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TWI800401B - 具有殘餘應力補償及聲阻之回饋控制的聲學裝置 - Google Patents

具有殘餘應力補償及聲阻之回饋控制的聲學裝置 Download PDF

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Publication number
TWI800401B
TWI800401B TW111121256A TW111121256A TWI800401B TW I800401 B TWI800401 B TW I800401B TW 111121256 A TW111121256 A TW 111121256A TW 111121256 A TW111121256 A TW 111121256A TW I800401 B TWI800401 B TW I800401B
Authority
TW
Taiwan
Prior art keywords
acoustic
feedback control
residual stress
stress compensation
devices
Prior art date
Application number
TW111121256A
Other languages
English (en)
Other versions
TW202304021A (zh
Inventor
席亞赫 迪米崔維奇 巴蘇科
Original Assignee
美商天工方案公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商天工方案公司 filed Critical 美商天工方案公司
Publication of TW202304021A publication Critical patent/TW202304021A/zh
Application granted granted Critical
Publication of TWI800401B publication Critical patent/TWI800401B/zh

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Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • H04R3/02Circuits for transducers, loudspeakers or microphones for preventing acoustic reaction, i.e. acoustic oscillatory feedback
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02Microphones
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021Transducers for transforming electrical into mechanical energy or vice versa
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054For holding or placing an element in a given position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0056Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0257Microphones or microspeakers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02244Details of microelectro-mechanical resonators
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/10Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10General applications
    • H04R2499/11Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • H04R3/04Circuits for transducers, loudspeakers or microphones for correcting frequency response
    • H04R3/06Circuits for transducers, loudspeakers or microphones for correcting frequency response of electrostatic transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Otolaryngology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
TW111121256A 2021-06-17 2022-06-08 具有殘餘應力補償及聲阻之回饋控制的聲學裝置 TWI800401B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163202608P 2021-06-17 2021-06-17
US202163202611P 2021-06-17 2021-06-17
US63/202,608 2021-06-17
US63/202,611 2021-06-17

Publications (2)

Publication Number Publication Date
TW202304021A TW202304021A (zh) 2023-01-16
TWI800401B true TWI800401B (zh) 2023-04-21

Family

ID=82705333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111121256A TWI800401B (zh) 2021-06-17 2022-06-08 具有殘餘應力補償及聲阻之回饋控制的聲學裝置

Country Status (3)

Country Link
US (2) US20220408195A1 (zh)
GB (2) GB2609299B (zh)
TW (1) TWI800401B (zh)

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US12391546B1 (en) 2021-01-07 2025-08-19 Skyworks Global Pte. Ltd. Method of making acoustic devices with directional reinforcement
US12328559B2 (en) 2021-06-17 2025-06-10 Skyworks Solutions, Inc. Acoustic devices with improved sensitivity
US12335687B2 (en) 2021-09-20 2025-06-17 Skyworks Solutions, Inc. Piezoelectric MEMS microphone with cantilevered separation
US12404167B2 (en) 2021-09-28 2025-09-02 Skyworks Global Pte. Ltd. Piezoelectric MEMS device with thermal compensation from different material thicknesses
US20230130082A1 (en) 2021-10-21 2023-04-27 Skyworks Solutions, Inc. Method of making a piezoelectric sensor with increased sensitivity and devices having the same
US20230343659A1 (en) 2022-03-30 2023-10-26 Skyworks Solutions, Inc. Integrated device package with opening in carrier
US20230312334A1 (en) * 2022-03-31 2023-10-05 Skyworks Solutions, Inc. Mems sensor with a thin region
US12538080B2 (en) 2022-09-20 2026-01-27 Skyworks Solutions, Inc. Piezoelectric microelectromechanical system microphone
CN116828377B (zh) * 2023-08-08 2025-10-31 安徽奥飞声学科技有限公司 Mems结构的制备方法

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Also Published As

Publication number Publication date
US20220408195A1 (en) 2022-12-22
US12081941B2 (en) 2024-09-03
GB2618713B (en) 2024-06-05
GB202208891D0 (en) 2022-08-10
US20220408185A1 (en) 2022-12-22
GB202312523D0 (en) 2023-09-27
GB2618713A (en) 2023-11-15
GB2609299B (en) 2023-11-22
GB2609299A (en) 2023-02-01
TW202304021A (zh) 2023-01-16

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