TWI887027B - Manufacturing method of electronic device - Google Patents
Manufacturing method of electronic device Download PDFInfo
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- TWI887027B TWI887027B TW113125625A TW113125625A TWI887027B TW I887027 B TWI887027 B TW I887027B TW 113125625 A TW113125625 A TW 113125625A TW 113125625 A TW113125625 A TW 113125625A TW I887027 B TWI887027 B TW I887027B
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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Abstract
Description
本發明是有關於一種裝置,且特別是有關於一種電子裝置的製造方法。The present invention relates to a device, and in particular to a method for manufacturing an electronic device.
現有包含可變電容的電子裝置,測試都是在製造完成後,以逆向偏壓(reverse bias)施加於可變電容的方式測試可變電容是否正常或損壞。現有的可變電容接合(bonding)在基板上後的測試難度高。並且,現有的測試是對於多個可變電容已接合在基板上後所進行的產品功能測試,而無法定位單顆損壞的狀況。The existing electronic devices including variable capacitors are tested after manufacturing by applying reverse bias to the variable capacitors to test whether the variable capacitors are normal or damaged. The existing variable capacitors are difficult to test after bonding to the substrate. In addition, the existing tests are product function tests performed after multiple variable capacitors have been bonded to the substrate, and cannot locate the damage of a single capacitor.
本揭露是針對一種電子裝置的製造方法,可在製造過程中自動判斷電子裝置中的電子元件是否損壞,以在製造過程中修復被判斷為損壞的電子元件。The present disclosure is directed to a method for manufacturing an electronic device, which can automatically determine whether an electronic component in the electronic device is damaged during the manufacturing process, so as to repair the electronic component determined to be damaged during the manufacturing process.
根據本揭露的實施例,本揭露的電子裝置的製造方法包括以下步驟。提供至少一個電子元件電連接測試裝置。透過測試裝置施加順向偏壓於至少一個電子元件,以根據至少一個電子元件所發出的光或者至少一個電子元件的熱特性來判斷至少一個電子元件為正常或損壞。運送被判斷為正常的至少一個電子元件至下一生產站點。至少一個電子元件由逆向偏壓驅動以進行至少一個電子元件的電容調變功能。According to an embodiment of the present disclosure, the manufacturing method of the electronic device of the present disclosure includes the following steps. Provide at least one electronic component to be electrically connected to a test device. Apply a forward bias to at least one electronic component through the test device to determine whether at least one electronic component is normal or damaged based on the light emitted by at least one electronic component or the thermal characteristics of at least one electronic component. Transport at least one electronic component determined to be normal to the next production site. At least one electronic component is driven by a reverse bias to perform a capacitance modulation function of at least one electronic component.
根據本揭露的另一實施例,本揭露的電子裝置的製造方法包括以下步驟。提供至少一個電子元件電連接測試裝置。透過測試裝置施加逆向偏壓於至少一個電子元件,以根據至少一個電子元件的電容調變功能來判斷至少一個電子元件為正常或損壞。運送被判斷為正常的至少一個電子元件至下一生產站點。至少一個電子元件在工作模式下主要由另一逆向偏壓驅動以進行至少一個電子元件的電容調變功能。According to another embodiment of the present disclosure, the manufacturing method of the electronic device of the present disclosure includes the following steps. Provide at least one electronic component to be electrically connected to a test device. Apply a reverse bias to at least one electronic component through the test device to determine whether the at least one electronic component is normal or damaged based on the capacitance modulation function of the at least one electronic component. Transport the at least one electronic component determined to be normal to the next production site. At least one electronic component is mainly driven by another reverse bias in the working mode to perform the capacitance modulation function of the at least one electronic component.
本揭露的電子裝置的製造方法可通過施加順向偏壓於電子元件以根據電子元件所發出的光或者熱特性,或者可通過施加逆向偏壓於電子元件以根據電子元件的電容調變功能,使得電子元件能夠被準確且便捷地判斷為正常或損壞。The manufacturing method of the electronic device disclosed in the present invention can accurately and conveniently judge whether the electronic component is normal or damaged by applying a forward bias to the electronic component based on the light or heat characteristics emitted by the electronic component, or by applying a reverse bias to the electronic component based on the capacitance modulation function of the electronic component.
為讓本揭露的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present disclosure more clearly understood, embodiments are specifically cited below and described in detail with reference to the accompanying drawings.
現將詳細地參考本揭露的示範性實施例,示範性實施例的實例說明於圖式中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to exemplary embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to represent the same or similar parts.
本揭露通篇說明書與所附的申請專利範圍中會使用某些詞匯來指稱特定元件。本領域技術人員應理解,電子裝置製造商可能會以不同的名稱來指稱相同的元件。本文並不意在區分那些功能相同但名稱不同的元件。在下文說明書與申請專利範圍中,「含有」與「包括」等詞為開放式詞語,因此其應被解釋為「含有但不限定為…」之意。Certain terms are used throughout this disclosure and in the attached patent claims to refer to specific components. It should be understood by those skilled in the art that electronic device manufacturers may refer to the same component by different names. This document is not intended to distinguish between components that have the same function but different names. In the following description and patent claims, the words "including" and "comprising" are open-ended words and should therefore be interpreted as "including but not limited to..."
在本揭露一些實施例中,關於「接合」以及「連接」等用語,除非特別定義,否則可指兩個結構系直接接觸,或者亦可指兩個結構並非直接接觸,其中有其它結構設於此兩個結構之間。並且,關於「接合」以及「連接」等用語亦可包括兩個結構都可移動,或者兩個結構都固定之情況。此外,用語「電性連接」、「耦接」包括任何直接及間接的電性連接手段。In some embodiments of the present disclosure, the terms "joined" and "connected" may refer to two structures being in direct contact, or may refer to two structures not being in direct contact, with other structures disposed between the two structures, unless otherwise specifically defined. Furthermore, the terms "joined" and "connected" may also include situations where both structures are movable, or both structures are fixed. In addition, the terms "electrically connected" and "coupled" include any direct and indirect electrical connection means.
說明書與申請專利範圍中所使用的序數例如「第一」、「第二」等之用詞用以修飾元件,其本身並不意含及代表該元件,或該些元件有任何之前的序數,也不代表某一元件與另一元件的順序、或是製造方法上的順序。該些序數的使用僅用來使具有某命名的元件得以和另一具有相同命名的元件能作出清楚區分。申請專利範圍與說明書中可不使用相同用詞,據此,說明書中的第一元件在申請專利範圍中可能為第二元件。須知悉的是,以下所舉實施例可以在不脫離本揭露的精神下,可將數個不同實施例中的特徵進行替換、重組、混合以完成其他實施例。各實施例間特徵只要不違背發明精神或相衝突,均可任意混合搭配使用。The ordinal numbers used in the specification and patent application, such as "first", "second", etc., are used to modify the components, and they themselves do not imply or represent the components, or any previous ordinal numbers of the components, nor do they represent the order of one component to another component, or the order of the manufacturing method. The use of these ordinal numbers is only used to make it possible to clearly distinguish a component with a certain name from another component with the same name. The patent application and the specification may not use the same terms, and accordingly, the first component in the specification may be the second component in the patent application. It should be noted that the following embodiments can replace, reorganize, and mix the features in several different embodiments to complete other embodiments without departing from the spirit of the present disclosure. The features between the embodiments can be mixed and matched as needed as long as they do not violate the spirit of the invention or conflict with each other.
圖1是本揭露的一實施例的電子裝置的結構示意圖。參考圖1,圖1可為電子裝置100的俯視圖。電子裝置100包括基板101、多個電子元件110、驅動電路120、130以及多個測試墊140。在本實施例中,所述多個電子元件110設置在基板101的主動區102中,並且驅動電路120、130以及所述多個測試墊140設置在主動區102以外的周邊區103。在本實施例中,所述多個電子元件110以陣列排列的方式設置在基板101的主動區102中,並且通過多個走線電性連接至驅動電路120、130以及所述多個測試墊140。在其它實施例中,所述多個電子元件110也可以隨機排列而連接的方式設置在基板101的主動區102中。FIG. 1 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG. 1 , FIG. 1 may be a top view of an electronic device 100. The electronic device 100 includes a substrate 101, a plurality of electronic components 110, a driving circuit 120, 130, and a plurality of test pads 140. In the present embodiment, the plurality of electronic components 110 are arranged in an active area 102 of the substrate 101, and the driving circuits 120, 130 and the plurality of test pads 140 are arranged in a peripheral area 103 outside the active area 102. In the present embodiment, the plurality of electronic components 110 are arranged in an array in the active area 102 of the substrate 101, and are electrically connected to the driving circuits 120, 130 and the plurality of test pads 140 through a plurality of traces. In other embodiments, the plurality of electronic components 110 may also be disposed in the active region 102 of the substrate 101 in a randomly arranged and connected manner.
在本實施例中,驅動電路120、130可分別設置在基板101的周邊區中,並且靠近基板101的相鄰的兩側邊緣的位置,但本揭露並不限於此。在一實施例中,驅動電路120、130也可分別設置在基板101的相對的兩側邊緣的位置或同一側邊緣的位置。在本實施例中,所述多個測試墊140可設置在基板101的周邊區中,並且沿著不同於驅動電路120、130的某一側邊緣的位置而設置,但本揭露並不限於此。在一實施例中,所述多個測試墊140也可沿著不同於驅動電路120、130的基板101的某兩側邊緣的位置或可沿著相同於驅動電路120、130的基板101的某一側或多側邊緣的位置而設置。In this embodiment, the driving circuits 120 and 130 may be respectively disposed in the peripheral area of the substrate 101 and close to the adjacent side edges of the substrate 101, but the present disclosure is not limited thereto. In one embodiment, the driving circuits 120 and 130 may also be respectively disposed at the positions of the opposite side edges or the same side edges of the substrate 101. In this embodiment, the plurality of test pads 140 may be disposed in the peripheral area of the substrate 101 and along a position different from a side edge of the driving circuits 120 and 130, but the present disclosure is not limited thereto. In one embodiment, the plurality of test pads 140 may be disposed along two side edges of the substrate 101 different from the driving circuits 120 and 130 or along one or more side edges of the substrate 101 that are the same as the driving circuits 120 and 130 .
在本實施例中,電子裝置100可為一種調諧裝置(tuning device),例如天線裝置等等,天線裝置可例如包括天線拼接裝置,但不以此為限。但本揭露並不限於此。在一實施例中,電子裝置100可為顯示裝置、感測裝置、觸控顯示裝置(touch display)、曲面顯示裝置(curved display)或非矩形顯示裝置(free shape display),但不以此為限。天線裝置可例如包括天線拼接裝置,但不以此為限。此外,本揭露的各實施例所述的基板及載板可為電路基板、玻璃基板或可撓式基板等。In the present embodiment, the electronic device 100 may be a tuning device, such as an antenna device, etc. The antenna device may, for example, include an antenna splicing device, but is not limited thereto. However, the present disclosure is not limited thereto. In one embodiment, the electronic device 100 may be a display device, a sensing device, a touch display device, a curved display device, or a free shape display device, but is not limited thereto. The antenna device may, for example, include an antenna splicing device, but is not limited thereto. In addition, the substrate and carrier described in each embodiment of the present disclosure may be a circuit substrate, a glass substrate, or a flexible substrate, etc.
在本實施例中,所述多個電子元件110可包括可變電容(或稱變容二極體(variable capacitance diode/varicap diode))及/或發光二極體。在本實施例中,驅動電路120、130可分別為源極(source)驅動電路以及柵極(gate)驅動電路,並且用以驅動所述多個電子元件110,但本揭露並不限於此。在本實施例中,所述多個測試墊140可用於在電子裝置100的製造過程中測試所述多個電子元件110是否為正常或損壞(fail),以便於在電子裝置100的製造過程中修復損壞的電子元件。In the present embodiment, the plurality of electronic components 110 may include a variable capacitance diode (or varicap diode) and/or a light emitting diode. In the present embodiment, the driving circuits 120 and 130 may be a source driving circuit and a gate driving circuit, respectively, and are used to drive the plurality of electronic components 110, but the present disclosure is not limited thereto. In the present embodiment, the plurality of test pads 140 may be used to test whether the plurality of electronic components 110 are normal or damaged (fail) during the manufacturing process of the electronic device 100, so as to repair the damaged electronic components during the manufacturing process of the electronic device 100.
圖2是本揭露的一實施例的電子裝置的製造方法的流程圖。參考圖1以及圖2,圖1的電子裝置100可通過進行以下步驟S210~240而被製造之。在步驟S210,提供基板101。基板101上可先形成電路走線。在步驟S220,將(至少一個)電子元件110接合於基板101上。電子元件110於基板101上的設置位置可基於先前形成的電路走線而決定。在本實施例中,電子元件110可包括可變電容,並且電子元件110的可變電容可在工作模式下主要由逆向偏壓(reverse bias)(或逆向電流)驅動(通過驅動電路120、130所提供的信號進行驅動),以通過可變電容的電子空乏區進行電容調變功能。FIG. 2 is a flow chart of a method for manufacturing an electronic device according to an embodiment of the present disclosure. Referring to FIG. 1 and FIG. 2 , the electronic device 100 of FIG. 1 can be manufactured by performing the following steps S210 to 240. In step S210, a substrate 101 is provided. A circuit trace can be formed on the substrate 101 first. In step S220, (at least one) electronic component 110 is bonded to the substrate 101. The location of the electronic component 110 on the substrate 101 can be determined based on the previously formed circuit trace. In this embodiment, the electronic component 110 may include a variable capacitor, and the variable capacitor of the electronic component 110 may be driven mainly by a reverse bias (or reverse current) in the working mode (driven by a signal provided by the driving circuits 120 and 130) to perform a capacitance modulation function through the electron depletion region of the variable capacitor.
在步驟S230,通過測試裝置施加順向偏壓(forward bias)(或順向電流)於電子元件110,並且判斷電子元件110為正常或損壞。測試裝置可通過測試墊140來提供順向偏壓於電子元件110的可變電容,以使可變電容實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波)。在本實施例中,可通過光偵測元件來偵測電子元件110是否發出具有特定波長的光,以判斷電子元件110的可變電容為正常或損壞。所述具有特定波長的光是從可變電容發出。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件110的可變電容是否有正常的熱特性(熱分布),以判斷電子元件110的可變電容為正常或損壞(包括可判斷可變電容與電路走線之間是否正常地電性連接)。In step S230, a forward bias (or forward current) is applied to the electronic component 110 by the test device, and the electronic component 110 is judged to be normal or damaged. The test device can provide a forward bias to the variable capacitor of the electronic component 110 through the test pad 140, so that the variable capacitor can realize a diode function to emit light (electromagnetic wave) with a specific wavelength (e.g., 0.2~1000 microns (um)). In this embodiment, a light detection element can be used to detect whether the electronic component 110 emits light with a specific wavelength to judge whether the variable capacitor of the electronic component 110 is normal or damaged. The light with a specific wavelength is emitted from the variable capacitor. Alternatively, in one embodiment, an infrared imager can be used to detect whether the circuit traces and the variable capacitor of the electronic component 110 have normal thermal characteristics (thermal distribution) to determine whether the variable capacitor of the electronic component 110 is normal or damaged (including determining whether the variable capacitor and the circuit traces are electrically connected normally).
在步驟S240,運送設置有被判斷為正常的電子元件的基板101,或修復被判斷為損壞的電子元件。對此,當判斷具有損壞的電子元件時,可通知製造人員或製造設備進行更換或修復損壞的電子元件。當全部的電子元件110為正常時,可進行電子裝置100的下一製造程序(例如形成驅動電路120、130)或進行封裝(package),而本揭露並不加以限制。因此,本實施例的製造方法可在製造過程中自動判斷電子裝置100中的電子元件110是否損壞,以使可在製造過程中修復被判斷為損壞的電子元件,以有效提升電子裝置100的製造良率。In step S240, the substrate 101 provided with the electronic components judged to be normal is transported, or the electronic components judged to be damaged are repaired. In this regard, when it is judged that there are damaged electronic components, the manufacturing personnel or manufacturing equipment can be notified to replace or repair the damaged electronic components. When all the electronic components 110 are normal, the next manufacturing process of the electronic device 100 (for example, forming the driving circuits 120, 130) or packaging can be performed, and the present disclosure is not limited thereto. Therefore, the manufacturing method of this embodiment can automatically determine whether the electronic component 110 in the electronic device 100 is damaged during the manufacturing process, so that the electronic component determined to be damaged can be repaired during the manufacturing process, thereby effectively improving the manufacturing yield of the electronic device 100.
圖3是本揭露的一實施例的電子裝置的結構示意圖。參考圖3,圖3可為電子裝置300的俯視圖,並且可表示電子裝置300完成製造流程後的(產品)結構。在本實施例中,電子裝置300包括基板301、多個電子元件310、驅動電路320、330以及多個測試墊341、342。在本實施例中,所述多個電子元件310以陣列排列的方式設置在基板301上,並且通過多個走線電性連接至驅動電路320、330以及所述多個測試墊341、342。相較於圖1,本實施例的所述多個測試墊341、342分別形成在基板301上且不同於驅動電路320、330的兩側邊緣的位置。並且,值得注意的是,驅動電路320、330以及所述多個測試墊341、342形成在基板301上。當電子裝置300完成並通過如上述圖2實施例所述的步驟S230的測試後,所述多個測試墊341、342可保留於基板301上。FIG3 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG3 , FIG3 may be a top view of the electronic device 300, and may represent the (product) structure of the electronic device 300 after completing the manufacturing process. In this embodiment, the electronic device 300 includes a substrate 301, a plurality of electronic components 310, a driving circuit 320, 330, and a plurality of test pads 341, 342. In this embodiment, the plurality of electronic components 310 are arranged on the substrate 301 in an array arrangement, and are electrically connected to the driving circuits 320, 330 and the plurality of test pads 341, 342 through a plurality of traces. Compared to FIG. 1 , the plurality of test pads 341, 342 of this embodiment are formed on the substrate 301 at positions different from the two side edges of the driving circuits 320, 330. Moreover, it is worth noting that the driving circuits 320, 330 and the plurality of test pads 341, 342 are formed on the substrate 301. When the electronic device 300 is completed and passes the test of step S230 described in the embodiment of FIG. 2 above, the plurality of test pads 341, 342 can be retained on the substrate 301.
圖4是本揭露的一實施例的電子裝置的結構示意圖。參考圖4,圖4可為電子裝置400的俯視圖,並且可表示電子裝置400完成製造流程後的(產品)結構。在本實施例中,電子裝置400包括基板401、多個電子元件410、驅動電路420、430以及多個測試墊441、442。在本實施例中,所述多個電子元件410以陣列排列的方式設置在基板401上,並且通過多個走線電性連接至驅動電路420、430以及所述多個測試墊441、442。相較於圖3,基於產品規格的要求(即受限於基板面積要求),當電子裝置400完成並通過如上述圖2實施例所述的步驟S230的測試後,所述多個測試墊441、442將被移除。換言之,所述多個測試墊441、442可形成在尚未進行基板切割之前的基板401或其他基板上。FIG. 4 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG. 4 , FIG. 4 may be a top view of the electronic device 400, and may represent the (product) structure of the electronic device 400 after completing the manufacturing process. In this embodiment, the electronic device 400 includes a substrate 401, a plurality of electronic components 410, a driving circuit 420, 430, and a plurality of test pads 441, 442. In this embodiment, the plurality of electronic components 410 are arranged on the substrate 401 in an array arrangement, and are electrically connected to the driving circuits 420, 430 and the plurality of test pads 441, 442 through a plurality of traces. Compared to FIG. 3 , based on the requirements of product specifications (i.e., limited by the substrate area requirements), after the electronic device 400 is completed and passes the test of step S230 as described in the embodiment of FIG. 2 , the plurality of test pads 441 and 442 will be removed. In other words, the plurality of test pads 441 and 442 can be formed on the substrate 401 or other substrates before the substrate is cut.
圖5是本揭露的一實施例的電子裝置的結構示意圖。參考圖5,圖5可為電子裝置500的俯視圖,並且可表示電子裝置500完成製造流程後的(產品)結構。在本實施例中,電子裝置500包括基板501、多個電子元件510、驅動電路520、530以及多個測試墊541、542。在本實施例中,所述多個電子元件510以陣列排列的方式設置在基板501上,並且通過多個走線電性連接至驅動電路520、530以及所述多個測試墊541、542。相較於圖1,本實施例的所述多個測試墊541、542分別形成在基板501上且相同於驅動電路520、530的兩側邊緣的位置,並且通過驅動電路520、530電性連接至所述多個電子元件510。值得注意的是,驅動電路520、530以及所述多個測試墊541、542形成在基板501上。當電子裝置500完成並通過如上述圖2實施例所述的步驟S230的測試後,所述多個測試墊541、542可保留於基板501上。FIG5 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG5 , FIG5 may be a top view of the electronic device 500, and may represent the (product) structure of the electronic device 500 after the manufacturing process is completed. In this embodiment, the electronic device 500 includes a substrate 501, a plurality of electronic components 510, a driving circuit 520, 530, and a plurality of test pads 541, 542. In this embodiment, the plurality of electronic components 510 are arranged on the substrate 501 in an array arrangement, and are electrically connected to the driving circuits 520, 530 and the plurality of test pads 541, 542 through a plurality of traces. Compared to FIG. 1 , the plurality of test pads 541, 542 of this embodiment are formed on the substrate 501 at the same positions as the two side edges of the driving circuits 520, 530, and are electrically connected to the plurality of electronic components 510 through the driving circuits 520, 530. It is worth noting that the driving circuits 520, 530 and the plurality of test pads 541, 542 are formed on the substrate 501. When the electronic device 500 is completed and passes the test of step S230 described in the embodiment of FIG. 2 above, the plurality of test pads 541, 542 can be retained on the substrate 501.
圖6是本揭露的一實施例的電子裝置的結構示意圖。參考圖6,圖6可為電子裝置600的俯視圖,並且可表示電子裝置600完成製造流程後的(產品)結構。在本實施例中,電子裝置600包括基板601、多個電子元件610、驅動電路620、630以及多個測試墊641、642。在本實施例中,所述多個電子元件610以陣列排列的方式設置在基板601上,並且通過多個走線電性連接至驅動電路620、630以及所述多個測試墊641、642。相較於圖5,基於產品規格的要求(即受限於基板面積要求),當電子裝置600完成並通過如上述圖2實施例所述的步驟S230的測試後,所述多個測試墊641、642將被移除。換言之,所述多個測試墊641、642可形成在尚未進行基板切割之前的基板601或其他基板上。FIG6 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG6 , FIG6 may be a top view of the electronic device 600, and may represent the (product) structure of the electronic device 600 after the manufacturing process is completed. In this embodiment, the electronic device 600 includes a substrate 601, a plurality of electronic components 610, a driving circuit 620, 630, and a plurality of test pads 641, 642. In this embodiment, the plurality of electronic components 610 are arranged on the substrate 601 in an array arrangement, and are electrically connected to the driving circuits 620, 630 and the plurality of test pads 641, 642 through a plurality of traces. Compared to FIG. 5 , based on the requirements of product specifications (i.e., limited by the substrate area requirements), after the electronic device 600 is completed and passes the test of step S230 as described in the embodiment of FIG. 2 , the plurality of test pads 641 and 642 will be removed. In other words, the plurality of test pads 641 and 642 can be formed on the substrate 601 or other substrates before the substrate is cut.
圖7是本揭露的一實施例的電子裝置的結構示意圖。參考圖7,圖7可為電子裝置700的俯視圖,並且可表示電子裝置700完成製造流程後的(產品)結構。在本實施例中,電子裝置700包括基板701、多個電子元件710以及多個測試墊741、742。在本實施例中,所述多個電子元件710以陣列排列的方式設置在基板701上,並且通過多個走線電性連接至所述多個測試墊741、742。相較於圖1,本實施例的所述多個測試墊741、742分別形成在基板701上且對應於驅動電路的位置。值得注意的是,當電子裝置700完成並通過如上述圖2實施例所述的步驟S230的測試後,所述多個測試墊741、742可作為鍵合墊(bonding pad),以保留於基板701上,並且形成驅動電路在所述多個測試墊741、742上。所述驅動電路可通過所述多個測試墊741、742電性連接至所述多個電子元件710。換言之,電子裝置700在製造過程中所形成用於鍵合驅動電路的鍵合墊可先用於測試所述多個電子元件710為正常或損壞,再接著用於當驅動電路形成於基板701上時可鍵合基板701,以通過相對應的電路走線電性連接至所述多個電子元件710。FIG7 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. Referring to FIG7 , FIG7 may be a top view of an electronic device 700, and may represent the (product) structure of the electronic device 700 after completing the manufacturing process. In this embodiment, the electronic device 700 includes a substrate 701, a plurality of electronic components 710, and a plurality of test pads 741, 742. In this embodiment, the plurality of electronic components 710 are arranged on the substrate 701 in an array arrangement, and are electrically connected to the plurality of test pads 741, 742 through a plurality of traces. Compared to FIG1 , the plurality of test pads 741, 742 of this embodiment are respectively formed on the substrate 701 and correspond to the positions of the driving circuits. It is worth noting that after the electronic device 700 is completed and passes the test of step S230 as described in the embodiment of FIG. 2 , the plurality of test pads 741 and 742 can be used as bonding pads to remain on the substrate 701, and a driving circuit can be formed on the plurality of test pads 741 and 742. The driving circuit can be electrically connected to the plurality of electronic components 710 through the plurality of test pads 741 and 742. In other words, the bonding pads formed during the manufacturing process of the electronic device 700 for bonding the driving circuit can first be used to test whether the multiple electronic components 710 are normal or damaged, and then used to bond the substrate 701 when the driving circuit is formed on the substrate 701 to electrically connect to the multiple electronic components 710 through corresponding circuit traces.
圖8是本揭露的一實施例的電子元件的電路示意圖。參考圖8,上述各實施例的電子元件可實現如圖8的電子元件810。在本實施例中,電子元件810包括可變電容811。測試裝置801可通過測試墊電性連接至可變電容811的陽極與陰極,並且可通過測試墊施加順向偏壓於可變電容811,以使可變電容811實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波)。在本實施例中,電子元件810還可包括其他電路走線(圖未示),以使與驅動電路電性連接。在本實施例中,可通過光偵測元件來偵測電子元件810的可變電容811是否發出具有特定波長的光,以判斷電子元件810的可變電容811為正常或損壞。所述具有特定波長的光是從可變電容811發出。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件810的可變電容811是否有正常的熱特性(熱分布),以判斷電子元件810的可變電容811為正常或損壞(包括可判斷可變電容811與電路走線之間是否正常地電性連接)。測試裝置801可為一種可提供測試電壓及/或測試電流的設備,並且測試裝置801可基於走線的配置結果,以使可實現施加順向偏壓及/或逆向偏壓於電子元件810,然而本揭露並不限制走線的配置方式。FIG8 is a circuit diagram of an electronic component of an embodiment of the present disclosure. Referring to FIG8 , the electronic components of the above-mentioned embodiments can be implemented as an electronic component 810 as shown in FIG8 . In this embodiment, the electronic component 810 includes a variable capacitor 811. The test device 801 can be electrically connected to the anode and cathode of the variable capacitor 811 through the test pad, and a forward bias can be applied to the variable capacitor 811 through the test pad so that the variable capacitor 811 can realize a diode function to emit light (electromagnetic waves) with a specific wavelength (e.g., 0.2 to 1000 micrometers (um)). In this embodiment, the electronic component 810 may also include other circuit traces (not shown) to electrically connect to the drive circuit. In this embodiment, a light detection element can be used to detect whether the variable capacitor 811 of the electronic component 810 emits light with a specific wavelength to determine whether the variable capacitor 811 of the electronic component 810 is normal or damaged. The light with a specific wavelength is emitted from the variable capacitor 811. Alternatively, in one embodiment, an infrared imager can be used to detect whether the circuit wiring and the variable capacitor 811 of the electronic component 810 have normal thermal characteristics (thermal distribution) to determine whether the variable capacitor 811 of the electronic component 810 is normal or damaged (including determining whether the variable capacitor 811 and the circuit wiring are normally electrically connected). The test device 801 may be a device that can provide a test voltage and/or a test current, and the test device 801 may apply a forward bias and/or a reverse bias to the electronic component 810 based on the configuration of the wiring. However, the present disclosure does not limit the configuration of the wiring.
圖9是本揭露的一實施例的電子元件的電路示意圖。參考圖9,上述各實施例的兩個相鄰的電子元件可實現如圖9的電子元件910_1、910_2。在本實施例中,電子元件910_1可包括可變電容911。電子元件910_2可包括發光二極體912。電子元件910_1與電子元件910_2之間的電路走線上還可包括電路元件950。可變電容911、發光二極體912以及電路元件950可以串聯的形式電性連接。電路元件950可例如由電感、電阻、電晶體及/或電容等相關元件所組成,而本揭露並不加以限制。測試裝置901可通過測試墊電性連接至可變電容911以及發光二極體912的陽極與陰極,並且可通過測試墊施加順向偏壓於可變電容911以及發光二極體912,以使可變電容911實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波),並且可使發光二極體912發出另一波長(例如350~800微米(um))的光。或者,測試裝置901可通過測試墊施加逆向偏壓於可變電容911,以測試可變電容911的電容調變功能。在本實施例中,電子元件910_1還可包括其他電路走線(圖未示),以使與驅動電路電性連接。FIG. 9 is a circuit diagram of an electronic component of an embodiment of the present disclosure. Referring to FIG. 9 , two adjacent electronic components of the above-mentioned embodiments can be implemented as electronic components 910_1 and 910_2 as shown in FIG. 9 . In the present embodiment, the electronic component 910_1 may include a
在本實施例中,可通過光偵測元件來偵測電子元件910_1的可變電容911是否發出具有特定波長的光,或是偵測電子元件910_2的發光二極體912是否發出另一波長的光(若可變電容911所發出的具有特定波長的光不易偵測),以判斷電子元件910_1的可變電容911為正常或損壞。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件910_1的可變電容911是否有正常的熱特性(熱分布),以判斷電子元件910_1的可變電容911為正常或損壞(包括可判斷可變電容911與電路走線之間是否正常地電性連接)。測試裝置901可為一種可提供測試電壓及/或測試電流的設備,並且測試裝置901可基於走線以及電路元件950的配置結果,以使可實現施加順向偏壓及/或逆向偏壓於電子元件910_1、910_2,然而本揭露並不限制走線以及電路元件950的具體配置方式。In this embodiment, a light detection element can be used to detect whether the
圖10是本揭露的一實施例的電子元件的電路示意圖。參考圖10,上述各實施例的電子元件可實現如圖10的電子元件1010。在本實施例中,電子元件1010可包括可變電容1011以及串聯電連接到可變電容1011的發光二極體1012,並且可變電容1011與發光二極體1012之間的電路走線上還可包括電路元件1050。可變電容1011、發光二極體1012以及電路元件1050可以串聯的形式電性連接。測試裝置1001可通過測試墊電性連接至可變電容1011以及發光二極體1012的陽極與陰極,並且可通過測試墊施加順向偏壓於可變電容1011以及發光二極體1012,以使可變電容1011實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波),並且可使發光二極體1012發出另一波長(例如350~800微米(um))的光。或者,測試裝置1001可通過測試墊施加逆向偏壓於可變電容1011,以測試可變電容1011的電容調變的功能。在本實施例中,電子元件1010還可包括其他電路走線(圖未示),以使與驅動電路電性連接。FIG10 is a circuit diagram of an electronic component of an embodiment of the present disclosure. Referring to FIG10 , the electronic components of the above-mentioned embodiments can be implemented as an
在本實施例中,可通過光偵測元件來偵測電子元件1010的可變電容1011是否發出具有特定波長的光,或是偵測電子元件1010的發光二極體1012是否發出另一波長的光(若可變電容1011所發出的具有特定波長的光不易偵測),以判斷電子元件1010的可變電容1011為正常或損壞。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件1010的可變電容1011是否有正常的熱特性(熱分布),以判斷電子元件1010的可變電容1011為正常或損壞(包括可判斷可變電容1011與電路走線之間是否正常地電性連接)。測試裝置1001可為一種可提供測試電壓及/或測試電流的設備,並且測試裝置1001可基於走線以及電路元件1050的配置結果,以使可實現施加順向偏壓及/或逆向偏壓於電子元件1010,然而本揭露並不限制走線以及電路元件1050的具體配置方式。In this embodiment, a photodetection element can be used to detect whether the
圖11是本揭露的一實施例的電子元件的電路示意圖。參考圖11,上述各實施例的兩個相鄰的電子元件可實現如圖11的電子元件1110_1、1110_2。在本實施例中,電子元件1110_1可包括可變電容1111。電子元件1110_2可包括發光二極體1112。電子元件1110_1與電子元件1110_2之間的電路走線上還可包括電路元件1150。可變電容1111、發光二極體1112以及電路元件1150可以並聯的形式電性連接。測試裝置1101可通過測試墊電性連接至可變電容1111以及發光二極體1112的陽極與陰極,並且可通過測試墊施加順向偏壓於可變電容1111以及發光二極體1112,以使可變電容1111實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波),並且可使發光二極體1112發出另一波長(例如350~800微米(um))的光。或者,測試裝置1101可通過測試墊施加逆向偏壓於可變電容1111,以測試可變電容1111的電容調變的功能。在本實施例中,電子元件1110_1還可包括其他電路走線(圖未示),以使與驅動電路電性連接。FIG. 11 is a circuit diagram of an electronic component of an embodiment of the present disclosure. Referring to FIG. 11 , two adjacent electronic components of the above-mentioned embodiments can be implemented as electronic components 1110_1 and 1110_2 as shown in FIG. 11 . In this embodiment, the electronic component 1110_1 can include a
在本實施例中,可通過光偵測元件來偵測電子元件1110_1的可變電容1111是否發出具有特定波長的光,或是偵測電子元件1110_2的發光二極體1112是否發出另一波長的光(若可變電容1111所發出的具有特定波長的光不易偵測),以判斷電子元件1110_1的可變電容1111為正常或損壞。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件1110_1的可變電容1111是否有正常的熱特性(熱分布),以判斷電子元件1110_1的可變電容1111為正常或損壞(包括可判斷可變電容1111與電路走線之間是否正常地電性連接)。測試裝置1101可為一種可提供測試電壓及/或測試電流的設備,並且測試裝置1101可基於走線以及電路元件1150的配置結果,以使可實現施加順向偏壓及/或逆向偏壓於電子元件1110_1、1110_2,然而本揭露並不限制走線以及電路元件1150的具體配置方式。In this embodiment, a photodetection element can be used to detect whether the
圖12是本揭露的一實施例的電子元件的電路示意圖。參考圖12,上述各實施例的電子元件可實現如圖12的電子元件1210。在本實施例中,電子元件1210可包括可變電容1211以及發光二極體1212,並且可變電容1211與發光二極體1212之間的電路走線上還可包括電路元件1250。可變電容1211、發光二極體1212以及電路元件1250可以並聯的形式電性連接。測試裝置1201可通過測試墊電性連接至可變電容1211以及發光二極體1212的陽極與陰極,並且可通過測試墊施加順向偏壓於可變電容1211以及發光二極體1212,以使可變電容1211實現二極體功能,以發出具有特定波長(例如0.2~1000微米(um))的光(電磁波),並且可使發光二極體1212發出另一波長(例如350~800微米(um))的光。或者,測試裝置1201可通過測試墊施加逆向偏壓於可變電容1211,以測試可變電容1211的電容調變的功能。在本實施例中,電子元件1210還可包括其他電路走線(圖未示),以使與驅動電路電性連接。FIG12 is a circuit diagram of an electronic component of an embodiment of the present disclosure. Referring to FIG12 , the electronic components of the above-mentioned embodiments can be implemented as an
在本實施例中,可通過光偵測元件來偵測電子元件1210的可變電容1211是否發出具有特定波長的光,或是偵測電子元件1210的發光二極體1212是否發出另一波長的光(若可變電容1211所發出的具有特定波長的光不易偵測),以判斷電子元件1210的可變電容1211為正常或損壞。或者,在一實施例中,可通過紅外線顯像儀來偵測電路走線以及電子元件1210的可變電容1211是否有正常的熱特性(熱分布),以判斷電子元件1210的可變電容1211為正常或損壞(包括可判斷可變電容1211與電路走線之間是否正常地電性連接)。測試裝置1201可為一種可提供測試電壓及/或測試電流的設備,並且測試裝置1201可基於走線以及電路元件1250的配置結果,以使可實現施加順向偏壓及/或逆向偏壓於電子元件1210,然而本揭露並不限制走線以及電路元件1250的具體配置方式。In this embodiment, a photodetection element can be used to detect whether the
圖13是本揭露的另一實施例的電子裝置的製造方法的流程圖。上述一些實施例的電子裝置可通過進行以下步驟S1301~S1309而被製造之。參考圖1以及圖13,以圖1的電子裝置100為例。在步驟S1301,形成電路於基板101上。基板101上可先形成多個電路走線(金屬走線)以及所述多個測試墊140。在步驟S1302,對所述電路進行開路/短路測試,以判斷所述多個電路走線以及所述多個測試墊140是否正常連接。在步驟S1303,形成所述多個電子元件110於基板101上。所述多個電子元件110通過所述多個電路走線電性連接所述多個測試墊140。在步驟S1304,通過所述多個測試墊140施加偏壓,以測試所述多個電子元件110,並且判斷這些電子元件110是否通過測試。對此,步驟S1304的測試細節可對照如上述圖2實施例的步驟S230的施加順向偏壓的相關測試說明,因此不多加贅述。若所述多個電子元件110的至少其中之一未通過測試,則執行步驟S1305。在步驟S1305,製造人員或製造設備可修復損壞的電子元件。若所述多個電子元件110的全部通過測試,則執行步驟S1306。在步驟S1306,形成驅動電路120、130於基板101上。驅動電路120、130通過所述多個電路走線電性連接至所述多個電子元件110。FIG. 13 is a flow chart of a method for manufacturing an electronic device of another embodiment of the present disclosure. The electronic devices of some of the above-mentioned embodiments can be manufactured by performing the following steps S1301 to S1309. Referring to FIG. 1 and FIG. 13, the electronic device 100 of FIG. 1 is taken as an example. In step S1301, a circuit is formed on a substrate 101. A plurality of circuit traces (metal traces) and the plurality of test pads 140 can be first formed on the substrate 101. In step S1302, an open circuit/short circuit test is performed on the circuit to determine whether the plurality of circuit traces and the plurality of test pads 140 are normally connected. In step S1303, the plurality of electronic components 110 are formed on the substrate 101. The plurality of electronic components 110 are electrically connected to the plurality of test pads 140 through the plurality of circuit traces. In step S1304, a bias is applied through the plurality of test pads 140 to test the plurality of electronic components 110, and determine whether these electronic components 110 pass the test. In this regard, the test details of step S1304 can refer to the relevant test description of applying a forward bias in step S230 of the embodiment of FIG. 2 above, and therefore will not be elaborated on. If at least one of the plurality of electronic components 110 fails the test, step S1305 is executed. In step S1305, the manufacturing personnel or manufacturing equipment can repair the damaged electronic components. If all of the plurality of electronic components 110 pass the test, step S1306 is performed. In step S1306, the driving circuits 120 and 130 are formed on the substrate 101. The driving circuits 120 and 130 are electrically connected to the plurality of electronic components 110 through the plurality of circuit traces.
在步驟S1307,可通過所述多個測試墊140再次施加偏壓,以再次測試所述多個電子元件110,並且判斷這些電子元件110是否通過測試。對此,步驟S1304的測試細節可對照如上述圖2實施例的步驟S230的施加順向偏壓的相關測試說明,亦可施加逆向偏壓以測試電容調變功能,因此不多加贅述。若所述多個電子元件110的至少其中之一未通過測試,則執行步驟S1308。在步驟S1308,製造人員或製造設備可修復損壞的電子元件。若所述多個電子元件110的全部通過測試,則執行步驟S1309。在步驟S1309,封裝/運送電子裝置100。因此,本實施例的製造方法可在製造過程中自動判斷電子裝置100中的電子元件110是否損壞,以使可在製造過程中修復被判斷為損壞的電子元件,以有效提升電子裝置100的製造良率。In step S1307, bias can be applied again through the plurality of test pads 140 to test the plurality of electronic components 110 again and determine whether the electronic components 110 pass the test. In this regard, the test details of step S1304 can refer to the relevant test description of applying forward bias in step S230 of the embodiment of FIG. 2 above, and reverse bias can also be applied to test the capacitance modulation function, so it is not repeated. If at least one of the plurality of electronic components 110 fails the test, step S1308 is executed. In step S1308, the manufacturing personnel or manufacturing equipment can repair the damaged electronic components. If all of the plurality of electronic components 110 pass the test, step S1309 is executed. In step S1309, the electronic device 100 is packaged/transported. Therefore, the manufacturing method of this embodiment can automatically determine whether the electronic component 110 in the electronic device 100 is damaged during the manufacturing process, so that the electronic component determined to be damaged can be repaired during the manufacturing process, thereby effectively improving the manufacturing yield of the electronic device 100.
在上述本揭露的一些實施例中,電子裝置可通過影像感測設備(例如光學顯微鏡(Optical Microscope,OM)或掃描電子顯微鏡(Scanning Electron Microscope,SEM))而被觀察到設置有測試墊以及發光二極體,或者可被觀察到可變電容內部具有發光二極體的結構。In some embodiments of the present disclosure, the electronic device can be observed to have a test pad and a light-emitting diode through an image sensing device (such as an optical microscope (OM) or a scanning electron microscope (SEM)), or the variable capacitor can be observed to have a structure with a light-emitting diode.
綜上所述,本揭露的電子裝置的製造方法可通過施加順向偏壓於電子元件,並偵測電子元件的可變電容及/或發光二極體是否發光,或偵測電子元件以及走線是否具有正常的熱分布,以準確且便捷地判斷可變電容為正常或損壞。並且,本揭露的電子裝置的製造方法還可過施加逆向偏壓於電子元件的可變電容,以測試可變電容的電容調變功能是否正常。In summary, the manufacturing method of the electronic device disclosed herein can accurately and conveniently determine whether the variable capacitor is normal or damaged by applying a forward bias to the electronic component and detecting whether the variable capacitor and/or the LED of the electronic component emits light, or detecting whether the electronic component and the wiring have a normal heat distribution. In addition, the manufacturing method of the electronic device disclosed herein can also apply a reverse bias to the variable capacitor of the electronic component to test whether the capacitance modulation function of the variable capacitor is normal.
最後應說明的是:以上各實施例僅用以說明本揭露的技術方案,而非對其限制;儘管參照前述各實施例對本揭露進行了詳細的說明,本領域的普通技術人員應當理解:其依然可以對前述各實施例所記載的技術方案進行修改,或者對其中部分或者全部技術特徵進行等同替換;而這些修改或者替換,並不使相應技術方案的本質脫離本揭露各實施例技術方案的範圍。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the above embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present disclosure.
100、300、400、500、600、700:電子裝置
101、301、401、501、601、701:基板
102:主動區
103:周邊區
110、310、410、510、610、710、810、910_1、910_2、1010、1110_1、1110_2、1210:電子元件
120、130、320、330、420、430、520、530、620、630:驅動電路
140、341、342、441、442、541、542、641、642、741、742:測試墊
801、901、1001、1101、1201:測試裝置
811、911、1011、1111、1211:可變電容
912、1012、1112、1212:發光二極體
950、1050、1150、1250:電路元件
S210~S240、S1301~S1309:步驟
100, 300, 400, 500, 600, 700: electronic device
101, 301, 401, 501, 601, 701: substrate
102: active area
103: peripheral area
110, 310, 410, 510, 610, 710, 810, 910_1, 910_2, 1010, 1110_1, 1110_2, 1210: electronic components
120, 130, 320, 330, 420, 430, 520, 530, 620, 630: drive circuit
140, 341, 342, 441, 442, 541, 542, 641, 642, 741, 742:
圖1是本揭露的一實施例的電子裝置的結構示意圖。 圖2是本揭露的一實施例的電子裝置的製造方法的流程圖。 圖3是本揭露的一實施例的電子裝置的結構示意圖。 圖4是本揭露的一實施例的電子裝置的結構示意圖。 圖5是本揭露的一實施例的電子裝置的結構示意圖。 圖6是本揭露的一實施例的電子裝置的結構示意圖。 圖7是本揭露的一實施例的電子裝置的結構示意圖。 圖8是本揭露的一實施例的電子元件的電路示意圖。 圖9是本揭露的一實施例的電子元件的電路示意圖。 圖10是本揭露的一實施例的電子元件的電路示意圖。 圖11是本揭露的一實施例的電子元件的電路示意圖。 圖12是本揭露的一實施例的電子元件的電路示意圖。 圖13是本揭露的另一實施例的電子裝置的製造方法的流程圖。 FIG. 1 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 2 is a flow chart of a method for manufacturing an electronic device of an embodiment of the present disclosure. FIG. 3 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 4 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 5 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 6 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 7 is a schematic diagram of the structure of an electronic device of an embodiment of the present disclosure. FIG. 8 is a schematic diagram of the circuit of an electronic component of an embodiment of the present disclosure. FIG. 9 is a schematic diagram of the circuit of an electronic component of an embodiment of the present disclosure. FIG. 10 is a schematic diagram of the circuit of an electronic component of an embodiment of the present disclosure. FIG. 11 is a schematic circuit diagram of an electronic component of an embodiment of the present disclosure. FIG. 12 is a schematic circuit diagram of an electronic component of an embodiment of the present disclosure. FIG. 13 is a flow chart of a method for manufacturing an electronic device of another embodiment of the present disclosure.
S210~S240:步驟 S210~S240: Steps
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