TWI878519B - Curable resin composition, dry film, cured product and printed wiring board - Google Patents
Curable resin composition, dry film, cured product and printed wiring board Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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Abstract
一種硬化性樹脂組成物,其係含有(A)鹼可溶性樹脂、(B)光聚合起始劑、(C)熱硬化性樹脂,及(D)著色劑,其係形成於表面經過CZ處理之銅上之硬化性樹脂組成物,其中,形成於厚度2mm之玻璃基板上之前述硬化性樹脂組成物之乾燥塗膜(膜厚20μm)之透射率,於波長430nm下為30~50%,於波長530nm下為28~45%。A curable resin composition comprising (A) an alkali-soluble resin, (B) a photopolymerization initiator, (C) a thermosetting resin, and (D) a coloring agent, wherein the curable resin composition is formed on a copper surface subjected to a CZ treatment, wherein the transmittance of a dry coating film (film thickness 20 μm) of the curable resin composition formed on a glass substrate having a thickness of 2 mm is 30 to 50% at a wavelength of 430 nm and 28 to 45% at a wavelength of 530 nm.
Description
本發明係有關硬化性樹脂組成物、乾膜、硬化物及印刷配線板。The present invention relates to a curable resin composition, a dry film, a cured product and a printed wiring board.
例如印刷配線板之製造中一般係於抗焊劑等之永久被膜之形成中採用硬化性樹脂組成物,作為此等硬化性樹脂組成物已開發出乾膜型的組成物及液狀的組成物。該等中,基於對環境問題之疑慮,係以使用稀鹼水溶液作為顯像液之鹼顯像型之硬化性樹脂組成物為主流,過去已提案有數種組成系(例如專利文獻1)。For example, in the manufacture of printed wiring boards, a curable resin composition is generally used to form a permanent film such as a solder resist, and dry film type compositions and liquid compositions have been developed as such curable resin compositions. Among these, alkaline developing type curable resin compositions using a dilute alkaline aqueous solution as a developer are the mainstream due to environmental concerns, and several composition systems have been proposed in the past (e.g., Patent Document 1).
近幾年來,由於半導體零件之急速進步,而使電子機器有輕薄短小化、高性能化、多功能化之傾向。追隨該傾向之半導體封裝的小型化、多銷化已實用化。具體而言,替代稱為QFP(quad flat pack package:四方封裝)、SOP(small outline package:小型輪廓封裝)等之IC封裝,而使用稱為BGA(ball grid array:球格柵陣列)、CSP (chip scale package:晶粒尺寸封裝)等之IC封裝。且,近幾年來,作為進而高密度化之IC封裝,FC-BGA(flipchip ball grid array:覆晶球格柵陣列)亦已實用化。對於此等IC封裝所用之印刷配線板(亦稱為封裝基板)中形成之阻焊劑等之永久被膜要求更進一步薄膜化。 且,基於隱蔽性及設計性之觀點,阻焊劑有時被要求為黑色者,因此關於阻焊劑所用之硬化性樹脂組成物,有含有顯示黑色之碳黑作為著色劑者,或藉由組合含有黑色以外之多數色之顏料而顯示黑色者。 [先前技術文獻] [專利文獻]In recent years, due to the rapid progress of semiconductor components, electronic devices have tended to be thinner, shorter, more powerful, and more multifunctional. Following this trend, the miniaturization and multi-sales of semiconductor packages have become practical. Specifically, IC packages such as BGA (ball grid array) and CSP (chip scale package) are used instead of IC packages such as QFP (quad flat pack package) and SOP (small outline package). In addition, in recent years, FC-BGA (flipchip ball grid array) has also become practical as a further high-density IC package. There is a demand for further thinning of permanent films such as solder resists formed on printed wiring boards (also called package substrates) used for such IC packaging. In addition, solder resists are sometimes required to be black from the perspective of concealment and design. Therefore, regarding the curable resin composition used for solder resists, there are those containing carbon black that displays black as a colorant, or those that display black by combining pigments containing multiple colors other than black. [Prior art literature] [Patent literature]
專利文獻1:日本特開昭61-243869號公報(申請專利範圍)Patent document 1: Japanese Patent Application No. 61-243869 (patent application scope)
[發明欲解決之課題][Problems to be solved by the invention]
目前之阻焊劑大多以光硬化形成圖像,最後實施熱硬化處理。藉由該熱硬化處理有時銅電路會因氧化而變色。且於基板上實施標記墨水時,由於阻焊劑硬化後進而印刷標記並使之熱硬化,故可能加速銅電路之變色。進而,亦有為了修正阻焊劑熱硬化時產生之基板翹曲而施加壓力與熱之情況,同樣可能使電路變色。該變色於以往之黑色硬化性樹脂組成物時無法被隱蔽,而使基板之外觀變差。且,即使以藉由與銅電路之銅色組合而顯示黑色之方式包含藍色著色料之以往的硬化性樹脂組成物其隱蔽性亦不足,尤其對於已進行用以使銅表面粗化提高密著性之處理的CZ處理的銅電路的隱蔽性至今仍有改良餘地。 且,阻焊劑於必須極力避免因著色劑之調配而使解像度降低,並要求高水準地兼具隱蔽性與解像性之方面,於過去必須變更色調以外之成分,且於重視解像性之情況,必須減少欲擔保隱蔽性之黑色顏料之添加量,該情況下根據硬化條件而定,會因銅電路之氧化使色調產生變化。Most current solder resists are photocured to form an image, and then heat-cured. The heat-curing process may cause the copper circuit to discolor due to oxidation. When marking ink is applied to the substrate, the solder resist is cured and then the marking is printed and heat-cured, which may accelerate the discoloration of the copper circuit. Furthermore, in order to correct the substrate warping caused by the heat curing of the solder resist, pressure and heat are applied, which may also cause the circuit to discolor. This discoloration cannot be concealed by the previous black curing resin composition, and the appearance of the substrate is deteriorated. Furthermore, even the conventional curable resin composition containing a blue colorant in a manner that displays black by combining with the copper color of the copper circuit has insufficient concealment, and there is still room for improvement in the concealment of the copper circuit that has been subjected to the CZ treatment for roughening the copper surface to improve adhesion. In addition, the solder resist must avoid the reduction of resolution due to the formulation of the colorant as much as possible, and requires both concealment and resolution at a high level. In the past, it was necessary to change the components other than the color tone, and in the case of attaching importance to resolution, it was necessary to reduce the amount of black pigment added to ensure concealment. In this case, depending on the curing conditions, the color tone will change due to the oxidation of the copper circuit.
因此本發明之目的在於提供於CZ處理後之銅上形成之塗膜因隱蔽性優異而加熱後之色調變化少且解像性優異之可鹼顯像之硬化性樹脂組成物、具有由該組成物所得之樹脂層之乾膜、該組成物或該乾膜之樹脂層的硬化物、及具有該硬化物之印刷配線板。 [用以解決課題之手段]Therefore, the purpose of the present invention is to provide a hardening resin composition that can be developed by alkali, which has excellent hiding power, little color change after heating, and excellent resolution, and a dry film having a resin layer obtained from the composition, a cured product of the composition or the resin layer of the dry film, and a printed wiring board having the cured product. [Means for solving the problem]
本發明人等鑒於上述而積極檢討之結果,發現於特定試驗條件下之透射率落於特定範圍之硬化性樹脂組成物,於CZ處理後之銅上形成之塗膜因隱蔽性優異而加熱後之色調變化少且解像性優異,因而完成本發明。The inventors of the present invention have actively studied the above results and found that under specific test conditions, a hardening resin composition with a transmittance within a specific range can form a coating on copper treated with CZ with excellent concealment, less color change after heating, and excellent resolution, thereby completing the present invention.
亦即,本發明之硬化性樹脂組成物之特徵係含有(A)鹼可溶性樹脂、(B)光聚合起始劑、(C)熱硬化性樹脂及(D)著色劑,其係形成於表面經過CZ處理之銅上之硬化性樹脂組成物, 其中形成於厚度2mm之玻璃基板上之前述硬化性樹脂組成物之乾燥塗膜(膜厚20μm)之透射率,於波長430nm下為30~50%,於波長530nm下為28~45%。That is, the characteristic of the curable resin composition of the present invention is that it contains (A) alkali-soluble resin, (B) photopolymerization initiator, (C) thermosetting resin and (D) coloring agent, and is a curable resin composition formed on copper with a CZ-treated surface, wherein the transmittance of the dry coating film (film thickness 20μm) of the aforementioned curable resin composition formed on a glass substrate with a thickness of 2mm is 30-50% at a wavelength of 430nm and 28-45% at a wavelength of 530nm.
本發明之硬化性樹脂組成物較佳前述乾燥塗膜之透射率於波長720nm下為12%以下。The curable resin composition of the present invention preferably has a transmittance of the dried coating of less than 12% at a wavelength of 720 nm.
本發明之硬化性樹脂組成物較佳前述乾燥塗膜之透射率於波長365nm下為5%以上。The curable resin composition of the present invention preferably has a transmittance of the dried coating of 5% or more at a wavelength of 365 nm.
本發明之乾膜之特徵係具有由前述硬化性樹脂組成物所獲得之樹脂層。The dry film of the present invention is characterized by having a resin layer obtained from the aforementioned hardening resin composition.
本發明之硬化物之特徵係將前述硬化性樹脂組成物或前述乾膜之樹脂層硬化所獲得。The characteristic of the hardened material of the present invention is that it is obtained by hardening the aforementioned hardening resin composition or the resin layer of the aforementioned dry film.
本發明之印刷配線之特徵係具有前述硬化物。 [發明效果]The printed wiring of the present invention is characterized by having the aforementioned hardened material. [Effect of the invention]
依據本發明,可提供於CZ處理後之銅上形成之塗膜因隱蔽性優異而加熱後之色調變化少且解像性優異之可鹼顯像之硬化性樹脂組成物、具有由該組成物所得之樹脂層之乾膜、該組成物或該乾膜之樹脂層的硬化物、及具有該硬化物之印刷配線板。According to the present invention, there can be provided a hardening resin composition capable of alkali developability, in which a coating formed on copper after CZ treatment has excellent hiding power, little color change after heating and excellent resolution, a dry film having a resin layer obtained from the composition, a cured product of the composition or the resin layer of the dry film, and a printed wiring board having the cured product.
本發明之硬化性樹脂組成物之特徵係含有(A)鹼可溶性樹脂、(B)光聚合起始劑、(C)熱硬化性樹脂及(D)著色劑,其係形成於表面經過CZ處理之銅上之硬化性樹脂組成物, 其中形成於厚度2mm之玻璃基板上之前述硬化性樹脂組成物之乾燥塗膜(膜厚20μm)之透射率,於波長430nm下為30~50%,於波長530nm下為28~45%。於一例中係調整硬化性樹脂組成物中之紅色著色劑、黃色著色劑、藍色著色劑及黑色著色劑之調配,而調整為於厚度2mm之玻璃基板上試驗之塗膜的透射率於波長430nm下為30~50%,於波長530nm下為28~45%。具有該透射率之硬化性樹脂組成物並非以往之黑色硬化性樹脂組成物,亦非以往之藍色硬化性樹脂組成物,而為新穎的硬化性樹脂組成物,係難以將著色劑以特定調配比例特定出,而反倒是使形成於厚度2mm之玻璃基板上之前述硬化性樹脂組成物之乾燥塗膜(膜厚20μm)之透射率,於波長430nm下為30~50%,於波長530nm下為28~45%者,兼具有本發明所期待之隱蔽性及解像性。因此,本發明之硬化性樹脂組成物係以特定試驗條件下之透過率落於特定範圍予以特定。 透射率之測定係以塗敷器將硬化性樹脂組成物以於80℃乾燥30分鐘後成為20μm厚之方式於厚度2mm之玻璃基板上形成乾燥塗膜,或將厚20μm之乾膜層壓於厚度2mm之玻璃基板上,剝離載體膜而形成。以紫外線可見光紅外線分光光度計V-670(日本分光公司製)測定。 較佳乾燥塗膜之透射率於波長720nm下為12%以下,藉此,可極力抑制加熱處理後之色調變化。 較佳乾燥塗膜之透射率於波長365nm下為5%以上,藉此,可提高解像性。The characteristic of the curable resin composition of the present invention is that it contains (A) alkali-soluble resin, (B) photopolymerization initiator, (C) thermosetting resin and (D) coloring agent, and is a curable resin composition formed on copper with a CZ-treated surface. The transmittance of the dry coating film (film thickness 20μm) of the aforementioned curable resin composition formed on a glass substrate with a thickness of 2mm is 30-50% at a wavelength of 430nm and 28-45% at a wavelength of 530nm. In one example, the red colorant, yellow colorant, blue colorant and black colorant in the curable resin composition are adjusted so that the transmittance of the coating film tested on a 2 mm thick glass substrate is 30-50% at a wavelength of 430 nm and 28-45% at a wavelength of 530 nm. The hardening resin composition with this transmittance is not the conventional black hardening resin composition, nor is it the conventional blue hardening resin composition, but is a novel hardening resin composition. It is difficult to specify the coloring agent in a specific mixing ratio, but the transmittance of the dry coating film (film thickness 20μm) of the aforementioned hardening resin composition formed on a glass substrate with a thickness of 2mm is 30-50% at a wavelength of 430nm and 28-45% at a wavelength of 530nm, which has both the concealment and resolution expected by the present invention. Therefore, the hardening resin composition of the present invention is specified by the transmittance falling within a specific range under specific test conditions. The transmittance is measured by using an applicator to form a dry coating on a 2mm thick glass substrate in a manner that the curable resin composition becomes 20μm thick after drying at 80℃ for 30 minutes, or by pressing a 20μm thick dry film layer on a 2mm thick glass substrate and peeling off the carrier film. It is measured using a UV-Vis-IR spectrophotometer V-670 (manufactured by JASCO Corporation). The transmittance of the preferably dry coating is less than 12% at a wavelength of 720nm, thereby greatly suppressing the color change after heat treatment. The transmittance of the preferably dry coating is more than 5% at a wavelength of 365nm, thereby improving the resolution.
以下針對本發明之硬化性樹脂組成物之各成分加以說明。又,本說明書中,所謂(甲基)丙烯酸酯係對丙烯酸酯、甲基丙烯酸酯及該等之混合物總稱之用語,關於其他類似表現亦同樣。The following is a description of the components of the curable resin composition of the present invention. In addition, in this specification, the term "(meth)acrylate" is a general term for acrylate, methacrylate and a mixture thereof, and the same applies to other similar expressions.
[(A)鹼可溶性樹脂] 作為(A)鹼可溶性樹脂,舉例為例如具有2個以上酚性羥基之化合物、含羧基樹脂、具有酚性羥基及羧基之化合物、具有2個以上硫醇基之化合物。其中鹼可溶性樹脂若為含羧基樹脂或酚樹脂,則與基底之密著性提高故而較佳。尤其由於顯像性優異,故鹼可溶性樹脂更佳為含羧基樹脂。含羧基樹脂較佳為具有乙烯性不飽和雙鍵之含羧基感光性樹脂,但亦可為不具有乙烯性不飽和雙鍵之含羧基樹脂。[(A) Alkali-soluble resin] Examples of (A) alkali-soluble resins include compounds having two or more phenolic hydroxyl groups, carboxyl-containing resins, compounds having phenolic hydroxyl groups and carboxyl groups, and compounds having two or more thiol groups. Among them, if the alkali-soluble resin is a carboxyl-containing resin or a phenolic resin, it is preferred because the adhesion to the substrate is improved. In particular, the alkali-soluble resin is more preferably a carboxyl-containing resin because of its excellent developing properties. The carboxyl-containing resin is preferably a carboxyl-containing photosensitive resin having an ethylenically unsaturated double bond, but may also be a carboxyl-containing resin without an ethylenically unsaturated double bond.
作為含羧基樹脂之具體例舉例為如以下列舉之化合物(寡聚物及聚合物均可)。Specific examples of the carboxyl group-containing resin include the following compounds (both oligomers and polymers).
(1) 藉由使(甲基)丙烯酸等之不飽和羧酸與苯乙烯、α-甲基苯乙烯、(甲基)丙烯酸低級烷酯、異丁烯等之含不飽和基之化合物之共聚合而得之含羧基樹脂。(1) Carboxyl-containing resins obtained by copolymerizing unsaturated carboxylic acids such as (meth)acrylic acid with unsaturated group-containing compounds such as styrene, α-methylstyrene, lower alkyl (meth)acrylates, isobutylene, etc.
(2) 藉由使脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯、與二羥甲基丙酸、二羥甲基丁酸等之含羧基二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物之聚加成反應所得之含羧基之胺基甲酸酯樹脂。(2) A carboxyl-containing urethane resin obtained by subjecting a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate, an aromatic diisocyanate, a carboxyl-containing diol compound such as dihydroxymethylpropionic acid and dihydroxymethylbutyric acid, and a diol compound such as a polycarbonate polyol, a polyether polyol, a polyester polyol, a polyolefin polyol, an acrylic polyol, a bisphenol A-based epoxyalkyl adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group to a polyaddition reaction.
(3) 於脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯與聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物之聚加成反應所得之胺基甲酸酯樹脂之末端與酸酐反應而得之末端含羧基之胺基甲酸酯樹脂。(3) Urethane resins containing carboxyl groups at the end obtained by reacting the terminal of a urethane resin obtained by the polyaddition reaction of a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, alicyclic diisocyanate, or an aromatic diisocyanate with a diol compound such as a polycarbonate polyol, a polyether polyol, a polyester polyol, a polyolefin polyol, an acrylic polyol, a bisphenol A-based epoxide adduct diol, or a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group with an acid anhydride.
(4) 使二異氰酸酯與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等之2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含羧基二醇化合物及二醇化合物之聚加成反應所得之含羧基之胺基甲酸酯樹脂。(4) A carboxyl-containing urethane resin obtained by subjecting a diisocyanate to a polyaddition reaction with a (meth)acrylate of a bifunctional epoxy resin such as bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, dimethylol epoxy resin, biphenol epoxy resin or a partially anhydride-modified product thereof, a carboxyl-containing diol compound and a diol compound.
(5) 於上述(2)或(4)之樹脂之合成中,添加(甲基)丙烯酸羥基烷酯等之分子中具有1個羥基與1個以上(甲基)丙烯醯基之化合物,進行末端(甲基)丙烯酸化之含羧基之胺基甲酸酯樹脂。(5) In the synthesis of the resin of (2) or (4) above, a compound having one hydroxyl group and one or more (meth)acryl groups in the molecule, such as (meth)acrylate hydroxyalkyl ester, is added to prepare a carboxyl-containing urethane resin which is terminally (meth)acrylated.
(6) 上述(2)或(4)之樹脂合成中,添加異佛酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等之分子內具有1個異氰酸酯基與1個以上(甲基)丙烯醯基之化合物之末端(甲基)丙烯酸化之含羧基之胺基甲酸酯樹脂。(6) In the resin synthesis of (2) or (4) above, a terminally (meth)acrylated carboxyl-containing urethane resin having one isocyanate group and one or more (meth)acryloyl groups in the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate, is added.
(7) 使多官能環氧樹脂與(甲基)丙烯酸反應,而於側鏈存在之羥基加間苯二甲酸酐、四氫間苯二甲酸酐、六氫鄰苯二甲酸酐等之二元酸酐之含羧基樹脂。(7) A polyfunctional epoxy resin is reacted with (meth) acrylic acid to obtain a carboxyl-containing resin having a dibasic acid anhydride such as isophthalic anhydride, tetrahydroisophthalic anhydride, or hexahydrophthalic anhydride, by adding a hydroxyl group to the side chain.
(8) 使2官能環氧樹脂之羥基進而以表氯醇環氧化之多官能環氧樹脂與(甲基)丙烯酸反應,而於產生之羥基加成二元酸酐之含羧基樹脂。(8) The hydroxyl group of a bifunctional epoxy resin is further epoxidized with epichlorohydrin to produce a polyfunctional epoxy resin which reacts with (meth)acrylic acid, and a carboxyl-containing resin is added to the produced hydroxyl group to produce a dibasic acid anhydride.
(9) 使多官能氧雜環丁烷樹脂與二羧酸反應,對產生之1級羥基加成二元酸酐之含羧基之聚酯樹脂。(9) A carboxyl-containing polyester resin is prepared by reacting a polyfunctional cyclohexane resin with a dicarboxylic acid and adding a dibasic acid anhydride to the generated primary hydroxyl group.
(10) 使1分中具有複數酚性羥基之化合物與環氧乙烷、環氧丙烷等之環氧烷反應所得之反應生成物與含不飽和基之單羧酸反應,所得之反應生成物與多元酸酐反應而得之含羧基樹脂。(10) A carboxyl-containing resin obtained by reacting a compound having multiple phenolic hydroxyl groups in one part with an alkylene oxide such as ethylene oxide or propylene oxide, and then reacting the resulting reaction product with a monocarboxylic acid containing an unsaturated group and reacting the resulting reaction product with a polyacid anhydride.
(11) 使1分中具有複數酚性羥基之化合物與碳酸伸乙酯、碳酸伸丙酯等之環狀碳酸酯化合物反應所得之反應生成物與含不飽和基之單羧酸反應,所得之反應生成物與多元酸酐反應而得之含羧基樹脂。(11) A carboxyl-containing resin obtained by reacting a compound having multiple phenolic hydroxyl groups in one part with a cyclic carbonate compound such as ethyl carbonate or propylene carbonate, the resulting reaction product with a monocarboxylic acid containing an unsaturated group, and reacting the resulting reaction product with a polyacid anhydride.
(12) 對使1分子中具有複數環氧基之環氧化合物與對-羥基苯乙醇等之1分子中具有至少1個醇性羥基與1個酚性羥基之化合物與(甲基)丙烯酸等之含不飽和基之單羧酸反應,使所得之反應生成物之醇性羥基與馬來酸酐、四氫鄰苯二甲酸酐、苯偏三甲酸酐、均苯四甲酸酐、己二酸酐等之多元酸酐反應而得之含羧基樹脂。(12) A carboxyl-containing resin obtained by reacting an epoxy compound having a plurality of epoxy groups in one molecule with a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule such as p-hydroxyphenylethanol with an unsaturated monocarboxylic acid such as (meth)acrylic acid, and reacting the alcoholic hydroxyl group of the resulting reaction product with a polyacid anhydride such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic anhydride, or the like.
(13) 於前述(1)~(12)等記載之含羧基樹脂進而加成(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸α-甲基縮水甘油酯等之分子中具有1個環氧基與1個以上(甲基)丙烯醯基之化合物而成之含羧基樹脂。(13) A carboxyl-containing resin obtained by further adding a compound having one epoxy group and one or more (meth)acryloyl groups in the molecule such as (meth)acrylate glycidyl, (meth)acrylate α-methylglycidyl, etc. to the carboxyl-containing resin described in (1) to (12) above.
上述含羧基樹脂中,較佳為(1)、(7)、(8)、(10)~(13)中記載之含羧基樹脂。Among the above carboxyl-containing resins, the carboxyl-containing resins described in (1), (7), (8), (10) to (13) are preferred.
作為具有酚性羥基之化合物,舉例為例如具有聯苯骨架或伸苯基骨架或其兩者骨架之化合物,或使用苯酚、鄰甲酚、對甲酚、間甲酚、2,3-二甲酚、2,4-二甲酚、2,5-二甲酚、2,6-二甲酚、3,4-二甲酚、3,5-二甲酚、兒茶酚、間苯二酚、對苯二酚、甲基對苯二酚、2,6-二甲基對苯二酚、三甲基對苯二酚、焦棓酚(pyrogallol)、間苯三酚等合成而成之具有各種骨架之酚樹脂。Examples of the compound having a phenolic hydroxyl group include compounds having a biphenyl skeleton or a phenylene skeleton or both skeletons, or phenol resins having various skeletons synthesized using phenol, o-cresol, p-cresol, m-cresol, 2,3-dimethylphenol, 2,4-dimethylphenol, 2,5-dimethylphenol, 2,6-dimethylphenol, 3,4-dimethylphenol, 3,5-dimethylphenol, catechol, resorcinol, hydroquinone, methylhydroquinone, 2,6-dimethylhydroquinone, trimethylhydroquinone, pyrogallol, phloroglucinol, and the like.
又,作為具有酚性羥基之化合物,舉例為例如酚酚醛清漆樹脂、烷基酚酚醛清漆樹脂、雙酚A酚醛清漆樹脂、二環戊二烯型酚樹脂、Xylok型酚樹脂、萜烯改質酚樹脂、聚乙烯酚類、雙酚F、雙酚S型酚樹脂、聚-對-羥基苯乙烯、萘酚與醛類之縮合物、二羥基萘與醛類之縮合物等之公知慣用之酚樹脂。Examples of the compound having a phenolic hydroxyl group include well-known and commonly used phenolic resins such as phenol novolac resins, alkylphenol novolac resins, bisphenol A novolac resins, dicyclopentadiene-type phenolic resins, Xylok-type phenolic resins, terpene-modified phenolic resins, polyvinylphenols, bisphenol F, bisphenol S-type phenolic resins, poly-p-hydroxystyrene, condensates of naphthol and aldehydes, and condensates of dihydroxynaphthalene and aldehydes.
作為酚樹脂之市售品可列舉為例如HF1H60 (明和化成公司製)、Phenolite TD-2090、Phenolite TD-2131(DIC公司製)、Besmol CZ-256-A(DIC公司製)、Shonol BRG-555、Shonol BRG-556(AICA公司製)、聚乙烯酚之CST70、CST90、S-1P、S-2P(丸善石油公司製)等。Commercially available products of phenolic resins include, for example, HF1H60 (manufactured by Meiwa Chemicals Co., Ltd.), Phenolite TD-2090, Phenolite TD-2131 (manufactured by DIC Corporation), Besmol CZ-256-A (manufactured by DIC Corporation), Shonol BRG-555, Shonol BRG-556 (manufactured by AICA Corporation), and polyvinyl phenol CST70, CST90, S-1P, S-2P (manufactured by Maruzen Oil Company).
(A)鹼可溶性樹脂之酸價適當為40~200 mgKOH/g之範圍,更佳為45~120 mgKOH/g之範圍。鹼可溶性樹脂之酸價為40 mgKOH/g以上時,鹼顯像變容易,另一方面,為200 mgKOH/g以下時,可容易描繪正常阻劑圖型故而較佳。(A) The acid value of the alkali-soluble resin is preferably in the range of 40 to 200 mgKOH/g, and more preferably in the range of 45 to 120 mgKOH/g. When the acid value of the alkali-soluble resin is 40 mgKOH/g or more, alkali development becomes easier. On the other hand, when the acid value is 200 mgKOH/g or less, normal resist patterns can be easily drawn, which is preferred.
(A)鹼可溶性樹脂之重量平均分子量係隨樹脂骨架而異,但較佳為1,500~150,000,更佳為1,500~ 100,000之範圍。重量平均分子量若為1,500以上,則無觸黏性能良好,曝光後之塗膜耐濕性良好,可抑制顯像時之膜減損,可抑制解像性降低。另一面、重量平均分子量若為150,000以下,則顯像性良好,儲存安定性亦優異。(A) The weight average molecular weight of the alkali-soluble resin varies depending on the resin skeleton, but is preferably in the range of 1,500 to 150,000, and more preferably in the range of 1,500 to 100,000. If the weight average molecular weight is 1,500 or more, the non-stick performance is good, the moisture resistance of the coating after exposure is good, the film deterioration during development can be suppressed, and the reduction in resolution can be suppressed. On the other hand, if the weight average molecular weight is 150,000 or less, the developing property is good and the storage stability is also excellent.
(A)鹼可溶性樹脂可單獨使用1種或組合2種以上使用。(A) The alkali-soluble resin may be used alone or in combination of two or more.
[(B)光聚合起始劑] 本發明之硬化性樹脂組成物中,作為(B)光聚合起始劑若作為光聚合起始劑或光自由基產生劑而習知之光聚合起始劑,則均可使用。作為(B)光聚合起始劑舉例為例如雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)苯基氧化膦(IGM Resins公司製之Omnirad 819)等之雙醯基氧化膦類;2,6-二甲氧基苯甲醯基二苯基氧化膦、2,6-二氯苯甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基苯基膦酸甲酯、2-甲基苯甲醯基二苯基氧化膦、特戊醯基苯基膦酸異丙酯、2,4,6-三甲基苯甲醯基二苯基氧化膦(IGM Resins公司製之Omnirad TPO H)等之單醯基氧化膦類;1-羥基-環己基苯基酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基丙醯基)苄基]苯基}-2-甲基-丙烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮等之羥基苯乙酮類;苯偶因、聯苯醯、苯偶因甲醚、苯偶因乙醚、苯偶因正丙醚、苯偶因異丙醚、苯偶因正丁醚等之苯偶因類;苯偶因烷醚類;二苯甲酮、對-甲基二苯甲酮、米氏酮、甲基二苯甲酮、4,4’-二氯二苯甲酮、4,4’-雙二乙胺基二苯甲酮等之二苯甲酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉-1-丙酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁酮-1、2-(二甲胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等之苯乙酮類;噻噸酮、2-乙基噻噸酮、2-異丙基噻噸酮、2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等之噻噸酮類;蒽醌、氯蒽醌、2-甲基蒽醌、2-乙基蒽醌、2-第三丁基蒽醌、1-氯蒽醌、2-戊基蒽醌、2-胺基蒽醌等之蒽醌類;苯乙酮二甲基縮醛、苄基二甲基縮醛等之縮醛類;4-二甲胺基苯甲酸乙酯、苯甲酸2-(二甲胺基)乙酯、對-二甲基苯甲酸乙酯等之苯甲酸酯類;1,2-辛二酮,1-[4-(苯硫基)-, 2-(O-苯甲醯基肟)]、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)等之肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙[2,6-二氟-3-(2-(1-吡啶-基)乙基)苯基]鈦等之鈦茂金屬類;苯基二硫化物2-硝基茀、丁偶因(butyroin)、茴香偶因乙醚、偶氮雙異丁腈、四甲基秋蘭姆二硫化物等。光聚合起始劑可單獨使用1種,亦可組合2種以上使用。其中較佳為肟酯類(以下亦稱為「肟酯系光聚合起始劑」),更佳為乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)。 (B)光聚合起始劑之調配量,相對於(A)鹼可溶性樹脂100質量份為例如0.01~30質量份。且肟酯系光聚合起始劑之調配量,係每光聚合起始劑總量,以固形分換算較佳為8質量%以上,更佳為12質量%以上。以8質量%以上含有,可容易達成高感度。肟酯系光聚合起始劑可單獨使用1種,亦可組合2種以上使用。[(B) Photopolymerization initiator] In the curable resin composition of the present invention, as the (B) photopolymerization initiator, any photopolymerization initiator known as a photopolymerization initiator or a photoradical generator can be used. Examples of the photopolymerization initiator (B) include bis-(2,6-dichlorobenzyl)phenylphosphine oxide, bis-(2,6-dichlorobenzyl)-2,5-dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)-4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)-1-naphthylphosphine oxide, bis-(2,6-dimethoxybenzyl)phenylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,4,4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,5-dimethylphenylphosphine oxide, bis-(2,4,6-trimethylbenzyl)phenylphosphine oxide (Omnirad manufactured by IGM Resins Co., Ltd.) 819) and the like; 2,6-dimethoxybenzyldiphenylphosphine oxide, 2,6-dichlorobenzyldiphenylphosphine oxide, methyl 2,4,6-trimethylbenzylphenylphosphine oxide, 2-methylbenzyldiphenylphosphine oxide, isopropyl tert-butylphenylphosphine oxide, 2,4,6-trimethylbenzyldiphenylphosphine oxide (Omnirad TPO manufactured by IGM Resins Co., Ltd.) H) and the like; hydroxyacetophenones such as 1-hydroxy-cyclohexyl phenyl ketone, 1-[4-(2-hydroxyethoxy)phenyl]-2-hydroxy-2-methyl-1-propane-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methylpropionyl)benzyl]phenyl}-2-methyl-propane-1-one, 2-hydroxy-2-methyl-1-phenylpropane-1-one, etc.; benzoin, biphenyl acyl, benzoin methyl ether, benzoin ethyl ether, benzoin Benzoins such as n-propyl ether, isopropyl ether, and n-butyl ether; benzoin alkyl ethers; benzophenones such as benzophenone, p-methylbenzophenone, Michler's ketone, methylbenzophenone, 4,4'-dichlorobenzophenone, and 4,4'-bis(diethylamino)benzophenone; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexylphenylketone, 2-methyl-1-[4-( Acetophenones such as 2-(4-methylthio)phenyl]-2-pyroline-1-propanone, 2-benzyl-2-dimethylamino-1-(4-pyrolinephenyl)-butanone-1, 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-pyroline)phenyl]-1-butanone, N,N-dimethylaminoacetophenone, etc.; thiothione, 2-ethylthiothione, 2-isopropylthiothione, 2,4-dimethylthiothione, 2,4-diethylthiothione, 2-chlorothiothione , 2,4-diisopropylthioxanthene, etc.; anthraquinones such as anthraquinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-amylanthraquinone, 2-aminoanthraquinone, etc.; acetals such as acetophenone dimethyl acetal, benzyl dimethyl acetal, etc.; benzoic acid esters such as ethyl 4-dimethylaminobenzoate, 2-(dimethylamino)ethyl benzoate, ethyl p-dimethylbenzoate, etc.; 1,2-octanedione, 1-[4-(phenylthio)-, Oxime esters such as bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium and bis(cyclopentadienyl)-bis[2,6-difluoro-3-(2-(1-pyridin-yl)ethyl)phenyl]titanium; phenyl disulfide, 2-nitrofluorene, butyroin, anisole ether, azobisisobutyronitrile, tetramethylthiuram disulfide, etc. The photopolymerization initiator may be used alone or in combination of two or more. Among them, oxime esters (hereinafter also referred to as "oxime ester photopolymerization initiators") are preferred, and acetone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-, 1-(O-acetyl oxime) is more preferred. The amount of the (B) photopolymerization initiator is, for example, 0.01 to 30 parts by mass relative to 100 parts by mass of the alkali-soluble resin (A). The amount of the oxime ester photopolymerization initiator is preferably 8% by mass or more, and more preferably 12% by mass or more, per the total amount of the photopolymerization initiator, in terms of solid content. When the amount is 8% by mass or more, high sensitivity can be easily achieved. The oxime ester-based photopolymerization initiator may be used alone or in combination of two or more.
作為肟酯系光聚合起始劑,若為習知之肟酯系光聚合起始劑則可使用任一者。作為市售品舉例為例如日本BASF公司製之Irgacure OXE01(1,2-辛二酮,1-[4-(苯硫基)-, 2-(O-苯甲醯基肟)])、Irgacure OXE02(乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟))、ADEKA公司製N-1919、NCI-831、常州強力電子新材料有限公司製之TR-PBG-304等。As the oxime ester photopolymerization initiator, any known oxime ester photopolymerization initiator may be used. Examples of commercially available products include Irgacure OXE01 (1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzoyl oxime)]) and Irgacure OXE02 (ethyl ketone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-, 1-(O-acetyl oxime)) manufactured by BASF Japan, N-1919 and NCI-831 manufactured by ADEKA, and TR-PBG-304 manufactured by Changzhou Qiangli Electronic New Materials Co., Ltd.
又,亦可較佳地使用分子內具有2個肟酯基之起始劑,具體舉例為具有以下述通式表示之咔唑構造之肟酯化合物。 (式中,X表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、苯基、苯基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具有碳數1~8之烷基之烷基胺基或二烷基胺基取代)、萘基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具有碳數1~8之烷基之烷基胺基或二烷基胺基取代),Y、Z分別獨立表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、鹵基、苯基、苯基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具有碳數1~8之烷基之烷基胺基或二烷基胺基取代)、萘基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具有碳數1~8之烷基之烷基胺基或二烷基胺基取代)、蒽基、吡啶基、苯并呋喃基、苯并噻吩基,Ar表示單鍵、或碳數1~10之伸烷基、伸乙烯基、伸苯基、伸聯苯基、伸吡啶基、伸萘基、噻吩基、伸蒽基、伸噻吩基、伸呋喃基、2,5-吡咯二基、4,4’-二苯基乙烯二基、4,2’-苯乙烯二基,n表示0~1之整數)。In addition, an initiator having two oxime ester groups in the molecule can also be preferably used, and a specific example is an oxime ester compound having a carbazole structure represented by the following general formula. (wherein, X represents a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, a phenyl group (substituted by an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, an alkylamino group having an alkyl group having 1 to 8 carbon atoms, or a dialkylamino group), a naphthyl group (substituted by an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, an alkylamino group having an alkyl group having 1 to 8 carbon atoms, or a dialkylamino group), Y and Z each independently represent a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a halogen group, a phenyl group, a phenyl group (substituted by an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, an alkylamino group having an alkyl group having 1 to 8 carbon atoms, or a dialkylamino group) substituted with an alkyl radical having 1 to 8 carbon atoms, an alkylamino radical or a dialkylamino radical having an alkyl radical having 1 to 8 carbon atoms), naphthyl (substituted with an alkyl radical having 1 to 17 carbon atoms, an alkoxy radical having 1 to 8 carbon atoms, an amino radical, an alkylamino radical or a dialkylamino radical having an alkyl radical having 1 to 8 carbon atoms), anthracenyl, pyridyl, benzofuranyl, benzothienyl, Ar represents a single bond, or an alkylene radical having 1 to 10 carbon atoms, vinylene radical, phenylene radical, biphenylene radical, pyridylene radical, naphthylene radical, thienyl, anthracene radical, thienylene radical, furanyl, 2,5-pyrrolediyl, 4,4'-diphenylethylenediyl, 4,2'-phenylenediyl, and n represents an integer from 0 to 1).
尤其,前述通式中,較佳X、Y分別為甲基或乙基,Z為甲基或苯基,n為0,Ar為單鍵,或伸苯基、伸萘基、噻吩基或伸噻吩基。In particular, in the above general formula, preferably X and Y are methyl or ethyl, respectively, Z is methyl or phenyl, n is 0, Ar is a single bond, or phenylene, naphthylene, thienyl or thienylene.
又,作為較佳之咔唑肟酯化合物,亦可舉例為以下述通式表示之化合物。 (式中,R1 表示碳原子數1~4之烷基或可經硝基、鹵原子或碳原子數1~4之烷基取代之苯基, R2 表示碳原子數1~4之烷基、碳原子數1~4之烷氧基或可經碳原子數1~4之烷基或烷氧基取代之苯基, R3 表示可藉氧原子或硫原子連結,可經可被苯基取代之碳原子數1~20之烷基、碳原子數1~4之烷氧基取代之苄基, R4 表示硝基或以X-C(=O)表示之氰基,X表示可經碳原子數1~4之烷基取代之芳基、噻吩基、嗎啉基、硫苯基或以下述式表示之構造), Furthermore, as preferred carbazole oxime ester compounds, compounds represented by the following general formula can also be exemplified. (In the formula, R1 represents an alkyl group having 1 to 4 carbon atoms or a phenyl group which may be substituted by a nitro group, a halogen atom or an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or a phenyl group which may be substituted by an alkyl group or an alkoxy group having 1 to 4 carbon atoms, R3 represents a benzyl group which may be linked via an oxygen atom or a sulfur atom and may be substituted by an alkyl group having 1 to 20 carbon atoms or an alkoxy group having 1 to 4 carbon atoms which may be substituted by a phenyl group, R4 represents a nitro group or a cyano group represented by XC(=O), and X represents an aryl group which may be substituted by an alkyl group having 1 to 4 carbon atoms, a thienyl group, a morpholinyl group, a thiophenyl group or a structure represented by the following formula)
此外,可舉例為日本特開2004-359639號公報、日本特開2005-097141號公報、日本特開2005-220097號公報、日本特開2006-160634號公報、日本特開2008-094770號公報、日本特表2008-509967號公報、日本特開2009-040762號公報、日本特開2011-80036號公報記載之咔唑肟酯化合物等。In addition, examples include carbazole oxime ester compounds described in Japanese Patent Application Publication Nos. 2004-359639, 2005-097141, 2005-220097, 2006-160634, 2008-094770, 2008-509967, 2009-040762, and 2011-80036.
[(C)熱硬化性樹脂] 本發明之硬化性樹脂組成物藉由包含熱硬化性樹脂,可期待耐熱性提高。熱硬化性樹脂可單獨使用1種或可組合2種以上使用。作為熱硬化性樹脂可使用任何習知者。例如可使用三聚氰胺樹脂、苯胍胺樹脂、三聚氰胺衍生物、苯胍胺衍生物等之胺基樹脂、異氰酸酯化合物、封端異氰酸酯化合物、環碳酸酯化合物、環氧化合物、氧雜環丁烷化合物、環硫樹脂、雙馬來醯亞胺、碳二醯亞胺樹脂等之習知熱硬化性成分。特佳為分子中具有複數環狀醚基或環狀硫醚基(以下簡稱為環狀(硫)醚基)之熱硬化性樹脂。[(C) Thermosetting resin] The curable resin composition of the present invention can be expected to have improved heat resistance by containing a thermosetting resin. The thermosetting resin can be used alone or in combination of two or more. Any known thermosetting resin can be used. For example, known thermosetting components such as melamine resin, benzoguanamine resin, melamine derivative, benzoguanamine derivative, etc., amino resin, isocyanate compound, blocked isocyanate compound, cyclocarbonate compound, epoxy compound, oxycyclobutane compound, cyclosulfide resin, dimaleimide, carbodiimide resin, etc. can be used. Particularly preferred are thermosetting resins having a plurality of cyclic ether groups or cyclic thioether groups (hereinafter referred to as cyclic (thio)ether groups) in the molecule.
上述之分子中具有複數環狀(硫)醚基之熱硬化性樹脂較佳為分子中具有複數個3、4或5員環之環狀(硫)醚基之化合物,舉例為例如分子內具有複數環氧基之化合物,亦即多官能環氧化合物、分子內具有複數氧雜環丁基之化合物,亦即多官能氧雜環丁烷化合物、分子內具有複數硫醚基之化合物,亦即環硫樹脂等。The thermosetting resin having a plurality of cyclic (thio)ether groups in the above-mentioned molecule is preferably a compound having a plurality of 3-, 4- or 5-membered cyclic (thio)ether groups in the molecule, for example, a compound having a plurality of epoxy groups in the molecule, i.e., a polyfunctional epoxy compound, a compound having a plurality of oxycyclobutyl groups in the molecule, i.e., a polyfunctional oxycyclobutane compound, a compound having a plurality of thioether groups in the molecule, i.e., an epoxide resin, etc.
作為多官能環氧化合物,舉例為環氧化植物油;雙酚A型環氧樹脂;氫醌型環氧樹脂;雙酚型環氧樹脂;硫醚型環氧樹脂;溴化環氧樹脂;酚醛清漆型環氧樹脂;聯酚酚醛清漆型環氧樹脂;雙酚F型環氧樹脂;氫化雙酚A型環氧樹脂;縮水甘油胺型環氧樹脂;乙內醯脲型環氧樹脂;脂環式環氧樹脂;三羥基苯基甲烷型環氧樹脂;聯二甲酚型或聯酚型環氧樹脂或該等之混合物;雙酚S型環氧樹脂;雙酚A酚醛清漆型環氧樹脂;四羥苯基乙烷型環氧樹脂;雜環式環氧樹脂;鄰苯二甲酸二縮水甘油酯樹脂;四縮水甘油基二甲苯醯基乙烷樹脂;含萘基之環氧樹脂;具有二環戊二烯骨架之環氧樹脂;甲基丙烯酸縮水甘油酯共聚合系環氧樹脂;環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯之共聚合環氧樹脂;環氧改質之聚丁二烯橡膠衍生物;CTBN改質環氧樹脂等,但不限於該等。該等環氧化合物可單獨使用1種或組合2種以上使用。該等中特佳為酚醛清漆型環氧樹脂、雙酚型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂、聯酚酚醛清漆型環氧樹脂、萘型環氧樹脂或該等之混合物。Examples of the polyfunctional epoxy compound include epoxidized vegetable oil; bisphenol A type epoxy resin; hydroquinone type epoxy resin; bisphenol type epoxy resin; thioether type epoxy resin; brominated epoxy resin; novolac type epoxy resin; biphenol novolac type epoxy resin; bisphenol F-type epoxy resin; hydrogenated bisphenol A-type epoxy resin; glycidylamine-type epoxy resin; hydantoin-type epoxy resin; alicyclic epoxy resin; trihydroxyphenylmethane-type epoxy resin; dimethylphenol-type or diphenol-type epoxy resin or mixtures thereof; bisphenol S-type epoxy resin Epoxy resin; bisphenol A novolac type epoxy resin; tetrahydroxyphenylethane type epoxy resin; heterocyclic epoxy resin; diglycidyl phthalate resin; tetraglycidyl dimethylbenzene ethyl resin; naphthyl-containing epoxy resin; epoxy resin having a dicyclopentadiene skeleton; methacrylate glycidyl ester copolymerized epoxy resin; epoxy resin copolymerized with cyclohexylmaleimide and methacrylate glycidyl ester; epoxy-modified polybutadiene rubber derivative; CTBN-modified epoxy resin, etc., but not limited to the above. The epoxy compounds may be used alone or in combination of two or more. Particularly preferred among these are novolac type epoxy resins, bisphenol type epoxy resins, dimethylol type epoxy resins, biphenol type epoxy resins, biphenol novolac type epoxy resins, naphthalene type epoxy resins or mixtures thereof.
作為氧雜環丁烷化合物舉例為雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]苯、丙烯酸(3-甲基-3-氧雜環丁基)甲酯、丙烯酸(3-乙基-3-氧雜環丁基)甲酯、甲基丙烯酸(3-甲基-3-氧雜環丁基)甲酯、甲基丙烯酸(3-乙基-3-氧雜環丁基)甲酯或該等之寡聚物或共聚物等之多官能氧雜環丁烷類,此外舉例為氧雜環丁醇與酚醛清漆樹脂、聚(p-羥基苯乙烯)、卡多(cardo)型雙酚類、杯芳烴類、間苯二酚杯芳烴(calix resorcinarene)、或倍半矽氧烷等之具有羥基之樹脂之醚化物等。此外,亦舉例為具有氧雜環丁環之不飽和單體與(甲基)丙烯酸烷酯之共聚物等。Examples of the cyclohexane compound include bis[(3-methyl-3-cyclohexanebutylmethoxy)methyl]ether, bis[(3-ethyl-3-cyclohexanebutylmethoxy)methyl]ether, 1,4-bis[(3-methyl-3-cyclohexanebutylmethoxy)methyl]benzene, 1,4-bis[(3-ethyl-3-cyclohexanebutylmethoxy)methyl]benzene, (3-methyl-3-cyclohexanebutyl)methyl acrylate, and (3-methyl-3-cyclohexanebutyl)methyl acrylate. Examples include polyfunctional cyclobutanes such as (3-ethyl-3-cyclooxobutyl)methyl ester, (3-methyl-3-cyclooxobutyl)methyl methacrylate, (3-ethyl-3-cyclooxobutyl)methyl methacrylate, or oligomers or copolymers thereof, and ethers of cyclobutanes with novolac resins, poly(p-hydroxystyrene), cardo-type bisphenols, calixarene, calix resorcinarene, or silsesquioxane resins having hydroxyl groups. Examples include copolymers of unsaturated monomers having cyclooxobutyl rings and (meth) alkyl acrylates.
作為分子中具有複數個環狀硫醚基之化合物可列舉為雙酚A型環硫樹脂等。且,亦可使用利用相同合成方法,將酚醛清漆型環氧樹脂之環氧基的氧原子取代為硫原子之環硫樹脂等。此等分子中具有複數個環狀(硫)醚基之熱硬化性樹脂之調配量,較佳為相對於(A)鹼可溶性樹脂之羧基或酚性羥基等之鹼可溶性基1當量,環狀(硫)醚基為0.6~2.5當量,更佳為0.8~2.0當量。Examples of compounds having multiple cyclic sulfide groups in the molecule include bisphenol A type epoxide sulfide resins. In addition, epoxide sulfide resins in which the oxygen atom of the epoxy group of a novolac type epoxy resin is replaced with a sulfur atom using the same synthesis method may also be used. The amount of the thermosetting resin having multiple cyclic (sulfide) ether groups in the molecule is preferably 0.6 to 2.5 equivalents of the cyclic (sulfide) ether group, more preferably 0.8 to 2.0 equivalents, relative to 1 equivalent of the alkali-soluble group such as the carboxyl group or phenolic hydroxyl group of the alkali-soluble resin (A).
作為三聚氰胺衍生物、苯胍胺衍生物等之胺基樹脂,舉例為羥甲基三聚氰胺化合物、羥甲基苯胍胺化合物、羥甲基甘脲化合物及羥甲基脲化合物等。Examples of the amino resin of melamine derivatives, benzoguanamine derivatives, etc. include hydroxymethylmelamine compounds, hydroxymethylbenzoguanamine compounds, hydroxymethylglycoluril compounds, and hydroxymethylurea compounds.
作為異氰酸酯化合物可調配聚異氰酸酯化合物。作為聚異氰酸酯化合物舉例為4,4’-二苯基甲烷二異氰酸酯、2,4-甲苯二異氰酸酯、2,6-甲苯二異氰酸酯、萘-1,5-二異氰酸酯、鄰-二甲苯二異氰酸酯、間-二甲苯二異氰酸酯及2,4-甲苯二聚物等之芳香族聚異氰酸酯;四亞甲基二異氰酸酯、六亞甲基二異氰酸酯、亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、4,4-亞甲基雙(環己基異氰酸酯)及異佛酮二異氰酸酯等之脂肪族聚異氰酸酯;雙環庚烷三異氰酸酯等之脂環式聚異氰酸酯;以及先前舉例之異氰酸酯化合物之加成體、縮二脲體及異氰尿酸酯體等。As the isocyanate compound, a polyisocyanate compound can be prepared. Examples of the polyisocyanate compound include aromatic polyisocyanates such as 4,4'-diphenylmethane diisocyanate, 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, naphthalene-1,5-diisocyanate, o-xylene diisocyanate, m-xylene diisocyanate, and 2,4-toluene dimer; tetramethylene diisocyanate, hexamethylene diisocyanate, Aliphatic polyisocyanates such as methyl diisocyanate, methylene diisocyanate, trimethylhexamethylene diisocyanate, 4,4-methylenebis(cyclohexyl isocyanate) and isophorone diisocyanate; alicyclic polyisocyanates such as dicycloheptane triisocyanate; and adducts, biuret forms and isocyanurate forms of the isocyanate compounds listed above.
作為封端異氰酸酯化合物可使用異氰酸酯化合物與異氰酸酯封端劑之加成反應生成物。作為可與異氰酸酯封端劑反應之異氰酸酯化合物舉例為例如上述之聚異氰酸酯化合物等。作為異氰酸酯封端劑舉例為例如酚系封端劑;內醯胺系封端劑;活性亞甲基系封端劑;醇系封端劑;肟系封端劑;硫醇系封端劑;酸醯胺系封端劑;醯亞胺系封端劑;胺系封端劑;咪唑系封端劑;亞胺系封端劑等。As the blocked isocyanate compound, an addition reaction product of an isocyanate compound and an isocyanate blocking agent can be used. Examples of isocyanate compounds that can react with an isocyanate blocking agent include the above-mentioned polyisocyanate compounds. Examples of isocyanate blocking agents include phenol-based blocking agents, lactam-based blocking agents, active methylene-based blocking agents, alcohol-based blocking agents, oxime-based blocking agents, thiol-based blocking agents, amide-based blocking agents, imide-based blocking agents, amine-based blocking agents, imidazole-based blocking agents, and imine-based blocking agents.
熱硬化性樹脂可單獨使用1種或組合2種以上使用。熱硬化性樹脂之調配量,相對於(A)鹼可溶性樹脂之固形分100質量份,較佳為20~60質量份,更佳為30~50質量份。為20質量份以上時,耐熱性優異。60質量份以下時,保存安定性隨之提高。Thermosetting resins may be used alone or in combination of two or more. The amount of the thermosetting resin to be added is preferably 20 to 60 parts by mass, more preferably 30 to 50 parts by mass, relative to 100 parts by mass of the solid content of the alkali-soluble resin (A). When the amount is 20 parts by mass or more, the heat resistance is excellent. When the amount is 60 parts by mass or less, the storage stability is improved.
[(D)著色劑] 著色劑可包含紅色著色劑、綠色著色劑、藍色著色劑、黃色著色劑、白色著色劑、黑色著色劑、其他顏色之著色劑的一種或適當組合兩種以上。顏料、染料、色素均可。具體可舉例為附有彩色指數(C.I.;The Society of Dyers and Colourists發行)編號者。但,基於減低環境負荷及對人體影響之觀點,較佳為不含鹵素之著色劑。[(D) Colorants] Colorants may include one or a suitable combination of two or more of red colorants, green colorants, blue colorants, yellow colorants, white colorants, black colorants, or colorants of other colors. Pigments, dyes, and pigments are all acceptable. Specifically, a colorant with a color index (C.I.; issued by The Society of Dyers and Colourists) number may be used. However, from the perspective of reducing environmental impact and impact on the human body, a halogen-free colorant is preferred.
作為紅色著色劑舉例為單偶氮系、雙偶氮系、偶氮色澱系、苯并咪唑酮系、苝系、二酮吡咯并吡咯系、縮合偶氮系、蒽醌系、喹吖啶酮系等。 作為綠色著色劑有同樣經金屬取代或無取代之酞青系、蒽醌系、苝系。 作為藍色著色劑可為顏料、染料、色素之任一者,其中較佳為不含鹵原子者。作為藍色著色劑有酞青系、蒽醌系,顏料系系歸類為顏料(Pigment)之化合物,具體可舉例為如下述者;顏料藍15、15:1、15:2、15:3、15:4、15:6、16、60。作為染料系可使用溶劑藍35、63、68、70、83、87、94、97、122、136、67、70等。上述以外,亦可使用金屬取代或未取代之酞青化合物。藍色著色劑可單獨使用1種,亦可併用2種以上。 作為黃色著色劑舉例為單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚酮系、蒽醌系等。 作為白色著色劑舉例為金紅石型、銳鈦礦型等之氧化鈦等。 作為黑色著色劑舉例為鈦黑系、碳黑系、石墨系、氧化鐵系、蒽醌系、氧化鈷系、氧化銅系、錳系、氧化銻系、氧化鎳系、苝系、苯胺系之顏料、硫化鉬、硫化鉍等。 此外,基於調整色調之目的,亦可添加紫色、橙色、茶色等之著色劑。 於成為使CZ處理後之銅上形成之塗膜因隱蔽性優異而加熱後之色調變化少且解像性優異之可鹼顯像之硬化性樹脂組成物時,著色劑較佳組合紅色著色劑、黃色著色劑、藍色著色劑、黑色著色劑。 該情況之(D)著色劑的調配量,相對於(A)鹼可溶性樹脂之固形分100質量份,較佳黑色著色劑為0.01~0.04質量份,藍色著色劑為1.10~2.45質量份,黃色著色劑為0.01~ 0.08質量份,紅色著色劑為0.60~2.00質量份之範圍,更佳黑色著色劑為0.02~0.03質量份,藍色著色劑為1.40~2.20質量份,黃色著色劑為0.03~0.06質量份,紅色著色劑為0.75~1.20質量份之範圍Examples of red colorants include monoazo, disazo, azochrome, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. Green colorants include phthalocyanine, anthraquinone, and perylene, which are similarly substituted with or without metal. Blue colorants may be any of pigments, dyes, and pigments, preferably those that do not contain halogen atoms. Blue colorants include phthalocyanine and anthraquinone. Pigments are compounds classified as pigments, and specific examples include: Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, and 60. As dyes, solvent blue 35, 63, 68, 70, 83, 87, 94, 97, 122, 136, 67, 70, etc. can be used. In addition to the above, metal-substituted or unsubstituted phthalocyanine compounds can also be used. Blue colorants can be used alone or in combination of two or more. Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, etc. Examples of white colorants include rutile-type, rutile-type, etc. titanium oxides, etc. Examples of black coloring agents include titanium black, carbon black, graphite, iron oxide, anthraquinone, cobalt oxide, copper oxide, manganese, antimony oxide, nickel oxide, perylene, aniline pigments, molybdenum sulfide, bismuth sulfide, etc. In addition, for the purpose of adjusting the color tone, purple, orange, brown, etc. coloring agents may also be added. When forming a hardening resin composition that can be developed by alkali and has excellent hiding power and little color change after heating and excellent resolution of the coating formed on copper after CZ treatment, the coloring agent is preferably a combination of red coloring agent, yellow coloring agent, blue coloring agent, and black coloring agent. In this case, the amount of the colorant (D) is preferably 0.01-0.04 mass parts for black colorant, 1.10-2.45 mass parts for blue colorant, 0.01-0.08 mass parts for yellow colorant, and 0.60-2.00 mass parts for red colorant, and more preferably 0.02-0.03 mass parts for black colorant, 1.40-2.20 mass parts for blue colorant, 0.03-0.06 mass parts for yellow colorant, and 0.75-1.20 mass parts for red colorant, relative to 100 mass parts of the solid content of the alkali-soluble resin (A).
[無機填料] 本發明之硬化性樹脂組成物較佳包含無機填料。無機填料並未特別限定,可使用習知慣用之無機填料,可使用例如氧化矽、結晶性氧化矽、紐伯格矽土、氫氧化鋁、玻璃粉末、滑石、黏土、碳酸鎂、碳酸鈣、天然雲母、合成雲母、氫氧化鋁、硫酸鋇、鈦酸鋇、氧化鐵、非纖維狀玻璃、水滑石、礦渣綿、矽酸鋁、矽酸鈣、鋅白等之無機填料之一種或組合兩種以上。其中較佳為氧化矽,積於表面積小,應力分散於全體,不易成為龜裂之起點,更佳為球狀氧化矽。[Inorganic filler] The curable resin composition of the present invention preferably contains an inorganic filler. The inorganic filler is not particularly limited, and conventionally used inorganic fillers can be used, such as silicon oxide, crystalline silicon oxide, Newberg silica, aluminum hydroxide, glass powder, talc, clay, magnesium carbonate, calcium carbonate, natural mica, synthetic mica, aluminum hydroxide, barium sulfate, barium titanate, iron oxide, non-fibrous glass, hydrotalcite, slag wool, aluminum silicate, calcium silicate, zinc white, etc., or a combination of two or more inorganic fillers. Silicon oxide is preferred, as it accumulates on the surface with a small area, and the stress is dispersed throughout the body, and it is not easy to become the starting point of turtle cracks. Spherical silicon oxide is more preferred.
無機填料亦可經表面處理。此處,所謂無機填料之表面處理係指用以提高與樹脂成分之相溶性之處理。無機填料之表面處理可係對無機填料表面導入硬化性反應基之表面處理,亦可為不導入之表面處理之任一者。此處,硬化性基若為與(A)鹼可溶性樹脂或(C)熱硬化性樹脂等之硬化性化合物進行硬化反應之基,則未特別限定,可為硬化性反應基亦可為熱硬化性反應基。作為硬化性反應基舉例為甲基丙烯酸基、丙烯酸基、乙烯基、苯乙烯基等,作為熱硬化性反應基舉例為環氧基、胺基、羥基、羧基、異氰酸酯基、亞胺基、氧雜環丁基、巰基、甲氧基甲基、甲氧基乙基、乙氧基甲基、乙氧基乙基、噁唑啉基等。於無機填料表面導入硬化性反應基之方法並未特別限定,只要使用習知慣用方法導入即可,以具有硬化性反應基之表面處理劑例如具有硬化性反應基作為有機基之偶合劑等處理無機填料表面即可。作為偶合劑可使用矽烷偶合劑、鈦偶合劑、鋯偶合劑、鋁偶合劑等。又,作為不具有硬化性反應基之經表面處理的無機填料舉例為例如經氧化矽-氧化鋁表面處理、鈦酸酯系偶合劑處理、鋁酸酯系偶合劑處理、有機處理等之無機填料等。The inorganic filler may also be surface treated. Here, the surface treatment of the inorganic filler refers to a treatment for improving the compatibility with the resin component. The surface treatment of the inorganic filler may be a surface treatment for introducing a curing reactive group into the surface of the inorganic filler, or a surface treatment for not introducing a curing reactive group. Here, the curing group is not particularly limited if it is a group that undergoes a curing reaction with a curing compound such as (A) an alkali-soluble resin or (C) a thermosetting resin, and may be a curing reactive group or a thermosetting reactive group. Examples of curable reactive groups include methacrylic acid, acrylic acid, vinyl, styrene, etc., and examples of thermosetting reactive groups include epoxy, amino, hydroxyl, carboxyl, isocyanate, imino, cyclobutyl, oxadiazole, methoxymethyl, methoxyethyl, ethoxymethyl, ethoxyethyl, oxazoline, etc. The method of introducing the curable reactive group on the surface of the inorganic filler is not particularly limited, and the method can be introduced by a conventional method, such as treating the surface of the inorganic filler with a surface treatment agent having a curable reactive group, such as a coupling agent having a curable reactive group as an organic group. As the coupling agent, a silane coupling agent, a titanium coupling agent, a zirconium coupling agent, an aluminum coupling agent, etc. can be used. Examples of the surface-treated inorganic filler having no curable reactive group include inorganic fillers surface-treated with silica-alumina, treated with a titanium ester coupling agent, treated with an aluminate coupling agent, or treated with an organic agent.
無機填料可單獨使用1種或可組合2種以上使用。無機填料之調配量,相對於(A)鹼可溶性樹脂之固形分100質量份,較佳為80~450質量份,更佳為100~200質量份。為80質量份以上時,耐熱性優異。為450質量份以下時,解像性更優異。The inorganic filler may be used alone or in combination of two or more. The amount of the inorganic filler is preferably 80 to 450 parts by mass, more preferably 100 to 200 parts by mass, relative to 100 parts by mass of the solid content of the alkali-soluble resin (A). When the amount is 80 parts by mass or more, the heat resistance is excellent. When the amount is 450 parts by mass or less, the resolution is more excellent.
(具有乙烯性不飽和基之化合物) 本發明之硬化性樹脂組成物可含有與(A)鹼可溶性樹脂不同,作為反應性稀釋劑發揮功能者,具體為具有乙烯性不飽和基之化合物。作為具有乙烯性不飽和基之化合物可使用習知慣用之光硬化性單體的光聚合性寡聚物、光聚合性乙烯基單體等。(Compounds with ethylenically unsaturated groups) The curable resin composition of the present invention may contain a compound having ethylenically unsaturated groups, which functions as a reactive diluent, unlike the alkali-soluble resin (A). As the compound having ethylenically unsaturated groups, photopolymerizable oligomers of conventionally used photocurable monomers, photopolymerizable vinyl monomers, etc. may be used.
作為光聚合性寡聚物可舉例不飽和聚酯系寡聚物、(甲基)丙烯酸酯系寡聚物等。作為(甲基)丙烯酸酯系寡聚物,可舉例酚酚醛清漆環氧(甲基)丙烯酸酯、甲酚酚醛清漆環氧(甲基)丙烯酸酯、雙酚型環氧(甲基)丙烯酸酯等之環氧(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯、環氧胺基甲酸酯(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、聚丁二烯改質(甲基)丙烯酸酯等。Examples of the photopolymerizable oligomer include unsaturated polyester oligomers and (meth)acrylate oligomers. Examples of the (meth)acrylate oligomer include epoxy (meth)acrylates such as phenol novolac epoxy (meth)acrylate, cresol novolac epoxy (meth)acrylate, and bisphenol epoxy (meth)acrylate, urethane (meth)acrylate, epoxyurethane (meth)acrylate, polyester (meth)acrylate, polyether (meth)acrylate, and polybutadiene modified (meth)acrylate.
作為光聚合性乙烯基單體,可使用習知慣用者,例如可列舉出苯乙烯、氯苯乙烯、α-甲基苯乙烯等之苯乙烯衍生物;乙酸乙烯酯、丁酸乙烯酯或苯甲酸乙烯酯等之乙烯基酯類;乙烯基異丁基醚、乙烯基正丁基醚、乙烯基第三丁基醚、乙烯基正戊基醚、乙烯基異戊基醚、乙烯基正十八烷基醚、乙烯基環己基醚、乙二醇單丁基乙烯基醚、三乙二醇單甲基乙烯基醚等之乙烯基醚類;丙烯醯胺、甲基丙烯醯胺、N-羥基甲基丙烯醯胺、N-羥基甲基甲基丙烯醯胺、N-甲氧基甲基丙烯醯胺、N-乙氧基甲基丙烯醯胺、N-丁氧基甲基丙烯醯胺等之(甲基)丙烯醯胺類;異氰尿酸三烯丙酯、鄰苯二甲酸二烯丙酯、間苯二甲酸二烯丙酯等之烯丙基化合物;(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸苯氧基乙酯等之(甲基)丙烯酸之酯類;(甲基)丙烯酸羥基乙酯、(甲基)丙烯酸羥基丙酯、季戊四醇三(甲基)丙烯酸酯等之(甲基)丙烯酸羥基烷酯類;(甲基)丙烯酸甲氧基乙酯、(甲基)丙烯酸乙氧基乙酯等之烷氧基烷二醇單(甲基)丙烯酸酯類;乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯類,新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等之伸烷基多元醇聚(甲基)丙烯酸酯;二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、乙氧化三羥甲基丙烷三丙烯酸酯、丙氧化三羥甲基丙烷三(甲基)丙烯酸酯等之聚氧烷二醇聚(甲基)丙烯酸酯類;羥基特戊酸新戊二醇酯二(甲基)丙烯酸酯等之聚(甲基)丙烯酸酯類;三[(甲基)丙烯醯氧基乙基]異氰尿酸酯等之異氰尿酸酯型聚(甲基)丙烯酸酯類等。該等可合於要求特性而單獨或組合2種以上使用。As the photopolymerizable vinyl monomer, those commonly used can be used, for example, styrene derivatives such as styrene, chlorostyrene, α-methylstyrene, etc.; vinyl esters such as vinyl acetate, vinyl butyrate, or vinyl benzoate, etc.; vinyl ethers such as vinyl isobutyl ether, vinyl n-butyl ether, vinyl tert-butyl ether, vinyl n-pentyl ether, vinyl isopentyl ether, vinyl n-octadecyl ether, vinyl cyclohexyl ether, ethylene glycol monobutyl vinyl ether, triethylene glycol monomethyl vinyl ether, etc.; acrylamide, methacrylamide, N-hydroxymethyl vinyl ether, etc. (Meth)acrylamides such as 1,2-dimethacrylamide, N-hydroxymethyl methacrylamide, N-methoxy methacrylamide, N-ethoxy methacrylamide, N-butoxy methacrylamide, etc.; allyl compounds such as triallyl isocyanurate, diallyl phthalate, diallyl isophthalate, etc.; (meth)acrylic acids such as 2-ethylhexyl (meth)acrylate, lauryl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, isobornyl (meth)acrylate, phenyl (meth)acrylate, phenoxyethyl (meth)acrylate, etc. Esters; hydroxyalkyl (meth)acrylates such as hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, and pentaerythritol tri(meth)acrylate; alkoxyalkylene glycol mono(meth)acrylates such as methoxyethyl (meth)acrylate and ethoxyethyl (meth)acrylate; ethylene glycol di(meth)acrylate, butanediol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, trihydroxymethylpropane tri(meth)acrylate, pentaerythritol tetra(meth)acrylate; ester, dipentaerythritol hexa(meth)acrylate and the like; polyoxyalkylene glycol poly(meth)acrylates such as diethylene glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, ethoxylated trihydroxymethylpropane triacrylate, propoxylated trihydroxymethylpropane tri(meth)acrylate and the like; poly(meth)acrylates such as hydroxypivalic acid neopentyl glycol ester di(meth)acrylate and the like; isocyanurate type poly(meth)acrylates such as tri[(meth)acryloyloxyethyl] isocyanurate and the like. These may be used alone or in combination of two or more depending on the required properties.
具有乙烯性不飽和基之化合物可單獨使用1種或可組合2種以上使用。具有乙烯性不飽和基之化合物之調配量,相對於(A)鹼可溶性樹脂之固形分100質量份,較佳為3~25質量份,更佳為5~20質量份。為3質量份以上時,有助於高感度化。為25質量份以下時,解像性良好。The compound having an ethylenically unsaturated group may be used alone or in combination of two or more. The amount of the compound having an ethylenically unsaturated group is preferably 3 to 25 parts by mass, more preferably 5 to 20 parts by mass, relative to 100 parts by mass of the solid content of the alkali-soluble resin (A). When it is 3 parts by mass or more, it contributes to high sensitivity. When it is 25 parts by mass or less, the resolution is good.
(熱硬化觸媒) 本發明之硬化性樹脂組成物可含有熱硬化觸媒。作為此等熱硬化觸媒舉例為例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;二氰二醯胺、苄基二甲基胺、4-(二甲胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等之胺化合物、己二酸二醯肼、癸二酸二醯肼等之醯肼化合物;三苯基膦等之磷化合物等。且,亦可使用胍胺、乙醯胍胺、苯胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪•異氰尿酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪•異氰尿酸加成物等之S-三嗪衍生物,較好與熱硬化觸媒併用該等亦可作為密著性賦予劑發揮功能之化合物。且若為可作為熱硬化性觸媒使用者,則亦可為有機填料。(Thermosetting catalyst) The curable resin composition of the present invention may contain a thermosetting catalyst. Examples of such thermosetting catalysts include imidazole derivatives such as imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole, etc.; amine compounds such as dicyandiamide, benzyldimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine, etc.; hydrazide compounds such as dihydrazide of adipic acid and dihydrazide of sebacic acid; phosphorus compounds such as triphenylphosphine, etc. In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine•isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine•isocyanuric acid adduct, and other S-triazine derivatives can also be used, preferably in combination with a thermosetting catalyst. These compounds can also function as adhesion imparting agents. And if it can be used as a thermosetting catalyst, it can also be an organic filler.
作為熱硬化觸媒較佳為具有胺基之有機填料,具體而言較佳為三聚氰胺及二氰基二醯胺(DICY)之至少任一種。The heat curing catalyst is preferably an organic filler having an amino group, and more specifically, at least one of melamine and dicyandiamide (DICY) is preferred.
熱硬化觸媒可單獨使用1種或組合2種以上使用。熱硬化觸媒之調配量,相對於(A)鹼可溶性樹脂之固形分100質量份,較佳為0.5~10質量份,更佳為1~8質量份。為0.5質量份以上時,耐熱性優異。為10質量份以下時,保存安定性提高。The heat-curing catalyst can be used alone or in combination of two or more. The amount of the heat-curing catalyst is preferably 0.5 to 10 parts by mass, more preferably 1 to 8 parts by mass, relative to 100 parts by mass of the solid content of the alkali-soluble resin (A). When the amount is 0.5 parts by mass or more, the heat resistance is excellent. When the amount is 10 parts by mass or less, the storage stability is improved.
(有機溶劑) 本發明之硬化性樹脂組成物,基於組成物之調製、或塗佈於基板或載體膜時之黏度調整等之目的,可含有有機溶劑。作為有機溶劑可使用甲基乙基酮、環己酮等酮類;甲苯、二甲苯、四甲基苯等之芳香族烴類;溶纖素、甲基溶纖素、丁基溶纖素、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲醚、二丙二醇單甲醚、二丙二醇二乙醚、二乙二醇單甲醚乙酸酯、三丙二醇單甲醚等之二醇醚類;乙酸乙酯、乙酸丁酯、乳酸丁酯、溶纖素乙酸酯、丁基溶纖素乙酸酯、卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、二丙二醇單甲醚乙酸酯、碳酸伸丙酯等之酯類;辛烷、癸烷等之脂肪族烴類;石油醚、石油腦、溶劑石油腦等之石油系溶劑等之習知慣用之有機溶劑。該等有機溶劑可單獨使用1種或組合2種以上使用。(Organic solvent) The curable resin composition of the present invention may contain an organic solvent for the purpose of preparing the composition or adjusting the viscosity when coating on a substrate or a carrier film. As the organic solvent, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; glycol ethers such as cellulose, methyl cellulose, butyl cellulose, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, and tripropylene glycol monomethyl ether; esters such as ethyl acetate, butyl acetate, butyl lactate, cellulose acetate, butyl cellulose acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, and propylene carbonate; aliphatic hydrocarbons such as octane and decane; petroleum-based solvents such as petroleum ether, petroleum naphtha, and solvent naphtha, etc., which are known and commonly used organic solvents. These organic solvents may be used alone or in combination of two or more.
(其他任意成分) 本發明之硬化性樹脂組成物中,亦可調配電子材料領域中習知慣用之其他硬化成分或其他添加劑。作為其他硬化成分,舉例為氰酸酯樹脂、活性酯樹脂、馬來醯亞胺化合物、脂環式烯烴聚合物。作為其他添加劑,舉例為熱聚合抑制劑、紫外線吸收劑、矽烷偶合劑、可塑劑、難燃劑、抗靜電劑、抗氧化劑、抗菌・防黴劑、消泡劑、調平劑、增黏劑、密著性賦予劑、觸變性賦予劑、光起始助劑、增感劑、熱塑性樹脂、有機填料、脫模劑、表面處理劑、分散劑、分散助劑、表面改質劑、安定劑、螢光體等。(Other optional components) Other curing components or other additives commonly used in the field of electronic materials may also be formulated into the curable resin composition of the present invention. Examples of other curing components include cyanate resins, active ester resins, maleimide compounds, and alicyclic olefin polymers. Examples of other additives include thermal polymerization inhibitors, ultraviolet absorbers, silane coupling agents, plasticizers, flame retardants, antistatic agents, antioxidants, antibacterial and antimold agents, defoaming agents, leveling agents, thickeners, adhesion enhancers, thixotropic enhancers, photoinitiators, sensitizers, thermoplastic resins, organic fillers, release agents, surface treatment agents, dispersants, dispersing aids, surface modifiers, stabilizers, and fluorescent materials.
本發明之硬化性樹脂組成物可經乾薄膜化使用亦可作為液狀使用。作為液狀使用時,可為單液性亦可為2液性以上。The curable resin composition of the present invention can be used in the form of a dry film or in a liquid form. When used in a liquid form, it can be a single component or a two-component or more component.
本發明之硬化性樹脂組成物具有於載體膜上塗佈本發明之硬化性樹脂組成物並乾燥而得之樹脂層。形成乾膜時,首先以上述有機溶劑稀釋本發明之硬化性樹脂組成物調整為適當黏度後,藉由缺角輪塗佈器、刮刀塗佈器、唇模塗佈器、桿塗佈器、橡皮輥塗佈器、逆輥塗佈器、傳送輥塗佈器、凹版塗佈器、噴霧塗佈器等,於載體膜上塗佈均一厚度。其後,通常於40~130℃之溫度將所塗佈之組成物乾燥1~30分鐘,可形成樹脂層。關於塗佈膜厚並未特別限制,但一般乾燥後之膜厚係於3~150μm,較佳5~60μm之範圍適當選擇。The hardening resin composition of the present invention has a resin layer obtained by coating the hardening resin composition of the present invention on a carrier film and drying it. When forming a dry film, the hardening resin composition of the present invention is first diluted with the above-mentioned organic solvent to adjust to an appropriate viscosity, and then coated on the carrier film with a uniform thickness by a notch wheel coater, a scraper coater, a lip die coater, a rod coater, a rubber roller coater, a reverse roller coater, a conveyor roller coater, a gravure coater, a spray coater, etc. Afterwards, the applied composition is dried at a temperature of 40-130°C for 1-30 minutes to form a resin layer. There is no particular restriction on the thickness of the applied film, but the thickness of the film after drying is generally in the range of 3-150μm, preferably 5-60μm.
作為載體膜係可使用塑膠膜,例如可使用聚對苯二甲酸乙二酯(PET)等之聚酯薄膜、聚醯亞胺膜、聚醯胺醯亞胺膜、聚丙烯膜、聚苯乙烯膜等。關於載體膜之厚度並未特別限制,但一般係於10~150μm之範圍適當選擇。更佳為15~130μm之範圍。As the carrier film, a plastic film can be used, for example, polyester film such as polyethylene terephthalate (PET), polyimide film, polyamide imide film, polypropylene film, polystyrene film, etc. The thickness of the carrier film is not particularly limited, but is generally selected in the range of 10 to 150 μm. More preferably, it is in the range of 15 to 130 μm.
於載體膜上形成由本發明之硬化性樹脂組成物所成之樹脂層後,基於防止於樹脂層表面附著灰塵等之目的,較好進而於樹脂層表面積層可剝離之覆蓋膜。作為可剝離之覆蓋膜可使用例如聚乙烯膜或聚四氟乙烯膜、聚丙烯膜、經表面處理之紙等。作為覆蓋膜,只要在將覆蓋膜剝離時,接著力小於樹脂層與載體膜之接著力即可。After forming a resin layer made of the curable resin composition of the present invention on the carrier film, it is preferable to further deposit a peelable cover film on the surface of the resin layer for the purpose of preventing dust from adhering to the surface of the resin layer. As the peelable cover film, for example, polyethylene film, polytetrafluoroethylene film, polypropylene film, surface-treated paper, etc. can be used. As the cover film, it is sufficient as long as the adhesion force of the cover film is smaller than the adhesion force between the resin layer and the carrier film when the cover film is peeled off.
又,本發明中,亦可於上述覆蓋膜上塗佈本發明之硬化性樹脂組成物並乾燥而形成樹脂層,並於其表面積層載體膜者。亦即,本發明中製造乾膜時作為塗佈本發明之硬化性樹脂組成物之薄膜可使用載體膜及覆蓋膜之任一者。In the present invention, the curable resin composition of the present invention may be applied on the above-mentioned cover film and dried to form a resin layer, and a carrier film may be laminated on the surface thereof. That is, in the present invention, when preparing a dry film, the thin film on which the curable resin composition of the present invention is applied may be either a carrier film or a cover film.
本發明之印刷配線板係具有由本發明之硬化性樹脂組成物或乾膜之樹脂層所得之硬化物者。作為本發明之印刷配線板之製造方法,例如將本發明之硬化性樹脂組成物使用上述有機溶劑調整為適於塗佈方法之黏度,於基材上藉由浸漬塗佈法、流動塗佈法、輥塗佈法、棒塗佈法、網版印刷法、簾塗佈法等方法塗佈後,於60~100℃之溫度使組成物中所含之有機溶劑揮發乾燥(暫時乾燥),形成無觸黏之樹脂層。又,於乾膜之情況,藉由層壓機等使樹脂層與基材接觸而貼合於基材上後,藉由剝下載體膜,可於基材上形成樹脂層。The printed wiring board of the present invention is a hardened product obtained from the hardening resin composition of the present invention or the resin layer of the dry film. As a method for manufacturing the printed wiring board of the present invention, for example, the hardening resin composition of the present invention is adjusted to a viscosity suitable for the coating method using the above-mentioned organic solvent, and after coating on the substrate by a method such as immersion coating, flow coating, roll coating, rod coating, screen printing, curtain coating, etc., the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of 60-100°C to form a non-tack resin layer. In the case of a dry film, after the resin layer is brought into contact with the substrate and bonded to the substrate by a laminating press or the like, the carrier film is peeled off to form the resin layer on the substrate.
作為上述基材,可舉例預先以銅等形成電路之印刷配線板或軟性印刷配線板以外,可利用使用紙酚、紙環氧樹脂、玻璃布環氧樹脂、玻璃聚醯亞胺、玻璃布/不織布環氧樹脂、玻璃布/紙環氧樹脂、合成纖維環氧樹脂、氟樹脂•聚乙烯•聚苯醚、聚苯氧化物•氰酸酯等之高頻電路用貼銅積層板等之材質者,全部等級(FR-4等)之貼銅積層板,以及金屬基板、聚醯亞胺膜、PET膜、聚萘二甲酸乙二酯(PEN)膜、玻璃基板、陶瓷基板、晶圓板等。As the above-mentioned substrate, in addition to printed wiring boards or flexible printed wiring boards in which circuits are pre-formed with copper or the like, materials such as copper-clad laminates for high-frequency circuits using paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth/non-woven epoxy, glass cloth/paper epoxy, synthetic fiber epoxy, fluororesin, polyethylene, polyphenylene ether, polyphenylene oxide, cyanate, etc. can be used, copper-clad laminates of all grades (FR-4, etc.), as well as metal substrates, polyimide films, PET films, polyethylene naphthalate (PEN) films, glass substrates, ceramic substrates, wafer boards, etc.
塗佈本發明之硬化性樹脂組成物後進行之揮發乾燥可使用熱風循環式乾燥爐、IR爐、加熱板、強制烘箱等(使用具備利用蒸氣之空氣加熱方式之熱源者使乾燥機內之熱風對流接觸之方法及利用噴嘴吹附支撐體之方法)進行。After applying the curable resin composition of the present invention, the volatile drying can be performed using a hot air circulation drying furnace, an IR furnace, a heating plate, a forced oven, etc. (a method of using a heat source with a steam-based air heating method to allow the hot air in the dryer to contact by convection and a method of using a nozzle to blow the support body).
於基材上形成樹脂層後,通過形成有特定圖型之光罩選擇性利用活性能量線曝光,藉由稀鹼水溶液(例如0.3~3質量%碳酸鈉水溶液)使未曝光部顯像,形成硬化物之圖型。進而對硬化物照射活性能量線後加熱硬化(例如100~220℃)或加熱硬化後照射活性能量線,或僅加熱硬化,而最終完成硬化(正式硬化),形成密著性、硬度等諸特性優異之硬化膜。 又,本發明之硬化性樹脂組成物包含光鹼產生劑時,曝光後顯像前較佳進行加熱,作為曝光後顯像前之加熱條件,較佳為例如於60~150℃加熱1~60分鐘。After forming a resin layer on a substrate, it is selectively exposed using active energy rays through a mask formed with a specific pattern, and the unexposed part is developed by a dilute alkaline aqueous solution (e.g., a 0.3-3 mass% sodium carbonate aqueous solution) to form a pattern of a cured product. The cured product is then irradiated with active energy rays and then heat-cured (e.g., 100-220°C), or irradiated with active energy rays after heat-curing, or only heat-cured, and finally cured (formal curing) to form a cured film with excellent properties such as adhesion and hardness. In addition, when the curable resin composition of the present invention contains a photoalkali generator, it is preferably heated before development after exposure. As a heating condition before development after exposure, it is preferably heated at 60-150°C for 1-60 minutes.
作為上述活性能量線照射所用之曝光機,若為搭載高壓水銀燈、超高壓水銀燈、金屬鹵素燈、水銀射弧燈等而照射350~450nm之範圍的紫外線之裝置即可,進而亦可使用直接描繪裝置(例如藉由來自電腦之CAD數據直接以雷射描繪圖像之雷射直接成像裝置)。作為直接描繪機之燈光源或雷射光源,宜為最大波長為350~450nm之範圍者。用於圖像形成之曝光量係隨膜厚等而異,但一般為10~1000 mJ/cm2 ,較佳為20~800mJ/cm2 之範圍內。As the exposure machine used for the above-mentioned active energy ray irradiation, any device that irradiates ultraviolet rays in the range of 350~450nm equipped with a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halogen lamp, a mercury arc lamp, etc. can be used. Furthermore, a direct drawing device (for example, a laser direct imaging device that directly draws images with a laser using CAD data from a computer) can also be used. As a light source or a laser light source of a direct drawing machine, it is preferably one with a maximum wavelength in the range of 350~450nm. The exposure amount used for image formation varies depending on the film thickness, etc., but is generally in the range of 10~1000 mJ/ cm2 , preferably in the range of 20~800mJ/ cm2 .
作為上述顯像方法,可藉由浸漬法、淋洗法、噴霧法、刷塗法等,作為顯影液,可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等之鹼水溶液。As the above-mentioned developing method, an immersion method, a rinsing method, a spray method, a brush coating method, etc. can be used, and as a developer, an alkaline aqueous solution of potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines, etc. can be used.
本發明之硬化性樹脂組成物可較佳地使用於用以於印刷配線板上形成硬化膜,尤其更適用於形成永久被膜,進而更適合使用於用以形成阻焊劑、層間絕緣膜、覆蓋層。又,依據本發明之熱硬化性樹脂組成物,即使為薄膜亦可獲得外觀及表面平滑性優異之硬化物,由於感度及解像性優異,故可適用於形成薄膜且要求高度信賴性之印刷配線板例如封裝基板尤其是FC-BGA用之永久被膜(尤其是阻焊劑)。The curable resin composition of the present invention can be preferably used to form a cured film on a printed wiring board, and is particularly suitable for forming a permanent film, and is further suitable for forming a solder resist, an interlayer insulating film, and a cover layer. In addition, according to the thermosetting resin composition of the present invention, a cured product with excellent appearance and surface smoothness can be obtained even in the form of a thin film. Due to its excellent sensitivity and resolution, it can be applied to forming a thin film and requiring a high degree of reliability for a printed wiring board such as a packaging substrate, especially a permanent film (especially a solder resist) for FC-BGA.
尤其本發明之硬化性樹脂組成物可適用於形成薄膜,較佳3~40μm、更佳5~30μm之硬化膜之形成。 [實施例]In particular, the curable resin composition of the present invention can be used to form a thin film, preferably a cured film of 3 to 40 μm, more preferably 5 to 30 μm. [Example]
以下顯示實施例及比較例具體說明本發明,但本發明並非限定於下述實施例者。又,以下之「份」及「%」,只要未特別指明則全部為質量基準。The following examples and comparative examples are provided to specifically illustrate the present invention, but the present invention is not limited to the following examples. In addition, the following "parts" and "%" are all based on mass unless otherwise specified.
(鹼可溶性樹脂A-1之合成) 於具備溫度計、氮氣導入裝置兼環氧烷導入裝置及攪拌裝置之高壓釜中,導入甲酚醛清漆樹脂(AICA工業公司製Shonol CRG951,OH當量:119.4) 119.4份、氫氧化鉀1.19份及甲苯119.4份,邊攪拌邊於系內置換氮氣,加熱升溫。其次,緩緩滴加環氧丙烷63.8份,以125~132℃、0~ 4.8kg/cm2 反應16小時。隨後,冷卻至室溫,於該反應溶液中添加混合89%磷酸1.56份,中和氫氧化鉀,獲得不揮發分62.1%、羥基價182.2 mgKOH/g(307.9g/eq.)之酚醛清漆型甲酚樹脂之環氧丙烷反應溶液。此係酚性羥基每1當量環氧丙烷平均加成1.08莫耳者。將所得酚醛清漆型甲酚樹脂之環氧丙烷反應溶液293.0份、丙烯酸43.2份、甲烷磺酸11.53份、甲基對苯二酚0.18份及甲苯252.9份導入具備攪拌機、溫度計及空氣吹入管之反應器中,以10ml/分鐘之速度吹入空氣,邊攪拌邊於110℃反應12小時。因反應生成之水作為與甲苯之共沸混合物,餾出12.6份之水。隨後冷卻至室溫,所得反應溶液以15%氫氧化鈉水溶液35.35份中和,其次水洗。隨後,以蒸發器以二乙二醇單乙醚乙酸酯118.1份置換甲苯並餾除,獲得酚醛清漆型丙烯酸酯樹脂溶液。其次,所得酚醛清漆型丙烯酸酯樹脂溶液332.5份及三苯膦1.22份導入具備攪拌器、溫度計及空氣吹入管之反應器中,以10ml/分鐘之速度吹入空氣,邊攪拌邊緩緩添加四氫鄰苯二甲酸酐60.8份,於95~101℃反應6小時,冷卻後取出。如此,獲得固形分65%,固形分之酸價87.7 mgKOH/g之丙烯酸酯樹脂A-1之溶液。(Synthesis of Alkaline Soluble Resin A-1) Into an autoclave equipped with a thermometer, a nitrogen and alkylene oxide inlet device, and a stirring device, 119.4 parts of cresol novolac resin (Shonol CRG951 manufactured by AICA Industries, OH equivalent: 119.4), 1.19 parts of potassium hydroxide, and 119.4 parts of toluene were introduced, and the nitrogen was replaced in the system while stirring, and the temperature was raised. Next, 63.8 parts of propylene oxide was slowly added dropwise, and the reaction was carried out at 125~132℃ and 0~4.8kg/ cm2 for 16 hours. Then, the mixture was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to the reaction solution to neutralize potassium hydroxide, thereby obtaining a phenolic lacquer type cresol resin propylene oxide reaction solution with a non-volatile content of 62.1% and a hydroxyl value of 182.2 mgKOH/g (307.9 g/eq.). This is a solution in which an average of 1.08 mol of phenolic hydroxyl groups are added per 1 equivalent of propylene oxide. 293.0 parts of the obtained propylene oxide reaction solution of the novolac type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 parts of methyl hydroquinone and 252.9 parts of toluene were introduced into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was blown in at a rate of 10 ml/min. The mixture was stirred and reacted at 110°C for 12 hours. The water generated by the reaction was an azeotropic mixture with toluene, and 12.6 parts of water were distilled out. The mixture was then cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 parts of a 15% sodium hydroxide aqueous solution, followed by water washing. Subsequently, 118.1 parts of diethylene glycol monoethyl ether acetate were used to replace toluene in an evaporator and distilled off to obtain a novolac type acrylate resin solution. Next, 332.5 parts of the obtained novolac type acrylate resin solution and 1.22 parts of triphenylphosphine were introduced into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was blown in at a rate of 10 ml/min. While stirring, 60.8 parts of tetrahydrophthalic anhydride were slowly added, and the mixture was reacted at 95-101°C for 6 hours, and then taken out after cooling. In this way, a solution of acrylate resin A-1 with a solid content of 65% and a solid acid value of 87.7 mgKOH/g was obtained.
(鹼可溶性樹脂A-2之合成) 於具備冷卻管、攪拌機之燒瓶中,饋入雙酚A 456份、水228份、37%甲醛649份,保持於40℃以下之溫度,添加25%氫氧化鈉水溶液228份,添加結束後於50℃反應10小時。反應結束後冷卻至40℃,保持於40℃以下並以37.5%磷酸水溶液中和至pH4。之後靜置分離水層。分離後添加甲基異丁基酮300份均一溶解後,以蒸餾水500份洗淨3次,於50℃以下之溫度減壓下去除水、溶劑等。所得聚羥甲基化合物溶解於甲醇550份中,獲得聚羥甲基化合物之甲醇溶液1230份。所得聚羥甲基化合物之甲醇溶液之一部份以真空乾燥機中於室溫乾燥後,固形分為55.2%。 饋入所得聚羥甲基化合物之甲醇溶液500份、2,6-二甲苯酚440份,於50℃均一溶解。均一溶解後於50℃以下之溫度減壓下去除甲醇。隨後添加草酸8份,於100℃反應10小時。反應結束後於180℃、50mmHg之減壓下去除餾出份,獲得酚醛清漆樹脂A 550份。進而於具備溫度計、氮氣導入裝置兼環氧烷導入裝置及攪拌裝置之高壓釜中,饋入上述酚醛清漆樹脂A 130份、50%氫氧化鈉水溶液2.6份、甲苯/甲基異丁基酮(質量比=2/1) 100份,邊攪拌邊於系內置換氮氣,其次加熱升溫,以150℃、8kg/cm2 緩緩導入環氧乙烷45份進行反應。反應持續約4小時直至表壓成為0.0kg.cm2 後,冷卻至室溫。於該反應溶液中添加混合36%鹽酸水溶液3.3份,中和氫氧化鈉。該中和反應生成物以甲苯稀釋,水洗3次,以蒸發器脫溶劑,獲得羥基價175g/eq.之酚醛清漆樹脂A之環氧乙烷加成物。此係酚性羥基每1當量環氧乙烷平均加成1莫耳者。將如此所得之酚醛清漆樹脂A之環氧乙烷加成物175份、丙烯酸50份、對-甲苯磺酸3.0份、對苯二酚單甲醚0.1份、甲苯130份饋入具備攪拌機、溫度計、空氣吹入管之反應器中,邊吹入空氣邊攪拌,升溫至115℃,將因反應生成之水作為與甲苯之共沸混合物餾除,進而反應4小時後,冷卻至室溫。所得反應溶液以5%NaCl水溶液水洗,減壓餾除甲苯後,添加二乙二醇單乙醚乙酸酯,獲得固形分68%之丙烯酸酯樹脂溶液。 其次,於附攪拌器及回流冷卻器之4頸燒瓶中饋入所得丙烯酸酯樹脂溶液312份、對苯二酚單甲醚0.1份、三苯膦0.3份,該混合物加熱至110℃,添加四氫鄰苯二甲酸酐45份,反應4小時,冷卻後取出。如此獲得之含羧基感光性樹脂係不揮發分72%,固形分酸價65 mgKOH/g。以下該含羧基感光性樹脂稱為A-2清漆。(Synthesis of Alkaline Soluble Resin A-2) In a flask equipped with a cooling tube and a stirrer, add 456 parts of bisphenol A, 228 parts of water, and 649 parts of 37% formaldehyde, keep the temperature below 40°C, add 228 parts of 25% sodium hydroxide aqueous solution, and react at 50°C for 10 hours after the addition. After the reaction is completed, cool to 40°C, keep it below 40°C and neutralize it to pH 4 with 37.5% phosphoric acid aqueous solution. Then stand and separate the water layer. After separation, add 300 parts of methyl isobutyl ketone and dissolve it uniformly, then wash it with 500 parts of distilled water 3 times, and remove water, solvent, etc. under reduced pressure at a temperature below 50°C. The obtained polyhydroxymethyl compound was dissolved in 550 parts of methanol to obtain 1230 parts of a methanol solution of the polyhydroxymethyl compound. A portion of the obtained methanol solution of the polyhydroxymethyl compound was dried in a vacuum dryer at room temperature, and the solid content was 55.2%. 500 parts of the obtained methanol solution of the polyhydroxymethyl compound and 440 parts of 2,6-xylenol were fed and uniformly dissolved at 50°C. After uniform dissolution, methanol was removed under reduced pressure at a temperature below 50°C. Subsequently, 8 parts of oxalic acid were added and reacted at 100°C for 10 hours. After the reaction was completed, the distilled portion was removed under reduced pressure at 180°C and 50 mmHg to obtain 550 parts of phenolic varnish resin A. Then, 130 parts of the above-mentioned phenolic varnish resin A, 2.6 parts of a 50% sodium hydroxide aqueous solution, and 100 parts of toluene/methyl isobutyl ketone (mass ratio = 2/1) were fed into a high pressure autoclave equipped with a thermometer, a nitrogen gas introduction device and an ethylene oxide introduction device, and a stirring device. The nitrogen gas was replaced in the system while stirring, and then the temperature was raised, and 45 parts of ethylene oxide were slowly introduced at 150°C and 8kg/ cm2 for reaction. The reaction lasted for about 4 hours until the gauge pressure reached 0.0kg.cm2, and then cooled to room temperature. 3.3 parts of a 36% hydrochloric acid aqueous solution were added and mixed into the reaction solution to neutralize the sodium hydroxide. The neutralization reaction product was diluted with toluene, washed with water three times, and the solvent was removed by evaporation to obtain an ethylene oxide adduct of novolac resin A with a hydroxyl value of 175 g/eq. This is a product in which an average of 1 mol of phenolic hydroxyl group is added to 1 equivalent of ethylene oxide. 175 parts of the ethylene oxide adduct of novolac resin A obtained in this way, 50 parts of acrylic acid, 3.0 parts of p-toluenesulfonic acid, 0.1 parts of hydroquinone monomethyl ether, and 130 parts of toluene were fed into a reactor equipped with a stirrer, a thermometer, and an air blowing tube. The reactor was stirred while blowing air in, and the temperature was raised to 115°C. The water generated by the reaction was distilled off as an azeotropic mixture with toluene. After further reaction for 4 hours, the reactor was cooled to room temperature. The obtained reaction solution was washed with 5% NaCl aqueous solution, and after toluene was distilled off under reduced pressure, diethylene glycol monoethyl ether acetate was added to obtain an acrylate resin solution with a solid content of 68%. Next, 312 parts of the obtained acrylate resin solution, 0.1 parts of hydroquinone monomethyl ether, and 0.3 parts of triphenylphosphine were added to a 4-neck flask equipped with a stirrer and a reflux cooler. The mixture was heated to 110°C, 45 parts of tetrahydrophthalic anhydride were added, and the mixture was reacted for 4 hours and removed after cooling. The carboxyl-containing photosensitive resin obtained in this way has a non-volatile content of 72% and a solid acid value of 65 mgKOH/g. The carboxyl-containing photosensitive resin is hereinafter referred to as A-2 varnish.
(鹼可溶性感光性樹脂A-3之合成) 於具備冷卻管、攪拌機之燒瓶中,饋入雙酚A 456份、水228份、37%甲醛649份,保持於40℃以下之溫度,添加25%氫氧化鈉水溶液228份,添加結束後於50℃反應10小時。反應結束後冷卻至40℃,保持於40℃以下並以37.5%磷酸水溶液中和至pH4。之後靜置分離水層。分離後添加甲基異丁基酮300份均一溶解後,以蒸餾水500份洗淨3次,於50℃以下之溫度減壓下去除水、溶劑等。所得聚羥甲基化合物溶解於甲醇550份中,獲得聚羥甲基化合物之甲醇溶液1230份。所得聚羥甲基化合物之甲醇溶液之一部份以真空乾燥機中於室溫乾燥後,固形分為55.2%。 饋入所得聚羥甲基化合物之甲醇溶液500份、2,6-二甲苯酚440份,於50℃均一溶解。均一溶解後於50℃以下之溫度減壓下去除甲醇。隨後添加草酸8份,於100℃反應10小時。反應結束後於180℃、50mmHg之減壓下去除餾出份,獲得酚醛清漆樹脂A 550份。進而於具備溫度計、氮氣導入裝置兼環氧烷導入裝置及攪拌裝置之高壓釜中,饋入上述酚醛清漆樹脂A 130份、50%氫氧化鈉水溶液2.6份、甲苯/甲基異丁基酮(質量比=2/1) 100份,邊攪拌邊於系內置換氮氣,其次加熱升溫,以150℃、8kg/cm2 緩緩導入環氧乙烷45份進行反應。反應持續約4小時直至表壓成為0.0kg.cm2 後,冷卻至室溫。於該反應溶液中添加混合36%鹽酸水溶液3.3份,中和氫氧化鈉。該中和反應生成物以甲苯稀釋,水洗3次,以蒸發器脫溶劑,獲得羥基價175 g/eq.之酚醛清漆樹脂A之環氧乙烷加成物。此係酚性羥基每1當量環氧乙烷平均加成1莫耳者。將如此所得之酚醛清漆樹脂A之環氧乙烷加成物175份、甲基丙烯酸75份、對-甲苯磺酸3.0份、對苯二酚單甲醚0.1份及甲苯130份饋入具備攪拌機、溫度計、空氣吹入管之反應器中,邊吹入空氣邊攪拌,升溫至115℃,將因反應生成之水作為與甲苯之共沸混合物餾除,進而反應4小時後,冷卻至室溫。所得反應溶液以5%NaCl水溶液水洗,減壓餾除甲苯後,添加二乙二醇單乙醚乙酸酯,獲得固形分68%之丙烯酸酯樹脂溶液。以下該丙烯酸樹脂溶液稱為樹脂溶液A-3。(Synthesis of Alkaline Soluble Photosensitive Resin A-3) In a flask equipped with a cooling tube and a stirrer, add 456 parts of bisphenol A, 228 parts of water, and 649 parts of 37% formaldehyde, keep the temperature below 40°C, add 228 parts of 25% sodium hydroxide aqueous solution, and react at 50°C for 10 hours after the addition. After the reaction is completed, cool to 40°C, keep it below 40°C and neutralize it to pH 4 with 37.5% phosphoric acid aqueous solution. Then stand it to separate the water layer. After separation, add 300 parts of methyl isobutyl ketone and dissolve it uniformly, then wash it with 500 parts of distilled water 3 times, and remove water, solvent, etc. under reduced pressure at a temperature below 50°C. The obtained polyhydroxymethyl compound was dissolved in 550 parts of methanol to obtain 1230 parts of a methanol solution of the polyhydroxymethyl compound. A portion of the obtained methanol solution of the polyhydroxymethyl compound was dried in a vacuum dryer at room temperature, and the solid content was 55.2%. 500 parts of the obtained methanol solution of the polyhydroxymethyl compound and 440 parts of 2,6-xylenol were fed and uniformly dissolved at 50°C. After uniform dissolution, methanol was removed under reduced pressure at a temperature below 50°C. Subsequently, 8 parts of oxalic acid were added and reacted at 100°C for 10 hours. After the reaction was completed, the distilled portion was removed under reduced pressure at 180°C and 50 mmHg to obtain 550 parts of phenolic varnish resin A. Then, 130 parts of the above-mentioned phenolic varnish resin A, 2.6 parts of a 50% sodium hydroxide aqueous solution, and 100 parts of toluene/methyl isobutyl ketone (mass ratio = 2/1) were fed into a high pressure autoclave equipped with a thermometer, a nitrogen gas introduction device and an ethylene oxide introduction device, and a stirring device. The nitrogen gas was replaced in the system while stirring, and then the temperature was raised, and 45 parts of ethylene oxide were slowly introduced at 150°C and 8kg/ cm2 for reaction. The reaction lasted for about 4 hours until the gauge pressure reached 0.0kg.cm2, and then cooled to room temperature. 3.3 parts of a 36% hydrochloric acid aqueous solution were added and mixed into the reaction solution to neutralize the sodium hydroxide. The neutralization reaction product was diluted with toluene, washed with water three times, and the solvent was removed by evaporation to obtain an ethylene oxide adduct of novolac resin A with a hydroxyl value of 175 g/eq. This is a product in which an average of 1 mol of phenolic hydroxyl group is added to 1 equivalent of ethylene oxide. 175 parts of the ethylene oxide adduct of novolac resin A obtained in this way, 75 parts of methacrylic acid, 3.0 parts of p-toluenesulfonic acid, 0.1 parts of hydroquinone monomethyl ether, and 130 parts of toluene were fed into a reactor equipped with a stirrer, a thermometer, and an air blowing tube, and stirred while blowing air in. The temperature was raised to 115°C, and the water generated by the reaction was distilled off as an azeotropic mixture with toluene. After further reaction for 4 hours, the reaction was cooled to room temperature. The obtained reaction solution was washed with a 5% NaCl aqueous solution, and after toluene was distilled off under reduced pressure, diethylene glycol monoethyl ether acetate was added to obtain an acrylic resin solution with a solid content of 68%. Hereinafter, the acrylic resin solution is referred to as resin solution A-3.
(球狀氧化矽之合成) 將球狀氧化矽(DENKA製SFP-30M) 70g、作為溶劑之PMA (丙二醇單甲醚乙酸酯) 30g混合分散,獲得無機填料。(Synthesis of spherical silica) 70 g of spherical silica (SFP-30M manufactured by DENKA) and 30 g of PMA (propylene glycol monomethyl ether acetate) as a solvent were mixed and dispersed to obtain an inorganic filler.
[實施例及比較例] 以表1所示之處方,將各成分以表1所示之比例(質量份)調配,以攪拌機預備混合後,以珠粒研磨機混練,調製硬化性樹脂組成物。又,表中之調配量表示固形分量(不揮發分)。[Example and Comparative Example] According to the formula shown in Table 1, each component is mixed in the proportion (mass parts) shown in Table 1, pre-mixed with a stirrer, and then kneaded with a bead mill to prepare a hardening resin composition. In addition, the mixing amount in the table represents the solid content (non-volatile matter).
(乾膜之製作) 將上述調製之硬化性樹脂組成物以敷料機以乾燥後之樹脂層膜厚成為特定膜厚之方式塗佈於PET膜上,於80℃乾燥30分鐘獲得乾膜。(Preparation of dry film) The hardening resin composition prepared above was applied on a PET film using an applicator in such a way that the thickness of the resin layer after drying became a specific film thickness, and dried at 80°C for 30 minutes to obtain a dry film.
(透射率) 依據上述(乾膜之製作)中記載之方法,製作乾燥後之樹脂層膜厚為20μm之乾膜。於厚2mm之玻璃基板上層壓上述樹脂層膜厚為20μm之乾膜,剝離PET膜。隨後,使用分光光光度計V-670測定吸光度。(Transmittance) According to the method described in (Preparation of dry film) above, a dry film with a resin layer thickness of 20 μm was prepared after drying. The above-mentioned dry film with a resin layer thickness of 20 μm was laminated on a 2 mm thick glass substrate, and the PET film was peeled off. Then, the absorbance was measured using a spectrophotometer V-670.
(隱蔽性) 依據上述(乾膜之製作)中記載之方法,製作乾燥後之樹脂層膜厚為20μm、25μm之乾膜。其次,於使用MERCK公司製MECetchBOND CZ-8101將18μm之銅箔以蝕刻率1μm進行CZ處理(粗化處理),進而使用MERCK公司製MECetchBOND CL-8300進行防鏽處理之形成有Cu厚為17μm且L/S=12μm/13μm之梳型圖型之印刷配線板層壓各乾膜。對於其藉由OAK製作所製HMW680G(金屬鹵素燈,散射光)以最適曝光量:800mJ進行全面曝光。剝離PET膜後,進而以累積曝光量1000mJ照射紫外線後,以熱循環式箱型爐,於160℃加熱60分鐘予以硬化(後固化)。 針對具有所得硬化膜之印刷配線板以目視評價電路之隱蔽性。 ◎:20μm、25μm之硬化膜均完全未見到Cu電路。 ○:於20μm之硬化膜透明而見到Cu電路,於25μm之硬化膜未見到Cu電路。 ×:20μm、25μm之硬化膜均透明而見到Cu電路。(Concealment) According to the method described in (Preparation of dry film) above, dry films with a resin layer thickness of 20μm and 25μm after drying were prepared. Next, 18μm copper foil was subjected to CZ treatment (roughening treatment) at an etching rate of 1μm using MECetchBOND CZ-8101 manufactured by MERCK, and then rust-proofed using MECetchBOND CL-8300 manufactured by MERCK, forming a printed wiring board with a comb-shaped pattern with a Cu thickness of 17μm and L/S=12μm/13μm. The dry films were fully exposed using HMW680G (metal halogen lamp, scattered light) manufactured by OAK with an optimal exposure dose of 800mJ. After peeling off the PET film, the film was further irradiated with UV light at a cumulative exposure of 1000mJ, and then cured (post-cured) by heating at 160°C for 60 minutes in a heat cycle box furnace. The printed wiring board with the obtained cured film was visually evaluated for the concealment of the circuit. ◎: The Cu circuit was not visible at all in the 20μm and 25μm cured films. ○: The Cu circuit was visible in the 20μm cured film, and the Cu circuit was not visible in the 25μm cured film. ×: The Cu circuit was visible in the 20μm and 25μm cured films.
(解像性) 依據上述(乾膜之製作)中記載之方法,製作乾燥後之樹脂層膜厚為20μm之乾膜。於使用MERCK公司製MECetchBOND CZ-8101將35μm之銅箔以蝕刻率1μm進行CZ處理(粗化處理),進而使用MERCK公司製MECetchBOND CL-8300進行防鏽處理之具有34μm銅箔之基板上層壓上述樹脂層之膜厚為20μm之乾膜,使用截斷比i線更長波長側之投影曝光機UFX-2223M-APU01,曝光以使具有直徑40~350nm之開口圖型。剝離PET膜以1.0wt%碳酸鈉水溶液顯像,以SEM確認可形成之最小開口徑。 ○:最小徑為40μm以下。 ×:最小徑超過40μm。(Resolution) According to the method described in (Preparation of dry film) above, a dry film with a resin layer thickness of 20μm after drying was prepared. A 35μm copper foil was subjected to CZ treatment (roughening treatment) at an etching rate of 1μm using MECetchBOND CZ-8101 manufactured by MERCK, and then the above-mentioned dry film with a resin layer thickness of 20μm was laminated on a substrate with a 34μm copper foil subjected to rustproof treatment using MECetchBOND CL-8300 manufactured by MERCK, and exposed using a projection exposure machine UFX-2223M-APU01 that cuts off the wavelength side longer than the i-line to form an opening pattern with a diameter of 40~350nm. The peeled PET film was developed with a 1.0wt% sodium carbonate aqueous solution, and the minimum opening diameter that could be formed was confirmed by SEM. ○: The minimum diameter is less than 40μm. ×: The minimum diameter exceeds 40μm.
(色調變化之確認試驗) 依據上述(乾膜之製作)中記載之方法,製作乾燥後之樹脂層膜厚為20μm之乾膜。於使用MERCK公司製MECetchBOND CZ-8101將35μm之銅箔以蝕刻率1μm進行CZ處理(粗化處理),進而使用MERCK公司製MECetchBOND CL-8300進行防鏽處理之具有34μm銅箔之基板上層壓上述樹脂層膜厚為20μm之乾膜。對於其藉由OAK製作所製HMW680G(金屬鹵素燈,散射光)以最適曝光量:800mJ進行全面曝光。剝離PET膜後,進而以累積曝光量1000mJ照射紫外線。 色調變化之確認試驗係對照射該紫外線後之基板以熱循環式箱型爐,以於150℃後固化60分鐘時及於170℃後固化60分鐘時之2條件進行,藉由色度測定器KONICA MINOLTA公司製CM-2600d以SCI模式以CIE L*a*b*方式測定。(Confirmation test of color tone change) According to the method described in the above (Preparation of dry film), a dry film with a resin layer thickness of 20μm after drying was prepared. A 35μm copper foil was subjected to CZ treatment (roughening treatment) at an etching rate of 1μm using MECetchBOND CZ-8101 manufactured by MERCK, and then the above-mentioned dry film with a resin layer thickness of 20μm was laminated on a substrate with a 34μm copper foil that was subjected to rustproof treatment using MECetchBOND CL-8300 manufactured by MERCK. It was fully exposed using HMW680G (metal halogen lamp, scattered light) manufactured by OAK with an optimal exposure amount of 800mJ. After peeling off the PET film, the substrate was further irradiated with UV light at a cumulative exposure of 1000 mJ. The color tone change confirmation test was conducted on the substrate after irradiation with UV light in a heat cycle box furnace under two conditions: post-curing at 150°C for 60 minutes and post-curing at 170°C for 60 minutes. The colorimeter CM-2600d manufactured by Konica Minolta was used to measure the CIE L*a*b* method in the SCI mode.
表1中之標題攔中之註解如下。 *1:上述合成之鹼可溶性樹脂之溶液A-1 *2:上述合成之鹼可溶性樹脂之溶液A-2 *3:上述合成之鹼可溶性樹脂之溶液A-3 *4:三洋化成工業公司製Neomer DA-600 *5:日本BASF公司製Laromer LR8863 *6:DIC公司製N-870-75EA *7:日本化藥公司製NC-3000H *8:DIC公司製HP-7200L *9:C.I.顏料紅149 *10:C.I.顏料黃147 *11:酞青(C.I.顏料藍15) *12:碳黑 *13:堺化學工業公司製B-30 *14:上述合成之球狀氧化矽 *15:IGM Resins公司製Omnirad TPO H,醯基氧化膦系光聚合起始劑 *16:日本DSKH公司製JMT-784,二茂鈦系光聚合起始劑 *17:三聚氰胺 *18:DICY(二氰基二醯胺) *19:川崎化成公司製QUINO POWER QS-30The notes in the headings of Table 1 are as follows. *1: Solution A-1 of the above-mentioned alkali-soluble resin *2: Solution A-2 of the above-mentioned alkali-soluble resin *3: Solution A-3 of the above-mentioned alkali-soluble resin *4: Neomer DA-600 manufactured by Sanyo Chemical Industries, Ltd. *5: Laromer LR8863 manufactured by BASF Japan *6: N-870-75EA manufactured by DIC Corporation *7: NC-3000H manufactured by Nippon Kayaku Co., Ltd. *8: HP-7200L manufactured by DIC Corporation *9: C.I. Pigment Red 149 *10: C.I. Pigment Yellow 147 *11: Phthalocyanine (C.I. Pigment Blue 15) *12: Carbon black *13: B-30 manufactured by Sakai Chemical Industry Co., Ltd. *14: Spherical silica synthesized above *15: IGM Omnirad TPO H manufactured by Resins, acylphosphine oxide-based photopolymerization initiator *16: JMT-784 manufactured by DSKH Co., Ltd., Japan, titaniumocene-based photopolymerization initiator *17: Melamine *18: DICY (dicyanamide) *19: QUINO POWER QS-30 manufactured by Kawasaki Chemical Co., Ltd.
由上述表中所示之結果,可知本發明之硬化性樹脂組成物之隱蔽性及解像性優異。相對於此,比較例1係隱蔽性評價結果差。比較例2、3係解像性評價結果差。比較例4係隱蔽性評價結果差。比較例5、6、7係解像性之評價結果差。且實施例1~4、比較例3於加熱前後見到色調變化。且比較例1、4係隱蔽性之評價結果差,比較例2、5、6、7係解像性之評價結果差,故未確認色調變化。 其結果,實施例1~4於加熱前後之色調變化較少,相對於此,比較例3與實施例1~4比較,色調變化較大。 且表中雖未顯示,但作為比較例8,係除了顏料以外之成分與比較例2同量調配,關於顏料不含黑色、黃色及紅色,而僅以藍色1.89質量份調配之組成物。關於比較例8,評價解像性之結果雖改善為30μm,但隱蔽性之評價結果為×,故未實施其他評價。From the results shown in the above table, it can be seen that the curable resin composition of the present invention has excellent concealment and resolution. In contrast, the concealment evaluation result of Comparative Example 1 is poor. The resolution evaluation results of Comparative Examples 2 and 3 are poor. The concealment evaluation result of Comparative Example 4 is poor. The resolution evaluation results of Comparative Examples 5, 6, and 7 are poor. Moreover, color tone changes were seen before and after heating in Examples 1 to 4 and Comparative Example 3. Moreover, the concealment evaluation results of Comparative Examples 1 and 4 are poor, and the resolution evaluation results of Comparative Examples 2, 5, 6, and 7 are poor, so the color tone change was not confirmed. As a result, the color tone of Examples 1 to 4 before and after heating changes less. In contrast, the color tone of Comparative Example 3 changes more when compared with Examples 1 to 4. Although not shown in the table, as Comparative Example 8, the components other than the pigment are prepared in the same amount as Comparative Example 2, and the pigment does not contain black, yellow and red, but only 1.89 parts by mass of blue. Regarding Comparative Example 8, although the result of evaluating the resolution is improved to 30μm, the evaluation result of the concealment is ×, so no other evaluation is performed.
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2021
- 2021-04-13 KR KR1020227035407A patent/KR20230008035A/en not_active Ceased
- 2021-04-13 WO PCT/JP2021/015290 patent/WO2021210570A1/en not_active Ceased
- 2021-04-13 CN CN202180028109.4A patent/CN115398338A/en active Pending
- 2021-04-14 TW TW110113384A patent/TWI878519B/en active
- 2021-04-14 TW TW114109855A patent/TWI902637B/en active
-
2024
- 2024-11-12 JP JP2024197721A patent/JP2025015597A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010091876A (en) * | 2008-10-09 | 2010-04-22 | Taiyo Ink Mfg Ltd | Black solder resist composition and cured material thereof |
| JP2019185026A (en) * | 2018-03-30 | 2019-10-24 | 太陽インキ製造株式会社 | Black photosensitive resin composition, cured product of the same, and rigid flexible printed wiring board |
| JP2020057668A (en) * | 2018-09-28 | 2020-04-09 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product, and electronic component |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115398338A (en) | 2022-11-25 |
| TWI902637B (en) | 2025-10-21 |
| JP2025015597A (en) | 2025-01-30 |
| JP7634345B2 (en) | 2025-02-21 |
| KR20230008035A (en) | 2023-01-13 |
| TW202525884A (en) | 2025-07-01 |
| JP2021170054A (en) | 2021-10-28 |
| TW202204460A (en) | 2022-02-01 |
| WO2021210570A1 (en) | 2021-10-21 |
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