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TWI881613B - Pipeline fluid pressure fluctuation sensing device - Google Patents

Pipeline fluid pressure fluctuation sensing device Download PDF

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Publication number
TWI881613B
TWI881613B TW112149973A TW112149973A TWI881613B TW I881613 B TWI881613 B TW I881613B TW 112149973 A TW112149973 A TW 112149973A TW 112149973 A TW112149973 A TW 112149973A TW I881613 B TWI881613 B TW I881613B
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sensing device
balance hole
pipeline
fluid pressure
pressure fluctuation
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TW112149973A
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Chinese (zh)
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TW202526282A (en
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陳耀明
李昭仁
蕭祝螽
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財團法人工業技術研究院
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Abstract

A pipeline fluid pressure fluctuation sensing device is provided. The pipeline fluid pressure fluctuation sensing device includes a housing, a vibration membrane, a fixed ring, a pressure balance hole, a magnetic element and a magnetic sensing element. The housing includes an open end and a closed end opposite to each other. The open end is used to connect the fluid pipeline. The vibration membrane is located inside the housing. The vibrating membrane is displaced due to pressure changes in the fluid pipeline. The fixed ring is connected between the housing and the vibration membrane. The pressure balancing hole is passing through the fixed ring and the pressure balancing hole is used to balance the pressure at the opposite sides of the vibration membrane. The magnetic element is arranged in conjunction with the vibration membrane, and the magnetic element produces a displacement change due to the movement of the vibration membrane. The magnetic sensing element is arranged outside the housing, and the magnetic sensing element senses the displacement change of the magnetic element.

Description

管路流體壓力波動感測裝置Pipeline fluid pressure fluctuation sensing device

本揭露是有關於一種感測管路流體壓力波動的感測裝置。 This disclosure relates to a sensing device for sensing pressure fluctuations of fluid in a pipeline.

工業用易燃性流體的輸送安全是相當重要的議題,有需要應用感測技術進行管路洩漏監測以避免輸送管路洩漏造成的生命財產與經濟上損失。 The transportation safety of flammable fluids for industrial use is a very important issue. It is necessary to apply sensing technology to monitor pipeline leakage to avoid loss of life, property and economy caused by pipeline leakage.

一般而言,壓力傳感器與聲波傳感器等不同形式的感測器,常用來偵測管路洩漏引起的壓力變動與聲波傳播,作為監測管路洩漏之用。 Generally speaking, different types of sensors such as pressure sensors and acoustic sensors are often used to detect pressure changes and acoustic wave propagation caused by pipeline leakage for the purpose of monitoring pipeline leakage.

習用技術中這些感測器的設計,有將感測元件與電路置於感測器殼體內,再以導線穿過殼體,連接外部的測量裝置。電路位於感測器殼體內的易燃性流體中、或有導線穿越壓力邊界,長期有洩漏的可能,這些因素導致在易燃性流體環境操作上安全性產生疑慮。 In the design of these sensors in the conventional technology, the sensing element and circuit are placed in the sensor housing, and then the wires pass through the housing to connect to the external measuring device. The circuit is located in the flammable fluid in the sensor housing, or the wires pass through the pressure boundary, which may leak over a long period of time. These factors lead to safety concerns in operating in a flammable fluid environment.

另外,習用技術中壓力傳感器的設計利用膜片的變形進行壓力感測,但此膜片也是構成壓力邊界的一環,相對殼體而言,此膜片是壓力邊界中在結構上是較脆弱的部份。 In addition, the design of pressure sensors in conventional technology uses the deformation of the diaphragm to sense pressure, but this diaphragm is also a part of the pressure boundary. Compared with the housing, this diaphragm is the structurally weaker part of the pressure boundary.

此外,此一壓力感測膜片因為要承受流體壓力,必須有足夠強度,這也影響微小壓力變動的測量。 In addition, this pressure sensing diaphragm must be strong enough to withstand fluid pressure, which also affects the measurement of small pressure changes.

本揭露實施例提供一種管路流體壓力波動感測裝置,以監控輸送管路洩漏,避免工安事故。 The disclosed embodiment provides a pipeline fluid pressure fluctuation sensing device to monitor pipeline leakage and avoid industrial accidents.

本揭露一實施例提出一種管路流體壓力波動感測裝置,管路流體壓力波動感測裝置用以連接一流體管路,所述管路流體壓力波動感測裝置包括一殼體、一振動膜、一固定環、一壓力平衡孔、一磁性元件、以及一磁性感測元件。殼體包括相對的一開放端與一封閉端,也因此無導線穿過殼體,開放端用以連接流體管路。振動膜設於殼體之內,因流體管路產生之壓力變化而使振動膜產生位移。固定環連接於殼體與振動膜之間。壓力平衡孔用以平衡振動膜相對兩側之壓力。磁性元件與振動膜連動設置,其中磁性元件因振動膜位移而產生一位移變化。磁性感測元件設於殼體之外,且磁性感測元件感測磁性元件之位移變化。 An embodiment of the present disclosure provides a pipeline fluid pressure fluctuation sensing device, which is used to connect a fluid pipeline. The pipeline fluid pressure fluctuation sensing device includes a housing, a vibrating membrane, a fixing ring, a pressure balance hole, a magnetic element, and a magnetic sensing element. The housing includes an open end and a closed end opposite to each other, and therefore no wire passes through the housing. The open end is used to connect the fluid pipeline. The vibrating membrane is disposed in the housing, and the vibrating membrane is displaced due to the pressure change generated by the fluid pipeline. The fixing ring is connected between the housing and the vibrating membrane. The pressure balance hole is used to balance the pressure on the two opposite sides of the vibrating membrane. The magnetic element is linked to the vibration film, wherein the magnetic element generates a displacement change due to the displacement of the vibration film. The magnetic sensing element is arranged outside the housing, and the magnetic sensing element senses the displacement change of the magnetic element.

基於上述,本揭露使用磁場偵測原理,壓力波動帶動殼體內之振動膜,磁性元件因振動膜位移而產生位移變化,且磁性感測元件感測磁性元件之位移變化,此位移變化由磁性感測元件轉換成電氣訊號。 Based on the above, the present disclosure uses the magnetic field detection principle. The pressure fluctuation drives the vibrating membrane in the housing. The magnetic element produces a displacement change due to the displacement of the vibrating membrane. The magnetic sensing element senses the displacement change of the magnetic element. This displacement change is converted into an electrical signal by the magnetic sensing element.

再者,振動膜之兩側的背景壓力藉由壓力平衡孔平衡,可提高高壓力環境下壓力波動測量的敏感度。 Furthermore, the background pressure on both sides of the diaphragm is balanced by the pressure balance hole, which can improve the sensitivity of pressure fluctuation measurement in high pressure environment.

另外,本揭露為無導線穿過殼體,具有完整的壓力邊界,無長期洩漏之虞,且壓力邊界不做感測用途,藉此以提升管路流體壓力波動感測裝置結構的整體強度。 In addition, the present disclosure has no wires passing through the shell, has a complete pressure boundary, has no risk of long-term leakage, and the pressure boundary is not used for sensing, thereby improving the overall strength of the pipeline fluid pressure fluctuation sensing device structure.

此外,本揭露殼體內部不包含電路元件,藉此提高管路流體壓力波動感測裝置在易燃性流體環境中的防爆安全性。 In addition, the shell of the present disclosure does not contain any circuit components, thereby improving the explosion-proof safety of the pipeline fluid pressure fluctuation sensing device in a flammable fluid environment.

為讓本揭露能更明顯易懂,下文特舉實施例,並配合所附圖 式作詳細說明如下。 In order to make this disclosure more clear and easy to understand, the following is a specific example and a detailed description with the attached figures.

50:流體管路 50: Fluid pipeline

52:管壁 52: Tube wall

60:流體 60: Fluid

100,300,400,500,600,700:管路流體壓力波動感測裝置 100,300,400,500,600,700: Pipeline fluid pressure fluctuation sensing device

110,310,410:殼體 110,310,410: Shell

112:開放端 112: Open end

114:封閉端 114: Closed end

116A:內區域 116A: Inner area

116B:外區域 116B: Outer area

122,222:振動膜 122,222: Vibrating membrane

124,224:外膜面 124,224: Outer membrane surface

126,226:內膜面 126,226: Inner membrane surface

130:固定環 130:Fixed ring

132A:內周面 132A: Inner Surface

132B:外周面 132B: Outer surface

140,440,540,640:壓力平衡孔 140,440,540,640: Pressure balance hole

150:磁性元件 150: Magnetic components

160,360:磁性感測元件 160,360: Magnetic sensing element

310A,410A:本體 310A,410A: Main body

310B:延伸體 310B: Extension body

370:延伸桿 370: Extension rod

410B:凹陷體 410B: Depression

442,642:第一壓力平衡孔 442,642: First pressure balance hole

444,644:第二壓力平衡孔 444,644: Second pressure balance hole

480,680:低頻延伸管 480,680: Low frequency extension tube

482,682:管體 482,682: Tube body

484,684:入口端 484,684:Entrance

486,686:出口端 486,686:Export port

DP:位移變化 DP: displacement change

K1,K2:曲線 K1, K2: curve

L1:最大震幅 L1: Maximum amplitude

L11,L21:曲線 L11,L21: Curve

L11A,L21A:線條 L11A, L21A: Lines

P:壓力 P: Pressure

第1圖為本揭露的管路流體壓力波動感測裝置一實施例的示意圖。 Figure 1 is a schematic diagram of an embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第2圖為第1圖的管路流體壓力波動感測裝置中振動膜位移一實施例的示意圖。 Figure 2 is a schematic diagram of an embodiment of the displacement of the vibrating membrane in the pipeline fluid pressure fluctuation sensing device of Figure 1.

第3圖為本揭露的壓力平衡裝置一實施例的示意圖。 Figure 3 is a schematic diagram of an embodiment of the pressure balancing device disclosed herein.

第4圖為本揭露的管路流體壓力波動感測裝置又一實施例的示意圖。 Figure 4 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第5圖為第4圖的管路流體壓力波動感測裝置中振動膜位移一實施例的示意圖。 Figure 5 is a schematic diagram of an embodiment of the displacement of the vibrating membrane in the pipeline fluid pressure fluctuation sensing device of Figure 4.

第6圖為本揭露的管路流體壓力波動感測裝置再一實施例的示意圖。 Figure 6 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第7圖為本揭露的管路流體壓力波動感測裝置變化實施例的示意圖。 Figure 7 is a schematic diagram of a variation of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第8圖為本揭露的管路流體壓力波動感測裝置其他實施例的示意圖。 Figure 8 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第9圖為本揭露的管路流體壓力波動感測裝置其他變化實施例的示意圖。 Figure 9 is a schematic diagram of other variations of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第10圖為本揭露管路流體壓力波動感測裝置一測試驗證的示意圖。 Figure 10 is a schematic diagram of a test verification of the pipeline fluid pressure fluctuation sensing device disclosed herein.

第11圖為本揭露管路流體壓力波動感測裝置一測試驗證的波動訊號的頻譜分析圖。 Figure 11 is a spectrum analysis diagram of the fluctuation signal of a test verification of the pipeline fluid pressure fluctuation sensing device disclosed in this disclosure.

下文列舉實施例並配合附圖來進行詳細地說明,但所提供的實施例並非用以限制本揭露所涵蓋的範圍。此外,附圖僅以說明為目的,並未依照原尺寸作圖。為了方便理解,在下述說明中相同的元件將以相同 的符號標示來說明。 The following is a detailed description of the embodiments and accompanying drawings, but the embodiments provided are not intended to limit the scope of the present disclosure. In addition, the drawings are for illustrative purposes only and are not drawn in original size. For ease of understanding, the same components will be indicated by the same symbols in the following description.

關於本揭露中所提到「包括」、「包含」、「具有」等的用語均為開放性的用語,也就是指「包含但不限於」。 The terms "including", "comprising", "having" and the like mentioned in this disclosure are all open terms, which means "including but not limited to".

在各個實施例的說明中,當以「第一」、「第二」、「第三」、「第四」等的用語來說明元件時,僅用於將這些元件彼此區分,並不限制這些元件的順序或重要性。 In the description of each embodiment, when the terms "first", "second", "third", "fourth", etc. are used to describe the elements, they are only used to distinguish these elements from each other and do not limit the order or importance of these elements.

在各個實施例的說明中,所謂的「耦接」或「連接」,其可指二或多個元件相互直接作實體或電性接觸,或是相互間接作實體或電性接觸,而「耦接」或「連接」還可指二或多個元件相互操作或動作。 In the description of each embodiment, the so-called "coupling" or "connection" may refer to two or more elements making direct physical or electrical contact with each other, or making indirect physical or electrical contact with each other, and "coupling" or "connection" may also refer to two or more elements operating or moving with each other.

第1圖為本揭露的管路流體壓力波動感測裝置一實施例的示意圖。第2圖為第1圖的管路流體壓力波動感測裝置中振動膜位移一實施例的示意圖。請參閱第1圖與第2圖。本揭露管路流體壓力波動感測裝置100用以連接一流體管路50,其中流體管路50以虛線表示,流體管路50可為氫氣輸送管線、使用氫氣之相關製程管線系統、以及石化管線系統。流體管路50之內流體60可為液體、氣體、或是氣體和液體同時存在的雙相流。 FIG. 1 is a schematic diagram of an embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein. FIG. 2 is a schematic diagram of an embodiment of the displacement of the oscillating membrane in the pipeline fluid pressure fluctuation sensing device of FIG. 1. Please refer to FIG. 1 and FIG. 2. The pipeline fluid pressure fluctuation sensing device 100 disclosed herein is used to connect a fluid pipeline 50, wherein the fluid pipeline 50 is represented by a dotted line, and the fluid pipeline 50 can be a hydrogen transmission pipeline, a related process pipeline system using hydrogen, and a petrochemical pipeline system. The internal fluid 60 of the fluid pipeline 50 can be a liquid, a gas, or a two-phase flow in which gas and liquid exist simultaneously.

管路流體壓力波動感測裝置100包括一殼體110、一振動膜122、一固定環130、一壓力平衡孔140、一磁性元件150、以及一磁性感測元件160。殼體110之材質可為非鐵磁性金屬、非磁性材質或非金屬等不影響磁場之材質。殼體110可為任意形狀,且殼體110包括相對的一開放端112與一封閉端114,舉例而言,殼體110例如為一圓柱形殼體,其一端開口定義為開放端112,圓柱形殼體之底部定義為封閉端114。開放端112與封閉端114之間為無電路,也就是並無導線穿接於殼體110,開放端112用以連接流體管路50中的管壁52。殼體110與流體管路50連接方式為法蘭或螺牙或一般管路常用連接方式。 The pipeline fluid pressure fluctuation sensing device 100 includes a housing 110, a vibration membrane 122, a fixed ring 130, a pressure balance hole 140, a magnetic element 150, and a magnetic sensing element 160. The material of the housing 110 can be a non-ferromagnetic metal, a non-magnetic material, or a non-metal material that does not affect the magnetic field. The housing 110 can be of any shape, and the housing 110 includes an open end 112 and a closed end 114 opposite to each other. For example, the housing 110 is a cylindrical housing, one end of which is defined as the open end 112, and the bottom of the cylindrical housing is defined as the closed end 114. There is no circuit between the open end 112 and the closed end 114, that is, there is no wire connected to the shell 110. The open end 112 is used to connect the pipe wall 52 in the fluid pipeline 50. The shell 110 and the fluid pipeline 50 are connected by flange or thread or other commonly used connection methods for general pipelines.

振動膜122設於殼體110之內,振動膜122之材質包含一彈性體結構、一聚四氟乙烯(Teflon)結構、或一金屬結構,可端視實際情況調整振動膜122之材質。振動膜122的形狀不限制為平坦狀,振動膜122的一側為外膜面124,振動膜122的另一側為內膜面126,且振動膜122將殼體110區分為內區域116A與外區域116B。因流體管路50產生之壓力P(如第2圖)波動變化而使振動膜122產生位移,其中以虛線與實線表示振動膜122因有壓力P波動變化而上下振動。 The vibration membrane 122 is disposed inside the housing 110. The material of the vibration membrane 122 includes an elastic body structure, a polytetrafluoroethylene (Teflon) structure, or a metal structure. The material of the vibration membrane 122 can be adjusted according to the actual situation. The shape of the vibration membrane 122 is not limited to a flat shape. One side of the vibration membrane 122 is an outer membrane surface 124, and the other side of the vibration membrane 122 is an inner membrane surface 126. The vibration membrane 122 divides the housing 110 into an inner area 116A and an outer area 116B. The vibration membrane 122 is displaced due to the fluctuation of the pressure P (as shown in Figure 2) generated by the fluid pipeline 50, wherein the dotted line and the solid line indicate that the vibration membrane 122 vibrates up and down due to the fluctuation of the pressure P.

固定環130連接於殼體110與振動膜122之間。壓力平衡孔140穿設於固定環130,壓力平衡孔140用以平衡振動膜122之外膜面124與內膜面126相對兩側之壓力。在其他實施例中,壓力平衡孔亦可為殼體上的兩個孔洞,其一孔洞為連通外區域116B,另一孔洞為連通內區域116A。 The fixing ring 130 is connected between the housing 110 and the diaphragm 122. The pressure balance hole 140 is provided through the fixing ring 130, and the pressure balance hole 140 is used to balance the pressure on the opposite sides of the outer membrane surface 124 and the inner membrane surface 126 of the diaphragm 122. In other embodiments, the pressure balance holes can also be two holes on the housing, one of which is connected to the outer area 116B, and the other is connected to the inner area 116A.

磁性元件150設於振動膜122之內膜面126之下,但也可以在外膜面124之上。使得磁性元件150與振動膜122連動設置,磁性元件150可為磁鐵、鐵磁性金屬或任何能導磁之元件。磁性感測元件160設於殼體110之外,磁性感測元件160可包含線圈,其形態可為磁電式、渦電流式感測器,用以感測殼體110內部的磁性元件150位移變化DP所造成的磁場變化。 The magnetic element 150 is disposed below the inner membrane surface 126 of the vibrating membrane 122, but can also be disposed above the outer membrane surface 124. The magnetic element 150 is disposed in conjunction with the vibrating membrane 122. The magnetic element 150 can be a magnet, a ferromagnetic metal, or any magnetically permeable element. The magnetic sensing element 160 is disposed outside the housing 110. The magnetic sensing element 160 can include a coil, and its form can be a magnetoelectric or eddy current sensor, which is used to sense the magnetic field change caused by the displacement change DP of the magnetic element 150 inside the housing 110.

在此配置之下,如第2圖所示,因流體管路50產生之壓力P(如第2圖)波動變化而使振動膜122產生位移,磁性元件150因振動膜122位移也連帶產生一位移變化DP,且磁性感測元件160感測磁性元件150之位移變化DP,此位移變化DP由磁性感測元件160轉換成電氣訊號。振動膜122之外膜面124與內膜面126兩側的背景壓力藉由壓力平衡孔140平衡,可提高高壓力環境下壓力波動測量的敏感度。 Under this configuration, as shown in FIG. 2, the pressure P (as shown in FIG. 2) generated by the fluid pipeline 50 fluctuates and changes, causing the vibrating membrane 122 to displace. The magnetic element 150 also generates a displacement change DP due to the displacement of the vibrating membrane 122, and the magnetic sensing element 160 senses the displacement change DP of the magnetic element 150. The displacement change DP is converted into an electrical signal by the magnetic sensing element 160. The background pressure on both sides of the outer membrane surface 124 and the inner membrane surface 126 of the vibrating membrane 122 is balanced by the pressure balance hole 140, which can improve the sensitivity of pressure fluctuation measurement in a high pressure environment.

再者,本揭露為無導線穿過殼體110,具有完整的壓力邊界,無長期洩漏之虞,且壓力邊界不做感測用途,藉此以提升管路流體壓力波動感測裝置結構的整體強度。 Furthermore, the present disclosure has no wires passing through the housing 110, has a complete pressure boundary, has no risk of long-term leakage, and the pressure boundary is not used for sensing, thereby improving the overall strength of the pipeline fluid pressure fluctuation sensing device structure.

此外,本揭露殼體110內部不包含電路元件,藉此提高管路流體壓力波動感測裝置100在易燃性流體環境中的防爆安全性。 In addition, the shell 110 disclosed herein does not contain circuit components, thereby improving the explosion-proof safety of the pipeline fluid pressure fluctuation sensing device 100 in a flammable fluid environment.

第3圖為本揭露的壓力平衡裝置一實施例的示意圖。請參閱第3圖與第2圖,固定環130例如為環體而可為一環形承載座,固定環130具有內周面132A與外周面132B,外周面132B安裝並固定於殼體110之內表面,內周面132A內為孔洞,內周面132A之內連接振動膜122,使得振動膜122被安裝於固定環130之內周面132A之內。壓力平衡孔140穿設於固定環130之內周面132A與外周面132B之間。壓力平衡孔140亦可開設於振動膜122之上。 FIG. 3 is a schematic diagram of an embodiment of the pressure balance device disclosed herein. Referring to FIG. 3 and FIG. 2, the fixed ring 130 is, for example, a ring and can be a ring-shaped support seat. The fixed ring 130 has an inner circumference 132A and an outer circumference 132B. The outer circumference 132B is mounted and fixed to the inner surface of the housing 110. The inner circumference 132A has a hole. The inner circumference 132A is connected to the vibration membrane 122, so that the vibration membrane 122 is mounted in the inner circumference 132A of the fixed ring 130. The pressure balance hole 140 is penetrated between the inner circumference 132A and the outer circumference 132B of the fixed ring 130. The pressure balance hole 140 can also be opened on the vibration membrane 122.

第4圖為本揭露的管路流體壓力波動感測裝置又一實施例的示意圖。第5圖為第4圖的管路流體壓力波動感測裝置中振動膜位移一實施例的示意圖。請參閱第4圖與第5圖,本揭露的管路流體壓力波動感測裝置300與第1圖、第2圖的管路流體壓力波動感測裝置100差異在於:本揭露的管路流體壓力波動感測裝置300更包括延伸桿370、以及與延伸桿370設置相關的殼體310、磁性感測元件360的型態。 FIG. 4 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein. FIG. 5 is a schematic diagram of an embodiment of the displacement of the oscillating membrane in the pipeline fluid pressure fluctuation sensing device of FIG. 4. Please refer to FIG. 4 and FIG. 5. The difference between the pipeline fluid pressure fluctuation sensing device 300 disclosed herein and the pipeline fluid pressure fluctuation sensing device 100 of FIG. 1 and FIG. 2 is that the pipeline fluid pressure fluctuation sensing device 300 disclosed herein further includes an extension rod 370, and a housing 310 and a magnetic sensing element 360 associated with the extension rod 370.

詳細而言,振動膜222包含相對的外膜面224與內膜面226,延伸桿370連接於振動膜222與磁性元件150之間,使得振動膜222、延伸桿370與磁性元件150形成一連動構件,振動膜222之位移會連動延伸桿370,以造成磁性元件150之位移。因應延伸桿370之設置,殼體310包括一本體310A與一延伸體310B,延伸體310B連通於本體310A。殼體310之材質可為可為非鐵磁性金屬、非磁性材質或非金屬等不影響磁場之材質。 磁性元件150與延伸桿370之一部分位於延伸體310B之內。延伸體310B為在本體310A下方連接的一凸出容置空間,其形態可端視延伸桿370之長度而定,在其他實施例中,若調整延伸桿370之長度,亦可不需設置延伸體310B,使得延伸桿370只位於本體310A內。 In detail, the vibration membrane 222 includes an outer membrane surface 224 and an inner membrane surface 226 that are opposite to each other. The extension rod 370 is connected between the vibration membrane 222 and the magnetic element 150, so that the vibration membrane 222, the extension rod 370 and the magnetic element 150 form a linkage component. The displacement of the vibration membrane 222 will link the extension rod 370 to cause the displacement of the magnetic element 150. In response to the setting of the extension rod 370, the housing 310 includes a body 310A and an extension body 310B, and the extension body 310B is connected to the body 310A. The material of the housing 310 can be a non-ferromagnetic metal, a non-magnetic material or a non-metal material that does not affect the magnetic field. The magnetic element 150 and a part of the extension rod 370 are located in the extension body 310B. The extension body 310B is a protruding accommodation space connected to the bottom of the main body 310A. Its shape can be determined by the length of the extension rod 370. In other embodiments, if the length of the extension rod 370 is adjusted, the extension body 310B may not be required, so that the extension rod 370 is only located in the main body 310A.

在一實施例中,延伸桿370為一桿件或其他具相等功能的構件。延伸桿370之材質可為一無磁性材質。在其他實施例中,延伸桿370亦可為一磁性材質。 In one embodiment, the extension rod 370 is a rod or other component with equivalent functions. The material of the extension rod 370 can be a non-magnetic material. In other embodiments, the extension rod 370 can also be a magnetic material.

此外,磁性感測元件360位於延伸體310B之外側,磁性感測元件360舉例為一環形體結構。藉由延伸桿370的配置,磁性元件150設置於延伸桿370遠離振動膜222的一端,使得磁性元件150能靠近磁性感測元件360,而讓磁性感測元件360更能感測到磁性元件150之位移變化。 In addition, the magnetic sensing element 360 is located outside the extension body 310B, and the magnetic sensing element 360 is, for example, a ring-shaped structure. Through the configuration of the extension rod 370, the magnetic element 150 is set at one end of the extension rod 370 away from the vibration film 222, so that the magnetic element 150 can be close to the magnetic sensing element 360, so that the magnetic sensing element 360 can better sense the displacement change of the magnetic element 150.

在此配置之下,如第5圖所示,虛線表示第4圖之振動膜222的位置,因流體管路之壓力P波動變化而使振動膜222產生位移,延伸桿370與其末端的磁性元件150因振動膜222位移也連帶產生位移變化DP,且磁性感測元件360感測磁性元件150之位移變化DP,此位移變化DP由磁性感測元件360轉換成電氣訊號。 Under this configuration, as shown in FIG. 5, the dotted line indicates the position of the diaphragm 222 in FIG. 4. The diaphragm 222 is displaced due to the fluctuation of the pressure P in the fluid pipeline. The extension rod 370 and the magnetic element 150 at its end also produce a displacement change DP due to the displacement of the diaphragm 222. The magnetic sensing element 360 senses the displacement change DP of the magnetic element 150. The displacement change DP is converted into an electrical signal by the magnetic sensing element 360.

第6圖為本揭露的管路流體壓力波動感測裝置再一實施例的示意圖。請參閱第6圖,本揭露的管路流體壓力波動感測裝置400與第4圖、第5圖的管路流體壓力波動感測裝置300差異在於:本揭露的管路流體壓力波動感測裝置400更包括一低頻延伸管480,用以測量低頻(如20赫茲以下次聲波範圍)的壓力波動、以及與低頻延伸管480設置相關的壓力平衡孔440的型態。 FIG. 6 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein. Referring to FIG. 6, the pipeline fluid pressure fluctuation sensing device 400 disclosed herein is different from the pipeline fluid pressure fluctuation sensing device 300 of FIG. 4 and FIG. 5 in that the pipeline fluid pressure fluctuation sensing device 400 disclosed herein further includes a low-frequency extension tube 480 for measuring low-frequency (such as infrasonic range below 20 Hz) pressure fluctuations, and the type of the pressure balance hole 440 associated with the low-frequency extension tube 480.

低頻延伸管480設於殼體310之內,且低頻延伸管480位於本體310A中的內區域116A中,低頻延伸管480包括一管體482、一入口端 484、以及一出口端486。壓力平衡孔440的數量為兩個,其包括第一壓力平衡孔442與第二壓力平衡孔444。固定環130連接於殼體310與振動膜222之間,第一壓力平衡孔442與第二壓力平衡孔444分別穿設於固定環130的不同位置,其中第二壓力平衡孔444連通於低頻延伸管480之入口端484,使得管體482連接於固定環130。第一壓力平衡孔442則未與管體482連通,其位置與功能可視為前述第1圖至第5圖的壓力平衡孔140。 The low-frequency extension tube 480 is disposed in the housing 310 and is located in the inner region 116A of the body 310A. The low-frequency extension tube 480 includes a tube body 482, an inlet end 484, and an outlet end 486. There are two pressure balance holes 440, including a first pressure balance hole 442 and a second pressure balance hole 444. The fixing ring 130 is connected between the housing 310 and the diaphragm 222. The first pressure balance hole 442 and the second pressure balance hole 444 are respectively penetrated at different positions of the fixing ring 130, wherein the second pressure balance hole 444 is connected to the inlet end 484 of the low-frequency extension tube 480, so that the tube body 482 is connected to the fixing ring 130. The first pressure balance hole 442 is not connected to the tube 482, and its position and function can be regarded as the pressure balance hole 140 in Figures 1 to 5 above.

在此配置之下,本實施例係將低頻延伸管480與第一壓力平衡孔442並存於同一管路流體壓力波動感測裝置400上。使用上,第一壓力平衡孔442與第二壓力平衡孔444能擇一適用,如關閉第二壓力平衡孔444,即功能與運作原理類同前述第5圖;如關閉第一壓力平衡孔442,藉由低頻延伸管480來測量低頻(如20赫茲以下次聲波範圍)的壓力波動,使得本揭露管路流體壓力波動感測裝置400能夠覆蓋波動頻率範圍至次聲波範圍(低於20赫茲以下次聲波範圍),能夠有效地測量和捕捉低頻波動。此外,低頻延伸管480二端為入口端484與出口端486之兩端開口,藉由第二壓力平衡孔444連通於低頻延伸管480之入口端484,也可平衡振動膜222兩側壓力。 Under this configuration, the present embodiment coexists the low-frequency extension tube 480 and the first pressure balance hole 442 on the same pipeline fluid pressure fluctuation sensing device 400. In use, the first pressure balance hole 442 and the second pressure balance hole 444 can be selected and applied, such as closing the second pressure balance hole 444, that is, the function and operation principle are similar to the aforementioned FIG. 5; if the first pressure balance hole 442 is closed, the low-frequency (such as the infrasonic range below 20 Hz) pressure fluctuation is measured by the low-frequency extension tube 480, so that the pipeline fluid pressure fluctuation sensing device 400 disclosed in the present invention can cover the fluctuation frequency range to the infrasonic range (below the infrasonic range below 20 Hz), and can effectively measure and capture low-frequency fluctuations. In addition, the two ends of the low-frequency extension tube 480 are open at the inlet end 484 and the outlet end 486. The second pressure balance hole 444 is connected to the inlet end 484 of the low-frequency extension tube 480, and the pressure on both sides of the diaphragm 222 can also be balanced.

在一實施例中,低頻延伸管480依亥姆霍茲共振(Helmholtz resonance)原理,其效果取決於管徑與管長,亥姆霍茲共振之方程式(1)如下:

Figure 112149973-A0305-12-0008-1
In one embodiment, the low frequency extension tube 480 is based on the Helmholtz resonance principle, and its effect depends on the tube diameter and tube length. The Helmholtz resonance equation (1) is as follows:
Figure 112149973-A0305-12-0008-1

上述方程式(1)中,v為聲速。A為管體482之管截面積,其可由管體482之管徑計算得到,L為管體482之管長,以及V為腔體容積,腔體容積為以殼體310為例,如振動膜222以下區域的容積。 In the above equation (1), v is the speed of sound. A is the cross-sectional area of the tube 482, which can be calculated from the diameter of the tube 482, L is the length of the tube 482, and V is the cavity volume, which is the volume of the area below the vibrating membrane 222, for example, the shell 310.

在一實施例中,管體482可為一螺旋管件,管體482環繞設於延伸桿370之外圍,藉由螺旋設置形狀避開延伸桿370,使得延伸桿370仍可於管體482中央部位移動,並能用來減少管體482長度方向上的長度,而能容置於殼體310之內,提升使用上便利性。在其他實施例中,管體482亦可依據殼體310的形狀尺寸而為其他設置型態。 In one embodiment, the tube 482 may be a spiral tube, and the tube 482 is disposed around the outer periphery of the extension rod 370. The spiral configuration avoids the extension rod 370, so that the extension rod 370 can still move in the central part of the tube 482, and can be used to reduce the length of the tube 482 in the longitudinal direction, so that it can be accommodated in the housing 310, thereby improving the convenience of use. In other embodiments, the tube 482 can also be disposed in other forms according to the shape and size of the housing 310.

第7圖為本揭露的管路流體壓力波動感測裝置變化實施例的示意圖。請參閱第7圖,本揭露的管路流體壓力波動感測裝置500與第6圖的管路流體壓力波動感測裝置400差異在於:本揭露的管路流體壓力波動感測裝置500只有一個壓力平衡孔540,壓力平衡孔540連通於低頻延伸管480中的入口端484。 FIG. 7 is a schematic diagram of a modified embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein. Please refer to FIG. 7. The difference between the pipeline fluid pressure fluctuation sensing device 500 disclosed herein and the pipeline fluid pressure fluctuation sensing device 400 of FIG. 6 is that the pipeline fluid pressure fluctuation sensing device 500 disclosed herein has only one pressure balance hole 540, and the pressure balance hole 540 is connected to the inlet end 484 in the low-frequency extension tube 480.

第8圖為本揭露的管路流體壓力波動感測裝置其他實施例的示意圖。請參閱第8圖,本揭露的管路流體壓力波動感測裝置600與第7圖的管路流體壓力波動感測裝置500、第6圖的管路流體壓力波動感測裝置400的差異在於:本揭露的管路流體壓力波動感測裝置600中的低頻延伸管680設於殼體310之外,且對應設置的壓力平衡孔640包括一第一壓力平衡孔642與一第二壓力平衡孔644,不同於前述實施例,本實施例固定環130連接於殼體310與振動膜122之間,但壓力平衡孔640並未穿設於固定環130,使得固定環130並無壓力平衡孔。取而代之的是,第一壓力平衡孔642與第二壓力平衡孔洞644分別穿設於殼體310的不同位置,且第一壓力平衡孔642位於外區域116B,第二壓力平衡孔644位於內區域116A。 FIG. 8 is a schematic diagram of another embodiment of the pipeline fluid pressure fluctuation sensing device disclosed herein. Please refer to FIG. 8 . The difference between the pipeline fluid pressure fluctuation sensing device 600 disclosed herein and the pipeline fluid pressure fluctuation sensing device 500 of FIG. 7 and the pipeline fluid pressure fluctuation sensing device 400 of FIG. 6 is that the low-frequency extension tube 680 in the pipeline fluid pressure fluctuation sensing device 600 disclosed herein is disposed outside the housing 310, and the corresponding pressure balance hole 640 includes a first pressure balance hole 642 and a second pressure balance hole 644. Different from the aforementioned embodiments, the fixing ring 130 of the present embodiment is connected between the housing 310 and the vibrating membrane 122, but the pressure balance hole 640 is not penetrated through the fixing ring 130, so that the fixing ring 130 has no pressure balance hole. Instead, the first pressure balance hole 642 and the second pressure balance hole 644 are respectively provided at different positions of the housing 310, and the first pressure balance hole 642 is located in the outer area 116B, and the second pressure balance hole 644 is located in the inner area 116A.

低頻延伸管680包括管體682、入口端684與出口端686,管體682可為一螺旋管件,入口端684連通於外區域116B中的第一壓力平衡孔642,出口端686之連通於內區域116A中的第二壓力平衡孔644。如此一來,藉由第一壓力平衡孔642與第二壓力平衡孔644平衡振動膜222兩側的 背景壓力,且利用低頻延伸管680測量低頻(如20赫茲以下次聲波範圍)的壓力波動。在其他實施例中,亦可在固定環130上穿設壓力平衡孔,而與前述第一壓力平衡孔642與第二壓力平衡孔644選擇性適用。 The low-frequency extension tube 680 includes a tube body 682, an inlet end 684 and an outlet end 686. The tube body 682 can be a spiral tube. The inlet end 684 is connected to the first pressure balance hole 642 in the outer area 116B, and the outlet end 686 is connected to the second pressure balance hole 644 in the inner area 116A. In this way, the background pressure on both sides of the diaphragm 222 is balanced by the first pressure balance hole 642 and the second pressure balance hole 644, and the low-frequency extension tube 680 is used to measure the pressure fluctuation of the low frequency (such as the infrasound range below 20 Hz). In other embodiments, a pressure balance hole can also be set on the fixed ring 130, and it can be selectively applied with the first pressure balance hole 642 and the second pressure balance hole 644.

第9圖為本揭露的管路流體壓力波動感測裝置其他變化實施例的示意圖。請參閱第9圖,本揭露的管路流體壓力波動感測裝置700與第8圖的管路流體壓力波動感測裝置600的差異在於:本揭露沒有延伸桿,磁性元件150設於振動膜222之內膜面226之下。並且,由於不須容置延伸桿,殼體410例如包括一本體410A與一凹陷體410B,凹陷體410B為於本體410A底部內凹形成的容置空間,使得磁性感測元件160設於凹陷體410B之內,但仍位於本體410A之外側。由於凹陷體410B的朝本體410A內部凹陷,使得設於凹陷體410B內的磁性感測元件160更靠近磁性元件150,而更能感測到磁性元件150之位移變化。然本揭露不以此為限,可端視實際使用磁性元件150與磁性感測元件160的型態來調整殼體410的形狀即可,確保磁性感測元件160能感應到磁性元件150。因此,在其他實施例中,亦可套用如第1圖所示的殼體110。 FIG. 9 is a schematic diagram of another variation of the pipeline fluid pressure fluctuation sensing device disclosed in the present invention. Referring to FIG. 9, the difference between the pipeline fluid pressure fluctuation sensing device 700 disclosed in the present invention and the pipeline fluid pressure fluctuation sensing device 600 of FIG. 8 is that the present invention does not have an extension rod, and the magnetic element 150 is disposed under the inner membrane surface 226 of the vibrating membrane 222. In addition, since there is no need to accommodate the extension rod, the housing 410, for example, includes a body 410A and a recessed body 410B, and the recessed body 410B is a receiving space formed by concavely forming the bottom of the body 410A, so that the magnetic sensing element 160 is disposed in the recessed body 410B, but is still located outside the body 410A. Since the recessed body 410B is recessed toward the inside of the main body 410A, the magnetic sensing element 160 disposed in the recessed body 410B is closer to the magnetic element 150 and can better sense the displacement change of the magnetic element 150. However, the present disclosure is not limited to this, and the shape of the housing 410 can be adjusted according to the actual type of the magnetic element 150 and the magnetic sensing element 160 to ensure that the magnetic sensing element 160 can sense the magnetic element 150. Therefore, in other embodiments, the housing 110 shown in FIG. 1 can also be applied.

第10圖為本揭露管路流體壓力波動感測裝置一測試驗證的示意圖,其中橫軸代表時間,單位為秒、左邊縱軸代表壓力值,單位為巴(bar)、以及右邊縱軸代表本揭露管路流體壓力波動感測裝置測得之電壓值,單位為伏特(volt)。請參閱第10圖,為了驗證本揭露管路流體壓力波動感測裝置對壓力波動的反應,將本揭露管路流體壓力波動感測裝置連接於一空氣流動中的2吋低壓管路,進行測試。於第10圖中時間為3秒時,經由此低壓管路上閥門的操作,製造一壓力的波動,此一波動如第10圖中曲線K1所示,最大震幅L1為0.002bar;本揭露管路流體壓力波動感測裝置於上述壓力波動下的反應如曲線K2所示,曲線K2訊號的波峰波谷與曲線 K1的壓力波動呈現的一致。此結果顯示本揭露管路流體壓力波動感測裝置確實有在壓力環境下測得微小壓力波動的效果,顯見本揭露的管路流體壓力波動感測裝置之可行性。 FIG. 10 is a schematic diagram of a test verification of the pipeline fluid pressure fluctuation sensing device disclosed herein, wherein the horizontal axis represents time in seconds, the left vertical axis represents pressure value in bar, and the right vertical axis represents the voltage value measured by the pipeline fluid pressure fluctuation sensing device disclosed herein in volt. Please refer to FIG. 10. In order to verify the response of the pipeline fluid pressure fluctuation sensing device disclosed herein to pressure fluctuations, the pipeline fluid pressure fluctuation sensing device disclosed herein is connected to a 2-inch low-pressure pipeline in air flow for testing. At 3 seconds in Figure 10, a pressure fluctuation is generated through the operation of the valve on the low-pressure pipeline. This fluctuation is shown as curve K1 in Figure 10, and the maximum amplitude L1 is 0.002 bar. The response of the pipeline fluid pressure fluctuation sensing device disclosed in this disclosure under the above pressure fluctuation is shown as curve K2. The peaks and troughs of the curve K2 signal are consistent with the pressure fluctuation of curve K1. This result shows that the pipeline fluid pressure fluctuation sensing device disclosed in this disclosure does have the effect of measuring tiny pressure fluctuations in a pressure environment, which shows the feasibility of the pipeline fluid pressure fluctuation sensing device disclosed in this disclosure.

第11圖為本揭露管路流體壓力波動感測裝置一測試驗證的波動訊號的頻譜分析圖,其中橫軸代表頻率,單位為赫茲(Hz),縱軸係無單位。請參閱第11圖,此實施例為以第6圖的管路流體壓力波動感測裝置400作為測試,第11圖的上半部的曲線L11是關閉第二壓力平衡孔444,也就是低頻延伸管480之入口端484被封閉,只開啟第一壓力平衡孔442的結果。第11圖的下半部的曲線L21是封閉第一壓力平衡孔442,開啟第二壓力平衡孔444,使低頻延伸管480之入口端484被開啟,比較此二曲線L11、L21,以及15Hz對應的峰值L11A、L21A,可發現使用低頻延伸管480能顯著改善100Hz以下的反應到次聲波的範圍。另外相同的測試條件,使用低頻延伸管480可測到13Hz、10Hz的微小壓力波動,顯見本揭露管路流體壓力波動感測裝置確實能夠覆蓋波動頻率範圍至次聲波範圍。 FIG. 11 is a spectrum analysis diagram of a fluctuation signal of a test verification of the pipeline fluid pressure fluctuation sensing device disclosed in the present invention, wherein the horizontal axis represents frequency, the unit is Hertz (Hz), and the vertical axis is unitless. Please refer to FIG. 11, this embodiment uses the pipeline fluid pressure fluctuation sensing device 400 of FIG. 6 as a test, and the curve L11 in the upper half of FIG. 11 is the result of closing the second pressure balance hole 444, that is, the inlet end 484 of the low-frequency extension tube 480 is closed, and only the first pressure balance hole 442 is opened. The curve L21 in the lower half of Figure 11 is when the first pressure balance hole 442 is closed and the second pressure balance hole 444 is opened, so that the inlet end 484 of the low-frequency extension tube 480 is opened. By comparing these two curves L11 and L21, and the peak values L11A and L21A corresponding to 15Hz, it can be found that the use of the low-frequency extension tube 480 can significantly improve the range of the response to infrasound below 100Hz. In addition, under the same test conditions, the use of the low-frequency extension tube 480 can detect tiny pressure fluctuations of 13Hz and 10Hz, which shows that the pipeline fluid pressure fluctuation sensing device disclosed in this disclosure can indeed cover the fluctuation frequency range to the infrasound range.

綜上所述,本揭露使用磁場偵測原理,壓力波動帶動殼體內之振動膜,磁性元件因振動膜位移而產生位移變化,且磁性感測元件感測磁性元件之位移變化,此位移變化由磁性感測元件轉換成電氣訊號。 In summary, the present disclosure uses the magnetic field detection principle. The pressure fluctuation drives the vibrating membrane in the housing. The magnetic element produces a displacement change due to the displacement of the vibrating membrane. The magnetic sensing element senses the displacement change of the magnetic element. The displacement change is converted into an electrical signal by the magnetic sensing element.

再者,本揭露振動膜之兩側的背景壓力藉由壓力平衡孔平衡,可提高高壓力環境下壓力波動測量的敏感度。 Furthermore, the background pressure on both sides of the vibrating membrane disclosed in the present invention is balanced by the pressure balance hole, which can improve the sensitivity of pressure fluctuation measurement in a high pressure environment.

另外,本揭露為無導線穿過殼體,具有完整的壓力邊界,且壓力邊界不做感測用途,無長期洩漏之虞,藉此以提升管路流體壓力波動感測裝置結構的整體強度。 In addition, the present disclosure has no wires passing through the shell, has a complete pressure boundary, and the pressure boundary is not used for sensing, so there is no risk of long-term leakage, thereby improving the overall strength of the pipeline fluid pressure fluctuation sensing device structure.

此外,本揭露殼體內部不包含電路元件,藉此提高管路流體壓力波動感測裝置在易燃性流體環境中的防爆安全性。 In addition, the shell of the present disclosure does not contain any circuit components, thereby improving the explosion-proof safety of the pipeline fluid pressure fluctuation sensing device in a flammable fluid environment.

進一步,本揭露藉由設置低頻延伸管來測量低頻(如20赫茲以下次聲波範圍)的壓力波動,使得本揭露管路流體壓力波動感測裝置能夠覆蓋波動頻率範圍至次聲波範圍(低於20赫茲),能夠有效地測量和捕捉低頻波動。 Furthermore, the present disclosure measures low-frequency (such as infrasonic range below 20 Hz) pressure fluctuations by setting a low-frequency extension tube, so that the pipeline fluid pressure fluctuation sensing device disclosed in the present disclosure can cover the fluctuation frequency range to the infrasonic range (below 20 Hz), and can effectively measure and capture low-frequency fluctuations.

此外,本揭露之低頻延伸管之管體可為一螺旋管件,減少管體長度方向上的長度,提升使用上便利性。 In addition, the tube body of the low-frequency extension tube disclosed in the present invention can be a spiral tube, which reduces the length of the tube body in the longitudinal direction and improves the convenience of use.

雖然本揭露已以實施例揭露如上,然其並非用以限定本揭露,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作些許之更動與潤飾,故本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present disclosure has been disclosed as above by way of embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the relevant technical field may make some changes and modifications within the spirit and scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the scope defined in the attached patent application.

50:流體管路 50: Fluid pipeline

52:管壁 52: Tube wall

60:流體 60: Fluid

100:管路流體壓力波動感測裝置 100: Pipeline fluid pressure fluctuation sensing device

110:殼體 110: Shell

112:開放端 112: Open end

114:封閉端 114: Closed end

116A:內區域 116A: Inner area

116B:外區域 116B: Outer area

122:振動膜 122: Vibrating membrane

124:外膜面 124: Outer membrane surface

126:內膜面 126: Inner membrane surface

130:固定環 130:Fixed ring

140:壓力平衡孔 140: Pressure balance hole

150:磁性元件 150: Magnetic components

160:磁性感測元件 160: Magnetic sensing element

Claims (11)

一種管路流體壓力波動感測裝置,用以連接一流體管路,所述管路流體壓力波動感測裝置包括:一殼體,包括相對的一開放端與一封閉端,其中該開放端用以連接該流體管路;一振動膜,設於該殼體之內,因該流體管路產生之壓力變化而使該振動膜產生位移;一固定環,連接於該殼體與該振動膜之間;一壓力平衡孔,穿設於該固定環,該壓力平衡孔用以平衡該振動膜相對兩側之壓力;一磁性元件,其與該振動膜連動設置,其中該磁性元件因該振動膜位移而產生一位移變化;一延伸桿,連接於該振動膜與該磁性元件之間,其中該延伸桿之材質為一無磁性材質或一磁性材質;以及一磁性感測元件,設於該殼體之外,且該磁性感測元件感測該磁性元件之該位移變化。 A pipeline fluid pressure fluctuation sensing device is used to connect a fluid pipeline, and the pipeline fluid pressure fluctuation sensing device comprises: a housing, comprising an open end and a closed end opposite to each other, wherein the open end is used to connect the fluid pipeline; a vibration membrane, arranged in the housing, and the vibration membrane is displaced due to the pressure change generated by the fluid pipeline; a fixed ring, connected between the housing and the vibration membrane; a pressure balance hole, penetrated through the fixed ring , the pressure balance hole is used to balance the pressure on the two opposite sides of the vibrating membrane; a magnetic element is linked to the vibrating membrane, wherein the magnetic element generates a displacement change due to the displacement of the vibrating membrane; an extension rod is connected between the vibrating membrane and the magnetic element, wherein the material of the extension rod is a non-magnetic material or a magnetic material; and a magnetic sensing element is arranged outside the housing, and the magnetic sensing element senses the displacement change of the magnetic element. 如請求項1所述的管路流體壓力波動感測裝置,其中該振動膜之材質包含一彈性體結構、一聚四氟乙烯結構、或一金屬結構。 The pipeline fluid pressure fluctuation sensing device as described in claim 1, wherein the material of the vibration membrane includes an elastic body structure, a polytetrafluoroethylene structure, or a metal structure. 如請求項1所述的管路流體壓力波動感測裝置,其中該固定環具有一內周面與一外周面,該固定環之該外周面固定於該殼體,該固定環之該內周面之內連接該振動膜。 As described in claim 1, the pipeline fluid pressure fluctuation sensing device, wherein the fixed ring has an inner peripheral surface and an outer peripheral surface, the outer peripheral surface of the fixed ring is fixed to the shell, and the inner peripheral surface of the fixed ring is connected to the vibrating membrane. 如請求項1所述的管路流體壓力波動感測裝置,更包括:一低頻延伸管,包括一管體、一入口端、以及一出口端。 The pipeline fluid pressure fluctuation sensing device as described in claim 1 further includes: a low-frequency extension tube, including a tube body, an inlet end, and an outlet end. 如請求項4所述的管路流體壓力波動感測裝置,其中該振動膜使該殼體區分為一內區域與一外區域,該低頻延伸管位於該內區域之內,該壓力平衡孔包括一第一壓力平衡孔與一第二壓力平衡孔,該管體連接於該固定環,該第二壓力平衡孔連通於該入口端。 As described in claim 4, the pipeline fluid pressure fluctuation sensing device, wherein the vibrating membrane divides the shell into an inner area and an outer area, the low-frequency extension tube is located in the inner area, the pressure balance hole includes a first pressure balance hole and a second pressure balance hole, the tube body is connected to the fixed ring, and the second pressure balance hole is connected to the inlet end. 如請求項4所述的管路流體壓力波動感測裝置,其中該振動膜使該殼體區分為一內區域與一外區域,該低頻延伸管設於該殼體之外,該壓力平衡孔包括一第一壓力平衡孔與一第二壓力平衡孔,該第一壓力平衡孔與該第二壓力平衡孔分別穿設於該殼體,且該第一壓力平衡孔位於該外區域,該第二壓力平衡孔位於該內區域,該入口端連通於該外區域中的該第一壓力平衡孔,該出口端連通於該內區域中的該第二壓力平衡孔。 As described in claim 4, the pipeline fluid pressure fluctuation sensing device, wherein the vibrating membrane divides the shell into an inner area and an outer area, the low-frequency extension tube is arranged outside the shell, the pressure balance hole includes a first pressure balance hole and a second pressure balance hole, the first pressure balance hole and the second pressure balance hole are respectively penetrated in the shell, and the first pressure balance hole is located in the outer area, the second pressure balance hole is located in the inner area, the inlet end is connected to the first pressure balance hole in the outer area, and the outlet end is connected to the second pressure balance hole in the inner area. 如請求項6所述的管路流體壓力波動感測裝置,其中該磁性元件設於該振動膜之下,該殼體包括一本體與一凹陷體,該凹陷體為於該本體之底部內凹形成的一容置空間,該磁性感測元件設於該凹陷體之內。 As described in claim 6, the pipeline fluid pressure fluctuation sensing device, wherein the magnetic element is disposed under the vibrating membrane, the housing includes a main body and a recessed body, the recessed body is a receiving space formed by recessing the bottom of the main body, and the magnetic sensing element is disposed in the recessed body. 如請求項4所述的管路流體壓力波動感測裝置,其中該管體為一螺旋管件。 A pipeline fluid pressure fluctuation sensing device as described in claim 4, wherein the pipe body is a spiral pipe. 如請求項4所述的管路流體壓力波動感測裝置,其中:該管體設於該延伸桿之外圍,該殼體包括一本體與一延伸體,該延伸體連通於該本體,該磁性元件與該延伸桿之一部分位於該延伸體之內,該磁性感測元件位於該延伸體之外側。 As described in claim 4, the pipeline fluid pressure fluctuation sensing device, wherein: the tube is arranged outside the extension rod, the shell includes a main body and an extension body, the extension body is connected to the main body, the magnetic element and a part of the extension rod are located inside the extension body, and the magnetic sensing element is located outside the extension body. 如請求項1所述的管路流體壓力波動感測裝置,其中該磁性元件設於該振動膜之下。 The pipeline fluid pressure fluctuation sensing device as described in claim 1, wherein the magnetic element is disposed under the vibrating membrane. 如請求項1所述的管路流體壓力波動感測裝置,其中該殼體為一非磁性材質。 A pipeline fluid pressure fluctuation sensing device as described in claim 1, wherein the shell is made of a non-magnetic material.
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* Cited by examiner, † Cited by third party
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US20040255684A1 (en) * 2002-12-30 2004-12-23 Pti Technologies, Inc. Electrical/visual differential pressure indicator with solid state sensor
TW201307819A (en) * 2011-08-12 2013-02-16 Grand Mate Co Ltd Pressure sensing device and sensing method thereof
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