TWI857272B - Docking assembly - Google Patents

Abstract

The invention relates to a test handler. Specifically according to an embodiment of the invention a tester coupling portion can be provided, which can be coupled with any one of a tester and a test handler provided with a socket base capable of accommodating equipment and includes a docking board, wherein the docking board is formed with an opening portion and a plurality of guide portions therein, the opening portion is configured to expose the equipment provided in the socket base to the test handler, in order for being detachably coupled to the tester, the guide portion is provided with a shape of one of a slot and a protrusion, and at least a part of the plurality of guide portions is coupled with a plurality of guide components formed in the tester, so that the docking board can be coupled with the tester.

Description

Docking components Invention Field

The present invention relates to a tester joint.

Invention background

A test handler is a device that supports testing of devices such as semiconductor components manufactured through a predetermined manufacturing process, classifies the electronic components according to the test results, and then loads them into a customer tray.

In order for the test processor to test devices such as semiconductor components, a tester (TESTER) is required to electrically connect the device and test it. This tester is manufactured separately from the test processor and can be transported separately from the test processor. On the other hand, in order to use the test processor and the tester, the tester needs to be firmly connected to the test processor. In the past, the test processor and the tester were firmly connected by bolts.

However, in order for the equipment to operate stably, it is necessary to perform regular or irregular inspections, and when a problem occurs with the tester, it is necessary to separate the tester from the test handler. Since this separation is performed by the user putting his hand inside the test handler and directly unfastening the bolt connection, it is difficult to separate the tester from the test handler once the tester is docked to the test handler.

In addition, when the test handler is separated from and combined with the tester many times, the threads formed in the socket base which is a part of the tester may be damaged. In order to replace the socket base, a large amount of wiring provided around the socket base needs to be reconnected, and the replacement time is long. In addition, when the wiring is not accurately connected after replacing the socket base, there is also a case where the entire tester is replaced.

Therefore, there is a need for a tester coupling portion that can easily couple and separate a tester to a test handler.

Summary of invention

In view of the above background, the embodiments of the present invention are invented, and the embodiments of the present invention are intended to provide a tester coupling portion that can be easily coupled to and separated from the tester.

In addition, it is intended to provide a tester joint that can prevent condensation from occurring around the device during testing.

According to one aspect of the present invention, a tester coupling part can be provided, which can be coupled with any one of a tester and a processor provided with a socket base capable of accommodating a device, comprising a docking plate, wherein a plurality of openings and guides are formed in the docking plate, wherein the openings are used to expose the device provided in the socket base to the processor, and in order to be detachably coupled to the tester, the guide has a shape selected from a groove and a protrusion, and at least a portion of the plurality of guides is coupled with a plurality of tester guides formed in the tester, so that the docking plate can be coupled with the tester.

Furthermore, a tester coupling part can be provided, which can be coupled with any one of a tester and a processor provided with a socket base capable of accommodating a device, comprising: a docking assembly capable of being coupled with the socket base; and a docking plate formed with an opening portion, the opening portion being used to expose the device provided in the socket base to the processor and surround at least a portion of the docking assembly, and when the tester approaches the docking plate below a predetermined distance, the docking plate can fix the position of the socket base relative to the docking plate by supporting the docking assembly.

Furthermore, a tester coupling part can be provided, wherein the docking assembly includes an auxiliary docking unit, the auxiliary docking unit can be connected to the socket base, the docking plate includes a locking device, and in order to selectively support the auxiliary docking unit, a clamping member is provided in the locking device, the clamping member is driven in a forward and backward manner toward the auxiliary docking unit, and the clamping member supports the auxiliary docking unit connected to the socket base, so that the locking device can fix the position of the socket base relative to the docking plate.

Furthermore, a tester coupling portion may be provided, wherein the auxiliary docking unit includes a roller, the roller rotates by contacting the clamping member advancing toward the auxiliary docking unit, and the clamping member is driven in a manner of advancing and retreating toward the roller.

Furthermore, a tester coupling portion can be provided, wherein the docking assembly includes a cleaning kit, and the cleaning kit can form a cleaning flow path together with the socket base, and a humidity adjustment fluid can flow through the cleaning flow path.

Furthermore, a tester coupling part can be provided, wherein a coupling hole is formed in the docking assembly, a coupling protrusion formed in the socket base can be inserted through the coupling hole, and the docking plate can be fixed at the position of the socket base relative to the docking plate by coupling with the coupling protrusion passing through the coupling hole.

Furthermore, a docking assembly can be provided, which can be combined with any one of a tester provided with a socket base capable of accommodating a device and a processor for transferring the device to the tester, comprising: an auxiliary docking unit, which can be connected to the socket base; and a cleaning kit, which can form a cleaning flow path with the socket base, and the humidity adjustment fluid received from any one of the tester and the processor flows through the cleaning flow path.

According to the embodiment of the present invention, it has the effect of being able to be easily combined with and separated from the tester.

In addition, it can prevent condensation around the equipment when testing the equipment.

1: Processor

2: Tester

2a: Socket base

2b: junctional protrusion

10: Tester joint

20: Substrate

30: Framework

40: First shuttle unit

41: First loading area

42: First exchange area

43: First unloading area

50: Second shuttle unit

51: Second loading area

52: Second exchange area

53: Second unloading area

60: Component supply unit

70: Temperature control unit

80: Loading unit

90: Unloading Department

100: Docking plate

110: Docking base

111: Opening

112,113: Guidance Department

114: Fastening hole

120: Locking device

121: Clamping piece

122: Drive Department

130: Operation Department

200: Docking assembly

201: Binding hole

202: Combined roller

210: Main docking unit

211: Auxiliary temperature control unit; heating device

212: Bimetallic

213: Shielding Body

214: Main train pin

220: Temperature control unit

221: Main body

221a: Transfer flow path

222: Fluid inlet

223:Blocking piece

230: Auxiliary docking unit

231: Assist in connecting with the main body

232: Roller

233: protrusion

234: Assisting in the whole train sales

240: Cleaning kit

241: Cleaning inlet

242: Kit row holes

250: Contact part

260: Manifold

270: Entire row of parts

Figure 1 is a top view of a processor of an embodiment of the present invention.

Figure 2 is a three-dimensional diagram of the tester coupling portion of an embodiment of the present invention.

Figure 3 is a bottom perspective view of the tester joint of Figure 2.

Figure 4 is a disassembled three-dimensional diagram of the tester joint in Figure 2.

FIG5 shows a side view of the locking device moving toward the roller of FIG2.

Figure 6 is a three-dimensional diagram of the auxiliary docking unit, cleaning kit and socket base of Figure 2.

Figure 7 is a transverse cross-sectional view of the main docking unit of Figure 2.

Figure 8 is a transverse cross-sectional view of the temperature control unit of Figure 2.

Figure 9 is a bottom view of the cleaning kit of Figure 7.

Figure 10 is a three-dimensional diagram of the docking assembly and the socket base of the second embodiment of the present invention.

Detailed description of the preferred embodiment

In the following, specific embodiments for realizing the spirit of the present invention will be described in detail with reference to the attached drawings.

In addition, when describing the present invention, if it is determined that the specific description of the relevant known structure or function may make the main purpose of the present invention unclear, its detailed description will be omitted.

In addition, when a component is mentioned to be "connected", "supported", "transmitted", "supplied", "interfacing", "combined", "fastened connected" and "fixed" to another component, it should be understood that it can be directly connected, supported, communicated, supplied, interfacing, combined, fastened connected and fixed to another component, but other components can exist in between.

The terms used in this specification are only used to illustrate specific embodiments and are not intended to limit the present invention. Unless the context clearly indicates otherwise, singular expressions include plural expressions.

In addition, terms including ordinal numbers such as first, second, etc. may be used to describe various constituent elements, but the corresponding constituent elements are not limited by these terms. These terms are only used to distinguish one constituent element from another constituent element.

As used in the specification, the meaning of "include" refers to specifying specific characteristics, regions, integers, steps, actions, elements and/or components, and does not exclude the existence or addition of other specific characteristics, regions, integers, steps, actions, elements, components and/or groups.

In addition, in this specification, the representation of the bottom surface, etc. is explained based on the illustrations in the attached drawings, and it should be noted that if the direction of the corresponding object is changed, it can be expressed differently. At the same time, in this specification, the up and down direction can be the up and down direction of Figure 4.

The tester combination part 10 of an embodiment of the present invention can be combined with any one of the processor 1 and the tester 2. In the following, the tester 2 will be described first.

The tester 2 can test the device received from the processor 1. The tester 2 can be provided with a socket base 2a, in which a socket is formed. The device to be tested can be installed in this socket. The device to be tested can be loaded into the socket base 2a through the component supply unit 60 described later.

The tester 2 can be combined with the processor 1 and can be electrically connected to the processor 1. The tester 2 can be set at the bottom of the processor 1 to make the socket base 2a rise and fall, and the rising and falling socket base 2a can be combined with the processor 1. The rise of this tester 2 can be driven by a manipulator (not shown).

In the following, the specific structure of the processor 1 including the tester coupling part 10 of the embodiment of the present invention will be described with reference to the attached drawings.

The processor 1 can test the equipment manufactured by the manufacturing process, classify it into grades according to the test results, and load it onto the customer tray. The processor 1 can be detachably combined with the tester 2. Such a processor 1 can include a tester combining part 10, a substrate 20, a frame 30, a first shuttle unit 40, a second shuttle unit 50, a component supply unit 60, a temperature regulating part 70, a loading part 80, and an unloading part 90.

The tester coupling portion 10 will be described in detail below.

The substrate 20 may provide a portion to be coupled with the tester coupling portion 10. The bottom surface of the substrate 20 may be coupled with the tester coupling portion 10, and the substrate 20 may be securely connected with the tester coupling portion 10 by bolts.

The frame 30 can support the tester coupling part 10, the substrate 20, the first shuttle unit 40, the second shuttle unit 50, the component supply unit 60, the temperature adjustment part 70, the loading part 80 and the unloading part 90.

The first shuttle unit 40 can transfer the equipment to be tested from the first loading area 41 to the first exchange area 42, and transfer the equipment to be tested from the first exchange area 42 to the first unloading area 43.

The second shuttle unit 50 can transfer the equipment to be tested from the second loading area 51 to the second exchange area 52, and transfer the equipment to be tested from the second exchange area 52 to the second unloading area 53.

The component supply unit 60 can move the device to be tested from the first exchange area 42 and the second exchange area 52 to the socket base 2a, or move the tested device from the socket base 2a to the first exchange area 42 and the second exchange area 52.

The temperature adjustment unit 70 can heat or cool the equipment to be tested before supplying it to the first shuttle unit 40 and the second shuttle unit 50.

The loading section 80 can provide a space in which the equipment to be tested by the tester 2 is loaded.

The unloading portion 90 can provide a space in which the equipment tested by the tester 2 can be loaded.

2 to 4 , the tester coupling portion 10 may provide a portion coupled to the tester 2 and a space for loading or unloading equipment into the tester 2. Such a tester coupling portion 10 may be coupled to the bottom surface of the substrate 20 and may be securely connected to the substrate 20 by bolts. Moreover, when the tester coupling portion 10 is coupled to the tester 2, the position of the tester 2 may be aligned and fixed. In the present specification, the tester coupling portion 10 may be directly/indirectly docked or undocking with the tester 2 by a hard docking or automatic docking method described later. Among them, docking may mean that the tester coupling portion 10 is coupled or connected to the tester 2, and undocking may mean releasing the coupling or connection. On the other hand, in this specification, the tester coupling part 10 has been described as being included in the processor 1, but may be a separate structure not included in the processor 1. Therefore, the tester coupling part 10 may also be coupled to either the processor 1 or the tester 2. Such a tester coupling part 10 may include a docking plate 100 and a docking assembly 200.

The docking plate 100 may provide a portion for coupling with the tester 2. The docking plate 100 may be directly/indirectly coupled with the tester 2 by hard docking or automatic docking. The docking plate 100 may include a docking base 110, a locking device 120, and an operating portion 130.

Referring to FIG. 3 , the docking base 110 may provide a portion combined with the tester 2 and a space for the device to pass through the tester 2. An opening portion 111 may be formed in the docking base 110, and the opening portion 111 is used to expose the device disposed in the socket base 2a to the processor 1. In other words, the opening portion 111 is used to expose the device disposed in the socket base 2a to the component supply unit 60. The opening portion 111 may be formed by opening from the center portion of the docking base 110.

The docking base 110 may provide a portion to be coupled with the tester 2. When the tester 2 is raised toward the bottom surface of the docking base 110 by the manipulator, the docking base 110 may be coupled with the tester 2. Referring to FIG. 3 , guide portions 112 and 113 may be formed in the docking base 110, and the guide portions 112 and 113 may have one of a groove and a protrusion in order to be detachably coupled to the tester 2. The groove may be a groove introduced into the docking base 110 to a predetermined depth, and the protrusion may be a pin or a rod protruding from the docking base 110. In addition, the guide portion 112 may have a hole shape. In this way, the docking base 110 can be coupled to the tester 2 by coupling at least a portion of the plurality of guides 112 and 113 to a tester guide (not shown) formed on the tester 2. The tester guide may have a shape of a protrusion and a groove corresponding to the shape of the guides 112 and 113. In addition, a fastening hole 114 may be formed in the docking base 110, into which a bolt (not shown) for fastening to the substrate 20 may be inserted. The bolt inserted into the fastening hole 114 is fastened to the substrate 20, so that the docking base 110 can be coupled to the substrate 20.

Hereinafter, the hard docking method will be described with reference to FIG. 3. The hard docking can be achieved by combining the groove-shaped guide portion 112 formed on the docking base 110 with the tester guide formed on the tester 2. In other words, during the period when the tester 2 rises toward the bottom surface of the docking base 110, the tester guide will be inserted into the groove-shaped guide portion 112 of the docking base 110, so that the docking plate 100 can be combined with the tester 2. In addition, during the hard docking, the tester guide will be inserted into the groove-shaped guide portion 112, so that the position of the tester 2 relative to the docking base 110 can be arranged. When the hard docking is completed, the socket base 2a of the tester 2 can be tightly attached to the bottom surface of the docking base 110, and the position of the socket base 2a can be on the lower side of the opening 111.

On the other hand, the types of testers 2 may be various according to different manufacturers of the testers 2. In addition, the position of the tester guide formed on the tester 2 may be different according to the type of the tester 2, and the size and shape of the tester guide may also be different. Accordingly, a plurality of groove-shaped guide portions 112 may be formed in the docking base 110, and the plurality of groove-shaped guide portions 112 may be formed at different positions of the docking base 110 to insert the tester guides provided in the various types of testers 2. In addition, the plurality of groove-shaped guide portions 112 may have different sizes and shapes to insert the tester guides provided in the various types of testers 2. Therefore, the plurality of groove-shaped guide portions 112 included in the docking base 110 of an embodiment of the present invention may be combined with guides formed on the various types of testers 2, that is, tester guides having different positions, sizes, and shapes. In other words, various types of testers 2 can be combined with the docking plate 100 by hard docking.

In addition, a protrusion-shaped guide portion 113 may be formed on the docking base 110, and a groove-shaped tester guide may be formed on the tester 2. Therefore, during hard docking, the protrusion-shaped tester guide of the tester 2 is first inserted into the groove-shaped guide portion 112 of the docking base 110 for the first calibration, and then the protrusion-shaped guide portion 113 of the docking base 110 is inserted into the groove-shaped tester guide for the second calibration. As described above, more than one calibration is performed during hard docking, so that the position of the tester 2 relative to the docking base 110 can be accurately adjusted. Such a protrusion-shaped guide portion 113 and a groove-shaped tester guide may be formed in plural. In addition, the groove-shaped guide portion 112 used for the first correction can be formed at a position farther away from the mouth portion 111 than the protrusion-shaped guide portion 112 used for the second correction. The tester guide member of the protrusion shape used for this first correction can be longer and thicker than the guide portion 113 of the protrusion shape used for the second correction. Since the shapes of the protrusion used for the first correction and the protrusion used for the second correction are different, more accurate position correction can be achieved when performing the second correction.

On the other hand, the first correction may be performed by the protrusion-shaped guide portion 113, and the second correction may be performed by the groove-shaped guide portion 112. In this case, the protrusion-shaped guide portion 113 may be formed at a position farther from the mouth portion 111 than the groove-shaped guide portion 112. In addition, the protrusion-shaped guide portion 113 used for the first correction may be shorter and thinner than the protrusion-shaped tester guide used for the second correction.

In the above-mentioned hard docking method, it is explained that during the rise of the tester 2 toward the bottom surface of the docking base 110, the protrusion-shaped tester guide is inserted into the groove-shaped guide portion 112 of the docking base 110, and the protrusion-shaped guide portion 113 is inserted into the groove-shaped tester guide, thereby combining the docking base 110 with the tester 2. However, this is only an example, and either the groove-shaped guide portion 112 or the protrusion-shaped guide portion 113 may be formed in the docking base 110. Therefore, during the hard docking, the protrusion-shaped guide portion 113 of the docking base 110 will be inserted into the groove-shaped tester guide, so that the docking base 110 and the tester 2 are combined, or the protrusion-shaped tester guide will be inserted into the groove-shaped guide portion 112 of the docking base 110, so that the docking base 110 and the tester 2 can be combined.

The locking device 120 can support the auxiliary docking unit 230 of the docking assembly 200 described later, and can fix the socket base 2a to the docking base 110. In other words, the locking device 120 can fix the relative position of the socket base 2a relative to the docking base 110 by supporting the auxiliary docking unit 230 connected to the socket base 2a. The locking device 120 can include a clamping member 121 and a driving part 122.

5 , in order to selectively support the auxiliary docking unit 230, the clamping member 121 may be driven to advance and retreat toward the auxiliary docking unit 230. Such a clamping member 121 may fix the auxiliary docking unit 230 by supporting the roller 232 of the auxiliary docking unit 230. In addition, the clamping member 121 may advance and retreat toward the roller 232 and may be driven by the driving portion 122. A plurality of the clamping members 121 may be provided, and the plurality of clamping members 121 may support the auxiliary docking unit 230 at different positions. In this specification, as shown in FIG. 5, the clamping member 121 is shown to move toward the roller 232 and support the roller 232 on one side of the roller 232, but this is only an example, and the roller 232 may be held on both sides of the roller. In this locking device 120, the auxiliary docking unit 230 is integrated with the socket base 2a, so that the socket base 2a is not directly supported, but the auxiliary docking unit 230 is supported to fix the position of the socket base 2a.

The driving part 122 can make the clamping member 121 move forward and backward toward the roller 232. For example, the driving part 122 can be composed of a hydraulic cylinder, and the clamping member 121 can be driven by the hydraulic pressure of the hydraulic cylinder. In addition, a plurality of driving parts 122 can be provided, and a plurality of clamping members 121 can be driven.

The operating part 130 can control the operation of the multiple driving parts 122. In other words, the operating part 130 can operate the clamping member 121 or stop the operation through the multiple driving parts 122. Such an operating part 130 can be arranged on one side of the docking base 110.

In the following, the automatic docking method will be described. Automatic docking is a method in which the locking device 120 supports and fixes the auxiliary docking unit 230 to fix the socket base 2a when the tester 2 is raised by the manipulator. In other words, in the automatic docking method, when the tester 2 approaches the docking plate 100 below a predetermined distance, the docking plate 100 will support the docking assembly 200, so that the socket base 2a can be fixed relative to the docking plate 100. In this way, the docking assembly 200 can be used not only to fix the socket base 2a, but also to determine the position. In addition, if higher precision is required, similar to the hard docking method, the position of the socket base 2a can be guided by at least one or more pins (such as the main alignment pin 214).

This automatic docking can be controlled by the operating part 130. When the tester 2 rises toward the bottom of the docking base 110 and approaches the docking base 110 below a predetermined distance, the operating part 130 can rotate at a predetermined angle. When the operating part 130 rotates at a predetermined angle, the multiple driving parts 122 can drive the multiple clamping members 121 to move the multiple clamping members 121 toward the auxiliary docking unit 230. When the automatic docking is completed, the multiple clamping members 121 can support the auxiliary docking unit 230 at different positions, and the socket base 2a connected to the auxiliary docking unit 230 can be fixed on the lower side of the opening 111.

In order to release the automatic docking, when the operating part is rotated at the angle before the driving part 122 is driven, the operation of the multiple driving parts 122 can be stopped. In addition, the driving of the multiple clamping members 121 will stop, and the multiple clamping members 121 will move toward the multiple driving parts 122, so that the support of the auxiliary docking unit 230 can be released. When the support of the auxiliary docking unit 230 is released, the fixation of the socket base 2a can be released.

On the other hand, in this specification, it is described that automatic docking is performed after hard docking, but automatic docking can be performed independently in a docking manner separate from hard docking. Therefore, only hard docking can be performed, and even if hard docking is not performed, the socket base 2a can be fixed by automatic docking.

Referring to Fig. 4 and Fig. 6, when the socket base 2a is raised and arranged on the lower side of the opening 111 by hard docking or automatic docking, the docking assembly 200 can align and fix the position of the socket base 2a. In addition, the docking assembly 200 can adjust the temperature of a part or the outer peripheral part of the socket base 2a, and can also adjust the temperature of the equipment supported on the socket base 2a. The docking assembly 200 can prevent condensation by reducing the humidity around the socket base 2a. This docking assembly 200 can pre-cool or pre-heat the equipment by supplying a temperature regulating fluid to the equipment before performing a test, and can adjust the temperature of the equipment during the test or even after the test is completed. On the other hand, the docking assembly 200 can supply a temperature regulating fluid into the socket base 2a so as to regulate the temperature of the device before performing hard docking or automatic docking. Such a docking assembly 200 may include a main docking unit 210, a temperature regulating unit 220, an auxiliary docking unit 230 and a cleaning kit 240.

When the socket base 2a rises and is located at the lower side of the opening 111, the main docking unit 210 can align the socket base 2a to a predetermined position. In addition, the main docking unit 210 can heat the socket base 2a. Such a main docking unit 210 may include an auxiliary temperature adjustment unit 211, a bimetal 212, a shielding body 213 and a main alignment pin 214.

Referring to FIG. 7 , the heating device 211 can change the temperature of the socket base 2a by heating the socket base 2a. When the temperature of the socket base 2a adjusted to a predetermined temperature range by the temperature adjustment unit 220 needs to be quickly changed, the heating device 211 will heat the socket base 2a, thereby adjusting the temperature of the socket base 2a. For example, the heating device 211 can be a heater, and the heater can heat the socket base 2a. A plurality of such heating devices 211 can be provided.

The bimetal 212 can prevent the socket base 2a from overheating. When the socket base 2a overheats, the bimetal 212 can automatically cut off the power supply of the heating device 211, thereby stopping the operation of the heating device 211.

The shielding body 213 can prevent the heat generated by the heating device 211 from diffusing to the outside. The shielding body 213 can be a heat-insulating material.

Referring to FIG. 4 and FIG. 6 , the main alignment pin 214 can align the position of the socket base 2a. Such a main alignment pin 214 can be inserted into the inner side of the auxiliary alignment pin 234 of the auxiliary docking unit 230 described later. For example, the main alignment pin 214 is inserted into the auxiliary alignment pin 234, and the auxiliary alignment pin 234 is inserted into the alignment component 270 fixed on the socket base 2a, so that the position of the socket base 2a can be aligned and fixed. In this way, the main alignment pin 214 can align and fix the position of the socket base 2a relative to the main docking unit 210.

The temperature adjustment unit 220 can supply a temperature adjustment fluid for heating or cooling the device to the socket base 2a. In other words, a high-temperature fluid can be supplied to the socket base 2a for heating the device, and a low-temperature fluid can be supplied to the socket base 2a for cooling the device. Such a temperature adjustment unit 220 can supply a fluid that has been pre-temperature-adjusted (i.e., a high-temperature or low-temperature fluid adjusted to a predetermined temperature) to the device. In addition, the temperature adjustment unit 220 can adjust the temperature around the socket base 2a by supplying the temperature adjustment fluid to the socket base 2a, and can adjust the temperature of the device placed on the socket base 2a.

The temperature regulating unit 220 can be selectively connected to the contact portion 250 to supply a temperature regulating fluid. For example, when the docking base 110 is combined with the tester 2, the temperature regulating unit 220 will be connected to the contact portion 250, and the temperature regulating fluid for heating or cooling the device can be supplied to the device of the socket base 2a. In addition, when the docking base 110 is separated from the tester 2, the temperature regulating unit 220 can be separated from the contact portion 250. Such a temperature regulating unit 220 can supply fluid to multiple contacts 250 simultaneously or independently. In addition, the temperature regulation of the temperature regulating unit 220 can be controlled in real time. For example, the temperature regulating unit 220 can be an automatic temperature controller (Automatic Temperature Control, ATC). This temperature adjustment unit 220 can be supported on the main docking unit 210. The temperature adjustment unit 220 can include a main body 221, a fluid inlet 222, and a blocking member 223.

The main body 221 can support the fluid inlet 222 and the blocking member 223. In addition, the main body 221 can be supported by the main docking unit 210. Referring to FIG8 , a transfer flow path 221a can be formed inside the main body 221, and the temperature regulating fluid supplied from the fluid inlet 222 can flow in the transfer flow path 221a. The transfer flow path 221a can provide a flow path for the temperature regulating fluid supplied from the fluid inlet 222 to flow to a connecting member (not shown). A portion of the transfer flow path 221a can be connected to the fluid inlet 222, and another portion of the transfer flow path 221a can be connected to the contact portion 250 described later through the connecting member. In addition, when the docking base 110 is separated from the tester 2, the transfer flow path 221a can be separated from the contact portion 250, and when the docking base 110 is combined with the tester 2, it can be connected to the contact portion 250.

The fluid inlet 222 can be supplied with a temperature regulating fluid, which is used to heat or cool the device from the outside. This fluid inlet 222 can be connected to one side end of the main body 221. In addition, multiple fluid inlets 222 can be provided, and the multiple fluid inlets 222 can be connected to the transfer flow path 221a.

The blocking member 223 can prevent the socket base 2a connected to the tester 2 from rising above a predetermined range. In other words, when the socket base 2a rises, the blocking member 223 contacts the auxiliary docking unit 230 connected to the socket base 2a, thereby preventing the socket base 2a and the auxiliary docking unit 230 from rising above a predetermined range. In addition, when the socket base 2a and the auxiliary docking unit 230 rise, the blocking member 223 can be inserted into a groove (not shown) formed in the auxiliary docking unit 230, and can contact the auxiliary docking unit 230 in the groove. Such a blocking member 223 can be connected to the main body 221 and can be formed to protrude from the main body 221. In addition, a plurality of blocking members 223 may be provided and inserted into a plurality of slots of the auxiliary docking unit 230 to prevent the socket base 2a and the auxiliary docking unit 230 from rising above a predetermined range.

The auxiliary docking unit 230 can support the socket base 2a and the cleaning kit 240 by connecting to the cleaning kit 240 connected to the socket base 2a. In addition, when the tester 2 is combined with the docking base 110, the auxiliary docking unit 230 can provide a portion supported by the locking device 120. The auxiliary docking unit 230 is supported by the locking device 120, so that the socket base 2a can be located at the lower side of the opening 111. The auxiliary docking unit 230 can include an auxiliary docking body 231, a roller 232, a protrusion 233 and an auxiliary alignment pin 234.

6, the auxiliary docking body 231 can support the roller 232, the protrusion 233 and the auxiliary alignment pin 234. Such an auxiliary docking body 231 can be connected to the cleaning kit 240. In addition, a groove can be formed in the auxiliary docking body 231, and the groove can contact the blocking member 223 of the temperature adjustment unit 220. For example, when the auxiliary docking body 231 rises toward the docking base 110 together with the socket base 2a, the blocking member 223 will be inserted into the groove formed in the auxiliary docking body 231, so that the auxiliary docking body 231 contacts the blocking member 223.

When automatic docking is performed, the roller 232 may be a portion supported by the clamping member 121 of the locking device 120. Such a roller 232 may rotate relative to the auxiliary docking unit 230 to prevent the clamping member 121 from being damaged. In this way, the roller 232 rotates corresponding to the movement of the clamping member 121, thereby preventing the auxiliary docking unit 230 from being damaged by the pressure of the advancing and retreating clamping member 121.

The protrusion 233 can support the auxiliary alignment pin 234 described later. For example, a hole (not shown) into which the auxiliary alignment pin 234 can be inserted can be formed in the protrusion 233, and the protrusion 233 can support the auxiliary alignment pin 234 by inserting the auxiliary alignment pin 234 into the hole. Such a protrusion 233 can be formed by protruding from the outer peripheral surface of the auxiliary docking body 231.

The auxiliary alignment pin 234 can align the position of the socket base 2a. This auxiliary alignment pin 234 is inserted into a hole formed in an alignment component 270 fixed to the socket base 2a, thereby aligning and fixing the position of the socket base 2a. In addition, the main alignment pin 214 can be inserted into the inner side of the auxiliary alignment pin 234 and can support the main alignment pin 214. This auxiliary alignment pin 234 can be inserted into the kit alignment hole 242 described later, and by being inserted into the kit alignment hole 242 and the alignment component 270, the position of the socket base 2a is aligned and fixed.

The cleaning kit 240 can prevent condensation around the socket base 2a by supplying a humidity regulating fluid to the socket base 2a. In other words, when the temperature regulating unit 220 supplies a low-temperature temperature regulating fluid to the device to cool the device, the cleaning kit 240 can prevent condensation by supplying low-humidity air to the socket base 2a. For example, the humidity regulating fluid can use dry air or cleaning gas. In addition, the cleaning kit 240 can cut off the power when heating the device (for example, during a high-temperature test) and start when cooling the device (for example, during a low-temperature test).

A cleaning inlet 241 may be formed in such a cleaning kit 240, and the cleaning inlet 241 may receive a fluid from an external device (not shown). In addition, the cleaning kit 240 may form a cleaning flow path together with the socket base 2a. In other words, the cleaning flow path may be formed surrounded by the cleaning kit 240 and the socket base 2a. Referring to FIG. 9, when the humidity adjustment fluid is supplied from the outside to the cleaning inlet 241, the fluid may be discharged to the outside from the cleaning flow path formed inside the cleaning kit 240 in a predetermined direction (e.g., the direction of the arrow in FIG. 9). Such a cleaning inlet 241 may be formed in multiple numbers. In this way, the humidity adjustment fluid circulates inside the cleaning kit 240 and is discharged, thereby preventing condensation that may occur in the socket base 2a.

In addition, a kit alignment hole 242 into which the auxiliary alignment pin 234 can be inserted can be formed in the cleaning kit 240.

The contact part 250 can receive the temperature regulating fluid for heating or cooling the device from the temperature regulating unit 220 and supply it to the manifold 260. One side of such a contact part 250 can be selectively connected to the transfer flow path 221a of the temperature regulating unit 220 through a connecting component, and the other side of the contact part 250 can be connected to the manifold 260. Therefore, when the tester 2 is separated from the docking base 110, the contact part 250 can be separated from the temperature regulating unit 220. A plurality of such contact parts 250 can be provided.

The manifold 260 can receive a temperature regulating fluid for heating or cooling the device from the contact portion 250, and can supply the received fluid around the socket base 2a. In addition, the manifold 260 can directly supply the fluid received from the contact portion 250 to the device.

The alignment component 270 may provide a portion into which the auxiliary alignment pin 234 is inserted. Such an alignment component 270 may be fixedly supported on one side of the socket base 2a. Therefore, by inserting the auxiliary alignment pin 234 into the alignment component 270, the position of the socket base 2a and the alignment component 270 relative to the docking base 110 may be aligned and fixed.

In the following, the function and effect of the processor 1 having the above structure will be described.

The user can combine the docking plate 100 with the tester 2 using a hard docking method. During the hard docking, the tester 2 can rise toward the docking plate 100. In this way, during the tester 2 rising toward the bottom surface of the docking base 110, the protrusion-shaped tester guide will first be inserted into the groove-shaped guide portion 112 of the docking base 110 for the first correction, and the protrusion-shaped guide portion 113 of the docking base 110 can be inserted into the groove-shaped tester guide for the second correction. When the hard docking is completed, the socket base 2a of the tester 2 can be set at the lower side of the opening portion 111 formed in the docking base 110, and the position of the socket base 2a can be fixed.

On the other hand, the user can use the automatic docking method to combine the docking plate 100 with the tester 2. During the automatic docking, it can rise toward the docking plate 100. When the tester 2 is located on the bottom surface of the docking base 110, the user can rotate the operating part 130 to drive the multiple locking devices 120. When the operating part 130 rotates, the multiple driving parts 122 can make the multiple clamping members 121 at different positions move toward the roller 232 of the auxiliary docking unit 230. The multiple clamping members 121 can fix the position of the socket base 2a connected to the auxiliary docking unit 230 by supporting the auxiliary docking unit 230.

During the period when the position of the socket base 2a is set at the lower side of the opening portion 111 of the docking plate 100 by at least one of the hard docking method and the automatic docking method, the main alignment pin 214 can be inserted into the auxiliary alignment pin, and the auxiliary alignment pin 234 can be inserted into the kit alignment hole 242 and the alignment component 270. In this way, the main alignment pin 214 is inserted into the alignment component 270 and the auxiliary alignment pin 234, the alignment component 270 is fixed in the socket base 2a, and the auxiliary alignment pin 234 is inserted into the kit alignment hole 242, so that the main alignment pin 214 can align and fix the position of the socket base 2a. When the position of the socket base 2a is aligned and fixed by the main alignment pin 214, the tester 2 can be electrically connected to the socket base 2a to perform equipment testing.

On the other hand, during the test, the temperature regulating unit 220 can regulate the device temperature of the socket base 2a. This temperature regulating unit 220 can receive the temperature regulating fluid for heating or cooling the device from the fluid inlet 222 and supply it to the contact part 250. The fluid flowing to the contact part 250 can be supplied to the device through the manifold 260. The device temperature regulation of this temperature regulating unit 220 can be controlled in real time. In addition, when the device is cooled by the temperature regulating unit 220, the cleaning kit 240 supplies dry air to the socket base 2a, thereby preventing condensation that may occur around the socket base 2a. The operation of this cleaning kit 240 can be performed simultaneously with the temperature regulation of the device.

When the test is completed, the device of the socket base 2a can be moved to the first exchange area 42 or the second exchange area 52 through the component supply unit 60.

The processor 1 of an embodiment of the present invention has the effect of being able to be easily combined with and separated from the tester 2. In addition, during the test, it has the effect of being able to adjust the temperature of the device. In addition, when the auxiliary docking unit 230 is damaged, the auxiliary docking unit 230 is separated from the socket base 2a, and only the auxiliary docking unit 230 is replaced, thereby having the effect of not having to replace the socket base 2a.

On the other hand, in addition to this structure, according to the second embodiment of the present invention, the main docking unit 210, the temperature adjustment unit 220, the auxiliary docking unit 230 and the cleaning kit 240 can be omitted in the docking assembly 200. Hereinafter, the second embodiment of the present invention will be further described with reference to FIG. 10. When describing the second embodiment, the difference compared with the above embodiment is mainly described, and the same description and figure markings are quoted from the above embodiment.

A hole (not shown) may be formed in the docking base 110, and the hole may be coupled with the coupling protrusion 2b of the socket base 2a. The docking base 110 may be coupled with the coupling protrusion 2b, and the coupling protrusion 2b passes through the coupling hole 201 described later in the hole, so that the position relative to the docking base 110 may be fixed.

The docking assembly 200 can be combined with the socket base 2a and can be supported on the docking base 110. A combination hole 201 can be formed in the docking assembly 200, and a combination protrusion 2b of the socket base 2a can be inserted into the combination hole 201. The combination hole 201 and the combination protrusion 2b can be formed in multiple numbers. Therefore, by inserting the multiple combination protrusions 2b of the socket base 2a into the multiple combination holes 201 of the docking assembly 200, the position of the socket base 2a relative to the docking assembly 200 can be fixed. In addition, when the combination protrusion 2b is inserted into the combination hole 201, the docking assembly 200 and the socket base 2a can be fastened by bolts.

A coupling roller 202 may be provided in the docking assembly 200. Such a coupling roller 202 may be rotated to prevent damage by the locking device 120. In addition, the coupling roller 202 may be supported by the locking device 120.

In the following, the function and effect of the processor 1 of the second embodiment of the present invention will be described.

The user can combine the socket base 2a and the docking assembly 200 before combining the tester 2 and the docking plate 100. The user can fix the socket base 2a to the docking assembly 200 by inserting the multiple coupling protrusions 2b of the socket base 2a into the multiple coupling holes 201 of the docking assembly 200. In addition, the docking assembly 200 and other parts of the socket base 2a can be fastened by bolts.

When the socket base 2a is firmly connected to the docking assembly 200, the tester 2 can rise toward the bottom surface of the docking plate 100. The coupling protrusion 2b of the socket base 2a that passes through the coupling hole 201 of the docking assembly 200 can be inserted into the hole formed in the docking base 110. In this way, the coupling protrusion 2b of the socket base 2a is inserted into the coupling hole 201 of the docking assembly 200 and the hole formed in the docking base 110 together, so that the position of the docking assembly 200 can be aligned and fixed to the docking base 110. In addition, when the socket base 2a is set at the lower side of the opening portion 111, the user can drive the locking device 120 through the operating portion 130. The clamping member 121 of the locking device 120 supports the coupling roller 202 of the docking assembly 200, so that the docking assembly 200 and the socket base 2a can be fixed on the docking plate 100 at a certain position.

This tester coupling portion 10 has the effect of making the socket base 2a easily coupled to or separated from the docking base 110 through the docking assembly 200.

From the above discussion, it will be understood that the present invention can be embodied in a variety of embodiments, including but not limited to the following:

Example 1: A tester coupling part is coupled with any one of a tester and a processor provided with a socket base for accommodating equipment, and is characterized in that it includes a docking plate, an opening and a plurality of guide parts are formed in the docking plate, the opening is used to expose the equipment provided in the socket base to the processor, and the guide part has a shape of a groove and a protrusion in order to be detachably coupled to the tester, and at least a part of the plurality of guide parts is coupled with a plurality of tester guides formed in the tester, so that the docking plate is coupled with the tester.

Example 2: A tester coupling part is coupled with any one of a tester and a processor provided with a socket base for accommodating a device, and is characterized in that it includes: a docking assembly coupled with the socket base; and a docking plate formed with an opening, the opening being used to expose the device provided in the socket base to the processor and surround at least a portion of the docking assembly, and when the tester approaches the docking plate below a predetermined distance, the docking plate fixes the position of the socket base relative to the docking plate by supporting the docking assembly.

Example 3: The tester coupling portion as described in Example 2 is characterized in that the docking assembly includes an auxiliary docking unit, the auxiliary docking unit is connected to the socket base, the docking plate includes a locking device, and in order to selectively support the auxiliary docking unit, a clamping piece is provided in the locking device, the clamping piece is driven in a forward and backward manner toward the auxiliary docking unit, and the clamping piece supports the auxiliary docking unit connected to the socket base, so that the locking device fixes the position of the socket base relative to the docking plate.

Example 4: The tester coupling portion as described in Example 3 is characterized in that the auxiliary docking unit includes a roller, the roller rotates by contacting the clamping member advancing toward the auxiliary docking unit, and the clamping member is driven in a forward and backward manner toward the roller.

Example 5: The tester coupling portion as described in Example 2 is characterized in that the docking assembly includes a cleaning kit, and the cleaning kit forms a cleaning flow path together with the socket base, and the humidity adjustment fluid flows through the cleaning flow path.

Example 6: The tester coupling portion as described in Example 2 is characterized in that a coupling hole is formed in the docking assembly, a coupling protrusion formed in the socket base is inserted through the coupling hole, and the docking plate is fixed at the position of the socket base relative to the docking plate by coupling with the coupling protrusion passing through the coupling hole.

Example 7: A docking assembly is combined with a tester provided with a socket base for accommodating a device and a processor for transferring the device to the tester, and is characterized in that it includes a cleaning kit, and the cleaning kit and the socket base together form a cleaning flow path, through which a humidity adjustment fluid received from either the tester or the processor flows.

Although the embodiments of the present invention have been described in specific implementation forms, these are only examples, and the present invention is not limited thereto and should be interpreted as having the broadest scope based on the basic ideas disclosed in this specification. A person skilled in the art may combine/replace the disclosed implementation forms to realize a pattern of a shape not shown, but this does not deviate from the scope of the present invention. In addition, a person skilled in the art may easily change or modify the implementation forms disclosed based on this specification, and it is clear that such changes or modifications also belong to the scope of the present invention.

1: Processor

10: Tester joint

20: Substrate

30: Framework

40: First shuttle unit

41: First loading area

42: First exchange area

43: First unloading area

50: Second shuttle unit

51: Second loading area

52: Second exchange area

53: Second unloading area

60: Component supply unit

70: Temperature control unit

80: Loading unit

90: Unloading Department

Claims (2)

A docking assembly is configured to be combined with any one of the following: a tester having a socket base for accommodating a device, and a processor for transferring the device to the tester, the docking assembly comprising: a cleaning kit to be connected to the socket base to form a cleaning flow path with the socket base and allow a humidity adjustment fluid received from any one of the tester and the processor to flow through the cleaning flow path; a main docking unit, when the socket base is raised and located under an opening for exposing the device accommodated in the socket base to the processor, the main docking unit aligns the socket base to a predetermined position; and an auxiliary docking unit, which is connected to the cleaning kit and supports the socket base and the cleaning kit. The docking assembly as described in claim 1 further comprises: a temperature regulating unit configured to supply a temperature regulating fluid having a temperature different from that of the humidity regulating fluid to the socket base to regulate the temperature of the device.