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TWI891316B - Testing device and processing machine - Google Patents

Testing device and processing machine

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Publication number
TWI891316B
TWI891316B TW113112670A TW113112670A TWI891316B TW I891316 B TWI891316 B TW I891316B TW 113112670 A TW113112670 A TW 113112670A TW 113112670 A TW113112670 A TW 113112670A TW I891316 B TWI891316 B TW I891316B
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unit
test
testing
electronic component
tester
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TW113112670A
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Chinese (zh)
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TW202540659A (en
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楊孟堅
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鴻勁精密股份有限公司
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Priority to TW113112670A priority Critical patent/TWI891316B/en
Application granted granted Critical
Publication of TWI891316B publication Critical patent/TWI891316B/en
Publication of TW202540659A publication Critical patent/TW202540659A/en

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  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

The testing device includes a testing mechanism, a detecting mechanism, and a transportation mechanism. The testing mechanism has a first testing unit and a second testing unit arranged along a first axis so as to electronically contact the first point and the second point of the electronic component respectively for testing. The detecting mechanism is independently arranged and has a first imaging unit and a second imaging unit arranged along a second axis in order to take the pictures of the first face and the second face for detection. The transportation mechanism has at least one transportation unit to move the electronic component to the position between the first imaging unit and the second imaging unit for taking images, and further to move the electronic component to the position between the first testing unit and the second testing unit for testing. Thereby, the accuracy and the efficiency of testing can be promoted.

Description

測試裝置及作業機Testing equipment and operating machines

本發明提供一種有效提高檢知精準性及測試產能之測試裝置。The present invention provides a testing device that effectively improves detection accuracy and testing throughput.

在現今,部分電子元件之型式係於頂面及底面分別設有複數個第一接點及複數個第二接點,以供執行電性測試。電子元件可為印刷電路板、撓性載板或是一頂、底面搭載有晶片之積體電路等。Today, some electronic components have multiple first contacts and multiple second contacts on the top and bottom surfaces, respectively, to facilitate electrical testing. The electronic component can be a printed circuit board, a flexible substrate, or an integrated circuit with chips mounted on both the top and bottom surfaces.

以印刷電路板為例,其頂面及底面分別設置有複數個第一接點及複數個第二接點,由於印刷電路板歷經多道加工製程,為確保品質,業者以一測試器對印刷電路板執行測試作業,亦即測試器先對印刷電路板頂面的複數個第一接點執行測試作業,於測試完畢後,再將印刷電路板移載至一翻面器而作翻面,於印刷電路板之底面朝向上方後,方可供測試器對印刷電路板底面的複數個第二接點執行測試作業;惟此一方式必需耗時將印刷電路板反覆翻面方可執行測試作業,於印刷電路板底面的複數個第二接點測試完畢後,更需再次將印刷電路板之頂面翻轉朝上,方可出料收置,以致作動時序繁瑣耗時而無法提高產能。Take a printed circuit board as an example. Its top and bottom surfaces are respectively provided with a plurality of first contacts and a plurality of second contacts. Since the printed circuit board has undergone multiple processing steps, in order to ensure the quality, the industry uses a tester to perform a test operation on the printed circuit board. That is, the tester first performs a test operation on the plurality of first contacts on the top surface of the printed circuit board. After the test is completed, the printed circuit board is transferred to a flipper to be flipped over. Only after the bottom of the printed circuit board is facing upward can the tester perform testing operations on the multiple second contacts on the bottom of the printed circuit board. However, this method requires the time-consuming process of repeatedly turning the printed circuit board over to perform the testing operation. After the multiple second contacts on the bottom of the printed circuit board are tested, the top of the printed circuit board must be turned upward again before it can be unloaded and stored. This makes the operation sequence cumbersome and time-consuming, and fails to improve production capacity.

再者,印刷電路板的複數個第一接點及複數個第二接點日趨精密微小,若測試器之探針無法精準對位接觸印刷電路板之頂面及底面的複數個第一接點及複數個第二接點,即會影響測試作業之準確性及測試品質。Furthermore, the multiple first contacts and multiple second contacts on a printed circuit board are becoming increasingly precise and tiny. If the probe of the tester cannot accurately align and contact the multiple first contacts and multiple second contacts on the top and bottom surfaces of the printed circuit board, the accuracy and test quality of the test operation will be affected.

本發明之目的一,提供一種測試裝置,包含測試機構、檢知機構及輸送機構;測試機構沿第一軸線配置一具有第一測試器之第一測試單元及一具有第二測試器之第二測試單元,第一測試器相對於第二測試器,能夠分別電性接觸電子元件頂面及底面的第一接點及第二接點;檢知機構獨立配置,並沿第二軸線配置一具有第一取像器之第一取像單元及一具有第二取像器之第二取像單元,第一取像器相對於第二取像器,能夠分別取像電子元件頂面及底面之第一待檢部及第二待檢部;輸送機構設置至少一具有輸送器之輸送單元,以供輸送電子元件作至少一方向位移至測試機構及檢知機構;藉以,輸送機構之輸送器將電子元件輸送至第一、二取像器之間而供分別精準取像第一、二待檢部 ,再將電子元件輸送至第一、二測試器之間,第一、二測試器依據取像資料而沿第一軸線位移分別準確電性接觸電子元件之第一、二接點執行測試作業,進而提高測試產能及測試品質。 The first object of the present invention is to provide a testing device comprising a testing mechanism, a detecting mechanism and a conveying mechanism; the testing mechanism is configured along a first axis with a first testing unit having a first tester and a second testing unit having a second tester, the first tester being capable of electrically contacting a first contact and a second contact on the top and bottom surfaces of an electronic component, respectively, relative to the second tester; the detecting mechanism is independently configured, and a first imaging unit having a first imager is configured along a second axis. The electronic component comprises a first imager and a second imaging unit having a second imager. The first imager is positioned opposite the second imager and can capture images of a first portion to be inspected and a second portion to be inspected on the top and bottom surfaces of the electronic component, respectively. The transport mechanism comprises at least one transport unit having a transporter for transporting the electronic component in at least one direction to the testing mechanism and the detection mechanism. The transporter of the transport mechanism transports the electronic component between the first and second imagers for precise imaging of the first and second portions to be inspected. The electronic component is then transported between the first and second testers. Based on the image data, the first and second testers move along a first axis to accurately electrically contact the first and second contacts of the electronic component to perform testing, thereby improving test throughput and quality.

本發明之目的二,提供一種測試裝置,其檢知機構之第一取像單元及第二取像單元分別以第一承架及第二承架獨立配置於機架或機台,以避免第一取像器及第二取像器受到其他機構(例如測試機構)之振動影響,進而提高取像精準性。A second object of the present invention is to provide a testing device in which the first imaging unit and the second imaging unit of the detection mechanism are independently configured on a frame or machine using a first support frame and a second support frame respectively, so as to prevent the first imager and the second imager from being affected by vibration of other mechanisms (such as the testing mechanism), thereby improving the imaging accuracy.

本發明之目的三,提供一種測試裝置,其輸送機構之輸送器能夠使電子元件頂面之第一接點及底面之第二接點裸露於外,並搭配測試機構相對配置之第一測試器及第二測試器沿第一軸線位移而直接電性接觸電子元件之第一接點及第二接點執行測試作業,毋需配置翻面器,進而節省成本及縮減測試作業時序。A third objective of the present invention is to provide a testing device in which a conveyor of a conveying mechanism is capable of exposing a first contact on the top surface and a second contact on the bottom surface of an electronic component. In conjunction with the first and second testers disposed oppositely in the testing mechanism, the conveyor is capable of displacing along a first axis to directly electrically contact the first and second contacts of the electronic component to perform testing operations. This eliminates the need for a flipper, thereby saving costs and shortening testing operation time.

本發明之目的四,提供一種測試裝置,其輸送機構之輸送器設置載具及定位結構,載具以供承置電子元件,定位結構可定位或釋放載具上之電子元件,以供平穩承載或易於取放電子元件,進而提高使用便利性。A fourth object of the present invention is to provide a testing device having a conveyor mechanism with a carrier and a positioning structure. The carrier is used to hold electronic components, and the positioning structure can position or release the electronic components on the carrier to provide stable support or easy access to the electronic components, thereby improving ease of use.

本發明之目的五,提供一種作業機,包含機台、供料裝置、收料裝置、測試裝置及中央控制裝置,供料裝置配置於機台,並設有至少一供料器 ,以供容置至少一待測之電子元件;收料裝置配置於機台,並設有至少一收料器,以供容置至少一已測之電子元件;本發明測試裝置配置於機台,並設有測試機構、檢知機構及輸送機構,以供測試、取像及輸送至少一電子元件;中央控制裝置以供控制及整合各裝置作動而執行自動化作業。 A fifth objective of the present invention is to provide a processing machine comprising a machine, a feeding device, a receiving device, a testing device, and a central control device. The feeding device is disposed on the machine and is equipped with at least one feeder for accommodating at least one electronic component to be tested; the receiving device is disposed on the machine and is equipped with at least one receiver for accommodating at least one tested electronic component; the testing device of the present invention is disposed on the machine and is equipped with a testing mechanism, a detection mechanism, and a conveying mechanism for testing, imaging, and conveying at least one electronic component; the central control device is configured to control and integrate the operations of each device to perform automated operations.

為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:To help you better understand this invention, we will provide you with a better understanding of this invention by providing a preferred embodiment with accompanying drawings.

請參閱圖1至圖5,本發明作業機包含機台10、供料裝置20、收料裝置30、測試裝置40及中央控制裝置(圖未示出);於本實施例,作業機應用於測試可為印刷電路板50之電子元件,印刷電路板50之頂面設有複數個第一接點(圖未示出),於底面設有複數個第二接點(圖未示出),更進一步,印刷電路板50可以第一接點及第二接點作為第一待檢部及第二待檢部,或者於頂面及底面另外設有第一待檢部及第二待檢部,於本實施例,印刷電路板50以第一接點及第二接點分別作為第一待檢部及第二待檢部。Referring to Figures 1 to 5, the operating machine of the present invention includes a machine 10, a feeding device 20, a receiving device 30, a testing device 40, and a central control device (not shown). In this embodiment, the operating machine is used to test electronic components, which may be printed circuit boards 50. The top surface of the printed circuit board 50 is provided with a plurality of first contacts (not shown), and the bottom surface is provided with a plurality of second contacts (not shown). Furthermore, the printed circuit board 50 can use the first contacts and the second contacts as the first and second parts to be inspected, or the top and bottom surfaces can each be provided with a first and second parts to be inspected. In this embodiment, the printed circuit board 50 uses the first contacts and the second contacts as the first and second parts to be inspected, respectively.

供料裝置20配置於機台10,並設置至少一供料器,以供容置至少一待測之電子元件,於本實施例,供料裝置20能夠容置待測之複數個印刷電路板50;收料裝置30配置於機台10,並設有至少一收料器,以供容置至少一已測之電子元件,於本實施例,收料裝置30能夠容置已測之複數個印刷電路板50;本發明測試裝置40配置於機台10,以供測試、取像及輸送至少一電子元件;中央控制裝置以供控制及整合各裝置作動而執行自動化作業。A feeding device 20 is disposed on the machine 10 and is provided with at least one feeder for accommodating at least one electronic component to be tested. In this embodiment, the feeding device 20 is capable of accommodating multiple printed circuit boards 50 to be tested. A receiving device 30 is disposed on the machine 10 and is provided with at least one receiver for accommodating at least one tested electronic component. In this embodiment, the receiving device 30 is capable of accommodating multiple tested printed circuit boards 50. The test device 40 of the present invention is disposed on the machine 10 for testing, imaging, and transporting at least one electronic component. A central control device is used to control and integrate the operations of various devices to perform automated operations.

依作業需求,作業機更包含除污裝置60,除污裝置60設置至少一除污器,以去除電子元件上之髒污。髒污例如灰塵或雜屑等。於本實施例,除污裝置60配置於供料裝置20之一側,除污器為具有適當黏性之滾筒,以供沾黏去除測試裝置40所移載之印刷電路板50的髒污。Depending on the operating requirements, the operating machine further includes a cleaning device 60 equipped with at least one cleaning element to remove contaminants from electronic components. Examples of such contaminants include dust and debris. In this embodiment, the cleaning device 60 is positioned on one side of the feeder 20. The cleaning element is a roller with suitable viscosity, designed to remove contaminants from the printed circuit boards 50 being transferred by the testing device 40.

依作業需求,作業機更包含打印裝置70,打印裝置70設置至少一打印器71,以供於電子元件打印記號。記號例如型號、產品資料或廠商資訊等 。打印器71可為雷射打印器或噴墨打印器等。於本實施例,打印裝置70配置於收料裝置30之一側,並設置打印器71及承台72,承台72以供承置該測試裝置40移載之已測印刷電路板50,打印器71為雷射打印器,以供對印刷電路板50執行打印作業。 Depending on the operating requirements, the operating machine further includes a printing device 70. The printing device 70 is equipped with at least one printer 71 for printing markings on electronic components. Markings such as model numbers, product information, or manufacturer information can be printed on these components. Printer 71 can be a laser printer or inkjet printer. In this embodiment, the printing device 70 is positioned on one side of the receiving device 30 and includes printer 71 and a support 72. Support 72 is configured to support the tested printed circuit board 50 transferred by the testing device 40. Printer 71 is a laser printer for printing on the printed circuit board 50.

依作業需求,作業機能夠於機台10配置至少一暫置裝置(圖未示出),以供暫置至少一電子元件;暫置裝置設置至少一暫置台,暫置台供承置電子元件,例如暫置台可供暫置已測之電子元件。According to the operation requirements, the operation function is sufficient to configure at least one temporary device (not shown) on the machine 10 for temporarily placing at least one electronic component; the temporary device is provided with at least one temporary table for placing electronic components, for example, the temporary table can be used to temporarily place tested electronic components.

本發明之測試裝置40包含測試機構、檢知機構及輸送機構。依作業需求,測試裝置40更包含移料機構。The testing device 40 of the present invention includes a testing mechanism, a detection mechanism, and a conveying mechanism. Depending on the operation requirements, the testing device 40 may further include a material transfer mechanism.

測試機構沿第一軸線L1且相對配置第一測試單元41及第二測試單元42,第一測試單元41之第一測試器411相對第二測試單元42之第二測試器421 ,第一測試器411及第二測試器421能夠分別電性接觸電子元件之第一接點及第二接點而作測試。 The testing mechanism comprises a first testing unit 41 and a second testing unit 42 arranged opposite each other along a first axis L1. A first tester 411 of the first testing unit 41 faces a second tester 421 of the second testing unit 42. The first tester 411 and the second tester 421 are capable of electrically contacting the first and second contacts of an electronic component, respectively, to perform testing.

於本實施例,第一測試單元41包含第一測試器411、第一架置器412、第一測試機413及第一測試調整器414。更進一步,第一測試器411與電子元件之其中一者朝向另一者作相對位移。依作業需求,第一架置器412可為固定器或可移動器;於本實施例,第一測試單元41設置至少一第一測試驅動器(圖未示出),第一測試驅動器能夠為壓缸、線性馬達或包含馬達及至少一傳動組,傳動組為皮帶輪組或螺桿螺座組等,第一架置器412為移載臂,並由第一測試驅動器帶動作至少一方向位移,第一架置器412能夠沿第一軸線L1且由上方朝向下方之待測印刷電路板50作Z方向位移;第一測試調整器414裝配於第一架置器412,而可同步作Z方向位移,第一測試調整器414能夠帶動第一測試器411作至少一方向位移或/及角度位移而調整位置;於本實施例,第一測試調整器414能夠帶動第一測試器411作X-Y-Z方向位移及角度位移(例如水平角度轉動位移)而微調位置,使第一測試器411更加精準電性接觸印刷電路板50頂面之第一接點(圖未示出);第一測試調整器414另以第一傳動架415供裝配第一測試機413,第一測試機413以線路電性連接第一測試器411而傳輸測試程式,並可隨第一測試器411位移作動。In this embodiment, the first test unit 41 includes a first tester 411, a first mount 412, a first test machine 413, and a first test adjuster 414. Furthermore, the first tester 411 and the electronic component are relatively displaced toward each other. Depending on the working requirements, the first mount 412 can be a fixed device or a movable device. In this embodiment, the first test unit 41 is provided with at least one first test driver (not shown). The first test driver can be a pressure cylinder, a linear motor, or a motor and at least one transmission assembly, wherein the transmission assembly is a pulley assembly or a screw-screw assembly. The first mount 412 is a transfer arm and is driven by the first test driver to move in at least one direction. The first mount 412 can move in the Z direction along the first axis L1 from the top toward the printed circuit board 50 to be tested. The first test adjuster 414 is mounted on the first mount 412 and can move in the Z direction synchronously. The adjuster 414 is capable of driving the first tester 411 to perform at least one directional displacement and/or angular displacement to adjust its position. In this embodiment, the first test adjuster 414 is capable of driving the first tester 411 to perform X-Y-Z directional displacement and angular displacement (e.g., horizontal angular rotational displacement) to fine-tune its position, allowing the first tester 411 to more accurately electrically contact the first contact (not shown) on the top surface of the printed circuit board 50. The first test adjuster 414 also has a first transmission frame 415 for assembling the first tester 413. The first tester 413 is electrically connected to the first tester 411 via wiring to transmit a test program and can move with the displacement of the first tester 411.

於本實施例,第二測試單元42包含第二測試器421、第二架置器422、第二測試機423及第二測試調整器424。更進一步,第二測試器421與電子元件之其中一者朝向另一者作相對位移。依作業需求,第二架置器422可為固定器或可移動器;於本實施例,第二測試單元42設置至少一第二測試驅動器(圖未示出),第二測試驅動器能夠為壓缸、線性馬達或包含馬達及至少一傳動組,傳動組為皮帶輪組或螺桿螺座組等,第二架置器422為移載臂,並由第二測試驅動器(圖未示出)帶動作至少一方向位移,第二架置器422能夠沿第一軸線L1且由下方朝向上方之待測印刷電路板50作Z方向位移;第二測試調整器424裝配於第二架置器422,而可同步作Z方向位移,第二測試調整器424能夠帶動第二測試器421作至少一方向位移或/及角度位移而調整位置;於本實施例,第二測試調整器424能夠帶動第二測試器421作X-Y-Z方向位移及角度位移而微調位置,第二測試器421相對第一測試器411,而可更加精準電性接觸印刷電路板50底面之第二接點(圖未示出);第二測試調整器424另以第二傳動架425供裝配第二測試機423 ,第二測試機423以線路電性連接第二測試器421而傳輸測試程式,並可隨第二測試器421位移作動。 In this embodiment, the second test unit 42 includes a second tester 421, a second mount 422, a second test machine 423, and a second test adjuster 424. Furthermore, the second tester 421 and the electronic component are relatively displaced toward each other. Depending on the working requirements, the second mounting device 422 can be a fixed device or a movable device. In this embodiment, the second test unit 42 is provided with at least one second test driver (not shown). The second test driver can be a pressure cylinder, a linear motor, or a motor and at least one transmission group. The transmission group is a belt pulley group or a screw-screw group. The second mounting device 422 is a transfer arm and is driven by the second test driver (not shown) to move in at least one direction. The second mounting device 422 can move in the Z direction along the first axis L1 from the bottom toward the printed circuit board 50 to be tested. The second test adjuster 424 is provided. Mounted on the second mounting bracket 422 and capable of synchronous Z-axis displacement, the second test adjuster 424 drives the second tester 421 to adjust its position by at least one axial displacement and/or angular displacement. In this embodiment, the second test adjuster 424 drives the second tester 421 to adjust its position by X-Y-Z axial displacement and angular displacement, enabling fine adjustment of the second tester 421 relative to the first tester 411, enabling more precise electrical contact with the second contact (not shown) on the bottom surface of the printed circuit board 50. The second test adjuster 424 also utilizes a second drive frame 425 for mounting a second tester 423. The second tester 423 is electrically connected to the second tester 421 via wiring to transmit the test program and can move with the movement of the second tester 421.

依作業需求,第一測試機413亦可配置於機台10,並以線路電性連接第一測試器411;第二測試機423亦可配置於機台10,並以線路電性連接第二測試器421,不受限於本實施例。According to operational requirements, the first tester 413 can also be configured on the machine 10 and electrically connected to the first tester 411 via a line; the second tester 423 can also be configured on the machine 10 and electrically connected to the second tester 421 via a line, without being limited to this embodiment.

檢知機構沿第二軸線L2且相對配置第一取像單元43及第二取像單元44,第一取像單元43之第一取像器431相對第二取像單元44之第二取像器441 ,第一取像器431及第二取像器441能夠分別取像電子元件之第一待檢部及第二待檢部以供檢查。 The detection mechanism comprises a first imaging unit 43 and a second imaging unit 44 disposed opposite each other along the second axis L2. The first imager 431 of the first imaging unit 43 faces the second imager 441 of the second imaging unit 44. The first imager 431 and the second imager 441 are capable of capturing images of the first and second portions of the electronic component, respectively, for inspection.

於本實施例,第一取像單元43包含第一取像器431、第一承架432及第一檢知調整器433;依作業需求,第一承架432能夠裝配於獨立機架(圖未示出)或機台10,以減少受到振動,而避免影響第一取像器431之取像精準度;於本實施例,第一取像單元43於獨立機架(圖未示出)裝配第一承架432,第一承架432裝配第一檢知調整器433,第一檢知調整器433可帶動第一取像器431作至少一方向位移而調整位置,於本實施例,第一檢知調整器433可帶動第一取像器431沿第二軸線L2作Z方向位移而調整高度位置,第一取像器431為CCD,能夠由上方朝向下方取像印刷電路板50頂面之第一待檢部(圖未示出)。In this embodiment, the first imaging unit 43 includes a first imager 431, a first support frame 432 and a first detection adjuster 433. According to the operation requirements, the first support frame 432 can be mounted on an independent frame (not shown) or the machine 10 to reduce vibration and avoid affecting the imaging accuracy of the first imager 431. In this embodiment, the first imaging unit 43 is mounted on an independent frame (not shown). The first support frame 432 432 is equipped with a first detection adjuster 433. The first detection adjuster 433 can drive the first imager 431 to move in at least one direction to adjust the position. In this embodiment, the first detection adjuster 433 can drive the first imager 431 to move in the Z direction along the second axis L2 to adjust the height position. The first imager 431 is a CCD and can capture the first portion to be inspected (not shown) on the top surface of the printed circuit board 50 from top to bottom.

於本實施例,第二取像單元44包含第二取像器441、第二承架442及第二檢知調整器443;依作業需求,第二承架442能夠裝配於獨立機架(圖未示出)或機台10,以減少受到振動,而避免影響第二取像器441之取像精準度;於本實施例,第二取像單元44於獨立機架(圖未示出)裝配第二承架442 ,第二承架442裝配第二檢知調整器443,第二檢知調整器443可帶動第二取像器441作至少一方向位移而調整位置,於本實施例,第二檢知調整器443可帶動第二取像器441沿第二軸線L2作Z方向位移而調整高度位置,第二取像器441為CCD,並相對第一取像器431,第二取像器441能夠由下方朝向上方取像印刷電路板50底面之第二待檢部(圖未示出)。 In this embodiment, the second imaging unit 44 includes a second imager 441, a second support frame 442, and a second detection adjuster 443. Depending on the operation requirements, the second support frame 442 can be mounted on an independent frame (not shown) or the machine 10 to reduce vibration and avoid affecting the imaging accuracy of the second imager 441. In this embodiment, the second imaging unit 44 is mounted on an independent frame (not shown). The second support frame 442 is equipped with a second detection adjuster 443. The second detection adjuster 443 can drive the second imager 441 to move in at least one direction to adjust its position. In this embodiment, the second detection adjuster 443 can drive the second imager 441 to move in the Z direction along the second axis L2 to adjust its height. The second imager 441 is a CCD. Opposite to the first imager 431, the second imager 441 can capture an image of a second portion to be inspected (not shown) on the bottom surface of the printed circuit board 50 from bottom to top.

輸送機構設置至少一輸送單元,輸送單元之輸送器能夠輸送電子元件作至少一方向位移於測試機構之第一測試器411及第二測試器421之間以供測試,以及輸送電子元件作至少一方向位移於檢知機構之第一取像器431及第二取像器441之間以供取像。The transport mechanism is provided with at least one transport unit, and the transport unit's transport device is capable of transporting electronic components for displacement in at least one direction between the first tester 411 and the second tester 421 of the testing mechanism for testing, and transporting electronic components for displacement in at least one direction between the first imager 431 and the second imager 441 of the detection mechanism for imaging.

於本實施例,輸送機構之至少一輸送單元包含第一輸送單元45及第二輸送單元46,第一輸送單元45之第一輸送器與第二輸送單元46之第二輸送器能夠接續輸送電子元件於第一取像單元43及第二取像單元44之間,以及輸送於第一測試單元41及第二測試單元42之間,而供執行取像作業及測試作業。In this embodiment, at least one transport unit of the transport mechanism includes a first transport unit 45 and a second transport unit 46. The first transporter of the first transport unit 45 and the second transporter of the second transport unit 46 can successively transport electronic components between the first imaging unit 43 and the second imaging unit 44, and between the first testing unit 41 and the second testing unit 42, for performing imaging operations and testing operations.

第一輸送單元45包含第一輸送器及第一輸送驅動器;第一輸送器配置有第一載具451及第一定位結構,第一載具451包含第一框件及第一連結部件,依作業需求,第一框件和第一連結部件可為獨立元件或一體成型,於本實施例,第一框件為中空框體,並以二側框桿之頂面作為第一承置部4511,能夠承置印制電路板,且使印刷電路板50之頂面及底面的第一接點及第二接點裸露於外;第一框件之一側框桿的外表面設置第一連結部件。第一定位結構包含二第一定位件452及二第一動力源453,二第一定位件452之設計相同,茲舉一個第一定位件452為例,第一定位件452以二支撐架架置樞設於第一框件之第一承置部4511上方;二第一動力源453之設計相同,茲舉一個第一動力源453為例,依作業需求,第一動力源453可為旋轉缸、直結式馬達或包含馬達及至少一傳動組或包含壓缸及至少一傳動組,傳動組可為皮帶輪組或齒輪組等,不受限於本實施例。於本實施例,第一動力源453於支撐架設置壓缸,壓缸驅動一傳動塊位移,傳動塊傳動一皮帶輪組作動,皮帶輪組帶動第一定位件452旋轉擺動,使第一定位件452能夠定位或釋放第一載具451上之印刷電路板50,以供平穩承載或易於取放印刷電路板50。The first conveying unit 45 includes a first conveyor and a first conveying driver; the first conveyor is equipped with a first carrier 451 and a first positioning structure, and the first carrier 451 includes a first frame and a first connecting component. Depending on the working requirements, the first frame and the first connecting component can be independent components or formed as an integral part. In this embodiment, the first frame is a hollow frame, and the top surface of the two side frame rods serves as the first supporting portion 4511, which can support the printed circuit board and expose the first and second contacts on the top and bottom surfaces of the printed circuit board 50 to the outside; the first connecting component is set on the outer surface of one side frame rod of the first frame. The first positioning structure includes two first positioning members 452 and two first power sources 453. The two first positioning members 452 are designed in the same manner. Taking one first positioning member 452 as an example, the first positioning member 452 is pivotally mounted on the first supporting portion 4511 of the first frame member with two support frames. The two first power sources 453 are designed in the same manner. Taking one first power source 453 as an example, according to the working requirements, the first power source 453 can be a rotary cylinder, a direct-drive motor, or a motor and at least one transmission group, or a pressure cylinder and at least one transmission group. The transmission group can be a pulley group or a gear group, etc., and is not limited to this embodiment. In this embodiment, the first power source 453 is provided with a pressure cylinder on the support frame. The pressure cylinder drives a transmission block to move, and the transmission block drives a belt pulley assembly to operate. The belt pulley assembly drives the first positioning member 452 to rotate and swing, so that the first positioning member 452 can position or release the printed circuit board 50 on the first carrier 451 to provide stable support or easy access to the printed circuit board 50.

第一輸送驅動器454包含至少一方向驅動源,以驅動第一輸送器作至少一方向位移;於本實施例,第一輸送驅動器454包含X方向驅動源及Y方向驅動源,並以X方向驅動源連結第一載具451之第一連結部件,能夠輸送第一載具451作X-Y方向位移。The first transport driver 454 includes at least one directional drive source to drive the first transport for displacement in at least one direction. In this embodiment, the first transport driver 454 includes an X-direction drive source and a Y-direction drive source. The X-direction drive source is connected to the first connecting member of the first carrier 451, enabling the first carrier 451 to be transported for displacement in the X-Y direction.

第二輸送單元46包含第二輸送器及第二輸送驅動器;第二輸送器配置第二載具461及第二定位結構,第二載具461包含第二框件及第二連結部件 ,依作業需求,第二框件和第二連結部件可為獨立元件或一體成型,於本實施例,第二框件為中空框體,並以二側框桿之頂面作為第二承置部4611,能夠承置印制電路板,且使印刷電路板50之頂面及底面的第一接點及第二接點裸露於外,第二框件之一側框桿的外表面設置第二連結部件。第二定位結構包含二第二定位件462及二第二動力源463,二第二定位件462之設計相同,茲舉一個第二定位件462為例,第二定位件462以二支撐架架置樞設於第二框件之第二承置部4611上方;二第二動力源463之設計相同,茲舉一個第二動力源463為例,依作業需求,第二動力源463可為旋轉缸、直結式馬達或包含馬達及至少一傳動組或包含壓缸及至少一傳動組,傳動組可為皮帶輪組或齒輪組等,不受限於本實施例。於本實施例,第二動力源463於支撐架設置壓缸,壓缸驅動一傳動塊位移,傳動塊傳動一皮帶輪組作動,皮帶輪組帶動第二定位件462旋轉擺動,使第二定位件462能夠定位或釋放第二載具461上之印刷電路板50,以供平穩承載或易於取放印刷電路板50。 The second transport unit 46 comprises a second conveyor and a second transport drive. The second conveyor is equipped with a second carrier 461 and a second positioning structure. The second carrier 461 comprises a second frame and a second connecting member. Depending on the operational requirements, the second frame and the second connecting member can be separate components or integrally formed. In this embodiment, the second frame is a hollow body with the top surfaces of the two side frame bars serving as the second receiving portion 4611, capable of receiving a printed circuit board (PCB). The first and second contacts on the top and bottom surfaces of the PCB 50 are exposed. The second connecting member is provided on the outer surface of one side frame bar of the second frame. The second positioning structure includes two second positioning members 462 and two second power sources 463. The two second positioning members 462 are designed in the same manner. Taking one second positioning member 462 as an example, the second positioning member 462 is pivotally mounted on the second supporting portion 4611 of the second frame member with two support frames. The two second power sources 463 are designed in the same manner. Taking one second power source 463 as an example, according to the working requirements, the second power source 463 can be a rotary cylinder, a direct-drive motor, or a motor and at least one transmission group, or a pressure cylinder and at least one transmission group. The transmission group can be a pulley group or a gear group, etc., and is not limited to this embodiment. In this embodiment, the second power source 463 comprises a cylinder mounted on the support frame. The cylinder drives a transmission block to move, which in turn drives a pulley assembly, which in turn rotates and oscillates the second positioning member 462. This allows the second positioning member 462 to position or release the printed circuit board 50 on the second carrier 461, ensuring stable loading or easy removal of the printed circuit board 50.

第二輸送驅動器464包含至少一方向驅動源,以驅動第二輸送器作至少一方向位移;於本實施例,第二輸送驅動器464包含另一X方向驅動源及另一Y方向驅動源,並以另一X方向驅動源連結第二載具461之第二連結部件,能夠輸送第二載具461作X-Y方向位移。The second transport driver 464 includes at least one directional drive source to drive the second transport for displacement in at least one direction. In this embodiment, the second transport driver 464 includes another X-direction drive source and another Y-direction drive source. The second X-direction drive source is connected to the second connecting member of the second carrier 461, enabling the transport of the second carrier 461 for X-Y directional displacement.

依作業需求,第一輸送驅動器454及第二輸送驅動器464更可包含Z方向驅動源,以供驅動第一輸送器及第二輸送器作X-Y-Z方向位移,能夠交錯位移而輸送電子元件,不受限於本實施例。According to the operation requirements, the first conveyor driver 454 and the second conveyor driver 464 may further include a Z-direction drive source to drive the first conveyor and the second conveyor to perform X-Y-Z direction displacement, and can transport electronic components by staggered displacement, which is not limited to this embodiment.

移料機構設置至少一移料單元,移料單元以供於輸送機構移載電子元件。The material transfer mechanism is provided with at least one material transfer unit, and the material transfer unit is used for the conveying mechanism to transfer electronic components.

於本實施例,至少一移料單元包含第一移料單元471、第二移料單元472及第三移料單元473;第一移料單元471能夠作X-Z方向位移,以於供料裝置20、除污裝置60及第一輸送單元45移載待測之印刷電路板50;第二移料單元472能夠作X-Z方向位移,以於第一輸送單元45、第二輸送單元46及打印裝置70移載待測/已測之印刷電路板50;第三移料單元473能夠作Y-Z方向位移,以於打印裝置70及收料裝置30移載已測之印刷電路板50。In this embodiment, at least one material transfer unit includes a first material transfer unit 471, a second material transfer unit 472 and a third material transfer unit 473; the first material transfer unit 471 can be displaced in the X-Z direction to transfer the printed circuit board 50 to be tested to the feeding device 20, the decontamination device 60 and the first conveying unit 45; the second material transfer unit 472 can be displaced in the X-Z direction to transfer the printed circuit board 50 to be tested/tested to the first conveying unit 45, the second conveying unit 46 and the printing device 70; the third material transfer unit 473 can be displaced in the Y-Z direction to transfer the tested printed circuit board 50 to the printing device 70 and the receiving device 30.

請參閱圖6至圖11,測試裝置40之第一移料單元471於供料裝置20取出待測之印刷電路板50,並通過除污裝置60,將待測之印刷電路板50移載置放於第一輸送單元45之第一載具451的第一承置部4511,第一輸送單元45以第一動力源453驅動第一定位件452旋轉而壓夾待測之印刷電路板50定位。Please refer to Figures 6 to 11. The first material transfer unit 471 of the testing device 40 takes out the printed circuit board 50 to be tested from the feeding device 20, and transfers the printed circuit board 50 to be tested to the first receiving portion 4511 of the first carrier 451 of the first conveying unit 45 through the decontamination device 60. The first conveying unit 45 drives the first positioning member 452 to rotate with the first power source 453 to clamp the printed circuit board 50 to be tested for positioning.

第一輸送單元45以第一輸送驅動器454驅動第一載具451作Y方向位移,將待測之印刷電路板50輸送至第一取像單元43的第一取像器431與第二取像單元44的第二取像器441之間,令待測之印刷電路板50頂面的第一接點(圖未示出)相對於第一取像器431,以及令待測之印刷電路板50底面的第二接點(圖未示出)相對於第二取像器441,第一取像器431由上方朝向下方取像印刷電路板50的第一接點,第二取像器441則由下方朝向上方取像印刷電路板50的第二接點,第一取像器431及第二取像器441將取像資料傳輸至一處理器(圖未示出),由於第一取像器431及第二取像器441分別獨立裝配於第一承架432及第二承架442,並未裝配於測試機構或移料機構等,以避免受到振動影響,進而提高取像精準度。The first transport unit 45 drives the first carrier 451 to move in the Y direction by the first transport driver 454, and transports the printed circuit board 50 to be tested to between the first imager 431 of the first imaging unit 43 and the second imager 441 of the second imaging unit 44, so that the first contact point (not shown) on the top surface of the printed circuit board 50 to be tested is opposite to the first imager 431, and the second contact point (not shown) on the bottom surface of the printed circuit board 50 to be tested is opposite to the second imager 441. The first imager 431 captures an image of the first contact of the printed circuit board 50 from top to bottom, while the second imager 441 captures an image of the second contact of the printed circuit board 50 from bottom to top. The first imager 431 and the second imager 441 transmit the captured image data to a processor (not shown). Since the first imager 431 and the second imager 441 are independently mounted on the first support frame 432 and the second support frame 442, respectively, and are not mounted on the testing mechanism or the material transfer mechanism, they are protected from vibration, thereby improving imaging accuracy.

第一輸送單元45以第一輸送驅動器454驅動第一載具451作Y方向位移至第二移料單元472的下方,以供第二移料單元472取出待測之印刷電路板50,第一載具451離開,第二輸送單元46以第二輸送驅動器464驅動第二載具461作Y方向位移至第二移料單元472的下方,第二移料單元472將待測之印刷電路板50放置於第二載具461的第二承置部4611,第二輸送單元46以第二動力源463驅動第二定位件462旋轉而壓夾待測之印刷電路板50定位。The first transport unit 45 drives the first carrier 451 to move in the Y direction to the bottom of the second material transfer unit 472 with the first transport driver 454, so that the second material transfer unit 472 can take out the printed circuit board 50 to be tested. The first carrier 451 leaves, and the second transport unit 46 drives the second carrier 461 to move in the Y direction to the bottom of the second material transfer unit 472 with the second transport driver 464. The second material transfer unit 472 places the printed circuit board 50 to be tested on the second supporting part 4611 of the second carrier 461. The second transport unit 46 drives the second positioning member 462 to rotate with the second power source 463 to clamp the printed circuit board 50 to be tested and position it.

第二輸送單元46以第二輸送驅動器464驅動第二載具461作Y方向位移,將待測之印刷電路板50至第一測試單元41的第一測試器411及第二測試單元42的第二測試器421之間, 第一測試單元41依據第一取像器431之取像資料,利用第一測試調整器414微調第一測試器411之位置,並以第一架置器412帶動第一測試器411及第一測試機413由上方朝向下方作Z方向位移,使第一測試器411精準地電性接觸待測印刷電路板50的第一接點;第二測試單元42依據第二取像器441之取像資料,利用第二測試調整器424微調第二測試器421之位置,並以第二架置器422帶動第二測試器421及第二測試機423由下方朝向上方作Z方向位移 ,第二測試器421電性接觸待測印刷電路板50的第二接點;因此,第一測試器411及第二測試器421準確地對印刷電路板50執行測試作業,進而提高測試品質。 The second transport unit 46 drives the second carrier 461 to move in the Y direction by the second transport driver 464, and moves the printed circuit board 50 to be tested between the first tester 411 of the first test unit 41 and the second tester 421 of the second test unit 42. The first test unit 41 uses the first test adjuster 414 to fine-tune the position of the first tester 411 based on the image data captured by the first imager 431. The first mounter 412 drives the first tester 411 and the first tester 413 to move downward in the Z direction, ensuring that the first tester 411 makes precise electrical contact with the first contact of the printed circuit board 50 under test. The second test unit 42 uses the second test adjuster 424 to fine-tune the position of the second tester 421 based on the image data captured by the second imager 441. The second mounter 422 drives the second tester 421 and the second tester 423 to move upward in the Z direction. , the second tester 421 electrically contacts the second contact of the printed circuit board 50 under test; therefore, the first tester 411 and the second tester 421 accurately perform testing operations on the printed circuit board 50, thereby improving the test quality.

於測試完畢,第二輸送單元46以第二輸送驅動器464驅動第二載具461作Y方向位移,將已測之印刷電路板50作Y方向位移輸送至第二移料單元472之下方,並令第二定位件462釋放已測之印刷電路板50,以供第二移料單元472將已測之印刷電路板50由第二載具461移載至打印裝置70之承台72,以供打印器71對印刷電路板50執行打印作業,於打印完畢,依測試結果,第三移料單元473將已測之印刷電路板50移載至收料裝置30收置。After the test is completed, the second transport unit 46 drives the second carrier 461 to move in the Y direction with the second transport driver 464, and moves the tested printed circuit board 50 in the Y direction to the bottom of the second material transfer unit 472, and causes the second positioning member 462 to release the tested printed circuit board 50, so that the second material transfer unit 472 can transfer the tested printed circuit board 50 from the second carrier 461 to the base 72 of the printing device 70, so that the printer 71 can perform the printing operation on the printed circuit board 50. After printing is completed, according to the test results, the third material transfer unit 473 transfers the tested printed circuit board 50 to the receiving device 30 for storage.

機台10 供料裝置20 收料裝置30 測試裝置40 第一測試單元41 第一測試器411 第一架置器412 第一測試機413 第一測試調整器414 第一傳動架415 第二測試單元42 第二測試器421 第二架置器422 第二測試機423 第二測試調整器424 第二傳動架425 第一取像單元43 第一取像器431 第一承架432 第一檢知調整器433 第二取像單元44 第二取像器441 第二承架442 第二檢知調整器443 第一輸送單元45 第一載具451 第一承置部4511 第一定位件452 第一動力源453 第一輸送驅動器454 第二輸送單元46 第二載具461 第二承置部4611 第二定位件462 第二動力源463 第二輸送驅動器464 第一移料單元471 第二移料單元472 第三移料單元473 第一軸線L1 第二軸線L2 印刷電路板50 除污裝置60 打印裝置70 打印器71 承台72 Machine 10 Feeder 20 Receiving device 30 Testing device 40 First testing unit 41 First tester 411 First mounting device 412 First test machine 413 First test adjuster 414 First transmission frame 415 Second testing unit 42 Second tester 421 Second mounting device 422 Second test machine 423 Second test adjuster 424 Second transmission frame 425 First imaging unit 43 First imager 431 First support frame 432 First detection adjuster 433 Second imaging unit 44 Second imager 441 Second support frame 442 Second detection adjuster 443 First conveyor unit 45 First carrier 451 First support portion 4511 First positioning member 452 First power source 453 First conveyor drive 454 Second conveyor unit 46 Second carrier 461 Second receiving portion 4611 Second positioning member 462 Second power source 463 Second conveyor drive 464 First material transfer unit 471 Second material transfer unit 472 Third material transfer unit 473 First axis L1 Second axis L2 Printed circuit board 50 Decontamination device 60 Printing device 70 Printer 71 Platform 72

圖1:本發明作業機之各裝置配置圖。 圖2:測試裝置之測試機構與輸送機構之示意圖。 圖3:測試裝置之檢知機構與輸送機構之示意圖。 圖4:第一、二輸送單元之局部示意圖。 圖5:檢知機構與第一輸送單元之示意圖。 圖6至圖11:測試裝置之使用示意圖。 Figure 1: Layout of the various devices of the operating machine of the present invention. Figure 2: Schematic diagram of the testing mechanism and conveying mechanism of the testing device. Figure 3: Schematic diagram of the detection mechanism and conveying mechanism of the testing device. Figure 4: Partial schematic diagram of the first and second conveying units. Figure 5: Schematic diagram of the detection mechanism and the first conveying unit. Figures 6 to 11: Schematic diagrams of the testing device in use.

43:第一取像單元 43: First imaging unit

431:第一取像器 431: First Imager

432:第一承架 432: First Frame

433:第一檢知調整器 433: First Detection Regulator

44:第二取像單元 44: Second imaging unit

441:第二取像器 441: Second imager

442:第二承架 442: Second support frame

443:第二檢知調整器 443: Second Detection Regulator

45:第一輸送單元 45: First transport unit

451:第一載具 451: First Vehicle

453:第一動力源 453: The First Power Source

454:第一輸送驅動器 454: First conveyor drive

L2:第二軸線 L2: Second axis

Claims (8)

一種測試裝置,包含: 測試機構:沿第一軸線且相對配置第一測試單元及第二測試單元,該第一測試單元以第一架置器裝配第一測試器,該第二測試單元以第二架置器裝配第二測試器,該第一測試器及該第二測試器能夠分別電性接觸電子元件之第一接點及第二接點而作測試; 檢知機構:沿第二軸線且相對配置第一取像單元及第二取像單元,該第一取像單元以第一承架裝配第一取像器,該第二取像單元以第二承架裝配第二取像器,該第一取像器及該第二取像器能夠分別取像該電子元件之第一待檢部及第二待檢部以供檢查; 輸送機構:設置至少一輸送單元,包含第一輸送單元及第二輸送單元,該第一輸送單元包含第一輸送器及第一輸送驅動器,該第一輸送器配置第一載具及第一定位結構,該第一載具能夠承置該電子元件,該第一定位結構能夠定位或釋放該電子元件,該第一輸送驅動器能夠驅動該第一輸送器作至少一方向位移,該第二輸送單元包含第二輸送器及第二輸送驅動器,該第二輸送器配置第二載具及第二定位結構,該第二載具能夠承置該電子元件,該第二定位結構能夠定位或釋放該電子元件,該第二輸送驅動器能夠驅動該第二輸送器作至少一方向位移,該輸送單元之該第二輸送器能夠輸送該電子元件作至少一方向位移於該測試機構之該第一測試器及該第二測試器之間以供測試,以及該第一輸送器能夠輸送該電子元件作至少一方向位移於該檢知機構之該第一取像器及該第二取像器之間以供取像。 A testing device comprises: A testing mechanism comprising a first testing unit and a second testing unit disposed oppositely along a first axis, the first testing unit being mounted with a first mount to hold a first tester, and the second testing unit being mounted with a second mount to hold a second tester, respectively capable of electrically contacting a first contact and a second contact of an electronic component for testing; A detecting mechanism comprising a first imaging unit and a second imaging unit disposed oppositely along a second axis, the first imaging unit being mounted with a first imager on a first support, and the second imaging unit being mounted with a second imager on a second support, respectively capable of capturing images of a first portion to be inspected and a second portion to be inspected of the electronic component for inspection; Conveying mechanism: at least one conveying unit is provided, including a first conveying unit and a second conveying unit, the first conveying unit includes a first conveyor and a first conveying driver, the first conveyor is equipped with a first carrier and a first positioning structure, the first carrier can hold the electronic component, the first positioning structure can position or release the electronic component, the first conveying driver can drive the first conveyor to move in at least one direction, the second conveying unit includes a second conveyor and a second conveying driver, the second conveyor is equipped with a second carrier and a second positioning structure, The second carrier is capable of supporting the electronic component, the second positioning structure is capable of positioning or releasing the electronic component, the second transport driver is capable of driving the second transport to move in at least one direction, the second transport of the transport unit is capable of transporting the electronic component to move in at least one direction between the first tester and the second tester of the testing mechanism for testing, and the first transport is capable of transporting the electronic component to move in at least one direction between the first imager and the second imager of the detection mechanism for imaging. 如請求項1所述之測試裝置,其該測試機構之該第一測試單元設置 第一測試調整器,以供調整該第一測試器之位置,該第二測試單元設置第二測試調整器,以供調整該第二測試器之位置。 The test device of claim 1, wherein the first test unit of the test mechanism is provided with a first test adjuster for adjusting the position of the first tester, and the second test unit is provided with a second test adjuster for adjusting the position of the second tester. 如請求項2所述之測試裝置,其該第一測試單元之該第一測試調整 器設置第一測試機,該第一測試機電性連接該第一測試器,該第二測試單元之該第二測試調整器設置第二測試機,該第二測試機電性連接該第二測試器。 The test device as described in claim 2, wherein the first test adjuster of the first test unit is provided with a first test machine, the first test machine is electrically connected to the first test machine, and the second test adjuster of the second test unit is provided with a second test machine, the second test machine is electrically connected to the second test machine. 如請求項1所述之測試裝置,其該檢知機構之該第一取像單元設置 第一檢知調整器,以供調整該第一取像器之位置。 The test device as described in claim 1, wherein the first imaging unit of the detection mechanism is provided with a first detection adjuster for adjusting the position of the first imaging unit. 如請求項1所述之測試裝置,其該檢知機構之該第二取像單元設置 第二檢知調整器,以供調整該第二取像器之位置。 The test device as described in claim 1, wherein the second imaging unit of the detection mechanism is provided with a second detection adjuster for adjusting the position of the second imager. 如請求項1所述之測試裝置,其該測試機構與該檢知機構各別獨立 作動。 In the test device described in claim 1, the test mechanism and the detection mechanism operate independently. 如請求項1至6中任一項所述之測試裝置,更包含移料機構,該移料機構設置至少一移料單元,該移料單元以供於該輸送機構移載該電子元件。The testing device as described in any one of claims 1 to 6 further includes a material transfer mechanism, which is provided with at least one material transfer unit, and the material transfer unit is used to transfer the electronic component to the conveying mechanism. 一種作業機,包含: 機台; 供料裝置:配置於該機台,並設有至少一供料器,以供容置至少一待測之電子元件; 收料裝置:配置於該機台,並設有至少一收料器,以供容置至少一已測之該電子元件; 至少一如請求項1所述之測試裝置:配置於該機台,以供測試、取像及輸送至少一該電子元件; 中央控制裝置:以供控制及整合各裝置作動而執行自動化作業。 A processing machine comprises: a machine; a feeding device, disposed on the machine and equipped with at least one feeder for accommodating at least one electronic component to be tested; a receiving device, disposed on the machine and equipped with at least one receiver for accommodating at least one tested electronic component; at least one testing device as described in claim 1, disposed on the machine for testing, imaging, and transporting at least one electronic component; a central control device for controlling and integrating the operations of various devices to perform automated operations.
TW113112670A 2024-04-03 2024-04-03 Testing device and processing machine TWI891316B (en)

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US20050083038A1 (en) * 2002-05-07 2005-04-21 Atg Test Systems Gmbh & Co. Kg Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method
CN103245803A (en) * 2012-02-13 2013-08-14 日本电产理德株式会社 Alignment method of substrate inspection apparatus and substrate inspection apparatus
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