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TWI888116B - Method of preparing silicon nitride nanomaterial - Google Patents

Method of preparing silicon nitride nanomaterial Download PDF

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TWI888116B
TWI888116B TW113116014A TW113116014A TWI888116B TW I888116 B TWI888116 B TW I888116B TW 113116014 A TW113116014 A TW 113116014A TW 113116014 A TW113116014 A TW 113116014A TW I888116 B TWI888116 B TW I888116B
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silicon nitride
crude product
nanomaterials
washing
iron
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TW202542075A (en
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黃常寧
鄭佳哲
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南臺學校財團法人南臺科技大學
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Abstract

A method of preparing a silicon nitride nanomaterial includes pickling, washing, and drying an agricultural waste containing carbon and silicon dioxide to prepare a biomass raw material. Performing said biomass raw material a low temperature carbon thermal reaction at 600 °C to form a first crude product containing carbon and silicon oxides, then pickling, washing, and drying said first crude product to obtain a carbonized product. Performing said carbonized product a high temperature carbon thermal reaction with an iron - based catalyst in a nitrogen atmosphere at 1300 °C to 1600 °C to form a second crude product comprising silicon nitride nanocrystalline whiskers and silicon nitride nanoparticles. Said iron - based catalyst selected from the group consisting of iron chloride, ferrous chloride, and any combination thereof. And performing an purification treatment by refining said second crude product including separating said silicon nitride nanocrystallines and said silicon nitride nanoparticles in said second crude product from each other with a polar solvent and a non - polar

Description

氮化矽奈米材料的製法Preparation method of silicon nitride nanomaterials

本發明是有關於一種氮化矽奈米材料的製法,特別是指一種使用農業廢棄物製備氮化矽奈米材料的製法。 The present invention relates to a method for preparing silicon nitride nanomaterials, and in particular to a method for preparing silicon nitride nanomaterials using agricultural waste.

氮化矽(Si3N4)是一種先進的陶瓷材料,其具有出色的熱機械性能、化學惰性、耐高溫、腐蝕耐久性、耐氧化性、耐腐蝕性及高導熱係數,故為目前最重要的結構應用工程陶瓷之一。 Silicon nitride (Si 3 N 4 ) is an advanced ceramic material that has excellent thermomechanical properties, chemical inertness, high temperature resistance, corrosion durability, oxidation resistance, corrosion resistance and high thermal conductivity. Therefore, it is one of the most important engineering ceramics for structural applications.

氮化矽的能隙寬(5.3eV)並可藉由摻雜異質原子來獲得不同的電子或光學特性。由於氮化矽具高機械強度、熱穩定性、化學穩定性、高摻雜濃度及卓越的光電和機械性能,使氮化矽奈米材料在許多方面具有潛在用途,例如奈米電池之能量轉換和儲存、激光、化學傳感和催化、光場發射元件、奈米複合材料、增強材料,故氮化矽被認為是未來高溫微電子和光電子元件之重要材料。 Silicon nitride has a wide energy gap (5.3eV) and can obtain different electronic or optical properties by doping heterogeneous atoms. Due to its high mechanical strength, thermal stability, chemical stability, high doping concentration, and excellent optoelectronic and mechanical properties, silicon nitride nanomaterials have potential uses in many areas, such as energy conversion and storage in nanobatteries, lasers, chemical sensors and catalysis, light field emission devices, nanocomposites, and enhanced materials. Therefore, silicon nitride is considered to be an important material for future high-temperature microelectronics and optoelectronic devices.

因此,本發明之目的,即在提供一種新穎的氮化矽奈米材料的製法。 Therefore, the purpose of the present invention is to provide a novel method for preparing silicon nitride nanomaterials.

於是,本發明氮化矽奈米材料的製法,包含以下步驟:(1)將包含碳及二氧化矽的農業廢棄物依序進行酸洗、水洗及烘乾,製得生質原料;(2)將該生質原料在600℃進行低溫碳熱反應形成包含碳及矽氧化物的第一粗產物,並將該第一粗產物依序進行酸洗、水洗及烘乾而獲得包含該碳及該矽氧化物的碳化產物;(3)將該碳化產物與鐵系催化劑於氮氣氣氛中在1300℃至1600℃進行高溫碳熱反應,形成包含氮化矽奈米晶鬚及氮化矽奈米顆粒的第二粗產物,其中,該鐵系催化劑選自於由氯化鐵、氯化亞鐵及上述任意組合所組成的群組;及(4).將該第二粗產物進行提純處理,該提純處理包括利用極性溶劑與非極性溶劑使該第二粗產物中的該氮化矽奈米晶鬚與該氮化矽奈米顆粒相互分離。 Therefore, the method for preparing silicon nitride nanomaterials of the present invention comprises the following steps: (1) acid-washing, water-washing and drying agricultural waste containing carbon and silicon dioxide in sequence to prepare biomass raw materials; (2) subjecting the biomass raw materials to low-temperature carbon thermal reaction at 600°C to form a first crude product containing carbon and silicon oxide, and acid-washing, water-washing and drying the first crude product in sequence to obtain a carbonized product containing the carbon and silicon oxide; (3) reacting the carbonized product with an iron-based catalyst in a A high temperature carbon thermal reaction is carried out at 1300°C to 1600°C in a nitrogen atmosphere to form a second crude product containing silicon nitride nano whiskers and silicon nitride nanoparticles, wherein the iron-based catalyst is selected from the group consisting of ferric chloride, ferrous chloride and any combination thereof; and (4). The second crude product is subjected to a purification treatment, wherein the purification treatment includes using a polar solvent and a non-polar solvent to separate the silicon nitride nano whiskers and the silicon nitride nanoparticles in the second crude product.

本發明之功效在於:本發明利用該農業廢棄物製備出氮化矽奈米材料,尤其於進行該高溫碳熱反應時配合使用該鐵系催化劑降低了該氮化矽奈米晶鬚的生成溫度。 The effect of the present invention is that: the present invention utilizes the agricultural waste to prepare silicon nitride nanomaterials, and in particular, the iron-based catalyst is used in conjunction with the high-temperature carbon thermal reaction to reduce the generation temperature of the silicon nitride nano whiskers.

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是本發明的實施例A組的氮化矽奈米晶鬚的表面形貌;圖2是本發明的實施例B組的氮化矽奈米晶鬚的表面形貌;圖3是對照例A組的氮化矽奈米晶鬚的表面形貌;圖4是本發明的實施例A組的氮化矽奈米晶鬚的X光繞射圖;圖5是本發明的實施例B組的氮化矽奈米晶鬚的X光繞射圖;圖6是對照例A組的氮化矽奈米晶鬚的X光繞射圖;圖7A及圖7B是本發明的實施例A組的氮化矽奈米晶鬚的拉曼光譜圖;圖8A及圖8B是本發明的實施例B組的氮化矽奈米晶鬚的拉曼光譜圖;及圖9A及圖9B是對照例A組的氮化矽奈米晶鬚的拉曼光譜圖。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: FIG. 1 is the surface morphology of the silicon nitride nano whiskers of Example A of the present invention; FIG. 2 is the surface morphology of the silicon nitride nano whiskers of Example B of the present invention; FIG. 3 is the surface morphology of the silicon nitride nano whiskers of the comparative example A; FIG. 4 is the X-ray diffraction diagram of the silicon nitride nano whiskers of Example A of the present invention; FIG. 5 is the surface morphology of the silicon nitride nano whiskers of the present invention; Figure 6 is an X-ray diffraction diagram of the silicon nitride nano whiskers of Example B of the present invention; Figure 7A and Figure 7B are Raman spectra of the silicon nitride nano whiskers of Example A of the present invention; Figure 8A and Figure 8B are Raman spectra of the silicon nitride nano whiskers of Example B of the present invention; and Figure 9A and Figure 9B are Raman spectra of the silicon nitride nano whiskers of Example A.

本發明氮化矽奈米材料的製法,包含以下步驟(1)至(4)。以下就步驟(1)至(4)進一步詳細說明。 The method for preparing the silicon nitride nanomaterial of the present invention comprises the following steps (1) to (4). Steps (1) to (4) are further described in detail below.

[步驟(1)] [Step (1)]

該步驟(1)中將包含碳及二氧化矽的農業廢棄物依序進行酸洗、水洗及烘乾,製得生質原料。 In step (1), agricultural waste containing carbon and silicon dioxide is acid-washed, water-washed and dried in sequence to produce biomass raw materials.

該農業廢棄物例如但不限於稻稈。 The agricultural waste includes, but is not limited to, rice.

該酸洗是以酸性液體去除該農業廢棄物中的金屬雜質及無機鹽類,該酸性液體例如但不限於濃度0.5N的鹽酸。 The pickling is to remove metal impurities and inorganic salts in the agricultural waste with an acidic liquid, such as but not limited to hydrochloric acid with a concentration of 0.5N.

[步驟(2)] [Step (2)]

該步驟(2)中將該生質原料在600℃進行低溫碳熱反應形成包含碳及矽氧化物的第一粗產物,並將該第一粗產物依序進行酸洗、水洗及烘乾而製得包含該碳及該矽氧化物的碳化產物。 In step (2), the biomass raw material is subjected to a low-temperature carbon thermal reaction at 600°C to form a first crude product containing carbon and silicon oxide, and the first crude product is sequentially acid-washed, water-washed and dried to obtain a carbonized product containing the carbon and the silicon oxide.

該低溫碳熱反應的時間例如但不限於3小時。 The time of the low-temperature carbon thermal reaction is, for example but not limited to, 3 hours.

該酸洗是以酸性液體去除殘留在該第一粗產物中的金屬雜質及無機鹽類,該酸性液體例如但不限於濃度0.5N的鹽酸。 The acid washing is to remove the metal impurities and inorganic salts remaining in the first crude product with an acidic liquid, such as but not limited to hydrochloric acid with a concentration of 0.5N.

[步驟(3)] [Step (3)]

該步驟(3)中將該碳化產物與鐵系催化劑於氮氣氣氛中在1300℃至1600℃進行高溫碳熱反應形成包含氮化矽奈米晶鬚、氮化矽奈米顆粒及殘留的該碳的第二粗產物。 In step (3), the carbonization product and an iron-based catalyst are subjected to a high-temperature carbon thermal reaction at 1300°C to 1600°C in a nitrogen atmosphere to form a second crude product comprising silicon nitride nanowhiskers, silicon nitride nanoparticles and residual carbon.

該鐵系催化劑選自於由氯化鐵、氯化亞鐵及上述任意組合所組成的群組。在本發明的一些實施態樣中,以該碳化產物的用量為1公克計,該鐵系催化劑的用量為0.03公克。 The iron-based catalyst is selected from the group consisting of ferric chloride, ferrous chloride and any combination thereof. In some embodiments of the present invention, the amount of the iron-based catalyst is 0.03 grams based on the amount of the carbonized product being 1 gram.

該高溫碳熱反應的時間範圍例如但不限於4小時。 The time range of the high temperature carbon thermal reaction is, for example but not limited to, 4 hours.

該氮化矽奈米晶鬚的晶相包括α-Si3N4及β-Si3N4,該α-Si3N4為主晶相,該β-Si3N4為次級晶相。 The crystal phases of the silicon nitride nano whiskers include α-Si 3 N 4 and β-Si 3 N 4 , wherein the α-Si 3 N 4 is the main crystal phase and the β-Si 3 N 4 is the secondary crystal phase.

[步驟(4)] [Step (4)]

該步驟(4)中將該第二粗產物進行提純處理,該提純處理包括利用極性溶劑與非極性溶劑使該第二粗產物中的該氮化矽奈米晶鬚與該氮化矽奈米顆粒相互分離;以及將相互分離的該氮化矽奈米晶鬚與該氮化矽奈米顆粒各自在600℃加熱以去除殘留的該碳。 In step (4), the second crude product is subjected to a purification treatment, and the purification treatment includes using a polar solvent and a non-polar solvent to separate the silicon nitride nano whiskers and the silicon nitride nanoparticles in the second crude product from each other; and heating the separated silicon nitride nano whiskers and the silicon nitride nanoparticles at 600°C to remove the residual carbon.

該極性溶劑例如但不限於水。該非極性溶劑例如但不限於二甲苯。 The polar solvent is, for example, but not limited to, water. The non-polar solvent is, for example, but not limited to, xylene.

本發明將就以下實施例來作進一步說明,但應瞭解的是,所述實施例僅為例示說明之用,而不應被解釋為本發明實施之限制。 The present invention will be further described with reference to the following embodiments, but it should be understood that the embodiments are only for illustrative purposes and should not be interpreted as limitations on the implementation of the present invention.

[實施例A組][Embodiment A Group]

(1)將稻稈粉末依序進行酸洗、水洗及烘乾製得生質原料。其中,該酸洗是將該稻稈粉末與0.5N鹽酸在80℃攪拌混合2小時,以去除該稻稈粉末中的金屬雜質及無機鹽類而得到經酸洗稻稈粉末。該水洗是將該經酸洗稻稈粉末以去離子水清洗至pH值為中性。 (1) The rice straw powder is acid-washed, water-washed and dried in sequence to obtain a biomass raw material. The acid-washing step is to stir and mix the rice straw powder with 0.5N hydrochloric acid at 80°C for 2 hours to remove metal impurities and inorganic salts in the rice straw powder to obtain the acid-washed rice straw powder. The water-washing step is to wash the acid-washed rice straw powder with deionized water until the pH value is neutral.

(2)將該生質原料在600℃加熱3小時進行低溫碳化還原形成包含碳及矽氧化物的第一粗產物,再將該第一粗產物依序進行酸洗、水洗及烘乾而獲得包含該碳及該矽氧化物的碳化產物。其 中,該酸洗是將該第一粗產物與0.5N鹽酸在80℃攪拌混合2小時,得到經酸洗第一粗產物。該水洗是將該經酸洗第一粗產物以去離子水清洗至pH值為中性。 (2) The biomass raw material is heated at 600°C for 3 hours to perform low-temperature carbonization reduction to form a first crude product containing carbon and silicon oxide, and the first crude product is then acid-washed, water-washed and dried in sequence to obtain a carbonized product containing the carbon and the silicon oxide. Wherein, the acid-washing is to stir and mix the first crude product with 0.5N hydrochloric acid at 80°C for 2 hours to obtain an acid-washed first crude product. The water-washing is to wash the acid-washed first crude product with deionized water until the pH value is neutral.

(3)將1公克的該碳化產物與0.03公克的氯化亞鐵置於一坩鍋內後於氮氣氣氛中(氮氣的流量為500sccm)在1300℃至1600℃加熱進行高溫碳熱反應,生成包含氮化矽奈米晶鬚、氮化矽奈米顆粒及殘留的該碳的第二粗產物。該第二粗產物中大部分的該氮化矽奈米晶鬚附著在該坩堝的表面,該氮化矽奈米顆粒被殘留的該碳包覆。 (3) 1 gram of the carbonized product and 0.03 gram of ferrous chloride are placed in a crucible and heated at 1300°C to 1600°C in a nitrogen atmosphere (nitrogen flow rate is 500 sccm) for high-temperature carbon thermal reaction to generate a second crude product containing silicon nitride nanowhiskers, silicon nitride nanoparticles and residual carbon. Most of the silicon nitride nanowhiskers in the second crude product are attached to the surface of the crucible, and the silicon nitride nanoparticles are coated by the residual carbon.

(4)將該第二粗產物從該坩堝中取出並移入一燒杯中,然後在該燒杯中加入去離子水並利用均質機以5000rpm/min的轉速進行攪拌,再於該燒杯中添加二甲苯,因該二甲苯與該去離子水不互溶會分層,使得被殘留的該碳包覆的該氮化矽奈米顆粒因疏水性而懸浮於該二甲苯的液面,而該氮化矽奈米晶鬚沉降於該燒杯底部,接著利用分液漏斗進行分液過濾而使該氮化矽奈米晶鬚與被殘留的該碳包覆的該氮化矽奈米顆粒相互分離。之後,將該氮化矽奈米晶鬚烘乾後在600℃恆溫10小時以去除因靜電附著的該碳,以及將被殘留的該碳包覆的該氮化矽奈米顆粒烘乾後在600℃恆溫10小時以去除包覆的該碳。 (4) The second crude product is taken out from the crucible and transferred into a beaker. Deionized water is then added to the beaker and stirred at a speed of 5000 rpm/min using a homogenizer. Xylene is then added to the beaker. Since the xylene and the deionized water are immiscible, they will separate into layers, so that the carbon-coated silicon nitride nanoparticles that are retained are suspended on the liquid surface of the xylene due to their hydrophobicity, while the silicon nitride nanocrystal whiskers settle to the bottom of the beaker. Then, a separatory funnel is used to perform separation filtration to separate the silicon nitride nanocrystal whiskers from the carbon-coated silicon nitride nanoparticles that are retained. Afterwards, the silicon nitride nano whiskers were dried and kept at 600°C for 10 hours to remove the carbon attached due to electrostatic charging, and the silicon nitride nanoparticles coated with the residual carbon were dried and kept at 600°C for 10 hours to remove the coated carbon.

[實施例B組][Embodiment B Group]

實施例B組與實施例A組的差異在於,在該步驟(3)中不是使用氯化亞鐵,而是改為使用氯化鐵。 The difference between Example B and Example A is that ferric chloride is used instead of ferrous chloride in step (3).

[對照例A組][Comparative Example Group A]

對照例A組與實施例A組及實施例B組的差別在於,對照例A組在該步驟(3)中沒有使用鐵系催化劑。 The difference between the control group A and the embodiment group A and the embodiment group B is that the control group A does not use an iron-based catalyst in step (3).

表面形貌分析:Surface morphology analysis:

利用場發射掃描式電子顯微鏡(廠牌型號:JEOL JSM-6701F)分別拍攝實施例A組、實施例B組及對照例B組中所獲得的氮化矽奈米晶鬚的表面形貌,所得結果如圖1至圖3所示。 The surface morphologies of the silicon nitride nano whiskers obtained in Example A, Example B, and Control Example B were photographed using a field emission scanning electron microscope (brand model: JEOL JSM-6701F). The results are shown in Figures 1 to 3.

X光繞射(X-ray diffraction,XRD)分析:X-ray diffraction (XRD) analysis:

利用X光繞射儀(廠牌型號:Bruker D2 phaser)分別分析實施例A組、實施例B組及對照例B組中所獲得的氮化矽奈米晶鬚,所得結果如表1至表3及圖4至圖6所示。 The silicon nitride nano whiskers obtained in Example A, Example B and Control Example B were analyzed using an X-ray diffraction instrument (brand model: Bruker D2 phaser). The results are shown in Tables 1 to 3 and Figures 4 to 6.

拉曼光譜分析:Raman spectroscopy analysis:

利用拉曼光譜儀(廠牌型號:法國Jobin Yvon/Labram HR)分別分析實施例A組、實施例B組及對照例B組中所獲得的氮化矽奈米晶鬚,所得結果如圖7至圖9所示。 The silicon nitride nanowhiskers obtained in Example A, Example B and Control Example B were analyzed using a Raman spectrometer (brand model: Jobin Yvon/Labram HR, France). The results are shown in Figures 7 to 9.

產率分析:Yield Analysis:

利用以下算式計算氮化矽奈米晶鬚及氮化矽奈米顆粒的總產率,以及氮化矽奈米晶鬚的占比。 The following formula is used to calculate the total yield of silicon nitride nanowhiskers and silicon nitride nanoparticles, as well as the proportion of silicon nitride nanowhiskers.

Figure 113116014-A0305-12-0008-1
Figure 113116014-A0305-12-0008-1

NWs為氮化矽奈米晶鬚的重量(單位:公克) NWs is the weight of silicon nitride nanowhiskers (unit: grams)

NPs為氮化矽奈米顆粒的重量(單位:公克) NPs is the weight of silicon nitride nanoparticles (unit: grams)

CRs為碳化產物的重量(單位:公克) CRs is the weight of carbonization product (unit: gram)

Figure 113116014-A0305-12-0008-2
Figure 113116014-A0305-12-0008-2

Figure 113116014-A0305-12-0009-3
Figure 113116014-A0305-12-0009-3

Figure 113116014-A0305-12-0010-4
Figure 113116014-A0305-12-0010-4

參閱表1及表2,有添加鐵系催化劑進行高溫碳熱反應的實施例A組及實施例B組,在高溫碳熱反應的溫度1400℃所獲得的氮化矽奈米晶鬚的占比最高,當高溫碳熱反應的溫度升高到1500℃至1600℃時所獲得的氮化矽奈米晶鬚的占比降低,也就是氮化矽奈米顆粒的占比相對增加。參閱表3,沒有添加鐵系催化劑進行高溫碳熱反應的對照例A組,氮化矽奈米晶鬚的占比隨著高溫碳熱反應的溫度升高而增加,在高溫碳熱反應的溫度1600℃所獲得的氮化矽奈米晶鬚的占比最高。對照之下可知,本發明透過於進行高溫碳熱反應時添加鐵系催化劑,讓氮化矽奈米晶鬚與氮化矽奈 米顆粒的生長趨勢改變,尤其能在較低的高溫碳熱反應的溫度(1400℃)獲得較多的氮化矽奈米晶鬚。 Referring to Table 1 and Table 2, in Example Group A and Example Group B, which are subjected to high-temperature carbon thermal reaction with the addition of an iron-based catalyst, the proportion of silicon nitride nano whiskers obtained at a high-temperature carbon thermal reaction temperature of 1400°C is the highest, and when the temperature of the high-temperature carbon thermal reaction is increased to 1500°C to 1600°C, the proportion of silicon nitride nano whiskers obtained decreases, that is, the proportion of silicon nitride nanoparticles increases relatively. Referring to Table 3, in Control Group A, which is subjected to high-temperature carbon thermal reaction without the addition of an iron-based catalyst, the proportion of silicon nitride nano whiskers increases as the temperature of the high-temperature carbon thermal reaction increases, and the proportion of silicon nitride nano whiskers obtained at a high-temperature carbon thermal reaction temperature of 1600°C is the highest. By contrast, the present invention changes the growth trend of silicon nitride nano whiskers and silicon nitride nanoparticles by adding an iron-based catalyst during high-temperature carbothermal reaction, and can especially obtain more silicon nitride nano whiskers at a lower high-temperature carbothermal reaction temperature (1400°C).

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above is only an example of the implementation of the present invention, and it cannot be used to limit the scope of the implementation of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still within the scope of the patent of the present invention.

Claims (10)

一種氮化矽奈米材料的製法,包含以下步驟: (1) 將包含碳及二氧化矽的農業廢棄物依序進行酸洗、水洗及烘乾,製得生質原料; (2) 將該生質原料在600℃進行低溫碳熱反應形成包含碳及矽氧化物的第一粗產物,並將該第一粗產物依序進行酸洗、水洗及烘乾而獲得包含該碳及該矽氧化物的碳化產物; (3) 將該碳化產物與鐵系催化劑於氮氣氣氛中在1300℃至1600℃進行高溫碳熱反應,形成包含氮化矽奈米晶鬚及氮化矽奈米顆粒的第二粗產物,其中,該鐵系催化劑選自於由氯化鐵、氯化亞鐵及上述任意組合所組成的群組;及 (4).將該第二粗產物進行提純處理,該提純處理包括利用極性溶劑與非極性溶劑使該第二粗產物中的該氮化矽奈米晶鬚與該氮化矽奈米顆粒相互分離。 A method for preparing silicon nitride nanomaterials comprises the following steps: (1) acid-washing, water-washing and drying agricultural waste containing carbon and silicon dioxide in sequence to obtain a biomass raw material; (2) subjecting the biomass raw material to a low-temperature carbon thermal reaction at 600°C to form a first crude product containing carbon and silicon oxide, and acid-washing, water-washing and drying the first crude product in sequence to obtain a carbonized product containing the carbon and the silicon oxide; (3) The carbonized product and an iron-based catalyst are subjected to a high-temperature carbon thermal reaction at 1300°C to 1600°C in a nitrogen atmosphere to form a second crude product containing silicon nitride nanowhiskers and silicon nitride nanoparticles, wherein the iron-based catalyst is selected from the group consisting of ferric chloride, ferrous chloride and any combination thereof; and (4) The second crude product is subjected to a purification treatment, wherein the purification treatment includes using a polar solvent and a non-polar solvent to separate the silicon nitride nanowhiskers and the silicon nitride nanoparticles in the second crude product. 如請求項1所述的氮化矽奈米材料的製法,其中,以該碳化產物的用量為1公克計,該鐵系催化劑的用量為0.03公克。The method for preparing silicon nitride nanomaterials as described in claim 1, wherein the amount of the iron-based catalyst used is 0.03 grams based on the amount of the carbonized product used being 1 gram. 如請求項1所述的氮化矽奈米材料的製法,其中,該氮化矽奈米晶鬚的晶相包括α-Si 3N 4The method for manufacturing silicon nitride nanomaterials as described in claim 1, wherein the crystal phase of the silicon nitride nanowhiskers comprises α-Si 3 N 4 . 如請求項3所述的氮化矽奈米材料的製法,其中,該氮化矽奈米晶鬚的晶相還包括β-Si 3N 4The method for manufacturing silicon nitride nanomaterials as described in claim 3, wherein the crystal phase of the silicon nitride nanowhiskers further includes β-Si 3 N 4 . 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(4)中該極性溶劑是水。The method for producing silicon nitride nanomaterials as described in claim 1, wherein in the step (4), the polar solvent is water. 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(4)中該非極性溶劑是二甲苯。The method for preparing silicon nitride nanomaterials as described in claim 1, wherein in the step (4), the non-polar solvent is xylene. 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(4)中該提純處理還包括將相互分離的該氮化矽奈米晶鬚與該氮化矽奈米顆粒各自在600℃加熱以去除殘留的該碳。The method for manufacturing silicon nitride nanomaterials as described in claim 1, wherein the purification process in the step (4) further comprises heating the separated silicon nitride nanowhiskers and the silicon nitride nanoparticles at 600° C. to remove the residual carbon. 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(1)中該農業廢棄物是稻稈粉末。The method for producing silicon nitride nanomaterials as described in claim 1, wherein in the step (1), the agricultural waste is rice powder. 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(1)中該酸洗是以酸性液體去除該農業廢棄物中的金屬雜質及無機鹽類。The method for producing silicon nitride nanomaterials as described in claim 1, wherein the pickling in step (1) is to remove metal impurities and inorganic salts in the agricultural waste using an acidic liquid. 如請求項1所述的氮化矽奈米材料的製法,其中,在該步驟(2)中該酸洗是以酸性液體清洗該第一粗產物。The method for producing silicon nitride nanomaterials as described in claim 1, wherein the acid washing in the step (2) is to wash the first crude product with an acidic liquid.
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CN102421706A (en) * 2009-04-30 2012-04-18 司奥普施有限责任公司 High purity silicon-containing products and method of manufacture
TWI646045B (en) * 2017-12-05 2019-01-01 國家中山科學研究院 A method for producing the spherical silicon nitride powder

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* Cited by examiner, † Cited by third party
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CN102421706A (en) * 2009-04-30 2012-04-18 司奥普施有限责任公司 High purity silicon-containing products and method of manufacture
TWI646045B (en) * 2017-12-05 2019-01-01 國家中山科學研究院 A method for producing the spherical silicon nitride powder

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