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TWI805047B - Thyristor - Google Patents

Thyristor Download PDF

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TWI805047B
TWI805047B TW110140056A TW110140056A TWI805047B TW I805047 B TWI805047 B TW I805047B TW 110140056 A TW110140056 A TW 110140056A TW 110140056 A TW110140056 A TW 110140056A TW I805047 B TWI805047 B TW I805047B
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transistor
heavily doped
region
well region
terminal
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TW110140056A
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TW202318670A (en
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王世鈺
黃文聰
徐誌緯
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旺宏電子股份有限公司
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Abstract

A thyristor includes a first transistor and a second transistor. A first end of the first transistor is configured to be an anode. The second transistor has a control end coupled to a second end of the first transistor. A first end of the second transistor is coupled to a control end of the first transistor. A second end of the second transistor is coupled to the first end of the second transistor to be a cathode.

Description

閘流器Thyristor

本發明是有關於一種閘流器,且特別是有關於一種可快速導通的閘流器。The present invention relates to a thyristor, and in particular to a rapidly conducting thyristor.

在習知的技術領域中,透過二極體來建構靜電防護電路,是一種常見的做法。然而,在高速運用中,受限於二極體的寄生電容,靜電防護電路的電流宣洩能力同樣受到限制,也影響了靜電放電防護的能力。In the known technical field, it is a common practice to construct an ESD protection circuit through diodes. However, in high-speed applications, limited by the parasitic capacitance of the diode, the current discharge capability of the ESD protection circuit is also limited, which also affects the ESD protection capability.

本發明提供多種閘流器,可提升被導通的速度。The present invention provides various thyristors, which can increase the speed of being turned on.

本發明的閘流器包括第一電晶體以及第二電晶體。第一電晶體具有第一端以作為陽極端。第二電晶體具有控制端以耦接至第一電晶體的第二端,第二電晶體的第一端耦接至第一電晶體的控制端,第二電晶體的第二端耦接至第二電晶體的第一端並作為陰極端。The thyristor of the present invention includes a first transistor and a second transistor. The first transistor has a first end serving as an anode end. The second transistor has a control terminal to be coupled to the second terminal of the first transistor, the first terminal of the second transistor is coupled to the control terminal of the first transistor, and the second terminal of the second transistor is coupled to the The first end of the second transistor serves as the cathode end.

本發明的另一閘流器包括第一井區、第一重摻雜區、第二重摻雜區、第三重摻雜區以及第二井區。第一重摻雜區設置在第一井區中,並電性耦接至陽極端。第二重摻雜區設置在第一井區中,並電性耦接至陰極端。第二井區設置在基底中,第三重摻雜區,設置在第二井區中並電性耦接至陰極端。Another thyristor of the present invention includes a first well region, a first heavily doped region, a second heavily doped region, a third heavily doped region and a second well region. The first heavily doped region is disposed in the first well region and electrically coupled to the anode terminal. The second heavily doped region is disposed in the first well region and electrically coupled to the cathode end. The second well region is disposed in the base, and the third heavily doped region is disposed in the second well region and electrically coupled to the cathode terminal.

基於上述,本發明的閘流器透過在第一重摻雜區(第一電晶體的第二端)以及基底(第一電晶體的控制端)間形成一內嵌二極體。當閘流器的陽極端以及陰極端間接收一順向偏壓時,內嵌二極體可輔助閘流器被導通,且第一井區(第一電晶體的第二端以及第二電晶體的控制端)也可同時輔助閘流器被導通。因此,閘流器的導通速度可有效被提升。Based on the above, the thyristor of the present invention forms an embedded diode between the first heavily doped region (the second terminal of the first transistor) and the substrate (the control terminal of the first transistor). When a forward bias voltage is received between the anode terminal and the cathode terminal of the thyristor, the built-in diode can assist the thyristor to be turned on, and the first well region (the second terminal of the first transistor and the second electrode The control terminal of the crystal) can also be turned on at the same time as the auxiliary thyristor. Therefore, the turn-on speed of the thyristor can be effectively increased.

請參照圖1,圖1繪示本發明一實施例的閘流器的電路示意圖。閘流器100包括電晶體T1以及電晶體T2。電晶體T1的第一端以做為閘流器100的陽極端AE。電晶體T1的第二端耦接至電晶體T2的控制端,電晶體T1的控制端則耦接至電晶體T2的第一端。另外,電晶體T2的第二端與電晶體T2的第一端相互耦接,並做為閘流器100的陰極端CE。Please refer to FIG. 1 , which is a schematic circuit diagram of a thyristor according to an embodiment of the present invention. The thyristor 100 includes a transistor T1 and a transistor T2. The first terminal of the transistor T1 serves as the anode terminal AE of the thyristor 100 . The second terminal of the transistor T1 is coupled to the control terminal of the transistor T2, and the control terminal of the transistor T1 is coupled to the first terminal of the transistor T2. In addition, the second terminal of the transistor T2 is coupled to the first terminal of the transistor T2 and serves as the cathode terminal CE of the thyristor 100 .

在本實施例中,電晶體T1的第一端可以為電晶體T1的射極;電晶體T1的第二端可以為電晶體T1的集極;電晶體T1的控制端則為電晶體T1的基極。此外,電晶體T2的第二端可以為電晶體T2的射極;電晶體T2的第二端可以為電晶體T2的集極;電晶體T2的控制端則為電晶體T2的基極。電晶體T1與電晶體T2的導電型態互補,具體來說明,電晶體T1為PNP型雙極性電晶體,電晶體T2則為NPN型雙極性電晶體。In this embodiment, the first terminal of the transistor T1 can be the emitter of the transistor T1; the second terminal of the transistor T1 can be the collector of the transistor T1; the control terminal of the transistor T1 is the terminal of the transistor T1 base. In addition, the second terminal of the transistor T2 can be the emitter of the transistor T2; the second terminal of the transistor T2 can be the collector of the transistor T2; the control terminal of the transistor T2 is the base of the transistor T2. The conduction types of the transistor T1 and the transistor T2 are complementary. Specifically, the transistor T1 is a PNP type bipolar transistor, and the transistor T2 is an NPN type bipolar transistor.

在本實施例中,電晶體T1的第一端與控制端間可以形成一個內嵌二極體。在當閘流器100的陽極端AE與陰極端CE間接收一順向偏壓時,電晶體T1的第一端、電晶體T1的控制端以及電晶體T2的第二端間形成一導通路徑。此時為浮接的電晶體T1的第二端上的電壓,會因上述的內嵌二極體的導通而被拉高。另外,電晶體T1的第一端、電晶體T1的控制端、電晶體T2的第一端、電晶體T1的第二端、電晶體T2的控制端與電晶體T2的第二端間形成另一導通路徑。在這樣的條件下,閘流器100可快速的被導通。In this embodiment, an embedded diode may be formed between the first terminal and the control terminal of the transistor T1. When a forward bias voltage is received between the anode terminal AE and the cathode terminal CE of the thyristor 100, a conduction path is formed between the first terminal of the transistor T1, the control terminal of the transistor T1 and the second terminal of the transistor T2 . At this time, the voltage on the second terminal of the floating transistor T1 will be pulled up due to the conduction of the above-mentioned built-in diode. In addition, the first terminal of transistor T1, the control terminal of transistor T1, the first terminal of transistor T2, the second terminal of transistor T1, the control terminal of transistor T2 and the second terminal of transistor T2 form another a conduction path. Under such conditions, the thyristor 100 can be turned on quickly.

在靜電放電防護的應用中,當靜電放電現象發生時,閘流器100可因應陽極端AE與陰極端CE間的靜電放電電壓而速的被導通,再透過雙重的導通路徑,有效的完成靜電放電電流的宣洩動作,有效提升靜電放電防護的等級。In the application of electrostatic discharge protection, when the electrostatic discharge phenomenon occurs, the thyristor 100 can be quickly turned on in response to the electrostatic discharge voltage between the anode terminal AE and the cathode terminal CE, and then through the double conduction path, effectively complete the electrostatic discharge. The venting action of the discharge current effectively improves the level of electrostatic discharge protection.

請參照圖2,圖2繪示本發明另一實施例的閘流器的電路示意圖。閘流器200包括電晶體T1、電晶體T2、電阻R1以及電阻R2。與圖1實施例不相同的,電阻R1耦接在電晶體T1的第二端與電晶體T2的控制端間。電阻R2則耦接在電晶體T2的第一端與電晶體T1的控制端間。其中,電阻R1以及R2可以為積體電路中,電晶體T1與電晶體T2間的半導體材料所形成的電阻。Please refer to FIG. 2 , which is a schematic circuit diagram of a thyristor according to another embodiment of the present invention. The thyristor 200 includes a transistor T1, a transistor T2, a resistor R1 and a resistor R2. Different from the embodiment in FIG. 1 , the resistor R1 is coupled between the second terminal of the transistor T1 and the control terminal of the transistor T2 . The resistor R2 is coupled between the first terminal of the transistor T2 and the control terminal of the transistor T1. Wherein, the resistors R1 and R2 may be resistors formed by the semiconductor material between the transistor T1 and the transistor T2 in the integrated circuit.

以下請參照圖3A,圖3A繪示本發明一實施例的閘流器的結構示意圖。閘流器301包括由井區建構的基底310、第一重摻雜區321、第二重摻雜區322、第三重摻雜區323以及井區331。其中,基底310可以為N型深井(NWD)區。第一重摻雜區321可以為P型重摻雜區(P+),並設置在基底310中。第二重摻雜區322可以為N型重摻雜區(N+),並設置在基底310中。井區331則可以為設置在基底310中的P型井區(PWI),第三重摻雜區323則可以為N型重摻雜區(N+),並設置在井區331中。Please refer to FIG. 3A below. FIG. 3A is a schematic structural diagram of a thyristor according to an embodiment of the present invention. The thyristor 301 includes a substrate 310 constructed of well regions, a first heavily doped region 321 , a second heavily doped region 322 , a third heavily doped region 323 and a well region 331 . Wherein, the substrate 310 may be an N-type deep well (NWD) region. The first heavily doped region 321 may be a P-type heavily doped region (P+), and is disposed in the substrate 310 . The second heavily doped region 322 may be an N-type heavily doped region (N+), and is disposed in the substrate 310 . The well region 331 may be a P-type well region (PWI) disposed in the substrate 310 , and the third heavily doped region 323 may be an N-type heavily doped region (N+) disposed in the well region 331 .

其中,井區331設置在為N型深井(NWD)區的基底310中,並為N型井區所環繞。因此,井區331為PWI(P-type Well Inside)型態的井區。Wherein, the well area 331 is set in the substrate 310 which is an N-type deep well (NWD) area, and is surrounded by the N-type well area. Therefore, the well area 331 is a PWI (P-type Well Inside) type well area.

也就是說,在本實施例中,基底310、第二重摻雜區322以及第三重摻雜區323的導電型態相同(N型)。第一重摻雜區321以及井區331的導電型態相同(P型)。That is to say, in this embodiment, the conduction types of the substrate 310 , the second heavily doped region 322 and the third heavily doped region 323 are the same (N type). The conductivity types of the first heavily doped region 321 and the well region 331 are the same (P type).

在本實施例中,第一重摻雜區321、基底310以及井區331可形成如圖1所示的電晶體T1。基底310、第三重摻雜區323以及井區331則可形成如圖1所示電晶體T2。另外,第一重摻雜區321電性耦接至閘流器301的陽極端AE,基底310、第二重摻雜區322以及第三重摻雜區323則共同耦接至閘流器301的陰極端CE。相對於圖1的實施例,第一重摻雜區321對應電晶體T1的第一端(射極);基底310對應電晶體T1的控制端(基極);井區331則對應電晶體T1的第二端(集極)。另外,基底310對應電晶體T2的第一端(集極);井區331則對應電晶體T2的控制端(基極);第三重摻雜區323對應電晶體T2的第二端(射極)。In this embodiment, the first heavily doped region 321 , the substrate 310 and the well region 331 can form a transistor T1 as shown in FIG. 1 . The substrate 310 , the third heavily doped region 323 and the well region 331 can form the transistor T2 as shown in FIG. 1 . In addition, the first heavily doped region 321 is electrically coupled to the anode terminal AE of the thyristor 301 , and the substrate 310 , the second heavily doped region 322 and the third heavily doped region 323 are commonly coupled to the thyristor 301 The cathode terminal CE. 1, the first heavily doped region 321 corresponds to the first terminal (emitter) of the transistor T1; the substrate 310 corresponds to the control terminal (base) of the transistor T1; the well region 331 corresponds to the transistor T1 The second terminal (collector). In addition, the substrate 310 corresponds to the first terminal (collector) of the transistor T2; the well region 331 corresponds to the control terminal (base) of the transistor T2; the third heavily doped region 323 corresponds to the second terminal (emitter) of the transistor T2 pole).

在實施例中,第一重摻雜區321與基底310間可以形成一個內嵌二極體。在當閘流器300的陽極端AE與陰極端CE間接收一順向偏壓時,第一重摻雜區321以及基底310所形成的內嵌二極體,可與第二重摻雜區322間形成一導通路徑。另外,此時為浮接的井區331上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區331則可與第三重摻雜區323形成另一導通路徑。在這樣的條件下,閘流器300可快速的被導通。在靜電放電防護的應用上,可加速靜電放電電流的宣洩效率,提升防護的等級。In an embodiment, an embedded diode may be formed between the first heavily doped region 321 and the substrate 310 . When a forward bias voltage is received between the anode terminal AE and the cathode terminal CE of the thyristor 300, the embedded diode formed by the first heavily doped region 321 and the substrate 310 can be connected with the second heavily doped region 322 forms a conduction path. In addition, the voltage on the well region 331 which is floating at this time will be pulled up due to the conduction of the above-mentioned embedded diode. In this way, the well region 331 can form another conduction path with the third heavily doped region 323 . Under such conditions, the thyristor 300 can be turned on quickly. In the application of electrostatic discharge protection, it can accelerate the discharge efficiency of electrostatic discharge current and improve the level of protection.

值得一提的,在本實施例中,第一重摻雜區321、第二重摻雜區322以及第三重摻雜區323是依序設置在基底310中。在本發明其他實施例中,請參見圖3B繪示的本發明另一實施例的閘流器的結構示意圖,在閘流器302中,設置於井區331中的第三重摻雜區323也可以設置在第一重摻雜區321以及第三重摻雜區323間。也就是說,第一重摻雜區321、第二重摻雜區322以及第三重摻雜區323並沒有位置上的限制。It is worth mentioning that in this embodiment, the first heavily doped region 321 , the second heavily doped region 322 and the third heavily doped region 323 are sequentially disposed in the substrate 310 . In other embodiments of the present invention, please refer to FIG. 3B , which is a schematic structural diagram of a thyristor according to another embodiment of the present invention. In the thyristor 302, the third heavily doped region 323 disposed in the well region 331 It can also be disposed between the first heavily doped region 321 and the third heavily doped region 323 . That is to say, there is no limitation on the positions of the first heavily doped region 321 , the second heavily doped region 322 and the third heavily doped region 323 .

以下請參照圖4,圖4繪示本發明另一實施例的閘流器的結構示意圖。閘流器400包括由P型井區(PW)建構的基底410、第一重摻雜區421、第二重摻雜區422、第三重摻雜區423、井區431以及深井區432。在本實施例中,第一重摻雜區421為P型重摻雜區(P+),第二重摻雜區422、第三重摻雜區423則均為N型重摻雜區(N+)。井區431為P型井區(P-type Well Inside, PWI),深井區432則為N型深井區(NWD)。Please refer to FIG. 4 below. FIG. 4 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. The thyristor 400 includes a substrate 410 constructed of a P-type well (PW), a first heavily doped region 421 , a second heavily doped region 422 , a third heavily doped region 423 , a well region 431 and a deep well region 432 . In this embodiment, the first heavily doped region 421 is a P-type heavily doped region (P+), and the second heavily doped region 422 and the third heavily doped region 423 are N-type heavily doped regions (N+ ). The well area 431 is a P-type well area (P-type Well Inside, PWI), and the deep well area 432 is an N-type deep well area (NWD).

在配置關係上,第一重摻雜區421以及深井區432直接設置在基底410中。井區431則配置在深井區432中。第二重摻雜區422配置在井區431外,且配置在深井區432中。第三重摻雜區423則配置在井區431中。In terms of configuration, the first heavily doped region 421 and the deep well region 432 are directly disposed in the substrate 410 . The well area 431 is configured in the deep well area 432 . The second heavily doped region 422 is disposed outside the well region 431 and disposed in the deep well region 432 . The third heavily doped region 423 is disposed in the well region 431 .

第一重摻雜區421電性連接至閘流器400的陽極端AE,第二重摻雜區422以及第三重摻雜區423則均電性連接至閘流器400的陰極端CE。The first heavily doped region 421 is electrically connected to the anode terminal AE of the thyristor 400 , and the second heavily doped region 422 and the third heavily doped region 423 are both electrically connected to the cathode terminal CE of the thyristor 400 .

對應圖1的實施例,本實施例中的基底410、深井區432以及井區431可形成電晶體T1。第三重摻雜區423、深井區432以及井區431可形成電晶體T2。第一重摻雜區421、基底410以及深井區432間可以形成一內嵌二極體。在初始狀態下,井區431則為浮接的狀態。Corresponding to the embodiment of FIG. 1 , the substrate 410 , the deep well region 432 and the well region 431 in this embodiment can form a transistor T1 . The third heavily doped region 423 , the deep well region 432 and the well region 431 can form a transistor T2. An embedded diode can be formed between the first heavily doped region 421 , the substrate 410 and the deep well region 432 . In an initial state, the well region 431 is in a floating state.

在當閘流器400的陽極端AE以及陰極端CE間接收一順向偏壓時,基底410以及深井區432間的內嵌二極體可被導通並提供一導通路徑。原為浮接狀態的井區431上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區431則可與第三重摻雜區423以提供另一導通路徑,有效提升閘流器400的導通效率。When a forward bias is applied between the anode terminal AE and the cathode terminal CE of the thyristor 400 , the embedded diode between the substrate 410 and the deep well region 432 can be turned on and provide a conduction path. The voltage on the well region 431 in the floating state will be pulled up due to the conduction of the above-mentioned built-in diode. In this way, the well region 431 can provide another conduction path with the third heavily doped region 423 to effectively improve the conduction efficiency of the thyristor 400 .

在本實施例中,透過擴大基底410與深井區432的接面,可以降低其間產生的內嵌二極體的空乏區所提供電容,並提升內嵌二極體的導通效率。In this embodiment, by enlarging the junction between the substrate 410 and the deep well region 432 , the capacitance provided by the depletion region of the embedded diode generated therebetween can be reduced, and the conduction efficiency of the embedded diode can be improved.

值得一提的,在本實施例中,第二重參雜區422可以如圖4所示的設置在第一重參雜區421以及第三重參雜區423間。在本發明其他實施例中,設置在井區431中的第三重參雜區423,也可以變更被設置在第一重參雜區421以及第二重參雜區422間,沒有一定的限制。It is worth mentioning that in this embodiment, the second heavily doped region 422 can be disposed between the first heavily doped region 421 and the third heavily doped region 423 as shown in FIG. 4 . In other embodiments of the present invention, the third heavily doped region 423 disposed in the well region 431 can also be changed to be disposed between the first heavily doped region 421 and the second heavily doped region 422, without certain restrictions. .

接著請參照圖5,圖5繪示本發明另一實施例的閘流器的結構示意圖。閘流器500包括由井區建構的基底510、第一重摻雜區521、第二重摻雜區522、第三重摻雜區523、井區531以及井區532。在本實施例中,基底510為一N型深井區(NWD)。第一重摻雜區521為P型重摻雜區(P+),第二重摻雜區522、第三重摻雜區523則均為N型重摻雜區(N+)。井區531以及井區532均為P型深井區(P-type Well Inside, PWI)。Next, please refer to FIG. 5 , which is a schematic structural diagram of a thyristor according to another embodiment of the present invention. The thyristor 500 includes a substrate 510 constructed of well regions, a first heavily doped region 521 , a second heavily doped region 522 , a third heavily doped region 523 , a well region 531 and a well region 532 . In this embodiment, the substrate 510 is an N-type deep well region (NWD). The first heavily doped region 521 is a P-type heavily doped region (P+), and the second heavily doped region 522 and the third heavily doped region 523 are N-type heavily doped regions (N+). Both the well area 531 and the well area 532 are P-type deep well areas (P-type Well Inside, PWI).

在配置關係上,第二重摻雜區522、井區531以及井區532直接設置在基底510中。第一重摻雜區521配置在井區532中。第二重摻雜區522配置在井區531外,也配置在井區532外。第三重摻雜區523則配置在井區531中。井區531以及井區532為物理性相互隔離。In terms of configuration, the second heavily doped region 522 , the well region 531 and the well region 532 are directly disposed in the substrate 510 . The first heavily doped region 521 is disposed in the well region 532 . The second heavily doped region 522 is configured outside the well region 531 and also outside the well region 532 . The third heavily doped region 523 is disposed in the well region 531 . The well area 531 and the well area 532 are physically isolated from each other.

第一重摻雜區521電性連接至閘流器500的陽極端AE,第二重摻雜區522以及第三重摻雜區523則均電性連接至閘流器500的陰極端CE。The first heavily doped region 521 is electrically connected to the anode terminal AE of the thyristor 500 , and the second heavily doped region 522 and the third heavily doped region 523 are both electrically connected to the cathode terminal CE of the thyristor 500 .

在本實施例中,第一重摻雜區521、井區532以及基底510間可形成一內嵌二極體。在初始狀態下,井區531為浮接的狀態。In this embodiment, an embedded diode can be formed among the first heavily doped region 521 , the well region 532 and the substrate 510 . In an initial state, the well region 531 is in a floating state.

在當閘流器500的陽極端AE以及陰極端CE間接收一順向偏壓時,第一重摻雜區521、井區532以及基底510間的內嵌二極體可被導通並提供一導通路徑。原為浮接狀態的第一井區531上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區531則可與第三重摻雜區523以提供另一導通路徑,有效提升閘流器500的導通效率。When a forward bias voltage is received between the anode terminal AE and the cathode terminal CE of the thyristor 500, the embedded diode between the first heavily doped region 521, the well region 532 and the substrate 510 can be turned on and provide a conduction path. The voltage on the first well region 531 in the floating state will be pulled up due to the above-mentioned conduction of the built-in diode. In this way, the well region 531 can provide another conduction path with the third heavily doped region 523 to effectively improve the conduction efficiency of the thyristor 500 .

請參照圖6,圖6繪示本發明一實施例的靜電放電防護電路的示意圖。靜電放電防護電路600包括閘流器SCR1以及SCR2。閘流器SCR1的陰極端接收電源電壓VCCQ,閘流器SCR1的陽極端耦接至焊墊DQ。閘流器SCR2的陰極端耦接至焊墊DQ,閘流器SCR2的陽極端接收參考接地電壓VSSQ。在本實施例中,閘流器SCR1可應用圖3A的閘流器301或圖5的閘流器500來實施,閘流器SCR2則可應用圖3A的閘流器301、圖4的閘流器400或圖5的閘流器500來實施。靜電放電防護電路600在應用可快速導通的閘流器SCR1以及SCR2的條件下,有效提升靜電放電的防護層級。Please refer to FIG. 6 , which is a schematic diagram of an electrostatic discharge protection circuit according to an embodiment of the present invention. The electrostatic discharge protection circuit 600 includes thyristors SCR1 and SCR2. The cathode terminal of the thyristor SCR1 receives the power supply voltage VCCQ, and the anode terminal of the thyristor SCR1 is coupled to the pad DQ. The cathode terminal of the thyristor SCR2 is coupled to the pad DQ, and the anode terminal of the thyristor SCR2 receives the reference ground voltage VSSQ. In this embodiment, the thyristor SCR1 can be implemented using the thyristor 301 in FIG. 3A or the thyristor 500 in FIG. 5 , and the thyristor SCR2 can be implemented by using the thyristor 301 in FIG. 400 or the thyristor 500 of FIG. 5 . The electrostatic discharge protection circuit 600 effectively improves the protection level of electrostatic discharge under the condition of using the thyristors SCR1 and SCR2 which can be turned on quickly.

請參照圖7A至7D,圖7A至7D繪示本發明多個實施例的閘流器的結構示意圖。在圖7A中,閘流器701包括井區711、721以及重摻雜區741、751以及761。井區721可做為基底。井區711設置在井區721中,其中井區721可以為P型井區(PW),井區711則可以為N型深井區(NWD)。重摻雜區741、751設置在井區711中,重摻雜區761則設置在井區721中。其中,重摻雜區741電性連接至閘流器701的陽極端AE,重摻雜區751、761共同電性連接至閘流器701的陰極端CE。重摻雜區741為P型重摻雜區(P+),重摻雜區751以及761則皆為N型重摻雜區(N+)。Please refer to FIGS. 7A to 7D . FIGS. 7A to 7D are schematic structural diagrams of thyristors according to various embodiments of the present invention. In FIG. 7A , a thyristor 701 includes well regions 711 , 721 and heavily doped regions 741 , 751 and 761 . Well region 721 may serve as a substrate. The well area 711 is set in the well area 721, wherein the well area 721 may be a P-type well area (PW), and the well area 711 may be an N-type deep well area (NWD). The heavily doped regions 741 and 751 are disposed in the well region 711 , and the heavily doped region 761 is disposed in the well region 721 . The heavily doped region 741 is electrically connected to the anode terminal AE of the thyristor 701 , and the heavily doped regions 751 and 761 are electrically connected to the cathode terminal CE of the thyristor 701 . The heavily doped region 741 is a P-type heavily doped region (P+), and the heavily doped regions 751 and 761 are both N-type heavily doped regions (N+).

在圖7B中,閘流器702包括井區712、722以及重摻雜區742、752以及762。井區722可做為基底。井區712設置在井區722中,其中井區722可以為P型井區(PW),井區712則可以為N型井區(NW)。重摻雜區742、752設置在井區712中,重摻雜區762則設置在井區722中。其中,重摻雜區742電性連接至閘流器702的陽極端AE,重摻雜區752、762共同電性連接至閘流器702的陰極端CE。重摻雜區742為P型重摻雜區(P+),重摻雜區752以及762則皆為N型重摻雜區(N+)。In FIG. 7B , thyristor 702 includes well regions 712 , 722 and heavily doped regions 742 , 752 and 762 . Well region 722 may serve as a substrate. The well area 712 is arranged in the well area 722 , wherein the well area 722 may be a P-type well area (PW), and the well area 712 may be an N-type well area (NW). The heavily doped regions 742 and 752 are disposed in the well region 712 , and the heavily doped region 762 is disposed in the well region 722 . The heavily doped region 742 is electrically connected to the anode terminal AE of the thyristor 702 , and the heavily doped regions 752 and 762 are electrically connected to the cathode terminal CE of the thyristor 702 . The heavily doped region 742 is a P-type heavily doped region (P+), and the heavily doped regions 752 and 762 are both N-type heavily doped regions (N+).

在圖7C中,閘流器703包括井區713、723、773以及重摻雜區743、753以及763。井區723可做為基底。井區713以及773均設置在井區723中,且井區713以及773相互隔離。其中井區723可以為P型井區(PW),井區713以及773則均可以為N型井區(NW)。重摻雜區743、753設置在井區713中,重摻雜區763則設置在井區773中。其中,重摻雜區743電性連接至閘流器703的陽極端AE,重摻雜區753、763共同電性連接至閘流器703的陰極端CE。重摻雜區743為P型重摻雜區(P+),重摻雜區753以及763則皆為N型重摻雜區(N+)。In FIG. 7C , thyristor 703 includes well regions 713 , 723 , 773 and heavily doped regions 743 , 753 and 763 . Well region 723 may serve as a substrate. The well areas 713 and 773 are both arranged in the well area 723, and the well areas 713 and 773 are isolated from each other. The well area 723 may be a P-type well area (PW), and the well areas 713 and 773 may both be N-type well areas (NW). The heavily doped regions 743 and 753 are disposed in the well region 713 , and the heavily doped region 763 is disposed in the well region 773 . The heavily doped region 743 is electrically connected to the anode terminal AE of the thyristor 703 , and the heavily doped regions 753 and 763 are electrically connected to the cathode terminal CE of the thyristor 703 . The heavily doped region 743 is a P-type heavily doped region (P+), and the heavily doped regions 753 and 763 are both N-type heavily doped regions (N+).

在圖7D中,閘流器704包括井區714、724、774以及重摻雜區744、754以及764。井區724可做為基底。井區714以及774均設置在井區723中,且井區714以及774相互隔離。其中井區724可以為P型井區(PW),井區714以及774則均可以為N型深井區(NWD)。重摻雜區744、754設置在井區714中,重摻雜區764則設置在井區774中。其中,重摻雜區744電性連接至閘流器704的陽極端AE,重摻雜區754、764共同電性連接至閘流器704的陰極端CE。重摻雜區744為P型重摻雜區(P+),重摻雜區754以及764則皆為N型重摻雜區(N+)。In FIG. 7D , thyristor 704 includes well regions 714 , 724 , 774 and heavily doped regions 744 , 754 and 764 . Well region 724 may serve as a substrate. The well areas 714 and 774 are both disposed in the well area 723, and the well areas 714 and 774 are isolated from each other. The well area 724 can be a P-type well area (PW), and the well areas 714 and 774 can both be N-type deep well areas (NWD). The heavily doped regions 744 , 754 are disposed in the well region 714 , and the heavily doped region 764 is disposed in the well region 774 . The heavily doped region 744 is electrically connected to the anode terminal AE of the thyristor 704 , and the heavily doped regions 754 and 764 are electrically connected to the cathode terminal CE of the thyristor 704 . The heavily doped region 744 is a P-type heavily doped region (P+), and the heavily doped regions 754 and 764 are both N-type heavily doped regions (N+).

綜上所述,本發明的閘流器提供內嵌二極體,在當閘流器的陽極與陰極間被施加一順向偏壓時,內嵌二極體可被導通並提供一導通路徑。並且,在當內嵌二極體被導通時,閘流器中為浮接的第一電晶體的第二端的電壓被拉高,並使第二電晶體被導通以提供另一導通路徑。也就是說,本發明的閘流器可提供雙重導通路徑,可提升導通效率,並提升電流宣洩能力。In summary, the thyristor of the present invention provides an embedded diode, and when a forward bias is applied between the anode and the cathode of the thyristor, the embedded diode can be turned on and provide a conduction path . Moreover, when the embedded diode is turned on, the voltage of the second terminal of the floating first transistor in the thyristor is pulled up, and the second transistor is turned on to provide another conduction path. That is to say, the thyristor of the present invention can provide double conduction paths, which can improve the conduction efficiency and the current discharge capability.

100、200、301、302、400、500、SCR1、SCR2:閘流器 310、410、510:基底 321、421、521:第一重摻雜區 322、422、522:第二重摻雜區 323、423、523:第三重摻雜區 331、431、432、531、532、711~714、721~724、773、774:井區 600:靜電放電防護電路 741~744、751~754、761~764:重摻雜區 AE:陽極端 CE:陰極端 R1、R2:電阻 T1、T2:電晶體 100, 200, 301, 302, 400, 500, SCR1, SCR2: thyratron 310, 410, 510: base 321, 421, 521: the first heavily doped region 322, 422, 522: the second heavily doped region 323, 423, 523: the third heavily doped region 331, 431, 432, 531, 532, 711~714, 721~724, 773, 774: well area 600: Electrostatic discharge protection circuit 741~744, 751~754, 761~764: heavily doped regions AE: anode end CE: cathode terminal R1, R2: resistance T1, T2: Transistor

圖1繪示本發明一實施例的閘流器的電路示意圖。 圖2繪示本發明另一實施例的閘流器的電路示意圖。 圖3A繪示本發明一實施例的閘流器的結構示意圖。 圖3B繪示本發明另一實施例的閘流器的結構示意圖。 圖4繪示本發明另一實施例的閘流器的結構示意圖。 圖5繪示本發明另一實施例的閘流器的結構示意圖。 圖6繪示本發明一實施例的靜電放電防護電路的示意圖。 圖7A至7D繪示本發明多個實施例的閘流器的結構示意圖。 FIG. 1 is a schematic circuit diagram of a thyristor according to an embodiment of the present invention. FIG. 2 is a schematic circuit diagram of a thyristor according to another embodiment of the present invention. FIG. 3A is a schematic structural diagram of a thyristor according to an embodiment of the present invention. FIG. 3B is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 4 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 5 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 6 is a schematic diagram of an electrostatic discharge protection circuit according to an embodiment of the present invention. 7A to 7D are schematic structural diagrams of thyristors according to various embodiments of the present invention.

100:閘流器 AE:陽極端 CE:陰極端 T1、T2:電晶體 100: Brake AE: anode end CE: cathode terminal T1, T2: Transistor

Claims (10)

一種閘流器,包括:一第一電晶體,具有第一端以作為一陽極端;以及一第二電晶體,具有控制端以耦接至該第一電晶體的第二端,該第二電晶體的第一端耦接至該第一電晶體的控制端,該第二電晶體的第二端直接耦接至該第二電晶體的第一端並作為一陰極端。 A thyristor, comprising: a first transistor with a first terminal serving as an anode terminal; and a second transistor with a control terminal coupled to the second terminal of the first transistor, the second transistor The first terminal of the crystal is coupled to the control terminal of the first transistor, and the second terminal of the second transistor is directly coupled to the first terminal of the second transistor and serves as a cathode terminal. 如請求項1所述的閘流器,其中該第一電晶體為PNP型雙極性電晶體,該第二電晶體為NPN型雙極性電晶體,該第一電晶體的第一端為射極,該第一電晶體的第二端為集極,該第二電晶體的第二端為射極,該第二電晶體的第一端為集極。 The thyristor according to claim 1, wherein the first transistor is a PNP bipolar transistor, the second transistor is an NPN bipolar transistor, and the first terminal of the first transistor is an emitter , the second terminal of the first transistor is the collector, the second terminal of the second transistor is the emitter, and the first terminal of the second transistor is the collector. 如請求項1所述的閘流器,更包括:一第一電阻,耦接在該第一電晶體的第二端與該第二電晶體的控制端間;以及一第二電阻,耦接在該第二電晶體的第一端與該第一電晶體的控制端間。 The thyristor according to claim 1, further comprising: a first resistor coupled between the second terminal of the first transistor and the control terminal of the second transistor; and a second resistor coupled Between the first terminal of the second transistor and the control terminal of the first transistor. 如請求項1所述的閘流器,其中當該陽極端與該陰極端間接收一順向偏壓時,該第一電晶體的第一端、第一電晶體的控制端以及該第二電晶體的第一端間形成一第一導通路徑,該第一電晶體的第一端、該第一電晶體的控制端、該第二電晶體的第一端、該第一電晶體的第二端、該第二電晶體的控制端與該第二電晶體的第二端間形成一第二導通路徑。 The thyristor according to claim 1, wherein when a forward bias voltage is received between the anode terminal and the cathode terminal, the first terminal of the first transistor, the control terminal of the first transistor and the second A first conduction path is formed between the first terminals of the transistor, the first terminal of the first transistor, the control terminal of the first transistor, the first terminal of the second transistor, the first terminal of the first transistor A second conduction path is formed between the two terminals, the control terminal of the second transistor and the second terminal of the second transistor. 一種閘流器,包括:一第一井區;一第一重摻雜區,設置在該第一井區中,電性耦接至一陽極端;一第二重摻雜區,設置在該第一井區中,電性耦接至一陰極端;一第二井區;以及一第三重摻雜區,設置在該第二井區中,電性耦接至該陰極端,其中電性耦接至該陽極端的該第一重摻雜區具有P型的導電型態,電性耦接至該陰極端的該第二重摻雜區以及電性耦接至該陰極端的第三重摻雜區具有N型的導電型態。 A thyristor, comprising: a first well region; a first heavily doped region disposed in the first well region and electrically coupled to an anode terminal; a second heavily doped region disposed in the first well region In a well area, electrically coupled to a cathode end; a second well area; and a third heavily doped region, disposed in the second well area, electrically coupled to the cathode end, wherein the electrical The first heavily doped region coupled to the anode terminal has a P-type conductivity type, the second heavily doped region electrically coupled to the cathode terminal and the third heavily doped region electrically coupled to the cathode terminal The impurity region has an N-type conductivity. 如請求項5所述的閘流器,其中該第一井區、該第二重摻雜區以及該第三重摻雜區的導電型態為相同的一第一導電型態,該第一重摻雜區以及該第二井區的導電型態為相同的一第二導電型態,該第二井區設置在該第一井區中,該第一導電型態為N型,該第二導電型態為P型,該第一重摻雜區、該第一井區以及該第二井區形成一第一電晶體,該第一井區、該第三重摻雜區以及該第二井區形成一第二電晶體,該第一電晶體為PNP型雙極性電晶體,該第二電晶體為NPN型雙極性電晶體。 The thyristor as claimed in item 5, wherein the conduction types of the first well region, the second heavily doped region and the third heavily doped region are the same first conduction type, the first The conductivity type of the heavily doped region and the second well region is the same second conductivity type, the second well region is set in the first well region, the first conductivity type is N type, and the second well region is set in the first well region. The second conductivity type is P type, the first heavily doped region, the first well region and the second well region form a first transistor, the first well region, the third heavily doped region and the second well region A second transistor is formed in the second well area, the first transistor is a PNP type bipolar transistor, and the second transistor is an NPN type bipolar transistor. 如請求項5所述的閘流器,更包括:一深井區,設置在該第一井區中, 其中,該第二井區設置在該深井區中,且該第二重摻雜區設置在該深井區中,該基底、該第一重摻雜區以及該第二井區的導電型態為相同的一第一導電型態,該第二重摻雜區、該第三重摻雜區以及該深井區的導電型態為相同的一第二導電型態,該第一導電型態為P型,該第二導電型態為N型,該第一井區、該深井區以及該第二井區形成一第一電晶體,該第二井區、該深井區以及該第三重摻雜區形成一第二電晶體,該第一電晶體為PNP型雙極性電晶體,該第二電晶體為NPN型雙極性電晶體。 The thyristor as described in claim 5, further comprising: a deep well area, set in the first well area, Wherein, the second well region is disposed in the deep well region, and the second heavily doped region is disposed in the deep well region, and the conductivity type of the substrate, the first heavily doped region and the second well region is The same first conductivity type, the conductivity type of the second heavily doped region, the third heavily doped region and the deep well region is the same second conductivity type, the first conductivity type is P type, the second conductivity type is N type, the first well region, the deep well region and the second well region form a first transistor, the second well region, the deep well region and the third heavily doped The region forms a second transistor, the first transistor is a PNP type bipolar transistor, and the second transistor is an NPN type bipolar transistor. 如請求項5所述的閘流器,更包括:一第三井區,設置在該第一井區中,其中該第二井區設置在該第一井區中,該第一重摻雜區設置在該第二井區中,該第二井區與該第三井區相互隔離,該第一重摻雜區、該第二井區以及該第三井區的導電型態為相同的一第一導電型態,該第一井區、該第二重摻雜區、該第三重摻雜區為相同的一第二導電型態,該第一導電型態為P型,該第二導電型態為N型,該第三井區、該第一井區以及該第二井區形成一第一電晶體,該第二井區、該第一井區以及該第三重摻雜區形成一第二電晶體,該第一電晶體為PNP型雙極性電晶體,該第二電晶體為NPN型雙極性電晶體。 The thyristor as described in claim 5, further comprising: a third well region disposed in the first well region, wherein the second well region is disposed in the first well region, and the first heavily doped region is set in the second well region, the second well region and the third well region are isolated from each other, and the conductivity types of the first heavily doped region, the second well region and the third well region are the same A first conductivity type, the first well region, the second heavily doped region, and the third heavily doped region are the same second conductivity type, the first conductivity type is P type, and the first well region The second conductivity type is N type, the third well region, the first well region and the second well region form a first transistor, the second well region, the first well region and the third heavily doped The region forms a second transistor, the first transistor is a PNP type bipolar transistor, and the second transistor is an NPN type bipolar transistor. 如請求項5所述的閘流器,其中該第一井區設置在該第二井區中。 The thyristor according to claim 5, wherein the first well area is arranged in the second well area. 如請求項5所述的閘流器,更包括: 一第三井區,設置在該第二井區中,其中該第三重摻雜區設置在該第三井區中,該第三井區與該第一井區相隔離,該第二井區與該第三井區皆為N型深井區。 The thyristor as described in claim item 5 further includes: a third well region, disposed in the second well region, wherein the third heavily doped region is disposed in the third well region, the third well region is isolated from the first well region, and the second well region area and the third well area are both N-type deep well areas.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200509360A (en) * 2003-04-30 2005-03-01 Texas Instruments Inc Efficient protection structure for reverse pin-to-pin electrostatic discharge
US20050104155A1 (en) * 2003-10-31 2005-05-19 Nils Jensen Diode structure and integral power switching arrangement
TW200522334A (en) * 2003-08-27 2005-07-01 Toshiba Kk Semiconductor integrated circuit device for esd protection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200509360A (en) * 2003-04-30 2005-03-01 Texas Instruments Inc Efficient protection structure for reverse pin-to-pin electrostatic discharge
TW200522334A (en) * 2003-08-27 2005-07-01 Toshiba Kk Semiconductor integrated circuit device for esd protection
US20050104155A1 (en) * 2003-10-31 2005-05-19 Nils Jensen Diode structure and integral power switching arrangement

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