TWI859062B - Device test system - Google Patents

Abstract

A device test system includes an actuating apparatus, a contact member, a first pressing force sensing pillar, a first pressing force sensing device, a second pressing force sensing pillar, a second pressing force sensing device, a third pressing force sensing device, a carrying apparatus, an electrical connection unit, an altitude difference adjusting apparatus, and a control apparatus. When the control apparatus controls the actuating apparatus to move the contact member toward a device under test, the first pressing force sensing pillar and the second pressing force sensing pillar first contact the carrying apparatus, and then the first pressing force sensing device senses a first pressing force value, the second pressing force sensing device senses a second pressing force value. The control apparatus calculates a transverse height difference of the device under test with respect to a contact surface of the contact member in accordance with the first pressing force value and the second pressing force value, and then controls the height difference adjusting apparatus to drive the carrying apparatus to eliminate the transverse height difference of the device under test with respect to the contact surface.

Description

Component test system

The present invention relates to a component testing system, and in particular to a component testing system that enables a plurality of electrical contact points of a component under test and a plurality of electrical contact points of an electrical connection unit to achieve good electrical contact and be subjected to the same pressure.

The component testing system referred to in the present invention generally refers to a system for testing various components such as semiconductor components, optoelectronic components, electronic components, magnetic components, etc. After the above-mentioned various components are manufactured, they must be tested to verify that they are proper components. The above-mentioned various components include a plurality of electrical contact points. The component testing systems of the prior art all include an electrical connection unit. The electrical connection unit also includes a plurality of electrical contact points. When the component under test is placed on the electrical connection unit for testing, the component under test should ensure that its multiple electrical contact points achieve good electrical contact with the multiple electrical contact points of the electrical connection unit and are all subjected to the same pressure.

In the component testing system of the prior art, in order to ensure that the pressing device can complete the pressing with the component under test placed on the electrical connection unit, it usually uses a hard stop component installed around the electrical connection unit, and the contact surface of the hard stop component is higher than the surface of the component under test. When the pressing device of the component testing system of the prior art moves toward the component under test, the outer periphery of the pressing device will first contact the hard stop component installed around the electrical connection unit. At this time, there is a controlled distance between the contact head in the pressing device that contacts the component under test, so as to protect the component under test from being damaged by excessive pressure.

However, there are several foreseeable factors that may affect whether the DUT is fully contacted: the hard stop component is usually locked together with the carrier and the electrical connection unit in the seat of the component test system of the prior art or on other devices and components. The fixed position may cause errors due to the angle or depth of the screws that are manually twisted. The hard stop component may be deformed or damaged after being pressed down multiple times due to its material and structure. The most common situation is that during the manufacturing and packaging process of the DUT, due to the influence of material or process parameters, the thickness of each DUT has a slight difference (for example, a difference of a few tenths of a millimeter to a few millimeters). Even though pogo pins can be installed in the electrical connection unit to provide electrical contact points and the compression of the pogo pins can be used to cover the above-mentioned unavoidable sources of variation, it is impossible to guarantee the stress condition of each component under test, and it is even more impossible to adjust in real time.

Therefore, one technical problem to be solved by the present invention is to provide a component testing system that enables a plurality of electrical contact points of a component under test and a plurality of electrical contact points of an electrical connection unit to achieve good electrical contact and be subjected to the same pressure.

According to a preferred specific embodiment of the present invention, a component testing system defines a vertical direction and a lateral direction. According to a preferred specific embodiment of the present invention, a component testing system includes an actuating device, a contact member, a first pressure-sensitive column, a first pressure-sensitive element, a second pressure-sensitive column, a second pressure-sensitive element, a third pressure-sensitive element, a supporting device, an electrical connection unit, a height difference adjusting device, and a control device. The actuating device can be controlled to move in a vertical direction. The contact member is operatively connected to the actuating device. The first pressure-sensitive column is disposed on a first side of the contact member along the lateral direction and is operatively connected to the actuating device. The first pressure-sensitive element is elastically disposed in the first pressure-sensitive column. The second pressure-sensing column is disposed on a second side of the contact member opposite to the first side in the lateral direction, and is operatively connected to the actuator. The second pressure-sensing element is elastically disposed in the second pressure-sensing column. The third pressure-sensing element is elastically disposed in the contact member. The supporting device is movably disposed below the contact member. The electrical connection unit is fixed on the supporting device and aligned with the contact member. The electrical connection unit includes a plurality of first electrical contact points thereon. The contact surface of the contact member faces the electrical connection unit. The first pressure-bearing surface of the first pressure-sensing column and the second pressure-bearing surface of the second pressure-sensing column both face the supporting device and are lower than the contact surface of the contact member. The tested element includes a plurality of second electrical contact points thereon. The tested element is placed on the electrical connection unit so that the plurality of second electrical contact points of the tested element are placed on the plurality of first electrical contact points of the electrical connection unit. The supporting device is operatively connected to the height difference adjusting device. The control device is electrically connected to the actuating device, the first pressure-sensitive element, the second pressure-sensitive element, the third pressure-sensitive element and the height difference adjusting device, respectively. When the control device controls the actuating device to move so that the abutting member moves toward the tested element, the first pressure-bearing surface of the first pressure-sensitive column and the second pressure-bearing surface of the second pressure-sensitive column first abut against the supporting device, and then the first pressure-sensitive element senses the first pressure value, and the second pressure-sensitive element senses the second pressure value. The control device calculates the lateral height difference of the tested component relative to the contact surface according to the first pressure value and the second pressure value, and then controls the height difference adjustment device to drive the carrier device to eliminate the lateral height difference of the tested component relative to the contact surface. The control device then controls the actuator to move so that the contact member contacts the tested component until the third pressure value sensed by the third pressure-sensitive element falls within a predetermined pressure value range. In this way, the plurality of second electrical contact points of the tested component and the plurality of first electrical contact points of the electrical connection unit achieve electrical contact and are all subjected to the same pressure.

Furthermore, the component testing system according to the preferred specific embodiment of the present invention also includes a base. The supporting device, the electrical connection unit and the height difference adjustment device are arranged in the base. The actuating device includes a cover and a pump. The contact member, the first pressure-sensitive column and the second pressure-sensitive column are fixed on the bottom surface of the cover. The cover is sealed and movably matched with the base to form a sealed cavity. The sealed cavity has at least one exhaust hole. The control device is electrically connected to the pump, and controls the pump to exhaust the sealed cavity through at least one exhaust hole, so that the cover moves toward the base to drive the contact member to move toward the component under test.

According to a variation of the component testing system of the preferred embodiment of the present invention, the actuating device includes a power unit.

Furthermore, according to another variation of the component testing system of the preferred specific embodiment of the present invention, the longitudinal direction is defined, and the third pressure-sensing column, the fourth pressure-sensing element, the fourth pressure-sensing column and the fifth pressure-sensing element are also included. The third pressure-sensing column is arranged on the first side of the contact member and is operatively connected to the actuating device. The third pressure-sensing column is at a distance from the first pressure-sensing column. The fourth pressure-sensing element is elastically arranged in the third pressure-sensing column. The fourth pressure-sensing column is arranged on the second side of the contact member and is operatively connected to the actuating device. The fourth pressure-sensing column is at the distance from the second pressure-sensing column. The fifth pressure-sensing element is elastically arranged in the fourth pressure-sensing column. The control device is electrically connected to the fourth pressure-sensitive element and the fifth pressure-sensitive element respectively. The third pressure-bearing surface of the third pressure-sensitive column and the fourth pressure-bearing surface of the fourth pressure-sensitive column both face the supporting device and are lower than the contact surface of the contact member. When the control device controls the actuator to move so that the contact member moves toward the measured element, the third pressure-bearing surface of the third pressure-sensitive column and the fourth pressure-bearing surface of the fourth pressure-sensitive column also contact the supporting device together with the first pressure-bearing surface of the first pressure-sensitive column and the second pressure-bearing surface of the second pressure-sensitive column, and then the fourth pressure value is sensed by the fourth pressure-sensitive element, and the fifth pressure value is sensed by the fifth pressure-sensitive element. The control device calculates the lateral height difference and the longitudinal height difference of the tested component relative to the contact surface according to the first pressure value, the second pressure value, the fourth pressure value and the fifth pressure value, and then controls the height difference adjustment device to drive the supporting device to eliminate the lateral height difference and the longitudinal height difference of the tested component relative to the contact surface.

Furthermore, according to another variation of the component testing system of the preferred specific embodiment of the present invention, the longitudinal direction is defined, and the system also includes a fifth pressure-sensing column, a sixth pressure-sensing element, a sixth pressure-sensing column, and a seventh pressure-sensing element. The fifth pressure-sensing column is disposed on the third side of the contact member along the longitudinal direction, and is operatively connected to the actuating device. The sixth pressure-sensing element is elastically disposed in the fifth pressure-sensing column. The sixth pressure-sensing column is disposed on the fourth side of the contact member opposite to the third side along the longitudinal direction, and is operatively connected to the actuating device. The seventh pressure-sensing element is elastically disposed in the sixth pressure-sensing column. The control device is electrically connected to the sixth pressure-sensing element and the seventh pressure-sensing element, respectively. The fifth pressure-bearing surface of the fifth pressure-sensing column and the sixth pressure-bearing surface of the sixth pressure-sensing column both face the support device and are lower than the contact surface of the contact member. When the control device controls the actuator to move so that the contact member moves toward the measured element, the fifth pressure-bearing surface of the fifth pressure-sensing column and the sixth pressure-bearing surface of the sixth pressure-sensing column also contact the support device together with the first pressure-bearing surface of the first pressure-sensing column and the second pressure-bearing surface of the second pressure-sensing column, and then the sixth pressure value is sensed by the sixth pressure-sensing element, and the seventh pressure value is sensed by the seventh pressure-sensing element. The control device calculates the lateral height difference of the tested component relative to the contact surface according to the first pressure value and the second pressure value, and calculates the longitudinal height difference of the tested component relative to the contact surface according to the sixth pressure value and the seventh pressure value, and then controls the height difference adjustment device to drive the supporting device to eliminate the lateral height difference and longitudinal height difference of the tested component relative to the contact surface.

Different from the prior art, the component testing system according to the present invention can adjust and eliminate the lateral height difference and the longitudinal height difference of the contact surface of the component under test relative to the contact member in real time, so that the multiple electrical contact points of the component under test and the multiple electrical contact points of the electrical connection unit can achieve good electrical contact. In addition, the component testing system according to the present invention can make the multiple electrical contact points of the component under test all receive the same pressure.

The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the attached drawings.

Please refer to Figures 1, 2 and 3, which schematically depict a component testing system 1 according to a preferred embodiment of the present invention. Figure 1 schematically depicts a component testing system 1 according to a preferred embodiment of the present invention in an exterior view. Figure 2 is a cross-sectional view of the component testing system 1 according to a preferred embodiment of the present invention, wherein the abutment member 11 has not yet moved toward the component under test 3. Figure 3 is a cross-sectional view of the component testing system 1 according to a preferred embodiment of the present invention, wherein the abutment member 11 has moved to abut the component under test 3. The component testing system 1 according to a preferred embodiment of the present invention is used to test the component under test 3. In practical applications, the tested component 3 can be a semiconductor component, an optoelectronic component, an electronic component, a magnetic component, or other component that needs to be tested.

As shown in Fig. 1, Fig. 2 and Fig. 3, the component testing system 1 according to the preferred embodiment of the present invention defines a vertical direction V and a transverse direction T. In Fig. 1, Fig. 2 and Fig. 3 and Fig. 4, the component testing system 1 according to the preferred embodiment of the present invention also defines a longitudinal direction L. The component testing system 1 according to the preferred embodiment of the present invention includes an actuating device 10, a contact member 11, a first pressure-sensitive column 12, a first pressure-sensitive element 13, a second pressure-sensitive column 14, a second pressure-sensitive element 15, a third pressure-sensitive element 16, a supporting device 17, an electrical connection unit 18, a height difference adjusting device 19 and a control device (not shown in the figure). In a specific embodiment, the control device may be an industrial computer, a server, etc., but the present invention is not limited thereto.

The actuator 10 can be controlled to move along the vertical direction V. The contact member 11 is operatively connected to the actuator 10. The first pressure-sensitive column 12 is disposed on a first side of the contact member 11 along the transverse direction T and is operatively connected to the actuator 10. The first pressure-sensitive element 13 is elastically disposed in the first pressure-sensitive column 12. For example, as shown in FIG. 2 , a spring is disposed in the first pressure-sensitive column 12 at a joint with the first pressure-sensitive element 13. The second pressure-sensitive column 14 is disposed on a second side of the contact member 11 opposite to the first side along the transverse direction T and is operatively connected to the actuator 10. The second pressure-sensitive element 15 is elastically disposed in the second pressure-sensitive column 14. For example, as shown in FIG2 , a spring is provided in the second pressure-sensitive column 14 at the joint with the second pressure-sensitive element 15. The third pressure-sensitive element 16 is elastically provided in the contact member 11. For example, as shown in FIG2 , a spring is provided in the contact member 11 at the joint with the third pressure-sensitive element 16. The first pressure-sensitive column 12 and the second pressure-sensitive column 14 are located on a plane defined by the vertical direction V and the transverse direction T.

The supporting device 17 is movably placed under the contact member 11. The electrical connection unit 18 is fixed on the supporting device 17 and aligned with the contact member 11. The electrical connection unit 18 includes a plurality of first electrical contact points (not shown in the figure). The contact surface 110 of the contact member 11 faces the electrical connection unit 18. The first pressure-bearing surface 120 of the first pressure-sensitive column 12 and the second pressure-bearing surface 140 of the second pressure-sensitive column 14 both face the supporting device 17 and are lower than the contact surface 110 of the contact member 11.

The tested element 3 includes a plurality of second electrical contacts (not shown in the figure). The tested element 3 is placed on the electrical connection unit 18, so that the plurality of second electrical contacts of the tested element 3 are placed on the plurality of first electrical contacts of the electrical connection unit 18. The carrier device 17 is operatively connected to the height difference adjustment device 19. The control device is electrically connected to the actuator 10, the first pressure-sensitive element 13, the second pressure-sensitive element 15, the third pressure-sensitive element 16 and the height difference adjustment device 19 respectively.

As shown in FIG2 and FIG3, when the control device controls the actuator 10 to move the contact member 11 toward the device under test 3, the first pressure-bearing surface 120 of the first pressure-sensitive column 12 and the second pressure-bearing surface 140 of the second pressure-sensitive column 14 first contact the supporting device 17, and then the first pressure-sensitive element 13 senses the first pressure value F1, and the second pressure-sensitive element 15 senses the second pressure value F2. The control device calculates the lateral height difference △h _T of the device under test 3 relative to the contact surface 110 according to the first pressure value F1 and the second pressure value F2, and then controls the height difference adjustment device 19 to drive the supporting device 17 to eliminate the lateral height difference △h _T of the device under test 3 relative to the contact surface 110. Since the first pressure-sensing column 12 and the second pressure-sensing column 14 are located on the same plane, as long as there is a difference between the first pressure value F1 sensed by the first pressure-sensing element 13 and the second pressure value F2 sensed by the second pressure-sensing element 15, and it represents that there is a lateral height difference △h _T between the tested component 3 and the contact surface 110, the lateral height difference △h _T between the tested component 3 and the contact surface 110 can be calculated by the difference between the first pressure value F1 and the second pressure-sensing element 15.

The control device then controls the actuator 10 to move so that the contact member 11 contacts the measured element 3 until the third pressure value F3 sensed by the third pressure-sensitive element 16 falls within the predetermined pressure value range. In this way, the plurality of second electrical contact points of the measured element 3 and the plurality of first electrical contact points of the electrical connection unit 18 are in electrical contact and are all subjected to the same pressure.

As shown in FIGS. 1, 2 and 3, the component testing system 1 according to the preferred embodiment of the present invention further includes a base 20. The carrier 17, the electrical connection unit 18 and the height difference adjustment device 19 are disposed in the base 20. The actuator 10 includes a cover 102 and a pump (not shown in the figure). The contact member 11, the first pressure-sensitive column 12 and the second pressure-sensitive column 14 are fixed on the bottom surface 1020 of the cover 102. The cover 102 is sealed and movably matched with the base 20 to form a sealed cavity. For example, as shown in FIGS. 1, 2 and 3, the base 20 includes a rib wall 202 extending upward and closed. The first sealing element 104 is disposed on the end of the lining of the cover body 102, and the second sealing element 204 is disposed on the rib wall 202. By means of the first sealing element 104 and the second sealing element 204, the cover body 102 can be sealedly matched with the rib wall 202 of the base body 20 to form a sealed cavity. The sealed cavity has at least one exhaust hole 206. For example, as shown in FIGS. 1, 2 and 3, the base body 20 has an exhaust hole 206. The pump is connected to the exhaust hole 206 through a pipeline. The control device is electrically connected to the pump, and controls the pump to exhaust the sealed cavity through at least one exhaust hole, so that the cover body 102 moves toward the base body 20 to drive the contact member 11 to move toward the measured component 3. In order to clearly describe the component testing system 1 according to the preferred embodiment of the present invention, in FIG1 , the cover 102 is shown in a cross-sectional view.

Please refer to Figures 4, 5, 6 and 7, which schematically depict a variation of the component testing system 1 according to a preferred embodiment of the present invention. Figure 4 schematically depicts a variation of the component testing system 1 according to a preferred embodiment of the present invention in an exterior view, in which some devices and components are shown in an exploded view. Figure 5 schematically depicts a variation of the component testing system 1 according to a preferred embodiment of the present invention in an exterior view. Figure 6 is a cross-sectional view of a variation of the component testing system 1 according to a preferred embodiment of the present invention, in which the abutment member 11 has not yet moved toward the component under test 3. FIG. 7 is a cross-sectional view of a deformation of a component testing system 1 according to a preferred embodiment of the present invention, wherein the contact member 11 has moved to contact the component under test 3.

As shown in Figures 4, 5, 6 and 7, in a specific embodiment, the actuator 10 includes a power unit. For example, in the examples shown in Figures 4, 5, 6 and 7, the actuator 10 includes a pressure cylinder 106. The contact member 11 is installed on the pressure cylinder 106. The devices and components in Figures 4, 5, 6 and 7 with the same number marks as those in Figures 1, 2 and 3 have the same or similar structures and functions, and will not be elaborated here.

Please refer to FIG. 8, which schematically depicts another variation of the component testing system 1 according to the preferred specific embodiment of the present invention. FIG. 8 schematically depicts part of the devices and components of another variation of the component testing system 1 according to the preferred specific embodiment of the present invention in an external view. In FIG. 8, part of the devices and components are presented in an exploded view, and the contact member 11 is depicted in dotted lines.

As shown in FIG8 , further, another variation of the component testing system 1 according to the preferred specific embodiment of the present invention further includes a third pressure-sensing column 21, a fourth pressure-sensing element 22, a fourth pressure-sensing column 23 and a fifth pressure-sensing element 24. The third pressure-sensing column 21 is disposed on a first side of the contact member 11 and is operatively connected to the actuating device 10. The third pressure-sensing column 21 is spaced a distance from the first pressure-sensing column 12. The first pressure-sensing column 12 and the third pressure-sensing column 21 are located on a plane defined by a vertical direction V and a longitudinal direction L. The fourth pressure-sensing element 22 is elastically disposed in the third pressure-sensing column 21. The fourth pressure-sensing column 23 is disposed on a second side of the contact member 11 and is operatively connected to the actuating device 10. The fourth pressure-sensing column 23 is at the distance from the second pressure-sensing column 14. The second pressure-sensing column 14 and the fourth pressure-sensing column 23 are located on another plane defined by the vertical direction V and the longitudinal direction L. The fifth pressure-sensing element 24 is elastically disposed in the fourth pressure-sensing column 23. The control device is electrically connected to the fourth pressure-sensing element 22 and the fifth pressure-sensing element 24, respectively. The third pressure-receiving surface 210 of the third pressure-sensing column 21 and the fourth pressure-receiving surface 230 of the fourth pressure-sensing column 23 both face the supporting device 17 and are lower than the contact surface 110 of the contact member 11. When the control device controls the actuator 10 to move so that the contact member 11 moves toward the measured element 3, the third pressure-bearing surface 210 of the third pressure-sensitive column 21 and the fourth pressure-bearing surface 230 of the fourth pressure-sensitive column 23 also firstly contact the bearing device 17 together with the first pressure-bearing surface 120 of the first pressure-sensitive column 12 and the second pressure-bearing surface 140 of the second pressure-sensitive column 14, and then the fourth pressure-sensitive element 22 senses the fourth pressure value F4, and the fifth pressure-sensitive element 24 senses the fifth pressure value F5. The control device calculates the lateral height difference △h _T and the longitudinal height difference △h _L of the tested component 3 relative to the contact surface 110 according to the first pressure value F1, the second pressure value F2, the fourth pressure value F4 and the fifth pressure value F5, and then controls the height difference adjustment device 19 to drive the supporting device 17 to eliminate the lateral height difference △h _T and the longitudinal height difference △h _L of the tested component 3 relative to the contact surface 110.

Please refer to FIG. 9, which schematically depicts another variation of the component testing system 1 according to the preferred specific embodiment of the present invention. FIG. 9 schematically depicts part of the devices and components of another variation of the component testing system 1 according to the preferred specific embodiment of the present invention in an external view. In FIG. 9, part of the devices and components are presented in an exploded view, and the contact member 11 is depicted in dotted lines.

As shown in FIG9 , further, another variation of the component testing system 1 according to the preferred embodiment of the present invention further comprises a fifth pressure-sensitive column 25, a sixth pressure-sensitive element 26, a sixth pressure-sensitive column 27 and a seventh pressure-sensitive element 28. The fifth pressure-sensitive column 25 is disposed on the third side of the contact member 11 along the longitudinal direction L, and is operatively connected to the actuator 10. The sixth pressure-sensitive element 26 is elastically disposed in the fifth pressure-sensitive column 25. The sixth pressure-sensitive column 27 is disposed on the fourth side of the contact member 11 along the longitudinal direction L opposite to the third side, and is operatively connected to the actuator 10. The seventh pressure-sensitive element 28 is elastically disposed in the sixth pressure-sensitive column 27. The fifth pressure-sensing column 25 and the sixth pressure-sensing column 27 are located on a plane defined by the vertical direction V and the longitudinal direction L. The control device is electrically connected to the sixth pressure-sensing element 26 and the seventh pressure-sensing element 28, respectively. The fifth pressure-receiving surface 250 of the fifth pressure-sensing column 25 and the sixth pressure-receiving surface 270 of the sixth pressure-sensing column 27 both face the supporting device 17 and are lower than the contact surface 110 of the contact member 11. When the control device controls the actuator 10 to move so that the contact member 11 moves toward the measured element 3, the fifth pressure-bearing surface 250 of the fifth pressure-sensitive column 25 and the sixth pressure-bearing surface 270 of the sixth pressure-sensitive column 27 also first contact the bearing device 17 together with the first pressure-bearing surface 120 of the first pressure-sensitive column 12 and the second pressure-bearing surface 140 of the second pressure-sensitive column 14, and then the sixth pressure-sensitive element 26 senses the sixth pressure value F6, and the seventh pressure-sensitive element 28 senses the seventh pressure value F7. The control device calculates the lateral height difference △h _T of the tested component 3 relative to the contact surface 110 according to the first pressure value F1 and the second pressure value F2, and calculates the longitudinal height difference △h _L of the tested component 3 relative to the contact surface 110 according to the sixth pressure value F6 and the seventh pressure value F7, and then controls the height difference adjustment device 19 to drive the supporting device 17 to eliminate the lateral height difference △h _T and the longitudinal height difference △h _L of the tested component 3 relative to the contact surface 110.

In one example of the present invention, the electrical connection unit 18 is equipped with a spring pin to provide a first electrical contact point. The predetermined pressure value range of the third pressure value F3 is related to the material of the spring pin, the compression amount of the spring pin, and the number of the plurality of spring pins on the electrical connection unit 18. According to the reasonable compression amount recommended by the manufacturer of the spring pin, for example, the reasonable compression amount of a single spring pin is 20%~40%, and the spring force of the spring pin is 30g~60g. Please refer to Figure 10, which is a relationship diagram between the third pressure value F3 and the compression amount of the spring pin when 88 spring pins are installed on the electrical connection unit 18. FIG. 10 shows that the third pressure value F3 varies in a straight line with the compression of the spring pin. If 88 spring pins are installed on the electrical connection unit 18, the reasonable spring pin feedback force reading value (third pressure value F3) should be 2.64~5.28Kg. Therefore, in this example, the predetermined pressure value range of the third pressure value F3 is 2.64~5.28Kg. If the third pressure value F3 sensed by the third pressure-sensing element 16 exceeds the safety range (for example, exceeds 5.28kg), the control device determines that the compression stroke of the spring pin may be too large, and the height difference adjustment device 19 can be adjusted immediately to increase the relative position of the contact member 11 and the supporting device 17 until the force falls back into the safe range, and the height difference adjustment device 19 stops operating.

Please refer to FIG. 11, which is another example of the present invention, showing the change of the first pressure value F1 sensed by the first pressure-sensitive element 13 over time after the first pressure-sensitive column 12 contacts the support device 17. The first pressure value F1 of the first pressure-sensitive element 13 changes over time in two stages, and the slope in the second stage is smaller than the slope in the first stage. Therefore, in addition to using the pressure curves of the first pressure-sensitive element 13 and the second pressure-sensitive element 15 to adjust and eliminate the lateral height difference Δh _T , the change in the second stage of the force curve can also be used as a basis for judging whether the contact member 11 is lifting or lowering.

In practical applications, the component testing system 1 according to the preferred specific embodiment of the present invention may include a plurality of abutment members 11 and a plurality of electrical connection units 18. The plurality of electrical connection units 18 are fixed on a carrier 17. A component under test 3 is placed on each electrical connection unit 18. The component testing system 1 according to the preferred specific embodiment of the present invention can instantly adjust and eliminate the lateral height difference Δh _T and the longitudinal height difference Δh _L of each component under test 3 relative to the abutment surface 110 of the abutment member 11. Even if there is a slight difference in thickness among the plurality of components under test 3, the component testing system 1 according to the preferred embodiment of the present invention can make the plurality of electrical contact points of each component under test 3 be subjected to the same pressure, and the pressure falls within a predetermined pressure value range.

Through the above detailed description of the present invention, it can be clearly understood that the component testing system according to the present invention can instantly adjust and eliminate the lateral height difference and longitudinal height difference of the contact surface of the component under test relative to the contact member, thereby allowing the multiple electrical contact points of the component under test to achieve good electrical contact with the multiple electrical contact points of the electrical connection unit. In addition, the component testing system according to the present invention can make the multiple electrical contact points of the component under test all receive the same pressure, and the pressure falls within the predetermined pressure value range.

The above detailed description of the preferred specific embodiments is intended to more clearly describe the features and spirit of the present invention, and is not intended to limit the scope of the present invention by the preferred specific embodiments disclosed above. On the contrary, the purpose is to cover various changes and arrangements with equivalents within the scope of the patent that the present invention intends to apply for. Therefore, the scope of the patent applied for by the present invention should be interpreted in the broadest sense according to the above description, so as to cover all possible changes and arrangements with equivalents.

1: Component testing system

10: Actuator

102: mask body

1020: Bottom surface

104: First sealing element

106: Pressure cylinder

11: Contact components

110:Contact surface

12: The first pressure-sensing column

120: First pressure surface

13: First pressure sensing element

14: Second pressure-sensing column

140: Second pressure surface

15: Second pressure-sensitive element

16: The third pressure-sensitive element

17: Carrier device

18: Electrical connection unit

19: Height difference adjustment device

20: Seat

202: Rib wall

204: Second sealing element

206: Exhaust hole

21: The third pressure-sensing column

210: The third pressure surface

22: The fourth pressure-sensitive element

23: The fourth pressure-sensing column

230: Fourth pressure surface

24: Fifth pressure sensing element

25: The fifth pressure column

250: Fifth pressure surface

26: Sixth pressure sensing element

27: Sixth Sense Pressure Column

270: Sixth pressure surface

28: Seventh pressure sensing element

3: Tested components

V: vertical direction

T: Horizontal direction

L: Longitudinal direction

FIG. 1 is an external view of a component test system according to a preferred embodiment of the present invention. FIG. 2 is a cross-sectional view of a component test system according to a preferred embodiment of the present invention, wherein the abutment member has not yet moved toward the component under test. FIG. 3 is a cross-sectional view of a component test system according to a preferred embodiment of the present invention, wherein the abutment member has moved to abut the component under test. FIG. 4 is a deformed external view of a component test system according to a preferred embodiment of the present invention and an exploded view of some devices and components. FIG. 5 is a deformed external view of a component test system according to a preferred embodiment of the present invention. FIG. 6 is a cross-sectional view of a deformation of a component test system according to a preferred specific embodiment of the present invention, in which the abutment member has not yet moved toward the component under test. FIG. 7 is a cross-sectional view of a deformation of a component test system according to a preferred specific embodiment of the present invention, in which the abutment member has moved to abut the component under test. FIG. 8 is an external view of a partial device and a component of another deformation of a component test system according to a preferred specific embodiment of the present invention. FIG. 9 is an external view of a partial device and a component of another deformation of a component test system according to a preferred specific embodiment of the present invention. FIG. 10 is a diagram showing the relationship between the third pressure value and the compression amount of the spring pins when 88 spring pins are installed on the electrical connection unit of the component test system according to one example of the present invention. FIG. 11 is a diagram showing the change of the first pressure value sensed by the first pressure-sensitive element over time after the first pressure-sensitive column of the component test system according to another example of the present invention contacts the carrier device.

1: Component testing system

10: Actuator

102: mask body

1020: Bottom surface

104: First sealing element

11: Contact components

110:Contact surface

12: The first pressure-sensing column

120: First pressure surface

13: First pressure sensing element

14: Second pressure-sensing column

140: Second pressure surface

15: Second pressure-sensitive element

16: The third pressure-sensitive element

17: Carrier device

18: Electrical connection unit

19: Height difference adjustment device

20: Seat

202: Rib wall

204: Second sealing element

206: Exhaust hole

3: Tested components

V: vertical direction

T: Horizontal direction

Claims (5)

A component testing system defines a vertical direction and a lateral direction, and the component testing system includes: an actuating device that can be controlled to move along the vertical direction; a contact member that is operatively connected to the actuating device; a first pressure-sensitive column that is disposed on a first side of the contact member along the lateral direction and operatively connected to the actuating device; a first pressure-sensitive element that is elastically disposed in the first pressure-sensitive column; a second pressure-sensitive column that is disposed on a second side of the contact member that is opposite to the first side along the lateral direction and operatively connected to the actuating device; a second pressure-sensitive element that is elastically disposed in the second pressure-sensitive column; a third pressure-sensitive element that is elastically disposed in The contact member is provided with a support device movably disposed below the contact member; an electrical connection unit is fixed on the support device and aligned with the contact member, the electrical connection unit includes a plurality of first electrical contact points, wherein a contact surface of the contact member faces the electrical connection unit, a first pressure-bearing surface of the first pressure-sensitive column and a second pressure-bearing surface of the second pressure-sensitive column both face the support device and are lower than the contact surface, and a tested component includes a plurality of second electrical contact points, the tested component is disposed on the electrical connection unit, so that the plurality of second electrical contact points are disposed at The plurality of first electrical contact points; a height difference adjusting device, the carrier device is operatively connected to the height difference adjusting device; and a control device, which is electrically connected to the actuating device, the first pressure-sensitive element, the second pressure-sensitive element, the third pressure-sensitive element and the height difference adjusting device respectively; wherein when the control device controls the actuating device to move so that the abutting member moves toward the tested element, the first pressure-bearing surface and the second pressure-bearing surface first abut against the carrier device, and then the first pressure-sensitive element senses a first pressure value, and the second pressure-sensitive element senses a second pressure value. The control device calculates a lateral height difference between the tested component and the contact surface according to the first pressure value and the second pressure value, and then controls the height difference adjustment device to drive the carrier device to eliminate the lateral height difference between the tested component and the contact surface. The control device then controls the actuator to move so that the contact member contacts the tested component until a third pressure value sensed by the third pressure-sensitive element falls within a predetermined pressure value range, thereby achieving electrical contact between the plurality of second electrical contact points and the plurality of first electrical contact points and being subjected to the same pressure. The component testing system as described in claim 1 further comprises: a base, the supporting device, the electrical connection unit and the height difference adjusting device are arranged in the base; wherein the actuating device comprises a cover and a pump, the abutment member, the first pressure-sensitive column and the second pressure-sensitive column are fixed on a bottom surface of the cover, the cover is sealed and movably matched with the base to form a sealed cavity, the sealed cavity has at least one exhaust hole, the control device is electrically connected to the pump and controls the pump to exhaust the sealed cavity through the at least one exhaust hole, so that the cover moves toward the base to drive the abutment member to move toward the tested component. A component testing system as described in claim 1, wherein the actuator comprises a power unit. The component testing system as described in claim 1 further defines a longitudinal direction, and the component testing system further comprises: A third pressure-sensitive column is arranged at the first side and is operatively connected to the actuating device, and the third pressure-sensitive column is at a distance from the first pressure-sensitive column; a fourth pressure-sensitive element is elastically arranged in the third pressure-sensitive column; a fourth pressure-sensitive column is arranged at the second side and is operatively connected to the actuating device, and the fourth pressure-sensitive column is at the distance from the second pressure-sensitive column; and a fifth pressure-sensitive element is elastically arranged in the fourth pressure-sensitive column; wherein the control device is electrically connected to the fourth pressure-sensitive element and the fifth pressure-sensitive element respectively, a third pressure-bearing surface of the third pressure-sensitive column and a fourth pressure-bearing surface of the fourth pressure-sensitive column both face the bearing device and are lower than the contact surface, when When the control device controls the actuator to move so that the contact member moves toward the measured element, the third pressure surface and the fourth pressure surface also contact the support device together with the first pressure surface and the second pressure surface, and then the fourth pressure-sensitive element senses a fourth pressure value, and the fifth pressure-sensitive element senses a fifth pressure value. The control device calculates the lateral height difference and the longitudinal height difference of the measured element relative to the contact surface according to the first pressure value, the second pressure value, the fourth pressure value and the fifth pressure value, and then controls the height difference adjustment device to drive the support device to eliminate the lateral height difference and the longitudinal height difference of the measured element relative to the contact surface. The component testing system as described in claim 1 further defines a longitudinal direction, and the component testing system further comprises: a fifth pressure-sensitive column, which is arranged on a third side of the contact member along the longitudinal direction and is operatively connected to the actuating device; a sixth pressure-sensitive element, which is elastically arranged in the fifth pressure-sensitive column; a sixth pressure-sensitive column, which is arranged on a fourth side of the contact member opposite to the third side along the longitudinal direction and is operatively connected to the actuating device; and a seventh pressure-sensitive element, which is elastically arranged in the sixth pressure-sensitive column; wherein the control device is electrically connected to the sixth pressure-sensitive element and the seventh pressure-sensitive element respectively, a fifth pressure-bearing surface of the fifth pressure-sensitive column and a sixth pressure-bearing surface of the sixth pressure-sensitive column both face the bearing device and are lower than the contact surface, and when the control device controls the actuating device When the contact member moves toward the tested element, the fifth pressure surface and the sixth pressure surface also contact the bearing device together with the first pressure surface and the second pressure surface, and then the sixth pressure-sensitive element senses a sixth pressure value, and the seventh pressure-sensitive element senses a seventh pressure value. The control device calculates the lateral height difference of the tested element relative to the contact surface according to the first pressure value and the second pressure value, and calculates the longitudinal height difference of the tested element relative to the contact surface according to the sixth pressure value and the seventh pressure value, and then controls the height difference adjustment device to drive the bearing device to eliminate the lateral height difference and the longitudinal height difference of the tested element relative to the contact surface.