TWI878020B - Light-emitting element and light-emitting device comprising the same - Google Patents
Light-emitting element and light-emitting device comprising the same Download PDFInfo
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Abstract
Description
本發明係關於一種發光裝置,尤關於一種包含有一對彼此對稱的電極的發光裝置。The present invention relates to a light emitting device, and more particularly to a light emitting device comprising a pair of electrodes symmetrical to each other.
發光二極體(Light-emitting diode;LED)因為兼具節能、壽命長、體積小等諸多優點而在各種照明應用上逐漸取代傳統白熾燈及螢光燈。Light-emitting diodes (LEDs) have gradually replaced traditional incandescent lamps and fluorescent lamps in various lighting applications due to their advantages such as energy saving, long life, and small size.
發光二極體可以進一步透過焊錫等導電材料貼合到一載板上以組合成一發光裝置(light-emitting device)。但是在組合連接的過程中,由於導電材料在固化過程中有流動的現象,可能造成位於導電材料上的發光二極體受到流動的導電材料拉扯而產生位移,進而使得發光二極體無法被結合到正確的位置上。The LED can be further bonded to a substrate through conductive materials such as solder to form a light-emitting device. However, during the bonding process, the conductive material flows during the solidification process, which may cause the LED on the conductive material to be pulled by the flowing conductive material and displaced, thereby making it impossible for the LED to be bonded to the correct position.
前述的發光裝置可以包含一次載體(sub-mount);一焊料(solder)位於上述次載體上,藉由此焊料將發光二極體黏結固定於次載體上並使發光二極體與次載體上之電路形成電連接;其中,上述之次載體 可以是導線架(lead frame)或大尺寸鑲嵌基底(mounting substrate)。The aforementioned light-emitting device may include a primary carrier (sub-mount); a solder (solder) is located on the above-mentioned sub-carrier, and the light-emitting diode is bonded and fixed to the sub-carrier by the solder and the light-emitting diode is electrically connected to the circuit on the sub-carrier; wherein the above-mentioned sub-carrier can be a lead frame (lead frame) or a large-sized mounting substrate (mounting substrate).
本發明係揭露一種發光裝置,包含一發光元件、一載板、一第一接觸以及一第二接觸。發光元件包含一第一電極與一第二電極。第一接觸設置於載板之上並電性連接第一電極,第二接觸設置於載板之上並電性連接第二電極。第一接觸與第一電極的輪廓相似,並且第二接觸與第二電極的輪廓相似。The present invention discloses a light-emitting device, comprising a light-emitting element, a carrier, a first contact and a second contact. The light-emitting element comprises a first electrode and a second electrode. The first contact is disposed on the carrier and electrically connected to the first electrode, and the second contact is disposed on the carrier and electrically connected to the second electrode. The first contact has a similar outline to the first electrode, and the second contact has a similar outline to the second electrode.
本發明係揭露一種發光裝置,包含一發光元件、一載板、一第一接觸與一第二接觸。發光元件包含一第一電極,以及一被第一電極環繞的第二電極。第一電極具有一第一輪廓,第二電極具有一不同於第一輪廓的一第二輪廓。第一接觸設置於載板之上並電性連接第一電極,第二接觸設置於載板之上並電性連接該第二電極,且第二接觸具有一第三輪廓。The present invention discloses a light-emitting device, comprising a light-emitting element, a carrier, a first contact and a second contact. The light-emitting element comprises a first electrode and a second electrode surrounded by the first electrode. The first electrode has a first profile, and the second electrode has a second profile different from the first profile. The first contact is disposed on the carrier and electrically connected to the first electrode, the second contact is disposed on the carrier and electrically connected to the second electrode, and the second contact has a third profile.
本發明係揭露一種發光裝置,包含一發光元件、一載板 、一第一接觸與一第二接觸。發光元件包含一第一電極,以及一具有一第一輪廓並被第一電極環繞的第二電極。第一接觸設置於載板之上並電性連接第一電極,具有第二輪廓的第二接觸設置於載板之上並電性連接第二電極。The present invention discloses a light-emitting device, comprising a light-emitting element, a carrier, a first contact and a second contact. The light-emitting element comprises a first electrode and a second electrode having a first profile and surrounded by the first electrode. The first contact is disposed on the carrier and electrically connected to the first electrode, and the second contact having a second profile is disposed on the carrier and electrically connected to the second electrode.
第1圖為本發明之一實施例的發光元件側視圖。參考第1圖,發光元件10包含一個半導體疊層(semiconductor stack)2、第一電極40與第二電極42,並且第一電極40與第二電極42彼此物理性分離、不互相接觸,可以彼此重疊(但間隔一絕緣層)或不重疊。在一實施例中,一絕緣部形成於第一電極40與第二電極42之間。半導體疊層(semiconductor stack)2包含一第一導電性的第一半導體層(圖未示)、一第二導電性的第二半導體層(圖未示)、以及一個位於第一半導體層及第二半導體層之間的發光層(圖未示),其中發光層可發出一非同調性光。第一半導體層電性連接第一電極40,而第二半導體層電性連接第二電極42。FIG. 1 is a side view of a light emitting device according to an embodiment of the present invention. Referring to FIG. 1, the
第一導電性的第一半導體層和第二導電性的第二半導體層可作為披覆層(cladding layer)或限制層(confinement layer),分別提供在發光層中結合以發出光線的電子(electron)和電洞(hole)。第一導電性的第一半導體層、第二導電性的第二半導體層及/或發光層的組成材料可以包括III-Ⅴ族半導體材料,例如Al
xIn
yGa
( 1-x-y )N或Al
xIn
yGa
( 1-x-y )P,其中0≤x,y≤1;(x + y)≤1。根據發光層的材料,發光元件10可以發射峰值波長在610nm和650nm之間的紅色光、峰值波長在530nm和570nm之間的的綠色光、或峰值波長在450nm和490nm之間的藍色光。
The first semiconductor layer of the first conductivity and the second semiconductor layer of the second conductivity may serve as a cladding layer or a confinement layer, respectively providing electrons and holes that are combined in the light-emitting layer to emit light. The constituent materials of the first semiconductor layer of the first conductivity, the second semiconductor layer of the second conductivity and/or the light-emitting layer may include III-V semiconductor materials, such as AlxInyGa ( 1-xy ) N or AlxInyGa ( 1 -xy ) P, where 0≤x, y≤1; (x+y)≤1. Depending on the material of the light-emitting layer, the light-emitting
電極40、42由金屬材料組成,例如鈦、鎳、金、鉑或鋁。在一實施例中,電極40、42是鈦/鋁/鎳/鋁/鎳/鋁/鎳/金、鈦/鋁/鈦/鋁/鎳/金,或鈦/鉑/鋁/鎳/鋁/鎳/金所組成的多層結構,其中最底下的一層是金,用於與外部的元件直接接觸。The
發光元件10更可以包含波長轉換材料(圖未示)覆蓋半導體疊層(semiconductor stack)2,波長轉換材料可以吸收半導體疊層(semiconductor stack)2所發出的第一光線並將其轉換成峰值波長或主波長不同於第一光線的第二光線。波長轉換材料包含了量子點材料、黃綠色螢光粉、紅色螢光粉或藍色螢光粉。黃綠色螢光粉包含了YAG、TAG,矽酸鹽,釩酸鹽,鹼土金屬硒化物,或金屬氮化物。紅色螢光粉包括氟化物(例如K
2TiF
6:Mn
4+或 K
2SiF
6:Mn
4+)、矽酸鹽、釩酸鹽、鹼土金屬硫化物、金屬氮氧化物、或鎢酸鹽和鉬酸鹽的混合物。藍色螢光粉包括BaMgAl
10O
17:Eu
2+。在一實施例中,第一光線與第二光線混成一白光,白光在CIE1931色度圖中具有一色點座標(x、y),其中,0.27≦x≦0.285;0.23≦y≦0.26。在一實施例中,白光具有一色溫介於2200~6500K(例如2200K、2400K、2700K、3000K、5700K、6500K)且在CIE1931色度圖中具有一色點座標(x、 y)位於7階麥克亞當橢圓(MacAdam ellipse)內。在一實施例中,第一光線與第二光線混成一非白光,例如紅光、琥珀光、紫光或者黃光。在一實施例中,第一光線可以幾乎全部或大多數被轉換成第二光線。
The light-emitting
量子點材料可以由核心(core)與外殼(shell)所組成。核心與外殼可以分別由不同的半導體材料組成,其中外殼的材料相較於核心的材料具有較高的能量障壁,可以減少核心的材料在反覆放出光線的過程中逸散過多的電子,藉此可以減少量子點材料的亮度衰減。核心的材料可選自於由硫化鋅(ZnS)、硒化鋅(ZnSe)、碲化鋅(ZnTe)、氧化鋅(ZnO)、硫化鎘(CdS)、硒化鎘(CdSe)、碲化鎘(CdTe)、氮化鎵(GaN)、磷化鎵(GaP)、硒化鎵(GaSe)、銻化鎵(GaSb)、砷化鎵(GaAs)、氮化鋁(AlN)、磷化鋁(AlP)、砷化鋁(AlAs)、磷化銦(InP)、砷化銦(InAs)、碲(Te)、硫化鉛(PbS)、銻化銦(InSb)、碲化鉛(PbTe)、硒化鉛(PbSe)、碲化銻(SbTe) 、硒化鋅鎘(ZnCdSe)、硫化鋅鎘硒(ZnCdSeS)、及硫化銅銦(CuInS)所組成之群組。外殼的材料與核心的材料必須相互搭配(例如核心與外殼的材料的晶格常數需要匹配)。具體而言,外殼的材料組成之選擇,除了與核心的材料的晶格常數需匹配外,另一個考量是為了能在核心的外圍形成一個高能障區域,以提升量子產率(quantum yield)。為了能同時滿足這兩種性質,可藉由殼的結構及/或組成的改變,一方面減少核心區與殼的應力,一方面拉高能障。殼的結構可以是單層、多層或者材料組成漸變的結構。在一實施例中,核心為硒化鎘,外殼為單層的硫化鋅。在另一實施例中,核心為硒化鎘,外殼包含內層的(鎘, 鋅)(硫, 硒)及外層的硫化鋅。在另一實施例中,核心為硒化鎘,外殼包含內層的硫化鎘,中間漸變層的Zn 0.25Cd 0.75S/Zn 0.5Cd 0.5S/Zn 0.75Cd 0.25S,與外層的硫化鋅。 Quantum dot materials can be composed of a core and a shell. The core and the shell can be composed of different semiconductor materials. The shell material has a higher energy barrier than the core material, which can reduce the excessive electrons emitted by the core material during the repeated emission of light, thereby reducing the brightness attenuation of the quantum dot material. The core material can be selected from zinc sulfide (ZnS), zinc selenide (ZnSe), zinc telluride (ZnTe), zinc oxide (ZnO), cadmium sulfide (CdS), cadmium selenide (CdSe), cadmium telluride (CdTe), gallium nitride (GaN), gallium phosphide (GaP), gallium selenide (GaSe), gallium antimonide (GaSb), gallium arsenide (GaAs), aluminum nitride (AlN), aluminum phosphide (AlP), aluminum arsenide (AlAs), indium phosphide (InP), indium arsenide (InAs), tellurium (Te), lead sulfide (PbS), indium antimonide (InSb), lead telluride (PbTe), lead selenide (PbSe), antimony telluride (SbTe) , zinc cadmium selenide (ZnCdSe), zinc cadmium selenide (ZnCdSeS), and copper indium sulfide (CuInS). The shell material and the core material must match each other (for example, the lattice constants of the core and shell materials need to match). Specifically, the choice of the shell material composition, in addition to matching the lattice constant of the core material, is also to form a high energy barrier region around the core to increase the quantum yield. In order to satisfy both properties at the same time, the shell structure and/or composition can be changed to reduce the stress in the core and shell on the one hand, and raise the energy barrier on the other. The shell structure can be a single layer, multi-layer, or a structure with a gradient material composition. In one embodiment, the core is cadmium selenide and the shell is a single layer of zinc sulfide. In another embodiment, the core is cadmium selenide and the shell comprises an inner layer of (cadmium, zinc) (sulfur, selenium) and an outer layer of zinc sulfide. In another embodiment, the core is cadmium selenide and the shell comprises an inner layer of cadmium sulfide, a middle gradient layer of Zn 0.25 Cd 0.75 S/Zn 0.5 Cd 0.5 S/Zn 0.75 Cd 0.25 S, and an outer layer of zinc sulfide.
發光元件10還可以包含載板,載板可用以承載或支撐發光層。在一實施例中,載板為可用於磊晶成長(epitaxial growth)之基板,基板之材料係例如藍寶石(sapphire)、氮化鎵、矽、碳化矽等,適於在其上形成(例如,磊晶成長技術)三五族或二六族等可以形成發光層之半導體材料。在另一實施例中,載板並非用於直接形成發光層之成長基板,而係用以置換或支撐成長基板之其他支撐構件(支撐構件係例如材料、組成、或形狀不同於成長基板之的結構)。The light-emitting
第2圖為第1圖的發光元件10的仰視圖,其中第一電極40與第二電極42的形狀相似,並且以一虛擬線L0為基準左右對稱,而第一電極40與第二電極42並不與虛擬線L0重疊。虛擬線L0為一示意用途的虛擬線,並非發光元件10上肉眼可視的具體線段,並且圖中的虛擬線L0與發光元件10的幾何中心(圖未示)重疊。參考第2圖,半導體疊層(semiconductor stack)2及內部的發光層(未顯示)具有一方型的輪廓,發光層可用以提供一具有方型輪廓的光場。在一實施例中,第一電極40與第二電極42之間的最短距離大於150μm。FIG. 2 is a bottom view of the light-emitting
第3圖為本發明之一實施例的發光裝置側視圖。參考第3圖,發光裝置1000包含一個半導體疊層(semiconductor stack)2、第一電極40與第二電極42、導電層101、102、第一接觸400、第二接觸420以及載板300。載板300包含有電路(未顯示),電路電性連接第一電極40與第二電極42,讓外部電源可以透過電路提供電力經導電層101、102以及電極40、42讓發光裝置1000發光。參考第4圖,第4圖顯示的是第3圖中載板300以及位於其上的導電層101、102的相對位置,並省略半導體疊層(semiconductor stack)2、第一電極40與第二電極42。第一接觸400與第二接觸420形成於載板300的上表面,並透過導電層101、102與半導體疊層(semiconductor stack)2電性連接。第一接觸400與第二接觸420之上的導電層101、102可以 具有不同的輪廓,並(相對於虛擬線L0)以非對稱的方式形成於第一接觸400與第二接觸420之上。第一接觸400與第二接觸420的形狀相似,彼此以一虛擬線L0為基準左右對稱,而第一接觸400與第二接觸420並不與虛擬線L0重疊。第一接觸400與第一電極40的輪廓相似,第二接觸420與第二電極42的輪廓相似。第一接觸400與第二接觸420可以與載板300上的電路(未顯示)電性連接。導電層101電性連接第一電極40與第一接觸400,導電層102電性連接第二電極42與第二接觸420,並使半導體疊層(semiconductor stack)2被固著於載板300之上。值得注意的是,導電層101、102接觸載板300上的第一接觸400與第二接觸420以及載板300上沒有被第一接觸400或第二接觸420覆蓋的區域。導電層101、102與第一接觸400與第二接觸420之間的接合力,比導電層101、102與載板300上表面沒有第一接觸400或第二接觸420的區域有更強的接合力。導電層與接觸之間的良好附著力可以避免製造過程中導電層101、102大量聚集到載板300上沒有第一接觸400或第二接觸420的區域,反而在第一接觸400或第二接觸420之上沒有導電層101、102而造成半導體疊層(semiconductor stack)2與載板300的電路之間的斷路。此外,良好的附著力也能避免導電層101、102從第一接觸400、第二接觸420或載板300的表面剝落,進而避免發光元件10連同導電層101、102與載板300分離的情況。在一實施例中,第一接觸400與第二接觸420之間的最短距離大於150μm。FIG. 3 is a side view of a light emitting device according to an embodiment of the present invention. Referring to FIG. 3 , the
第4圖為第3圖中的載板300的上視圖,參考第4圖,第一接觸400(第二接觸420)由分支(區域A),以及主體(例如區域B)組成。製造過程中,將導電材料覆蓋在第一接觸400與第二接觸420之上,導電材料可以是銲錫或其他具有導電性質的黏著材料。再將發光元件10下壓並固著在第一接觸400與第二接觸420之上,同時導電材料固著後形成導電層101、102。在下壓的過程中,由於第一接觸400與第二接觸420上所覆蓋導電材料的量不完全相同、第一接觸400與第二接觸420 上的粗糙度差異或是下壓過程中於第一接觸400與第二接觸420 上的施力不相等之類的原因,都會造成導電材料在第一接觸400與第二接觸420上流動,因而形成如第4圖所示導電層101、102具有不同形狀的情況。因此,本發明利用導電材料與第一接觸400、及與第二接觸420之間的接合力大於導電材料與載板300之間的接合力的特性,將第一接觸400與第二接觸420設計成具有區域B與區域A的結構,使得導電材料在下壓過程中主要往同樣材料並相對載板300的表面具有較大接合力的區域A或區域B流動,避免了導電材料四處流竄(例如流動到沒有第一接觸400與第二接觸420所在的載板300之上)的情況,使得導電材料可以留在第一接觸400、第二接觸420上與電極40、42之間。FIG. 4 is a top view of the
另外,值得注意的是,第一接觸400與第二接觸420中的分支(例如區域A)的最大寬度比主體(例如區域B)的最大寬度小。使得分支較主體而言吸引較少的導電材料,進而避免導電材料也通過分支而同時接觸兩個接觸400、420形成短路。同時,發光元件10即使在製造過程中因導電層材料的流動而移動位置,也不易因過多的導電材料造成第一接觸400與第二接觸420同時電性連接發光元件10上的同一個電極40或42而短路的情況。In addition, it is worth noting that the maximum width of the branch (e.g., region A) in the
導電材料可以是焊料(solder)或異方導電膠(Anisotropic Conductive Paste;ACP)。異方導電膠包含含有微錫球的膠或超微陣列式異方性導電膠(ultra-fine pitch fixed array ACP)等導電性膠材。其中,含有微錫球的膠可以是PAL-ACF(particle-aligned anisotropic conductive film)、ACF(Anisotropic Conductive film)、SAP(Self Assembly Anisotropic Conductive Paste)或epoxy solder pate。The conductive material can be solder or anisotropic conductive paste (ACP). Anisotropic conductive paste includes conductive pastes such as paste containing micro-solder balls or ultra-fine pitch fixed array anisotropic conductive paste (ultra-fine pitch fixed array ACP). Among them, the paste containing micro-solder balls can be PAL-ACF (particle-aligned anisotropic conductive film), ACF (Anisotropic Conductive film), SAP (Self Assembly Anisotropic Conductive Paste) or epoxy solder pate.
第5圖為本發明之一實施例的發光元件剖面圖。發光元件20包含一個半導體疊層(semiconductor stack)2與一個電極部6,電極部6包含一第一電極60、一第二電極62以及第一電極60與第二電極62之間的第一絕緣部61,半導體疊層(semiconductor stack)2的細節請參考前述實施例中的相關段落,為簡潔故不另重複說明。電極部6突出於半導體疊層(semiconductor stack)2之上,並具有一大致平坦的表面在遠離半導體疊層(semiconductor stack)2的一側。第6圖為第5圖的發光元件仰視圖。參考第6圖,電極部6具有一方型的輪廓,第二電極62與環繞第二電極62的第一絕緣部61形成一同心圓的結構。此同心圓結構在第6圖的平面圖中具有一中心C1。第一電極60、第一絕緣部61與第二電極62都突出於半導體疊層(semiconductor stack)2之外,並且都具有相同的高度以及一大致齊平的最外表面用以電性連接其他元件。第二電極62的中心C1大致與發光元件20的幾何中心重疊,而第二電極62具有一半徑R1,絕緣部61自中心C1算起具有一半徑R2。第一電極60與第二電極62藉由第一絕緣部61彼此物理性分離、不互相接觸,也不彼此重疊,並且各自電性連接到半導體疊層(semiconductor stack)2內不同電性的半導體層。第一絕緣部61圍繞著第二電極62,並具有與第二電極62同樣的輪廓。在一實施例中,第一絕緣部61與第二電極62具有相近的輪廓,例如圓形或橢圓形。在其他實施例中,第一絕緣部61與第二電極62也可以同樣具有一四邊形、三角形、多邊形或一封閉曲線的形狀。參考第6圖,第一電極60的輪廓與半導體疊層(semiconductor stack)2類似,並且第一電極60的最外邊緣不與半導體疊層(semiconductor stack)2的最外邊緣重疊。發光元件20具有一方型的輪廓,而半導體疊層(semiconductor stack)2以及其中的發光層(未顯示)具有與發光元件20相同的輪廓。也就是說,半導體疊層(semiconductor stack)2具有一方型的輪廓,並且發光層(未顯示)也具有一方型的輪廓。在一實施例中,第一絕緣部61的最窄寬度大於150μm,避免製作第一電極60與第二電極62的過程中,電極60、62的重疊而造成短路。FIG. 5 is a cross-sectional view of a light-emitting device according to an embodiment of the present invention. The light-emitting device 20 comprises a
絕緣部61的材料可以是氧化物、氮化物或聚合物。氧化物包括氧化矽(SiO x)、氧化鈦(TiO x)、氧化鉭(TaO x)或氧化鋁(AlO x)。氮化物包括氮化鋁(AlN x)或氮化矽(SiN x)。聚合物包括聚酰亞胺或苯並環丁烷(BCB)。在另一個實施例中,絕緣部61包括了重複堆疊的低折射率層和高折射率層的多個次層,以形成一布拉格反射層(DBR)。 The material of the insulating portion 61 may be an oxide, a nitride or a polymer. Oxides include silicon oxide ( SiOx ), titanium oxide ( TiOx ), tantalum oxide ( TaOx ) or aluminum oxide ( AlOx ). Nitrides include aluminum nitride ( AlNx ) or silicon nitride ( SiNx ). Polymers include polyimide or benzocyclobutane (BCB). In another embodiment, the insulating portion 61 includes a plurality of sub-layers of repeatedly stacked low refractive index layers and high refractive index layers to form a Bragg reflector (DBR).
第7圖為本發明之一實施例的發光裝置剖面圖。第8圖為第7圖中的載板300的上視圖。第7圖中,發光裝置2000包含一發光元件20透過導電層103固接到載板300之上。參考第8圖,載板300上設置有第一接觸600、第二接觸620與隔離第一接觸600與第二接觸620的第二絕緣部610,第一接觸600、第二接觸620與第二絕緣部610大致等高而具有一齊平的平面。第一接觸600、第二接觸620與第二絕緣部610的輪廓在第8圖的平面圖中大致為圓形,並且第一接觸600、第二接觸620與第二絕緣部610的輪廓形成一同心圓結構,該同心圓結構在第8圖的平面圖中具有一中心C2。第二接觸620具有一中心C2與一半徑R3,第二絕緣部610自中心C2算起具有一半徑R4。在一實施例中,中心C2與載板300的幾何中心重疊。在另一實施例中,第二絕緣部610的最窄寬度大於150μm。在一實施例中,載板300上可設置有多個發光元件20。更具體而言,載板300上設置多組由第二絕緣部610隔開的第一接觸600與第二接觸620,使得每一組第一接觸600與第二接觸620得以電性連接一個發光元件20。如第7圖所示,發光元件20透過導電層103、104固接到載板300上,發光元件20的第一電極60透過導電層103電性連接到第一接觸600,第二電極62透過電層104電性連接到第二接觸620,而第一絕緣部61大致與第二絕緣部610對接。導電層103、104的材料可以是焊料(solder)或異方導電膠(Anisotropic Conductive Paste;ACP)。參考第7圖,導電層103、104的邊緣形狀為弧形。其中,第二電極62的中心C1大致對接到第二接觸620的中心C2。本實施例中,第一接觸600、第二接觸620、第二絕緣部610、第二電極62以及第一絕緣部61都具有圓形的輪廓。其中,第二電極62的半徑R1不大於第二絕緣部610的半徑R4,避免第二電極62同時與第一接觸600及第二接觸620電性連接。並且第二接觸620的半徑R3不大於第一絕緣部61的半徑R2,避免第一電極60與第二電極62一起與第二接觸620電性連接。導電層103、104的兩側分別連接發光元件20以及載板300。在載板300的一側,當導電層103、104與第二絕緣部610相接的時候,導電層103、104與第一接觸600、第二接觸620之間的接合力較佳地大於導電層103、104與第二絕緣部610之間的接合力。在發光元件20的一側,當導電層103、104與第二絕緣部610相接的時候,導電層103、104與第一電極60、第二電極62之間的接合力較佳地大於導電層103、104與第一絕緣部61之間的接合力。第一接觸600、第二接觸620與第二絕緣部610的表面大致齊平,以配合發光元件20的電極部6大致平整的表面。在一實施例中,發光元件20的電極部6具有一包含突起部及/或凹陷部的非平整表面。例如,第二電極62與第一絕緣部61的厚度大於第一電極60的厚度。相對地,載板300的第二接觸620與第二絕緣部610的表面則比第一接觸600的表面更內凹,以配合電極部6的突出外型;而導電層104也填入載板300內凹的部分,使得第二電極62可以透過導電層104電性連接第二接觸620,而導電層103可以電性連接第一電極60與第一接觸600。FIG. 7 is a cross-sectional view of a light emitting device according to an embodiment of the present invention. FIG. 8 is a top view of the
第9圖為本發明之一實施例的發光元件剖面圖。發光元件30包含一個載板204、具有第一導電性的第一半導體層201、發光層202、具有第二導電性的第二半導體層203、第一電極80、第二電極82、以及位於第一電極80與第二電極82之間的凹槽部81。第一導電性與第二導電性可以分別是N型與P型、或P型與N型。第一半導體層201包含一凸起的部分201U,發光層202形成在凸起的部分201U之上,並可發出一非同調性光。參考第9圖,凸起的部分201U大致位於第一半導體層201的中心部分的位置,並且也大致位於發光元件30的中心部分的位置。在一實施例中,第一半導體層201的最上表面為一大致等高的平面,並且發光層202形成於該大致等高的平面上並位在第一半導體層201的中心部分的位置,並且發光層202的中心點(圖未示)大致與第一半導體層201的中心點(圖未示)對齊。第一半導體層201電性連接第一電極80,第二半導體層203電性連接第二電極82。第10圖為第9圖的發光元件30的上視圖。參考第10圖,第二電極82具有一圓形的輪廓,而環繞在第二電極82之外的凹槽部81具有與第二電極82大致相同的圓形輪廓。第二電極82與環繞第二電極82的凹槽部81形成一同心圓的結構。此同心圓結構在第10圖的平面圖中具有一中心C3。第二電極82具有一半徑R5,凹槽部81自中心C3算起具有一半徑R6。發光層202與第二電極82的輪廓大致為相同圓形,因此發光元件30具有一圓形發光區域。第一電極80的外輪廓不限於第10圖中的態樣,第一電極80的外輪廓可以是圓形或其他封閉曲線所形成的各種形狀。凹槽部81在第10圖的平面圖上具有一大致相等的寬度。凹槽部81內包含有空氣。在一實施例中,凹槽部81的最窄寬度大於150μm。在一實施例中,凹槽部81內更包含有絕緣材料,用以電性隔絕第一電極80與發光層202、第二半導體層203以及第二電極82。並且絕緣材料可以是填滿整個凹槽部81,或者僅凹槽部81的部分區域被絕緣材料覆蓋,例如第一電極80靠近發光層202一側的側壁、發光層202靠近第一電極80的側壁、第二半導體層203靠近第一電極80的側壁及/或第二電極82靠近第一電極80的側壁。FIG. 9 is a cross-sectional view of a light-emitting element of an embodiment of the present invention. The light-emitting element 30 includes a carrier 204, a first semiconductor layer 201 having a first conductivity, a light-emitting layer 202, a second semiconductor layer 203 having a second conductivity, a first electrode 80, a second electrode 82, and a groove portion 81 located between the first electrode 80 and the second electrode 82. The first conductivity and the second conductivity can be N-type and P-type, or P-type and N-type, respectively. The first semiconductor layer 201 includes a raised portion 201U, and the light-emitting layer 202 is formed on the raised portion 201U and can emit an incoherent light. Referring to FIG. 9, the raised portion 201U is approximately located at the center of the first semiconductor layer 201, and is also approximately located at the center of the light-emitting element 30. In one embodiment, the uppermost surface of the first semiconductor layer 201 is a plane of substantially equal height, and the light-emitting layer 202 is formed on the plane of substantially equal height and is located at the center of the first semiconductor layer 201, and the center point (not shown) of the light-emitting layer 202 is substantially aligned with the center point (not shown) of the first semiconductor layer 201. The first semiconductor layer 201 is electrically connected to the first electrode 80, and the second semiconductor layer 203 is electrically connected to the second electrode 82. FIG. 10 is a top view of the light-emitting element 30 of FIG. 9. Referring to FIG. 10, the second electrode 82 has a circular profile, and the groove portion 81 surrounding the second electrode 82 has a circular profile substantially the same as that of the second electrode 82. The second electrode 82 and the groove portion 81 surrounding the second electrode 82 form a concentric circle structure. This concentric circle structure has a center C3 in the plan view of FIG. 10. The second electrode 82 has a semi-diameter R5, and the groove portion 81 has a semi-diameter R6 from the center C3. The contours of the light-emitting layer 202 and the second electrode 82 are roughly the same circle, so the light-emitting element 30 has a circular light-emitting area. The outer contour of the first electrode 80 is not limited to the state in FIG. 10, and the outer contour of the first electrode 80 can be various shapes formed by a circle or other closed curves. The groove portion 81 has a substantially equal width in the plan view of FIG. 10. The groove portion 81 contains air. In one embodiment, the narrowest width of the groove portion 81 is greater than 150μm. In one embodiment, the groove portion 81 further includes an insulating material for electrically isolating the first electrode 80 from the light-emitting layer 202, the second semiconductor layer 203, and the second electrode 82. The insulating material may fill the entire groove portion 81, or only a portion of the groove portion 81 may be covered by the insulating material, such as the sidewall of the first electrode 80 close to the light-emitting layer 202, the sidewall of the light-emitting layer 202 close to the first electrode 80, the sidewall of the second semiconductor layer 203 close to the first electrode 80, and/or the sidewall of the second electrode 82 close to the first electrode 80.
在一實施例中,載板204為可用於磊晶成長(epitaxial growth)之基板,基板之材料係例如藍寶石(sapphire)、氮化鎵、矽、氮化矽等,適於在其上形成(例如,磊晶成長技術)三五族或二六族等可以形成發光層之半導體材料。在另一實施例中,載板204並非用於直接形成發光層之材料層或成長基板,而係用以置換或支撐成長基板之其他支撐構件(支撐構件係例如材料、結構、或形狀不同於成長基板之的結構)In one embodiment, the carrier 204 is a substrate that can be used for epitaxial growth. The material of the substrate is, for example, sapphire, gallium nitride, silicon, silicon nitride, etc., which is suitable for forming (for example, epitaxial growth technology) semiconductor materials of group III-V or group II-VI that can form a light-emitting layer thereon. In another embodiment, the carrier 204 is not a material layer or a growth substrate for directly forming a light-emitting layer, but is used to replace or support other supporting members of the growth substrate (the supporting member is, for example, a structure whose material, structure, or shape is different from that of the growth substrate).
參考第10圖,發光層202與第二電極82的輪廓大致相同而具有一圓形的輪廓以提供一圓形的發光區域,也使得發光層202在各方向上的具有大致相同的光學特性,包括發光強度、發出光線的主波長及/或發出光線的峰值波長。並且圓形的輪廓也有便於製造的好處,例如將發光元件30透過導電層接合到載板的過程中,即使發光元件30從原本預定的位置上旋轉了45度,圓形的第二電極82依然能正確對接到載板上的導電區域,並且第一電極80也不會對接到第二電極82該對接的導電區域。相對地,當電極並不具有圓形輪廓的時候,例如第1圖中的電極40、42,若在接合過程中發光元件10旋轉(例如從原本預定的位置旋轉45度),電極40(及/或42)就有機會同時對接到兩個接觸400與420形成短路而造成發光元件10燒毀。Referring to FIG. 10 , the light-emitting layer 202 and the second electrode 82 have substantially the same profile and a circular profile to provide a circular light-emitting area, and the light-emitting layer 202 has substantially the same optical properties in all directions, including the light intensity, the main wavelength of the emitted light, and/or the peak wavelength of the emitted light. The circular profile also has the advantage of being easy to manufacture. For example, in the process of bonding the light-emitting element 30 to the carrier through the conductive layer, even if the light-emitting element 30 is rotated 45 degrees from the originally predetermined position, the circular second electrode 82 can still be correctly connected to the conductive area on the carrier, and the first electrode 80 will not be connected to the conductive area of the second electrode 82 that is to be connected. In contrast, when the electrode does not have a circular profile, such as the
第11圖為本發明之一實施例的發光裝置剖面圖。第12圖為第11圖中載板301的上視圖。發光裝置3000包含一發光元件30透過導電層105、106固接到載板301之上。發光元件30的細節請參考前述實施例中的相關段落。發光裝置3000並未於凹槽部81內填入固態材料,因此在第一半導體層201與載板301之間大致填滿空氣。載板301上設置有第一接觸800、第二接觸820與隔離第一接觸800與第二接觸820的第三絕緣部810。第二電極82透過導電層106與第二接觸820電性連接。第一電極80透過導電層105與第一接觸800電性連接。導電層105與導電層106彼此不接觸,從側視圖觀之,導電層105與導電層106的邊緣形狀為弧形。FIG. 11 is a cross-sectional view of a light-emitting device according to an embodiment of the present invention. FIG. 12 is a top view of the carrier 301 in FIG. 11. The light-emitting device 3000 includes a light-emitting element 30 fixedly connected to the carrier 301 through conductive layers 105 and 106. For details of the light-emitting element 30, please refer to the relevant paragraphs in the aforementioned embodiment. The light-emitting device 3000 does not fill the groove 81 with solid material, so the space between the first semiconductor layer 201 and the carrier 301 is substantially filled with air. The carrier 301 is provided with a first contact 800, a second contact 820 and a third insulating portion 810 isolating the first contact 800 and the second contact 820. The second electrode 82 is electrically connected to the second contact 820 through the conductive layer 106. The first electrode 80 is electrically connected to the first contact 800 through the conductive layer 105. The conductive layer 105 and the conductive layer 106 do not contact each other. From the side view, the edge shape of the conductive layer 105 and the conductive layer 106 is an arc.
參考第12圖,第一接觸800、第二接觸820與環繞第二接觸820的第三絕緣部810形成一同心圓的結構。此同心圓結構在第12圖的平面圖中具有一中心C4。第二接觸820具有一從一中心C4算起的半徑R7,第三絕緣部810具有一從一中心C4算起的半徑R8。第一接觸800、第二接觸820與第三絕緣部810大致等高而具有一齊平的平面。在一實施例中,第三絕緣部810的最窄寬度大於150μm。因此在接合發光元件30與載板301時,若發生發光元件30與載板301對位時的偏差,例如放置發光元件30的位置與預定的距離有一距離d的誤差,當距離d小於第三絕緣部810的最窄寬度時,發光裝置3000仍然能正常運作而不會發生第一電極80與第二接觸820誤接觸,或是第二電極82與第一接觸800誤接觸的情況。在一實施例中,載板301上可設置有多個發光元件30。更具體而言,載板301上設置多組由絕緣部隔開的第一接觸與第二接觸,使得每一組第一接觸800與第二接觸820得以電性連接一個發光元件30。如第11圖所示,發光元件30透過導電層105、106固接到載板301上。第一接觸800、第二接觸820、第三絕緣部810以及第二電極82都具有相近的輪廓,例如一圓形。在其他實施例中,凹槽部81與第二電極82也可以同樣具有一四邊形、三角形、多邊形或一封閉曲線的輪廓。參考第10、11、12圖,第二電極82的半徑不大於第三絕緣部810的最大半徑,避免第二電極82與第一接觸800電性連接。並且第二接觸820的半徑不大於凹槽部81的最大半徑,避免第一電極80與第二接觸820電性連接。導電層105、106的兩側分別連接發光元件30以及載板301。在載板301一側,導電層105與第一接觸800之間的接合力,以及導電層106與第二接觸820之間的接合力,都大於導電層105或導電層106與第三絕緣部810之間的接合力。在一實施例中,第三絕緣部810與導電層105、106相接觸,但第三絕緣部810與導電層105、106之間的接合力,小於導電層105與第一電極80之間的接合力,也小於導電層106與第二電極82之間的接合力。第一接觸800、第二接觸820與第三絕緣部810的表面大致齊平,以配合發光元件30大致等高的電極80、82。在一實施例中,第一接觸800、第二接觸820與第三絕緣部810則配合電極80、82的表面型態突起或者凹下,使得接觸與電極可以緊密接合。Referring to FIG. 12 , the first contact 800, the second contact 820, and the third insulating portion 810 surrounding the second contact 820 form a concentric circle structure. The concentric circle structure has a center C4 in the plan view of FIG. 12 . The second contact 820 has a radius R7 from the center C4, and the third insulating portion 810 has a radius R8 from the center C4. The first contact 800, the second contact 820, and the third insulating portion 810 are substantially equal in height and have a flat surface. In one embodiment, the narrowest width of the third insulating portion 810 is greater than 150 μm. Therefore, when the light-emitting element 30 and the carrier 301 are joined, if there is a deviation in the alignment of the light-emitting element 30 and the carrier 301, for example, there is an error of a distance d between the position of the light-emitting element 30 and the predetermined distance, when the distance d is less than the narrowest width of the third insulating portion 810, the light-emitting device 3000 can still operate normally without the first electrode 80 and the second contact 820 being in contact with each other, or the second electrode 82 and the first contact 800 being in contact with each other. In one embodiment, a plurality of light-emitting elements 30 may be disposed on the carrier 301. More specifically, a plurality of groups of first contacts and second contacts separated by insulating portions are disposed on the carrier 301, so that each group of first contacts 800 and second contacts 820 can be electrically connected to a light-emitting element 30. As shown in FIG. 11, the light-emitting element 30 is fixed to the carrier 301 through the conductive layers 105 and 106. The first contacts 800, the second contacts 820, the third insulating portion 810, and the second electrode 82 all have similar profiles, such as a circle. In other embodiments, the groove portion 81 and the second electrode 82 may also have a quadrilateral, triangle, polygon, or closed curve profile. Referring to Figures 10, 11, and 12, the radius of the second electrode 82 is not larger than the maximum radius of the third insulating portion 810, so as to avoid electrical connection between the second electrode 82 and the first contact 800. Also, the radius of the second contact 820 is not larger than the maximum radius of the groove portion 81, so as to avoid electrical connection between the first electrode 80 and the second contact 820. The two sides of the conductive layers 105 and 106 are connected to the light emitting element 30 and the carrier 301, respectively. On the carrier 301 side, the bonding force between the conductive layer 105 and the first contact 800, and the bonding force between the conductive layer 106 and the second contact 820 are both greater than the bonding force between the conductive layer 105 or the conductive layer 106 and the third insulating portion 810. In one embodiment, the third insulating portion 810 contacts the conductive layers 105 and 106, but the bonding force between the third insulating portion 810 and the conductive layers 105 and 106 is smaller than the bonding force between the conductive layer 105 and the first electrode 80, and also smaller than the bonding force between the conductive layer 106 and the second electrode 82. The surfaces of the first contact 800, the second contact 820 and the third insulating portion 810 are substantially flush to match the electrodes 80, 82 of substantially the same height of the light emitting element 30. In one embodiment, the first contact 800, the second contact 820 and the third insulating portion 810 are protruding or concave to match the surface morphology of the electrodes 80, 82, so that the contacts and the electrodes can be tightly bonded.
第13圖為本發明之一實施例的發光元件仰視圖。發光元件30’大致與發光元件30的結構相似,相關描述請參考前述實施例中的相關段落。發光元件30’具有一圓形的輪廓,由第13圖觀之,發光元件30’的第一電極80、第二電極82與凹槽部81的輪廓大致成一同心圓。由於發光元件30’的輪廓以及發光層(圖未示)的輪廓都是圓形,使得發光元件30’在各方向上的光學特性大致相同。並且在接合發光元件30’到載板 (例如第12圖中的載板301)的過程中,即使發光元件30’有所旋轉,也不會讓發光元件30’的第一電極80或第二電極82同時接觸到載板(例如第12圖中的載板301)上的兩個不同接觸(例如第12圖中的第一接觸800與第二接觸820)而短路。FIG. 13 is a bottom view of a light-emitting element of an embodiment of the present invention. The structure of the light-emitting element 30' is roughly similar to that of the light-emitting element 30. For the relevant description, please refer to the relevant paragraphs in the aforementioned embodiment. The light-emitting element 30' has a circular outline. From FIG. 13, the outlines of the first electrode 80, the second electrode 82 and the groove portion 81 of the light-emitting element 30' are roughly concentric circles. Since the outline of the light-emitting element 30' and the outline of the light-emitting layer (not shown) are both circular, the optical characteristics of the light-emitting element 30' in all directions are roughly the same. Furthermore, during the process of joining the light-emitting element 30' to the carrier (e.g., the carrier 301 in FIG. 12 ), even if the light-emitting element 30' is rotated, the first electrode 80 or the second electrode 82 of the light-emitting element 30' will not simultaneously contact two different contacts (e.g., the first contact 800 and the second contact 820 in FIG. 12 ) on the carrier (e.g., the carrier 301 in FIG. 12 ) to cause a short circuit.
第14圖為本發明之一實施例的發光裝置剖面圖。發光裝置4000包含一發光元件30透過導電層107固接到載板301之上。發光裝置4000與發光裝置3000類似,相關的細節請參考前述實施例中的相關段落。值得注意的是,導電層107為一連續層,同時連接第一電極80與載板301,以及第二電極82與載板301。導電層107包含第一區域107A、第二區域107B以及第三區域107C,其中第一區域107A電性連接第一電極80與載板301上的第一接觸800,第二區域107B電性連接第二電極82與載板301的第二接觸820,而第一區域107A與第二區域107B彼此以第三區域107C隔絕。更進一步來說,第一區域107A與第二區域107B內包含有足夠濃度與數量的導電粒子,藉此達到(於一垂直載板301與導電層107相接的表面的方向上)電性連接發光元件30與載板301上導電區域的效果。而第三區域107C內則沒有導電粒子,或者僅包含有很少量的導電粒子,不足以(在一平行於載板301與導電層107相接的表面的方向上)電性導通第一區域107A與第二區域107B,也不足以(於一垂直載板301與導電層107相接的表面的方向上)導通發光元件30與載板301上導電區域。導電層107內各區域的導電粒子數量/濃度的差異,可以是製造發光裝置4000的製造過程中造成的。具體而言,當導電層107的導電材料覆蓋於載板301之上的時候,導電材料內的導電粒子起初大致為均勻的分布,但在將發光元件30放置並連接到載板301的過程中,施壓或者加熱使得導電材料成為導電層107的過程中,第三區域107C中的導電粒子往區域107A及107B移動。也可以是一預先形成的差異,例如預先形成導電層107,讓第三區域107C的導電粒子數量/濃度低於區域107A、107B的導電粒子數量/濃度,以達到特定區域的垂直方向的導電效果,並(在一平行於載板301與導電層107相接的表面的方向上)電性隔絕部分區域。在一實施例中,導電層107的高度並不一致,位於第一區域107A與第二區域107B之間的第三區域107C的高度較低。導電層107與導電層105、106類似,從第14圖觀之,導電層107的邊緣形狀也為一弧形。FIG. 14 is a cross-sectional view of a light emitting device according to an embodiment of the present invention. The light emitting device 4000 includes a light emitting element 30 fixedly connected to a carrier 301 through a conductive layer 107. The light emitting device 4000 is similar to the light emitting device 3000. For details, please refer to the relevant paragraphs in the aforementioned embodiment. It is worth noting that the conductive layer 107 is a continuous layer, which simultaneously connects the first electrode 80 and the carrier 301, and the second electrode 82 and the carrier 301. The conductive layer 107 includes a first region 107A, a second region 107B, and a third region 107C, wherein the first region 107A is electrically connected to the first electrode 80 and the first contact 800 on the carrier 301, the second region 107B is electrically connected to the second electrode 82 and the second contact 820 of the carrier 301, and the first region 107A and the second region 107B are isolated from each other by the third region 107C. Further, the first region 107A and the second region 107B contain conductive particles of sufficient concentration and quantity, thereby achieving the effect of electrically connecting the light-emitting element 30 and the conductive region on the carrier 301 (in a direction perpendicular to the surface where the carrier 301 and the conductive layer 107 are connected). The third region 107C does not contain any conductive particles, or contains only a small amount of conductive particles, which is insufficient to electrically connect the first region 107A and the second region 107B (in a direction parallel to the surface where the carrier 301 and the conductive layer 107 are connected), and is also insufficient to electrically connect the light-emitting element 30 and the conductive region on the carrier 301 (in a direction perpendicular to the surface where the carrier 301 and the conductive layer 107 are connected). The difference in the amount/concentration of conductive particles in each region of the conductive layer 107 may be caused during the manufacturing process of the light-emitting device 4000. Specifically, when the conductive material of the conductive layer 107 covers the carrier 301, the conductive particles in the conductive material are initially roughly evenly distributed, but in the process of placing the light-emitting element 30 and connecting it to the carrier 301, the conductive material is pressed or heated to form the conductive layer 107, and the conductive particles in the third region 107C move to the regions 107A and 107B. It can also be a pre-formed difference, for example, the conductive layer 107 is pre-formed so that the number/concentration of conductive particles in the third region 107C is lower than the number/concentration of conductive particles in the regions 107A and 107B, so as to achieve a vertical conductive effect in a specific region and electrically isolate a part of the region (in a direction parallel to the surface of the carrier 301 connected to the conductive layer 107). In one embodiment, the height of the conductive layer 107 is not uniform, and the height of the third region 107C between the first region 107A and the second region 107B is lower. The conductive layer 107 is similar to the conductive layers 105 and 106. From FIG. 14 , the edge of the conductive layer 107 is also an arc shape.
以上所述之實施例僅係為說明本發明之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施,當不能以之限定本發明之專利範圍,即大凡依本發明所揭示之精神所作之均等變化或修飾,仍應涵蓋在本發明之專利範圍。The embodiments described above are only for illustrating the technical ideas and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly. They should not be used to limit the patent scope of the present invention. In other words, any equivalent changes or modifications made according to the spirit disclosed by the present invention should still be covered by the patent scope of the present invention.
10、20、30、30’:發光元件
1000、2000、3000、4000:發光裝置
2:半導體疊層(semiconductor stack)
201、203:半導體層
202:發光層
81:凹槽部
40、42、60、62、80、82:電極
6:電極部
61、610、810:絕緣部
204、300、301:載板
101、102、103、104、105、106、107:導電層
400、420、600、620、800、820:接觸
A、B、107A、107B、107C:區域
L0、L1:虛擬線
C1、C2、C3、C4:中心
R1、R2、R3、R4、R5、R6、R7、R8:半徑
10, 20, 30, 30': light-emitting
第1圖為本發明之一實施例的發光元件側視圖;FIG. 1 is a side view of a light emitting element according to an embodiment of the present invention;
第2圖為第1圖的發光元件仰視圖;FIG. 2 is a bottom view of the light emitting element of FIG. 1;
第3圖為本發明之一實施例的發光裝置側視圖;FIG3 is a side view of a light emitting device according to an embodiment of the present invention;
第4圖為第3圖中的載板上視圖;FIG. 4 is a view of the carrier board in FIG. 3;
第5圖為本發明之一實施例的發光元件剖面圖;FIG5 is a cross-sectional view of a light emitting element according to an embodiment of the present invention;
第6圖為第5圖的發光元件仰視圖;FIG6 is a bottom view of the light emitting element of FIG5;
第7圖為本發明之一實施例的發光裝置剖面圖;FIG7 is a cross-sectional view of a light emitting device according to an embodiment of the present invention;
第8圖為第7圖中的載板上視圖;FIG. 8 is a view of the carrier board in FIG. 7;
第9圖為本發明之一實施例的發光元件剖面圖;FIG9 is a cross-sectional view of a light emitting element according to an embodiment of the present invention;
第10圖為第9圖的發光元件上視圖;FIG10 is a top view of the light emitting element of FIG9;
第11圖為本發明之一實施例的發光裝置剖面圖;FIG11 is a cross-sectional view of a light emitting device according to an embodiment of the present invention;
第12圖為第11圖的載板上視圖;FIG. 12 is a view of the carrier board of FIG. 11;
第13圖為本發明之一實施例的發光元件 仰視圖;FIG. 13 is a bottom view of a light emitting element according to an embodiment of the present invention;
第14圖為本發明之一實施例的發光裝置剖面圖。FIG. 14 is a cross-sectional view of a light emitting device according to an embodiment of the present invention.
20:發光元件 20: Light-emitting element
2:半導體疊層(semiconductor stack) 2: Semiconductor stack
40、42:電極 40, 42: Electrode
L0、L1:虛擬線 L0, L1: virtual line
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| US20150263234A1 (en) * | 2012-09-28 | 2015-09-17 | Bbsa Limited | Iii nitride semiconductor device and method of manufacturing the same |
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| TWI488284B (en) * | 2008-08-05 | 2015-06-11 | 三星電子股份有限公司 | Light-emitting element |
| US20150263234A1 (en) * | 2012-09-28 | 2015-09-17 | Bbsa Limited | Iii nitride semiconductor device and method of manufacturing the same |
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