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TWI870073B - Copper plate with low anisotropy and manufacturing method thereof - Google Patents

Copper plate with low anisotropy and manufacturing method thereof Download PDF

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TWI870073B
TWI870073B TW112140358A TW112140358A TWI870073B TW I870073 B TWI870073 B TW I870073B TW 112140358 A TW112140358 A TW 112140358A TW 112140358 A TW112140358 A TW 112140358A TW I870073 B TWI870073 B TW I870073B
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copper plate
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copper
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TW202517806A (en
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洪胤庭
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中國鋼鐵股份有限公司
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Abstract

The present invention relates to a manufacturing method of a copper plate with low anisotropy. The manufacturing method is to subject a high-purity copper blank to a heating process, rolling processes, and heat treatment processes under specific conditions, so as to change the grain size, recrystallization texture and rolling texture of the obtained copper plate. The in-plane anisotropies of the yield stress, tensile strength stress, and elongation of the copper plate obtained by the manufacturing method of the present invention in the three directions of 0°, 45° and 90° are all less than 5%.

Description

低異向性銅板及其製造方法Low anisotropy copper plate and manufacturing method thereof

本發明是關於一種低異向性銅板以及一種低異向性銅板的製造方法。本發明的低異向性銅板於0°、45°和90°三方向的降伏強度、拉伸強度以及伸長率之水平異向性均小於5%。 The present invention relates to a low anisotropic copper plate and a method for manufacturing the low anisotropic copper plate. The horizontal anisotropy of the yield strength, tensile strength and elongation of the low anisotropic copper plate of the present invention in the three directions of 0°, 45° and 90° is less than 5%.

一般鑄造、擠型與軋延銅板常因0°、45°和90°三方向機性(例如,降伏強度、拉伸強度以及伸長率)差異過大,故具有明顯的異向性,因此無法順利成型。 Generally, cast, extruded and rolled copper sheets often have obvious anisotropy due to the large differences in mechanical properties (e.g., yield strength, tensile strength and elongation) in the three directions of 0°, 45° and 90°, and therefore cannot be formed smoothly.

目前已知一種利用連續鑄造製作之銅板,其將高純銅原料加熱後,直接澆鑄成圓柱銅鑄錠,然後切片成銅板,再加工成銅藥型罩。然而,此方法所得之銅板的晶粒尺寸大於5000μm,導致其0°、45°和90°三方向機性差異相當大,例如拉伸強度的水平異向性與伸長率的水平異向性都大於10%。因此,此方法所製得之銅板無法順利成型,且產生橘皮與破裂等現象。 Currently, a copper plate made by continuous casting is known. After the high-purity copper raw material is heated, it is directly cast into a cylindrical copper ingot, then sliced into copper plates, and then processed into copper charge liners. However, the grain size of the copper plate obtained by this method is greater than 5000μm, resulting in a considerable difference in mechanical properties in the three directions of 0°, 45° and 90°. For example, the horizontal anisotropy of tensile strength and the horizontal anisotropy of elongation are both greater than 10%. Therefore, the copper plate obtained by this method cannot be formed smoothly, and produces phenomena such as orange peel and cracking.

還已知一種利用鍛造法製作之銅板,其將銅鑄錠於 高溫鍛打成圓柱銅錠,然後切片成銅板,再加工成銅藥型罩。然而,此方法所得之銅板的尺寸約為400μm且晶粒尺寸分布不均,導致0°、45°、90°三方向伸長率相差很大,例如其伸長率的水平異向性高達12%。此種銅板成型時,會因三方向伸長率差異相當大,無法順利成型對稱型狀,且會產生凸耳或產品互相不對稱。 It is also known that a copper plate is made by forging, in which a copper ingot is forged at a high temperature into a cylindrical copper ingot, which is then sliced into a copper plate and processed into a copper charge liner. However, the size of the copper plate obtained by this method is about 400μm and the grain size distribution is uneven, resulting in a large difference in elongation in the three directions of 0°, 45°, and 90°. For example, the horizontal anisotropy of its elongation is as high as 12%. When this copper plate is formed, it cannot be smoothly formed into a symmetrical shape due to the large difference in elongation in the three directions, and lugs or asymmetric products will be generated.

因此,亟須提供一種低異向性銅板的製造方法,以解決上述問題。 Therefore, it is urgent to provide a method for manufacturing low anisotropic copper plates to solve the above problems.

本發明之一態樣是提供一種低異向性銅板,其中銅板的晶粒尺寸小於70μm,且具有特定比例的(100)[001]再結晶集合組織與(110)[112]和(112)[111]軋延集合組織。銅板於0°、45°和90°三方向的各種力學性能的水平異向性都小於5%,故本發明的低異向性銅板可以避免產生橘皮、破裂以及凸耳等的情形,因此可以順利成型。 One aspect of the present invention is to provide a low anisotropic copper plate, wherein the grain size of the copper plate is less than 70 μm, and has a specific ratio of (100) [001] recrystallized aggregate structure and (110) [112] and (112) [111] rolled aggregate structure. The horizontal anisotropy of various mechanical properties of the copper plate in the three directions of 0°, 45° and 90° is less than 5%, so the low anisotropic copper plate of the present invention can avoid the occurrence of orange peel, cracks and bulges, and can be formed smoothly.

本發明至少一實施例提供一種低異向性銅板的製造方法,包含以下步驟。提供銅胚。對銅胚進行加熱步驟。於加熱步驟後,對銅胚進行熱軋步驟,以獲得熱軋銅板。對熱軋銅板進行冷軋步驟,以獲得冷軋銅板。對冷軋銅板進行退火步驟,以獲得退火銅板。對退火銅板進行水冷步驟,以獲得低異向性銅板。其中於該低異向性銅板中,降伏強度的水平異向性小於5%,拉伸強度的水平異向性小於5%,且伸長率的水平異向性小於5%。 At least one embodiment of the present invention provides a method for manufacturing a low anisotropic copper plate, comprising the following steps. A copper blank is provided. The copper blank is heated. After the heating step, the copper blank is hot-rolled to obtain a hot-rolled copper plate. The hot-rolled copper plate is cold-rolled to obtain a cold-rolled copper plate. The cold-rolled copper plate is annealed to obtain an annealed copper plate. The annealed copper plate is water-cooled to obtain a low anisotropic copper plate. Among them, in the low anisotropic copper plate, the horizontal anisotropy of yield strength is less than 5%, the horizontal anisotropy of tensile strength is less than 5%, and the horizontal anisotropy of elongation is less than 5%.

在本發明至少一實施例中,上述銅胚的純度為99.9%至99.99%。 In at least one embodiment of the present invention, the purity of the copper blank is 99.9% to 99.99%.

在本發明至少一實施例中,上述加熱步驟的加熱溫度為550℃至650℃。上述加熱步驟的加熱時間為30分鐘至2小時。 In at least one embodiment of the present invention, the heating temperature of the above heating step is 550°C to 650°C. The heating time of the above heating step is 30 minutes to 2 hours.

在本發明至少一實施例中,上述熱軋步驟中的每道次之熱軋裁減量為5%至20%。上述熱軋步驟的完軋溫度為500℃至550℃。 In at least one embodiment of the present invention, the hot rolling reduction in each pass of the hot rolling step is 5% to 20%. The finishing temperature of the hot rolling step is 500℃ to 550℃.

在本發明至少一實施例中,上述冷軋步驟中的每道次之冷軋裁減量為5%至20%。 In at least one embodiment of the present invention, the cold rolling reduction in each pass of the cold rolling step is 5% to 20%.

在本發明至少一實施例中,上述冷軋步驟中的總冷軋裁減量為50%至60%。 In at least one embodiment of the present invention, the total cold rolling reduction in the above-mentioned cold rolling step is 50% to 60%.

在本發明至少一實施例中,上述退火步驟的退火溫度為300℃至400℃。 In at least one embodiment of the present invention, the annealing temperature of the above annealing step is 300°C to 400°C.

在本發明至少一實施例中,上述退火步驟的退火時間為30分鐘至2小時。 In at least one embodiment of the present invention, the annealing time of the above annealing step is 30 minutes to 2 hours.

在本發明至少一實施例中,對上述退火銅板進行水冷步驟中的水冷時間為2分鐘內,並在2分鐘內降溫至常溫。 In at least one embodiment of the present invention, the water cooling time in the water cooling step of the annealed copper plate is within 2 minutes, and the temperature is reduced to room temperature within 2 minutes.

在本發明至少一實施例中,藉由上述之低異向性銅板的製造方法所製成,其中於低異向性銅板中,降伏強度的水平異向性小於5%,拉伸強度的水平異向性小於5%,且伸長率的水平異向性小於5%。 In at least one embodiment of the present invention, the low anisotropic copper plate is manufactured by the above-mentioned manufacturing method, wherein in the low anisotropic copper plate, the horizontal anisotropy of the yield strength is less than 5%, the horizontal anisotropy of the tensile strength is less than 5%, and the horizontal anisotropy of the elongation is less than 5%.

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之詳細說明如下。 In order to make the above and other purposes, features, advantages and embodiments of the present invention more clearly understood, the detailed description of the attached drawings is as follows.

圖1為根據本發明之實驗例之低異向性銅板的掃描式電子顯微鏡圖。 Figure 1 is a scanning electron microscope image of a low anisotropic copper plate according to an experimental example of the present invention.

以下仔細討論本發明實施例之製造和使用。然而,可以理解的是,實施例提供許多可應用的發明概念,其可實施於各式各樣的特定內容中。所討論之特定實施例僅供說明,並非用以限定本發明之範圍。 The manufacture and use of embodiments of the present invention are discussed in detail below. However, it is understood that the embodiments provide many applicable inventive concepts that can be implemented in a variety of specific contexts. The specific embodiments discussed are for illustration only and are not intended to limit the scope of the present invention.

在本文中,由「一數值至另一數值」表示的範圍,是一種避免在說明書中一一列舉該範圍中的所有數值的概要性表示方式。因此,某一特定數值範圍的記載,涵蓋該數值範圍內的任意數值以及由該數值範圍內的任意數值界定出的較小數值範圍,如同在說明書中明文寫出該任意數值和該較小數值範圍一樣。關於本文中所使用之「約」、「大約」或「大致」的用語一般通常係指數值之誤差或範圍約百分之二十以內,較佳地是約百分之十以內,更佳地則是約百分五之以內。 In this article, the range expressed by "a value to another value" is a summary expression method to avoid listing all the values in the range one by one in the specification. Therefore, the description of a specific numerical range covers any numerical value within the numerical range and the smaller numerical range defined by any numerical value within the numerical range, just as if the arbitrary numerical value and the smaller numerical range were written in the specification. The terms "about", "approximately" or "approximately" used in this article generally refer to the error or range of the numerical value within about 20%, preferably within about 10%, and more preferably within about 5%.

須說明的是,本文用語「異向性」代表「水平異向性(in-plane anisotropy;IPA)」,其用於定量化板材 的異向性。IPA的計算公式為

Figure 112140358-A0305-12-0004-1
, 其中,Xmax代表三個方向的力學性能的最大值,Xmid代表三 個方向的力學性能的中間值,Xmin代表三個方向的力學性能的最小值。上述「三個方向」為0°、45°和90°方向。上述「力學性能」包含降伏強度、拉伸強度以及伸長率。 It should be noted that the term "anisotropy" in this article refers to "in-plane anisotropy (IPA)", which is used to quantify the anisotropy of the sheet material. The calculation formula of IPA is
Figure 112140358-A0305-12-0004-1
, where X max represents the maximum value of the mechanical properties in the three directions, X mid represents the middle value of the mechanical properties in the three directions, and X min represents the minimum value of the mechanical properties in the three directions. The above-mentioned "three directions" are 0°, 45° and 90° directions. The above-mentioned "mechanical properties" include yield strength, tensile strength and elongation.

上述0°、45°和90°方向的定義係具有通常知識者所熟知。簡略說明如下,0°、45°和90°方向均平行於板材的頂表面,且以0°方向為起始方向,將其順時針旋轉45°和90°即分別可得知所述的45°方向與90°方向。 The definitions of the above 0°, 45° and 90° directions are well known to those with common knowledge. A brief explanation is as follows: the 0°, 45° and 90° directions are all parallel to the top surface of the plate, and the 0° direction is used as the starting direction. Rotating it 45° and 90° clockwise will respectively give the 45° and 90° directions.

本發明的一些實施例中提供一種低異向性銅板的製造方法。製造方法包含對銅胚進行加熱步驟與熱軋步驟,以獲得熱軋銅板。對熱軋銅板進行水冷步驟,以獲得水冷銅板。對水冷銅板進行冷軋步驟,以獲得冷軋銅板。對冷軋銅板進行退火步驟,以獲得退火銅板。對退火銅板進行水冷步驟,以獲得本發明之低異向性銅板。 Some embodiments of the present invention provide a method for manufacturing a low anisotropic copper plate. The manufacturing method includes heating and hot rolling a copper blank to obtain a hot rolled copper plate. The hot rolled copper plate is water cooled to obtain a water cooled copper plate. The water cooled copper plate is cold rolled to obtain a cold rolled copper plate. The cold rolled copper plate is annealed to obtain an annealed copper plate. The annealed copper plate is water cooled to obtain the low anisotropic copper plate of the present invention.

在一些實施例中,低異向性銅板的晶粒尺寸小於70μm。當銅板的晶粒尺寸大於70μm時,將影響銅板的(100)[001]再結晶集合組織與(110)[112]和(112)[111]軋延集合組織,使得銅板於0°、45°和90°三方向的各種力學性能的水平異向性大於5%,因此銅板於成型過程中會產生橘皮、破裂以及凸耳的情形。 In some embodiments, the grain size of the low anisotropic copper plate is less than 70 μm. When the grain size of the copper plate is greater than 70 μm, it will affect the (100)[001] recrystallization structure and the (110)[112] and (112)[111] rolled structures of the copper plate, making the horizontal anisotropy of the various mechanical properties of the copper plate in the three directions of 0°, 45° and 90° greater than 5%, so the copper plate will produce orange peel, cracks and bulges during the forming process.

在一些實施例中,由於本發明的低異向性銅板同時具備(100)[001]再結晶集合組織與(110)[112]和(112)[111]軋延集合組織,使得低異向性銅板於0°、45°和90°三方向的降伏強度、拉伸強度與伸長率的水平異向性均小於5%。當各種力學性能的水平異向性大於5%時, 無法使銅板順利成型,會使銅板於成型過程中產生橘皮、破裂以及凸耳的情形,不利於後續應用。 In some embodiments, since the low anisotropic copper plate of the present invention has both (100)[001] recrystallized aggregate structure and (110)[112] and (112)[111] rolled aggregate structures, the horizontal anisotropy of the yield strength, tensile strength and elongation of the low anisotropic copper plate in the three directions of 0°, 45° and 90° is less than 5%. When the horizontal anisotropy of various mechanical properties is greater than 5%, the copper plate cannot be formed smoothly, and the copper plate will produce orange peel, cracks and lugs during the forming process, which is not conducive to subsequent applications.

在一些實施例中,上述銅胚的純度為99.9%至99.99%。當銅胚的純度介於上述範圍時,可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the purity of the copper blank is 99.9% to 99.99%. When the purity of the copper blank is within the above range, the grain size of the copper plate formed subsequently can be less than 70μm, and the horizontal anisotropy of various mechanical properties of the copper plate can be less than 5%.

在一些實施例中,上述加熱步驟的加熱溫度為550℃至650℃。在一些實施例中,上述加熱步驟的加熱時間為30分鐘至3小時。當加熱溫度與加熱時間介於上述範圍時,有利於均勻地加熱上述銅胚,且有利於後續的軋延步驟。 In some embodiments, the heating temperature of the heating step is 550°C to 650°C. In some embodiments, the heating time of the heating step is 30 minutes to 3 hours. When the heating temperature and the heating time are within the above range, it is beneficial to uniformly heat the copper billet and facilitate the subsequent rolling step.

在一些實施例中,上述熱軋步驟中的每道次之熱軋裁減量為5%至20%。在一些實施例中,上述熱軋步驟中的總熱軋裁減量為50%至90%。在一些實施例中,上述熱軋步驟的完軋溫度為500℃至550℃。由於熱軋步驟需要達到足夠的總裁減量並維持特定的完軋溫度,方能確保銅板具備均勻細緻的晶粒。因此,當每道次之熱軋裁減量、總熱軋裁減量與完軋溫度介於上述範圍時,可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the hot rolling reduction of each pass in the hot rolling step is 5% to 20%. In some embodiments, the total hot rolling reduction in the hot rolling step is 50% to 90%. In some embodiments, the finishing temperature of the hot rolling step is 500°C to 550°C. Since the hot rolling step needs to achieve a sufficient total reduction and maintain a specific finishing temperature, it is possible to ensure that the copper plate has uniform and fine grains. Therefore, when the hot rolling reduction per pass, the total hot rolling reduction and the finishing temperature are within the above range, the grain size of the copper plate to be formed subsequently can be less than 70μm, and the horizontal anisotropy of various mechanical properties of the copper plate can be less than 5%.

在一些實施例中,對上述熱軋銅板進行水冷步驟中的水冷時間為30秒至20分鐘,並水冷至常溫。當水冷時間介於上述範圍時,可以避免銅板處於高溫發生晶粒成長,進而確保銅板晶粒尺寸細緻,從而強化銅板的強度。因此, 可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the water cooling time of the hot-rolled copper plate in the water cooling step is 30 seconds to 20 minutes, and the plate is water-cooled to room temperature. When the water cooling time is within the above range, the copper plate can be prevented from being subjected to high temperature and grain growth, thereby ensuring the fine grain size of the copper plate, thereby strengthening the strength of the copper plate. Therefore, the grain size of the copper plate formed subsequently can be made less than 70 μm, and the horizontal anisotropy of various mechanical properties of the copper plate can be less than 5%.

在一些實施例中,上述冷軋步驟中的每道次之冷軋裁減量為5%至20%。在一些實施例中,上述冷軋步驟中的總冷軋裁減量為50%至60%。由於冷軋總裁減量須達50%以上方可確保形成特定的集合組織,降低銅板異向性。因此,當每道次之冷軋裁減量與總冷軋裁減量介於上述範圍時,可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the cold rolling reduction in each pass of the cold rolling step is 5% to 20%. In some embodiments, the total cold rolling reduction in the cold rolling step is 50% to 60%. Since the total cold rolling reduction must be more than 50% to ensure the formation of a specific aggregate structure and reduce the anisotropy of the copper plate. Therefore, when the cold rolling reduction in each pass and the total cold rolling reduction are between the above ranges, the grain size of the copper plate formed subsequently can be less than 70μm, and the horizontal anisotropy of various mechanical properties of the copper plate can be less than 5%.

在一些實施例中,上述退火步驟的退火溫度為300℃至400℃。在一些實施例中,上述退火步驟的退火時間為30分鐘至2小時。在退火步驟中,銅板因為發生再結晶,進而促進晶粒的生長。因此,當退火溫度與退火時間介於上述範圍時,可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the annealing temperature of the annealing step is 300°C to 400°C. In some embodiments, the annealing time of the annealing step is 30 minutes to 2 hours. In the annealing step, the copper plate undergoes recrystallization, which promotes the growth of grains. Therefore, when the annealing temperature and annealing time are within the above range, the grain size of the copper plate formed subsequently can be less than 70μm, and the horizontal anisotropy of various mechanical properties of the copper plate is less than 5%.

在一些實施例中,對上述退火銅板進行水冷步驟中的水冷時間為2分鐘內,並在2分鐘內降溫至常溫,以獲得低異向性銅板。在退火步驟後進行水冷,可避免銅板因處高溫發生晶粒成長,進而有利於細化晶粒。因此,當水冷步驟中的水冷時間介於上述範圍時,可以使後續形成的銅板的晶粒尺寸小於70μm,且銅板的各種力學性能的水平異向性小於5%。 In some embodiments, the water cooling time in the water cooling step of the annealed copper plate is within 2 minutes, and the temperature is cooled to room temperature within 2 minutes to obtain a low anisotropy copper plate. Water cooling after the annealing step can prevent the copper plate from growing grains due to high temperature, which is beneficial to grain refinement. Therefore, when the water cooling time in the water cooling step is within the above range, the grain size of the subsequently formed copper plate can be less than 70μm, and the horizontal anisotropy of various mechanical properties of the copper plate can be less than 5%.

以下利用實驗例以說明本發明之應用,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍內,當可作各種之更動與潤飾。 The following experimental examples are used to illustrate the application of the present invention, but they are not used to limit the present invention. Anyone familiar with this art can make various changes and modifications without departing from the spirit and scope of the present invention.

實驗例 Experimental example

首先,將純度為99.99%的銅胚置於高溫爐中,並於650℃加熱3小時。然後,對加熱後的銅胚進行熱軋步驟,其中熱軋步驟的總熱軋裁減量為80%,且完軋溫度控制於550℃以下,以獲得熱軋銅板。接著,對熱軋銅板進行水冷步驟,使熱軋銅板於2分鐘內冷卻至常溫,以獲得水冷銅板。然後,對水冷銅板進行冷軋步驟,其中冷軋總裁減量為55%,以獲得冷軋銅板。在獲得冷軋銅板後,再度進行水冷步驟。接著,對冷軋銅板進行退火步驟,並將冷軋銅板於400℃進行熱處理1小時,以獲得退火銅板。然後,對退火銅板進行水冷步驟,以獲得本發明之低異向性銅板。 First, a copper blank with a purity of 99.99% is placed in a high-temperature furnace and heated at 650°C for 3 hours. Then, the heated copper blank is subjected to a hot rolling step, wherein the total hot rolling reduction of the hot rolling step is 80%, and the final rolling temperature is controlled below 550°C to obtain a hot rolled copper plate. Next, the hot rolled copper plate is subjected to a water cooling step, and the hot rolled copper plate is cooled to room temperature within 2 minutes to obtain a water-cooled copper plate. Then, the water-cooled copper plate is subjected to a cold rolling step, wherein the total cold rolling reduction is 55%, to obtain a cold rolled copper plate. After obtaining the cold-rolled copper plate, a water cooling step is performed again. Then, the cold-rolled copper plate is annealed, and the cold-rolled copper plate is heat treated at 400°C for 1 hour to obtain an annealed copper plate. Then, the annealed copper plate is water-cooled to obtain the low anisotropy copper plate of the present invention.

實驗例所製得的銅板之金相組織請參考圖1。實驗例所製得的銅板分別以下述之評價方式來量測的晶粒尺寸,以及銅板於0°、45°和90°三方向的降伏強度(yield stress;YS)、拉伸強度(tensile stress;TS)、伸長率(elongation;EL)以及上述之IPA。其結果分別如表1所示。 Please refer to Figure 1 for the metallographic structure of the copper plate produced in the experimental example. The grain size of the copper plate produced in the experimental example was measured by the following evaluation methods, as well as the yield stress (YS), tensile strength (TS), elongation (EL) and the above-mentioned IPA in the three directions of 0°, 45° and 90°. The results are shown in Table 1.

比較例 Comparison example

首先,將純度為99.99%的銅胚置於高溫爐中,並於950℃加熱3小時。然後,對加熱後的銅胚進行熱軋步驟,其中熱軋步驟的總熱軋裁減量為90%,且完軋溫度 控制於800℃以下,以獲得熱軋銅板。接著,對熱軋銅板進行退火步驟,並於700℃進行熱處理1小時,以獲得退火銅板。然後,對退火銅板進行水冷步驟,以獲得銅板。 First, a copper blank with a purity of 99.99% is placed in a high-temperature furnace and heated at 950°C for 3 hours. Then, the heated copper blank is subjected to a hot rolling step, wherein the total hot rolling reduction of the hot rolling step is 90%, and the finishing temperature is controlled below 800°C to obtain a hot rolled copper plate. Next, the hot rolled copper plate is subjected to an annealing step and heat treated at 700°C for 1 hour to obtain an annealed copper plate. Then, the annealed copper plate is subjected to a water cooling step to obtain a copper plate.

比較例所製得的銅板分別以下述之評價方式來量測銅板的晶粒尺寸,以及銅板於0°、45°和90°三方向的降伏強度、拉伸強度、伸長率以及上述之IPA。其結果分別如表1所示。 The copper plate produced in the comparative example was evaluated using the following evaluation methods to measure the grain size of the copper plate, as well as the yield strength, tensile strength, elongation and the above-mentioned IPA in the three directions of 0°, 45° and 90°. The results are shown in Table 1.

Figure 112140358-A0305-12-0009-2
Figure 112140358-A0305-12-0009-2

評價方式 Evaluation method 1.晶粒尺寸 1. Grain size

本發明之晶粒尺寸是利用掃描式電子顯微鏡影像來測量,其採標準方法ASTM E8之對角線、水平線及垂直線量測法所獲得之平均晶粒尺寸作為評價結果。表1顯示實驗例的晶粒尺寸為小於70μm,其掃描式電子顯微鏡圖請參圖1,其中圖1的晶粒分布均勻。比較例的晶粒尺寸為350μm至400μm。 The grain size of the present invention is measured by scanning electron microscope images, and the average grain size obtained by the diagonal, horizontal and vertical line measurement method of standard method ASTM E8 is used as the evaluation result. Table 1 shows that the grain size of the experimental example is less than 70μm, and its scanning electron microscope image is shown in Figure 1, where the grain distribution in Figure 1 is uniform. The grain size of the comparative example is 350μm to 400μm.

2.降伏強度(YS) 2. Yield strength (YS)

本發明此處所稱之降伏強度係依據標準方法ASTM E8進行試驗,以測量實驗例及比較例之銅板於0°、 45°和90°三方向的降伏強度,單位為MPa。表1顯示實驗例之銅板於各方向的降伏強度約為68MPa,而比較例之銅板於各方向的降伏強度介於約79MPa至約101MPa。 The yield strength referred to herein in the present invention is tested according to the standard method ASTM E8 to measure the yield strength of the copper plates of the experimental examples and comparative examples in three directions of 0°, 45° and 90°, and the unit is MPa. Table 1 shows that the yield strength of the copper plates of the experimental examples in each direction is about 68MPa, while the yield strength of the copper plates of the comparative examples in each direction ranges from about 79MPa to about 101MPa.

3.拉伸強度(TS) 3. Tensile strength (TS)

本發明此處所稱之抗拉強度係依據標準方法ASTM E8進行試驗,以測量實驗例及比較例之銅板於0°、45°和90°三方向的抗拉強度,單位為MPa。表1顯示實驗例之銅板於各方向的抗拉強度約為224MPa,而比較例之銅板於各方向的降伏強度介於約200MPa至約203MPa。 The tensile strength referred to herein in the present invention is tested according to the standard method ASTM E8 to measure the tensile strength of the copper plates of the experimental examples and comparative examples in three directions of 0°, 45° and 90°, and the unit is MPa. Table 1 shows that the tensile strength of the copper plates of the experimental examples in each direction is about 224MPa, while the yield strength of the copper plates of the comparative examples in each direction ranges from about 200MPa to about 203MPa.

4.伸長率 4. Elongation

本發明此處所稱之伸長率係依據標準方法ASTM E8進行試驗,以測量實驗例及比較例之銅板於0°、45°和90°三方向的伸長率。表1顯示實驗例之銅板於各方向的伸長率介於約57%至約61%,而比較例之銅板於各方向的伸長率介於約51%至約57%。 The elongation referred to herein in the present invention is tested according to the standard method ASTM E8 to measure the elongation of the copper plates of the experimental examples and the comparative examples in three directions of 0°, 45° and 90°. Table 1 shows that the elongation of the copper plates of the experimental examples in each direction ranges from about 57% to about 61%, while the elongation of the copper plates of the comparative examples in each direction ranges from about 51% to about 57%.

5.IPA 5.IPA

利用前述IPA計算公式來計算上述降伏強度、抗拉強度以及伸長率之IPA。實驗例的各種力學性能之IPA都小於5%,而比較例的降伏強度之IPA以及伸長率之IPA均大於5%。 The above IPA calculation formula is used to calculate the above IPA of yield strength, tensile strength and elongation. The IPA of various mechanical properties of the experimental example is less than 5%, while the IPA of yield strength and elongation of the comparative example are greater than 5%.

藉由分析上述實驗例所製得之銅板的集合組織可知,(100)[001]再結晶集合組織佔5.8%,(110)[112]軋延集合組織佔11.6%,而(112)[111]軋延集合組織佔 8.4%。 By analyzing the structure of the copper plate obtained in the above experimental example, it can be seen that the (100)[001] recrystallized structure accounts for 5.8%, the (110)[112] rolled structure accounts for 11.6%, and the (112)[111] rolled structure accounts for 8.4%.

上述比較例所製得之銅板晶粒相當粗大(350μm至400μm),且因銅板完成再結晶,因此再結晶集合組織強度高,軋延集合組織強度偏低,造成銅板異向性很大,因此銅板於0°、45°、90°三方向具有較高的降伏強度之IPA與伸長率之IPA。 The copper plate obtained in the above comparative example has relatively coarse grains (350μm to 400μm), and because the copper plate has completed recrystallization, the recrystallized aggregate structure strength is high, and the rolled aggregate structure strength is relatively low, resulting in a large anisotropy of the copper plate. Therefore, the copper plate has a relatively high yield strength IPA and elongation IPA in the three directions of 0°, 45°, and 90°.

本發明的低異向性銅板之晶粒尺寸小於70μm,且具有特定比例的(100)[001]再結晶集合組織與(110)[112]和(112)[111]軋延集合組織。其次,銅板於0°、45°和90°三方向的各種力學性能的水平異向性都小於5%,故本發明的低異向性銅板於成型時可以避免產生橘皮、破裂以及凸耳等的情形,因此可以順利成型。 The grain size of the low anisotropic copper plate of the present invention is less than 70μm, and has a specific ratio of (100)[001] recrystallized aggregate structure and (110)[112] and (112)[111] rolled aggregate structure. Secondly, the horizontal anisotropy of various mechanical properties of the copper plate in the three directions of 0°, 45° and 90° is less than 5%, so the low anisotropic copper plate of the present invention can avoid the occurrence of orange peel, cracks and bulges during forming, so it can be formed smoothly.

可理解的是,本發明雖以特定製造方法及特定評價方式作為例示,說明本發明之低異向性銅板的製造方法,惟本發明所屬技術領域中任何具有通常知識者可知,本發明並不限於此,在不脫離本發明之精神和範圍內,本發明亦可使用其他製造方法或其他評價方式進行。 It is understandable that although the present invention uses a specific manufacturing method and a specific evaluation method as examples to illustrate the manufacturing method of the low anisotropic copper plate of the present invention, anyone with common knowledge in the technical field to which the present invention belongs can know that the present invention is not limited to this. Without departing from the spirit and scope of the present invention, the present invention can also be carried out using other manufacturing methods or other evaluation methods.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,在本發明所屬技術領域中任何具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the form of implementation as above, it is not intended to limit the present invention. Anyone with common knowledge in the technical field to which the present invention belongs can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of the patent application attached hereto.

Claims (8)

一種低異向性銅板的製造方法,包含:提供一銅胚,其中該銅胚的純度為99.9%至99.99%;對該銅胚進行一加熱步驟;於該加熱步驟後,對該銅胚進行一熱軋步驟,以獲得一熱軋銅板,其中該熱軋步驟中的一總熱裁減量為50%至90%,且該熱軋步驟的一完軋溫度為500℃至550℃;對該熱軋銅板進行一冷軋步驟,以獲得一冷軋銅板,其中該冷軋步驟中的每道次之一冷軋裁減量為5%至20%,且該冷軋步驟中的一總冷軋裁減量為50%以上;對該冷軋銅板進行一退火步驟,以獲得一退火銅板;對該退火銅板進行一水冷步驟,以獲得該低異向性銅板,其中該低異向性銅板的一晶粒尺寸小於70μm,其中於該低異向性銅板中,降伏強度的水平異向性小於5%,拉伸強度的水平異向性小於5%,且伸長率的水平異向性小於5%。 A method for manufacturing a low anisotropic copper plate comprises: providing a copper blank, wherein the purity of the copper blank is 99.9% to 99.99%; performing a heating step on the copper blank; after the heating step, performing a hot rolling step on the copper blank to obtain a hot rolled copper plate, wherein a total heat reduction in the hot rolling step is 50% to 90%, and a finishing temperature in the hot rolling step is 500°C to 550°C; performing a cold rolling step on the hot rolled copper plate to obtain a cold rolled copper plate, wherein each of the cold rolling steps is 100°C to 150°C. The cold rolling reduction in one pass is 5% to 20%, and the total cold rolling reduction in the cold rolling step is more than 50%; the cold rolled copper plate is subjected to an annealing step to obtain an annealed copper plate; the annealed copper plate is subjected to a water cooling step to obtain the low anisotropy copper plate, wherein a grain size of the low anisotropy copper plate is less than 70 μm, wherein in the low anisotropy copper plate, the horizontal anisotropy of the yield strength is less than 5%, the horizontal anisotropy of the tensile strength is less than 5%, and the horizontal anisotropy of the elongation is less than 5%. 如請求項1所述之低異向性銅板的製造方法,其中:該加熱步驟的一加熱溫度為550℃至650℃;及該加熱步驟的一加熱時間為30分鐘至3小時。 The method for manufacturing a low anisotropic copper plate as described in claim 1, wherein: a heating temperature of the heating step is 550°C to 650°C; and a heating time of the heating step is 30 minutes to 3 hours. 如請求項1所述之低異向性銅板的製造方法,其中: 該熱軋步驟中的每道次之一熱軋裁減量為5%至20%。 A method for manufacturing a low anisotropic copper plate as described in claim 1, wherein: The hot rolling reduction in each pass of the hot rolling step is 5% to 20%. 如請求項1所述之低異向性銅板的製造方法,其中該冷軋步驟中的該總冷軋裁減量為50%至60%。 The method for manufacturing a low anisotropic copper plate as described in claim 1, wherein the total cold rolling reduction in the cold rolling step is 50% to 60%. 如請求項1所述之低異向性銅板的製造方法,其中該退火步驟的一退火溫度為300℃至400℃。 The method for manufacturing a low anisotropic copper plate as described in claim 1, wherein an annealing temperature of the annealing step is 300°C to 400°C. 如請求項1所述之低異向性銅板的製造方法,其中該退火步驟的一退火時間為30分鐘至2小時。 The method for manufacturing a low anisotropic copper plate as described in claim 1, wherein the annealing time of the annealing step is 30 minutes to 2 hours. 如請求項1所述之低異向性銅板的製造方法,其中對該退火銅板進行該水冷步驟中的一水冷時間為2分鐘內,並在2分鐘內降溫至常溫。 The method for manufacturing a low anisotropic copper plate as described in claim 1, wherein the water cooling time of the annealed copper plate in the water cooling step is within 2 minutes, and the temperature is lowered to room temperature within 2 minutes. 一種低異向性銅板,藉由如請求項1至請求項7任一項所述之低異向性銅板的製造方法所製成,其中於該低異向性銅板中,降伏強度的水平異向性小於5%,拉伸強度的水平異向性小於5%,伸長率的水平異向性小於5%,(100)[001]再結晶集合組織佔5.8%,(110)[112]軋延集合組織佔11.6%,且(112)[111]軋延集合組織佔8.4%。 A low anisotropic copper plate is produced by the method for producing a low anisotropic copper plate as described in any one of claims 1 to 7, wherein in the low anisotropic copper plate, the horizontal anisotropy of the yield strength is less than 5%, the horizontal anisotropy of the tensile strength is less than 5%, the horizontal anisotropy of the elongation is less than 5%, the (100)[001] recrystallized aggregate structure accounts for 5.8%, the (110)[112] rolled aggregate structure accounts for 11.6%, and the (112)[111] rolled aggregate structure accounts for 8.4%.
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TW201102446A (en) * 2009-04-27 2011-01-16 Dowa Metaltech Co Ltd Copper alloy sheet and method for producing same
CN110578126A (en) * 2019-10-18 2019-12-17 洛阳高新四丰电子材料有限公司 Preparation method of multi-specification high-purity copper target

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TW201102446A (en) * 2009-04-27 2011-01-16 Dowa Metaltech Co Ltd Copper alloy sheet and method for producing same
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