TWI880391B - Fluid flowrate calibration system and calibration method - Google Patents

Abstract

A fluid flowrate calibration system and calibration method are utilized to calibrate a flowrate of fluid flowing into a process device end through a pipeline. The system includes: a control valve for control the fluid flow; a flowrate calibration device for measuring and calibrating the fluid flowrate; at least one measuring instrument for monitoring the fluid flowrate; and a control module connected to the afore-mentioned components to regulate the fluid flowrate through signals. The control module sets a target flowrate and controls the control valve to adjust the fluid flowrate according to the target flowrate. The control module determines whether the fluid flowrate is same as the target flowrate: when being different, the control module controls the control valve to adjust the fluid flowrate to conform with the target flowrate; when being the same, the control module controls the fluid to flow into the process device end.

Description

Fluid flow calibration system and calibration method

The present invention relates to a flow calibration system and calibration method, and in particular to a fluid flow calibration system and calibration method.

Today's semiconductor industry is developing rapidly, and there are many different types of wet process equipment to meet the needs. Most process equipment will recycle the fluid when conveying fluids because the fluids required for the same process or process (such as etching liquid or washing liquid, etc.) are the same. However, the bubbles or solid byproducts generated in the fluid due to process reactions will increase or accumulate as the number of cycles increases, causing the fluid viscosity to increase, resulting in unstable flow problems. However, due to the high price of the above-mentioned fluids, they will not be completely replaced unless the properties of the fluids no longer meet the specifications, the product life has expired, or before the annual maintenance.

Therefore, the technical field of the present invention urgently needs a fluid flow correction system and method that can maintain the fluid flow rate through fluid flow correction and pipeline branch design before all the fluids used in the process cycle are replaced.

The fluid flow correction system and method provided by the present invention can adjust the valve size of the control valve by regularly correcting the fluid flow in the pipeline so that the fluid flow reaches the target flow required by the process. Thus, by regularly correcting the fluid flow value, the problem of unstable fluid flow in semiconductor process equipment (such as wet process equipment) can be reduced, thereby improving the yield or production rate of the overall process (such as improving the cleaning yield after wafer etching), while reducing the number of times expensive fluids are replaced and reducing process costs.

In view of the above problems, in order to solve the problem that the known fluid flow rate is different from the target flow rate, the present invention provides a fluid flow correction system for correcting a fluid flow rate flowing into a process equipment end fluid through a pipeline, which includes: a control valve for controlling the size of the fluid flow rate; at least one metering instrument for monitoring the fluid flow rate; a flow correction device for measuring a liquid flow rate flowing into the flow correction device and correcting the fluid flow rate; and a control module, the signal of which is connected to the control valve, the flow correction device and the at least one metering instrument, for regulating the fluid flow rate through the signal. The control module sets a target flow rate, and the control module controls the control valve to adjust the fluid flow rate according to the target flow rate. The control module determines whether the fluid flow rate is the same as the target flow rate through the flow correction device. When the fluid flow rate is different from the target flow rate, the control module controls the control valve to adjust the fluid flow rate to meet the target flow rate. When the fluid flow rate is the same as the target flow rate, the control module controls the fluid to flow into the process equipment end.

In a preferred embodiment, the control module sets the target flow rate, and the control module controls the control valve to adjust the fluid flow rate according to the target flow rate, further comprising: the control module transmits a target flow rate signal to the control valve to control the control valve to adjust the fluid flow rate according to the target flow rate; and the control valve adjusts the fluid flow rate according to the target flow rate signal, and returns an adjustment feedback signal to the control module.

In a preferred embodiment, the fluid flow correction system further includes a process equipment end valve and a flow correction equipment end valve, the process equipment end valve is arranged on the pipeline in front of the process equipment end, and the flow correction equipment end valve is arranged on the pipeline in front of the flow correction equipment. Before the control module determines whether the fluid flow rate is the same as the target flow rate through the flow correction device, it further includes: the control module closes the valve at the process equipment end to stop the fluid from flowing into the process equipment end; the control module opens the valve at the flow correction device end to allow the fluid to flow into the flow correction device; and the control module transmits a flow correction signal to the flow correction device to start the flow correction device and make it measure the fluid flow rate. After the flow correction device measures the fluid flow rate, it transmits a correction feedback signal to the control module.

In a preferred embodiment, when the control module determines whether the fluid flow rate is the same as the target flow rate through the flow correction device, it further includes: the control module determines whether the fluid flow rate is the same as the target flow rate according to the adjustment feedback signal and the correction feedback signal.

In a preferred embodiment, when the difference between the fluid flow rate and the target flow rate is less than or equal to a predetermined allowable value, the control module determines that the fluid flow rate is the same as the target flow rate.

In a preferred embodiment, the at least one metering instrument is disposed on the pipeline and is located between the control valve and the valve at the end of the process equipment to monitor the flow rate of the fluid flowing through the valve at the end of the process equipment.

In a preferred embodiment, the at least one metering instrument is disposed on the pipeline and is located between the control valve and the valve at the end of the flow correction device to monitor the flow rate of the fluid flowing through the valve at the end of the flow correction device.

The present invention also provides a fluid flow correction method for correcting a fluid flow rate flowing into a process equipment end through a pipeline, comprising the following steps: setting a target flow rate through a control module, and the control module controls a control valve to adjust the fluid flow rate according to the target flow rate; the control module measures a liquid flow rate flowing into the flow correction device through a flow correction device to determine whether the fluid flow rate is the same as the target flow rate; when the fluid flow rate is different from the target flow rate, the control module controls the control valve to adjust the fluid flow rate to meet the target flow rate; when the fluid flow rate is the same as the target flow rate, the control module controls the fluid to flow into the process equipment end. The control module signal is connected to the control valve and the flow correction device, and the fluid flow rate is adjusted through the signal.

Compared with the prior art, the fluid flow calibration system and calibration method of the present invention can reduce the problem of fluid flow instability in wet process equipment by only regularly calibrating the fluid flow value, thereby improving the yield of the overall process (for example, improving the cleaning yield after wafer etching), while reducing the number of times expensive fluids need to be replaced and reducing process costs.

1000: Fluid flow calibration system

100: Control valve

200: Measuring instruments

300: Flow calibration equipment

400: Load meter

500: Control module

600: Process equipment side

V1: Process equipment end valve

V2: Flow calibration equipment end valve

P: Pipeline

S100,S110,S120,S200,S300,S400,S500: Steps

Figure 1 is a schematic diagram of a unit block of a fluid flow correction system provided in an embodiment of the present invention.

Figure 2 is a three-dimensional operation schematic diagram of a fluid flow correction system provided in an embodiment of the present invention.

Figure 3 is a schematic diagram of the flow chart of the fluid flow correction method provided in an embodiment of the present invention.

Figure 4 is a schematic diagram of the flow chart of the fluid flow correction method provided by another embodiment of the present invention.

In order to further understand the features, technical means, and specific functions and purposes of the present invention, more specific embodiments are listed, followed by detailed descriptions with drawings and figure numbers as follows.

The following descriptions of the embodiments refer to the attached drawings to illustrate specific embodiments in which the present invention can be implemented. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "top", "bottom", "horizontal", "vertical", etc., are only with reference to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, rather than to limit the present invention. For the convenience of description, the proportions and relative positions in the drawings of the present invention may be exaggerated or not exactly the same as in the actual implementation. The contents of the drawings are only examples and are not intended to limit the present invention.

Please refer to FIG. 1 and FIG. 2. FIG. 1 is a schematic diagram of a unit block of a fluid flow correction system provided by an embodiment of the present invention, and FIG. 2 is a three-dimensional operation schematic diagram of a fluid flow correction system provided by an embodiment of the present invention. The present invention provides a fluid flow correction system 1000, and the fluid flow correction system 1000 can correct a fluid flow of a fluid flowing into a process equipment end 600 through a pipeline P. In actual application, the process equipment end 600 can be a chamber for a wet process, a pickling module, a rinsing module, or other equipment applications for semiconductor processes, and the present invention is not limited thereto.

Specifically, the fluid flow correction system 1000 includes: a control valve 100, at least one metering instrument 200, a flow correction device 300 and a control module 500. The control valve 100 controls the flow rate of the fluid flowing through the pipeline P by controlling the switch size of the valve it has. The control valve 100 can control the flow rate of the fluid through its valve opening, electromagnetic control or other quantitative methods, but the present invention is not limited to this. The at least one metering instrument 200 can monitor the fluid flow rate, and the at least one metering instrument 200 can be an instrument such as a flow meter or a flow meter, but the present invention is not limited to this. In actual application, the at least one metering instrument 200 can measure again when the fluid flows for a period of time or the flow rate is stable. The flow calibration device 300 can measure a liquid flow rate flowing into the flow calibration device 300 and calibrate the fluid flow rate. In one embodiment, the fluid flow calibration system 1000 of the present invention further includes a load cell 400, which is signal-connected or electrically connected to the flow calibration device 300 and can measure the weight of the fluid passing through the flow calibration device 300 per unit time, so that the flow calibration device 300 can measure the fluid flow rate. The load cell 400 can be a scale, an electronic balance, or other device or instrument for weighing, but the present invention is not limited thereto. The control module 500 is signal-connected to the control valve 100, the flow correction device 300 (and/or the load cell 400) and the at least one metering instrument 200. The control module 500 can adjust the fluid flow rate by transmitting or receiving signals to the aforementioned components. The control module 500 can be a programmable logic controller (PLC), an industrial personal computer (IPC) or other control device or equipment with computing and control functions, and the signal connection can be made in a wired or wireless manner, but the present invention is not limited thereto.

In one embodiment, the fluid flow correction system 1000 of the present invention corrects the fluid flow by performing the following actions. First, the control module 500 sets a target flow and controls the control valve 100 to adjust the fluid flow according to the target flow. The target flow can be the flow required by the process, and during the correction process, it can be set according to the initial flow, that is, according to the target flow that the fluid that has not entered the process equipment end 600 should have. Specifically, the control module 500 controls the control valve 100 to adjust the fluid flow according to the target flow signal by transmitting a target flow signal to the control valve 100, and the control valve 100 adjusts the fluid flow according to the target flow signal, and returns an adjustment feedback signal to the control module 500. That is, after receiving the adjustment feedback signal, the control module 500 confirms the current fluid flow rate of the control valve 100 and sets it at the target flow rate.

Then, the control module 500 determines whether the fluid flow rate is the same as the target flow rate through the flow correction device 300. As shown in FIG2 , the pipeline P of the fluid flow correction system 1000 further includes a process equipment end valve V1 and a flow correction device end valve V2. The process equipment end valve V1 is set on the pipeline P before the process equipment end 600, and the flow correction device end valve V2 is set on the pipeline P before the flow correction device 300. In other words, the pipeline P of the fluid flow correction system 1000 of the present invention is designed in a branching manner, and the inflow of the fluid is controlled by the process equipment end valve V1 and the flow correction device end valve V2. Thus, by opening and closing the valve V1 at the process equipment end and the valve V2 at the flow correction equipment end, the fluid can be controlled to flow to the process equipment end 600 or to the flow correction equipment 300.

Specifically, in order to measure the current fluid flow rate of the fluid with the flow correction device 300, the control module 500 needs to control the fluid in the pipeline P of the fluid flow correction system 1000 to flow completely to the fluid flow correction device 300. In one embodiment, the control module 500 closes the process equipment end valve V1 to stop the fluid from flowing into the process equipment end 600, and the control module 500 opens the flow correction device end valve V2 to allow the fluid to flow into the flow correction device 300. Then, the control module 500 transmits a flow correction signal to the flow correction device 300 to start the flow correction device 300 and make it measure the fluid flow rate. After measuring the fluid flow rate, the flow correction device 300 transmits a correction feedback signal to the control module 500.

In one embodiment, the flow calibration device 300 can measure the fluid flow rate by measuring the accumulated weight of the fluid flowing through the flow calibration device 300 per unit time through the load cell 400. The flow calibration device 300 then transmits the calibration feedback signal to the control module 500 according to the measured fluid flow rate. In this way, the control module 500 can determine whether the fluid flow rate is the same as the set target flow rate according to the adjustment feedback signal and the calibration feedback signal. In actual application, the control module 500 can obtain the above judgment by comparing the above signals with each other or through other calculations, and the present invention is not limited thereto. When the fluid flow rate is different from the target flow rate, the control module 500 controls the control valve 100 to adjust the fluid flow rate to meet the target flow rate, and when the fluid flow rate is the same as the target flow rate, the control module 500 controls the fluid to flow into the process equipment end 600.

It is worth mentioning that in one embodiment, when the difference between the fluid flow rate and the target flow rate is less than or equal to a predetermined allowable value, the control module 500 can determine that the fluid flow rate is the same as the target flow rate. In actual applications, since the content of bubbles and byproducts contained in the fluid currently flowing through the pipeline P is not exactly the same, it may still be difficult to achieve the same consistency by reciprocating the target flow rate and the fluid flow rate. Therefore, the predetermined allowable value can be preset in the control module 500 in advance. If the difference between the fluid flow rate and the target flow rate is less than or equal to the predetermined allowable value and will not affect the process, subsequent actions can be executed to achieve the purpose of correcting the fluid flow rate to optimize the process and reduce costs. For example, the predetermined allowable value may be in the range of 5% to 15%, preferably 10%, which means that when the difference between the fluid flow rate and the target flow rate is between ±10%, the control module 500 still determines that the fluid flow rate is the same as the target flow rate, but the present invention is not limited thereto and can be adjusted according to actual needs.

When the control module 500 determines that the fluid flow rate is different from the target flow rate or the difference is not within the allowable value range, the control module 500 transmits a flow adjustment signal to the control valve 100, and the control valve 100 adjusts the size of its valve according to the flow adjustment signal to adjust the fluid flow rate to meet the target flow rate, and the control valve 100 transmits an adjustment feedback signal to the control module 500. The control module 500 can then transmit the flow correction signal to the flow correction device 300 to measure the fluid flow rate, and the flow correction device 300 also measures the fluid flow rate and transmits the correction feedback signal to the control module 500. The control module 500 can then determine whether the fluid flow rate is the same as the target flow rate according to the adjustment feedback signal and the correction feedback signal, and repeat this cycle until the control module 500 determines that the fluid flow rate is the same as the target flow rate or the difference is within the allowable value range. The control module 500 opens the process equipment end valve V1 to supply the fluid to flow into the process equipment end 600, and the control module 500 closes the flow correction device end valve V2 to stop the fluid from flowing into the flow correction device 300. It is worth mentioning that the present invention does not limit the order of closing and opening the aforementioned process equipment end valve V1 and the flow correction device end valve V2. In addition, the adjustment feedback signal and correction feedback signal described in the present invention at least include the fluid flow rate measured by the component for the control module 500 to judge and compare.

In the embodiment of the present invention, the control module 500 can monitor the fluid flow rate flowing through the pipeline P through the at least one metering instrument 200. The signal of the at least one metering instrument 200 of the fluid flow correction system 1000 is connected to the control module 500, and the at least one metering instrument 200 can be arranged between the control valve 100 and the valve V1 at the process equipment end to monitor the fluid flow rate flowing through the valve V1 at the process equipment end, or be arranged between the control valve 100 and the valve V2 at the flow correction equipment end to monitor the fluid flow rate flowing through the valve V2 at the flow correction equipment end. In this way, the control module 500 can monitor the fluid flow in the pipeline P in real time to determine whether fluid flow calibration is required or whether the calibration previously performed is correct.

Please refer to FIG. 3 and FIG. 4. FIG. 3 is a schematic flow chart of a fluid flow correction method provided by one embodiment of the present invention, and FIG. 4 is a schematic flow chart of a fluid flow correction method provided by another embodiment of the present invention. In another embodiment, the present invention provides a fluid flow correction method to correct the fluid flow of the fluid flowing into the process equipment end 600 through the pipeline P. As shown in FIG. 3 and FIG. 4, together with FIG. 1 and FIG. 2, the fluid flow correction method of the present invention achieves the fluid flow correction through the following steps: Step S100: The target flow is set through the control module 500, and the control module 500 controls the control valve 100 to adjust the fluid flow according to the target flow; Step S200: The control module 500 measures a liquid flow flowing into the flow correction device 300 through the flow correction device 300. ; Step S300: The control module 500 determines whether the fluid flow rate is the same as the target flow rate. When the fluid flow rate is different from the target flow rate, step S400 is executed; when the fluid flow rate is the same as the target flow rate, step S500 is executed; Step S400: The control module 500 controls the control valve 100 to adjust the fluid flow rate to meet the target flow rate; and Step S500: The control module 500 controls the fluid to flow into the process equipment end 600.

In step S100, the control module 500 controls the control valve 100 to adjust the fluid flow according to the target flow by transmitting the target flow signal to the control valve 100, and the control valve 100 adjusts the fluid flow according to the target flow signal and returns the adjustment feedback signal to the control module 500. In step S300, the control module 500 determines whether the fluid flow and the target flow are the same according to the adjustment feedback signal and the correction feedback signal.

In another embodiment, before executing step S200, the following steps are further included: step S110: the control module 500 closes the process equipment end valve V1 to stop the fluid from flowing into the process equipment end 600; and step S120: the control module 500 opens the flow correction device end valve V2 to allow the fluid to flow into the flow correction device 300.

In step S110 and step S120, the control module 500 transmits the flow correction signal to the flow correction device 300 to activate the flow correction device 300 and make it measure the fluid flow rate. After the flow correction device 300 measures the fluid flow rate, the flow correction device 300 transmits the correction feedback signal to the control module 500.

The fluid flow correction method of the present invention can be applied to the fluid flow correction system 1000 of the present invention. The specific implementation of the fluid flow correction system 1000 has been described in detail in the aforementioned embodiments, so it will not be repeated here.

In summary, by regularly calibrating the fluid flow in the pipeline, the fluid flow calibration system 1000 and calibration method provided by the present invention help adjust the valve size of the control valve 100 so that the fluid flow reaches the target flow required by the process. In this way, the problem of unstable fluid flow in semiconductor process equipment (such as wet process equipment) can be reduced, thereby improving the yield or production rate of the overall process (such as improving the cleaning yield after wafer etching), while reducing the number of times expensive fluids are replaced and reducing process costs.

The above is only the best implementation method of the present invention. It should be pointed out that for those with ordinary knowledge in the technical field to which the present invention belongs, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

1000: Fluid flow calibration system

100: Control valve

200: Measuring instruments

300: Flow calibration equipment

400: Load meter

500: Control module

600: Process equipment side

Claims (14)

A fluid flow correction system is used to correct the flow of a fluid flowing into a process equipment end through a pipeline, comprising: A control valve for controlling the size of the fluid flow; At least one metering instrument for monitoring the fluid flow; A flow correction device for measuring the flow of a liquid flowing into the flow correction device and correcting the fluid flow; and A control module, the signal of which is connected to the control valve, the flow correction device and the at least one metering instrument, for regulating the fluid flow through the signal; Wherein, the control module sets a target flow, and the control module controls the control valve to adjust the fluid flow according to the target flow; Wherein, the control module determines whether the fluid flow is the same as the target flow through the flow correction device; When the fluid flow rate is different from the target flow rate, the control module controls the control valve to adjust the fluid flow rate to meet the target flow rate; When the fluid flow rate is the same as the target flow rate, the control module controls the fluid to flow into the process equipment end. The fluid flow correction system as described in claim 1, wherein the control module sets the target flow, and the control module controls the control valve to adjust the fluid flow according to the target flow, further comprising: The control module transmits a target flow signal to the control valve to control the control valve to adjust the fluid flow according to the target flow; and The control valve adjusts the fluid flow according to the target flow signal, and returns an adjustment feedback signal to the control module. The fluid flow correction system as described in claim 2 further includes a process equipment end valve and a flow correction device end valve, the process equipment end valve is arranged on the pipeline in front of the process equipment end, and the flow correction device end valve is arranged on the pipeline in front of the flow correction device, wherein, before the control module determines whether the fluid flow is the same as the target flow through the flow correction device, it further includes: The control module closes the process equipment end valve to stop the fluid from flowing into the process equipment end; The control module opens the flow correction device end valve to allow the fluid to flow into the flow correction device; and The control module transmits a flow correction signal to the flow correction device to activate the flow correction device and enable it to measure the fluid flow rate. After measuring the fluid flow rate, the flow correction device transmits a correction feedback signal to the control module. The fluid flow correction system as described in claim 3, wherein when the control module determines whether the fluid flow is the same as the target flow through the flow correction device, it further includes: The control module determines whether the fluid flow is the same as the target flow based on the adjustment feedback signal and the correction feedback signal. A fluid flow correction system as described in claim 4, wherein, when the difference between the fluid flow and the target flow is less than or equal to a predetermined allowable value, the control module determines that the fluid flow is the same as the target flow. A fluid flow calibration system as described in claim 3, wherein the at least one metering instrument is arranged on the pipeline and located between the control valve and the valve at the end of the process equipment to monitor the fluid flow flowing through the valve at the end of the process equipment. A fluid flow correction system as described in claim 3, wherein the at least one metering instrument is arranged on the pipeline and located between the control valve and the valve at the end of the flow correction device to monitor the fluid flow flowing through the valve at the end of the flow correction device. A fluid flow correction method is used to correct a fluid flow rate of a fluid flowing into a process equipment end through a pipeline, comprising the following steps: A target flow rate is set through a control module, and the control module controls a control valve to adjust the fluid flow rate according to the target flow rate; The control module measures a liquid flow rate flowing into the flow correction device through a flow correction device to determine whether the fluid flow rate is the same as the target flow rate; When the fluid flow rate is different from the target flow rate, the control module controls the control valve to adjust the fluid flow rate to meet the target flow rate; When the fluid flow rate is the same as the target flow rate, the control module controls the fluid to flow into the process equipment end; Wherein, the control module signal is connected to the control valve and the flow correction device, and the fluid flow rate is adjusted through the signal. The fluid flow correction method as described in claim 8, wherein the control module sets the target flow, and the control module controls the control valve to adjust the fluid flow according to the target flow, further comprising: The control module transmits a target flow signal to the control valve to control the control valve to adjust the fluid flow according to the target flow; and The control valve adjusts the fluid flow according to the target flow signal, and returns an adjustment feedback signal to the control module. As described in claim 9, the fluid flow correction method further comprises a process equipment end valve and a flow correction device end valve on the pipeline, the process equipment end valve is arranged on the pipeline in front of the process equipment end, and the flow correction device end valve is arranged on the pipeline in front of the flow correction device, wherein, before the control module determines whether the fluid flow is the same as the target flow through the flow correction device, it further comprises: The control module closes the process equipment end valve to stop the fluid from flowing into the process equipment end; The control module opens the flow correction device end valve to allow the fluid to flow into the flow correction device; and The control module transmits a flow correction signal to the flow correction device to activate the flow correction device and enable it to measure the fluid flow rate. After measuring the fluid flow rate, the flow correction device transmits a correction feedback signal to the control module. The fluid flow correction method as described in claim 10, wherein when the control module determines whether the fluid flow is the same as the target flow through the flow correction device, it further includes: The control module determines whether the fluid flow is the same as the target flow based on the adjustment feedback signal and the correction feedback signal. A fluid flow correction method as described in claim 11, wherein, when the difference between the fluid flow and the target flow is less than or equal to a predetermined allowable value, the control module determines that the fluid flow is the same as the target flow. A fluid flow correction method as described in claim 10, wherein the pipeline further has at least one metering instrument, the signal of which is connected to the control module, and the at least one metering instrument is located between the control valve and the valve at the end of the process equipment to monitor the fluid flow flowing through the valve at the end of the process equipment. A fluid flow correction method as described in claim 10, wherein the pipeline further has at least one metering instrument, the signal of which is connected to the control module, and the at least one metering instrument is located between the control valve and the valve at the end of the flow correction device to monitor the fluid flow flowing through the valve at the end of the flow correction device.