TWI878133B - Surface light generating structure - Google Patents

Abstract

The invention discloses a surface light generating structure. A light source device outputs a linear light on reflective surface of a prism, and the prism is put in a tubular device and the prism reflects the linear light. The tubular device is installed on a rotating device. When the tubular device is rotating, the linear light is converted to a surface light.

Description

Surface light generating structure

The present invention provides a surface light generating structure, in particular a surface light used to detect smoke leaked from product defects.

The semiconductor manufacturing process requires a highly clean clean room to produce integrated circuits. If there are pollutants such as particles in the clean room environment, the defective rate of the integrated circuit will increase. Therefore, it is very important to provide a highly clean clean room environment.

The clean room will be equipped with a filter with a corresponding filter efficiency according to the required air cleanliness level to filter the air entering the clean room. The filter can filter out most of the particles and other pollutants in the gas to achieve the purpose of purifying the air and keep the air cleanliness of the clean room at the specified air cleanliness level. Therefore, the method of detecting the integrity of the fibers in the filter is the first step.

Currently, smoke is used to detect whether the filter is leaking, and most of the time, people observe and record with their naked eyes. Therefore, it is easy to miss the leaking smoke because it is difficult for people to observe it, resulting in failure to detect bad filters.

In the known technology, the device for testing the filter includes a centrifuge. When the centrifuge is in operation, there will be problems such as instability and uneven quality, which will lead to unstable quality of the filter testing process and reduce the service life of the centrifuge.

Therefore, in order to solve the deficiencies of the previous technology, the present invention provides a surface light generating structure.

The present invention provides a surface light generating structure, comprising: a columnar element, a light channel, a prism, a rotating shaft device, and a light emitting device.

The light channel is provided in the columnar element, and the prism is provided in the columnar element. The columnar element is provided in the rotating shaft device. The light emitting device outputs a light source, and the light source is a linear light that shines on a reflecting surface of the prism and then passes through the light channel, and the rotating shaft device rotates to drive the columnar element to rotate around an axis, so that the linear light is converted into a surface light.

The purpose of the present invention is that the light-emitting device outputs a linear light to illuminate the prism in the columnar element, and the columnar element disposed in the rotating shaft device has a symmetrical structure and equal mass with one axis as the center, so as to increase the rotation speed of the columnar element and convert the linear light into the surface light with stable beam intensity.

10: Surface light generation structure

20: Columnar element

21: Axis

30: Optical channel

40: Horizontal platform

50: Prism

51: Reflective surface

60: Rotating shaft device

61: Bearing seat

70: Light-emitting device

71: Linear light

72: Surface light

80: Power supply

X: Angle

Figure 1 is a three-dimensional diagram, a schematic diagram of the surface light structure of the preferred embodiment of the present invention.

Figure 2 is a side view, a schematic diagram of the surface light structure of a preferred embodiment of the present invention.

Figure 3 is a side view, a schematic diagram of a prism of a surface-shaped optical structure of a preferred embodiment of the present invention.

Figure 4 is a three-dimensional diagram, a schematic diagram of the surface light structure of the preferred embodiment of the present invention.

Figure 5 is a side view, a schematic diagram of the surface light structure of a preferred embodiment of the present invention.

In order to understand the technical features and practical effects of the present invention and implement it according to the contents of the manual, the preferred embodiment shown in the figure is further described in detail as follows:

Please refer to FIG. 1, which is a schematic diagram of a surface light structure of a preferred embodiment of the present invention. As shown in FIG. 1, the surface light generating structure 10 includes: a columnar element 20, an optical channel 30, a prism 50, a rotating shaft device 60, and a light emitting device 70.

Specifically, the power source of the rotating shaft device 60 is a motor. After the columnar element 20 is connected to the rotating shaft device 60, the power of the motor is transmitted to the columnar element 20, allowing the columnar element 20 to rotate around an axis.

The columnar element 20 includes a light channel 30 and a prism 50. The columnar element 20 is illustrated by taking aluminum alloy as an example, but is not limited thereto. One end of the columnar element 20 is a quadrilateral opening, and the other end is connected to the shaft device 60.

To explain in detail, the prism 50 is a spectroscope. The reflectivity of the spectroscope is 100:0. Alternatively, the prism 50 is a total reflection mirror. This embodiment is used as an illustration. Please refer to Figures 2 and 3. The prism 50 is spliced into a cube with two 45-degree isosceles triangle slopes. The inclined surface of the cube of the prism 50 is a reflection surface 51. In particular, the reflection surface 51 is a total reflection surface, so after the reflection surface 51 reflects the light source, the original light intensity of the light source can be maintained.

The light emitting device 70 is disposed facing the reflective surface 51 and spaced from the columnar element 20, and outputs a linear light 71 from a light source to illuminate the reflective surface 51, wherein the linear light 71 is parallel to the axis 21 of the columnar element 20, and the reflective surface 51 is inclined, and the reflective surface 51 and the axis 21 are at an angle of 45 degrees, so the linear light 71 and the reflective surface 51 form an angle X, when the shaft device 60 rotates, the columnar element 20 rotates with its axis 21 as the axis, so that the linear light 71 illuminates the reflective surface 51 for reflection, so that the linear light 71 rotates upward by 90 degrees, and then is output from the light channel 30 and converted into a flat light 72.

The light emitting device 70 may be a fiber laser, a diode-pumped solid-state laser, a semiconductor laser, or a combination thereof, but the present invention is not limited thereto. In this embodiment, the light emitting device 70 is a diode-pumped solid-state laser as an example for illustration, but the present invention is not limited thereto.

Specifically, please refer to FIG. 4 , the shaft device 60 and the light emitting device 70 are both disposed on a horizontal platform 40, a power supply 80 is disposed below the horizontal platform 40, the power supply 80 supplies the power required by the shaft device 60 and the light emitting device 70, and a bearing seat 61 is disposed between the shaft device 60 and the light emitting device 70, and the columnar element 20 is disposed on the horizontal platform 40. The shaft bearing seat 61 is provided with one end of the columnar element 20 on the rotating shaft device 60. The rotating shaft device 60 is a belt pulley. The belt pulley of the rotating shaft device 60 connects the motor and the columnar element 20, thereby transmitting the power provided by the motor to the columnar element 20, so that the columnar element 20 rotates around its axis 21 and its rotation speed is between 1,800 and 29,000 per minute. In this embodiment, the motor of the shaft device 60 uses a voltage of 36 volts and a power of 100 watts, and the motor has a rotation speed of 6,000 per minute. The gear ratio of the pulley is 57:12 to drive the cylindrical element 20. After deducting the kinetic energy loss such as mechanical friction during operation, the final maximum rotation speed of the cylindrical element 20 is 29,000 per minute.

In particular, the rotation speed of the cylindrical element 20 about its axis 21 must be at least 1,800 per minute to convert the linear light 71 into the planar light 72. The rotation speed limit of the cylindrical element 20 is positively correlated with the power used by the motor of the rotating shaft device 60. There is no special limit on the power used by the motor. The most important thing is that the rotation speed of the cylindrical element 20 about its axis 21 must be at least 1,800 per minute.

In this embodiment, the light emitting device 70 is a diode-pumped solid-state laser as an example for illustration. The diode-pumped solid-state laser uses a light source with a power of 2 watts and a wavelength of 532 nanometers. The light source is a green laser light, and the wavelength range of the green laser light is between 520 nanometers and 532 nanometers. The light source irradiates the reflective surface 51 in a path parallel to the horizontal platform 40. The angle X between the light source and the reflective surface 51 is between 0 degrees and 90 degrees, wherein the angle X is preferably 45 degrees. This embodiment is described in this way, but is not limited thereto. The prism 50 is placed at the end of the columnar element 20 with a quadrangular opening and the columnar element 20 is rotated about its axis 21 at a speed of at least 1,800 revolutions per minute. The light emitting device 70 generates the light source, which is a linear light 71 that irradiates the reflecting surface 51 of the prism 50 in a path parallel to the horizontal platform 40. The path of the light source rotates upward by 90 degrees and passes through the light channel 30, so that the linear light 71 is converted into the stable surface light 72.

Please refer to Figures 1, 2, 3 and 5. The prism 50 is a cube formed by splicing two 45-degree isosceles triangle slopes and is set at the quadrilateral end of the columnar element 20. The purpose is to make the mass center of the prism 50 on the axis 21 of the columnar element 20, so that after the columnar element 20 is set with the prism 50, the symmetrical structure and mass equality of the columnar element 20 based on the axis 21 are maintained. A light channel 30 is set in the columnar element 20. The light channel 30 is a T-shaped structure. The T-shaped structure can maintain the symmetrical structure and mass equality of the columnar element 20 based on the axis 21. In particular, the columnar element 20 is a concentric circle structure, the purpose of which is to make the columnar element 20 symmetrical in structure and equal in mass based on the axis 21.

Specifically, the light channel 30 is a T-shaped structure, and the T-shaped structure is a symmetrical structure, wherein the T-shaped structure is a side T-shaped structure, which can make the columnar element 20 have equal mass and reduce eccentricity. Further, please refer to FIG. 2 , the side T-shaped structure takes the axis 21 of the columnar element 20 as the center line, and forms the light channel 30 above, below and to the left of the prism 50. The light channel 30 is a side T-shaped structure to achieve structural symmetry of the columnar element 20. Therefore, when the columnar element 20 rotates at a high speed, the vibration of the shaft device 60 can be reduced and the life of the shaft device 60 can be extended, and the speed limit of the columnar element 20 rotating with the axis 21 as the axis can be increased, so that the rotation speed of the columnar element 20 can reach more than 29,000 per minute.

The purpose of the present invention is to provide a columnar element 20 with a symmetrical structure and equal mass. When the columnar element 20 rotates at high speed with the axis 21 as the axis, the columnar element 20 and the rotating shaft device 60 can rotate smoothly to generate stable surface light 72, and improve the rotation speed limit of the columnar element 20 and extend the service life of the rotating shaft device 60.

However, the above is only a preferred embodiment of the present invention, and it cannot be used to limit the scope of implementation of the present invention. That is, simple equivalent changes and modifications made according to the scope of the patent application and the description of the present invention are still within the scope of the present invention.

10: Surface light generation structure

20: Columnar element

30: Optical channel

50: Prism

60: Rotating shaft device

70: Light-emitting device

72: Surface light

Claims (10)

A surface light generating structure, comprising: A cylindrical element; A light channel, which is arranged in the columnar element; A prism, the prism is disposed in the light channel; A rotating shaft device, the rotating shaft device is connected to the columnar element; and A light emitting device, wherein a light source generated by the light emitting device is irradiated on the prism and the light source is reflected through the light channel to form a surface light. The planar light generating structure as described in claim 1, wherein the columnar element is a symmetrical structure. The surface light generating structure as described in claim 1, wherein the columnar element is a concentric circle structure. The surface light generating structure as described in claim 1, wherein one end of the columnar element is a quadrangle. The surface light generating structure as described in claim 1, wherein the light channel is a T-shaped structure. The surface light generating structure as described in claim 1, wherein the prism is a dichroic mirror. The surface light generating structure as described in claim 1, wherein the prism is a total reflection mirror. The surface light generating structure as described in claim 1, wherein the angle between the prism and the light source is 0 degrees to 90 degrees. The surface light generating structure as described in claim 1, wherein the rotating shaft device is a pulley. The planar light generating structure as described in claim 1, wherein the light emitting device can be a fiber laser, a diode-pumped solid-state laser, a semiconductor laser, and a combination thereof.

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