TWI869390B - Retainer unit and pin - Google Patents

Abstract

The object of the present invention is to provide a retainer unit that can easily form a line along the scanning direction of the retainer unit.

In the retainer unit 40 of the present invention, the pin 70 supporting the scribing wheel 60 has a limiting portion 80 that blocks the scribing wheel 60 from moving relative to the pin 70 in the axial direction of the pin 70, and the restricted portion of the scribing wheel 60 and the limiting portion 80 of the pin 70 are in contact at two points to support the scribing wheel 60, thereby suppressing the deviation of the scribing wheel.

Description

Retainer unit and pin

The present invention relates to a retainer unit and a pin.

A marking device is used when marking a brittle material substrate such as a glass substrate. The marking device is provided with a retainer unit and a scanning device for scanning the same. The retainer unit is composed of a retainer body, a pin, and a marking wheel. The retainer body is mounted on the scanning device. The pin is supported on the retainer body. The marking wheel is supported on the pin. Patent document 1 discloses an example of a retainer unit, namely a marking unit (20). The marking unit (20) is composed of a marking wheel (60), a pin (32) that supports the marking wheel (60) and allows it to rotate, and a support frame (33) that supports the pin (32). A marking unit (20) is used to scan the brittle material substrate along a specific scanning direction to form a marking line on the brittle material substrate.

[Prior Art Literature] [Patent Literature]

[Patent document 1] Japanese Patent Publication No. 2012-106479

In a previous scribing device, for example, when the retainer unit is scanned in a straight direction, a non-straight scribing line is sometimes formed on a brittle material substrate. In one example, the non-straight scribing line includes a straight line portion along the scanning direction of the scribing wheel and a non-straight line portion that moves in a direction different from the scanning direction. There are cases where the non-straight line portion is partially formed in one or several parts of the scribing line, and there are cases where the straight line portion and the non-straight line portion are alternately formed in the substantially entire scribing line, and the shape of the non-straight scribing line is varied. Based on the point of improving the quality of the brittle material substrate that has been broken, it is better to form a scribing line along the scanning direction. This applies not only to the case of forming a straight line, but also to the case of forming a scribing line of a shape different from a straight line.

(1) The retainer unit related to the present invention is characterized in that it includes: a scribing wheel; a pin inserted into the insertion hole of the scribing wheel to rotatably support the scribing wheel; and a retainer that retains the pin; and the scribing wheel is supported by a restricted portion provided on the inner circumference of the insertion hole and a restricting portion provided on the pin in contact at two points; the restricting portion is a recessed portion formed on the outer circumference of the pin.

When the scribing wheel is scanning, if a reaction force is generated in the scribing wheel in the axial direction of the pin, the reaction force is borne by the limiting portion of the pin. Therefore, the movement of the scribing wheel relative to the pin in the axial direction of the pin is suppressed. In this way, it is easy to form a scribing line along the scanning direction of the retainer unit. In addition, the limiting portion of the pin and the restricted portion of the scribing wheel are in contact at two points, so it is easy to stabilize the position and posture of the scribing wheel in the retainer.

(2) In the retainer unit described in (1), in a preferred embodiment, the above-mentioned restricted portion is a convex surface.

Therefore, the structure of the restriction part is simple.

(3) In the retainer unit described in (2), in a preferred embodiment, the width of the recess is smaller than the thickness of the scribing wheel.

Therefore, the restricted part and the restricting part are surely in contact at two points.

(4) In the retainer unit described in (2), in a preferred embodiment, the convex surface is provided in the entire thickness direction of the scoring wheel.

Since the concave and convex parts are in contact, the friction resistance when drawing lines becomes smaller.

(5) The pin related to the present invention is inserted into the insertion hole of the scribing wheel, supports the scribing wheel rotatably, and has: a limiting portion that contacts the insertion hole of the scribing wheel at two points; the limiting portion is a recessed portion formed on the outer periphery of the pin.

According to the above method, the same effect as described in (1) can be obtained.

According to the retainer unit and pin related to the present invention, it is easy to form a line along the scanning direction of the retainer unit.

1: Marking device

10: Mobile devices

11: Mobile platform

12: Tracks

13: Rotational-linear conversion device

13A: Motor

13B: Lead screw part

20: Platform device

21: Platform

22: Motor

30:Maintaining mechanism

31: Bridge

31A: Guidance

32: Pillar

33: Connection part

34: Marking the thread ends

35: Retainer joint

40: Retainer unit

50: Retainer

51: Groove

51A: Noodles

51B: Noodles

52: Support hole

60: Scoring wheel

61: Main body

61A: 1st side

61B: 2nd side

62: Blade tip

63: Insertion hole

70: Sales

70A: End

71: Outer surface

80: Restriction Department

81: Concave part

81A: Bottom

81B: Fate

81C: Fate

90: Restricted Department

91: convex part

91A: Noodles

91B: Top point

170:Sales

180: Restriction Department

181: Concave part

270:Sales

280: Restriction Department

281: Concave part

370: Sales

380: Restriction Department

381: Concave part

DT: thickness direction

GB: brittle material substrate

HA:Height

J: Center axis

LA: Straight Line

LB: Straight line

SA: gap

SB: Gap

XA: Depth

XB: Width

Figure 1 is a three-dimensional diagram of the line drawing device in the implementation form.

Figure 2 is a cross-sectional view of the retainer unit in Figure 1.

FIG. 3 is a diagram showing the deviation of the drawn line when the drawn line is drawn using the retainer unit of the embodiment.

FIG. 4 is a diagram showing the deviation of the marking line when the marking is performed using the previous retainer unit.

Figures 5(a) to (c) are enlarged side views showing variations of the limiting portion of the retainer unit of the embodiment.

(Implementation form)

The scribing device 1 shown in FIG. 1 is used to form scribing lines on the surface of a brittle material substrate GB in order to separate a substrate formed of a brittle material such as a glass substrate or a ceramic substrate (hereinafter referred to as a "brittle material substrate GB"). An example of the brittle material substrate GB is a glass substrate. An example of a glass substrate is alkali-free glass. Alkali-free glass is used in flat panel displays, etc.

The main elements constituting the marking device 1 are a moving device 10, a platform device 20, a holding mechanism 30, and a retainer unit 40. The moving device 10 allows the brittle material substrate GB to be scanned along the scanning direction. The moving device 10 has a moving table 11 on which the platform device 20 is mounted. The moving table 11 is mounted on a pair of rails 12. The rotation-to-linear conversion device 13 moves the moving table 11 along the rails 12. An example of the rotation-to-linear conversion device 13 is a lead screw device, which has a motor 13A as a driving source and a lead screw portion 13B connected to the output shaft of the motor 13A.

The platform device 20 has a platform 21 that can rotate around a rotation center axis J, and a motor 22 for rotating the platform 21. The brittle material substrate GB is placed on the platform 21 and is held on the platform 21 by being adsorbed on the platform 21 by a vacuum suction mechanism (not shown). The motor 22 is housed in the platform 21. The motor 22 determines the position of the brittle material substrate GB in the rotation direction of the platform 21 by rotating the platform 21.

The holding mechanism 30 holds the retainer unit 40. The holding mechanism 30 has a bridge 31 arranged to cross the platform 21 from above, and a pair of pillars 32 supporting the bridge 31. A guide 31A is provided on the bridge 31. The marking head 34 is movably mounted on the guide 31A via a connecting portion 33. The connecting portion 33 and the marking head 34 move along the guide 31A. The connecting portion 33 and the marking head 34 are connected via a lifting mechanism (not shown). By driving the lifting mechanism, the marking head 34 moves in the up and down direction relative to the connecting portion 33. The retainer unit 40 is detachably mounted on the marking head 34 via a retainer joint 35.

The main elements constituting the retainer unit 40 shown in FIG2 are the retainer 50, the scribing wheel 60, and the pin 70 of the scribing wheel 60 (hereinafter referred to as "pin 70"). Since the scribing wheel 60 is a consumable part, it is replaced regularly. In one example, the scribing wheel 60 is replaced by replacing only the scribing wheel 60 or the retainer unit 40.

An example of a material constituting the retainer 50 is a magnetic metal. The retainer 50 is roughly cylindrical or prism-shaped. The retainer 50 has a groove portion 51 for accommodating a portion of the scribing wheel 60, and a support hole 52 that penetrates the retainer 50 in a manner connected to the groove portion 51. The groove portion 51 opens toward the brittle material substrate GB when the retainer 50 is mounted on the scribing head 34 (see FIG. 1 ).

The pin 70 supports the scribing wheel 60. The pin 70 is inserted into the support hole 52. One end 70A of the pin 70 is a tapered shape. The relationship between the support hole 52 and the pin 70 can be selected arbitrarily. In the first example, the pin 70 is fixed to the support hole 52 in a manner that it cannot rotate relative to the support hole 52. The fixing method is press-in or connection. In the case of the first example, it is preferred that the maximum inner diameter of the support hole 52 and the maximum outer diameter of the pin 70 are substantially equal. In the second row, the pin 70 is inserted into the support hole 52 in a manner that it can rotate relative to the support hole 52. In the case of the second example, the maximum inner diameter of the support hole 52 is slightly larger than the maximum outer diameter of the pin 70. In the following, the extension direction of the center axis of the pin 70 is referred to as the pin axis direction.

An example of the material constituting the scribing wheel 60 and the pin 70 is sintered diamond, superhard alloy, single crystal diamond, and polycrystalline diamond. In other examples, there is a case where a hard material is coated on the scribing wheel 60. The hard material is, for example, diamond.

The scribing wheel 60 is mainly divided into a main body 61 and a blade tip 62. The main body 61 is in the shape of a circular plate, i.e., the portion of the scribing wheel 60 that is closer to the inner side of the blade tip 62 in diameter. The blade tip 62 is in the shape of a V-shaped cross section, formed on the entire periphery of the scribing wheel 60. The V-shaped cross section refers to a shape that tapers toward the outer periphery of the scribing wheel 60 in a cross section of the scribing wheel 60 cut along a plane in the thickness direction of the scribing wheel 60 (hereinafter referred to as "thickness direction DT"). In the following description, a cross section that is orthogonal to a plane parallel to the radial direction of the scribing wheel 60 is referred to as an orthogonal cross section. In a preferred example, an example of the outer diameter of the scribing wheel 60 is within the range of Φ1mm~Φ7mm. In one example, the outer diameter of the scribing wheel 60 is Φ2.5 mm. In a preferred example, the thickness of the scribing wheel 60 is within the range of 0.38 mm to 1.1 mm. An example of the thickness of the scribing wheel 60 is 0.64 mm. In addition, the length of the groove portion 51 in the thickness direction DT, that is, the distance between the two surfaces 51A and 51B facing each other in the thickness direction DT in the inner surface of the groove portion 51, is 0.66 mm.

An insertion hole 63 is formed at the center of the main body 61 and penetrates the main body 61 in the thickness direction DT. A pin 70 is inserted into the insertion hole 63. The main body 61 has a first side surface 61A forming one end of the insertion hole 63 and a second side surface 61B forming the other end of the insertion hole 63. The portion of the first side surface 61A received in the groove portion 51 is opposite to the surface 51A of the groove portion 51 through a specific gap SA. The portion of the second side surface 61B received in the groove portion 51 is opposite to the surface 51B of the groove portion 51 through a specific gap SB. The relationship between the size of the gap SA in the thickness direction DT and the size of the gap SB can be arbitrarily selected according to the position and size of the limiting portion 80 described later. In the first example shown in FIG. 2 , the size of the gap SA in the thickness direction DT is equal to the size of the gap SB. In the second example, the size of the gap SA in the thickness direction DT is different from the size of the gap SB.

The sizes of the gaps SA and SB in the thickness direction DT can be set arbitrarily. In a preferred example, the sizes of the gaps SA and SB in the thickness direction DT are determined based on the relationship between the ease of suppressing the tilting of the scribing wheel 60 in the groove portion 51 of the retainer 50 in the thickness direction DT and the difficulty of blocking the gaps SA and SB by foreign matter. An example of foreign matter is debris of the brittle material substrate GB generated by forming the scribing line. An example of the maximum values of the sizes of the gaps SA and SB in the thickness direction DT is 10 μm, respectively. When the sizes of the gaps SA and SB are less than 10 μm, it is easy to suppress the tilting of the scribing wheel 60 in the groove portion 51 of the retainer 50 in the thickness direction DT. An example of the minimum values of the sizes of the gaps SA and SB in the thickness direction DT is 2 μm, respectively. When the size of the gaps SA and SB is greater than 2μm, foreign matter is less likely to block the gaps SA and SB. Furthermore, the scribing wheel 60 and the retainer 50 are less likely to interfere with each other. An example of the desirable range of the total size of the gaps SA and SB in the thickness direction DT is 4μm~20μm.

In the step of forming a score line on the brittle material substrate GB, the retainer unit 40 is scanned along a specific scanning direction while the scoring wheel 60 is pressed against the surface of the brittle material substrate GB. As a scanning method, there can be listed a method of moving the retainer unit 40 relative to the brittle material substrate GB, a method of moving the brittle material substrate GB relative to the retainer unit 40, and a method of combining these. When the brittle material substrate GB is scored, the scoring wheel 60 not only has a first reaction force including a component that acts in the direction opposite to the scanning direction, but also has a second reaction force including a component in the pin direction. This is mainly caused by the uneven surface properties of the brittle material substrate GB. The unevenness of the surface properties is caused by, for example, a plurality of tiny unevennesses distributed unevenly on the surface and the curvature of the surface. The second reaction force includes a reaction force acting in one direction of the pin axis, namely, the first pin axis direction, and a reaction force acting in the other direction of the pin axis, namely, the second pin axis direction. Since the shape of the surface unevenness of the brittle material substrate GB is different for each part, the direction and strength of the second reaction force acting on the scribing wheel 60 change as the scribing wheel 60 moves. Since the scribing wheel 60 is not fixed relative to the pin 70, as the second reaction force acts on the scribing wheel 60, the scribing wheel 60 is displaced relative to the pin 70 along the pin axis direction. In the following description, the movement of the scoring wheel 60 relative to the pin 70 in the direction of the pin axis is referred to as "axis direction displacement".

The direction and amount of the axle-direction displacement mainly depend on the relationship between the strength of the second reaction force acting in the first pin direction and the strength of the second reaction force acting in the second pin direction. A non-straight line is formed due to the axle-direction displacement. By suppressing the displacement, it is difficult to form a non-straight line. The retainer unit 40 has a displacement suppression structure for suppressing the axle-direction displacement. The displacement suppression structure includes a limiting portion 80 provided on the pin 70 and a restricted portion 90 provided on the scoring wheel 60.

The structure of the limiting portion 80 can be selected arbitrarily. In the example shown in FIG. 2 , the limiting portion 80 includes a recess 81 formed on the outer periphery of the pin 70. Therefore, the structure of the limiting portion 80 is simple. The recess 81 is formed by, for example, grinding, discharge processing, and laser processing on the outer periphery of the pin 70 in order to be able to contact the restricted portion 90 at two points, and does not include the tiny bumps and depressions formed when the pin 70 is manufactured. The recess 81 goes around the outer periphery of the pin 70 once. The position of the recess 81 in the axial direction of the pin 70 can be selected arbitrarily. In one example, the recess 81 is set at the center of the axial direction of the pin 70. The recess 81 is a shape that is recessed toward the center axis side of the pin 70 relative to the outer peripheral surface 71 of the pin 70.

The diameter of the pin 70 is within the range of 0.35 mm to 1.5 mm. The depth XA of the recess 81 is within the range of 1 μm to 100 μm. The depth XA of the recess 81 is preferably within the range of 15 μm to 60 μm. The depth XA of the recess 81 is represented by the distance between a straight line LA passing through the outer peripheral surface 71 of the pin 70 on an orthogonal cross section and the bottom 81A of the recess 81.

The width XB of the recess 81 in the pin axis direction is represented by the distance between one edge 81B and the other edge 81C of the recess 81 on the straight line LA passing through the outer peripheral surface 71 on the orthogonal section. The width XB of the recess 81 is preferably smaller than the thickness of the scribing wheel 60 and is greater than 50μm.

The restricted portion 90 includes a convex portion 91 that contacts the concave portion 81 at two points. Therefore, the structure of the restricted portion 90 is simple. The surface 91A of the convex portion 91 is a curved surface formed between the first side surface 61A and the second side surface 61B in the thickness direction DT and is defined by a specific curvature radius RB. Therefore, it is not easy to generate stress concentration on the convex portion 91. The relationship between the width of the concave portion 81 and the curvature radius RB of the convex portion 91 can be arbitrarily selected. In the case of the first example, since the edges 81B and 81C of the concave portion 81 and the surface 91A of the convex portion 91 are in line contact at two points, the marking wheel 60 is stably supported on the pin 70 and the friction resistance during marking is reduced. The height HA of the convex portion is included in the range of 0.1μm~20μm. The height HA of the protrusion 91 is preferably within the range of 0.5 μm to 15 μm. The height HA of the protrusion 91 is represented by the distance between the straight line LB passing through the boundary between the side surfaces 61A, 61B of the main body 61 and the surface 91A and the vertex 91B of the protrusion 91. The minimum inner diameter of the protrusion 91 of the insertion hole 63 of the scribing wheel 60 is slightly larger than the maximum outer diameter of the pin 70.

The function and effect of the retainer unit 40 are explained. When the scribing wheel 60 is pressed against the brittle material substrate GB, and in a state where no scanning is performed, on the orthogonal section, the vertex 91B of the restricted portion 90 of the scribing wheel 60 contacts the restricting portion 80 of the pin 70. In fact, the fixed range of the restricted portion 90 is in line contact with the restricting portion 80. The restricted portion 90 receives a reaction force from the restricting portion 80 that acts in the pressing direction. When the second reaction force acts on the scribing wheel 60 as the scribing wheel 60 scans, the second reaction force that is intended to move the restricted portion 90 in the pin axis direction is borne by the restricting portion 80 of the pin 70. Therefore, the displacement of the scribing wheel 60 in the axle direction is blocked, so that the scribing wheel 60 moves along the scanning direction, and a straight scribing line is formed on the brittle material substrate GB. Therefore, a scribing line along the scanning direction of the retainer unit 40 can be easily formed.

(Experiment)

The retainer unit of this embodiment was used to perform scribing and verify the displacement of the scribing wheel in the axial direction. As the scribing wheel, a scribing wheel with an outer diameter of 2.5 mm, an inner diameter of 0.82 mm, and a thickness of 0.64 mm was used, and a convex portion with a curved surface shape of 13 μm in height was formed. In addition, as the pin, a pin with an outer diameter of 0.80 mm and a length of 5.99 mm was used, and a pin with a concave portion with a width of 285 μm and a bottom depth of 50 μm was formed.

Using this retainer unit, a 80mm long line is formed on the glass substrate. In addition, in order to eliminate the influence of the initial line drawing, the offset of the line in the horizontal direction (perpendicular to the line drawing direction) is measured at intervals of 0.2mm for a line drawing of 20mm in length starting from a position 5mm away from the starting point of the line drawing. It is believed that the offset of the line drawing is mainly caused by the displacement of the wheel axis direction in the retainer. The measurement results are shown in Figure 3. In addition, as a comparative example, a retainer unit of a previous line drawing wheel with the same shape as the implementation form except for the point where the convex portion is not provided, and a previous pin with the same shape as the implementation form except for the point where the concave portion is not provided are used to measure the offset of the line drawing in the same manner. The measurement results of the comparative example are shown in Figure 4.

In the retainer unit of the embodiment, it is confirmed that the marking line periodically meanders left and right, but the maximum deviation of the marking line is about 2μm. In the retainer unit of the embodiment, since the marking wheel is stably supported by two points between the limiting part and the restricted part, the displacement in the wheel axis direction is suppressed, thereby suppressing the deviation of the marking line. Therefore, the retainer unit of this embodiment can easily form a marking line along the scanning direction of the retainer unit.

In contrast, in the retainer unit of the comparative example, the marking line meanders irregularly, and the maximum offset is about 14μm. In the retainer unit of the comparative example, the contact position between the marking wheel and the pin is unstable during marking, resulting in axial displacement of the marking wheel, or the marking wheel tilts in the retainer, which is considered to cause larger and irregular offsets in marking.

Furthermore, when the width of the recess 81 is set to 408 μm and the retainer unit is otherwise configured the same as the above-mentioned embodiment, the same tendency as the above-mentioned embodiment is also found.

(Example of variation)

The above-mentioned embodiments are examples of the forms that the retainer unit and the scoring wheel and pin related to the present invention can take, and are not intended to limit their forms. The retainer unit and the scoring wheel and pin related to the present invention can take forms different from the forms illustrated in the embodiments. One example is a form that replaces, changes, or omits a part of the structure of the embodiment, or adds a new structure to the embodiment. An example of a variation of the embodiment is shown below.

The structure of the limiting portion 80 provided on the pin 70 can be arbitrarily changed. FIG. 5 shows the structure of the pin having the limiting portion of the variation. FIG. 5(a) is an enlarged side view of the portion of the pin 170 including the limiting portion 180 of the first variation. In the pin limiting portion 180, the recess 181 is a groove having a curved surface with a specific radius of curvature in a side view, and is provided in a circle around the outer circumference of the pin 170. Here, it is preferred that the radius of curvature of the recess 181 is smaller than the radius of curvature RB of the convex portion 91.

FIG5(b) is an enlarged side view of the portion of the pin 270 of the second variation including the limiting portion 280. In the limiting portion 280, the recess 281 is a rectangular groove having a specific depth in a side view, and is arranged around the outer circumference of the pin 270. FIG5(c) is an enlarged side view of the portion of the pin 370 of the third variation including the limiting portion 380. In the limiting portion 380, the recess 381 is a V-shaped groove having an inclined surface toward the deepest part in a side view, and is arranged around the outer circumference of the pin 370.

If the shape of the limiting portion is a specific depth that does not contact the vertex of the restricted portion of the scoring wheel, it is not limited to these variations. For example, two convex portions having the same height as the depth of the concave portion of the embodiment can be provided in a specific spacing around the outer circumference of the pin 70.

The structure of the restricted portion 90 of the scribing wheel 60 can be changed arbitrarily. In one example, the restricted portion 90 of the retainer unit 40 can also be a small concave-convex portion formed by the inner surface of the insertion hole 63 of the scribing wheel 60. In this case, the restricted portion 90 is preferably a convex portion provided at a specific height of the insertion hole 63, and the maximum height Rz of its surface is 0.5μm~2.0μm. Thereby, when the height of the convex portion of the restricted portion is relatively small, when it contacts the edge 81B and the other edge 81C of the restricting portion at two points, the displacement in the axle direction can be more reliably suppressed. In addition, the shape of the restricted portion 90 is not limited to the structure disclosed in the above-mentioned embodiment, and can also be set to a shape having a flat portion in a part, for example.

40: Retainer unit

50: Retainer

51: Groove

51A: Noodles

51B: Noodles

52: Support hole

60: Scoring wheel

61: Main body

61A: 1st side

61B: 2nd side

62: Blade tip

63: Insertion hole

70: Sales

70A: End

71: Outer surface

80: Restriction Department

81: Concave part

81A: Bottom

81B: Fate

81C: Fate

90: Restricted Department

91: convex part

91A: Noodles

91B: Top point

DT: thickness direction

GB: brittle material substrate

HA:Height

LA: Straight Line

LB: Straight line

SA: gap

SB: Gap

XA: Depth

XB: Width

Claims (5)

A retainer unit includes: a scribing wheel; a pin inserted into an insertion hole of the scribing wheel to rotatably support the scribing wheel; and a retainer to retain the pin; the scribing wheel is supported by a restricted portion provided on the inner circumference of the insertion hole and a restricting portion provided on the pin in contact at two points; the restricting portion is a recessed portion formed on the outer circumference of the pin. As in claim 1, the retainer unit, wherein the restricted portion is a convex surface. A retainer unit as claimed in claim 2, wherein the width of the recess is smaller than the thickness of the scoring wheel. A retainer unit as claimed in claim 2, wherein the convex surface is arranged in the entire thickness direction of the scoring wheel. A pin is inserted into an insertion hole of a scribing wheel to rotatably support the scribing wheel, and is provided with: a limiting portion that contacts the insertion hole of the scribing wheel at two points; the limiting portion is a recessed portion formed on the outer periphery of the pin.