TWI869920B - Anti-vibration unit - Google Patents

Abstract

An anti-vibration unit including a intermediary body, a first piezoelectric actuator, a first elastic body, a second piezoelectric actuator and at least one second elastic body is provided. The first piezoelectric actuator and the first elastic body are disposed on a side of the intermediary body along a first direction, and are suitable for driving the intermediary body to reciprocate in the first direction. The second piezoelectric actuator and the at least one second elastic body are respectively disposed on two opposite sides of the intermediary body along a second direction, and each is adapted to expand and contract along the second direction. The first direction intersects the second direction.

Description

Anti-vibration unit

The present invention relates to an anti-vibration structure, and in particular to an anti-vibration unit.

The manufacturing process of high-density integrated circuits or high-precision processing must rely on highly stable machines to complete. Therefore, even slight vibrations, such as the movement of workers in a clean room, or the passage of automatic processing equipment or transmission equipment, will cause slight low-frequency vibrations (or micro-vibrations), which may cause problems with the working performance of the machine and affect the output yield.

Generally speaking, the platform of the machine must be equipped with multiple sets of single-axis actuation modules to achieve multi-degree-of-freedom vibration isolation. However, this approach will increase the layout space required for the vibration-proof structure and is also more expensive.

The present invention provides an anti-vibration unit having multi-degree-of-freedom anti-vibration capabilities.

The anti-vibration unit of the present invention includes an intermediate body, a first piezoelectric actuator, a first elastic body, a second piezoelectric actuator and at least one second elastic body. The first piezoelectric actuator and the first elastic body are arranged on one side of the intermediate body along the first direction, and are suitable for driving the intermediate body to move back and forth along the first direction. The second piezoelectric actuator and at least one second elastic body are arranged on the opposite sides of the intermediate body along the second direction, and are each suitable for stretching and contracting along the second direction. The first direction intersects with the second direction.

Based on the above, in one embodiment of the present invention, the anti-vibration unit has multi-degree-of-freedom anti-micro-vibration capability due to the integration of at least two axial actuation structures. In addition to being equipped with a piezoelectric actuator, each axial actuation structure is also provided with an elastic body having the same extension direction as the piezoelectric actuator. In this way, the number of piezoelectric actuators can be greatly reduced to increase the cost advantage of the anti-vibration unit.

1: Anti-vibration table

10, 11, 12, 13, 14: Anti-vibration unit

100: Base

121: First piezoelectric actuator

122: Second piezoelectric actuator

123: Third piezoelectric actuator

131: First elastic body

132: Second elastic body

133: The third elastic body

142, 143: Auxiliary elastic body

150:Intermediate

161, 162, 163: abutment parts

170: Elastic structure

171: Rigid layer

172: Elastic body membrane

182, 183: Preload piston

191, 192, 193: Accelerometer

200: Carrier

300: Control unit

AS: Accommodation space

AAX1, AAX2: Actuating shaft

AX1, AX2, AX3: moving axis

C1, C2, C3, C4: Damping coefficient

F1, F2, F3: Force

G: Gap

GR1, GR2, GR3a, GR3b: Guide rails

K1, K2, K3, K4: elastic coefficient

RS: Groove

X, Y, Z: direction

A-A’, B-B’: section line

Figure 1 is a schematic cross-sectional view of an anti-vibration unit according to an embodiment of the present invention.

Figure 2 is a top view schematic diagram of the anti-vibration unit of Figure 1.

Figure 3 is a schematic diagram of the drive structure of the anti-vibration unit in Figure 1.

Figure 4 is a schematic diagram of the structure of an anti-vibration table according to an embodiment of the present invention.

As used herein, "about", "approximately", "essentially", or "substantially" include the stated value and the average value within an acceptable range of deviation of a particular value determined by a person of ordinary skill in the art, taking into account the measurement in question and the specific amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or, for example, within ±30%, ±20%, ±15%, ±10%, ±5%. Furthermore, as used herein, "about", "approximately", "essentially", or "substantially" can select a more acceptable range of deviation or standard deviation based on the measured property, cutting property, or other property, and can apply to all properties without a single standard deviation.

In the accompanying drawings, the thickness of layers, films, panels, regions, etc., is exaggerated for clarity. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to another element, or an intermediate element may also exist. Conversely, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intermediate elements. As used herein, "connected" may refer to physical and/or electrical connections. Furthermore, "electrical connection" may be the presence of other elements between two elements.

Additionally, relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship of one element to another element, as shown in the figures. It should be understood that relative terms are intended to include different orientations of the device in addition to the orientation shown in the figures. For example, if the device in one figure is flipped, the elements described as being on the "lower" side of the other elements will be oriented on the "upper" side of the other elements. Thus, the exemplary term "lower" can include both "lower" and "upper" orientations, depending on the particular orientation of the figure. Similarly, if the device in one figure is flipped, the elements described as being "below" or "beneath" the other elements will be oriented as being "above" the other elements. Thus, the exemplary term "above" or "below" can include both above and below orientations.

Exemplary embodiments are described herein with reference to cross-sectional views that are schematic illustrations of idealized embodiments. Therefore, variations in the shapes of the illustrations as a result of, for example, manufacturing techniques and/or tolerances are to be expected. Therefore, the embodiments described herein should not be construed as limited to the particular shapes of the regions as shown herein, but rather include deviations in shape that result, for example, from manufacturing. For example, a region shown or described as flat may typically have rough and/or nonlinear features. Furthermore, sharp corners shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the precise shape of the regions and are not intended to limit the scope of the claims.

Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same element symbols are used in the drawings and description to represent the same or similar parts.

FIG1 is a schematic cross-sectional view of an anti-vibration unit according to an embodiment of the present invention. FIG2 is a schematic top view of the anti-vibration unit of FIG1. FIG3 is a schematic diagram of a drive structure of the anti-vibration unit of FIG1. FIG2 is a cross-sectional view of the anti-vibration unit of FIG1 at the section line A-A'. FIG1 is a cross-sectional view of the anti-vibration unit of FIG2 at the section line B-B'.

Referring to FIG. 1 and FIG. 2 , the anti-vibration unit 10 includes a base 100, an intermediate body 150, a first piezoelectric actuator 121 and a first elastic body 131. The intermediate body 150 is movably disposed on the base 100. The first set of actuation structures formed by the first piezoelectric actuator 121 and the first elastic body 131 is disposed on one side of the intermediate body 150 along a first direction (e.g., direction Z), and is suitable for driving the intermediate body 150 to reciprocate along the first direction.

For example, in this embodiment, the base 100 can be sleeved on the intermediate body 150, and a guide rail GR1 can be provided between the base 100 and the intermediate body 150, wherein the guide rail GR1 can be an air-pressure guide rail or a hydraulic-pressure guide rail. The provision of the guide rail GR1 allows the intermediate body 150 to slightly move along the first direction in the base 100 in a nearly frictionless manner to achieve a rapid response. In addition, the design of the air-pressure guide rail or the hydraulic-pressure guide rail can further enhance the vibration isolation effect of the anti-vibration unit 10.

In this embodiment, the first piezoelectric actuator 121 can be selectively fixed on the base 100 and extend into the groove RS of the intermediate body 150 to abut against the intermediate body 150. However, the present invention is not limited thereto. In other embodiments, the first piezoelectric actuator 121 can also be fixed in the groove RS of the intermediate body 150 and abut against the base 100.

It is particularly noted that in order to avoid a gap formed during the force application process when the contact surfaces of the intermediate body 150 and the first piezoelectric actuator 121 are not parallel, the contact type between the intermediate body 150 and the first piezoelectric actuator 121 can be single-point contact. For example, in this embodiment, an abutment member 161 can be provided between the first piezoelectric actuator 121 and the intermediate body 150. The abutment member 161 can be fixed on the side of the first piezoelectric actuator 121 facing the intermediate body 150, and the surface of the abutment member 161 on the side facing the intermediate body 150 is an arc surface.

When the first piezoelectric actuator 121 applies force to the intermediate body 150 along the first direction, the arc surface of the abutment member 161 does not produce obvious deformation, thereby ensuring that the contact between the first piezoelectric actuator 121 and the intermediate body 150 can be maintained at a single point contact. Through this single point contact relationship, it can be ensured that the force applied by the first piezoelectric actuator 121 can accurately act on the intermediate body 150. The material of the abutment member 161 includes, for example, tungsten carbide, ceramics, hardened steel, or other suitable high-hardness materials.

In this embodiment, the first elastic body 131 is disposed on the base 100 and surrounds the first piezoelectric actuator 121. The intermediate body 150 is disposed on the first elastic body 131. More specifically, the first elastic body 131 is sandwiched between the base 100 and the intermediate body 150.

Furthermore, the anti-vibration unit 10 further includes a second piezoelectric actuator 122 and at least one second elastic body 132. The second piezoelectric actuator 122 and the second elastic body 132 are respectively disposed on opposite sides of the intermediate body 150 along the second direction (e.g., direction X), and are each adapted to stretch along the second direction, wherein the second direction intersects with (e.g., is perpendicular to) the first direction.

In this embodiment, the intermediate body 150 may have a receiving space AS on one side away from the groove RS, and a flexible structure 170 is provided in the receiving space AS. That is, the flexible structure 170 is provided on the other side of the intermediate body 150 away from the first piezoelectric actuator 121 and the first flexible body 131 along the first direction (as shown in FIG. 1 ). In particular, the flexible structure 170 provided in the receiving space AS and the intermediate body 150 have a gap G along the first direction (e.g., direction X) or the third direction (e.g., direction Y) (as shown in FIG. 2 ), and the width of the gap G along the spacing direction is greater than 0 mm, for example, 2 mm. That is, as long as there is a gap G between the intermediate body 150 and the flexible structure 170, it will be sufficient.

For example, the elastic structure 170 may be formed by stacking multiple rigid layers 171 and multiple layers of elastic body membrane 172 alternately, wherein the material of the elastic body membrane 172 may include a polymer (such as natural rubber or polyester rubber) or a copolymer, but is not limited thereto. In other embodiments, the elastic structure may also include multiple plate springs alternately arranged with the multiple layers of elastic body membrane 172.

Similar to the rail GR1 between the base 100 and the intermediate body 150, a rail GR2 may also be provided between the elastic structure 170 and the intermediate body 150, wherein the rail GR2 may be an air-pressure rail or a hydraulic-pressure rail. The provision of the rail GR2 allows the elastic structure 170 to move slightly along the second direction in the accommodation space AS of the intermediate body 150 in a nearly frictionless manner to achieve a rapid response. In addition, the design of the air-pressure rail or the hydraulic-pressure rail can further enhance the vibration isolation effect of the anti-vibration unit 10.

The second piezoelectric actuator 122 and the second elastic body 132 are respectively disposed on opposite sides of the elastic structure 170 along the second direction, and each abuts against the elastic structure 170. The second set of actuation structures formed by the second piezoelectric actuator 122 and the second elastic body 132 is suitable for driving the elastic structure 170 to reciprocate along the second direction. In this embodiment, the extension and contraction axis of the actuation structure formed by the first piezoelectric actuator 121 and the first elastic body 131 can be perpendicular to the extension and contraction axis of another actuation structure formed by the second piezoelectric actuator 122 and the second elastic body 132, but is not limited thereto.

Similar to the contact type between the first piezoelectric actuator 121 and the intermediate body 150, the contact type between the second piezoelectric actuator 122 and the second elastic body 132 and the elastic structure 170 can also be single-point contact. That is, an abutment member 162 can be provided between the second piezoelectric actuator 122 and the elastic structure 170, and an abutment member 163 can be provided between the second elastic body 132 and the elastic structure 170. The abutment member 162 and the abutment member 163 each have a curved surface on one side facing the elastic structure 170.

When the second piezoelectric actuator 122 applies force to the elastic structure 170 along the second direction, the arc surface of the abutment member 162 and the abutment member 163 will not produce obvious deformation, thereby ensuring that the contact between the second piezoelectric actuator 122 and the second elastic body 132 and the elastic structure 170 can be maintained at a single point contact. Through this single point contact relationship, it can be ensured that the force of the second piezoelectric actuator 122 and the rebound force of the second elastic body 132 can accurately act on the elastic structure 170. The materials of the abutment member 162 and the abutment member 163 include, for example, tungsten carbide, ceramics, hardened steel, or other suitable high-hardness materials.

In this embodiment, an auxiliary elastic body 142 suitable for stretching along the second direction is provided between the second piezoelectric actuator 122 and the intermediate body 150, and the second piezoelectric actuator 122 can be fixed on the intermediate body 150 via the auxiliary elastic body 142, but is not limited thereto. In other embodiments, the second piezoelectric actuator 122 can also be directly fixed on the intermediate body 150.

In this embodiment, a preload piston 182 may be selectively provided between the second piezoelectric actuator 122 and the auxiliary elastic body 142, and a guide rail GR3a may be provided between the preload piston 182 and the intermediate body 150, wherein the guide rail GR3a may be a pneumatic pressure guide rail or a hydraulic pressure guide rail. The provision of the guide rail GR3a allows the second piezoelectric actuator 122 to slightly move along the second direction in the intermediate body 150 in a manner that is almost frictionless, so as to achieve a rapid response. In addition, the design of the pneumatic pressure guide rail or the hydraulic pressure guide rail can further enhance the vibration isolation effect of the anti-vibration unit 10.

It is particularly noted that in this embodiment, the number of the second elastic bodies 132 of the anti-vibration unit 10 is, for example, two. The second piezoelectric actuator 122 has an actuation axis AAX1 parallel to the second direction, and the two second elastic bodies 132 are respectively located on opposite sides of the actuation axis AAX1 of the second piezoelectric actuator 122. More specifically, although the extension and contraction directions of the two second elastic bodies 132 are parallel to the extension and contraction directions of the second piezoelectric actuator 122, they are both arranged in a manner offset from the actuation axis AAX1. In this way, the elastic structure 170 can be prevented from generating a rotational torque and moving away from the second direction under the force of the second piezoelectric actuator 122 or the rebound force of the second elastic body 132, thereby ensuring the anti-vibration effect of the anti-vibration unit 10 in the second direction.

Furthermore, the anti-vibration unit 10 further includes a third piezoelectric actuator 123 and at least one third elastic body 133. The third piezoelectric actuator 123 and the third elastic body 133 are respectively disposed on opposite sides of the intermediate body 150 along a third direction (e.g., direction Y), and are each adapted to stretch along the third direction, wherein the third direction intersects (e.g., is perpendicular to) the first direction and the second direction.

The third piezoelectric actuator 123 and the third elastic body 133 are respectively disposed on opposite sides of the elastic structure 170 along the third direction, and each abuts against the elastic structure 170. The third actuating structure formed by the third piezoelectric actuator 123 and the third elastic body 133 is suitable for driving the elastic structure 170 to reciprocate along the third direction. In this embodiment, the extension and contraction axis of the actuation structure formed by the third piezoelectric actuator 123 and the third elastic body 133 may be perpendicular to the extension and contraction axis of the second actuation structure formed by the second piezoelectric actuator 122 and the second elastic body 132 and the extension and contraction axis of the first actuation structure formed by the first piezoelectric actuator 121 and the first elastic body 131, but is not limited thereto.

Similar to the contact type between the second piezoelectric actuator 122 and the elastic structure 170, the contact type between the third piezoelectric actuator 123 and the third elastic body 133 and the elastic structure 170 can also be single-point contact. That is, an abutment member 162 can be provided between the third piezoelectric actuator 123 and the elastic structure 170, and an abutment member 163 can be provided between the third elastic body 133 and the elastic structure 170. The abutment member 162 and the abutment member 163 each have a curved surface on one side facing the elastic structure 170.

When the third piezoelectric actuator 123 applies force to the elastic structure 170 along the third direction, the arc surface of the abutment member 162 and the abutment member 163 will not produce obvious deformation, thereby ensuring that the contact between the third piezoelectric actuator 123 and the third elastic body 133 and the elastic structure 170 can be maintained at a single point of contact. Through this single point contact relationship, it can be ensured that the force of the third piezoelectric actuator 123 and the rebound force of the third elastic body 133 can accurately act on the elastic structure 170.

In this embodiment, an auxiliary elastic body 143 suitable for stretching along the third direction is provided between the third piezoelectric actuator 123 and the intermediate body 150, and the third piezoelectric actuator 123 can be fixed on the intermediate body 150 via the auxiliary elastic body 143, but is not limited thereto. In other embodiments, the third piezoelectric actuator 123 can also be directly fixed on the intermediate body 150.

In this embodiment, a preload piston 183 may be selectively provided between the third piezoelectric actuator 123 and the auxiliary elastic body 143, and a guide rail GR3b may be provided between the preload piston 183 and the intermediate body 150, wherein the guide rail GR3b may be an air-pressure guide rail or a hydraulic-pressure guide rail. The provision of the guide rail GR3b allows the third piezoelectric actuator 123 to move slightly along the third direction in the intermediate body 150 in an almost frictionless manner to achieve a rapid response. In addition, the design of the air-pressure guide rail or the hydraulic-pressure guide rail can further enhance the vibration isolation effect of the anti-vibration unit 10.

It is particularly noted that, regardless of whether the aforementioned guide rail is of pneumatic or hydraulic type, the pneumatic pressure or hydraulic pressure can enter the aforementioned multiple guide rail surfaces (such as guide rail GR1, guide rail GR2, guide rail GR3a and guide rail GR3b) through the same pipeline or different pipelines. However, the present invention is not limited to this. In other embodiments, the guide rail can also be a general roller guide rail or ball guide rail.

In this embodiment, the number of the third elastic bodies 133 of the anti-vibration unit 10 is, for example, two. The third piezoelectric actuator 123 has an actuation axis AAX2 parallel to the third direction, and the two third elastic bodies 133 are respectively located on opposite sides of the actuation axis AAX2 of the third piezoelectric actuator 123. More specifically, although the extension and contraction directions of the two third elastic bodies 133 are parallel to the extension and contraction directions of the third piezoelectric actuator 123, they are both arranged in a manner offset from the actuation axis AAX2. In this way, the elastic structure 170 can be prevented from moving away from the third direction under the force of the third piezoelectric actuator 123 or the rebound force of the third elastic body 133, thereby ensuring the anti-vibration effect of the anti-vibration unit 10 in the third direction.

Since the anti-vibration unit 10 of this embodiment is equipped with three sets of actuation structures in different axial directions, vibration isolation with three degrees of freedom can be achieved.

Referring to FIGS. 1 to 3 , in this embodiment, the elastic structure 170 of the anti-vibration unit 10 is suitable for receiving a carrier 200, and the carrier 200 may be provided with a tool for precision process or precision machining, but is not limited thereto. For example, the first elastic body 131 may have an elastic coefficient K1 and a damping coefficient C1, and serve as an elastic damper between the intermediate body 150 and the base 100. The auxiliary elastic body 142 may have an elastic coefficient K2 and a damping coefficient C2, and serve as an elastic damper between the elastic structure 170 and the intermediate body 150. The auxiliary elastic body 143 may have an elastic coefficient K3 and a damping coefficient C3, and serve as an elastic damper between the elastic structure 170 and the intermediate body 150. The elastic structure 170 may have an elastic coefficient K4 and a damping coefficient C4, and serve as an elastic damper between the carrier 200 and the intermediate body 150.

On the other hand, the first piezoelectric actuator 121 is suitable for applying force F1 to the intermediate body 150 along the first direction (e.g., direction Z), the second piezoelectric actuator 122 is suitable for applying force F2 to the elastic structure 170 along the second direction (e.g., direction X), and the third piezoelectric actuator 123 is suitable for applying force F3 to the elastic structure 170 along the third direction (e.g., direction Y). When any of the above piezoelectric actuators stops operating, the elastic body that stretches in the same direction can provide a corresponding rebound force. In this way, the number of piezoelectric actuators can be reduced.

In this embodiment, the anti-vibration unit 10 may further include a control unit 300 and a plurality of accelerometers, such as a first accelerometer 191, a second accelerometer 192, and a third accelerometer 193. The first accelerometer 191 is disposed on the base 100, the second accelerometer 192 is disposed on the intermediate body 150, and the third accelerometer 193 is disposed on the carrier 200.

In this embodiment, the accelerometer can be a three-axis accelerometer, and its three sensing axes are respectively set in the first direction, the second direction and the third direction, so the number of configurations can be one, but is not limited to this. In other embodiments, the accelerometer on the base 100, the intermediate body 150 or the stage 200 can be a single axis. Therefore, if acceleration sensing in three axes is to be achieved, the number of configurations of the single-axis accelerometer can be three, and they are respectively set on the base 100, the intermediate body 150 or the stage 200 corresponding to the three different axes.

For example, when the accelerometers of the anti-vibration unit 10 sense vibrations in multiple axes, the control unit 300 receives the sensing signals from these accelerometers and analyzes them, and then sends a driving signal to the first piezoelectric actuator 121, the second piezoelectric actuator 122, the third piezoelectric actuator 123, or a combination thereof according to the analysis results to provide the force required for vibration reduction.

FIG4 is a schematic diagram of the structure of an anti-vibration table according to an embodiment of the present invention. Referring to FIG4, in this embodiment, the anti-vibration table 1 may include a carrier 200 and anti-vibration units 11, 12, 13 and 14 respectively disposed at four corners of the carrier 200. The composition structure of these anti-vibration units is similar to the anti-vibration unit 10 of FIG1 and FIG2. For detailed description, please refer to the above-mentioned relevant paragraphs, which will not be repeated here.

Since each anti-vibration unit has three degrees of freedom vibration isolation capability, the anti-vibration table 1 of this embodiment can have six degrees of freedom vibration isolation capability.

For example, when the driving phase of the third piezoelectric actuator 123 of the anti-vibration unit 11 and the second piezoelectric actuator 122 of the anti-vibration unit 13 is opposite to the driving phase of the second piezoelectric actuator 122 of the anti-vibration unit 12 and the third piezoelectric actuator 123 of the anti-vibration unit 14, the anti-vibration table 1 has the anti-vibration capability in the axial direction of the moving axis AX1. When the driving phase of the second piezoelectric actuator 122 of the anti-vibration unit 11 and the third piezoelectric actuator 123 of the anti-vibration unit 12 is opposite to the driving phase of the third piezoelectric actuator 123 of the anti-vibration unit 13 and the second piezoelectric actuator 122 of the anti-vibration unit 14, the anti-vibration table 1 has the anti-vibration capability in the axial direction of the moving axis AX2. When the first piezoelectric actuators 121 of the anti-vibration unit 11, the anti-vibration unit 12, the anti-vibration unit 13, and the anti-vibration unit 14 are activated in the same phase, the anti-vibration table 1 has anti-vibration capability in the axial direction of the moving axis AX3.

When the driving phase of the first piezoelectric actuator 121 of the anti-vibration unit 11 and the anti-vibration unit 12 is opposite to the driving phase of the first piezoelectric actuator 121 of the anti-vibration unit 13 and the anti-vibration unit 14, the anti-vibration table 1 has a rotational vibration resistance relative to the moving axis AX1. When the driving phase of the first piezoelectric actuator 121 of the anti-vibration unit 11 and the anti-vibration unit 13 is opposite to the driving phase of the first piezoelectric actuator 121 of the anti-vibration unit 12 and the anti-vibration unit 14, the anti-vibration table 1 has a rotational vibration resistance relative to the moving axis AX2. When the driving phase of the third piezoelectric actuator 123 of the anti-vibration unit 11, the anti-vibration unit 12, the anti-vibration unit 13, and the anti-vibration unit 14 is opposite to the driving phase of the second piezoelectric actuator 122 of the anti-vibration unit 11, the anti-vibration unit 12, the anti-vibration unit 13, and the anti-vibration unit 14, the anti-vibration table 1 has a rotational anti-vibration capability relative to the moving axis AX3.

It should be noted that the vibration-proof direction of the vibration-proof table 1 is not limited to the axial directions of the aforementioned moving axes AX1, AX2, and AX3, and the vibration-proof table 1 also has vibration-proof capabilities in other directions intersecting these moving axes. For example, when the driving phase of the second piezoelectric actuator 122 and the third piezoelectric actuator 123 of the anti-vibration unit 11 is opposite to the driving phase of the second piezoelectric actuator 122 and the third piezoelectric actuator 123 of the anti-vibration unit 14, the anti-vibration table 1 also has anti-vibration capability in the direction deviating from the respective axial directions of the moving axis AX1 and the moving axis AX2, and the degree of deviation can be determined by the difference in the expansion and contraction of the second piezoelectric actuator 122 and the third piezoelectric actuator 123 of the anti-vibration unit 11 or the anti-vibration unit 14. By analogy, any anti-vibration capability not in the respective axial directions of the aforementioned moving axis AX1, moving axis AX2 and moving axis AX3 can be realized by a similar driving method, so it will not be repeated.

Since the anti-vibration table 1 of this embodiment only uses four anti-vibration units 10 as shown in Figures 1 and 2 to have six degrees of freedom (three translations and three rotations) of anti-vibration capability, it can not only greatly reduce the layout space required for the anti-vibration structure, but also reduce the installation cost.

It should be noted that in this embodiment, although the number of anti-vibration units of the anti-vibration table 1 is four, the present invention is not limited to this. In other embodiments, the number and location of the anti-vibration units can be adjusted according to the actual application object and usage environment.

In summary, in one embodiment of the present invention, the anti-vibration unit has multi-degree-of-freedom anti-micro-vibration capability due to the integration of at least two axial actuation structures. In addition to being equipped with a piezoelectric actuator, each axial actuation structure is also provided with an elastic body having the same extension direction as the piezoelectric actuator. In this way, the number of piezoelectric actuators can be greatly reduced to increase the cost advantage of the anti-vibration unit.

10: Anti-vibration unit

100: Base

121: First piezoelectric actuator

122: Second piezoelectric actuator

131: First elastic body

132: Second elastic body

142: Auxiliary elastic body

150:Intermediate

161, 162, 163: abutment parts

170: Elastic structure

171: Rigid layer

172: Elastic body membrane

182: Preload piston

200: Carrier

AS: Accommodation space

G: Gap

GR1, GR2, GR3a: Guide rails

RS: Groove

X, Y, Z: direction

A-A’: section line

Claims (10)

An anti-vibration unit comprises: an intermediate body; a first piezoelectric actuator and a first elastic body, which are arranged on one side of the intermediate body along a first direction and are suitable for driving the intermediate body to reciprocate along the first direction; a second piezoelectric actuator and at least one second elastic body, which are arranged on two opposite sides of the intermediate body along a second direction and are each suitable for stretching and contracting along the second direction, wherein the first direction intersects the second direction; an elastic structure, which is arranged on the other side of the intermediate body along the first direction and away from the first piezoelectric actuator and the first elastic body, wherein the second piezoelectric actuator and the first elastic body are respectively arranged on two opposite sides of the intermediate body along a second direction and are each suitable for stretching and contracting along the second direction, wherein the first direction intersects the second direction; and a flexible structure, which is arranged on the other side of the intermediate body along the first direction and away from the first piezoelectric actuator and the first elastic body, wherein the second piezoelectric actuator and the first elastic body are respectively arranged on the second side of the intermediate body along the second direction and are respectively suitable for stretching and contracting along the second direction. The electric actuator is fixed on the intermediate body, the second piezoelectric actuator and the at least one second elastic body respectively abut the elastic structure, and are suitable for driving the elastic structure to reciprocate along the second direction; and a third piezoelectric actuator and at least one third elastic body are arranged on opposite sides of the intermediate body along a third direction, and are respectively suitable for stretching along the third direction, the third direction intersects the first direction and the second direction, the third piezoelectric actuator and the at least one third elastic body respectively abut the elastic structure, and are suitable for driving the elastic structure to reciprocate along the third direction. The anti-vibration unit as described in claim 1, wherein a pneumatic hydrostatic guide rail or a hydraulic hydrostatic guide rail is provided between the intermediate body and the elastic structure. The anti-vibration unit as described in claim 1, wherein the contact type between the elastic structure and the second piezoelectric actuator is single-point contact. The anti-vibration unit as described in claim 1, wherein the at least one second elastic body is two second elastic bodies, the second piezoelectric actuator has a consistent actuation axis parallel to the second direction, and the two second elastic bodies are respectively located on opposite sides of the actuation axis of the second piezoelectric actuator. As described in claim 4, the anti-vibration unit, wherein an auxiliary elastic body is provided between the second piezoelectric actuator and the intermediate body, and the auxiliary elastic body is suitable for stretching along the second direction. As described in claim 5, the anti-vibration unit is provided with a pre-stress piston between the second piezoelectric actuator and the auxiliary elastic body, the pre-stress piston is sleeved on the second piezoelectric actuator, and a pneumatic static pressure guide rail or a hydraulic static pressure guide rail is provided between the pre-stress piston and the intermediate body. The anti-vibration unit as described in claim 1 further includes: a base, which is mounted on the intermediate body, wherein the first piezoelectric actuator is fixed on the base, and the first elastic body is sandwiched between the base and the intermediate body. The anti-vibration unit as described in claim 7, wherein a pneumatic hydrostatic guide rail or a hydraulic hydrostatic guide rail is provided between the base and the intermediate body. The anti-vibration unit as described in claim 7 further includes: at least one first accelerometer disposed on the base; and at least one second accelerometer disposed on the intermediate body. The anti-vibration unit as described in claim 1, wherein the contact type between the intermediate body and the first piezoelectric actuator is single-point contact.

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