TWI802934B - Measuring apparatus - Google Patents

Abstract

A measuring apparatus includes: a first contact and a second contact being pressed to an object-to-be-measured respectively; a transmitting part for transmitting an electric signal; a transmitting substrate which electrically connects the first contact and the second contact with the transmitting part; and a housing which is set to a ground potential and supports the first contact, the second contact, the transmitting part and the transmitting substrate; wherein a high frequency transmission line which includes a ground line electrically connected to the first contact and a signal line electrically connected to the second contact, is provided at the transmitting substrate, and a ground transmission line allowing an electric signal to be transmitted from the transmitting part toward the object-to-be-measured is electrically connected to the housing through a conducting line branched from the ground line at an object-to-be-measured side with respect to the transmitting part.

Description

measuring device

The invention relates to a measuring device.

A high-frequency characteristic measuring device is disclosed in Japanese JP2005-223170A, which has: a workbench that can be lifted and lowered, on which a wafer is placed, and the wafer is formed with a plurality of integrated circuits as measurement objects; and a high-frequency probe device, Measure the high-frequency characteristics of integrated circuits.

In a measurement device that measures high-frequency characteristics of a measurement object, if a mismatch of characteristic impedance occurs in a transmission path that transmits an electrical signal for measurement, measurement accuracy may decrease. Therefore, the measurement device is required to match the characteristic impedance of the transmission path with good precision to improve the measurement accuracy.

An object of the present invention is to provide a measuring device capable of measuring high-frequency characteristics with good accuracy.

According to an aspect of the present invention, the measuring device is provided with: the first contact member and the second contact member are respectively pressed to the measurement object; the transmission part is for transmitting electric signals; the transmission substrate is for connecting the first contact member and the second contact member The second contact is electrically connected to the transmission part; and the housing is set to ground potential and supports the first contact, the second contact, the transmission part and the transmission substrate; a high-frequency transmission path is provided on the transmission substrate, The high-frequency transmission line includes a ground line electrically connected to the first contact and a signal line electrically connected to the second contact, and the ground transmission path for the transmission of electrical signals from the transmission part to the measurement object is in the transmission part Further on the measurement object side, it is electrically connected to the case through a conduction line branched from the ground transmission path.

According to another aspect of the present invention, the measuring device is provided with: the first contact piece and the second contact piece are respectively pressed to the measurement object; the transmission part is for transmitting electrical signals; the transmission substrate is for connecting the first contact piece and the second contact piece The second contact is electrically connected to the transmission part; and the housing is set to a ground potential and supports the first contact, the second contact, the transmission part and the transmission substrate; a high-frequency transmission path is provided on the transmission substrate, The high-frequency transmission circuit includes a ground wire electrically connected to the first contact and a signal wire electrically connected to the second contact. The ground transmission path of the electrical signal from the transmission part to the measurement object is through the conductive wire and the housing. For electrical connection, the housing has a supporting member for supporting the measurement object, and the conductive line electrically connects the ground line of the transmission substrate constituting a part of the ground transmission path to the supporting member.

1: Shell

2: The first bracket

3: Second bracket

4: The third bracket

5: Supporting member

5a, 5b: through holes

5c: next door

5d: Groove

5e: The third threaded hole

10: The first contact piece

10a: the first opposite surface

10b: the first front-end opposite surface

11: The first installation department

11a: first flat surface

12: The first mounting hole

12a: the first notch

15: The first terminal part

15a: vertical plane

16: The first inclined surface

20: Second contact piece

20a: the second opposite surface

20b: the second front-end opposite surface

21: The second installation department

21a: second flat surface

22: The second mounting hole

22a: the second notch

25: Second terminal part

25a: vertical plane

26: The second inclined surface

30: base

31: Mobile board

32: First base

32a: the first threaded hole

33:Second base

33a: Second threaded hole

34a: first spring

34b: Second spring

35a: First spring guide

35b: Second spring guide

36: stopper

37: Guidance department

37a: Track

37b: follower

40: Driving mechanism

41: Electric motor

42: Ball screw mechanism

42a: Ball screw

50: coaxial cable

51: Center conductor

52: Insulator

53: Outer conductor

55: Connector

60: Transmission substrate

60a: Slit

60b, 60c: base end slit

61: Substrate

62: The first ground wire

62a: the first through hole

62b: The first backside ground wire

63: signal line

63a: the second insertion hole

63b: Substrate notch

64: Second ground wire

64b: Second back side ground wire

65: Contact side end

65a: first mounting end

65b: Second mounting end

66: Connector side end

66a: Connector connection part

66b: first protrusion

66c: second protrusion

66e, 67c, 67d: through hole

67: Substrate main body

67a: The first main body

67b: Second main body

69a: The first confluence line

69b: Second confluence line

70: branch

70a: the third through hole

71: The first branch

72: The second branch

73: Lead wire

73a: dorsal part

75: The third mounting bolt

80: First mounting bolt

80a, 85a: head

80b, 85b: threaded part

81: First Resin Washer

85: Second mounting bolt

86:Second resin gasket

100: Measuring device

101: Check device

102: Conveyor

103: conveyor table

103a: holding tank

104: Press member

105: Control device

110: first contact piece

112: The third mounting hole

112a: the third gap

120: second contact piece

122: The fourth mounting hole

122a: the fourth gap

160: Transmission substrate

161: The first copper foil substrate

162: Second copper foil substrate

165: The third through hole

165a: first substrate notch

166: The fourth through hole

166a: second substrate notch

180: the first connecting bolt

181: First link washer

185: Second connecting bolt

186:Second connecting washer

200: Measuring device

300: Measuring device

G1: Gap

O1, O2: center

P1: the first imaginary plane

P2: Second imaginary plane

T: measurement object

Fig. 1 is a front view showing a measuring device according to an embodiment of the present invention.

Fig. 2 is a partial cross-sectional view showing a measuring device and an inspection device of an embodiment.

Fig. 3 is a side view of the measuring device of the embodiment.

Fig. 4 is a front view of the measurement device according to the embodiment, with part of the structure omitted.

Fig. 5 is a sectional view of the coaxial cable of the embodiment.

Fig. 6 is a perspective view of the measuring device of the embodiment.

Fig. 7 is a perspective view of the first contact element of the embodiment.

Fig. 8 is a perspective view of the second contact element of the embodiment.

Fig. 9 is a front view showing a first contact and a second contact according to the embodiment.

Fig. 10 is a cross-sectional view along line X-X in Fig. 4 .

Fig. 11 is a plan view showing the surface of the transmission substrate according to the embodiment.

Fig. 12 is a bottom view showing the back surface of the transmission substrate according to the embodiment.

Fig. 13 is a cross-sectional view along line XIII-XIII in Fig. 6 .

Fig. 14 is a front view showing the periphery of the branch portion of the transmission substrate of the measurement device according to the embodiment.

Fig. 15 is a front view showing a measurement device according to a modified example of the embodiment.

Fig. 16 is a side view showing a measurement device according to a modified example of the embodiment.

Fig. 17 is a front view showing a first contact and a second contact according to a modified example of the embodiment.

Fig. 18 is a front view showing a transmission substrate according to a modified example of the embodiment.

Fig. 19 is a front view showing a comparative example of the embodiment.

Hereinafter, measurement devices according to embodiments of the present invention will be described with reference to the drawings. In addition, in each drawing, for convenience of description, the scale of each structure is changed suitably, and it is not necessarily strictly illustrated.

First, an overall configuration of a measurement device 100 according to the embodiment will be described with reference to FIGS. 1 to 5 . Hereinafter, for convenience of description, as shown in FIG. 1 and the like, three axes of X, Y, and Z that are perpendicular to each other are set, and the configuration of the measurement device 100 will be described. In this embodiment, the Z-axis direction is a direction parallel to the vertical direction. FIG. 1 is a front view of the measuring device 100 . FIG. 2 is a partial sectional view showing the measurement device 100 and the inspection device 101 . FIG. 3 is a side view of the measurement device 100 . Fig. 4 is the front view of measuring device 100, which is from In the description of FIG. 1 , diagrams of some configurations are omitted. FIG. 5 is a cross-sectional view of a coaxial cable 50 serving as a transmission unit described later.

As shown in FIGS. 1 and 2 , the measurement device 100 is used in an inspection device 101 for electrically testing a measurement object T (see FIG. 2 ) such as a chip component.

As shown in Figure 1, the inspection device 101 has: a measuring device 100, which is used to measure the electrical characteristics of the measurement object T; a transport device 102, which is used to transport the measurement object T to a measurement position for measuring the electrical characteristics; and a control device 105. Receive the electrical signal applied to the measurement object T, and perform predetermined signal processing.

As shown in FIG. 2 , the measurement device 100 is to measure the electrical characteristics such as the high-frequency characteristics of the measurement object T, and press the first contact piece 10 and the second contact piece 20 to the measurement position at the measurement position from below the vertical direction. Object T, and a transmission mechanism for transmitting electrical signals between the measurement object T and the control device 105 (see FIG. 1 ). For example, the measurement device 100 applies electromagnetic waves of a specific frequency such as hundreds of MHz to several GHz to the measurement object T, and transmits a high-frequency signal generated in the measurement object T to the control device 105 . The measurement of the high-frequency characteristics of the measurement object T is thereby performed. In addition, in the following description, the pressing action of the first contact member 10 and the second contact member 20 on the measurement object T is also referred to as “probing”.

The conveying device 102 has: a conveying table 103 formed with a plurality of accommodating grooves 103a for accommodating the measuring object T; The transport table 103 is a disc-shaped member. A plurality of accommodation grooves 103 a (only one accommodation groove 103 a is shown in FIG. 2 ) is formed radially so as to extend radially from the outer peripheral surface of the transfer table 103 . The index mechanism rotates the conveyance table 103 intermittently around the central axis of the conveyance table 103 as a rotation axis. Thus, the measurement object T accommodated in the storage tank 103a of the transport table 103 is transported to the measurement position, and the measurement device 100 performs high-frequency measure of sex. In addition, the transfer table 103 is rotated by the index mechanism, whereby the measurement object T whose measurement of the high-frequency characteristics is completed is moved out of the measurement position.

Above the conveyance table 103 in the vertical direction is provided a pressing member 104 that suppresses the measurement object T from floating up as it is pressed from the vertically downward direction by the first contactor 10 and the second contactor 20 . Below the conveyance table 103 in the vertical direction, a support member 5 is provided, which constitutes a part of the housing 1 described later and supports the measurement object T. As shown in FIG. The support member 5 is provided with a holder 6 (see FIGS. 2 and 6 ) in which passage holes 5 a and 5 b through which the first contact 10 and the second contact 20 pass are formed. As shown in FIG. 2, the passage holes 5a and 5b are separated by a partition wall 5c. The measurement object T is supported from vertically downward by the partition wall 5 c of the holder 6 provided on the support member 5 , and is restricted from falling out of the storage groove 103 a of the transport table 103 .

Next, the configuration of the measurement device 100 will be described. In addition, in each figure except FIG. 1 and FIG. 2 , the illustration of the structure of the measuring object T, the conveyance table 103, etc. is abbreviate|omitted suitably.

As shown in Fig. 1, Fig. 3 and Fig. 4, the measuring device 100 has: the first contact element 10 and the second contact element 20, which are respectively pressed to the measurement object T; the base part 30, which is equipped with the first contact element 10 and The second contact piece 20 ; and the drive mechanism 40 drive the base 30 to press the first contact piece 10 and the second contact piece 20 toward the measurement object T in a predetermined pressing direction. In addition, the measurement device 100 is equipped with: a coaxial cable 50, which is used as a transmission part to transmit electrical signals input and output to the control device 105; a transmission substrate 60, which is used as a connection part to connect the first contact 10 and the second contact 20 electrically connected to the coaxial cable 50 ; and the connector 55 is used to electrically connect the coaxial cable 50 and the transmission substrate 60 . In this embodiment, the pressing direction is a direction parallel to the Z axis.

In addition, as shown in FIG. 1 , the measurement device 100 includes a first bracket 2 , a second bracket 3 , and a third bracket 4 as members constituting the housing 1 . The housing 1 of the measuring device 100 is directly or indirectly supported A metal structure that supports at least one of the first contact 10 and the second contact 20 , the coaxial cable 50 , and the transmission substrate 60 . Housing 1 is set to ground potential.

A support member 5 is attached to the first bracket 2 . The second bracket 3 is attached to the first bracket 2 and supports the connector 55 . The third bracket 4 is an L-shaped bracket installed on the first bracket 2 and supports the coaxial cable 50 . In this way, the first bracket 2, the second bracket 3, the third bracket 4, and the support member 5 are integrated.

The first contact 10 and the second contact 20 are electrodes each formed of a conductor and pressed against the measurement object T to receive a high-frequency signal. In the present embodiment, the first contact 10 is a ground electrode set at a ground potential, and the second contact 20 is a signal electrode set at a signal potential.

As shown in FIGS. 3 and 4 , the base 30 has: a moving plate 31 driven by a drive mechanism 40 to advance and retreat in the pressing direction; and a first base 32 and a second base 33 arranged to be movable in the pressing direction on the moving plate 31. The first base portion 32 and the second base portion 33 are attached to the moving plate 31 via guide portions 37 , respectively, and are arranged to be relatively movable in the pressing direction with respect to the moving plate 31 . The first base 32 and the second base 33 are configured to be movable independently of each other.

The first contact 10 is mounted on the first base 32 by a first mounting bolt 80 made of metal as a first mounting member in a state of being electrically connected to the high-frequency transmission path of the transmission substrate 60 . The second contact 20 is mounted on the second base 33 by the second mounting bolt 85 made of metal as a second mounting member in a state of being electrically connected to the high-frequency transmission path of the transmission substrate 60 . The specific structure of the first contact 10 and the second contact 20 and the attachment structure to the base 30 will be described in detail later with reference to FIGS. 7 to 10 and the like.

As shown in FIG. 4 , the base 30 is provided with: a first spring 34a, which is used as a first spring pushing member to push the first base 32 toward the measurement object T along the pressing direction; and a second spring 34b, which is used as a second spring. The push member springs the second base 33 toward the measurement object T in the pressing direction. The first spring 34a and the second spring 34b are elastic members for ensuring the pressing force of the first contact 10 and the second contact 20 on the measurement object T, respectively. The moving plate 31 is provided with a first spring guide 35a supporting the first spring 34a, a second spring guide 35b supporting the second spring 34b, and a stopper that abuts on the first base 32 and the second base 33. 36 (refer to Figure 3).

The first spring 34a and the second spring 34b are respectively coil springs. The first spring 34a is provided between the first base 32 and the first spring guide 35a in a compressed state. The second spring 34b is provided between the second base 33 and the second spring guide 35b in a compressed state. The stopper 36 (refer to FIG. 3 ) abuts against the first base 32 and the second base 33, thereby restricting the first base 32 from moving toward the measurement object T due to the biasing force of the first spring 34a and restricting the second base 33 from The biasing force of the second spring 34b moves toward the measurement object T. FIG.

The guide portion 37 has a rail 37a mounted to the moving plate 31 and disposed in the pressing direction, and a follower 37b mounted to the first base 32 or the second base 33 and configured to be slidable along the rail 37a.

The drive mechanism 40 is an actuator that advances and retreats the moving plate 31 of the base 30 in one direction. The driving direction of the base 30 by the driving mechanism 40 corresponds to the pressing direction of the measurement object T by the first contactor 10 and the second contactor 20 (a direction parallel to the Z-axis in this embodiment). The moving plate 31 advances and retreats by the drive mechanism 40 , whereby the first contact 10 and the second contact 20 advance and retreat together with the first base 32 and the second base 33 . That is, the base 30 advances and retreats in the pressing direction by the driving mechanism 40 , whereby the first contact 10 and the second contact 20 come into contact with and separate from the measurement object T. As shown in FIG.

As shown in FIGS. 1 , 3 , etc., the drive mechanism 40 has an electric motor 41 and a ball screw mechanism 42 that converts the rotation of the electric motor 41 into linear motion.

The ball screw mechanism 42 has: a ball screw 42a provided along the pressing direction (Z-axis direction) and rotated by an electric motor 41; Moves in the axial direction of the ball screw 42a.

The moving plate 31 of the base 30 is attached to the ball nut of the ball screw mechanism 42 . When the electric motor 41 is rotationally driven, the rotation of the ball screw 42a is converted into linear motion of the ball nut, and the ball nut moves in the axial direction. Thereby, the moving plate 31 attached to the base 30 of the ball nut is linearly driven in the pressing direction together with the first base 32 and the second base 33 . In addition, the drive mechanism 40 is not limited to the configuration of the present embodiment as long as it can advance and retreat the base portion 30 in one direction. For example, the drive mechanism 40 may use a fluid pressure cylinder or a solenoid (so-called push-pull solenoid) instead of the combination of the electric motor 41 and the ball screw mechanism 42 .

As shown in FIG. 1 , the coaxial cable 50 is electrically connected to a control device 105 that transmits and receives electrical signals for characteristic measurement, and transmits the electrical signals transmitted and received by the control device 105 . As shown in FIG. 5 , the coaxial cable 50 is arranged on a concentric circle with a center conductor 51 as a signal transmission path, an insulator 52 as an insulating layer around the center conductor 51 , and an insulator 52 as a grounding layer around the insulator 52 . The coaxial transmission section formed by the outer conductor 53 of the transmission path.

As shown in FIG. 1 , the transmission substrate 60 is a flexible strip-shaped flexible printed circuit board, and has a laminated structure in which a coplanar line and a coplanar strip line are formed as a high-frequency transmission line. In the transmission substrate 60 , first ground lines 62 , signal lines 63 , and second ground lines 64 as conductor layers are printed on one surface of a base material 61 as an insulating layer, respectively.

One end of the first ground wire 62 is electrically connected to the first contact 10 . One end of the signal line 63 is electrically connected to the second contact 20 . One end of the second ground line 64 is electrically connected to the first ground line 62 . The other end of the first ground wire 62 and the other end of the second ground wire 64 are connected to each other through the connector 55 The outer conductor 53 (see FIG. 5 ) of the coaxial cable 50 is electrically connected. The other end of the signal line 63 is electrically connected to the central conductor 51 (see FIG. 5 ) of the coaxial cable 50 through the connector 55 . The specific structure of the transmission substrate 60 will be described in detail later with reference to FIGS. 11 to 13 .

As shown in Figure 6, the connector 55 is connected to the coaxial cable 50 and clamps the other end of the transmission substrate 60, and connects the first ground wire 62, the signal wire 63 and the second ground wire 64 of the transmission substrate 60 to the coaxial cable respectively. 50 electrical connections. In addition, the connector 55 can adopt a known structure, so further detailed description is omitted.

In order to measure the high-frequency characteristics of the measurement object T, the base 30 is moved forward in the pressing direction (upper in the vertical direction), and the first contact 10 and the second contact 20 are moved from below the vertical direction to the support member 5. The supported measurement object T is in contact.

In the state where the first contact 10 and the second contact 20 are in contact with the measurement object T, the base 30 is further moved upward in the vertical direction, thereby pressing the first contact 10 and the second contact 20 with a predetermined pressing force. It is pressed against the measurement object T to be electrically connected to the measurement object T. When the first contact piece 10 and the second contact piece 20 are further pressed while in contact with the measurement object T, the first base portion 32 and the second base portion 33 compress the first spring 34a and the second spring 34b respectively ( against the elastic thrust) relatively moves with respect to the moving plate 31 (refer to FIG. 3 etc.). The pressing force for pressing the first contact 10 and the second contact 20 against the measurement object T is ensured by the elastic force generated by the compression of the first spring 34 a and the second spring 34 b.

The electric signal output from the first contact 10 and the second contact 20 is transmitted through the high-frequency transmission line of the transmission substrate 60, and is input to the control device 105 (see FIG. 1 ) through the coaxial cable 50 . The transmission substrate 60 can be deformed by an external force, and flexurally deformed as the base 30 is driven by the drive mechanism 40 (see FIG. 1 ). Thereby, relative movement of the base 30 , the first contact 10 , and the second contact 20 relative to the coaxial cable 50 and the connector 55 is allowed along the pressing direction.

Next, specific structures of the first contact 10 and the second contact 20 will be described mainly with reference to FIGS. 7 to 10 .

As shown in FIGS. 7 and 8 , the first contact 10 and the second contact 20 are respectively formed in a plate shape having a uniform thickness and formed in the same shape as each other. In addition, as shown in FIG. 9 , the first contact 10 and the second contact 20 are arranged side by side with a predetermined gap G1 in one direction (X direction; hereinafter also referred to as "adjacent direction") perpendicular to the pressing direction. .

That is, the first contact 10 and the second contact 20 are formed as common components, and are arranged symmetrically (plane symmetrically) with respect to each other with a gap G1 therebetween. Therefore, in the following, the specific structure of the first contact 10 will be mainly described, and the description of the structure of the second contact 20 will be appropriately omitted. In addition, hereinafter, as shown in FIG. 9 , the side of the gap G1 between the first contact 10 and the second contact 20 is also referred to as the "inner side" in the adjacent direction when viewed from the first contact 10 and the second contact 20 respectively. The direction away from the gap G1 is also referred to as "outside".

As shown in FIG. 7 , the first contact 10 has: a first mounting portion 11, which is mounted on the first base portion 32 of the base portion 30, and is electrically connected to the first ground wire 62 of the transmission substrate 60; and a first terminal portion 15, is pressed against the measuring object T. In addition, the first contact 10 is provided with a first opposing surface 10 a that is parallel to the pressing direction and parallel to the plate thickness direction, that is, a surface parallel to the YZ plane. The first opposing surface 10 a is provided over the first mounting portion 11 and the first terminal portion 15 . In other words, the first mounting portion 11 and the first terminal portion 15 are connected inwardly in the adjoining direction via the first opposing surface 10 a without a difference in height.

The first mounting portion 11 is formed in a plate shape having a first flat surface 11 a parallel to the pressing direction. In the first mounting portion 11, the first mounting hole 12 through which the first mounting bolt 80 (see FIG. 4 ) is inserted passes through the plate thickness direction (Y direction) formed. In addition, the first mounting portion 11 is formed with a hole that communicates with the first mounting hole 12 and opens at the outer edge of the first mounting portion 11 . The first notch 12a. The first notch portion 12a is formed to extend outward from the first attachment hole 12 in the adjacent direction (see FIG. 9 ). Accordingly, the first mounting hole 12 is configured not as a closed hole but as an open hole (open hole) formed on the outer edge of the first mounting portion 11 by the first notch portion 12 a.

The first terminal portion 15 is formed to protrude from the first mounting portion 11 toward the measurement object T in the pressing direction. The end surface of the front end of the first terminal portion 15 is formed as a vertical surface 15 a perpendicular to the pressing direction. The vertical surface 15a of the first terminal portion 15 is in contact with the object T to be measured.

In addition, the first terminal portion 15 is formed such that its width dimension (dimension in the X-axis direction) increases from the tip end in contact with the measurement object T to the base end connected to the first attachment portion 11 . More specifically, in the first terminal part 15, the inner side (the second contact 20 side) in the adjoining direction is formed as the first facing surface 10a parallel to the pressing direction, and the outer side (the side opposite to the second contact 20) is formed It is the first inclined surface 16 inclined with respect to the pressing direction. As shown in FIG. 9 , the first inclined surface 16 is formed such that the center O1 of the first attachment hole 12 is disposed on the inner side in the adjacent direction from the first virtual plane P1 including the first inclined surface 16 .

Like the first contact 10 , the second contact 20 has a second mounting portion 21 and a second terminal portion 25 as shown in FIG. 8 . The second mounting portion 21 is formed with a second mounting hole 22 through which the second mounting bolt 85 is inserted, and a second notch portion 22 a communicating with the second mounting hole 22 and forming an opening on the outer edge of the second mounting portion 21 . The vertical surface 25a at the front end of the second terminal portion 25 is in contact with the object T to be measured. In the second contact 20 , a second opposing surface 20 a is provided over the second mounting portion 21 and the second terminal portion 25 . In addition, a second inclined surface 26 is formed on the outer side of the second terminal portion 25 in the adjacent direction. As shown in FIG. 9 , the second inclined surface 26 is formed such that the center O2 of the second attachment hole 22 is disposed on the inner side in the adjacent direction from the second virtual plane P2 including the second inclined surface 26 .

In the detection of the measurement object T, the detected reaction force is transmitted to the first mounting bolt 80 and the second mounting bolt 85 through the first contact 10 and the second contact 20 (refer to FIG. 4 and the like). In contrast to this, In this embodiment, the center O1 of the first mounting hole 12 is arranged on the inner side in the adjoining direction of the first imaginary plane P1 including the first inclined surface 16, and the center O2 of the second mounting hole 22 is arranged on the inner side than the first imaginary plane P1 including the first inclined surface 16. The second imaginary plane P2 of the two inclined surfaces 26 is closer to the inner side in the adjoining direction. Accordingly, the detected reaction forces are respectively transmitted to the first mounting bolt 80 and the second mounting bolt 85 so that the reaction force acts on the central axes of the first mounting bolt 80 and the second mounting bolt 85 . In this way, the detected reaction force can act on the central axes of the first mounting bolt 80 and the second mounting bolt 85 , so that the first mounting bolt 80 and the second mounting bolt 85 can be prevented from loosening due to the reaction force.

In addition, in this embodiment, the 1st inclined surface 16 and the 2nd inclined surface 26 are each linear (flat surface shape) tapered surface. In contrast, the first inclined surface 16 and the second inclined surface 26 are not limited to tapered surfaces. The first inclined surface 16 and the second inclined surface 26 may be formed as curved surfaces, for example, as long as they are formed to be inclined with respect to the pressing direction.

The first contact 10 and the second contact 20 are arranged so that the first opposing surface 10 a and the second opposing surface 20 a are parallel to each other with a predetermined interval therebetween, and are arranged side by side in the adjoining direction. The first opposing surface 10 a and the second opposing surface 20 a are planes perpendicular to the adjoining direction, respectively. The distance between the first opposing surface 10a and the second opposing surface 20a is set so that the bonding strength between the first mounting portion 11 and the second mounting portion 21 reaches a desired strength, in other words, the transmission path achieves a desired characteristic impedance (such as 50Ω).

In addition, the first opposing surface 10a and the second opposing surface 20a are formed so that the interval between a part pressed toward the front end side of the measurement object T is wider than the interval between other parts. Specifically, a part of the first facing surface 10a on the front end side continuous with the vertical surface 15a at the front end of the first terminal portion 15 (hereinafter referred to as "first front facing surface 10b") is located on a lower side than the first facing surface. The other part of the surface 10a is on the outside in the adjoining direction. Similarly, a part of the second facing surface 20a on the front end side continuous with the vertical surface 25a at the front end of the second terminal portion 25 (hereinafter referred to as "second front facing surface 20b") is located on a lower side than the second facing surface. The other part of 20a is in the adjacent direction outside. The distance between the first front-end facing surface 10 b and the second front-end facing surface 20 b in the adjoining direction is set to match the size of the measurement object T that contacts the first contact 10 and the second contact 20 . Therefore, the first front-end facing surface 10b is positioned on the inside of the first facing surface 10a in the adjacent direction, and the second front-end facing surface 20b is positioned on the inside of the second facing surface 20a in the adjacent direction.

Next, the mounting structure of the first contact 10 and the second contact 20 will be described mainly with reference to FIG. 10 .

As shown in FIG. 10 , the first mounting bolt 80 has a head portion 80 a and a threaded portion 80 b screwed into the first threaded hole 32 a formed in the first base portion 32 . Similarly, the second mounting bolt 85 has a head portion 85 a and a threaded portion 85 b screwed into the second threaded hole 33 a formed in the second base portion 33 .

Between the first mounting portion 11 of the first contact 10 and the head portion 80a of the first mounting bolt 80, a first resin washer 81 as an insulating member formed of resin as an insulating material is provided. The first mounting bolt 80 is inserted through the first resin washer 81 , the first mounting hole 12 of the first mounting portion 11 , and the first insertion hole 62 a of the transmission substrate 60 described later, and is screwed to the first threaded hole 32 a of the first base portion 32 . combine. Thus, the first contacts 10 and the transmission substrate 60 are mounted on the first base 32 by the first mounting bolts 80 . In addition, the first mounting portion 11 of the first contact 10 is prevented from being in direct contact with the head 80a of the first mounting bolt 80 by the first resin washer 81, thereby insulating the first contact 10 from the first mounting bolt 80. .

Like the first contact 10 , a second resin washer 86 made of resin as an insulating member is provided between the second mounting portion 21 of the second contact 20 and the head portion 85 a of the second mounting bolt 85 . The second mounting bolt 85 is inserted through the second resin washer 86 , the second mounting hole 22 of the second mounting portion 21 , and the second insertion hole 63 a of the transmission board 60 described later, and is screwed with the second threaded hole 33 a of the second base portion 33 . close, thereby mounting the second contact 20 and the transmission substrate 60 on the second base 33 . In addition, the second contact piece 20 is connected to the The second mounting bolt 85 is insulated. In addition, the first insulating member and the second insulating member are not limited to being made of resin, and may be formed of other materials as insulating materials.

Next, a specific structure of the transmission substrate 60 will be described mainly with reference to FIGS. 11 to 13 . FIG. 11 is a plan view viewed from one surface (front) of the transmission substrate 60 , and FIG. 12 is a bottom view viewed from the other surface (rear surface) of the transmission substrate 60 .

The base material 61 of the transmission substrate 60 is formed of a flexible material. The first ground line 62 , the second ground line 64 , and the signal line 63 are each extended so as to have predetermined widths along the longitudinal direction of the strip-shaped substrate 61 . The signal line 63 is provided at a position sandwiched between the first ground line 62 and the second ground line 64 in the width direction (left-right direction in FIG. 11 ) perpendicular to the long-side direction of the transmission substrate 60, and is connected to the first The ground line 62 and the second ground line 64 are separated by a predetermined interval.

The transmission substrate 60 is divided in its longitudinal direction into: a contact-side end portion 65 on which the first contact 10 and the second contact 20 are mounted; a connection to the coaxial cable 50 via the connector 55 (see FIG. 1 ). the device-side end portion 66 ; and the substrate main body portion 67 provided between the contact-side end portion 65 and the connector-side end portion 66 .

The first ground line 62 and the signal line 63 are provided as contacts extending from the connector-side end portion 66 of the transmission substrate 60 connected to the connector 55 to the transmission substrate 60 on which the first contacts 10 and the second contacts 20 are mounted. Part side end 65. On the other hand, the second ground wire 64 is provided only in the middle portion in the longitudinal direction from the connector-side end portion 66 to the board main body portion 67 .

A slit 60 a extending in the longitudinal direction of the transmission substrate 60 is formed at the contact-side end portion 65 of the transmission substrate 60 . Thus, the contact-side end portion 65 of the transmission substrate 60 is divided by the slit 60 a into a first mounting end portion 65 a on which the first contact 10 is mounted and a second mounting end portion 65 b on which the second contact 20 is mounted.

One end of the first ground wire 62 is provided at the first mounting end portion 65 a, and a first insertion hole 62 a through which the first mounting bolt 80 is inserted is formed to penetrate the first ground wire 62 . The following will also The portion of the first ground wire 62 that is in direct contact with the first contact 10 is referred to as the “front end portion” of the first ground wire 62 .

One end portion of the signal line 63 is provided at the second mounting end portion 65 b, and the second insertion hole 63 a through which the second mounting bolt 85 is inserted is formed to pass through the signal line 63 . The first attachment end portion 65a and the second attachment end portion 65b are separated by the slit 60a, thereby being configured to be movable (deformable) independently of each other. In addition, the first mounting end portion 65a and the second mounting end portion 65b conform to the shape of the first contact 10 and the second contact 20 to be mounted, and the width dimension is formed to be wide.

The slit 60 a is provided to extend from the front end (front edge) of the contact-side end 65 of the transmission substrate 60 to the connector 55 side in the longitudinal direction beyond the first contact 10 and the second contact 20 ( Refer to Figure 6).

Moreover, the board notch part 63b which communicates with the outer edge of the 2nd mounting end part 65b and the 2nd insertion hole 63a is formed in the 2nd mounting end part 65b. That is to say, the second insertion hole 63a is formed in the same manner as the first mounting hole 12 of the first contact 10 and the second mounting hole 22 of the second contact 20 for the second mounting on the transmission substrate 60 through the substrate notch 63b. The outer edge of the end portion 65b forms an open hole (open hole) rather than a circumferentially closed hole. The substrate cutout portion 63 b is formed in a linear shape extending in the adjoining direction between the first contact 10 and the second contact 20 (in other words, the width direction perpendicular to the longitudinal direction of the transmission substrate 60 ).

The connector-side end portion 66 of the transmission board 60 is sandwiched by the connector 55 in the thickness direction (the direction perpendicular to the longitudinal direction and the width direction; the direction perpendicular to the paper surface in FIG. 11 ), thereby being connected to the connector 55 (see Figure 6). The connector side end portion 66 is provided with: a connector connecting portion 66a, which is arranged side by side with a first ground wire 62, a signal wire 63, and a second ground wire 64 and is clamped by the connector 55; and a first protrusion 66b and a second ground wire 66a. The two protruding portions 66c extend from both sides of the connector connecting portion 66a in the width direction of the transmission substrate 60 to the outside in the width direction respectively. The first protrusion 66 b and the second protrusion 66 c are also held by the connector 55 .

The first ground wire 62 is provided on one surface of the first protruding portion 66b. The second ground wire 64 is provided on one surface of the second protruding portion 66c. In addition, the first protruding portion 66 b and the second protruding portion 66 c are arranged in the width direction of the transmission substrate 60 with a predetermined gap with respect to the substrate main body portion 67 . That is, in the width direction of the transmission substrate 60, between the first protrusion 66b and the second protrusion 66c and the substrate main body 67, the base end slits 60b, 60c. Thereby, the substrate main body portion 67 is easily moved relative to the connector-side end portion 66 .

Furthermore, as shown in FIG. 12 , as conductor layers, a first backside ground line 62 b and a second backside ground line 64 b are provided on the back surface of the connector-side end portion 66 . The first backside ground wire 62b is electrically connected to the first ground wire 62 on the surface through the through hole 66d. The second backside grounding line 64b passes through the through hole 66e and is electrically connected to the second grounding line 64 on the surface. The portion where the first backside ground line 62b and the second backside ground line 64b are provided is thicker than the portion where the conductor layer is not provided (the base material 61 is exposed) on the backside. Thereby, the part provided with the 1st backside ground wire 62b and the part provided with the 2nd backside ground wire 64b which are thicker than other parts are firmly sandwiched by the connector 55. As shown in FIG. Therefore, the first ground wire 62 and the second ground wire 64 can be reliably connected to the outer conductor 53 of the coaxial cable 50 through the connector 55 (see FIG. 1 ). Hereinafter, the portion of the first ground wire 62 sandwiched by the connector 55 and in direct contact with the connector 55 is also referred to as a “base end portion” of the first ground wire 62 .

As shown in FIG. 11, the substrate main body 67 has: a first main body 67a, which is provided with a first ground line 62, a second ground line 64, and a signal line 63; and a second main body 67b, which is provided with a first ground line. line 62 and signal line 63, but the second ground line 64 is not provided. The first body portion 67 a is connected to the connector-side end portion 66 , and the second body portion 67 b is connected to the contact-side end portion 65 . Due to the provision of the second ground wire 64 , the width of the first body portion 67 a is wider than that of the second body portion 67 b, and a step is formed between the first body portion 67 a and the second body portion 67 b.

That is, in the connector side end portion 66 and the first body portion 67a of the board body portion 67, a so-called common circuit having a line structure of G (ground)-S (signal)-G (ground) is provided as a high-frequency transmission path. surface lines. In addition, a so-called coplanar strip line having a G-S line structure is provided as a high-frequency transmission path on the second body portion 67b of the substrate body portion 67 and the contact-side end portion 65 .

As shown in FIG. 12 , a junction line serving as a conductor layer electrically connecting the first ground line 62 and the second ground line 64 is formed on the back surface of the first main body portion 67 a. In this embodiment, both the 1st merging line 69a and the 2nd merging line 69b are provided as a merging line. The first junction line 69a is electrically connected to the first ground line 62 on the surface of the transmission substrate 60 through the through hole 67c, and is electrically connected to the second ground line 64 on the surface through the through hole 67d. In addition, the second junction line 69b is electrically connected to the first ground line 62 on the surface of the transmission substrate 60 through the through hole 67c, and is electrically connected to the second ground line 64 on the surface through the through hole 67d.

Thus, in this embodiment, the first ground line 62 and the second ground line 64 are electrically connected by the first junction line 69a and the second junction line 69b, thereby connecting the high-frequency transmission line from the connector side end 66 The G-S-G coplanar line is converted into a G-S coplanar strip line.

Further, as shown in FIG. 11 , a branch portion 70 is provided in the base material 61 of the contact-side end portion 65 of the transmission substrate 60 so as to branch from the side portion of the first mounting end portion 65 a. In other words, the branch portion 70 is a part of the base material 61 . The branch portion 70 has: a first branch portion 71 whose base end is connected to the side portion of the first mounting end portion 65a and extends from the base end toward the width direction of the transmission substrate 60; and a second branch portion 72 extending from the first branch portion. The end portion of the branch portion 71 extends in the longitudinal direction of the transmission substrate 60 , and the branch portion 70 is formed in a substantially L-shape in plan view.

The branch portion 70 is provided with a conduction wire 73 that electrically connects the first ground wire 62 and the support member 5 (see FIG. 6 ) of the casing 1 . The conductive line 73 is provided on one surface of the base material 61 constituting the branch portion 70 . Conduction line 73 is A conductive layer (printed wiring) continuous with the first ground line 62 and formed on one surface of the base material 61 . By forming the via line 73 in the form of a conductive layer continuous with the first ground line 62, the via line 73 is easily formed.

As shown in FIG.6 and FIG.13, the 2nd branch part 72 is attached to the support member 5 by the metal 3rd attachment bolt 75 which is a 3rd attachment member. A third insertion hole 70 a through which a third attachment bolt 75 is inserted is formed in the second branch portion 72 (see FIG. 11 ).

In addition, as shown in FIG. 12 , the conductive wire 73 is provided to the rear surface of the base material 61 through the third insertion hole 70 a. The branch portion 70 is fixed to the support member 5 by the third mounting bolt 75 in a state where the back side portion 73 a of the conductive wire 73 is in contact with the surface of the support member 5 (see FIG. 6 ). In this way, the first ground wire 62 and the supporting member 5 are electrically connected by the conductive wire 73 . In addition, a connection portion (hereinafter also referred to as “conduction portion”) between the conduction wire 73 and the first ground wire 62 is provided at a position of the first ground wire 62 away from the base end portion toward the front end portion. The fact that the conduction part is away from the base end from the front end means that the conduction part and the base end are different parts rather than the same part.

As shown in FIG. 13 , a groove portion 5 d for accommodating the branch portion 70 of the transfer substrate 60 and for attaching the branch portion 70 is formed in the support member 5 . The third threaded hole 5e into which the third mounting bolt 75 of the mounting branch portion 70 is screwed is formed in the groove portion 5d. The groove portion 5d is formed in any of a direction (X-axis direction) relative to the pressing direction (Z-axis direction) and a direction (X-axis direction) perpendicular to the first flat surface 11a of the first contact 10 (second flat surface 21a of the second contact 20 ). One direction is formed at an inclined angle. That is, the second branch portion 72 of the branch portion 70 is attached to the support member 5 so that the XZ plane is arranged on a plane that rotates (inclines) around the X axis. Accordingly, the central axis of the third mounting bolt 75 to which the branch portion 70 is mounted is inclined with respect to the pressing direction.

As shown in FIG. 1 and the like, the measurement device 100 has a structure extending as a whole on the XZ plane including the pressing direction. Therefore, when the central axis of the third mounting bolt 75 extends parallel to the XZ plane, a device such as a driver for rotating the bolt easily interferes with the components of the measurement device 100 . by this Mode of Implementation The third mounting bolt 75 is arranged to be inclined relative to the XZ plane, so as to avoid interference between the appliance and the components, and facilitate the installation work.

In addition, the branch portion 70 is attached to the supporting member 5, and thus relatively moves with respect to the contact-side end portion 65 of the transmission substrate 60 at the time of detection. When the branch portion 70 is attached to the support member 5 in parallel to the pressing direction (in other words, in such a way that the branch portion 70 extends on the XZ plane including the pressing direction), the branch portion 70 is connected to the contact side end of the transmission substrate 60 The relative movement between the parts 65 deforms in the thickness direction of the transmission substrate 60 . Such deformation in the thickness direction may be deformed so as to protrude toward one side of the Y-axis direction, and on the other hand, contrary to the above case, may be deformed so as to be concave, which lacks reproducibility. Therefore, when the branch portion 70 is attached to the supporting member 5 so as to be parallel to the pressing direction, there is a possibility that the characteristic impedance of the transmission path may fluctuate. Thereby, there exists a possibility that measurement precision may fall.

On the other hand, in the present embodiment, the second branch portion 72 of the branch portion 70 is inclined with respect to the pressing direction, in other words, as shown in FIG. The structure of the supporting member 5. Therefore, when a relative movement occurs with the contact-side end portion 65 of the transmission substrate 60 due to probing, the branch portion 70 deforms in a bending direction as shown by arrow A in the figure to absorb the relative movement. Thus, by providing the branch portion 70 in a bent manner, the reproducibility of the deformation caused by the relative movement with the contact-side end portion 65 can be improved, so that the fluctuation of the characteristic impedance accompanying the deformation of the branch portion 70 can be suppressed. Improve measurement accuracy.

Here, in order to facilitate understanding of this embodiment, a measurement device 300 of a comparative example of this embodiment will be described with reference to FIG. 19 . In addition, in the comparative example, about the same structure as the above-mentioned embodiment, the same element code|symbol as the above-mentioned embodiment is attached|subjected, and description is abbreviate|omitted.

In general, in a measuring device that measures high-frequency characteristics of a measurement object, when a mismatch of characteristic impedance in a transmission path for measuring high-frequency characteristics occurs, the measurement device may be disconnected. The hidden danger of reducing the accuracy of the measurement. Therefore, the measurement device is required to match the characteristic impedance of the transmission path with good precision to improve the measurement accuracy.

The measurement device 300 of the comparative example is different from the above-mentioned embodiment in that it does not have the branch portion 70 and the conductive line 73 provided on the transmission substrate 60 in the above-mentioned embodiment, and the connection between the first contact 10 and the first mounting bolt 80 is not provided. The first resin washer 81 and the second resin washer 86 between the second contact piece 20 and the second mounting bolt 85 are formed on the first notch portion 12a and the second contact piece 10 and the second contact piece 20 respectively. The notch 22 a is formed on the substrate notch 63 b of the second mounting end portion 65 b of the transmission substrate 60 and the second ground wire 64 .

In such a comparative example, there is a possibility that the proximity portion of the first contact 10 and the second contact 20 will be in contact with the housing 1 (more specifically, the housing 1 with the ground potential for the first contact 10 and the second contact). The support member 5) through the holes 5a, 5b through which the contact 20 is inserted is capacitively coupled (part B in the figure). Thus, it is possible to use the first contact piece 10, the first ground wire 62, the connector 55, and the housing 1 including the support member 5, the first bracket 2, and the second bracket 3, as shown in FIG. 19 An undesired transmission path is formed as indicated by the arrow.

On the other hand, when the length of the transmission path is shorter than the wavelength of the electrical signal for measurement (for example, when the length of the transmission path is less than about 1/20 of the wavelength), the transmission path of the electric signal can be regarded as The so-called lumped constant circuit can ignore potential fluctuations in the transmission path. However, if the length of the transmission path is longer than the wavelength of the electrical signal for measurement, it functions as a so-called distributed constant circuit. In the transmission path, for example, the potential oscillates to show a sine wave along the transmission path. . That is, since the wavelength becomes shorter as the frequency of the electrical signal for measurement is higher, it is easy to function as a distributed constant circuit.

Therefore, when an undesired transmission path occurs due to capacitive coupling between the first contact 10 and the support member 5 and the transmission path functions as a distributed constant circuit, the ground potential is set to the ground potential. The potentials of the first contact 10 and the support member 5 in the path will vibrate. When the ground potential of the first contact 10 and the support member 5 vibrates and becomes unstable, the original transmission path (coaxial cable 50, transmission substrate 60, first contact 10, and second contact) for transmitting the electrical signal for measurement The characteristic impedance on the component 20) will become insufficiently matched.

On the other hand, in the measurement device 100 of the present embodiment, the conduction portion of the first ground wire 62 is electrically connected to the supporting member 5 via the conduction wire 73 . Thus, even when an undesired transmission path is formed due to the capacitive coupling between the first contact 10 and the supporting member 5, as shown in FIG. 1 to form an undesired transmission path, but will be composed of the first contact 10, a part of the first ground wire 62 from the first contact 10 to the conductive wire 73, the conductive wire 73, and the support member 5. An undesired transmission path is constituted by a relatively short path from the portion to which the conductive line 73 is connected to the portion capacitively coupled with the first contact 10 . Therefore, since the length of the transmission path becomes shorter than the wavelength of the electric signal, it is possible to suppress fluctuations in potential on the transmission path set to the ground potential.

That is, in the measurement device 100, the conduction portion of the first ground wire 62 in the middle of the transmission path is also provided with ground, so the vibration of the potential on the transmission path can be suppressed, and the characteristic impedance on the transmission path can be fully realized. match. Therefore, the measurement accuracy of the measurement device 100 can be improved.

In addition, in order to shorten the path length of the undesirably formed transmission path, it is preferable to form the conduction portion of the first ground line 62 so as to be directly connected to the front end thereof as in the present embodiment. From another viewpoint, it is preferable that a part of the front end function as a conduction part and be connected to the support member 5 via the conduction wire 73 . However, as long as the conduction part is located on the first ground line 62, the conduction part may be provided at any position.

In addition, it is preferable that the conducting wire 73 is mechanically and directly connected to the support member 5 capacitively coupled with the first contact 10 and the second contact 20 . However, for example, the conductive wire 73 may also be connected to the first bracket 2, etc. are connected to the components of the housing 1 other than the support member 5 of the support member 5. In other words, the conduction wire 73 may be indirectly connected to the support member 5 via other members of the housing 1 . In addition, the conductive line 73 is not limited to the printed wiring provided on the surface of the transmission substrate 60 .

In addition, in the measuring device 300 of the comparative example, the metal first mounting bolt 80 is in direct contact with the first contact 10 and is not insulated from the first contact 10 . Likewise, the metal second mounting bolt 85 is in direct contact with the second contact 20 and is not insulated from the second contact 20 .

Therefore, the first mounting bolt 80 and the second mounting bolt 85 are configured as stubs on the transmission path. Except for the part of the electrical signal transmitted from the high-frequency transmission path of the transmission substrate 60 to the first contact 10 and the second contact 20 directly from the high-frequency transmission path to the first contact 10 and the second contact 20, a part It is also transmitted from the high-frequency transmission path to the first contact piece 10 and the second contact piece 20 via the first mounting bolt 80 and the second mounting bolt 85 formed as stubs. That is, a part of the electric signal transmitted between the high-frequency transmission path and the first contact 10 and the second contact 20 is detour-transmitted via the first mounting bolt 80 and the second mounting bolt 85 . A signal passing through such a detoured transmission path is a signal whose phase is shifted from a signal directly transmitted without detour. Therefore, since an electrical signal including a signal whose phase is shifted is input to the measurement object T, the measurement accuracy of the high-frequency characteristic is lowered.

In addition, when the path through which the electrical signal is directly transmitted to the measurement object T merges with the detoured transmission path, reflection of the signal will also occur, so that the transmission characteristic will deteriorate. From another point of view, with respect to the high-frequency transmission path and the transmission path between the first contact 10 and the second contact 20, the first mounting bolt 80 and the second mounting bolt 85 are electrically connected to form a stub, Therefore, the characteristic impedance of the portion where the first mounting bolt 80 and the second mounting bolt 85 are electrically connected is different from the characteristic impedance of other transmission paths. As a result, a mismatch of characteristic impedance occurs and the transmission characteristic deteriorates.

In contrast, in this embodiment, the first mounting bolt 80 and the second mounting bolt 85 are insulated from the first contact 10 and the second contact 20 by the first resin washer 81 and the second resin washer 86, respectively. . Accordingly, since the first mounting bolt 80 and the second mounting bolt 85 are not formed as stubs on the transmission path, the transmission characteristic can be improved, in other words, the characteristic impedance can be matched, and the measurement accuracy can be improved.

Furthermore, in the measurement device 300 of the comparative example, the first mounting hole 12 of the first mounting portion 11 of the first contact 10 , the second mounting hole 22 of the first mounting portion 11 of the second contact 20 , and the transmission substrate 60 The second insertion holes 63a of the second mounting end portion 65b are formed as closed circular holes, respectively. Therefore, the electrical signal transmitted through the transmission path generates a magnetic field by circulating around the first mounting hole 12 , the second mounting hole 22 , and the second insertion hole 63 a. That is, the electrical signal flows around the first mounting hole 12, the second mounting hole 22, and the first insertion hole 62a, thereby constituting a loop antenna in appearance, and part of the energy of the electrical signal is in the form of electromagnetic waves. radiate into space. As a result, the electrical signal applied to the measurement object T is attenuated, and thus the measurement accuracy of the measurement device 300 decreases.

In contrast, in this embodiment, the first mounting hole 12 of the first contact 10, the second mounting hole 22 of the second contact 20, and the second insertion hole 63a of the transmission substrate 60 are respectively connected to the first notch. 12a, the second notch 22a and the substrate notch 63b communicate. Through the first notch 12a, the second notch 22a and the substrate notch 63b, the first mounting hole 12, the second mounting hole 22 and the second insertion hole 63a are respectively configured as open holes to prevent electric signals from going around. Thereby, the radiation of an electric signal can be suppressed, and the fall of measurement precision can be prevented.

In addition, in general, in a measurement device, there may be a limitation that only two contacts of the first contact and the second contact must be used as the contacts due to the specifications of the inspection device or the measurement object. In this case, in general, as in the measuring device 300 of the comparative example, A ground line (first ground line 62 ) and a signal line 63 are provided on the transmission substrate 60 , that is, a coplanar strip line having a G-S line structure is provided.

On the other hand, in the present embodiment, a coplanar strip line having a G-S line structure is provided at the contact-side end 65 of the transmission substrate 60 , while a connector-side end 66 of the transmission substrate 60 is provided with a G-S line structure. There are coplanar lines with a G-S-G line structure. In the transmission substrate 60, the first ground line 62 and the second ground line 64 are connected to each other by the first junction line 69a and the second junction line 69b provided on the substrate main body 67, and the high-frequency transmission path is converted from a coplanar line. It is a coplanar stripline. The coplanar line is more resistant to noise than the coplanar strip line and suppresses changes in characteristic impedance when switching from the coaxial cable 50, so it is easier to match the characteristic impedance than the coplanar strip line. In this way, in the measurement device 100, even when the number of contacts is limited to two, since a part of the transmission line in the high-frequency transmission line is configured as a coplanar line, the high-frequency transmission line with the transmission substrate 60 Compared with the comparative example composed only of the coplanar strip line, it is easier to achieve impedance matching, and the measurement accuracy can be improved.

Next, modifications of the above-described embodiment will be described. Modifications described below are also within the scope of the present invention, and the following modifications can be combined with each structure of the above-mentioned embodiment, or the following modifications can be combined with each other. In addition, in each modified example, the same reference numerals are attached to the same components as those in the above-mentioned embodiment, and description thereof will be omitted.

(1) In the above-mentioned embodiment, the connecting portion is the flexible transmission substrate 60 (flexible printed circuit board). On the other hand, as long as relative movement between the first contact 10 and the second contact 20 (in other words, the base 30 ) and the coaxial cable 50 is at least allowed, the connection part may not have flexibility.

In the first modified example shown in FIGS. 15 to 18 , the transmission substrate 160 as the connection part includes: a first copper foil substrate 161 as an electrical connection between the outer conductor 53 on the outer periphery of the coaxial cable 50 and the first contact 110 . The ground wire of connection; And the second copper foil substrate 162, is as will be in the center The signal line electrically connected to the central conductor 51 and the second contact 120 . The first copper-clad substrate 161 and the second copper-clad substrate 162 are respectively constituted by plate members, and are provided so as to be spaced apart from each other at predetermined intervals in the adjoining direction (see FIG. 15 ).

As shown in FIG. 16 , in the first copper foil substrate 161 , one end is connected to the outer conductor 53 of the coaxial cable 50 by means such as welding, and the other end is connected to the first contact 110 and the first base by the first connecting bolt 180 32. One end of the second copper foil substrate 162 is connected to the central conductor 51 of the coaxial cable 50 by welding or other means, and the other end is connected to the second contact 120 and the second base 33 by the second connecting bolt 185 .

In addition, as shown in FIG. 15 , a resin-made first connection washer 181 as an insulating member is provided between the first contact 110 and the first connection bolt 180 . A second connection washer 186 is provided between the second contact 120 and the second connection bolt 185 . Accordingly, it is possible to prevent the first fastening bolt 180 and the second fastening bolt 185 from being formed as stubs on the transmission path, and it is possible to improve the measurement accuracy of the measurement device 200 .

In addition, in the first modified example, as shown in FIG. In addition to the first notch 12a that communicates with the first mounting hole 12, a third mounting hole 112 for the first connecting bolt 180 to pass through, and a third mounting hole 112 that communicates with the third mounting hole 112 and is formed on the first contact piece are formed. The outer edge of 110 forms an open third notch portion 112a. In the second contact piece 120, in addition to forming the second mounting hole 22 and the second notch 22a through which the second mounting bolt 85 for mounting the second contact piece 120 to the second base portion 33 is inserted, there are also formed holes for The fourth mounting hole 122 through which the second fastening bolt 185 is inserted, and the fourth notch 122 a communicating with the fourth mounting hole 122 and forming an opening on the outer edge of the second contact 120 .

As shown in FIG. 18, a third insertion hole 165 for the insertion of the first connecting bolt 180 is formed on the first copper foil substrate 161, and communicates with the third insertion hole 165 and is outside the first copper foil substrate 161. edge forming The opening of the first substrate notch 165a. Formed in the second copper foil substrate 162 is a fourth insertion hole 166 through which the second fastening bolt 185 is inserted, and a second through hole 166 communicating with the fourth insertion hole 166 and forming an opening on the outer edge of the second copper foil substrate 162 . The substrate notch 166a.

In this way, the first mounting hole 12 and the third mounting hole 112 of the first contact 110 formed on the transmission path, the second mounting hole 22 and the fourth mounting hole 122 of the second contact 120 , the first copper foil substrate 161 The third insertion hole 165 of the second copper foil substrate 162 and the fourth insertion hole 166 of the second copper foil substrate 162 are respectively configured as open holes rather than closed holes. Therefore, similar to the above-mentioned embodiment, it is possible to suppress electrical signals passing through the first mounting hole 12, the second mounting hole 22, the third mounting hole 112, the fourth mounting hole 122, the third insertion hole 165, and the fourth insertion hole. The surrounding holes 166 can improve the measuring accuracy of the measuring device 200 .

In addition, in the first modified example, although illustration is omitted, a conduction line serving as a ground line electrically connecting the first copper-clad substrate 161 and the support member 5 may be provided similarly to the above-mentioned embodiment. Thus, even when a transmission path is unexpectedly formed due to capacitive coupling between the first contact 10 and the supporting member 5, since the ground is provided on the first copper foil substrate 161, the unexpected transmission can be shortened. The path length of the path can suppress fluctuations in potential on the ground transmission path. Therefore, the vibration of the potential on the transmission line can be suppressed, and the matching of the characteristic impedance on the transmission line can be sufficiently realized. Therefore, the measurement accuracy of the measurement device 100 can be improved.

(2) In addition, in the above-mentioned embodiment, the transmission substrate 60 is a flexible printed substrate having flexibility. On the other hand, the flexible transmission substrate may be a rigid-flex substrate including a flexible portion and a non-flexible portion.

(3) In addition, in the above-mentioned embodiment, as shown in FIG. first mounting screw The bolt 80 is insulated. Similarly, a second resin washer 86 is provided between the second contact 20 and the second metal mounting bolt 85 , and the second contact 20 is insulated from the second mounting bolt 85 .

On the other hand, as a structure for insulating the first mounting bolt 80 and the second mounting bolt 85 from the first contact 10 and the second contact 20, the first mounting bolt 80 and the second mounting bolt 85 themselves may be It is formed of resin as an insulating material without using the first resin spacer 81 and the second resin spacer 86 . Also in this case, the first mounting bolt 80 and the second mounting bolt 85 can be prevented from being formed as stubs on the transmission path, and thus the measurement accuracy of the measuring device 100 can be improved.

In addition, from the viewpoint of suppressing the reduction in measurement accuracy caused by the first mounting bolt 80 and the second mounting bolt 85 forming a stub line, it is desirable that the first contact 10 and the second contact 20 are respectively connected to the first mounting bolt 80 and the second mounting bolt 85. The bolt 80 and the second mounting bolt 85 are insulated. However, from the viewpoint of suppressing the reduction in measurement accuracy due to stubs, the structure in which both the first contact 10 and the second contact 20 are insulated from the first mounting bolt 80 and the second mounting bolt 85 is not essential. , as long as at least one side is insulated from the corresponding first mounting bolt 80 and second mounting bolt 85 (for mounting itself on the base 30 ).

(4) In addition, the first mounting member and the second mounting member are not limited to the first mounting bolt 80 and the second mounting bolt 85 . As the first mounting member and the second mounting member, press-fit pins that are press-fitted into the first base portion 32 and the second base portion 33 can also be used. In addition, the first mounting member and the second mounting member do not have to be detachably configured like the first mounting bolts 80 and the second mounting bolts 85 . In these cases, resin gaskets can be used to insulate the first mounting member and the second mounting member from the first contact piece 10 and the second contact piece 20 respectively, or the first mounting member and the second mounting member themselves can be made of an insulating material. Formed so as to be insulated from the first contact 10 and the second contact 20 .

(5) Furthermore, in the above-described embodiment, the conductive line 73 electrically connects the first ground line 62 of the transmission substrate 60 and the supporting member 5 . In contrast, as long as the above-mentioned unintended transmission path can be The length of the diameter is shortened, and the conduction wire 73 is not limited to the structure that electrically connects the first ground wire 62 and the support member 5 .

For example, in the measurement device 100 , a conduction wire electrically connecting the connector 55 and the supporting member 5 may be provided. In addition, a conducting wire may be provided to electrically connect the first contact 10 and the supporting member 5 . In these cases, even if an unintended transmission path occurs, the path length can be made shorter than that of the comparative example (see FIG. 19 ), so the same effects as those of the above-mentioned embodiment can be exhibited. In other words, the conduction line only needs to be a structure that electrically connects any part of the ground transmission path of the electrical signal from the coaxial cable 50 to the measurement object T to the support member 5 (housing 1). As long as such a structure is adopted, Just can bring into play the effect identical with above-mentioned embodiment mode. In addition, the ground transmission path of the electrical signal from the coaxial cable 50 to the measurement object T includes the connector 55 , the transmission substrate 60 and the first contact 10 , but does not include the coaxial cable 50 . That is, the ground transmission path refers to a transmission path between the coaxial cable 50 and the measurement object T in a state where the first contact 10 and the second contact 20 are pressed to the measurement object T.

Next, actions and effects of the embodiments described in this specification and modifications thereof will be summarized.

The measuring device 100 has: the first contact member 10 and the second contact member 20, which are respectively pressed to the measurement object T; the transmission part (coaxial cable 50), which transmits electric signals; the transmission substrate 60, which has flexibility, an electrical connection between a contact 10 and a second contact 20 and the transmission part; and the housing 1, which is set to ground potential, supports the first contact 10, the second contact 20, the transmission part and the transmission substrate 60; The transmission substrate 60 is provided with a high-frequency transmission path including a ground line (first ground line 62 ) electrically connected to the first contact 10 and a signal line 63 electrically connected to the second contact 20, leading from the transmission part to the measurement object. The grounding transmission path of the electrical signal of T is electrically connected to the casing through the conducting wire 73 .

Furthermore, in the measurement device 100 , the conductive wire 73 electrically connects the ground line of the transmission substrate 60 constituting a part of the ground transmission path, and the case 1 .

In addition, in the measuring device 100, the housing 1 has a support member 5 provided with passage holes 5a, 5b for inserting the first contact piece 10 and the second contact piece 20 and supporting the measurement object T, the ground wire The conductive portion is electrically connected to the support member 5 .

According to these configurations, since the ground is also provided in the middle of the ground transmission path from the transmission unit to the measurement target T, the vibration of the potential on the transmission path can be suppressed, and the characteristic impedance matching on the transmission path can be sufficiently realized. Therefore, the measurement accuracy of the measurement device 100 can be improved.

In addition, in the measurement device 100 , the conduction line 73 is integrally formed with the transmission substrate 60 and is continuous with the ground line.

According to this structure, the conduction line 73 and the ground line can be formed at the same time, so the formation of the conduction line 73 is easy.

In addition, in the measurement device 100, the first contact 10 has: a terminal portion (first terminal portion 15) that is pressed toward the measurement object T; and a mounting portion (first mounting portion 11) that is formed to have a flat surface The flat surface is parallel to the pressing direction of the terminal part for the measurement object T, and the mounting part is electrically connected to the transmission substrate 60; the conductive line 73 is provided at the branch part 70 branched from the side part of the transmission substrate 60, The branch portion 70 is connected to the housing 1 at an angle inclined to any of a direction perpendicular to a flat surface of the mounting portion and a direction parallel to it.

In this structure, the relative movement of the transmission substrate 60 and the branch portion 70 as the first contact 10 and the second contact 20 are pressed toward the measurement object T is absorbed by the flexural deformation of the branch portion 70 . The branch portion 70 is inclined in both the vertical direction and the parallel direction with respect to the flat surface of the mounting portion. The angle is connected to the housing 1 , thereby improving the reproducibility of the flexural deformation of the branch portion 70 . Therefore, it is possible to suppress fluctuations in the characteristic impedance caused by the flexural deformation of the branch portion 70 and improve the measurement accuracy of the measurement device 100 .

In addition, the measurement device 100 is provided with: the first contact 10 and the second contact 20 respectively pressed to the measurement object T; the base 30 on which the first contact 10 and the second contact 20 are mounted; and the drive mechanism 40 , the base 30 is driven to press the first contact piece 10 and the second contact piece 20 toward the measurement object T. Moreover, the measurement device 100 is provided with: a transmission part (coaxial cable 50) for transmitting electrical signals; a connection part (transmission substrate 60) for electrically connecting the transmission part with the first contact 10 and the second contact 20, and following The base 30 is driven to deform, allowing the relative movement of the first contact piece 10 and the second contact piece 20 relative to the transmission part; the first mounting member (first mounting bolt 80) is used to install the first contact piece 10 on the base 30; and a second mounting member (second mounting bolt 85), which installs the second contact piece 20 on the base 30; at least one of the first contact piece 10 and the second contact piece 20 is configured to be used to attach itself The first mounting member or the second mounting member mounted on the base 30 is insulated.

In addition, in the measuring device 100, at least one of the first contact 10 and the second contact 20 is constituted by an insulating member (the first resin spacer 81, the second resin spacer 86) and the The first mounting member or the second mounting member of the base 30 is insulated, and the insulating member is provided between at least one of the first contact 10 and the second contact 20 and the first mounting member or the second mounting member, and is formed by an insulating material formed.

Furthermore, in the measurement device 100 of the modified example, at least one of the first mounting member (first mounting bolt 80 ) and the second mounting member (second mounting bolt 85 ) is arranged to be formed of an insulating material so as to be in contact with the first The member 10 or the second contact member 20 is insulated.

According to these structures, at least one of the first mounting member (first mounting bolt 80) and the second mounting member (second mounting bolt 85) is insulated from the first contact piece 10 and the second contact piece 20, and therefore, with An electrical signal for measuring high-frequency characteristics becomes less likely to flow through the first mounting member (first mounting bolt 80 ) and the second mounting member (second mounting bolt 85 ). Thus, it is possible to prevent the first mounting member (first mounting bolt 80 ) and the second mounting member (second mounting bolt 85 ) from interfering with the high-frequency transmission path of the transmission substrate 60 and the first contact 10 and the second contact 20 . affect the transmission of electrical signals between at least one of the parties. Therefore, the characteristic impedance matching on the measurement transmission line can be sufficiently realized, and the measurement accuracy of the measurement devices 100 and 200 can be improved.

In addition, in the measuring device 100, the first contact 10 has: a first terminal portion 15 pressed toward the measurement object T; and a first mounting portion 11 formed with a first mounting portion through which the first mounting member is inserted. hole 12, and is mounted on the base portion 30; the second contact piece 20 has: a second terminal portion 25, which is pressed to the measurement object T; and a second mounting portion 21, which is formed with a second The installation hole 22 is installed on the base 30 .

Moreover, a first notch 12a communicating with the first mounting hole 12 and opening on the outer edge of the first contact 10 is formed on the first mounting portion 11 of the first contact 10 , and on the second of the second contact 20 The mounting portion 21 is formed with a second notch portion 22 a communicating with the second mounting hole 22 and opening at the outer edge of the second contact piece 20 .

In this structure, with the first notch portion 12a and the second notch portion 22a, the first mounting hole 12 and the second mounting hole 22 are respectively formed as open holes instead of closed holes. As a result, electrical signals are prevented from circulating around the first mounting hole 12 and the second mounting hole 22 , thus suppressing radiation of signals due to the electrical signal surrounding. Therefore, the measurement accuracy of the measurement device 100 can be improved.

In addition, in the measurement device 100, the first contact 10 and the second contact 20 are spaced apart in a predetermined adjoining direction perpendicular to the direction in which the first contact 10 and the second contact 20 are pressed against the measurement object T. Arranged side by side, the first terminal portion 15 has a first inclined surface 16 arranged on the opposite side of the second contact piece 20 in the adjacent direction and inclined relative to the pressing direction, and the second terminal portion 25 has a first inclined surface 16 provided in the adjacent direction. On the opposite side of the first contact 10 and the second inclined surface 26 inclined relative to the pressing direction, the center O1 of the first mounting hole 12 is disposed closer in the adjacent direction than the first imaginary plane P1 including the first inclined surface 16 . On the second contact 20 side, the center O2 of the second mounting hole 22 is arranged closer to the first contact 10 than the second imaginary plane P2 including the second inclined surface 26 in the adjacent direction.

In this structure, the center of the first mounting hole 12 is arranged closer to the second contact 20 than the first imaginary plane P1, and the center of the second mounting hole 22 is arranged closer to the first contact than the second imaginary plane P2. 10 sides. Accordingly, the reaction force to the pressing force of the first contact 10 and the second contact 20 against the measurement object T is transmitted to the first mounting bolt 80 and the center axis of the second mounting bolt 85 respectively to the first mounting bolt 80 and the center axis of the second mounting bolt 85 . Mounting bolts 80 and second mounting bolts 85 . Since the reaction force of the pressing force that enables the first contact 10 and the second contact 20 to be pressed against the measurement object T acts on the central axis of the first mounting bolt 80 and the second mounting bolt 85 , the first mounting bolt 80 can be suppressed. And the second mounting bolt 85 is loosened due to the reaction force.

In addition, the measurement device 100 includes: the first contact 10 and the second contact 20, which are respectively pressed to the measurement object T; the transmission part (coaxial cable 50), which transmits electrical signals; the transmission substrate 60, which is provided with a high frequency The transmission path electrically connects the first contact element 10 and the second contact element 20 to the transmission part; the high-frequency transmission path has: a signal line 63, one end is electrically connected to the signal transmission path (central conductor 51) in the transmission part, and the other One end is electrically connected to the first contact 10; the first ground wire 62 is electrically connected to the ground transmission path (external conductor 53) in the transmission part at one end, and the other end is electrically connected to the second contact 20; the second ground wire 64 , is that one end is electrically connected with the grounding transmission line in the transmission part;

In addition, in the measurement device 100, the transmission substrate 60 also has a base material 61, the signal line 63, the first ground line 62 and the second ground line 64 are provided on one side of the base material 61, the first ground line 62 and The second ground line 64 is disposed on one surface of the substrate 61 with the signal line 63 interposed therebetween.

In addition, in the measurement device 100 , the merging line (the first merging line 69 a and the second merging line 69 b ) is provided on the other surface of the base material 61 opposite to the one surface.

According to these configurations, a part of the transmission path in the high-frequency transmission path of the transmission substrate 60 is a so-called coplanar line composed of one signal line 63 and two ground lines. The coplanar line is more resistant to noise than the coplanar strip line, and suppresses fluctuations in characteristic impedance when switching from the coaxial cable 50, so that matching of the characteristic impedance can be easily achieved. Therefore, according to the above configuration, the measurement accuracy of the measurement device 100 can be improved.

In addition, the measurement device 100 further includes: a connector 55 for connecting the transmission part (coaxial cable 50) to the transmission substrate 60; the transmission substrate 60 has a connector-side end 66 clamped by the connector 55; 66 has: a connector connection portion 66a, which is provided with a signal line 63, a first ground line 62, and a second ground line 64 side by side; The two sides of the connector connection part 66a on the top extend to the outside of the width direction; the first ground wire 62 is provided on the first protruding part 66b, and the second ground wire 64 is provided on the second protruding part 66c. Base end slits 60 b and 60 c extending in the longitudinal direction of the transmission board 60 are formed between the portion 66 a and the first protruding portion 66 b and between the connector connecting portion 66 a and the second protruding portion 66 c , respectively.

In this structure, the transmission substrate 60 is easily relatively moved with respect to the connector-side end portion 66 .

In addition, in the measurement device 100, the signal line 63, the first ground line 62, and the second ground line 64 are provided on one surface of the connector-side end portion 66, and the signal line 63, the first ground line 62, and the second ground line 64 are provided on the other surface of the connector-side end portion 66. The first backside grounding line 62b electrically connected to the first grounding line 62, and the second backside grounding line 64b electrically connected to the second grounding line 64, and the first backside grounding line is provided in the connector side end 66. 62b and the second backside ground line 64b are formed to be thicker than other portions.

In this structure, the portion where the first backside ground wire 62b and the second backside ground wire 64b are provided is formed thicker than other portions, whereby this portion can be securely held by the connector 55 . Therefore, can The first ground wire 62 and the second ground wire 64 are reliably connected to the outer conductor 53 of the coaxial cable 50 through the connector 55 .

The embodiments of the present invention have been described above, but the above embodiments are merely examples of application of the present invention, and are not intended to limit the technical scope of the present invention to the specific configurations of the above embodiments. In this specification, terms such as "parallel", "perpendicular", "orthogonal", "identical", "uniform", "constant", and "entirely the same" do not have strict meanings, without departing from the technical idea of the present invention. Deviations are allowed within the range.

1: shell

2: The first bracket

3: Second bracket

4: The third bracket

5: Supporting member

10: The first contact piece

20: Second contact piece

30: base

31: Mobile board

32: First base

33:Second base

34a: first spring

34b: Second spring

35a: First spring guide

35b: Second spring guide

40: Driving mechanism

41: Electric motor

42: Ball screw mechanism

42a: Ball screw

50: coaxial cable

55: Connector

60: Transmission substrate

62: The first ground wire

63: signal line

64: Second ground wire

70: branch

80: First mounting bolt

81: First Resin Washer

85: Second mounting bolt

86:Second resin gasket

100: Measuring device

101: Check device

102: Conveyor

103: conveyor table

104: Press member

105: Control device

Claims (6)

A measuring device comprising: The first contact piece and the second contact piece are respectively pressed to the measurement object; Transmission Department, which transmits electrical signals; a transmission substrate electrically connecting the first contact and the second contact to the transmission part; and a case set at a ground potential, and supporting the first contact, the second contact, the transmission part, and the transmission substrate; A high-frequency transmission path is provided on the transmission substrate, and the high-frequency transmission path includes a ground line electrically connected to the first contact and a signal line electrically connected to the second contact, A ground transmission path for transmitting electrical signals from the transmission portion to the measurement object is located on the measurement object side of the transmission portion, and is electrically connected to the case through a conduction wire branching from the ground transmission path. A measuring device comprising: The first contact piece and the second contact piece are respectively pressed to the measurement object; Transmission Department, which transmits electrical signals; a transmission substrate electrically connecting the first contact and the second contact to the transmission part; and a case set at a ground potential, and supporting the first contact, the second contact, the transmission part, and the transmission substrate; A high-frequency transmission path is provided on the transmission substrate, and the high-frequency transmission path includes a ground line electrically connected to the first contact and a signal line electrically connected to the second contact, The grounding transmission path of the electrical signal from the transmission part to the measurement object is electrically connected to the housing through a conducting line, The aforementioned housing has a supporting member that supports the aforementioned measuring object, The conductive line electrically connects the ground line of the transmission substrate constituting a part of the ground transmission path and the support member. The measuring device as described in claim 2, wherein, The aforementioned conduction line is integrally formed with the aforementioned transmission substrate, and is continuous with the aforementioned ground line. The measuring device as described in claim 3, wherein, The aforementioned first contact has: a terminal portion that is pressed toward the aforementioned measurement object; and The mounting portion is formed in a flat plate shape having a flat surface parallel to a direction in which the terminal portion presses the measurement object, and the mounting portion is electrically connected to the transmission substrate, The conduction line is provided at a branch portion extending from a side portion of the transmission substrate, The branch portion is connected to the housing at an angle inclined to any one of a direction perpendicular to the flat surface of the mounting portion and a direction parallel to it. The measuring device according to any one of claims 1 to 4, wherein, The aforementioned transmission substrate has: a first mounting end for mounting the aforementioned first contact; a second mounting end for mounting the aforementioned second contact; and a slit formed to separate the first mounting end portion and the second mounting end portion from each other, The first mounting end portion and the second mounting end portion are configured to be movable independently of each other by the slit. The measuring device as described in claim 5, wherein, The aforementioned transmission substrate is formed in a strip shape, The slit is formed to extend in the longitudinal direction of the transmission substrate.

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