[go: up one dir, main page]

TWI890352B - Led pixel and method of fabricating the same - Google Patents

Led pixel and method of fabricating the same

Info

Publication number
TWI890352B
TWI890352B TW113108579A TW113108579A TWI890352B TW I890352 B TWI890352 B TW I890352B TW 113108579 A TW113108579 A TW 113108579A TW 113108579 A TW113108579 A TW 113108579A TW I890352 B TWI890352 B TW I890352B
Authority
TW
Taiwan
Prior art keywords
micro
backplane
led
disposed
leds
Prior art date
Application number
TW113108579A
Other languages
Chinese (zh)
Other versions
TW202504129A (en
Inventor
孫健峰
浩智 黃
徐立松
西法帕奇亞 卡納帕西亞潘
庫倫代夫盧 西瓦南丹
智勇 李
明偉 朱
納格B 帕逖邦德拉
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW202504129A publication Critical patent/TW202504129A/en
Application granted granted Critical
Publication of TWI890352B publication Critical patent/TWI890352B/en

Links

Classifications

    • H10W90/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/851Wavelength conversion means
    • H10H20/8514Wavelength conversion means characterised by their shape, e.g. plate or foil
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/852Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0361Manufacture or treatment of packages of wavelength conversion means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0362Manufacture or treatment of packages of encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/851Wavelength conversion means
    • H10H20/8511Wavelength conversion means characterised by their material, e.g. binder
    • H10H20/8512Wavelength conversion materials
    • H10H20/8513Wavelength conversion materials having two or more wavelength conversion materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/855Optical field-shaping means, e.g. lenses

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Led Device Packages (AREA)

Abstract

Described herein are devices and methods for creating micro-LED pixels including a backplane, at least three micro-LEDs disposed on the backplane, and subpixel isolation (SI) structures disposed on the backplane and between the micro¬LEDs, the SI structures defining wells of at least three subpixels. One or more of the wells has at least one of: a micro-LED gap, a backplane gap, or an SI structure indentation. Optionally, an isolation film is disposed on the backplane where the well may further include an isolation film indentation. The device further includes a sealant disposed in at least of one the gaps or the indentations and a color conversion material is disposed in the wells.

Description

LED像素及其製造方法LED pixel and manufacturing method thereof

本揭露案的實施例大體而言係關於LED像素及製造LED像素的方法。 Embodiments of the present disclosure generally relate to LED pixels and methods of manufacturing LED pixels.

發光二極體(light emitting diode,LED)面板使用LED陣列,其中單獨的LED提供單獨可控的像素元件。此種LED面板可以用於電腦、觸控面板裝置、個人數位助理(personal digital assistant,PDA)、蜂巢式電話、電視監視器及類似者。與有機發光二極體(OLED)相比,使用基於III-V代半導體技術的微米級LED(亦稱為微型LED)的LED面板將具有多種優勢,例如更高的能源效率、亮度和壽命,以及顯示堆疊中更少的材料層,此可簡化製造。然而,微型LED面板的製造存在挑戰。 Light-emitting diode (LED) panels use an array of LEDs, where individual LEDs provide individually controllable pixel elements. Such LED panels can be used in computers, touchscreen devices, personal digital assistants (PDAs), cellular phones, television monitors, and the like. LED panels using micron-sized LEDs based on III-V semiconductor technology (also known as micro-LEDs) offer several advantages over organic light-emitting diodes (OLEDs), such as higher energy efficiency, brightness, and lifetime, as well as fewer material layers in the display stack, which simplifies manufacturing. However, the manufacturing of micro-LED panels presents challenges.

在微型LED像素內,隔離結構形成在背板上以分隔每個微型LED像素。該等隔離結構的一種功能是將液態顏色轉換材料保持在每個微型LED上方。顏色轉換材料的洩漏可能會導致像素效能下降。因此,需要改進的微型LED像素和形成微型LED像素的方法。 Within a micro-LED pixel, isolation structures are formed on the backplane to separate each micro-LED pixel. One function of these isolation structures is to retain the liquid color-conversion material above each micro-LED. Leakage of the color-conversion material can lead to reduced pixel performance. Therefore, there is a need for improved micro-LED pixels and methods for forming micro-LED pixels.

本揭露案的實施例大體而言係關於LED像素及製造LED像素的方法。 Embodiments of the present disclosure generally relate to LED pixels and methods of manufacturing LED pixels.

在一個實施例中,揭示了一種裝置。該裝置包括背板、設置在背板上的至少三個微型LED、以及設置在背板上且位於微型LED之間的子像素隔離(subpixel isolation,SI)結構。該等SI結構限定至少三個子像素的阱。該等阱中的一或多個阱包括以下中的至少一者:在SI結構與背板之間的背板間隙、在SI結構與微型LED之間的微型LED間隙、或SI結構中的SI結構凹陷。該裝置進一步包括設置在一或多個阱的背板間隙、微型LED間隙、或SI結構凹陷中的至少一者中的密封劑,以及設置在阱中的顏色轉換材料。 In one embodiment, a device is disclosed. The device includes a backplane, at least three micro-LEDs disposed on the backplane, and a subpixel isolation (SI) structure disposed on the backplane and between the micro-LEDs. The SI structures define wells for at least three sub-pixels. One or more of the wells include at least one of: a backplane gap between the SI structure and the backplane, a micro-LED gap between the SI structure and the micro-LEDs, or an SI structure recess within the SI structure. The device further includes an encapsulant disposed within at least one of the backplane gap, the micro-LED gap, or the SI structure recess within the one or more wells, and a color conversion material disposed within the wells.

在一個實施例中,揭示了一種裝置。該裝置包括背板、設置在背板上的至少三個微型LED、設置在背板上的隔離膜、以及設置在隔離膜上且位於微型LED之間的子像素隔離(SI)結構,該等SI結構限定至少三個子像素的阱。該等阱中的一或多個阱具有以下中的至少一者:在SI結構與微型LED之間的微型LED間隙、SI結構中的SI結構凹陷、或隔離膜中的隔離膜凹陷。該裝置進一步包括設置在一或多個阱的微型LED間隙、SI結構凹陷或隔離膜凹陷中的至少一者中的密封劑,以及設置在該等阱中的顏色轉換材料。 In one embodiment, a device is disclosed. The device includes a backplane, at least three micro-LEDs disposed on the backplane, an isolation film disposed on the backplane, and a sub-pixel isolation (SI) structure disposed on the isolation film and between the micro-LEDs, the SI structures defining wells for at least three sub-pixels. One or more of the wells have at least one of the following: a micro-LED gap between the SI structure and the micro-LEDs, an SI structure recess in the SI structure, or an isolation film recess in the isolation film. The device further includes an encapsulant disposed in at least one of the micro-LED gap, the SI structure recess, or the isolation film recess in the one or more wells, and a color conversion material disposed in the wells.

在另一個實施例中,揭示了一種方法。該方法包括經由旋塗製程將密封劑沉積到裝置上。該裝置包括背板、設置在背板上的至少三個微型LED、以及設置在背板上且位於微型LED之間的子像素隔離(SI)結構,該等SI結 構限定至少三個子像素的阱。該等阱中的一或多個阱具有以下中的至少一者:在SI結構與背板之間的背板間隙、在SI結構與微型LED之間的微型LED間隙、或在該等SI結構中的至少一個SI結構中的SI結構凹陷。將密封劑沉積到背板間隙、微型LED間隙、或SI結構凹陷中的至少一者中。該方法進一步包括蒸發密封劑並固化密封劑,使得密封劑設置在一或多個阱的背板間隙、微型LED間隙、或SI結構凹陷中的至少一者中。 In another embodiment, a method is disclosed. The method includes depositing an encapsulant onto a device via a spin-on process. The device includes a backplane, at least three micro-LEDs disposed on the backplane, and sub-pixel isolation (SI) structures disposed on the backplane and between the micro-LEDs, the SI structures defining wells for the at least three sub-pixels. One or more of the wells have at least one of the following: a backplane gap between the SI structure and the backplane, a micro-LED gap between the SI structure and the micro-LEDs, or an SI structure recess in at least one of the SI structures. The encapsulant is deposited into at least one of the backplane gap, the micro-LED gap, or the SI structure recess. The method further includes evaporating the sealant and curing the sealant such that the sealant is disposed in at least one of a backplane gap, a micro-LED gap, or an SI structure recess of the one or more wells.

100:像素 100: Pixels

100a:第一子像素隔離結構佈置 100a: First sub-pixel isolation structure layout

100b:第二子像素隔離結構佈置 100b: Second sub-pixel isolation structure layout

102:背板 102: Back panel

104:微型LED 104: Micro LED

104a:微型LED 104a: Micro LED

104b:微型LED 104b: Micro LED

104c:微型LED 104c: Micro LED

104d:微型LED 104d: Micro LED

108:基板 108:Substrate

110:SI結構 110:SI structure

112:子像素 112: Sub-pixel

112a:第一子像素 112a: First subpixel

112b:第二子像素 112b: Second subpixel

112c:第三子像素 112c: Third subpixel

112d:第四子像素 112d: Fourth subpixel

113:阱 113: Trap

114:顏色轉換材料 114: Color Conversion Material

114a:紅色轉換材料 114a: Red Conversion Material

114b:藍色轉換材料 114b: Blue conversion material

114c:綠色轉換材料 114c: Green Conversion Material

120:隔離膜 120: Isolation film

122:封裝層 122: Packaging layer

126:鈍化層 126: Passivation layer

128:微型透鏡 128: Micro lens

130:密封劑 130: Sealant

132:微型LED間隙 132: Micro LED Gap

134:SI結構凹陷 134: SI structural depression

136:背板間隙 136: Back panel gap

138:隔離膜凹陷 138: Depression of the isolation membrane

200:方法 200:Method

210:操作 210: Operation

220:操作 220: Operation

230:操作 230: Operation

240:操作 240: Operation

為了能夠詳細理解本揭露的上述特徵,可以參考實施例對以上簡要概述的本揭露進行更特別的描述,實施例中的一些實施例在附圖中圖示。然而,應當注意的是,附圖僅圖示了本揭露案的典型實施例,因此不應被認為是對其範疇的限制,因為本揭露案可以允許其他同等有效的實施例。 To provide a more detailed understanding of the aforementioned features of the present disclosure, the present disclosure, briefly summarized above, will be described in more detail with reference to the accompanying embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings illustrate only typical embodiments of the present disclosure and are not to be considered limiting of its scope, as the present disclosure may admit to other equally effective embodiments.

第1A圖是根據實施例的具有第一子像素隔離結構佈置的像素的剖視圖。 FIG1A is a cross-sectional view of a pixel having a first sub-pixel isolation structure arrangement according to an embodiment.

第1B圖是根據實施例的具有第二子像素隔離結構佈置的像素的剖視圖。 FIG1B is a cross-sectional view of a pixel having a second sub-pixel isolation structure arrangement according to an embodiment.

第2圖是根據實施例的製造像素的方法的流程圖。 Figure 2 is a flow chart of a method for manufacturing pixels according to an embodiment.

第3A圖至第3H圖是在根據實施例的方法期間基板的示意性剖視圖。 Figures 3A to 3H are schematic cross-sectional views of a substrate during a method according to an embodiment.

本揭露案的實施例大體而言係關於LED像素及製造LED像素的方法。 Embodiments of the present disclosure generally relate to LED pixels and methods of manufacturing LED pixels.

微型LED經由顏色轉換材料轉換成不同的顏色。顏色轉換材料往往是被噴墨打印到每個微型LED上方的阱中的液體。每個阱都由隔離結構、背板、和微型LED構成。由於顏色轉換材料的液體性質,洩漏可能會導致顏色發射串擾。顏色發射串擾可能導致顯示色域減小、顏色對比度降低、以及像素均勻性降低。洩漏亦可能發生在像素隔離結構下方。此種形式的洩漏可能導致像素阱內顏色轉換材料不足。若沒有足夠的顏色轉換材料,則光子吸收率可能較低,從而導致最終產品中的色域減小。為了防止正常操作期間的顏色發射串擾和其他顯示問題,必須填充像素內每個阱的大小小於幾百奈米的間隙和凹陷。因此,需要一種密封微型LED阱的方法。 Micro-LEDs are converted to different colors by color conversion materials. The color conversion material is often a liquid that is inkjet-printed into a well above each micro-LED. Each well is composed of an isolation structure, a backplane, and a micro-LED. Due to the liquid nature of the color conversion material, leakage can cause color emission crosstalk. Color emission crosstalk can result in a reduction in the displayed color gamut, reduced color contrast, and reduced pixel uniformity. Leakage can also occur under the pixel isolation structure. This form of leakage can result in insufficient color conversion material within the pixel well. Without sufficient color conversion material, photon absorption can be low, resulting in a reduced color gamut in the final product. To prevent color emission crosstalk and other display issues during normal operation, the gaps and recesses within each well within the pixel, which are smaller than a few hundred nanometers, must be filled. Therefore, a method for sealing the micro-LED wells is needed.

第1A圖是具有第一子像素隔離結構佈置100a的像素100的剖視圖。第1B圖是具有第二子像素隔離結構佈置100b的像素100的剖視圖。像素100包括設置在背板102上的至少三個微型LED 104。背板設置在基板108上。基板108可以由透明材料製成。在一個實施例中,基板108可以是玻璃。 FIG1A is a cross-sectional view of a pixel 100 having a first subpixel isolation structure arrangement 100a. FIG1B is a cross-sectional view of a pixel 100 having a second subpixel isolation structure arrangement 100b. Pixel 100 includes at least three micro-LEDs 104 disposed on a backplane 102. The backplane is disposed on a substrate 108. Substrate 108 can be made of a transparent material. In one embodiment, substrate 108 can be glass.

微型LED 104與背板電路系統整合,使得每個微型LED 104可以被單獨尋址。例如,背板102的電路系統可包括薄膜電晶體(thin film transistor,TFT)主動矩 陣陣列以驅動微型LED 104,該TFT主動矩陣陣列具有用於每個微型LED的薄膜電晶體和儲存電容器(未圖示)、行位址線和列位址線、行驅動器和列驅動器。或者,微型LED 104可由背板102電路系統中的被動矩陣驅動。背板102可以使用習知的互補金屬氧化物矽(complementary metal-oxide silicon,CMOS)製程來製造。 The micro-LEDs 104 are integrated with the backplane circuitry so that each micro-LED 104 can be individually addressed. For example, the backplane 102 circuitry may include a thin film transistor (TFT) active matrix array to drive the micro-LEDs 104. The TFT active matrix array has a thin film transistor and storage capacitor (not shown) for each micro-LED, row and column address lines, and row and column drivers. Alternatively, the micro-LEDs 104 can be driven by a passive matrix within the backplane 102 circuitry. The backplane 102 can be fabricated using a conventional complementary metal-oxide silicon (CMOS) process.

在第一子像素隔離結構佈置100a中,如第1A圖所示,子像素隔離(SI)結構110設置在背板上。如第1B圖所示,第二子像素隔離結構佈置100b包括隔離膜120。隔離膜120圍繞微型LED 104。在第二子像素隔離結構佈置100b中,SI結構110設置在隔離膜120上。相鄰的SI結構110限定至少三個子像素112的相應阱113。該等子像素112包括:第一子像素112a,其具有設置在第一子像素112a的阱113中的紅色轉換材料114a;第二子像素112b,其具有設置在第二子像素112b的阱113中的藍色轉換材料114b;以及第三子像素112c,其具有設置在第三子像素112c的阱113中的綠色轉換材料114c。當第一子像素112a的微型LED 104a開啟時,紅色轉換材料114a將從微型LED 104a發射的光轉換為紅光。當第二子像素112b的微型LED 104b開啟時,藍色轉換材料114b將從微型LED 104b發射的光轉換為藍光。在一個實施例中,像素100包括第四子像素112d。如第1A圖和第1B圖所示,第四子像素112d不包括顏色轉換材料114,亦即, 第四子像素112d沒有顏色轉換層。在一些實施例中,如第1A圖和第1B圖所示,第四子像素112d包括犧牲材料。在其他實施例中,至少三個子像素112包括相同的顏色轉換材料114。隨後可以用顏色轉換材料114填充第四子像素112d。在一些實施例中,顏色轉換材料114可以是量子點。量子點可定大小以產生與不同顏色對應的波長。在一個實施例中,紅色轉換材料114a可具有大小為約6nm的量子點。藍色轉換材料114b可以具有大小為約2nm的量子點。綠色轉換材料114c可以具有大小為約4nm的量子點。在其他實施例中,顏色轉換材料114可以是奈米結構、光致發光材料、或有機物質。 In a first subpixel isolation structure arrangement 100a, as shown in FIG1A , a subpixel isolation (SI) structure 110 is disposed on a backplane. As shown in FIG1B , a second subpixel isolation structure arrangement 100b includes an isolation film 120. The isolation film 120 surrounds the micro-LEDs 104. In the second subpixel isolation structure arrangement 100b, the SI structures 110 are disposed on the isolation film 120. Adjacent SI structures 110 define corresponding wells 113 for at least three subpixels 112. The subpixels 112 include a first subpixel 112a having a red-converting material 114a disposed in a well 113 of the first subpixel 112a; a second subpixel 112b having a blue-converting material 114b disposed in the well 113 of the second subpixel 112b; and a third subpixel 112c having a green-converting material 114c disposed in the well 113 of the third subpixel 112c. When the micro-LED 104a of the first subpixel 112a is turned on, the red-converting material 114a converts light emitted from the micro-LED 104a into red light. When the micro-LED 104b of the second subpixel 112b is turned on, the blue-converting material 114b converts light emitted from the micro-LED 104b into blue light. In one embodiment, the pixel 100 includes a fourth subpixel 112d. As shown in Figures 1A and 1B, fourth subpixel 112d does not include color-conversion material 114; that is, fourth subpixel 112d lacks a color-conversion layer. In some embodiments, as shown in Figures 1A and 1B, fourth subpixel 112d includes a sacrificial material. In other embodiments, at least three subpixels 112 include the same color-conversion material 114. Fourth subpixel 112d may then be filled with color-conversion material 114. In some embodiments, color-conversion material 114 may be quantum dots. Quantum dots may be sized to produce wavelengths corresponding to different colors. In one embodiment, red-conversion material 114a may have quantum dots of approximately 6 nm in size. Blue-conversion material 114b may have quantum dots of approximately 2 nm in size. Green-conversion material 114c may have quantum dots of approximately 4 nm in size. In other embodiments, the color conversion material 114 may be a nanostructure, a photoluminescent material, or an organic substance.

SI結構110可以由光阻劑材料,諸如負性光阻劑材料或基於環氧基的阻劑製成。SI結構110內的SI結構凹陷134防止SI結構110與微型LED 104之間的密封。在第一子像素隔離結構佈置100a中,如第1A圖所示,SI結構凹陷134可以形成在SI結構110上的任何地方。背板間隙136可以形成在SI結構110與背板102之間。微型LED間隙132可以形成在微型LED 104與SI結構110之間。 The SI structure 110 can be made of a photoresist material, such as a negative photoresist material or an epoxy-based resist. An SI structure recess 134 within the SI structure 110 prevents sealing between the SI structure 110 and the micro-LEDs 104. In the first sub-pixel isolation structure arrangement 100a, as shown in FIG. 1A , the SI structure recess 134 can be formed anywhere on the SI structure 110. A backplane gap 136 can be formed between the SI structure 110 and the backplane 102. A micro-LED gap 132 can be formed between the micro-LEDs 104 and the SI structure 110.

在第二子像素隔離結構佈置100b中,如第1B圖所示,SI結構凹陷134可以形成在SI結構110上的任何地方。在某些實施例中,SI結構凹陷134可以形成在SI結構110與隔離膜120之間。隔離膜凹陷138可以形成在隔離膜120上的任何地方。微型LED間隙132可以形成在微型LED 104與隔離膜120之間。 In the second sub-pixel isolation structure arrangement 100b, as shown in FIG. 1B , the SI structure recess 134 can be formed anywhere on the SI structure 110. In some embodiments, the SI structure recess 134 can be formed between the SI structure 110 and the isolation film 120. The isolation film recess 138 can be formed anywhere on the isolation film 120. The micro-LED gap 132 can be formed between the micro-LED 104 and the isolation film 120.

在第一子像素隔離結構佈置100a中,如第1A圖所示,密封劑130設置在每個阱113內。密封劑130在隔離結構、背板102、和微型LED 104之間的每個阱113內形成密封。密封劑130藉由填充SI結構凹陷134、背板間隙136、和/或微型LED間隙132來形成密封。在一些實施例中,密封劑130的光學密度(optical density,OD)為約0ODU至約0.02ODU。密封劑130的OD允許光以與沒有密封劑130的情況下從像素100發射的光實質上相同的速度和波長從像素100發射。 In the first subpixel isolation structure arrangement 100a, as shown in FIG. 1A , a sealant 130 is disposed within each well 113. The sealant 130 forms a seal within each well 113 between the isolation structure, the backplane 102, and the micro-LEDs 104. The sealant 130 forms a seal by filling the SI structure recess 134, the backplane gap 136, and/or the micro-LED gap 132. In some embodiments, the optical density (OD) of the sealant 130 is approximately 0 ODU to approximately 0.02 ODU. The OD of the sealant 130 allows light to be emitted from the pixel 100 at substantially the same speed and wavelength as light emitted from the pixel 100 without the sealant 130.

在第二子像素隔離結構佈置100b中,如第1B圖所示,密封劑130設置在每個阱113內。密封劑130在SI結構110、隔離膜120、背板102、和微型LED 104之間的每個阱113內形成密封。密封劑130藉由填充SI結構凹陷134、隔離膜凹陷138或微型LED間隙132來形成密封。在一些實施例中,密封劑130的光學密度(optical density,OD)為約0ODU至約0.02ODU。密封劑130的OD允許光以與沒有密封劑130的情況下從像素100發射的光實質上相同的速度和波長從像素100發射。在一個實施例中,隔離膜120包括基於聚合物的膠、基於環氧基的膠、丙烯酸膠,或其組合。在某些實施例中,基於環氧基的膠是兩部分或一體式體系。該兩部分體系包含環氧樹脂和硬化劑。將環氧樹脂與硬化劑混合。該一體式體系包括現成的基於環氧基的膠。 In the second sub-pixel isolation structure arrangement 100b, as shown in FIG. 1B , a sealant 130 is disposed within each well 113. The sealant 130 forms a seal within each well 113 between the SI structure 110, the isolation film 120, the backplane 102, and the micro-LEDs 104. The sealant 130 forms a seal by filling the SI structure recess 134, the isolation film recess 138, or the micro-LED gap 132. In some embodiments, the optical density (OD) of the sealant 130 is approximately 0 ODU to approximately 0.02 ODU. The OD of the sealant 130 allows light to be emitted from the pixel 100 at substantially the same speed and wavelength as light emitted from the pixel 100 without the sealant 130. In one embodiment, the isolation film 120 includes a polymer-based adhesive, an epoxy-based adhesive, an acrylic adhesive, or a combination thereof. In certain embodiments, the epoxy-based adhesive is a two-part or one-part system. The two-part system includes an epoxy resin and a hardener. The epoxy resin and hardener are mixed. The one-part system includes an off-the-shelf epoxy-based adhesive.

在一個實施例中,密封劑130包括環氧樹脂、丙烯酸類、和表面活性劑。在一些實施例中,密封劑130可以是基於丙烯酸的多官能交聯劑,諸如己二醇二丙烯酸酯(hexanediaol diacrylate,HDDA)、1,4-丁二醇二甲基丙烯酸酯、二氨基甲酸酯二甲基丙烯酸酯(Diurethane Dimethacrylate,DUDMA)、1,4-伸苯基二丙烯酸酯、聚乙二醇二甲基丙烯酸酯、DEAA(二乙基丙烯醯胺)、三羥甲基丙烷三丙烯酸酯(Trimethylolpropane triacrylate,TMPTA)、二季戊四醇五丙烯酸酯(四丙烯酸酯、五丙烯酸酯、六丙烯酸酯的混合物),或其任意組合。在其他實施例中,密封劑可以是基於環氧基的或基於其他固化化學物質。在一個實施例中,密封劑130包括己二醇二丙烯酸酯(HDDA)、三羥甲基丙烷三丙烯酸酯(TMPTA)、(2,4,6-三甲基苯甲醯基)-苯基次膦酸乙酯(TPO-L)、和表面活性劑。 In one embodiment, sealant 130 includes an epoxy resin, an acrylic acid, and a surfactant. In some embodiments, sealant 130 can be an acrylic-based multifunctional crosslinker, such as hexanediol diacrylate (HDDA), 1,4-butanediol dimethacrylate, diurethane dimethacrylate (DUDMA), 1,4-phenylene diacrylate, polyethylene glycol dimethacrylate, DEAA (diethylacrylamide), trimethylolpropane triacrylate (TMPTA), dipentaerythritol pentaacrylate (a mixture of tetraacrylates, pentaacrylates, and hexaacrylates), or any combination thereof. In other embodiments, the sealant can be epoxy-based or based on other curing chemistries. In one embodiment, the sealant 130 includes hexanediol diacrylate (HDDA), trihydroxymethylpropane triacrylate (TMPTA), ethyl (2,4,6-trimethylbenzyl)-phenylphosphinate (TPO-L), and a surfactant.

封裝層122設置在SI結構110和子像素112上方。如第1A圖和第1B圖所示,第一子像素隔離結構佈置100a和第二子像素隔離結構佈置100b包括設置在封裝層122上和子像素112的每個阱113上方的微型透鏡128。鈍化層126設置在微型透鏡128上。微型透鏡128可以由阻劑材料,例如阻擋紫外(UV)光的光阻劑材料製成。在一些實施例(未圖示)中,像素100可以被結構化為沒有微型透鏡128。 An encapsulation layer 122 is disposed over the SI structure 110 and the sub-pixels 112. As shown in FIG1A and FIG1B , the first sub-pixel isolation structure arrangement 100a and the second sub-pixel isolation structure arrangement 100b include a microlens 128 disposed on the encapsulation layer 122 and over each well 113 of the sub-pixel 112. A passivation layer 126 is disposed over the microlens 128. The microlens 128 can be made of a resist material, such as a photoresist material that blocks ultraviolet (UV) light. In some embodiments (not shown), the pixel 100 can be structured without the microlens 128.

第2圖是製造像素100的方法200的流程圖。根據實施例,方法200包括在阱113內施加密封劑130。第3A圖至第3E圖是根據實施例的在方法200期間具有第二子像素隔離結構佈置100b的像素100的示意性剖視圖。第3F圖是根據實施例的在方法200期間具有第一子像素隔離結構佈置100a的像素100的示意性剖視圖。 FIG. 2 is a flow chart of a method 200 for manufacturing pixel 100. According to an embodiment, method 200 includes applying a sealant 130 within well 113. FIG. 3A through FIG. 3E are schematic cross-sectional views of pixel 100 having a second subpixel isolation structure arrangement 100 b during method 200 according to an embodiment. FIG. 3F is a schematic cross-sectional view of pixel 100 having a first subpixel isolation structure arrangement 100 a during method 200 according to an embodiment.

本文所述的方法200適用於第一子像素隔離結構佈置100a和第二子像素隔離結構佈置100b兩者,因為隔離膜120是可選的。第3F圖是根據第一子像素隔離結構佈置100a的方法200完成之後的像素100的示意性剖視圖。 The method 200 described herein is applicable to both the first sub-pixel isolation structure arrangement 100a and the second sub-pixel isolation structure arrangement 100b because the isolation film 120 is optional. FIG3F is a schematic cross-sectional view of the pixel 100 after the method 200 for the first sub-pixel isolation structure arrangement 100a is completed.

第3A圖是操作210之前的基板108的示意性剖視圖。第3A圖描繪第二子像素隔離結構佈置100b的背板102。基板108包括背板102、微型LED 104、隔離膜120、SI結構110、隔離膜凹陷138、SI結構凹陷134、微型LED間隙132、和阱113。如第3A圖所示,SI結構凹陷134是若在SI結構110與隔離膜120之間存在分層時發生的凹陷的實例。SI結構110與隔離膜120之間的分層導致SI結構凹陷134跨SI結構110延伸,其中SI結構110接觸隔離膜120。在其他實施例中,SI結構凹陷134可以位於SI結構110上的任何地方,並且SI結構凹陷134可以部分地延伸穿過SI結構110。隔離膜120阻擋UV光以增強色域。隔離膜120牢固地保持微型LED 104以提高微型LED傳質產率。 FIG3A is a schematic cross-sectional view of substrate 108 prior to operation 210. FIG3A depicts backplane 102 of second subpixel isolation structure arrangement 100b. Substrate 108 includes backplane 102, micro-LEDs 104, isolation film 120, SI structure 110, isolation film recess 138, SI structure recess 134, micro-LED gap 132, and well 113. As shown in FIG3A, SI structure recess 134 is an example of a recess that occurs when delamination occurs between SI structure 110 and isolation film 120. Delamination between SI structure 110 and isolation film 120 causes SI structure recess 134 to extend across SI structure 110, where SI structure 110 contacts isolation film 120. In other embodiments, the SI structure recess 134 can be located anywhere on the SI structure 110, and the SI structure recess 134 can partially extend through the SI structure 110. The isolation film 120 blocks UV light to enhance the color gamut. The isolation film 120 securely holds the micro-LEDs 104 to improve micro-LED mass transfer yield.

在操作210處,將密封劑130沉積在像素100上方。密封劑130在操作210期間作為液體沉積。作為液體,密封劑130能夠在阱113內擴散並填充微型LED間隙132、隔離膜凹陷138、和SI結構凹陷134。 At operation 210 , sealant 130 is deposited over pixel 100 . Sealant 130 is deposited as a liquid during operation 210 . As a liquid, sealant 130 is able to diffuse within well 113 and fill micro-LED gap 132 , isolation film recess 138 , and SI structure recess 134 .

如第3B圖所示,在一個實施例中,密封劑130經由旋塗製程沉積。密封劑130沉積在SI結構110和微型LED 104上。在實施例中,密封劑130可以在基板108靜止或自旋的同時沉積到基板108上。在沉積密封劑130之後,基板108的後續自旋速率是約500rpm和約3000rpm。當基板108自旋時,密封劑130將密封劑130分配到每個阱113中。在每個阱113內,密封劑130填充SI結構凹陷134、隔離膜凹陷138或微型LED間隙132。 As shown in FIG. 3B , in one embodiment, sealant 130 is deposited via a spin-on process. Sealant 130 is deposited on SI structure 110 and micro-LEDs 104. In one embodiment, sealant 130 can be deposited onto substrate 108 while it is stationary or spinning. After depositing sealant 130, substrate 108 is subsequently spun at a rate of approximately 500 rpm and approximately 3000 rpm. As substrate 108 spins, sealant 130 is dispensed into each well 113. Within each well 113, sealant 130 fills SI structure recess 134, isolation film recess 138, or micro-LED gap 132.

在一些實施例中,當經由旋塗製程沉積密封劑130時,沉積環境可以處於環境溫度。密封劑130可以在惰性環境中沉積。密封劑可以在黃光環境中沉積。在一些實施例中,旋塗製程可以進行達設定的時間段。在某些實施例中,例如,設定的時間段可以是30秒。在其他實施例中,可以進行旋塗製程直到密封劑130在微型LED 104上方的厚度是約2μm和約3μm。 In some embodiments, when depositing encapsulant 130 via a spin-on process, the deposition environment can be at ambient temperature. Encapsulant 130 can be deposited in an inert environment. Encapsulant can be deposited in a yellow light environment. In some embodiments, the spin-on process can be performed for a set time period. In some embodiments, the set time period can be, for example, 30 seconds. In other embodiments, the spin-on process can be performed until the thickness of encapsulant 130 over micro-LEDs 104 is between approximately 2 μm and approximately 3 μm.

如第3C圖所示,在另一實施例中,密封劑130經由噴墨打印製程沉積。密封劑130可以沉積在每個阱113內的SI結構110之間、背板102、隔離膜120和微型LED 104上。當經由噴墨打印沉積密封劑130時,密封劑130僅沉積到阱113中,而不沉積到SI結構110的頂部上。在 每個阱113內,密封劑130沉積到SI結構凹陷134、隔離膜凹陷138、或微型LED間隙132中。 As shown in FIG. 3C , in another embodiment, sealant 130 is deposited via an inkjet printing process. Sealant 130 can be deposited between SI structures 110 within each well 113, on backplane 102, isolation film 120, and micro-LEDs 104. When sealant 130 is deposited via inkjet printing, sealant 130 is deposited only within wells 113 and not on top of SI structures 110. Within each well 113, sealant 130 is deposited into SI structure recesses 134, isolation film recesses 138, or micro-LED gaps 132.

在一些實施例中,當經由噴墨打印製程沉積密封劑130時,沉積環境可以處於環境溫度。在某些實施例中,沉積環境可以是比環境溫度高約5℃或比環境溫度低約5℃的溫度。密封劑130可以在惰性環境中沉積。在一些實施例中,可以基於密封劑130或顏色轉換材料114的材料來修改波形和電壓。密封劑130可以基於其表面張力和阱表面的潤濕條件來選擇。密封劑130的黏度以厘泊為單位量測,並且在噴墨打印期間為約5cp至約20cp。更準確地,密封劑130的黏度是約5cp至約15cp。在一些實施例中,噴墨打印製程可以進行達設定的時間段。例如,在某些實施例中,設定的時間段可以在約10秒與約20秒之間。在其他實施例中,可以進行噴墨打印製程,直到密封劑130在微型LED 104上方的厚度是約2μm和約3μm。在一些實施例中,可以將添加劑添加到密封劑130中以降低用於噴墨打印的密封劑130的黏度。在一些實施例中,添加劑可以是低黏度溶劑。在一些實施例中,添加劑可以是甲苯、二甲苯、丙二醇甲醚乙酸酯、1,4-二[口咢]烷、二甲基甲醯胺,或其任意組合。 In some embodiments, when the sealant 130 is deposited via an inkjet printing process, the deposition environment can be at ambient temperature. In certain embodiments, the deposition environment can be a temperature that is about 5°C higher than the ambient temperature or about 5°C lower than the ambient temperature. The sealant 130 can be deposited in an inert environment. In some embodiments, the waveform and voltage can be modified based on the material of the sealant 130 or the color conversion material 114. The sealant 130 can be selected based on its surface tension and the wetting conditions of the well surface. The viscosity of the sealant 130 is measured in centipoise and is about 5 cp to about 20 cp during inkjet printing. More precisely, the viscosity of the sealant 130 is about 5 cp to about 15 cp. In some embodiments, the inkjet printing process can be performed for a set time period. For example, in some embodiments, the set time period can be between approximately 10 seconds and approximately 20 seconds. In other embodiments, the inkjet printing process can be performed until the thickness of the encapsulant 130 above the micro-LEDs 104 is between approximately 2 μm and approximately 3 μm. In some embodiments, an additive can be added to the encapsulant 130 to reduce the viscosity of the encapsulant 130 for inkjet printing. In some embodiments, the additive can be a low-viscosity solvent. In some embodiments, the additive can be toluene, xylene, propylene glycol methyl ether acetate, 1,4-dioxane, dimethylformamide, or any combination thereof.

在操作220處,執行蒸發製程。如第3D圖所示,經由蒸發移除微型LED 104上方的密封劑130,與此同時密封劑130保留在隔離膜凹陷138、SI結構凹陷134和微型LED間隙132中。微型LED 104上方和SI結構110側面 上的密封劑130的厚度可以在蒸發製程期間減小。蒸發製程可以執行達約1min和約10min。在一些實施例中,蒸發製程的時間可以基於在操作210期間沉積的密封劑的厚度而變化。在其他實施例中,可以執行蒸發製程,直到微型LED 104的中心上方的密封劑130被移除或者微型LED的中心處的密封劑130的厚度是約0μm和約5μm。或者更精確地,約0μm至約1.5μm。或者更精確地,0μm和1μm。或者更精確地,約0μm至約0.5μm。蒸發製程打開用於顏色轉換材料114的阱113。 At operation 220, an evaporation process is performed. As shown in FIG. 3D , the encapsulant 130 above the micro-LEDs 104 is removed by evaporation, while remaining within the isolation film recess 138, the SI structure recess 134, and the micro-LED gap 132. The thickness of the encapsulant 130 above the micro-LEDs 104 and on the sides of the SI structure 110 may decrease during the evaporation process. The evaporation process may be performed for between approximately 1 minute and approximately 10 minutes. In some embodiments, the duration of the evaporation process may vary based on the thickness of the encapsulant deposited during operation 210. In other embodiments, the evaporation process can be performed until the encapsulant 130 above the center of the micro-LED 104 is removed or the thickness of the encapsulant 130 at the center of the micro-LED is between about 0 μm and about 5 μm. Or, more precisely, between about 0 μm and about 1.5 μm. Or, more precisely, between 0 μm and 1 μm. Or, more precisely, between about 0 μm and about 0.5 μm. The evaporation process opens a well 113 for the color conversion material 114.

蒸發製程可以在環境溫度下執行。在一些實施例中,可以使用更高的溫度來加速蒸發製程。在蒸發期間,像素100可以保持在惰性環境中。可以使用惰性化學物質,諸如氮氣。在一些實施例中,可利用惰性錯流來加速蒸發。 The evaporation process can be performed at ambient temperature. In some embodiments, a higher temperature can be used to accelerate the evaporation process. During evaporation, the pixel 100 can be maintained in an inert environment. An inert chemical, such as nitrogen, can be used. In some embodiments, an inert cross-flow can be utilized to accelerate evaporation.

在操作230中固化密封劑130。第3E圖是具有第二子像素隔離結構佈置100b的像素100在固化之後的剖視圖。操作230的固化製程使密封劑130硬化。固化密封劑130產生了防漏阱113。另外,固化密封劑130防止在顏色轉換材料的沉積期間顏色轉換材料被密封劑130污染。此可以減少或消除顏色發射串擾,從而導致改善的顯示色域、顏色對比度、和顏色均勻性。 In operation 230 , sealant 130 is cured. FIG. 3E is a cross-sectional view of pixel 100 having second subpixel isolation structure arrangement 100 b after curing. The curing process of operation 230 hardens sealant 130 . Curing sealant 130 creates leak-proof wells 113 . Furthermore, curing sealant 130 prevents contamination of the color conversion material by sealant 130 during deposition of the color conversion material. This can reduce or eliminate color emission crosstalk, resulting in improved display color gamut, color contrast, and color uniformity.

第3F圖是具有第一子像素隔離結構佈置100a的像素100在固化之後的剖視圖。密封劑130沉積到背板間隙136中。操作230的固化製程使密封劑130硬化。固化密封 劑130產生了防漏阱113。另外,固化密封劑130防止在顏色轉換材料的沉積期間顏色轉換材料被密封劑130污染。此可以減少或消除顏色發射串擾,從而導致改善的顯示色域、顏色對比度、和顏色均勻性。 FIG3F is a cross-sectional view of pixel 100 with first subpixel isolation structure arrangement 100a after curing. Sealant 130 is deposited into backplane gap 136. The curing process of operation 230 hardens sealant 130. Curing sealant 130 creates leak-proof wells 113. Furthermore, curing sealant 130 prevents contamination of the color-converting material by sealant 130 during deposition. This can reduce or eliminate color emission crosstalk, resulting in improved display color gamut, color contrast, and color uniformity.

固化可以經由UV固化來執行。在一個實施例中,UV固化經由頂部固化進行。在應用頂部固化製程的實施例中,UV固化可以利用位於像素100上方的泛光UV源。在另一實施例中,UV固化經由自下而上固化進行。在應用自下而上固化製程的實施例中,UV固化可以藉由打開每個阱113內的微型LED 104來完成。可以利用自下而上固化來更有效地到達SI結構凹陷134、隔離膜凹陷138、微型LED間隙132和背板間隙136內的密封劑130。在固化期間,像素100可以保持在惰性環境中。可以使用惰性化學物質,諸如氮氣。在一些實施例中,環境中的氧氣可以保持在小於30ppm。 Curing can be performed via UV curing. In one embodiment, UV curing is performed via top-down curing. In embodiments employing a top-down curing process, UV curing can utilize a flood UV source positioned above the pixel 100. In another embodiment, UV curing is performed via bottom-up curing. In embodiments employing a bottom-up curing process, UV curing can be accomplished by opening the micro-LEDs 104 within each well 113. Bottom-up curing can be utilized to more efficiently reach the sealant 130 within the SI structure recess 134, the isolation film recess 138, the micro-LED gap 132, and the backplane gap 136. During curing, the pixel 100 can be maintained in an inert environment. An inert chemical, such as nitrogen, can be used. In some embodiments, the oxygen content in the environment can be maintained at less than 30 ppm.

在操作240處,將顏色轉換材料114沉積到阱113中,如第3G圖和第3H圖所示。第3G圖是具有第一子像素隔離結構佈置100a的像素100在固化之後的剖視圖。第3H圖是具有第二子像素隔離結構佈置100b的像素100在固化之後的剖視圖。如第3G圖和第3H圖所示,紅色轉換材料114a沉積在阱113中。然後固化顏色轉換材料114。重複操作240,直到顏色轉換材料114沉積在第二子像素112b的阱113和第三子像素112c的阱113中。例如,可以將藍色轉換材料114b沉積在第二子像素112b的阱113中並固 化該藍色轉換材料114b,並且可以將綠色轉換材料114c沉積在第三子像素112c的阱113中並固化綠色轉換材料114c。藉由打開微型LED或藉由暴露於UV光來固化顏色轉換材料114。隨後將封裝層122設置在SI結構110和子像素112的頂表面上方。在某些實施例中,微型透鏡128可以設置在封裝層122上以及每個阱上方。在其他實施例中,鈍化層126可以設置在微型透鏡128上。像素100可以經歷進一步的處理以形成如第1A圖或第1B圖所示的像素100,以包括封裝層122、微型透鏡128、和鈍化層126。 At operation 240, color conversion material 114 is deposited into well 113, as shown in Figures 3G and 3H. Figure 3G is a cross-sectional view of pixel 100 having first subpixel isolation structure arrangement 100a after curing. Figure 3H is a cross-sectional view of pixel 100 having second subpixel isolation structure arrangement 100b after curing. As shown in Figures 3G and 3H, red color conversion material 114a is deposited into well 113. Color conversion material 114 is then cured. Operation 240 is repeated until color conversion material 114 is deposited into well 113 of second subpixel 112b and well 113 of third subpixel 112c. For example, blue-converting material 114b can be deposited and cured in well 113 of second subpixel 112b, and green-converting material 114c can be deposited and cured in well 113 of third subpixel 112c. Color-converting material 114 is cured by turning on the micro-LEDs or by exposing them to UV light. An encapsulation layer 122 is then positioned over the SI structure 110 and the top surface of subpixels 112. In some embodiments, a microlens 128 can be positioned over encapsulation layer 122 and over each well. In other embodiments, a passivation layer 126 can be positioned over microlenses 128. The pixel 100 may undergo further processing to form the pixel 100 shown in FIG. 1A or FIG. 1B to include an encapsulation layer 122, a microlens 128, and a passivation layer 126.

儘管前面針對本揭露案的實施例,但是在不脫離本揭露案的基本範疇的情況下可以設計本揭露案的其他和進一步實施例,並且本揭露案的範疇由所附申請專利範圍確定。 While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope of the present disclosure, and the scope of the present disclosure is determined by the appended patent claims.

100:像素 100a:第一子像素隔離結構佈置 102:背板 104:微型LED 104a:微型LED 104b:微型LED 104c:微型LED 104d:微型LED 108:基板 110:SI結構 112:子像素 112a:第一子像素 112b:第二子像素 112c:第三子像素 112d:第四子像素 113:阱 114:顏色轉換材料 114a:紅色轉換材料 114b:藍色轉換材料 114c:綠色轉換材料 122:封裝層 126:鈍化層 128:微型透鏡 130:密封劑 132:微型LED間隙 134:SI結構凹陷 100: Pixel 100a: First sub-pixel isolation structure layout 102: Backplane 104: Micro-LED 104a: Micro-LED 104b: Micro-LED 104c: Micro-LED 104d: Micro-LED 108: Substrate 110: SI structure 112: Sub-pixels 112a: First sub-pixel 112b: Second sub-pixel 112c: Third sub-pixel 112d: Fourth sub-pixel 113: Well 114: Color conversion material 114a: Red conversion material 114b: Blue conversion material 114c: Green conversion material 122: Encapsulation layer 126: Passivation layer 128: Micro-lens 130: Sealant 132: Micro-LED gap 134: SI structure depression

Claims (20)

一種LED像素,包括: 一背板; 至少三個微型LED,設置在該背板上; 子像素隔離(SI)結構,設置在該背板上且位於該等微型LED之間,該等SI結構限定至少三個子像素的阱,其中該等阱中的一或多個阱具有以下中的至少一者: 一背板間隙,在該等SI結構與該背板之間; 一微型LED間隙,在該等SI結構與該等微型LED之間;或 一SI結構凹陷,在該等SI結構中的至少一個SI結構中; 一密封劑,設置在一或多個阱的該背板間隙、該微型LED間隙或該SI結構凹陷中的至少一者中;以及 一顏色轉換材料,設置在該等阱中。 An LED pixel comprises: a backplane; at least three micro-LEDs disposed on the backplane; subpixel isolation (SI) structures disposed on the backplane and between the micro-LEDs, the SI structures defining wells for at least three sub-pixels, wherein one or more of the wells have at least one of the following: a backplane gap between the SI structures and the backplane; a micro-LED gap between the SI structures and the micro-LEDs; or an SI structure recess within at least one of the SI structures; an encapsulant disposed in at least one of the backplane gap, the micro-LED gap, or the SI structure recess within one or more of the wells; and a color conversion material disposed within the wells. 如請求項1所述之LED像素,進一步包括: 一封裝層,設置在該等SI結構和該等子像素上方; 微型透鏡,設置在該封裝層上方和該等子像素的該等阱的每個阱上方;以及 一鈍化層,設置在該等微型透鏡上。 The LED pixel of claim 1 further comprises: an encapsulation layer disposed over the SI structures and the sub-pixels; a microlens disposed over the encapsulation layer and over each of the wells of the sub-pixels; and a passivation layer disposed over the microlenses. 如請求項1所述之LED像素,其中該密封劑的一厚度是約0 μm至約5 μm。The LED pixel of claim 1, wherein the encapsulant has a thickness of about 0 μm to about 5 μm. 如請求項1所述之LED像素,其中該等子像素中的至少三個子像素具有一不同的顏色轉換材料。The LED pixel of claim 1, wherein at least three of the sub-pixels have a different color conversion material. 如請求項1所述之LED像素,其中該密封劑的一光學密度是0 ODU。The LED pixel of claim 1, wherein the encapsulant has an optical density of 0 ODU. 如請求項1所述之LED像素,其中該密封劑包含一環氧樹脂、一丙烯酸類、和一表面活性劑。The LED pixel of claim 1, wherein the sealant comprises an epoxy resin, an acrylic, and a surfactant. 一種LED像素,包括: 一背板; 至少三個微型LED,設置在該背板上; 一隔離膜,設置在該背板上; 子像素隔離(SI)結構,設置在該隔離膜上且位於該等微型LED之間,該等SI結構限定至少三個子像素的阱,其中該等阱中的一或多個阱具有以下中的至少一者: 一微型LED間隙,在該等SI結構與該等微型LED之間; 一SI結構凹陷,在該等SI結構中的至少一個SI結構中;或 一隔離膜凹陷,在該隔離膜中; 一密封劑,設置在一或多個阱的該微型LED間隙、該SI結構凹陷、或該隔離膜凹陷中的至少一者中;以及 一顏色轉換材料,設置在該等阱中。 An LED pixel comprises: a backplane; at least three micro-LEDs disposed on the backplane; an isolation film disposed on the backplane; a sub-pixel isolation (SI) structure disposed on the isolation film and between the micro-LEDs, the SI structures defining wells for at least three sub-pixels, wherein one or more of the wells has at least one of the following: a micro-LED gap between the SI structures and the micro-LEDs; an SI structure recess in at least one of the SI structures; or an isolation film recess in the isolation film; an encapsulant disposed in at least one of the micro-LED gap, the SI structure recess, or the isolation film recess in one or more wells; and a color conversion material disposed in the wells. 如請求項7所述之LED像素,進一步包括: 一封裝層,設置在該等SI結構和該等子像素上方; 微型透鏡,設置在該封裝層上方和該等子像素的該等阱的每個阱上方;以及 一鈍化層,設置在該等微型透鏡上。 The LED pixel of claim 7 further comprises: an encapsulation layer disposed over the SI structures and the sub-pixels; a microlens disposed over the encapsulation layer and over each of the wells of the sub-pixels; and a passivation layer disposed over the microlenses. 如請求項7所述之LED像素,其中該隔離膜包括一基於聚合物的膠。The LED pixel of claim 7, wherein the isolation film comprises a polymer-based glue. 如請求項7所述之LED像素,其中該密封劑的一厚度是約0 μm和約5 μm。The LED pixel of claim 7, wherein a thickness of the encapsulant is between about 0 μm and about 5 μm. 如請求項7所述之LED像素,其中該等子像素中的至少三個子像素具有一不同的顏色轉換材料。An LED pixel as described in claim 7, wherein at least three of the sub-pixels have a different color conversion material. 如請求項7所述之LED像素,其中該密封劑的一光學密度是0 ODU。The LED pixel of claim 7, wherein the encapsulant has an optical density of 0 ODU. 如請求項7所述之LED像素,其中該密封劑包含一環氧樹脂、一丙烯酸類、和一表面活性劑。The LED pixel of claim 7, wherein the encapsulant comprises an epoxy resin, an acrylic, and a surfactant. 一種製造一LED像素的方法,包括以下步驟: 經由一旋塗製程將一密封劑沉積到一裝置上,該裝置包括: 一背板; 至少三個微型LED,設置在該背板上; 子像素隔離(SI)結構,設置在該背板上且位於該等微型LED之間,該等SI結構限定至少三個子像素的阱,其中該等阱中的一或多個阱具有以下中的至少一者: 一背板間隙,在該SI結構與該背板之間; 一微型LED間隙,在該等SI結構與該等微型LED之間;或 一SI結構凹陷,在該等SI結構中的至少一個SI結構中; 其中將該密封膠沉積到該背板間隙、該微型LED間隙、或該SI結構凹陷中; 蒸發該密封劑;以及 固化該密封劑,使得該密封劑設置在一或多個阱的該背板間隙、該微型LED間隙或該SI結構凹陷中的至少一者中。 A method for manufacturing an LED pixel comprises the following steps: Depositing an encapsulant onto a device via a spin-on process, the device comprising: A backplane; At least three micro-LEDs disposed on the backplane; Subpixel isolation (SI) structures disposed on the backplane and between the micro-LEDs, the SI structures defining wells for at least three sub-pixels, wherein one or more of the wells have at least one of the following: A backplane gap between the SI structure and the backplane; A micro-LED gap between the SI structures and the micro-LEDs; or An SI structure recess in at least one of the SI structures; Wherein, the encapsulant is deposited into the backplane gap, the micro-LED gap, or the SI structure recess; Evaporating the encapsulant; and The sealant is cured so that the sealant is disposed in at least one of the backplane gap, the micro-LED gap, or the SI structure recess of one or more wells. 如請求項14所述之方法,其中執行該蒸發該密封劑,直到該密封劑已從該三個微型LED中的至少一個微型LED的一中心完全蒸發。The method of claim 14, wherein evaporating the encapsulant is performed until the encapsulant has completely evaporated from a center of at least one of the three micro-LEDs. 如請求項14所述之方法,其中該密封劑包含一環氧樹脂、一丙烯酸類、和一表面活性劑。The method of claim 14, wherein the sealant comprises an epoxy, an acrylic, and a surfactant. 如請求項14所述之方法,其中該固化經由一紫外光(UV)固化製程執行,並且該固化是經由一泛光UV源或藉由打開該等微型LED來執行的。The method of claim 14, wherein the curing is performed via an ultraviolet (UV) curing process, and the curing is performed via a flood UV source or by turning on the micro-LEDs. 如請求項14所述之方法,其中執行該固化直至該密封劑已固化。The method of claim 14, wherein the curing is performed until the sealant is cured. 如請求項14所述之方法,其中該旋塗製程進一步包括以下步驟: 沉積該密封劑;以及 在沉積該密封劑之後旋轉該背板。 The method of claim 14, wherein the spin-on process further comprises the steps of: depositing the sealant; and spinning the backing plate after depositing the sealant. 如請求項14所述之方法,其中該方法進一步包括以下步驟: 將一顏色轉換材料沉積到一子像素的至少一個阱中;以及 固化該顏色轉換材料。 The method of claim 14, further comprising the steps of: depositing a color-converting material into at least one well of a subpixel; and curing the color-converting material.
TW113108579A 2023-03-10 2024-03-08 Led pixel and method of fabricating the same TWI890352B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202363451311P 2023-03-10 2023-03-10
US63/451,311 2023-03-10

Publications (2)

Publication Number Publication Date
TW202504129A TW202504129A (en) 2025-01-16
TWI890352B true TWI890352B (en) 2025-07-11

Family

ID=92756342

Family Applications (2)

Application Number Title Priority Date Filing Date
TW113108579A TWI890352B (en) 2023-03-10 2024-03-08 Led pixel and method of fabricating the same
TW114121584A TW202541665A (en) 2023-03-10 2024-03-08 Led pixel and method of fabricating the same

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW114121584A TW202541665A (en) 2023-03-10 2024-03-08 Led pixel and method of fabricating the same

Country Status (2)

Country Link
TW (2) TWI890352B (en)
WO (1) WO2024191856A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170186925A1 (en) * 2015-12-25 2017-06-29 Nichia Corporation Light emitting device
US20210118944A1 (en) * 2019-10-22 2021-04-22 Samsung Electronics Co., Ltd. Micro led device and method of manufacturing the same
CN217933824U (en) * 2022-05-26 2022-11-29 广州市众拓光电科技有限公司 Epitaxial structure of Micro LED based on Si base GAN
TW202303957A (en) * 2021-03-25 2023-01-16 美商應用材料股份有限公司 Micro-led displays to reduce subpixel crosstalk and methods of manufacture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9583533B2 (en) * 2014-03-13 2017-02-28 Apple Inc. LED device with embedded nanowire LEDs
KR102755842B1 (en) * 2019-06-05 2025-01-20 삼성디스플레이 주식회사 Backlight unit, display device including the same, and manufacturing method thereof
CN114628439B (en) * 2020-12-11 2026-01-27 京东方科技集团股份有限公司 Display panel, preparation method thereof and display device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170186925A1 (en) * 2015-12-25 2017-06-29 Nichia Corporation Light emitting device
US20210118944A1 (en) * 2019-10-22 2021-04-22 Samsung Electronics Co., Ltd. Micro led device and method of manufacturing the same
TW202303957A (en) * 2021-03-25 2023-01-16 美商應用材料股份有限公司 Micro-led displays to reduce subpixel crosstalk and methods of manufacture
CN217933824U (en) * 2022-05-26 2022-11-29 广州市众拓光电科技有限公司 Epitaxial structure of Micro LED based on Si base GAN

Also Published As

Publication number Publication date
TW202504129A (en) 2025-01-16
TW202541665A (en) 2025-10-16
WO2024191856A1 (en) 2024-09-19

Similar Documents

Publication Publication Date Title
TWI863187B (en) Methods of fabricating displays
TWI874397B (en) Color conversion layers for light-emitting devices
JP7278421B2 (en) In-situ curing of the color conversion layer in recesses
CN104299973B (en) A kind of display base plate and preparation method thereof, display device
TWI794943B (en) Light-emitting devices and methods of fabricating multi-color displays
Huang et al. Monolithic Integration of Full‐Color Microdisplay Screen with Sub‐5 µm Quantum‐Dot Pixels
CN108666349A (en) Color filter substrate and its manufacturing method and WOLED display
CN110265531A (en) Micro-led and display panel
TW201024836A (en) Display drivers
TWI890352B (en) Led pixel and method of fabricating the same
US10338429B2 (en) Method for manufacturing quantum dot color filter
US20240145624A1 (en) Enhanced quantum dot color conversion layer fabrication and integration for microled backplane
US11621304B2 (en) Display panel with single crystal perovskite color conversion layer and manufacturing method thereof
US20240234655A9 (en) U-display structure with qd color conversion and methods of manufacture
CN107680900A (en) Quantum dot film and preparation method thereof, quantum dot device
TW202518738A (en) Quantum dot print, cure, wash, and dry process with color filters for microled display fabrication
US20240145642A1 (en) Micro led display with racetrack structure
WO2025165701A1 (en) Inkjet printing and selective curing of color conversion materials
TWI853645B (en) Display panel and method for manufacturing the same
TW202523174A (en) Temporary underfill-based selective mass transfer for microled fabrication
TW202539480A (en) Releasing separate color conversion layer on micro-led display backplane
WO2024238583A1 (en) Structure for reducing impact of defects on display quality
TW202439952A (en) Encapsulation of quantum dots with encapsulation films and methods of manufacture
JP2025534278A (en) Color conversion layer for display device and method for forming display device