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TWI881501B - Airflow sensor - Google Patents

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TWI881501B
TWI881501B TW112140361A TW112140361A TWI881501B TW I881501 B TWI881501 B TW I881501B TW 112140361 A TW112140361 A TW 112140361A TW 112140361 A TW112140361 A TW 112140361A TW I881501 B TWI881501 B TW I881501B
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sensing
circuit
heating
air flow
flow sensor
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TW112140361A
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TW202517976A (en
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李其源
洪嘉德
陳嘉鴻
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元智大學
泓明科技股份有限公司
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Abstract

The present invention discloses an airflow sensor comprising a substrate, a heating circuit, four sensing circuits, and a control module. The heating circuit can be powered to function as a heating resistor, thereby generating thermal energy. The four sensing circuits are formed on one side of the substrate. Each sensing circuit can be powered to act as a thermistor. The four sensing circuits are arranged around the heating circuit and are interconnected to form a Wheatstone bridge. The width of each sensing circuit progressively increases from the end closer to the heating circuit to the end farther away. The control module is positioned on the substrate and is electrically connected to both the heating circuit and the four sensing circuits. The control module can determine changes in resistance values of each sensing circuit and output a signal indicating the direction of the airflow.

Description

氣流感測器Air flow sensor

本發明涉及一種氣流感測器,特別是一種利用熱敏電阻進行氣流感測的氣流感測器。The present invention relates to an air flow sensor, in particular to an air flow sensor which uses a thermistor to perform air flow detection.

請參閱圖1,其顯示為現有常見的氣流感測器的示意圖。在現有技術中,常見的氣流感測器A是於電路板A1上設置加熱線路A2、兩個感測線路A3及控制器A4,加熱線路A2作為加熱電阻,而兩個感測線路A3作為熱敏電阻。當加熱線路A2被通電,而產生熱能時,若是外部氣流由圖中左側向右側流動(即,氣流是沿著圖1中所示的箭頭方向流動),則位於右側的熱敏電阻的電阻值,相對於位於左側的熱敏電阻的電阻值將會明顯變化,為此,控制器A4即可通過取得兩個熱敏電阻的電阻值的變化,而判斷出外部氣流的流動方向。Please refer to FIG. 1, which shows a schematic diagram of a common air flow sensor. In the prior art, a common air flow sensor A is provided with a heating circuit A2, two sensing circuits A3 and a controller A4 on a circuit board A1, wherein the heating circuit A2 serves as a heating resistor and the two sensing circuits A3 serve as thermistors. When the heating circuit A2 is energized and generates heat energy, if the external airflow flows from the left side to the right side in the figure (i.e., the airflow flows along the direction of the arrow shown in FIG. 1), the resistance value of the thermistor located on the right side will change significantly relative to the resistance value of the thermistor located on the left side. Therefore, the controller A4 can determine the flow direction of the external airflow by obtaining the change in the resistance values of the two thermistors.

圖1所示的習知的氣流感測器,在實際應用中,僅可偵測單一方向的氣體流動。具體來說,圖1所示的氣流感測器,僅可偵測圖中X軸方向的氣流方向,而該氣流感測器無法感測圖中Y軸方向的氣流方向。The conventional air flow sensor shown in FIG1 can only detect the air flow in a single direction in practical application. Specifically, the air flow sensor shown in FIG1 can only detect the air flow direction in the X-axis direction of the figure, and the air flow sensor cannot sense the air flow direction in the Y-axis direction of the figure.

本發明公開一種氣流感測器,主要用以改善現有的氣流感測器,僅能感測單一軸向的氣流流動。The present invention discloses an air flow sensor, which is mainly used to improve the existing air flow sensor which can only sense the air flow in a single axial direction.

本發明的其中一實施例公開一種氣流感測器,其包含:一基板、一加熱線路、至少四個感測線路及一控制模組。加熱線路能被供電以構成一加熱電阻,並據以產生熱能;四個感測線路形成於基板的一側面,各個感測線路能被供電構成一熱敏電阻,四個感測線路環繞加熱線路設置,且四個感測線路相連接,以構成一惠斯通電橋;各個感測線路的線寬,由靠近加熱線路的一端,向遠離加熱線路的一端逐漸增加;控制模組設置於基板,且控制模組電性連接加熱線路及四個感測線路,控制模組能依據各個感測線路的電阻值變化,以輸出一氣流方向訊號。One embodiment of the present invention discloses an air flow sensor, which includes: a substrate, a heating circuit, at least four sensing circuits and a control module. The heating circuit can be powered to form a heating resistor and generate heat energy accordingly; four sensing circuits are formed on one side of the substrate, each sensing circuit can be powered to form a thermistor, the four sensing circuits are arranged around the heating circuit, and the four sensing circuits are connected to form a Wheatstone bridge; the line width of each sensing circuit gradually increases from one end close to the heating circuit to one end far from the heating circuit; the control module is arranged on the substrate, and the control module is electrically connected to the heating circuit and the four sensing circuits, and the control module can output an air flow direction signal according to the change of the resistance value of each sensing circuit.

綜上所述,本發明的氣流感測器通過四個感測線路的設置,可以讓氣流感測器可以感測多方向的氣流流動,且本發明的氣流感測器通過使各個感測線路的線寬,由靠近加熱線路的一端,向遠離加熱線路的一端逐漸增加的設計,可以大幅地提升氣流感測器的感測靈敏度。In summary, the air flow sensor of the present invention can sense air flow in multiple directions by setting up four sensing circuits, and the air flow sensor of the present invention can greatly improve the sensing sensitivity of the air flow sensor by designing that the line width of each sensing circuit gradually increases from one end close to the heating circuit to one end far from the heating circuit.

為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and do not limit the protection scope of the present invention in any way.

於以下說明中,如有指出請參閱特定圖式或是如特定圖式所示,其僅是用以強調於後續說明中,所述及的相關內容大部份出現於該特定圖式中,但不限制該後續說明中僅可參考所述特定圖式。In the following description, if it is indicated to refer to a specific figure or as shown in a specific figure, it is only used to emphasize that most of the relevant content described in the subsequent description appears in the specific figure, but it does not limit the subsequent description to only refer to the specific figure.

請參閱圖2,其顯示為本發明的氣流感測器的第一實施例的示意圖。氣流感測器100包含:一基板1、一加熱線路2、四個感測線路及一控制模組4。基板1例如可以是硬式電路板或是軟性電路板。在基板1為軟性電路板的實施例中,氣流感測器100可以是配合黏膠、雙面膠等,以作為貼附於設備、機械手臂等機構表面上的構件,藉此,可以監測設備、機械手臂等機構外的氣流流動情況。Please refer to FIG. 2, which is a schematic diagram of the first embodiment of the air flow sensor of the present invention. The air flow sensor 100 comprises: a substrate 1, a heating circuit 2, four sensing circuits and a control module 4. The substrate 1 can be, for example, a hard circuit board or a flexible circuit board. In the embodiment where the substrate 1 is a flexible circuit board, the air flow sensor 100 can be used with adhesive, double-sided tape, etc. to be attached to the surface of a device, a robot arm, etc., thereby monitoring the air flow outside the device, the robot arm, etc.

加熱線路2能被供電以構成一加熱電阻,並據以產生熱能。在實際應用中,加熱線路2例如可以是包含多個弧形區段31及多個轉彎區段32,各個弧形區段31的至少一端是與其中一個轉彎區段32連接,而加熱線路2的外圍可以大致呈現為圓形(或橢圓形)。關於加熱線路2的外型、尺寸、線徑等,皆可依據實際需求加以變化,圖中所示僅為其中一個示範態樣。The heating circuit 2 can be powered to form a heating resistor and generate heat energy accordingly. In practical applications, the heating circuit 2 can include, for example, a plurality of arc sections 31 and a plurality of bend sections 32, at least one end of each arc section 31 is connected to one of the bend sections 32, and the periphery of the heating circuit 2 can be roughly circular (or elliptical). The shape, size, wire diameter, etc. of the heating circuit 2 can be changed according to actual needs, and the figure shows only one exemplary state.

在其中一個具體應用中,加熱線路2可以是上下、左右對稱地設計,且加熱線路2的任一位置的線寬都相同,藉此,加熱線路2通電產生熱能時,加熱線路2的任一位置的溫度將大致相同。通過使加熱線路2的任一位置的線寬都相同的設計,還可以讓氣流感測器100,在外部氣流未流動的情況下,各個感測線路因為加熱線路2所產生的熱能,而產生的電阻值變化量會大致相同。In one specific application, the heating circuit 2 can be designed to be symmetrical in the vertical direction and in the horizontal direction, and the line width at any position of the heating circuit 2 is the same, so that when the heating circuit 2 is energized to generate heat energy, the temperature at any position of the heating circuit 2 will be substantially the same. By making the line width at any position of the heating circuit 2 the same, the air flow sensor 100 can also make the resistance value changes of each sensing circuit due to the heat energy generated by the heating circuit 2 substantially the same when the external air flow is not flowing.

四個感測線路形成於基板1的一側面,各個感測線路能被供電,以構成一熱敏電阻。四個感測線路環繞加熱線路2設置,四個感測線路相連接,以構成一惠斯通電橋(Wheatstone Bridge)。Four sensing lines are formed on one side of the substrate 1, and each sensing line can be powered to form a thermistor. The four sensing lines are arranged around the heating line 2, and the four sensing lines are connected to form a Wheatstone Bridge.

為利說明,位於圖2中的左上角、右上角、左下角及右下角的四個感測線路,依序定義為第一感測線路3A、第二感測線路3B、第三感測線路3C及第四感測線路3D。第一感測線路3A及第二感測線路3B是左右對稱地設置,第三感測線路3C與第四感測線路3D也是左右對稱地設置,第一感測線路3A與第三感測線路3C則是上下對稱地設置,第二感測線路3B與第四感測線路3D則是上下對稱地設置。For the sake of explanation, the four sensing circuits located at the upper left corner, the upper right corner, the lower left corner and the lower right corner in FIG. 2 are defined as the first sensing circuit 3A, the second sensing circuit 3B, the third sensing circuit 3C and the fourth sensing circuit 3D in sequence. The first sensing circuit 3A and the second sensing circuit 3B are arranged symmetrically, the third sensing circuit 3C and the fourth sensing circuit 3D are also arranged symmetrically, the first sensing circuit 3A and the third sensing circuit 3C are arranged symmetrically, and the second sensing circuit 3B and the fourth sensing circuit 3D are arranged symmetrically.

各個感測線路的線寬,由靠近加熱線路2的一端,向遠離加熱線路2的一端逐漸增加。在其中一個具體應用中,各個感測線路的最小線寬D1,是各個感測線路的最大線寬D2至少百分之五,由於感測線路整體外型,大致是由靠近加熱線路2向外延伸形成,因此,在氣流感測器100所處環境,未有氣流流動的情況下,感測線路靠近加熱線路2的區段受到加熱線路2的熱能的影響,將明顯大於感測線路遠離加熱線路2的區段,為此,將使得感測線路最靠近加熱線路2的區段,與感測線路最遠離加熱線路2的區段,兩者具有相對較大的溫差。在感測線路最靠近加熱線路2的區段,與感測線路最遠離加熱線路2的區段,兩者具有相對較大的溫差的情況下,當氣流感測器100的外部氣流微幅流動時,感測線路的整體溫度將相對不容易發生變化,而氣流感測器100的電阻值變化將不靈敏。The line width of each sensing line gradually increases from the end close to the heating line 2 to the end far from the heating line 2. In one specific application, the minimum line width D1 of each sensing line is at least 5% of the maximum line width D2 of each sensing line. Since the overall shape of the sensing line is roughly formed by extending outward from the end close to the heating line 2, when there is no airflow in the environment where the air flow sensor 100 is located, the section of the sensing line close to the heating line 2 is significantly affected by the heat energy of the heating line 2 than the section of the sensing line far from the heating line 2. Therefore, the section of the sensing line closest to the heating line 2 and the section of the sensing line farthest from the heating line 2 have a relatively large temperature difference. When there is a relatively large temperature difference between the section of the sensing circuit closest to the heating circuit 2 and the section of the sensing circuit farthest from the heating circuit 2, when the external airflow of the airflow sensor 100 flows slightly, the overall temperature of the sensing circuit will be relatively unlikely to change, and the resistance value of the airflow sensor 100 will be insensitive to changes.

相對地,本發明的氣流感測器100的各個感測線路的線寬,是由靠近加熱線路2的一端,向遠離加熱線路2的一端逐漸增加,因此,本發明的氣流感測器100,在氣流感測器100所處環境,未有氣流流動的情況下,各個感測線路最靠近加熱線路2的區段,與最遠離加熱線路2的區段,兩者的溫差不會太大,藉此,當氣流感測器100的外部氣流微幅流動時,感測線路的整體溫度將會相對快速地變化,而氣流感測器100的電阻值,將會對應靈敏地變化。也就是說,本發明的氣流感測器100通過使感測線路的線寬的變化等設計,可以有效地提升氣流感測器100的感測靈敏度。In contrast, the line width of each sensing circuit of the air flow sensor 100 of the present invention gradually increases from the end close to the heating circuit 2 to the end farthest from the heating circuit 2. Therefore, when there is no airflow in the environment where the air flow sensor 100 of the present invention is located, the temperature difference between the section of each sensing circuit closest to the heating circuit 2 and the section farthest from the heating circuit 2 will not be too large. As a result, when the external airflow of the air flow sensor 100 flows slightly, the overall temperature of the sensing circuit will change relatively quickly, and the resistance value of the air flow sensor 100 will change sensitively accordingly. That is, the air flow sensor 100 of the present invention can effectively improve the sensing sensitivity of the air flow sensor 100 by changing the line width of the sensing circuit.

在實際應用中,各個感測線路例如可以是包含多個弧形區段31及多個轉彎區段32,各個弧形區段31的至少一端是與其中一個轉彎區段32連接,而感測線路的整體大致呈現為多個S型結構相互連接的型態。In practical applications, each sensing circuit may include, for example, a plurality of arc segments 31 and a plurality of bend segments 32, at least one end of each arc segment 31 is connected to one of the bend segments 32, and the overall sensing circuit is generally in the form of a plurality of S-shaped structures connected to each other.

各個感測線路越靠近加熱線路2的弧形區段31的長度越小,而各個感測線路越遠離加熱線路2的弧形區段31的長度越長。在實際應用中,關於各個感測線路的弧形區段31的弧度及尺寸,都可以依據實際需求加以變化,圖中所示僅為其中一個示範態樣。通過上述各個感測線路的弧形區段31的長度變化等設計,在氣流感測器100所處環境,未有氣流流動的情況下,各個感測線路最靠近加熱線路2的區段,與最遠離加熱線路2的區段,兩者的溫差不會太大,藉此,當氣流感測器100的外部氣流微幅流動時,感測線路的整體溫度將會相對快速地變化,而氣流感測器100的電阻值,將會對應靈敏地變化。在其中一個較佳的具體應用中,各個感測線路的材料可以是金箔,如此,可以讓感測線路的電阻值變化更靈敏。The closer each sensing line is to the heating line 2, the shorter the length of the arc section 31 is, and the farther each sensing line is from the heating line 2, the longer the length of the arc section 31 is. In actual applications, the curvature and size of the arc section 31 of each sensing line can be changed according to actual needs, and the figure shows only one exemplary embodiment. By changing the length of the arc section 31 of each sensing circuit, when there is no airflow in the environment of the air flow sensor 100, the temperature difference between the section closest to the heating circuit 2 and the section farthest from the heating circuit 2 will not be too large. Therefore, when the airflow outside the air flow sensor 100 flows slightly, the overall temperature of the sensing circuit will change relatively quickly, and the resistance value of the air flow sensor 100 will change sensitively accordingly. In one of the preferred specific applications, the material of each sensing circuit can be gold foil, so that the resistance value of the sensing circuit can change more sensitively.

控制模組4電性連接加熱線路2及四個感測線路,而控制模組4能依據各個感測線路的電阻值變化,以輸出一氣流方向訊號。在實際應用中,控制模組4中例如可以是包含有微處理器、訊號轉換電路、訊號放大器、通訊晶片等,而微處理器依據四個感測線路的電阻值變化,而產生相對應的氣流方向訊號後,微處理器例如可以是通過通訊晶片,將氣流方向訊號向外傳遞。當然,在不同的實施例中,微處理器也可以是通過與基板1連接的相關軟性排線、電線等構件,將氣流方向訊號向外傳遞。關於控制模組4所包含的構件及其依據惠斯通電橋,將電阻值變化轉換為類比訊號的技術,皆屬於習知技術,於此不再贅述。The control module 4 is electrically connected to the heating circuit 2 and the four sensing circuits, and the control module 4 can output an airflow direction signal according to the change in the resistance value of each sensing circuit. In practical applications, the control module 4 may include, for example, a microprocessor, a signal conversion circuit, a signal amplifier, a communication chip, etc., and after the microprocessor generates a corresponding airflow direction signal according to the change in the resistance value of the four sensing circuits, the microprocessor may, for example, transmit the airflow direction signal to the outside through the communication chip. Of course, in different embodiments, the microprocessor may also transmit the airflow direction signal to the outside through related flexible cables, wires, and other components connected to the substrate 1. The components included in the control module 4 and the technology of converting the resistance value change into an analog signal based on the Wheatstone bridge are all known technologies and will not be elaborated here.

控制模組4能通過量測四個感測線路的電阻值變化,據以判斷出氣流的流動方向。更詳細來說,當氣流感測器100的外部氣流未流動時,控制模組4將會量測出,四個感測線路具有大致相同的電阻值,當氣流感測器100的外部氣流開始流動時,加熱線路2所產生的熱能,將會隨氣流向其中至少一個感測線路的方向流動,如此,將導致相對應的感測線路的整體溫度上升,而該感測線路的電阻值將會對應變化,藉此,控制模組4即可知道氣流是向該感測線路的方向流動。The control module 4 can determine the flow direction of the airflow by measuring the change in the resistance value of the four sensing circuits. More specifically, when the external airflow of the airflow sensor 100 is not flowing, the control module 4 will measure that the four sensing circuits have approximately the same resistance value. When the external airflow of the airflow sensor 100 begins to flow, the heat energy generated by the heating circuit 2 will flow along with the airflow toward at least one of the sensing circuits, thus causing the overall temperature of the corresponding sensing circuit to rise, and the resistance value of the sensing circuit will change accordingly, thereby allowing the control module 4 to know that the airflow is flowing toward the sensing circuit.

如圖3所示,在實際應用中,氣流感測器100還可以包含一絕緣保護層5。絕緣保護層5設置於基板1形成有感測線路及加熱線路2的一側,且絕緣保護層5覆蓋感測線路及加熱線路2。絕緣保護層5用以保護感測線路及加熱線路2,以大幅降低感測線路或加熱線路2,受到外力作用而發生剝離基板1的問題,藉此,可以進一步提升氣流感測器100的使用壽命。較佳地,絕緣保護層5的厚度不大於0.0008公釐,藉此,可以避免絕緣保護層5,阻擋了氣流帶動熱能傳遞。在實際應用中,絕緣保護層5例如可以是PI 9320材料。噹然,在不同的實施例中,氣流感測器100也可以是不包含有絕緣保護層5。As shown in FIG3 , in actual application, the air flow sensor 100 may further include an insulating protective layer 5. The insulating protective layer 5 is disposed on the side of the substrate 1 where the sensing circuit and the heating circuit 2 are formed, and the insulating protective layer 5 covers the sensing circuit and the heating circuit 2. The insulating protective layer 5 is used to protect the sensing circuit and the heating circuit 2, so as to greatly reduce the problem of the sensing circuit or the heating circuit 2 being peeled off from the substrate 1 due to external force, thereby further improving the service life of the air flow sensor 100. Preferably, the thickness of the insulating protective layer 5 is not greater than 0.0008 mm, thereby preventing the insulating protective layer 5 from blocking the airflow-driven heat transfer. In practical applications, the insulating protective layer 5 can be, for example, PI 9320 material. Of course, in different embodiments, the airflow sensor 100 may not include the insulating protective layer 5.

綜上所述,本發明的氣流感測器通過加熱線路及四個感測線路及控制器等設計,可以有效地偵測各種方向的氣流流動,藉此可以有效地改善,圖1所示的習知的氣流感測器,僅可偵測單一方向的氣流流動的問題,且本發明的氣流感測器通過使感測線路的線寬,由靠近加熱線路的區段向遠離加熱線路的區段逐漸增加的設計,及使氣流感測器的各感測線路,越靠近加熱線路的區段的長度越小,越遠離加熱線路的區段的長度越大的設計,還可以大幅地提升氣流感測器的感測靈敏度。In summary, the air flow sensor of the present invention can effectively detect airflow in various directions through the design of a heating circuit, four sensing circuits and a controller, thereby effectively improving the problem that the known air flow sensor shown in FIG. 1 can only detect airflow in a single direction. In addition, the air flow sensor of the present invention can greatly improve the sensing sensitivity of the air flow sensor by gradually increasing the line width of the sensing circuit from the section close to the heating circuit to the section far from the heating circuit, and by making the length of each sensing circuit of the air flow sensor smaller as it is closer to the heating circuit and larger as it is far from the heating circuit.

請參閱圖4,其顯示為本發明的氣流感測器的第二實施例的示意圖。本實施例與前述實施例的其中一個不同之處在於:各個感測線路是包含多個直線區段33,各個感測線路越靠近加熱線路2的直線區段33的長度越小,而各個感測線路越遠離加熱線路2的直線區段33的長度越長。其中,各個感測線路越靠近加熱線路2的直線區段33的線寬越小,而越遠離加熱線路2的直線區段33的線寬越大。在其中一個具體應用中,各個感測線路的最小線寬D3,是各個感測線路的最大線寬D4至少百分之五。Please refer to FIG. 4, which is a schematic diagram of a second embodiment of the air flow sensor of the present invention. One difference between this embodiment and the aforementioned embodiment is that each sensing line includes a plurality of straight line segments 33, and the closer the sensing line is to the heating line 2, the shorter the length of the straight line segment 33 is, and the farther the sensing line is from the heating line 2, the longer the length of the straight line segment 33 is. The closer the sensing line is to the heating line 2, the smaller the line width is, and the farther the straight line segment 33 is from the heating line 2, the larger the line width is. In one specific application, the minimum line width D3 of each sensing line is at least 5% of the maximum line width D4 of each sensing line.

本實施例與前述實施例的另一個不同之處在於:加熱線路2包含一加熱區段21及兩個連接區段22,加熱區段21的兩端連接兩個連接區段22,其中一個連接區段22位於其中第一感測線路3A及第三感測線路3C之間,另一個連接區段22位於第二感測線路3B及第四感測線路3D之間,且加熱線路2的於加熱區段21的任一位置的線寬D5,與各個連接區段22的任一位置的線寬D6不相同。在其中一個具體應用中,加熱區段21的任一位置的線寬D5,小於各個連接區段22的任一位置的線寬D6。Another difference between this embodiment and the aforementioned embodiment is that the heating circuit 2 includes a heating section 21 and two connecting sections 22, the two ends of the heating section 21 are connected to the two connecting sections 22, one of the connecting sections 22 is located between the first sensing circuit 3A and the third sensing circuit 3C, and the other connecting section 22 is located between the second sensing circuit 3B and the fourth sensing circuit 3D, and the line width D5 of the heating circuit 2 at any position of the heating section 21 is different from the line width D6 at any position of each connecting section 22. In one specific application, the line width D5 at any position of the heating section 21 is smaller than the line width D6 at any position of each connecting section 22.

依上所述,通過使加熱區段21的任一位置的線寬D5,與各連接區段22的任一位置的線寬D6不同的設計,可以大幅地降低加熱線路2產生熱能時,連接區段22產生的熱能帶給鄰近的感測線路的影響。As described above, by making the line width D5 at any position of the heating section 21 different from the line width D6 at any position of each connecting section 22, the impact of the heat energy generated by the connecting section 22 on the adjacent sensing circuit when the heating circuit 2 generates heat energy can be greatly reduced.

更進一步來說,由於第一感測線路3A與第二感測線路3B之間及第三感測線路3C與第四感測線路3D之間,都沒有設置連接區段22,因此,通過使連接區段22的線寬,大於加熱區段21的線寬的設計,可以大幅地降低連接區段22的溫度,對於其周圍的感測線路的溫度的影響,從而可以進一步地提升感測線路的感測靈敏度。Furthermore, since there is no connection section 22 between the first sensing circuit 3A and the second sensing circuit 3B and between the third sensing circuit 3C and the fourth sensing circuit 3D, by making the line width of the connection section 22 larger than the line width of the heating section 21, the temperature of the connection section 22 can be greatly reduced, which affects the temperature of the surrounding sensing circuits, thereby further improving the sensing sensitivity of the sensing circuits.

綜上所述,本發明的氣流感測器整體結構簡單,且可以感測多方向的氣流,而可有效地解決圖1所示的習知的氣流感測器,僅可感測單一方向的氣流的問題,且本發明的氣流感測器通過各個感測線路的線寬、各個感測線路長度等設計,可以大幅地提升氣流感測器的感測靈敏度。In summary, the air flow sensor of the present invention has a simple overall structure and can sense airflow in multiple directions, which can effectively solve the problem that the conventional air flow sensor shown in FIG. 1 can only sense airflow in a single direction. In addition, the air flow sensor of the present invention can greatly improve the sensing sensitivity of the air flow sensor by designing the line width and length of each sensing line.

以上所述僅為本發明的較佳可行實施例,非因此侷限本發明的專利範圍,故舉凡運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的保護範圍內。The above description is only the preferred feasible embodiment of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the contents of the specification and drawings of the present invention are included in the protection scope of the present invention.

A:氣流感測器 A1:電路板 A2:加熱線路 A3:感測線路 A4:控制器 100:氣流感測器 1:基板 2:加熱線路 21:加熱區段 22:連接區段 3A:第一感測線路 3B:第二感測線路 3C:第三感測線路 3D:第四感測線路 31:弧形區段 32:轉彎區段 33:直線區段 4:控制模組 5:絕緣保護層 D1:線寬 D2:線寬 D3:線寬 D4:線寬 D5:線寬 D6:線寬 A: Air flow sensor A1: Circuit board A2: Heating circuit A3: Sensing circuit A4: Controller 100: Air flow sensor 1: Substrate 2: Heating circuit 21: Heating section 22: Connecting section 3A: First sensing circuit 3B: Second sensing circuit 3C: Third sensing circuit 3D: Fourth sensing circuit 31: Arc section 32: Turning section 33: Straight section 4: Control module 5: Insulation protection layer D1: Line width D2: Line width D3: Line width D4: Line width D5: Line width D6: Line width

圖1為習知的氣流感測器的示意圖。FIG. 1 is a schematic diagram of a conventional air flow sensor.

圖2為本發明的氣流感測器的第一實施例的示意圖。FIG. 2 is a schematic diagram of a first embodiment of the air flow sensor of the present invention.

圖3為本發明的氣流感測器沿圖2的剖線III-III的剖面示意圖。FIG. 3 is a schematic cross-sectional view of the air flow sensor of the present invention along the section line III-III of FIG. 2 .

圖4為本發明的氣流感測器的第二實施例的示意圖。FIG. 4 is a schematic diagram of a second embodiment of the air flow sensor of the present invention.

100:氣流感測器 100: Air flow detector

1:基板 1: Substrate

2:加熱線路 2: Heating circuit

3A:第一感測線路 3A: First sensing circuit

3B:第二感測線路 3B: Second sensing circuit

3C:第三感測線路 3C: The third sensing circuit

3D:第四感測線路 3D: Fourth sensing circuit

31:弧形區段 31: Arc section

32:轉彎區段 32: Turning section

4:控制模組 4: Control module

5:絕緣保護層 5: Insulation protective layer

D1:線寬 D1: Line width

D2:線寬 D2: Line width

Claims (9)

一種氣流感測器,其包含: 一基板; 一加熱線路,其能被供電以構成一加熱電阻,並據以產生熱能; 至少四個感測線路,其形成於所述基板的一側面,各個所述感測線路能被供電構成一熱敏電阻,四個所述感測線路環繞所述加熱線路設置,且四個所述感測線路相連接,以構成一惠斯通電橋;各個所述感測線路的線寬,由靠近所述加熱線路的一端,向遠離所述加熱線路的一端逐漸增加; 一控制模組,其設置於所述基板,且所述控制模組電性連接所述加熱線路及四個所述感測線路,所述控制模組能依據各個所述感測線路的電阻值變化,以輸出一氣流方向訊號; 其中,所述加熱線路包含一加熱區段及兩個連接區段,所述加熱區段的兩端連接兩個所述連接區段,其中一個所述連接區段位於其中兩個所述感測線路之間,另一個所述連接區段位於另外兩個所述感測線路之間,且所述加熱線路的於所述加熱區段的任一位置的線寬,與各個所述連接區段的任一位置的線寬不相同。 An airflow sensor, comprising: a substrate; a heating circuit, which can be powered to form a heating resistor and generate heat energy accordingly; at least four sensing circuits, which are formed on one side of the substrate, each of which can be powered to form a thermistor, and the four sensing circuits are arranged around the heating circuit, and the four sensing circuits are connected to form a Wheatstone bridge; the line width of each sensing circuit gradually increases from one end close to the heating circuit to one end far from the heating circuit; a control module, which is arranged on the substrate, and the control module is electrically connected to the heating circuit and the four sensing circuits, and the control module can output an airflow direction signal according to the change of the resistance value of each sensing circuit; The heating circuit includes a heating section and two connecting sections, the two ends of the heating section are connected to the two connecting sections, one of the connecting sections is located between two of the sensing circuits, and the other connecting section is located between the other two sensing circuits, and the line width of the heating circuit at any position of the heating section is different from the line width at any position of each of the connecting sections. 如請求項1所述的氣流感測器,其中,所述基板為一軟性電路板。An air flow sensor as described in claim 1, wherein the substrate is a flexible circuit board. 如請求項1所述的氣流感測器,其中,各個所述感測線路的最小線寬,是各個所述感測線路的最大線寬至少百分之五。An air flow sensor as described in claim 1, wherein the minimum line width of each of the sensing lines is at least 5 percent of the maximum line width of each of the sensing lines. 如請求項1所述的氣流感測器,其中,各個所述感測線路的材料為金箔;其中兩個所述感測線路是左右對稱地設置,另外兩個所述感測線路是左右對稱地設置。An air flow sensor as described in claim 1, wherein the material of each of the sensing circuits is gold foil; two of the sensing circuits are arranged symmetrically, and the other two of the sensing circuits are arranged symmetrically. 如請求項1所述的氣流感測器,其中,各個所述感測線路包含多個直線區段,各個所述感測線路越靠近所述加熱線路的所述直線區段的長度越小,而各個所述感測線路越遠離所述加熱線路的所述直線區段的長度越長。An air flow sensor as described in claim 1, wherein each of the sensing lines comprises a plurality of straight line segments, the closer each of the sensing lines is to the heating line, the shorter the length of the straight line segment is, and the farther each of the sensing lines is from the heating line, the longer the length of the straight line segment is. 如請求項1所述的氣流感測器,其中,各個所述感測線路包含多個弧形區段及多個轉彎區段,各個所述弧形區段的至少一端是與其中一個所述轉彎區段連接;各個所述感測線路越靠近所述加熱線路的所述弧形區段的長度越小,而各個所述感測線路越遠離所述加熱線路的所述弧形區段的長度越長。An air flow sensor as described in claim 1, wherein each of the sensing circuits comprises a plurality of arc segments and a plurality of turning segments, at least one end of each of the arc segments is connected to one of the turning segments; the closer each of the sensing circuits is to the heating circuit, the shorter the length of the arc segment, and the farther each of the sensing circuits is from the heating circuit, the longer the length of the arc segment. 如請求項1所述的氣流感測器,其中,所述加熱線路包含多個弧形區段及多個轉彎區段,各個所述弧形區段的至少一端是與其中一個所述轉彎區段連接;所述加熱線路的外圍大致為圓形。An air flow sensor as described in claim 1, wherein the heating circuit comprises a plurality of arc sections and a plurality of bend sections, at least one end of each of the arc sections is connected to one of the bend sections; and the outer periphery of the heating circuit is substantially circular. 如請求項1所述的氣流感測器,其中,所述加熱區段的任一位置的線寬,小於各個所述連接區段的任一位置的線寬。An air flow sensor as described in claim 1, wherein the line width at any position of the heating section is smaller than the line width at any position of each of the connecting sections. 如請求項1所述的氣流感測器,其中,所述氣流感測器還包含一絕緣保護層,所述絕緣保護層設置於所述基板形成有所述感測線路及所述加熱線路的一側,且所述絕緣保護層覆蓋所述感測線路及所述加熱線路,所述絕緣保護層的厚度不大於0.0008公釐。An air flow sensor as described in claim 1, wherein the air flow sensor further comprises an insulating protective layer, wherein the insulating protective layer is disposed on a side of the substrate where the sensing circuit and the heating circuit are formed, and the insulating protective layer covers the sensing circuit and the heating circuit, and the thickness of the insulating protective layer is not greater than 0.0008 mm.
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CN113933535A (en) * 2021-09-28 2022-01-14 东南大学 Two-dimensional dual-mode MEMS wind speed and direction sensor and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5827960A (en) * 1997-08-28 1998-10-27 General Motors Corporation Bi-directional mass air flow sensor having mutually-heated sensor elements
TW364946B (en) * 1998-07-15 1999-07-21 Ind Teconology Res Inst Integrated flow sensor
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CN212903385U (en) * 2020-10-22 2021-04-06 无锡芯灵微电子有限公司 Temperature difference type gas flow sensor based on MEMS
CN113933535A (en) * 2021-09-28 2022-01-14 东南大学 Two-dimensional dual-mode MEMS wind speed and direction sensor and preparation method thereof

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