TWI870072B - Gate valve assembly and substrate processing system - Google Patents

Abstract

The present invention relates to a substrate processing system including a gate valve assembly. The gate valve assembly includes: a housing body, a converter unit, a cover unit and a valve housing. The housing body is located between a first device and a second device, and includes a side wall, wherein the side wall has a first gate opposite to the gate of the first device and a second gate opposite to the gate of the second device, and the upper part of the housing body is an open part. The converter unit has an opening part corresponding to the size of the second gate, and is detachably coupled to the housing body around the first gate. The cover unit is detachably coupled to selectively cover the open part above the housing body. The valve housing includes a sealing component that is arranged on one side of the converter unit and contacts the outer wall surface of the first device.

Description

Substrate processing system including gate valve assembly

The present invention relates to a substrate processing system including a gate valve assembly, which has a converter which is detachably arranged at an opening and is provided with a sealing component to hermetically seal a chamber, and the sealing component can be easily replaced without changing the layout.

Generally speaking, a semiconductor manufacturing apparatus includes a process chamber forming a processing space that maintains a specified pressure and temperature state so as to perform a manufacturing process. During the period when the processing space is isolated from the outside and a main process is performed, the internal process atmosphere of the processing space is always kept consistent.

In particular, conventional semiconductor manufacturing equipment includes, in addition to a process chamber that performs a process under a vacuum state, a load lock chamber disposed adjacent to the process chamber for loading or unloading wafers for processing, and a transfer chamber disposed between the process chamber and the load lock chamber for transferring wafers.

FIG. 1 is a partial cross-sectional view showing a conventional gate valve.

Referring to FIG. 1 , a conventional gate valve for a vacuum processing device is composed of a valve body 3 and a moving module 4 for lifting and tilting the valve body 3. The valve body 3 is disposed between a first device and a second device (e.g., a first chamber 1 and a second chamber 2) and is moved by lifting and tilting to be close to the outer wall around the gate 2a of the second chamber 2, thereby closing the second chamber 2 and isolating the first chamber 1 from the second chamber 2.

When the gate valve having the structure described above transfers a substrate between the first chamber 1 and the second chamber 2, the valve body 3 is lowered by the moving module 4 so that the gates 1a and 2a can be connected to each other. As described above, the first chamber 1 or the second chamber 2 can be respectively composed of a transfer chamber and a process chamber, and the substrate is continuously transferred between the transfer chamber and the process chamber.

At this time, when the substrate is introduced from the outside, the process chamber must be isolated from the transfer chamber in a vacuum pressure state and the pressure must be changed to atmospheric pressure, and when the substrate is transferred to the transfer chamber, the pressure of the transfer chamber is changed to vacuum pressure in a state isolated from the outside, and then the gate is opened to communicate with the process chamber. In addition, in order to make the process chamber (i.e., the second chamber 2) a vacuum pressure state, the internal space is evacuated in a state where the gate 2a is closed by the valve body 3.

The gate valve is provided with a sealing member such as an O-ring so as to seal airtightly. When the sealing member is damaged or contaminated, or when a replacement cycle comes, the gate valve is separated (undocking) from the process chamber to replace the sealing member. At this time, the gate valve having the structure is combined with the process chamber and the transfer chamber to form a system, so in order to separate the gate valve, the process chamber itself needs to be separated.

However, the replacement of the sealing member by separation takes a long time and has a high difficulty of work, so it is necessary to study a method to make up for this defect.

Technical Problems to be Solved

According to an embodiment of the present invention, a substrate processing system including a gate valve assembly is provided, which can easily replace the sealing component in a short time while hermetically sealing the process chamber. 《Means for Solving the Problem》

According to an embodiment of the present invention, a substrate processing system including a gate valve assembly is provided. The gate valve assembly may include a housing body, a converter unit, a cover unit, and a valve housing. The housing body is located between a first device and a second device, and includes a side wall, wherein the side wall has a first gate opposite to the gate of the first device and a second gate opposite to the gate of the second device, and the upper part of the housing body is an open part. The converter unit has an opening corresponding to the size of the second gate, and is detachably coupled to the housing body around the first gate. The cover unit is detachably coupled to selectively cover the open part above the housing body. The valve housing includes a sealing component disposed on one side of the converter unit and in contact with the outer wall surface of the first device. 《The Effect of Invention》

According to the gate valve assembly of the embodiment of the present invention, the converter unit and the cover unit are introduced from the outer shell body to form a detachable structure, which can not only hermetically seal the process chamber, but also when the sealing component is damaged or contaminated or the replacement cycle arrives, the sealing component can be easily replaced in a short time without separating (undocking) the gate valve from the process chamber.

FIG. 2 is a perspective view showing a gate valve assembly according to an embodiment of the present invention; FIG. 3 is a cross-sectional view showing a gate valve assembly according to the first embodiment of the present invention.

2 and 3 , a gate valve assembly 10 according to a first embodiment of the present invention is taken as an example for description. The gate valve assembly 10 according to the first embodiment has a structure including a valve housing 100 , a blade module 200 , and a drive module 300 .

The valve housing 100 has a structure including a housing body 110, a converter unit 130, a cover unit 150, and sealing components S1 and S2.

The housing body 110 is disposed between the first chamber 600 and the second chamber 700 , and a first gate 111 and a second gate 113 for the substrate to enter and exit are formed on the first chamber 600 and the second chamber 700 , respectively. The first gate 111 and the second gate 113 are opposite to each other, and an open portion 114 is formed on the upper portion.

The housing body 110 has a storage space inside to accommodate the blade module 200, forming a structure that can be raised and lowered. The housing body 110 has a hexahedral structure connected by four side walls W, and has an upper and lower open structure, wherein the upper part is connected to the cover unit 150, and the blade module 200 is connected to the drive module 300 through the lower recess.

The housing body 110 has a structure in which two side walls form a first gate 111 and a second gate 113 respectively, so as to allow the substrate to enter and exit. At this time, the opening areas of the first gate 111 and the second gate 113 are different, wherein the opening area of the second gate 113 is the same as the area of the opening of the converter unit 130. In order to form a space combined with the converter unit 130, the opening area of the first gate 111 is larger than the opening area of the second gate 113.

The converter unit 130 has a structure that is detachably coupled along the periphery of the first gate 111 and forms an opening portion 131 .

In particular, the converter unit 130 may be disposed at a side of a process chamber that needs to exhaust gas or maintain a vacuum state, and the process chamber may be the first chamber 600 .

FIG. 4 is a state diagram showing a state in which a housing body of a gate valve assembly according to the first embodiment of the present invention is combined with a converter unit and a cover unit; FIG. 5 is a three-dimensional diagram showing a converter unit of the gate valve assembly according to the first embodiment of the present invention.

4 and 5, the housing body 110 may include a plurality of first fastening holes 112 formed along one side of the periphery of the first gate 111. The converter unit 130 may include a plurality of second fastening holes 132 formed along one side of the periphery of the outer circumference at positions corresponding to the plurality of first fastening holes 112. The converter unit 130 is combined in a detachable structure along the periphery of the first gate 111 using a first fastening member B1 fastened to the first fastening holes 112 and the second fastening holes 132. A representative example of the first fastening member B1 is a bolt, which may have a variety of shapes.

Furthermore, in order to hermetically seal the first gate 111 of the housing body 110 and the converter unit 130 and ensure ease of installation, a structure is formed with a step surface or an inclined surface.

FIG6 is a state diagram showing the separation state of the housing body 110, the converter unit 130 and the cover unit 150 of the gate valve assembly of the first embodiment of the present invention; FIG7 is a partial cross-sectional view showing the path of external air flowing into the valve housing 100 (indicated by the dotted arrow) and the path of gas diffusion inside the process chamber (indicated by the solid arrow) in the gate valve assembly 10 of the first embodiment of the present invention.

6 and 7, the converter unit 130 has a structure including a first exposed surface 133a formed in a flat structure at the upper portion and a first step surface 133b formed at the lower portion of the first exposed surface 133a with a step. In addition, at least one of the first gate 111 and the second gate 113 has a structure including a second step surface 115 formed on the inner peripheral surface with a step corresponding to the first step surface 133b. Accordingly, the first step surface 133b of the converter unit is combined with a structure in contact with the second step surface 115.

Furthermore, the converter unit 130 has a structure including a first setting groove 134a formed concavely on the first exposed surface 133a and a second setting groove 134b formed concavely on the first step surface 133b. According to the gate valve assembly 10 of the embodiment of the present invention, including a first sealing member S1 provided in the first setting groove 134a and a second sealing member S2 provided in the second setting groove 134b, the diffusion of gas and the inflow of external air can be prevented.

The valve housing 100 having the above structure prevents the gas or vacuum pressure exhausted from the first chamber 600 from flowing in through the joint of the converter unit 130 based on the first sealing component S1, and prevents the gas (Gas inflow) from flowing in through the opening part based on the seventh sealing component S7 provided in the blade module 200. Furthermore, the inflow of external air (Air inflow) is prevented based on the second sealing component S2 and the fifth sealing component S5. Furthermore, the inflow of air through the cover unit is prevented based on the sixth sealing component S6.

8 is a state diagram showing the state in which the housing body 110' of the gate valve assembly 10' of the second embodiment of the present invention is combined with the converter unit 130' and the cover unit 150; FIG. 9 is a state diagram showing the state in which the housing body 110', the converter unit 130' and the cover unit 150 of the gate valve assembly of the second embodiment of the present invention are separated.

According to one embodiment, the converter unit 130' has a structure including a first inclined surface 135b formed on the second exposed surface 135a in a flat structure and connected to the second exposed surface 135a and inclined toward the end direction. In addition, the first gate 111 has a structure including a second inclined surface 116 inclined toward the end direction corresponding to the first inclined surface 135b on the inner circumference. Accordingly, the first inclined surface 135b of the converter unit is combined with a structure in contact with the second inclined surface 116.

Furthermore, the converter unit 130' has a structure including a third setting groove 136a formed concavely on the second exposed surface 135a and a fourth setting groove 136b formed concavely on the first inclined surface 135b. The gate valve assembly 10' according to the embodiment includes a third sealing member S3 provided in the third setting groove 136a and a fourth sealing member S4 provided in the fourth setting groove 136b, thereby preventing the diffusion of gas and the inflow of external air.

Specifically, the valve housing 100' having the structure prevents the gas exhausted from the first chamber 600 from flowing in through the joint of the converter unit 130 based on the third sealing component S3, and prevents the gas (Gas inflow) from flowing in through the opening part based on the seventh sealing component S7 provided in the blade module 200. Furthermore, the inflow of external air (Air inflow) is prevented based on the fourth sealing component S4 and the fifth sealing component S5. Furthermore, the inflow of air through the cover unit is prevented based on the sixth sealing component S6.

The housing body 110, 110' includes a receiving groove 118 formed along the circumference of the outer surface of the side wall adjacent to the second gate 113, and the receiving groove 118 is provided with a fifth sealing member S5. Thus, the inflow of external air can be prevented.

In addition, the cover unit 150 is coupled to the upper side wall of the housing body 110, 110' in a detachable structure. When the cover unit 150 is separated from the housing body 110, 110', the upper opening portion 114 is opened, and the accommodation space of the housing body 110, 110' is opened through the upper opening portion 114, so that the user can perform operations for separating and setting the converter unit 130 from the housing body 110, 110'. Accordingly, a structure can be formed in which the converter unit 130 is separated from the housing body 110 and the sealing components S1, S2, S3, and S4 set between the housing body 110, 110' and the converter unit 130, 130' are easily separated. That is, according to the gate valve assembly 10, 10' of the embodiment, a structure is formed in which the sealing components S1, S2, S3, S4 can be easily replaced without changing the layout.

According to one embodiment, the cover unit 150 may include a plurality of third fastening holes 153 formed along one side of the periphery. At this time, the housing body 110 may include a plurality of fourth fastening holes 117 formed by being recessed at positions corresponding to the third fastening holes 153 on the upper part of the wall. Accordingly, the cover unit 150 is coupled to the upper open portion of the housing body 110, 110' in a detachable structure using the second fastening component B2 fastened to the third fastening holes 153 and the fourth fastening holes 117. A representative example of the second fastening component B2 is a bolt, which may have a variety of shapes.

Moreover, the cover unit 150 can form a structure to prevent external air from flowing into the interior of the accommodation space of the valve housing 100, 100'. To this end, the cover unit 150 includes an insertion groove 151 formed concavely on one side below. The gate valve assembly 10 includes a sixth sealing component S6 disposed in the insertion groove 151 and in contact with the upper wall of the housing body 110, 110', thereby forming a structure to prevent external air from flowing into the interior of the accommodation space of the valve housing 100, 100'.

In addition, the gate valve assembly 10 according to the embodiment may include a blade module 200 disposed inside the accommodation space of the housing body 110, 110' to open and close one of the first gate 111 and the second gate 113, and a driving module 300 to raise and lower the blade module 200 to adjust the opening and closing of the first gate 111.

The blade module 200 and the driving module 300 may have various conventional structures disposed on a gate valve.

In particular, according to the gate valve assembly 10, 10' of the embodiment, in order to prevent gas or vacuum from flowing into the internal accommodation space of the valve housing 100, 100' from the first chamber 600 or the second chamber 700, the blade module 200 includes a concave groove (not shown in the attached figure) formed concavely thereon. The gate valve assembly 10 may include a seventh sealing component S7 disposed in the concave groove, thereby preventing gas or vacuum from flowing into the internal accommodation space of the valve housing 100, 100' from the first chamber 600.

The first to seventh sealing members S1 to S7 may be formed of a material having elasticity, heat resistance, airtightness, and the like, and a representative example thereof is an O-ring.

The gate valve assembly according to the embodiment described above can easily replace the sealing component in a short time when the sealing component is damaged or contaminated, or when the replacement cycle arrives.

Figure 10 is a three-dimensional diagram showing the state of separating the second fastening component B2 and the cover unit 150 in the gate valve assembly 10 of the first embodiment of the present invention; Figure 11 is a three-dimensional diagram showing the state of separating the blade module 200 in the gate valve assembly 10 of Figure 10; Figure 12 is a three-dimensional diagram showing the state of separating the first fastening component B1 in the gate valve assembly 10 of Figure 11; Figure 13 is a three-dimensional diagram showing the state of separating the converter unit 130 in the shell body 110 of the gate valve assembly 10 of Figure 12.

Referring to FIG. 10 to FIG. 13, the first embodiment is described as an example. First, the cover unit 150 is separated from the housing body 110. Based on the separation of the cover unit 150, the blade module 200 disposed at the lower portion of the housing body 110 with the accommodation space opened is removed. Then, the first fastening member B1 disposed inside the housing body 110 is removed, and the converter unit 130 coupled to the housing body 110 is separated. The first sealing member S1 and the second sealing member S2 attached to the separated converter unit 130 are replaced respectively, and assembly is performed in the reverse order of the separation process of the converter unit 130.

That is, according to the gate valve assembly of the embodiment, the cover unit 150 is removed, and the internal accommodation space can be approached through the upper part of the outer shell body 110, and after the converter unit 130 fastened by the fastening member is separated, the sealing members S1 and S2 provided in the converter unit 130 are replaced respectively.

As described above, the gate valve assembly according to the embodiment, which introduces the converter unit and the cover unit into a detachable structure from the outer shell body, can not only hermetically seal the process chamber, but also when the sealing component is damaged or contaminated or the replacement cycle arrives, the sealing component can be easily replaced in a short time without separating (undocking) the gate valve from the process chamber.

In addition, FIG14 is a diagram showing the configuration of a substrate processing system according to an embodiment of the present invention.

14 , the substrate processing system according to the embodiment has a structure including the gate valve assembly and a first chamber 600 coupled to the first gate 111 side of the gate valve assembly 10, 10' and a second chamber 700 coupled to the second gate 113. In addition, the substrate processing system may have a structure in which a transfer robot 800 for transferring wafers is formed, and may have a structure in which a cleaning chamber 900 is provided.

The substrate processing system described above may be a conventional system of various forms used for substrate processing such as thin film deposition, cleaning, substrate processing, etc., but is not limited thereto.

"Prior Art" 1: First chamber 1a, 2a: Gate 2: Second chamber 3: Valve body 4: Moving module "Case" 10, 10': Gate valve assembly 100, 100': Valve housing 110, 110': Housing body 111: First gate 112: First fastening hole 113: Second gate 114: Opening 115: Second differential surface 116: Second inclined surface 117: Fourth fastening hole 118: Accommodating groove 130, 130': Converter unit 131: Opening 132: Second fastening hole 133a: First exposed surface 133b: first step difference surface 134a: first setting groove 134b: second setting groove 135a: second exposed surface 135b: first inclined surface 136a: third setting groove 136b: fourth setting groove 150: cover unit 151: insertion groove 153: third fastening hole 200: blade module 300: drive module 600: first chamber 700: second chamber 800: transfer robot 900: chamber B1: first fastening member B2: second fastening member S1: first sealing member (sealing member) S2: second sealing member (sealing member) S3: third sealing member (sealing member) S4: fourth sealing member (sealing member) S5: fifth sealing member S6: sixth sealing member S7: Seventh sealing component W: Side wall

FIG. 1 is a cross-sectional view showing a portion of a conventional gate valve; FIG. 2 is a three-dimensional view showing the appearance of a gate valve assembly according to an embodiment of the present invention; FIG. 3 is a cross-sectional view showing a gate valve assembly according to Embodiment 1 of the present invention along the BB' cross-sectional direction of FIG. 2; FIG. 4 is a state diagram showing a state in which a housing body of the gate valve assembly according to Embodiment 1 of the present invention is combined with a converter unit and a cover unit; FIG. 5 is a three-dimensional view showing a converter unit of the gate valve assembly according to Embodiment 1 of the present invention; FIG. 6 is a state diagram showing a state in which a housing body, a converter unit and a cover unit of the gate valve assembly according to Embodiment 1 of the present invention are separated; FIG7 is a partial cross-sectional view showing the path of the external air flowing into the valve housing (indicated by the dotted arrow) and the path of the gas diffusion inside the process chamber (indicated by the solid arrow) in the gate valve assembly of the first embodiment of the present invention; FIG8 is a state diagram showing the state of the housing body of the gate valve assembly of the second embodiment of the present invention combined with the converter unit and the cover unit; FIG9 is a state diagram showing the separation state of the housing body, the converter unit and the cover unit of the gate valve assembly of the second embodiment of the present invention; FIG10 is a three-dimensional diagram showing the state of separating the second fastening member and the cover unit in the gate valve assembly of the first embodiment of the present invention; FIG. 11 is a perspective view showing a state where a blade module is separated in the gate valve assembly of FIG. 10; FIG. 12 is a perspective view showing a state where a first fastening member is separated in the gate valve assembly of FIG. 11; FIG. 13 is a perspective view showing a state where a converter unit is separated in the gate valve assembly of FIG. 12; and FIG. 14 is a diagram showing a configuration of a substrate processing system according to an embodiment of the present invention.

10: Gate valve assembly

110: Shell body

113: The second gate

130: Converter unit

131: Opening

150: Cover unit

151: Insert slot

200: Blade module

300:Drive module

600: First chamber

700: Second chamber

S1: First sealing component (sealing component)

S2: Second sealing component (sealing component)

S5: The fifth sealing component

S6: Sixth sealing component

S7: Seventh sealing component

W: Side wall

Claims (16)

A substrate processing system including a gate valve assembly, wherein the gate valve assembly includes: a housing body, located between a first device and a second device, the housing body including a side wall, the side wall having a first gate opposite to the gate of the first device and a second gate opposite to the gate of the second device, the upper part of the housing body is an open part; a converter unit, coupled with a detachable structure along the periphery of the first gate to form an opening; a cover unit, coupled to the opening with a detachable structure; and a valve housing, including a first sealing component disposed on one side of the converter unit and in contact with the outer wall surface of the first device, and a second sealing component disposed between the converter unit and the housing body. According to the substrate processing system described in claim 1, the open areas of the first gate and the second gate are different, and the open area of the second gate is the same as the area of the opening portion of the converter unit. A substrate processing system according to claim 1, wherein the first device is a process chamber and the second device is a transfer chamber. According to the substrate processing system of claim 1, the converter unit comprises: a first exposed surface formed on one surface with a flat structure; and a first step-difference surface formed at the lower part of the first exposed surface with a step-difference, wherein the first gate comprises a second step-difference surface formed on the inner peripheral surface with a step-difference, and the second step-difference surface corresponds to the first step-difference surface. According to claim 4, the substrate processing system, wherein the converter unit comprises: a first setting groove, which is formed concavely on the first exposed surface; and a second setting groove, which is formed concavely on the first step surface, wherein the first sealing component is provided in the first setting groove, and the second sealing component is provided in the second setting groove. According to the substrate processing system of claim 1, the converter unit includes: a first inclined surface, which forms a second exposed surface with a flat structure and is connected to the second exposed surface and inclined toward the end direction; wherein the first gate includes: a second inclined surface, which is inclined toward the end direction corresponding to the first inclined surface on the inner peripheral surface. According to the substrate processing system of claim 6, the converter unit includes: a third setting groove formed concavely on the second exposed surface; and a fourth setting groove formed concavely on the first inclined surface, wherein the gate valve assembly includes: a third sealing component disposed in the third setting groove; and a fourth sealing component disposed in the fourth setting groove. According to the substrate processing system of claim 1, the housing body includes: a receiving groove formed on the outer wall along the periphery of the second gate, and the gate valve assembly includes: a fifth sealing component disposed in the receiving groove. According to claim 1, the substrate processing system, wherein the housing body comprises: a plurality of first fastening holes formed through the inner wall along the periphery of the first gate; the converter unit comprises: a plurality of second fastening holes formed through the inner wall at positions corresponding to the plurality of first fastening holes, wherein the converter unit is combined with a detachable structure along the periphery of the first gate using a fastening member fastened to the first fastening holes and the second fastening holes. According to the substrate processing system of claim 1, the cover unit includes: a plurality of third fastening holes formed through the periphery on the upper side; the outer shell body includes: a plurality of fourth fastening holes formed recessed in the upper side wall and corresponding to the third fastening holes, wherein the cover unit is coupled to the opening of the outer shell body in a detachable structure by a fastening member fastened to the third fastening holes and the fourth fastening holes. According to the substrate processing system described in claim 1, the cover unit includes: an insertion groove, which is concavely formed on the lower side; the gate valve assembly includes: a sixth sealing component, which is arranged in the insertion groove and contacts the upper surface of the side wall of the outer shell body. According to the substrate processing system described in claim 1, the gate valve assembly includes: a blade module disposed inside the storage space of the housing body to open and close the first gate; and a drive module to raise and lower the blade module to adjust the opening and closing of the first gate. According to the substrate processing system of claim 12, the blade module includes: a recessed groove formed along the periphery on one side; and the gate valve assembly includes: a seventh sealing component disposed in the recessed groove. A substrate processing system including a gate valve assembly, wherein the gate valve assembly includes: a housing body, located between a first device and a second device, having a first gate corresponding to the gate of the first device and a second gate corresponding to the gate of the second device, and having a receiving space inside; a converter unit, detachably coupled to the housing body adjacent to the first gate, so that the sizes of the first gate and the second gate correspond to each other; a blade module, used to make the inside of the receiving space rise and fall to open and close at least one of the first gate and the second gate; and a sealing component, formed between the first device and the converter unit and between the housing body and the converter unit. According to the substrate processing system described in claim 14, the upper part of the housing body is an open part, and the gate valve assembly further includes: a cover unit that selectively opens and closes the upper part of the housing body, and at least one sealing component is formed between the side wall surface of the upper part of the housing body and the cover unit. According to claim 14, the substrate processing system, wherein the sealing component is also formed between the second device and the housing body and between the blade module and the converter unit.