[go: up one dir, main page]

TWI801149B - 線形掃描彩色共焦量測系統 - Google Patents

線形掃描彩色共焦量測系統 Download PDF

Info

Publication number
TWI801149B
TWI801149B TW111106642A TW111106642A TWI801149B TW I801149 B TWI801149 B TW I801149B TW 111106642 A TW111106642 A TW 111106642A TW 111106642 A TW111106642 A TW 111106642A TW I801149 B TWI801149 B TW I801149B
Authority
TW
Taiwan
Prior art keywords
measuring system
linear scanning
chromatic confocal
confocal measuring
scanning chromatic
Prior art date
Application number
TW111106642A
Other languages
English (en)
Other versions
TW202234020A (zh
Inventor
陳亮嘉
伍國瑋
陳泓叡
Original Assignee
國立臺灣大學
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 國立臺灣大學 filed Critical 國立臺灣大學
Publication of TW202234020A publication Critical patent/TW202234020A/zh
Application granted granted Critical
Publication of TWI801149B publication Critical patent/TWI801149B/zh

Links

TW111106642A 2021-02-25 2022-02-23 線形掃描彩色共焦量測系統 TWI801149B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163153712P 2021-02-25 2021-02-25
US202163153699P 2021-02-25 2021-02-25
US63/153,699 2021-02-25
US63/153,712 2021-02-25

Publications (2)

Publication Number Publication Date
TW202234020A TW202234020A (zh) 2022-09-01
TWI801149B true TWI801149B (zh) 2023-05-01

Family

ID=84957083

Family Applications (4)

Application Number Title Priority Date Filing Date
TW111106645A TWI812025B (zh) 2021-02-25 2022-02-23 全域式軸向可調色散鏡組及其彩色共焦量測系統
TW111106641A TWI807653B (zh) 2021-02-25 2022-02-23 高深寬比微結構光學量測系統
TW111106644A TWI788231B (zh) 2021-02-25 2022-02-23 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統
TW111106642A TWI801149B (zh) 2021-02-25 2022-02-23 線形掃描彩色共焦量測系統

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW111106645A TWI812025B (zh) 2021-02-25 2022-02-23 全域式軸向可調色散鏡組及其彩色共焦量測系統
TW111106641A TWI807653B (zh) 2021-02-25 2022-02-23 高深寬比微結構光學量測系統
TW111106644A TWI788231B (zh) 2021-02-25 2022-02-23 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統

Country Status (1)

Country Link
TW (4) TWI812025B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI859010B (zh) * 2023-11-29 2024-10-11 致茂電子股份有限公司 利用反射光譜的相位萃取資訊進行孔深量測的方法、量測系統及電腦可讀取媒體
TWI874045B (zh) * 2023-12-14 2025-02-21 致茂電子股份有限公司 表面形貌量測方法
TWI884657B (zh) * 2023-12-27 2025-05-21 錼創顯示科技股份有限公司 加工與檢測設備及檢測設備
TWI882902B (zh) * 2024-09-12 2025-05-01 中華精測科技股份有限公司 表面量測系統及其量測方法
TWI886056B (zh) * 2024-09-30 2025-06-01 國立臺灣大學 具有全域反捲積表面形貌重建的線掃描彩色共焦量測系統

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统
CN111486953A (zh) * 2020-06-02 2020-08-04 南京引创光电科技有限公司 光学测量系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984888A (en) * 1989-12-13 1991-01-15 Imo Industries, Inc. Two-dimensional spectrometer
JP2008058338A (ja) * 2006-08-04 2008-03-13 Nippon Sheet Glass Co Ltd 正立等倍レンズアレイ、正立等倍レンズアレイを用いた画像読取装置及び画像書込装置、並びに、正立等倍レンズアレイの製造方法
IL188029A0 (en) * 2007-12-10 2008-11-03 Nova Measuring Instr Ltd Optical method and system
CN101324467A (zh) * 2008-07-03 2008-12-17 虞潜 一种纵向、横向分开聚焦的光谱仪聚焦成像系统
US8411268B2 (en) * 2010-10-01 2013-04-02 Raytheon Company Two material achromatic prism
ITTO20110298A1 (it) * 2011-04-01 2012-10-02 St Microelectronics Srl Rilevatore ottico confocale, schiera di rilevatori e relativo procedimento di fabbricazione
WO2015031988A1 (en) * 2013-09-05 2015-03-12 Mcmaster University Apparatus and method for foci array scanning through an adjusting refractive medium
TWI613534B (zh) * 2016-08-25 2018-02-01 雙層微透鏡陣列光學元件
US10481111B2 (en) * 2016-10-21 2019-11-19 Kla-Tencor Corporation Calibration of a small angle X-ray scatterometry based metrology system
US10690602B2 (en) * 2017-02-17 2020-06-23 Kla-Tencor Corporation Methods and systems for measurement of thick films and high aspect ratio structures
WO2018182526A1 (en) * 2017-03-31 2018-10-04 Nanyang Technological University Apparatus for analysing a specimen
CN111522132B (zh) * 2020-04-29 2022-02-18 苏州埃克瑞自动化设备有限公司 可见光近红外宽光谱复消色差像方远心镜头及其应用

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统
CN111486953A (zh) * 2020-06-02 2020-08-04 南京引创光电科技有限公司 光学测量系统

Also Published As

Publication number Publication date
TWI788231B (zh) 2022-12-21
TWI807653B (zh) 2023-07-01
TWI812025B (zh) 2023-08-11
TW202234020A (zh) 2022-09-01
TW202311704A (zh) 2023-03-16
TW202234127A (zh) 2022-09-01
TW202311703A (zh) 2023-03-16

Similar Documents

Publication Publication Date Title
TWI801149B (zh) 線形掃描彩色共焦量測系統
EP4251978A4 (en) OVERLAY MEASUREMENT USING SAMPLING SCATTER MEASUREMENT
EP4159176A4 (en) EXAMINATION SYSTEM
EP4249974A4 (en) OPTICAL CABLE
GB2614551B (en) Optical measurement system
IL315672A (en) Dynamic optical system calibration
GB202219449D0 (en) Optical measurement system
EP4396772A4 (en) FEATURE INSPECTION SYSTEM
EP4471452A4 (en) MEASURING DEVICE
TWI800005B (zh) 光學感測器
EP4306188A4 (en) INSPECTION SYSTEM
EP4261583A4 (en) OPTICAL SYSTEM
EP4318025B8 (en) Scanning measuring device with fiber network
EP4468031A4 (en) MEASURING DEVICE
EP4137448A4 (en) SAMPLE HOLDER
TWI800046B (zh) 光學探針
EP4141498A4 (en) OPTICAL SYSTEM
HK40128107A (zh) 光学测量系统
EP4320729A4 (en) SCANNING SYSTEM
AU2020904122A0 (en) High-resolution optical microscopy
AU2020901419A0 (en) Scanning systems for teachers
GB202319012D0 (en) Optical probe
AU2022903450A0 (en) Optical sensing system
EP4183229A4 (en) OPTICAL RESOLUTION REDUCTION ELEMENTS
AU2023900823A0 (en) An Illuminated Lead or Cable