TWI822591B - Signal improvement system of tof-meis - Google Patents

Abstract

The invention provides a system for improving energy ion scattering signals in time-of-flight ranging, which includes a particle detector and a noise elimination unit arranged at the front end of the particle detector. The particle detector is used to detect scattered ions in a sample. , and when power is supplied, the noise elimination unit will apply an electric field force in the direction of ion movement to prevent it from reaching the particle detector, thereby improving the energy ion scattering signal in time-of-flight ranging.

Description

Energy ion scattering signal improvement system in time-of-flight ranging

The present invention is related to the technology of eliminating electronic noise, and in particular refers to an energy ion scattering signal in time-of-flight distance measurement required when analyzing a wafer or sample to be tested, thereby eliminating the non-linear energy ion scattering generated by time-of-flight distance measurement. Necessary electronic noise time-of-flight ranging energy ion scattering signal improvement system.

Time-Of-Flight Medium Energy Ion Scattering, that is, TOF-MEIS is the abbreviation of Time-Of-Flight Medium Energy Ion Scattering, which is the drift time (or flight time) of scattered medium energy ions. The method of analyzing "Time-Of-Flight Medium Energy Ion Scattering" in the scattering spectrum is to interrupt (discontinuous) the pulsed ion beam in the medium energy region and use it with a fixed period. After being transmitted to the wafer or sample to be tested, the technology detects the drift time (or flight time) of scattered ions (such as He) and converts it into energy to analyze the composition or thickness of the wafer or sample to be tested. , that is, detecting the time when the scattered ions arrive at the particle detector, and using this as a basis for converting it into an energy spectrum that can be used to analyze the wafer or sample to be tested.

The above-mentioned technology will continue to produce the problem of detecting low-energy scattered ions during repeated measurements.

Theoretically, according to the above-mentioned technology, as ions are incident and transmitted to the wafer or sample to be tested, scattered ions will be generated in sequence to reach the particle detector. In fact, particles that have collided with nuclear particles multiple times will The speed will weaken, resulting in a slower phenomenon and a delay in arriving at the particle detector. Therefore, particles (energy) with a longer drift time (or flight time) will be detected.

Since the aforementioned scattered ions have lower energy, they are not suitable for MEIS analysis and are therefore excluded from analysis sampling.

In addition, the low-energy scattered ions generated above will also form particle background (Back Ground) or electronic noise (Noise) in the measurement cavity, thereby distorting the measurement data.

The energy ion scattering signal in time-of-flight ranging is a periodic acquisition signal in its characteristics. The measurement of the next cycle will not start until the end of one cycle. However, the aforementioned low-energy scattered ions After the end of a cycle, the particle detector will not appear or arrive, but will be detected by the particle detector during the measurement process of the next cycle. Therefore, the wafer or sample to be tested will be This causes a significant increase in the probability of particle background during analysis, thereby distorting the accuracy of the measurement data.

An embodiment disclosed by the present invention is to solve the problems caused by the prior art.

The problem to be solved by the present invention is how to use time-of-flight medium energy ion scattering (TOF-MEIS, the abbreviation of Time-Of-Flight Medium Energy Ion Scattering) in an embodiment disclosed by the present invention. medium energy ions The flight time (or flight time) is a signal improvement system that uses the analysis of "Time-Of-Flight Medium Energy Ion Scattering" in the scattering spectrum. The energy ion scattering signal improvement system in time-of-flight ranging can effectively grasp the applicable scattered ions generated in energy ion scattering in time-of-flight ranging for data analysis, and thereby achieve high-efficiency data analysis.

In addition, how to use the time-of-flight mid-energy ion scattering (TOF-MEIS) signal improvement system in an embodiment disclosed in the present invention to reduce the particle background (Back) when measuring the wafer or sample to be tested. Ground) or electronic noise (Noise) interference phenomenon.

The technical means to solve the aforementioned problems of the present invention is to use the time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the present invention, which includes an ion generator, a particle detector and a hybrid The noise elimination unit is used to generate a predetermined ion and irradiate it onto the wafer or sample to be tested. The noise elimination unit is set at the front end of the particle detector. The particle detector is used to detect the wafer or sample to be tested. Ions scattered by the wafer or sample, and when power is supplied, the noise cancellation unit applies an electric field force in the direction in which the ions move to prevent them from reaching the particle detector.

Wherein, the noise elimination unit is defined as an electrode unit, which is used to generate voltage when supplying power.

Wherein, the noise elimination unit is defined as an electrode unit that includes a first electrode part and a second electrode part. The first electrode part and the second electrode part are both arranged at the front end of the particle detector and separated by The particle detector is arranged oppositely, wherein the first electrode unit and the second electrode unit generate different electrodes.

Wherein, the noise elimination unit is electrically connected to a power supply unit.

Wherein, the power supply unit is electrically activated within a predetermined first time period and electrically shut down within a predetermined second time period.

Wherein, the power supply part of the noise elimination unit does not repeatedly present a power supply or power outage state within the set first and second predetermined periods.

Among them, the time-of-flight ranging energy ion scattering (ie TOF-MEIS) signal improvement system further includes a filter module, which is set at the front end of the particle detector so that the scattered ions only reach the predetermined position at the front end of the particle detector. transmission within the diameter range.

Wherein, the filter module includes a first filter part and a second filter part, the first filter part has a channel with a first diameter, the second filter part has a channel with a second diameter, and The size of the first diameter channel of the first filter part is larger than the size of the second diameter channel of the second filter part, so that the second filter part can be disposed in the first filter part, wherein the filter module The first filter part and the second filter part are both located in the same axis direction and correspond to the particle detector.

The effect of the present invention compared with the prior art is that according to the time-of-flight mid-energy ion scattering (TOF-MEIS) signal improvement system disclosed in the present invention, the noise elimination unit is disposed between the particle detector and the object to be measured. Technical characteristics between wafers or samples, so that when power is supplied, the noise cancellation unit will apply an electric field force in the direction of ion movement to prevent it from reaching the particle detector, thereby effectively improving The aforementioned reduces the interference phenomenon of particle background (Back Ground) or electronic noise (Noise).

Preferably, the noise elimination can be electrically activated at a predetermined time through the time-of-flight mid-energy ion scattering (TOF-MEIS) signal improvement system disclosed in the present invention. The technical characteristics of the unit can also prevent the ions scattered by the wafer or sample to be tested from reaching the particle detector, thereby more effectively improving the aforementioned reduction of particle background (Back Ground) or electronic noise (Noise) interference. phenomenon.

100:Ion generator

200:Particle Detector

300: Noise elimination unit, electrode unit

310: First electrode part

320: Second electrode part

400:Power supply department

500:Filter module

510: First filtering department

520: Second filtering department

530: The third filtering department

Figure 1 is a schematic diagram of data measured by the present invention.

FIG. 2 is a schematic diagram of a time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the first preferred embodiment of the present invention.

FIG. 3 is a schematic diagram of another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention.

FIG. 4 is a cross-sectional and front schematic view of some components of the second preferred embodiment of the present invention disclosed in FIG. 3 , which mainly discloses the technical features of a first electrode part and a second electrode part.

FIG. 5 is similar to the schematic diagram of data measured in the second preferred embodiment of the present invention disclosed in FIG. 3 , and mainly discloses data measured after electrically activating a power supply unit.

FIG. 6 is a schematic diagram of another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the third preferred embodiment of the present invention.

FIG. 7 is a schematic diagram of yet another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) signal improvement system disclosed in the fourth preferred embodiment of the present invention.

FIG. 8 is a schematic diagram of yet another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the fifth preferred embodiment of the present invention.

The present invention is described in detail through various specific embodiments. However, these are not intended to limit the patentable scope of the present invention.

In the various specific embodiments disclosed in the present invention, each specific embodiment of the present invention will be described in detail with reference to the accompanying drawings, and the same components in the drawings are labeled with the same symbols as much as possible; in addition, , descriptions related to known functions and compositions that may obscure the gist of the present invention are omitted.

The size or shape of each sub-component disclosed in each drawing of the present invention is used as an aid to clearly explain the technical features of each sub-component in each specific embodiment. Some components may be exaggerated in the drawings. The omission or supplementary schematic indications are not intended to limit the patentable scope of the present invention and shall be explained in advance.

Please refer to Figure 1 first, which is a schematic diagram of data measured by the present invention.

The data disclosed in Figure 1 and shown in Figure 2 can be obtained according to the present invention, which means that after a specific time period, scattered ions will be prevented from reaching a particle detector 200. In this way, the particle detector 200 will be prevented from being reached. The particle detector 200 prevents the detection of scattered ions with low energy. As shown in FIG. 1 , if the particle detector 200 starts to detect scattered ions after a delay of 3 μs (ie, 3000 ns), at this time, the scattered ions will be detected after a delay of 3 μs (ie, 3000 ns). The ions cannot reach the particle detector 200. This can effectively improve the aforementioned interference phenomenon of reducing particle background (Back Ground) or electronic noise (Noise), thereby obtaining more accurate measurement data.

Please refer to Figure 2, which is a schematic diagram of a time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the first preferred embodiment of the present invention. TOF-MEIS is the abbreviation of Time-Of-Flight Medium Energy Ion Scattering, which is the drift time (or flight time) of scattered medium energy ions. It is based on the "drift time (or flight time) of medium energy ions in the scattering spectrum". "Time-Of-Flight Medium Energy Ion Scattering" method of analysis, that is, the pulsed ion beam is interrupted (discontinuous) in the medium energy region and transmitted to the wafer or sample to be tested in a fixed periodic manner. , a technology that detects the drift time (or flight time) of scattered ions (such as He) and converts it into energy to analyze the composition or thickness of the wafer or sample to be tested.

The time-of-flight medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the first preferred embodiment of the present invention includes an ion generator 100, a particle detector 200, and a noise canceller. unit 300 and a power supply unit 400.

As mentioned above, please also refer to Figure 2. The ion generator 100 of the time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system is used to generate a predetermined ion and irradiate the wafer or sample to be tested. above, and the ion generator 100 is spaced apart from the wafer or sample to be tested, and generates the predetermined ions at a predetermined time and irradiates the predetermined ions to the wafer or sample to be tested. superior. The particle detector 200 of the time-of-flight mid-energy ion scattering (TOF-MEIS) signal improvement system is used to capture and measure particles (or ions) scattered from the wafer or sample to be measured. The noise elimination unit 300 of the time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system is disposed at the front end of the particle detector 200, so that the noise elimination unit 300 is located between the particle detector 200 and the wafer or sample to be tested, wherein the noise elimination unit 300 generates an electric field force sufficient to cause the ions to change their movement paths. Preferably, in this embodiment, the noise elimination unit 300 is defined is the electrode unit 300, that is, power is supplied from the outside to the noise elimination unit 300 (or defines When it is an electrode unit 300), the noise elimination unit 300 (or defined as the electrode unit 300) can form the positive electrode (+) of the power supply or the negative electrode (-) of the power supply. The power supply unit 400 of the time-of-flight ranging energy ion scattering (TOF-MEIS) signal improvement system is electrically connected to the noise elimination unit 300 and electrically activates the noise elimination unit in a predetermined time period. 300, so that the noise elimination unit 300 generates an electric field force sufficient to cause the ions to change their moving paths, thereby preventing the scattered ions from reaching the particle detector 200.

As mentioned above, please refer to Figure 1 again. The data disclosed in Figure 1 are only used as reference data for the operation of various embodiments of the present invention. Of course, they can also be determined based on the elements of the wafers or samples to be tested that are expected to be analyzed. Adopt relatively matching appropriate values.) It can be clearly known that the power supply unit 400 of the time-of-flight ranging energy ion scattering (ie TOF-MEIS) signal improvement system does not The noise elimination unit 300 is electrically activated; and the noise elimination unit 300 (or defined as the electrode unit 300) is electrically activated only when the time period is from 3 μs (that is, 3000 ns) to 5 μs (that is, 5000 ns). .

Please refer to Figure 3, which is a schematic diagram of another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention. The common technical features disclosed in each sub-component are marked The icons shown are the same as those shown in the first preferred embodiment.

Another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention includes an ion generator 100, a particle detector 200, a first The electrode part 310, a second electrode part 320 and a power supply part 400.

As mentioned above, the technical features, connection correspondence relationships and functions of the two components of the ion generator 100 and the particle detector 200 disclosed in the second preferred embodiment of the present invention are all the same as those disclosed in the first preferred embodiment. The ion generator 100 and the particle detector 200 disclosed in the example have the same components, so their explanation will be omitted below.

As mentioned above, another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention is characterized in that the power supply unit 400 is a separate circuit The first electrode part 310 and the second electrode part 320 are electrically connected and electrically controlled respectively.

As mentioned above, the first electrode part 310 and the second electrode part 320 are both disposed at the front end of the particle detector 200 and opposite to each other across the particle detector 200 , wherein the first electrode part 310 and the second electrode part 320 are The second electrode part 320 can be electrically activated by the power supply part 400 to form a positive power pole (+) or a negative power pole (-). In this way, the first electrode part 310 and the second electrode part 320 An electric field will be formed therebetween, which is sufficient to allow the ions between the first electrode part 310 and the second electrode part 320 to change their movement paths. It is worth mentioning that, as shown in FIG. 3 , the first electrode part 310 and the second electrode part 320 are both disposed at the front end of the particle detector 200 and opposite to each other across the particle detector 200 , so that The first electrode part 310 and the second electrode part 320 are between the wafer or sample to be tested and the particle detector 200 .

As mentioned above, if the ion generator 100 is used as a reference position, the first electrode part 310 will be closer to the ion generator 100 than the second electrode part 320 .

As mentioned above, the first electrode part in another time-of-flight ranging energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention 310 and the second electrode part 320 and other components can be electrically activated by the power supply part 400 to operate. In this way, the advantages disclosed in the first preferred embodiment can also be achieved. The data is as shown in Figure 1.

Please refer to FIG. 4 , which is a cross-sectional and front view of some components of the second preferred embodiment of the present invention disclosed in FIG. 3 , which mainly discloses the technical features of a first electrode part and a second electrode part.

As mentioned above, the first electrode part 310 and the second electrode part in another time-of-flight ranging energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention. The system 320 can be formed in various shapes. In this embodiment, it is in the shape of two opposite flat plates as shown in Figure 4(a). In this embodiment, it is in the shape of two opposite semicircular arcs as shown in Figure 4(b). shape, in other words, the first electrode part 310 and the second electrode part 320 can be formed in various shapes, and the number can also be provided in plural, and their arrangement can also be different.

As mentioned above, the first electrode part 310 and the second electrode part 320 are arranged symmetrically or parallel to each other. In addition, the first electrode part 310 and the second electrode part 320 can also be formed at the same time. Power polarity operation or alternatively generates power polarity operation.

Please refer to the schematic diagram of data measured in the second preferred embodiment of the present invention disclosed in FIG. 5 , which mainly discloses the data measured after the power supply unit 400 is electrically activated.

As mentioned above, the power supply unit 400 of another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention can conduct electrical power according to a predetermined time period. Start.

As mentioned above, the power supply unit 400 of another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention is to power on within a predetermined first time period. electrically activated, and electrically shut down within a predetermined second time period; and in this embodiment, for example, when the overall electrical operation time period of the power supply unit 400 is set to 5 μs (that is, 5000 ns), the predetermined first The time period of time can be defined from 3 μs (that is, 3000 ns) to 5 μs (that is, 5000 ns), and the time period of the predetermined second time can be defined from 0 μs to 3 μs (that is, 3000 ns). When the power supply unit 400 is electrically activated and within a predetermined first time period, the electric field force generated by the first electrode unit 310 and the second electrode unit 320 will cause the wafer or sample to be tested to be scattered. The moving direction of the ions is changed so that they cannot reach the particle detector 200, but they can reach the particle detector 200 in the predetermined second time period and be captured and measured. As a result, corresponding to the predetermined first time period disclosed in this embodiment, the density of scattered ions captured and measured by the particle detector 200 will be very low, and corresponding to the predetermined first time period disclosed in this embodiment. A higher density of scattered ions can be obtained in two time periods. In addition, the power supply unit 400 will regularly and repeatedly perform electrical startup and electrical shutdown in a predetermined first time period and a predetermined second time period, thereby obtaining the following: The data shown in Figure 5.

As mentioned above, the predetermined first time period and the predetermined time period of the power supply unit 400 of another time-of-flight ranging energy ion scattering (TOF-MEIS) signal improvement system disclosed in the second preferred embodiment of the present invention It can be reasonably inferred that the second time period will depend on the actual location of the wafer or sample to be tested or the structure of its constituent elements, the distance between the ion generator 100 and the wafer or sample to be tested, the location of the wafer or sample to be tested, and the location of the wafer or sample to be tested. circle or sample both with the particle detector 200 Factors such as the distance between them or the electrical start-up time period of the ion generator 100 can then be appropriately matched.

Please refer to FIG. 6 , which is a schematic diagram of another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) signal improvement system disclosed in the third preferred embodiment of the present invention.

Another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the third preferred embodiment of the present invention includes an ion generator 100, a particle detector 200, a first The electrode part 310, a second electrode part 320, a power supply part 400 and a filter module 500.

As mentioned above, the ion generator 100, the particle detector 200, The technical features, connection correspondence relationships and functions of the first electrode part 310, the second electrode part 320 and the power supply part 400 are basically the same as those of the first and second preferred embodiments disclosed above, so the following will be omitted. Explain it.

As mentioned above, according to the technical features of the first electrode part 310 and the second electrode part 320 disclosed in the second preferred embodiment of the present invention, although the first electrode part 310 and the second electrode part 320 can be electrically activated respectively through the power supply part 400, The polarity of the power supply generated by the electrode part 310 and the second electrode part 320 then changes the movement path of the scattered ions. However, it may also result in low energy due to phenomena such as other structures or elastic collisions between scattered ions. Scattered ions are collided in the direction of the particle detector 200 and captured and measured by the particle detector 200. Therefore, in order to effectively improve and prevent the aforementioned situation, the third preferred embodiment of the present invention is disclosed. Another technical feature of the time-of-flight ranging energy ion scattering (ie TOF-MEIS) signal improvement system is that the filter module 500 is provided as a component.

As mentioned above, the filter module 500 disclosed in the third preferred embodiment of the present invention is disposed at the front end of the particle detector 200, and the filter module 500 can be formed in a predetermined shape (for example, circular Porous, cylindrical or conical, etc.), and the filter module 500 can also be formed in a tubular shape with both ends penetrating according to Figure 6 as a reference; therefore, the filter module 500 can be used to prevent the passage through the third The scattered ions in the changed moving directions of one electrode part 310 and the second electrode part 320 reach the function of the particle detector 200 again.

Please refer to FIG. 7 , which is a schematic diagram of yet another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) signal improvement system disclosed in the fourth preferred embodiment of the present invention.

The time-of-flight medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the fourth preferred embodiment of the present invention includes an ion generator 100, a particle detector 200, a first The electrode part 310, a second electrode part 320, a power supply part 400, a first filter part 510 and a second filter part 520.

As mentioned above, the ion generator 100, the particle detector 200, The technical features, connection correspondence relationships and functions of the first electrode part 310, the second electrode part 320 and the power supply part 400 are basically the same as those of the first, second and third preferred embodiments disclosed above, so The explanation will be omitted below.

Continuing with the above, please refer to FIG. 6 again. According to the technical features of the filter module 500 disclosed in the third preferred embodiment of the present invention, if the first filter module is electrically activated through the power supply unit 400, When the polarity of the power generated behind the electrode part 310 and the second electrode part 320 does not sufficiently change the movement path of the scattered ions, they may also be guided to the filter module 500 and captured and detected by the particle detector 200 Yes, this is not a welcome phenomenon.

As mentioned above, in order to prevent the aforementioned phenomenon from occurring, as shown in FIG. 7 , another time-of-flight ranging mid-energy ion scattering (ie, TOF-MEIS) signal is disclosed in the fourth preferred embodiment of the present invention. The technical feature of the improved system is that the filter module 500 is mainly composed of the first filter part 510 and the second filter part 520 .

As mentioned above, the first filter part 510 of the time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the fourth preferred embodiment of the present invention has a first diameter. channel, the second filter part 520 has a channel with a second diameter, and the first diameter of the first filter part 510 is larger than the second diameter of the second filter part 520, so that the second filter The part 520 can be disposed in the first filter part 510. Preferably, the first filter part 510 and the second filter part 520 are both located in the same axial direction and correspond to the position of the particle detector 200, so , when the first electrode part 310 and the second electrode part 320 are electrically activated through the power supply part 400, the polarity of the power generated thereby changes the movement path of the scattered ions, thereby making it possible that the scattered ions cannot reach the particle detector 200 Sex will be greatly improved.

As mentioned above, according to the technical features of the first filter part 510 and the second filter part 520 disclosed in the fourth preferred embodiment of the present invention, if the first filter part 510 and the second filter part 520 are respectively electrically activated through the power supply part 400 When the polarity of the power source generated behind the electrode part 310 and the second electrode part 320 does not sufficiently change the movement path of the scattered ions, it is possible for the low-energy scattered ions to move into the first filter part 510, and the low-energy scattered ions may If you want to directly enter the passage from the first filter part 510 to the second filter part 520 , it may also be difficult to enter the passage of the second filter part 520 smoothly, and then allow the particle detector 200 to detect it. less than; at the same time, even if the low-energy scattered ions located in the channel of the first filter part 510 pass through After internal collision or impact, the scattered ions bounce back or change their movement paths again. At this time, the second filter part 520 can be used as a second line of defense to prevent being captured and detected by the particle detector 200 .

Please refer to FIG. 8 , which is a schematic diagram of yet another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) signal improvement system disclosed in the fifth preferred embodiment of the present invention.

Yet another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system disclosed in the fifth preferred embodiment of the present invention includes an ion generator 100, a particle detector 200, a third An electrode part 310, a second electrode part 320, a power supply part 400, a first filter part 510, a second filter part 520 and a third filter part 530.

As mentioned above, the ion generator 100 and the particle detector 200 in yet another time-of-flight ranging medium energy ion scattering (TOF-MEIS) signal improvement system are disclosed in the fifth preferred embodiment of the present invention. The technical features, connection correspondence relationships and functions of the first electrode part 310, the second electrode part 320 and the power supply part 400 are basically the same as those of the first, second, third and fourth preferred embodiments disclosed above. Examples, explanation thereof will be omitted below.

Continuing with the above, please refer to FIG. 7 again. Although the technical features and functions of the first filter part 510 and the second filter part 520 have been disclosed in the fourth preferred embodiment of the present invention, there are also It may happen that the moving direction of low-energy scattered ions is not fully changed or is reflected after collision, and then is inadvertently captured and detected by the particle detector 200 .

As mentioned above, in order to prevent the above-mentioned phenomenon from occurring, as shown in FIG. 8 , yet another time-of-flight ranging medium energy ion scattering (ie, TOF-MEIS) is disclosed in the fifth preferred embodiment of the present invention. The technical feature of the signal improvement system is that the filter module 500 mainly The system may be composed of the first filter part 510, the second filter part 520, the third filter part 530 and other components.

As mentioned above, the first filter part 510 can be a cylindrical body with both ends connected, the second filter part 520 can be a circular plate-shaped body, and the third filter part 530 can be a cone with both ends connected. Shape.

As mentioned above, the first filter part 510 is disposed at the front end of the particle detector 200 , the second filter part 520 is disposed at intervals at the front end of the first filter part 510 , and the third filter part 530 is disposed at the front end of the particle detector 200 . In the front port of the first filter part 510, the third filter part 530 is just between the first filter part 510 and the second filter part 520; therefore, as the power supply part 400 is electrically The polarity of the power generated after the first electrode part 310 and the second electrode part 320 are activated will allow the low-energy scattered ions to fully change the moving direction, or the low-energy scattered ions will not fully change the moving direction, or the low-energy scattered ions will not fully change the moving direction. Although the ions have changed their moving direction, they have moved to the wrong direction. At this time, the second filtering part 520 will be used as the first filtering, and the third filtering part 530 will be used to filter the forced ions. Scattered ions that move in the wrong direction; of course, the first filter part 510 can also be used to enhance filtering of scattered ions that are forced to move in the wrong direction or move after rebounding.

The above is a detailed description of each embodiment disclosed by the present invention. The detailed structure, characteristics, assembly or use, manufacturing, etc. of the present invention have been clearly described in the foregoing detailed description of the embodiments. However, in the present invention Those with ordinary knowledge in the field should be able to understand that these detailed descriptions and examples of the present invention are only used to support the implementation of the present invention and are not intended to limit the patentable scope of the present invention; in addition, It can be easily thought from the patentable scope of the present invention without departing from the technical characteristics of the present invention. Simply adding, changing, deleting or adding components should of course also fall within the scope of the patent application of the present invention.

100:Ion generator

200:Particle Detector

300: Noise elimination unit, electrode unit

400:Power supply department

Claims (8)

A system for improving energy ion scattering signals in time-of-flight ranging, which includes: an ion generator (100), which is used to generate a predetermined ion and irradiate it onto a wafer or sample to be measured; a particle detector (200), It is used to detect ions scattered by the wafer or sample to be tested; and a noise elimination unit (300) is provided at the front end of the particle detector (200); wherein, when power is supplied, the noise elimination unit (300) The unit (300) applies an electric field force in the direction in which the ions move to prevent them from reaching the particle detector (200). The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 1, wherein the noise elimination unit (300) is defined as an electrode unit for generating voltage when supplying power. The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 2, wherein the noise elimination unit (300) is defined as an electrode unit that includes a first electrode part (310) and a second electrode part (320), the first electrode part (310) and the second electrode part (320) are both arranged at the front end of the particle detector (200) and are oppositely arranged across the particle detector (200). The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 1, wherein the noise elimination unit (300) is electrically connected to a power supply unit (400). The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 4, wherein the power supply unit (400) is electrically started to operate within a predetermined first time period, and within a predetermined second time period Electrical shutdown. The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 5, wherein the power supply unit (400) repeatedly electrically activates or cuts off the power within a predetermined time period. The energy ion scattering signal improvement system in time-of-flight ranging as described in claim 1 further includes a filter module (500), which is arranged at the front end of the particle detector (200) so that scattered ions can only be detected in the particle detector. It is transmitted within a predetermined diameter range at the front end of the device (200). The energy ion scattering signal improvement system in time-of-flight ranging as claimed in claim 7, wherein the filtering module (500) includes a first filtering part (510) and a second filtering part (520), and the third filtering part (520) A filter part (510) has a channel with a first diameter, the second filter part (520) has a channel with a second diameter, and the size of the first diameter channel of the first filter part (510) is larger than The size of the second diameter channel of the second filter part (520) enables the second filter part (520) to be disposed in the first filter part (510), wherein the filter module (500) The first filter part (510) and the second filter part (520) are both located in the same axis direction and correspond to the particle detector (200).

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