[go: up one dir, main page]

TWI877795B - A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus. - Google Patents

A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus. Download PDF

Info

Publication number
TWI877795B
TWI877795B TW112135514A TW112135514A TWI877795B TW I877795 B TWI877795 B TW I877795B TW 112135514 A TW112135514 A TW 112135514A TW 112135514 A TW112135514 A TW 112135514A TW I877795 B TWI877795 B TW I877795B
Authority
TW
Taiwan
Prior art keywords
dcra
light
reflector array
angle
plane
Prior art date
Application number
TW112135514A
Other languages
Chinese (zh)
Other versions
TW202513275A (en
Inventor
黃旭華
Original Assignee
黃旭華
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黃旭華 filed Critical 黃旭華
Priority to TW112135514A priority Critical patent/TWI877795B/en
Application granted granted Critical
Publication of TWI877795B publication Critical patent/TWI877795B/en
Publication of TW202513275A publication Critical patent/TW202513275A/en

Links

Images

Abstract

This invention is an improvement to the existing Dihedral Corner Reflector Array (DCRA), so it does not generate ghost images, and we can uses the characteristics of the aerial display in stereolithography apparatus. It can greatly speed up the printing speed and increase its accuracy. Because of the application of the new method, many photocuring solvent can be saved, and the generation of residues can also be avoided. After improvement, The printing time can shorten to be only 1/5 of the traditional method.

Description

一種改進型的雙角反射鏡陣列及應用於光固化式積層製造設備及方法 An improved double-angle reflector array and its application in photocuring lamination manufacturing equipment and method

現有的雙角反射鏡陣列(DCRA),自發明以來大部份運用於浮空投影顯示方面;其部份原因是因為其鬼影的產生;難以消除。本發明從理論方面深入分析其產生原因,並提出有效方法加以防治。然後運用其浮空投影的特點,運用於光固化式的(積層製造設備)3D印表機系統之中,可以大幅加快其列印速度及增加精度。當前的光固化式3D印表機,運作起來非常緩慢,經常一個工件要列印要等上2~3小時,令人心急,經常中途列印失敗,不能穩定工作,令人卻步。究其原因,普通的光固化式3D印表機是緊貼著LCD做曝光的,每當曝光完畢,工件必須脫璃曝光區,讓工件不產生沾黏,讓新鮮的溶劑流入曝光區。脫離的過程產生溶劑的搖晃擾動,造成工件品質非常不穩定;列印完沾黏的殘渣更是麻煩無限,每一次都需要更換耗材。改善鬼影效應之後的雙角反射鏡陣列,可以浮空成像在溶劑之中,可以快速連續列印,沒有沾黏問題,使得整個列印時間可以縮短到只有傳統方法的1/5。 Since its invention, the existing dual-angle reflector array (DCRA) has been mostly used in floating projection display. Part of the reason is that it produces ghost images, which are difficult to eliminate. The present invention analyzes the causes of its generation from a theoretical perspective and proposes effective methods to prevent and control it. Then, using its floating projection characteristics, it is applied to the light-curing (layer-by-layer manufacturing equipment) 3D printer system, which can greatly speed up its printing speed and increase its accuracy. The current light-curing 3D printer operates very slowly. It often takes 2 to 3 hours to print a workpiece, which makes people anxious. Printing often fails in the middle and cannot work stably, which makes people hesitate. The reason is that ordinary light-curing 3D printers are exposed in close contact with the LCD. After each exposure, the workpiece must be deglazed in the exposure area to prevent the workpiece from sticking and allow fresh solvent to flow into the exposure area. The deglazing process causes the solvent to shake, resulting in very unstable workpiece quality; the sticky residue after printing is even more troublesome, and the consumables need to be replaced every time. The double-angle reflector array after improving the ghosting effect can float in the solvent, allowing for fast and continuous printing without sticking problems, so that the entire printing time can be shortened to only 1/5 of the traditional method.

浮空投影裝置的發明,2006年前川聰在SPIE(國際光電工程協會)發表論文,利用雙角反射鏡陣列(DCRA),可以形成浮在空中的高品質影像如第1圖。整個系統,含物方110,DCRA元件100及成像方120。物方110與DCRA 元件100有45°夾角,DCRA元件100與成像方120有45°夾角,物方110與成像方120有相互成90°夾角的特徵。僅管實際的成品還有鬼影及低光利用效率的缺點;但其解析度仍然遠遠勝過以往使用傳統光學元件做成的效果。目前經過多年的改良,其做成的浮空投影顯示器已有成功的商業運用。唯鬼影的消除仍然不夠完美,以致於限制了其它的用途。 In 2006, Chuan Cong published a paper in SPIE (International Society of Photoelectric Engineering) on the invention of the floating projection device. By using the double-angle reflector array (DCRA), a high-quality image floating in the air can be formed as shown in Figure 1. The entire system includes an object space 110, a DCRA element 100 and an imaging space 120. The object space 110 and the DCRA element 100 have a 45° angle, the DCRA element 100 and the imaging space 120 have a 45° angle, and the object space 110 and the imaging space 120 have a 90° angle with each other. Although the actual finished product still has the disadvantages of ghosting and low light utilization efficiency; its resolution is still far better than the effect made by using traditional optical elements in the past. After years of improvement, the floating projection display made by it has been successfully used in business. However, the ghost removal is still not perfect enough, which limits its other uses.

關於DCRA的鬼影問題,經過大量的實驗結果,可以發現從物方來的光線,經過DCRA之後,只有一部份變成了有效的成像光線;總括來說;如第2圖,在YZ平面上來看,有大於45度部份的光線140,此部份的光線,無法入射到DCRA中雙角反射面的任何一面;變成雜光被DCRA中的黑色檔光層中吸收消失。有小於45度的光線150,但是可以入射到DCRA中雙角反射面的一個面,但是無法入射到DCRA中雙角反射面的另外一個面,這部份的光線會成像在成像區,變成鬼影光線;有小於45度的光線160,但是都可以連續入射到DCRA中雙角反射面的兩個面,這部份的光線會清楚成像,是我們需要的光線;這三部分的光混雜再一起,變成我們所看到的影像;過去有一些論文提及改變光源的角度分布可以減少鬼影情況,但是當光源的強度增加,人眼仍然能察覺其存在,本發明將從理論及改進設計的觀點,徹底消除鬼影,擴展其在其他成像光學方面的應用。 Regarding the ghosting problem of DCRA, after a large number of experimental results, it can be found that only a part of the light from the object side becomes effective imaging light after passing through DCRA. In summary, as shown in Figure 2, on the YZ plane, there is a part of light 140 greater than 45 degrees. This part of the light cannot be incident on any side of the double-angle reflective surface in DCRA; it becomes stray light and is absorbed by the black light layer in DCRA and disappears. There is light 150 less than 45 degrees, but it can be incident on one side of the double-angle reflective surface in DCRA, but it cannot be incident on the other side of the double-angle reflective surface in DCRA. This part of the light will be imaged in the imaging area and become ghost light; there is light 160 less than 45 degrees, but it can be incident on both sides of the double-angle reflective surface in DCRA continuously. This part of the light will form a clear image, which is the light we need; these three parts of light are mixed together to become the image we see; in the past, some papers mentioned that changing the angular distribution of the light source can reduce the ghost situation, but when the intensity of the light source increases, the human eye can still perceive its existence. The present invention will completely eliminate ghosts from the perspective of theory and improved design, and expand its application in other imaging optics.

關於DCRA做為成像元件應用其他領域;DCRA自從發明以來,因為其卓越的解析度特性,引起許多人的關注,但是令人困擾的鬼影問題,難以擴展其應用;如果能消除鬼影,DCRA將有比傳統成像光學元件更具優勢的應用;比如曝光顯影用的成像鏡頭。傳統的成像鏡頭為了消除球差及畸變;必須堆疊非常多的鏡片組以消除像差,另外是必需做精準位移控制,才能獲 得大面積的精密影像成像;如果加上其必需是在浸潤式的情況成像;鏡頭的工作距離必需足夠,這造成鏡頭設計及製造需克服許多困難,成本也極高。本發明方面走另外的途徑,利用DCRA簡單而且高解析度的特質,設法從理論層次去解析及改變設計,消除鬼影。並且引入到積層製造(3D列印)方面的運用。 Regarding the application of DCRA as an imaging element in other fields; since its invention, DCRA has attracted the attention of many people due to its excellent resolution characteristics, but the annoying ghost problem makes it difficult to expand its application; if ghosting can be eliminated, DCRA will have more advantageous applications than traditional imaging optical elements; such as imaging lenses used for exposure and development. In order to eliminate spherical aberration and distortion, traditional imaging lenses must stack a lot of lens groups to eliminate aberrations, and precise displacement control is required to obtain large-area precision imaging; if it is added that it must be imaged in an immersion situation, the working distance of the lens must be sufficient, which causes many difficulties to be overcome in lens design and manufacturing, and the cost is also extremely high. This invention takes a different approach, using the simplicity and high-resolution characteristics of DCRA to analyze and change the design from a theoretical level to eliminate ghosting. It also introduces the application of multi-layer manufacturing (3D printing).

DLP光固化式積層製造設備,如第3A圖,第3B圖是DLP式的光固化式積層製造設備(以下簡稱3D印表機)200,利用燈泡(或LED)產生的UV光220,將芯片210上的影像,經由220投影鏡頭投影到240光固化溶劑槽240中工件的所在位置250;顯示出切片畫面。在高分子感光溶液中,曝光顯影,凝結成型。然後再移動升降機構裝置260進行下一層切片的投影,曝光成型。這個系統的缺點是,做為光學放大的鏡頭基本上在週邊會產生畸變像差,造成工件變形;解析度品質方面,中心與週邊不一致;往往中心區域解析度可以,週邊會變形及模糊;另外是如圖3C,鏡頭的邊緣光束270,在廣角的情況下,光固化溶劑的濃度會變,導致遠近成像位置280,290會有些微改變,造成成像的大小會變化。這對於越廣角的鏡頭,誤差越嚴重。因此不能太廣角的結果,造成製造的面積沒有辦法很大,而且高品質的光學成像鏡頭價格,也極為昂貴難以接受。 DLP photocuring type multilayer manufacturing equipment, as shown in FIG. 3A and FIG. 3B, is a DLP type photocuring type multilayer manufacturing equipment (hereinafter referred to as 3D printer) 200, which uses UV light 220 generated by a light bulb (or LED) to project the image on the chip 210 to the position 250 of the workpiece in the photocuring solvent tank 240 through the projection lens 220; the slice image is displayed. In the polymer photosensitive solution, the image is exposed and developed, and condensed into a shape. Then the lifting mechanism device 260 is moved to project the next layer of slices and expose and shape them. The disadvantage of this system is that as an optical magnifying lens, it will basically produce distortion aberration at the periphery, causing deformation of the workpiece; in terms of resolution quality, the center and the periphery are inconsistent; often the resolution of the central area is good, but the periphery will be deformed and blurred; in addition, as shown in Figure 3C, the edge beam 270 of the lens will change the concentration of the photocuring solvent in the case of wide angle, resulting in slight changes in the near and far imaging positions 280, 290, causing the size of the image to change. The wider the angle of the lens, the more serious the error. Therefore, the result of not being too wide-angle, resulting in the manufacturing area cannot be very large, and the price of high-quality optical imaging lenses is also extremely expensive and unacceptable.

LCD光固化式積層製造設備,如第4A圖,第4B圖是LCD式的光固化式積層製造設備(以下簡稱3D印表機);利用單色LCD面板320及UV LED背光板310;在光固化溶劑槽330中,顯示切片畫面,透過離形膜在高分子感光溶液中,密接曝光凝結成型。此方法的優點是,製造面積可以比較大,解析度高,中心與週邊解析度平均。缺點如第4C圖,顯示,300A,300B,300C是三種工作狀態,密接曝光,脫離,回復定位點之示意圖,一開始升降機350控制 340工件,與LCD上的離型膜320密接曝光,溶劑凝結成型。然後進行脫離,與離形膜撕裂,(否則無法進行下一層切片製造)。等新的溶濟流入,然後再度與LCD上的離形膜密接,進行下一層切片曝光成型。這裡面LCD面板上的離型膜的作用至為關鍵;一個有400個切片的立體工件,離形膜要能承受分離的撕裂力量而且不留殘渣;(因此經常失敗),離形膜成為必要更換的耗材;品質極為關鍵。另外用使用離形膜,系統必須在切片畫片曝光完之後要分離,讓感光溶液流入曝光區及等待溶液靜止;因此速度上很慢;如果垂直移動的軸承不穩定,會造成列印的工件歪斜扭曲。因此LCD式的光固化式3D印表機僅管成本較低;但仍然被視為低階機種;其列印品質及速度仍然需要大幅改進。 LCD photocuring lamination manufacturing equipment, as shown in Figure 4A, Figure 4B is an LCD-type photocuring lamination manufacturing equipment (hereinafter referred to as 3D printer); using a single-color LCD panel 320 and a UV LED backlight panel 310; in the photocuring solvent tank 330, the slice screen is displayed, and the release film is exposed and condensed in a polymer photosensitive solution. The advantages of this method are that the manufacturing area can be relatively large, the resolution is high, and the center and periphery resolutions are average. The disadvantages are shown in Figure 4C, which shows that 300A, 300B, and 300C are three working states, close exposure, separation, and return to the positioning point. At the beginning, the elevator 350 controls the workpiece 340, and the release film 320 on the LCD is exposed in close contact, and the solvent is condensed to form. Then it is separated and the release film is torn (otherwise, the next layer of slices cannot be made). Wait for the new solvent to flow in, and then it is in close contact with the release film on the LCD again to expose and shape the next layer of slices. The role of the release film on the LCD panel is crucial here; for a three-dimensional workpiece with 400 slices, the release film must be able to withstand the tearing force of separation and leave no residue; (therefore, it often fails), and the release film becomes a consumable that must be replaced; quality is extremely critical. In addition, when using the release film, the system must be separated after the sliced picture is exposed, allowing the photosensitive solution to flow into the exposure area and waiting for the solution to settle; therefore, the speed is very slow; if the vertical moving bearing is unstable, the printed workpiece will be skewed and twisted. Therefore, although LCD-type light-curing 3D printers have lower costs, they are still considered low-end models; their printing quality and speed still need to be greatly improved.

關於下一代用於3d列印的成像元件,綜合以上所述,下一代用於3d列印的成像元件,其必要的條件為: Regarding the next generation of imaging components for 3D printing, based on the above, the necessary conditions for the next generation of imaging components for 3D printing are:

(1)要能有足夠長的工作距離,可以在液體中成像 (1) It must have a sufficiently long working distance to be able to image in liquids

(2)最好是像方遠心成像,也就是稍微改變距離也不影響成像大小 (2) It is best to use telecentric imaging, which means that a slight change in distance will not affect the image size.

(3)能做大面積成像 (3) Capable of large-area imaging

(4)成像元件的成本要低,結構不要太敏感複雜。從以上的條件來看,改進後的DCRA實為最佳的候選元件。 (4) The cost of the imaging element should be low and the structure should not be too sensitive or complex. Based on the above conditions, the improved DCRA is the best candidate element.

本發明針對雙角反射鏡陣列(DCRA)做光線路徑理論的分析,提出一種在輸入光線平面處,設立禁止區,以限制一次反射之無效光線進入單元內的方法;(實務上是將禁止區塗黑),因此可以取出純淨的二次反射之有效光,以消除鬼影。本發明亦藉由理論計算提出,成像解析度與單元大小之數學關係,也就如果能定義希望得到的解析度,便可以依此計算出所需的單元 大小。另外,本發明提出可以將去除鬼影後的雙角反射鏡陣列(DCRA),應用於浸潤式曝光機之方法,並且設計出其架構。另外進一步,本發明提出可以將去除鬼影後的雙角反射鏡陣列(DCRA),應用於光固化積層製造(3D印表機)之方法,並且設計出其架構。新式的光固化積層製造(3D印表機),比傳統形式精準,而且因為可以連續列印,速度相對較快。 The present invention analyzes the light path theory of the dual-angle reflector array (DCRA) and proposes a method to set up a forbidden area at the input light plane to limit the invalid light of the first reflection from entering the unit; (in practice, the forbidden area is painted black), so that the pure effective light of the second reflection can be extracted to eliminate ghosting. The present invention also proposes the mathematical relationship between imaging resolution and unit size through theoretical calculation, that is, if the desired resolution can be defined, the required unit size can be calculated accordingly. In addition, the present invention proposes a method to apply the dual-angle reflector array (DCRA) after ghosting is removed to an immersion exposure machine, and designs its structure. Furthermore, the present invention proposes a method of applying the dual-angle reflector array (DCRA) after ghost removal to photocuring laminated manufacturing (3D printer) and designs its structure. The new photocuring laminated manufacturing (3D printer) is more accurate than the traditional form, and because it can print continuously, the speed is relatively fast.

100:雙角反射鏡陣列(DCRA)平板 100: Double-angle reflector array (DCRA) plate

110:物方在顯示器位置 110: Object is at the display position

120:像方在浮空投影顯像之位置 120: The image side's position in the floating projection display

130:DCRA之單元 130: DCRA Unit

140:與中軸線夾角超過45度之光線,只能打到雙角反射鏡之一面 140: Light that is at an angle of more than 45 degrees to the center axis can only hit one side of the double-angle reflector.

150:與中軸線夾角小過45度之光線,但只能打到雙角反射鏡之一面 150: Light with an angle less than 45 degrees to the central axis can only hit one side of the double-angle reflector

160:與中軸線夾角小過45度之光線,可以打到雙角反射鏡的兩個面 160: Light with an angle less than 45 degrees with the central axis can hit both sides of the double-angle reflector.

170:與中軸線夾角小過45度之光線,可以打到雙角反射鏡之第二面的邊緣點G 170: Light rays with an angle less than 45 degrees with the central axis can hit the edge point G of the second surface of the double-angle reflector.

131:光線進入DCRA之處,在GFEH平面上之點A 131: Where the light enters DCRA, point A on the GFEH plane

132:光線發生第一次反射之處,點B 132: The first reflection of the light, point B

133:光線發生第一次反射之處,點C 133: The first reflection of the light, point C

134:光線離開DCRA之處,點D 134: Where the light leaves DCRA, point D

130A:光線在A’之處入射DCRA單元之一,在ZX平面上之投影 130A: The projection of the light incident on one of the DCRA units at A’ on the ZX plane

130B:光線在A’之處入射DCRA單元之一,在ZX平面上之投影 130B: The projection of the light incident on one of the DCRA units at A’ on the ZX plane

130R:一個DCRA的單元,光線射入角度為正的情況 130R: A DCRA unit with a positive incident angle of light

131R:光線在單元130R內的射入點A’ 131R: The incident point A’ of the light in unit 130R

132R:光線在單元130R內的第一反射點B 132R: The first reflection point B of the light in unit 130R

133R:光線在單元130R內的第二反射點C 133R: The second reflection point C of the light in unit 130R

134R:光線在單元130R內的出射點D 134R: The light exit point D in unit 130R

135R:光線在單元130R內的射入點,延伸到EH邊上之交會點為A 135R: The light enters the unit 130R and extends to the intersection point on the EH edge at A.

130L:一個DCRA的單元,光線射入角度為負的情況 130L: A DCRA unit with a negative incident angle of light

131L:光線在單元130L內的射入點A’ 131L: The incident point A’ of the light in unit 130L

132L:光線在單元130L內的第一反射點B 132L: The first reflection point B of the light in unit 130L

133L:光線在單元130L內的第二反射點C 133L: The second reflection point C of the light in unit 130L

134L:光線在單元130L內的出射點D 134L: The light exit point D in unit 130L

135L:光線在單元130L內的射入點,延伸到EH邊上之交會點為A 135L: The light enters the unit 130L and extends to the intersection point on the EH edge at A.

136:DCRA單元靠近物方之平面,光線射入端 136: DCRA unit close to the object plane, light incident end

137:DCRA單元靠近物方之平面,光線射出端 137: DCRA unit close to the object plane, light emission end

138:DCRA單元靠近物方平面,左側之禁止線,靠左需途黑,是禁止區 138: The DCRA unit is close to the object plane, the prohibited line on the left side, the road to the left must be black, it is a prohibited area

139:DCRA單元靠近物方平面,右側之禁止線,靠右需途黑,是禁止區 139: The DCRA unit is close to the object plane, the prohibited line on the right side, the road to the right must be black, it is a prohibited area

161:光線之入射點A’ 161: Light incident point A’

162:光線之第一個反射點B 162: The first reflection point of light B

163:光線之第二個反射點C 163: The second reflection point of light C

164:光線之出射點D 164: Light emission point D

171:光線之入射點A’ 171: Light incident point A’

172:光線之第一個反射點B 172: The first reflection point of light B

173:光線之第二個反射點C 173: The second reflection point of light C

174:光線之出射點D 174: Light emission point D

180:光路徑向量在YZ平面上之投影 180: Projection of the light path vector on the YZ plane

190:光路徑向量在ZX平面上之投影 190: Projection of light path vector on ZX plane

200:一個使用DLP作為主要成像元件的3D列印機 200: A 3D printer using DLP as the main imaging element

210:DLP芯片 210:DLP chip

220:DLP照明系統 220:DLP lighting system

230:DLP光機之投影鏡頭 230:DLP optical engine projection lens

240:光固化溶劑槽 240: Light-curing solvent tank

250:列印的工件 250: Printed workpiece

260:升降機構裝置 260: Lifting mechanism device

270:曝光投影之邊緣光束 270: Edge beam of exposure projection

280:因溶劑濃度改變,投影距離變長,導致成像面積變大 280: Due to the change in solvent concentration, the projection distance becomes longer, resulting in a larger imaging area

290:因溶劑濃度改變,投影距離變短,導致成像面積變小 290: Due to the change in solvent concentration, the projection distance becomes shorter, resulting in a smaller imaging area

300:一個使用LCD作為主要成像元件的3D列印機 300: A 3D printer using LCD as the main imaging element

310:UVLED光源 310: UVLED light source

320:LCD面板,上面覆蓋一層離型膜 320: LCD panel, covered with a layer of release film

330:光固化溶劑槽 330: Light-curing solvent tank

340:列印的工件 340: Printed workpiece

350:升降機構裝置 350: Lifting mechanism device

300A:工件與LCD上的離型膜密接曝光成型 300A: Exposure molding of the workpiece and the release film on the LCD in close contact

300B:工件與LCD上的離型膜撕裂脫離 300B: The release film on the workpiece and LCD is torn and separated

300C:工件回復到原定位點與LCD密接,LCD顯示下一切片層畫面 300C: The workpiece returns to the original position and is in close contact with the LCD, and the LCD displays the next slice layer screen

500:一個使用改進後之DCRA於3D印表機系統 500: A 3D printer system using improved DCRA

510:經過準直化的UV光源 510: Collimated UV light source

520:不帶光源的LCD面版 520: LCD panel without light source

530:經過改進後,塗黑處理的DCRA平板 530: Improved DCRA flat panel with black finish

540:成像位置,光固化劑凝結之處 540: Imaging position, where the light curing agent condenses

550:光固化劑溶劑槽 550: Light curing agent solvent tank

560:光固化之成品工件 560: Finished workpiece of light curing

570:工件之夾持機構 570: Workpiece clamping mechanism

500A:一個使用改進後之DCRA於3D印表機系統,在初始列印階段示意圖 500A: A schematic diagram of the initial printing stage using the improved DCRA in a 3D printer system

500B:一個使用改進後之DCRA於3D印表機系統,在中途列印階段之一示意圖 500B: A schematic diagram of a 3D printer system using the improved DCRA at a mid-printing stage

500C:一個使用改進後之DCRA於3D印表機系統,在中途列印階段之二示意圖 500C: A schematic diagram of the second printing stage using the improved DCRA in a 3D printer system

500D:一個使用改進後之DCRA於3D印表機系統,在最後列印階段示意圖 500D: A schematic diagram of a 3D printer system using the improved DCRA at the final printing stage

600R:x>0情況下,虛線處為二次反射之有效光線範圍 600R: When x > 0, the dotted line is the effective light range of secondary reflection

610R:x>0情況下,

Figure 112135514-A0305-12-0019-85
<1曲線範圍 610R: x > 0,
Figure 112135514-A0305-12-0019-85
<1 Curve Range

620R:x>0情況下,2-tan(x+

Figure 112135514-A0305-12-0019-83
)<
Figure 112135514-A0305-12-0019-84
曲線範圍 620R: x > 0, 2-tan( x +
Figure 112135514-A0305-12-0019-83
)<
Figure 112135514-A0305-12-0019-84
Curve range

630R:x>0情況下,0<x<

Figure 112135514-A0305-12-0019-82
曲線範圍 630R: x >0, 0< x <
Figure 112135514-A0305-12-0019-82
Curve range

600L:x<0情況下,虛線處為二次反射之有效光線範圍 600L: When x <0, the dotted line is the effective light range of secondary reflection

610L:x<0情況下,

Figure 112135514-A0305-12-0020-86
<1曲線範圍 610L: x <0,
Figure 112135514-A0305-12-0020-86
<1 Curve Range

620L:x<0情況下,2-tan(x+

Figure 112135514-A0305-12-0020-87
)<
Figure 112135514-A0305-12-0020-88
曲線範圍 620L: When x <0, 2-tan( x +
Figure 112135514-A0305-12-0020-87
)<
Figure 112135514-A0305-12-0020-88
Curve range

630L:x<0情況下,-

Figure 112135514-A0305-12-0020-91
<x<0曲線範圍 630L: x <0, -
Figure 112135514-A0305-12-0020-91
<x<0 curve range

700:將600L及610L合併之結果。此時-18.43°<x<18.43° 700: The result of combining 600L and 610L. At this time, -18.43 ° < x <18.43 °

800:將700加上

Figure 112135514-A0305-12-0020-90
<
Figure 112135514-A0305-12-0020-89
曲線範圍之結果,此時-11.3°<x<11.3° 800: add 700
Figure 112135514-A0305-12-0020-90
<
Figure 112135514-A0305-12-0020-89
The result of the curve range is -11.3 ° < x <11.3 °

900:一個使用DCRA的浸潤式曝光機系統 900: An immersion exposure system using DCRA

910:經過準直化的UV光源 910: Collimated UV light source

920:不帶光源的LCD面版 920: LCD panel without light source

930:DCRA平板 930:DCRA flat panel

940:光固化溶劑槽 940: Light-curing solvent tank

950:工件之光成像面 950: Light imaging surface of the workpiece

960:夾持工件機構 960: Workpiece clamping mechanism

圖1 雙角反射鏡陣列(DCRA)系統圖 Figure 1 Dual-corner reflector array (DCRA) system diagram

圖2 進入DCRA的光線之分類示意圖 Figure 2 Schematic diagram of the classification of light entering DCRA

圖3A 一個使用DLP作為主要成像元件的3D列印機之正面示意圖 Figure 3A A schematic diagram of the front view of a 3D printer using DLP as the main imaging element

圖3B 一個使用DLP作為主要成像元件的3D列印機之立體示意圖 Figure 3B A 3D schematic diagram of a 3D printer using DLP as the main imaging element

圖3C 一個使用DLP作為主要成像元件的3D列印機之原理圖 Figure 3C Schematic diagram of a 3D printer using DLP as the main imaging element

圖4A 一個使用LCD作為主要成像元件的3D列印機之正面示意圖 Figure 4A Schematic diagram of the front view of a 3D printer using LCD as the main imaging element

圖4B 一個使用LCD作為主要成像元件的3D列印機之立體示意圖 Figure 4B A three-dimensional schematic diagram of a 3D printer using LCD as the main imaging element

圖4C 一個使用LCD作為主要成像元件的3D列印機之三種工作時的狀態 Figure 4C Three working states of a 3D printer using LCD as the main imaging element

圖5A 光線進入DCRA單元路徑向量之立體示意圖 Figure 5A 3D schematic diagram of the path vector of light entering the DCRA unit

圖5B 光線進入DCRA單元路徑向量之YZ平面分量示意圖 Figure 5B Schematic diagram of the YZ plane component of the path vector of the light entering the DCRA unit

圖5C 光線進入DCRA單元路徑向量之ZX平面分量示意圖 Figure 5C Schematic diagram of the ZX plane component of the path vector of the light entering the DCRA unit

圖6 不同位置光線進入DCRA單元之ZX平面示意圖 Figure 6 Schematic diagram of the ZX plane of light entering the DCRA unit at different positions

圖7 光線向量在ZX平面示意圖,射入角度為正的情況 Figure 7 Schematic diagram of the light vector in the ZX plane, when the incident angle is positive

圖8 當光線射入角度為正,路徑為一次反射及二次反射之解範圍示意圖 Figure 8 Schematic diagram of the solution range when the incident angle of the light is positive and the path is a single reflection and a double reflection

圖9 光線向量在ZX平面示意圖,射入角度為負的情況 Figure 9 Schematic diagram of light vector in the ZX plane, when the incident angle is negative

圖10 當光線射入角度為負,路徑為一次反射及二次反射之解範圍示意圖 Figure 10 Schematic diagram of the solution range when the incident angle of the light is negative and the path is a single reflection and a double reflection

圖11 無論光線射入角度為正或負,路徑為一次反射及二次反射之完整解範圍示意圖 Figure 11 Schematic diagram of the complete solution range for a single reflection and a double reflection path, regardless of whether the incident angle of the light is positive or negative.

圖12 設定P/W範圍及x範圍後,可得純粹之二次反射有效光線解之範圍示意圖 Figure 12 After setting the P/W range and x range, the range diagram of the pure secondary reflection effective light solution can be obtained

圖13 設定P/W範圍及x範圍後,可得純粹之二次反射有效光線解之光線路徑值曲線圖 Figure 13 After setting the P/W range and x range, the light path value curve of the pure secondary reflection effective light solution can be obtained

圖14 一個使用DCRA的浸潤式曝光機系統 Figure 14 An immersion exposure system using DCRA

圖15 在DCRA單元上設立禁止區之立體視圖 Figure 15 3D view of setting up a prohibited area on a DCRA unit

圖16A 在DCRA單元靠近物端,左側設立禁止區之內,有效光線射入,射出光線圖 Figure 16A: Effective light entering and exiting the prohibited area on the left side of the DCRA unit near the object end

圖16B 在DCRA單元靠近物端,左側設立禁止區之外,無效光線射入,射出光線圖 Figure 16B shows the DCRA unit near the object end, with invalid light entering and exiting the forbidden area on the left side.

圖17A 在DCRA單元靠近物端,右側設立禁止區之內,有效光線射入,射出光線圖 Figure 17A: Effective light entering and exiting the prohibited area on the right side of the DCRA unit near the object end

圖17B 在DCRA單元靠近物端,右側設立禁止區之內,無效光線射入,射出光線圖 Figure 17B shows the DCRA unit near the object end, with invalid light entering and exiting the prohibited area on the right side.

圖18 在DCRA陣列上做部分塗黑之XZ平面方向視圖 Figure 18: XZ plane view of partially blackening the DCRA array

圖19 一個使用改進後之DCRA於3D印表機系統之立體視圖 Figure 19 A stereoscopic view of a 3D printer system using the improved DCRA

圖20A 一個使用改進後之DCRA於3D印表機系統之側面視圖 Figure 20A A side view of a 3D printer system using the improved DCRA

圖20B 一個使用改進後之DCRA於3D印表機系統之正面視圖 Figure 20B A front view of a 3D printer system using the improved DCRA

圖21 一個使用改進後之DCRA於3D印表機系統進行連續列印示意圖 Figure 21 A schematic diagram of continuous printing using the improved DCRA in a 3D printer system

DCRA的光學路徑方程(Optical Path Equation) Optical Path Equation of DCRA

以下我們使用光學路徑方程(Optical Path equation)來分析DCRA的有效光線問題,並且提出解決辦法;我們考慮光線有x,y,z的向量,如第5A圖是一道光線入射進DCRA的路徑立體圖及其對應的座標系;進入的點是130,A點,然後打到第一個反射面的140,B點,再打到第二個反射面的150,C點,最後從160,D點出射。整個光向量可以考慮成由如第5B圖之Y平面向量170與如第5C圖之XZ平面向量180組成。XZ平面是DCRA下方的一個菱形的區域,參考第6圖不同光線射入DCRA之XZ平面位置示意圖130A,130B。以130A為例,光線從161,A’點射入,經過162,B點反射,再經過163,C點反射,從164,D點射出。A’B點可以延伸到EH邊線找到交叉點A。以130B為例,光線從171,B’點射入,經過172,B點反射,再經過173,C點反射,從174,D’點射出。CD’點可以延伸到GH邊線找到交叉點D。 Below we use the optical path equation to analyze the effective light problem of DCRA and propose a solution; we consider that light has x, y, z vectors, such as Figure 5A is a three-dimensional diagram of the path of a light incident on DCRA and its corresponding coordinate system; the entry point is 130, point A, then hits the first reflection surface 140, point B, then hits the second reflection surface 150, point C, and finally exits from 160, point D. The entire light vector can be considered to be composed of the Y plane vector 170 in Figure 5B and the XZ plane vector 180 in Figure 5C. The XZ plane is a diamond-shaped area below the DCRA, refer to Figure 6 for the schematic diagrams 130A and 130B of the XZ plane positions of different light rays incident on the DCRA. Taking 130A as an example, the light enters from point 161, A’, reflects from point 162, B, reflects from point 163, C, and exits from point 164, D. Point A’B can be extended to the EH edge to find the intersection point A. Taking 130B as an example, the light enters from point 171, B’, reflects from point 172, B, reflects from point 173, C, and exits from point 174, D’. Point CD’ can be extended to the GH edge to find the intersection point D.

以下我們分析DCRA單元的光學路徑方程如下:假設進入DCRA的光線起點為A’,可以延伸到EH線上之A點。光線先入射到EF反射面,再遇到FG反射面。(先入射到FG,再遇到EF也是一樣的情況) Below we analyze the optical path equation of the DCRA unit as follows: Assume that the starting point of the light entering the DCRA is A’, and it can be extended to point A on the EH line. The light first enters the EF reflective surface, and then encounters the FG reflective surface. (The same situation applies if it first enters FG and then encounters EF)

假設x是光線與X軸夾角,我們將所有經過A點的光線,分成兩群來討論; Assuming x is the angle between the light and the X-axis, we divide all the light rays passing through point A into two groups for discussion;

(1)第一群光線,如第7圖:光線從131R,A’點射入(延伸到EH邊線為135R,A點),在132R,B點反射,在133R,C點反射,從134R,D點射出。 (1) The first group of light rays, as shown in Figure 7: The light rays enter from point 131R, A’ (extending to the EH edge to point 135R, A), are reflected from point 132R, B, are reflected from point 133R, C, and are emitted from point 134R, D.

假設:

Figure 112135514-A0305-12-0007-1
Assumptions:
Figure 112135514-A0305-12-0007-1

其中我們假設菱形邊長EF=FG=GH=HEWAHpHere we assume that the side length of the rhombus EF = FG = GH = HE is W and AH is p .

Figure 112135514-A0305-12-0008-2
Figure 112135514-A0305-12-0008-2

因此進入菱形區域內的光線,經過兩次反射之後,離開菱形區域之總長度為:OPE(x)=AB+BC+CD------------(3) Therefore, after entering the diamond area, the total length of the light leaving the diamond area after two reflections is: OPE ( x ) = AB + BC + CD ------------(3)

其中可以達成兩個面都反射的條件為CG>0。(這裡CG<0,表示光線無法遇到第二個反射面) The condition for achieving reflection on both surfaces is CG > 0. (Here CG < 0 means that the light cannot encounter the second reflection surface)

Figure 112135514-A0305-12-0008-93
Figure 112135514-A0305-12-0008-93

Figure 112135514-A0305-12-0008-4
Figure 112135514-A0305-12-0008-4

Figure 112135514-A0305-12-0008-5
Figure 112135514-A0305-12-0008-5

Figure 112135514-A0305-12-0008-6
Figure 112135514-A0305-12-0008-6

Figure 112135514-A0305-12-0008-7
Figure 112135514-A0305-12-0008-7

Figure 112135514-A0305-12-0008-12
Figure 112135514-A0305-12-0008-12

Figure 112135514-A0305-12-0008-10
Figure 112135514-A0305-12-0008-10

Figure 112135514-A0305-12-0008-11
Figure 112135514-A0305-12-0008-11

Figure 112135514-A0305-12-0009-13
Figure 112135514-A0305-12-0009-13

反射兩次條件

Figure 112135514-A0305-12-0009-14
Reflection twice condition
Figure 112135514-A0305-12-0009-14

此處我們處理一下三角函數以簡化方程

Figure 112135514-A0305-12-0009-15
Here we deal with trigonometric functions to simplify the equation
Figure 112135514-A0305-12-0009-15

Figure 112135514-A0305-12-0009-16
Figure 112135514-A0305-12-0009-16

Figure 112135514-A0305-12-0009-18
Figure 112135514-A0305-12-0009-18

Figure 112135514-A0305-12-0009-19
Figure 112135514-A0305-12-0009-19

總光程可以化簡為:AB=WT 3-pT 3-----------(18) The total optical path can be simplified as: AB = WT 3 - pT 3 -----------(18)

Figure 112135514-A0305-12-0009-20
Figure 112135514-A0305-12-0009-20

=W(T 2-T 3)+pT 3-------------(20) = W ( T 2 - T 3 )+ pT 3 -------------(20)

Figure 112135514-A0305-12-0009-21
Figure 112135514-A0305-12-0009-21

Figure 112135514-A0305-12-0009-22
Figure 112135514-A0305-12-0009-22

Figure 112135514-A0305-12-0009-23
Figure 112135514-A0305-12-0009-23

Figure 112135514-A0305-12-0010-24
Figure 112135514-A0305-12-0010-24

Figure 112135514-A0305-12-0010-25
Figure 112135514-A0305-12-0010-25

反射兩次條件(13)可重寫成:

Figure 112135514-A0305-12-0010-26
Reflecting twice condition (13) can be rewritten as:
Figure 112135514-A0305-12-0010-26

Figure 112135514-A0305-12-0010-27
Figure 112135514-A0305-12-0010-27

Figure 112135514-A0305-12-0010-29
Figure 112135514-A0305-12-0010-29

Figure 112135514-A0305-12-0010-30
Figure 112135514-A0305-12-0010-30

綜合(29)及(1)(2)式,我們以做圖法解析x解的範圍如第8圖。 Combining (29) and (1)(2), we use graphical method to analyze the range of solutions for x as shown in Figure 8.

第8圖之630R以(1)式表示,610R為(2)式表示,620R為(29)式表示 In Figure 8, 630R is represented by formula (1), 610R is represented by formula (2), and 620R is represented by formula (29)

(2)第二群光線如第9圖:此時光線從131R,A’點射入(延伸到EH邊線為135R,A點),在132R,B點反射,在133R,C點反射,從134R,D點射出。 (2) The second group of light rays is shown in Figure 9: At this time, the light rays enter from point 131R, A’ (extending to the EH edge to point 135R, A), reflect at point 132R, B, reflect at point 133R, C, and exit from point 134R, D.

Figure 112135514-A0305-12-0010-31
Figure 112135514-A0305-12-0010-31

此時的反射兩次條件為:

Figure 112135514-A0305-12-0010-32
The conditions for the two reflections at this time are:
Figure 112135514-A0305-12-0010-32

仿照之前的推導方法,可以推導出下式

Figure 112135514-A0305-12-0010-33
Following the previous derivation method, we can derive the following formula:
Figure 112135514-A0305-12-0010-33

我們以X座標代表x(光線與菱形區域中的X軸夾角),以Y座標代表

Figure 112135514-A0305-12-0011-36
,由以上方程式(2)及(30)(32),可作圖如第10圖 We use the X coordinate to represent x (the angle between the light and the x-axis in the diamond area) and the Y coordinate to represent
Figure 112135514-A0305-12-0011-36
, from the above equations (2) and (30)(32), we can draw a graph as shown in Figure 10

第10圖之630L以(30)式表示,610L為(2)式表示,620L為(32)式表示綜合第8圖及第10圖的結果,綜合結果x的範圍700如第11圖所示;虛線的部份是二次反射,有效光線的範圍,從第11圖來看,如果想要得到純粹的二次反射,有效光線,必須同時限制

Figure 112135514-A0305-12-0011-37
值及x值的範圍。 630L in Figure 10 is expressed by equation (30), 610L is expressed by equation (2), and 620L is expressed by equation (32). The combined results of Figures 8 and 10 are shown in Figure 11. The range of the combined result x is 700. The dotted part is the range of secondary reflection and effective light. From Figure 11, if you want to obtain pure secondary reflection and effective light, you must limit
Figure 112135514-A0305-12-0011-37
The range of values and x values.

對DCRA同時做

Figure 112135514-A0305-12-0011-38
x值的範圍做限制以濾除無效光線,如果我們限制了0<
Figure 112135514-A0305-12-0011-39
<
Figure 112135514-A0305-12-0011-40
DCRA
Figure 112135514-A0305-12-0011-38
and x values to filter out invalid light. If we limit 0<
Figure 112135514-A0305-12-0011-39
<
Figure 112135514-A0305-12-0011-40

從(29),(32)式,tan(x+

Figure 112135514-A0305-12-0011-41
)<
Figure 112135514-A0305-12-0011-42
,tan(-x+
Figure 112135514-A0305-12-0011-43
)<
Figure 112135514-A0305-12-0011-44
From (29), (32), tan( x +
Figure 112135514-A0305-12-0011-41
)<
Figure 112135514-A0305-12-0011-42
,tan(- x +
Figure 112135514-A0305-12-0011-43
)<
Figure 112135514-A0305-12-0011-44

我們可以得到:x<0.063π=11.34°;11.34°<x<0,綜合以上:我們可以得到限制-11.34°<x<11.4°x值範圍,800如第12圖顯示之虛線區域,可以得到純粹的二次反射光線。 We can get: x <0.063 π =11.34 ° ; 11.34 ° < x <0, combining the above: we can get the limit -11.34 ° < x <11.4 ° , x value range, 800 as shown in the dotted area in Figure 12, we can get pure secondary reflected light.

光學路徑方程(Optical Path Equation)與DCRA的解析度問題,從(3)及(18)(20)(25)式可以整理出完整的光線路徑方程如下:OPE(x)=AB+BC+CD Optical Path Equation and DCRA resolution problem. From (3) and (18)(20)(25), the complete optical path equation can be obtained as follows: OPE ( x ) = AB + BC + CD

Figure 112135514-A0305-12-0011-34
Figure 112135514-A0305-12-0011-34

Figure 112135514-A0305-12-0011-45
Figure 112135514-A0305-12-0011-45

Figure 112135514-A0305-12-0012-46
Figure 112135514-A0305-12-0012-46

Figure 112135514-A0305-12-0012-47
Figure 112135514-A0305-12-0012-47

此時0<x<

Figure 112135514-A0305-12-0012-56
Figure 112135514-A0305-12-0012-57
At this time 0 < x <
Figure 112135514-A0305-12-0012-56
,
Figure 112135514-A0305-12-0012-57

Figure 112135514-A0305-12-0012-50
(x)這個函數,是一個平滑遞增變化的函數。在x接近
Figure 112135514-A0305-12-0012-48
情況下,函數值會接近無窮大。其物理意義是,光線無法入射到DCRA的第一個反射鏡,是無效的光線。
Figure 112135514-A0305-12-0012-50
( x ) is a smoothly increasing function.
Figure 112135514-A0305-12-0012-48
In this case, the function value will approach infinity. Its physical meaning is that the light cannot enter the first reflector of DCRA and is invalid light.

考慮之前的分析,0<

Figure 112135514-A0305-12-0012-58
<
Figure 112135514-A0305-12-0012-59
及-11.34°<x<11.34°;可以求出
Figure 112135514-A0305-12-0012-60
(x)邊界值如下;假設0<x<0.063π;相當於1.414<T 2<1.803,
Figure 112135514-A0305-12-0012-51
Considering the previous analysis, 0<
Figure 112135514-A0305-12-0012-58
<
Figure 112135514-A0305-12-0012-59
and -11.34 ° < x <11.34 ° ; we can find
Figure 112135514-A0305-12-0012-60
The ( x ) boundary values are as follows; assuming 0 < x < 0.063 π ; this is equivalent to 1.414 < T 2 < 1.803,
Figure 112135514-A0305-12-0012-51

如第13圖,顯示RPE(x)在不同的

Figure 112135514-A0305-12-0012-52
的值情況下的變化圖,其變化量不是很大。 As shown in Figure 13, RPE ( x ) is different in
Figure 112135514-A0305-12-0012-52
The change graph under the value of , the change amount is not very large.

Figure 112135514-A0305-12-0012-53
情況下;
Figure 112135514-A0305-12-0012-54
exist
Figure 112135514-A0305-12-0012-53
In this case;
Figure 112135514-A0305-12-0012-54

Figure 112135514-A0305-12-0012-55
情況下;
Figure 112135514-A0305-12-0013-61
exist
Figure 112135514-A0305-12-0012-55
In this case;
Figure 112135514-A0305-12-0013-61

綜合(37)(38)式可以得到

Figure 112135514-A0305-12-0013-62
Combining equations (37) and (38) we can get
Figure 112135514-A0305-12-0013-62

從(39)式,我們可以得到,

Figure 112135514-A0305-12-0013-65
From (39), we can get,
Figure 112135514-A0305-12-0013-65

OPE(x)<0.354W---------------(40) OPE ( x )<0.354 W ---------------(40)

此值代表DCRA產生的畫素成像的誤差值。 This value represents the pixel imaging error value generated by DCRA.

也就是DCRA產生的畫素成像為W+0.354W=1.354W That is, the pixel image produced by DCRA is W + 0.354 W = 1.354 W.

一般來說,假設我們原始的顯示器之單一畫素邊長為p;則經過DCRA平板之後,最後顯示的邊長p'

Figure 112135514-A0305-12-0013-63
Generally speaking, if the side length of a single pixel of our original display is p , then after passing through the DCRA panel, the side length of the final display is p '
Figure 112135514-A0305-12-0013-63

一個DCRA用於微影光學方面之實施案例:從以上的分析;我們提出一個DCRA用於微影光學方面之實施案例如下:假設我們使用一個手機使用的5.6inchOLED面板;尺寸為151.3*70.1mm;解析度為1080P(2220X1080pixels)的OLED面板;pixel size 68*65um.取最大畫素邊長68um;如果我們希望得到的影像接近原始的OLED面板水準,68um,根據公式(41)(1+0.354)W=68um A practical example of DCRA for lithography: Based on the above analysis, we propose a practical example of DCRA for lithography as follows: Assume that we use a 5.6-inch OLED panel used in mobile phones; the size is 151.3*70.1mm; the resolution is 1080P (2220X1080 pixels); the pixel size is 68*65um. The maximum pixel side length is 68um. If we want to obtain an image close to the original OLED panel level, 68um, according to formula (41)(1+0.354) W = 68 um

W=50um W =50 um

關於DCRA在微影光學的應用,我們都知道,在微影光學中,一個非常高解析度的鏡頭成像裝置是至為關鍵的一部份;為了消除像差及畸變,其結構也變得極為複雜昂貴。我們認為DCRA的單元更微小化之後,以及經過消除鬼影處理,其有潛力可以做為微影光學的成像裝置應用。DCRA可以做浮空投影的特質甚至可以在浸潤式的微影裝置上使用。如第14圖,一個浸潤式的曝光機系統900中,使用了DCRA的示意圖,其中910是UV光源,920是光罩,930是DCRA元件,940是水或是油等折射率介質,950是曝光顯影的工件,960是夾持工件的機構。因為DCRA有足夠的工作距離,因此可以在液體中做曝光顯影的製程。 Regarding the application of DCRA in lithography, we all know that in lithography, a very high-resolution lens imaging device is a critical part; in order to eliminate aberrations and distortions, its structure becomes extremely complex and expensive. We believe that after the DCRA unit is miniaturized and ghosting is eliminated, it has the potential to be used as an imaging device in lithography. The DCRA's ability to perform floating projection can even be used in immersion lithography devices. As shown in Figure 14, a schematic diagram of the use of DCRA in an immersion exposure system 900, in which 910 is a UV light source, 920 is a mask, 930 is a DCRA element, 940 is a refractive index medium such as water or oil, 950 is a workpiece for exposure and development, and 960 is a mechanism for clamping the workpiece. Because DCRA has a sufficient working distance, it can perform exposure and development processes in liquid.

對DCRA做遮罩處理,達成對

Figure 112135514-A0305-12-0014-66
值的限制。 Masking is performed on DCRA to achieve
Figure 112135514-A0305-12-0014-66
Value restrictions.

這裡討論如何在實務上,將DCRA的

Figure 112135514-A0305-12-0014-67
值做限制;如第15圖;DCRA之一單元130,做了遮罩處理的示意圖(左邊是立體視角示意圖,右邊是塗黑區域相對於坐標系之示意圖),從途中可以看到下方光線進入的平面136進行了部分塗黑,上方出口的平面137不做處理)。這個處理方式來自於圖12的結果,對於
Figure 112135514-A0305-12-0014-69
做限制。 This article discusses how to apply DCRA in practice.
Figure 112135514-A0305-12-0014-67
As shown in Figure 15, a unit 130 of DCRA is masked (the left side is a three-dimensional view diagram, and the right side is a diagram of the blackened area relative to the coordinate system). It can be seen from the diagram that the plane 136 where the light enters from the bottom is partially blackened, and the plane 137 at the top of the exit is not processed). This processing method comes from the result of Figure 12.
Figure 112135514-A0305-12-0014-69
Make restrictions.

也就是限制0<

Figure 112135514-A0305-12-0014-70
<
Figure 112135514-A0305-12-0014-71
的範圍,將
Figure 112135514-A0305-12-0014-72
<
Figure 112135514-A0305-12-0014-73
<1的部分(禁止線左方)做塗黑,以限制射入光線的範圍;如第16A圖,130L,考慮入射光與垂直軸的角度x=11.3入射底部平面136,從出口平面137射出,可以發現,左側的禁止線138在其中發揮了作用。在禁止線138右方0<
Figure 112135514-A0305-12-0014-74
<
Figure 112135514-A0305-12-0014-75
的入射光都成為有效光線,二次反 射後從出口平面137射出。如第16B圖,禁止線138也發揮了作用。在禁止線138左方
Figure 112135514-A0305-12-0015-76
<
Figure 112135514-A0305-12-0015-77
<1的一次無效入射光都被阻擋了。 That is, limit 0<
Figure 112135514-A0305-12-0014-70
<
Figure 112135514-A0305-12-0014-71
The range will
Figure 112135514-A0305-12-0014-72
<
Figure 112135514-A0305-12-0014-73
<1 (left side of the forbidden line) is painted black to limit the range of the incident light; as shown in Figure 16A, 130L, considering that the incident light is incident on the bottom plane 136 at an angle x = 11.3 with the vertical axis and exits from the exit plane 137, it can be found that the forbidden line 138 on the left plays a role.
Figure 112135514-A0305-12-0014-74
<
Figure 112135514-A0305-12-0014-75
All incident light becomes effective light and is emitted from the exit plane 137 after secondary reflection. As shown in FIG. 16B , the prohibition line 138 also plays a role.
Figure 112135514-A0305-12-0015-76
<
Figure 112135514-A0305-12-0015-77
All invalid incident light <1 is blocked.

如第17A圖,130R,考慮入射光與垂直軸的角度x=-11.3入射底部平面136,從出口平面137射出,可以發現,右側的禁止線139在其中發揮了作用。在禁止線139左方0<

Figure 112135514-A0305-12-0015-78
<
Figure 112135514-A0305-12-0015-79
的入射光都成為有效光線,二次反射後從出口平面137射出。如第17B圖,禁止線138也發揮了作用。在禁止線139右方
Figure 112135514-A0305-12-0015-80
<
Figure 112135514-A0305-12-0015-81
<1的一次無效入射光都被阻擋了。要注意的是禁止區域的塗黑只有在DCRA單元,面對入射光的平面136進行;出口平面137是不做處理的。 As shown in FIG. 17A, 130R, consider that the incident light is incident on the bottom plane 136 at an angle x = -11.3 with the vertical axis and exits from the exit plane 137. It can be found that the prohibition line 139 on the right side plays a role.
Figure 112135514-A0305-12-0015-78
<
Figure 112135514-A0305-12-0015-79
All incident light becomes effective light and is emitted from the exit plane 137 after secondary reflection. As shown in FIG. 17B , the forbidden line 138 also plays a role.
Figure 112135514-A0305-12-0015-80
<
Figure 112135514-A0305-12-0015-81
<1, all invalid incident light is blocked. It should be noted that the blackening of the forbidden area is only performed on the DCRA unit, on the plane 136 facing the incident light; the exit plane 137 is not processed.

如第18圖是把所有的DCRA單元都做禁止區域塗黑的示意圖;因為其區域很小很精細,在工藝上也需使用微影技術來實現。 For example, Figure 18 shows a schematic diagram of all DCRA units being blackened as prohibited areas; because the area is very small and fine, lithography technology is also required to achieve this in the process.

對DCRA的光源做處理,達成對x值的限制,從前面的分析,要抑制一次反射無效光線,必須要對入射光線做限制;這部分一般可以針對不同的光源,比如LED,做相對應的照明設計,使用準直器反射鏡或透鏡組,將光線角度分布縮小。 The DCRA light source is processed to limit the x value. From the previous analysis, in order to suppress invalid light from one reflection, the incident light must be limited. This part can generally be targeted at different light sources, such as LEDs, and corresponding lighting designs can be made, using collimators, reflectors or lens sets to reduce the angle distribution of light.

關於應用DCRA於光固化式積層製造設備,如上,改善之後的DCRA,可以應用於光固化式積層製造設備(3D印表機);其設計類似於第14圖的浸潤式的曝光機系統900;但是將工件夾持機構960,改成升降機構;可以做精密的垂直軸位移及定位,如第19圖是其立體視圖;並請同時參看第20A、20B圖所示;其結構是使用一個UV光源510,經由一個不帶背光板的LCD面板520,進入一個已做部分塗黑處理的DCRA平板530。然後 最後得到的成像影像540在液體槽550中,560是列印中的工件,570視工件夾持及精密升降裝置。如第20A圖是其側面視圖,第20B圖是其之正視圖;其工作方式是曝光,光固化凝結,升降機往上移位,然後重複曝光,光固化,移位的動作,如第21圖是進行連續列印時,從初始階段500A,到中途階段500B,500C,到最後完成品階段500D之示意圖。與之前提及的LCD形式3D印表機比較起來,因為此形式沒有撕開分離LCD離形膜的過程,可以直接列印,因此速度快很多。 Regarding the application of DCRA in photocuring lamination manufacturing equipment, as mentioned above, the improved DCRA can be applied to photocuring lamination manufacturing equipment (3D printer); its design is similar to the immersion exposure system 900 in Figure 14; but the workpiece clamping mechanism 960 is changed to a lifting mechanism; it can perform precise vertical axis displacement and positioning, as shown in Figure 19, which is a three-dimensional view; and please refer to Figures 20A and 20B at the same time; its structure uses a UV light source 510, through an LCD panel 520 without a backlight, and enters a DCRA flat plate 530 that has been partially blackened. Then The final image 540 is in the liquid tank 550, 560 is the workpiece being printed, and 570 is the workpiece clamping and precision lifting device. Figure 20A is its side view, and Figure 20B is its front view. Its working method is exposure, light curing, and the elevator moves upward, and then the exposure, light curing, and shifting are repeated. Figure 21 is a schematic diagram of continuous printing from the initial stage 500A, to the intermediate stages 500B, 500C, to the final finished product stage 500D. Compared with the LCD type 3D printer mentioned earlier, this type does not have the process of tearing and separating the LCD release film, and can print directly, so the speed is much faster.

500:一個使用改進後之DCRA於3D印表機系統 500: A 3D printer system using improved DCRA

520:不帶光源的LCD面版 520: LCD panel without light source

530:經過改進後,塗黑處理的DCRA平板 530: Improved DCRA flat panel with black finish

550:光固化劑溶劑槽 550: Light curing agent solvent tank

560:光固化之成品工件 560: Finished workpiece of light curing

570:工件之夾持機構 570: Workpiece clamping mechanism

Claims (4)

一種改進型的雙角反射鏡陣列平板及應用於光固化式積層製造設備,至少包含有:一LCD影像顯像裝置;一經過準直化的UV光源,做為LCD影像顯像裝置之背光源;一雙角反射鏡陣列(DCRA)平板,係以四十五度斜置於LCD影像顯像裝置前方,使LCD顯示的立體設計物體的影像切片可以成像在光固化槽中;該雙角反射鏡陣列(DCRA)平板係由多個雙角反射鏡陣列(DCRA)單元組成的光學平板;單元面對入射光之一面為菱形平面,且在該DCRA平板的截面兩個對角點距離的之
Figure 112135514-A0305-13-0001-92
處形成左、右邊各形成一個三角形塗黑區;該塗黑區用以遮擋無法正常成像的光線;一光固化劑溶劑槽;一工件夾持及移動裝置,能將曝光好的影像切片夾持及移動;藉此,將由該光固化劑溶劑槽內所得到立體設計物體的影像切片,漸漸移動堆疊成立體的物件。
An improved double-angle reflector array flat plate and a photocuring type lamination manufacturing device are provided, which at least comprises: an LCD image display device; a collimated UV light source as a backlight source of the LCD image display device; a double-angle reflector array (DCRA) flat plate which is tilted at 45 degrees in front of the LCD image display device so that the image slice of the three-dimensional design object displayed by the LCD can be imaged in the photocuring tank; the double-angle reflector array (DCRA) flat plate is an optical flat plate composed of a plurality of double-angle reflector array (DCRA) units; one side of the unit facing the incident light is a rhombus flat surface, and the distance between the two diagonal points of the cross section of the DCRA flat plate is 1/4 of the distance between the two diagonal points of the cross section of the DCRA flat plate.
Figure 112135514-A0305-13-0001-92
A triangular black area is formed on the left and right sides respectively; the black area is used to block the light that cannot form a normal image; a photocuring agent solvent tank; a workpiece clamping and moving device, which can clamp and move the exposed image slices; thereby, the image slices of the three-dimensional design object obtained from the photocuring agent solvent tank are gradually moved and stacked into a three-dimensional object.
如請求項1所述之一種改進型的雙角反射鏡陣列及應用於光固化式積層製造設備,其中該影像切片在成像處的畫素邊長為p',雙角反射鏡陣列(DCRA)之菱形單元的寬度為W,兩者應符合p'>1.354W的關係式。 An improved dual-angle reflector array and a photocuring lamination manufacturing device as described in claim 1, wherein the pixel side length of the image slice at the imaging location is p ', and the width of the diamond unit of the dual-angle reflector array (DCRA) is W , and both should satisfy the relationship p '> 1.354W . 如請求項1所述之一種改進型的雙角反射鏡陣列及應用於光固化式積層製造設備,該LCD影像顯像裝置之平面與該DCRA平板的平面呈45°角的 關係;該DCRA平板的平面與影像切片的平面間呈45°的關係;而LCD影像顯像裝置與影像切片的平面間呈90°。 An improved double-angle reflector array as described in claim 1 and applied to a photocurable laminate manufacturing device, wherein the plane of the LCD image display device is at a 45° angle to the plane of the DCRA plate; the plane of the DCRA plate is at a 45° angle to the plane of the image slice; and the plane of the LCD image display device is at a 90° angle to the plane of the image slice. 一種應用於光固化式積層製造之方法,其包含如請求項1之一種改進型雙角反射鏡陣列平板及應用於光固化式積層製造之設備,其步驟如下:步驟一,將立體設計物件,預先做切片處理,之後逐一送到紫外光顯像裝置做曝光及位移;步驟二,將工件位移到光成像區;步驟三,將上述之工件曝光,光固化凝結;步驟四,設一升降機,將工件夾持並往上移位一個切片距離;步驟五,重複第三步驟,直到所有切片都曝光固化完成。 A method for photocuring laminate manufacturing, comprising an improved double-angle reflector array plate as claimed in claim 1 and an apparatus for photocuring laminate manufacturing, the steps of which are as follows: Step 1, pre-slice the three-dimensional design object, and then send it to the ultraviolet imaging device one by one for exposure and displacement; Step 2, displace the workpiece to the light imaging area; Step 3, expose the above workpiece, photocuring and solidifying; Step 4, set up an elevator to clamp the workpiece and move it upward by a slice distance; Step 5, repeat the third step until all slices are exposed and cured.
TW112135514A 2023-09-18 2023-09-18 A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus. TWI877795B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW112135514A TWI877795B (en) 2023-09-18 2023-09-18 A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW112135514A TWI877795B (en) 2023-09-18 2023-09-18 A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus.

Publications (2)

Publication Number Publication Date
TWI877795B true TWI877795B (en) 2025-03-21
TW202513275A TW202513275A (en) 2025-04-01

Family

ID=95830317

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112135514A TWI877795B (en) 2023-09-18 2023-09-18 A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus.

Country Status (1)

Country Link
TW (1) TWI877795B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202001344A (en) * 2018-06-07 2020-01-01 財團法人國家實驗研究院 Floating imaging display device including a display light source and at least one array type triangular mirror structure
US20210364818A1 (en) * 2020-05-20 2021-11-25 Hyundai Motor Company Apparatus for displaying floating image and vehicular display module including the same
CN115769110A (en) * 2020-05-15 2023-03-07 三星电子株式会社 Reflection structure, reflection structure array including the same, and floating image display device
CN115917403A (en) * 2020-06-03 2023-04-04 凸版印刷株式会社 air display device
US20230288613A1 (en) * 2022-03-09 2023-09-14 Alps Alpine Co., Ltd. Method for manufacturing optical element, optical element, aerial image display device, and spatial input device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202001344A (en) * 2018-06-07 2020-01-01 財團法人國家實驗研究院 Floating imaging display device including a display light source and at least one array type triangular mirror structure
CN115769110A (en) * 2020-05-15 2023-03-07 三星电子株式会社 Reflection structure, reflection structure array including the same, and floating image display device
US20210364818A1 (en) * 2020-05-20 2021-11-25 Hyundai Motor Company Apparatus for displaying floating image and vehicular display module including the same
CN115917403A (en) * 2020-06-03 2023-04-04 凸版印刷株式会社 air display device
US20230288613A1 (en) * 2022-03-09 2023-09-14 Alps Alpine Co., Ltd. Method for manufacturing optical element, optical element, aerial image display device, and spatial input device

Also Published As

Publication number Publication date
TW202513275A (en) 2025-04-01

Similar Documents

Publication Publication Date Title
EP3264173A1 (en) Transmissive screen and head-up display device using same
US20090097007A1 (en) Illumination optical system, exposure apparatus, and device manufacturing method
KR20200110183A (en) Diffraction light guiding plate
US11426993B2 (en) Three-dimensional printing system
KR20160090916A (en) Illumination apparatus, illumination method, exposure apparatus, exposure method and device manufacturing method
US10768409B2 (en) Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method
JPWO2009125511A1 (en) Spatial light modulation unit, illumination optical system, exposure apparatus, and device manufacturing method
TWI877795B (en) A kind of improved dihedral corner reflector array and its application in stereolithography method and apparatus.
WO2011155409A1 (en) Lenticular lens sheet and process for production thereof, and optical element
CN112578568A (en) Projection optical system and head-up display device of automobile
US1749278A (en) Optical system for use in photographic color processes
JP2004004256A (en) Optical scanning device and two-dimensional image forming device
US20030210385A1 (en) Projection optical system, a projection exposure apparatus provided with the same, as well as a device manufacturing method
US6856377B2 (en) Relay image optical system, and illuminating optical device and exposure system provided with the optical system
WO2007114024A1 (en) Projection optical system, aligner, and method for fabricating device
CN113050387A (en) Optical device, photoetching system comprising same and exposure method thereof
US20230160820A1 (en) Tunable shrinkage and trim process for fabricating gratings
CN109491215A (en) A method of improving the DMD mask-free photolithography precision of images
CN115793196A (en) Projection lens for 3D printer
JP2006078631A (en) Projection optical system and exposure apparatus having the same
JP5831516B2 (en) Image forming apparatus
CN112578569A (en) Projection optical system and head-up display device of automobile
US11981097B1 (en) Pattern printing on prisms
US12320992B2 (en) Floating image display device
JP2006078592A (en) Projection optical system and exposure apparatus having the same