in which the contact section protrudes outward from the test opening. 如請求項1所述彈性探針,更包含一第一彈性段,該第一彈性段設置於該固定段與該第二彈性段之間,該第一彈性段的結構是朝著相反該測試開口的方向進行彎曲。 The elastic probe according to claim 1 further includes a first elastic section, the first elastic section is arranged between the fixed section and the second elastic section, and the structure of the first elastic section is towards the opposite direction of the test. Bend in the direction of the opening. 如請求項1所述彈性探針,其中,該第一彈性段彎曲的曲率是大於該第二彈性段彎曲的曲率,該第一彈性段彎曲的弧度為角度20度到角度90度,該第二彈性段彎曲的弧度為角度180度到角度270度。 The elastic probe of claim 1, wherein the curvature of the first elastic segment is greater than the curvature of the second elastic segment, the curvature of the first elastic segment is from an angle of 20 degrees to an angle of 90 degrees, and the curvature of the first elastic segment is from an angle of 20 degrees to an angle of 90 degrees. The curvature of the two elastic segments is from an angle of 180 degrees to an angle of 270 degrees. 如請求項1所述彈性探針,更包含一套設於該彈性探針表面的絕緣套。 The elastic probe according to claim 1 further includes an insulating sleeve provided on the surface of the elastic probe. 如請求項2所述彈性探針,其中,該絕緣套是套設於該彈性探針之固定段、第一彈性段、第二彈性段、彈性延伸段、接觸段、其中之一及其組合。 The elastic probe of claim 2, wherein the insulating sleeve is sleeved on the fixed section, the first elastic section, the second elastic section, the elastic extension section, the contact section, one of the fixed section, the first elastic section, the contact section, and a combination thereof. . 一種電路測試裝置,適用於取得一待測電路之至少一待測電極的電性,並包括:一基座,包括至少一由該基座圍繞界定之測試槽,及至少一設置於該基座並與該測試槽連接之測試開口;至少一固定座,設置於該基座之測試槽中,並包括至少一由該固定座圍繞界定之固定槽,該固定槽與該測試槽連接;至少一如請求項1~5任一項所述彈性探針,依序包括一固定段、一第一彈性段、一第二彈性段、一彈性延伸段,及一接觸段,該彈性探針之固定段設置於該固定座之固定槽並突出於該測試槽中,該第一彈性段朝著相反該測試開口的方向進行彎曲,該第二彈性段朝向該測試開口的方向進行彎曲,並由該彈性延伸段延伸至該測試開口,該接觸段由該測試開口向外突出並且設置位置與該待測電極的位置相配合;及至少一檢測電極,與設置於該基座中之彈性探針電性連接,該彈性探針之接觸段提供該待測電路之待測電極接觸以使該檢測電極與該待測電極電性連接。 A circuit testing device suitable for obtaining the electrical properties of at least one electrode to be tested of a circuit to be tested, and includes: a base, including at least one test slot defined by the base, and at least one test slot disposed on the base and a test opening connected to the test slot; at least one fixing seat, which is disposed in the test slot of the base, and includes at least one fixing slot surrounded by the fixing seat, and the fixing slot is connected to the test slot; at least one The elastic probe as described in any one of claims 1 to 5 includes, in order, a fixed section, a first elastic section, a second elastic section, an elastic extension section, and a contact section, and the fixed section of the elastic probe The first elastic segment is arranged in the fixing groove of the fixing base and protrudes into the test slot. The first elastic segment is bent in the direction opposite to the test opening. The second elastic segment is bent in the direction of the test opening and is formed by the The elastic extension section extends to the test opening, the contact section protrudes outward from the test opening and is set in a position that matches the position of the electrode to be tested; and at least one detection electrode is electrically connected to the elastic probe disposed in the base. The contact section of the elastic probe provides contact with the electrode under test of the circuit under test so that the detection electrode and the electrode under test are electrically connected. 如請求項6所述電路測試裝置,其中,該測試開口的開口方向與該固定槽的開口方向相反。 The circuit testing device of claim 6, wherein the opening direction of the test opening is opposite to the opening direction of the fixing groove. 如請求項6所述電路測試裝置,其中,該彈性探針更包括一套設於該彈性探針表面的絕緣套。 The circuit testing device of claim 6, wherein the elastic probe further includes an insulating sleeve disposed on the surface of the elastic probe. 如請求項8所述電路測試裝置,其中,該絕緣套套設於該固定段的表面,該固定座之固定槽固定複數個彈性探針之固定段,該複數彈性探針藉由設置之絕緣套而彼此絕緣。 The circuit test device of claim 8, wherein the insulating sleeve is set on the surface of the fixed section, and the fixing groove of the fixing base fixes the fixed section of the plurality of elastic probes, and the plurality of elastic probes are connected through the insulating sleeve. And insulated from each other. 如請求項8所述電路測試裝置,其中,該絕緣套套設於該接觸段的表面,該基座之測試開口中容置複數個彈性探針之接觸段,該複數彈性探針藉由設置之絕緣套而彼此絕緣。 The circuit test device of claim 8, wherein the insulating sleeve is set on the surface of the contact section, and the test opening of the base accommodates the contact section of a plurality of elastic probes, and the plurality of elastic probes are arranged by Insulating sleeves to insulate each other.
TW111123157A 2022-06-22 2022-06-22 Elastic probe and circuit test device TWI825798B (en)

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