TWI805047B - Thyristor - Google Patents
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Abstract
Description
本發明是有關於一種閘流器,且特別是有關於一種可快速導通的閘流器。The present invention relates to a thyristor, and in particular to a rapidly conducting thyristor.
在習知的技術領域中,透過二極體來建構靜電防護電路,是一種常見的做法。然而,在高速運用中,受限於二極體的寄生電容,靜電防護電路的電流宣洩能力同樣受到限制,也影響了靜電放電防護的能力。In the known technical field, it is a common practice to construct an ESD protection circuit through diodes. However, in high-speed applications, limited by the parasitic capacitance of the diode, the current discharge capability of the ESD protection circuit is also limited, which also affects the ESD protection capability.
本發明提供多種閘流器,可提升被導通的速度。The present invention provides various thyristors, which can increase the speed of being turned on.
本發明的閘流器包括第一電晶體以及第二電晶體。第一電晶體具有第一端以作為陽極端。第二電晶體具有控制端以耦接至第一電晶體的第二端,第二電晶體的第一端耦接至第一電晶體的控制端,第二電晶體的第二端耦接至第二電晶體的第一端並作為陰極端。The thyristor of the present invention includes a first transistor and a second transistor. The first transistor has a first end serving as an anode end. The second transistor has a control terminal to be coupled to the second terminal of the first transistor, the first terminal of the second transistor is coupled to the control terminal of the first transistor, and the second terminal of the second transistor is coupled to the The first end of the second transistor serves as the cathode end.
本發明的另一閘流器包括第一井區、第一重摻雜區、第二重摻雜區、第三重摻雜區以及第二井區。第一重摻雜區設置在第一井區中,並電性耦接至陽極端。第二重摻雜區設置在第一井區中,並電性耦接至陰極端。第二井區設置在基底中,第三重摻雜區,設置在第二井區中並電性耦接至陰極端。Another thyristor of the present invention includes a first well region, a first heavily doped region, a second heavily doped region, a third heavily doped region and a second well region. The first heavily doped region is disposed in the first well region and electrically coupled to the anode terminal. The second heavily doped region is disposed in the first well region and electrically coupled to the cathode end. The second well region is disposed in the base, and the third heavily doped region is disposed in the second well region and electrically coupled to the cathode terminal.
基於上述,本發明的閘流器透過在第一重摻雜區(第一電晶體的第二端)以及基底(第一電晶體的控制端)間形成一內嵌二極體。當閘流器的陽極端以及陰極端間接收一順向偏壓時,內嵌二極體可輔助閘流器被導通,且第一井區(第一電晶體的第二端以及第二電晶體的控制端)也可同時輔助閘流器被導通。因此,閘流器的導通速度可有效被提升。Based on the above, the thyristor of the present invention forms an embedded diode between the first heavily doped region (the second terminal of the first transistor) and the substrate (the control terminal of the first transistor). When a forward bias voltage is received between the anode terminal and the cathode terminal of the thyristor, the built-in diode can assist the thyristor to be turned on, and the first well region (the second terminal of the first transistor and the second electrode The control terminal of the crystal) can also be turned on at the same time as the auxiliary thyristor. Therefore, the turn-on speed of the thyristor can be effectively increased.
請參照圖1,圖1繪示本發明一實施例的閘流器的電路示意圖。閘流器100包括電晶體T1以及電晶體T2。電晶體T1的第一端以做為閘流器100的陽極端AE。電晶體T1的第二端耦接至電晶體T2的控制端,電晶體T1的控制端則耦接至電晶體T2的第一端。另外,電晶體T2的第二端與電晶體T2的第一端相互耦接,並做為閘流器100的陰極端CE。Please refer to FIG. 1 , which is a schematic circuit diagram of a thyristor according to an embodiment of the present invention. The
在本實施例中,電晶體T1的第一端可以為電晶體T1的射極;電晶體T1的第二端可以為電晶體T1的集極;電晶體T1的控制端則為電晶體T1的基極。此外,電晶體T2的第二端可以為電晶體T2的射極;電晶體T2的第二端可以為電晶體T2的集極;電晶體T2的控制端則為電晶體T2的基極。電晶體T1與電晶體T2的導電型態互補,具體來說明,電晶體T1為PNP型雙極性電晶體,電晶體T2則為NPN型雙極性電晶體。In this embodiment, the first terminal of the transistor T1 can be the emitter of the transistor T1; the second terminal of the transistor T1 can be the collector of the transistor T1; the control terminal of the transistor T1 is the terminal of the transistor T1 base. In addition, the second terminal of the transistor T2 can be the emitter of the transistor T2; the second terminal of the transistor T2 can be the collector of the transistor T2; the control terminal of the transistor T2 is the base of the transistor T2. The conduction types of the transistor T1 and the transistor T2 are complementary. Specifically, the transistor T1 is a PNP type bipolar transistor, and the transistor T2 is an NPN type bipolar transistor.
在本實施例中,電晶體T1的第一端與控制端間可以形成一個內嵌二極體。在當閘流器100的陽極端AE與陰極端CE間接收一順向偏壓時,電晶體T1的第一端、電晶體T1的控制端以及電晶體T2的第二端間形成一導通路徑。此時為浮接的電晶體T1的第二端上的電壓,會因上述的內嵌二極體的導通而被拉高。另外,電晶體T1的第一端、電晶體T1的控制端、電晶體T2的第一端、電晶體T1的第二端、電晶體T2的控制端與電晶體T2的第二端間形成另一導通路徑。在這樣的條件下,閘流器100可快速的被導通。In this embodiment, an embedded diode may be formed between the first terminal and the control terminal of the transistor T1. When a forward bias voltage is received between the anode terminal AE and the cathode terminal CE of the
在靜電放電防護的應用中,當靜電放電現象發生時,閘流器100可因應陽極端AE與陰極端CE間的靜電放電電壓而速的被導通,再透過雙重的導通路徑,有效的完成靜電放電電流的宣洩動作,有效提升靜電放電防護的等級。In the application of electrostatic discharge protection, when the electrostatic discharge phenomenon occurs, the
請參照圖2,圖2繪示本發明另一實施例的閘流器的電路示意圖。閘流器200包括電晶體T1、電晶體T2、電阻R1以及電阻R2。與圖1實施例不相同的,電阻R1耦接在電晶體T1的第二端與電晶體T2的控制端間。電阻R2則耦接在電晶體T2的第一端與電晶體T1的控制端間。其中,電阻R1以及R2可以為積體電路中,電晶體T1與電晶體T2間的半導體材料所形成的電阻。Please refer to FIG. 2 , which is a schematic circuit diagram of a thyristor according to another embodiment of the present invention. The
以下請參照圖3A,圖3A繪示本發明一實施例的閘流器的結構示意圖。閘流器301包括由井區建構的基底310、第一重摻雜區321、第二重摻雜區322、第三重摻雜區323以及井區331。其中,基底310可以為N型深井(NWD)區。第一重摻雜區321可以為P型重摻雜區(P+),並設置在基底310中。第二重摻雜區322可以為N型重摻雜區(N+),並設置在基底310中。井區331則可以為設置在基底310中的P型井區(PWI),第三重摻雜區323則可以為N型重摻雜區(N+),並設置在井區331中。Please refer to FIG. 3A below. FIG. 3A is a schematic structural diagram of a thyristor according to an embodiment of the present invention. The
其中,井區331設置在為N型深井(NWD)區的基底310中,並為N型井區所環繞。因此,井區331為PWI(P-type Well Inside)型態的井區。Wherein, the
也就是說,在本實施例中,基底310、第二重摻雜區322以及第三重摻雜區323的導電型態相同(N型)。第一重摻雜區321以及井區331的導電型態相同(P型)。That is to say, in this embodiment, the conduction types of the
在本實施例中,第一重摻雜區321、基底310以及井區331可形成如圖1所示的電晶體T1。基底310、第三重摻雜區323以及井區331則可形成如圖1所示電晶體T2。另外,第一重摻雜區321電性耦接至閘流器301的陽極端AE,基底310、第二重摻雜區322以及第三重摻雜區323則共同耦接至閘流器301的陰極端CE。相對於圖1的實施例,第一重摻雜區321對應電晶體T1的第一端(射極);基底310對應電晶體T1的控制端(基極);井區331則對應電晶體T1的第二端(集極)。另外,基底310對應電晶體T2的第一端(集極);井區331則對應電晶體T2的控制端(基極);第三重摻雜區323對應電晶體T2的第二端(射極)。In this embodiment, the first heavily doped
在實施例中,第一重摻雜區321與基底310間可以形成一個內嵌二極體。在當閘流器300的陽極端AE與陰極端CE間接收一順向偏壓時,第一重摻雜區321以及基底310所形成的內嵌二極體,可與第二重摻雜區322間形成一導通路徑。另外,此時為浮接的井區331上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區331則可與第三重摻雜區323形成另一導通路徑。在這樣的條件下,閘流器300可快速的被導通。在靜電放電防護的應用上,可加速靜電放電電流的宣洩效率,提升防護的等級。In an embodiment, an embedded diode may be formed between the first heavily doped
值得一提的,在本實施例中,第一重摻雜區321、第二重摻雜區322以及第三重摻雜區323是依序設置在基底310中。在本發明其他實施例中,請參見圖3B繪示的本發明另一實施例的閘流器的結構示意圖,在閘流器302中,設置於井區331中的第三重摻雜區323也可以設置在第一重摻雜區321以及第三重摻雜區323間。也就是說,第一重摻雜區321、第二重摻雜區322以及第三重摻雜區323並沒有位置上的限制。It is worth mentioning that in this embodiment, the first heavily doped
以下請參照圖4,圖4繪示本發明另一實施例的閘流器的結構示意圖。閘流器400包括由P型井區(PW)建構的基底410、第一重摻雜區421、第二重摻雜區422、第三重摻雜區423、井區431以及深井區432。在本實施例中,第一重摻雜區421為P型重摻雜區(P+),第二重摻雜區422、第三重摻雜區423則均為N型重摻雜區(N+)。井區431為P型井區(P-type Well Inside, PWI),深井區432則為N型深井區(NWD)。Please refer to FIG. 4 below. FIG. 4 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. The
在配置關係上,第一重摻雜區421以及深井區432直接設置在基底410中。井區431則配置在深井區432中。第二重摻雜區422配置在井區431外,且配置在深井區432中。第三重摻雜區423則配置在井區431中。In terms of configuration, the first heavily doped
第一重摻雜區421電性連接至閘流器400的陽極端AE,第二重摻雜區422以及第三重摻雜區423則均電性連接至閘流器400的陰極端CE。The first heavily doped
對應圖1的實施例,本實施例中的基底410、深井區432以及井區431可形成電晶體T1。第三重摻雜區423、深井區432以及井區431可形成電晶體T2。第一重摻雜區421、基底410以及深井區432間可以形成一內嵌二極體。在初始狀態下,井區431則為浮接的狀態。Corresponding to the embodiment of FIG. 1 , the
在當閘流器400的陽極端AE以及陰極端CE間接收一順向偏壓時,基底410以及深井區432間的內嵌二極體可被導通並提供一導通路徑。原為浮接狀態的井區431上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區431則可與第三重摻雜區423以提供另一導通路徑,有效提升閘流器400的導通效率。When a forward bias is applied between the anode terminal AE and the cathode terminal CE of the
在本實施例中,透過擴大基底410與深井區432的接面,可以降低其間產生的內嵌二極體的空乏區所提供電容,並提升內嵌二極體的導通效率。In this embodiment, by enlarging the junction between the
值得一提的,在本實施例中,第二重參雜區422可以如圖4所示的設置在第一重參雜區421以及第三重參雜區423間。在本發明其他實施例中,設置在井區431中的第三重參雜區423,也可以變更被設置在第一重參雜區421以及第二重參雜區422間,沒有一定的限制。It is worth mentioning that in this embodiment, the second heavily doped
接著請參照圖5,圖5繪示本發明另一實施例的閘流器的結構示意圖。閘流器500包括由井區建構的基底510、第一重摻雜區521、第二重摻雜區522、第三重摻雜區523、井區531以及井區532。在本實施例中,基底510為一N型深井區(NWD)。第一重摻雜區521為P型重摻雜區(P+),第二重摻雜區522、第三重摻雜區523則均為N型重摻雜區(N+)。井區531以及井區532均為P型深井區(P-type Well Inside, PWI)。Next, please refer to FIG. 5 , which is a schematic structural diagram of a thyristor according to another embodiment of the present invention. The
在配置關係上,第二重摻雜區522、井區531以及井區532直接設置在基底510中。第一重摻雜區521配置在井區532中。第二重摻雜區522配置在井區531外,也配置在井區532外。第三重摻雜區523則配置在井區531中。井區531以及井區532為物理性相互隔離。In terms of configuration, the second heavily doped
第一重摻雜區521電性連接至閘流器500的陽極端AE,第二重摻雜區522以及第三重摻雜區523則均電性連接至閘流器500的陰極端CE。The first heavily doped
在本實施例中,第一重摻雜區521、井區532以及基底510間可形成一內嵌二極體。在初始狀態下,井區531為浮接的狀態。In this embodiment, an embedded diode can be formed among the first heavily doped
在當閘流器500的陽極端AE以及陰極端CE間接收一順向偏壓時,第一重摻雜區521、井區532以及基底510間的內嵌二極體可被導通並提供一導通路徑。原為浮接狀態的第一井區531上的電壓,會因上述的內嵌二極體的導通而被拉高。如此一來,井區531則可與第三重摻雜區523以提供另一導通路徑,有效提升閘流器500的導通效率。When a forward bias voltage is received between the anode terminal AE and the cathode terminal CE of the
請參照圖6,圖6繪示本發明一實施例的靜電放電防護電路的示意圖。靜電放電防護電路600包括閘流器SCR1以及SCR2。閘流器SCR1的陰極端接收電源電壓VCCQ,閘流器SCR1的陽極端耦接至焊墊DQ。閘流器SCR2的陰極端耦接至焊墊DQ,閘流器SCR2的陽極端接收參考接地電壓VSSQ。在本實施例中,閘流器SCR1可應用圖3A的閘流器301或圖5的閘流器500來實施,閘流器SCR2則可應用圖3A的閘流器301、圖4的閘流器400或圖5的閘流器500來實施。靜電放電防護電路600在應用可快速導通的閘流器SCR1以及SCR2的條件下,有效提升靜電放電的防護層級。Please refer to FIG. 6 , which is a schematic diagram of an electrostatic discharge protection circuit according to an embodiment of the present invention. The electrostatic discharge protection circuit 600 includes thyristors SCR1 and SCR2. The cathode terminal of the thyristor SCR1 receives the power supply voltage VCCQ, and the anode terminal of the thyristor SCR1 is coupled to the pad DQ. The cathode terminal of the thyristor SCR2 is coupled to the pad DQ, and the anode terminal of the thyristor SCR2 receives the reference ground voltage VSSQ. In this embodiment, the thyristor SCR1 can be implemented using the
請參照圖7A至7D,圖7A至7D繪示本發明多個實施例的閘流器的結構示意圖。在圖7A中,閘流器701包括井區711、721以及重摻雜區741、751以及761。井區721可做為基底。井區711設置在井區721中,其中井區721可以為P型井區(PW),井區711則可以為N型深井區(NWD)。重摻雜區741、751設置在井區711中,重摻雜區761則設置在井區721中。其中,重摻雜區741電性連接至閘流器701的陽極端AE,重摻雜區751、761共同電性連接至閘流器701的陰極端CE。重摻雜區741為P型重摻雜區(P+),重摻雜區751以及761則皆為N型重摻雜區(N+)。Please refer to FIGS. 7A to 7D . FIGS. 7A to 7D are schematic structural diagrams of thyristors according to various embodiments of the present invention. In FIG. 7A , a
在圖7B中,閘流器702包括井區712、722以及重摻雜區742、752以及762。井區722可做為基底。井區712設置在井區722中,其中井區722可以為P型井區(PW),井區712則可以為N型井區(NW)。重摻雜區742、752設置在井區712中,重摻雜區762則設置在井區722中。其中,重摻雜區742電性連接至閘流器702的陽極端AE,重摻雜區752、762共同電性連接至閘流器702的陰極端CE。重摻雜區742為P型重摻雜區(P+),重摻雜區752以及762則皆為N型重摻雜區(N+)。In FIG. 7B ,
在圖7C中,閘流器703包括井區713、723、773以及重摻雜區743、753以及763。井區723可做為基底。井區713以及773均設置在井區723中,且井區713以及773相互隔離。其中井區723可以為P型井區(PW),井區713以及773則均可以為N型井區(NW)。重摻雜區743、753設置在井區713中,重摻雜區763則設置在井區773中。其中,重摻雜區743電性連接至閘流器703的陽極端AE,重摻雜區753、763共同電性連接至閘流器703的陰極端CE。重摻雜區743為P型重摻雜區(P+),重摻雜區753以及763則皆為N型重摻雜區(N+)。In FIG. 7C ,
在圖7D中,閘流器704包括井區714、724、774以及重摻雜區744、754以及764。井區724可做為基底。井區714以及774均設置在井區723中,且井區714以及774相互隔離。其中井區724可以為P型井區(PW),井區714以及774則均可以為N型深井區(NWD)。重摻雜區744、754設置在井區714中,重摻雜區764則設置在井區774中。其中,重摻雜區744電性連接至閘流器704的陽極端AE,重摻雜區754、764共同電性連接至閘流器704的陰極端CE。重摻雜區744為P型重摻雜區(P+),重摻雜區754以及764則皆為N型重摻雜區(N+)。In FIG. 7D ,
綜上所述,本發明的閘流器提供內嵌二極體,在當閘流器的陽極與陰極間被施加一順向偏壓時,內嵌二極體可被導通並提供一導通路徑。並且,在當內嵌二極體被導通時,閘流器中為浮接的第一電晶體的第二端的電壓被拉高,並使第二電晶體被導通以提供另一導通路徑。也就是說,本發明的閘流器可提供雙重導通路徑,可提升導通效率,並提升電流宣洩能力。In summary, the thyristor of the present invention provides an embedded diode, and when a forward bias is applied between the anode and the cathode of the thyristor, the embedded diode can be turned on and provide a conduction path . Moreover, when the embedded diode is turned on, the voltage of the second terminal of the floating first transistor in the thyristor is pulled up, and the second transistor is turned on to provide another conduction path. That is to say, the thyristor of the present invention can provide double conduction paths, which can improve the conduction efficiency and the current discharge capability.
100、200、301、302、400、500、SCR1、SCR2:閘流器
310、410、510:基底
321、421、521:第一重摻雜區
322、422、522:第二重摻雜區
323、423、523:第三重摻雜區
331、431、432、531、532、711~714、721~724、773、774:井區
600:靜電放電防護電路
741~744、751~754、761~764:重摻雜區
AE:陽極端
CE:陰極端
R1、R2:電阻
T1、T2:電晶體
100, 200, 301, 302, 400, 500, SCR1, SCR2: thyratron
310, 410, 510:
圖1繪示本發明一實施例的閘流器的電路示意圖。 圖2繪示本發明另一實施例的閘流器的電路示意圖。 圖3A繪示本發明一實施例的閘流器的結構示意圖。 圖3B繪示本發明另一實施例的閘流器的結構示意圖。 圖4繪示本發明另一實施例的閘流器的結構示意圖。 圖5繪示本發明另一實施例的閘流器的結構示意圖。 圖6繪示本發明一實施例的靜電放電防護電路的示意圖。 圖7A至7D繪示本發明多個實施例的閘流器的結構示意圖。 FIG. 1 is a schematic circuit diagram of a thyristor according to an embodiment of the present invention. FIG. 2 is a schematic circuit diagram of a thyristor according to another embodiment of the present invention. FIG. 3A is a schematic structural diagram of a thyristor according to an embodiment of the present invention. FIG. 3B is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 4 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 5 is a schematic structural diagram of a thyristor according to another embodiment of the present invention. FIG. 6 is a schematic diagram of an electrostatic discharge protection circuit according to an embodiment of the present invention. 7A to 7D are schematic structural diagrams of thyristors according to various embodiments of the present invention.
100:閘流器 AE:陽極端 CE:陰極端 T1、T2:電晶體 100: Brake AE: anode end CE: cathode terminal T1, T2: Transistor
Claims (10)
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| TW200509360A (en) * | 2003-04-30 | 2005-03-01 | Texas Instruments Inc | Efficient protection structure for reverse pin-to-pin electrostatic discharge |
| US20050104155A1 (en) * | 2003-10-31 | 2005-05-19 | Nils Jensen | Diode structure and integral power switching arrangement |
| TW200522334A (en) * | 2003-08-27 | 2005-07-01 | Toshiba Kk | Semiconductor integrated circuit device for esd protection |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200509360A (en) * | 2003-04-30 | 2005-03-01 | Texas Instruments Inc | Efficient protection structure for reverse pin-to-pin electrostatic discharge |
| TW200522334A (en) * | 2003-08-27 | 2005-07-01 | Toshiba Kk | Semiconductor integrated circuit device for esd protection |
| US20050104155A1 (en) * | 2003-10-31 | 2005-05-19 | Nils Jensen | Diode structure and integral power switching arrangement |
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