TWI888561B - Resin composition - Google Patents
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- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
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- C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
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Abstract
本發明提供可獲得具有高接合強度且翹曲發生受抑制之硬化物的樹脂組成物;使用該樹脂組成物之樹脂薄片、電路基板及半導體晶片封裝。 本發明之樹脂組成物係包含(A)環氧樹脂、(B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑、(C)具有芳香族構造之聚酯多元醇樹脂、及(D)無機填充材之樹脂組成物,其中(C)成分之含量於將樹脂組成物中之不揮發成分設為100質量%時,為2質量%以上20質量%以下。The present invention provides a resin composition that can obtain a cured product having high bonding strength and suppressed warping; a resin sheet, a circuit board, and a semiconductor chip package using the resin composition. The resin composition of the present invention is a resin composition comprising (A) an epoxy resin, (B) at least one curing agent selected from anhydride curing agents, amine curing agents, and phenolic curing agents, (C) a polyester polyol resin having an aromatic structure, and (D) an inorganic filler, wherein the content of the component (C) is 2% by mass or more and 20% by mass or less when the non-volatile components in the resin composition are set to 100% by mass.
Description
本發明有關樹脂組成物。進而有關含有該樹脂組成物之樹脂薄片、電路基板及半導體晶片封裝。The present invention relates to a resin composition, and further to a resin sheet, a circuit substrate and a semiconductor chip package containing the resin composition.
近幾年來,智慧型手機、平板型裝置之小型高機能電子機器之需求增加,伴隨此,對於可作為該等小型電子機器之密封層及絕緣層使用之絕緣材料亦要求高機能化。作為此等絕緣材料已知有專利文獻1、2中所記載者。 [先前技術文獻] [專利文獻]In recent years, the demand for small, high-function electronic devices such as smartphones and tablet devices has increased, and with this, there is a demand for highly functional insulating materials that can be used as sealing layers and insulating layers of such small electronic devices. As such insulating materials, those described in patent documents 1 and 2 are known. [Prior technical documents] [Patent document]
[專利文獻1]國際公開第2019/044803號 [專利文獻2]國際公開第2019/131413號[Patent Document 1] International Publication No. 2019/044803 [Patent Document 2] International Publication No. 2019/131413
[發明欲解決之課題][Problems to be solved by the invention]
近幾年來,要求更小型之電子機器,而對電子機器所用之絕緣層或密封層要求更薄。絕緣層或密封層具有若薄則容易發生翹曲之傾向,而期望可抑制翹曲之絕緣層或密封層。又,對於絕緣層或密封層亦期望與其他層之接合強度高。In recent years, there has been a demand for smaller electronic devices, and the insulating layer or sealing layer used in the electronic devices has been required to be thinner. The insulating layer or sealing layer has a tendency to warp easily if it is thin, and an insulating layer or sealing layer that can suppress the warp is desired. In addition, the insulating layer or sealing layer is also expected to have a high bonding strength with other layers.
本發明係鑒於前述課題而創作者,其目的在於提供可獲得具有高接合強度且翹曲發生受抑制之硬化物的樹脂組成物;使用該樹脂組成物之樹脂薄片、電路基板及半導體晶片封裝。 [用以解決課題之手段]The present invention was created in view of the above-mentioned problem, and its purpose is to provide a resin composition that can obtain a cured product with high bonding strength and suppressed warping; a resin sheet, a circuit substrate and a semiconductor chip package using the resin composition. [Means for solving the problem]
本發明人等為解決前述課題而積極檢討之結果,發現藉由組合包含(A)環氧樹脂、(B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑、(C)具有特定量之芳香族構造之聚酯多元醇樹脂、及(D)無機填充材之樹脂組成物,可解決前述課題,因而完成本發明。 亦即,本發明包含下述內容。 [1] 一種樹脂組成物,其包含 (A)環氧樹脂、 (B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑、 (C)具有芳香族構造之聚酯多元醇樹脂、及 (D)無機填充材, 其中(C)成分之含量於將樹脂組成物中之不揮發成分設為100質量%時,為2質量%以上20質量%以下。 [2] 如[1]之樹脂組成物,其中(A)成分包含縮合環骨架。 [3] 如[1]或[2]之樹脂組成物,其中(C)成分之末端為羥基及羧基之任一者。 [4] 如[1]至[3]中任一項之樹脂組成物,其中(D)成分之含量於將樹脂組成物中之不揮發成分設為100質量%時,為60質量%以上95質量%以下。 [5] 如[1]至[4]中任一項之樹脂組成物,其中(C)成分係具有源自聚酯之構造及源自多元醇之構造的樹脂。 [6] 如[5]之樹脂組成物,其中源自多元醇之構造包含環氧乙烷構造、環氧丙烷構造及環氧丁烷構造之任一者。 [7] 如[1]至[6]中任一項之樹脂組成物,其中(C)成分具有雙酚骨架。 [8] 如[1]至[7]中任一項之樹脂組成物,其中將(C)成分之於將樹脂組成物中之不揮發成分設為100質量%時之含量設為c1,將(D)成分之於將樹脂組成物中之不揮發成分設為100質量%時之含量設為d1時,d1/c1為5以上70以下。 [9] 如[1]至[8]中任一項之樹脂組成物,其係密封層用。 [10] 一種樹脂薄片,其包含支撐體與設於該支撐體上之包含如[1]至[9]中任一項之樹脂組成物的樹脂組成物層。 [11] 一種電路基板,其包含由如[1]至[9]中任一項之樹脂組成物的硬化物所形成之硬化物層。 [12] 一種半導體晶片封裝,其包含如[11]之電路基板及搭載於該電路基板上之半導體晶片。 [13] 一種半導體晶片封裝,其包含由如[1]至[9]中任一項之樹脂組成物或如[10]之樹脂薄片予以密封之半導體晶片。 [發明效果]As a result of the active research to solve the above-mentioned problems, the inventors of the present invention have found that the above-mentioned problems can be solved by combining a resin composition comprising (A) an epoxy resin, (B) at least one curing agent selected from anhydride curing agents, amine curing agents and phenolic curing agents, (C) a polyester polyol resin having a specific amount of aromatic structure, and (D) an inorganic filler, thereby completing the present invention. That is, the present invention includes the following contents. [1] A resin composition comprising: (A) an epoxy resin, (B) at least one curing agent selected from an anhydride curing agent, an amine curing agent and a phenol curing agent, (C) a polyester polyol resin having an aromatic structure, and (D) an inorganic filler, wherein the content of component (C) is 2% by mass to 20% by mass when the non-volatile components in the resin composition are taken as 100% by mass. [2] A resin composition as described in [1], wherein component (A) comprises a condensed ring skeleton. [3] A resin composition as described in [1] or [2], wherein the terminal of component (C) is either a hydroxyl group or a carboxyl group. [4] The resin composition of any one of [1] to [3], wherein the content of component (D) is 60% by mass or more and 95% by mass or less, when the non-volatile components in the resin composition are taken as 100% by mass. [5] The resin composition of any one of [1] to [4], wherein component (C) is a resin having a structure derived from polyester and a structure derived from polyol. [6] The resin composition of [5], wherein the structure derived from polyol includes any one of an ethylene oxide structure, a propylene oxide structure and a butylene oxide structure. [7] The resin composition of any one of [1] to [6], wherein component (C) has a bisphenol skeleton. [8] A resin composition as described in any one of [1] to [7], wherein when the content of component (C) in the resin composition is 100% by mass and the content of component (D) in the resin composition is 100% by mass, d1/c1 is 5 to 70. [9] A resin composition as described in any one of [1] to [8], which is used as a sealing layer. [10] A resin sheet comprising a support and a resin composition layer provided on the support and comprising the resin composition as described in any one of [1] to [9]. [11] A circuit substrate comprising a hardened material layer formed by a hardened material of a resin composition as described in any one of [1] to [9]. [12] A semiconductor chip package comprising a circuit substrate as described in [11] and a semiconductor chip mounted on the circuit substrate. [13] A semiconductor chip package comprising a semiconductor chip sealed by a resin composition as described in any one of [1] to [9] or a resin sheet as described in [10]. [Effect of the invention]
依據本發明可提供可獲得具有高接合強度且翹曲發生受抑制之硬化物的樹脂組成物;使用該樹脂組成物之樹脂薄片、電路基板及半導體晶片封裝。According to the present invention, a resin composition capable of obtaining a cured product having high bonding strength and suppressed warping can be provided; and a resin sheet, a circuit substrate and a semiconductor chip package using the resin composition can be provided.
以下顯示實施形態及例示物針對本發明詳細說明。但本發明並非限定於以下舉例之實施形態及例示物,在不脫離本發明之申請專利範圍及其均等範圍的範圍內可任意變更實施。The following embodiments and examples are provided to explain the present invention in detail. However, the present invention is not limited to the following embodiments and examples, and can be arbitrarily modified and implemented within the scope of the patent application of the present invention and its equivalent scope.
[樹脂組成物] 本發明之樹脂組成物包含(A)環氧樹脂、(B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑、(C)具有芳香族構造之聚酯多元醇樹脂、及(D)無機填充材,其中(C)成分之含量於將樹脂組成物中之不揮發成分設為100質量%時,為2質量%以上20質量%以下。藉由使用此等樹脂組成物,可獲得具有高接合強度且翹曲發生受抑制之硬化物。且,本發明亦可獲得熱膨脹係數(CTE)低的硬化物。[Resin composition] The resin composition of the present invention comprises (A) epoxy resin, (B) at least one curing agent selected from anhydride curing agents, amine curing agents and phenol curing agents, (C) polyester polyol resin having an aromatic structure, and (D) inorganic filler, wherein the content of component (C) is 2% by mass or more and 20% by mass or less when the non-volatile components in the resin composition are set to 100% by mass. By using such resin compositions, a cured product having high bonding strength and suppressed warping can be obtained. In addition, the present invention can also obtain a cured product with a low coefficient of thermal expansion (CTE).
該樹脂組成物之硬化物可活用其優異特性,可較佳地使用作為電路基板及半導體晶片封裝之絕緣層或密封層,尤其較佳使用作為密封層用。The cured product of the resin composition can make use of its excellent properties and can be preferably used as an insulating layer or a sealing layer of a circuit substrate and a semiconductor chip package, and is particularly preferably used as a sealing layer.
樹脂組成物亦可進而包含任意成分組合於(A)~(D)成分。作為任意成分,舉例為例如(E)硬化促進劑、(F)溶劑及(G)其他添加劑等。以下針對樹脂組成物所含之各成分詳細說明。The resin composition may further include an arbitrary component in combination with the components (A) to (D). Examples of the arbitrary component include (E) a hardening accelerator, (F) a solvent, and (G) other additives. The following is a detailed description of each component contained in the resin composition.
<(A)環氧樹脂> 樹脂組成物含有(A)環氧樹脂作為(A)成分。作為(A)環氧樹脂舉例為例如聯二甲苯酚型環氧樹脂;雙酚A型環氧樹脂;雙酚F型環氧樹脂;雙酚S型環氧樹脂;雙酚AF型環氧樹脂;二環戊二烯型環氧樹脂;三酚型環氧樹脂;酚酚醛清漆型環氧樹脂;縮水甘油胺型環氧樹脂;縮水甘油酯型環氧樹脂;甲酚酚醛清漆型環氧樹脂;聯苯型環氧樹脂;鏈狀脂肪族環氧樹脂;具有丁二烯構造之環氧樹脂;脂環式環氧樹脂;雜環式環氧樹脂;含螺環之環氧樹脂;環己烷型環氧樹脂;環己烷二甲醇型環氧樹脂;三羥甲基型環氧樹脂;四苯基乙烷型環氧樹脂;萘醚型環氧樹脂、第三丁基-兒茶酚型環氧樹脂、萘型環氧樹脂、萘酚型環氧樹脂、蒽型環氧樹脂、萘酚酚醛清漆型環氧樹脂等之含有縮合骨架之環氧樹脂等。環氧樹脂可單獨使用1種,亦可組合2種以上使用。其中,作為(A)環氧樹脂,基於顯著獲得本發明效果之觀點,較佳包含含有縮合骨架之環氧樹脂。<(A) Epoxy resin> The resin composition contains (A) epoxy resin as the (A) component. Examples of the epoxy resin (A) include bixylenol epoxy resins; bisphenol A epoxy resins; bisphenol F epoxy resins; bisphenol S epoxy resins; bisphenol AF epoxy resins; dicyclopentadiene epoxy resins; trisphenol epoxy resins; phenol novolac epoxy resins; glycidylamine epoxy resins; glycidyl ester epoxy resins; cresol novolac epoxy resins; biphenyl epoxy resins; chain aliphatic epoxy resins; epoxy resins having butylene; Epoxy resins with diene structure; alicyclic epoxy resins; heterocyclic epoxy resins; epoxy resins containing spiro rings; cyclohexane type epoxy resins; cyclohexanedimethanol type epoxy resins; trihydroxymethyl type epoxy resins; tetraphenylethane type epoxy resins; naphthyl ether type epoxy resins, tert-butyl-catechol type epoxy resins, naphthalene type epoxy resins, naphthol type epoxy resins, anthracene type epoxy resins, naphthol novolac type epoxy resins, and other epoxy resins containing condensed skeletons. The epoxy resins may be used alone or in combination of two or more. Among them, the epoxy resin (A) preferably includes an epoxy resin containing a condensed skeleton from the viewpoint of significantly obtaining the effects of the present invention.
樹脂組成物係作為(A)環氧樹脂較佳包含1分子中具有2個以上環氧基之環氧樹脂。基於顯著獲得本發明期望效果之觀點,相對於(A)環氧樹脂之不揮發成分100質量%,1分子中具有2個以上環氧基之環氧樹脂的比例較佳為50質量%以上,更佳為60質量%以上,特佳為70質量%以上。The resin composition preferably includes an epoxy resin having two or more epoxy groups in one molecule as the epoxy resin (A). From the viewpoint of significantly obtaining the desired effect of the present invention, the ratio of the epoxy resin having two or more epoxy groups in one molecule is preferably 50% by mass or more, more preferably 60% by mass or more, and particularly preferably 70% by mass or more, relative to 100% by mass of the non-volatile component of the epoxy resin (A).
環氧樹脂有在溫度20℃為液狀之環氧樹脂(以下有時稱為「液狀環氧樹脂」)與在溫度20℃為固體狀之環氧樹脂(以下有時稱為「固體狀環氧樹脂」)。樹脂組成物係作為(A)環氧樹脂可僅包含液狀環氧樹脂,亦可僅包含固體狀環氧樹脂,亦可組合包含液狀環氧樹脂與固體狀環氧樹脂,但基於顯著獲得本發明效果之觀點,較佳僅包含液狀環氧樹脂。Epoxy resins include epoxy resins that are liquid at 20°C (hereinafter sometimes referred to as "liquid epoxy resins") and epoxy resins that are solid at 20°C (hereinafter sometimes referred to as "solid epoxy resins"). The resin composition as (A) epoxy resin may include only liquid epoxy resins, only solid epoxy resins, or a combination of liquid epoxy resins and solid epoxy resins. However, from the perspective of significantly obtaining the effects of the present invention, it is preferred that only liquid epoxy resins be included.
作為液狀環氧樹脂較佳為1分子中具有2個以上環氧基之液狀環氧樹脂。The liquid epoxy resin is preferably a liquid epoxy resin having two or more epoxy groups in one molecule.
作為液狀環氧樹脂,較佳為雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AF型環氧樹脂、萘型環氧樹脂、縮水甘油酯型環氧樹脂、縮水甘油胺型環氧樹脂、酚酚醛清漆型環氧樹脂、具有酯骨架之脂環式環氧樹脂、環己烷型環氧樹脂、環己烷二甲醇型環氧樹脂、縮水甘油胺型環氧樹脂及具有丁二烯構造之環氧樹脂,更佳為具有酯骨架之脂環式環氧樹脂、萘型環氧樹脂。As the liquid epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AF type epoxy resin, naphthalene type epoxy resin, glycidyl ester type epoxy resin, glycidyl amine type epoxy resin, phenol novolac type epoxy resin, alicyclic epoxy resin having an ester skeleton, cyclohexane type epoxy resin, cyclohexanedimethanol type epoxy resin, glycidyl amine type epoxy resin and epoxy resin having a butadiene structure are preferred, and alicyclic epoxy resin having an ester skeleton and naphthalene type epoxy resin are more preferred.
作為液狀環氧樹脂之具體例舉例為DIC公司製之「HP4032」、「HP4032D」、「HP4032SS」(萘型環氧樹脂);三菱化學公司製之「828US」、「jER828EL」、「825」、「EPICOTE 828EL」(雙酚A型環氧樹脂);三菱化學公司製之「jER807」、「1750」(雙酚F型環氧樹脂);三菱化學公司製之「jER152」(酚酚醛清漆型環氧樹脂);三菱化學公司製之「630」、「630LSD」(縮水甘油胺型環氧樹脂);新日鐵住金化學公司製之「ZX1059」(雙酚A型環氧樹脂與雙酚F型環氧樹脂之混合品);NAGASE CHEM TEX公司製之「EX-721」(縮水甘油酯型環氧樹脂);DAICEL公司製之「CELLOXIDE 2021P」(具有酯骨架之脂環式環氧樹脂);DAICEL公司製之「PB-3600」(具有丁二烯構造之環氧樹脂);新日鐵住金化學公司製之「ZX1658」、「ZX1658GS」(液狀1,4-縮水甘油基環己烷型環氧樹脂)等。該等可單獨使用1種,或亦可組合2種以上使用。Specific examples of liquid epoxy resins include "HP4032", "HP4032D", and "HP4032SS" (naphthalene-based epoxy resins) manufactured by DIC Corporation; "828US", "jER828EL", "825", and "EPICOTE" manufactured by Mitsubishi Chemical Corporation; "828EL" (bisphenol A type epoxy resin); "jER807" and "1750" (bisphenol F type epoxy resin) manufactured by Mitsubishi Chemical Corporation; "jER152" (phenol novolac type epoxy resin) manufactured by Mitsubishi Chemical Corporation; "630" and "630LSD" (glycidylamine type epoxy resin) manufactured by Mitsubishi Chemical Corporation; "ZX1059" (a mixture of bisphenol A type epoxy resin and bisphenol F type epoxy resin) manufactured by Nippon Steel & Sumitomo Chemical Corporation; "EX-721" (glycidyl ester type epoxy resin) manufactured by NAGASE CHEM TEX; "CELLOXIDE "2021P" manufactured by DAICEL (epoxy resin with an ester skeleton); "PB-3600" manufactured by DAICEL (epoxy resin with a butadiene structure); "ZX1658" and "ZX1658GS" manufactured by Nippon Steel & Sumitomo Metal Chemicals (liquid 1,4-glycidylcyclohexane type epoxy resins), etc. These may be used alone or in combination of two or more.
作為固體狀環氧樹脂較佳為1分子中具有3個以上環氧基之固體狀環氧樹脂,更佳為1分子中具有3個以上環氧基之芳香族系之固體狀環氧樹脂。The solid epoxy resin is preferably a solid epoxy resin having three or more epoxy groups in one molecule, and more preferably an aromatic solid epoxy resin having three or more epoxy groups in one molecule.
作為固體狀環氧樹脂較佳為聯二甲酚型環氧樹脂、萘型環氧樹脂、萘型4官能環氧樹脂、甲酚酚醛清漆型環氧樹脂、二環戊二烯型環氧樹脂、三酚型環氧樹脂、萘酚型環氧樹脂、聯苯型環氧樹脂、萘醚型環氧樹脂、蒽型環氧樹脂、雙酚A型環氧樹脂、雙酚AF型環氧樹脂、四苯基乙烷型環氧樹脂,更佳為萘型環氧樹脂。Preferred solid epoxy resins are bixylene type epoxy resins, naphthalene type epoxy resins, naphthalene type tetrafunctional epoxy resins, cresol novolac type epoxy resins, dicyclopentadiene type epoxy resins, trisphenol type epoxy resins, naphthol type epoxy resins, biphenyl type epoxy resins, naphthyl ether type epoxy resins, anthracene type epoxy resins, bisphenol A type epoxy resins, bisphenol AF type epoxy resins, and tetraphenylethane type epoxy resins, and more preferred are naphthalene type epoxy resins.
作為固體狀環氧樹脂之具體例舉例為DIC公司製之「HP4032H」(萘型環氧樹脂);DIC公司製之「HP-4700」、「HP-4710」(萘型4官能環氧樹脂);DIC公司製之「N-690」(甲酚酚醛清漆型環氧樹脂);DIC公司製之「N-695」(甲酚酚醛清漆型環氧樹脂);DIC公司製之「HP-7200」(二環戊二烯型環氧樹脂);DIC公司製之「HP-7200HH」、「HP-7200H」、「EXA-7311」、「EXA-7311-G3」、「EXA-7311-G4」、「EXA-7311-G4S」、「HP6000」(萘醚型環氧樹脂);日本化藥公司製之「EPPN-502H」(三酚型環氧樹脂);日本化藥公司製之「NC7000L」(萘酚酚醛清漆環氧樹脂);日本化藥公司製之「NC3000H」、「NC3000」、「NC3000L」、「NC3100」(聯苯型環氧樹脂);新日鐵住金化學公司製之「ESN475V」(萘酚型環氧樹脂);新日鐵住金化學公司製之「ESN485」(萘酚酚醛清漆型環氧樹脂);三菱化學公司製之「YX4000H」、「YX4000」、「YL6121」(聯苯型環氧樹脂);三菱化學公司製之「YX4000HK」(聯二甲酚型環氧樹脂);三菱化學公司製之「YX8800」(蒽型環氧樹脂);大阪氣體化學公司製之「PG-100」、「CG-500」;三菱化學公司製之「YL7760」(雙酚AF型環氧樹脂);三菱化學公司製之「YL7800」(茀型環氧樹脂);三菱化學公司製之「jER1010」(固體狀雙酚A型環氧樹脂);三菱化學公司製之「jER1031S」(四苯基乙烷型環氧樹脂)等。該等可單獨使用1種,或亦可組合2種以上使用。Specific examples of solid epoxy resins include "HP4032H" (naphthalene-based epoxy resin) manufactured by DIC Corporation; "HP-4700" and "HP-4710" (naphthalene-based tetrafunctional epoxy resin) manufactured by DIC Corporation; "N-690" (cresol novolac-based epoxy resin) manufactured by DIC Corporation; "N-695" (cresol novolac-based epoxy resin) manufactured by DIC Corporation; "HP-7200" (dicyclopentadiene-based epoxy resin) manufactured by DIC Corporation; "HP-7200HH", "HP-7200H", "EXA-7311", "EXA-7311-G3", "EXA-7311-G4", "EXA-7311-G4S", "HP6000" (naphthyl ether type epoxy resin); "EPPN-502H" (trisphenol type epoxy resin) manufactured by Nippon Kayaku Co., Ltd.; "NC7000L" (naphthol phenolic varnish epoxy resin) manufactured by Nippon Kayaku Co., Ltd.; "NC3000H" manufactured by Nippon Kayaku Co., Ltd., "NC3000", "NC3000L", "NC3100" (biphenyl type epoxy resin); "ESN475V" manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. (naphthol type epoxy resin); "ESN485" manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. (naphthol novolac type epoxy resin); "YX4000H", "YX4000", "YL6121" (biphenyl type epoxy resin) manufactured by Mitsubishi Chemical Corporation; "YX4000HK" (xylenol type epoxy resin) manufactured by Mitsubishi Chemical Corporation "YX8800" manufactured by Mitsubishi Chemical (anthracene type epoxy resin); "PG-100" and "CG-500" manufactured by Osaka Gas Chemical; "YL7760" manufactured by Mitsubishi Chemical (bisphenol AF type epoxy resin); "YL7800" manufactured by Mitsubishi Chemical (fluorene type epoxy resin); "jER1010" manufactured by Mitsubishi Chemical (solid bisphenol A type epoxy resin); "jER1031S" manufactured by Mitsubishi Chemical (tetraphenylethane type epoxy resin), etc. These may be used alone or in combination of two or more.
組合使用液狀環氧樹脂與固體狀環氧樹脂作為(A)環氧樹脂時,該等之量比(液狀環氧樹脂:固體狀環氧樹脂)以質量比計,較佳為1:0.1~1:20,更佳為1:1~ 1:10,特佳為1:1.5~1:5。藉由使液狀環氧樹脂與固體狀環氧樹脂之量比成為該範圍,可顯著獲得本發明期望之效果。再者,通常以樹脂薄片之形態使用時,亦帶有適度黏著性。且通常以樹脂薄片之形態使用時,獲得充分可撓性,處理性提高。再者通常可獲得具有充分斷裂強度之硬化物。When a liquid epoxy resin and a solid epoxy resin are used in combination as the epoxy resin (A), the mass ratio of the liquid epoxy resin: the solid epoxy resin is preferably 1:0.1 to 1:20, more preferably 1:1 to 1:10, and particularly preferably 1:1.5 to 1:5. By making the mass ratio of the liquid epoxy resin to the solid epoxy resin within this range, the desired effect of the present invention can be significantly obtained. Furthermore, when it is usually used in the form of a resin sheet, it also has moderate adhesiveness. And when it is usually used in the form of a resin sheet, it has sufficient flexibility and improved handling. Furthermore, a hardened material having sufficient fracture strength can usually be obtained.
(A)環氧樹脂之環氧當量較佳為50g/eq.~5000 g/eq.,更佳為50g/eq.~3000g/eq.,又更佳為80g/eq.~2000 g/eq.,再更佳為110g/eq.~1000g/eq.。藉由成為該範圍,樹脂組成物層的硬化物之交聯密度充分且可獲得表面粗糙度小的絕緣層。環氧當量係包含1當量環氧基之環氧樹脂的質量。該環氧當量可根據JIS K7236測定。(A) The epoxy equivalent of the epoxy resin is preferably 50 g/eq. to 5000 g/eq., more preferably 50 g/eq. to 3000 g/eq., still more preferably 80 g/eq. to 2000 g/eq., and still more preferably 110 g/eq. to 1000 g/eq.. By being within this range, the crosslinking density of the cured product of the resin composition layer is sufficient and an insulating layer with a small surface roughness can be obtained. The epoxy equivalent is the mass of the epoxy resin containing 1 equivalent of epoxy groups. The epoxy equivalent can be measured according to JIS K7236.
(A)環氧樹脂之重量平均分子量(Mw),基於顯著獲得本發明期望效果之觀點,較佳為100~5000,更佳為100~4000,又更佳為200~5000。 樹脂之重量平均分子量係藉由凝膠滲透層析(GPC)法測定之聚苯乙烯換算之值。(A) The weight average molecular weight (Mw) of the epoxy resin is preferably 100-5000, more preferably 100-4000, and even more preferably 200-5000 in order to significantly obtain the desired effect of the present invention. The weight average molecular weight of the resin is a value converted to polystyrene measured by gel permeation chromatography (GPC).
(A)環氧樹脂之含量,基於獲得顯示良好機械強度、絕緣信賴性之絕緣層之觀點,於將樹脂組成物中之不揮發成分設為100質量%時,較佳為1質量%以上,更佳為2質量%以上,又更佳為3質量%以上。環氧樹脂含量之上限,基於顯著獲得本發明期望效果之觀點,較佳為30質量%以下,更佳為25質量%以下,特佳為20質量%以下。又,本發明中,樹脂組成物中之各成分含量,只要未另外明示,則係將樹脂組成物中之不揮發成分設為100質量%時之值。(A) The content of the epoxy resin is preferably 1% by mass or more, more preferably 2% by mass or more, and even more preferably 3% by mass or more, based on the viewpoint of obtaining an insulating layer showing good mechanical strength and insulation reliability, when the non-volatile components in the resin composition are set to 100% by mass. The upper limit of the content of the epoxy resin is preferably 30% by mass or less, more preferably 25% by mass or less, and particularly preferably 20% by mass or less, based on the viewpoint of significantly obtaining the expected effect of the present invention. In addition, in the present invention, the content of each component in the resin composition is the value when the non-volatile components in the resin composition are set to 100% by mass, unless otherwise specified.
<(B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑> 樹脂組成物含有(B)選自酸酐系硬化劑、胺系硬化劑及酚系硬化劑之至少1種硬化劑作為(B)成分。硬化劑通常具有與(A)成分反應使樹脂組成物硬化之機能,但特別藉由於樹脂組成物中含有該等硬化劑,除了與(A)成分反應使樹脂組成物硬化之機能以外,亦可獲得翹曲之發生受抑制之硬化物。(B)成分可單獨使用1種,亦可組合2種以上使用。<(B) at least one curing agent selected from an acid anhydride curing agent, an amine curing agent, and a phenol curing agent> The resin composition contains (B) at least one curing agent selected from an acid anhydride curing agent, an amine curing agent, and a phenol curing agent as the (B) component. The curing agent generally has the function of curing the resin composition by reacting with the (A) component, but in particular, by containing such a curing agent in the resin composition, in addition to the function of curving the resin composition by reacting with the (A) component, a cured product with suppressed warping can be obtained. The (B) component can be used alone or in combination of two or more.
作為酸酐系硬化劑,舉例為1分子內具有1個以上酸酐基之硬化劑。作為酸酐系硬化劑之具體例,可舉例鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、4-甲基六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、甲基耐地酸酐、氫化甲基耐地酸酐、三烷基四氫鄰苯二甲酸酐、十二烷基琥珀酸酐、5-(2,5-二氧代四氫-3-呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐、苯偏三酸酐、均苯四酸酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、萘四羧酸二酐、氧基二鄰苯二甲酸二酐、3,3’-4,4’-二苯基碸四羧酸二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二氧代-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮、乙二醇雙(苯偏三酸酐)、苯乙烯與馬來酸共聚合之苯乙烯・馬來酸樹脂等之聚合型之酸酐等。Examples of the acid anhydride curing agent include a curing agent having one or more acid anhydride groups in one molecule. Specific examples of the acid anhydride curing agent include phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, methylhexahydrophthalic anhydride, methylnalidic anhydride, hydrogenated methylnalidic anhydride, trialkyltetrahydrophthalic anhydride, dodecylsuccinic anhydride, 5-(2,5-dioxotetrahydro-3-furanyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, trimellitic anhydride, homotriac Pyromellitic anhydride, benzophenonetetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, naphthalenetetracarboxylic dianhydride, oxydiphthalic dianhydride, 3,3'-4,4'-diphenylsulfonatetetracarboxylic dianhydride, 1,3,3a,4,5,9b-hexahydro-5-(tetrahydro-2,5-dioxo-3-furanyl)-naphtho[1,2-c]furan-1,3-dione, ethylene glycol bis(trimellitic anhydride), styrene-maleic acid resin copolymerized with maleic acid, etc.
作為酸酐系硬化劑之市售品,舉例為新日本理化公司製之「MH-700」等。Examples of commercially available acid anhydride hardeners include "MH-700" manufactured by Shin Nippon Chemical Co., Ltd.
作為胺系硬化劑舉例為1分子內具有1個以上胺基之硬化劑,舉例為例如脂肪族胺類、聚醚胺類、脂環式胺類、芳香族胺類等,其中,基於發揮本發明期望效果之觀點,較佳為芳香族胺類。胺系硬化劑較佳為1級胺或2級胺,更佳為1級胺。作為胺系硬化劑之具體例舉例為4,4’-亞甲基雙(2,6-二甲基苯胺)、二苯基二胺基碸、4,4’-二胺基二苯基甲烷、4,4’-二胺基二苯基碸、3,3’-二胺基二苯基碸、間-苯基二胺、間-二甲苯基二胺、二乙基甲苯二胺、4,4’-二胺基二苯基醚、3,3’-二甲基-4,4’-二胺基聯苯、2,2’-二甲基-4,4’-二胺基聯苯、3,3’-二羥基聯苯胺、2,2-雙(3-胺基-4-羥基苯基)丙烷、3,3-二甲基-5,5-二乙基-4,4-二苯基甲烷二胺、2,2-雙(4-胺基苯基)丙烷、2,2-雙(4-(4-胺基苯氧基)苯基)丙烷、1,3-雙(3-胺基苯氧基)苯、1,3-雙(4-胺基苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、4,4’-雙(4-胺基苯氧基)聯苯、雙(4-(4-胺基苯氧基)苯基)碸、雙(4-(3-胺基苯氧基)苯基)碸等。Examples of amine-based hardeners include hardeners having one or more amine groups in one molecule, such as aliphatic amines, polyether amines, alicyclic amines, aromatic amines, etc. Among them, aromatic amines are preferred from the viewpoint of exerting the desired effect of the present invention. The amine-based hardener is preferably a primary amine or a secondary amine, and more preferably a primary amine. Specific examples of amine-based curing agents include 4,4'-methylenebis(2,6-dimethylaniline), diphenyldiaminosulfonate, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylsulfonate, 3,3'-diaminodiphenylsulfonate, m-phenyldiamine, m-xylyldiamine, diethyltoluenediamine, 4,4'-diaminodiphenyl ether, 3,3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl-4,4'-diaminobiphenyl, 3,3'-dihydroxybenzidine, 2,2-bis(3-amino)benzidine, bis(4-aminophenoxy)phenyl)sulfone, bis(4-(4-aminophenoxy)phenyl)sulfone, and the like.
胺系硬化劑亦可使用市售品,舉例為例如日本化藥公司製之「KAYABOND C-200S」、「KAYABOND C-100」、「KAYAHARD A-A」、「KAYAHARD A-B」、「KAYAHARD A-S」、三菱化學公司製之「EPICURE W」等。Amine hardeners that can be used are commercially available products, for example, "KAYABOND C-200S", "KAYABOND C-100", "KAYAHARD A-A", "KAYAHARD A-B", "KAYAHARD A-S" manufactured by Nippon Kayaku Co., Ltd., and "EPICURE W" manufactured by Mitsubishi Chemical Corporation.
作為酚系硬化劑舉例為1分子中具有1個以上,較佳2個以上之鍵結於芳香環(苯環、萘環等)之羥基的硬化劑。其中,較佳具有鍵結於苯環之羥基的化合物。且,基於耐熱性及耐水性之觀點,較佳為具有酚醛清漆構造之酚系硬化劑。再者,基於密著性之觀點,以含氮酚系硬化劑較佳,更好為含有三嗪骨架之酚系硬化劑。尤其,基於高度滿足耐熱性、耐水性及密著性之觀點,較佳為含有三嗪骨架之酚酚醛清漆硬化劑。An example of a phenolic hardener is a hardener having one or more, preferably two or more, hydroxyl groups bonded to an aromatic ring (benzene ring, naphthalene ring, etc.) in one molecule. Among them, compounds having a hydroxyl group bonded to a benzene ring are preferred. Moreover, from the viewpoint of heat resistance and water resistance, a phenolic hardener having a novolac structure is preferred. Furthermore, from the viewpoint of adhesion, a nitrogen-containing phenolic hardener is preferred, and a phenolic hardener containing a triazine skeleton is more preferred. In particular, from the viewpoint of highly satisfying heat resistance, water resistance, and adhesion, a phenolic novolac hardener containing a triazine skeleton is preferred.
作為酚系硬化劑之具體例舉例為明和化成公司製之「MEH-7700」、「MEH-7810」、「MEH-7851」、「MEH-8000H」;日本化藥公司製之「NHN」、「CBN」、「GPH」;DIC公司製之「TD-2090」、「TD-2090-60M」、「LA-7052」、「LA-7054」、「LA-1356」、「LA-3018」、「LA-3018-50P」、「EXB-9500」、「HPC-9500」、「KA-1160」、「KA-1163」、「KA-1165」;群榮化學公司製之「GDP-6115L」、「GDP-6115H」、「ELPC75」;Sigma Aldrich公司製之「2,2-二烯丙基雙酚A」等。Specific examples of phenolic hardeners include "MEH-7700", "MEH-7810", "MEH-7851", and "MEH-8000H" manufactured by Meiwa Chemicals; "NHN", "CBN", and "GPH" manufactured by Nippon Kayaku; and "TD-2090", "TD-2090-60M", "LA-7052", and "LA- "7054", "LA-1356", "LA-3018", "LA-3018-50P", "EXB-9500", "HPC-9500", "KA-1160", "KA-1163", "KA-1165"; "GDP-6115L", "GDP-6115H", "ELPC75" manufactured by Qunrong Chemical Company; "2,2-Diallylbisphenol A" manufactured by Sigma Aldrich Company, etc.
(B)成分之含量,基於顯著獲得本發明效果之觀點,將樹脂組成物中不揮發成分設為100質量%時,較佳為0.1質量%以上,更佳為0.2質量%以上,又更佳為0.3質量%以上,較佳為20質量%以下,更佳為15質量%以下,又更佳為10質量%以下。From the viewpoint of remarkably obtaining the effect of the present invention, the content of the component (B) is preferably 0.1% by mass or more, more preferably 0.2% by mass or more, and even more preferably 0.3% by mass or more, and is preferably 20% by mass or less, more preferably 15% by mass or less, and even more preferably 10% by mass or less, when the non-volatile components in the resin composition are set to 100% by mass.
將(A)成分之環氧基數設為1時,(B)成分之活性基數較佳為0.1以上,更佳為0.3以上,又更佳為0.5以上,較佳為2以下,更佳為1.8以下,又更佳為1.5以下。此處,所謂「(A)成分之環氧基數」係樹脂組成物中存在之(A)成分之不揮發成分的質量除以環氧當量之值全部予以合計之值。且所謂「(B)成分之活性基數」係樹脂組成物中存在之(B)成分之不揮發成分的質量除以活性基當量之值全部予以合計之值。藉由將(A)成分之環氧基數設為1時的(B)成分之活性基數設為上述範圍內,可顯著獲得本發明之期望效果。When the number of epoxy groups of component (A) is set to 1, the number of active groups of component (B) is preferably 0.1 or more, more preferably 0.3 or more, and even more preferably 0.5 or more, preferably 2 or less, more preferably 1.8 or less, and even more preferably 1.5 or less. Here, the so-called "number of epoxy groups of component (A)" is the total value of the mass of the non-volatile components of component (A) present in the resin composition divided by the value of the epoxy equivalent. And the so-called "number of active groups of component (B)" is the total value of the mass of the non-volatile components of component (B) present in the resin composition divided by the value of the active group equivalent. By setting the number of active groups of component (B) within the above range when the number of epoxy groups of component (A) is set to 1, the expected effect of the present invention can be significantly obtained.
<(C)具有芳香族構造之聚酯多元醇樹脂> 樹脂組成物含有(C)具有芳香族構造之聚酯多元醇樹脂作為(C)成分。藉由於樹脂組成物中含有(C)成分,可緩和其硬化物之應力,結果可獲得具有高接合強度且硬化物之翹曲發生受抑制之硬化物。且,由於(C)成分可發揮緩和應力之作用,故通常可降低硬化物之熱膨脹係數(CTE)。(C)成分可單獨使用1種,亦可組合2種以上使用。<(C) Polyester polyol resin with aromatic structure> The resin composition contains (C) polyester polyol resin with aromatic structure as component (C). By containing component (C) in the resin composition, the stress of the cured product can be relieved, and as a result, a cured product with high bonding strength and suppressed warping of the cured product can be obtained. In addition, since component (C) can play a role in relieving stress, the thermal expansion coefficient (CTE) of the cured product can usually be reduced. Component (C) can be used alone or in combination of two or more.
作為(C)成分之含量,基於獲得具有高接合強度且硬化物之翹曲發生受抑制之硬化物之觀點,將樹脂組成物中不揮發成分設為100質量%時,較佳為2質量%以上,更佳為3質量%以上,又更好為4質量%以上,再更佳為5質量%以上。基於獲得接合強度及熱膨脹係數優異之硬化物之觀點,上限為20質量%以下,較佳為15質量%以下,更佳為10質量%以下,又更佳為8質量%以下。The content of the component (C) is preferably 2% by mass or more, more preferably 3% by mass or more, further preferably 4% by mass or more, and further preferably 5% by mass or more, based on 100% by mass of the non-volatile components in the resin composition, from the viewpoint of obtaining a cured product having high bonding strength and suppressed warping of the cured product. From the viewpoint of obtaining a cured product having excellent bonding strength and thermal expansion coefficient, the upper limit is 20% by mass or less, preferably 15% by mass or less, further preferably 10% by mass or less, and further preferably 8% by mass or less.
基於抑制硬化物之翹曲發生,並且提高對於銅箔等之導體層之密著性,進而提高水解性之觀點,(C)成分較佳為具有源自聚酯之構造及源自多元醇之構造的樹脂。該樹脂例如可使多元醇與聚羧酸反應而獲得。且作為(C)成分較佳為於源自聚酯之構造及源自多元醇之構造之任一者中具有芳香族構造,基於顯著獲得本發明效果之觀點,更佳為於源自聚酯之構造及源自多元醇之構造之任一者中具有雙酚骨架,又更佳於源自多元醇之構造具有雙酚骨架。所謂芳香族構造係一般定義為芳香族之化學構造,亦包含多環芳香族及芳香族雜環。作為雙酚骨架,舉例為例如雙酚A骨架、雙酚B骨架、雙酚C骨架、雙酚AF骨架等,較佳為雙酚A骨架。From the viewpoint of suppressing the occurrence of warping of the cured product, improving the adhesion to the conductive layer such as copper foil, and further improving the hydrolyzability, the component (C) is preferably a resin having a structure derived from polyester and a structure derived from polyol. The resin can be obtained, for example, by reacting a polyol with a polycarboxylic acid. And as the component (C), it is preferred that either the structure derived from polyester or the structure derived from polyol has an aromatic structure. From the viewpoint of significantly obtaining the effect of the present invention, it is more preferred that either the structure derived from polyester or the structure derived from polyol has a bisphenol skeleton, and it is even more preferred that the structure derived from polyol has a bisphenol skeleton. The so-called aromatic structure is generally defined as an aromatic chemical structure, and also includes polycyclic aromatics and aromatic heterocycles. Examples of the bisphenol skeleton include a bisphenol A skeleton, a bisphenol B skeleton, a bisphenol C skeleton, and a bisphenol AF skeleton, and a bisphenol A skeleton is preferred.
基於提高與(A)環氧樹脂之相溶性及對銅箔等之密著性之觀點,(C)成分較佳為該(C)成分之分子鏈末端為羥基及羧基之任一者。作為(C)成分所含之羥基及羧基之數,每1分子較佳為2個以上,較佳為6個以下,更佳為4個以下,又更佳為3個以下,特佳為2個。From the viewpoint of improving the compatibility with the epoxy resin (A) and the adhesion to the copper foil, etc., the component (C) preferably has a molecular chain terminal of either a hydroxyl group or a carboxyl group. The number of hydroxyl groups and carboxyl groups contained in the component (C) is preferably 2 or more, preferably 6 or less, more preferably 4 or less, still more preferably 3 or less, and particularly preferably 2 per molecule.
基於顯著獲得本發明效果之觀點,源自多元醇之構造較佳具有環氧乙烷構造(-CH2 CH2 O-)、環氧丙烷構造(-CH2 CH2 CH2 O-)、環氧丁烷構造(-CH2 CH2 CH2 CH2 O-)等之碳原子數2以上之環氧烷構造。From the viewpoint of significantly obtaining the effects of the present invention, the structure derived from the polyol preferably has an alkylene oxide structure having 2 or more carbon atoms such as an ethylene oxide structure ( -CH2CH2O- ), a propylene oxide structure ( -CH2CH2CH2O- ) , or a butylene oxide structure ( -CH2CH2CH2CH2O- ).
作為多元醇,舉例為例如乙二醇、丙二醇、1,4-丁二醇、1,6-己二醇、二乙二醇、新戊二醇、1,3-丁二醇等之脂肪族多元醇;環己烷二甲醇等之具有脂環式構造之多元醇;雙酚A及雙酚F等之具有雙酚骨架等之芳香族構造之多元醇;具有前述芳香族構造之多元醇經環氧烷改質之多元醇。其中,作為多元醇,較佳為具有脂環式構造之多元醇、具有芳香族構造之多元醇、具有芳香族構造之多元醇經環氧烷改質之多元醇,更佳為具有芳香族構造之多元醇經環氧烷改質之多元醇。多元醇可單獨使用1種,亦可組合2種以上使用。Examples of polyols include aliphatic polyols such as ethylene glycol, propylene glycol, 1,4-butanediol, 1,6-hexanediol, diethylene glycol, neopentyl glycol, and 1,3-butanediol; polyols having an alicyclic structure such as cyclohexanedimethanol; polyols having an aromatic structure such as bisphenol A and bisphenol F; and polyols having the aforementioned aromatic structures modified with alkylene oxide. Among them, polyols having an alicyclic structure, polyols having an aromatic structure, and polyols having an aromatic structure modified with alkylene oxide are preferred, and polyols having an aromatic structure modified with alkylene oxide are more preferred. One type of polyol may be used alone, or two or more types may be used in combination.
作為具有芳香族構造之多元醇的改質所用之環氧烷,舉例為例如環氧乙烷、環氧丙烷、環氧丁烷等之碳原子數為2以上之環氧烷等。碳原子數為2以上之環氧烷的碳原子數上限較佳為4以下,更佳為3以下。Examples of alkylene oxides used for modifying polyols having an aromatic structure include alkylene oxides having 2 or more carbon atoms such as ethylene oxide, propylene oxide, and butylene oxide. The upper limit of the carbon number of the alkylene oxide having 2 or more carbon atoms is preferably 4 or less, more preferably 3 or less.
多元醇之數平均分子量較佳為50以上,較佳為1500以下,更佳為1000以下,又更佳為700以下。The number average molecular weight of the polyol is preferably 50 or more, preferably 1500 or less, more preferably 1000 or less, and even more preferably 700 or less.
多元醇亦可使用市售品。作為市售品舉例為例如DIC公司製之「High Blocks MDB-561」等。Commercially available polyols may be used, and examples of commercially available polyols include "High Blocks MDB-561" manufactured by DIC Corporation.
作為聚羧酸舉例為例如琥珀酸、己二酸、癸二酸、十二烷二羧酸等之脂肪族聚羧酸;對苯二甲酸、間苯二甲酸、鄰苯二甲酸、萘二羧酸等之芳香族聚羧酸;該等之酸酐或酯化物等。Examples of the polycarboxylic acid include aliphatic polycarboxylic acids such as succinic acid, adipic acid, sebacic acid, and dodecanedicarboxylic acid; aromatic polycarboxylic acids such as terephthalic acid, isophthalic acid, phthalic acid, and naphthalenedicarboxylic acid; and anhydrides or esters thereof.
聚羧酸可單獨使用1種,亦可組合2種以上使用,較佳包含脂肪族聚羧酸作為聚羧酸。作為脂肪族聚羧酸之含有率,於聚羧酸全部含量中,較佳為5莫耳%以上,更佳為10莫耳%以上,較佳為100莫耳%以下。The polycarboxylic acid may be used alone or in combination of two or more, preferably aliphatic polycarboxylic acid. The content of aliphatic polycarboxylic acid is preferably 5 mol% or more, more preferably 10 mol% or more, and preferably 100 mol% or less in the total content of the polycarboxylic acid.
作為一實施形態,作為聚羧酸係組合使用脂肪族聚羧酸及芳香族聚羧酸。芳香族聚羧酸及脂肪族聚羧酸之含量比(芳香族聚羧酸/脂肪族聚羧酸),以莫耳基準計,較佳為1/99以上,更佳為30/70以上,又更佳為50/50以上,較佳為99/1以下,更佳為90/10以下,又更佳為85/15以下。藉由將芳香族聚羧酸及脂肪族聚羧酸之含量比設為該範圍內,可顯著獲得本發明之效果。As one embodiment, aliphatic polycarboxylic acid and aromatic polycarboxylic acid are used in combination as polycarboxylic acid. The content ratio of aromatic polycarboxylic acid to aliphatic polycarboxylic acid (aromatic polycarboxylic acid/aliphatic polycarboxylic acid) is preferably 1/99 or more, more preferably 30/70 or more, and even more preferably 50/50 or more, and preferably 99/1 or less, more preferably 90/10 or less, and even more preferably 85/15 or less, on a molar basis. By setting the content ratio of aromatic polycarboxylic acid to aliphatic polycarboxylic acid within this range, the effect of the present invention can be significantly obtained.
(C)成分在不阻礙本發明目的之程度可含有碳原子數4以上之氧伸烷基單位。作為碳原子數為4以上之氧伸烷基單位之含有率,較佳為10質量%以下,更佳為5質量%以下,又更佳為3質量%以下,特佳為1質量%以下。The component (C) may contain an oxyalkylene unit having 4 or more carbon atoms to the extent that the purpose of the present invention is not impeded. The content of the oxyalkylene unit having 4 or more carbon atoms is preferably 10% by mass or less, more preferably 5% by mass or less, further preferably 3% by mass or less, and particularly preferably 1% by mass or less.
(C)成分可藉由例如使多元醇與聚羧酸反應而製造。作為反應溫度較佳為190℃以上,更佳為200℃以上,較佳為250℃以下,更佳為240℃以下。且反應時間較佳為1小時以上,較佳為100小時以下。The component (C) can be produced, for example, by reacting a polyol with a polycarboxylic acid. The reaction temperature is preferably 190°C or higher, more preferably 200°C or higher, preferably 250°C or lower, and more preferably 240°C or lower. The reaction time is preferably 1 hour or longer, and preferably 100 hours or shorter.
反應時,根據需要,可使用觸媒。作為觸媒舉例為例如四異丙基鈦酸酯、四丁基鈦酸酯之鈦系觸媒;二丁基錫氧化物等之錫系觸媒;對甲苯磺酸等之有機磺酸系觸媒等。觸媒可單獨使用1種,亦可組合2種以上使用。During the reaction, a catalyst may be used as needed. Examples of the catalyst include titanium-based catalysts such as tetraisopropyl titanium ester and tetrabutyl titanium ester; tin-based catalysts such as dibutyltin oxide; and organic sulfonic acid-based catalysts such as p-toluenesulfonic acid. The catalyst may be used alone or in combination of two or more.
作為觸媒之含量,基於有效進行反應之觀點,相對於多元醇與聚羧酸之合計100質量份,較佳為0.0001質量份以上,更佳為0.0005質量份以上,較佳為0.01質量份以下,更佳為0.005質量份以下。From the viewpoint of effective reaction, the content of the catalyst is preferably 0.0001 parts by mass or more, more preferably 0.0005 parts by mass or more, and preferably 0.01 parts by mass or less, more preferably 0.005 parts by mass or less, based on 100 parts by mass of the total of the polyol and the polycarboxylic acid.
作為(C)成分之羥基價,基於顯著獲得本發明效果之觀點,較佳為2mgKOH/g以上,更佳為4mgKOH/g以上,又更佳為6mgKOH/g以上、10mgKOH/g以上、25 mgKOH/g以上、30mgKOH/g以上或35mgKOH/g以上,較佳為450mgKOH/g以下,更佳為100mgKOH/g以下,又更佳為50mgKOH/g以下、45mgKOH/g以下、或40mgKOH/g以下。羥基價可藉由依據JIS K0070的方法測定。The hydroxyl value of the component (C) is preferably 2 mgKOH/g or more, more preferably 4 mgKOH/g or more, further preferably 6 mgKOH/g or more, 10 mgKOH/g or more, 25 mgKOH/g or more, 30 mgKOH/g or more, or 35 mgKOH/g or more, and is preferably 450 mgKOH/g or less, more preferably 100 mgKOH/g or less, further preferably 50 mgKOH/g or less, 45 mgKOH/g or less, or 40 mgKOH/g or less, from the viewpoint of remarkably obtaining the effect of the present invention. The hydroxyl value can be measured by a method in accordance with JIS K0070.
且,作為(C)成分之酸價,基於顯著獲得本發明效果之觀點,較佳為2mgKOH/g以上,更佳為4 mgKOH/g以上,又更佳為6mgKOH/g以上、10mgKOH/g以上、25mgKOH/g以上、30mgKOH/g以上或35mgKOH/g以上,較佳為450mgKOH/g以下,更佳為100mgKOH/g以下,又更佳為50mgKOH/g以下、45mgKOH/g以下或40mgKOH/g以下。酸價可藉由依據JIS K0070之方法測定。Furthermore, the acid value of the component (C) is preferably 2 mgKOH/g or more, more preferably 4 mgKOH/g or more, and further preferably 6 mgKOH/g or more, 10 mgKOH/g or more, 25 mgKOH/g or more, 30 mgKOH/g or more, or 35 mgKOH/g or more, and is preferably 450 mgKOH/g or less, more preferably 100 mgKOH/g or less, and further preferably 50 mgKOH/g or less, 45 mgKOH/g or less, or 40 mgKOH/g or less, from the viewpoint of significantly obtaining the effect of the present invention. The acid value can be measured by a method in accordance with JIS K0070.
作為(C)成分於75℃下之黏度,基於顯著獲得本發明效果之觀點,較佳為0.1Pa·s以上,更佳為0.2Pa·s以上,又更佳為0.5Pa·s以上,較佳為25Pa·s以下,更佳為20Pa·s以下,又更佳為15Pa·s以下。黏度例如可使用E型黏度計測定。The viscosity of the component (C) at 75° C. is preferably 0.1 Pa·s or more, more preferably 0.2 Pa·s or more, and even more preferably 0.5 Pa·s or more, and preferably 25 Pa·s or less, more preferably 20 Pa·s or less, and even more preferably 15 Pa·s or less, from the viewpoint of significantly obtaining the effects of the present invention. The viscosity can be measured using an E-type viscometer, for example.
作為(C)成分之數平均分子量,基於提高與(A)環氧樹脂之相溶性及對銅箔等之密著性之觀點,較佳為500以上,更佳為1000以上,又更佳為1500以上、2000以上或2500以上,較佳為7000以下,更佳為6000以下,又更佳為5000以下。數平均分子量可使用GPC(凝膠滲透層析法)測定。The number average molecular weight of the component (C) is preferably 500 or more, more preferably 1000 or more, more preferably 1500 or more, 2000 or more, or 2500 or more, and preferably 7000 or less, more preferably 6000 or less, and even more preferably 5000 or less, from the viewpoint of improving compatibility with the epoxy resin (A) and adhesion to copper foil, etc. The number average molecular weight can be measured using GPC (gel permeation chromatography).
作為(C)成分之玻璃轉移溫度,基於顯著獲得本發明效果之觀點,較佳為-100℃以上,更佳為-80℃以上,又更佳為-70℃以上,較佳為50℃以下,更佳為40℃以下,又更佳為30℃以下。玻璃轉移溫度係利用DSC (示差掃描熱量測定)而測定的值。The glass transition temperature of the component (C) is preferably -100°C or higher, more preferably -80°C or higher, and even more preferably -70°C or higher, and is preferably 50°C or lower, more preferably 40°C or lower, and even more preferably 30°C or lower, from the viewpoint of remarkably obtaining the effect of the present invention. The glass transition temperature is a value measured by DSC (differential scanning calorimetry).
<(D)無機填充材> 樹脂組成物含有(D)無機填充材。藉由於樹脂組成物中含有(D)無機填充材,可獲得熱膨脹係數優異之硬化物。<(D) Inorganic filler> The resin composition contains (D) inorganic filler. By containing (D) inorganic filler in the resin composition, a cured product with excellent thermal expansion coefficient can be obtained.
作為無機填充材之材料係使用無機化合物。作為無機填充材之材料之例,舉例為氧化矽、氧化鋁、玻璃、堇青石、矽氧化物、硫酸鋇、碳酸鋇、滑石、黏土、雲母粉、氧化鋅、水滑石、勃姆石(Boehmite)、氫氧化鋁、氫氧化鎂、碳酸鈣、碳酸鎂、氧化鎂、氮化硼、氮化鋁、氮化錳、硼酸鋁、碳酸鍶、鈦酸鍶、鈦酸鈣、鈦酸鎂、鈦酸鉍、氧化鈦、氧化鋯、鈦酸鋇、鈦酸鋯酸鋇、鋯酸鋇、鋯酸鈣、磷酸鋯及磷酸鎢酸鋯等。該等中適宜為氧化矽、氧化鋁,特佳為氧化矽。作為氧化矽舉例為例如無定形氧化矽、熔融氧化矽、結晶氧化矽、合成氧化矽、中空氧化矽等。且作為氧化矽較好為球狀氧化矽。(D)無機填充材可單獨使用1種,亦可組合2種以上使用。Inorganic compounds are used as materials for the inorganic filler. Examples of materials for the inorganic filler include silicon oxide, aluminum oxide, glass, cordierite, silicon oxide, barium sulfate, barium carbonate, talc, clay, mica powder, zinc oxide, hydrotalcite, boehmite, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum nitride, manganese nitride, aluminum borate, strontium carbonate, strontium titanate, calcium titanate, magnesium titanate, bismuth titanate, titanium oxide, zirconium oxide, barium titanate, barium zirconate, barium zirconate, calcium zirconate, zirconium phosphate, and zirconium tungstate phosphate. Among them, silicon oxide and aluminum oxide are suitable, and silicon oxide is particularly preferred. Examples of silicon oxide include amorphous silicon oxide, molten silicon oxide, crystalline silicon oxide, synthetic silicon oxide, hollow silicon oxide, etc. And spherical silicon oxide is preferred as silicon oxide. (D) The inorganic filler may be used alone or in combination of two or more.
作為(D)無機填充材之市售品舉例為例如新日鐵住金材料公司製之「SP60-05」、「SP507-05」;ADMATECHS公司製之「YC100C」、「YA050C」、「YA050C-MJE」、「YA010C」;DENKA公司製之「UFP-30」;德山公司製之「SILFIL NSS-3N」、「SILFIL NSS-4N」、「SILFIL NSS-5N」;ADMATECHS公司製之「SC2500SQ」、「SO-C4」、「SO-C2」、「SO-C1」;等。Examples of commercially available products of (D) inorganic fillers include "SP60-05" and "SP507-05" manufactured by Nippon Steel & Sumitomo Metal Materials Corporation; "YC100C", "YA050C", "YA050C-MJE", and "YA010C" manufactured by ADMATECHS; "UFP-30" manufactured by DENKA; "SILFIL NSS-3N", "SILFIL NSS-4N", and "SILFIL NSS-5N" manufactured by Tokuyama; "SC2500SQ", "SO-C4", "SO-C2", and "SO-C1" manufactured by ADMATECHS; and the like.
(D)無機填充材之平均粒徑,基於顯著獲得本發明之期望效果之觀點,較佳為0.01μm以上,更佳為0.05μm以上,特佳為0.1μm以上,較佳為25μm以下,更佳為5μm以下,又更佳為1μm以下。(D) The average particle size of the inorganic filler is preferably 0.01 μm or more, more preferably 0.05 μm or more, particularly preferably 0.1 μm or more, preferably 25 μm or less, more preferably 5 μm or less, and even more preferably 1 μm or less, from the viewpoint of significantly obtaining the desired effect of the present invention.
(D)無機填充材之平均粒徑可基於Mie散射理論,以雷射繞射.散射法進行測定。具體而言,可利用雷射繞射式粒度分佈測定裝置,以體積基準作成無機填充材之粒度分佈,以其中值徑作為平均粒徑而測定。測定樣品可使用將無機填充材100mg、甲基乙基酮10g量取於安瓿中以超音波分散10分鐘而成者。測定樣品係使用雷射繞射式粒度分佈測定裝置,將使用光源波長設為藍色及紅色,以流動胞(flow cell)方式測定(D)無機填充材之體積基準之粒徑分佈,自所得粒徑分佈算出平均粒徑作為中值徑。作為雷射繞射式粒度分佈測定裝置舉例為例如堀場製作所公司製之「LA-960」等。The average particle size of (D) inorganic fillers can be measured by laser diffraction/scattering method based on Mie scattering theory. Specifically, a laser diffraction particle size distribution measuring device can be used to make a particle size distribution of the inorganic filler based on volume, and the median diameter can be used for measurement. The measurement sample can be made by measuring 100 mg of inorganic filler and 10 g of methyl ethyl ketone in an ampoule and dispersing them ultrasonically for 10 minutes. The sample is measured using a laser diffraction particle size distribution measuring device, and the wavelength of the light source is set to blue and red. The volume-based particle size distribution of (D) inorganic fillers is measured by flow cell method, and the average particle size is calculated from the obtained particle size distribution as the median diameter. An example of a laser diffraction particle size distribution measuring device is "LA-960" manufactured by Horiba, Ltd.
(D)無機填充材之比表面積,基於顯著獲得本發明之期望效果之觀點,較佳為1m2 /g以上,更佳為1.5 m2 /g以上,特佳為2m2 /g以上或3m2 /g以上。上限並未特別限制,但較佳為60m2 /g以下、50m2 /g以下或40m2 /g以下。比表面積可依據BET法,使用比表面積測定裝置(MOUNTECH公司製Macsorb HM-1210),於試料表面吸附氮氣,使用BET多點法算出比表面積而獲得。(D) The specific surface area of the inorganic filler is preferably 1 m 2 /g or more, more preferably 1.5 m 2 /g or more, and particularly preferably 2 m 2 /g or more or 3 m 2 /g or more, from the viewpoint of significantly obtaining the desired effect of the present invention. The upper limit is not particularly limited, but is preferably 60 m 2 /g or less, 50 m 2 / g or less, or 40 m 2 /g or less. The specific surface area can be obtained by adsorbing nitrogen on the sample surface using a specific surface area measuring device (Macsorb HM-1210 manufactured by MOUNTECH) according to the BET method, and calculating the specific surface area using the BET multi-point method.
基於提高耐濕性及分散性之觀點,(D)無機填充材較佳以表面處理劑處理。作為表面處理劑舉例為例如含氟矽烷偶合劑、胺基矽烷系偶合劑、環氧矽烷系偶合劑、巰基矽烷系偶合劑、矽烷系偶合劑、烷氧基矽烷、有機矽氮烷化合物、鈦酸酯系偶合劑等。又,表面處理劑可單獨使用1種,亦可任意組合2種以上使用。From the viewpoint of improving moisture resistance and dispersibility, (D) inorganic filler is preferably treated with a surface treatment agent. Examples of the surface treatment agent include fluorine-containing silane coupling agents, aminosilane-based coupling agents, epoxysilane-based coupling agents, butylsilane-based coupling agents, silane-based coupling agents, alkoxysilanes, organic silazane compounds, and titanium ester-based coupling agents. In addition, the surface treatment agent may be used alone or in combination of two or more.
作為表面處理劑之市售品列舉為例如信越化學工業公司製「KBM403」(3-縮水甘油氧基丙基三甲氧基矽烷)、信越化學工業公司製「KBM803」(3-巰基丙基三甲氧基矽烷)、信越化學工業公司製「KBE903」(3-胺基丙基三乙氧基矽烷)、信越化學工業公司製「KBM573」(N-苯基-3-胺基丙基三甲氧基矽烷)、信越化學工業公司製「SZ-31」(六甲基二矽氮烷)、信越化學工業公司製「KBM103」(苯基三甲氧基矽烷)、信越化學工業公司製「KBM-4803」(長鏈環氧型矽烷偶合劑)、信越化學工業公司製「KBM-7103」(3,3,3-三氟丙基三甲氧基矽烷)等。Examples of commercially available surface treatment agents include "KBM403" (3-glycidyloxypropyltrimethoxysilane) manufactured by Shin-Etsu Chemical, "KBM803" (3-butylpropyltrimethoxysilane) manufactured by Shin-Etsu Chemical, "KBE903" (3-aminopropyltriethoxysilane) manufactured by Shin-Etsu Chemical, and "KBM573" (N-phenyl- 3-aminopropyltrimethoxysilane), Shin-Etsu Chemical Co., Ltd. "SZ-31" (hexamethyldisilazane), Shin-Etsu Chemical Co., Ltd. "KBM103" (phenyltrimethoxysilane), Shin-Etsu Chemical Co., Ltd. "KBM-4803" (long-chain epoxy-type silane coupling agent), Shin-Etsu Chemical Co., Ltd. "KBM-7103" (3,3,3-trifluoropropyltrimethoxysilane), etc.
利用表面處理劑進行表面處理之程度,基於提高無機填充材之分散性之觀點,較佳侷限於特定範圍。具體而言,無機填充材100質量份較佳以0.2質量份~5質量份之表面處理劑表面處理,更佳以0.2質量份~3質量份表面處理,又較佳以0.3質量份~2質量份表面處理。The degree of surface treatment with the surface treatment agent is preferably limited to a specific range from the viewpoint of improving the dispersibility of the inorganic filler. Specifically, 100 parts by weight of the inorganic filler is preferably treated with 0.2 to 5 parts by weight of the surface treatment agent, more preferably 0.2 to 3 parts by weight, and even more preferably 0.3 to 2 parts by weight.
利用表面處理劑進行表面處理之程度可藉由無機填充材之每單位表面積之碳量而評價。無機填充材之每單位表面積之碳量,基於提高無機填充材之分散性之觀點,較佳為0.02mg/m2 以上,更佳為0.1mg/m2 以上,又更佳為0.2mg/m2 以上。另一方面,基於抑制樹脂清漆之熔融黏度及薄片形態之熔融黏度上升之觀點,較佳為1mg/m2 以下,更佳為0.8mg/m2 以下,又更佳為0.5mg/m2 以下。The degree of surface treatment using a surface treatment agent can be evaluated by the amount of carbon per unit surface area of the inorganic filler. The amount of carbon per unit surface area of the inorganic filler is preferably 0.02 mg/m 2 or more, more preferably 0.1 mg/m 2 or more, and even more preferably 0.2 mg/m 2 or more from the viewpoint of improving the dispersibility of the inorganic filler. On the other hand, from the viewpoint of suppressing the increase in the melt viscosity of the resin varnish and the melt viscosity of the flake form, it is preferably 1 mg/m 2 or less, more preferably 0.8 mg/m 2 or less, and even more preferably 0.5 mg/m 2 or less.
無機填充材之每單位表面積之碳量可藉由將表面處理後之無機填充材以溶劑(例如甲基乙基酮(MEK))進行洗淨處理後測定。具體而言,將作為溶劑之充分量之MEK添加於以表面處理劑表面處理之無機填充材中,於25℃進行超音波洗淨5分鐘。去除上澄液,使固形分乾燥後,使用碳分析計測定無機填充材之每單位表面積之碳量。至於碳分析計可使用例如堀場製作所公司製之「EMIA-320V」等。The amount of carbon per unit surface area of an inorganic filler can be measured by washing the surface treated inorganic filler with a solvent (e.g., methyl ethyl ketone (MEK)). Specifically, a sufficient amount of MEK as a solvent is added to the inorganic filler surface treated with a surface treatment agent, and ultrasonic washing is performed at 25°C for 5 minutes. After removing the supernatant and drying the solids, a carbon analyzer is used to measure the amount of carbon per unit surface area of the inorganic filler. As for the carbon analyzer, for example, the "EMIA-320V" manufactured by Horiba, Ltd. can be used.
基於顯著獲得本發明之期望效果之觀點,作為(D)無機填充材之含量,於將樹脂組成物中之不揮發成分設為100質量%時,較佳為60質量%以上,更佳為65質量%以上,又更佳為70質量%以上,75質量%以上,較佳為95質量%以下,更佳為93質量%以下,又更佳為92質量%以下,90質量%以下。From the viewpoint of significantly achieving the desired effect of the present invention, the content of the (D) inorganic filler is preferably 60% by mass or more, more preferably 65% by mass or more, further preferably 70% by mass or more, 75% by mass or more, preferably 95% by mass or less, more preferably 93% by mass or less, further preferably 92% by mass or less, 90% by mass or less, when the non-volatile components in the resin composition are set to 100% by mass.
將樹脂組成物中之不揮發成分設為100質量%時的(D)成分之含量設為d1,將樹脂組成物中之不揮發成分設為100質量%時的(C)成分之含量設為c1時,基於顯著獲得本發明之效果之觀點,d1/c1較佳為5以上,更佳為10以上,又更佳為15以上,較佳為70以下,更佳為60以下,又更佳為50以下、45以下、40以下或35以下。When the content of the component (D) is d1 and the content of the component (C) is c1, the ratio of d1/c1 is preferably 5 or more, more preferably 10 or more, and even more preferably 15 or more, and preferably 70 or less, and even more preferably 60 or less, and even more preferably 50 or less, 45 or less, 40 or less, or 35 or less, from the viewpoint of remarkably obtaining the effect of the present invention.
<(E)硬化促進劑> 樹脂組成物除上述成分以外亦可進而包含(E)硬化促進劑作為任意成分。藉由含有(E)硬化促進劑,可有效調整硬化時間等。<(E) Hardening accelerator> The resin composition may further contain (E) a hardening accelerator as an optional component in addition to the above components. By containing (E) a hardening accelerator, the hardening time, etc. can be effectively adjusted.
作為硬化促進劑舉例為例如磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑、胍系硬化促進劑、金屬系硬化促進劑等。其中,較佳為磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑、金屬系硬化促進劑,更佳為胺系硬化促進劑、咪唑系硬化促進劑、金屬系硬化促進劑。硬化促進劑可單獨使用1種,或亦可組合2種以上使用。Examples of the hardening accelerator include phosphorus-based hardening accelerators, amine-based hardening accelerators, imidazole-based hardening accelerators, guanidine-based hardening accelerators, and metal-based hardening accelerators. Among them, phosphorus-based hardening accelerators, amine-based hardening accelerators, imidazole-based hardening accelerators, and metal-based hardening accelerators are preferred, and amine-based hardening accelerators, imidazole-based hardening accelerators, and metal-based hardening accelerators are more preferred. The hardening accelerators may be used alone or in combination of two or more.
作為磷系硬化促進劑舉例為例如三苯膦、硼酸鏻化合物、四苯基鏻四苯基硼酸鹽、正丁基鏻四苯基硼酸鹽、四丁基鏻癸酸鹽、(4-甲基苯基)三苯基鏻硫代氰酸鹽、四苯基鏻硫代氰酸鹽、丁基三苯基鏻硫代氰酸鹽等,較佳為三苯膦、四丁基鏻癸酸鹽。Examples of phosphorus-based hardening accelerators include triphenylphosphine, phosphonium borate compounds, tetraphenylphosphonium tetraphenylborate, n-butylphosphonium tetraphenylborate, tetrabutylphosphonium decanoate, (4-methylphenyl)triphenylphosphonium thiocyanate, tetraphenylphosphonium thiocyanate, butyltriphenylphosphonium thiocyanate, etc., preferably triphenylphosphine and tetrabutylphosphonium decanoate.
作為胺系硬化促進劑舉例為例如三乙胺、三丁胺等三烷胺,4-二甲胺基吡啶、苄基二甲胺、2,4,6-三(二甲胺基甲基)酚、1,8-二氮雜雙環(5,4,0)-十一碳烯、1,8-二氮雜雙環[5,4,0]-十一碳烯-7,4-二甲胺基吡啶、2,4,6-三(二甲胺基甲基)酚等,較好為4-二甲胺基吡啶、1,8-二氮雜雙環(5,4,0)-十一碳烯。Examples of the amine-based hardening accelerator include trialkylamines such as triethylamine and tributylamine, 4-dimethylaminopyridine, benzyldimethylamine, 2,4,6-tris(dimethylaminomethyl)phenol, 1,8-diazabicyclo(5,4,0)-undecene, 1,8-diazabicyclo[5,4,0]-undecene-7,4-dimethylaminopyridine, and 2,4,6-tris(dimethylaminomethyl)phenol. 4-dimethylaminopyridine and 1,8-diazabicyclo(5,4,0)-undecene are preferred.
作為咪唑系硬化促進劑舉例為例如2-甲基咪唑、2-十一烷基咪唑、2-十七烷基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1-氰乙基-2-甲基咪唑、1-氰乙基-2-十一烷基咪唑、1-氰乙基-2-乙基-4-甲基咪唑、1-氰乙基-2-苯基咪唑、1-氰乙基-2-十一烷基咪唑鎓偏苯三酸鹽、1-氰乙基-2-苯基咪唑鎓偏苯三酸鹽、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-十一烷基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪異氰尿酸加成物、2-苯基咪唑異氰尿酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2,3-二氫-1H-吡咯并[1,2-a]苯并咪唑、1-十二烷基-2-甲基-3-苄基咪唑鎓氯化物、2-甲基咪唑啉、2-苯基咪唑啉等咪唑化合物及咪唑化合物與環氧樹脂之加成物,較佳為2-乙基-4-甲基咪唑、1-苄基-2-苯基咪唑。Examples of imidazole-based hardening accelerators include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyanoethyl-2- -methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazole trimellitate, 1-cyanoethyl-2-phenylimidazole trimellitate, 2,4-diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-triazine, 2,4-diamino-6 -[2'-Undecylimidazolyl-(1')]-ethyl-s-triazine, 2,4-diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-s-triazine, 2,4-diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-triazine isocyanuric acid adduct, 2-phenylimidazolyl isocyanuric acid adduct, 2-phenyl-4,5-dihydroxymethyl imidazole compounds such as imidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo[1,2-a]benzimidazole, 1-dodecyl-2-methyl-3-benzylimidazolium chloride, 2-methylimidazoline, 2-phenylimidazoline, and adducts of imidazole compounds with epoxy resins, preferably 2-ethyl-4-methylimidazole and 1-benzyl-2-phenylimidazole.
作為咪唑系硬化促進劑亦可使用市售品,舉例為例如三菱化學公司製之「P200-H50」、四國化成工業公司製之「Curezol 2Mz」、「2E4MZ」、「C11Z」、「C11Z-CN」、「C11Z-CNS」、「C11Z-A」、「2MZ-OK」、「2MA-OK」、「2PHZ」等。As the imidazole-based curing accelerator, commercially available products may be used, for example, "P200-H50" manufactured by Mitsubishi Chemical Corporation, "Curezol 2Mz", "2E4MZ", "C11Z", "C11Z-CN", "C11Z-CNS", "C11Z-A", "2MZ-OK", "2MA-OK", "2PHZ" and the like manufactured by Shikoku Chemical Industries, Ltd.
作為胍系硬化促進劑舉例為例如二氰二醯胺、1-甲基胍、1-乙基胍、1-環己基胍、1-苯基胍、1-(鄰-甲苯基)胍、二甲基胍、二苯基胍、三甲基胍、四甲基胍、五甲基胍、1,5,7-三氮雜雙環[4.4.0]癸-5-烯、7-甲基-1,5,7-三氮雜雙環[4.4.0]癸-5-烯、1-甲基雙胍、1-乙基雙胍、1-正丁基雙胍、1-正十八烷基雙胍、1,1-二甲基雙胍、1,1-二乙基雙胍、1-環己基雙胍、1-烯丙基雙胍、1-苯基雙胍、1-(鄰-甲苯基)雙胍等,較佳為1,5,7-三氮雜雙環[4.4.0]癸-5-烯。Examples of guanidine-based hardening accelerators include dicyandiamide, 1-methylguanidine, 1-ethylguanidine, 1-cyclohexylguanidine, 1-phenylguanidine, 1-(o-tolyl)guanidine, dimethylguanidine, diphenylguanidine, trimethylguanidine, tetramethylguanidine, pentamethylguanidine, 1,5,7-triazabicyclo[4.4.0]dec-5-ene, 7-methyl-1,5,7-triazabicyclo[4.4.0]dec-5-ene, 4.0]dec-5-ene, 1-methylbiguanidine, 1-ethylbiguanidine, 1-n-butylbiguanidine, 1-n-octadecylbiguanidine, 1,1-dimethylbiguanidine, 1,1-diethylbiguanidine, 1-cyclohexylbiguanidine, 1-allylbiguanidine, 1-phenylbiguanidine, 1-(o-tolyl)biguanidine, etc., preferably 1,5,7-triazabicyclo[4.4.0]dec-5-ene.
作為金屬系硬化促進劑,列舉為例如鈷、銅、鋅、鐵、鎳、錳、錫等之金屬之有機金屬錯合物或有機金屬鹽。作為有機金屬錯合物之具體例舉例為乙醯基丙酮酸鈷(II)、乙醯基丙酮酸鈷(III)等有機鈷錯合物、乙醯基丙酮酸銅(II)等之有機銅錯合物、乙醯基丙酮酸鋅(II)等有機鋅錯合物、乙醯基丙酮酸鐵(III)等有機鐵錯合物、乙醯基丙酮酸鎳(II)等有機鎳錯合物、乙醯基丙酮酸錳(II)等有機錳錯合物等。作為有機金屬鹽舉例為例如辛酸鋅、辛酸錫、環烷酸鋅(zinc naphthenate)、環烷酸鈷、硬脂酸錫、硬脂酸鋅等。Examples of metal hardening accelerators include organic metal complexes or organic metal salts of metals such as cobalt, copper, zinc, iron, nickel, manganese, and tin. Specific examples of the organometallic complex include organic cobalt complexes such as cobalt (II) acetylacetonate and cobalt (III) acetylacetonate, organic copper complexes such as copper (II) acetylacetonate, organic zinc complexes such as zinc (II) acetylacetonate, organic iron complexes such as iron (III) acetylacetonate, organic nickel complexes such as nickel (II) acetylacetonate, and organic manganese complexes such as manganese (II) acetylacetonate. Examples of the organic metal salt include zinc octylate, tin octylate, zinc naphthenate, cobalt naphthenate, tin stearate, zinc stearate, and the like.
(E)硬化促進劑之含量,基於顯著獲得本發明之期望效果之觀點,將樹脂組成物中之不揮發成分設為100質量%時,較佳為0.01質量%以上,更佳為0.05質量%以上,又更佳為0.1質量%以上,較佳為1.5質量%以下,更佳為1質量%以下,又更佳為0.5質量%以下。(E) The content of the hardening accelerator is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, and even more preferably 0.1% by mass or more, and preferably 1.5% by mass or less, more preferably 1% by mass or less, and even more preferably 0.5% by mass or less, based on the viewpoint of remarkably obtaining the expected effect of the present invention, when the non-volatile component in the resin composition is set to 100% by mass.
<(F)溶劑> 樹脂組合物亦可進而含有任意溶劑作為揮發性成分。作為溶劑舉例為例如有機溶劑。且,溶劑可單獨使用1種,亦可以任意比例組合2種以上使用。溶劑量較少較佳。溶劑量相對於樹脂組成物中之不揮發性成分100質量%,較佳為3質量%以下,更佳為1質量%以下,又更佳為0.5質量%以下,再更佳為0.1質量%以下,又再更佳為0.01質量%以下,特佳不含(0質量%)。且,樹脂組成物於此等溶劑量較少時,亦可為糊狀。糊狀樹脂組成物於25℃之黏度較佳於20Pa·s~1000Pa·s之範圍。<(F) Solvent> The resin composition may further contain any solvent as a volatile component. Examples of the solvent include organic solvents. Moreover, the solvent may be used alone or in combination of two or more in any proportion. The smaller the amount of solvent, the better. The amount of solvent relative to 100% by mass of the non-volatile components in the resin composition is preferably 3% by mass or less, more preferably 1% by mass or less, still more preferably 0.5% by mass or less, still more preferably 0.1% by mass or less, still more preferably 0.01% by mass or less, and particularly preferably contains no solvent (0% by mass). Moreover, when the amount of such solvent is small, the resin composition may also be in a paste state. The viscosity of the paste resin composition at 25°C is preferably in the range of 20Pa·s~1000Pa·s.
<(G)其他添加劑> 樹脂組成物除上述成分以外,可進而含有其他添加劑作為任意成分。作為此等添加劑舉例為例如熱塑性樹脂;(B)成分以外之硬化劑;有機填充材;增黏劑、消泡劑、調平劑、密著性賦予劑、難燃劑等之樹脂添加劑;等。該等添加劑可單獨使用1種,亦可組合使用2種以上。<(G) Other additives> In addition to the above-mentioned components, the resin composition may further contain other additives as arbitrary components. Examples of such additives include thermoplastic resins; hardeners other than component (B); organic fillers; resin additives such as thickeners, defoamers, leveling agents, adhesion agents, flame retardants, etc. These additives may be used alone or in combination of two or more.
本發明之樹脂組成物之調製方法並未特別限定,可舉例為例如將調配成分依據需要添加溶劑等使用旋轉混合機予以混合・分散之方法等。The method for preparing the resin composition of the present invention is not particularly limited, and examples thereof include a method in which a solvent is added to the formulation components as needed, and the mixture is mixed and dispersed using a rotary mixer.
<樹脂組成物之物性、用途> 樹脂組成物於180℃熱硬化90分鐘之硬化物顯示接合強度優異之特性。接合強度例如可由剪切強度表示。因此,前述硬化物通常導致剪切強度優異之絕緣層或密封層。作為剪切強度較佳為2kgf/mm2 以上。剪切強度之評價可依據後述實施例中記載之方法測定。<Physical properties and uses of resin composition> The cured product of the resin composition heat-cured at 180°C for 90 minutes shows excellent bonding strength. The bonding strength can be represented by shear strength, for example. Therefore, the aforementioned cured product usually leads to an insulating layer or sealing layer with excellent shear strength. The shear strength is preferably 2kgf/ mm2 or more. The evaluation of shear strength can be measured according to the method described in the embodiment described below.
樹脂組成物於190℃熱硬化90分鐘之硬化物通常顯示熱膨脹係數(CTE)低的特性。因此,前述硬化物導致熱膨脹係數低的絕緣層或密封層。作為熱膨脹係數(CTE)較佳未達13ppm/℃。前述熱膨脹係數之評價可依據後述實施例記載之方法測定。The resin composition is heat cured at 190°C for 90 minutes and the cured product generally shows a low coefficient of thermal expansion (CTE). Therefore, the cured product results in an insulating layer or sealing layer with a low coefficient of thermal expansion. The coefficient of thermal expansion (CTE) is preferably less than 13 ppm/°C. The evaluation of the coefficient of thermal expansion can be measured according to the method described in the embodiment described below.
樹脂組成物於190℃熱硬化90分鐘之硬化物顯示翹曲量受抑制之特性。因此,前述硬化物導致翹曲量受抑制之絕緣層或密封層。具體而言,於矽晶圓上壓縮成型樹脂組成物而獲得樹脂組成物層。藉由使樹脂組成物層熱硬化獲得試料基板。使用陰影疊紋(shadow moire)測定裝置,依據電子資訊技術產業協會規格之JEITA EDX-7311-24,求出試料基板於25℃之翹曲量。前述翹曲量未達2mm。翹曲量測定細節可依據後述實施例記載之方法測定。The cured product obtained by heat curing the resin composition at 190°C for 90 minutes shows a characteristic of suppressed warping. Therefore, the cured product results in an insulating layer or a sealing layer with suppressed warping. Specifically, a resin composition is compression-molded on a silicon wafer to obtain a resin composition layer. A sample substrate is obtained by heat curing the resin composition layer. Using a shadow moire measuring device, the warping amount of the sample substrate at 25°C is determined in accordance with JEITA EDX-7311-24, a standard of the Electronics and Information Technology Industry Association. The aforementioned warping amount does not reach 2 mm. The warping amount measurement details can be measured according to the method described in the embodiment described later.
樹脂組成物由於具有上述特性,故可適當使用作為用以密封有機EL裝置或半導體等電子機器之樹脂組成物(密封用之樹脂組成物),特別是用以密封半導體之樹脂組成物(半導體密封用之樹脂組成物),較佳可適當使用作為用以密封半導體晶片之樹脂組成物(半導體晶片密封用之樹脂組成物)。且,樹脂組成物除密封用途以外,可使用作為絕緣層用之絕緣用途的樹脂組成物。例如,前述樹脂組成物可適當使用作為用以形成半導體晶片封裝之絕緣層的樹脂組成物(半導體晶片封裝之絕緣層用的樹脂組成物)及用以形成電路基板(包括印刷配線板)之絕緣層的樹脂組成物(電路基板之絕緣層用的樹脂組成物)。Since the resin composition has the above-mentioned properties, it can be suitably used as a resin composition for sealing electronic devices such as organic EL devices or semiconductors (resin composition for sealing), particularly as a resin composition for sealing semiconductors (resin composition for semiconductor sealing), and more preferably as a resin composition for sealing semiconductor chips (resin composition for semiconductor chip sealing). In addition to the sealing purpose, the resin composition can be used as a resin composition for insulating purposes such as an insulating layer. For example, the resin composition can be suitably used as a resin composition for forming an insulating layer of a semiconductor chip package (resin composition for insulating layer of semiconductor chip package) and a resin composition for forming an insulating layer of a circuit substrate (including a printed wiring board) (resin composition for insulating layer of a circuit substrate).
作為半導體晶片封裝,舉例為例如FC-CSP、MIS-BGA封裝、ETS-BGA封裝、扇出型WLP(晶圓等級封裝)、扇入型WLP、扇出型PLP(面板等級封裝)、扇入型PLP等。Examples of semiconductor chip packages include FC-CSP, MIS-BGA package, ETS-BGA package, fan-out WLP (wafer level package), fan-in WLP, fan-out PLP (panel level package), fan-in PLP, etc.
又,前述樹脂組成物可使用作為底填充材,例如可使用作為將半導體晶片連接於基板後使用之MUF (Molding Under Filling)之材料。Furthermore, the resin composition can be used as an underfill material, for example, as a material for MUF (Molding Under Filling) used after a semiconductor chip is connected to a substrate.
再者,前述樹脂組成物可使用於樹脂薄片、預浸體等之薄片狀積層材料、阻焊劑、晶粒黏合材、填孔樹脂、部件嵌埋樹脂等之使用樹脂組成物之廣泛用途。Furthermore, the resin composition can be used in a wide range of applications such as resin sheets, prepregs and other thin-sheet lamination materials, solder resists, die bonding materials, via-filling resins, component embedding resins, and the like.
[樹脂薄片] 本發明之樹脂薄片具有支撐體及設於該支撐體上之樹脂組成物層。樹脂組成物層係包含本發明之樹脂組成物之層,通常以樹脂組成物形成。[Resin sheet] The resin sheet of the present invention has a support and a resin composition layer disposed on the support. The resin composition layer is a layer including the resin composition of the present invention, and is usually formed of a resin composition.
樹脂組成物層之厚度,基於薄型化之觀點,較佳為600μm以下,更佳為550μm以下,又更佳為500μm以下、400μm以下、350μm以下、300μm以下或200μm以下。樹脂組成物層厚度之下限並未特別限定,但為例如1μm以上、5μm以上、10μm以上等。The thickness of the resin composition layer is preferably 600 μm or less, more preferably 550 μm or less, and even more preferably 500 μm or less, 400 μm or less, 350 μm or less, 300 μm or less, or 200 μm or less from the viewpoint of thinning. The lower limit of the thickness of the resin composition layer is not particularly limited, but is, for example, 1 μm or more, 5 μm or more, 10 μm or more, etc.
作為支撐體,舉例為例如由塑膠材料所成之膜、金屬箔、脫模紙,較好為由塑膠材料所成之膜、金屬箔。Examples of the support include films made of plastic materials, metal foils, and release paper, and films made of plastic materials and metal foils are preferred.
使用由塑膠材料所成之膜作為支撐體時,作為塑膠材料舉例為例如聚對苯二甲酸乙二酯(以下有時簡稱「PET」)、聚萘二甲酸乙二酯(以下有時簡稱「PEN」)等聚酯;聚碳酸酯(以下有時簡稱「PC」);聚甲基丙烯酸甲酯(以下有時簡稱「PMMA」)等之丙烯酸系聚合物;環狀聚烯烴;三乙醯纖維素(以下有時簡稱「TAC」);聚醚硫化物(以下有時簡稱「PES」);聚醚酮;聚醯亞胺等。其中,較佳為聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯,特佳為便宜之聚對苯二甲酸乙二酯。When a film made of a plastic material is used as a support, examples of the plastic material include polyesters such as polyethylene terephthalate (hereinafter sometimes referred to as "PET") and polyethylene naphthalate (hereinafter sometimes referred to as "PEN"); polycarbonate (hereinafter sometimes referred to as "PC"); acrylic polymers such as polymethyl methacrylate (hereinafter sometimes referred to as "PMMA"); cyclic polyolefin; triacetyl cellulose (hereinafter sometimes referred to as "TAC"); polyether sulfide (hereinafter sometimes referred to as "PES"); polyether ketone; polyimide, etc. Among them, polyethylene terephthalate and polyethylene naphthalate are preferred, and inexpensive polyethylene terephthalate is particularly preferred.
使用金屬箔作為支撐體時,作為金屬箔舉例為例如銅箔、鋁箔等。其中較好為銅箔。作為銅箔可使用由銅之單金屬所成之箔,亦可使用銅與其他金屬(例如錫、鉻、銀、鎂、鎳、鋯、矽、鈦等)之合金所成之箔。When a metal foil is used as a support, examples of the metal foil include copper foil and aluminum foil. Among them, copper foil is preferred. The copper foil may be a foil made of copper alone or a foil made of an alloy of copper and other metals (such as tin, chromium, silver, magnesium, nickel, zirconium, silicon, titanium, etc.).
支撐體亦可於與樹脂組成物層接合之面施以霧面處理、電暈處理、抗靜電處理等之處理。The support body may also be subjected to a treatment such as a matte treatment, a corona treatment, an antistatic treatment, etc. on the surface that is bonded to the resin composition layer.
且,作為支撐體,亦可使用於與樹脂組成物層接合之面具有脫模層之附脫模層之支撐體。作為附脫模層之支撐體之脫模層中使用之脫模劑舉例為例如由醇酸樹脂、聚烯烴樹脂、胺基甲酸酯樹脂及矽氧樹脂所成之群選擇之1種以上之脫模劑。作為脫模劑之市售品,舉例為例如醇酸樹脂系脫模劑之LINTEC公司製之「SK-1」、「AL-5」、「AL-7」等。又作為附脫模層之支撐體舉例為例如東麗公司製之「LUMIRROR T60」;帝人公司製之「PUREX」;UNITIKA公司製「UNIPEEL」;等。Furthermore, as a support body, a support body with a release layer having a release layer on the surface bonded to the resin composition layer can also be used. Examples of release agents used in the release layer of the support body with a release layer include at least one release agent selected from the group consisting of alkyd resins, polyolefin resins, urethane resins, and silicone resins. Examples of commercially available release agents include alkyd resin release agents such as "SK-1", "AL-5", and "AL-7" manufactured by LINTEC. Examples of the support body with a release layer include "LUMIRROR T60" manufactured by Toray Industries, "PUREX" manufactured by Teijin, and "UNIPEEL" manufactured by UNITIKA.
作為支撐體之厚度較佳為5μm~75μm之範圍,更佳為10μm~60μm之範圍。又,使用附脫模層之支撐體時,較佳附脫模層之支撐體全體厚度為上述範圍。The thickness of the support is preferably in the range of 5 μm to 75 μm, more preferably in the range of 10 μm to 60 μm. When a support with a release layer is used, the thickness of the support with a release layer is preferably in the above range.
樹脂薄片可藉由例如將樹脂組成物使用模嘴塗佈器等塗佈裝置塗佈於支撐體上而製造。又,根據需要,亦可將樹脂組成物溶解於有機溶劑中調製樹脂清漆,並塗佈該樹脂清漆而製造樹脂薄片。藉由使用溶劑,可調整黏度,提高塗佈性。使用樹脂清漆時,通常於塗佈後使樹脂清漆乾燥,形成樹脂組成物層。The resin sheet can be manufactured by, for example, applying the resin composition onto a support using a coating device such as a die coater. Alternatively, if necessary, the resin composition can be dissolved in an organic solvent to prepare a resin varnish, and the resin sheet can be manufactured by applying the resin varnish. By using a solvent, the viscosity can be adjusted to improve the coating property. When using a resin varnish, the resin varnish is usually dried after application to form a resin composition layer.
作為有機溶劑舉例為例如丙酮、甲基乙基酮及環己酮等之酮溶劑;乙酸乙酯、乙酸丁酯、溶纖素乙酸酯、丙二醇單甲醚乙酸酯及卡必醇乙酸酯等之乙酸酯溶劑;溶纖素及丁基卡必醇等之卡必醇溶劑;甲苯及二甲苯等之芳香族烴溶劑;二甲基甲醯胺、二甲基乙醯胺(DMAc)及N-甲基吡咯啶酮等之醯胺系溶劑;等。有機溶劑可單獨使用1種,亦可以任意比率組合2種以上使用。Examples of organic solvents include ketone solvents such as acetone, methyl ethyl ketone, and cyclohexanone; acetate solvents such as ethyl acetate, butyl acetate, cellulose acetate, propylene glycol monomethyl ether acetate, and carbitol acetate; carbitol solvents such as cellulose and butyl carbitol; aromatic hydrocarbon solvents such as toluene and xylene; amide solvents such as dimethylformamide, dimethylacetamide (DMAc), and N-methylpyrrolidone; etc. The organic solvent may be used alone or in combination of two or more in any ratio.
乾燥可藉由加熱、熱風吹拂等習知方法實施。乾燥條件係乾燥至樹脂組成物層中之有機溶劑含量通常為10質量%以下,較佳為5質量%以下。雖隨樹脂清漆中有機溶劑之沸點而異,但例如使用含30質量%~60質量%有機溶劑之樹脂清漆時,藉由在50℃~150℃乾燥3分鐘~10分鐘,可形成樹脂組成物層。Drying can be carried out by known methods such as heating and hot air blowing. The drying condition is to dry until the organic solvent content in the resin composition layer is usually 10 mass% or less, preferably 5 mass% or less. Although it varies with the boiling point of the organic solvent in the resin varnish, for example, when a resin varnish containing 30 mass% to 60 mass% of organic solvent is used, the resin composition layer can be formed by drying at 50°C to 150°C for 3 minutes to 10 minutes.
樹脂薄片可根據需要包含支撐體及樹脂組成物層以外之任意層。例如於樹脂薄片中,於樹脂組成物層之未與支撐體接合之面(亦即與支撐體相反側之面)上亦可設置依據支撐體之保護膜。保護膜之厚度可為例如1μm~ 40μm。藉由保護膜,可抑制髒污等對樹脂組成物層表面之附著或傷痕。樹脂薄片具有保護膜時,藉由剝除保護膜而可使用樹脂薄片。又樹脂薄片可捲繞成捲筒狀而保存。The resin sheet may include any layer other than the support and the resin component layer as required. For example, in the resin sheet, a protective film depending on the support may be provided on the surface of the resin component layer that is not bonded to the support (i.e., the surface on the opposite side of the support). The thickness of the protective film may be, for example, 1 μm to 40 μm. The protective film can inhibit dirt from adhering to or scratching the surface of the resin component layer. When the resin sheet has a protective film, the resin sheet can be used by removing the protective film. The resin sheet can also be rolled into a roll for storage.
樹脂薄片可適當地使用於半導體晶片封裝之製造中用以形成絕緣層(半導體晶片封裝之絕緣用樹脂薄片)。例如樹脂薄片可使用於形成電路基板之絕緣層(電路基板之絕緣層用樹脂薄片)。作為使用此等基板之封裝之例舉例為FC-CSP、MIS-BGA封裝、ETS-BGA封裝。The resin sheet can be appropriately used in the manufacture of semiconductor chip packages to form an insulating layer (resin sheet for insulating semiconductor chip packages). For example, the resin sheet can be used to form an insulating layer of a circuit substrate (resin sheet for insulating layer of a circuit substrate). Examples of packages using such substrates include FC-CSP, MIS-BGA packages, and ETS-BGA packages.
又,樹脂薄片可適當使用於密封半導體晶片(半導體晶片封裝用樹脂薄片)。作為可適用之半導體晶片封裝舉例為例如扇出型WLP、扇入型WLP、扇出型PLP、扇入型PLP等。Furthermore, the resin sheet can be suitably used for sealing semiconductor chips (resin sheet for semiconductor chip packaging). Examples of applicable semiconductor chip packages include fan-out WLP, fan-in WLP, fan-out PLP, fan-in PLP, and the like.
又,樹脂薄片可使用於將半導體晶片連接於基板後使用之MUF之材料。In addition, the resin sheet can be used as a material for MUF used after the semiconductor chip is connected to the substrate.
進而,樹脂薄片可使用於要求高絕緣信賴性之其他廣泛用途。例如樹脂薄片可較佳地使用於形成印刷配線板等之電路基板的絕緣層。Furthermore, the resin sheet can be used in a wide range of other applications requiring high insulation reliability. For example, the resin sheet can be preferably used to form an insulation layer of a circuit substrate such as a printed wiring board.
[電路基板] 本發明之電路基板包含藉由本發明之樹脂組成物之硬化物形成之硬化物層。硬化物層又可為絕緣層或密封層。該電路基板可藉由例如包含下述步驟(1)及步驟(2)之製造方法製造。 (1)於基材上形成樹脂組成物層之步驟。 (2)使樹脂組成物層熱硬化,形成絕緣層之步驟。[Circuit board] The circuit board of the present invention includes a cured layer formed by a cured product of the resin composition of the present invention. The cured layer may be an insulating layer or a sealing layer. The circuit board may be manufactured by a manufacturing method including, for example, the following steps (1) and (2). (1) A step of forming a resin composition layer on a substrate. (2) A step of thermally curing the resin composition layer to form an insulating layer.
步驟(1)中,準備基材。作為基材舉例為例如玻璃環氧基板、金屬基板(不鏽鋼或冷壓延鋼板(SPCC)等)、聚酯基板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚苯醚基板等之基板。又基材亦可於其表面具有銅箔等之金屬層作為該基材之一部分。例如,可使用於兩者之表面具有可剝離之第一金屬層及第二金屬層之基材。使用此等基材時,通常於第二金屬層之與第一金屬層相反側之面形成作為可作為電路配線發揮功能之配線層的導體層。作為金屬層之材料舉例為銅箔、附載體之銅箔、後述之導體層的材料等,較佳為銅箔。且作為此等具有金屬層之基材可使用市售品,舉例為例如三井金屬礦業公司製之附載體銅箔之極薄銅箔「Micro Thin」等。In step (1), a substrate is prepared. Examples of the substrate include glass epoxy substrates, metal substrates (stainless steel or cold-pressed rolled steel (SPCC)), polyester substrates, polyimide substrates, BT resin substrates, thermosetting polyphenylene ether substrates, and the like. The substrate may also have a metal layer such as copper foil on its surface as part of the substrate. For example, a substrate having a first metal layer and a second metal layer that can be peeled off on both surfaces may be used. When using such substrates, a conductive layer that serves as a wiring layer that can function as circuit wiring is usually formed on the surface of the second metal layer opposite to the first metal layer. Examples of the material of the metal layer include copper foil, copper foil with a carrier, and the material of the conductor layer described below, and copper foil is preferred. Commercially available products can be used as the substrate having the metal layer, for example, an ultra-thin copper foil "Micro Thin" with a carrier copper foil manufactured by Mitsui Mining & Co., Ltd.
且,亦可於基材之一者或兩者之表面形成導體層。以下說明中,包含基材與形成於該基材表面之導體層之構件有時適當稱為「附配線層之基材」。作為導體層中所含之導體材料舉例為例如包含自金、鉑、鈀、銀、銅、鋁、鈷、鉻、鋅、鎳、鈦、鎢、鐵、錫及銦所成之群中選擇之1種以上之金屬的材料。作為導體材料可使用單金屬,亦可使用合金。作為合金舉例為例如自上述群選擇之2種以上金屬之合金(例如鎳・鉻合金、銅・鎳合金及銅・鈦合金)。其中,基於導體層形成之廣泛利用性、成本、圖型化容易性之觀點,較佳為作為單金屬之鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅;及作為合金之鎳・鉻合金、銅・鎳合金及銅・鈦合金之合金。其中,更佳為鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅之單金屬;及鎳・鉻合金,特佳為銅的單金屬。Furthermore, a conductive layer may be formed on the surface of one or both of the substrates. In the following description, a component including a substrate and a conductive layer formed on the surface of the substrate is sometimes appropriately referred to as a "substrate with a wiring layer". Examples of conductive materials contained in the conductive layer include materials including one or more metals selected from the group consisting of gold, platinum, palladium, silver, copper, aluminum, cobalt, chromium, zinc, nickel, titanium, tungsten, iron, tin, and indium. As the conductive material, a single metal may be used, or an alloy may be used. Examples of alloys include alloys of two or more metals selected from the above group (e.g., nickel-chromium alloy, copper-nickel alloy, and copper-titanium alloy). Among them, from the viewpoint of wide availability, cost, and ease of patterning of the conductor layer formation, chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver, or copper as a single metal, and nickel-chromium alloy, copper-nickel alloy, and copper-titanium alloy as an alloy are preferred. Among them, chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver, or copper as a single metal, and nickel-chromium alloy are more preferred, and copper as a single metal is particularly preferred.
導體層例如為了作為配線層發揮功能,亦可進行圖型加工。此時,導體層之線(電路寬)/間隔(電路間之間隔)比,並未特別限定,但較佳為20/20μm以下(即間距為40μm以下),更佳為10/10μm以下,又更佳為5/5μm以下,再更佳為1/1μm以下,特佳為0.5/0.5μm以上。間距並無必要遍及導體層全體為相同。導體層之最小間距可為例如40μm以下、36μm以下或30μm以下。The conductor layer may also be patterned, for example, in order to function as a wiring layer. In this case, the line (circuit width)/spacing (spacing between circuits) ratio of the conductor layer is not particularly limited, but is preferably 20/20 μm or less (i.e., spacing is 40 μm or less), more preferably 10/10 μm or less, still more preferably 5/5 μm or less, still more preferably 1/1 μm or less, and particularly preferably 0.5/0.5 μm or more. The spacing does not necessarily have to be the same throughout the conductor layer. The minimum spacing of the conductor layer may be, for example, 40 μm or less, 36 μm or less, or 30 μm or less.
導體層厚度係隨電路基板之設計而定,但較佳為3μm~35μm,更佳為5μm~30μm,又更佳為10μm~ 20μm,特佳為15μm~20μm。The thickness of the conductor layer depends on the design of the circuit substrate, but is preferably 3 μm to 35 μm, more preferably 5 μm to 30 μm, even more preferably 10 μm to 20 μm, and particularly preferably 15 μm to 20 μm.
導體層可藉由包含下述步驟之方法形成:於基材上積層乾膜(感光性阻劑膜)之步驟;使用光罩對乾膜以特定條件進行曝光及顯像而形成圖型,獲得圖型乾膜之步驟;將經顯像之圖型乾膜作為鍍敷遮罩藉由電解鍍敷法等之鍍敷法形成導體層之步驟;及剝離圖型乾膜之步驟。作為乾膜可使用由光阻組成物所成之感光性乾膜,例如可使用以酚醛清漆樹脂、丙烯酸樹脂等之樹脂形成之乾膜。基材與乾膜之積層條件與後述之基材與樹脂薄片之積層條件相同。乾膜之剝離可使用例如氫氧化鈉溶液等之鹼性剝離液實施。The conductive layer can be formed by a method comprising the following steps: a step of laminating a dry film (photosensitive resist film) on a substrate; a step of exposing and developing the dry film under specific conditions using a photomask to form a pattern to obtain a patterned dry film; a step of forming a conductive layer by a coating method such as an electrolytic coating method using the developed patterned dry film as a coating mask; and a step of peeling off the patterned dry film. As the dry film, a photosensitive dry film formed of a photoresist composition can be used, for example, a dry film formed of a resin such as a novolac resin or an acrylic resin can be used. The lamination conditions of the substrate and the dry film are the same as the lamination conditions of the substrate and the resin sheet described later. The stripping of the dry film can be carried out using an alkaline stripping liquid such as sodium hydroxide solution.
準備基材後,於基材上形成樹脂組成物層。於基材表面形成導體層時,樹脂組成物層之形成較佳以導體層嵌埋於樹脂組成物層中之方式進行。After preparing the substrate, a resin composition layer is formed on the substrate. When forming the conductor layer on the surface of the substrate, the resin composition layer is preferably formed in a manner that the conductor layer is embedded in the resin composition layer.
樹脂組成物層之形成係例如藉由將樹脂薄片與基材積層而進行。該積層可藉由例如自支撐體側將樹脂薄片加熱壓著於基材,使樹脂組成物層貼合於基材而進行。作為樹脂薄片加熱壓著於基材之構件(以下有時稱為「加熱壓著構件」)舉例為例如經加熱之金屬板(SUS鏡板等)或金屬輥(SUS輥等)等。又,較佳加熱壓著構件並非直接加壓於樹脂薄片上,而是以使樹脂薄片充分追隨基材之表面凹凸之方式,介隔耐熱橡膠等之彈性材而加壓。The resin composition layer is formed, for example, by laminating a resin sheet and a substrate. The lamination can be performed, for example, by heat-pressing the resin sheet to the substrate from the side of the support so that the resin composition layer is attached to the substrate. Examples of the member for heat-pressing the resin sheet to the substrate (hereinafter sometimes referred to as the "heat-pressing member") include, for example, a heated metal plate (SUS mirror plate, etc.) or a metal roller (SUS roller, etc.). In addition, the preferred heat-pressing member is not directly pressed on the resin sheet, but is pressed through an elastic material such as heat-resistant rubber in a manner that allows the resin sheet to fully follow the surface irregularities of the substrate.
基材與樹脂薄片之積層亦可藉由例如真空層合法實施。真空層合法中,加熱壓著溫度較佳為60℃~160℃,更佳為80℃~140℃之範圍。加熱壓著壓力較佳為0.098MPa~1.77MPa,更佳為0.29MPa~1.47MPa之範圍。加熱壓著時間較佳為20秒~400秒,更佳為30秒~300秒之範圍。積層較好於壓力13hPa以下之減壓條件下實施。The lamination of the substrate and the resin sheet can also be performed by, for example, a vacuum lamination method. In the vacuum lamination method, the heating and pressing temperature is preferably in the range of 60°C to 160°C, more preferably in the range of 80°C to 140°C. The heating and pressing pressure is preferably in the range of 0.098MPa to 1.77MPa, more preferably in the range of 0.29MPa to 1.47MPa. The heating and pressing time is preferably in the range of 20 seconds to 400 seconds, more preferably in the range of 30 seconds to 300 seconds. Lamination is preferably performed under reduced pressure conditions with a pressure of less than 13hPa.
積層後,亦可在常壓下(大氣壓下)藉由例如自支撐體側對加熱壓著構件加壓,而進行所積層之樹脂薄片之平滑化處理。平滑化處理之加壓條件可設為與上述積層之加熱壓著條件相同之條件。又,積層與平滑化處理亦可使用真空層合機連續進行。After lamination, the laminated resin sheet can be smoothed by, for example, applying pressure to the heat-pressing member from the support body side under normal pressure (atmospheric pressure). The pressurizing conditions for the smoothing treatment can be the same as the heat-pressing conditions for the lamination described above. In addition, lamination and smoothing treatment can be performed continuously using a vacuum laminator.
又,樹脂組成物層之形成可藉由例如壓縮成型法進行。壓縮成型法之具體操作,例如作為模,準備上模及下模。將樹脂組成物塗佈於基材。將塗佈有樹脂組成物之基材安裝於下模。隨後將上模與下模予以合模,對樹脂組成物施加熱及壓力進行壓縮成型。The resin composition layer can be formed by, for example, compression molding. The specific operation of the compression molding method is, for example, preparing an upper mold and a lower mold as a mold. Applying the resin composition to the substrate. Installing the substrate coated with the resin composition to the lower mold. Then, the upper mold and the lower mold are molded together, and heat and pressure are applied to the resin composition for compression molding.
且壓縮成型法之具體操作,例如亦可如下述。作為壓縮成型用之模,準備上模及下模。於下模載置樹脂組成物。且於上模安裝基材。隨後,以載置於下模之樹脂組成物與安裝於上模之基材接觸之方式,將上模與下模予以合模,施加熱及壓力進行壓縮成型。The specific operation of the compression molding method can be, for example, as follows. An upper mold and a lower mold are prepared as molds for compression molding. A resin composition is placed on the lower mold. A base material is mounted on the upper mold. Then, the upper mold and the lower mold are clamped together in such a manner that the resin composition placed on the lower mold is in contact with the base material mounted on the upper mold, and heat and pressure are applied to perform compression molding.
壓縮成型法中之成型條件係隨樹脂組成物之組成而異。成型時之模溫度較佳為可使樹脂組成物發揮優異之壓縮成型性之溫度,例如較佳為80℃以上,更佳為100℃以上,又更佳為120℃以上,較佳為200℃以下,更佳為170℃以下,又更佳為150℃以下。且,成型時施加之壓力較佳為1MPa以上,更佳為3MPa以上,又更佳為5MPa以上,較佳為50MPa以下,更佳為30MPa以下,又更佳為20MPa以下。硬化時間較佳為1分鐘以上,更佳為2分鐘以上,特佳為5分鐘以上,較佳為60分鐘以下,更佳為30分鐘以下,特佳為20分鐘以下。通常,於形成樹脂組成物層後,卸除模。模的卸除可在樹脂組成物層熱硬化前進行,亦可於熱硬化後進行。The molding conditions in the compression molding method vary with the composition of the resin composition. The mold temperature during molding is preferably a temperature that allows the resin composition to exhibit excellent compression molding properties, for example, preferably 80°C or higher, more preferably 100°C or higher, more preferably 120°C or higher, preferably 200°C or lower, more preferably 170°C or lower, and more preferably 150°C or lower. In addition, the pressure applied during molding is preferably 1MPa or higher, more preferably 3MPa or higher, more preferably 5MPa or higher, preferably 50MPa or lower, more preferably 30MPa or lower, and more preferably 20MPa or lower. The curing time is preferably 1 minute or more, more preferably 2 minutes or more, particularly preferably 5 minutes or more, preferably 60 minutes or less, more preferably 30 minutes or less, particularly preferably 20 minutes or less. Usually, after the resin composition layer is formed, the mold is removed. The mold can be removed before the resin composition layer is thermally cured, or after the thermal curing.
於基板上形成樹脂組成物層後,將樹脂組成物層熱硬化,形成絕緣層。樹脂組成物層之熱硬化條件隨樹脂組成物種類而異,但硬化溫度通常於120℃~240℃之範圍(較佳於150℃~220℃之範圍,更佳於170℃~200℃之範圍),硬化時間為5分鐘~120分鐘之範圍(較佳10分鐘~100分鐘,更佳15分鐘~90分鐘)。After forming a resin composition layer on the substrate, the resin composition layer is heat-cured to form an insulating layer. The heat-curing conditions of the resin composition layer vary with the type of resin composition, but the curing temperature is generally in the range of 120°C to 240°C (preferably in the range of 150°C to 220°C, and more preferably in the range of 170°C to 200°C), and the curing time is in the range of 5 minutes to 120 minutes (preferably 10 minutes to 100 minutes, and more preferably 15 minutes to 90 minutes).
將樹脂組成物層熱硬化之前,亦可在比硬化溫度低的溫度對樹脂組成物層實施預加熱處理。例如在樹脂組成物層熱硬化之前,亦可在通常50℃以上且未達120℃(較佳60℃以上110℃以下,更佳70℃以上100℃以下)之溫度,使樹脂組成物層預加熱通常5分鐘以上(較佳5分鐘~150分鐘,更佳15分鐘~120分鐘)。Before the resin composition layer is heat-hardened, the resin composition layer may be preheated at a temperature lower than the hardening temperature. For example, before the resin composition layer is heat-hardened, the resin composition layer may be preheated at a temperature of usually 50°C or higher and lower than 120°C (preferably 60°C or higher and 110°C or lower, and more preferably 70°C or higher and 100°C or lower) for usually 5 minutes or more (preferably 5 minutes to 150 minutes, and more preferably 15 minutes to 120 minutes).
如以上,可製造具有絕緣層之電路基板。又,電路基板之製造方法進而亦可包含任意步驟。 例如使用樹脂薄片製造電路基板時,電路基板之製造方法可包含剝離樹脂薄片之支撐體的步驟。支撐體可於樹脂組成物層之熱硬化前剝離,亦可於樹脂組成物層之熱硬化後剝離。As described above, a circuit substrate having an insulating layer can be manufactured. In addition, the manufacturing method of the circuit substrate can further include any steps. For example, when a circuit substrate is manufactured using a resin sheet, the manufacturing method of the circuit substrate can include the step of peeling off the support body of the resin sheet. The support body can be peeled off before the resin component layer is thermally cured, and can also be peeled off after the resin component layer is thermally cured.
電路基板之製造方法例如於形成絕緣層之後,亦可包含研磨該絕緣層表面之步驟。研磨方法並未特別限定。例如可使用平面研削盤研磨絕緣層表面。The manufacturing method of the circuit substrate may include a step of grinding the surface of the insulating layer after forming the insulating layer. The grinding method is not particularly limited. For example, a flat grinding disc may be used to grind the surface of the insulating layer.
電路基板之製造方法,亦可包含例如將導體層進行層間連接之步驟(3),所謂對絕緣層穿孔之步驟。藉此可對絕緣層形成穿孔、通孔等之孔。作為穿孔之形成方法舉例為例如雷射照射、蝕刻、機械鑽孔等。穿孔的尺寸或形狀可對應於電路基板之設計適當決定。又,步驟(3)亦可藉由絕緣層之研磨或研削進行層間連接。The manufacturing method of the circuit substrate may also include, for example, the step (3) of connecting the conductor layer between layers, that is, the step of perforating the insulating layer. In this way, holes such as perforations and through holes can be formed in the insulating layer. Examples of the method of forming the perforations include laser irradiation, etching, mechanical drilling, etc. The size or shape of the perforations can be appropriately determined according to the design of the circuit substrate. In addition, step (3) can also be performed by grinding or grinding the insulating layer to connect between layers.
穿孔形成後,較佳進行去除穿孔內膠渣之步驟。該步驟有時稱為去膠渣步驟。例如藉由鍍敷步驟對絕緣層上進行導體層形成時,亦可對於穿孔進行濕式去膠渣處理。又,例如藉由濺鍍步驟對絕緣層上進行導體層形成時,亦可進行電漿處理步驟等之乾式去膠渣步驟。再者,亦可藉由去膠渣步驟對絕緣層實施粗化處理。After the through-hole is formed, it is preferred to perform a step of removing the slag in the through-hole. This step is sometimes called a deslagging step. For example, when a conductive layer is formed on an insulating layer by a coating step, a wet deslagging treatment may be performed on the through-hole. Also, when a conductive layer is formed on an insulating layer by a sputtering step, a dry deslagging step such as a plasma treatment step may be performed. Furthermore, the insulating layer may also be roughened by a deslagging step.
又,於絕緣層上形成導體層之前,亦可對絕緣層進行粗化處理。依據該粗化處理,通常可將包含穿孔內之絕緣層表面粗化。作為粗化處理可以乾式及濕式之任一粗化處理進行。作為乾式粗化處理之例舉例為電漿處理等。又作為濕式粗化處理之例,舉例為依序進行利用膨潤液之膨潤處理、利用氧化劑之粗化處理、及利用中和劑之中和處理之方法。Furthermore, before forming the conductive layer on the insulating layer, the insulating layer may be subjected to a roughening treatment. According to the roughening treatment, the surface of the insulating layer including the through-holes can be generally roughened. The roughening treatment may be performed by either a dry roughening treatment or a wet roughening treatment. An example of a dry roughening treatment is a plasma treatment. Another example of a wet roughening treatment is a method of sequentially performing a swelling treatment using a swelling liquid, a roughening treatment using an oxidizing agent, and a neutralization treatment using a neutralizing agent.
形成穿孔後,可於絕緣層上形成導體層。藉由於形成有穿孔之位置形成導體層,使新形成之導體層與基材表面之導體層導通,進行層間連接。導體層之形成方法舉例為例如鍍敷法、濺鍍法、蒸鍍法等,其中較佳為鍍敷法。較佳實施形態中,藉由半加成法、全加成法等之適當方法於絕緣層表面進行鍍敷,形成具有期望配線圖型之導體層。又,樹脂薄片中之支撐體為金屬箔時,可藉由減去法形成具有期望配線圖型之導體層。形成之導體層材料可為單金屬,亦可為合金。且該導體層可具有單層構造,亦可具有包含2層以上之由不同種類材料之層之複層構造。After the perforations are formed, a conductive layer can be formed on the insulating layer. By forming a conductive layer at the location where the perforations are formed, the newly formed conductive layer is connected to the conductive layer on the surface of the substrate to achieve inter-layer connection. Examples of methods for forming the conductive layer include plating, sputtering, evaporation, etc., among which plating is preferred. In a preferred embodiment, plating is performed on the surface of the insulating layer by an appropriate method such as a semi-additive method or a full-additive method to form a conductive layer with a desired wiring pattern. Furthermore, when the support in the resin sheet is a metal foil, a conductive layer with a desired wiring pattern can be formed by a subtractive method. The material of the conductive layer to be formed can be a single metal or an alloy. The conductive layer may have a single-layer structure or a multi-layer structure including two or more layers made of different types of materials.
此處詳細說明於絕緣層上形成導體層之實施形態之例。於絕緣層表面藉由無電解鍍敷形成鍍敷種晶層。其次於形成之鍍敷種晶層上,對應於期望之配線圖型,形成使鍍敷種晶層之一部分露出之遮罩圖型。於露出之鍍敷種晶層上利用電解鍍敷形成電解鍍敷層後,去除遮罩圖型。隨後,以蝕刻等之處理去除不要之鍍敷種晶層,可形成具有期望配線圖型之導體層。又,形成導體層時,形成遮罩圖型所用之乾膜與上述乾膜相同。Here, an example of an implementation form of forming a conductive layer on an insulating layer is described in detail. A coating seed layer is formed on the surface of the insulating layer by electroless plating. Next, a mask pattern is formed on the formed coating seed layer corresponding to the desired wiring pattern to expose a portion of the coating seed layer. After an electrolytic coating layer is formed on the exposed coating seed layer by electrolytic plating, the mask pattern is removed. Subsequently, the unnecessary coating seed layer is removed by etching or the like, and a conductive layer having the desired wiring pattern can be formed. Furthermore, when forming the conductive layer, the dry film used to form the mask pattern is the same as the above-mentioned dry film.
電路基板之製造方法亦可包含去除基材之步驟(4)。藉由去除基材,獲得具有絕緣層與嵌埋入該絕緣層之導體層的電路基板。該步驟(4)可於例如使用具有可剝離金屬層之基材時進行。The method for manufacturing a circuit substrate may also include a step (4) of removing the substrate. By removing the substrate, a circuit substrate having an insulating layer and a conductive layer embedded in the insulating layer is obtained. The step (4) may be performed, for example, when a substrate having a strippable metal layer is used.
[半導體晶片封裝] 本發明第一實施形態之半導體晶片封裝包含上述之電路基板與搭載於該電路基板之半導體晶片。該半導體晶片封裝可藉由將半導體晶片接合於電路基板而製造。[Semiconductor chip package] The semiconductor chip package of the first embodiment of the present invention includes the above-mentioned circuit substrate and a semiconductor chip mounted on the circuit substrate. The semiconductor chip package can be manufactured by bonding the semiconductor chip to the circuit substrate.
電路基板與半導體晶片之接合條件可採用可將半導體晶片之端子電極與電路基板之電路配線導體連接之任意條件。例如可採用半導體晶片之覆晶安裝中使用之條件。且例如半導體晶片與電路基板之間可經由絕緣性接著劑接合。The bonding conditions between the circuit board and the semiconductor chip can be any conditions that can connect the terminal electrodes of the semiconductor chip to the circuit wiring conductors of the circuit board. For example, the conditions used in flip-chip mounting of semiconductor chips can be used. And for example, the semiconductor chip and the circuit board can be bonded via an insulating adhesive.
作為接合方法舉例為將半導體晶片壓著於電路基板之方法。作為壓著條件,壓著溫度通常為120℃~240℃之範圍(較佳130℃~200℃之範圍,更佳為140℃~180℃之範圍),壓著時間通常為1秒~60秒之範圍(較佳5秒~30秒)。An example of a bonding method is a method of pressing a semiconductor chip onto a circuit board. As pressing conditions, the pressing temperature is usually in the range of 120°C to 240°C (preferably 130°C to 200°C, and more preferably 140°C to 180°C), and the pressing time is usually in the range of 1 second to 60 seconds (preferably 5 seconds to 30 seconds).
又作為接合方法之其他例舉例為將半導體晶片回焊於電路基板而接合之方法。回焊條件可設為120℃~300℃之範圍。Another example of the bonding method is to reflow the semiconductor chip to the circuit board for bonding. The reflow condition can be set in the range of 120°C to 300°C.
將半導體晶片接合於電路基板後,亦可以模製底填充材填充半導體晶片。作為該模製底填充材可使用上述樹脂組成物,又亦可使用上述樹脂薄片之樹脂組成物層。After the semiconductor chip is bonded to the circuit substrate, the semiconductor chip may be filled with a mold underfill material. The mold underfill material may be the resin composition or the resin composition layer of the resin sheet.
本發明第二實施形態之半導體晶片封裝包含半導體晶片與密封該半導體晶片之前述樹脂組成物之硬化物。此種半導體晶片封裝通常樹脂組成物之硬化物係作為密封層發揮功能。作為第二實施形態之半導體晶片封裝舉例為例如扇出型WLP。The semiconductor chip package of the second embodiment of the present invention comprises a semiconductor chip and a hardened material of the aforementioned resin composition for sealing the semiconductor chip. In such semiconductor chip package, the hardened material of the resin composition usually functions as a sealing layer. The semiconductor chip package of the second embodiment is exemplified by a fan-out WLP.
此等如扇出型WLP之半導體晶片封裝之製造方法包含: (A)於基材上積層暫時固定膜之步驟, (B)將半導體晶片暫時固定於暫時固定膜上之步驟, (C)於半導體晶片上積層本發明之樹脂薄片的樹脂組成物層,或於半導體晶片上塗佈本發明之樹脂組成物並熱硬化,形成密封層之步驟, (D)將基材及暫時固定膜自半導體晶片剝離之步驟, (E)於半導體晶片之已剝離基材及暫時固定膜之面上,形成再配線形成層(絕緣層)之步驟, (F)於再配線形成層(絕緣層)上,形成導體層(再配線層)之步驟,以及 (G)於導體層上形成阻焊層之步驟。又,半導體晶片封裝之製造方法亦可包含:(H)將複數個半導體晶片封裝切割為各個半導體晶片封裝而單片化之步驟。The manufacturing method of the semiconductor chip package such as fan-out WLP includes: (A) a step of laminating a temporary fixing film on a substrate, (B) a step of temporarily fixing a semiconductor chip on the temporary fixing film, (C) laminating a resin composition layer of the resin sheet of the present invention on the semiconductor chip, or coating the resin composition of the present invention on the semiconductor chip and thermally curing it to form a sealed (D) a step of peeling off the substrate and the temporary fixing film from the semiconductor chip, (E) a step of forming a redistribution layer (insulating layer) on the surface of the semiconductor chip from which the substrate and the temporary fixing film have been peeled off, (F) a step of forming a conductor layer (redistribution layer) on the redistribution layer (insulating layer), and (G) a step of forming a solder resist layer on the conductor layer. In addition, the manufacturing method of the semiconductor chip package may also include: (H) a step of cutting a plurality of semiconductor chip packages into individual semiconductor chip packages for singulation.
此等半導體封裝之製造方法細節可參酌國際公開第2016/035577號之段落0066~0081之記載,其內容併入本說明書中。The details of the manufacturing method of these semiconductor packages can be found in paragraphs 0066 to 0081 of International Publication No. 2016/035577, the contents of which are incorporated into this specification.
本發明第三實施形態之半導體晶片封裝係例如於第二實施形態之半導體晶片封裝中,以本發明之樹脂組成物的硬化物形成再配線形成層或阻焊層之半導體晶片封裝。The semiconductor chip package of the third embodiment of the present invention is a semiconductor chip package in which, for example, in the semiconductor chip package of the second embodiment, a redistribution layer or a solder resist layer is formed by using a cured product of the resin composition of the present invention.
[半導體裝置] 作為安裝上述半導體晶片封裝之半導體裝置,舉例為例如供於電氣製品(例如電腦、行動電話、智慧型手機、平板電腦型裝置、可穿戴裝置、數位相機、醫療機器及電視等)及載具(例如機車、汽車、電車、船舶及飛機等)等之各種半導體裝置。 [實施例][Semiconductor device] Examples of semiconductor devices in which the semiconductor chip package is mounted include various semiconductor devices used in electrical products (such as computers, mobile phones, smart phones, tablet devices, wearable devices, digital cameras, medical devices, and televisions, etc.) and vehicles (such as motorcycles, cars, trains, ships, and airplanes, etc.). [Example]
以下藉由實施例針對本發明具體說明。但本發明並不限於以下實施例。以下說明中,表示量之「份」及「%」只要未另外指明,則分別意指「質量份」及「質量%」。且以下說明之操作只要未另外指明,則係於常溫常壓環境進行。The present invention is specifically described below by way of examples. However, the present invention is not limited to the following examples. In the following description, "parts" and "%" indicating amounts, unless otherwise specified, mean "parts by mass" and "% by mass", respectively. The operations described below are performed at room temperature and pressure unless otherwise specified.
且實施例及比較例所用之氧化矽A、氧化矽B及氧化鋁A係如下。 氧化矽A:平均粒徑1.8μm,比表面積3.5m2 /g,經N-苯基-3-胺基丙基三甲氧基矽烷(信越化學工業公司製「KBM-573」)表面處理之氧化矽。 氧化矽B:平均粒徑3.2μm,比表面積4.6m2 /g,經3-縮水甘油氧基丙基三甲氧矽烷(信越化學工業公司製「KBM-403」)表面處理之氧化矽。 氧化鋁A:平均粒徑6.2μm,比表面積1.7m2 /g,經N-苯基-3-胺基丙基三甲氧基矽烷(信越化學工業公司製「KBM-573」)表面處理之氧化鋁。The silicon oxide A, silicon oxide B and aluminum oxide A used in the examples and comparative examples are as follows. Silicon oxide A: average particle size 1.8 μm, specific surface area 3.5 m 2 /g, silicon oxide surface treated with N-phenyl-3-aminopropyl trimethoxysilane ("KBM-573" manufactured by Shin-Etsu Chemical Co., Ltd.). Silicon oxide B: average particle size 3.2 μm, specific surface area 4.6 m 2 /g, silicon oxide surface treated with 3-glycidyloxypropyl trimethoxysilane ("KBM-403" manufactured by Shin-Etsu Chemical Co., Ltd.). Alumina A: average particle size 6.2 μm, specific surface area 1.7 m 2 /g, aluminum oxide surface treated with N-phenyl-3-aminopropyltrimethoxysilane ("KBM-573" manufactured by Shin-Etsu Chemical Co., Ltd.).
<合成例1:具有芳香族構造之聚酯多元醇樹脂A之合成> 於反應裝置中饋入雙酚A型二醇醚(High Blocks MDB-561,DIC公司製)779.1質量份、間苯二甲酸132.9質量份及癸二酸40.4質量份,開始升溫及攪拌。 其次於內溫上升至230℃後,饋入四異丙基鈦酸酯0.10質量份,於230℃反應24小時合成具有芳香族構造之聚酯多元醇樹脂A。所得具有芳香族構造之聚酯多元醇樹脂A於兩末端具有OH基,其羥基價為36.9mgKOH/g,數平均分子量為3040,玻璃轉移溫度為-14℃,於75℃之黏度為9Pa·s。<Synthesis Example 1: Synthesis of Polyester Polyol Resin A with Aromatic Structure> Into the reaction apparatus, 779.1 parts by mass of bisphenol A type glycol ether (High Blocks MDB-561, manufactured by DIC Corporation), 132.9 parts by mass of isophthalic acid, and 40.4 parts by mass of sebacic acid were fed, and the temperature was raised and stirred. Then, after the internal temperature rose to 230°C, 0.10 parts by mass of tetraisopropyl titanium ester was fed, and the reaction was carried out at 230°C for 24 hours to synthesize the polyester polyol resin A with aromatic structure. The obtained polyester polyol resin A with aromatic structure has OH groups at both ends, its hydroxyl value is 36.9 mgKOH/g, the number average molecular weight is 3040, the glass transition temperature is -14°C, and the viscosity at 75°C is 9 Pa·s.
<合成例2:具有芳香族構造之聚酯多元醇樹脂B之合成> 於反應裝置中饋入雙酚A型二醇醚(High Blocks MDB-561,DIC公司製)596.8質量份及癸二酸257.4質量份,開始升溫及攪拌。 其次於內溫上升至230℃後,饋入四異丙基鈦酸酯0.10質量份,於230℃反應24小時合成具有芳香族構造之聚酯多元醇樹脂B。所得具有芳香族構造之聚酯多元醇樹脂B於兩末端具有-COOH基,其酸價為36.6mgKOH/g,數平均分子量為3070,玻璃轉移溫度為-33℃,於75℃之黏度為12Pa·s。<Synthesis Example 2: Synthesis of Polyester Polyol Resin B with Aromatic Structure> 596.8 parts by mass of bisphenol A type glycol ether (High Blocks MDB-561, manufactured by DIC Corporation) and 257.4 parts by mass of sebacic acid were fed into the reaction apparatus, and the temperature was raised and stirred. Then, after the internal temperature rose to 230°C, 0.10 parts by mass of tetraisopropyl titanium ester was fed, and the reaction was carried out at 230°C for 24 hours to synthesize the polyester polyol resin B with aromatic structure. The obtained polyester polyol resin B with aromatic structure has -COOH groups at both ends, an acid value of 36.6 mgKOH/g, a number average molecular weight of 3070, a glass transition temperature of -33°C, and a viscosity of 12 Pa·s at 75°C.
<實施例1> 使用混合機將脂環式環氧樹脂(DAICEL公司製,「CEL2021P」,環氧當量136g/eq.)6.6份、萘型環氧樹脂(DIC公司製,「HP4032D」,環氧當量142g/eq.)8份、胺系硬化劑(日本化藥公司製,「KYAHARD A-A」)0.5份、合成例1合成之具有芳香族構造之聚酯多元醇樹脂A 2.5份、氧化矽A 80份、硬化促進劑(四國化成公司製,「2MA-OK」)0.4份均一分散,獲得樹脂組成物1。<Example 1> Using a mixer, 6.6 parts of an epoxy resin ("CEL2021P" manufactured by DAICEL, epoxy equivalent 136 g/eq.), 8 parts of a naphthalene epoxy resin ("HP4032D" manufactured by DIC, epoxy equivalent 142 g/eq.), 0.5 parts of an amine curing agent ("KYAHARD A-A" manufactured by Nippon Kayaku Co., Ltd.), 2.5 parts of a polyester polyol resin A having an aromatic structure synthesized in Synthesis Example 1, 80 parts of silicon oxide A, and 0.4 parts of a curing accelerator ("2MA-OK" manufactured by Shikoku Chemical Co., Ltd.) were uniformly dispersed to obtain a resin composition 1.
<實施例2> 實施例1中,將具有芳香族構造之聚酯多元醇樹脂A 0.5份變更為具有芳香族構造之聚酯多元醇樹脂B 0.5份。除上述事項以外,與實施例1同樣製作樹脂組成物2。<Example 2> In Example 1, 0.5 parts of polyester polyol resin A having an aromatic structure is replaced with 0.5 parts of polyester polyol resin B having an aromatic structure. Resin composition 2 is prepared in the same manner as in Example 1 except for the above matters.
<實施例3> 使用混合機將脂環式環氧樹脂(DAICEL公司製,「CEL2021P」,環氧當量136g/eq.)3份、萘型環氧樹脂(DIC公司製,「HP4032D」,環氧當量142g/eq.)3份、酸酐系硬化劑(新日本理化公司製,「MH-700」)10份、合成例1合成之具有芳香族構造之聚酯多元醇樹脂A 4份、氧化矽A 100份、硬化促進劑(四國化成公司製,「2MA-OK」)0.5份均一分散,獲得樹脂組成物3。<Example 3> Using a mixer, 3 parts of an epoxy resin ("CEL2021P" manufactured by DAICEL, epoxy equivalent 136 g/eq.), 3 parts of a naphthalene epoxy resin ("HP4032D" manufactured by DIC, epoxy equivalent 142 g/eq.), 10 parts of an acid anhydride curing agent ("MH-700" manufactured by Shin Nippon Chemical Co., Ltd.), 4 parts of the polyester polyol resin A having an aromatic structure synthesized in Synthesis Example 1, 100 parts of silicon oxide A, and 0.5 parts of a curing accelerator ("2MA-OK" manufactured by Shikoku Chemical Co., Ltd.) were uniformly dispersed to obtain a resin composition 3.
<實施例4> 實施例3中,將具有芳香族構造之聚酯多元醇樹脂A 4份變更為具有芳香族構造之聚酯多元醇樹脂B 8份,且氧化矽A 100份變更為氧化鋁A 130份。 除上述事項以外,與實施例3同樣製作樹脂組成物4。<Example 4> In Example 3, 4 parts of polyester polyol resin A with an aromatic structure are changed to 8 parts of polyester polyol resin B with an aromatic structure, and 100 parts of silicon oxide A are changed to 130 parts of aluminum oxide A. Except for the above matters, resin composition 4 is prepared in the same manner as in Example 3.
<實施例5> 使用混合機將脂環式環氧樹脂(DAICEL公司製,「CEL2021P」,環氧當量136g/eq.)7份、萘型環氧樹脂(DIC公司製,「HP4032D」,環氧當量142g/eq.)8份、酚系硬化劑(2,2-二烯丙基雙酚A)1份、合成例1合成之具有芳香族構造之聚酯多元醇樹脂A 2份、氧化矽A 70份、硬化促進劑(四國化成公司製,「2MA-OK」)0.4份均一分散,獲得樹脂組成物5。<Example 5> Using a mixer, 7 parts of an epoxy resin ("CEL2021P" manufactured by DAICEL, epoxy equivalent 136 g/eq.), 8 parts of a naphthalene epoxy resin ("HP4032D" manufactured by DIC, epoxy equivalent 142 g/eq.), 1 part of a phenolic curing agent (2,2-diallylbisphenol A), 2 parts of a polyester polyol resin A having an aromatic structure synthesized in Synthesis Example 1, 70 parts of silicon oxide A, and 0.4 parts of a curing accelerator ("2MA-OK" manufactured by Shikoku Chemical Co., Ltd.) were uniformly dispersed to obtain a resin composition 5.
<比較例1> 實施例2中,不使用具有芳香族構造之聚酯多元醇樹脂A 2.5份。除上述事項以外,與實施例2同樣製作樹脂組成物6。<Comparative Example 1> In Example 2, 2.5 parts of polyester polyol resin A having an aromatic structure are not used. Resin composition 6 is prepared in the same manner as in Example 2 except for the above matters.
<比較例2> 實施例3中,具有芳香族構造之聚酯多元醇樹脂A之量自4份變更為0.5份。除上述事項以外,與實施例3同樣製作樹脂組成物7。<Comparative Example 2> In Example 3, the amount of polyester polyol resin A having an aromatic structure was changed from 4 parts to 0.5 parts. Resin composition 7 was prepared in the same manner as in Example 3 except for the above matters.
<比較例3> 實施例3中,具有芳香族構造之聚酯多元醇樹脂A之量自4份變更為35份。除上述事項以外,與實施例3同樣製作樹脂組成物8。<Comparative Example 3> In Example 3, the amount of polyester polyol resin A having an aromatic structure was changed from 4 parts to 35 parts. Resin composition 8 was prepared in the same manner as in Example 3 except for the above matters.
<剪切強度之評價> 在塗佈有聚醯亞胺之矽晶圓上,使用經挖出直徑4mm之矽橡膠框,將實施例及比較例製作之樹脂組成物1~8填充成高度5mm之圓柱狀。於180℃加熱90分鐘後,卸除矽橡膠框,製備由樹脂組成物之硬化物所成之試驗片。以黏合測試儀(Dage公司製系列4000),以頭部位置距離基材1mm,頭部速度700μm/s之條件測定聚醯亞胺與試驗片之界面的剪切強度。試驗進行5次,使用其平均值,按以下基準進行評價。 ○:2kgf/mm2 以上時 ×:未達2kgf/mm2 時<Evaluation of shear strength> On a silicon wafer coated with polyimide, a silicone rubber frame with a diameter of 4mm was hollowed out, and the resin compositions 1 to 8 prepared in the embodiment and the comparative example were filled into a cylindrical shape with a height of 5mm. After heating at 180°C for 90 minutes, the silicone rubber frame was removed to prepare a test piece made of the cured resin composition. The shear strength of the interface between polyimide and the test piece was measured using an adhesion tester (Series 4000 manufactured by Dage) with the head position at a distance of 1mm from the substrate and a head speed of 700μm/s. The test was performed 5 times, and the average value was used for evaluation according to the following criteria. ○: 2kgf/ mm2 or more ×: less than 2kgf/ mm2
<翹曲量之測定> 於12吋矽晶圓上,將實施例及比較例製作之樹脂組成物,使用壓縮模製裝置(模具溫度:130℃,壓力:6MPa,硬化時間:10分鐘)進行壓縮成型,形成厚度300μm之樹脂組成物層。隨後,於180℃加熱90分鐘,使樹脂組成物層熱硬化。藉此,獲得包含矽晶圓與樹脂組成物之硬化物層之試料基板。使用陰影疊紋測定裝置(Akorometrix公司「ThermoireAXP」),測定前述試料基板於25℃之翹曲量。測定係依據電子資訊技術產業協會規格之JEITA EDX-7311-24進行。具體而言,藉由測定區域之基板面所有數據之最小平方法算出之假想平面作為基準面,求出距離該基準面於垂直方向最小值與最大值之差作為翹曲量。翹曲量未達2mm評價為「○」,2mm以上評價為「×」。<Measurement of warp> On a 12-inch silicon wafer, the resin composition prepared in the embodiment and the comparative example was compression molded using a compression molding device (mold temperature: 130°C, pressure: 6MPa, curing time: 10 minutes) to form a resin composition layer with a thickness of 300μm. Subsequently, the resin composition layer was thermally cured by heating at 180°C for 90 minutes. In this way, a sample substrate including a silicon wafer and a cured layer of the resin composition was obtained. The warp of the aforementioned sample substrate at 25°C was measured using a shadow overlay measuring device (Akorometrix "ThermoireAXP"). The measurement is carried out in accordance with the JEITA EDX-7311-24 standard of the Electronics and Information Technology Industry Association. Specifically, the virtual plane calculated by the least square method of all the data on the substrate surface of the measurement area is used as the reference plane, and the difference between the minimum and maximum values in the vertical direction from the reference plane is calculated as the warp amount. The warp amount less than 2mm is evaluated as "○", and more than 2mm is evaluated as "×".
<熱膨脹係數(CTE)之測定> 於經脫模處理之12吋矽晶圓上,將實施例及比較例製作之樹脂組成物1~8,使用壓縮模製裝置(模具溫度:130℃,壓力:6MPa,硬化時間:10分鐘)進行壓縮成型,形成厚度300μm之樹脂組成物層。隨後,自經脫模處理之矽晶圓剝離樹脂組成物層,於180℃加熱90分鐘,使樹脂組成物層熱硬化製作硬化物樣品。將硬化物樣品切斷為寬5mm、長15mm,獲得試驗片。針對試驗片,使用熱機械分析裝置(RIGAKU公司製「ThermoPlus TMA8310」),以拉伸加重法進行熱機械分析。詳細而言,將試驗片安裝於前述熱機械分析裝置後,以荷重1g、升溫速度5℃/分鐘之測定條件,連續進行2次測定。然後,於第2次測定中,算出自25℃至150℃之範圍的平面方向之熱膨脹係數(ppm/℃),並藉以下基準進行評價。 ○:未達13ppm/℃時 ×:13ppm/℃以上時<Determination of coefficient of thermal expansion (CTE)> On a 12-inch silicon wafer that had been subjected to demolding, the resin compositions 1 to 8 prepared in the embodiment and the comparative example were compression molded using a compression molding device (mold temperature: 130°C, pressure: 6 MPa, curing time: 10 minutes) to form a resin composition layer with a thickness of 300 μm. Subsequently, the resin composition layer was peeled off from the silicon wafer that had been subjected to demolding, and the resin composition layer was heated at 180°C for 90 minutes to thermally cure the resin composition layer to prepare a hardened sample. The hardened sample was cut into 5 mm wide and 15 mm long pieces to obtain test pieces. For the test piece, a thermomechanical analysis was performed using a thermomechanical analysis device ("ThermoPlus TMA8310" manufactured by RIGAKU) using the tensile weight method. Specifically, after the test piece was mounted in the aforementioned thermomechanical analysis device, two measurements were performed consecutively under the measurement conditions of a load of 1g and a heating rate of 5°C/min. Then, in the second measurement, the thermal expansion coefficient (ppm/°C) in the plane direction in the range of 25°C to 150°C was calculated and evaluated using the following criteria. ○: Less than 13ppm/°C ×: 13ppm/°C or more
實施例1~5中,即使不含(E)成分時,儘管程度上存在差異,但仍確認歸屬於與上述實施例相同之結果。In Examples 1 to 5, even when the component (E) was not included, the results were confirmed to be the same as those of the above-mentioned Examples, although there were differences in degree.
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