TWI877313B - Thin film peeling method and thin film peeling device - Google Patents

Abstract

A sheet peeling method is a method for peeling an adhesive sheet (AS) attached to an adherend (WK) from the adherend (WK), implementing: an elastic restoring force weakening process in which the elastic restoring force of a peeling starting portion (AS1) of the adhesive sheet (AS) is weakened; and a peeling process in which the peeling starting portion (AS1) with weakened elastic restoring force and the adherend (WK) are moved relative to each other to peel the adhesive sheet from the adherend (WK).

Description

Thin film peeling method and thin film peeling device

The present invention relates to a thin film peeling method and a thin film peeling device.

A known sheet peeling method is to hold the peeling start portion of an adhesive sheet attached to an adherend, move the peeling start portion and the adherend relative to each other, and peel the adhesive sheet from the adherend (for example, document 1: see Japanese Patent Publication No. 11-16862).

In the sheet peeling method of document 1, if the elastic restoring force of the protective sheet F (adhesive sheet) increases, the arc radius of the bent portion ASR (see FIG. 1C of this case) of the adhesive sheet after being peeled from the semiconductor wafer W (adherend) will increase. In this case, the force of the adhesive sheet to lift the adherend from the mounting table 203 (supporting means) (the force component in the direction in which the supporting means separates from the supporting surface of the adhesive sheet and perpendicularly intersects the supporting surface) will increase, and the adherend may fall off the supporting means and be damaged.

The object of the present invention is to provide a thin film peeling method and a thin film peeling device, which can greatly reduce the possibility of an adherend falling off from a supporting means and being damaged.

The present invention adopts the structure described in the patent application scope.

According to the present invention, since the elastic restoring force of the adhesive sheet is weakened, the arc radius of the bent portion of the adhesive sheet can be suppressed from increasing, and the force of the adhesive sheet to lift the adherend from the supporting means will not increase, which can greatly reduce the possibility of the adherend falling off the supporting means and being damaged.

An implementation method of the present invention is described below with reference to FIGS. 1A to 1E.

In addition, the X-axis, Y-axis, and Z-axis of the present embodiment are each perpendicular to each other. The X-axis and the Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Furthermore, in the present embodiment, when directions are displayed based on the situation of viewing from the front direction of FIG. 1A parallel to the Y-axis, "up" is the arrow direction of the Z-axis, and "down" is the opposite direction thereof, "left" is the arrow direction of the X-axis, and "right" is the opposite direction thereof, and "front" is the front direction of FIG. 1A parallel to the Y-axis, and "rear" is the opposite direction thereof.

The sheet peeling device EA of the present invention is a device for peeling an adhesive sheet AS attached to an adherend WK from the adherend WK, and comprises: an elastic restoring force weakening means 10 for weakening the elastic restoring force of a peeling starting portion AS1 of the adhesive sheet AS; and a peeling means 20 for moving the peeling starting portion AS1 whose elastic restoring force has been weakened and the adherend WK relative to each other to peel the adhesive sheet AS from the adherend WK; and the device is arranged in the vicinity of a supporting means 30 for supporting the adherend WK.

The elastic restoring force reducing means 10 is an elastic restoring force reducing means 10A that reduces the elastic restoring force of the adhesive sheet AS by reducing the thickness of a part of the adhesive sheet AS. The elastic restoring force reducing means 10A comprises: a driving machine, i.e., a multi-joint robot arm 11, which is composed of a plurality of arms and can displace the object supported by the working part, i.e., the front end arm 11A, to any position and any angle within its working range; and a cutting blade 12 as a cutting member supported by the front end arm 11A.

The peeling means 20 includes: a discharging means 21 for discharging the heat-sensitive adhesive peeling tape PT, a pressing means 22 for pressing the peeling tape PT to adhere it to the adhesive sheet AS, a cutting means 23 for cutting the peeling tape PT into a predetermined length, and a linear motor 24 as a driving mechanism.

The discharging means 21 comprises: a supporting roller 21A supporting the peeling tape PT, a guide roller 21B guiding the peeling tape PT, a sliding pallet 21E supported by a slider 21D of a linear motor 21C serving as a driving machine, a pushing roller 21H serving as a pushing member rotatably supported by an output shaft 21G of a linear motor 21F serving as a driving machine, and a holding means having a pair of gripping claws 21J and serving as a clamping cylinder 21K serving as a driving machine.

The pressing means 22 includes a linear motor 22A as a driving mechanism, a heating means 22C including a coil heater and a heating side of a heating tube supported by an output shaft 22B of the linear motor 22A, and a pressing head 22D as a pressing member supported by the heating means 22C.

The cutting means 23 includes a linear motor 23A as a driving mechanism and a cutting blade 23C as a cutting member supported by an output shaft 23B of the linear motor 23A.

The supporting means 30 includes a mounting table 31, which is supported by the slider 24A of the linear motor 24 and has a supporting surface 31A that can be sucked and held by a decompression means (holding means) (not shown) such as a decompression pump and a vacuum ejector.

The operation of the above-mentioned sheet peeling device EA is described.

First, for the sheet peeling device EA, each component of which is arranged at the initial position shown by the solid line in FIG. 1A, the user of the sheet peeling device EA (hereinafter simply referred to as "user") assembles the peeling tape PT as shown in the figure, and then inputs a signal for starting automatic operation through an operating means such as an unillustrated operation panel and a personal computer. Then, if the user or an unillustrated transport means such as a multi-jointed robot arm and a belt conveyor places an adherend WK attached with an adhesive sheet AS on the support surface 31A as shown by the solid line in FIG. 1A, the support means 30 drives the unillustrated pressure reducing means to start adsorption and retention of the adherend WK on the support surface 31A.

Thereafter, the elastic restoring force weakening means 10 drives the multi-joint robot arm 11, as shown by the two-dot lock line in FIG. 1A, and forms a cut groove CU (see FIG. 1B) in the adhesive sheet AS that does not reach the adherend WK, thereby thinning the thickness of a portion of the adhesive sheet AS, and weakening the elastic restoring force of the adhesive sheet AS (elastic restoring force weakening process). In the case of the present embodiment, the elastic restoring force weakening means 10 is, as shown in FIG. 1B, a cut groove CU extending in a direction parallel to a direction perpendicular to the peeling direction of the adhesive sheet AS (hereinafter, also referred to as the "peeling direction"), and is formed in multiple directions in the peeling direction of the adhesive sheet AS.

Next, the peeling means 20 drives the linear motor 24 to move the mounting table 31 to the right, and when the right end of the adhesive sheet AS is located directly below the pressing head 22D, the driving of the linear motor 24 is stopped. Furthermore, the peeling means 20 drives the linear motor 21C to move the sliding plate 21E to the right as shown by the two-dot lock line in FIG. 1A, and discharges the peeling tape PT between the pair of gripping claws 21J. Next, the peeling means 20 drives the linear motor 21F and the linear motor 21C to retract the push roller 21H upward, and after returning the slide pallet 21E to the initial position, drives the clamping cylinder 21K to hold the peeling tape PT by the holding claw 21J. Thereafter, the peeling means 20 drives the linear motor 22A and the heating means 22C to lower the heated pushing head 22D, and as shown in FIG. 1C, the pushing head 22D pushes the peeling tape PT to adhere to the right end of the adhesive sheet AS, and the peeling start portion AS1 is maintained.

Next, the peeling means 20 drives the linear motor 21F to return the push roller 21H to the initial position, and then drives the linear motor 23A to lower the cutting blade 23C to cut the peeling tape PT as shown in FIG. 1C. Furthermore, the peeling means 20 drives the linear motors 22A and 23A to return the push head 22D and the cutting blade 23C to the initial position, and then drives the linear motor 24 to move the mounting table 31 to the right as shown by the two-dot dashed line in FIG. 1C to peel the adhesive sheet AS from the adherend WK (peeling process). At this time, in the case of the adhesive sheet AS without the cut groove CU, as shown by the two-dot lock line in Figure 1C, the bending portion ASR becomes the bending portion ASR1 with a large arc radius. In contrast, the adhesive sheet AS whose elastic restoring force is weakened by the cut groove CU becomes the bending portion ASR2 with a smaller arc radius than the bending portion ASR1.

When the adhesive sheet AS is completely peeled off from the adherend WK, the peeling means 20 stops driving the linear motor 24, and the supporting means 30 also stops driving the pressure reducing means (not shown), and releases the adhering holding of the adherend WK in the supporting surface 31A. Then, the peeling means 20 drives the clamping cylinder 21K to return the gripping claw 21J to the initial position, releases the grip of the peeling tape PT, and delivers the peeled adhesive sheet AS to the collection means (not shown) such as a collection box and a collection bag, and to the user. Afterwards, the user or the unillustrated transporting means transports the adhered body WK to the next process, and each means drives each driving machine to return each component to the initial position, and then repeats the same action as above.

According to the above implementation method, since the elastic restoring force of the adhesive sheet AS can be weakened, the arc radius of the bending portion ASR of the adhesive sheet AS can be suppressed from increasing. The force of the adhesive sheet AS to lift the adherend WK from the supporting means 30 will not increase, and the possibility of the adherend WK falling off the supporting means 30 and being damaged can be greatly reduced.

As mentioned above, the best structures, methods, etc. for practicing the present invention are as mentioned above, but the present invention is not limited to them. That is, the present invention only specifically illustrates and explains the main and specific implementation methods, but within the scope of the technical ideas and purposes of the present invention, the industry can add various deformations to the above-mentioned implementation methods in terms of shape, material, quantity, and other detailed structures. Moreover, the description of the above-mentioned limited shapes, materials, etc. is only for the purpose of easily understanding the present invention, and is not used to limit the present invention. Therefore, even if the names of some or all components of those shapes, materials, etc. are not limited, they are also included in the present invention.

For example, the elastic restoring force reducing means 10, as shown in FIG. 1D, may also adopt a structure in which a groove DC is formed in the adhesive sheet AS by the cutting blade 23C. This groove DC may be, for example, a V-shape in cross-sectional view as shown in the same figure, or any other U-shape, C-shape, or the like. As shown by the two-dot lock line in the figure, the upper part of the groove DC may be connected.

The elastic restoring force weakening means 10 may be formed by forming the grooves CU and the grooves DC extending in a non-parallel direction in a direction perpendicular to the peeling direction, or by forming the grooves CU and the grooves DC parallel to or non-parallel to each other in the peeling direction of the adhesive sheet AS in plurality, or by forming the grooves CU and the grooves DC in a cross-sectional manner, or by forming the grooves CU and the grooves DC in the entire adhesive sheet AS, or by forming the grooves CU and the grooves DC in the adhesive sheet AS to which the peeling tape PT is attached. Groove DC may be formed in a specified portion of the adhesive sheet AS, or an odd number of grooves CU and DC may be formed. As shown in FIG. 1B , grooves CU and DC may be formed to reach the outer edge of the adherend WK, or grooves CU and DC may be formed to not reach the outer edge of the adherend WK. Grooves CU and DC may be in any shape, such as straight lines, curved lines, folded lines, wavy lines, circular lines, polygonal lines, etc.

The elastic restoring force reducing means 10 may also be an elastic restoring force reducing means 10B that reduces the elastic restoring force of the adhesive sheet AS by thinning the entire adhesive sheet AS as shown in FIG. 1E. Such elastic restoring force reducing means 10B may be, for example, a structure including a grinding means 14 such as a grinder, a grindstone, a file, sandpaper, etc. supported on an output shaft 13A of a rotary motor 13 as a driving machine. Furthermore, the elastic restoring force reducing means 10B may be, for example, a structure in which the elastic restoring force of the adhesive sheet AS is reduced by thinning a portion of the adhesive sheet AS by means of the grinding means 14.

The elastic restoring force weakening means 10 may be to weaken the elastic restoring force of the adhesive sheet AS by softening the adhesive sheet AS as a whole or in part. For example, when the adhesive sheet AS is softened by heating and cooling to weaken the elastic restoring force, the adhesive sheet AS may be weakened by applying hot air and hot water, or applying cooling air and cold water, etc. The adhesive sheet AS is subjected to microwave, X-ray, gamma ray, ultraviolet ray, visible light, etc. In the case where the elastic restoring force is weakened by applying energy rays such as infrared rays, or applying chemical liquid, the elastic restoring force of the adhesive sheet AS may be weakened by applying energy rays to the adhesive sheet AS, or applying chemical liquid to the adhesive sheet AS. Hot air, hot water, cooling air, cold water, energy rays, or chemical liquid may be applied to the entire adhesive sheet AS, or to a specified part of the adhesive sheet AS, thereby making the adhesive sheet AS soft as a whole or in part.

The elastic restoring force weakening means 10 is to form a groove CU, form a groove DC, grind the adhesive sheet AS, apply hot air and hot water, apply cooling air and cold water, apply energy rays, apply a chemical solution, etc., and at least two of them are applied to the adhesive sheet AS to weaken the elastic restoring force of the adhesive sheet AS, or the elastic restoring force of the adhesive sheet AS before being attached to the adherend WK can be weakened.

The peeling means 20 is, for example, a linear motor having a slide supporting the clamping cylinder 21K as a driving mechanism, and the peeling start portion AS1 and the adherend WK are moved relative to each other by keeping the mounting table 31 stationary or moving and moving the clamping cylinder 21K. Alternatively, the clamping cylinder 21K and the mounting table 31 may be moved relative to each other by a driving mechanism such as a multi-jointed robot arm. The operator moves the peeling start portion AS1 relative to the adherend WK. 1 and the adherend WK may be moved relative to each other, the peeling tape PT may be attached to a position where the cutting groove CU is formed, or the peeling tape PT may be attached to a position where the cutting groove CU is not formed. Instead of using the peeling tape PT, the peeling starting portion AS1 whose elastic restoring force has been weakened may be directly held by holding means such as a suction cup and a clamping tube, so that the peeling starting portion AS1 and the adherend WK may be moved relative to each other.

The peeling tape PT may be a pressure-sensitive adhesive peeling tape PT. Furthermore, when the pressure-sensitive adhesive peeling tape PT is used, the peeling means 20 may or may not be equipped with the heating means 22C.

The pushing means 22 may be a heating means such as a discharge heater, a microwave irradiation device, a warm air blowing device, etc., or a vibration means such as an ultrasonic vibration device and a vibrator that vibrates the pushing head 22D may be used instead of or in combination with the heating means.

The supporting means 30 may not be provided with a decompression means (not shown), and the sheet peeling apparatus EA of the present invention may or may not be provided with the decompression means.

The sheet peeling device EA may include grinding means for grinding the adherend WK to reduce the thickness of the adherend WK, or may include integration means for integrating the adherend WK and the frame member via other adhesive sheets such as dicing tape and stretch tape.

The frame member may be annular or non-annular (not connected at the outer circumference), but may also be circular, elliptical, a polygon larger than a triangle, or other shapes.

The means and processes of the present invention are not limited in any way as long as they can achieve the described means and process actions, functions or processes, and are not limited to the components and processes of one embodiment shown in the above-mentioned embodiment. For example, if the peeling process is a process of peeling the adhesive sheet from the adherend, any process is acceptable, and there is no limitation if it is within the technical scope compared with the technical common sense at the time of the application (the same applies to other means and processes).

The materials, types, shapes, etc. of the adhesive sheet AS, the peeling tape PT, and the adherend WK are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be circular, elliptical, triangular, quadrilateral, or other polygonal shapes, and the adhesive sheet AS may be a pressure-sensitive adhesive, a heat-sensitive adhesive, or other adhesive form. Furthermore, this adhesive sheet AS may be, for example, a single-layered sheet having only an adhesive layer, a sheet having an intermediate layer between the substrate and the adhesive layer, a sheet having three or more layers, etc. Furthermore, it may be a double-sided adhesive sheet from which the substrate can be peeled off from the adhesive layer. The double-sided adhesive sheet may be a single-layered or multiple-layered intermediate layer, or a single-layered or multiple-layered adhesive sheet without an intermediate layer. Furthermore, the adherend WK may be, for example, a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer and a compound semiconductor wafer, a circuit substrate, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wood board, or a resin, or a composite formed of two or more of these, or any form of components and articles. Furthermore, the adhesive sheet AS may be any sheet, film, tape, etc., which is changed into a recording method with functionalities and uses, for example, an information recording label, a decorative label, a protective sheet, a dicing tape, a chip fixing sheet, a die bonding tape, a recording layer forming resin sheet, etc.

The driving machine of the above-mentioned embodiment can adopt: electric machines such as rotary motors, linear motors, linear motors, single-axis robots, multi-joint robots with 2-axis or 3-axis joints, pneumatic cylinders, hydraulic cylinders, rodless cylinders and rotary cylinders, etc., and those can be directly or indirectly combined.

In the above-mentioned embodiment, when a rotating component such as a roller is used, a driving machine for driving the rotating component to rotate may be provided, the surface of the rotating component and the rotating component itself may be composed of deformable components such as rubber and resin, the surface of the rotating component and the rotating component itself may be composed of non-deformable components, and other components such as rotating or non-rotating shafts and blades may be used instead of rollers. When pushing is performed by using a pushing means such as a pushing roller and a pushing head and a pushed object of a pushing component, the above-mentioned examples may be replaced or used in combination with components such as rollers, round bars, leaf materials, rubber, resin, sponges, etc., or a structure in which pushing is performed by blowing gas such as air and gas may be adopted. The pusher may be composed of a deformable component such as rubber and resin, or may be composed of a non-deformable component. In the case of using a supporting (holding) means and a supporting (holding) member to support (hold) a supported member (held member), a structure in which the supported member is supported (held) by a holding means such as a mechanical chuck and a clamping cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), a magnetic force, Bernoulli adsorption, suction adsorption, a driving mechanism, etc. may be used. In the case of using cutting means and cutting members to cut the member to be cut or forming an incision and cutting line in the member to be cut, the above-mentioned examples can be replaced or used in combination with cutting by a cutter, a laser cutter, an ion beam, fire, heat, water pressure, an electric heating wire, blowing of gas and liquid, etc., or by moving a cutter combined with an appropriate driving machine.

10: Elastic restoring force weakening means 10A: Elastic restoring force weakening means 10B: Elastic restoring force weakening means 11: Multi-joint robot arm 11A: Front arm 12: Cutting blade 13: Rotating motor 13A: Output shaft 14: Grinding means 20: Peeling means 21: Discharging means 21A: Support roller 21B: Guide roller 21C: Linear motor 21D: Slide 21E: Sliding pallet 21F: Linear motor 21G: Output shaft 21H: Push roller 21J: Gripping claw 21K: Clamping cylinder 22: Pushing means 22A, 23A: Linear motor 22B: Output shaft 22C: Heating means 22D: Pressing head 23: Cutting means 23A: Linear motor 23B: Output shaft 23C: Cutting blade 24: Linear motor 24A: Slider 30: Support means 31: Loading table 31A: Support surface 203: Loading table AS: Adhesive sheet AS1: Peeling start ASR: Bend ASR1: Bend ASR2: Bend DC: Groove EA: Sheet peeling device F: Protective sheet PT: Peeling tape W: Semiconductor wafer WK: Adhesive body

[Figure 1A] is an explanatory diagram of a sheet peeling device of an embodiment of the present invention. [Figure 1B] is an explanatory diagram of a sheet peeling device of an embodiment of the present invention. [Figure 1C] is an explanatory diagram of a sheet peeling device of an embodiment of the present invention. [Figure 1D] is an explanatory diagram of a modified example of the present invention. [Figure 1E] is an explanatory diagram of a modified example of the present invention.

10: Measures to reduce elastic resilience

10A: Elastic resilience reduction measures

11: Multi-joint robotic arm

11A: Front arm

12: Cutting blade

20: Divorce means

21: Spitting method

21A: Support roller

21B: Guide roller

21C: Linear Motor

21D: Slide

21E: Sliding pallet

21F: Linear Motor

21G: Output shaft

21H: Push the roller

21J: Gripping claws

21K: Clamping tube

22: Pushing method

22A: Linear Motor

22B: Output shaft

22C: Heating method

22D: Pushing head

23: Cut-off means

23A: Linear Motor

23B: Output shaft

23C: Cutting blade

24: Linear Motor

24A: Slider

30: Supporting means

31: Loading platform

31A: Support surface

AS: Adhesive Sheet

AS1: Peel off the start part

EA: Flake stripping device

PT: Peeling tape

WK: Adhesion

Claims (2)

A sheet peeling method, is a sheet peeling method for peeling an adhesive sheet attached to an adherend from the adherend, characterized by implementing: an elastic restoring force weakening process in which the elastic restoring force of the peeling starting portion of the adhesive sheet is weakened by thinning the thickness of the peeling starting portion of the adhesive sheet attached to the adherend as a whole or in part; and a peeling process in which the peeling starting portion with the weakened elastic restoring force and the adherend are moved relative to each other so that the adhesive sheet is peeled off as a whole from the adherend in a manner that the adhesive sheet is not split. A sheet peeling device, is a sheet peeling device for peeling an adhesive sheet attached to an adherend from the adherend, characterized by comprising: elastic restoring force weakening means for weakening the elastic restoring force of the peeling starting portion of the adhesive sheet by thinning the thickness of the peeling starting portion of the adhesive sheet attached to the adherend as a whole or in part; and peeling means for moving the peeling starting portion with the weakened elastic restoring force and the adherend relative to each other so as to peel the entire adhesive sheet from the adherend in a manner that the adhesive sheet is not split.

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