TWI872869B - Portable pyrometer calibration device - Google Patents
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本發明係關於一種高溫計校正裝置,特別是一種可攜式高溫計校正裝置。 The present invention relates to a pyrometer calibration device, in particular to a portable pyrometer calibration device.
根據黑體輻射定律的原理,黑體的輻射強度與其溫度成正比。基於此,高溫黑體爐做為黑體輻射源,可用於校正和測試高溫輻射溫度計(高溫計)的設備,以確保高溫計的精確性。一般來說,高溫計感測黑體爐的黑體輻射後會輸出所感測的溫度讀數,將此讀數與黑體爐的實際溫度相比較。在兩者不相符的情況下,藉由調整高溫計的參數使其輸出的溫度讀數與黑體爐的實際溫度相匹配,以達成高溫計的校正。 According to the principle of blackbody radiation law, the radiation intensity of a blackbody is proportional to its temperature. Based on this, a high-temperature blackbody furnace, as a blackbody radiation source, can be used to calibrate and test high-temperature radiation thermometers (pyrometers) to ensure the accuracy of the pyrometer. Generally speaking, after sensing the blackbody radiation of a blackbody furnace, a pyrometer will output the sensed temperature reading, which is compared with the actual temperature of the blackbody furnace. In the case of a mismatch between the two, the pyrometer parameters are adjusted to match the output temperature reading with the actual temperature of the blackbody furnace to achieve the calibration of the pyrometer.
然而,傳統黑體爐的體積通常較大而不容易移動,故無法將其運送至高溫計所在現場,而需將高溫計運送至實驗室才能校正,非常耗時且增加額外的成本。並且,由於黑體爐的升溫和穩定過程需要較長的時間,故使用傳統黑體爐進行高溫計的校正通常較為費時。此外,傳統黑體爐的操作需處於高溫環境下,且需於強光下對位高溫計,故校正操作需要由經過受訓的受權人員進行,從而增加了操作的複雜性和成本。另外,傳統黑體爐採用高耗電加熱石墨管,對於操作人員存有高溫危害的安全問題,並衍生有高碳排放量的問題。再者,由於石墨管為耗材,其使用壽命僅約為48小時,故需定期更換黑體爐中的石墨管,進而使成本增加。 However, the size of a traditional blackbody furnace is usually large and not easy to move, so it cannot be transported to the site where the pyrometer is located. The pyrometer must be transported to a laboratory for calibration, which is very time-consuming and adds additional costs. In addition, since the heating and stabilization process of the blackbody furnace takes a long time, it is usually time-consuming to use a traditional blackbody furnace to calibrate the pyrometer. In addition, the operation of a traditional blackbody furnace must be in a high-temperature environment, and the pyrometer must be aligned under strong light, so the calibration operation must be performed by trained authorized personnel, which increases the complexity and cost of the operation. In addition, the traditional blackbody furnace uses a high-power heating graphite tube, which poses a safety problem of high temperature hazards to operators and leads to high carbon emissions. Furthermore, since the graphite tube is a consumable material, its service life is only about 48 hours, so the graphite tube in the black body furnace needs to be replaced regularly, which increases the cost.
本發明在於提供一種可攜式高溫計校正裝置,藉以解決先前技術中傳統黑體爐的體積龐大而無法移動至現場的問題,傳統黑體爐進行高溫計校正較為費時的問題,傳統黑體爐的操作需處於高溫環境以及採用高耗電加熱石墨管而容易對操作人員造成高溫危害的安全問題,以及需定期更換黑體爐中石墨管使成本增加並衍生有高碳排放量的問題。 The present invention provides a portable pyrometer calibration device to solve the problems of the traditional black body furnace in the prior art that the traditional black body furnace is too large to be moved to the site, the pyrometer calibration of the traditional black body furnace is time-consuming, the operation of the traditional black body furnace requires a high temperature environment and uses a high power consumption graphite tube to heat the furnace, which easily causes high temperature hazards to the operator, and the graphite tube in the black body furnace needs to be replaced regularly, which increases the cost and leads to high carbon emissions.
本發明之一實施例所揭露之可攜式高溫計校正裝置,用以校正一高溫計。可攜式高溫計校正裝置包含一手持式對接單元、一黑體擬真器以及一光纖光導管。手持式對接單元用以與高溫計對接。黑體擬真器包含一光源以及一光束調整結構。光源具有對應一黑體溫度模擬光譜的一橢圓發散光束,光束調整結構配置在對應於光源的相對位置,以將橢圓發散光束準直並變形為一圓形平行光束。光纖光導管導引該圓形平行光束,並具有相對的一收光端以及一出光端,收光端連接於黑體擬真器,且出光端連接於手持式對接單元。 The portable pyrometer calibration device disclosed in one embodiment of the present invention is used to calibrate a pyrometer. The portable pyrometer calibration device includes a handheld docking unit, a black body simulator and an optical fiber light guide tube. The handheld docking unit is used to dock with the pyrometer. The black body simulator includes a light source and a beam adjustment structure. The light source has an elliptical divergent beam corresponding to a black body temperature simulation spectrum, and the beam adjustment structure is arranged at a relative position corresponding to the light source to collimate and transform the elliptical divergent beam into a circular parallel beam. The optical fiber light guide tube guides the circular parallel beam and has a relative light receiving end and a light emitting end, the light receiving end is connected to the black body simulator, and the light emitting end is connected to the handheld docking unit.
根據上述實施例所揭露的可攜式高溫計校正裝置,透過黑體擬真器產生用以校正高溫計的黑體溫度模擬光譜,可做為穩定的校正熱源,使可攜式高溫計校正裝置具有體積小的優勢,為可攜式的設計而可於現場應用。並且,黑體擬真器採用低耗電冷光,可避免校正過程有高溫危害的問題,亦無需定期更換耗材的問題,可降低碳排放量。此外,黑體擬真器的光源可在短時間內升溫至預定溫度,使可攜式高溫計校正裝置僅需在10分鐘以內即可完成熱機,而有利於現場快速安裝與校正。再者,透過光束調整結構將光源的橢圓發散光束準直並變形為圓形平行光束,可提供符合 高溫計收光角範圍的黑體溫度模擬光譜,進而可有效利用光源能量。另外,透過手持式對接單元與高溫計對接,可容易使光纖光導管的出光端與高溫計對位。 According to the portable pyrometer calibration device disclosed in the above-mentioned embodiment, the blackbody temperature simulation spectrum used to calibrate the pyrometer is generated by the blackbody simulator, which can be used as a stable calibration heat source, so that the portable pyrometer calibration device has the advantage of small size, and can be used on site due to its portable design. In addition, the blackbody simulator uses low-power cold light, which can avoid the problem of high temperature hazards during the calibration process, and there is no need to regularly replace consumables, which can reduce carbon emissions. In addition, the light source of the blackbody simulator can be heated to a predetermined temperature in a short time, so that the portable pyrometer calibration device can be heated up in less than 10 minutes, which is conducive to rapid installation and calibration on site. Furthermore, the elliptical divergent beam of the light source is collimated and transformed into a circular parallel beam through the beam adjustment structure, which can provide a black body temperature simulation spectrum that meets the pyrometer's light receiving angle range, thereby effectively utilizing the light source energy. In addition, by docking the pyrometer with a handheld docking unit, the light output end of the optical fiber light guide can be easily aligned with the pyrometer.
以上關於本發明內容的說明及以下實施方式的說明係用以示範與解釋本發明的原理,並且提供本發明的專利申請範圍更進一步的解釋。 The above description of the content of the present invention and the following description of the implementation method are used to demonstrate and explain the principle of the present invention, and provide a further explanation of the scope of the patent application of the present invention.
1:可攜式高溫計校正裝置 1: Portable pyrometer calibration device
2:黑體擬真器 2: Blackbody simulator
20,20b:光源 20,20b: Light source
21,21b:光束調整結構 21,21b: Beam adjustment structure
211,211b:準直鏡組 211,211b: Collimator lens set
E11:圓對稱透鏡,第一柱狀透鏡 E11: Circular symmetric lens, first cylindrical lens
E12:第二柱狀透鏡 E12: Second cylindrical lens
212,212b:變形鏡組 212,212b: Deformed lens set
E21:第一變形稜鏡 E21: First deformation prism
S1:第一入射面 S1: First incident surface
S2:第一出射面 S2: First exit surface
E22:第二變形稜鏡 E22: Second Deformed Prism
S3:第二入射面 S3: Second incident surface
S4:第二出射面 S4: Second exit surface
213b:勻光鏡組 213b: homogenizing mirror set
E31:第一微陣列透鏡 E31: First micro-array lens
E32:第二微陣列透鏡 E32: Second micro-array lens
E33:平凸透鏡 E33: Plano-convex lens
E34:擴散片 E34: Diffusive tablets
3,3b:光纖光導管 3,3b: Fiber optic light guide tube
31,31b:收光端 31,31b: light receiving end
32:出光端 32: Light output end
4:手持式對接單元 4: Handheld docking unit
9:高溫計 9: Thermometer
L1:橢圓發散光束 L1: Elliptical divergent beam
L2:橢圓準直光束 L2: Elliptical collimated beam
L3:圓形平行光束 L3: Circular parallel beam
CL1:光軸 CL1: optical axis
CL2:中心軸 CL2: Center axis
θ1,θ2:夾角,銳角 θ1,θ2: angle, sharp angle
θ3,θ4:夾角 θ3,θ4: angle of intersection
D1:距離 D1: Distance
X:X軸方向 X: X-axis direction
Y:Y軸方向 Y: Y-axis direction
圖1為根據本發明之第一實施例所述之可攜式高溫計校正裝置及高溫計的示意圖。 FIG1 is a schematic diagram of a portable pyrometer calibration device and a pyrometer according to the first embodiment of the present invention.
圖2為圖1之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG2 is a schematic diagram of the light source and beam adjustment structure of the black body simulator and a part of the optical fiber light guide tube of the portable pyrometer calibration device of FIG1.
圖3為圖2之光源的一種實施態樣的雷射光束輪廓分布示意圖。 FIG3 is a schematic diagram of the laser beam profile distribution of an implementation of the light source in FIG2.
圖4為根據本發明之第二實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG4 is a partial schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide tube of the portable pyrometer calibration device according to the second embodiment of the present invention.
圖5為根據本發明之第三實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG5 is a partial schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide tube of the portable pyrometer calibration device according to the third embodiment of the present invention.
圖6為根據本發明之第四實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG6 is a partial schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide tube of the portable pyrometer calibration device according to the fourth embodiment of the present invention.
圖7為根據本發明之第五實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG7 is a partial schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide tube of the portable pyrometer calibration device according to the fifth embodiment of the present invention.
圖8為根據本發明之第六實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 FIG8 is a partial schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide tube of the portable pyrometer calibration device according to the sixth embodiment of the present invention.
以下在實施方式中詳細敘述本發明之實施例之詳細特徵以及優點,其內容足以使任何本領域中具通常知識者了解本發明之實施例之技術內容並據以實施,且根據本說明書所揭露之內容、申請專利範圍及圖式,任何本領域中具通常知識者可輕易地理解本發明相關之目的及優點。以下之實施例係進一步詳細說明本發明之觀點,但非以任何觀點限制本發明之範疇。 The detailed features and advantages of the embodiments of the present invention are described in detail in the following implementation method. The content is sufficient to enable any person with ordinary knowledge in the field to understand the technical content of the embodiments of the present invention and implement it accordingly. According to the content disclosed in this specification, the scope of the patent application and the drawings, any person with ordinary knowledge in the field can easily understand the relevant purposes and advantages of the present invention. The following embodiments are to further illustrate the viewpoints of the present invention, but do not limit the scope of the present invention by any viewpoint.
請參閱圖1和圖2,圖1為根據本發明之第一實施例所述之可攜式高溫計校正裝置及高溫計的示意圖,且圖2為圖1之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。 Please refer to Figures 1 and 2. Figure 1 is a schematic diagram of a portable pyrometer calibration device and a pyrometer according to the first embodiment of the present invention, and Figure 2 is a schematic diagram of a light source and a beam adjustment structure of a black body simulator and a part of an optical fiber light guide tube of the portable pyrometer calibration device of Figure 1.
本實施例之可攜式高溫計校正裝置1,用以校正一高溫計9。所述高溫計9可指高溫輻射溫度計。舉例來說,高溫計9例如係以fluke endurance E1RL為感測元件的高溫輻射溫度計,其進光半角約為1.098度且進光數值孔徑(NA)為0.019,其工作距離為600公釐,其感測元件的感測光譜中心波長為1.0微米,且其感測元件的材質為矽(Si)。或者,高溫計9例如係以chino IR-FAS IR-FL5AH02為感測元件的高溫輻射溫度計,其進光半角約為0.955度且進光數值孔徑(NA)為0.017,其工作距離為150公釐,其感測元件的感測光譜中心波長為0.9微米,且其感測元件的材質為矽。或者,高溫計9例如為德國KE公司LP3/LP4系列高溫輻射溫度計,
其進光半角約為1.814度且進光數值孔徑(NA)為0.032,其工作距離為600公釐,且其感測元件的感測光譜中心波長為0.9微米。或者,高溫計9例如為美國Raytek公司MR1SASF高溫輻射溫度計,其進光半角約為1.098度且進光數值孔徑(NA)為0.019,其工作距離為600公釐,且其感測元件的感測光譜中心波長為1.0微米。
The portable
可攜式高溫計校正裝置1包含一黑體擬真器2、一手持式對接單元4以及一光纖光導管3。在一種實施態樣中,黑體擬真器2的尺寸可為30公分×30公分×14公分。相較於傳統黑體爐,黑體擬真器2具有體積小的優勢,為可攜式的設計而可於現場應用。黑體擬真器2包含一光源20、一熱電致冷器(未另繪示)、一光源控制器(未另繪示)以及一光束調整結構21。
The portable
光源20具有對應一黑體溫度模擬光譜的一橢圓發散光束L1,且光源20可例如為寬頻超亮固態光源(Superluminescent Diode,SLD)、LED光源、雷射二極體光源或多波長光源,本發明不以此為限。其中,光源20具有一發光層,且發光層可例如用以產生不同波長的光或單一波長的光。藉此,相較於傳統黑體爐,本實施例之黑體擬真器2採用低耗電冷光,可避免校正過程有高溫危害的問題,亦無需定期更換耗材的問題。詳細來說,傳統黑體爐是採用燃燒石墨管的方式升溫,而需頻繁更換石墨管,且升溫時間長使黑體爐熱機需耗時至少3小時。相較於傳統黑體爐,本實施例之光源20具有使用壽命長的優點,一般來說可使用至少1萬小時,此外,採用此光源20可在短時間內升溫至預定溫度,使可攜式高溫計校正裝置1僅需在10分鐘以內即可完成熱機,而有利於現場快速安裝與校正。
The
請參照圖3以及下表一,其中圖3為圖2之光源的一種實施態樣的雷射光束輪廓分布示意圖。光源20所發出的光束在X軸方向上的光束直徑較大且數值孔徑(NA)為0.59,而在垂直於X軸方向的Y軸方向上的光束直徑較小且數值孔徑(NA)為0.15。根據實際使用需求,可例如將光束半徑為光束中心到光強衰退至半高寬(FWHM)的距離的部分視為有效光束而做為橢圓發散光束L1,或者可例如將光束半徑為光束中心到光強衰退至峰值的13.5%(1/e2)的距離的部分視為有效光束而做為橢圓發散光束L1,但本發明不以此為限。
Please refer to FIG. 3 and Table 1 below, where FIG. 3 is a schematic diagram of the laser beam profile distribution of an implementation of the light source of FIG. 2 . The beam diameter of the light beam emitted by the
當將光束半徑為光束中心到光強衰退至半高寬的距離的部分視為有效光束而做為橢圓發散光束L1時,光束在X軸方向上的輻照度(irradiance)為43.9度且在Y軸方向上的輻照度為9.5度。當將光束半徑為光束中心到光強衰退至峰值的13.5%的距離的部分視為有效光束而做為橢圓發散光束L1時,光束在X軸方向上的輻照度為72.4度且在Y軸方向上的輻照度為16.9度。 When the beam radius is the distance from the center of the beam to the light intensity decaying to half the width as the effective beam and is taken as the elliptical divergent beam L1, the irradiance of the beam in the X-axis direction is 43.9 degrees and the irradiance in the Y-axis direction is 9.5 degrees. When the beam radius is the distance from the center of the beam to the light intensity decaying to 13.5% of the peak value as the effective beam and is taken as the elliptical divergent beam L1, the irradiance of the beam in the X-axis direction is 72.4 degrees and the irradiance in the Y-axis direction is 16.9 degrees.
高溫計9中的一感測器具有一光譜響應區間。橢圓發散光束L1的黑體溫度模擬光譜可為連續性光譜,且黑體溫度模擬光譜用以對應於高溫計9的感測器的光譜響應區間。黑體溫度模擬光譜的光譜範圍可例如為550奈米至1700奈米。當黑體溫度模擬光譜的光譜範圍可為550奈米
至750奈米且光譜中心波長可為650奈米時,高溫計9可模擬黑體溫度範圍為攝氏1000度至3000度。當黑體溫度模擬光譜的光譜範圍可為780奈米至1150奈米且光譜中心波長可為900奈米時,高溫計9可模擬黑體溫度範圍為攝氏300度至2000度。當黑體溫度模擬光譜的光譜範圍可為1500奈米至1700奈米且光譜中心波長可為1600奈米時,高溫計9可模擬黑體溫度範圍為攝氏200度至2000度。其中,高溫計9可具有濾光片,用以限制感測器的感測區間。進一步地,可攜式高溫計校正裝置1所採用的光源20的類型,係可根據高溫計9中的濾光片(或鍍膜)所限制的光譜範圍而確定。舉例來說,操作人員可先於現場量測待校正的高溫計9中的濾光片(或鍍膜)的光譜範圍,再依據所量測的光譜範圍選用具有相應黑體溫度模擬光譜的光源20之可攜式高溫計校正裝置1。然而,本發明不以上述光譜範圍為限。
A sensor in the pyrometer 9 has a spectral response range. The blackbody temperature simulation spectrum of the elliptical divergent light beam L1 may be a continuous spectrum, and the blackbody temperature simulation spectrum is used to correspond to the spectral response range of the sensor of the pyrometer 9. The spectral range of the blackbody temperature simulation spectrum may be, for example, 550 nm to 1700 nm. When the spectral range of the blackbody temperature simulation spectrum may be 550 nm to 750 nm and the central wavelength of the spectrum may be 650 nm, the pyrometer 9 may simulate a blackbody temperature range of 1000 degrees Celsius to 3000 degrees Celsius. When the spectrum range of the black body temperature simulation spectrum is 780 nm to 1150 nm and the center wavelength of the spectrum is 900 nm, the pyrometer 9 can simulate the black body temperature range of 300 degrees Celsius to 2000 degrees Celsius. When the spectrum range of the black body temperature simulation spectrum is 1500 nm to 1700 nm and the center wavelength of the spectrum is 1600 nm, the pyrometer 9 can simulate the black body temperature range of 200 degrees Celsius to 2000 degrees Celsius. The pyrometer 9 can have a filter to limit the sensing range of the sensor. Furthermore, the type of
熱電致冷器(thermoelectric cooler,TEC)熱接觸於光源20,用以對光源20散熱。舉例來說,光源控制器電性連接光源20和熱電致冷器,且熱電致冷器用以透過光源控制器的控制以對光源20散熱。
The thermoelectric cooler (TEC) is in thermal contact with the
在本實施例中,光源控制器根據光源20的驅動電流大小和光源20的工作溫度,來將橢圓發散光束L1調整成響應在黑體溫度模擬光譜的範圍內。其中,光源20的工作溫度可透過熱電致冷器來控制。具體來說,光源控制器可透過控制輸入光源20的驅動電流,以調整光源20的光強度。並且,光源控制器可透過熱電致冷器控制光源20的工作溫度,使光源20的光譜產生紅移現象。藉此,可控制光源20輸出的光束具有所需的黑體溫度模擬光譜範圍。
In this embodiment, the light source controller adjusts the elliptical divergent light beam L1 to respond within the range of the blackbody temperature simulation spectrum according to the driving current of the
光束調整結構21配置在對應光源20的相對位置,以將橢圓發散光束L1準直並變形為一圓形平行光束L3。詳細來說,光束調整結構21可包含一準直鏡組211以及一變形鏡組212,準直鏡組211位於光源20與變形鏡組212之間,且光源20的中心軸CL2對齊準直鏡組211的光軸CL1。準直鏡組211用以將橢圓發散光束L1準直為一橢圓準直光束L2,且變形鏡組212用以將橢圓準直光束L2變形為圓形平行光束L3。其中,變形鏡組212為單向光束擴展變形稜鏡組,且變形鏡組212具有單向放大倍率為4X以上,但本發明不以此為限。在其他實施例中,變形鏡組的單向放大倍率可為2X至6X。所述橢圓發散光束是指光束的截面形狀呈橢圓形且其在進行方向上逐漸發散;所述橢圓準直光束是指光束的截面形狀呈橢圓形且為平行光束或趨近於平行光束;所述圓形平行光束是指光束的截面形狀呈圓形或趨近於圓形且為平行光束或趨近於平行光束。所述圓形平行光束趨近於平行光束,可指圓形平行光束具有小於或等於高溫計9容許收光角範圍的一發散角(divergence angle)。
The
準直鏡組211可包含一第一柱狀透鏡E11以及一第二柱狀透鏡E12,第一柱狀透鏡E11配置在X軸方向上以準直橢圓發散光束L1,且較第二柱狀透鏡E12靠近光源20。第二柱狀透鏡E12配置在Y軸方向上以準直橢圓發散光束L1。其中,第一柱狀透鏡E11的焦距可為4.5公釐,且第二柱狀透鏡E12的焦距可為15公釐。
The collimator lens set 211 may include a first cylindrical lens E11 and a second cylindrical lens E12. The first cylindrical lens E11 is arranged in the X-axis direction to collimate the elliptical divergence light beam L1 and is closer to the
變形鏡組212可包含一第一變形稜鏡E21以及一第二變形稜鏡E22,且第一變形稜鏡E21較第二變形稜鏡E22靠近準直鏡組211。第一變形稜鏡E21和第二變形稜鏡E22配置在Y軸方向上以轉折和擴展
橢圓準直光束L2而為圓形平行光束L3。
The
進一步來說,第一變形稜鏡E21具有相對的一第一入射面S1以及一第一出射面S2,且第一入射面S1與第一出射面S2之間的夾角θ1為銳角。第二變形稜鏡E22具有相對的一第二入射面S3以及一第二出射面S4,且第二入射面S3與第二出射面S4之間的夾角θ2為銳角。橢圓準直光束L2以起偏振角(Brewster’s angle)入射第一入射面S1並從第一出射面S2垂直出射,接著再以起偏振角入射第二入射面S3並從第二出射面S4垂直出射,從而形成圓形平行光束L3。所述起偏振角係指當入射光以此角度射入介面時,反射光與折射光互相垂直。 Specifically, the first deformable prism E21 has a first incident surface S1 and a first exit surface S2 opposite to each other, and the angle θ1 between the first incident surface S1 and the first exit surface S2 is a sharp angle. The second deformable prism E22 has a second incident surface S3 and a second exit surface S4 opposite to each other, and the angle θ2 between the second incident surface S3 and the second exit surface S4 is a sharp angle. The elliptical collimated light beam L2 is incident on the first incident surface S1 at a polarizing angle (Brewster’s angle) and is vertically emitted from the first exit surface S2, and then is incident on the second incident surface S3 at a polarizing angle and is vertically emitted from the second exit surface S4, thereby forming a circular parallel light beam L3. The polarizing angle refers to the angle at which the reflected light and the refracted light are perpendicular to each other when the incident light enters the interface.
透過將變形鏡組的變形稜鏡以不同的角度設置,可提供不同的單向放大倍率。在本實施例中,第一變形稜鏡E21的第一出射面S2與垂直於準直鏡組211的光軸CL1的參考線之間的夾角θ3可例如為34.1度,且第二變形稜鏡E22的第二出射面S4與垂直於準直鏡組211的光軸CL1的參考線之間的夾角θ4可例如為2.1度。透過將第一變形稜鏡E21與第二變形稜鏡E22以這樣的角度關係設置,變形鏡組212可提供4X以上單向放大倍率。然而,本發明不以此為限。舉例來說,在其他實施例中,可攜式高溫計校正裝置的黑體擬真器可採用不同類型的光源,並可透過改變第一變形稜鏡和第二變形稜鏡的設置角度,以具有不同的夾角θ3、θ4,使變形稜鏡可提供不同的單向放大倍率(例如2X至6X單向放大倍率),以因應並適當擴展所採用的光源所發出的光束。其中,夾角θ3的範圍可為20.6度至39.7度,且夾角θ4的範圍可為-6.5度至4.0度,其中夾角θ4為負值的範圍係指在一些放大倍率的配置下,第二變形稜鏡的第二出射面因轉動
後而相較於垂直的參考線變成為由圖2之右上往左下之方向傾斜。
By arranging the deformable prisms of the deformable lens assembly at different angles, different one-way magnifications can be provided. In the present embodiment, the angle θ3 between the first output surface S2 of the first deformable prism E21 and the reference line perpendicular to the optical axis CL1 of the
在本實施例中,變形鏡組212可例如為Edmund公司產品型號為47-244之變形鏡組,但本發明不以此為限。 In this embodiment, the deformable lens set 212 may be, for example, a deformable lens set with a product model number of 47-244 from Edmund, but the present invention is not limited thereto.
手持式對接單元4用以與高溫計9對接。光纖光導管3具有相對的一收光端31以及一出光端32,其中收光端31連接於黑體擬真器2並用以接收來自光束調整結構21的圓形平行光束L3,且出光端32連接於手持式對接單元4並用以發出圓形平行光束L3。手持式對接單元4可具有一對接結構(未另繪示),用以套設於高溫計9,使光纖光導管3的出光端32與高溫計9對位。
The
光纖光導管3可例如由可撓性材質所組成,且光纖光導管3可包含多個光纖束(未另繪示),其中各光纖束的表面具有一反射鍍膜,用以反射圓形平行光束L3,且反射鍍膜的反射率例如大於99.7%。藉此,可避免反射鍍膜吸收過多的光能量,使光纖光導管3在傳遞圓形平行光束L3時可降低光能量的損失,並避免熱吸收造成塗層損壞。所述可撓性材質例如為聚合物材料、矽材料、玻璃材料和塑膠材料等,但本發明不以此為限。另外,反射鍍膜的材質可例如為金或銀,但本發明不以此為限。
The optical fiber
透過上述本實施例中光束調整結構21的配置,圓形平行光束L3的發散角可小於1.6度,且圓形平行光束L3於出光端32處的直徑可為0.8公釐至14公釐。在應用可攜式高溫計校正裝置1校正高溫計9時,光纖光導管3的出光端32與高溫計9可間隔0.7公尺至1.0公尺。藉此,可確保圓形平行光束L3的發散角滿足高溫計9的收光角範圍(例如發散角小於或等於前述各種高溫計9類型的進光半角的兩倍)。詳細來說,高溫計
9在不同的感測距離下,其感測的視野大小不同,因此,透過控制圓形平行光束L3的直徑和發散角,以及光纖光導管3的出光端32與高溫計9之間的距離,使圓形平行光束L3的面積可涵蓋高溫計9的感測視野,並使兩者的範圍相近,以有效利用光源20能量並確保對高溫計9校正的精準性。舉例來說,當所欲校正的高溫計9為fluke endurance E1RL高溫輻射溫度計時,可攜式高溫計校正裝置1中圓形平行光束L3於出光端32處的直徑可為6公釐,且圓形平行光束L3在進入fluke endurance E1RL高溫輻射溫度計後透過鏡組聚焦至感測元件,其在感測元件上的光斑大小在X-方向上為0.2公釐且在X-方向上為0.1公釐。當所欲校正的高溫計9為chino IR-FAS IR-FL5AH02高溫輻射溫度計時,可攜式高溫計校正裝置1中圓形平行光束L3於出光端32處的直徑可為5公釐,且圓形平行光束L3在進入chino IR-FAS IR-FL5AH02高溫輻射溫度計後透過鏡組聚焦至感測元件,其在感測元件上的光斑大小在X-方向上為0.2公釐且在X-方向上為0.1公釐。當所欲校正的高溫計9為德國KE公司LP3/LP4系列高溫輻射溫度計時,可攜式高溫計校正裝置1中圓形平行光束L3於出光端32處的直徑可為0.8公釐。當所欲校正的高溫計9為美國Raytek公司MR1SASF高溫輻射溫度計時,可攜式高溫計校正裝置1中圓形平行光束L3於出光端32處的直徑可為14公釐。
Through the configuration of the
如圖1所示,當使用本實施例之可攜式高溫計校正裝置1校正高溫計9時,首先將手持式對接單元4對接於高溫計9,使高溫計9感測橢圓發散光束L1的黑體溫度模擬光譜。接著,將高溫計9輸出的溫度讀數與黑體擬真器2的模擬溫度相比較。在兩者不相符的情況下,藉由調整
高溫計9的參數使其輸出的溫度讀數與黑體擬真器2的模擬溫度相匹配,以完成高溫計9的校正。
As shown in FIG1 , when the portable
本發明不以上述第一實施例之光束調整結構21的配置為限。在其他實施例中,光束調整結構可進一步配置具有其他功能的鏡組,且光束調整結構的這些鏡組中的透鏡及/或稜鏡等光學元件可有不同的結構及/或數量配置。舉例來說,請參照圖4,為根據本發明之第二實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。本實施例(對應圖4)之可攜式高溫計校正裝置與前述圖1至圖2之可攜式高溫計校正裝置1相似,並以相同的標號來表示相同的元件,各元件具備的功能與效果皆與前述相同,於此不再贅述。
The present invention is not limited to the configuration of the
在本實施例的可攜式高溫計校正裝置的黑體擬真器中,光束調整結構21b的準直鏡組211b可包含一圓對稱透鏡E11。圓對稱透鏡E11的光圈值為0.5,且圓對稱透鏡E11配置在X軸方向上以及在垂直於X軸方向的Y軸方向上以準直來自光源20b的橢圓發散光束L1而為橢圓準直光束L2。其中,光源20b的中心軸CL2對齊準直鏡組211b的光軸CL1。
In the blackbody simulator of the portable pyrometer calibration device of this embodiment, the collimator set 211b of the
光束調整結構21b的變形鏡組212b可包含一第一變形稜鏡E21以及一第二變形稜鏡E22,第一變形稜鏡E21和第二變形稜鏡E22配置在Y軸方向上,且第一變形稜鏡E21較第二變形稜鏡E22靠近準直鏡組211b,以轉折和擴展橢圓準直光束L2而為圓形平行光束L3。
The
進一步來說,第一變形稜鏡E21具有由相對的第一入射面S1與第一出射面S2所組成的銳角θ1,且第二變形稜鏡E22具有由相對的第二入射面S3與第二出射面S4所組成的另一銳角θ2。透過所述銳角θ1 和所述另一銳角θ2將橢圓準直光束L2變成圓形平行光束L3。 Specifically, the first deformable prism E21 has a sharp angle θ1 formed by the first incident surface S1 and the first exit surface S2, and the second deformable prism E22 has another sharp angle θ2 formed by the second incident surface S3 and the second exit surface S4. The elliptical collimated light beam L2 is transformed into a circular parallel light beam L3 through the sharp angle θ1 and the other sharp angle θ2.
透過將變形鏡組的變形稜鏡以不同的角度設置,可提供不同的單向放大倍率。在本實施例中,第一變形稜鏡E21的第一出射面S2與垂直於準直鏡組211b的光軸CL1的參考線之間的夾角θ3可例如為34.8度,且第二變形稜鏡E22的第二出射面S4與垂直於準直鏡組211b的光軸CL1的參考線之間的夾角θ4可例如為2.3度。透過將第一變形稜鏡E21與第二變形稜鏡E22以這樣的角度關係設置,變形鏡組212b可提供4.22X以上單向放大倍率,但本發明不以此為限。
By setting the deformable prisms of the deformable lens group at different angles, different one-way magnifications can be provided. In this embodiment, the angle θ3 between the first output surface S2 of the first deformable prism E21 and the reference line perpendicular to the optical axis CL1 of the
此外,在本實施例中,光束調整結構21b可更包含一勻光鏡組213b,以均勻化圓形平行光束L3的亮度,且勻光鏡組213b位於變形鏡組212b與光纖光導管3b的收光端31b之間。其中,勻光鏡組213b可為根據柯拉照明(Köhler illumination)之原理設計用於勻光的鏡組。具體來說,勻光鏡組213b可包含一平凸透鏡E33,且平凸透鏡E33具有正焦距,以收光和聚光。其中,平凸透鏡E33的有效焦距可為150公釐。
In addition, in this embodiment, the
在本實施例中,圓對稱透鏡E11可例如為Edmund公司產品型號為33-263之圓對稱透鏡,變形鏡組212b可例如為Edmund公司產品型號為47-274之變形鏡組,且平凸透鏡E33可例如為Edmund公司產品型號為67-541之平凸透鏡,但本發明不以此為限。 In this embodiment, the circularly symmetrical lens E11 may be, for example, a circularly symmetrical lens with a product model number of 33-263 from Edmund, the deformable lens set 212b may be, for example, a deformable lens set with a product model number of 47-274 from Edmund, and the plano-convex lens E33 may be, for example, a plano-convex lens with a product model number of 67-541 from Edmund, but the present invention is not limited thereto.
本發明不以上述第二實施例之光束調整結構21b的勻光鏡組213b的配置為限。在其他實施例中,勻光鏡組可進一步配置具有其他功能的光學元件。舉例來說,請參照圖5,為根據本發明之第三實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導
管之局部的示意圖。本實施例(對應圖5)之可攜式高溫計校正裝置與前述圖4之可攜式高溫計校正裝置相似,並以相同的標號來表示相同的元件,各元件具備的功能與效果皆與前述相同,於此不再贅述。
The present invention is not limited to the configuration of the
在本實施例的可攜式高溫計校正裝置的黑體擬真器中,光束調整結構21b的勻光鏡組213b更包含一第一微陣列透鏡E31,且第一微陣列透鏡E31位於變形鏡組212b與平凸透鏡E33之間。第一微陣列透鏡E31可用於光束均勻化與塑形,其尺寸可為10公釐×10公釐,且其陣列間距可為300微米。其中,第一微陣列透鏡E31可例如為Edmund公司產品型號為64-476之微陣列透鏡。
In the blackbody simulator of the portable pyrometer calibration device of this embodiment, the
再舉例來說,請參照圖6,為根據本發明之第四實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。本實施例(對應圖6)之可攜式高溫計校正裝置與前述圖5之可攜式高溫計校正裝置相似,並以相同的標號來表示相同的元件,各元件具備的功能與效果皆與前述相同,於此不再贅述。 For another example, please refer to FIG6, which is a schematic diagram of the light source and beam adjustment structure of the black body simulator and the partial optical fiber light guide tube of the portable pyrometer calibration device according to the fourth embodiment of the present invention. The portable pyrometer calibration device of this embodiment (corresponding to FIG6) is similar to the portable pyrometer calibration device of FIG5, and the same reference numerals are used to represent the same components. The functions and effects of each component are the same as those described above, and will not be repeated here.
在本實施例的可攜式高溫計校正裝置的黑體擬真器中,光束調整結構21b的勻光鏡組213b更包含一第二微陣列透鏡E32,且第二微陣列透鏡E32位於第一微陣列透鏡E31與平凸透鏡E33之間。第二微陣列透鏡E32可用於光束均勻化與塑形,其尺寸可為10公釐×10公釐,且其陣列間距可為300微米。其中,第二微陣列透鏡E32可例如為Edmund公司產品型號為64-476之微陣列透鏡。
In the blackbody simulator of the portable pyrometer calibration device of the present embodiment, the
再舉例來說,請參照圖7,為根據本發明之第五實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光 導管之局部的示意圖。本實施例(對應圖7)之可攜式高溫計校正裝置與前述圖6之可攜式高溫計校正裝置相似,並以相同的標號來表示相同的元件,各元件具備的功能與效果皆與前述相同,於此不再贅述。 For another example, please refer to FIG. 7, which is a schematic diagram of the light source and beam adjustment structure of the black body simulator and the optical fiber light guide of the portable pyrometer calibration device according to the fifth embodiment of the present invention. The portable pyrometer calibration device of this embodiment (corresponding to FIG. 7) is similar to the portable pyrometer calibration device of FIG. 6, and the same reference numerals are used to represent the same components. The functions and effects of each component are the same as those described above, and will not be repeated here.
在本實施例的可攜式高溫計校正裝置的黑體擬真器中,光束調整結構21b的勻光鏡組213b更包含一擴散片(diffuser)E34,且擴散片E34用於控制光束的擴散角度。根據本發明所揭露的可攜式高溫計校正裝置1,可根據所採用之光源20的光強度不同,而選用不同的擴散片E34,以控制繞射擴散角。其中,擴散片E34位於平凸透鏡E33與光纖光導管3b的收光端31b之間,且擴散片E34與平凸透鏡E33之間的距離D1可為150公釐至300公釐。舉例來說,擴散片E34與平凸透鏡E33之間的距離D1可例如為150公釐、200公釐、250公釐或300公釐。
In the black body simulator of the portable pyrometer calibration device of the present embodiment, the
再舉例來說,請參照圖8,為根據本發明之第六實施例所述之可攜式高溫計校正裝置的黑體擬真器的光源和光束調整結構以及光纖光導管之局部的示意圖。本實施例(對應圖8)之可攜式高溫計校正裝置與前述圖4之可攜式高溫計校正裝置相似,並以相同的標號來表示相同的元件,各元件具備的功能與效果皆與前述相同,於此不再贅述。 For another example, please refer to FIG8, which is a schematic diagram of the light source and beam adjustment structure of the black body simulator and the partial optical fiber light guide tube of the portable pyrometer calibration device according to the sixth embodiment of the present invention. The portable pyrometer calibration device of this embodiment (corresponding to FIG8) is similar to the portable pyrometer calibration device of FIG4, and the same reference numerals are used to represent the same components. The functions and effects of each component are the same as those described above, and will not be repeated here.
相較於圖4之可攜式高溫計校正裝置,在本實施例的可攜式高溫計校正裝置的黑體擬真器中,光束調整結構21b的勻光鏡組213b更包含一擴散片E34,且擴散片E34用於控制光束的擴散角度。其中,擴散片E34位於平凸透鏡E33與光纖光導管3b的收光端31b之間,且擴散片E34與平凸透鏡E33之間的距離D1可為150公釐。
Compared with the portable pyrometer calibration device of FIG. 4 , in the black body simulator of the portable pyrometer calibration device of the present embodiment, the
根據上述實施例之可攜式高溫計校正裝置,透過黑體擬真器 產生用以校正高溫計的黑體溫度模擬光譜,可做為穩定的校正熱源,使可攜式高溫計校正裝置具有體積小的優勢,為可攜式的設計而可於現場應用。並且,黑體擬真器採用低耗電冷光,可避免校正過程有高溫危害的問題,亦無需定期更換耗材的問題,可降低碳排放量。此外,黑體擬真器的光源可在短時間內升溫至預定溫度,使可攜式高溫計校正裝置僅需在10分鐘以內即可完成熱機,而有利於現場快速安裝與校正。再者,透過光束調整結構將光源的橢圓發散光束準直並變形為圓形平行光束,可提供符合高溫計收光角範圍的黑體溫度模擬光譜,進而可有效利用光源能量。另外,透過手持式對接單元與高溫計對接,可容易使光纖光導管的出光端與高溫計對位。 According to the portable pyrometer calibration device of the above-mentioned embodiment, a blackbody temperature simulation spectrum for calibrating the pyrometer is generated through a blackbody simulator, which can be used as a stable calibration heat source, so that the portable pyrometer calibration device has the advantage of small size and can be used on site due to its portable design. In addition, the blackbody simulator uses low-power cold light, which can avoid the problem of high temperature hazards during the calibration process, and there is no need to regularly replace consumables, which can reduce carbon emissions. In addition, the light source of the blackbody simulator can be heated to a predetermined temperature in a short time, so that the portable pyrometer calibration device can be heated up in less than 10 minutes, which is conducive to rapid installation and calibration on site. Furthermore, the elliptical divergent beam of the light source is collimated and transformed into a circular parallel beam through the beam adjustment structure, which can provide a black body temperature simulation spectrum that meets the pyrometer's light receiving angle range, thereby effectively utilizing the light source energy. In addition, by docking the pyrometer with a handheld docking unit, the light output end of the fiber optic light guide can be easily aligned with the pyrometer.
雖然本發明以前述之較佳實施例揭露如上,然其並非用以限定本發明,任何熟習相像技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。 Although the present invention is disclosed as above with the aforementioned preferred embodiment, it is not used to limit the present invention. Anyone familiar with similar techniques can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of patent protection of the present invention shall be subject to the scope of the patent application attached to this specification.
1:可攜式高溫計校正裝置 1: Portable pyrometer calibration device
2:黑體擬真器 2: Blackbody simulator
3:光纖光導管 3: Fiber optic light guide tube
31:收光端 31: Light receiving end
32:出光端 32: Light output end
4:手持式對接單元 4: Handheld docking unit
9:高溫計 9: Thermometer
Claims (20)
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW523845B (en) * | 1999-05-03 | 2003-03-11 | Steag Rtp Systems Inc | System and process for calibrating pyrometers in thermal processing chambers |
| TW200818323A (en) * | 2006-06-27 | 2008-04-16 | Applied Materials Inc | Dynamic surface annealing using addressable laser array with pyrometry feedback |
| US20130028286A1 (en) * | 2002-06-24 | 2013-01-31 | Mattson Technology, Inc. | System and Process for Calibrating Pyrometers in Thermal Processing Chambers |
| TW202221292A (en) * | 2020-10-09 | 2022-06-01 | 德商愛思強歐洲公司 | Method for emissivity-corrected pyrometry |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW523845B (en) * | 1999-05-03 | 2003-03-11 | Steag Rtp Systems Inc | System and process for calibrating pyrometers in thermal processing chambers |
| US20130028286A1 (en) * | 2002-06-24 | 2013-01-31 | Mattson Technology, Inc. | System and Process for Calibrating Pyrometers in Thermal Processing Chambers |
| US20150092813A1 (en) * | 2002-06-24 | 2015-04-02 | Mattson Technology, Inc. | System and Process for Calibrating Pyrometers in Thermal Processing Chambers |
| TW200818323A (en) * | 2006-06-27 | 2008-04-16 | Applied Materials Inc | Dynamic surface annealing using addressable laser array with pyrometry feedback |
| TW202221292A (en) * | 2020-10-09 | 2022-06-01 | 德商愛思強歐洲公司 | Method for emissivity-corrected pyrometry |
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