[go: up one dir, main page]

TWI800784B - Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process - Google Patents

Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process Download PDF

Info

Publication number
TWI800784B
TWI800784B TW110101653A TW110101653A TWI800784B TW I800784 B TWI800784 B TW I800784B TW 110101653 A TW110101653 A TW 110101653A TW 110101653 A TW110101653 A TW 110101653A TW I800784 B TWI800784 B TW I800784B
Authority
TW
Taiwan
Prior art keywords
mechanical polishing
chemical mechanical
control method
polishing process
polishing system
Prior art date
Application number
TW110101653A
Other languages
Chinese (zh)
Other versions
TW202230493A (en
Inventor
王楨坤
Original Assignee
科斯邁股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 科斯邁股份有限公司 filed Critical 科斯邁股份有限公司
Priority to TW110101653A priority Critical patent/TWI800784B/en
Publication of TW202230493A publication Critical patent/TW202230493A/en
Application granted granted Critical
Publication of TWI800784B publication Critical patent/TWI800784B/en

Links

TW110101653A 2021-01-15 2021-01-15 Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process TWI800784B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110101653A TWI800784B (en) 2021-01-15 2021-01-15 Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110101653A TWI800784B (en) 2021-01-15 2021-01-15 Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process

Publications (2)

Publication Number Publication Date
TW202230493A TW202230493A (en) 2022-08-01
TWI800784B true TWI800784B (en) 2023-05-01

Family

ID=83782436

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110101653A TWI800784B (en) 2021-01-15 2021-01-15 Chemical Mechanical Polishing System and Control Method for Chemical Mechanical Polishing Process

Country Status (1)

Country Link
TW (1) TWI800784B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201405649A (en) * 2012-07-25 2014-02-01 Applied Materials Inc Temperature control of chemical mechanical polishing
TW201513201A (en) * 2008-06-04 2015-04-01 荏原製作所股份有限公司 Honing device and honing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201513201A (en) * 2008-06-04 2015-04-01 荏原製作所股份有限公司 Honing device and honing method
TW201405649A (en) * 2012-07-25 2014-02-01 Applied Materials Inc Temperature control of chemical mechanical polishing

Also Published As

Publication number Publication date
TW202230493A (en) 2022-08-01

Similar Documents

Publication Publication Date Title
EP4141583A4 (en) METHOD AND SYSTEM FOR APPARATUS CONTROL
SG11202107874TA (en) Information processing system, information processing method, program, and substrate processing apparatus
EP3248075A4 (en) Method and apparatus for advanced control using function blocks in industrial process control and automation systems
GB201805153D0 (en) Method and system for controlling processing
SG10202006430QA (en) Substrate stage, substrate processing apparatus, and temperature control method
DE102020204854A8 (en) Machine learning apparatus, numerical control system and machine learning method
EP4207028A4 (en) CRYPTOAST BLOCKCHAIN PROCESSING APPARATUS, PROCESSING METHOD, PROCESSING SYSTEM AND PROCESSING PROGRAM
EP4192037A4 (en) AUDIO CONTROL METHOD, APPARATUS AND SYSTEM
EP3841354C0 (en) METHOD AND APPARATUS FOR ELECTROMAGNETIC GYROSCOPIC STABILIZING DRIVE SYSTEM
DE112020002305A5 (en) Process for checking workpieces, control system and treatment system
GB201800389D0 (en) Process control system and method
PL3244277T3 (en) Method and apparatus for optimizing process control systems
IL265051B (en) Monitoring system and method for controlling process of surface treatment for construction
EP3612904A4 (en) Apparatus and method for rationalizing and resolving alarms in industrial process control and automation systems
EP3794521C0 (en) METHOD AND SYSTEM FOR DISPATCH CONTROL
EP4350664A4 (en) VEHICLE CONTROL METHOD, APPARATUS AND SYSTEM
SG11201807852TA (en) Method for controlling operation of reverse osmosis membrane apparatus and reverse osmosis membrane treatment system
EP4035054A4 (en) METHOD, APPARATUS AND SYSTEM FOR BENDING GLASS
EP3822715A4 (en) PROCESS CONTROL AND METHOD AND SYSTEM THEREOF
EP4166092A4 (en) INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, INFORMATION PROCESSING SYSTEM AND INFORMATION PROCESSING PROGRAM
DK3741729T3 (en) Sludge treatment method and cement production system
EP4410502A4 (en) INFORMATION PROCESSING DEVICE, ROBOT CONTROLLER, INFORMATION PROCESSING SYSTEM AND INFORMATION PROCESSING METHOD
EP3399696C0 (en) SYSTEM AND METHOD FOR AUTOMATION OF THE DISCOVERY PROCESS
GB202018941D0 (en) Method and System for Modelling Industrial Processes
KR102209917B9 (en) Data processing apparatus and method for deep reinforcement learning