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TWI894511B - Perovskite film, method for producing perovskite film and photonic device - Google Patents

Perovskite film, method for producing perovskite film and photonic device

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Publication number
TWI894511B
TWI894511B TW112101956A TW112101956A TWI894511B TW I894511 B TWI894511 B TW I894511B TW 112101956 A TW112101956 A TW 112101956A TW 112101956 A TW112101956 A TW 112101956A TW I894511 B TWI894511 B TW I894511B
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Taiwan
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calcium
titanium
dimensional
layer
quasi
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TW112101956A
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Chinese (zh)
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TW202431971A (en
Inventor
施權峰
呂正傑
吳炫達
蕭淵文
鄭弼軒
葉政賢
Original Assignee
國立成功大學
四維精密材料股份有限公司
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

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  • Inorganic Compounds Of Heavy Metals (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The present invention relates to a perovskite film, a method for producing the perovskite film and a photonic device. The perovskite film is composed of a three-dimensional perovskite layer and a quasi-two-dimensional perovskite layer, and the two layers have specific perovskite compounds. In the method for producing the perovskite film, a specific molar concentration ratio of lead ions to methyl ammonium ions is used to produce the perovskite film, thereby improving power conversion efficiency and stability of the photonic device containing the perovskite film.

Description

鈣鈦礦薄膜、鈣鈦礦薄膜製造方法以及光電裝置Calcium-titanium thin film, calcium-titanium thin film manufacturing method, and optoelectronic device

本發明係有關於一種鈣鈦礦薄膜、鈣鈦礦薄膜製造方法以及光電裝置,且特別是有關於一種由三維鈣鈦礦層及準二維鈣鈦礦層所組成之鈣鈦礦薄膜、鈣鈦礦薄膜製造方法以及光電裝置。 The present invention relates to a calcium-titanium thin film, a method for manufacturing the calcium-titanium thin film, and a photoelectric device, and in particular to a calcium-titanium thin film composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, a method for manufacturing the calcium-titanium thin film, and a photoelectric device.

光電裝置(如太陽能電池及光感測器)常使用鈣鈦礦層做為光電轉換的元件。舉例而言,鈣鈦礦太陽能電池以三維鈣鈦礦層做為主動層,且光感測器可如發光二極體,其利用鈣鈦礦層做為光吸收層。雖然三維鈣鈦礦層之鈣鈦礦化合物具有高光電轉換效率,但容易遭受外界水氣降解,故穩定性差。 Photoelectric devices (such as solar cells and photosensors) often use calcium-titanium layers as components for photoelectric conversion. For example, calcium-titanium solar cells use a three-dimensional calcium-titanium layer as the active layer, while photosensors such as light-emitting diodes utilize a calcium-titanium layer as the light-absorbing layer. Although the calcium-titanium compounds in three-dimensional calcium-titanium layers have high photoelectric conversion efficiency, they are easily degraded by external moisture, resulting in poor stability.

習知的改善方案係利用對三維鈣鈦礦層之鈍化處理(如覆蓋一層有機層,並此層做為鈍化層),以獲得p-i-n接面結構。然而此結構容易發生非輻射再復合的現象,進而縮短載子生命週期,並使太陽能電池之光電流不穩定,故降低其光電轉換效率。 A known improvement involves passivating the three-dimensional calcium-titanium layer (e.g., covering it with an organic layer that serves as a passivation layer) to create a p-i-n junction structure. However, this structure is prone to non-radiative recombination, which shortens the carrier lifetime and makes the solar cell's photocurrent unstable, thereby reducing its photoelectric conversion efficiency.

另一種改善方案係利用摻雜二維鈣鈦礦及/或準二維鈣鈦礦於三維鈣鈦礦中。舉例而言,加入如長鏈銨鹽之疏水性分子於三維鈣鈦礦中,以減少晶體缺陷,並平整化接面。然而,直接將長鏈銨鹽加入鈣鈦礦會使三維鈣鈦礦晶體結構直接發生轉換,並同時產生多種維度之晶體存在同一個鈣鈦礦層內。此容易導致組成元素分佈不均,而使碘化鉛形成晶粒殘留在鈣鈦礦層內,故影響其均勻性。 Another improvement approach involves doping three-dimensional calcite and/or quasi-two-dimensional calcite with three-dimensional calcite. For example, hydrophobic molecules such as long-chain ammonium salts can be added to three-dimensional calcite to reduce crystal defects and smoothen interfaces. However, directly adding long-chain ammonium salts to calcite directly transforms the three-dimensional calcite crystal structure, resulting in the simultaneous coexistence of crystals of multiple dimensions within the same calcite layer. This can easily lead to uneven distribution of the constituent elements, causing lead iodide to form residual grains within the calcite layer, thus affecting its uniformity.

有鑑於此,亟需發展一種新的鈣鈦礦薄膜及其製造方法,以改善包含鈣鈦礦薄膜之光電裝置的缺點。 In view of this, there is an urgent need to develop a new calcium-titanium thin film and its manufacturing method to improve the shortcomings of optoelectronic devices containing calcium-titanium thin films.

有鑑於上述之問題,本發明之一態樣是在提供一種鈣鈦礦薄膜。此鈣鈦礦薄膜係由三維鈣鈦礦層及準二維鈣鈦礦層所組成,且二者具有特定的鈣鈦礦化合物,以提升所製得之鈣鈦礦薄膜之光電轉換效率及其穩定性。 In view of the above-mentioned problems, one aspect of the present invention is to provide a calcium-titanium thin film. This calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, both of which contain a specific calcium-titanium compound to enhance the photoelectric conversion efficiency and stability of the resulting calcium-titanium thin film.

本發明之另一態樣是在提供一種鈣鈦礦薄膜之製造方法。此製造方法係利用特定的鉛離子與甲基銨離子之莫耳濃度比值來製得前述之鈣鈦礦薄膜。 Another aspect of the present invention provides a method for producing a calcium-titanium thin film. This method utilizes a specific molar concentration ratio of lead ions to methylammonium ions to produce the aforementioned calcium-titanium thin film.

本發明之又一態樣是在提供一種光電裝置。此光電裝置包含前述之鈣鈦礦薄膜。 Another aspect of the present invention is to provide a photoelectric device. This photoelectric device includes the aforementioned calcium-titanium thin film.

根據本發明之一態樣,提出一種鈣鈦礦薄膜。此鈣鈦礦薄膜係由三維鈣鈦礦層及準二維鈣鈦礦層所組成,準二維鈣鈦礦層設置於三維鈣鈦礦層上,並且三維鈣鈦礦層配置以做為n型半導體,準二維鈣鈦礦層配置以做為p型 半導體,以於三維鈣鈦礦層與準二維鈣鈦礦層之間構成p-n接面。三維鈣鈦礦層具有如下式(1)所示之鈣鈦礦化合物,且準二維鈣鈦礦層具有如下式(2)所示之鈣鈦礦化合物:ABX3 (1) According to one aspect of the present invention, a calcium-titanium thin film is provided. The thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer. The quasi-two-dimensional calcium-titanium layer is disposed on the three-dimensional calcium-titanium layer. The three-dimensional calcium-titanium layer is configured as an n-type semiconductor, while the quasi-two-dimensional calcium-titanium layer is configured as a p-type semiconductor, forming a pn junction between the three-dimensional calcium-titanium layer and the quasi-two-dimensional calcium-titanium layer. The three-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (1), and the quasi-two-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (2): ABX 3 (1)

L2An-1BnX3n+1 (2)於式(1)與式(2)中,A代表碳數為1至2的烷基銨離子或鹼金屬元素之一價離子,B代表第13族金屬離子、第14族金屬離子或第15族金屬離子,X代表鹵素離子,L代表碳數為3至4的烷基銨離子、苯甲基銨離子、苯乙基銨離子、碳數為1至3的烷基二銨離子或碳數為4至6的胺基酸基,且n代表2至5的整數。 L 2 A n-1 B n X 3n+1 (2) In formulas (1) and (2), A represents an alkylammonium ion having a carbon number of 1 to 2 or a monovalent ion of an alkali metal element, B represents a Group 13 metal ion, a Group 14 metal ion, or a Group 15 metal ion, X represents a halogen ion, L represents an alkylammonium ion having a carbon number of 3 to 4, a benzylammonium ion, a phenethylammonium ion, an alkyldiammonium ion having a carbon number of 1 to 3, or an amino acid group having a carbon number of 4 to 6, and n represents an integer from 2 to 5.

依據本發明之一實施例,三維鈣鈦礦層的厚度為300nm至800nm,且準二維鈣鈦礦層之厚度為100nm至300nm。 According to one embodiment of the present invention, the thickness of the three-dimensional calcium-titanium layer is 300nm to 800nm, and the thickness of the quasi-two-dimensional calcium-titanium layer is 100nm to 300nm.

依據本發明之另一實施例,準二維鈣鈦礦層係由第一區域及第二區域所組成,第一區域具有L2A1B2X7所示之鈣鈦礦化合物(2-1)及L2A2B3X10所示之鈣鈦礦化合物(2-2),並且第二區域具有鈣鈦礦化合物(2-2)、L2A3B4X13所示之鈣鈦礦化合物(2-3)及L2A4B5X16所示之鈣鈦礦化合物(2-4)。 According to another embodiment of the present invention, a quasi-two-dimensional calcium-titanium layer consists of a first region and a second region. The first region contains a calcium-titanium compound ( 2-1 ) represented by L2A1B2X7 and a calcium -titanium compound ( 2-2) represented by L2A2B3X10 . The second region contains a calcium-titanium compound ( 2-2 ), a calcium-titanium compound ( 2-3) represented by L2A3B4X13 , and a calcium - titanium compound ( 2-4 ) represented by L2A4B5X16 .

依據本發明之又一實施例,鈣鈦礦化合物(2-2)的XRD圖譜具有在(111)結晶方向的繞射峰。 According to another embodiment of the present invention, the XRD spectrum of the calcium-titanium compound (2-2) has a diffraction peak in the (111) crystal direction.

依據本發明之又一實施例,第一區域具有平行於鈣 鈦礦薄膜之膜面的晶面。 According to another embodiment of the present invention, the first region has a crystal plane parallel to the film surface of the calcium-titanium thin film.

依據本發明之又一實施例,晶面包含(020)平面、(040)平面、(060)平面及/或(080)平面。 According to another embodiment of the present invention, the crystal plane includes a (020) plane, a (040) plane, a (060) plane and/or a (080) plane.

依據本發明之又一實施例,第二區域具有垂直於鈣鈦礦薄膜之膜面的晶面。 According to another embodiment of the present invention, the second region has a crystal plane perpendicular to the film surface of the calcium-titanium thin film.

本發明之另一態樣係提供一種鈣鈦礦薄膜之製造方法。在鈣鈦礦薄膜之製造方法中,配製三維鈣鈦礦前驅物溶液,其中鉛離子與甲基銨離子之莫耳濃度比值為1.1至1.2。沉積三維鈣鈦礦前驅物溶液於基材上,以獲得三維鈣鈦礦層,其中三維鈣鈦礦層之厚度為300nm至800nm。於95℃至105℃下,對三維鈣鈦礦層進行第一退火處理,以獲得三維鈣鈦礦層。配製準二維鈣鈦礦前驅物溶液,其中鉛離子與甲基銨離子之莫耳濃度比值為0.7至0.9。沉積準二維鈣鈦礦前驅物溶液於三維鈣鈦礦層上,以獲得準二維鈣鈦礦層,其中準二維鈣鈦礦層之厚度為100nm至300nm。於105℃至115℃下,對準二維鈣鈦礦層進行第二退火處理,以獲得準二維鈣鈦礦層。 Another aspect of the present invention provides a method for manufacturing a calcium-titanium thin film. In this method, a three-dimensional calcium-titanium precursor solution is prepared, wherein the molar ratio of lead ions to methylammonium ions is 1.1 to 1.2. The three-dimensional calcium-titanium precursor solution is deposited on a substrate to obtain a three-dimensional calcium-titanium layer, wherein the three-dimensional calcium-titanium layer has a thickness of 300 nm to 800 nm. The three-dimensional calcium-titanium layer is subjected to a first annealing treatment at 95°C to 105°C to obtain the three-dimensional calcium-titanium layer. A quasi-two-dimensional calcium-titanium precursor solution is prepared, wherein the molar ratio of lead ions to methylammonium ions is 0.7 to 0.9. The quasi-two-dimensional calcium-titanium precursor solution is deposited on the three-dimensional calcium-titanium layer to obtain a quasi-two-dimensional calcium-titanium layer, wherein the quasi-two-dimensional calcium-titanium layer has a thickness of 100 nm to 300 nm. The quasi-two-dimensional calcium-titanium layer is subjected to a second annealing treatment at 105°C to 115°C to obtain the quasi-two-dimensional calcium-titanium layer.

依據本發明之一實施例,沉積三維鈣鈦礦前驅物溶液之操作及沉積準二維鈣鈦礦前驅物溶液之操作係選自於由旋轉塗佈、刮刀塗佈、狹縫式塗佈、噴塗、液相結晶、液相沉澱、離子層吸附、熱溶劑注射及其任意組合所組成之族群。 According to one embodiment of the present invention, the operations for depositing a three-dimensional calcium-titanium precursor solution and the operations for depositing a quasi-two-dimensional calcium-titanium precursor solution are selected from the group consisting of spin coating, doctor blade coating, slot coating, spraying, liquid phase crystallization, liquid phase precipitation, ion layer adsorption, hot solvent injection, and any combination thereof.

本發明之又一態樣係提供一種光電裝置。此光電裝置包含第一電極層、設置於第一電極層上之電子傳輸層、 設置於電子傳輸層上之鈣鈦礦薄膜、設置於鈣鈦礦薄膜上之電洞傳輸層,以及設置於電洞傳輸層上之第二電極層。鈣鈦礦薄膜係由三維鈣鈦礦層及準二維鈣鈦礦層所組成,三維鈣鈦礦層設置於電子傳輸層與準二維鈣鈦礦層之間。 Another aspect of the present invention provides a photoelectric device. This photoelectric device includes a first electrode layer, an electron transport layer disposed on the first electrode layer, a calcium-titanium thin film disposed on the electron transport layer, a hole transport layer disposed on the calcium-titanium thin film, and a second electrode layer disposed on the hole transport layer. The calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, with the three-dimensional calcium-titanium layer disposed between the electron transport layer and the quasi-two-dimensional calcium-titanium layer.

應用本發明之鈣鈦礦薄膜、鈣鈦礦薄膜製造方法以及光電裝置。鈣鈦礦薄膜係由三維鈣鈦礦層及準二維鈣鈦礦層所組成,且二者具有特定的鈣鈦礦化合物。鈣鈦礦薄膜製造方法係利用特定的鉛離子與甲基銨離子之莫耳濃度比值製得此鈣鈦礦薄膜,進而提升包含此鈣鈦礦薄膜之光電裝置的功率轉換效率及其穩定性。 The present invention is applied to a calcium-titanium thin film, a method for manufacturing the calcium-titanium thin film, and a photoelectric device. The calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, both of which contain a specific calcium-titanium compound. The calcium-titanium thin film manufacturing method utilizes a specific molar concentration ratio of lead ions to methylammonium ions to produce the calcium-titanium thin film, thereby improving the power conversion efficiency and stability of the photoelectric device containing the calcium-titanium thin film.

100:鈣鈦礦薄膜 100: Calcium-titanium film

110:三維鈣鈦礦層 110: Three-dimensional calcium-titanium deposit

120:準二維鈣鈦礦層 120: Quasi-two-dimensional calcium-titanium deposit

121,122:區域 121,122: Area

200:方法 200: Methods

210,220,230,240,250,260:操作 210, 220, 230, 240, 250, 260: Operation

300:光電裝置 300: Optoelectronic devices

310:第一電極層 310: First electrode layer

320:電子傳輸層 320:Electron transmission layer

330:鈣鈦礦薄膜 330: Calcium-titanium film

331:三維鈣鈦礦層 331: Three-dimensional calcium-titanium deposit

332:準二維鈣鈦礦層 332: Quasi-two-dimensional calcium-titanium deposit

340:電洞傳輸層 340: Hole transport layer

350:第二電極層 350: Second electrode layer

為了對本發明之實施例及其優點有更完整之理解,現請參照以下之說明並配合相應之圖式。必須強調的是,各種特徵並非依比例描繪且僅係為了圖解目的。相關圖式內容說明如下:圖1係繪示根據本發明之一實施例之鈣鈦礦薄膜之示意圖。 For a more complete understanding of the embodiments of the present invention and its advantages, please refer to the following description in conjunction with the accompanying drawings. It must be emphasized that the various features are not drawn to scale and are for illustrative purposes only. The relevant drawings are described as follows: Figure 1 is a schematic diagram of a calcium-titanium thin film according to one embodiment of the present invention.

圖2係繪示根據本發明之一實施例之鈣鈦礦薄膜的製造方法之流程圖。 Figure 2 is a flow chart showing a method for manufacturing a calcium-titanium thin film according to one embodiment of the present invention.

圖3係繪示根據本發明之一實施例之光電裝置之示意圖。 Figure 3 is a schematic diagram of an optoelectronic device according to one embodiment of the present invention.

圖4係根據本發明之實施例1及比較例1之鈣鈦礦太陽能電池的可靠度試驗結果圖。 Figure 4 shows the reliability test results of the calcium-titanium solar cell according to Example 1 and Comparative Example 1 of the present invention.

圖5係根據本發明之實施例1之光感測器的外部量子效率 試驗結果圖。 Figure 5 shows the external quantum efficiency test results of the photosensor according to Example 1 of the present invention.

圖6係根據本發明之實施例1的鈣鈦礦薄膜之XRD圖譜。 Figure 6 is an XRD pattern of the calcium-titanium thin film according to Example 1 of the present invention.

圖7係根據本發明之實施例1的鈣鈦礦薄膜之XRD圖譜。 Figure 7 is an XRD pattern of the calcium-titanium thin film according to Example 1 of the present invention.

圖8係根據本發明之實施例1的鈣鈦礦薄膜之GIWAXS圖譜。 Figure 8 is a GIWAXS spectrum of the calcium-titanium thin film according to Example 1 of the present invention.

圖9係繪示包含實施例1之鈣鈦礦薄膜的電容之電容對電壓的曲線圖。 FIG9 is a graph showing the capacitance versus voltage of a capacitor including the calcium-titanium thin film of Example 1.

圖10係繪示包含實施例1之鈣鈦礦薄膜之電容的電容三次方之倒數(1/C3)對電壓的曲線圖。 FIG. 10 is a graph showing the inverse of the cubic capacitance (1/C 3 ) of the capacitor of the calcium-titanium thin film according to Example 1 versus voltage.

以下仔細討論本發明實施例之製造和使用。然而,可以理解的是,實施例提供許多可應用的發明概念,其可實施於各式各樣的特定內容中。所討論之特定實施例僅供說明,並非用以限定本發明之範圍。 The following details the making and using of embodiments of the present invention. However, it should be understood that the embodiments provide many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are for illustrative purposes only and are not intended to limit the scope of the present invention.

請參閱圖1,鈣鈦礦薄膜100係由三維鈣鈦礦層110及準二維鈣鈦礦層120所組成,且準二維鈣鈦礦層120設置於三維鈣鈦礦層110上。三維鈣鈦礦層110做為n型半導體,且準二維鈣鈦礦層120做為p型半導體,以於三維鈣鈦礦層110與準二維鈣鈦礦層120之間構成p-n接面結構,進而於鈣鈦礦薄膜100內產生內建電位。此內建電位助於電子及電洞分別往電子傳輸層及電洞傳輸層移動,故減少電子及電洞發生復合,從而提升鈣鈦礦薄膜100之光電轉換效率。進一步,倘若鈣鈦礦薄膜100包含摻雜 二維鈣鈦礦之三維鈣鈦礦層110,前述之p-n接面結構難以形成,而失去內建電位,故降低鈣鈦礦薄膜100之光電轉換效率。在一些實施例中,p-n接面之內建電位可為0.5V至0.7V。 Referring to Figure 1, a calcium-titanium thin film 100 is composed of a three-dimensional calcium-titanium layer 110 and a quasi-two-dimensional calcium-titanium layer 120, with the quasi-two-dimensional calcium-titanium layer 120 disposed on the three-dimensional calcium-titanium layer 110. The three-dimensional calcium-titanium layer 110 acts as an n-type semiconductor, and the quasi-two-dimensional calcium-titanium layer 120 acts as a p-type semiconductor, forming a p-n junction structure between the three-dimensional calcium-titanium layer 110 and the quasi-two-dimensional calcium-titanium layer 120, thereby generating a built-in potential within the calcium-titanium thin film 100. This built-in potential facilitates the migration of electrons and holes to the electron transport layer and hole transport layer, respectively, thereby reducing recombination and improving the photoelectric conversion efficiency of the calcium-titanium thin film 100. Furthermore, if the calcium-titanium thin film 100 includes a three-dimensional calcium-titanium layer 110 doped with two-dimensional calcium-titanium, the aforementioned p-n junction structure becomes difficult to form, resulting in a loss of the built-in potential and a reduction in the photoelectric conversion efficiency of the calcium-titanium thin film 100. In some embodiments, the built-in potential of the p-n junction can be 0.5V to 0.7V.

三維鈣鈦礦層110具有如後式(1)所示之鈣鈦礦化合物:ABX3(1)。於式(1)中,A代表碳數為1至2的烷基銨離子或鹼金屬元素之一價離子,B代表第13族金屬離子、第14族金屬離子或第15族金屬離子,且X代表鹵素離子。舉例而言,A可代表CH3NH3 +、C2H5NH3 +、Na+、K+、Rb+或Cs+。B可代表Mn2+、Cu2+、Ag+、Au+、Zn2+、In3+、Tl3+、Ge2+、Sn2+、Pb2+、Bi3+、或Sb3+。X可代表Cl-、Br-或I-。倘若三維鈣鈦礦層110不具如式(1)所示之鈣鈦礦化合物,降低鈣鈦礦薄膜100之光電轉換效率。 The three-dimensional calcium-titanium layer 110 has a calcium-titanium compound represented by the following formula (1): ABX 3 (1). In formula (1), A represents an alkylammonium ion having a carbon number of 1 to 2 or a monovalent ion of an alkaline metal element, B represents a Group 13 metal ion, a Group 14 metal ion, or a Group 15 metal ion, and X represents a halogen ion. For example, A can represent CH 3 NH 3 + , C 2 H 5 NH 3 + , Na + , K + , Rb + , or Cs + . B can represent Mn 2+ , Cu 2+ , Ag + , Au + , Zn 2+ , In 3+ , Tl 3+ , Ge 2+ , Sn 2+ , Pb 2+ , Bi 3+ , or Sb 3+ . X can represent Cl , Br , or I . If the three-dimensional calcium-titanium layer 110 does not contain the calcium-titanium compound shown in formula (1), the photoelectric conversion efficiency of the calcium-titanium thin film 100 is reduced.

在一些實施例中,三維鈣鈦礦層110的XRD圖譜具有在(110)結晶方向的繞射峰。當三維鈣鈦礦層110具有此繞射峰時,結晶性較高,故提升光電轉換效率。 In some embodiments, the XRD spectrum of the three-dimensional calcium-titanium layer 110 has a diffraction peak in the (110) crystal direction. When the three-dimensional calcium-titanium layer 110 has this diffraction peak, the crystallinity is high, thereby improving the photoelectric conversion efficiency.

再者,準二維鈣鈦礦層120具有如後式(2)所示之鈣鈦礦化合物:L2An-1BnX3n+1(2),於式(2)中,A代表碳數為1至2的烷基銨離子或鹼金屬元素之一價離子,B代表第13族金屬離子、第14族金屬離子或第15族金屬離子,X代表鹵素離子,L代表碳數為3至4的烷基銨離子、苯甲基銨離子、苯乙基銨離子、碳數為1至3的烷基二銨離子或碳數為4至6的胺基酸基,且n代表2至5 的整數。倘若準二維鈣鈦礦層120不具如式(2)所示之鈣鈦礦化合物,準二維鈣鈦礦層120不能保護三維鈣鈦礦層110免於遭受外界水氣降解,故降低鈣鈦礦薄膜100之穩定性。 Furthermore, the quasi-two-dimensional calcium-titanium layer 120 has a calcium-titanium compound as shown in the following formula (2): L 2 A n-1 B n X 3n+1 (2), wherein A represents an alkylammonium ion having a carbon number of 1 to 2 or a monovalent ion of an alkali metal element, B represents a Group 13 metal ion, a Group 14 metal ion, or a Group 15 metal ion, X represents a halogen ion, L represents an alkylammonium ion having a carbon number of 3 to 4, a benzylammonium ion, a phenethylammonium ion, an alkyldiammonium ion having a carbon number of 1 to 3, or an amino acid group having a carbon number of 4 to 6, and n represents an integer from 2 to 5. If the quasi-two-dimensional calcium-titanium layer 120 does not have the calcium-titanium compound shown in formula (2), the quasi-two-dimensional calcium-titanium layer 120 cannot protect the three-dimensional calcium-titanium layer 110 from being degraded by external moisture, thereby reducing the stability of the calcium-titanium film 100.

於三維鈣鈦礦層110中,較佳地,相較於其他長碳鏈之銨離子,甲基銨離子(MA+)可增強三維鈣鈦礦層110及準二維鈣鈦礦層120中之鈣鈦礦結構內之碘原子與氫原子間的氫鍵及庫倫力的相互作用,而更穩定三維鈣鈦礦層110及準二維鈣鈦礦層120之結構,以更提升鈣鈦礦薄膜100的穩定性。 In the three-dimensional calcium-titanium layer 110, methylammonium ions (MA + ) are preferably present compared to other long carbon chain ammonium ions. They can enhance the hydrogen bonding and Coulomb force interactions between iodine atoms and hydrogen atoms within the calcium-titanium structure of the three-dimensional calcium-titanium layer 110 and the quasi-two-dimensional calcium-titanium layer 120, thereby further stabilizing the structure of the three-dimensional calcium-titanium layer 110 and the quasi-two-dimensional calcium-titanium layer 120, thereby further improving the stability of the calcium-titanium film 100.

於準二維鈣鈦礦層120中,相較於乙基胺離子及丙基胺離子,正丁基銨離子(BA+)之疏水性較高,故更能保護三維鈣鈦礦層110免於遭受外界水氣降解,以更提升鈣鈦礦薄膜100的穩定性。 In the quasi-two-dimensional calcium-titanium layer 120 , n-butylammonium ions (BA + ) are more hydrophobic than ethylamine ions and propylamine ions. Therefore, they can better protect the three-dimensional calcium-titanium layer 110 from degradation by external moisture, thereby further improving the stability of the calcium-titanium film 100 .

在一些實施例中,準二維鈣鈦礦層120係由第一區域121及第二區域122所組成,其中第二區域122位於第一區域121與三維鈣鈦礦層110之間。當第一區域121及第二區域122之排列為前述方式時,更提升光電轉換效率及穩定性。 In some embodiments, the quasi-two-dimensional calcium-titanium layer 120 is composed of a first region 121 and a second region 122, wherein the second region 122 is located between the first region 121 and the three-dimensional calcium-titanium layer 110. When the first region 121 and the second region 122 are arranged in the aforementioned manner, the photoelectric conversion efficiency and stability are further improved.

第一區域121具有L2A1B2X7所示之鈣鈦礦化合物(2-1)及L2A2B3X10所示之鈣鈦礦化合物(2-2),並且第二區域122具有L2A2B3X10所示之鈣鈦礦化合物(2-2)、L2A3B4X13所示之鈣鈦礦化合物(2-3)及L2A4B5X16所示之鈣鈦礦化合物(2-4)所示之鈣鈦礦化 合物。當第一區域121及第二區域122均具有前述相應之鈣鈦礦化合物時,提升光電轉換效率及穩定性。 First region 121 contains a calcium- titanium compound ( 2-1) represented by L2A1B2X7 and a calcium -titanium compound ( 2-2 ) represented by L2A2B3X10 . Second region 122 contains a calcium-titanium compound ( 2-2 ) represented by L2A2B3X10 , a calcium - titanium compound (2-3) represented by L2A3B4X13 , and a calcium - titanium compound ( 2-4) represented by L2A4B5X16 . When both first region 121 and second region 122 contain the corresponding calcium-titanium compounds, photoelectric conversion efficiency and stability are improved.

進一步,第一區域121之鈣鈦礦化合物(2-2)與鈣鈦礦化合物(2-1)之比值大於第二區域122之鈣鈦礦化合物(2-2)與鈣鈦礦化合物(2-3)和鈣鈦礦化合物(2-4)之總和的比值,以提升阻擋外界水氣之效果。此外,鈣鈦礦化合物(2-2)的XRD圖譜具有在(111)結晶方向的繞射峰。當鈣鈦礦化合物(2-2)具有此繞射峰時,利於第二區域122接合準二維鈣鈦礦層120與三維鈣鈦礦層110,以促進鈣鈦礦薄膜100中之電子與電洞之分離及其傳輸,從而提升光電轉換效率。 Furthermore, the ratio of the calcium-titanium compound (2-2) to the calcium-titanium compound (2-1) in the first region 121 is greater than the ratio of the calcium-titanium compound (2-2) to the sum of the calcium-titanium compound (2-3) and the calcium-titanium compound (2-4) in the second region 122, thereby enhancing the effect of blocking external moisture. Furthermore, the XRD pattern of the calcium-titanium compound (2-2) exhibits a diffraction peak in the (111) crystal direction. When the calcium-titanium compound (2-2) has this diffraction peak, it facilitates the second region 122 to bond the quasi-two-dimensional calcium-titanium layer 120 and the three-dimensional calcium-titanium layer 110, thereby promoting the separation and transmission of electrons and holes in the calcium-titanium thin film 100, thereby improving the photoelectric conversion efficiency.

在較佳的實施例中,第一區域121具有平行於鈣鈦礦薄膜100之膜面的晶面。晶面包含(020)平面、(040)平面、(060)平面及/或(080)平面。當第一區域121具有前述之晶面時,增加阻擋外界水氣及氧氣之效果,從而更提升穩定性。 In a preferred embodiment, the first region 121 has a crystal plane parallel to the film surface of the calcium-titanium thin film 100. The crystal planes include a (020) plane, a (040) plane, a (060) plane, and/or a (080) plane. When the first region 121 has the aforementioned crystal planes, the effect of blocking external moisture and oxygen is enhanced, thereby further improving stability.

此外,第二區域122具有垂直於鈣鈦礦薄膜100之膜面的晶面。晶面包含(111)平面,以更利於第二區域122接合準二維鈣鈦礦層120與三維鈣鈦礦層110,並助於第一區域121阻擋外界之水氣,從而提升光電轉換效率及穩定性。 In addition, the second region 122 has a crystal plane perpendicular to the film surface of the calcium-titanium thin film 100. The crystal plane includes a (111) plane, which is more conducive to the second region 122 bonding the quasi-two-dimensional calcium-titanium layer 120 and the three-dimensional calcium-titanium layer 110, and helps the first region 121 block external water vapor, thereby improving the photoelectric conversion efficiency and stability.

接續,請參閱圖2,在鈣鈦礦薄膜之製造方法200中,配製三維鈣鈦礦前驅物溶液,如操作210所示。三維鈣鈦礦前驅物溶液之鉛離子與甲基銨離子之莫耳濃度比值 為1.0至1.4,較佳為1.1至1.2,且更佳為1.2。於三維鈣鈦礦前驅物溶液中,倘若鉛離子與甲基銨離子之莫耳濃度比值大於1.4,鉛離子會以鹵化鉛的鹽類大量析出,以使後續製得之三維鈣鈦礦層存在雜質,而降低鈣鈦礦薄膜的光電轉換效率及穩定性。 Continuing with FIG. 2 , in method 200 for fabricating a calcium-titanium thin film, a three-dimensional calcium-titanium precursor solution is prepared, as shown in operation 210 . The molar concentration ratio of lead ions to methylammonium ions in the three-dimensional calcium-titanium precursor solution is 1.0 to 1.4, preferably 1.1 to 1.2, and more preferably 1.2. If the molar ratio of lead ions to methylammonium ions in the three-dimensional calcium-titanium precursor solution is greater than 1.4, the lead ions will precipitate in large quantities as lead halide salts, causing impurities in the subsequently produced three-dimensional calcium-titanium layer and reducing the photoelectric conversion efficiency and stability of the calcium-titanium thin film.

反之,倘若前述莫耳濃度比值小於1.0,所製得之三維鈣鈦礦層存在孔洞,而降低鈣鈦礦薄膜之光電轉換效率及穩定性。再者,倘若此莫耳濃度比值大於1.4或小於1.0,三維鈣鈦礦層不具如上式(1)所示之鈣鈦礦化合物。於較佳實例中,莫耳濃度比值為1.1至1.2,且更佳為1.2,以利於三維鈣鈦礦前驅物溶液所製得之三維鈣鈦礦層做為n型半導體。 On the contrary, if the above-mentioned molar concentration ratio is less than 1.0, the three-dimensional calcium-titanium layer produced will have holes, which will reduce the photoelectric conversion efficiency and stability of the calcium-titanium film. Furthermore, if the molar concentration ratio is greater than 1.4 or less than 1.0, the three-dimensional calcium-titanium layer does not have the calcium-titanium compound shown in the above formula (1). In a preferred embodiment, the molar concentration ratio is 1.1 to 1.2, and more preferably 1.2, so that the three-dimensional calcium-titanium layer produced from the three-dimensional calcium-titanium precursor solution can be used as an n-type semiconductor.

在操作210後,沉積三維鈣鈦礦前驅物溶液於基材上,以獲得三維鈣鈦礦層,如操作220所示。前述之沉積的操作220可選自於由旋轉塗佈、刮刀塗佈、狹縫式塗佈、噴塗、液相結晶、液相沉澱、離子層吸附、熱溶劑注射及其任意組合所組成之族群。較佳地,相較於旋塗方式,刮刀方式可增大三維鈣鈦礦前驅物溶液的塗佈面積,且提升其塗佈均勻度。 After operation 210, a three-dimensional calcium-titanium precursor solution is deposited on the substrate to obtain a three-dimensional calcium-titanium layer, as shown in operation 220. The deposition operation 220 can be selected from the group consisting of spin coating, doctor blade coating, slit coating, spray coating, liquid phase crystallization, liquid phase precipitation, ion layer adsorption, hot solvent injection, and any combination thereof. Preferably, compared to spin coating, the doctor blade method can increase the coating area of the three-dimensional calcium-titanium precursor solution and improve its coating uniformity.

具體而言,刮刀塗佈之速率可為25公釐/秒至35公釐/秒,且較佳為30公釐/秒,以更提升三維鈣鈦礦前驅物溶液的塗佈均勻度,並利於三維鈣鈦礦層及準二維鈣鈦礦層之形成,從而提升鈣鈦礦薄膜之光電轉換效率及穩定性。 Specifically, the doctor blade coating speed can be between 25 mm/s and 35 mm/s, preferably 30 mm/s, to further improve the uniformity of the coating of the three-dimensional calcium-titanium precursor solution and facilitate the formation of three-dimensional and quasi-two-dimensional calcium-titanium layers, thereby improving the photoelectric conversion efficiency and stability of the calcium-titanium thin film.

在塗佈期間,可加熱基材,以提供熱源,此熱源用以在塗佈期間除去三維鈣鈦礦前驅物溶液中之溶劑,以使其形成三維鈣鈦礦層。加熱溫度可為145℃至155℃,且較佳為150℃,以提升光電轉換效率。 During coating, the substrate can be heated to provide a heat source. This heat source is used to remove the solvent from the three-dimensional calcium-titanium precursor solution during coating, thereby forming a three-dimensional calcium-titanium layer. The heating temperature can be between 145°C and 155°C, preferably 150°C, to improve photoelectric conversion efficiency.

三維鈣鈦礦層之厚度為300nm至800nm,較佳為500nm至600nm,且更佳為550nm。倘若三維鈣鈦礦層之厚度不在前述之範圍內,所製得之三維鈣鈦礦層易存在缺陷。 The thickness of the three-dimensional calcium-titanium layer is 300nm to 800nm, preferably 500nm to 600nm, and more preferably 550nm. If the thickness of the three-dimensional calcium-titanium layer is outside the aforementioned range, the resulting three-dimensional calcium-titanium layer is likely to contain defects.

在操作220後,於95℃至105℃下,對三維鈣鈦礦層進行退火處理,以獲得三維鈣鈦礦層,如操作230所示。倘若退火處理之溫度不為前述之範圍,所製得之三維鈣鈦礦層易存在雜質及/或缺陷。 After operation 220, the three-dimensional calcium-titanium layer is annealed at 95°C to 105°C to obtain the three-dimensional calcium-titanium layer, as shown in operation 230. If the annealing temperature is not within the aforementioned range, the obtained three-dimensional calcium-titanium layer is prone to the presence of impurities and/or defects.

在操作230後,配製準二維鈣鈦礦前驅物溶液,如操作240所示。準二維鈣鈦礦前驅物溶液中之鉛離子與甲基銨離子之莫耳濃度比值為0.7至0.9。倘若此莫耳濃度比值小於0.7,所製得之準二維鈣鈦礦層不具如上式(2)所示之鈣鈦礦化合物,而降低其穩定性。於較佳實例中,莫耳濃度比值為0.75至0.85,以利於準二維鈣鈦礦前驅物溶液所製得之準二維鈣鈦礦層做為p型半導體。 After operation 230, a quasi-two-dimensional calcium-titanium precursor solution is prepared, as shown in operation 240. The molar concentration ratio of lead ions to methylammonium ions in the quasi-two-dimensional calcium-titanium precursor solution is 0.7 to 0.9. If this molar concentration ratio is less than 0.7, the quasi-two-dimensional calcium-titanium layer produced does not have the calcium-titanium compound shown in formula (2) above, and its stability is reduced. In a preferred embodiment, the molar concentration ratio is 0.75 to 0.85, so that the quasi-two-dimensional calcium-titanium layer produced by the quasi-two-dimensional calcium-titanium precursor solution can be used as a p-type semiconductor.

在操作240後,沉積準二維鈣鈦礦前驅物溶液於三維鈣鈦礦層上,以獲得準二維鈣鈦礦層,如操作250所示。於使用塗佈方式之實施例中,先加熱三維鈣鈦礦層到165℃至175℃後,再塗佈準二維鈣鈦礦前驅物溶液於其上,以更提升光電轉換效率及穩定性。 After operation 240, a quasi-two-dimensional calcium-titanium precursor solution is deposited on the three-dimensional calcium-titanium layer to obtain the quasi-two-dimensional calcium-titanium layer, as shown in operation 250. In an embodiment using a coating method, the three-dimensional calcium-titanium layer is first heated to 165°C to 175°C before the quasi-two-dimensional calcium-titanium precursor solution is coated thereon to further improve the photoelectric conversion efficiency and stability.

較佳地,當上述加熱溫度為170℃時,利於使第一區域具有上述鈣鈦礦化合物(2-1)及鈣鈦礦化合物(2-2),並且第二區域具有上述鈣鈦礦化合物(2-2)、鈣鈦礦化合物(2-3)及鈣鈦礦化合物(2-4)。 Preferably, when the heating temperature is 170°C, the first region contains the calcium-titanium compound (2-1) and the calcium-titanium compound (2-2), and the second region contains the calcium-titanium compound (2-2), the calcium-titanium compound (2-3), and the calcium-titanium compound (2-4).

準二維鈣鈦礦層之厚度為100nm至300nm,且較佳為100nm至200nm。倘若此厚度不在前述之範圍內,所製得之準二維鈣鈦礦層易存在雜質及/或缺陷,故降低穩定性。 The thickness of the quasi-two-dimensional calcium-titanium layer is 100nm to 300nm, preferably 100nm to 200nm. If this thickness is outside the aforementioned range, the resulting quasi-two-dimensional calcium-titanium layer is susceptible to the presence of impurities and/or defects, thereby reducing stability.

與上述三維鈣鈦礦層相同,沉積準二維鈣鈦礦層之操作250亦可選自於由旋轉塗佈、刮刀塗佈、狹縫式塗佈、噴塗、液相結晶、液相沉澱、離子層吸附、熱溶劑注射及其任意組合所組成之族群。在一些實施例中,前述之塗佈方法的塗佈速率可為35公釐/秒至45公釐/秒,且較佳為40公釐/秒,以利於使準二維鈣鈦礦層具有第一區域及第二區域。 Similar to the three-dimensional calcium-titanium layer described above, the quasi-two-dimensional calcium-titanium layer deposition process 250 can also be selected from the group consisting of spin coating, doctor blade coating, slit coating, spray coating, liquid phase crystallization, liquid phase precipitation, ion layer adsorption, hot solvent injection, and any combination thereof. In some embodiments, the coating rate of the aforementioned coating method can be 35 mm/s to 45 mm/s, preferably 40 mm/s, to facilitate forming the quasi-two-dimensional calcium-titanium layer with a first region and a second region.

舉例而言,於液相結晶方法中,以溶劑(如二甲基甲醯胺(DMF)及二甲基亞碸(DMSO))配製鈣鈦礦前驅物溶液,再降溫,以利用溫差使鈣鈦礦前驅物溶液達到過飽和後析出鈣鈦礦晶體,且於90℃下經歷10分鐘退火。於液相沉澱方法中,以對鈣鈦礦前驅物具有較高溶解度之一種溶劑(如DMF及DMSO)配製鈣鈦礦前驅物溶液,再將對鈣鈦礦前驅物具有較低溶解度之另一種溶劑(做為反溶劑,如甲苯及己烷)逐量滴入前述鈣鈦礦前驅物溶液中,藉由溶解度的差異使鈣鈦礦晶體析出。 For example, in the liquid phase crystallization method, a calcium-titanium precursor solution is prepared with a solvent (such as dimethylformamide (DMF) and dimethyl sulfoxide (DMSO)), then cooled to utilize the temperature difference to supersaturate the calcium-titanium precursor solution, and then calcium-titanium crystals are precipitated, and then annealed at 90°C for 10 minutes. In the liquid phase precipitation method, a calcium-titanium precursor solution is prepared using a solvent with a high solubility for the calcium-titanium precursor (such as DMF and DMSO). Another solvent with a lower solubility for the calcium-titanium precursor (serving as a countersolvent, such as toluene and hexane) is then gradually added dropwise to the calcium-titanium precursor solution. The difference in solubility causes the calcium-titanium crystals to precipitate.

舉例而言,於離子層吸附方法中,利用兩種溶劑分別配製碘化鉛溶液及正丁基碘化銨溶液,再將基板依序浸泡到碘化鉛溶液及正丁基碘化銨溶液後取出,經烘烤與90℃至110℃的退火,以獲得鈣鈦礦薄膜。於熱溶劑注射方法中,利用兩種溶劑分別配製碘化鉛溶液及正丁基碘化銨溶液,再將碘化鉛溶液注入正丁基碘化銨溶液(或者相反),以使鈣鈦礦晶體析出,藉由離心取出鈣鈦礦晶體,且於90℃至200℃下退火。 For example, in the ionic layer adsorption method, two solvents are used to prepare a lead iodide solution and an n-butylammonium iodide solution, respectively. The substrate is then immersed in the lead iodide solution and the n-butylammonium iodide solution, removed, baked, and annealed at 90°C to 110°C to obtain a calcium-titanium thin film. In the hot solvent injection method, two solvents are used to prepare a lead iodide solution and an n-butylammonium iodide solution, respectively. The lead iodide solution is then injected into the n-butylammonium iodide solution (or vice versa) to precipitate calcium-titanium crystals. The calcium-titanium crystals are then removed by centrifugation and annealed at 90°C to 200°C.

在操作250後,於105℃至115℃下,對準二維鈣鈦礦塗層進行退火處理,以獲得準二維鈣鈦礦層,如操作260所示。倘若退火處理之溫度不為前述之範圍,所製得之準二維鈣鈦礦層易存在雜質及/或缺陷,故降低穩定性。 After operation 250, the quasi-two-dimensional calcite-titanium coating is annealed at 105°C to 115°C to obtain a quasi-two-dimensional calcite-titanium layer, as shown in operation 260. If the annealing temperature is outside the aforementioned range, the resulting quasi-two-dimensional calcite-titanium layer is prone to the presence of impurities and/or defects, thereby reducing stability.

在一些較佳的實施例中,上述之三維鈣鈦礦層及準二維鈣鈦礦層之退火處理的退火時間可皆為12分鐘至17分鐘,利於使三維鈣鈦礦層的XRD圖譜具有在(110)結晶方向的繞射峰。在一些具體例中,第一區域具有平行於鈣鈦礦薄膜之膜面的晶面,且第二區域具有垂直於鈣鈦礦薄膜之膜面的晶面。 In some preferred embodiments, the annealing time of the three-dimensional calcium-titanium layer and the quasi-two-dimensional calcium-titanium layer can be 12 minutes to 17 minutes, which is conducive to making the XRD spectrum of the three-dimensional calcium-titanium layer have a diffraction peak in the (110) crystal direction. In some specific examples, the first region has a crystal plane parallel to the film surface of the calcium-titanium film, and the second region has a crystal plane perpendicular to the film surface of the calcium-titanium film.

接續,請參閱圖3,光電裝置300包含第一電極層310、設置於第一電極層310上之電子傳輸層320、設置於電子傳輸層320上之鈣鈦礦薄膜330、設置於鈣鈦礦薄膜330上之電洞傳輸層340,以及設置於電洞傳輸層340上之第二電極層350。鈣鈦礦薄膜330係由三維鈣鈦 礦層331及準二維鈣鈦礦層332所組成,三維鈣鈦礦層331設置於電子傳輸層320與準二維鈣鈦礦層332之間。以下分別對各層進行說明。 Continuing with FIG. 3 , the optoelectronic device 300 includes a first electrode layer 310 , an electron transport layer 320 disposed on the first electrode layer 310 , a calcium-titanium thin film 330 disposed on the electron transport layer 320 , a hole transport layer 340 disposed on the calcium-titanium thin film 330 , and a second electrode layer 350 disposed on the hole transport layer 340 . The calcium-titanium thin film 330 is composed of a three-dimensional calcium-titanium layer 331 and a quasi-two-dimensional calcium-titanium layer 332. The three-dimensional calcium-titanium layer 331 is disposed between the electron transport layer 320 and the quasi-two-dimensional calcium-titanium layer 332. Each layer is described below.

第一電極層310及第二電極層350之材料可包含金、銀、銅、鋁、鈀、鎳或其組合。電子傳輸層320之材料可包含氧化銦錫、摻氟氧化錫、氧化鋁鋅或氧化鋅銦。 The materials of the first electrode layer 310 and the second electrode layer 350 may include gold, silver, copper, aluminum, palladium, nickel, or a combination thereof. The material of the electron transport layer 320 may include indium tin oxide, fluoride-doped tin oxide, aluminum zinc oxide, or zinc indium oxide.

進一步,鈣鈦礦薄膜330已於前面詳述,故於此不再贅述。此外,電洞傳輸層340之材料可包含聚(3,4-亞乙二氧基噻吩):聚苯乙烯磺酸鹽(PEDOT:PSS)及2,2’,7,7’-四[N,N-二(4-甲氧基苯基)氨基]-9,9’-螺二芴(spiro-OMeTAD)。 Furthermore, the calcium-titanium thin film 330 has been described in detail above and will not be repeated here. Furthermore, the material of the hole transport layer 340 may include poly(3,4-ethylenedioxythiophene):polystyrenesulfonate (PEDOT:PSS) and 2,2',7,7'-tetrakis[N,N-bis(4-methoxyphenyl)amino]-9,9'-spirobifluorene (spiro-OMeTAD).

前述之第一電極層310、電子傳輸層320、電洞傳輸層340及第二電極層350皆可利用本發明所屬技術領域中具有通常知識者所慣用之方法製得,例如氣相沉積法、濺射法、熱蒸發法及電鍍。此外,此些層的厚度亦可為本發明所屬技術領域中具有通常知識者所慣用者。 The aforementioned first electrode layer 310, electron transport layer 320, hole transport layer 340, and second electrode layer 350 can all be fabricated using methods commonly used by those skilled in the art, such as vapor deposition, sputtering, thermal evaporation, and electroplating. Furthermore, the thicknesses of these layers can also be within the range commonly used by those skilled in the art.

在一些應用例中,光電裝置300可包含鈣鈦礦太陽能電池及光感測器。 In some applications, the optoelectronic device 300 may include a calcium-titanium solar cell and a photodetector.

以下利用實施例以說明本發明之應用,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。 The following examples illustrate the application of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can make various modifications and improvements without departing from the spirit and scope of the present invention.

鈣鈦礦薄膜、鈣鈦礦太陽能電池與光感測器之製備 Preparation of calcium-titanium thin films, calcium-titanium solar cells, and photosensors

實施例1 Example 1

於設置摻氟氧化錫(FTO)層之玻璃基材上,蒸鍍 TiO2層(做為電子傳輸層)於FTO層(做為第一電極層)上。 On a glass substrate with a fluorine-doped tin oxide (FTO) layer, a TiO2 layer (as an electron transport layer) was evaporated on the FTO layer (as the first electrode layer).

然後,以二甲基甲醯胺及二甲基亞碸配製甲基碘化銨溶液及碘化鉛溶液,並且以異丙醇配製正丁基碘化銨溶液。取1.0M的甲基碘化胺及1.1M的碘化鉛溶液混合成三維鈣鈦礦前驅物溶液。於大氣壓下,利用刮刀塗佈厚度為550nm之三維鈣鈦礦前驅物溶液於預先加熱至150℃的TiO2層上,且塗佈速率為30公釐/秒,再經100℃之退火處理15分鐘,以獲得三維鈣鈦礦層,其具有如式(1)所示之鈣鈦礦化合物。 Then, dimethylformamide and dimethylsulfoxide were used to prepare methylammonium iodide solution and lead iodide solution, and isopropyl alcohol was used to prepare n-butylammonium iodide solution. 1.0M methylammonium iodide solution and 1.1M lead iodide solution were mixed to form a three-dimensional calcium-titanium precursor solution. Under atmospheric pressure, a doctor blade was used to apply the three-dimensional calcium-titanium precursor solution with a thickness of 550nm on a TiO2 layer preheated to 150°C at a coating rate of 30 mm/s, and then annealed at 100°C for 15 minutes to obtain a three-dimensional calcium-titanium layer having a calcium-titanium compound as shown in formula (1).

另取1.0M的甲基碘化胺、0.3M的正丁基碘化銨溶液及0.8M的碘化鉛溶液,混合成準二維鈣鈦礦前驅物溶液。於大氣壓下,利用刮刀塗佈厚度為200nm之準二維鈣鈦礦前驅物溶液於預先加熱至170℃的前述三維鈣鈦礦層上,且塗佈速率為40公釐/秒,再經110℃之退火處理15分鐘,以獲得準二維鈣鈦礦層,其具有如式(2)所示之鈣鈦礦化合物,即製得實施例1之鈣鈦礦薄膜。 Separately, 1.0M methylammonium iodide solution, 0.3M n-butylammonium iodide solution, and 0.8M lead iodide solution were mixed to form a quasi-two-dimensional calcium-titanium precursor solution. Under atmospheric pressure, a doctor blade was used to apply a 200nm thick quasi-two-dimensional calcium-titanium precursor solution onto the aforementioned three-dimensional calcium-titanium layer, which had been preheated to 170°C, at a coating rate of 40 mm/s. The layer was then annealed at 110°C for 15 minutes to obtain a quasi-two-dimensional calcium-titanium layer having the calcium-titanium compound shown in formula (2), thus obtaining the calcium-titanium film of Example 1.

接續,混合Spiro-OMeTAD、氯苯、鋰鹽、乙腈及氧化劑(型號為FK-209),以配製成Spiro-OMeTAD溶液,再將其旋塗至冷卻到室溫的準二維鈣鈦礦層上,以獲得電洞傳輸層。然後,於電洞傳輸層上熱蒸鍍金層,以做為第二電極層。接著,對應於太陽能電池與光感測器之組裝方式,分別進行封裝及接上外電路,以獲得實施例1之鈣鈦礦太陽能電池與光感測器。 Next, a Spiro-OMeTAD solution was prepared by mixing chlorobenzene, lithium salt, acetonitrile, and an oxidizing agent (Model FK-209). This solution was then spin-coated onto the quasi-two-dimensional calcium-titanium layer cooled to room temperature to form a hole transport layer. A gold layer was then thermally evaporated onto the hole transport layer to serve as the second electrode layer. Following this, the solar cell and photosensor were packaged and connected to external circuits, respectively, to obtain the calcium-titanium solar cell and photosensor of Example 1.

比較例1及2 Comparison Examples 1 and 2

比較例1及2之鈣鈦礦薄膜、鈣鈦礦太陽能電池與光感測器係以與實施例1相同的方法製備。不同的是,比較例1沒有使用準二維鈣鈦礦層,且比較例2使用做為n型半導體之二維鈣鈦礦層及做為n型半導體之準二維鈣鈦礦層。於比較例2中,二維鈣鈦礦層前驅物溶液為取1.0M的甲基碘化胺、0.3M的正丁基碘化銨溶液及1.1M的碘化鉛溶液混合而成。前述之實施例1及比較例1至2之具體條件及評價結果如下表1所示。 The calcium-titanium thin films, calcium-titanium solar cells, and photosensors in Comparative Examples 1 and 2 were prepared using the same method as Example 1. The differences were that Comparative Example 1 did not use a quasi-two-dimensional calcium-titanium layer, while Comparative Example 2 used a two-dimensional calcium-titanium layer as an n-type semiconductor and a quasi-two-dimensional calcium-titanium layer as an n-type semiconductor. In Comparative Example 2, the two-dimensional calcium-titanium layer precursor solution was a mixture of 1.0 M methylammonium iodide, 0.3 M n-butylammonium iodide solution, and 1.1 M lead iodide solution. The specific conditions and evaluation results for Example 1 and Comparative Examples 1-2 are shown in Table 1 below.

評價方式 Evaluation method

1.鈣鈦礦太陽能電池之短路電流密度、開路電壓、填充因子及轉換效率之試驗 1. Testing of short-circuit current density, open-circuit voltage, fill factor, and conversion efficiency of calcium-titanium solar cells

對實施例1及比較例1至2之鈣鈦礦太陽能電池進行短路電流密度、開路電壓、填充因子及功率轉換效率之試驗,其試驗方法係利用本發明所屬技術領域中具有通常知識者所慣用之方法量測。功率轉換效率用以評價鈣鈦礦薄膜的光電轉換效率,且隨著天數增加,量測功率轉換效率,以追蹤功率轉換效率的變化,並以其表示可靠度,以評價鈣鈦礦太陽能電池的穩定性,其亦可反映出鈣鈦礦薄膜的穩定性。 The calcium-titanium solar cells of Example 1 and Comparative Examples 1-2 were tested for short-circuit current density, open-circuit voltage, fill factor, and power conversion efficiency using methods commonly used by those skilled in the art. Power conversion efficiency is used to evaluate the photoelectric conversion efficiency of the calcium-titanium thin film. The power conversion efficiency was measured over time to track changes in power conversion efficiency. This represents reliability, assessing the stability of the calcium-titanium solar cell and reflecting the stability of the calcium-titanium thin film.

2.光感測器之外部量子效率、探測率及響應度之試驗 2. Testing of external quantum efficiency, detectivity, and response of photodetectors

對實施例1及比較例1至2之光感測器進行外部量子效率、探測率及響應度之試驗,其試驗方法係利用本 發明所屬技術領域中具有通常知識者所慣用之方法量測。此外,於相對溼度為50%至80%之大氣環境下,經過200天,量測光感測器之外部量子效率,以評價光感測器的穩定性,其亦可反映出鈣鈦礦薄膜的穩定性。 The photosensors of Example 1 and Comparative Examples 1 and 2 were tested for external quantum efficiency, detectivity, and responsiveness using methods commonly used by those skilled in the art. Furthermore, the external quantum efficiency of the photosensors was measured over 200 days in an atmospheric environment with a relative humidity of 50% to 80% to evaluate the stability of the photosensors, which also reflects the stability of the calcium-titanium thin film.

3.三維鈣鈦礦層及準二維鈣鈦礦層之晶面與排列的量測 3. Measurement of crystal planes and arrangement of three-dimensional and quasi-two-dimensional calcium-titanium layers

對鈣鈦礦薄膜中之三維鈣鈦礦層及準二維鈣鈦礦層量測掠角入射廣角X光散射(GIWAXS)圖譜及X射線衍射(XRD)圖譜,並根據圖譜分析三維鈣鈦礦層及準二維鈣鈦礦層之晶面與排列。 Grazing-incidence wide-angle X-ray scattering (GIWAXS) and X-ray diffraction (XRD) patterns were measured on the three-dimensional and quasi-two-dimensional calcium-titanium layers in the calcium-titanium thin films. The crystal planes and arrangement of the three-dimensional and quasi-two-dimensional calcium-titanium layers were analyzed based on the patterns.

請參閱表1及圖4,相較於比較例1及2,實施例1使用具有準二維鈣鈦礦層之鈣鈦礦薄膜做為鈣鈦礦太陽能電池之主動層,從而提升功率轉換效率及其穩定性。進一步,實施例1之鈣鈦礦薄膜具有三維鈣鈦礦層及準二維鈣鈦礦層,以構建p-n接面,故增加短路電流密度。 Referring to Table 1 and Figure 4, compared to Comparative Examples 1 and 2, Example 1 uses a calcium-titanium thin film with a quasi-two-dimensional calcium-titanium layer as the active layer of a calcium-titanium solar cell, thereby improving power conversion efficiency and stability. Furthermore, the calcium-titanium thin film of Example 1 has both a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer to form a p-n junction, thereby increasing the short-circuit current density.

請參閱表2及圖5,相較於比較例1及2,實施例 1使用具有準二維鈣鈦礦層之鈣鈦礦薄膜做為光感測器之光吸收層,從而提升外部量子效率、探測率、響應度及其穩定性。 Refer to Table 2 and Figure 5. Compared to Comparative Examples 1 and 2, Example 1 uses a calcium-titanium thin film with a quasi-two-dimensional calcium-titanium layer as the light absorption layer of the photosensor, thereby improving the external quantum efficiency, detectivity, response, and stability.

請參閱圖6,實施例1之準二維鈣鈦礦層係由第一區域及第二區域所組成。鈣鈦礦化合物(2-1)具有(040)晶面,如圖6之標記「(040)2」所示。鈣鈦礦化合物(2-2)具有(040)晶面、(060)晶面及(080)晶面,依序如圖6之標記「(040)3」、「(060)3」及「(080)3」所示。 Referring to FIG. 6 , the quasi-two-dimensional calcium-titanium layer of Example 1 is composed of a first region and a second region. The calcium-titanium compound (2-1) has a (040) crystal plane, as indicated by the label "(040) 2 " in FIG. The calcium-titanium compound (2-2) has a (040) crystal plane, a (060) crystal plane, and a (080) crystal plane, as indicated by the labels "(040) 3 ", "(060) 3 ", and "(080) 3 " in FIG. 6 , respectively.

請參閱圖7,隨著入射角的增加,X射線穿透鈣鈦礦薄膜的深度愈深,三維鈣鈦礦層之ABX3所示之鈣鈦礦化合物的晶面(110)的繞射峰強度逐漸增強(如圖7之標記「(110)3D」所示),此表示三維鈣鈦礦層位於鈣鈦礦薄膜之內層。當入射角為0.5度時,(040)平面及(080)平面的繞射峰之強度較強(如圖7之標記「(040)3」及「(080)5」所示),此表示準二維鈣鈦礦層之第一區位於鈣鈦礦薄膜之最外層。換句話說,準二維鈣鈦礦層之第二區位於鈣鈦礦薄膜之中間層。 Please refer to Figure 7. As the incident angle increases, the depth of X-rays penetrating into the calcium-titanium film becomes deeper, and the diffraction peak intensity of the crystal plane (110) of the calcium-titanium compound indicated by ABX 3 of the three-dimensional calcium-titanium layer gradually increases (as indicated by the label "(110) 3D " in Figure 7). This indicates that the three-dimensional calcium-titanium layer is located in the inner layer of the calcium-titanium film. When the incident angle is 0.5 degrees, the diffraction peaks of the (040) and (080) planes are stronger (as shown by the labels "(040) 3 " and "(080) 5 " in Figure 7). This indicates that the first region of the quasi-two-dimensional calcium-titanium layer is located in the outermost layer of the calcium-titanium film. In other words, the second region of the quasi-two-dimensional calcium-titanium layer is located in the middle layer of the calcium-titanium film.

請參閱圖8,在實施例1之準二維鈣鈦礦層中,鈣鈦礦化合物(2-1)具有(020)晶面及(040)晶面,如圖8之標記「(020)2」及「(040)2」所示。鈣鈦礦化合物(2-2)具有(040)晶面、(060)晶面、(080)晶面及(111)晶面,依序如圖8之標記「(040)3」、「(060)3」、「(080)3」及「(111)」所示。再者,圖8之標記「FTO」表示X射線對FTO層所產生之衍射弧。第一區域具有平行於鈣鈦礦 薄膜之膜面的晶面,且第二區域具有垂直於鈣鈦礦薄膜之膜面的晶面。 Referring to FIG8 , in the quasi-two-dimensional calcium-titanium layer of Example 1, the calcium-titanium compound (2-1) has a (020) crystal plane and a (040) crystal plane, as indicated by the labels “(020) 2 ” and “(040) 2 ” in FIG8 . The calcium-titanium compound (2-2) has a (040) crystal plane, a (060) crystal plane, a (080) crystal plane, and a (111) crystal plane, as indicated by the labels “(040) 3 ”, “(060) 3 ”, “(080) 3 ”, and “(111)” in FIG8 , respectively. Furthermore, the label “FTO” in FIG8 represents the diffraction arc generated by X-rays on the FTO layer. The first region has a crystal plane parallel to the film surface of the calcium-titanium film, and the second region has a crystal plane perpendicular to the film surface of the calcium-titanium film.

於實施例1之鈣鈦礦薄膜的兩側分別設置電極,再加上外電路,以組裝成電容。請參閱圖9,此圖為包含實施例1之鈣鈦礦薄膜的電容之電容對電壓的曲線圖,再根據此圖畫出圖10,圖10為電容的三次方之倒數(1/C3)對電壓的曲線圖,圖10之Y軸採用科學記號,例如以「2.00E+27」表示「2.00×1027」。然後,根據費米能階之理論,從圖10中0.6V至1.0V的區間做回歸線分析,藉由回歸線之斜率求得實施例1之鈣鈦礦薄膜的p-n接面之內建電位為0.62V。 Electrodes are placed on both sides of the calcium-titanium thin film of Example 1, and external circuitry is added to form a capacitor. See Figure 9, which plots capacitance versus voltage for a capacitor containing the calcium-titanium thin film of Example 1. Based on this figure, Figure 10 plots the inverse of the cube of capacitance (1/C 3 ) versus voltage. The Y-axis of Figure 10 uses scientific notation, for example, "2.00E+27" represents "2.00×10 27 ." Then, based on the theory of the Fermi level, a regression line analysis was performed on the range of 0.6V to 1.0V in Figure 10. The built-in potential of the pn junction of the calcium-titanium thin film in Example 1 was calculated to be 0.62V based on the slope of the regression line.

綜上所述,本發明之鈣鈦礦薄膜、鈣鈦礦薄膜製造方法以及光電裝置,其中鈣鈦礦薄膜係由三維鈣鈦礦層及準二維鈣鈦礦層所組成,且二者具有特定的鈣鈦礦化合物。鈣鈦礦薄膜製造方法係利用特定的鉛離子與甲基銨離子之莫耳濃度比值製得鈣鈦礦薄膜,進而提升包含鈣鈦礦薄膜之光電裝置的功率轉換效率及穩定性。 In summary, the present invention provides a calcium-titanium thin film, a method for manufacturing a calcium-titanium thin film, and an optoelectronic device. The calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, both of which contain a specific calcium-titanium compound. The calcium-titanium thin film manufacturing method utilizes a specific molar concentration ratio of lead ions to methylammonium ions to produce the calcium-titanium thin film, thereby improving the power conversion efficiency and stability of optoelectronic devices containing the calcium-titanium thin film.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,在本發明所屬技術領域中任何具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed above in terms of embodiments, this is not intended to limit the present invention. Anyone with ordinary skill in the art to which the present invention pertains may make various modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the patent application attached hereto.

100:鈣鈦礦薄膜 100: Calcium-titanium film

110:三維鈣鈦礦層 110: Three-dimensional calcium-titanium deposit

120:準二維鈣鈦礦層 120: Quasi-two-dimensional calcium-titanium deposit

121,122:區域 121,122: Area

Claims (10)

一種鈣鈦礦薄膜,係由一三維鈣鈦礦層及一準二維鈣鈦礦層所組成,該準二維鈣鈦礦層設置於該三維鈣鈦礦層上,並且該三維鈣鈦礦層配置以做為n型半導體,該準二維鈣鈦礦層配置以做為p型半導體,以於該三維鈣鈦礦層與該準二維鈣鈦礦層之間構成一p-n接面, 其中該三維鈣鈦礦層具有如下式(1)所示之鈣鈦礦化合物,且該準二維鈣鈦礦層具有如下式(2)所示之鈣鈦礦化合物: ABX 3(1) L 2A n-1B nX 3n+1(2) 於該式(1)與該式(2)中,A代表碳數為1至2的烷基銨離子或鹼金屬元素之一價離子,B代表第13族金屬離子、第14族金屬離子或第15族金屬離子,X代表鹵素離子,L代表碳數為3至4的烷基銨離子、苯甲基銨離子、苯乙基銨離子、碳數為1至3的烷基二銨離子或碳數為4至6的胺基酸基,且n代表2至5的整數。 A calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer. The quasi-two-dimensional calcium-titanium layer is disposed on the three-dimensional calcium-titanium layer. The three-dimensional calcium-titanium layer is configured as an n-type semiconductor, and the quasi-two-dimensional calcium-titanium layer is configured as a p-type semiconductor, so as to form a pn junction between the three-dimensional calcium-titanium layer and the quasi-two-dimensional calcium-titanium layer. The three-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (1), and the quasi-two-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (2): ABX 3 (1) L 2 A n-1 B n X 3n+1 (2) In formula (1) and formula (2), A represents an alkylammonium ion having 1 to 2 carbon atoms or a monovalent ion of an alkali metal element, B represents a Group 13 metal ion, a Group 14 metal ion, or a Group 15 metal ion, X represents a halogen ion, L represents an alkylammonium ion having 3 to 4 carbon atoms, a benzylammonium ion, a phenethylammonium ion, an alkyldiammonium ion having 1 to 3 carbon atoms, or an amino acid group having 4 to 6 carbon atoms, and n represents an integer from 2 to 5. 如請求項1所述之鈣鈦礦薄膜,其中該三維鈣鈦礦層的一厚度為300nm至800nm,且該準二維鈣鈦礦層之一厚度為100nm至300nm。The calcium-titanium thin film as described in claim 1, wherein a thickness of the three-dimensional calcium-titanium layer is 300 nm to 800 nm, and a thickness of the quasi-two-dimensional calcium-titanium layer is 100 nm to 300 nm. 如請求項1所述之鈣鈦礦薄膜,其中該準二維鈣鈦礦層係由一第一區域及一第二區域所組成,該第二區域位於該第一區域與該三維鈣鈦礦層之間,該第一區域具有L 2A 1B 2X 7所示之鈣鈦礦化合物(2-1)及L 2A 2B 3X 10所示之鈣鈦礦化合物(2-2),並且 該第二區域具有該鈣鈦礦化合物(2-2)、L 2A 3B 4X 13所示之鈣鈦礦化合物(2-3)及L 2A 4B 5X 16所示之鈣鈦礦化合物(2-4)。 The calcium-titanium film of claim 1, wherein the quasi-two-dimensional calcium-titanium layer is composed of a first region and a second region, the second region being located between the first region and the three-dimensional calcium-titanium layer, the first region comprising a calcium-titanium compound (2-1) represented by L 2 A 1 B 2 X 7 and a calcium-titanium compound (2-2) represented by L 2 A 2 B 3 X 10 , and the second region comprising the calcium-titanium compound (2-2), a calcium-titanium compound (2-3) represented by L 2 A 3 B 4 X 13 , and a calcium-titanium compound (2-4) represented by L 2 A 4 B 5 X 16 . 如請求項3所述之鈣鈦礦薄膜,其中該鈣鈦礦化合物(2-2)的一XRD圖譜具有在(111)結晶方向的一繞射峰。The calcium-titanium film as described in claim 3, wherein an XRD spectrum of the calcium-titanium compound (2-2) has a diffraction peak in the (111) crystal direction. 如請求項3所述之鈣鈦礦薄膜,其中該第一區域具有平行於該鈣鈦礦薄膜之一膜面的一晶面。The calcium-titanium thin film as described in claim 3, wherein the first region has a crystal plane parallel to a film surface of the calcium-titanium thin film. 如請求項5所述之鈣鈦礦薄膜,其中該晶面包含(020)平面、(040)平面、(060)平面及/或(080)平面。The calcium-titanium thin film as described in claim 5, wherein the crystal plane includes a (020) plane, a (040) plane, a (060) plane and/or a (080) plane. 如請求項3所述之鈣鈦礦薄膜,其中該第二區域具有垂直於該鈣鈦礦薄膜之一膜面的一晶面。The calcium-titanium thin film as described in claim 3, wherein the second region has a crystal plane perpendicular to a film surface of the calcium-titanium thin film. 一種鈣鈦礦薄膜之製造方法,包含: 配製一三維鈣鈦礦前驅物溶液,其中鉛離子與甲基銨離子之一莫耳濃度比值為1.1至1.2; 沉積該三維鈣鈦礦前驅物溶液於一基材上,以獲得一三維鈣鈦礦塗層,其中該三維鈣鈦礦塗層之一厚度為300nm至800nm; 於95℃至105℃下,對該三維鈣鈦礦塗層進行一第一退火處理,以獲得一三維鈣鈦礦層,其中該三維鈣鈦礦層具有如下式(1)所示之鈣鈦礦化合物: ABX 3(1); 配製一準二維鈣鈦礦前驅物溶液,其中該鉛離子與該甲基銨離子之一莫耳濃度比值為0.7至0.9; 沉積該準二維鈣鈦礦前驅物溶液於該三維鈣鈦礦層上,以獲得一準二維鈣鈦礦塗層,其中該準二維鈣鈦礦塗層之一厚度為100nm至300nm;以及 於105℃至115℃下,對該準二維鈣鈦礦塗層進行一第二退火處理,以獲得一準二維鈣鈦礦層,其中該準二維鈣鈦礦層具有如下式(2)所示之鈣鈦礦化合物: L 2A n-1B nX 3n+1(2), 於該式(1)與該式(2)中,A代表碳數為1至2的烷基銨離子或鹼金屬元素之一價離子,B代表第13族金屬離子、第14族金屬離子或第15族金屬離子,X代表鹵素離子,L代表碳數為3至4的烷基銨離子、苯甲基銨離子、苯乙基銨離子、碳數為1至3的烷基二銨離子或碳數為4至6的胺基酸基,且n代表2至5的整數。 A method for manufacturing a calcium-titanium thin film comprises: preparing a three-dimensional calcium-titanium precursor solution, wherein the molar ratio of lead ions to methylammonium ions is 1.1 to 1.2; depositing the three-dimensional calcium-titanium precursor solution on a substrate to obtain a three-dimensional calcium-titanium coating, wherein the three-dimensional calcium-titanium coating has a thickness of 300 nm to 800 nm; Performing a first annealing treatment on the three-dimensional calcium-titanium coating at 95° C. to 105° C. to obtain a three-dimensional calcium-titanium layer, wherein the three-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (1): ABX 3 (1); preparing a quasi-two-dimensional calcium-titanium precursor solution, wherein a molar concentration ratio of the lead ions to the methylammonium ions is 0.7 to 0.9; Depositing the quasi-two-dimensional calcium-titanium precursor solution on the three-dimensional calcium-titanium layer to obtain a quasi-two-dimensional calcium-titanium coating, wherein the quasi-two-dimensional calcium-titanium coating has a thickness of 100 nm to 300 nm; and performing a second annealing treatment on the quasi-two-dimensional calcium-titanium coating at 105° C. to obtain a quasi-two-dimensional calcium-titanium layer, wherein the quasi-two-dimensional calcium-titanium layer has a calcium-titanium compound represented by the following formula (2): L 2 An -1 Bn X 3n+1 (2), In formula (1) and formula (2), A represents an alkylammonium ion having 1 to 2 carbon atoms or a monovalent ion of an alkali metal element, B represents a Group 13 metal ion, a Group 14 metal ion, or a Group 15 metal ion, X represents a halogen ion, L represents an alkylammonium ion having 3 to 4 carbon atoms, a benzylammonium ion, a phenethylammonium ion, an alkyldiammonium ion having 1 to 3 carbon atoms, or an amino acid group having 4 to 6 carbon atoms, and n represents an integer from 2 to 5. 如請求項8所述之鈣鈦礦薄膜之製造方法,其中該沉積該三維鈣鈦礦前驅物溶液之操作及該沉積該準二維鈣鈦礦前驅物溶液之操作係選自於由旋轉塗佈、刮刀塗佈、狹縫式塗佈、噴塗、液相結晶、液相沉澱、離子層吸附、熱溶劑注射及其任意組合所組成之一族群。The method for manufacturing a calcium-titanium thin film as described in claim 8, wherein the operation of depositing the three-dimensional calcium-titanium precursor solution and the operation of depositing the quasi-two-dimensional calcium-titanium precursor solution are selected from a group consisting of spin coating, doctor blade coating, slit coating, spraying, liquid phase crystallization, liquid phase precipitation, ion layer adsorption, hot solvent injection, and any combination thereof. 一種光電裝置,包含: 一第一電極層; 一電子傳輸層,設置於該第一電極層上; 如請求項1至7之任一項所述之一鈣鈦礦薄膜,設置於該電子傳輸層上,其中該鈣鈦礦薄膜係由一三維鈣鈦礦層及一準二維鈣鈦礦層所組成,該三維鈣鈦礦層設置於該電子傳輸層與該準二維鈣鈦礦層之間; 一電洞傳輸層,設置於該鈣鈦礦薄膜上;以及 一第二電極層,設置於該電洞傳輸層上。 A photoelectric device comprises: a first electrode layer; an electron transport layer disposed on the first electrode layer; a calcium-titanium thin film as described in any one of claims 1 to 7 disposed on the electron transport layer, wherein the calcium-titanium thin film is composed of a three-dimensional calcium-titanium layer and a quasi-two-dimensional calcium-titanium layer, the three-dimensional calcium-titanium layer being disposed between the electron transport layer and the quasi-two-dimensional calcium-titanium layer; a hole transport layer disposed on the calcium-titanium thin film; and a second electrode layer disposed on the hole transport layer.
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CN115595139A (en) * 2021-07-07 2023-01-13 三星电子株式会社(Kr) Quantum dots, compositions, quantum dot composites and display panels

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US20210028319A1 (en) * 2013-12-17 2021-01-28 Isis Innovation Limited Photovoltaic device comprising a metal halide perovskite and a passivating agent
US20180019358A1 (en) * 2016-07-13 2018-01-18 Lg Electronics Inc. Tandem solar cell, tandem solar cell module comprising the same, and method for manufacturing thereof
CN115595139A (en) * 2021-07-07 2023-01-13 三星电子株式会社(Kr) Quantum dots, compositions, quantum dot composites and display panels

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