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TWI886053B - A stacking test device - Google Patents

A stacking test device Download PDF

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TWI886053B
TWI886053B TW113136480A TW113136480A TWI886053B TW I886053 B TWI886053 B TW I886053B TW 113136480 A TW113136480 A TW 113136480A TW 113136480 A TW113136480 A TW 113136480A TW I886053 B TWI886053 B TW I886053B
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test
assembly
carrier
shuttle
transfer
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TW113136480A
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林德禮
許穎龍
邱創先
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大陸商無錫艾方芯動自動化設備有限公司
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Abstract

一種堆疊式測試裝置,包括:機台、測試機架、晶片放置區、移載總成、飛梭移動總成及移料臂總成,測試機架設置於機台上,測試機架設有多層測試槽,測試槽內設有可進出的測試載板,測試載板上設有用以承載晶片的數個測試單元;晶片放置區設置於測試機架一側的機台上;飛梭移動總成設置於晶片放置區一側的機台上;移載總成設置於機台上,移載總成用於將晶片於晶片放置區與飛梭移動總成之間進行轉運;移料臂總成設置於機台上,移料臂總成用以將晶片於飛梭移動總成與測試單元之間進行轉運,藉由本發明一種堆疊式測試裝置能在機台有限空間下進行更多晶片的測試。A stacking test device includes: a machine, a test rack, a chip placement area, a transfer assembly, a shuttle assembly and a material transfer arm assembly. The test rack is arranged on the machine, and the test rack is provided with multiple test slots. The test slots are provided with test carriers that can be inserted and removed, and the test carriers are provided with a plurality of test units for carrying chips. The chip placement area is arranged on the machine on one side of the test rack; the shuttle assembly is arranged on the machine on one side of the chip placement area; the transfer assembly is arranged on the machine, and the transfer assembly is used to transfer chips between the chip placement area and the shuttle assembly; the material transfer arm assembly is arranged on the machine, and the transfer arm assembly is used to transfer chips between the shuttle assembly and the test units. By means of the stacking test device of the present invention, more chips can be tested in a limited space of the machine.

Description

一種堆疊式測試裝置A stacking test device

本發明為一種測試裝置之技術領域,尤其指一種具多層的堆疊式測試裝置。The present invention relates to the technical field of a testing device, and more particularly to a multi-layer stacked testing device.

一般來說,記憶體在出廠前,必須通過各項電性測試,目前測試作業的進行方式是將封裝完成的複數個記憶體晶片放置於托盤上,在收集複數個托盤後再集中送至一台測試機台處,測試機台上是以平面陣列方式分佈著複數個測試作業區,每個測試作業區內設有相關電路板及複數個測試單元,每個測試單元供單一記憶體晶片放置且經電路板配合能對記憶體晶片進行各項測試。測試機台上設有取放機構負責一次將複數晶片由托盤上移出並送至對應測試作業區的複數個測試單元上,利用測試所需時間的時間差,進行記憶體晶片的移載,以滿足於同一時間進行數目眾多之記憶體晶片的測試。但是如果還要提升測試晶片的數量,當然就必須於測試機台上分佈更多測試作業區,如此會將機台體積過大,不僅需更大的廠房空間,測試機台搬運過程中還可能須先拆解成數個部分,之後再於廠房內組裝及微調,極為麻煩且非常不便。Generally speaking, memory must pass various electrical tests before leaving the factory. The current testing method is to place multiple packaged memory chips on a tray, collect multiple trays and send them to a test machine. The test machine has multiple test work areas arranged in a planar array. Each test work area is equipped with a related circuit board and multiple test units. Each test unit is used to place a single memory chip and can perform various tests on the memory chip through the cooperation of the circuit board. The test machine is equipped with a pick-and-place mechanism that is responsible for removing multiple chips from the tray at a time and sending them to multiple test units in the corresponding test operation area. The time difference required for the test is used to transfer the memory chips to meet the test of a large number of memory chips at the same time. However, if the number of test chips is to be increased, more test operation areas must be distributed on the test machine, which will make the machine too large. Not only will a larger factory space be required, but the test machine may also need to be disassembled into several parts during the transportation process, and then assembled and fine-tuned in the factory, which is extremely troublesome and inconvenient.

本發明為一種堆疊式測試裝置,主要是採用垂直堆疊方式形成複數個測試槽,並利用特殊的移載方式快速地將托盤上的晶片移動至所對應空間的測試槽內進行測試,藉此在相同機台體積下,本發明設計能進行數量更多的晶片測試作業。The present invention is a stacking test device, which mainly adopts a vertical stacking method to form a plurality of test slots, and uses a special transfer method to quickly move the chips on the tray to the test slots in the corresponding space for testing. In this way, under the same machine volume, the design of the present invention can perform more chip testing operations.

為實現前述目的,本發明採用了如下技術方案:To achieve the above-mentioned purpose, the present invention adopts the following technical solutions:

本發明為一種堆疊式測試裝置,包括:機台、測試機架、晶片放置區、移載總成、飛梭移動總成及移料臂總成,其中:該測試機架設於該機台上,該測試機架設有多層測試槽,該測試槽內設有可進出的測試載板,該測試載板上設有複數個測試單元,該測試單元用以承載晶片;該晶片放置區設置於該測試機架一側的該機台上;該飛梭移動總成設置於該晶片放置區一側的該機台上;該移載總成設置於該機台上,該移載總成用於將晶片於該晶片放置區與該飛梭移動總成之間進行轉運;該移料臂總成設置於該機台上,該移料臂總成用以將晶片於該飛梭移動總成與該測試單元之間進行轉運。The present invention is a stacking test device, comprising: a machine, a test rack, a chip placement area, a transfer assembly, a shuttle movement assembly and a material transfer arm assembly, wherein: the test rack is arranged on the machine, the test rack is provided with multiple test slots, the test slots are provided with an in-and-out test carrier, the test carrier is provided with a plurality of test units, and the test units are used to carry chips; the chip placement area is arranged on the machine at one side of the test rack; the shuttle movement assembly is arranged on the machine at one side of the chip placement area; the transfer assembly is arranged on the machine, and the transfer assembly is used to transfer chips between the chip placement area and the shuttle movement assembly; the material transfer arm assembly is arranged on the machine, and the material transfer arm assembly is used to transfer chips between the shuttle movement assembly and the test unit.

作為較佳優選實施方案之一,其中該測試槽內設有一個可抽換的承載板,由該承載板承載著該測試載板,該承載板上設有移動組件與該測試載板連動,在該移動組件作動時使該測試載板由該載板上伸出或縮回於該承載板上。As one of the preferred embodiments, a replaceable carrier plate is provided in the test slot, and the test carrier plate is supported by the carrier plate. A moving assembly is provided on the carrier plate and connected to the test carrier plate. When the moving assembly is actuated, the test carrier plate is extended from the carrier plate or retracted onto the carrier plate.

作為較佳優選實施方案之一,該晶片放置區設有用以承載托盤的複數個托盤承載機構,該托盤供放置複數個晶片。As one of the preferred embodiments, the chip placement area is provided with a plurality of tray carrying mechanisms for carrying trays, and the trays are used to place a plurality of chips.

作為較佳優選實施方案之一,該移載總成負責控制複數個取放頭於該晶片放置區與該飛梭移動總成之間進行移動,該移載總成還包括間距調整機構、取料往復機構及橫向移動機構,複數個該取放頭是設置於該間距調整機構,該間距調整機構能調整相鄰該取放頭之間的間距,該取料往復機構是負責帶動該間距調整機構前後往復移動,該橫向移動機構負責帶動該取料往復機構於複數個該托盤承載機構與該飛梭移動總成之間移動。As one of the preferred implementation schemes, the transfer assembly is responsible for controlling the movement of multiple pick-and-place heads between the chip placement area and the shuttle movement assembly. The transfer assembly also includes a spacing adjustment mechanism, a material picking reciprocating mechanism and a lateral movement mechanism. Multiple pick-and-place heads are arranged on the spacing adjustment mechanism. The spacing adjustment mechanism can adjust the spacing between adjacent pick-and-place heads. The material picking reciprocating mechanism is responsible for driving the spacing adjustment mechanism to move back and forth. The lateral movement mechanism is responsible for driving the material picking reciprocating mechanism to move between multiple tray carrying mechanisms and the shuttle movement assembly.

作為較佳優選實施方案之一,其中複數個該取放頭是採以前後兩排,每排數個方式設置於該間距調整機構處。As one of the preferred implementation schemes, a plurality of the pick-and-place heads are arranged at the spacing adjustment mechanism in two rows, with a plurality of heads in each row.

作為較佳優選實施方案之一,該飛梭移動總成包括往復移動機構及飛梭載板,該飛梭載板上設有數個承載治具,該承載治具上設有至少一個置放座,該置放座負責承載晶片,該往復移動機構負責帶動該飛梭載板於該移料臂總成與該晶片放置區之間移動。As one of the preferred implementation schemes, the shuttle moving assembly includes a reciprocating moving mechanism and a shuttle carrier, the shuttle carrier is provided with a plurality of supporting fixtures, the supporting fixture is provided with at least one placing seat, the placing seat is responsible for carrying the chip, and the reciprocating moving mechanism is responsible for driving the shuttle carrier to move between the material transfer arm assembly and the chip placement area.

作為較佳優選實施方案之一,其中該飛梭載板上設有數個併排設置的該承載治具,該承載治具設有用以承載晶片的兩個該置放座。As one of the preferred implementation schemes, a plurality of the supporting fixtures arranged side by side are provided on the shuttle carrier, and the supporting fixture is provided with two placing seats for supporting chips.

作為較佳優選實施方案之一,其中該移料臂總成負責控制複數個吸取頭將晶片於最低位置與該測試機架上對應高度的該測試槽之間進行移動,該移料臂總成還包括水平移動機構、垂直移動機構、移料移動機構及支撐懸臂,複數個該吸取頭固定於該支撐懸臂,並由該移料移動機構帶動該支撐懸臂進行水平移動,該垂直移動機構負責帶動該移料移動機構移至不同的高度位置,該水平移動機構負責帶動該垂直移動機構移動至該測試機架不同縱向之該測試槽位置。As one of the better preferred implementation schemes, the material transfer arm assembly is responsible for controlling a plurality of suction heads to move the chip between the lowest position and the test slot of the corresponding height on the test rack. The material transfer arm assembly also includes a horizontal moving mechanism, a vertical moving mechanism, a material transfer mechanism and a support cantilever. A plurality of the suction heads are fixed to the support cantilever, and the support cantilever is moved horizontally by the material transfer mechanism. The vertical moving mechanism is responsible for driving the material transfer mechanism to move to different height positions, and the horizontal moving mechanism is responsible for driving the vertical moving mechanism to move to the test slot positions in different longitudinal directions of the test rack.

作為較佳優選實施方案之一,其中該吸取頭是採用前後兩排,每排各複數個方式併排設置於該支撐懸臂,前、後兩排的該吸取頭分別用以吸取待測試晶片及已測晶片。As one of the preferred implementation schemes, the suction heads are arranged in two rows, front and rear, with a plurality of suction heads in each row arranged in parallel on the supporting arm. The suction heads in the front and rear rows are used to suck the wafer to be tested and the wafer that has been tested, respectively.

作為較佳優選實施方案之一,該移料移動機構於面對該測試機架的方向還安裝掃描移動機構及掃描單元,該掃描移動機構負責帶動該掃描單元水平移動,該掃描單元用於掃描該測試單元上的晶片位置。As one of the preferred implementation schemes, the material moving mechanism is also equipped with a scanning moving mechanism and a scanning unit in the direction facing the test rack. The scanning moving mechanism is responsible for driving the scanning unit to move horizontally, and the scanning unit is used to scan the chip position on the test unit.

與現有技術相比,本發明一種堆疊式測試裝置是於測試機架採堆疊模式設有多層測試槽,配合移載總成、飛梭移動總成以及移料臂總成,將位於晶片放置區中之托盤上的複數個晶片適時移載至對應高度及位置之測試槽內進行測試,且移載過程中能分別將待測晶片及已測晶片同步移動,避免部分機構總成出現待機空轉現象,大幅提升移載效率,如此就能在有限的機台空間中大幅提升測試晶片的數量,另外設有可抽換的承載板,能抽換為與待測晶片相匹配合適的測試單元,如此這樣能夠提高適用性;而且在測試單元損壞的時候也便於更換或維修,從而提高效率。Compared with the prior art, the stacking test device of the present invention is a test rack with multiple layers of test slots in a stacking mode. In conjunction with a transfer assembly, a shuttle movement assembly and a material transfer arm assembly, multiple chips on a tray in a chip placement area are timely transferred to the test slots of corresponding heights and positions for testing. In the transfer process, the chips to be tested and the tested chips can be moved synchronously respectively to avoid the idle running of some mechanism assemblies, thereby greatly improving the transfer efficiency. In this way, the number of test chips can be greatly increased in a limited machine space. In addition, a replaceable carrier plate is provided, which can be replaced with a test unit that matches the chip to be tested, thereby improving applicability; and when the test unit is damaged, it is also convenient to replace or repair it, thereby improving efficiency.

下面將結合具體實施例和附圖,對本發明的技術方案進行清楚、完整地描述。需要說明的是,當元件被稱為「安裝於或固定於」另一個元件,意指它可以直接在另一個元件上或者也可以存在居中的元件。當一個元件被認為是「連接」另一個元件,意指它可以是直接連接到另一個元件或者可能同時存在居中元件。在所示出的實施例中,方向表示上、下、左、右、前和後等是相對的,用於解釋本案中不同部件的結構和運動是相對的。當部件處於圖中所示的位置時,這些表示是恰當的。但是,如果元件位置的說明發生變化,那麼認為這些表示也將相應地發生變化。The technical solution of the present invention will be described clearly and completely below in conjunction with specific embodiments and accompanying drawings. It should be noted that when an element is referred to as being "mounted on or fixed to" another element, it means that it can be directly on the other element or there can also be a centered element. When an element is considered to be "connected to" another element, it means that it can be directly connected to the other element or there can be a centered element at the same time. In the illustrated embodiments, the directions indicating up, down, left, right, front and back, etc. are relative, and are used to explain that the structures and movements of different components in this case are relative. These representations are appropriate when the components are in the positions shown in the figures. However, if the description of the component positions changes, it is believed that these representations will also change accordingly.

除非另有定義,本文所使用的所有技術和科學術語與屬於本發明技術領域的技術人員通常理解的含義相同。本文中所使用的術語只是為了描述具體實施例的目的,不是旨在限制本發明。本文所使用的術語「和/或」包括一個或多個相關的所列項目的任意的和所有的組合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention pertains. The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and/or" used herein includes any and all combinations of one or more of the related listed items.

如圖1及圖2所示,為本發明之立體圖及俯視圖。本發明一種堆疊式測試裝置是於機台1上設有測試機架2、晶片放置區3、移載總成4、飛梭移動總成5及移料臂總成6。本發明是以托盤7承載待測或已測試晶片,由晶片放置區3為供複數個托盤7放置,測試機架2為垂直堆疊式架構並設有多層測試槽21,移載總成4負責將晶片由托盤7上移入或移出,飛梭移動總成5提供晶片水平方向的移載,負責將晶片於晶片放置區3一側與移料臂總成6之間進行移載,移料臂總成6提供晶片不同空間位置的移載,負責將晶片於最低位置(於飛梭移動總成5所在位置)與測試機架2上對應高度位置的測試槽21之間進行移載。如此一來,本發明一種堆疊式測試裝置能容納更多晶片且進行測試,但機台1所佔面積並不用增加。As shown in Fig. 1 and Fig. 2, which are the three-dimensional and top views of the present invention, a stacking test device of the present invention is provided with a test frame 2, a wafer placement area 3, a transfer assembly 4, a shuttle moving assembly 5 and a material transfer arm assembly 6 on a machine 1. The present invention uses a tray 7 to carry the wafer to be tested or tested, and a wafer placement area 3 is used to place a plurality of trays 7. The test rack 2 is a vertical stacking structure and is provided with multiple test slots 21. The transfer assembly 4 is responsible for moving the wafer in or out of the tray 7. The shuttle moving assembly 5 provides horizontal transfer of the wafer and is responsible for transferring the wafer between one side of the wafer placement area 3 and the material transfer arm assembly 6. The material transfer arm assembly 6 provides transfer of the wafer at different spatial positions and is responsible for transferring the wafer between the lowest position (where the shuttle moving assembly 5 is located) and the test slot 21 at the corresponding height position on the test rack 2. In this way, the present invention is a stacking test device that can accommodate more wafers and perform tests, but the area occupied by the machine 1 does not need to be increased.

接著就各構件的結構作一詳細的說明:Next, the structure of each component is described in detail:

如圖1、圖3所示,測試機架2設有多層測試槽21,測試槽21內設有一可進出的測試載板22,測試載板22上設有數個測試單元23,測試單元23用以承載待測之晶片。在本實施例中,多層測試槽21是以縱向多排並列設置,每個測試載板22上設有8 個並排的測試單元23,每個測試單元23為標準測試治具,設有探針、測試介面板及相關固定機構,以適時將放置其上的晶片固定、釋放及進行測試作業,測試載板22處設有關線路及電性接頭,用以將測試單元23的測試訊號與終端主機相互傳輸。請一併參閱圖4、圖5所示,為了在測試不同晶片時便於更換不同的測試模組,本實施例中測試槽21內設有一個可抽換的承載板24,由承載板24承載著測試載板22,測試載板22並能於承載板24上滑行,承載板24上設有移動組件25與測試載板22連動,在移動組件25作動時使測試載板22使由承載板24上伸出(如圖4)或縮回於承載板24上(如圖5),在本實施例中該移動組件25為一氣壓缸。承載板24在使用時是固定於測試槽21,可以螺絲或其他卡扣結構加以固定,若欲進行不同晶片測試時,則可解除原本鎖固狀態,將承載板24由測試機架2後面抽出更換即可。As shown in Fig. 1 and Fig. 3, the test rack 2 is provided with a multi-layer test slot 21, and a test carrier 22 that can be entered and exited is provided in the test slot 21. A plurality of test units 23 are provided on the test carrier 22, and the test units 23 are used to carry the chips to be tested. In this embodiment, the multi-layer test slots 21 are arranged in parallel in multiple rows in the longitudinal direction, and each test carrier 22 is provided with 8 parallel test units 23. Each test unit 23 is a standard test fixture, and is provided with a probe, a test interface panel and related fixing mechanisms to fix, release and perform test operations on the chip placed thereon in a timely manner. The test carrier 22 is provided with related circuits and electrical connectors to transmit the test signals of the test unit 23 to the terminal host. Please refer to FIG. 4 and FIG. 5 together. In order to facilitate the replacement of different test modules when testing different chips, a replaceable carrier plate 24 is provided in the test slot 21 in this embodiment. The carrier plate 24 carries the test carrier 22, and the test carrier 22 can slide on the carrier plate 24. A moving assembly 25 is provided on the carrier plate 24 and is linked to the test carrier 22. When the moving assembly 25 is actuated, the test carrier 22 is extended from the carrier plate 24 (as shown in FIG. 4) or retracted onto the carrier plate 24 (as shown in FIG. 5). In this embodiment, the moving assembly 25 is a pneumatic cylinder. The carrier plate 24 is fixed to the test slot 21 when in use, and can be fixed by screws or other snap-fit structures. If a different chip test is to be performed, the original locking state can be released, and the carrier plate 24 can be pulled out from the back of the test rack 2 and replaced.

如圖6所示,晶片放置區3設置於測試機架2一側的機台1上,晶片放置區3設有複數個托盤承載機構31,複數個托盤7以堆疊方式放置於托盤承載機構31處。在本實施例中,複數個托盤承載機構31是因使用目的不同,分別用以放置待測晶片的托盤7或、已測試之良品晶片之托盤7、或不良品晶片之托盤7等。As shown in FIG6 , the wafer placement area 3 is disposed on the machine 1 at one side of the test rack 2. The wafer placement area 3 is provided with a plurality of tray carrying mechanisms 31. A plurality of trays 7 are stacked and placed on the tray carrying mechanisms 31. In this embodiment, the plurality of tray carrying mechanisms 31 are used for placing trays 7 of wafers to be tested, trays 7 of tested good wafers, or trays 7 of defective wafers, etc., according to different purposes.

如圖6、7所示,移載總成4設置於機台1上,用於將晶片於晶片放置區3與飛梭移動總成5之間轉運,移載總成4控制著複數個取放頭41於晶片放置區3與飛梭移動總成5之間移動,由取放頭41將晶片移入或移出托盤7。移載總成4是以多個連動機構帶動取放頭41進行三軸向(X、Y、Z方向)的移動,此機構有許多方式可以達到,本發明僅就其中一種作說明,本發明移載總成4包括間距調整機構42、取料往復機構43及橫向移動機構44,複數個取放頭41是設置於間距調整機構42,每個取放頭41並設有獨立的升降機構、吸嘴及供氣管等,使取放頭41能適時下降並吸取於托盤7上的晶片。間距調整機構42則能調整相鄰取放頭41之間的間距,取料往復機構43是負責帶動間距調整機構42前後往復移動,以移動至對應托盤7上之晶片位置,橫向移動機構44負責帶動取料往復機構43於晶片放置區3的複數個托盤承載機構31與飛梭移動總成5之間移動。As shown in Figures 6 and 7, the transfer assembly 4 is set on the machine 1 and is used to transfer the chip between the chip placement area 3 and the shuttle movement assembly 5. The transfer assembly 4 controls a plurality of pick-and-place heads 41 to move between the chip placement area 3 and the shuttle movement assembly 5, and the pick-and-place heads 41 move the chip into or out of the tray 7. The transfer assembly 4 uses multiple linkage mechanisms to drive the pick-and-place head 41 to move in three axes (X, Y, and Z directions). This mechanism can be achieved in many ways, and the present invention only explains one of them. The transfer assembly 4 of the present invention includes a spacing adjustment mechanism 42, a material reciprocating mechanism 43, and a lateral movement mechanism 44. Multiple pick-and-place heads 41 are arranged on the spacing adjustment mechanism 42. Each pick-and-place head 41 is also provided with an independent lifting mechanism, a suction nozzle, and an air supply pipe, so that the pick-and-place head 41 can descend in time and absorb the chip on the tray 7. The spacing adjustment mechanism 42 can adjust the spacing between adjacent pick-up and placement heads 41. The material picking reciprocating mechanism 43 is responsible for driving the spacing adjustment mechanism 42 to move back and forth to move to the chip position corresponding to the tray 7. The lateral moving mechanism 44 is responsible for driving the material picking reciprocating mechanism 43 to move between the multiple tray carrying mechanisms 31 in the chip placement area 3 and the shuttle moving assembly 5.

另外本發明 複數個取放頭41是採前後兩排,每排各四個的方式設有於間距調整機構42處,(圖中僅看到前排結構,後排也具有相同數目及結構的取放頭41),其中在取放過程中是先由間距調整機構42調整同一排相鄰取放頭41之間的間距,再由取料往復機構43移動至對應的托盤7上方位置,在取放頭41下降時先取4個晶片,之後取料往復機構43再移動間距調整機構42一段距離,改由另一排的複數個取放頭41下降吸取托盤7上另一排4個晶片,最後再由橫向移動機構44移動至飛梭移動總成5處。In addition, the present invention has a plurality of pick-and-place heads 41 arranged in two rows, front and rear, with four heads in each row, at a spacing adjustment mechanism 42 (only the front row structure is shown in the figure, and the rear row also has the same number and structure of pick-and-place heads 41). During the pick-and-place process, the spacing adjustment mechanism 42 first adjusts the spacing between adjacent pick-and-place heads 41 in the same row, and then the material reciprocating mechanism 43 moves to the position above the corresponding tray 7. When the pick-and-place head 41 descends, it first takes 4 chips, and then the material reciprocating mechanism 43 moves the spacing adjustment mechanism 42 a certain distance, and then the plurality of pick-and-place heads 41 in another row descend to absorb another row of 4 chips on the tray 7, and finally move to the shuttle moving assembly 5 by the lateral moving mechanism 44.

如圖2、圖6、及圖7所示,飛梭移動總成5設置於晶片放置區3一側的機台1上,負責將晶片於晶片放置區3一側與移料臂總成6之間進行移載。飛梭移動總成5包括往復移動機構51及飛梭載板52,在本實施例中往復移動機構51包括氣壓缸及安裝機台1與飛梭載板52之間的滑軌及滑座等結構,往復移動機構51負責帶動飛梭載板52於移料臂總成6與晶片放置區3一側之間移動。飛梭載板52上設有數個並排的承載治具53,承載治具53用以承載晶片。在本實施例中每個承載治具53上設有兩個置放座531、532,其中置放座531是用於放置待測晶片,另一個置放座532則用以放置已測晶片。另外每個承載治具53還能安裝於一個電動旋轉台上,當電動旋轉台控制承載治具53旋動時,能調整放置其上之晶片位置,以後續晶片取放上更為精準。As shown in FIG. 2 , FIG. 6 , and FIG. 7 , the shuttle moving assembly 5 is arranged on the machine 1 at one side of the wafer placement area 3 and is responsible for transferring the wafer between the wafer placement area 3 and the material transfer arm assembly 6. The shuttle moving assembly 5 includes a reciprocating mechanism 51 and a shuttle carrier 52. In this embodiment, the reciprocating mechanism 51 includes a pneumatic cylinder and a slide rail and a slide seat between the machine 1 and the shuttle carrier 52. The reciprocating mechanism 51 is responsible for driving the shuttle carrier 52 to move between the material transfer arm assembly 6 and the wafer placement area 3. A plurality of side-by-side carrying jigs 53 are arranged on the shuttle carrier 52, and the carrying jigs 53 are used to carry the wafer. In this embodiment, each carrier fixture 53 is provided with two placement seats 531, 532, wherein the placement seat 531 is used to place the wafer to be tested, and the other placement seat 532 is used to place the wafer that has been tested. In addition, each carrier fixture 53 can also be mounted on an electric rotating table. When the electric rotating table controls the carrier fixture 53 to rotate, the position of the wafer placed thereon can be adjusted, so that the subsequent wafer placement can be more accurate.

另外由圖中可清楚發現相鄰承載治具53之間的間距遠大於托盤7上相鄰晶片之間的間距,因此當移載總成4的間距調整機構42被移動於此處時,間距調整機構42會同步調整相鄰兩個取放頭41之間的間距,先由前排的四個取放頭41進行取放動作,之後橫向移動機構44及取料往復機構43依序作動,接著由後排的四個取放頭41接著進行取、放動作,藉此於併排的8個承載治具53上放置或取出晶片。In addition, it can be clearly seen from the figure that the distance between adjacent carrier jigs 53 is much larger than the distance between adjacent chips on the tray 7. Therefore, when the distance adjustment mechanism 42 of the transfer assembly 4 is moved here, the distance adjustment mechanism 42 will synchronously adjust the distance between two adjacent pick-up and placement heads 41. The four pick-up and placement heads 41 in the front row will perform the pick-up and placement action first, and then the lateral movement mechanism 44 and the material reciprocating mechanism 43 will be operated in sequence, and then the four pick-up and placement heads 41 in the back row will continue to perform the pick-up and placement action, thereby placing or removing chips on the eight parallel carrier jigs 53.

如圖1、2及圖8所示,移料臂總成6設置於測試機架2與晶片放置區3之間的機台1,負責控制複數個吸取頭61將晶片於最低位置與測試機架2之不同高度及位置之測試槽21之間進行移載,該最低位置指飛梭載板52上承載治具53上的位置。移料臂總成6還包括水平移動機構62、垂直移動機構63、移料移動機構64、支撐懸臂65,藉由多組機構帶動併排的複數個吸取頭61進行長距離及高低落差大的移載作業。複數個吸取頭61是固定於支撐懸臂65處,並由移料移動機構64帶動支撐懸臂65進行前後水平移動,垂直移動機構63負責帶動移料移動機構64移至不同的高度位置,水平移動機構62負責帶動垂直移動機構63移動至測試機架2不同縱向之測試槽21位置,藉此吸取頭61就能將晶片放置於不同高度之測試槽21內之測試載板22上、或是放置於飛梭載板52之承載治具53上。As shown in Figs. 1, 2 and 8, the material transfer arm assembly 6 is disposed on the machine 1 between the test rack 2 and the wafer placement area 3, and is responsible for controlling a plurality of suction heads 61 to transfer the wafer between the lowest position and the test slots 21 of different heights and positions of the test rack 2, wherein the lowest position refers to the position on the carrier fixture 53 on the shuttle carrier plate 52. The material transfer arm assembly 6 also includes a horizontal movement mechanism 62, a vertical movement mechanism 63, a material transfer mechanism 64, and a supporting cantilever 65. The plurality of suction heads 61 arranged in parallel are driven by multiple sets of mechanisms to perform long-distance and high-drop transfer operations. A plurality of suction heads 61 are fixed to a supporting cantilever 65, and the supporting cantilever 65 is moved horizontally forward and backward by a material transfer mechanism 64. A vertical transfer mechanism 63 is responsible for driving the material transfer mechanism 64 to move to different height positions. A horizontal transfer mechanism 62 is responsible for driving the vertical transfer mechanism 63 to move to different longitudinal test slots 21 positions of the test rack 2. Thus, the suction heads 61 can place the chip on a test carrier 22 in a test slot 21 at different heights, or on a carrier fixture 53 of a shuttle carrier 52.

如圖8及9所示,在本實施例中複數個吸取頭61是採用前後兩排,每排各8個方式併排設置於支撐懸臂65處,前、後兩排分別用以吸取待測試晶片及已測晶片,藉此提升移載的效率。例如測試作業完成欲進行移載前,此時前排複數個吸取頭61可由承載治具53處先吸取待測晶片,後排則為空的吸取頭61,接著移料臂總成6作動後,吸取頭61移至對應高度的測試槽21時,垂直移動機構63及移料移動機構64作動,先由後排空的吸取頭61自測試載板22上的複數個測試單元23上吸取已測試晶片並移出,之後垂直移動機構63及移料移動機構64持續作動改由前排吸取頭61將待測晶片接替放置於空的測試單元23上。後續經下降、位移再將已測晶片放置於飛梭載板52的承載治具53上,藉此提高移載的效率。As shown in FIGS. 8 and 9 , in this embodiment, a plurality of suction heads 61 are arranged in two rows, 8 in each row, on a supporting arm 65 . The front and rear rows are used to suction the wafer to be tested and the wafer that has been tested, respectively, to improve the transfer efficiency. For example, before the test operation is completed and the transfer is to be performed, the front row of multiple suction heads 61 can first suck the wafer to be tested from the carrying fixture 53, and the rear row is an empty suction head 61. Then, after the material transfer arm assembly 6 is actuated, when the suction head 61 moves to the test slot 21 at the corresponding height, the vertical movement mechanism 63 and the material transfer mechanism 64 are actuated, and the empty suction head 61 in the rear row first sucks the tested wafer from the multiple test units 23 on the test carrier 22 and moves it out. After that, the vertical movement mechanism 63 and the material transfer mechanism 64 continue to actuate, and the front row suction head 61 replaces the wafer to be tested and places it on the empty test unit 23. After descending and moving, the tested wafer is placed on the carrying fixture 53 of the shuttle carrier 52, thereby improving the transfer efficiency.

另外如圖9所示,移料移動機構64面對測試機架2的方向還安裝一掃描移動機構66及一掃描單元67,掃描移動機構66負責帶動掃描單元67水平移動,掃描單元67負責在待測晶片放置於測試單元23後進行掃描,以確認夾持不良的晶片位置,便於後續由吸取頭61進行重新放置的動作。In addition, as shown in FIG9 , a scanning movement mechanism 66 and a scanning unit 67 are installed on the material moving mechanism 64 facing the direction of the test rack 2. The scanning movement mechanism 66 is responsible for driving the scanning unit 67 to move horizontally. The scanning unit 67 is responsible for scanning after the wafer to be tested is placed on the test unit 23 to confirm the position of the wafer that is poorly clamped, so as to facilitate the subsequent re-placement action by the suction head 61.

接著,就本發明的運作流程作一簡單的說明:Next, a brief description of the operation process of the present invention is given:

如圖10,初始位置,飛梭移動總成5之飛梭載板52會移動至晶片放置區3之托盤承載機構31一側。之後由移載總成4以取放頭41將晶片由托盤7上移載至承載治具53上,待測晶片放置於置放座531上。由於一排僅有四個取放頭41,故會分兩次由前後兩排的取放頭41吸取八個晶片,之後取放頭41移動至飛梭載板52上方時,放大相鄰兩個取放頭41的間距,之後也是分兩次將前後兩排共八個晶片放置於併排的八個承載治具53上。另外此時若承載治具53上的另一個置放座532若放置有已測晶片,移載總成4的取放頭41也能依序取出,再根據測試結果將良品及不良品直接於放置於晶片放置區3中對應的托盤7處,藉此就不須重新分類。As shown in FIG10 , in the initial position, the shuttle carrier 52 of the shuttle moving assembly 5 will move to the side of the tray supporting mechanism 31 of the wafer placement area 3. Then, the transfer assembly 4 uses the pick-and-place head 41 to transfer the wafer from the tray 7 to the supporting fixture 53, and the wafer to be tested is placed on the placement seat 531. Since there are only four pick-and-place heads 41 in a row, eight wafers will be sucked by the pick-and-place heads 41 in the front and rear rows twice. Then, when the pick-and-place head 41 moves to the top of the shuttle carrier 52, the distance between the two adjacent pick-and-place heads 41 is enlarged, and then the eight wafers in the front and rear rows are placed on the eight supporting fixtures 53 in parallel in two times. In addition, if another placement seat 532 on the carrier fixture 53 is placed with tested chips, the placement head 41 of the transfer assembly 4 can also take them out in sequence, and then place the good and defective products directly on the corresponding tray 7 in the chip placement area 3 according to the test results, so there is no need to reclassify them.

如圖11,飛梭移動總成5由往復移動機構51將飛梭載板52移動至移料臂總成6的工作區內,之後移料臂總成6控制兩排的共十六個吸取頭61同時下降,但僅有同一排八個吸取頭61將待測晶片由承載治具53上的置放座531取出。若移料臂總成6的另外一排八個吸取頭61已吸取著已測晶片,則在移動後放置於承載治具53的另一置放座532內。As shown in FIG11 , the shuttle moving assembly 5 moves the shuttle carrier 52 to the working area of the material transfer arm assembly 6 by means of the reciprocating moving mechanism 51, and then the material transfer arm assembly 6 controls the two rows of 16 suction heads 61 to descend simultaneously, but only the eight suction heads 61 in the same row take out the wafer to be tested from the placement seat 531 on the carrier fixture 53. If the other row of eight suction heads 61 of the material transfer arm assembly 6 has already sucked the wafer to be tested, it will be placed in another placement seat 532 of the carrier fixture 53 after the movement.

如圖12,完成上述晶片取放動作後,移料臂總成6先控制複數個吸取頭61上升,飛梭移動總成5之飛梭載板52須移動至晶片放置區3之托盤承載機構31一側位置。此時測試機架2上已完成測試作業的測試載板22伸出。As shown in FIG12, after the wafer pick-up and placement operation is completed, the transfer arm assembly 6 first controls the plurality of suction heads 61 to rise, and the shuttle carrier 52 of the shuttle moving assembly 5 must be moved to a position on the side of the tray supporting mechanism 31 of the wafer placement area 3. At this time, the test carrier 22 on the test rack 2 that has completed the test operation is extended.

如圖13所示,移料臂總成6之水平移動機構62作動,將垂直移動機構63移至對應的測試載板22處,由垂直移動機構63將移料移動機構64移至對應測試載板22的高度,之後由移料移動機構64控制其中一排的八個吸取頭61將已測試晶片取後,之後再由另一排八個吸取頭61將待測晶片放置已空著的測試單元23中,若測試單元23發出夾持故障的訊號,則由掃描單元67重新掃描,確認故障位置後再重新取出再固定一次。As shown in FIG13 , the horizontal moving mechanism 62 of the material transfer arm assembly 6 is actuated to move the vertical moving mechanism 63 to the corresponding test carrier 22, and the vertical moving mechanism 63 moves the material transfer mechanism 64 to the height corresponding to the test carrier 22. Then, the material transfer mechanism 64 controls one row of eight suction heads 61 to take out the tested wafers, and then another row of eight suction heads 61 place the wafers to be tested in the empty test unit 23. If the test unit 23 sends a signal of clamping failure, the scanning unit 67 re-scans, confirms the fault location, and then takes it out and fixes it again.

綜合以上所述,本發明一種堆疊式測試裝置是於測試機架2採堆疊模式設有多層測試槽21,配合移載總成4、飛梭移動總成5以及移料臂總成6,將位於晶片放置區3中之托盤7上的複數個晶片適時移載至對應高度及位置之測試槽21內進行測試,且移載過程中能分別將待測晶片及已測晶片同步移動,避免部分機構總成出現待機空轉現象,大幅提升移載效率,如此就能在有限的機台1空間中大幅提升測試晶片的數量。In summary, the present invention provides a stacking test device in which a test rack 2 is provided with multiple test slots 21 in a stacking mode, and cooperates with a transfer assembly 4, a shuttle movement assembly 5 and a material transfer arm assembly 6 to timely transfer a plurality of chips on a tray 7 in a chip placement area 3 to the test slots 21 of corresponding heights and positions for testing. In addition, during the transfer process, the chips to be tested and the tested chips can be moved synchronously respectively, thereby avoiding the idle running phenomenon of some mechanism assemblies, greatly improving the transfer efficiency, and thus greatly increasing the number of test chips in a limited machine 1 space.

以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施例之範圍。即凡依本發明申請專利範圍所作的均等變化及修飾,皆為本發明之專利範圍所涵蓋。The above is only the preferred embodiment of the present invention and is not intended to limit the scope of the embodiments of the present invention. That is, all equivalent changes and modifications made according to the scope of the patent application of the present invention are covered by the patent scope of the present invention.

1:機台 2:測試機架 21:測試槽 22:測試載板 23:測試單元 24:承載板 25:移動組件 3:晶片放置區 31:托盤承載機構 4:移載總成 41:取放頭 42:間距調整機構 43:取料往復機構 44:橫向移動機構 5:飛梭移動總成 51:往復移動機構 52:飛梭載板 53:承載治具 531:置放座 532:置放座 6:移料臂總成 61:吸取頭 62:水平移動機構 63:垂直移動機構 64:移料移動機構 65:支撐懸臂 66:掃描移動機構 67:掃描單元 7:托盤 1: Machine 2: Test rack 21: Test slot 22: Test carrier 23: Test unit 24: Carrier 25: Moving assembly 3: Wafer placement area 31: Tray carrier mechanism 4: Transfer assembly 41: Pick-up and placement head 42: Spacing adjustment mechanism 43: Reciprocating mechanism for material removal 44: Horizontal movement mechanism 5: Shuttle movement assembly 51: Reciprocating mechanism 52: Shuttle carrier 53: Carrier fixture 531: Placement seat 532: Placement seat 6: Material transfer arm assembly 61: Suction head 62: Horizontal movement mechanism 63: Vertical movement mechanism 64: Material transfer movement mechanism 65: Support cantilever 66: Scanning moving mechanism 67: Scanning unit 7: Tray

圖1為本發明之立體圖。FIG. 1 is a perspective view of the present invention.

圖2為本發明之俯視圖。FIG. 2 is a top view of the present invention.

圖3為本發明之局部測試機架的放大圖。FIG. 3 is an enlarged view of a partial test rack of the present invention.

圖4為本發明測試載板被推出狀態的立體圖。FIG. 4 is a perspective view of the test carrier of the present invention being pushed out.

圖5為本發明測試載板位於承載板上的立體圖。FIG. 5 is a three-dimensional diagram of the test carrier of the present invention located on the support plate.

圖6為本發明晶片放置區、移載總成及飛梭移動總成的立體圖。FIG. 6 is a three-dimensional diagram of the chip placement area, transfer assembly and shuttle movement assembly of the present invention.

圖7為本發明移載總成及飛梭移動總成的放大立體圖。FIG. 7 is an enlarged three-dimensional view of the transfer assembly and the shuttle transfer assembly of the present invention.

圖8為本發明移料臂總成的立體圖。FIG8 is a perspective view of the material transfer arm assembly of the present invention.

圖9為本發明移料臂總成另一角度的局部放大圖。FIG. 9 is a partial enlarged view of the material transfer arm assembly of the present invention from another angle.

圖10為本發明作動時之平面圖一,此時晶片將於晶片放置區與飛梭載板之間進行移載。FIG. 10 is a plan view of the present invention in operation, where the chip is transferred between the chip placement area and the shuttle carrier.

圖11為本發明作動時之平面圖二,此時飛梭載板移動至移料臂總成處。FIG. 11 is a second plan view of the present invention in operation, where the shuttle carrier moves to the material transfer arm assembly.

圖12為本發明作動時之平面圖三,此時測試機架之測試載板伸出。FIG. 12 is a third plan view of the present invention in operation, where the test carrier of the test rack is extended.

圖13為本發明作動時之平面圖四,此時吸取頭將移至測試載板處。FIG. 13 is a fourth plan view of the present invention in operation, where the suction head is moved to the test carrier.

1:機台 1: Machine

2:測試機架 2: Test rack

21:測試槽 21: Test tank

22:測試載板 22: Test the carrier board

3:晶片放置區 3: Chip placement area

31:托盤承載機構 31: Pallet loading mechanism

4:移載總成 4: Transfer assembly

41:取放頭 41: Pick and place head

5:飛梭移動總成 5: Shuttle moving assembly

51:往復移動機構 51: Reciprocating mechanism

52:飛梭載板 52: Shuttle carrier

53:承載治具 53: Bearing fixture

6:移料臂總成 6: Material transfer arm assembly

61:吸取頭 61: Suction head

7:托盤 7: Tray

Claims (9)

一種堆疊式測試裝置,包括:機台、測試機架、晶片放置區、移載總成、飛梭移動總成及移料臂總成,其中:該測試機架設於該機台上,該測試機架設有多層測試槽,該測試槽內設有可進出的測試載板,該測試載板上設有複數個測試單元,該測試單元用以承載晶片;該晶片放置區設置於該測試機架一側的該機台上;該飛梭移動總成設置於該晶片放置區一側的該機台上;該移載總成設置於該機台上,該移載總成用於將晶片於該晶片放置區與該飛梭移動總成之間進行轉運;該移料臂總成設置於該機台上,該移料臂總成用以將晶片於該飛梭移動總成與該測試單元之間進行轉運,其中該移料臂總成負責控制複數個吸取頭將晶片於最低位置與該測試機架上對應高度的該測試槽之間進行移動,該移料臂總成還包括水平移動機構、垂直移動機構、移料移動機構及支撐懸臂,複數個該吸取頭固定於該支撐懸臂,並由該移料移動機構帶動該支撐懸臂進行水平移動,該垂直移動機構負責帶動該移料移動機構移至不同的高度位置,該水平移動機構負責帶動該垂直移動機構移動至該測試機架不同縱向之該測試槽位置。A stacking test device includes: a machine, a test rack, a chip placement area, a transfer assembly, a shuttle assembly and a material transfer arm assembly, wherein: the test rack is arranged on the machine, the test rack is provided with multiple test slots, the test slots are provided with an in-and-out test carrier, the test carrier is provided with a plurality of test units, and the test units are used to carry chips; the chip placement area is arranged on the machine at one side of the test rack; the shuttle assembly is arranged on the machine at one side of the chip placement area; the transfer assembly is arranged on the machine, and the transfer assembly is used to transfer chips between the chip placement area and the shuttle assembly; the material transfer arm assembly is arranged on the machine The material transfer arm assembly is used to transfer the chip between the shuttle moving assembly and the test unit, wherein the material transfer arm assembly is responsible for controlling a plurality of suction heads to move the chip between the lowest position and the test slot of the corresponding height on the test rack. The material transfer arm assembly also includes a horizontal moving mechanism, a vertical moving mechanism, a material transfer moving mechanism and a supporting cantilever. A plurality of the suction heads are fixed to the supporting cantilever, and the supporting cantilever is driven by the material transfer moving mechanism to move horizontally. The vertical moving mechanism is responsible for driving the material transfer moving mechanism to move to different height positions, and the horizontal moving mechanism is responsible for driving the vertical moving mechanism to move to the test slot positions of different longitudinal directions of the test rack. 如請求項1所述之一種堆疊式測試裝置,其中該測試槽內設有一個可抽換的承載板,由該承載板承載著該測試載板,該承載板上設有移動組件該測試載板連動,在該移動組件作動時使該測試載板由該載板上伸出或縮回於該承載板上。A stacking test device as described in claim 1, wherein a replaceable carrier plate is provided in the test slot, the carrier plate supports the test carrier, and a moving assembly is provided on the carrier plate to be connected to the test carrier, so that the test carrier is extended from the carrier plate or retracted onto the carrier plate when the moving assembly is actuated. 如請求項1所述之一種堆疊式測試裝置,該晶片放置區設有用以承載托盤的複數個托盤承載機構,該托盤供放置複數個晶片。A stacking test device as described in claim 1, wherein the chip placement area is provided with a plurality of tray supporting mechanisms for supporting trays, and the tray is used to place a plurality of chips. 如請求項3所述之一種堆疊式測試裝置,該移載總成負責控制複數個取放頭於該晶片放置區與該飛梭移動總成之間進行移動,該移載總成還包括間距調整機構、取料往復機構及橫向移動機構,複數個該取放頭是設置於該間距調整機構,該間距調整機構能調整相鄰該取放頭之間的間距,該取料往復機構是負責帶動該間距調整機構前後往復移動,該橫向移動機構負責帶動該取料往復機構於複數個該托盤承載機構與該飛梭移動總成之間移動。A stacking test device as described in claim 3, wherein the transfer assembly is responsible for controlling a plurality of pick-and-place heads to move between the chip placement area and the shuttle movement assembly, and the transfer assembly also includes a spacing adjustment mechanism, a material picking reciprocating mechanism and a lateral movement mechanism. A plurality of the pick-and-place heads are arranged on the spacing adjustment mechanism, and the spacing adjustment mechanism can adjust the spacing between adjacent pick-and-place heads. The material picking reciprocating mechanism is responsible for driving the spacing adjustment mechanism to move back and forth, and the lateral movement mechanism is responsible for driving the material picking reciprocating mechanism to move between a plurality of the tray carrying mechanisms and the shuttle movement assembly. 如請求項4所述之一種堆疊式測試裝置,其中複數個該取放頭是採以前後兩排,每排數個方式設置於該間距調整機構處。A stacking test device as described in claim 4, wherein a plurality of the pick-and-place heads are arranged at the spacing adjustment mechanism in two rows, with a plurality of heads in each row. 如請求項1所述之一種堆疊式測試裝置,該飛梭移動總成包括往復移動機構及飛梭載板,該飛梭載板上設有數個承載治具,該承載治具上設有至少一個置放座,該置放座負責承載晶片,該往復移動機構負責帶動該飛梭載板於該移料臂總成與該晶片放置區之間移動。A stacking test device as described in claim 1, the shuttle moving assembly includes a reciprocating moving mechanism and a shuttle carrier, the shuttle carrier is provided with a plurality of supporting fixtures, the supporting fixture is provided with at least one placing seat, the placing seat is responsible for carrying the chip, and the reciprocating moving mechanism is responsible for driving the shuttle carrier to move between the material transfer arm assembly and the chip placement area. 如請求項6所述之一種堆疊式測試裝置,其中該飛梭載板上設有數個併排設置的該承載治具,該承載治具設有用以承載晶片的兩個該置放座。A stacking test device as described in claim 6, wherein a plurality of the supporting fixtures arranged side by side are provided on the shuttle carrier, and the supporting fixture is provided with two placing seats for supporting chips. 如請求項1所述之一種堆疊式測試裝置,其中該吸取頭是採用前後兩排,每排各複數個方式併排設置於該支撐懸臂,前、後兩排的該吸取頭分別用以吸取待測試晶片及已測晶片。A stacking test device as described in claim 1, wherein the suction heads are arranged in two rows, front and rear, with a plurality of suction heads in each row arranged in parallel on the supporting arm, and the suction heads in the front and rear rows are respectively used to suck the chips to be tested and the chips that have been tested. 如請求項1所述之一種堆疊式測試裝置,該移料移動機構於面對該測試機架的方向還安裝掃描移動機構及掃描單元,該掃描移動機構負責帶動該掃描單元水平移動,該掃描單元用於掃描該測試單元上的晶片位置。As described in claim 1, a stacking test device, the material moving mechanism is also equipped with a scanning moving mechanism and a scanning unit in the direction facing the test rack, the scanning moving mechanism is responsible for driving the scanning unit to move horizontally, and the scanning unit is used to scan the chip position on the test unit.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201351520A (en) * 2012-06-13 2013-12-16 Chroma Ate Inc Semi-packaged stacked wafer testing classification bench
EP3840029A1 (en) * 2019-12-20 2021-06-23 AT&S (Chongqing) Company Limited Stacking arrays and separator bodies during processing of component carriers on array level
TW202248662A (en) * 2021-03-08 2022-12-16 美商前進測試解決股份有限公司 Carrier based high volume system level testing of devices with pop structures
TW202343640A (en) * 2022-04-29 2023-11-01 大陸商深圳格芯集成電路裝備有限公司 Test equipment and test method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201351520A (en) * 2012-06-13 2013-12-16 Chroma Ate Inc Semi-packaged stacked wafer testing classification bench
EP3840029A1 (en) * 2019-12-20 2021-06-23 AT&S (Chongqing) Company Limited Stacking arrays and separator bodies during processing of component carriers on array level
TW202248662A (en) * 2021-03-08 2022-12-16 美商前進測試解決股份有限公司 Carrier based high volume system level testing of devices with pop structures
TW202343640A (en) * 2022-04-29 2023-11-01 大陸商深圳格芯集成電路裝備有限公司 Test equipment and test method thereof

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