TWI895532B - Fluorine-containing resin, repellent, photosensitive resin composition, cured product, and display - Google Patents
Fluorine-containing resin, repellent, photosensitive resin composition, cured product, and displayInfo
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- TWI895532B TWI895532B TW110140043A TW110140043A TWI895532B TW I895532 B TWI895532 B TW I895532B TW 110140043 A TW110140043 A TW 110140043A TW 110140043 A TW110140043 A TW 110140043A TW I895532 B TWI895532 B TW I895532B
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
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- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/42—Nitriles
- C08F220/44—Acrylonitrile
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- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/12—Polymers provided for in subclasses C08C or C08F
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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Abstract
本發明提供一種含氟樹脂,其可製作即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低之障壁(間隔壁)。 本發明之含氟樹脂之特徵在於:含有包含側鏈具有三鍵之單體(A)作為單體單元之重複單元(U)。 The present invention provides a fluorinated resin capable of forming barrier ribs (partition walls) whose repellency is not easily reduced even after UV ozone treatment or oxygen plasma treatment. The fluorinated resin of the present invention is characterized by comprising a repetitive unit (U) comprising a monomer (A) having a triple-bonded side chain as a monomer unit.
Description
本發明係關於一種含氟樹脂、撥液劑、感光性樹脂組合物、硬化物及顯示器。The present invention relates to a fluorine-containing resin, a repellent, a photosensitive resin composition, a cured product, and a display.
於製造有機EL(Electroluminescence,電致發光)顯示器、微LED(light-emitting diode,發光二極體)顯示器、量子點顯示器等顯示元件時,作為具有發光等功能之有機層之形成方法,已知有噴墨法。噴墨法存在數種方法,具體而言,可例舉:使自噴嘴滴至形成於基板上之具有凹凸之圖案膜之凹部之墨水固化之方法;或形成作為被墨水潤濕之部位之親液部與作為未被墨水潤濕之部位之撥液部,將墨水之液滴滴至預先形成於基板上之圖案膜上,使墨水僅附著於親液部之方法等。Inkjet printing is a well-known method for forming organic layers with luminescent properties when manufacturing display devices such as organic EL (electroluminescence) displays, micro-LED (light-emitting diode) displays, and quantum dot displays. Several inkjet methods exist, including: one in which ink dripped from a nozzle onto the concave portions of a patterned film with reliefs formed on a substrate is cured; another in which ink is dropped onto a patterned film pre-formed on the substrate, forming a lyophilic portion (wetted by the ink) and a lyophilic portion (unwetted by the ink), and then depositing ink drops onto the patterned film, ensuring that the ink adheres only to the lyophilic portion.
尤其是,於前者所例舉之使自噴嘴滴至圖案膜之凹部之墨水固化之方法中,為了製作此種具有凹凸之圖案膜,主要可採用兩種方法。一種為光微影法,其藉由將塗佈於基板上之感光性抗蝕膜之表面呈圖案狀曝光,而形成曝光部與未曝光部,利用顯影液將任一部位溶解去除;另一種為使用印刷技術之壓印法。通常於形成具有凹凸之圖案膜之後,會對基板整面進行UV(ultraviolet,紫外線)臭氧處理或氧電漿處理。藉由該UV臭氧處理或氧電漿處理,尤其是可去除圖案膜之凹部之殘留有機物,可降低滴加之墨水之潤濕不均,藉此可防止顯示元件之故障於未然。In particular, in the method cited above of solidifying the ink dripped from the nozzle to the concave portion of the pattern film, there are two main methods that can be used to produce such a pattern film with concave and convex surfaces. One is the photolithography method, which forms exposed and unexposed portions by exposing the surface of the photosensitive anti-etching film coated on the substrate in a patterned manner, and dissolving and removing any portion with a developer; the other is the embossing method using printing technology. Usually, after the pattern film with concave and convex surfaces is formed, the entire surface of the substrate is subjected to UV (ultraviolet) ozone treatment or oxygen plasma treatment. By means of the UV ozone treatment or oxygen plasma treatment, residual organic matter in the concave portion of the pattern film can be removed, and uneven wetting of the dripped ink can be reduced, thereby preventing malfunctions of the display element before they occur.
所形成之具有凹凸之圖案膜之凸部被稱為障壁(間隔壁),於向圖案膜之凹部滴加墨水時,障壁作為用以不使墨水彼此混合之屏障而發揮作用。為了提高該作為屏障之效果,要求基板表面於圖案膜凹部露出,該基板表面對於墨水具有親液性,且障壁上表面對於墨水具有撥液性。The raised areas of the resulting concave-convex pattern film are called barriers (partition walls). When ink is dripped into the concave areas of the pattern film, the barriers act as a barrier, preventing the ink from mixing. To enhance this barrier effect, the substrate surface exposed in the concave areas of the pattern film must be lyophilic to the ink, and the upper surface of the barrier must be repellent to the ink.
作為用以形成此種障壁之樹脂,可使用含氟樹脂。藉由使用含氟樹脂,撥液性提高。Fluorine-containing resins can be used as the resin for forming such a barrier. Fluorine-containing resins improve liquid repellency.
於專利文獻1中,作為含有含氟樹脂之抗蝕劑組合物,揭示有一種抗蝕劑組合物,其特徵在於:其係包含具有由式1所表示之單體形成之單體單元、且氟原子含有率為7~35質量%之含氟樹脂(A)、及對於波長100~600 nm之光起反應之感光性成分者,相對於該抗蝕劑組合物之總固形物成分,上述含氟樹脂(A)之比率為0.1~30質量%,上述感光性成分包含:光酸產生劑(B);鹼可溶性樹脂(C),其具有羧基及/或酚性羥基;及酸交聯劑(D),其係具有兩個以上之藉由酸之作用而能夠與羧基或酚性羥基反應之基之化合物。 CH 2=C(R 1)COOXR f・・・式1 式1中,R 1表示氫原子、甲基、或三氟甲基,X表示碳數1~6之不含氟原子之二價有機基,R f表示碳數4~6之全氟烷基。 Patent document 1 discloses an anti-corrosion agent composition containing a fluorine-containing resin, wherein the anti-corrosion agent composition comprises a fluorine-containing resin (A) having a monomer unit formed by a monomer represented by Formula 1 and a fluorine atom content of 7 to 35 mass %, and a fluorine-containing resin (A) having ... The photosensitive component that reacts to light of 100 nm is prepared by mixing the fluorinated resin (A) in an amount of 0.1 to 30% by mass relative to the total solid content of the anti-corrosion composition. The photosensitive component comprises: a photoacid generator (B); an alkali-soluble resin (C) having carboxyl groups and/or phenolic hydroxyl groups; and an acid crosslinking agent (D) having two or more groups capable of reacting with carboxyl groups or phenolic hydroxyl groups by the action of an acid. CH 2 =C(R 1 )COOXR f ・・・Formula 1 In Formula 1, R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, X represents a divalent organic group having 1 to 6 carbon atoms and not containing a fluorine atom, and R f represents a perfluoroalkyl group having 4 to 6 carbon atoms.
於專利文獻2中,作為含有含氟原子之聚合單元之撥墨劑,揭示有一種撥墨劑,其特徵在於:包含具有聚合單元(b1)及聚合單元(b2)之聚合物,上述聚合單元(b1)具有氫原子之至少一個被取代為氟原子之碳數20以下之烷基(其中,上述烷基包含具有醚性氧者),上述聚合單元(b2)具有乙烯性雙鍵,且上述撥墨劑之氟含量為5~25質量%,數量平均分子量為500以上且未達10000。Patent Document 2 discloses an ink repellent containing fluorine-containing polymeric units. The ink repellent comprises a polymer having polymeric units (b1) and polymeric units (b2), wherein the polymeric units (b1) have an alkyl group having 20 or fewer carbon atoms (including an ethereal oxygen group) in which at least one hydrogen atom is substituted with a fluorine atom, and the polymeric units (b2) have an ethylenic double bond. The ink repellent has a fluorine content of 5 to 25% by mass and a number average molecular weight of 500 or more and less than 10,000.
於專利文獻3中,作為含有含氟樹脂之抗蝕劑組合物,揭示有一種抗蝕劑組合物,其特徵在於:其係包含具有由式1所表示之單體形成之單體單元、具有乙烯性雙鍵、且氟原子含有率為7~35質量%之含氟樹脂(A)、及對於波長100~600 nm之光起反應之感光性成分者,相對於該抗蝕劑組合物之總固形物成分,上述含氟樹脂(A)之比率為0.1~30質量%,上述感光性成分包含光自由基起始劑(E)、及於1分子內具有酸性基及兩個以上之乙烯性雙鍵之鹼可溶性樹脂(F)。 CH 2=C(R 1)COOXR f・・・式1 式1中,R 1表示氫原子、甲基、或三氟甲基,X表示碳數1~6之不含氟原子之二價有機基,R f表示碳數4~6之全氟烷基。 Patent Document 3 discloses an anti-etching composition containing a fluorinated resin. The anti-etching composition comprises a fluorinated resin (A) having monomer units formed from a monomer represented by Formula 1, having ethylenic double bonds, and a fluorine atom content of 7 to 35% by mass; and a photosensitive component that reacts to light having a wavelength of 100 to 600 nm. The ratio of the fluorinated resin (A) is 0.1 to 30% by mass relative to the total solid content of the anti-etching composition. The photosensitive component comprises a photoradical initiator (E) and an alkali-soluble resin (F) having an acidic group and two or more ethylenic double bonds per molecule. CH 2 =C(R 1 )COOXR f ・・・Formula 1 In Formula 1, R 1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, X represents a divalent organic group having 1 to 6 carbon atoms and not containing a fluorine atom, and R f represents a perfluoroalkyl group having 4 to 6 carbon atoms.
於專利文獻4中,作為包含具有氟原子之撥墨劑之負型感光性樹脂組合物,揭示有一種負型感光性樹脂組合物,其特徵在於:其係含有具有光硬化性之鹼可溶性樹脂或鹼可溶性單體(A)、光自由基聚合起始劑(B)、光酸產生劑(C)、酸硬化劑(D)、及具有氟原子之撥墨劑(E)者,且上述撥墨劑(E)中之上述氟原子之含有率為1~40質量%,上述撥墨劑(E)具有乙烯性雙鍵。Patent Document 4 discloses a negative photosensitive resin composition containing an ink repellent having fluorine atoms. The composition comprises a photocurable alkali-soluble resin or alkali-soluble monomer (A), a photoradical polymerization initiator (B), a photoacid generator (C), an acid curing agent (D), and an ink repellent having fluorine atoms (E). The content of the fluorine atoms in the ink repellent (E) is 1 to 40% by mass, and the ink repellent (E) has an ethylenic double bond.
於專利文獻5中,作為具有良好撥液性之感光性樹脂組合物,揭示有一種感光性樹脂組合物,其特徵在於:至少包含具有交聯部位之含氟樹脂、溶劑、及光聚合起始劑,且上述含氟樹脂含有包含具有氟原子之烴之重複單元。 先前技術文獻 專利文獻 Patent Document 5 discloses a photosensitive resin composition having excellent repellency, characterized by comprising at least a fluorinated resin having a crosslinking site, a solvent, and a photopolymerization initiator, wherein the fluorinated resin contains repeating units containing a hydrocarbon having a fluorine atom. Prior Art Documents Patent Documents
專利文獻1:日本專利第4474991號 專利文獻2:日本專利第4488098號 專利文獻3:日本專利第4905563號 專利文獻4:日本專利第6536578號 專利文獻5:國際公開第2020/110793號 Patent Document 1: Japanese Patent No. 4474991 Patent Document 2: Japanese Patent No. 4488098 Patent Document 3: Japanese Patent No. 4905563 Patent Document 4: Japanese Patent No. 6536578 Patent Document 5: International Publication No. 2020/110793
[發明所欲解決之問題][Identify the problem you want to solve]
於使用專利文獻1~4中記載之抗蝕劑組合物等來製作障壁(間隔壁)之情形時,該樹脂硬化物雖具有優異之撥液性,但存在如下問題:當進行上述UV臭氧處理或氧電漿處理時,撥液性下降。When using the anti-etching compositions described in Patent Documents 1 to 4 to form barrier ribs (partition walls), the cured resin has excellent liquid repellency, but suffers from a problem in that the liquid repellency decreases when subjected to the aforementioned UV ozone treatment or oxygen plasma treatment.
本發明之課題在於提供一種含氟樹脂,其可製作即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低之障壁(間隔壁)。 [解決問題之技術手段] The present invention is to provide a fluorinated resin that can be used to produce barrier ribs (partition walls) whose liquid repellency is not easily reduced even after UV ozone treatment or oxygen plasma treatment. [Technical Solution]
本發明人等鑒於上述問題點而進行了銳意研究。結果發現,藉由使用側鏈具有三鍵之單體,可解決上述課題,從而完成了本發明。In light of the above-mentioned problems, the inventors conducted intensive research and discovered that the above-mentioned problems can be solved by using a monomer with a triple-bond side chain, thus completing the present invention.
藉由使用本發明之含氟樹脂,可製作即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低之障壁(間隔壁)。By using the fluorine-containing resin of the present invention, it is possible to produce barrier ribs (partition ribs) whose liquid repellency is not easily reduced even after UV ozone treatment or oxygen plasma treatment.
即,本發明如下所述。That is, the present invention is as follows.
本發明之含氟樹脂之特徵在於:含有包含側鏈具有三鍵之單體(A)作為單體單元之重複單元(U)。The fluorine-containing resin of the present invention is characterized in that it contains a monomer (A) having a triple bond in the side chain as a repetitive unit (U).
本發明之含氟樹脂較佳為氟原子之含量為5質量%以上。The fluorine-containing resin of the present invention preferably has a fluorine atom content of 5% by mass or more.
本發明之含氟樹脂較佳為於至少一部分之上述單體(A)之側鏈包含氟原子。The fluorine-containing resin of the present invention preferably contains fluorine atoms in at least a portion of the side chains of the monomer (A).
於本發明之含氟樹脂中,較佳為三鍵之至少一部分為腈基之碳-氮三鍵。In the fluorine-containing resin of the present invention, a carbon-nitrogen triple bond in which at least a portion of the triple bond is a nitrile group is preferred.
於本發明之含氟樹脂中,較佳為至少一部分之上述單體(A)具有下述式(1)或式(1´)所表示之結構。 CH 2=C(R 1)C≡CR 2・・・(1) CH 2=C(R 1)XC≡CR 2・・・(1´) (式(1)及式(1´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R 2表示碳數1~15之直鏈狀、碳數3~15之支鏈狀或碳數3~15之環狀之烷基,該烷基中之任意數量之氫原子可經氟原子取代) In the fluorinated resin of the present invention, it is preferred that at least a portion of the monomer (A) has a structure represented by the following formula (1) or formula (1'). CH 2 =C(R 1 )C≡CR 2 ・・・(1) CH 2 =C(R 1 )XC≡CR 2 ・・・(1´) (In formulas (1) and (1´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a hydroxy group or -OC(=O)-CH 3 ; R 2 represents a linear, branched, or cyclic alkyl group having 1 to 15 carbon atoms, 3 to 15 carbon atoms, or 3 to 15 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a fluorine atom)
於本發明之含氟樹脂中,較佳為上述式(1)或(1´)所表示之結構為下述式(2)或式(2´)所表示之結構。 CH 2=C(R 1)C≡CR f・・・(2) CH 2=C(R 1)XC≡CR f・・・(2´) (式(2)及式(2´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R f表示碳數1~6之直鏈狀、碳數3~6之支鏈狀或者碳數3~6之環狀之全氟烷基) In the fluorinated resin of the present invention, the structure represented by the above formula (1) or (1') is preferably a structure represented by the following formula (2) or (2'). CH 2 =C(R 1 )C≡CR f ・・・(2) CH 2 =C(R 1 )XC≡CR f ・・・(2´) (In formulas (2) and (2´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms; any number of hydrogen atoms in the alkylene group may be substituted with a hydroxyl group or -OC(=O)-CH 3 ; R f represents a linear, branched, or cyclic perfluoroalkyl group having 1 to 6 carbon atoms)
本發明之含氟樹脂較佳為上述重複單元(U)包含上述單體(A)及具有下述式(3)或式(3´)所表示之結構之單體(B)作為單體單元。 CH 2=C(R 1)COOR 2・・・(3) CH 2=C(R 1)COOXR 2・・・(3´) (式(3)及式(3´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R 2表示碳數1~15之直鏈狀、碳數3~15之支鏈狀或碳數3~15之環狀之烷基,該烷基中之任意數量之氫原子可經氟原子取代) The fluorinated resin of the present invention preferably comprises the above-mentioned repeating unit (U) comprising the above-mentioned monomer (A) and a monomer (B) having a structure represented by the following formula (3) or formula (3') as monomer units. CH 2 =C(R 1 )COOR 2 ・・・(3) CH 2 =C(R 1 )COOXR 2 ・・・(3´) (In formulas (3) and (3´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a hydroxy group or -OC(=O)-CH 3 ; R 2 represents a linear, branched, or cyclic alkyl group having 1 to 15 carbon atoms, 3 to 15 carbon atoms, or 3 to 15 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a fluorine atom)
本發明之含氟樹脂較佳為上述式(3)或式(3´)所表示之結構為下述式(4)或式(4´)所表示之結構。 CH 2=C(R 1)COOR f・・・(4) CH 2=C(R 1)COOXR f・・・(4´) (式(4)及式(4´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R f表示碳數1~6之直鏈狀、碳數3~6之支鏈狀或者碳數3~6之環狀之全氟烷基) The fluorinated resin of the present invention preferably has a structure represented by the above formula (3) or formula (3') or a structure represented by the following formula (4) or formula (4'). CH 2 =C(R 1 )COOR f ・・・(4) CH 2 =C(R 1 )COOXR f ・・・(4´) (In formulas (4) and (4´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms; any number of hydrogen atoms in the alkylene group may be substituted with a hydroxyl group or -OC(=O)-CH 3 ; R f represents a linear, branched, or cyclic perfluoroalkyl group having 1 to 6 carbon atoms)
本發明之撥液劑之特徵在於包含上述本發明之含氟樹脂。The repellent of the present invention is characterized by comprising the above-mentioned fluorine-containing resin of the present invention.
本發明之感光性樹脂組合物之特徵在於至少包含上述本發明之含氟樹脂、溶劑、及光聚合起始劑。The photosensitive resin composition of the present invention is characterized by comprising at least the fluorine-containing resin of the present invention, a solvent, and a photopolymerization initiator.
本發明之感光性樹脂組合物較佳為進而包含交聯劑及鹼溶解性樹脂。The photosensitive resin composition of the present invention preferably further comprises a crosslinking agent and an alkaline-soluble resin.
本發明之感光性樹脂組合物較佳為用於間隔壁之形成。The photosensitive resin composition of the present invention is preferably used for forming partition walls.
本發明之硬化物之特徵在於:其係使上述本發明之感光性樹脂組合物硬化而成。The characteristic of the cured product of the present invention is that it is formed by curing the above-mentioned photosensitive resin composition of the present invention.
本發明之顯示器之特徵在於包含發光元件,該發光元件具備: 間隔壁,其包含上述本發明之硬化物;及 發光層,其配置於藉由上述間隔壁所劃分之區域。 The display of the present invention is characterized by including a light-emitting element having: Partition walls comprising the cured article of the present invention; and A light-emitting layer disposed in the region defined by the partition walls.
本發明之顯示器較佳為有機EL顯示器或量子點顯示器。 [發明之效果] The display of the present invention is preferably an organic EL display or a quantum dot display. [Effects of the Invention]
根據本發明,可製作即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低之障壁(間隔壁)。According to the present invention, it is possible to produce a barrier rib (partition rib) whose liquid repellency is not easily reduced even after UV ozone treatment or oxygen plasma treatment.
以下,針對本發明進行詳細說明,以下所記載之構成要件之說明為本發明之實施方式之一例,本發明並不限定於該等具體內容。可於其主旨範圍內進行各種變化來實施。The present invention is described in detail below. The description of the constituent elements described below is an example of an embodiment of the present invention. The present invention is not limited to the specific contents and can be implemented in various modifications within the scope of the present invention.
於本說明書之「實施方式」一欄中,由「[」及「]」、「<」及「>」表示之事項單純為符號,其本身不具有含義。 於本說明書中,「聚合物」與「樹脂」為同義詞,除非另有註釋,否則該等係指高分子化合物。 In the "Embodiments" section of this specification, the terms "[" and "]", "<" and ">" are merely symbols and have no inherent meaning. In this specification, "polymer" and "resin" are synonymous and, unless otherwise noted, refer to high molecular weight compounds.
於本說明書中,「障壁」與「間隔壁」為同義詞,除非另有註釋,否則該等係指噴墨法中之具有凹凸之圖案膜之凸部。In this specification, "barrier" and "spacer" are synonymous and, unless otherwise noted, refer to the convex portion of a patterned film having concave and convex surfaces in an inkjet process.
(含氟樹脂) 本發明之含氟樹脂之特徵在於:含有包含側鏈具有三鍵之單體(A)作為單體單元之重複單元(U)。 (Fluoro-Resin) The fluorine-containing resin of the present invention is characterized by comprising a monomer (A) having a triple-bonded side chain as a repetitive unit (U).
藉由使用此種本發明之含氟樹脂,可製作撥液性足夠高之障壁(間隔壁)。又,所製作之障壁(間隔壁)即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低。 再者,可製作撥液性足夠高之障壁(間隔壁)之原因預測為如下。 首先,認為當含氟烷基發生表面偏析時,撥液性提高。 如後所述,於使用本發明之含氟樹脂製作障壁(間隔壁)之情形時,於形成圖案膜之後進行UV臭氧處理或氧電漿處理,其後進行加熱處理。 於使用本發明之含氟樹脂形成圖案膜之後,藉由進行UV臭氧處理或氧電漿處理,而使三鍵所具有之π電子與-CH、-OH、-NH鍵相互作用,該等官能基被固定化。另一方面,與三鍵所具有之π電子之相互作用較弱之含氟烷基易於發生表面偏析。其後藉由加熱,使得再排列得到促進,撥液性提高。 By using the fluorinated resin of the present invention, barrier ribs (partition ribs) with sufficiently high liquid repellency can be produced. Furthermore, even after UV ozone treatment or oxygen plasma treatment, the resulting barrier ribs (partition ribs) exhibit a low level of liquid repellency. The reason for producing such highly liquid repellent barrier ribs (partition ribs) is speculated to be as follows. First, it is believed that surface segregation of fluoroalkyl groups enhances liquid repellency. As described below, when using the fluorinated resin of the present invention to produce barrier ribs (partition ribs), UV ozone treatment or oxygen plasma treatment is performed after forming a patterned film, followed by a heat treatment. After forming a patterned film using the fluorinated resin of the present invention, UV ozone treatment or oxygen plasma treatment allows the π electrons of the triple bonds to interact with the -CH, -OH, and -NH bonds, immobilizing these functional groups. On the other hand, fluorinated alkyl groups, which interact less strongly with the π electrons of the triple bonds, tend to segregate on the surface. Subsequent heating promotes rearrangement, improving liquid repellency.
於本說明書中,「側鏈具有三鍵之單體(A)」係指於單體(A)形成聚合物時,於聚合物之成為側鏈之位置具有三鍵之單體。 於本說明書中,「重複單元(U)」係構成含氟樹脂之主鏈之單體單元,且係指於該主鏈中所存在之複數個之單體單元。再者,重複單元(U)可連續地構成含氟樹脂之主鏈,亦可以於重複單元(U)彼此之間存在其他單體單元之方式構成含氟樹脂之主鏈。又,於含氟樹脂之主鏈末端亦可存在除了重複單元(U)以外之單體單元。 In this specification, "a monomer (A) having a triple bond in a side chain" refers to a monomer having a triple bond at a position that becomes a side chain in a polymer formed from monomer (A). In this specification, "a repeating unit (U)" refers to a monomer unit that constitutes the main chain of a fluororesin and refers to a plurality of monomer units present in that main chain. Furthermore, the repeating units (U) may constitute the main chain of the fluororesin continuously, or other monomer units may be present between the repeating units (U). Furthermore, monomer units other than the repeating units (U) may be present at the ends of the main chain of the fluororesin.
本發明之含氟樹脂較佳為氟原子之含量為5質量%以上。 又,氟原子之含量較佳為50質量%以下。 於氟原子之含量為5質量%以上之情形時,可製作撥液性更高之障壁。 The fluorine-containing resin of the present invention preferably has a fluorine atom content of 5% by mass or greater. Also, the fluorine atom content is preferably 50% by mass or less. A fluorine atom content of 5% by mass or greater can produce a barrier with even higher liquid repellency.
再者,於本說明書中,「含氟樹脂之氟原子之含量」係指根據經NMR(核磁共振分光法)所測得之構成含氟樹脂之單體之莫耳比率、構成含氟樹脂之單體之分子量、及單體中所含之氟之含量而算出之值。 此處,針對在含氟樹脂為將1,1-雙三氟甲基丁二烯、4-羥基苯乙烯、及甲基丙烯酸2-(全氟己基)乙酯聚合而成之樹脂之情況下之氟含量之測定方法進行說明。 (i)首先,藉由對含氟樹脂進行NMR測定,算出各組成之比率(莫耳比率)。 (ii)將含氟樹脂之各組成之單體之分子量(Mw)乘以莫耳比率,將所獲得之值相加,求出合計值。由該合計值算出各組成之重量比率(wt%)。 再者,1,1-雙三氟甲基丁二烯之分子量為190,1,1-雙三氟甲基丁二烯之分子量為120,甲基丙烯酸2-(全氟己基)乙酯之分子量為432。 (iii)其次,於含有氟之組成中,計算單體中之氟含有率。 (iv)算出各成分中之「單體中之氟含有率÷單體分子量(Mw)×重量比率(wt%)」,將所獲得之數值累加。 (v)算出「上述(iv)中獲得之數值」/「上述(ii)中獲得之合計值」,算出含氟樹脂之氟原子之含量。 Furthermore, in this specification, the "fluorine atom content of a fluorinated resin" refers to a value calculated based on the molar ratio of monomers constituting the fluorinated resin, the molecular weight of the monomers constituting the fluorinated resin, and the fluorine content contained in the monomers, as measured by NMR (nuclear magnetic resonance spectroscopy). Herein, a method for determining the fluorine content in a fluorinated resin obtained by polymerizing 1,1-bis(trifluoromethyl)butadiene, 4-hydroxystyrene, and 2-(perfluorohexyl)ethyl methacrylate is described. (i) First, the ratio (molar ratio) of each component is calculated by NMR measurement of the fluorinated resin. (ii) Multiply the molecular weight (Mw) of the monomers in each component of the fluorinated resin by the molar ratio, add the obtained values, and calculate the total. Calculate the weight ratio (wt%) of each component from this total. Furthermore, the molecular weight of 1,1-bis(trifluoromethyl)butadiene is 190, the molecular weight of 1,1-bis(trifluoromethyl)butadiene is 120, and the molecular weight of 2-(perfluorohexyl)ethyl methacrylate is 432. (iii) Next, calculate the fluorine content of the monomers in the fluorine-containing components. (iv) Calculate the "fluorine content of the monomers" for each component by dividing the monomer molecular weight (Mw) by the weight ratio (wt%) and sum the obtained values. (v) Calculate the "value obtained in (iv) above" / "the total value obtained in (ii) above" to calculate the fluorine atom content of the fluorine-containing resin.
於本發明之含氟樹脂中,較佳為至少一部分之單體(A)具有下述式(1)或式(1´)所表示之結構。 CH 2=C(R 1)C≡CR 2・・・(1) CH 2=C(R 1)XC≡CR 2・・・(1´) (式(1)及式(1´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R 2表示碳數1~15之直鏈狀、碳數3~15之支鏈狀或碳數3~15之環狀之烷基,該烷基中之任意數量之氫原子可經氟原子取代) In the fluorinated resin of the present invention, it is preferred that at least a portion of the monomer (A) has a structure represented by the following formula (1) or formula (1'). CH 2 =C(R 1 )C≡CR 2 ・・・(1) CH 2 =C(R 1 )XC≡CR 2 ・・・(1´) (In formulas (1) and (1´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a hydroxy group or -OC(=O)-CH 3 ; R 2 represents a linear, branched, or cyclic alkyl group having 1 to 15 carbon atoms, 3 to 15 carbon atoms, or 3 to 15 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a fluorine atom)
又,於本發明之含氟樹脂中,較佳為上述式(1)或(1´)所表示之結構為下述式(2)或式(2´)所表示之結構。 CH 2=C(R 1)C≡CR f・・・(2) CH 2=C(R 1)XC≡CR f・・・(2´) (式(2)及式(2´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R f表示碳數1~6之直鏈狀、碳數3~6之支鏈狀或者碳數3~6之環狀之全氟烷基) Furthermore, in the fluorine-containing resin of the present invention, it is preferred that the structure represented by the above formula (1) or (1') is a structure represented by the following formula (2) or (2'). CH 2 =C(R 1 )C≡CR f ・・・(2) CH 2 =C(R 1 )XC≡CR f ・・・(2´) (In formulas (2) and (2´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms; any number of hydrogen atoms in the alkylene group may be substituted with a hydroxyl group or -OC(=O)-CH 3 ; R f represents a linear, branched, or cyclic perfluoroalkyl group having 1 to 6 carbon atoms)
作為式(1)及式(1´)之較佳結構(包含式(2)及式(2´)之較佳結構),可例舉如下之式(1-1)~(1-4)及(2-1)~(2-4)表示之結構。As preferred structures of Formula (1) and Formula (1') (including preferred structures of Formula (2) and Formula (2')), the structures represented by the following Formulas (1-1) to (1-4) and (2-1) to (2-4) can be cited.
CH 2=CHC≡CCF 2H・・・(1-1) CH 2=CHC≡CC 2F 4H・・・(1-2) CH 2=C(CH 3)C≡CCF 2H・・・(1-3) CH 2=C(CH 3)C≡CC 2F 4H・・・(1-4) CH 2=CHC≡CCF 3・・・(2-1) CH 2=CHC≡CC 4F 9・・・(2-2) CH 2=C(CH 3)C≡CCF 3・・・(2-3) CH 2=C(CH 3)C≡CC 4F 9・・・(2-4) CH 2 =CHC≡CCF 2 H・・・(1-1) CH 2 =CHC≡CC 2 F 4 H・・・(1-2) CH 2 =C(CH 3 )C≡CCF 2 H・・・(1-3) CH 2 =C(CH 3 )C≡CC 2 F 4 H・・・(1-4) CH 2 =CHC≡CCF 3 ・・・(2-1) CH 2 =CHC≡CC 4 F 9 ・・・(2-2) CH 2 =C(CH 3 )C≡CCF 3 ・・・(2-3) CH 2 =C(CH 3 )C≡CC 4 F 9 ・・・(2-4)
又,於本發明之含氟樹脂中,較佳為重複單元(U)包含上述單體(A)及具有下述式(3)或式(3´)所表示之結構之單體(B)作為單體單元。Furthermore, in the fluorinated resin of the present invention, it is preferred that the repeating unit (U) comprises the above-mentioned monomer (A) and a monomer (B) having a structure represented by the following formula (3) or formula (3') as monomer units.
CH 2=C(R 1)COOR 2・・・(3) CH 2=C(R 1)COOXR 2・・・(3´) (式(3)及式(3´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R 2表示碳數1~15之直鏈狀、碳數3~15之支鏈狀或碳數3~15之環狀之烷基,該烷基中之任意數量之氫原子可經氟原子取代) CH 2 =C(R 1 )COOR 2 ・・・(3) CH 2 =C(R 1 )COOXR 2 ・・・(3´) (In formulas (3) and (3´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a hydroxy group or -OC(=O)-CH 3 ; R 2 represents a linear, branched, or cyclic alkyl group having 1 to 15 carbon atoms, 3 to 15 carbon atoms, or 3 to 15 carbon atoms, and any number of hydrogen atoms in the alkylene group may be substituted with a fluorine atom)
又,作為式(3)及式(3´)所表示之單體,較佳為具有下述式(4)及式(4´)所表示之結構。Furthermore, the monomers represented by formula (3) and formula (3') preferably have structures represented by the following formula (4) and formula (4').
CH 2=C(R 1)COOR f・・・(4) CH 2=C(R 1)COOXR f・・・(4´) (式(4)及式(4´)中,R 1表示氫原子、氟原子、或甲基;X表示二價之連結基,表示碳數1~10之直鏈狀、碳數3~10之支鏈狀或碳數3~10之環狀之伸烷基,該伸烷基中之任意數量之氫原子可經羥基或-O-C(=O)-CH 3取代;R f表示碳數1~6之直鏈狀、碳數3~6之支鏈狀或者碳數3~6之環狀之全氟烷基) CH 2 =C(R 1 )COOR f ・・・(4) CH 2 =C(R 1 )COOXR f ・・・(4´) (In formulas (4) and (4´), R 1 represents a hydrogen atom, a fluorine atom, or a methyl group; X represents a divalent linking group, representing a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms, 3 to 10 carbon atoms, or 3 to 10 carbon atoms; any number of hydrogen atoms in the alkylene group may be substituted with a hydroxyl group or -OC(=O)-CH 3 ; R f represents a linear, branched, or cyclic perfluoroalkyl group having 1 to 6 carbon atoms)
關於式(4)及式(4´),作為更佳之結構,可例舉如下之式(4´-1)~(4´-3)之結構。Regarding Formula (4) and Formula (4'), the following structures of Formula (4'-1) to (4'-3) can be cited as more preferable structures.
CH 2=C(CH 3)COOC 2H 4C 6F 13・・・(4´-1) CH 2=C(CH 3)COOC 2H 4C 4F 9・・・(4´-2) CH 2=C(CH 3)COOCH(CF 3)CF 3・・・(4´-3) CH 2 =C(CH 3 )COOC 2 H 4 C 6 F 13 ・・・(4´-1) CH 2 =C(CH 3 )COOC 2 H 4 C 4 F 9 ・・・(4´-2) CH 2 =C(CH 3 )COOCH(CF 3 )CF 3 ・・・(4´-3)
於本發明之含氟樹脂之重複單元(U)包含兩個以上之式(1)、式(1´)、式(2)、式(2´)、式(3)、式(3´)、式(4)、及式(4´)所表示之結構中之不同種類之結構之情形時,於各結構中,R 1、R 2、R f及X可相同亦可不同。 When the repeating unit (U) of the fluorinated resin of the present invention includes two or more structures of different types among the structures represented by formula (1), formula (1'), formula (2), formula (2'), formula (3), formula (3'), formula (4), and formula (4'), R 1 , R 2 , R f , and X in each structure may be the same or different.
本發明之含氟樹脂較佳為於至少一部分之單體(A)之側鏈包含氟原子。 又,氟原子可配置於上述式(1)、式(1´)、式(2)、或式(2´)所示之結構中成為側鏈之位置,亦可配置於其他結構中成為側鏈之位置。 The fluorine-containing resin of the present invention preferably contains fluorine atoms in the side chains of at least a portion of the monomer (A). Furthermore, the fluorine atoms may be positioned at positions forming side chains in the structures represented by Formula (1), Formula (1'), Formula (2), or Formula (2'), or may be positioned at positions forming side chains in other structures.
於本發明之含氟樹脂中,較佳為三鍵之至少一部分為腈基之碳-氮三鍵。 又,氟原子可配置於上述式(1)、式(1´)、式(2)、或式(2´)所示之結構中成為側鏈之位置,亦可配置於其他結構中成為側鏈之位置。 In the fluorinated resin of the present invention, a carbon-nitrogen triple bond in which at least a portion of the triple bond is a nitrile group is preferred. Fluorine atoms may be positioned as side chains in the structures represented by formula (1), formula (1'), formula (2), or formula (2'), or may be positioned as side chains in other structures.
本發明之含氟樹脂之分子量以藉由將聚苯乙烯作為標準物質之凝膠滲透層析法(GPC)所測得之質量平均分子量計,較佳為1,000以上1,000,000以下,更佳為2,000以上500,000以下,尤佳為3,000以上100,000以下。 若分子量小於1,000,則有形成之含氟樹脂膜或有機EL用障壁之強度降低之趨勢,若分子量大於1,000,000,則於溶劑中之溶解性不足,藉由塗佈之含氟樹脂膜之形成可能會變得困難。 The molecular weight of the fluororesin of the present invention, as measured by gel permeation chromatography (GPC) using polystyrene as a standard, is preferably 1,000 to 1,000,000, more preferably 2,000 to 500,000, and even more preferably 3,000 to 100,000. If the molecular weight is less than 1,000, the strength of the resulting fluororesin film or barrier rib for organic EL tends to decrease. If the molecular weight is greater than 1,000,000, the solubility in solvents is insufficient, making it difficult to form a fluororesin film by coating.
分散指數(Mw/Mn)較佳為1.01~5.00,更佳為1.01~4.00,尤佳為1.01~3.00。The dispersion index (Mw/Mn) is preferably 1.01 to 5.00, more preferably 1.01 to 4.00, and even more preferably 1.01 to 3.00.
本發明之含氟樹脂可用於撥液劑或感光性樹脂組合物。The fluorine-containing resin of the present invention can be used in repellents or photosensitive resin compositions.
(感光性樹脂組合物) 本發明之感光性樹脂組合物之特徵在於至少包含上述本發明之含氟樹脂、溶劑、及光聚合起始劑。 (Photosensitive Resin Composition) The photosensitive resin composition of the present invention is characterized by comprising at least the fluorinated resin of the present invention, a solvent, and a photopolymerization initiator.
本發明之感光性樹脂組合物可用於形成障壁(間隔壁)。 由於包含上述本發明之含氟樹脂,故可製作撥液性足夠高之障壁(間隔壁)。又,所製作之障壁(間隔壁)即便經過UV臭氧處理或氧電漿處理,撥液性亦不易降低。 The photosensitive resin composition of the present invention can be used to form barrier ribs (partition walls). Because it contains the fluorinated resin of the present invention, barrier ribs (partition walls) with sufficiently high liquid repellency can be produced. Furthermore, even after UV ozone treatment or oxygen plasma treatment, the liquid repellency of the produced barrier ribs (partition walls) is not easily reduced.
本發明之感光性樹脂組合物中所含之溶劑只要含氟樹脂可溶於其中,便無特別限定,可例舉:酮類、醇類、多元醇類及其衍生物、醚類、酯類、芳香族系溶劑、氟系溶劑等。該等可單獨使用,亦可將兩種以上混合來使用。The solvent contained in the photosensitive resin composition of the present invention is not particularly limited as long as the fluorinated resin is soluble therein. Examples include ketones, alcohols, polyols and their derivatives, ethers, esters, aromatic solvents, and fluorinated solvents. These solvents may be used alone or in combination of two or more.
作為酮類,具體而言,可例舉:丙酮、甲基乙基酮、環戊酮、環己酮、甲基異戊酮、2-庚酮環戊酮、甲基異丁基酮甲基異戊酮、2-庚酮等。 作為醇類,具體而言,可例舉:異丙醇、丁醇、異丁醇、正戊醇、異戊醇(isopentanol)、第三戊醇(tert-pentanol)、4-甲基-2-戊醇、3-甲基-3-戊醇、2,3-二甲基-2-戊醇、正己醇、正庚醇、2-庚醇、正辛醇、正癸醇、第二戊醇、第三戊醇(t-amyl alcohol)、異戊醇(isoamyl alcohol)、2-乙基-1-丁醇、月桂醇、己基癸醇、油醇等。 Specific examples of ketones include acetone, methyl ethyl ketone, cyclopentanone, cyclohexanone, methyl isoamyl ketone, 2-heptanone, cyclopentanone, methyl isobutyl ketone, methyl isoamyl ketone, and 2-heptanone. Specific examples of alcohols include isopropanol, butanol, isobutanol, n-pentanol, isopentanol, tert-pentanol, 4-methyl-2-pentanol, 3-methyl-3-pentanol, 2,3-dimethyl-2-pentanol, n-hexanol, n-heptanol, 2-heptanol, n-octanol, n-decanol, t-amyl alcohol, isoamyl alcohol, 2-ethyl-1-butanol, lauryl alcohol, hexyldecanol, and oleyl alcohol.
作為多元醇類及其衍生物,具體而言,可例舉:乙二醇、乙二醇單乙酸酯、乙二醇二甲醚、二乙二醇、二乙二醇二甲醚、二乙二醇單乙酸酯、丙二醇、丙二醇單乙酸酯、丙二醇單甲醚(PGME)、丙二醇單乙醚、丙二醇單丙醚、丙二醇單丁醚、丙二醇單甲醚乙酸酯(PGMEA)、二丙二醇、或二丙二醇單乙酸酯之單甲醚、單乙醚、單丙醚、單丁醚、單苯醚等。Specific examples of polyols and their derivatives include ethylene glycol, ethylene glycol monoacetate, ethylene glycol dimethyl ether, diethylene glycol, diethylene glycol dimethyl ether, diethylene glycol monoacetate, propylene glycol, propylene glycol monoacetate, propylene glycol monomethyl ether (PGME), propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate (PGMEA), dipropylene glycol, or the monomethyl ether, monoethyl ether, monopropyl ether, monobutyl ether, and monophenyl ether of dipropylene glycol monoacetate.
作為醚類,具體而言,可例舉:二乙醚、二異丙醚、四氫呋喃、二㗁烷、苯甲醚等。Specific examples of the ethers include diethyl ether, diisopropyl ether, tetrahydrofuran, dioxane, and anisole.
作為酯類,具體而言,可例舉:乳酸甲酯、乳酸乙酯(EL)、乙酸甲酯、乙酸乙酯、乙酸丁酯、丙酮酸甲酯、丙酮酸乙酯、甲氧基丙酸甲酯、乙氧基丙酸乙酯、γ-丁內酯等。 作為芳香族系溶劑,可例舉:二甲苯、甲苯等。 Specific examples of esters include methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, ethyl ethoxypropionate, and γ-butyrolactone. Examples of aromatic solvents include xylene and toluene.
作為氟系溶劑,可例舉:氟氯碳化物、氫氟氯碳化物、全氟化合物、六氟異丙醇等。Examples of fluorine-based solvents include fluorochlorocarbons, hydrofluorochlorocarbons, perfluoro compounds, and hexafluoroisopropyl alcohol.
此外,為了提高塗佈性,可使用作為高沸點弱溶劑之松節油系之石腦油溶劑或石蠟系溶劑等。In order to improve the coating properties, a turpentine-based naphtha solvent or a wax-based solvent, which is a high-boiling-point weak solvent, can be used.
其中,溶劑較佳為選自由如下化合物所組成之群中之至少一種:甲基乙基酮、環己酮、甲基異戊酮、2-庚酮、乙二醇、乙二醇二甲醚、乙二醇單乙酸酯、二乙二醇、二乙二醇單乙酸酯、二乙二醇二甲醚、丙二醇、丙二醇單乙酸酯、丙二醇單甲醚(PGME)、丙二醇單甲醚乙酸酯(PGMEA)、二丙二醇、二丙二醇單乙酸酯單甲醚、二丙二醇單乙酸酯單乙醚、二丙二醇單乙酸酯單丙醚、二丙二醇單乙酸酯單丁醚、二丙二醇單乙酸酯單苯醚、1,4-二㗁烷、乳酸甲酯、乳酸乙酯、乙酸甲酯、乙酸乙酯、乙酸丁酯、甲氧基丙酸甲酯、乙氧基丙酸乙酯、γ-丁內酯、及六氟異丙醇。更佳為選自由甲基乙基酮、丙二醇單甲醚乙酸酯(PGMEA)、丙二醇單甲醚(PGME)、環己酮、乳酸乙酯、乙酸丁酯、及γ-丁內酯所組成之群中之至少一種。Among them, the solvent is preferably at least one selected from the group consisting of methyl ethyl ketone, cyclohexanone, methyl isoamyl ketone, 2-heptanone, ethylene glycol, ethylene glycol dimethyl ether, ethylene glycol monoacetate, diethylene glycol, diethylene glycol monoacetate, diethylene glycol dimethyl ether, propylene glycol, propylene glycol monoacetate, propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dipropylene glycol, dipropylene glycol monoacetate monomethyl ether, dipropylene glycol monoacetate monoethyl ether, dipropylene glycol monoacetate monopropyl ether, dipropylene glycol monoacetate monobutyl ether, dipropylene glycol monoacetate monophenyl ether, 1,4-dioxane, methyl lactate, ethyl lactate, methyl acetate, ethyl acetate, butyl acetate, methyl methoxypropionate, ethyl ethoxypropionate, γ-butyrolactone, and hexafluoroisopropanol. More preferably, it is at least one selected from the group consisting of methyl ethyl ketone, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), cyclohexanone, ethyl lactate, butyl acetate, and γ-butyrolactone.
本發明之感光性樹脂組合物中之溶劑之量相對於含氟樹脂之濃度(其中,於感光性樹脂組合物中包含後述之鹼溶解性樹脂之情形時為包括該樹脂在內之合計濃度)100質量份,較佳為處於50質量份以上2,000質量份以下之範圍內。更佳為100質量份以上1,000質量份以下。藉由調整溶劑之量,可調整所形成之樹脂膜之膜厚,若溶劑之量處於上述範圍,則可獲得尤其適於獲得有機EL用障壁之樹脂膜之膜厚。The amount of solvent in the photosensitive resin composition of the present invention is preferably within a range of 50 to 2,000 parts by mass relative to 100 parts by mass of the fluorinated resin concentration (wherein, when the photosensitive resin composition includes an alkali-soluble resin, this is the total concentration including the alkali-soluble resin described below). More preferably, it is 100 to 1,000 parts by mass. Adjusting the amount of solvent can adjust the thickness of the resulting resin film. When the amount of solvent is within this range, a resin film thickness particularly suitable for forming barrier ribs for organic EL can be achieved.
本發明之感光性樹脂組合物中所含之光聚合起始劑只要是藉由電磁波或電子束等高能量線而使具有聚合性雙鍵之單體聚合者,則並無特別限定,可使用公知之光聚合起始劑。 作為光聚合起始劑,可使用光自由基起始劑或光酸起始劑,該等可單獨使用,亦可併用光自由基起始劑及光酸起始劑,亦可將兩種以上之光自由基起始劑或光酸起始劑混合使用。又,藉由使用光聚合起始劑之同時使用添加劑,視情況亦可進行活性聚合,該添加劑可使用公知之添加劑。 The photopolymerization initiator contained in the photosensitive resin composition of the present invention is not particularly limited, as long as it polymerizes monomers having polymerizable double bonds by high-energy radiation such as electromagnetic waves or electron beams. Known photopolymerization initiators can be used. Photopolymerization initiators can be photoradical initiators or photoacid initiators. These can be used alone or in combination, or two or more photoradical initiators or photoacid initiators can be mixed. Furthermore, by using an additive simultaneously with the photopolymerization initiator, living polymerization can be achieved, if appropriate. Such additives can be known additives.
作為光自由基起始劑,具體而言,可分類為分子內之鍵因吸收電磁波或電子束而斷鍵,生成自由基之分子內斷鍵型;及藉由併用三級胺或醚等氫供與體而生成自由基之奪氫型等;該等均可使用。亦可使用除了上述所例舉之類型以外之光自由基起始劑。Photoradical initiators can be specifically categorized into two types: intramolecular bond-breaking type, in which bonds within a molecule are broken by absorption of electromagnetic waves or electron beams, generating free radicals; and hydrogen-absorptive type, in which free radicals are generated by combining with hydrogen donors such as tertiary amines or ethers. All of these types can be used. Photoradical initiators other than the types listed above can also be used.
作為光自由基起始劑,具體而言,可例舉:二苯甲酮系、苯乙酮系、二酮系、醯基氧化膦系、醌系、醇酮(acyloin)系等。Specific examples of the photoradical initiator include benzophenone-based, acetophenone-based, diketone-based, acylphosphine oxide-based, quinone-based, and acyloin-based.
作為二苯甲酮系,具體而言,可例舉:二苯甲酮、4-羥基二苯甲酮、2-苯甲醯苯甲酸、4-苯甲醯苯甲酸、4,4'-雙(二甲胺基)二苯甲酮、4,4'-雙(二乙胺基)二苯甲酮等。其中,較佳為2-苯甲醯苯甲酸、4-苯甲醯苯甲酸、4,4'-雙(二乙胺基)二苯甲酮。Specific examples of benzophenone-based compounds include benzophenone, 4-hydroxybenzophenone, 2-benzoylbenzoic acid, 4-benzoylbenzoic acid, 4,4'-bis(dimethylamino)benzophenone, and 4,4'-bis(diethylamino)benzophenone. Among them, 2-benzoylbenzoic acid, 4-benzoylbenzoic acid, and 4,4'-bis(diethylamino)benzophenone are preferred.
作為苯乙酮系,具體而言,可例舉:苯乙酮、2-(4-甲苯磺醯氧基)-2-苯基苯乙酮、對二甲胺基苯乙酮、2,2'-二甲氧基-2-苯基苯乙酮、對甲氧基苯乙酮、2-甲基-[4-(甲硫基)苯基]-2-𠰌啉基-1-丙酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁烷-1-酮等。其中,較佳為對二甲胺基苯乙酮、對甲氧基苯乙酮。Specific examples of acetophenone-based compounds include acetophenone, 2-(4-toluenesulfonyloxy)-2-phenylacetophenone, p-dimethylaminoacetophenone, 2,2'-dimethoxy-2-phenylacetophenone, p-methoxyacetophenone, 2-methyl-[4-(methylthio)phenyl]-2-oxolinyl-1-propanone, and 2-benzyl-2-dimethylamino-1-(4-oxolinylphenyl)-butan-1-one. Among these, p-dimethylaminoacetophenone and p-methoxyacetophenone are preferred.
作為二酮系,具體而言,可例舉:4,4'-二甲氧基苯偶醯、苯甲醯甲酸甲酯、9,10-菲醌等。其中,較佳為4,4'-二甲氧基苯偶醯、苯甲醯甲酸甲酯。Specific examples of diketones include 4,4'-dimethoxybenzyl, methyl benzoylcarboxylate, and 9,10-phenanthrenequinone. Among them, 4,4'-dimethoxybenzyl and methyl benzoylcarboxylate are preferred.
作為醯基氧化膦系,具體而言,可例舉雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦等。Specific examples of the acylphosphine oxide series include bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide and the like.
作為醌系,具體而言,可例舉:蒽醌、2-乙基蒽醌、樟腦醌、1,4-萘醌等。其中,較佳為樟腦醌、1,4-萘醌。Specific examples of the quinone-based compounds include anthraquinone, 2-ethylanthraquinone, camphorquinone, and 1,4-naphthoquinone. Among them, camphorquinone and 1,4-naphthoquinone are preferred.
作為醇酮系,具體而言,可例舉:安息香、安息香甲醚、安息香乙醚、安息香異丙醚等。其中,較佳為安息香、安息香甲醚。Specific examples of the alcohol ketone series include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether. Among them, benzoin and benzoin methyl ether are preferred.
作為光自由基起始劑,較佳為二苯甲酮系、苯乙酮系、二酮系,更佳為二苯甲酮系。As the photoradical initiator, benzophenone-based, acetophenone-based, and diketone-based are preferred, and benzophenone-based are more preferred.
市售之光自由基起始劑之中,作為較佳之光自由基起始劑,可例舉:BASF股份有限公司製造之製品名:Irgacure 127、Irgacure 184、Irgacure 369、Irgacure 651、Irgacure 819、Irgacure 907、Irgacure 2959、Irgacure OXE-01、Darocure 1173、Lucirin TPO等。其中,更佳為Irgacure 651、Irgacure 369。Among commercially available photoradical initiators, preferred examples include Irgacure 127, Irgacure 184, Irgacure 369, Irgacure 651, Irgacure 819, Irgacure 907, Irgacure 2959, Irgacure OXE-01, Darocure 1173, and Lucirin TPO, all manufactured by BASF. Among these, Irgacure 651 and Irgacure 369 are more preferred.
光酸起始劑具體係包含選自由芳香族磺酸、芳香族錪、芳香族重氮鎓、芳香族銨、噻蒽鎓、9-氧硫𠮿鎓、(2,4-環戊二烯-1-基)(1-甲基乙基苯)鐵所組成之群中之至少一種之陽離子、與選自由四氟硼酸鹽、六氟磷酸鹽、六氟銻酸鹽、五氟苯基硼酸鹽所組成之群中之至少一種之陰離子之對之鎓鹽。 其中,尤佳為雙[4-(二苯基鋶基)苯基]硫醚雙六氟磷酸鹽、雙[4-(二苯基鋶基)苯基]硫醚四(五氟苯基)硼酸鹽、二苯基錪六氟磷酸鹽。 The photoacid initiator specifically comprises a photoacid selected from aromatic sulfonic acid, aromatic iodine, aromatic diazonium, aromatic ammonium, thianthrenium, 9-oxosulfuronium, An onium salt of at least one cation selected from the group consisting of bis(2,4-cyclopentadien-1-yl)(1-methylethylphenyl)iron, and at least one anion selected from the group consisting of tetrafluoroborate, hexafluorophosphate, hexafluoroantimonate, and pentafluorophenylborate. Among them, bis[4-(diphenylsectonyl)phenyl]sulfide bis(hexafluorophosphate), bis[4-(diphenylsectonyl)phenyl]sulfide tetrakis(pentafluorophenyl)borate, and diphenyliodonium hexafluorophosphate are particularly preferred.
作為市售之光酸起始劑,例如可例舉:San-Apro股份有限公司製造之製品名:CPI-100P、CPI-110P、CPI-101A、CPI-200K、CPI-210S;Dow Chemical日本股份有限公司製造之製品名:Cyracure光硬化起始劑UVI-6990、Cyracure光硬化起始劑UVI-6992、Cyracure光硬化起始劑UVI-6976;ADEKA股份有限公司製造之製品名:Adeka Optomer SP-150、Adeka Optomer SP-152、Adeka Optomer SP-170、Adeka Optomer SP-172、Adeka Optomer SP-300;日本曹達股份有限公司製造之製品名:CI-5102、CI-2855;三新化學工業股份有限公司製造之製品名:San-Aid SI-60L、San-Aid SI-80L、San-Aid SI-100L、San-Aid SI-110L、San-Aid SI-180L、San-Aid SI-110、San-Aid SI-180;Lamberti公司製造之製品名:Esacure 1064、Esacure 1187;BASF股份有限公司製造之製品名:Irgacure 250等。Examples of commercially available photoacid initiators include: CPI-100P, CPI-110P, CPI-101A, CPI-200K, and CPI-210S manufactured by San-Apro Co., Ltd.; Cyracure Photocuring Initiator UVI-6990, Cyracure Photocuring Initiator UVI-6992, and Cyracure Photocuring Initiator UVI-6976 manufactured by Dow Chemical Japan Co., Ltd.; and Adeka Optomer SP-150, Adeka Optomer SP-152, Adeka Optomer SP-170, Adeka Optomer SP-172, and Adeka Optomer SP-176 manufactured by Adeka Co., Ltd. SP-300; CI-5102 and CI-2855 manufactured by Nippon Soda Co., Ltd.; San-Aid SI-60L, San-Aid SI-80L, San-Aid SI-100L, San-Aid SI-110L, San-Aid SI-180L, San-Aid SI-110 and San-Aid SI-180 manufactured by San Hsin Chemical Industry Co., Ltd.; Esacure 1064 and Esacure 1187 manufactured by Lamberti; Irgacure 250 manufactured by BASF GmbH.
本發明之感光性樹脂組合物中之光聚合起始劑之含量相對於含氟樹脂(其中,於感光性樹脂組合物中包含後述之鹼溶解性樹脂之情形時為包括該樹脂在內之合計濃度)100質量份,較佳為0.1質量份以上30質量份以下,更佳為1質量份以上20質量份以下。若光聚合起始劑之含量小於0.1質量份,則存在無法充分獲得交聯效果之趨勢,若超過30質量份,則存在解像性或感度降低之趨勢。The content of the photopolymerization initiator in the photosensitive resin composition of the present invention is preferably from 0.1 to 30 parts by mass, and more preferably from 1 to 20 parts by mass, relative to 100 parts by mass of the fluorinated resin (wherein, when the photosensitive resin composition includes an alkali-soluble resin described below, this is the total concentration including such resin). If the content of the photopolymerization initiator is less than 0.1 parts by mass, the crosslinking effect tends to be insufficient, while if it exceeds 30 parts by mass, the resolution or sensitivity tends to decrease.
本發明之感光性樹脂組合物除了作為必需成分之含氟樹脂、溶劑、及光聚合起始劑以外,亦可包含交聯劑、鹼溶解性樹脂、含萘醌二疊氮基化合物、鹼性化合物、及其他添加劑。The photosensitive resin composition of the present invention may contain, in addition to the essential components of the fluorinated resin, solvent, and photopolymerization initiator, a crosslinking agent, an alkali-soluble resin, a naphthoquinone diazide-containing compound, an alkaline compound, and other additives.
本發明之感光性樹脂組合物所含之交聯劑藉由與含氟樹脂之重複單元(U)反應,可使樹脂採取交聯結構,可提高形成之膜之機械強度。The crosslinking agent contained in the photosensitive resin composition of the present invention reacts with the repeating units (U) of the fluorinated resin to form a crosslinked structure in the resin, thereby improving the mechanical strength of the formed film.
交聯劑可使用公知者,具體而言,可例舉:使甲醛或甲醛及低級醇與三聚氰胺、乙胍𠯤、苯并胍胺、脲、伸乙脲、伸丙脲、甘脲等含胺基化合物反應,將該胺基之氫原子利用羥甲基或低級烷氧基甲基取代而成之化合物;多官能環氧化合物、多官能氧雜環丁烷化合物、多官能異氰酸酯化合物、多官能丙烯酸酯化合物等。此處,使用三聚氰胺之交聯劑稱為三聚氰胺系交聯劑,使用脲之交聯劑稱為脲系交聯劑,使用伸乙脲、伸丙脲等伸烷基脲之交聯劑稱為伸烷基脲系交聯劑,使用甘脲之交聯劑稱為甘脲系交聯劑。該等交聯劑可單獨使用,亦可將兩種以上混合來使用。Crosslinking agents that can be used are known. Specific examples include compounds formed by reacting formaldehyde or formaldehyde and a lower alcohol with an amino-containing compound such as melamine, ethylguanidine, benzoguanamine, urea, ethylurea, propylurea, or glycoluril, where the hydrogen atoms of the amino groups are replaced with hydroxymethyl or lower alkoxymethyl groups; polyfunctional epoxy compounds, polyfunctional oxycyclobutane compounds, polyfunctional isocyanate compounds, and polyfunctional acrylate compounds. Herein, a crosslinking agent using melamine is referred to as a melamine-based crosslinking agent, a crosslinking agent using urea is referred to as a urea-based crosslinking agent, a crosslinking agent using an alkylurea such as ethylurea or propylurea is referred to as an alkylurea-based crosslinking agent, and a crosslinking agent using glycoluril is referred to as a glycoluril-based crosslinking agent. These crosslinking agents may be used alone or in combination of two or more.
作為交聯劑,較佳為選自該等交聯劑之至少一種,尤佳為甘脲系交聯劑、多官能丙烯酸酯化合物。The crosslinking agent is preferably at least one selected from the above crosslinking agents, and more preferably a glycoluril crosslinking agent or a multifunctional acrylate compound.
作為三聚氰胺系交聯劑,可例舉:六甲氧基甲基三聚氰胺、六乙氧基甲基三聚氰胺、六丙氧基甲基三聚氰胺、六丁氧基丁基三聚氰胺等,其中,較佳為六甲氧基甲基三聚氰胺。Examples of the melamine-based crosslinking agent include hexamethoxymethylmelamine, hexaethoxymethylmelamine, hexapropoxymethylmelamine, and hexabutoxybutylmelamine. Among them, hexamethoxymethylmelamine is preferred.
作為脲系交聯劑,可例舉:雙甲氧基甲基脲、雙乙氧基甲基脲、雙丙氧基甲基脲、雙丁氧基甲基脲等,其中,較佳為雙甲氧基甲基脲。Examples of urea-based crosslinking agents include bismethoxymethyl urea, bisethoxymethyl urea, bispropoxymethyl urea, and bisbutoxymethyl urea. Among them, bismethoxymethyl urea is preferred.
作為伸烷基脲系交聯劑,例如可例舉:單及/或二羥甲基化伸乙脲、單及/或二甲氧基甲基化伸乙脲、單及/或二乙氧基甲基化伸乙脲、單及/或二丙氧基甲基化伸乙脲、單及/或二丁氧基甲基化伸乙脲等伸乙脲系交聯劑;單及/或二羥甲基化伸丙脲、單及/或二甲氧基甲基化伸丙脲、單及/或二乙氧基甲基化伸丙脲、單及/或二丙氧基甲基化伸丙脲、單及/或二丁氧基甲基化伸丙脲等伸丙脲系交聯劑;1,3-二(甲氧基甲基)4,5-二羥基-2-咪唑啶酮、1,3-二(甲氧基甲基)-4,5-二甲氧基-2-咪唑啶酮等。Examples of the alkylene urea crosslinking agent include ethylurea crosslinking agents such as mono- and/or dihydroxymethylated ethylurea, mono- and/or dimethoxymethylated ethylurea, mono- and/or diethoxymethylated ethylurea, mono- and/or dipropoxymethylated ethylurea, and mono- and/or dibutoxymethylated ethylurea; propylurea crosslinking agents such as mono- and/or dihydroxymethylated propylurea, mono- and/or dimethoxymethylated propylurea, mono- and/or diethoxymethylated propylurea, mono- and/or dipropoxymethylated propylurea, and mono- and/or dibutoxymethylated propylurea; and 1,3-bis(methoxymethyl)-4,5-dihydroxy-2-imidazolidinone and 1,3-bis(methoxymethyl)-4,5-dimethoxy-2-imidazolidinone.
作為甘脲系交聯劑,例如可例舉:單、二、三、及/或四羥甲基化甘脲;單、二、三、及/或四甲氧基甲基化甘脲;單、二、三、及/或四乙氧基甲基化甘脲;單、二、三、及/或四丙氧基甲基化甘脲;單、二、三、及/或四丁氧基甲基化甘脲等。Examples of glycoluril-based crosslinking agents include mono-, di-, tri-, and/or tetrahydroxymethylated glycoluril; mono-, di-, tri-, and/or tetramethoxymethylated glycoluril; mono-, di-, tri-, and/or tetraethoxymethylated glycoluril; mono-, di-, tri-, and/or tetrapropoxymethylated glycoluril; and mono-, di-, tri-, and/or tetrabutoxymethylated glycoluril.
作為多官能丙烯酸酯化合物,可例舉:多官能丙烯酸酯(例如,新中村化學工業股份有限公司製造之製品名:A-TMM-3、A-TMM-3L、A-TMM-3LM-N、A-TMPT、AD-TMP)、聚乙二醇二丙烯酸酯(例如,新中村化學工業股份有限公司製造之製品名:A-200、A-400、A-600)、胺基甲酸酯丙烯酸酯(例如,新中村化學工業股份有限公司製造之製品名:UA-122P、UA-4HA、UA-6HA、UA-6LPA、UA-11003H、UA-53H、UA-4200、UA-200PA、UA-33H、UA-7100、UA-7200)、季戊四醇四丙烯酸酯等。Examples of the multifunctional acrylate compound include multifunctional acrylates (e.g., products manufactured by Shin-Nakamura Chemical Co., Ltd.: A-TMM-3, A-TMM-3L, A-TMM-3LM-N, A-TMPT, and AD-TMP), polyethylene glycol diacrylates (e.g., products manufactured by Shin-Nakamura Chemical Co., Ltd.: A-200, A-400, and A-600), urethane acrylates (e.g., products manufactured by Shin-Nakamura Chemical Co., Ltd.: UA-122P, UA-4HA, UA-6HA, UA-6LPA, UA-11003H, UA-53H, UA-4200, UA-200PA, UA-33H, UA-7100, and UA-7200), and pentaerythritol tetraacrylate.
作為多官能丙烯酸酯化合物,下文例示較佳者。Preferred polyfunctional acrylate compounds are exemplified below.
[化1] [Chemistry 1]
[化2] [Chemistry 2]
[化3] [Chemistry 3]
本發明之感光性樹脂組合物中之交聯劑之含量相對於含氟樹脂(其中,於感光性樹脂組合物中包含後述之鹼溶解性樹脂之情形時為包括該樹脂在內之合計濃度)100質量份,較佳為10質量份以上300質量份以下,更佳為50質量份以上200質量份以下。若交聯劑之含量小於10質量份,則存在無法充分獲得交聯效果之趨勢,若超過300質量份,則存在解像性或感度降低之趨勢。The content of the crosslinking agent in the photosensitive resin composition of the present invention is preferably 10 to 300 parts by mass, and more preferably 50 to 200 parts by mass, relative to 100 parts by mass of the fluorinated resin (wherein, when the photosensitive resin composition includes an alkali-soluble resin, as described below), and is more preferably 10 to 300 parts by mass. If the crosslinking agent content is less than 10 parts by mass, the crosslinking effect tends to be insufficient, while if it exceeds 300 parts by mass, resolution or sensitivity tends to decrease.
若本發明之感光性樹脂組合物包含鹼溶解性樹脂,則可使由本發明之感光性樹脂組合物獲得之障壁之形狀良好。If the photosensitive resin composition of the present invention contains an alkali-soluble resin, the shape of the barrier ribs obtained from the photosensitive resin composition of the present invention can be improved.
作為鹼溶解性樹脂,可例舉鹼溶解性酚醛清漆樹脂。 鹼溶解性酚醛清漆樹脂可於酸性觸媒存在下使酚類與醛類縮合而獲得。 Examples of alkali-soluble resins include alkali-soluble novolac resins. Alkali-soluble novolac resins can be obtained by condensing phenols with aldehydes in the presence of an acidic catalyst.
作為酚類,具體而言,可例示:苯酚、鄰甲酚、間甲酚、對甲酚、2,3-二甲基苯酚、2,4-二甲基苯酚、2,5-二甲基苯酚、3,4-二甲基苯酚、3,5-二甲基苯酚、2,3,5-三甲基苯酚、3,4,5-三甲基苯酚、間苯二酚、2-甲基間苯二酚、4-乙基間苯二酚、對苯二酚、甲基對苯二酚、鄰苯二酚、4-甲基鄰苯二酚、鄰苯三酚、間苯三酚、瑞香草酚、異瑞香草酚等。該等酚類可單獨使用,亦可將兩種以上組合使用。Specific examples of phenols include phenol, o-cresol, m-cresol, p-cresol, 2,3-dimethylphenol, 2,4-dimethylphenol, 2,5-dimethylphenol, 3,4-dimethylphenol, 3,5-dimethylphenol, 2,3,5-trimethylphenol, 3,4,5-trimethylphenol, resorcinol, 2-methylresorcinol, 4-ethylresorcinol, hydroquinone, methylhydroquinone, o-catechol, 4-methylo-catechol, o-cresol, phloroglucinol, styroquinol, and iso-styroquinol. These phenols may be used alone or in combination of two or more.
作為醛類,具體而言,可例示:甲醛、三㗁烷、多聚甲醛、苯甲醛、乙醛、丙醛、苯乙醛、α-苯丙醛、β-苯丙醛、鄰羥基苯甲醛、間羥基苯甲醛、對羥基苯甲醛、鄰甲基苯甲醛、間甲基苯甲醛、對甲基苯甲醛、硝基苯甲醛、糠醛、乙二醛、戊二醛、對苯二甲醛、間苯二甲醛等。 作為酸觸媒,具體而言,可例示:鹽酸、硝酸、硫酸、磷酸、亞磷酸、甲酸、草酸、乙酸、甲磺酸、二乙基硫酸、對甲苯磺酸等。該等酸觸媒可單獨使用,亦可將兩種以上組合使用。 Specific examples of aldehydes include formaldehyde, trioxane, paraformaldehyde, benzaldehyde, acetaldehyde, propionaldehyde, phenylacetaldehyde, α-phenylpropionaldehyde, β-phenylpropionaldehyde, o-hydroxybenzaldehyde, m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p-methylbenzaldehyde, nitrobenzaldehyde, furfural, glyoxal, glutaraldehyde, terephthalaldehyde, and isophthalaldehyde. Specific examples of acid catalysts include hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, phosphorous acid, formic acid, oxalic acid, acetic acid, methanesulfonic acid, diethylsulfuric acid, and p-toluenesulfonic acid. These acid catalysts may be used alone or in combination of two or more.
此外,作為鹼溶解性樹脂,可例舉酸改性環氧丙烯酸酯系。作為市售之酸改性環氧丙烯酸酯系,例如可使用日本化藥股份有限公司製造之製品名:CCR-1218H、CCR-1159H、CCR-1222H、CCR-1291H、CCR-1235、PCR-1050、TCR-1335H、UXE-3024、ZAR-1035、ZAR-2001H、ZFR-1185、及ZCR-1569H等。Examples of alkaline-soluble resins include acid-modified epoxy acrylates. Commercially available acid-modified epoxy acrylates include CCR-1218H, CCR-1159H, CCR-1222H, CCR-1291H, CCR-1235, PCR-1050, TCR-1335H, UXE-3024, ZAR-1035, ZAR-2001H, ZFR-1185, and ZCR-1569H manufactured by Nippon Kayaku Co., Ltd.
基於感光性樹脂組合物之顯影性及解像性之觀點,鹼溶解性樹脂成分之質量平均分子量較佳為1,000~50,000。From the perspective of the developability and resolution of the photosensitive resin composition, the mass average molecular weight of the alkali-soluble resin component is preferably 1,000 to 50,000.
本發明之感光性樹脂組合物中之鹼溶解性樹脂之含量相對於含氟樹脂100質量份,較佳為500質量份以上10,000質量份以下,更佳為1,000質量份以上7,000質量份以下。若鹼溶解性樹脂之含量超過10,000質量份,則存在無法充分獲得本發明之含氟樹脂所具有之於UV臭氧處理後或氧電漿處理後對於墨水之撥液性之趨勢。The content of the alkali-soluble resin in the photosensitive resin composition of the present invention is preferably 500 to 10,000 parts by mass, and more preferably 1,000 to 7,000 parts by mass, per 100 parts by mass of the fluorinated resin. If the content of the alkali-soluble resin exceeds 10,000 parts by mass, the fluorinated resin of the present invention tends to fail to fully exhibit its ink repellency after UV ozone treatment or oxygen plasma treatment.
若本發明之感光性樹脂組合物含有含萘醌二疊氮基化合物,則可使由本發明之感光性樹脂組合物獲得之障壁之形狀良好。 含萘醌二疊氮基化合物並無特別限制,可使用通常用作I-光線用抗蝕劑組合物之感光性成分之含萘醌二疊氮基化合物。 If the photosensitive resin composition of the present invention contains a naphthoquinone diazide-containing compound, the barrier ribs obtained from the photosensitive resin composition of the present invention can have a good shape. The naphthoquinone diazide-containing compound is not particularly limited, and naphthoquinone diazide-containing compounds commonly used as photosensitive components of I-ray resist compositions can be used.
作為含萘醌二疊氮基化合物,具體而言,可例示:萘醌-1,2-二疊氮基-4-磺酸酯化合物、萘醌-1,2-二疊氮基-5-磺酸酯化合物、萘醌-1,2-二疊氮基-6-磺酸酯化合物、萘醌-1,2-二疊氮基磺酸酯化合物、鄰苯醌二疊氮基磺酸酯化合物、鄰蒽醌二疊氮基磺酸酯化合物等。其中,基於溶解性優異之方面,較佳為萘醌-1,2-二疊氮基-4-磺酸酯化合物、萘醌-1,2-二疊氮基-5-磺酸酯化合物、萘醌-1,2-二疊氮基-6-磺酸酯化合物。該等化合物可單獨使用,亦可將兩種以上混合來使用。Specific examples of naphthoquinonediazide-containing compounds include naphthoquinone-1,2-diazide-4-sulfonate compounds, naphthoquinone-1,2-diazide-5-sulfonate compounds, naphthoquinone-1,2-diazide-6-sulfonate compounds, naphthoquinone-1,2-diazide-sulfonate compounds, o-benzoquinonediazide-sulfonate compounds, and o-anthraquinonediazide-sulfonate compounds. Among these, naphthoquinone-1,2-diazide-4-sulfonate compounds, naphthoquinone-1,2-diazide-5-sulfonate compounds, and naphthoquinone-1,2-diazide-6-sulfonate compounds are preferred due to their excellent solubility. These compounds may be used alone or in combination of two or more.
本發明之感光性樹脂組合物中之含萘醌二疊氮基化合物之含量相對於含氟樹脂(其中,於感光性樹脂組合物包含上述鹼溶解性樹脂之情形時為包括該樹脂在內之合計濃度)100質量份,較佳為10質量份~60質量份,更佳為20質量份~50質量份。若超過60重量份,則存在難以獲得作為感光性樹脂組合物之感度之趨勢。The content of the naphthoquinonediazide-containing compound in the photosensitive resin composition of the present invention is preferably 10 to 60 parts by weight, and more preferably 20 to 50 parts by weight, relative to 100 parts by weight of the fluorinated resin (wherein, when the photosensitive resin composition includes the aforementioned alkali-soluble resin, this is the total concentration including the alkali-soluble resin). If the content exceeds 60 parts by weight, the sensitivity of the photosensitive resin composition tends to be insufficient.
若本發明之感光性樹脂組合物包含鹼性化合物,則具有減慢由上述光酸產生劑產生之酸向本發明之感光性樹脂組合物之膜中擴散時之擴散速度之作用。 藉由調配鹼性化合物,可調整酸擴散距離,可使障壁之形狀良好。 又,藉由調配鹼性化合物,即便於形成障壁後至曝光為止之放置時間較長,障壁亦不易發生變形,可穩定地形成具有所需精度之障壁。 If the photosensitive resin composition of the present invention contains an alkaline compound, it has the effect of slowing the diffusion rate of the acid generated by the photoacid generator into the film of the photosensitive resin composition of the present invention. By adding the alkaline compound, the acid diffusion distance can be adjusted, thereby improving the shape of the barrier ribs. Furthermore, by adding the alkaline compound, the barrier ribs are less likely to deform even if the time between barrier rib formation and exposure is long, allowing for stable barrier rib formation with the desired precision.
作為鹼性化合物,可例舉:脂肪族胺類、芳香族胺類、雜環式胺類、脂肪族多環式胺類等。其中,較佳為脂肪族胺類,具體而言,可例舉:二級或三級脂肪族胺、烷基醇胺等。該等鹼性化合物可單獨使用,亦可將兩種以上混合來使用。Examples of alkaline compounds include aliphatic amines, aromatic amines, heterocyclic amines, and aliphatic polycyclic amines. Among these, aliphatic amines are preferred, and specific examples include secondary or tertiary aliphatic amines and alkanolamines. These alkaline compounds may be used alone or in combination of two or more.
作為脂肪族胺類,可例舉氨(NH 3)之氫原子之至少一個經碳數12以下之烷基或羥烷基取代而成之烷基胺或烷基醇胺。作為其具體例,可例舉:三甲胺、三乙胺、三正丙胺、三正丁胺、三正戊胺、三正己胺、三正庚胺、三正辛胺、三正壬胺、三正癸胺、三正十二烷基胺、二甲胺、二乙胺、二正丙胺、二正丁胺、二正戊胺、二正己胺、二正庚胺、二正辛胺、二正壬胺、二正癸胺、二正十二烷基胺、二環己胺、甲胺、乙胺、正丙胺、正丁胺、正戊胺、正己胺、正庚胺、正辛胺、正壬胺、正癸胺、正十二烷基胺、二乙醇胺、三乙醇胺、二異丙醇胺、三異丙醇胺、二正辛醇胺、三正辛醇胺等。 其中,較佳為二烷基胺、三烷基胺、烷基醇胺,更佳為烷基醇胺。烷基醇胺中,尤佳為三乙醇胺、三異丙醇胺。 Examples of the aliphatic amines include alkylamines or alkylolamines in which at least one hydrogen atom of ammonia (NH 3 ) is substituted with an alkyl group or a hydroxyalkyl group having 12 or less carbon atoms. Specific examples thereof include trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine, tri-n-dodecylamine, dimethylamine, diethylamine, di-n-propylamine, di-n-butylamine, di-n-pentylamine, di-n-hexylamine, di-n-heptylamine, di-n-octylamine, di-n-nonylamine, di-n-decylamine, di-n-dodecylamine, dicyclohexylamine, methylamine, ethylamine, n-propylamine, n-butylamine, n-pentylamine, n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine, n-dodecylamine, diethanolamine, triethanolamine, diisopropanolamine, triisopropanolamine, di-n-octanolamine, and tri-n-octanolamine. Among them, dialkylamines, trialkylamines, and alkylolamines are preferred, and alkylolamines are more preferred. Among the alkanolamines, triethanolamine and triisopropanolamine are particularly preferred.
作為芳香族胺類及雜環式胺類,例如可例舉:苯胺、N-甲基苯胺、N-乙基苯胺、N-丙基苯胺、N,N-二甲基苯胺、2-甲基苯胺、3-甲基苯胺、4-甲基苯胺、乙基苯胺、丙基苯胺、三甲基苯胺、2-硝基苯胺、3-硝基苯胺、4-硝基苯胺、2,4-二硝基苯胺、2,6-二硝基苯胺、3,5-二硝基苯胺、N,N-二甲基甲苯胺等苯胺衍生物;1,5-二氮雜雙環[4.3.0]壬-5-烯、1,8-二氮雜雙環[5.4.0]十一碳-7-烯、1,4-二氮雜雙環[2.2.2]辛烷、吡啶、聯吡啶、4-二甲胺基吡啶、六亞甲基四胺、4,4-二甲基咪唑啉等雜環胺類;癸二酸雙(1,2,2,6,6-五甲基-4-哌啶基)酯等受阻胺類;2-羥基吡啶、胺基甲酚、2,4-喹啉二醇、3-吲哚甲醇水合物、單乙醇胺、二乙醇胺、三乙醇胺、N-乙基二乙醇胺、N,N-二乙基乙醇胺、三異丙醇胺、2,2'-亞胺基二乙醇、2-胺基乙醇、3-胺基-1-丙醇、4-胺基-1-丁醇、4-(2-羥基乙基)𠰌啉、2-(2-羥基乙基)吡啶、1-(2-羥基乙基)哌𠯤、1-[2-(2-羥基乙氧基)乙基]哌𠯤等醇性含氮化合物;甲基吡啶、二甲基吡啶、吡咯、哌啶、哌𠯤、吲哚、六亞甲基四胺等。Examples of the aromatic amines and heterocyclic amines include aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N,N-dimethylaniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6- Aniline derivatives such as dinitroaniline, 3,5-dinitroaniline, N,N-dimethyltoluidine, 1,5-diazabicyclo[4.3.0]non-5-ene, 1,8-diazabicyclo[5.4.0]undec-7-ene, 1,4-diazabicyclo[2.2.2]octane, pyridine, bipyridine, 4-dimethylaminopyridine, hexamethylenetetramine, 4,4-dimethylaminopyridine, Heterocyclic amines such as methylimidazoline; hindered amines such as bis(1,2,2,6,6-pentamethyl-4-piperidinyl) sebacate; 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3-indolemethanol hydrate, monoethanolamine, diethanolamine, triethanolamine, N-ethyldiethanolamine, N,N-diethylethanolamine, triisopropanolamine, 2,2'-imidodiethanol , 2-aminoethanol, 3-amino-1-propanol, 4-amino-1-butanol, 4-(2-hydroxyethyl)piperidinium, 2-(2-hydroxyethyl)pyridine, 1-(2-hydroxyethyl)piperidinium, 1-[2-(2-hydroxyethoxy)ethyl]piperidinium and the like; picoline, lutidine, pyrrole, piperidine, piperidinium, indole, hexamethylenetetramine, etc.
本發明之感光性樹脂組合物中,鹼性化合物之含量相對於含氟樹脂(其中,於感光性樹脂組合物中包含上述鹼溶解性樹脂之情形時為包括該樹脂在內之合計濃度)100質量份,較佳為0.001質量份~2質量份,更佳為0.01質量份~1質量份。若鹼性化合物之調配量小於0.001質量份,則難以充分獲得作為添加劑之效果,若超過2質量份,則存在解像性或感度降低之趨勢。In the photosensitive resin composition of the present invention, the content of the alkaline compound is preferably 0.001 to 2 parts by mass, and more preferably 0.01 to 1 part by mass, relative to 100 parts by mass of the fluorinated resin (where the photosensitive resin composition contains the aforementioned alkaline-soluble resin, this is the total concentration including the resin). If the amount of the alkaline compound is less than 0.001 parts by mass, the effect as an additive may not be fully achieved. If the amount exceeds 2 parts by mass, the resolution or sensitivity tends to decrease.
本發明之感光性樹脂組合物亦可視需要包含其他添加劑。作為其他添加劑,可例舉:溶解抑制劑、塑化劑、穩定劑、著色劑、界面活性劑、增黏劑、調平劑、消泡劑、相容劑、密接劑、抗氧化劑等各種添加劑。 該等其他添加劑可為公知之添加劑。 The photosensitive resin composition of the present invention may also contain other additives as needed. Examples of such additives include dissolution inhibitors, plasticizers, stabilizers, colorants, surfactants, tackifiers, leveling agents, defoaming agents, compatibilizers, adhesion promoters, antioxidants, and other additives. These other additives may be known additives.
再者,作為界面活性劑,較佳為含有氟系或矽系界面活性劑(氟系界面活性劑及矽系界面活性劑、含有氟原子與矽原子兩者之界面活性劑)之任一者或兩種以上。Furthermore, as the surfactant, it is preferred to contain one or more of a fluorine-based surfactant or a silicon-based surfactant (a fluorine-based surfactant and a silicon-based surfactant, or a surfactant containing both fluorine atoms and silicon atoms).
其次,針對使用本發明之感光性樹脂組合物形成間隔壁之方法進行說明。 該間隔壁之形成方法可包含:(1)成膜步驟、(2)曝光步驟、及(3)顯影步驟。 以下,針對各步驟進行說明。 Next, a method for forming a partition wall using the photosensitive resin composition of the present invention will be described. The partition wall formation method may include: (1) a film forming step, (2) an exposure step, and (3) a development step. The following describes each step.
(1)成膜步驟 首先,於將上述本發明之感光性樹脂組合物塗佈於基板之後,藉由進行加熱,將上述感光性樹脂組合物製成含氟樹脂膜。 加熱條件並無特別限定,較佳為於80~100℃下進行60~200秒。 藉此,可去除感光性樹脂組合物中所含之溶劑等。 (1) Film Formation Step: First, after applying the photosensitive resin composition of the present invention onto a substrate, the photosensitive resin composition is heated to form a fluorine-containing resin film. The heating conditions are not particularly limited, but are preferably performed at 80-100°C for 60-200 seconds. This removes solvents and the like contained in the photosensitive resin composition.
作為基板,可使用矽晶圓、金屬、玻璃、ITO(Indium Tin Oxides,氧化銦錫)基板等。 又,可於基板上預先設置有機系或無機系之膜。例如,可具有抗反射膜、多層抗蝕劑之底層,亦可於其上形成圖案。又,可將基板預先洗淨。例如,可使用超純水、丙酮、醇(甲醇、乙醇、異丙醇)等進行洗淨。 Substrates can include silicon wafers, metals, glass, and ITO (Indium Tin Oxides) substrates. Also, organic or inorganic films can be pre-formed on the substrate. For example, an antireflective film or a multi-layered resist base layer can be provided, and a pattern can be formed thereon. Furthermore, the substrate can be pre-cleaned. For example, ultrapure water, acetone, or alcohols (methanol, ethanol, or isopropyl alcohol) can be used for cleaning.
作為將本發明之感光性樹脂組合物塗佈於基板之方法,可使用旋轉塗佈等公知之方法。As a method for coating the photosensitive resin composition of the present invention on a substrate, a known method such as spin coating can be used.
(2)曝光步驟 其次,將所需之光罩設置於曝光裝置,隔著該光罩,用高能量線對上述含氟樹脂膜進行曝光。 高能量線較佳為選自由紫外線、伽瑪射線、X射線、及α射線所組成之群中之至少一種。 (2) Exposure Step Next, a desired photomask is placed in an exposure device, and the fluorine-containing resin film is exposed to high-energy radiation through the photomask. The high-energy radiation is preferably at least one selected from the group consisting of ultraviolet rays, gamma rays, X-rays, and alpha rays.
高能量線之曝光量較佳為1 mJ/cm 2以上200 mJ/cm 2以下,更佳為10 mJ/cm 2以上100 mJ/cm 2以下。 The exposure dose of high energy rays is preferably 1 mJ/ cm2 to 200 mJ/ cm2 , more preferably 10 mJ/ cm2 to 100 mJ/ cm2 .
(3)顯影步驟 其次,用鹼水溶液使曝光步驟後之含氟樹脂膜顯影,製成含氟樹脂圖案膜。 即,藉由將含氟樹脂膜曝光部或膜未曝光部之任一部位溶解於鹼水溶液,製成含氟樹脂圖案膜。 (3) Development Step Next, the fluorinated resin film after the exposure step is developed with an alkaline aqueous solution to form a fluorinated resin pattern film. That is, the fluorinated resin pattern film is formed by dissolving either the exposed portion or the unexposed portion of the fluorinated resin film in an alkaline aqueous solution.
作為鹼水溶液,可使用氫氧化四甲基銨(TMAH)水溶液、氫氧化四丁基銨(TBAH)水溶液等。 於鹼水溶液為氫氧化四甲基銨(TMAH)水溶液之情形時,其濃度較佳為0.1質量%以上5質量%以下,更佳為2質量%以上3質量%以下。 As the aqueous alkaline solution, an aqueous solution of tetramethylammonium hydroxide (TMAH) or an aqueous solution of tetrabutylammonium hydroxide (TBAH) can be used. When the aqueous alkaline solution is an aqueous solution of tetramethylammonium hydroxide (TMAH), its concentration is preferably from 0.1% by mass to 5% by mass, and more preferably from 2% by mass to 3% by mass.
顯影方法可使用公知之方法,例如可例舉:浸漬法、覆液法、噴霧法等。The developing method may be a known method, for example, an immersion method, a liquid coating method, a spray method, etc.
顯影時間(顯影液與含氟樹脂膜之接觸時間)較佳為10秒以上3分鐘以下,更佳為30秒以上2分鐘以下。The developing time (contact time between the developer and the fluorinated resin film) is preferably 10 seconds to 3 minutes, more preferably 30 seconds to 2 minutes.
顯影後,亦可視需要設置使用去離子水等將含氟樹脂圖案膜洗淨之步驟。洗淨方法及洗淨時間較佳為10秒以上3分鐘以下,更佳為30秒以上2分鐘以下。After development, a step of washing the fluorinated resin pattern film with deionized water or the like may be optionally provided. The washing method and time are preferably from 10 seconds to 3 minutes, more preferably from 30 seconds to 2 minutes.
以此方式所製造之間隔壁可用作顯示器用之障壁。The partitions produced in this way can be used as barriers for displays.
本發明之顯示器之特徵在於包含發光元件,該發光元件具備:間隔壁,其包含上述本發明之感光性樹脂組合物;及發光層,其配置於藉由上述間隔壁所劃分之區域。 作為顯示器,可例舉有機EL顯示器、量子點顯示器等。 [實施例] The display of the present invention is characterized by comprising a light-emitting element having: partitions comprising the photosensitive resin composition of the present invention; and a light-emitting layer disposed in the regions defined by the partitions. Examples of the display include organic EL displays and quantum dot displays. [Examples]
以下,藉由實施例對本發明進行詳細說明,但本發明並不限定於該等實施例。The present invention is described in detail below with reference to embodiments, but the present invention is not limited to these embodiments.
1.單體之合成 [合成例1]5,5,5-三氟-2-甲基-1-戊烯-3-炔(TFMPY)之合成 向附帶攪拌機之500 mL玻璃製燒瓶中添加反式-1-氯-3,3,3-三氟丙烯(製品名:1233E,Central Glass股份有限公司製造)13 g、四氫呋喃50 mL,冷卻至-78℃。向其中滴加正丁基鋰1.6M己烷溶液100 mL之後,攪拌30分鐘,其次添加脫水丙酮5.81 g。攪拌1小時後,加入水100 mL,將有機層分離。重複三次用100 mL之水將分離之有機層洗淨之操作,然後藉由常壓蒸餾,回收99~103℃之餾份,以69%之產率獲得5,5,5-三氟-2-甲基-3-戊炔-2-醇(以下,記作TFMPO)(10.5 g)。 1. Monomer Synthesis [Synthesis Example 1] Synthesis of 5,5,5-trifluoro-2-methyl-1-pentene-3-yne (TFMPY) To a 500 mL glass flask equipped with a stirrer, 13 g of trans-1-chloro-3,3,3-trifluoropropene (product name: 1233E, manufactured by Central Glass Co., Ltd.) and 50 mL of tetrahydrofuran were added and cooled to -78°C. 100 mL of a 1.6 M n-butyllithium hexane solution was added dropwise and stirred for 30 minutes. Then, 5.81 g of dehydrated acetone was added. After stirring for 1 hour, 100 mL of water was added and the organic layer was separated. The separated organic layer was washed with 100 mL of water three times. The fraction at 99-103°C was then recovered by atmospheric distillation to obtain 5,5,5-trifluoro-2-methyl-3-pentyn-2-ol (hereinafter referred to as TFMPO) (10.5 g) in a 69% yield.
[化4] 其次,向附帶攪拌機之100 ml玻璃製燒瓶內添加濃硫酸15 g,加溫至100℃,然後歷時1小時緩慢滴加10 g之TFMPO。滴加結束後,於100℃下攪拌60分鐘,藉由 19F-NMR對反應液進行解析,結果未檢測到殘留原料。其次,藉由常壓蒸餾,自反應液回收68~70℃之餾份,以55%之產率獲得5,5,5-三氟-2-甲基-1-戊烯-3-炔(以下,記作TFMPY)。 [Chemistry 4] Next, 15 g of concentrated sulfuric acid was added to a 100 ml glass flask equipped with a stirrer. The mixture was heated to 100°C, and then 10 g of TFMPO was slowly added dropwise over 1 hour. After the addition, the mixture was stirred at 100°C for 60 minutes. Analysis of the reaction solution by 19 F-NMR revealed no residual starting material. The distillate at 68-70°C was then recovered from the reaction solution by atmospheric distillation, yielding 5,5,5-trifluoro-2-methyl-1-pentene-3-yne (hereinafter referred to as TFMPY) in a 55% yield.
[化5] [Chemistry 5]
<NMR分析結果> 1H-NMR(溶劑:氘氯仿,標準物質:TMS(Tetramethylsilane,四甲基矽烷));δ(ppm)1.92 (1H, m) 5.52 (1H, m)、5.85 (1H, m) 19F-NMR(溶劑:氘氯仿,標準物質:C 6D 6);δ(ppm)-49.8 (3F, S) <NMR Analysis Results> 1 H-NMR (Solvent: Deuterated chloroform, Standard substance: TMS (Tetramethylsilane)); δ (ppm) 1.92 (1H, m) 5.52 (1H, m), 5.85 (1H, m) 19 F-NMR (Solvent: Deuterated chloroform, Standard substance: C 6 D 6 ); δ (ppm) -49.8 (3F, S)
[合成例2]4-羥基苯乙烯(p-HO-St)之合成 (參考日本專利特開2016-98181號公報之實施例進行合成) 於室溫(約20℃)下,於附帶攪拌機之1000 ml玻璃製燒瓶內將4-乙醯氧基苯乙烯(東京化成工業股份有限公司之製品;以下,記作p-AcO-St)100 g及甲醇300 g進行混合,添加作為聚合抑制劑之1,3,5-三羥基苯0.50 g(相當於p-AcO-St之0.5質量%)。其次,藉由冰浴將該溶液冷卻至0℃之後,歷時40分鐘緩慢滴加濃度12質量%之氫氧化鈉水溶液(相當於p-AcO-St之1.0當量),其後,於0℃下攪拌30分鐘。將反應液藉由 1H-NMR進行解析,結果未檢測到殘留原料。其次,歷時30分鐘滴加濃度18質量%之鹽酸水溶液(相當於p-AcO-St之0.8當量),滴加結束後攪拌30分鐘。測定該溶液之pH值,結果pH值為6。使用甲基第三丁醚360 g於室溫(約20℃)下對所獲得之反應溶液進行萃取。其次,使用精製水330 g洗淨兩次。以相當於4-羥基苯乙烯之1質量%之方式向所獲得之有機層添加1,3,5-三羥基苯。其後,將4-羥基苯乙烯濃縮成72質量%,投入至冷卻到0℃之作為不良溶劑之正辛烷,其次,將該溶液浸漬於冰浴中,攪拌1小時,藉此使4-羥基苯乙烯之結晶析出。將結晶過濾分離,進而用正辛烷洗淨。其次,於25℃下、減壓下對結晶進行乾燥,藉此獲得4-羥基苯乙烯(以下,記作p-HO-St)之白色結晶(產率為66%)。 [Synthesis Example 2] Synthesis of 4-Hydroxystyrene (p-HO-St) (Synthesis was performed with reference to the example in Japanese Patent Publication No. 2016-98181) 100 g of 4-acetoxystyrene (Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as p-AcO-St) and 300 g of methanol were mixed in a 1000 ml glass flask equipped with a stirrer at room temperature (approximately 20°C). 0.50 g of 1,3,5-trihydroxybenzene (equivalent to 0.5% by mass of p-AcO-St) was added as a polymerization inhibitor. Next, the solution was cooled to 0°C in an ice bath, and then a 12% by mass aqueous sodium hydroxide solution (equivalent to 1.0 equivalent of p-AcO-St) was slowly added dropwise over 40 minutes, followed by stirring at 0°C for 30 minutes. The reaction solution was analyzed by 1H -NMR, and no residual raw materials were detected. Next, an 18% by mass aqueous hydrochloric acid solution (equivalent to 0.8 equivalent of p-AcO-St) was added dropwise over 30 minutes, and stirred for 30 minutes after the addition was completed. The pH value of the solution was measured, and the pH value was 6. The obtained reaction solution was extracted with 360 g of methyl tert-butyl ether at room temperature (about 20°C). Next, the solution was washed twice with 330 g of purified water. To the resulting organic layer, 1,3,5-trihydroxybenzene was added at a concentration equivalent to 1% by mass of 4-hydroxystyrene. The 4-hydroxystyrene was then concentrated to 72% by mass and added to n-octane, a poor solvent, cooled to 0°C. The solution was then immersed in an ice bath and stirred for 1 hour to cause crystallization of the 4-hydroxystyrene. The crystals were separated by filtration and washed with n-octane. The crystals were then dried at 25°C under reduced pressure to obtain white crystals of 4-hydroxystyrene (hereinafter referred to as p-HO-St) (yield: 66%).
[化6] [Chemistry 6]
2.含氟樹脂之製造(第一步驟:聚合) [構成各重複單元之單體之莫耳比之測定]NMR 聚合物中之構成各重複單元之單體之莫耳比係由 1H-NMR、 19F-NMR、或 13C-NMR之測定值確定。 2. Preparation of Fluoropolymer (Step 1: Polymerization) [Determination of the Molar Ratio of Monomers Constituting Each Repeating Unit] NMR The molar ratio of monomers constituting each repeating unit in the polymer is determined by 1 H-NMR, 19 F-NMR, or 13 C-NMR measurements.
[聚合物之分子量之測定]GPC 關於聚合物之重量平均分子量Mw與分子量分散指數(數量平均分子量Mn與重量平均分子量Mw之比;Mw/Mn),使用高效凝膠滲透層析儀(以下,有時稱為GPC;東曹股份有限公司製造,型號HLC-8320GPC),將ALPHA-M管柱與ALPHA-2500管柱(均為東曹股份有限公司製造)逐根串聯連接,使用四氫呋喃(THF)作為展開溶劑來進行測定。檢測器使用折射率差測定檢測器。 [Polymer Molecular Weight Determination] GPC The weight-average molecular weight (Mw) and molecular weight dispersion index (Mw/Mn, the ratio of the number-average molecular weight (Mn) to the weight-average molecular weight (Mw)) of polymers were determined using a high-performance gel permeation chromatography (hereinafter sometimes referred to as GPC; manufactured by Tosoh Corporation, model HLC-8320GPC). An ALPHA-M column and an ALPHA-2500 column (both manufactured by Tosoh Corporation) were connected in series, using tetrahydrofuran (THF) as the developing solvent. A refractive index difference detector was used.
2-1.含氟樹脂前驅物之聚合 [含氟樹脂前驅物1之合成] 於室溫(約20℃)下,取丙烯腈(東京化成工業股份有限公司之製品;以下,記作AN)10.6 g(0.2 mol)、甲基丙烯酸2-(全氟丁基)乙酯(東京化成工業股份有限公司之製品;以下,記作MA-C4F)49.8 g(0.15 mol)、甲基丙烯酸2-羥乙酯(東京化成工業股份有限公司之製品;以下,記作HEMA)19.5 g(0.15 mol)、及甲基乙基酮(以下,記作MEK)80 g並置於附帶攪拌機之500 ml玻璃製燒瓶內,添加2,2'-偶氮雙(2-甲基丁腈)(東京化成工業股份有限公司之製品;以下,記作AIBN)1.6 g(0.01 mol),於攪拌之同時進行脫氣,然後將燒瓶內用氮氣置換,升溫至內溫75℃,反應6小時。向反應系統滴加正庚烷400 g,結果析出透明之黏性物質。藉由傾析法,單離出該黏性物質。於60℃下進行減壓乾燥,以86%之產率獲得69 g之作為透明黏性物質之含氟樹脂前驅物1。 2-1. Polymerization of Fluororesin Precursor [Synthesis of Fluororesin Precursor 1] At room temperature (approximately 20°C), 10.6 g (0.2 mol) of acrylonitrile (a product of Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as AN), 49.8 g (0.15 mol) of 2-(perfluorobutyl)ethyl methacrylate (a product of Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as MA-C4F), 19.5 g (0.15 mol) of 2-hydroxyethyl methacrylate (a product of Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as HEMA), and 80 g of methyl ethyl ketone (hereinafter referred to as MEK) were placed in a 500°C stirring vessel equipped with a stirrer. To a 1.5-ml glass flask, 1.6 g (0.01 mol) of 2,2'-azobis(2-methylbutyronitrile) (Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as AIBN) was added. The mixture was degassed while stirring, and then the flask was purged with nitrogen. The temperature was raised to 75°C, and the reaction was allowed to proceed for 6 hours. 400 g of n-heptane was added dropwise to the reaction system, resulting in the precipitation of a transparent, viscous substance. This viscous substance was isolated by decanting. After drying under reduced pressure at 60°C, 69 g of fluororesin precursor 1 was obtained as a transparent, viscous substance with an 86% yield.
<NMR測定結果> 含氟樹脂前驅物1之重複單元之組成比以莫耳%表示,源自AN之單體單元:源自MA-C4F之單體單元:源自HEMA之單體單元=41:28:31。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 1, expressed in molar %, is 41:28:31 for the monomer units derived from AN:MA-C4F:HEMA.
[化7] 含氟樹脂前驅物1 [Chemistry 7] Fluorinated resin precursor 1
<GPC測定結果> Mw=6,700,Mw/Mn=1.3 <GPC measurement results> Mw=6,700, Mw/Mn=1.3
[含氟樹脂前驅物2之合成] 除了使用甲基丙烯酸2-(全氟己基)乙酯(東京化成工業股份有限公司之製品;以下,記作MA-C6F)代替MA-C4F以外,以與含氟樹脂前驅物1之合成同樣之順序,以85%之產率獲得包含以下重複單元之含氟樹脂前驅物2。 [Synthesis of Fluororesin Producer 2] Fluororesin producer 2, consisting of the following repeating units, was obtained in 85% yield by following the same synthesis procedure as for Fluororesin Producer 1, except that 2-(perfluorohexyl)ethyl methacrylate (Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as MA-C6F) was used instead of MA-C4F.
<NMR測定結果> 含氟樹脂前驅物2之各重複單元之組成比以莫耳%表示,源自AN之單體單元:源自MA-C6F之單體單元:源自HEMA之單體單元=42:27:31。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 2, expressed in molar %, is 42:27:31 for the monomer units derived from AN:MA-C6F:HEMA.
[化8] 含氟樹脂前驅物2 [Chemistry 8] Fluorinated resin precursor 2
<GPC測定結果> Mw=6,300,Mw/Mn=1.3 <GPC measurement results> Mw=6,300, Mw/Mn=1.3
[含氟樹脂前驅物3之合成] 除了使用甲基丙烯腈(東京化成工業股份有限公司之製品;以下,記作MN)代替AN以外,以與含氟樹脂前驅物1之合成同樣之順序,以83%之產率獲得包含以下重複單元之含氟樹脂前驅物3。 [Synthesis of Fluororesin Precursor 3] Fluororesin precursor 3, containing the following repeating units, was obtained in 83% yield by following the same synthesis procedure as for Fluororesin Precursor 1, except that methacrylonitrile (manufactured by Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as MN) was used instead of AN.
<NMR測定結果> 含氟樹脂前驅物3之各重複單元之組成比以莫耳%表示,源自MN之單體單元:源自MA-C4F之單體單元:源自HEMA之單體單元=40:28:32。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 3, expressed in molar %, is MN-derived monomer units: MA-C4F-derived monomer units: HEMA-derived monomer units = 40:28:32.
[化9] 含氟樹脂前驅物3 [Chemistry 9] Fluorinated resin precursor 3
<GPC測定結果> Mw=4,700,Mw/Mn=1.3 <GPC measurement results> Mw=4,700, Mw/Mn=1.3
[含氟樹脂前驅物4之合成] 除了使用MN代替AN以外,以與含氟樹脂前驅物2之合成同樣之順序,以83%之產率獲得包含以下重複單元之含氟樹脂前驅物4。 [Synthesis of Fluororesin Producer 4] Fluororesin producer 4, containing the following repeating units, was obtained in 83% yield by following the same synthesis sequence as for Fluororesin Producer 2, except that MN was used instead of AN.
<NMR測定結果> 含氟樹脂前驅物4之各重複單元之組成比以莫耳%表示,源自MN之單體單元:源自MA-C6F之單體單元:源自HEMA之單體單元=39:29:32。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 4, expressed in molar %, is MN-derived monomer units: MA-C6F-derived monomer units: HEMA-derived monomer units = 39:29:32.
[化10] 含氟樹脂前驅物4 [Chemistry 10] Fluorinated resin precursor 4
<GPC測定結果> Mw=4,200,Mw/Mn=1.3 <GPC measurement results> Mw=4,200, Mw/Mn=1.3
[含氟樹脂前驅物5之合成] 除了使用合成例1中所獲得之TFMPY代替AN以外,以與含氟樹脂前驅物3-1之合成同樣之順序,以80%之產率獲得包含以下重複單元之含氟樹脂前驅物5。 [Synthesis of Fluororesin Producer 5] Fluororesin Producer 5, comprising the following repeating units, was obtained in 80% yield by following the same procedure as for Fluororesin Producer 3-1, except that TFMPY obtained in Synthesis Example 1 was used instead of AN.
<NMR測定結果> 含氟樹脂前驅物5之各重複單元之組成比以莫耳%表示,源自TFMPY之單體單元:源自MA-C4F之單體單元:源自HEMA之單體單元=38:30:32。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 5, expressed in molar %, is TFMPY-derived monomer units: MA-C4F-derived monomer units: HEMA-derived monomer units = 38:30:32.
[化11] 含氟樹脂前驅物5 [Chemistry 11] Fluorinated resin precursor 5
<GPC測定結果> Mw=4,400,Mw/Mn=1.3 <GPC measurement results> Mw=4,400, Mw/Mn=1.3
[含氟樹脂前驅物6之合成] 除了使用合成例1中所獲得之TFMPY代替AN以外,以與含氟樹脂前驅物2之合成同樣之順序,以81%之產率獲得包含以下重複單元之含氟樹脂前驅物6。 [Synthesis of Fluororesin Producer 6] Fluororesin Producer 6, consisting of the following repeating units, was obtained in 81% yield by following the same procedure as for Fluororesin Producer 2, except that TFMPY obtained in Synthesis Example 1 was used instead of AN.
<NMR測定結果> 含氟樹脂前驅物6之各重複單元之組成比以莫耳%表示,源自TFMPY之單體單元:源自MA-C6F之單體單元:源自HEMA之單體單元=39:29:32。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 6, expressed in molar %, is TFMPY-derived monomer units: MA-C6F-derived monomer units: HEMA-derived monomer units = 39:29:32.
[化12] 含氟樹脂前驅物6 [Chemistry 12] Fluorinated resin precursor 6
<GPC測定結果> Mw=4,600,Mw/Mn=1.3 <GPC measurement results> Mw=4,600, Mw/Mn=1.3
[含氟樹脂前驅物7之合成] 於室溫(約20℃)下,取10.6 g(0.2 mol)之AN、49.8 g(0.15 mol)之MA-C4F、19.5 g(0.15 mol)之HEMA、8.66 g(0.1 mol)之甲基丙烯酸(以下,記作MAA)、及89 g之MEK並置於附帶攪拌機之500 ml玻璃製燒瓶內,添加1.6 g(0.01 mol)之AIBN,於攪拌之同時進行脫氣,然後將燒瓶內用氮氣置換,升溫至內溫75℃,反應6小時。向反應系統滴加正庚烷450 g,結果析出透明之黏性物質。藉由傾析法,單離出該黏性物質。於60℃下進行減壓乾燥,以84%之產率獲得74 g之作為透明黏性物質之含氟樹脂前驅物7。 [Synthesis of Fluororesin Precursor 7] At room temperature (approximately 20°C), 10.6 g (0.2 mol) of AN, 49.8 g (0.15 mol) of MA-C4F, 19.5 g (0.15 mol) of HEMA, 8.66 g (0.1 mol) of methacrylic acid (hereinafter referred to as MAA), and 89 g of MEK were placed in a 500 ml glass flask equipped with a stirrer. 1.6 g (0.01 mol) of AIBN was added, and the mixture was degassed while stirring. The flask was then purged with nitrogen, heated to 75°C, and reacted for 6 hours. 450 g of n-heptane was added dropwise to the reaction system, resulting in the precipitation of a transparent, viscous substance. This viscous substance was isolated by decanting. After drying under reduced pressure at 60°C, 74 g of fluororesin precursor 7 was obtained as a transparent viscous substance with a yield of 84%.
<NMR測定結果> 含氟樹脂前驅物7之重複單元之組成比以莫耳%表示,源自AN之單體單元:源自MA-C4F之單體單元:源自HEMA之單體單元:源自MAA之單體單元=33:24:26:17。 <NMR Measurement Results> The composition ratio of the repeating units of fluororesin precursor 7, expressed in molar %, is AN-derived monomer units: MA-C4F-derived monomer units: HEMA-derived monomer units: MAA-derived monomer units = 33:24:26:17.
[化13] 含氟樹脂前驅物7 [Chemistry 13] Fluorinated resin precursor 7
<GPC測定結果> Mw=7,700,Mw/Mn=1.4 <GPC measurement results> Mw=7,700, Mw/Mn=1.4
[含氟樹脂前驅物8之合成] 除了使用MN代替AN、使用MA-C6F代替MA-C4F以外,以與含氟樹脂前驅物7之合成同樣之順序,以81%之產率獲得包含以下重複單元之含氟樹脂前驅物8。 [Synthesis of Fluororesin Producer 8] Fluororesin producer 8, consisting of the following repeating units, was obtained in 81% yield by following the same synthesis sequence as fluororesin producer 7, except that MN was used instead of AN and MA-C6F was used instead of MA-C4F.
<NMR測定結果> 含氟樹脂前驅物8之各重複單元之組成比以莫耳%表示,源自MN之單體單元:源自MA-C6F之單體單元:源自HEMA之單體單元:源自MAA之單體單元=34:23:25:18。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 8, expressed in molar %, is: monomer unit derived from MN: monomer unit derived from MA-C6F: monomer unit derived from HEMA: monomer unit derived from MAA = 34:23:25:18.
[化14] 含氟樹脂前驅物8 [Chemistry 14] Fluorinated resin precursor 8
<GPC測定結果> Mw=5,300,Mw/Mn=1.3 <GPC measurement results> Mw=5,300, Mw/Mn=1.3
[含氟樹脂前驅物9之合成] 除了使用MA-C6F代替MA-C4F、使用丙烯酸(以下,記作AA)代替MAA以外,以與含氟樹脂前驅物7之合成同樣之順序,以81%之產率獲得包含以下重複單元之含氟樹脂前驅物9。 [Synthesis of Fluororesin Precursor 9] Fluororesin precursor 9, containing the following repeating units, was obtained in 81% yield by following the same synthesis sequence as for Fluororesin Precursor 7, except that MA-C6F was used instead of MA-C4F and acrylic acid (hereinafter referred to as AA) was used instead of MAA.
<NMR測定結果> 含氟樹脂前驅物9之各重複單元之組成比以莫耳%表示,源自AN之單體單元:源自MA-C6F之單體單元:源自HEMA之單體單元:源自AA之單體單元=34:23:27:16。 <NMR Measurement Results> The composition ratio of the repeating units in fluororesin precursor 9, expressed in molar %, is 34:23:27:16 (monomer units derived from AN: monomer units derived from MA-C6F: monomer units derived from HEMA: monomer units derived from AA).
[化15] 含氟樹脂前驅物9 [Chemistry 15] Fluorinated resin precursor 9
<GPC測定結果> Mw=6,900,Mw/Mn=1.3 <GPC measurement results> Mw=6,900, Mw/Mn=1.3
[含氟樹脂前驅物10之合成] 除了使用MN代替AN、使用AA代替MAA以外,以與含氟樹脂前驅物7之合成同樣之順序,以82%之產率獲得包含以下重複單元之含氟樹脂前驅物10。 [Synthesis of Fluororesin Producer 10] Fluororesin producer 10, containing the following repeating units, was obtained in 82% yield by following the same synthesis sequence as fluororesin producer 7, except that MN was used instead of AN and AA was used instead of MAA.
<NMR測定結果> 含氟樹脂前驅物10之各重複單元之組成比以莫耳%表示,源自MN之單體單元:源自MA-C4F之單體單元:源自HEMA之單體單元:源自AA之單體單元=33:24:26:17。 <NMR Measurement Results> The composition ratio of the repeating units in the fluororesin precursor 10, expressed in molar %, is MN-derived monomer units: MA-C4F-derived monomer units: HEMA-derived monomer units: AA-derived monomer units = 33:24:26:17.
[化16] 含氟樹脂前驅物10 [Chemistry 16] Fluorinated resin precursor 10
<GPC測定結果> Mw=5,500,Mw/Mn=1.3 <GPC measurement results> Mw=5,500, Mw/Mn=1.3
2-2.比較含氟樹脂前驅物之合成 [比較聚合例1] 於室溫(約20℃)下,取43.2 g(0.1 mol)之MA-C6F、23.6 g(0.1 mol)之甲基丙烯酸六氟異丙酯(Central Glass股份有限公司製造,以下,記作HFIP-M)、17.32 g(0.2 mol)之MAA、84 g之MEK、及1.6 g(0.010 mol)之AIBN並置於附帶攪拌機之300 ml玻璃製燒瓶內,於攪拌之同時進行脫氣,然後將燒瓶內用氮氣置換,升溫至80℃之後,反應6小時。將反應結束後之反應液滴至500 g之正庚烷中,結果獲得白色沈澱。將該沈澱過濾分離,於60℃之溫度下進行減壓乾燥,以64%之產率獲得55 g之作為白色固體之比較含氟樹脂前驅物1。 2-2. Comparative Synthesis of Fluororesin Precursors [Comparative Polymerization Example 1] At room temperature (approximately 20°C), 43.2 g (0.1 mol) of MA-C6F, 23.6 g (0.1 mol) of hexafluoroisopropyl methacrylate (manufactured by Central Glass Co., Ltd., hereinafter referred to as HFIP-M), 17.32 g (0.2 mol) of MAA, 84 g of MEK, and 1.6 g (0.010 mol) of AIBN were placed in a 300 ml glass flask equipped with a stirrer. Deaeration was performed while stirring, and the atmosphere in the flask was replaced with nitrogen. The temperature was raised to 80°C, and the reaction was allowed to proceed for 6 hours. The reaction mixture was added dropwise to 500 g of n-heptane, yielding a white precipitate. The precipitate was separated by filtration and dried under reduced pressure at 60°C to yield 55 g of comparative fluorinated resin precursor 1 as a white solid with a yield of 64%.
<NMR測定結果> 比較含氟樹脂前驅物1之各重複單元之組成比以莫耳比表示,源自MA-C6F之單體單元:源自HFIP-M之單體單元:源自MAA之單體單元=26:20:54。 <NMR Measurement Results> Comparison of the compositional ratios of the repeating units in fluororesin precursor 1, expressed as a molar ratio, revealed that the ratio of monomer units derived from MA-C6F: monomer units derived from HFIP-M: monomer units derived from MAA was 26:20:54.
[化17] 比較含氟樹脂前驅物1 [Chemistry 17] Comparison of fluorinated resin precursor 1
<GPC測定結果> Mw=9,700,Mw/Mn=1.5 <GPC measurement results> Mw=9,700, Mw/Mn=1.5
[比較聚合例2] 於室溫下,取13.01 g(0.1 mol)之HEMA、43.2 g(0.1 mol)之MA-C6F、23.6 g(0.1 mol)之HFIP-M、8.66 g(0.1 mol)之MAA、及88 g之MEK並置於附帶攪拌機之300 ml玻璃製燒瓶內,添加1.6 g(0.010 mol)之AIBN,於攪拌之同時進行脫氣,然後將燒瓶內用氮氣置換,升溫至80℃之後,反應6小時。將反應結束後之反應液滴至500 g之正庚烷中,結果獲得白色沈澱。將該沈澱過濾分離,於溫度60℃下進行減壓乾燥,以68%之產率獲得60 g之作為白色固體之比較含氟樹脂前驅物2。 [Comparative Polymerization Example 2] At room temperature, 13.01 g (0.1 mol) of HEMA, 43.2 g (0.1 mol) of MA-C6F, 23.6 g (0.1 mol) of HFIP-M, 8.66 g (0.1 mol) of MAA, and 88 g of MEK were placed in a 300 ml glass flask equipped with a stirrer. 1.6 g (0.010 mol) of AIBN was added, and the mixture was degassed while stirring. The flask was then purged with nitrogen, heated to 80°C, and reacted for 6 hours. The reaction mixture was then added dropwise to 500 g of n-heptane, yielding a white precipitate. The precipitate was separated by filtration and dried under reduced pressure at 60°C to obtain 60 g of comparative fluorinated resin precursor 2 as a white solid with a yield of 68%.
<NMR測定結果> 比較含氟樹脂前驅物2之各重複單元之組成比以莫耳比表示,源自HEMA之單體單元:源自MA-C6F之單體單元:源自HFIP-M之單體單元:源自MAA之單體單元=24:26:24:26。 <NMR Measurement Results> The molar ratio of the repeating units in fluororesin precursor 2 was 24:26:24:26.
[化18] 比較含氟樹脂前驅物2 [Chemistry 18] Comparison of Fluorinated Resin Precursor 2
<GPC測定結果> Mw=10,700,Mw/Mn=1.5 <GPC measurement results> Mw=10,700,Mw/Mn=1.5
[比較聚合例3] 於室溫下,取12.2 g(0.10 mol)合成例2所獲得之p-HO-St、43.2 g(0.1 mol)之MA-C6F、8.8 g(0.1 mol)之2-羥乙基乙烯醚(東京化成工業股份有限公司之製品;以下,記作HEVE)、及64 g之MEK並置於附帶攪拌機之300 ml玻璃製燒瓶內,添加1.6 g(0.010 mol)之AIBN,於攪拌之同時進行脫氣,然後將燒瓶內用氮氣置換,升溫至80℃之後,反應6小時。將反應結束後之反應液滴至500 g之正庚烷中,結果獲得白色沈澱。將該沈澱過濾分離,於溫度60℃下進行減壓乾燥,以81%之產率獲得51 g之作為白色固體之比較含氟樹脂前驅物3。 [Comparative Polymerization Example 3] At room temperature, 12.2 g (0.10 mol) of p-HO-St obtained in Synthesis Example 2, 43.2 g (0.1 mol) of MA-C6F, 8.8 g (0.1 mol) of 2-hydroxyethyl vinyl ether (Tokyo Chemical Industry Co., Ltd.; hereinafter referred to as HEVE), and 64 g of MEK were placed in a 300 ml glass flask equipped with a stirrer. 1.6 g (0.010 mol) of AIBN was added, and the mixture was degassed while stirring. The flask was then purged with nitrogen, heated to 80°C, and reacted for 6 hours. The reaction mixture was then added dropwise to 500 g of n-heptane, resulting in a white precipitate. The precipitate was separated by filtration and dried under reduced pressure at 60°C to obtain 51 g of comparative fluorinated resin precursor 3 as a white solid with a yield of 81%.
<NMR測定結果> 比較含氟樹脂前驅物3之各重複單元之組成比以莫耳比表示,源自HEVE之單體單元:源自MA-C6F之單體單元:源自p-HO-St之單體單元=35:31:34。 <NMR Measurement Results> Comparison of the compositional ratios of the repeating units in fluororesin precursor 3, expressed as a molar ratio, revealed that the ratio of monomer units derived from HEVE: monomer units derived from MA-C6F: monomer units derived from p-HO-St was 35:31:34.
[化19] 比較含氟樹脂前驅物3 [Chemistry 19] Comparison of Fluorinated Resin Precursor 3
<GPC測定結果> Mw=17,300,Mw/Mn=1.7 <GPC measurement results> Mw=17,300, Mw/Mn=1.7
3.含氟樹脂之製造(第二步驟:加成反應) 藉由使「2.含氟樹脂之製造(第一步驟:聚合)」中所獲得之含氟樹脂前驅物1~6及比較含氟樹脂前驅物1~3與丙烯酸衍生物反應,而合成含氟樹脂。使用Karenz-AOI(昭和電工股份有限公司之製品)作為丙烯酸衍生物。該反應係各含氟樹脂前驅物中之羥基與丙烯酸衍生物之加成反應。 3. Production of Fluororesins (Second Step: Addition Reaction) Fluororesins were synthesized by reacting fluororesin precursors 1-6 and comparative fluororesin precursors 1-3 obtained in "2. Production of Fluororesins (First Step: Polymerization)" with an acrylic acid derivative. Karenz-AOI (manufactured by Showa Denko Co., Ltd.) was used as the acrylic acid derivative. This reaction was an addition reaction between the hydroxyl groups in each fluororesin precursor and the acrylic acid derivative.
[化20] Karenz-AOI [Chemistry 20] Karenz-AOI
[含氟樹脂1之合成] 取10 g(羥基當量為0.019 mol)之含氟樹脂前驅物1、20 g之PGMEA並置於附帶攪拌機之300 ml玻璃製燒瓶內,添加2.68 g(0.019 mol)之Karenz-AOI,於45℃下反應4小時。將反應結束後之反應液濃縮後,添加150 g之正庚烷,使沈澱析出。將該沈澱過濾分離,於40℃下進行減壓乾燥,以90%之產率獲得11.4 g之作為白色固體之含氟樹脂1。 [Synthesis of Fluororesin 1] 10 g (hydroxyl equivalent weight 0.019 mol) of fluororesin precursor 1 and 20 g of PGMEA were placed in a 300 ml glass flask equipped with a stirrer. 2.68 g (0.019 mol) of Karenz-AOI was added and the mixture was reacted at 45°C for 4 hours. The reaction mixture was concentrated and 150 g of n-heptane was added to allow precipitation. The precipitate was separated by filtration and dried under reduced pressure at 40°C to yield 11.4 g of fluororesin 1 as a white solid in a 90% yield.
< 13C-NMR測定結果> 於含氟樹脂1中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自AN之單體單元、源自MA-C4F之單體單元)之組成比與所使用之含氟樹脂前驅物1相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Fluororesin 1, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from AN and monomer units derived from MA-C4F) was confirmed to be unchanged compared to Fluororesin Prototype 1 (same as before crosslinking group introduction).
[含氟樹脂2之合成] 除了使用含氟樹脂前驅物2代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以91%之產率獲得含氟樹脂2。 [Synthesis of Fluoro-Resin 2] Fluoro-Resin 2 was obtained in 91% yield by following the same synthesis procedure as Fluoro-Resin 1, except that Fluoro-Resin Precursor 2 was used instead of Fluoro-Resin Precursor 1.
< 13C-NMR測定結果> 於含氟樹脂2中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為95:5。又,確認出,不與交聯基部位反應之各重複單元(源自AN之單體單元、源自MA-C6F之單體單元)之組成比與所使用之含氟樹脂前驅物2相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Fluororesin 2, the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) and the amount of residual hydroxyl groups (unreacted rate) expressed in a molar ratio of 95:5 were confirmed. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from AN and monomer units derived from MA-C6F) remained unchanged compared to that in Fluororesin Prototype 2 (the same as before crosslinking group introduction).
[含氟樹脂3之合成] 除了使用含氟樹脂前驅物3代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以90%之產率獲得含氟樹脂3。 [Synthesis of Fluoro-Resin 3] Fluoro-Resin 3 was obtained in 90% yield by following the same synthesis procedure as Fluoro-Resin 1, except that Fluoro-Resin Precursor 3 was used instead of Fluoro-Resin Precursor 1.
< 13C-NMR測定結果> 於含氟樹脂3中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為97:3。又,確認出,不與交聯基部位反應之各重複單元(源自MN之單體單元、源自MA-C4F之單體單元)之組成比與所使用之含氟樹脂前驅物3相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Fluororesin 3, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 97:3. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MN and monomer units derived from MA-C4F) was confirmed to be unchanged compared to Fluororesin Prototype 3 (same as before crosslinking group introduction).
[含氟樹脂4之合成] 除了使用含氟樹脂前驅物4代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以89%之產率獲得含氟樹脂4。 [Synthesis of Fluororesin 4] Fluororesin 4 was obtained in 89% yield by following the same synthesis procedure as Fluororesin 1, except that Fluororesin Precursor 4 was used instead of Fluororesin Precursor 1.
< 13C-NMR測定結果> 於含氟樹脂4中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自MN之單體單元、源自MA-C6F之單體單元)之組成比與所使用之含氟樹脂前驅物4相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 4, the molar ratio of the amount of acrylic acid derivative introduced from Karenz-AOI (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MN and monomer units derived from MA-C6F) was confirmed to be unchanged compared to that of fluororesin protopolymer 4 (the same as before crosslinking group introduction).
[含氟樹脂5之合成] 除了使用含氟樹脂前驅物5代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以92%之產率獲得含氟樹脂5。 [Synthesis of Fluororesin 5] Fluororesin 5 was obtained in a 92% yield by following the same synthesis procedure as Fluororesin 1, except that Fluororesin Precursor 5 was used instead of Fluororesin Precursor 1.
< 13C-NMR測定結果> 於含氟樹脂5中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為95:5。又,確認出,不與交聯基部位反應之各重複單元(源自TFMPY之單體單元、源自MA-C4F之單體單元)之組成比與所使用之含氟樹脂前驅物5相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 5, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 95:5. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from TFMPY and monomer units derived from MA-C4F) was confirmed to be unchanged compared to that in fluororesin protopolymer 5 (the same as before crosslinking group introduction).
[含氟樹脂6之合成] 除了使用含氟樹脂前驅物6代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以89%之產率獲得含氟樹脂6。 [Synthesis of Fluororesin 6] Fluororesin 6 was obtained in 89% yield by following the same synthesis procedure as Fluororesin 1, except that Fluororesin Precursor 6 was used instead of Fluororesin Precursor 1.
< 13C-NMR測定結果> 於含氟樹脂6中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自TFMPY之單體單元、源自MA-C6F之單體單元)之組成比與所使用之含氟樹脂前驅物6相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 6, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from TFMPY and monomer units derived from MA-C6F) was confirmed to be unchanged compared to that in fluororesin protopolymer 6 (the same as before crosslinking group introduction).
[含氟樹脂7之合成] 取10 g之含氟樹脂前驅物7(醇性羥基當量0.018 mol)、20 g之PGMEA並置於附帶攪拌機之300 ml玻璃製燒瓶內,添加2.52 g(0.018 mol)之Karenz-AOI,於45℃下反應5小時。將反應結束後之反應液濃縮後,添加150 g之正庚烷,使沈澱析出。將該沈澱過濾分離,於40℃下進行減壓乾燥,以96%之產率獲得12.0 g之作為白色固體之含氟樹脂7。 [Synthesis of Fluororesin 7] 10 g of fluororesin precursor 7 (alcoholic hydroxyl equivalent 0.018 mol) and 20 g of PGMEA were placed in a 300 ml glass flask equipped with a stirrer. 2.52 g (0.018 mol) of Karenz-AOI was added and the mixture was reacted at 45°C for 5 hours. The reaction mixture was concentrated and 150 g of n-heptane was added to precipitate the product. The precipitate was separated by filtration and dried under reduced pressure at 40°C to yield 12.0 g of fluororesin 7 as a white solid in a 96% yield.
< 13C-NMR測定結果> 於含氟樹脂7中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留醇性羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自AN之單體單元、源自MA-C4F之單體單元)之組成比與所使用之含氟樹脂前驅物7相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 7, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual alcoholic hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from AN and monomer units derived from MA-C4F) was confirmed to be unchanged compared to that of fluororesin protopolymer 7 (the same as before crosslinking group introduction).
[含氟樹脂8之合成] 除了使用含氟樹脂前驅物8代替含氟樹脂前驅物7以外,以與含氟樹脂7之合成同樣之順序,以93%之產率獲得含氟樹脂8。 [Synthesis of Fluororesin 8] Fluororesin 8 was obtained in a 93% yield by following the same synthesis procedure as Fluororesin 7, except that Fluororesin Precursor 8 was used instead of Fluororesin Precursor 7.
< 13C-NMR測定結果> 於含氟樹脂8中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留醇性羥基量(未反應率)以莫耳比表示,為97:3。又,確認出,不與交聯基部位反應之各重複單元(源自MN之單體單元、源自MA-C6F之單體單元)之組成比與所使用之含氟樹脂前驅物8相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Fluororesin 8, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual alcoholic hydroxyl groups (unreacted rate) was 97:3. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MN and monomer units derived from MA-C6F) was confirmed to be unchanged compared to Fluororesin Prototype 8 (same as before crosslinking group introduction).
[含氟樹脂9之合成] 除了使用含氟樹脂前驅物9代替含氟樹脂前驅物7以外,以與含氟樹脂7之合成同樣之順序,以90%之產率獲得含氟樹脂9。 [Synthesis of Fluororesin 9] Fluororesin 9 was obtained in a 90% yield by following the same synthesis procedure as Fluororesin 7, except that Fluororesin Precursor 9 was used instead of Fluororesin Precursor 7.
< 13C-NMR測定結果> 於含氟樹脂9中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為95:5。又,確認出,不與交聯基部位反應之各重複單元(源自AN之單體單元、源自MA-C6F之單體單元)之組成比與所使用之含氟樹脂前驅物9相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 9, the molar ratio of the amount of acrylic acid derivative introduced from Karenz-AOI (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 95:5. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from AN and monomer units derived from MA-C6F) was confirmed to be unchanged compared to that of fluororesin protopolymer 9 (the same as before crosslinking group introduction).
[含氟樹脂10之合成] 除了使用含氟樹脂前驅物10代替含氟樹脂前驅物7以外,以與含氟樹脂7之合成同樣之順序,以93%之產率獲得含氟樹脂10。 [Synthesis of Fluororesin 10] Fluororesin 10 was obtained in a 93% yield by following the same synthesis procedure as Fluororesin 7, except that Fluororesin Precursor 10 was used instead of Fluororesin Precursor 7.
< 13C-NMR測定結果> 於含氟樹脂10中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自MN之單體單元、源自MA-C4F之單體單元)之組成比與所使用之含氟樹脂前驅物10相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In fluororesin 10, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MN and monomer units derived from MA-C4F) was confirmed to be unchanged compared to the fluororesin precursor 10 used (same as before crosslinking group introduction).
[比較含氟樹脂1之合成] 除了使用比較含氟樹脂前驅物1代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以89%之產率獲得比較含氟樹脂1。 [Synthesis of Comparative Fluororesin 1] Fluororesin 1 was obtained in 89% yield by following the same synthesis procedure as Fluororesin 1, except that Comparative Fluororesin Precursor 1 was used instead of Fluororesin Precursor 1.
< 13C-NMR測定結果> 於比較含氟樹脂1中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出,不與交聯基部位反應之各重複單元(源自MA-C6F之單體單元、源自HFIP-M之單體單元)之組成比與所使用之比較含氟樹脂前驅物1相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Comparative Fluororesin 1, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MA-C6F and monomer units derived from HFIP-M) was confirmed to be unchanged from that in Comparative Fluororesin Prototype 1 (same as before crosslinking group introduction).
[比較含氟樹脂2之合成] 除了使用比較含氟樹脂前驅物2代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以90%之產率獲得比較含氟樹脂2。 [Synthesis of Comparative Fluorine-Containing Resin 2] Comparative Fluorine-Containing Resin 2 was obtained in 90% yield by following the same synthesis procedure as Fluorine-Containing Resin 1, except that Comparative Fluorine-Containing Resin Precursor 2 was used instead of Fluorine-Containing Resin Precursor 1.
< 13C-NMR測定結果> 於比較含氟樹脂2中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為96:4。又,確認出不與交聯基部位反應之各重複單元(源自MA-C6F之單體單元、源自HFIP-M之單體單元)之組成比與所使用之比較含氟樹脂前驅物2相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Comparative Fluororesin 2, the molar ratio of the amount of Karenz-AOI-derived acrylic acid derivative introduced (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 96:4. Furthermore, the composition ratio of the repeating units that do not react with the crosslinking sites (monomer units derived from MA-C6F and monomer units derived from HFIP-M) was confirmed to be unchanged from that in Comparative Fluororesin Prototype 2 (same as before crosslinking group introduction).
[比較含氟樹脂3之合成] 除了使用比較含氟樹脂前驅物3代替含氟樹脂前驅物1以外,以與含氟樹脂1之合成同樣之順序,以90%之產率獲得比較含氟樹脂3。 [Synthesis of Comparative Fluorine-Containing Resin 3] Comparative Fluorine-Containing Resin 3 was obtained in 90% yield by following the same synthesis procedure as Fluorine-Containing Resin 1, except that Comparative Fluorine-Containing Resin Precursor 3 was used instead of Fluorine-Containing Resin Precursor 1.
< 13C-NMR測定結果> 於比較含氟樹脂3中,源自Karenz-AOI之丙烯酸衍生物之導入量(反應率)及殘留羥基量(未反應率)以莫耳比表示,為95:5。又,確認出,不與交聯基部位反應之各重複單元(源自MA-C6F之單體單元)之組成比與所使用之比較含氟樹脂前驅物3相比並無變化(與導入交聯基前相同)。 < 13C -NMR Measurement Results> In Comparative Fluororesin 3, the molar ratio of the amount of acrylic acid derivative introduced from Karenz-AOI (reaction rate) to the amount of residual hydroxyl groups (unreacted rate) was 95:5. Furthermore, the composition ratio of the repeating units (monomer units derived from MA-C6F) that do not react with the crosslinking sites was confirmed to be unchanged from that in Comparative Fluororesin Prototype 3 (same as before crosslinking group introduction).
4.感光性樹脂組合物之製備 [感光性樹脂組合物1之製備] 調配0.5質量份之所製造之含氟樹脂1、作為光聚合起始劑之0.5質量份之Irgacure 369(BASF股份有限公司之製品)、作為交聯劑之50質量份之季戊四醇四丙烯酸酯(東京化成工業股份有限公司之製品)、作為鹼溶解性樹脂之50質量份之ZAR2051H(日本化藥股份有限公司之製品)、作為溶劑之160質量份之丙二醇單甲醚乙酸酯(PGMEA)及70質量份之丙二醇單甲醚(PGME),將所獲得之溶液藉由0.2 μm之膜濾器進行過濾,藉此製備感光性樹脂組合物1。 4. Preparation of Photosensitive Resin Composition [Preparation of Photosensitive Resin Composition 1] 0.5 parts by mass of the prepared fluorinated resin 1, 0.5 parts by mass of Irgacure 369 (manufactured by BASF Corporation) as a photopolymerization initiator, 50 parts by mass of pentaerythritol tetraacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.) as a crosslinking agent, 50 parts by mass of ZAR2051H (manufactured by Nippon Kayaku Co., Ltd.) as an alkali-soluble resin, and 160 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) and 70 parts by mass of propylene glycol monomethyl ether (PGME) as solvents were mixed. The resulting solution was filtered through a 0.2 μm membrane filter to prepare photosensitive resin composition 1.
[感光性樹脂組合物2之製備] 除了使用含氟樹脂2代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物2。 [Preparation of Photosensitive Resin Composition 2] Photosensitive resin composition 2 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 2 was used instead of fluorinated resin 1.
[感光性樹脂組合物3之製備] 除了使用含氟樹脂3代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物3。 [Preparation of Photosensitive Resin Composition 3] Photosensitive resin composition 3 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 3 was used instead of fluorinated resin 1.
[感光性樹脂組合物4之製備] 除了使用含氟樹脂4代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物4。 [Preparation of Photosensitive Resin Composition 4] Photosensitive resin composition 4 was prepared using the same procedures as for photosensitive resin composition 1, except that fluorinated resin 4 was used instead of fluorinated resin 1.
[感光性樹脂組合物5之製備] 除了使用含氟樹脂5代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物5。 [Preparation of Photosensitive Resin Composition 5] Photosensitive resin composition 5 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 5 was used instead of fluorinated resin 1.
[感光性樹脂組合物6之製備] 除了使用含氟樹脂6代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物6。 [Preparation of Photosensitive Resin Composition 6] Photosensitive resin composition 6 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 6 was used instead of fluorinated resin 1.
[感光性樹脂組合物7之製備] 除了使用含氟樹脂7代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物7。 [Preparation of Photosensitive Resin Composition 7] Photosensitive resin composition 7 was prepared using the same procedure as for photosensitive resin composition 1, except that fluorinated resin 7 was used instead of fluorinated resin 1.
[感光性樹脂組合物8之製備] 除了使用含氟樹脂8代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物8。 [Preparation of Photosensitive Resin Composition 8] Photosensitive resin composition 8 was prepared using the same procedure as for photosensitive resin composition 1, except that fluorinated resin 8 was used instead of fluorinated resin 1.
[感光性樹脂組合物9之製備] 除了使用含氟樹脂9代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物9。 [Preparation of Photosensitive Resin Composition 9] Photosensitive resin composition 9 was prepared using the same procedure as for photosensitive resin composition 1, except that fluorinated resin 9 was used instead of fluorinated resin 1.
[感光性樹脂組合物10之製備] 除了使用含氟樹脂10代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備感光性樹脂組合物10。 [Preparation of Photosensitive Resin Composition 10] Photosensitive resin composition 10 was prepared using the same procedures as for photosensitive resin composition 1, except that fluorinated resin 10 was used instead of fluorinated resin 1.
[比較感光性樹脂組合物1之製備] 除了使用比較含氟樹脂1代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備比較感光性樹脂組合物1。 [Preparation of Comparative Photosensitive Resin Composition 1] Comparative photosensitive resin composition 1 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 1 was used instead of fluorinated resin 1.
[比較感光性樹脂組合物2之製備] 除了使用比較含氟樹脂2代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備比較感光性樹脂組合物2。 [Preparation of Comparative Photosensitive Resin Composition 2] Comparative Photosensitive Resin Composition 2 was prepared following the same procedures as for Photosensitive Resin Composition 1, except that Comparative Fluoropolymer Resin 2 was used instead of Fluoropolymer Resin 1.
[比較感光性樹脂組合物3之製備] 除了使用比較含氟樹脂3代替含氟樹脂1以外,以與感光性樹脂組合物1之製備同樣之順序製備比較感光性樹脂組合物3。 [Preparation of Comparative Photosensitive Resin Composition 3] Comparative photosensitive resin composition 3 was prepared following the same procedures as for photosensitive resin composition 1, except that fluorinated resin 3 was used instead of fluorinated resin 1.
5.障壁之評價 使用「4.感光性樹脂組合物之製備」中所獲得之感光性樹脂組合物1~10及比較感光性樹脂組合物1~3,形成障壁1~10及比較障壁1~3,對障壁性能進行評價及比較。將本發明之障壁之結果及比較障壁之結果示於表1。 5. Barrier Evaluation Using photosensitive resin compositions 1-10 and comparative photosensitive resin compositions 1-3 obtained in "4. Preparation of Photosensitive Resin Compositions," barrier ribs 1-10 and comparative barrier ribs 1-3 were formed and their barrier performance was evaluated and compared. The results for the barrier ribs of the present invention and the comparative barrier ribs are shown in Table 1.
[障壁之形成] 將10 cm見方之ITO基板利用超純水、然後利用丙酮洗淨之後,使用UV臭氧處理裝置(SEN特殊光源股份有限公司製造,型號:PL17-110),對該基板進行5分鐘UV臭氧處理。其次,使用「4.感光性樹脂組合物之製備」中所獲得之感光性樹脂組合物1~10及比較感光性樹脂組合物1~3,使用旋轉塗佈機以轉速1,000 rpm塗佈於所獲得之UV臭氧處理後之基板上,於加熱板上以100℃加熱150秒,形成膜厚2 μm之含氟樹脂膜及比較含氟樹脂膜。使用光罩對準曝光機(SUSS MicroTec股份有限公司之製品),隔著線與間隙為5 μm之光罩,向所獲得之樹脂膜照射i-光線(波長365 nm),進行曝光。 針對所獲得之曝光後之樹脂膜進行顯影液溶解性、障壁性能之評價(感度、解像度)、及接觸角之測定。 [Barrier Formation] A 10 cm square ITO substrate was cleaned with ultrapure water and then acetone, then treated with UV ozone for 5 minutes using a UV ozone treatment system (Model: PL17-110, manufactured by SEN Specialty Lighting Co., Ltd.). Next, photosensitive resin compositions 1-10 and comparative photosensitive resin compositions 1-3 obtained in "4. Preparation of Photosensitive Resin Compositions" were applied to the UV ozone-treated substrate using a spin coater at 1,000 rpm. The films were heated on a hot plate at 100°C for 150 seconds to form 2 μm-thick fluororesin and comparative fluororesin films. The resulting resin film was exposed to i-rays (365 nm wavelength) through a mask with 5 μm lines and spaces using a mask alignment and exposure system (SUSS MicroTec Co., Ltd.). The exposed resin film was evaluated for developer solubility, barrier properties (sensitivity, resolution), and contact angle.
[顯影液溶解性] 將ITO基板上之曝光後之樹脂膜於室溫下在鹼顯影液中浸漬80秒,評價於鹼顯影液中之溶解性。作為鹼顯影液,使用2.38質量%之氫氧化四甲基銨水溶液(以下,有時稱為TMAH)。障壁之溶解性藉由使用接觸式膜厚計測定浸漬後之障壁之膜厚來進行評價。將障壁完全溶解之情形設為「可溶」,將障壁未溶解而殘留之情形設為「不溶」。將結果示於表1。 [Developer Solubility] The exposed resin film on the ITO substrate was immersed in an alkaline developer at room temperature for 80 seconds to evaluate its solubility in the alkaline developer. A 2.38% by mass aqueous solution of tetramethylammonium hydroxide (hereinafter sometimes referred to as TMAH) was used as the alkaline developer. The barrier solubility was evaluated by measuring the film thickness after immersion using a contact-type film thickness gauge. Complete dissolution of the barrier was considered "soluble," while residual barrier dissolution was considered "insoluble." The results are shown in Table 1.
[障壁性能(感度、解像度)] 求出形成上述線與間隙之圖案即障壁時之最佳曝光量Eop(mJ/cm 2),將其作為感度之指標。 又,使用顯微鏡觀察所獲得之障壁圖案,對解像度進行評價。將未能確認到線邊緣粗糙度者設為「優」、略微確認到者設為「良」、明顯者設為「不合格」。將結果示於表1。 [Barrier Performance (Sensitivity, Resolution)] The optimal exposure dose (Eop) (mJ/ cm² ) for forming the barrier ribs, the line-and-space pattern described above, was determined and used as an indicator of sensitivity. The resulting barrier rib patterns were observed under a microscope to evaluate resolution. No visible edge roughness was rated "Excellent," slight visible edge roughness was rated "Good," and significant edge roughness was rated "Unacceptable." The results are shown in Table 1.
[表1]
[接觸角] 將藉由上述步驟所獲得之具有障壁之基板於230℃下進行60分鐘之加熱之後,對於該基板整面進行10分鐘之UV臭氧處理或氧電漿處理。其後,於230℃下加熱60秒。於UV臭氧處理或氧電漿處理前後、及其後之加熱步驟之後,使用接觸角計(協和界面科學股份有限公司製造,型號:DMs-601)對各障壁表面之對於苯甲醚、PGMEA、及水之接觸角進行測定。將結果示於表2。 再者,所使用之UV臭氧處理裝置與上述UV臭氧處理裝置相同。 又,作為氧電漿處理裝置,使用Yamato Scientific股份有限公司製造之電漿乾式清洗機PDC210,於氧氣流量30 cc/分鐘、輸出300 W之條件下進行氧電漿處理。 [Contact Angle] The substrates with barrier ribs obtained through the above steps were heated at 230°C for 60 minutes. The entire surface of the substrates was then subjected to UV ozone treatment or oxygen plasma treatment for 10 minutes. Subsequently, the substrates were heated at 230°C for 60 seconds. Before and after the UV ozone or oxygen plasma treatment, and after the subsequent heating step, the contact angles of the barrier rib surfaces with respect to anisole, PGMEA, and water were measured using a contact angle meter (DMs-601, manufactured by Kyowa Interface Science Co., Ltd.). The results are shown in Table 2. The UV ozone treatment apparatus used was the same as that described above. In addition, a plasma dry cleaner PDC210 manufactured by Yamato Scientific Co., Ltd. was used as an oxygen plasma treatment device. Oxygen plasma treatment was performed at an oxygen flow rate of 30 cc/min and an output of 300 W.
[表2]
如表1所示,本發明之障壁及比較障壁均為於顯影液溶解性之評價中僅未曝光部溶解之負型抗蝕劑,於障壁性能之評價中顯示出相同程度之感度,光罩之5 μm之線與間隙均以較佳之解像性轉印,未觀察到線邊緣粗糙度之解像度均為「優」。即,基於該等評價,可知本發明之含氟樹脂與比較含氟樹脂對障壁之影響較小。As shown in Table 1, both the barrier ribs of the present invention and the comparative barrier ribs are negative resists, dissolving only in the unexposed areas in the developer solubility evaluation. In the barrier rib performance evaluation, they exhibited comparable sensitivity. 5 μm lines and spaces on the photomask were transferred with excellent resolution, and no line edge roughness was observed, resulting in an "Excellent" resolution. These evaluations demonstrate that the fluorinated resin of the present invention has a smaller impact on the barrier ribs than the comparative fluorinated resin.
另一方面,如表2所示,於本發明之障壁中,曝光部(相當於障壁上表面)之對於苯甲醚、PGMEA、及水之接觸角雖因UV臭氧處理或氧電漿處理而有所降低,但藉由隨後進行之加熱步驟而增加,故顯示良好之撥液性。於比較障壁中,接觸角因UV臭氧處理或氧電漿處理而有所降低,即便藉由隨後進行之加熱步驟,接觸角亦幾乎無變化而仍較低。On the other hand, as shown in Table 2, the contact angles of the exposed portion (equivalent to the barrier rib top surface) of the barrier rib of the present invention with respect to anisole, PGMEA, and water, while reduced by UV ozone or oxygen plasma treatment, were increased by the subsequent heating step, demonstrating excellent liquid repellency. In the comparative barrier rib, the contact angle was reduced by UV ozone or oxygen plasma treatment, but remained relatively low, with little change even after the subsequent heating step.
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| CN106662815B (en) | 2014-07-18 | 2020-06-16 | Agc株式会社 | Negative photosensitive resin composition, resin cured film, partition wall and optical element |
| JP6404799B2 (en) * | 2015-06-04 | 2018-10-17 | 信越化学工業株式会社 | Resist underlayer film material and pattern forming method |
| US11939459B2 (en) | 2018-11-26 | 2024-03-26 | Central Glass Company, Limited | Photosensitive resin composition, method for producing cured product of fluororesin, fluororesin, fluororesin film, bank and display element |
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- 2021-10-27 WO PCT/JP2021/039671 patent/WO2022092155A1/en not_active Ceased
- 2021-10-27 JP JP2022559202A patent/JPWO2022092155A1/ja active Pending
- 2021-10-27 KR KR1020237017117A patent/KR20230096006A/en active Pending
- 2021-10-27 CN CN202180074320.XA patent/CN116438218A/en active Pending
- 2021-10-28 TW TW110140043A patent/TWI895532B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI700323B (en) * | 2015-08-31 | 2020-08-01 | 日商富士軟片股份有限公司 | Curable composition, method for producing cured film, color filter, light-blocking film, solid-state imaging element, and image display device |
| TW202016194A (en) * | 2018-07-30 | 2020-05-01 | 日商大金工業股份有限公司 | Compositions and molded products containing fluoropolymers |
| CN111690159A (en) * | 2020-06-10 | 2020-09-22 | 北京大学 | Preparation method of liquid crystal/high-molecular full-polymerization quantum dot film based on vinyl ether |
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| JPWO2022092155A1 (en) | 2022-05-05 |
| CN116438218A (en) | 2023-07-14 |
| TW202229381A (en) | 2022-08-01 |
| KR20230096006A (en) | 2023-06-29 |
| WO2022092155A1 (en) | 2022-05-05 |
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