TWI898239B - Heat shield positioning jig, heat shield positioning method and silicon single crystal manufacturing method - Google Patents

Abstract

[Problem] Provide a heat shield positioning jig that may easily and appropriately position the heat shield in the horizontal direction. [Solution] The heat shield positioning jig positions the heat shield surrounding the silicon single crystal that is being pulled up in a chamber, and comprises a jig body. The jig body is configured to be detachable with respect to the chamber. The jig body is provided with a positioning portion for the jig and a positioning portion for the heat shield. The positioning portion for the jig positions the jig body in a horizontal direction relative to the chamber. The positioning portion for the heat shield positions the heat shield in a horizontal direction relative to the jig body.

Description

Heat shield positioning fixture, heat shield positioning method, and silicon single crystal manufacturing method

The present invention relates to a heat shield plate positioning jig, a heat shield plate positioning method and a silicon single crystal manufacturing method.

As is known, a silicon single crystal manufacturing apparatus for manufacturing a silicon single crystal is known (for example, see Patent Document 1). This silicon single crystal manufacturing apparatus is provided with a heat shield that surrounds the silicon single crystal being pulled from a silicon melt within a crucible. For example, the upper end of the heat shield is supported by a heat retaining cylinder that surrounds the crucible and the heat shield. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent No. 2022-083492

[Identify the problem you want to solve]

Silicon single crystal manufacturing equipment is configured so that the central axis of the silicon single crystal, which is pulled up by a wire or shaft, is aligned with the central axis of the chamber. Furthermore, a heat shield is positioned so that its central axis preferably aligns with the central axis of the silicon single crystal. If the central axis of the heat shield is not aligned with the central axis of the silicon single crystal, there is a risk of the silicon single crystal wobbling or uneven thermal environment around the silicon single crystal due to uneven flow of the inert gas between the silicon single crystal and the heat shield.

It is known that although the placement of the heat shield is determined by the operator visually or using a tape measure, these methods do not allow for easy positioning of the heat shield, and there is a risk of positional deviation when the operator determines the placement.

The present invention aims to provide a heat shield positioning jig, a heat shield positioning method, and a silicon single crystal manufacturing method that can easily and appropriately position a heat shield in the horizontal direction. [Solution]

The heat shield positioning jig of the present invention is used to position a heat shield surrounding a silicon single crystal being pulled within a chamber. The jig comprises a jig body configured to be freely attachable and detachable relative to the chamber. The jig body includes a jig positioning portion for horizontally positioning the jig body relative to the chamber, and a heat shield positioning portion for horizontally positioning the heat shield relative to the jig body.

In the heat shield positioning jig of the present invention, it is preferred that a plurality of heat shield positioning portions are provided on the vertical side of the jig body for horizontally positioning a plurality of types of heat shields having different horizontal dimensions. The jig body is mounted in the chamber with the heat shield positioning portion corresponding to the heat shield to be positioned facing the upper side of the heat shield.

In the heat shield positioning jig of the present invention, preferably, at least one heat shield positioning portion is provided on one side of the jig body in the vertical direction, and the remaining heat shield positioning portions are provided on the other side of the jig body in the vertical direction.

In the heat shield plate positioning jig of the present invention, it is preferred that the jig body includes a base and a plurality of arms extending horizontally from the base in different directions, and the jig positioning portion and the heat shield plate positioning portion are respectively provided on the plurality of arms.

In the heat shield positioning jig of the present invention, it is preferred that the base and at least one of the plurality of arms be provided with a gripping portion for gripping the jig body.

In the heat shield plate positioning jig of the present invention, it is preferred that the holding portion is formed by a through hole penetrating through a portion where the holding portion is provided.

The heat shield positioning method of the present invention utilizes the aforementioned heat shield positioning jig to position a heat shield surrounding a silicon single crystal being pulled within a chamber. The method comprises temporarily placing the heat shield within the chamber and simultaneously performing horizontal positioning relative to the jig body within the chamber using the jig positioning portion and horizontal positioning relative to the jig body using the heat shield positioning portion, or performing one positioning step followed by the other, before separating the heat shield positioning jig from the chamber and the heat shield.

The silicon single crystal manufacturing method of the present invention uses the above-mentioned heat shield positioning method to position the heat shield surrounding the silicon single crystal being pulled up in the chamber, and pulls up the silicon single crystal in the chamber.

[Example] The following describes an example of the present invention.

<Silicon Single Crystal Manufacturing Equipment Configuration> First, the configuration of the silicon single crystal manufacturing apparatus will be described. Figure 1 is a schematic diagram illustrating the configuration of the silicon single crystal manufacturing apparatus.

The silicon single crystal manufacturing apparatus 1 shown in Figure 1 produces silicon single crystals (SM) using the Czochralski method. Silicon single crystal manufacturing apparatus 1 produces silicon single crystals (SM) having a straight body diameter of, for example, 200 mm to 450 mm. Silicon single crystal manufacturing apparatus 1 includes a chamber 11, a crucible 12, a heater 13, a heat-insulating cylinder 14, a heat shield 15, a pulling unit 16, and a crucible drive unit 17.

The chamber 11 includes a main chamber 111, a top chamber 112, and a traction chamber 113.

The main chamber 111 is formed in a bottomed cylindrical shape and houses the crucible 12 , the heater 13 , the heat-insulating cylinder 14 , and the heat shield 15 .

The top chamber 112 is formed into a substantially conical cylindrical shape with a diameter at the upper end being smaller than that at the lower end. The lower end of the top chamber 112 is airtightly connected to the upper end of the main chamber 111 and covers the upper portion of the main chamber 111.

The pulling chamber 113 is formed in a cylindrical shape. The lower end of the pulling chamber 113 is airtightly connected to the upper end of the top chamber 112. The pulling chamber 113 temporarily accommodates the pulled silicon single crystal SM.

In this way, the main chamber 111, the top chamber 112, and the traction chamber 113 are airtightly connected to form a sealed space in the chamber 11.

A gas inlet 113A is provided at the top of the traction chamber 113 to introduce an inert gas such as argon (Ar) into the chamber 11. A gas exhaust port 111A is provided at the bottom of the main chamber 111 to exhaust the gas in the chamber 11 by driving a vacuum pump (not shown).

Crucible 12 is disposed in main chamber 111 and stores dopant-added melt MD, which is a silicon melt to which a dopant is added. Depending on the resistivity of silicon single crystal SM, no dopant may be added to the silicon melt.

The heaters 13 are cylindrical and are arranged outside the crucible 12 at predetermined intervals to melt the silicon raw material in the crucible 12 .

The heat-insulating tubes 14 are formed in a cylindrical shape and are arranged outside the heater 13 at predetermined intervals.

The heat shield 15 comprises a conical cylindrical heat shield body 151, with a larger diameter at its upper end than at its lower end, and a supported portion 152 extending outward from the entire circumference of the upper end of the heat shield body 151. The heat shield 15 is supported by the supported portion 152, which is placed on the upper end of the heat-insulating cylinder 14, so as to surround the silicon single crystal SM being pulled from the dopant-doped melt MD. The heat shield 15 blocks radiant heat from the heater 13 toward the silicon single crystal SM.

The pull-up unit 16 includes a cable 161 having a seed crystal SC attached to one end thereof, and a pull-up drive unit 162 for moving the cable 161 upward, downward, and in rotation.

The crucible driving unit 17 includes a support shaft 171 that supports the crucible 12 from below, and rotates and elevates the crucible 12 at a predetermined speed.

The silicon single crystal manufacturing apparatus 1 having the above-described structure is configured so that the cable 161, the central axis of the silicon single crystal SM pulled by the cable 161, and the central axis of the chamber 11 are aligned.

<Heat Shield Positioning Jig Structure> Next, the heat shield positioning jig, which horizontally positions the heat shield 15 relative to the chamber 11, will be described. Figure 2 is a top view of the heat shield positioning jig. (A) shows the heat shield positioning jig of this embodiment, and (B) shows the heat shield positioning jig of a modified example. Figure 3 is a side view of the heat shield positioning jig of this embodiment. (A) shows the entire heat shield positioning jig, and (B) shows a portion of the heat shield positioning jig.

The heat shield plate positioning jig 2 shown in FIG2(A) is used to position the heat shield plate 15 in the horizontal direction relative to the main chamber 111 (chamber 11). The heat shield plate positioning jig 2 includes a jig body 21.

The jig body 21 is designed to be freely attachable and detachable to the main chamber 111. The jig body 21 is preferably constructed of a material that ensures rigidity and prevents metal contamination within the main chamber 111. Furthermore, while heat resistance is not required for the jig body 21, which is used at room temperature, lightweight construction is desirable to facilitate handling by workers. Examples of materials that meet these requirements include Teflon (registered trademark) and graphite. Furthermore, to prevent metal contamination within the main chamber 111, metal should be avoided in areas of the jig body 21 that come into contact with the heat shield 15. Therefore, areas of the jig body 21 that do not come into contact with the heat shield 15 can be constructed of metal.

The jig body 21 includes a base 211 and four arms 212. The four arms 212 are arranged to extend radially from the base 211 by the same length when viewed from above. Specifically, the four arms 212 are arranged to extend from the base 211 by the same length in different horizontal directions when viewed from above, and so that the angles formed by adjacent arms 212 are equal (forming a 90° angle). Alternatively, as shown in FIG2(B), the jig body 21 may be configured to include three arms 212. In this case, the three arms 212 are preferably arranged to extend from the base 211 by the same length in different horizontal directions when viewed from above, and so that the angles formed by adjacent arms 212 are equal (forming a 120° angle). Alternatively, the jig body 21 may include two, five, or more arms 212. Furthermore, although the angles formed by adjacent wrists 212 do not necessarily need to be equal, it is preferred that the angles formed by adjacent wrists 212 be equal from the perspective of improving weight balance.

As shown in FIG. 3(A) , the base portion 211 is formed in, for example, a disk shape, and four arm portions 212 are fixed to the outer peripheral surface of the base portion 211 .

The jig body 21 is provided with a jig positioning portion 22. The jig positioning portion 22 serves to horizontally position the jig body 21 relative to the main chamber 111. The jig positioning portion 22 is formed by the top end of each arm 212 in the direction in which it extends. In other words, four jig positioning portions 22 are provided on the jig body 21. When viewed from the side, the top end of each arm 212 forming the jig positioning portion 22 is formed into a generally arcuate shape in the direction in which it extends. Furthermore, when viewed from the side, the jig positioning portion 22 can be formed into a straight line or a concave-convex shape. As shown in Figure 2(A), the four arms 212 are formed so that the diameter R of the virtual circumscribed circle P circumscribing the four jig positioning portions 22 is less than the inner diameter of the main chamber 111. For example, the four arms 212 are formed so that the difference between the diameter R of the virtual circumcircle P and the inner diameter of the main chamber 111 is between 0 mm and 1 mm. The outer diameter of the heat shield positioning jig 2 (the diameter R of the virtual circumcircle P shown in FIG2(A) ) can be, for example, between 1 m and 2.5 m.

As will be described in detail later, with the four arms 212 extending in a direction parallel to the horizontal direction and each jig positioning portion 22 abutting against or facing the inner circumferential surface of the main chamber 111, the jig body 21 is inserted into the main chamber 111 to position the jig body 21 horizontally relative to the main chamber 111.

As shown in FIG. 3A and FIG. 3B , a first heat shield plate positioning portion 23 , a second heat shield plate positioning portion 24 , and a third heat shield plate positioning portion 25 are provided on the lead vertical side of the jig body 21 .

The first heat shield positioning portion 23, the second heat shield positioning portion 24, and the third heat shield positioning portion 25 function to horizontally position the heat shield 15 relative to the jig body 21. The first heat shield positioning portion 23 positions a heat shield 15 whose supported portion 152 has an outer diameter of a first length (hereinafter, sometimes referred to as the "first heat shield 15"). The second heat shield positioning portion 24 positions a heat shield 15 whose supported portion 152 has an outer diameter of a second length, shorter than the first length (hereinafter, sometimes referred to as the "second heat shield 15"). The third heat shield positioning portion 25 positions a heat shield 15 whose supported portion 152 has an outer diameter of a third length, shorter than the first and second lengths (hereinafter, sometimes referred to as the "third heat shield 15"). Specifically, the jig body 21 is provided with a plurality of heat shield positioning portions (a first heat shield positioning portion 23, a second heat shield positioning portion 24, and a third heat shield positioning portion 25) to horizontally position a plurality of heat shields 15 having different horizontal dimensions. Also, hereinafter, the supported portion 152 of the first heat shield 15 may be referred to as the first supported portion 152, the supported portion 152 of the second heat shield 15 may be referred to as the second supported portion 152, and the supported portion 152 of the third heat shield 15 may be referred to as the third supported portion 152.

The first heat shield positioning portion 23 is provided on one side of each arm 212 in the vertical direction (the upper end in Figures 3(A) and 3(B)). The second heat shield positioning portion 24 and the third heat shield positioning portion 25 are provided on the other side of each arm 212 in the vertical direction (the lower end in Figures 3A and 3B). The first, second, and third heat shield positioning portions 23, 24, 25 abut against the upper edges of the first, second, and third supported portions 152, 152, and 152, respectively, thereby horizontally positioning the first, second, and third heat shields 15, 15, and 15.

Each first heat shield positioning portion 23 includes a first horizontal surface 231 and a first lead surface 232. Each first heat shield positioning portion 23 preferably further includes a first inclined surface 233. The first horizontal surface 231 is formed parallel to the horizontal direction and is configured to abut the upper surface of the first supported portion 152. The first lead surface 232 extends in the lead direction from the end of the first horizontal surface 231 at the top side of the arm portion 212 and is configured to abut or face the side surface of the first supported portion 152. The first lead surface 232 can be formed as an arcuate surface corresponding to the side surface of the first supported portion 152, or it can be formed as a flat surface. Each first lead surface 232 is formed so that the diameter R1 of a first virtual inscribed circle inscribed within the first lead surface 232 is greater than or equal to the outer diameter of the first supported portion 152. For example, each first lead surface 232 is formed so that the difference between the diameter R1 of the first virtual inscribed circle and the outer diameter of the first supported portion 152 is greater than or equal to 0 mm and less than or equal to 1 mm. The first inclined surface 233 is formed so as to be inclined relative to the lead vertical direction from the end of the first lead surface 232 opposite the first horizontal surface 231. The first inclined surface 233 is inclined so as to move away from the base 211 as it moves away from the first lead surface 232.

Each second heat shield positioning portion 24 includes a second horizontal surface 241 and a second lead surface 242. Each third heat shield positioning portion 25 includes a third horizontal surface 251 and a third lead surface 252. Each second heat shield positioning portion 24 preferably includes a second inclined surface 243. Each third heat shield positioning portion 25 preferably includes a third inclined surface 253. The second and third horizontal surfaces 241 and 251 are formed parallel to the horizontal direction and are configured to abut the upper surfaces of the second and third supported portions 152 and 152. The second and third lead surfaces 242, 252 are formed to extend in the lead direction from the ends of the top side of the arm portion 212 of the second and third horizontal surfaces 241, 251, and are configured to abut or face the side surfaces of the second and third supported portions 152, 152. The second and third lead surfaces 242, 252 can be formed into arcuate surfaces corresponding to the side surfaces of the second and third supported portions 152, 152, or can be formed into flat surfaces. Each of the second and third lead surfaces 242 and 252 is formed so that the diameters R2 and R3 of the second and third virtual inscribed circles inscribed in the second and third lead surfaces 242 and 252 are greater than the outer diameters of the second and third supported portions 152 and 152, respectively. For example, each of the second and third lead surfaces 242 and 252 is formed so that the difference between the diameters R2 and R3 of the second and third virtual inscribed circles and the outer diameters of the second and third supported portions 152 and 152 is greater than or equal to 0 mm and less than or equal to 1 mm. The second and third inclined surfaces 243 and 253 are formed to be inclined relative to the lead vertical direction from the ends of the second and third lead surfaces 242 and 252 extending in the direction opposite to the second and third horizontal surfaces 241 and 251. The second and third inclined surfaces 243 and 253 are inclined so as to move away from the base 211 as they move away from the second and third lead surfaces 242 and 252.

Each of the first heat shield positioning portion 23, the second heat shield positioning portion 24, and the third heat shield positioning portion 25 can be positioned equidistant from the center of the heat shield positioning jig 2 (on a circle concentric with the virtual circumcircle P). This configuration allows the heat shield 15 to be positioned with its central axis reliably aligned with the central axis of the chamber 11.

Although described in detail later, for example, with the first heat shield positioning portion 23 positioned downward, the jig body 21 is inserted into the main chamber 111, the first horizontal surface 231 abuts against the upper surface of the first supported object 152 placed on the heat insulation cylinder 14, and the first lead straight surface 232 abuts against or faces the side surface of the first supported portion 152, thereby horizontally positioning the first heat shield 15 relative to the main chamber 111.

Furthermore, handles 213 are fixed to the upper and lower surfaces of the base 211. The handles 213 are used by the operator to hold and carry the jig body 21. In other words, the handles 213 function as the gripping portion of the present invention.

Furthermore, a through hole 212A is formed at the top end of each arm 212 in the direction of its extension, extending horizontally through each arm 212. Through hole 212A is sized to accommodate a worker's hand and is used when the worker grasps and carries jig body 21. Through hole 212A functions as the gripping portion of the present invention and contributes to the weight reduction of jig body 21.

<Heat Shield Positioning Method> Next, we will describe a heat shield positioning method for horizontally positioning the heat shield 15 relative to the chamber 11 using the heat shield positioning jig 2. Although this method describes positioning the first heat shield 15 using the first heat shield positioning portion 23 of the heat shield positioning jig 2, the following description also describes positioning the second heat shield 15 using the second heat shield positioning portion 24 or the third heat shield positioning portion 25. Furthermore, the worker-operated tasks described below may be performed by at least one worker or by a device. Figure 4 is a schematic diagram illustrating the horizontal positioning of the heat shield relative to the chamber.

First, as shown in Figure 4, the operator temporarily places the first supported portion 152 of the first heat shield 15 on the upper end of the heat insulation cylinder 14. Next, the operator grasps the handle 213 located on the side opposite the side where the first heat shield positioning portion 23 is located, or inserts their hand into the through hole 212A. With the first heat shield positioning portion 23 positioned downward, that is, facing the upper side of the first heat shield 15 to be positioned, the operator inserts the heat shield positioning jig 2 into the main cavity 111.

When the heat shield plate positioning jig 2 is inserted into the main chamber 111, the jig positioning portion 22 located at the top end of the arm 212 contacts the inner circumferential surface of the main chamber 111, thereby horizontally positioning the heat shield plate positioning jig 2 relative to the main chamber 111 by the jig positioning portion 22.

Furthermore, when the heat shield positioning jig 2 is inserted into the main chamber 111, the first inclined surface 233 of at least one first heat shield positioning portion 23 abuts the upper corner of the first supported portion 152. Subsequently, as the heat shield positioning jig 2 is inserted, the abutment position of the first inclined surface 233 and the upper corner of the first supported portion 152 gradually moves toward the first lead surface 232, causing the first heat shield 15 to move horizontally. The heat shield positioning jig 2 is then inserted until the first lead surface 232 abuts the side surface of the first supported portion 152, thereby horizontally positioning the first heat shield 15 relative to the main chamber 111 using the first heat shield positioning portion 23. The heat shield positioning jig 2 is then inserted until the first horizontal surface 231 abuts the upper surface of the first supported portion 152.

The operator then grasps the upper handle 213 or reaches into the through-hole 212A to remove the heat shield positioning jig 2 from the main chamber 111, ensuring that the first heat shield 15 does not move. In other words, the operator separates the heat shield positioning jig 2 from the main chamber 111 and the first heat shield 15. Through these steps, the horizontal position of the first heat shield 15 is adjusted so that its central axis aligns with that of the main chamber 111, or more specifically, with that of the silicon single crystal SM.

In addition, when the central axis of the temporarily placed first heat shield plate 15 is located on the central axis of the main chamber 111, the first inclined surface 233 does not abut the upper corner of the first supported portion 152, and the first heat shield plate 15 does not move horizontally as the heat shield plate positioning jig 2 is inserted.

Furthermore, when the difference between the diameter R of the virtual circumscribed circle P circumscribing the four jig positioning portions 22 and the inner diameter of the main chamber 111 is not 0 mm, the heat shield positioning jig 2 is inserted into the main chamber 111 without at least one jig positioning portion 22 abutting the main chamber 111. Furthermore, when the difference between the diameter R1 of the first virtual inscribed circle circumscribing the four first lead surfaces 232 and the outer diameter of the first supported portion 152 is not 0 mm, the heat shield positioning jig 2 is inserted into the main chamber 111 without at least one first lead surface 232 abutting the first supported portion 152.

When the first heat shield 15 is positioned in at least one of the following conditions: when at least one jig positioning portion 22 is not in contact with the main chamber 111, and when at least one first lead surface 232 is not in contact with the first supported portion 152, the difference between the diameter R of the virtual circumscribed circle P and the inner diameter of the main chamber 111, and the difference between the diameter R1 of the first virtual inscribed circle and the outer diameter of the first supported portion 152, are both 1 mm or less. Therefore, the maximum deviation of the center axis of the first heat shield 15 from the center axis of the main chamber 111 is 2 mm.

If the deviation of the center axis of the first heat shield 15 from the center axis of the main chamber 111 is 2 mm or less, wobbling of the silicon single crystal SM and uneven thermal environment around it caused by uneven flow of the inert gas between the silicon single crystal SM and the first heat shield 15 can be suppressed. Therefore, even if at least one of the difference between the diameter R of the virtual circumscribed circle P and the inner diameter of the main chamber 111, or the difference between the diameter R1 of the first virtual inscribed circle P and the outer diameter of the first supported portion 152 is not 0 mm, the heat shield positioning jig 2 can properly position the first heat shield 15 in the horizontal direction as long as this difference is less than a predetermined value (1 mm in this embodiment).

<Silicon Single Crystal Manufacturing Method> Next, the silicon single crystal manufacturing method including the aforementioned heat shield positioning method will be described. First, the operator horizontally positions the first heat shield 15, which is temporarily placed within the main chamber 111, using the aforementioned heat shield positioning method. After the operator removes the heat shield positioning jig 2 from the main chamber 111, the silicon single crystal manufacturing apparatus 1 pulls up the silicon single crystal SM within the chamber 11 using a known method. During this pull-up, the central axis of the first heat shield 15 aligns with the central axis of the silicon single crystal SM. This allows the silicon single crystal SM to be pulled up while preventing any wobbling of the silicon single crystal SM and any uneven thermal environment surrounding the silicon single crystal SM.

[Effects of the Embodiment] The heat shield positioning jig 2 includes a jig body 21 that is freely attachable and detachable relative to the main chamber 111. The jig body 21 is provided with a jig positioning portion 22 for horizontally positioning the jig body 21 relative to the main chamber 111, and a first heat shield positioning portion 23 for horizontally positioning the first heat shield 15 relative to the jig body 21. Therefore, the first heat shield plate 15 is temporarily placed in the main chamber 111. After the jig body 21 is horizontally positioned relative to the main chamber 111 by the jig positioning portions 22 and the first heat shield plate positioning portions 23, the first heat shield plate 15 can be horizontally positioned relative to the jig body 21 by simply separating the heat shield plate positioning jig 2 from the main chamber 111 and the first heat shield plate 15. This allows for highly reproducible horizontal positioning of the first heat shield plate 15 relative to the main chamber 111. Therefore, a heat shield plate positioning jig 2 is provided that allows for easy and appropriate horizontal positioning of the first heat shield plate 15. Furthermore, while workers can visually determine the proper position of the first heat shield plate 15 if the main chamber 111 is small, in the silicon single crystal manufacturing apparatus 1 used to manufacture silicon single crystals SM with a straight body diameter of 300 mm or greater, the larger main chamber 111 makes it difficult for workers to visually determine the proper position of the first heat shield plate 15. The heat shield plate positioning jig 2 is useful for positioning the first heat shield plate 15 relative to such a large main chamber 111.

The jig body 21 is provided with first, second, and third heat shield positioning portions 23, 24, and 25 on its vertical side, respectively, for horizontally positioning the first, second, and third heat shield plates 15, 15, respectively, which have different horizontal dimensions. The jig body 21 is mounted in the main chamber 111 with the first heat shield positioning portion 23, corresponding to the first heat shield plate 15 to be positioned, facing the upper side of the first heat shield plate 15. Thus, with only a single heat shield positioning jig 2, it is possible to position the first, second, and third heat shield plates 15, 15, each of which has different horizontal dimensions.

A first heat shield positioning portion 23 is provided on one vertical side of the jig body 21, while a second heat shield positioning portion 24 and a third heat shield positioning portion 25 are provided on the other side. Thus, by attaching the heat shield positioning jig 2 to the main chamber 111 with the first heat shield positioning portion 23 facing the upper side of the first heat shield 15 when positioning the first heat shield 15, and attaching the heat shield positioning jig 2 to the main chamber 111 with the second heat shield positioning portion 24 and the third heat shield positioning portion 25 facing the upper sides of the second and third heat shield 15 when positioning the second and third heat shield 15, the first, second, and third heat shields 15 can be positioned horizontally.

The jig body 21 comprises a base 211 and a plurality of arms 212 extending horizontally from the base 211 in different directions. Each arm 212 is provided with a jig positioning portion 22, as well as a first heat shield positioning portion 23, a second heat shield positioning portion 24, and a third heat shield positioning portion 25. Combining the base 211 and arms 212 to form the jig body 21, the heat shield positioning jig 2 is lightweight.

The base 211 is provided with a handle 213 that functions as a grip. Furthermore, the wrist 212 is provided with a through-hole 212A that also functions as a grip. Thus, the operator can easily move the heat shield positioning jig 2 using the handle 213 or through-hole 212A.

[Variations] Although the embodiments of the present invention have been described in detail above with reference to the accompanying drawings, the specific configuration is not limited to these embodiments. Various improvements and design modifications that do not depart from the spirit of the present invention are also included in the present invention.

For example, the heat shield positioning jig 2 may not include one or two of the first heat shield positioning portion 23, the second heat shield positioning portion 24, and the third heat shield positioning portion 25. Alternatively, the heat shield positioning jig 2 may include four or more heat shield positioning portions to horizontally position four or more types of heat shields 15 having different horizontal dimensions. In this case, the four or more heat shield positioning portions are preferably located on each arm 212 at equal distances from the center of the heat shield positioning jig 2 (on a circle concentric with the virtual circumcircle P).

A first heat shield plate positioning portion 23 , a second heat shield plate positioning portion 24 , and a third heat shield plate positioning portion 25 may be provided on one side of the jig body 21 in the vertical direction (the upper end in FIG. 3A and FIG. 3B ).

The jig body 21 can be formed from a circular plate-shaped member having an outer diameter less than the inner diameter of the main chamber 111, or from a polygonal plate-shaped member having a circumscribed circle with a diameter less than the inner diameter of the main chamber 111. In this case, the side surfaces of the circular plate-shaped member or the corners of the polygonal plate-shaped member when viewed from above can function as jig positioning portions, and positioning portions for the heat shield can be provided on the main surfaces of the circular plate-shaped member or the polygonal plate-shaped member.

The jig body 21 is not provided with at least one of the handle 213 and the through hole 212A that function as a grip. Alternatively, the base 211 may be provided with a through hole that functions as a grip, or the arm 212 may be provided with the handle 213.

A level may be provided at the base 211 and at least one of the four arms 212. With this configuration, it is possible to determine whether the heat shield 15 is horizontally disposed.

Although the jig positioning portion 22 is exemplified as being in contact with the inner peripheral surface of the main chamber 111 , it may also be in contact with at least the outer peripheral surface of the inner and outer peripheral surfaces of the main chamber 111 .

For example, the first heat shield positioning portion 23 may be configured to horizontally position the first heat shield 15 relative to the main chamber 111 by contacting the upper or lower opening edge of the heat shield main body 151 constituting the first heat shield 15, or by contacting the inner peripheral surface of the heat shield main body 151.

The horizontal length of the arm 212 can be varied, enabling the horizontal positioning of the heat shield 15 relative to main chambers 111 having different inner diameters using a single heat shield positioning jig 2. For example, the arm 212 can be constructed by connecting two split arms via a rotating shaft, and the length of the arm 212 can be varied by rotating the outer split arm. Alternatively, instead of using a rotating shaft, the length of the arm 212 can be varied by connecting the two split arms via a toothed mechanism, and sliding the outer split arm.

For example, the heat shield positioning jig 2 can be configured so that the jig body 21 is positioned horizontally relative to the main chamber 111 by the jig positioning portion 22, and the first heat shield positioning portion 23 is used to position the first heat shield 15 horizontally relative to the jig body 21. Alternatively, for example, the heat shield positioning jig 2 can be configured so that the jig body 21 is positioned horizontally relative to the main chamber 111 by the jig positioning portion 22 after the first heat shield positioning portion 23 positions the first heat shield 15 horizontally relative to the jig body 21.

1: Silicon Single Crystal Manufacturing Apparatus 2: Heat Shield Positioning Jig 11: Chamber 12: Crucible 13: Heater 14: Insulation Cylinder 15: Heat Shield 16: Puller 17: Crucible Drive 21: Jig Body 22: Jig Positioning Unit 23: First Heat Shield Positioning Unit 24: Second Heat Shield Positioning Unit 25: Third Heat Shield Positioning Unit 111: Main Chamber 111A: Gas Exhaust Port 112: Top Chamber 113: Puller Chamber 113A: Gas Inlet 151: Heat Shield Body 152: Support Unit 161: Cable 162: Puller Drive 171: Support shaft 211: Base 212: Wrist 212A: Through-hole/Handle 213: Handle/Handle 231: First horizontal surface 232: First lead plane 233: First inclined surface 241: Second horizontal surface 242: Second lead plane 243: Second inclined surface 251: Third horizontal surface 252: Third lead plane 253: Third inclined surface MD: Dopant addition melt R1, R2, R3: Diameters SC: Seed crystal SM: Silicon single crystal

Figure 1 is a schematic diagram illustrating the configuration of a silicon single crystal manufacturing apparatus according to an embodiment of the present invention. Figure 2 is a top view of a heat shield positioning jig, with (A) showing the heat shield positioning jig according to the aforementioned embodiment and (B) showing a heat shield positioning jig according to a modified embodiment. Figure 3 is a side view of the heat shield positioning jig according to the aforementioned embodiment, with (A) showing the entire heat shield positioning jig and (B) showing a portion of the heat shield positioning jig. Figure 4 is a schematic diagram illustrating the horizontal positioning of a heat shield relative to a chamber according to an embodiment.

1: Silicon single crystal manufacturing equipment

2: Heat shield positioning fixture

14: Thermostatic tube

15:Heat shield

21: Fixture body

22: Positioning part for jig

23: Positioning portion for the first heat shield

111:Main chamber

151: Heat shield body

152: Supported Department

211: Base

212: Wrist

212A: Through hole/handle

213: Handle/Grip

Claims (8)

A heat shield positioning jig is provided for positioning a heat shield surrounding a silicon single crystal being pulled within a chamber. The jig comprises: a jig body configured to be freely attachable and detachable relative to the chamber; the jig body is provided with: a jig positioning portion for horizontally positioning the jig body relative to the chamber; and a heat shield positioning portion for horizontally positioning the heat shield relative to the jig body. The heat shield positioning jig of claim 1, wherein: A plurality of heat shield positioning portions are provided on a vertical side of the jig body for horizontally positioning a plurality of types of heat shields having different horizontal dimensions. The jig body is mounted in the chamber with the heat shield positioning portion corresponding to the heat shield to be positioned facing the upper side of the heat shield. The heat shield positioning jig of claim 2, wherein: At least one heat shield positioning portion is provided on one side of the jig body in the vertical direction, and the remaining heat shield positioning portions are provided on the other side of the jig body in the vertical direction. The heat shield positioning jig according to any one of claims 1 to 3, wherein: the jig body includes a base and a plurality of arms extending horizontally from the base in different directions; the jig positioning portion and the heat shield positioning portion are respectively provided on the plurality of arms. The heat shield positioning jig as described in claim 4, wherein a gripping portion for gripping the jig body is provided on the base and at least one of the plurality of arms. The heat shield plate positioning jig according to claim 5, wherein the holding portion is formed by a through hole penetrating through a portion where the holding portion is provided. A heat shield positioning method is provided for positioning a heat shield surrounding a silicon single crystal being pulled within a chamber using the heat shield positioning jig according to claim 1, wherein: the heat shield is temporarily positioned within the chamber; the jig positioning portion simultaneously positions the jig body horizontally relative to the chamber and the heat shield positioning portion simultaneously positions the jig body horizontally relative to the jig body, or positions one of the two positions first and then the other; the heat shield positioning jig is separated from the chamber and the heat shield. A method for manufacturing a silicon single crystal uses the heat shield positioning method of claim 7 to position a heat shield surrounding a silicon single crystal being pulled in a chamber, wherein the silicon single crystal is pulled in the chamber.