TWI889330B - External gas treatment system with waste heat recovery and method thereof - Google Patents

Abstract

The present invention is an outside air treatment system with waste heat recovery and its method. It mainly uses a combination design of an outside air, an outside air conditioning unit (MAU), an air duct, an outside air treatment system and an incineration device to utilize the waste heat discharged by the incineration device to provide the dehumidification wheel of the outside air treatment system to remove the latent heat of the outside air, and then transport it to the required place through the air duct. In this way, the load of the outside air conditioning unit (MAU) can be greatly reduced. At the same time, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs.

Description

External gas treatment system with waste heat recovery and method thereof

The present invention relates to an external air treatment system with waste heat recovery and a method thereof, particularly a system with heat recovery application and energy saving and carbon reduction performance, and is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc.

Semiconductor manufacturing requires four major exhaust systems, including acid exhaust, alkali exhaust, volatile organic, and general exhaust. Therefore, a large amount of outside air must be added to meet the exhaust needs.

The MAU in the semiconductor industry's factory system is an energy-consuming but necessary device. The energy consumption of an MAU in an advanced process plant may be as high as 10,000 refrigerated tons.

In recent years, in order to achieve the goal of energy conservation and carbon reduction, the semiconductor industry has actively sought improvement solutions for high-energy-consuming equipment or facilities in the factory to reduce energy consumption. Among them, the outdoor air conditioning unit (MAU) is the main equipment to be improved.

Therefore, in view of the above shortcomings, the inventors of the present invention hope to propose a waste heat recovery outdoor air treatment system and method with the functions of heat recovery application and energy saving and carbon reduction, so that users can easily operate and assemble. They have devoted themselves to research and design to provide user convenience, which is the motivation for the invention that the inventors want to develop.

The main purpose of the present invention is to provide an outside air treatment system and method with waste heat recovery. The main purpose is to use the combination design of an outside air, an outside air conditioning unit (MAU), an air duct, an outside air treatment system and an incineration device to provide the waste heat discharged by the incineration device to the dehumidification wheel of the outside air treatment system to remove the latent heat of the outside air, and then transport it to the required place through the air duct. In this way, the load of the outside air conditioning unit (MAU) can be greatly reduced. At the same time, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

Another object of the present invention is to provide an outdoor air treatment system with waste heat recovery and a method thereof, wherein the outdoor air treatment system is provided with a box, and the dehumidification wheel is provided in the box, and the dehumidification wheel has a treatment area and a regeneration area, wherein at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device are arranged in front of the dehumidification wheel, so that the outdoor air (Outside Air) can first be dusted, filtered and its temperature and humidity controlled by the above-mentioned devices, and then transported to the treatment area of the dehumidification wheel for dehumidification adsorption, and a fan is provided in the box, and the fan is arranged in any one of the front and rear positions of the dehumidification wheel to push and pull the outdoor air (Outside Air) Air) to produce fresh air with constant temperature and humidity, thereby increasing the overall usability.

Another object of the present invention is to provide an external air treatment system with waste heat recovery and a method thereof, which is connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area through the air duct system, so as to provide the above places with the need to supplement a large amount of external air, and drive the air circulation in the above places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air, thereby increasing the overall operability.

In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the attached drawings are only for reference and description and are not used to limit the present invention.

10: Outside Air

20: Outdoor air conditioning box (MAU)

21: Cabinet

211: External air intake

22: First filter equipment

23: First temperature equipment

231: Pre-cooling coil

232: Preheating coil

233: Precooler

234: Preheater

24: Washing equipment

25: Second temperature equipment

251: Recooling coil

252: Reheat coil

253: Recooler

254: Reheater

26: Second filter equipment

27: Fan

30: Air duct

31: Clean room

40: External air treatment system

41: Cabinet

411: External air inlet

42: First filter equipment

43: First temperature equipment

431: Pre-cooling coil

432: Preheating coil

433: Precooler

434: Preheater

44: Washing equipment

45: Second temperature equipment

451: Recooling coil

453: Recooler

46: Second filter equipment

47: Fan

51: Dehumidification wheel

511: Processing area

512: Regeneration Zone

52: First heat exchanger

53: Second heat exchanger

54: Water tank

541: Water valve

55: Pump

60: Incineration equipment

61: Combustion exhaust gas

62: Heat exchanger

70:Chimney

80:Bypass equipment

S100: External air enters

S110: transported to air duct

S120: Dehumidification adsorption

S130: Exhaust combustion exhaust gas

S140: Heat transfer

S150: Provide a heat source

S160: transported to air duct

Figure 1 is a schematic diagram of the main structure.

Figure 2 is another schematic diagram of the structure.

Figure 3 is a flowchart of the main steps.

Please refer to Figures 1 to 3, which are schematic diagrams of the embodiments of the present invention. The best implementation of the waste heat recovery external air treatment system and method of the present invention is applicable to related places or factories in the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc., mainly with the performance of heat recovery application and energy saving and carbon reduction.

The outside air treatment system with waste heat recovery of the present invention is mainly designed by combining an outside air (Outside Air) 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration device 60 (as shown in Figures 1 and 2), wherein the outside air (Outside Air) 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. In addition, the outside air (Outside Air) 10 is commonly known as air. Furthermore, the incineration equipment 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator (not shown) or a regenerative thermal incinerator (RTO) (not shown). When the incineration equipment 60 is a direct-fired incinerator (TO), the direct-fired incinerator (TO) is provided with any one of two heat exchangers 62, three heat exchangers 62 or four heat exchangers 62. The incineration equipment 60 is assembled with a double-rotor volatile organic gas (VOC) treatment system (not shown) or a single-rotor volatile organic gas (VOC) treatment system (not shown), and the incineration equipment 60 discharges a combustion exhaust gas 61 (as shown in Figures 1 and 2), and the combustion exhaust gas 61 has a temperature that is above 150°C.

In addition, the outside air conditioning box (MAU) 20 is for the outside air 10 to enter, and the outside air conditioning box (MAU) 20 is provided with a box body 21, and the box body 21 is provided with an outside air inlet 211, and the box body 21 is provided with at least one first filter device 22, at least one first temperature device 23, at least one water washing device 24, at least one second temperature device 25 and at least one second filter device 26 (as shown in Figures 1 and 2), wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre The filter is mostly plate-shaped and suitable for primary filtration, mainly used for filtering dust particles larger than 5μm, and the materials are mainly non-woven fabrics, nylon mesh, activated carbon filter materials, and metal mesh. The medium efficiency filter is mostly bag-shaped and widely used for intermediate filtration, mainly used for filtering dust particles larger than 1-5um, and the materials are mainly synthetic fibers and non-woven fabrics. The at least one first temperature device 23 is any one or a combination of a pre-cooling coil 231 and a pre-heating coil 232 (as shown in Figure 2), and the pre-cooling coil 231 is provided with any one of cooling water and ice water to flow in, so as to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is used to supply either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 23 can also be any one or a combination of a precooler 233 and a preheater 234 (as shown in Figure 1). The precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

In addition, the at least one washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, thereby increasing the humidity of the outside air 10 to form humidified air. The at least one second temperature device 25 is any one or a combination of a recooling coil 251 and a reheating coil 252 (as shown in FIG. 2 ), and the recooling coil 251 is supplied with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the reheating coil 252 is supplied with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 25 can also be any one or a combination of a subcooler 253 and a reheater 254 (as shown in Figure 1), the subcooler 253 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 254 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater. The at least one second filter device 26 is either a high efficiency particulate air filter (HEPA) or an ultra low penetration air filter (ULPA) or a combination thereof. The high efficiency particulate air filter (HEPA) is suitable for end filtering, and its efficiency for 0.1 micron and 0.3 micron particles is 99.998%, and its efficiency for removing particles with a diameter of 0.3 micron (1/200 of the diameter of a hair) is more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12μm (120 nanometers), with a filtering effect of about DOP 99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

A fan 27 is disposed in the housing 21 of the outside air conditioning box (MAU) 20. The fan 27 is disposed in front of the at least one second filter device 26 (as shown in FIGS. 1 and 2). The fan 27 mainly provides power so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 25 and the at least one second filter device 26 in sequence to ensure efficient operation of the outside air conditioning box (MAU) 20. In addition, the outside air conditioning box (MAU) 20 is connected to the air duct 30 to transport the gas sent out by the outside air conditioning box (MAU) 20 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), at least one electronic process plant area (not shown), so as to provide the above places with the need to supplement a large amount of the outside air (Outside Air) 10, and drive the air circulation in the above places to take away dust and heat, realize the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

Furthermore, in addition to being connected to the above-mentioned outside air conditioning unit (MAU) 20, the air duct 30 of the present invention can also be connected to an outside air processing system 40 (as shown in Figures 1 and 2), so that the air duct 30 has dual outside air (Outside Air) processing gas, or it can be a single outside air (Outside Air) processing gas. The outside air treatment system 40 is provided with a box 41, and the box 41 is provided with an outside air inlet 411 for the outside air 10 to enter, and the outside air treatment system 40 is connected to the air duct 30 to transport the gas sent out by the outside air treatment system 40 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), and at least one electronic process plant area (not shown).

The external air treatment system 40 is provided with a dehumidification wheel 51, a first heat exchanger 52, a second heat exchanger 53 and a water tank 54 (as shown in FIG. 1 and FIG. 2), wherein the dehumidification wheel 51 is arranged in the housing 41. The dehumidification wheel 51 is a special paper wheel with a honeycomb shape carrying a moisture absorbent. Since the honeycomb hole diameter is only 1.5 mm, the moisture absorption area of the wheel paper core of 1 m ³ reaches 3000 m ^2. The air flows through the honeycomb hole in a boundary laminar flow state, and the moisture exchange effect is good, so the dehumidification capacity is strong. The dehumidification wheel 51 has a treatment zone 511 and a regeneration zone 512. The first heat exchanger 52 is connected to the regeneration zone 512 and provides a heat source to the regeneration zone 512 for desorption. The first heat exchanger 52 allows a gas to enter, and the gas is either the outside air 10 or the gas treated in the treatment zone (not shown) for heat exchange. The water tank 54 is connected to the first heat exchanger 52 and the second heat exchanger 53 (as shown in FIG. 1 and FIG. 2 ). The water tank 54 outputs water, wherein the water is any one of filtered water, tap water, cooling water, and ice water, so that the heat of the second heat exchanger 53 is transferred to the first heat exchanger 52 through the water in the water tank 54. The water tank 54 is connected to a pump 55 to push the water in the water tank 54, and the water tank 54 is provided with a water valve 541, which controls the water entering the water tank 54 so that the water tank 54 has the effect of replenishing the water source. The first heat exchanger 52 and the second heat exchanger 53 are liquid-to-air heat exchangers.

Furthermore, the incineration equipment 60 discharges a combustion exhaust gas 61, which has a temperature of more than 150°C, and the combustion exhaust gas 61 passes through the second heat exchanger 53 (as shown in Figures 1 and 2), so that the water and gas in the second heat exchanger 53 exchange heat, allowing the water in the water tank 54 to transfer heat to the first heat exchanger 52 for use, and the water and gas in the first heat exchanger 52 exchange heat again to transport the gas with a heat source to the regeneration zone 512, so that the regeneration zone 512 can be thermally desorbed, and the gas after thermal desorption is then discharged to the outside, which is any one of the sky and the chimney 70. The combustion exhaust gas 61 that has undergone heat exchange in the second heat exchanger 53 is transported to a chimney 70 for discharge.

In addition, at least one first filter device 42, at least one first temperature device 43, at least one washing device 44 and at least one second temperature device 45 are arranged in front of the dehumidification wheel 51, and the above-mentioned devices are arranged in the box body 41, wherein the at least one first filter device 42 is any one or a combination of a primary filter (Pre Filter) or a medium efficiency filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly a plate-shaped type, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium efficiency filter is mostly bag-shaped, widely applicable to medium filtration, mainly used to filter dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 43 is any one or a combination of a pre-cooling coil 431 and a pre-heating coil 432 (as shown in Figure 2), and the pre-cooling coil 431 is provided with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the pre-heating coil 432 is provided with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 43 can also be any one or a combination of a precooler 433 and a preheater 434 (as shown in FIG. 1 ), the precooler 433 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 434 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

In addition, the at least one washing device 44 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, thereby increasing the humidity of the outside air 10 to form humidified air. The at least one second temperature device 45 is any one or a combination of a recooling coil 451 and a reheating coil (not shown) (as shown in FIG. 2 ), and the recooling coil 451 is supplied with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the reheating coil (not shown) is supplied with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 45 can also be any one or a combination of a subcooler 453 and a reheater (not shown) (as shown in FIG. 1 ), the subcooler 453 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater (not shown) is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

The outside air 10 treated by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 is sent to the treatment area 511 of the dehumidification wheel 51 for dehumidification and adsorption (as shown in Figures 1 and 2). 3/4 of the area of the dehumidification wheel 51 is the treatment area 511. When the outside air 10 to be treated passes through the treatment area 511, the moisture in the outside air 10 is absorbed by the moisture absorbent attached to the special fiber to become low-humidity dry air, and is blown out from the other end of the treatment area 511, so that the outside air 10 after passing through the at least one water washing device 44 can be dehumidified by condensation. Air)10 absolute humidity is adjusted to meet the needs.

In addition, the first heat exchanger 52 provides a heat source to the regeneration zone 512 (as shown in FIG. 1 and FIG. 2 ), and the temperature of the heat source exceeds 100° C., and enters the remaining 1/4 area of the dehumidification wheel 51, that is, the regeneration zone 512, through the opposite direction. The heat source slowly enters the regeneration zone 512 to increase the temperature of the hygroscopic agent attached to the special fiber, so that the water contained in the hygroscopic agent attached to the special fiber is vaporized and taken out of the dehumidification wheel 51, so that the hygroscopic agent attached to the special fiber can restore its hygroscopic function, that is, the hygroscopic agent is regenerated. In addition, when the dehumidification wheel 51 rotates slowly, the dehumidification agent attached to the special fiber of the dehumidification wheel 51 performs moisture absorption and regeneration processes simultaneously, so the dehumidification wheel 51 can ensure continuous and stable output of dry air.

In addition, at least one second filter device 46 is provided in the housing 41 of the outside air treatment system 40. The at least one second filter device 46 is located at the last section of the housing 41 (as shown in FIG. 1 and FIG. 2). The outside air 10 after dehumidification and adsorption in the treatment area 511 of the dehumidification wheel 51 enters the at least one second filter device 46 for filtration. The at least one second filter device 46 is any one or a combination of a high-level filter (High Efficiency Particulate Air Filter, HEPA) or an ultra-low penetration filter (Ultra Low Penetration Air Filter, ULPA). The high-level filter (High Efficiency Particulate Air Filter, HEPA) or an ultra-low penetration filter (Ultra Low Penetration Air Filter, ULPA) Filter, HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1/200 of the diameter of hair) can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and the material is mainly ultrafine glass fiber paper or composite filter paper. The ultra-low penetration filter (Ultra Low Penetration Air Filter, ULPA) is mainly used to remove particles larger than 0.12μm (120 nanometers), with a filtering effect of about DOP 99.995% or more, and the material is mainly special ultrafine glass fiber paper.

In addition, a fan 47 is provided in the housing 41 of the outside air treatment system 40. The fan 47 is provided in front of the dehumidification wheel 51 (as shown in FIG. 2) or behind the dehumidification wheel 51 (as shown in FIG. 1). The fan 47 mainly provides power to push and pull the outside air 10 to move. Air) 10 can be processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence (the above devices are used to remove dust, filter and control the temperature and humidity), or by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44, the at least one second temperature device 45 and the dehumidification wheel 51 in sequence (the above devices are used to remove dust, filter and control the temperature and humidity, and then transported to the treatment area 511 of the dehumidification wheel 51 for dehumidification adsorption), so as to have the effect of generating constant temperature and humidity fresh air.

In addition, the outside air treatment system 40 is connected to the air duct 30 to transport the gas sent out by the outside air treatment system 40 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), and at least one electronic process plant area (not shown) to provide the above places with a large amount of outside air (Outside Air) 10 required to supplement, and drive the air circulation in the above places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

Furthermore, the dehumidification wheel 51 of the present invention is additionally provided with a bypass device 80 (as shown in FIG. 2 ), wherein the bypass device 80 is any one of a pipeline and a shelf, and the pipeline is mainly connected to the front end and the rear end of the treatment area 511 of the dehumidification wheel 51 through a bypass pipeline provided on the outer side of the box 41 or a bypass pipeline provided on the inner side of the box 41, and a control valve is provided for switching, and another The shelf is mainly provided with a bypass shelf (not shown) in the box 41. When necessary, the bypass shelf will cover the processing area 511 of the dehumidification wheel 51 to form a gas channel for the outside air 10 that passes through the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence to bypass the dehumidification wheel 51. It is mainly designed to prevent the outside air treatment system 40 from being unable to operate when the dehumidification wheel 51 fails, the dehumidification wheel 51 is saturated with adsorption, or other force majeure factors occur. A bypass facility that changes the direction of the airflow is designed.

Thus, the present invention mainly utilizes the combined design of an outside air 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration device 60 to provide the waste heat discharged by the incineration device 60 to the dehumidification wheel 51 of the outside air treatment system 40 to remove the latent heat of the outside air 10, and then transport it to the required place through the air duct 30. In this way, the load of the outside air conditioning unit (MAU) 20 can be greatly reduced, and at the same time, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

The outside air treatment method with waste heat recovery of the present invention is mainly through a combination design of an outside air (Outside Air) 10, an outside air air conditioning box (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration equipment 60 (as shown in Figures 1 and 2). The air duct 30 is connected to the outside air air conditioning box (MAU) 20. The outside air treatment system 40 is composed of a dehumidification wheel 51, a first heat exchanger 52, a second heat exchanger 53 and a water tank 54. The dehumidification wheel 51 has a treatment area 511 and a regeneration area 512. The water tank 54 is connected to the first heat exchanger 52 and the second heat exchanger 53. The first heat exchanger 52 is connected to the regeneration area 512. The outside air 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. The outside air 10 is also commonly known as air. Furthermore, the incineration equipment 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator (not shown) or a regenerative thermal incinerator (RTO) (not shown). When the incineration equipment 60 is a direct-fired incinerator (TO), the direct-fired incinerator (TO) is provided with any one of two heat exchangers 62, three heat exchangers 62 or four heat exchangers 62, and The incineration equipment 60 is assembled with a double-rotor volatile organic gas (VOC) treatment system (not shown) or a single-rotor volatile organic gas (VOC) treatment system (not shown), and the incineration equipment 60 discharges a combustion exhaust gas 61 (as shown in Figures 1 and 2), and the combustion exhaust gas 61 has a temperature that is above 150°C.

The main steps of the outside air treatment method with waste heat recovery (as shown in Figure 3) include step S100: outside air enters: the outside air conditioning unit (MAU) 20 is used to allow the outside air (Outside Air) 10 to enter. After completing the above step S100, the next step S1 10 is performed.

The MAU 20 is for the outside air 10 to enter, and the MAU 20 is provided with a box 21, the box 21 is provided with an outside air inlet 211, and the box 21 is provided with at least one first filter device 22, at least one first temperature device 23, at least one washing device 24, at least one second temperature device 25 and at least one second filter device 26 (as shown in FIG. 1 and FIG. 2), wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre The filter is mostly plate-shaped and suitable for primary filtration, mainly used for filtering dust particles larger than 5μm, and the materials are mainly non-woven fabrics, nylon mesh, activated carbon filter materials, and metal mesh. The medium efficiency filter is mostly bag-shaped and widely used for intermediate filtration, mainly used for filtering dust particles larger than 1-5um, and the materials are mainly synthetic fibers and non-woven fabrics. The at least one first temperature device 23 is any one or a combination of a pre-cooling coil 231 and a pre-heating coil 232 (as shown in Figure 2), and the pre-cooling coil 231 is provided with any one of cooling water and ice water to flow in, so as to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is used to supply either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 23 can also be any one or a combination of a precooler 233 and a preheater 234 (as shown in FIG. 1 ). The precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler. The preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater or a hot water heater.

The at least one washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humid air. The at least one second temperature device 25 is any one or a combination of a recooling coil 251 and a reheating coil 252 (as shown in FIG. 2 ), and the recooling coil 251 is supplied with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the reheating coil 252 is supplied with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 25 can also be any one or a combination of a subcooler 253 and a reheater 254 (as shown in Figure 1), the subcooler 253 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 254 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater. The at least one second filter device 26 is any one or a combination of a high efficiency particulate air filter (HEPA) or an ultra low penetration filter (ULPA). The high efficiency particulate air filter (HEPA) is suitable for end filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and its efficiency for removing particles with a diameter of 0.3 micron (1/200 of the diameter of a hair) is more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12μm (120 nanometers), with a filtering effect of about DOP 99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

In addition, the next step S110 is to deliver the gas to the air duct: the gas delivered by the outdoor air conditioning box (MAU) 20 is delivered to the air duct 30. After completing the above step S110, the next step S120 is performed.

A fan 27 is disposed in the housing 21 of the above-mentioned outside air conditioning box (MAU) 20. The fan 27 is disposed in front of the at least one second filter device 26 (as shown in Figures 1 and 2). The main function of the fan 27 is to provide power so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 25 and the at least one second filter device 26 in sequence to ensure efficient operation of the outside air conditioning box (MAU) 20. In addition, the outside air conditioning box (MAU) 20 is connected to the air duct 30 to transport the gas sent out by the outside air conditioning box (MAU) 20 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), at least one electronic process plant area (not shown), so as to provide the above places with the need to supplement a large amount of the outside air (Outside Air) 10, and drive the air circulation in the above places to take away dust and heat, realize the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

In addition, the next step S120 is to perform dehumidification and adsorption: the external air treatment system 40 allows the external air 10 to enter and perform dehumidification and adsorption through the treatment area 511 of the dehumidification wheel 51. After completing the above step S120, the next step S130 is performed.

In addition to being connected to the above-mentioned outdoor air conditioning box (MAU) 20, the air duct 30 of the present invention can also be connected to an outdoor air processing system 40 (as shown in Figures 1 and 2), so that the air duct 30 has dual outdoor air (Outside Air) processing gas, or it can be a single outdoor air (Outside Air) processing gas. The outdoor air processing system 40 is provided with a box body 41, and the box body 41 is provided with an outdoor air inlet 411 for the outdoor air (Outside Air) 10 to enter.

The external air treatment system 40 is provided with a dehumidification wheel 51, a first heat exchanger 52, a second heat exchanger 53 and a water tank 54 (as shown in FIG. 1 and FIG. 2), wherein the dehumidification wheel 51 is arranged in the housing 41. The dehumidification wheel 51 is a special paper wheel with a honeycomb shape carrying a moisture absorbent. Since the honeycomb hole diameter is only 1.5 mm, the moisture absorption area of the wheel paper core of 1 m ³ reaches 3000 m ^2. The air flows through the honeycomb hole in a boundary laminar flow state, and the moisture exchange effect is good, so the dehumidification capacity is strong. The dehumidification wheel 51 has a treatment zone 511 and a regeneration zone 512. The first heat exchanger 52 is connected to the regeneration zone 512 and provides a heat source to the regeneration zone 512 for desorption. The first heat exchanger 52 allows a gas to enter, and the gas is either the outside air 10 or the gas treated in the treatment zone (not shown) for heat exchange. The water tank 54 is connected to the first heat exchanger 52 and the second heat exchanger 53 (as shown in FIG. 1 and FIG. 2 ). The water tank 54 outputs water, wherein the water is any one of filtered water, tap water, cooling water, and ice water, so that the heat of the second heat exchanger 53 is transferred to the first heat exchanger 52 through the water in the water tank 54. The water tank 54 is connected to a pump 55 to push the water in the water tank 54, and the water tank 54 is provided with a water valve 541, which controls the water entering the water tank 54 so that the water tank 54 has the effect of replenishing the water source. The first heat exchanger 52 and the second heat exchanger 53 are liquid-to-air heat exchangers.

In addition, the next step S130 is to discharge the combustion exhaust gas: the incineration equipment 60 discharges a combustion exhaust gas 61, the combustion exhaust gas 61 has a temperature, and the combustion exhaust gas 61 passes through the second heat exchanger 53. After completing the above step S130, the next step S140 is performed.

In addition, the next step S140 is to perform heat transfer: the water tank 54 outputs water, and the heat of the second heat exchanger 53 is transferred to the first heat exchanger 52 through the water in the water tank 54. After completing the above step S140, the next step S150 is performed.

In addition, the next step S150 provides a heat source: the first heat exchanger 52 provides a heat source to the regeneration zone 512 for desorption. After completing the above step S150, the next step S160 is performed.

In the above-mentioned steps S130, S140 and S150, the incineration equipment 60 discharges a combustion exhaust gas 61, and the combustion exhaust gas 61 has a temperature, which is above 150°C, and the combustion exhaust gas 61 passes through the second heat exchanger 53 (as shown in Figures 1 and 2), so that the water and gas in the second heat exchanger 53 perform heat exchange, so that the water in the water tank 54 can transfer heat to the first heat exchanger 52 for use, and the water and gas in the first heat exchanger 52 perform heat exchange again to transport the gas with a heat source to the regeneration zone 512, so that the regeneration zone 512 can perform thermal desorption, and the gas after thermal desorption is then discharged to the outside, which is any one of the sky and the chimney 70. The combustion exhaust gas 61 that has undergone heat exchange in the second heat exchanger 53 is transported to a chimney 70 for discharge.

In addition, the next step S160 is to deliver to the air duct: the gas delivered by the external air treatment system 40 is delivered to the air duct 30.

The above-mentioned external air treatment system 40 is connected to the air duct 30 to transport the gas sent out by the external air treatment system 40 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), and at least one electronic process plant area (not shown).

In addition, at least one first filter device 42, at least one first temperature device 43, at least one washing device 44 and at least one second temperature device 45 are arranged in front of the dehumidification wheel 51, and the above-mentioned devices are arranged in the box body 41, wherein the at least one first filter device 42 is any one or a combination of a primary filter (Pre Filter) or a medium efficiency filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly a plate-shaped type, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium efficiency filter is mostly bag-shaped, widely applicable to medium filtration, mainly used for filtering dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 43 is any one or a combination of a pre-cooling coil 431 and a pre-heating coil 432 (as shown in Figure 2), and the pre-cooling coil 431 is provided with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the pre-heating coil 432 is provided with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 43 can also be any one or a combination of a precooler 433 and a preheater 434 (as shown in FIG. 1 ), the precooler 433 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 434 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

The at least one washing device 44 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humid air. The at least one second temperature device 45 is any one or a combination of a recooling coil 451 and a reheating coil (not shown) (as shown in FIG. 2 ), and the recooling coil 451 is supplied with any one of cooling water and ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the reheating coil (not shown) is supplied with any one of hot water and steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 45 can also be any one or a combination of a subcooler 453 and a reheater (not shown) (as shown in FIG. 1 ), the subcooler 453 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater (not shown) is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

The outside air 10 treated by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 is sent to the treatment area 511 of the dehumidification wheel 51 for dehumidification adsorption (as shown in Figures 1 and 2). 3/4 of the area of the dehumidification wheel 51 is the treatment area 511. When the outside air 10 to be treated passes through the treatment area 511, the moisture in the outside air 10 is absorbed by the moisture absorbent attached to the special fiber to become low-humidity dry air, and is blown out from the other end of the treatment area 511, so that the outside air 10 after passing through the at least one water washing device 44 can be dehumidified by condensation. Air)10 absolute humidity is adjusted to meet the needs.

In addition, the first heat exchanger 52 provides a heat source to the regeneration zone 512 (as shown in Figures 1 and 2), and the temperature of the heat source exceeds 100°C, and enters the remaining 1/4 area of the dehumidification wheel 51, that is, the regeneration zone 512, through the opposite direction. The heat source slowly enters the regeneration zone 512 to increase the temperature of the hygroscopic agent attached to the special fiber, so that the water contained in the hygroscopic agent attached to the special fiber is vaporized and taken out of the dehumidification wheel 51, so that the hygroscopic agent attached to the special fiber can restore its hygroscopic function, that is, the hygroscopic agent is regenerated. In addition, when the dehumidification wheel 51 rotates slowly, the dehumidification agent attached to the special fiber of the dehumidification wheel 51 performs moisture absorption and regeneration processes simultaneously, so the dehumidification wheel 51 can ensure continuous and stable output of dry air.

In addition, at least one second filter device 46 is provided in the housing 41 of the outside air treatment system 40. The at least one second filter device 46 is located at the last section of the housing 41 (as shown in FIG. 1 and FIG. 2). The outside air 10 after dehumidification and adsorption in the treatment area 511 of the dehumidification wheel 51 enters the at least one second filter device 46 for filtration. The at least one second filter device 46 is any one or a combination of a high efficiency filter (High Efficiency Particulate Air Filter, HEPA) or an ultra low penetration filter (Ultra Low Penetration Air Filter, ULPA). The high efficiency filter (High Efficiency Particulate Air Filter, HEPA) or an ultra low penetration filter (Ultra Low Penetration Air Filter, ULPA) Filter, HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1/200 of the diameter of hair) can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and the material is mainly ultrafine glass fiber paper or composite filter paper. The ultra-low penetration filter (Ultra Low Penetration Air Filter, ULPA) is mainly used to remove particles larger than 0.12μm (120 nanometers), with a filtering effect of about DOP 99.995% or more, and the material is mainly special ultrafine glass fiber paper.

In addition, a fan 47 is provided in the housing 41 of the outside air treatment system 40. The fan 47 is provided in front of the dehumidification wheel 51 (as shown in FIG. 2) or behind the dehumidification wheel 51 (as shown in FIG. 1). The fan 47 mainly provides power to push and pull the outside air 10 to move forward. Air) 10 can be processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence (the above devices are used to remove dust, filter and control the temperature and humidity), or by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44, the at least one second temperature device 45 and the dehumidification wheel 51 in sequence (the above devices are used to remove dust, filter and control the temperature and humidity, and then transported to the treatment area 511 of the dehumidification wheel 51 for dehumidification adsorption), so as to have the effect of generating constant temperature and humidity fresh air.

In addition, the outside air treatment system 40 is connected to the air duct 30 to transport the gas sent out by the outside air treatment system 40 to the required place through the air duct 30 (as shown in Figures 1 and 2), and the air duct 30 is connected to at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant area (not shown), at least one electronic process plant area (not shown), so as to provide the above places with the need to replenish a large amount of the outside air (Outside Air) 10, and drive the air circulation in the above places to take away dust and heat, realize the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

Furthermore, the dehumidification wheel 51 of the present invention is additionally provided with a bypass device 80 (as shown in FIG. 2 ), wherein the bypass device 80 is any one of a pipeline and a shelf, and the pipeline is mainly connected to the front end and the rear end of the treatment area 511 of the dehumidification wheel 51 through a bypass pipeline provided on the outer side of the box 41 or a bypass pipeline provided on the inner side of the box 41, and a control valve is provided for switching, and another The shelf is mainly provided with a bypass shelf (not shown) in the box 41. When necessary, the bypass shelf will cover the processing area 511 of the dehumidification wheel 51 to form a gas channel for the outside air 10 that passes through the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence to bypass the dehumidification wheel 51. It is mainly designed to prevent the outside air treatment system 40 from being unable to operate when the dehumidification wheel 51 fails, the dehumidification wheel 51 is saturated with adsorption, or other force majeure factors occur. A bypass facility that changes the direction of the airflow is designed.

Thus, the present invention mainly utilizes the combination design of an outside air 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration device 60 to utilize the waste heat discharged by the incineration device 60 to provide the dehumidification wheel 51 of the outside air treatment system 40 to remove the latent heat of the outside air 10, and then transport it to the required place through the air duct 30. In this way, the load of the outside air conditioning unit (MAU) 20 can be greatly reduced, and at the same time, it has the effect of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

The above detailed description will enable those familiar with this technology to understand that this invention can indeed achieve the above-mentioned purpose and is in compliance with the provisions of the Patent Law, and therefore an invention patent application is filed.

However, the above is only a preferred embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention; therefore, all simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the invention specification should still fall within the scope of the present invention patent.

10: Outside Air

20: Outdoor air conditioning box (MAU)

21: Cabinet

211: External air intake

22: First filter equipment

23: First temperature equipment

233: Precooler

234: Preheater

24: Washing equipment

25: Second temperature equipment

253: Recooler

254: Reheater

26: Second filter equipment

27: Fan

30: Air duct

31: Clean room

40: External air treatment system

41: Cabinet

411: External air inlet

42: First filter equipment

43: First temperature equipment

433: Precooler

434: Preheater

44: Washing equipment

45: Second temperature equipment

453: Recooler

46: Second filter equipment

47: Fan

51: Dehumidification wheel

511: Processing area

512: Regeneration Zone

52: First heat exchanger

53: Second heat exchanger

54: Water tank

541: Water valve

55: Pump

60: Incineration equipment

61: Combustion exhaust gas

62: Heat exchanger

70:Chimney

Claims (38)

An outside air treatment system with waste heat recovery includes: an outside air (Outside Air), the outside air (Outside Air) contains at least one gas or combination; an outside air conditioning box (MAU), the outside air conditioning box (MAU) is for the outside air (Outside Air) to enter, the outside air conditioning box (MAU) is provided with a box body, the box body is equipped with at least one first filter device, at least one first temperature device, at least one water washing device, at least one second temperature device and at least one second filter device; an air duct, the air duct is connected to the outside air conditioning box (MAU); an outside air treatment system, the outside air treatment system is for the outside air (Outside Air) to enter Air) enters, the external air treatment system is connected to the air duct, the external air treatment system is composed of a dehumidification wheel, a first heat exchanger, a second heat exchanger and a water tank, the dehumidification wheel has a treatment area and a regeneration area, the treatment area performs dehumidification adsorption, the first heat exchanger is connected to the regeneration area, and provides a heat source to the regeneration area for desorption, the water tank is connected to the first heat exchanger and the second heat exchanger, the water tank outputs water to transfer the heat of the second heat exchanger to the first heat exchanger through the water in the water tank; and an incineration device, the incineration device discharges a combustion exhaust gas, the combustion exhaust gas has a temperature, and the combustion exhaust gas passes through the second heat exchanger. As described in item 1 of the patent application scope, the exhaust gas treatment system with waste heat recovery, wherein the combustion exhaust gas is further transported to a chimney. As described in item 1 of the patent application scope, the outdoor air treatment system with waste heat recovery, wherein the water tank is further connected to a pump to push the water in the water tank. As described in item 1 of the patent application scope, the outdoor air treatment system with waste heat recovery, wherein the water tank is further provided with a water valve, and the water valve controls the water entering the water tank. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein the first heat exchanger is further provided with a gas for heat exchange. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein the air duct is further connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area. As described in item 1 of the patent application scope, the waste gas treatment system with waste heat recovery, wherein the dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel. As described in Item 7 of the patent application scope, the external air treatment system with waste heat recovery, wherein the bypass device is further any one of a pipeline and a shelf. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein the external air treatment system is further provided with a box, and the dehumidification wheel is arranged in the box. As described in item 9 of the patent application scope, the waste gas treatment system with waste heat recovery, wherein the dehumidification wheel is further equipped with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device. As described in item 10 of the patent application scope, the external air treatment system with waste heat recovery, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater. As described in item 10 of the patent application scope, the external air treatment system with waste heat recovery, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater. As described in Item 9 of the patent application, in the external air treatment system with waste heat collection, a fan is further provided in the box, and the fan is provided at any one of the positions before the dehumidification wheel and after the dehumidification wheel. As described in item 9 of the patent application scope, the external air treatment system with waste heat recovery, wherein the box is further provided with at least one second filter device, and the at least one second filter device is located at the last section of the box. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein a fan is further provided in the box. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater. As described in item 1 of the patent application scope, the external air treatment system with waste heat recovery, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater. As described in item 1 of the patent application scope, the waste gas treatment system with waste heat recovery, wherein the incineration equipment is further any one of a direct-fired incinerator (TO), a catalytic incinerator or a regenerative thermal incinerator (RTO). As described in item 1 of the patent application scope, the waste gas treatment system with waste heat recovery, wherein the incineration equipment is further combined with either a double-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system. A method for treating outside air with waste heat recovery mainly comprises an outside air, an outside air conditioning unit (MAU), an air duct, an outside air treatment system and an incineration device. Air) contains at least one gas or combination, the air duct is connected to the outside air conditioning box (MAU), the outside air conditioning box (MAU) is provided with a box body, the box body is equipped with at least one first filter device, at least one first temperature device, at least one water washing device, at least one second temperature device and at least one second filter device, the outside air treatment system is equipped with a dehumidification wheel, a first heat exchanger, a second heat exchanger and a water tank, the dehumidification wheel has a treatment area and a regeneration area, the water tank is connected to the first heat exchanger and the second heat exchanger, the first heat exchanger is connected to the regeneration area, and the main steps include: outside air entry: the outside air conditioning box (MAU) is for the outside air (Outside Air) enters; transports to the air duct: the gas sent out by the outdoor air conditioning box (MAU) is transported to the air duct; performs dehumidification adsorption: the outdoor air treatment system allows the outdoor air (Outside Air) to enter, and performs dehumidification adsorption through the treatment area of the dehumidification wheel; discharges combustion exhaust gas: the incineration equipment discharges a combustion exhaust gas, the combustion exhaust gas has a temperature, and the combustion exhaust gas passes through the second heat exchanger; performs heat transfer: the water tank outputs a water, and the heat of the second heat exchanger is transferred to the first heat exchanger through the water in the water tank; provides a heat source: the first heat exchanger provides a heat source to the regeneration area for desorption; and transports to the air duct: the gas sent out by the outdoor air treatment system is transported to the air duct. As described in item 20 of the patent application scope, the exhaust gas treatment method with waste heat recovery, wherein the combustion exhaust gas is further transported to a chimney. As described in item 20 of the patent application scope, the outdoor air treatment method with waste heat recovery, wherein the water tank is further connected to a pump to push the water in the water tank. As described in item 20 of the patent application scope, the outdoor air treatment method with waste heat recovery, wherein the water tank is further provided with a water valve, and the water valve controls the water entering the water tank. As described in item 20 of the patent application scope, the method for treating waste gas with waste heat recovery, wherein the first heat exchanger is further provided with a gas for heat exchange. As described in item 20 of the patent application scope, the outdoor air treatment method with waste heat recovery, wherein the air duct is further connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area. As described in item 20 of the patent application scope, the method for treating waste gas with waste heat recovery, wherein the dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel. As described in item 26 of the patent application scope, the external air treatment method with waste heat recovery, wherein the bypass device is further any one of a pipeline and a shelf. As described in item 20 of the patent application scope, the external air treatment method with waste heat recovery, wherein the external air treatment system is further provided with a box, and the dehumidification wheel is arranged in the box. As described in Item 28 of the patent application scope, the waste gas treatment method with waste heat recovery, wherein the dehumidification wheel is further equipped with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device. As described in item 29 of the patent application scope, the external gas treatment method with waste heat recovery, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater. As described in item 29 of the patent application scope, the external gas treatment method with waste heat recovery, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater. As described in item 28 of the patent application scope, the external air treatment method with waste heat recovery, wherein the box is further provided with a fan, and the fan is provided at any one of the positions before the dehumidification wheel and after the dehumidification wheel. As described in item 28 of the patent application scope, the method for treating external air with waste heat recovery, wherein the box is further provided with at least one second filter device, and the at least one second filter device is located at the last section of the box. As described in item 20 of the patent application scope, the external air treatment method with waste heat recovery, wherein a fan is further provided in the box. As described in item 20 of the patent application scope, the external gas treatment method with waste heat recovery, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater. As described in item 20 of the patent application scope, the external gas treatment method with waste heat recovery, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater. As described in item 20 of the patent application scope, the waste gas treatment method with waste heat recovery, wherein the incineration equipment is further any one of a direct-fired incinerator (TO), a catalytic incinerator or a regenerative thermal incinerator (RTO). As described in item 20 of the patent application scope, the incineration equipment is further combined with either a double-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system.

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