TWI855748B - Optical signal processing device and optical signal measurement method - Google Patents
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Description
本揭露係關於一種光訊號處理裝置,特別是關於一種感測發光元件所產生的光訊號的光訊號處理裝置。The present disclosure relates to a light signal processing device, and more particularly to a light signal processing device for sensing a light signal generated by a light-emitting element.
發光元件的尺寸隨著需求而越來愈小,相對地,在單位面積上的發光元件的數量越來越高。在發光元件做成產品出貨前都須經過測試。因此,要如何有效率地測試數量越來越多且密度越來越高的發光元件,已成為本領域重要的議題。As the demand for light-emitting components increases, the size of light-emitting components is getting smaller and smaller. In contrast, the number of light-emitting components per unit area is increasing. Before light-emitting components are manufactured and shipped, they must be tested. Therefore, how to efficiently test the increasing number and density of light-emitting components has become an important issue in this field.
上文之「先前技術」說明僅係提供背景技術,並未承認上文之「先前技術」說明揭示本揭露之標的,不構成本揭露之先前技術,且上文之「先前技術」之任何說明均不應作為本案之任一部分。The above “prior art” description is only to provide background technology, and does not admit that the above “prior art” description discloses the subject matter of the present disclosure, does not constitute the prior art of the present disclosure, and any description of the above “prior art” should not be regarded as any part of the present case.
本揭露之一實施例提供一種光訊號處理裝置,用以測試一微發光二極體陣列的光訊號,該微發光二極體陣列分為複數個測試區塊,每一測試區塊包含包含複數個微發光二極體,該光訊號處理裝置一次測試單一測試區塊,該光訊號處理裝置包含複數光訊號測試元件以及光訊號感測裝置。該等光訊號測試元件用以傳遞一選定測試區塊的複數第一微發光二極體在一第一時間區間內發出之複數第一光訊號;以及傳遞該選定測試區塊的複數第二微發光二極體在一第二時間區間內發出之複數第二光訊號。一個光訊號測試元件用以於該第一時間區間內感測該等光訊號測試元件傳遞之該等第一光訊號;於該第二時間區間內感測該等光訊號測試元件傳遞之該等第二光訊號以及;根據該等第一光訊號及該等第二光訊號產生複數感測訊號。An embodiment of the present disclosure provides an optical signal processing device for testing an optical signal of a micro-luminescent diode array, wherein the micro-luminescent diode array is divided into a plurality of test blocks, each test block includes a plurality of micro-luminescent diodes, and the optical signal processing device tests a single test block at a time, and the optical signal processing device includes a plurality of optical signal testing components and an optical signal sensing device. The optical signal testing components are used to transmit a plurality of first optical signals emitted by a plurality of first micro-luminescent diodes of a selected test block within a first time period; and transmit a plurality of second optical signals emitted by a plurality of second micro-luminescent diodes of the selected test block within a second time period. An optical signal test element is used to sense the first optical signals transmitted by the optical signal test elements in the first time period; sense the second optical signals transmitted by the optical signal test elements in the second time period; and generate a plurality of sensing signals according to the first optical signals and the second optical signals.
本揭露之一實施例提供一種用於一光訊號處理裝置之光訊號量測方法,用以測試一微發光二極體陣列的光訊號,該微發光二極體陣列分為複數個測試區塊,每一測試區塊包含複數個微發光二極體,該光訊號處理裝置一次測試單一測試區塊,該光訊號處理裝置包含複數光訊號測試元件以及一光訊號感測裝置,該光訊號量測方法包含:將該等光訊號測試元件對齊一晶圓上之一選定測試區塊的複數微發光二極體,該等微發光二極體包含複數第一發光二極體以及複數第二發光二極體;該等光訊號測試元件傳遞該等第一微發光二極體在一第一時間區間內發出之複數第一光訊號,其中一個光訊號測試元件傳遞一個第一微發光二極體發出的光訊號;該光訊號感測裝置感測該等光訊號測試元件傳遞之該等第一光訊號,並根據該等第一光訊號產生複數第一感測訊號;該等光訊號測試元件傳遞該等第二微發光二極體在一第二時間區間內發出之複數第二光訊號,其中一個光訊號測試元件傳遞一個第二微發光二極體發出的光訊號;以及該光訊號感測裝置感測該等光訊號測試元件傳遞之該等第二光訊號,並根據該等第二光訊號產生複數第二感測訊號。An embodiment of the present disclosure provides an optical signal measurement method for an optical signal processing device, for testing an optical signal of a micro-LED array, wherein the micro-LED array is divided into a plurality of test blocks, each test block includes a plurality of micro-LEDs, and the optical signal processing device tests a single test block at a time. The optical signal processing device includes a plurality of optical signal test components and an optical signal sensing device. The optical signal measurement method includes: aligning the optical signal test components with a plurality of micro-LEDs in a selected test block on a wafer, wherein the micro-LEDs include a plurality of first LEDs and a plurality of second LEDs; the optical signal test components transmit the first micro-LEDs to the optical signal processing device; A plurality of first light signals are emitted by the photodiode within a first time period, wherein one light signal test element transmits a light signal emitted by a first micro-luminescent diode; the light signal sensing device senses the first light signals transmitted by the light signal test elements and generates a plurality of first sensing signals according to the first light signals; the light signal test elements transmit a plurality of second light signals emitted by the second micro-luminescent diodes within a second time period, wherein one light signal test element transmits a light signal emitted by a second micro-luminescent diode; and the light signal sensing device senses the second light signals transmitted by the light signal test elements and generates a plurality of second sensing signals according to the second light signals.
本揭露之一實施例提供一種用於一光訊號處理裝置之光訊號量測方法,用以測試一微發光二極體陣列的光訊號,該微發光二極體陣列分為複數個測試區塊,每一測試區塊包含複數個微發光二極體,該光訊號處理裝置一次測試單一測試區塊,該光訊號處理裝置包含複數光訊號測試元件以及一光訊號感測裝置,該光訊號量測方法包含:將該等光訊號測試元件對齊一晶圓上之一選定測試區塊的複數第一微發光二極體;該等光訊號測試元件傳遞該等第一微發光二極體在一第一時間區間內發出之複數第一光訊號,其中一個光訊號測試元件傳遞一個第一微發光二極體發出的光訊號;該光訊號感測裝置感測該等光訊號測試元件傳遞之該等第一光訊號,並根據該等第一光訊號產生複數第一感測訊號;將該等光訊號測試元件對齊該晶圓上之另一選定測試區塊的複數第二微發光二極體;該等光訊號測試元件傳遞該等第二微發光二極體在一第二時間區間內發出之複數第二光訊號,其中一個光訊號測試元件傳遞一個第一微發光二極體發出的光訊號;以及該光訊號感測裝置感測該等光訊號測試元件傳遞之該等第二光訊號,並根據該等第二光訊號產生複數第二感測訊號。An embodiment of the present disclosure provides an optical signal measurement method for an optical signal processing device, for testing an optical signal of a micro-luminescent diode array, wherein the micro-luminescent diode array is divided into a plurality of test blocks, each test block includes a plurality of micro-luminescent diodes, and the optical signal processing device tests a single test block at a time. The optical signal processing device includes a plurality of optical signal test components and an optical signal sensing device. The optical signal measurement method includes: aligning the optical signal test components with a plurality of first micro-luminescent diodes of a selected test block on a wafer; the optical signal test components transmit a plurality of first optical signals emitted by the first micro-luminescent diodes within a first time period, wherein one optical signal test component The optical signal testing component transmits an optical signal emitted by a first micro-luminescent diode; the optical signal sensing device senses the first optical signals transmitted by the optical signal testing components and generates a plurality of first sensing signals according to the first optical signals; the optical signal testing components are aligned with a plurality of second micro-luminescent diodes of another selected test area on the wafer; the optical signal testing components transmit a plurality of second optical signals emitted by the second micro-luminescent diodes within a second time period, wherein one optical signal testing component transmits an optical signal emitted by a first micro-luminescent diode; and the optical signal sensing device senses the second optical signals transmitted by the optical signal testing components and generates a plurality of second sensing signals according to the second optical signals.
上文已相當廣泛地概述本揭露之技術特徵及優點,俾使下文之本揭露詳細描述得以獲得較佳瞭解。構成本揭露之申請專利範圍標的之其它技術特徵及優點將描述於下文。本揭露所屬技術領域中具有通常知識者應瞭解,可相當容易地利用下文揭示之概念與特定實施例可作為修改或設計其它結構或製程而實現與本揭露相同之目的。本揭露所屬技術領域中具有通常知識者亦應瞭解,這類等效建構無法脫離後附之申請專利範圍所界定之本揭露的精神和範圍。The above has been a fairly broad overview of the technical features and advantages of the present disclosure, so that the detailed description of the present disclosure below can be better understood. Other technical features and advantages that constitute the subject matter of the patent application scope of the present disclosure will be described below. Those with ordinary knowledge in the technical field to which the present disclosure belongs should understand that the concepts and specific embodiments disclosed below can be easily used to modify or design other structures or processes to achieve the same purpose as the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs should also understand that such equivalent constructions cannot deviate from the spirit and scope of the present disclosure as defined by the attached patent application scope.
本揭露之以下說明伴隨併入且組成說明書之一部分的圖式,說明本揭露之實施例,然而本揭露並不受限於該實施例。此外,以下的實施例可適當整合以完成另一實施例。The following description of the present disclosure is accompanied by the drawings which are incorporated into and constitute a part of the specification, and illustrate embodiments of the present disclosure, but the present disclosure is not limited to the embodiments. In addition, the following embodiments can be appropriately integrated to complete another embodiment.
「一實施例」、「實施例」、「例示實施例」、「其他實施例」、「另一實施例」等係指本揭露所描述之實施例可包括特定特徵、結構或是特性,然而並非每一實施例必須包括該特定特徵、結構或是特性。再者,重複使用「在實施例中」一語並非必須指相同實施例,然而可為相同實施例。"One embodiment", "embodiment", "exemplary embodiment", "other embodiments", "another embodiment", etc. refer to embodiments described in the present disclosure that may include specific features, structures or characteristics, but not every embodiment must include the specific features, structures or characteristics. Furthermore, repeated use of the phrase "in an embodiment" does not necessarily refer to the same embodiment, but may refer to the same embodiment.
為了使得本揭露可被完全理解,以下說明提供詳細的步驟與結構。顯然,本揭露的實施不會限制該技藝中的技術人士已知的特定細節。此外,已知的結構與步驟不再詳述,以免不必要地限制本揭露。本揭露的較佳實施例詳述如下。然而,除了詳細說明之外,本揭露亦可廣泛實施於其他實施例中。本揭露的範圍不限於詳細說明的內容,而是由申請專利範圍定義。In order to make the present disclosure fully understandable, the following description provides detailed steps and structures. Obviously, the implementation of the present disclosure is not limited to specific details known to those skilled in the art. In addition, known structures and steps are no longer described in detail to avoid unnecessarily limiting the present disclosure. The preferred embodiments of the present disclosure are described in detail below. However, in addition to the detailed description, the present disclosure can also be widely implemented in other embodiments. The scope of the present disclosure is not limited to the content of the detailed description, but is defined by the scope of the patent application.
應當理解,以下揭露內容提供用於實作本發明的不同特徵的諸多不同的實施例或實例。以下闡述組件及排列形式的具體實施例或實例以簡化本揭露內容。當然,該些僅為實例且不旨在進行限制。舉例而言,元件的尺寸並非僅限於所揭露範圍或值,而是可相依於製程條件及/或裝置的所期望性質。此外,以下說明中將第一特徵形成於第二特徵「之上」或第二特徵「上」可包括其中第一特徵及第二特徵被形成為直接接觸的實施例,且亦可包括其中第一特徵與第二特徵之間可形成有附加特徵、進而使得所述第一特徵與所述第二特徵可能不直接接觸的實施例。為簡潔及清晰起見,可按不同比例任意繪製各種特徵。在附圖中,為簡化起見,可省略一些層/特徵。It should be understood that the following disclosure provides many different embodiments or examples for implementing different features of the present invention. Specific embodiments or examples of components and arrangements are described below to simplify the disclosure. Of course, these are only examples and are not intended to be limiting. For example, the size of the components is not limited to the disclosed ranges or values, but may depend on the process conditions and/or the desired properties of the device. In addition, the following description of forming a first feature "on" or "on" a second feature may include embodiments in which the first feature and the second feature are formed to be in direct contact, and may also include embodiments in which additional features may be formed between the first feature and the second feature, so that the first feature and the second feature may not be in direct contact. For the sake of brevity and clarity, the various features may be arbitrarily drawn in different proportions. In the accompanying drawings, some layers/features may be omitted for simplicity.
此外,為易於說明,本文中可能使用例如「之下(beneath)」、「下面(below)」、「下部的(lower)」、「上方(above)」、「上部的(upper)」等空間相對關係用語來闡述圖中所示的一個元件或特徵與另一(其他)元件或特徵的關係。所述空間相對關係用語旨在除圖中所繪示的取向外亦囊括元件在使用或操作中的不同取向。所述裝置可具有其他取向(旋轉90度或處於其他取向)且本文中所用的空間相對關係描述語可同樣相應地進行解釋。Furthermore, for ease of explanation, spatially relative terms such as "beneath," "below," "lower," "above," "upper," etc. may be used herein to describe the relationship of one element or feature shown in the figures to another (other) element or feature. The spatially relative terms are intended to encompass different orientations of the elements in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or in other orientations) and the spatially relative descriptors used herein may be interpreted accordingly.
參考圖1,其係本揭露一些實施例之一光訊號處理裝置10的示意圖。光訊號處理裝置10用以量測多個微發光二極體MLED於一時間區間內所發出的多個光訊號SP。1 is a schematic diagram of an optical signal processing device 10 according to some embodiments of the present disclosure. The optical signal processing device 10 is used to measure a plurality of optical signals SP emitted by a plurality of micro-luminescent diodes MLED within a time period.
具體來說,光訊號處理裝置10包含多個光訊號測試元件110及光訊號感測裝置120。每一個光訊號測試元件110用以接收一個對應的微發光二極體MLED所發出的光訊號SP,並將光訊號SP傳遞至光訊號感測裝置120。於一些實施例中,光訊號測試元件110與微發光二極體MLED係一一對應。換言之,每一個光訊號測試元件110分別接收並傳遞一個對應的微發光二極體MLED發出的光訊號SP,且每一個光訊號測試元件110對應的微發光二極體MLED不重複。Specifically, the optical signal processing device 10 includes a plurality of optical signal test components 110 and an optical signal sensing device 120. Each optical signal test component 110 is used to receive an optical signal SP emitted by a corresponding micro-luminescent diode MLED and transmit the optical signal SP to the optical signal sensing device 120. In some embodiments, the optical signal test components 110 and the micro-luminescent diodes MLED are one-to-one corresponding. In other words, each optical signal test component 110 receives and transmits an optical signal SP emitted by a corresponding micro-luminescent diode MLED, and the micro-luminescent diode MLED corresponding to each optical signal test component 110 is not repeated.
更進一步來說,光訊號感測裝置120耦接該些光訊號測試元件110,用以感測由該些光訊號測試元件110傳遞的該些光訊號SP,並根據該些光訊號SP產生複數個感測訊號SS。如此一來,便可利用後端分析裝置(未繪示)分析感測訊號SS,以得到相關測試結果。Furthermore, the optical signal sensing device 120 is coupled to the optical signal test elements 110 to sense the optical signals SP transmitted by the optical signal test elements 110 and generate a plurality of sensing signals SS according to the optical signals SP. In this way, the sensing signals SS can be analyzed by a back-end analysis device (not shown) to obtain relevant test results.
在一些實施例中,該些微發光二極體MLED為晶圓級的微發光二極體(wafer-scale micro LED),設置在一晶圓W上。換言之,光訊號處理裝置10用來直接對晶圓W上的微發光二極體MLED進行光訊號量測。然本揭露不限於此,例如,微發光二極體MLED可為其他種產生光訊號的元件。In some embodiments, the micro LEDs MLEDs are wafer-scale micro LEDs disposed on a wafer W. In other words, the optical signal processing device 10 is used to directly measure optical signals of the micro LEDs MLEDs on the wafer W. However, the present disclosure is not limited thereto, for example, the micro LEDs MLEDs may be other components that generate optical signals.
在另一些實施例中,微發光二極體MLED為RGB發光二極體。於此實施例中,每一個光訊號測試元件110用以接收多個微發光二極體MLED於一時間區間內所發出的RGB光訊號SP。其中,光訊號SP可包含RGB中單一顏色光訊號,例如:紅色光訊號、綠色光訊號或藍色光訊號。In other embodiments, the micro-LEDs MLEDs are RGB LEDs. In this embodiment, each optical signal testing element 110 is used to receive RGB optical signals SP emitted by a plurality of micro-LEDs MLEDs within a time period. The optical signal SP may include a single color light signal in RGB, such as a red light signal, a green light signal, or a blue light signal.
參考圖2,其係本揭露一些實施例之一光訊號處理裝置20的示意圖。光訊號處理裝置20用以量測多個微發光二極體MLED於一時間區間內所發出的多個光訊號SP。2 is a schematic diagram of an optical signal processing device 20 according to some embodiments of the present disclosure. The optical signal processing device 20 is used to measure a plurality of optical signals SP emitted by a plurality of micro-luminescent diodes MLED within a time period.
具體來說,光訊號處理裝置20包含多個光訊號測試元件210、光訊號感測裝置220、定位裝置230與多個探針240。每一個探針240用來將一個控制訊號SC傳輸至一個對應的微發光二極體MLED,使該微發光二極體MLED依據控制訊號SC發出一個光訊號SP。更進一步來說,該些探針240用來接觸該些微發光二極體MLED,並傳送該些控制訊號SC啟動該些微發光二極體MLED,使該些微發光二極體MLED發出光訊號SP。Specifically, the optical signal processing device 20 includes a plurality of optical signal test elements 210, an optical signal sensing device 220, a positioning device 230, and a plurality of probes 240. Each probe 240 is used to transmit a control signal SC to a corresponding micro-LED MLED, so that the micro-LED MLED emits a light signal SP according to the control signal SC. Furthermore, the probes 240 are used to contact the micro-LEDs MLED and transmit the control signals SC to activate the micro-LEDs MLED, so that the micro-LEDs MLED emit light signals SP.
在一些實施例中,該些探針240設置在一探針卡245上,透過探針卡245來調整該些探針240的位置,以使每個探針240都可以接觸到對應的微發光二極體MLED。然本揭露不限於此,各種可設置多個探針240的機構(mechanism)或組合(assembly)均在本揭露的範疇內。In some embodiments, the probes 240 are disposed on a probe card 245, and the positions of the probes 240 are adjusted through the probe card 245 so that each probe 240 can contact the corresponding micro-luminescent diode MLED. However, the present disclosure is not limited thereto, and various mechanisms or assemblies that can be provided with multiple probes 240 are within the scope of the present disclosure.
在一些實施例中,每一個光訊號測試元件210包含一個光引導單元,用以接收一個對應的微發光二極體MLED所發出的光訊號SP,並將光訊號SP傳遞至光訊號感測裝置220。在一些實施例中,每一個光引導單元可以是光纖,且該些光訊號測試元件210可以一個光纖陣列區塊(Fiber Array Block,FAB)之結構設置。在一些實施例中,光訊號處理裝置20包含至少48、240、480或960個光訊號測試元件210。In some embodiments, each optical signal test element 210 includes a light guiding unit for receiving an optical signal SP emitted by a corresponding micro-luminescent diode MLED and transmitting the optical signal SP to the optical signal sensing device 220. In some embodiments, each light guiding unit may be an optical fiber, and the optical signal test elements 210 may be arranged in a fiber array block (FAB) structure. In some embodiments, the optical signal processing device 20 includes at least 48, 240, 480 or 960 optical signal test elements 210.
在一些實施例中,該些微發光二極體MLED設置在一晶圓W上,為晶圓級的微發光二極體。換言之,光訊號處理裝置20用來直接對晶圓W上的微發光二極體MLED進行光訊號量測。然本揭露不限於此,例如,微發光二極體MLED為其他種可產生光訊號的元件,及光訊號處理裝置20用以量測非晶圓級的微發光二極體MLED。In some embodiments, the micro-luminescent diodes MLEDs are disposed on a wafer W and are wafer-level micro-luminescent diodes. In other words, the optical signal processing device 20 is used to directly measure the optical signals of the micro-luminescent diodes MLEDs on the wafer W. However, the present disclosure is not limited thereto, for example, the micro-luminescent diodes MLEDs are other types of components that can generate optical signals, and the optical signal processing device 20 is used to measure non-wafer-level micro-luminescent diodes MLEDs.
在另一些實施例中,微發光二極體MLED為RGB發光二極體。於此實施例中,每一個光訊號測試元件210用以接收多個微發光二極體MLED於一時間區間內所發出的RGB光訊號SP。其中,光訊號SP可包含RGB中單一顏色光訊號,例如:紅色光訊號、綠色光訊號或藍色光訊號。In other embodiments, the micro-LEDs MLEDs are RGB LEDs. In this embodiment, each optical signal test element 210 is used to receive RGB optical signals SP emitted by a plurality of micro-LEDs MLEDs within a time period. The optical signal SP may include a single color light signal in RGB, such as a red light signal, a green light signal, or a blue light signal.
須說明,針對微發光二極體MLED,習知技術可透過積分球(integrating sphere)來接收其所發出的光線並進行後續量測,然而,由於積分球體積相對於微發光二極體來說甚為巨大,因此,配置上較難排列多個積分球進行量測。另外,積分球在量測時對於收光的程度有其限制,並非可以將光訊號完全接收,且不一定能將接收到的光訊號全然的傳輸至量測儀器,傳輸中必有損耗,進而造成必然的誤差。更甚者,積分球單次所能涵蓋之微發光二極體之數量極為有限(例如:4、8、16、32個微發光二極體),且同一時間內僅能點亮範圍內之單一微發光二極體進行單一微發光二極體之量測,因此,大量微發光二極體之測量耗時甚鉅。It should be noted that for MLEDs, the conventional technology is to use an integrating sphere to receive the light emitted by them and perform subsequent measurements. However, since the volume of the integrating sphere is very large compared to the MLED, it is difficult to arrange multiple integrating spheres for measurement. In addition, the integrating sphere has its own limitations on the degree of light collection during measurement. It cannot completely receive the optical signal, and it may not be able to completely transmit the received optical signal to the measuring instrument. There will be losses during the transmission, which will inevitably cause errors. Furthermore, the number of LM diodes that can be covered by an integrating sphere at one time is extremely limited (e.g., 4, 8, 16, 32 LM diodes), and only a single LM diode within the range can be lit up for measurement at the same time. Therefore, the measurement of a large number of LM diodes is very time-consuming.
據此,相較上述的先前技術,本揭露使用的光訊號測試元件210因其體積小,因此,光訊號測試元件210不會受到空間不足之影響,可對應微發光二極體之排列一對一地進行配置,以大幅提升單次量測所能涵蓋之微發光二極體之數量。此外,由於光訊號測試元件210與微發光二極體係一對一配置,因此可同時點亮多個微發光二極體進行量測,即光訊號測試元件210傳遞多個微發光二極體MLED同時發出之多個光訊號SP,以大幅地縮減測量時間。更者,光訊號測試元件210使用光纖,因此可以將接收之光訊號SP幾近無損耗地傳遞至光訊號感測裝置220,以提升測量品質並降低量測的誤差。Accordingly, compared to the above-mentioned prior art, the optical signal test element 210 used in the present disclosure is small in size. Therefore, the optical signal test element 210 will not be affected by insufficient space and can be configured one-to-one corresponding to the arrangement of the micro-LEDs, thereby greatly increasing the number of micro-LEDs that can be covered by a single measurement. In addition, since the optical signal test element 210 and the micro-LEDs are configured one-to-one, multiple micro-LEDs can be lit up at the same time for measurement, that is, the optical signal test element 210 transmits multiple optical signals SP emitted simultaneously by multiple micro-LEDs MLEDs, thereby greatly shortening the measurement time. Furthermore, the optical signal testing element 210 uses optical fiber, so the received optical signal SP can be transmitted to the optical signal sensing device 220 almost without loss, so as to improve the measurement quality and reduce the measurement error.
舉例來說,假設先前技術之積分球涵蓋8個微發光二極體MLED,單一微發光二極體MLED之點亮測試時間為n秒,積分球移動一次之時間為m秒,則測試2萬4千個微發光二極體之時間大致上為24000*n+(24000/8)*m秒,即24000*n+3000*m秒。而利用本發明,假設光訊號處理裝置20之光訊號測試元件210之數量為240,單一微發光二極體MLED之點亮測試時間為n秒,光訊號測試元件210整體移動一次之時間為m秒,測量同樣數量2萬4千個微發光二極體MLED之時間大致上為(24000/240)*n+(24000/240)*m秒,即100*n+100*m秒。明顯地,本揭露有效且大幅地降低測試時間。For example, assuming that the integrating sphere of the prior art covers 8 MLEDs, the lighting test time of a single MLED is n seconds, and the time for the integrating sphere to move once is m seconds, then the time for testing 24,000 MLEDs is roughly 24000*n+(24000/8)*m seconds, that is, 24000*n+3000*m seconds. Using the present invention, assuming that the number of optical signal test components 210 of the optical signal processing device 20 is 240, the lighting test time of a single micro-luminescent diode MLED is n seconds, and the time for the optical signal test component 210 to move once as a whole is m seconds, the time to measure the same number of 24,000 micro-luminescent diodes MLED is approximately (24000/240)*n+(24000/240)*m seconds, that is, 100*n+100*m seconds. Obviously, the present disclosure effectively and significantly reduces the test time.
在一些實施例中,一個微發光二極體MLED包含三原色發光二極體的畫素(pixel),並設置在一顯示面板(未繪示)上。換言之,光訊號處理裝置20用來對顯示面板上的畫素進行光訊號量測。In some embodiments, a micro-LED MLED includes pixels of three primary color LEDs and is disposed on a display panel (not shown). In other words, the optical signal processing device 20 is used to measure optical signals of the pixels on the display panel.
更進一步來說,光訊號感測裝置220耦接該些光訊號測試元件210,用以感測由該些光訊號測試元件210傳遞的該些光訊號SP,並根據該些光訊號SP產生複數個感測訊號SS。在一些實施例中,光訊號感測裝置220包含攝影機,用以擷取該些光訊號SP在攝影機內的成像面上的一成像,接著再依據該成像產生該些感測訊號SS。在一些實施例中,光訊號感測裝置220包含CMOS影像感測器(CIS),利用CIS上的光電二極體來感測該些光訊號SP並對應產生該些感測訊號SS。More specifically, the optical signal sensing device 220 is coupled to the optical signal test elements 210 to sense the optical signals SP transmitted by the optical signal test elements 210 and generate a plurality of sensing signals SS according to the optical signals SP. In some embodiments, the optical signal sensing device 220 includes a camera to capture an image of the optical signals SP on an imaging plane in the camera and then generate the sensing signals SS according to the image. In some embodiments, the optical signal sensing device 220 includes a CMOS image sensor (CIS) to sense the optical signals SP using photodiodes on the CIS and generate the sensing signals SS accordingly.
在一些實施例中,該些感測訊號SS傳送至一分析儀器(未繪示),一個感測訊號SS代表一個微發光二極體MLED的效能。例如,分析儀器可分析感測訊號SS得到微發光二極體MLED的亮度、色差等。而當獲得所有微發光二極體MLED的亮度及/或色差後,便可依據亮度及/或色差對所有微發光二極體MLED進行分類(binning),使亮度及/或色差相近的微發光二極體MLED分成同一類別。In some embodiments, the sensing signals SS are transmitted to an analysis instrument (not shown), and a sensing signal SS represents the performance of a micro-luminescent diode MLED. For example, the analysis instrument can analyze the sensing signal SS to obtain the brightness, color difference, etc. of the micro-luminescent diode MLED. After the brightness and/or color difference of all micro-luminescent diodes MLED are obtained, all micro-luminescent diodes MLED can be classified (binning) according to the brightness and/or color difference, so that micro-luminescent diodes MLED with similar brightness and/or color difference are classified into the same category.
在一些實施例中,定位裝置230用以將該些探針240與該些光訊號測試元件210之光引導單元分別對齊該些微發光二極體MLED的兩個不同的表面。如圖2所示,微發光二極體MLED由第一表面S1接觸探針240以接收控制訊號SC,並從第二表面S2發出光訊號SP至光訊號測試元件210之光引導單元,其中第一表面S1與第二表面S2相對立。在一些實施例中,定位裝置230用以將該些控制探針240(或探針卡245)與該些光訊號測試元件210之光引導單元分別對齊該些微發光二極體MLED。例如,定位裝置230單獨控制該些探針240對齊並接觸該些微發光二極體MLED,或單獨控制該些光訊號測試元件210之該些光引導單元對齊該些微發光二極體MLED。In some embodiments, the positioning device 230 is used to align the probes 240 and the light guiding units of the optical signal test components 210 with two different surfaces of the micro-LEDs MLEDs. As shown in FIG2 , the micro-LEDs MLEDs contact the probes 240 from the first surface S1 to receive the control signal SC, and send the light signal SP from the second surface S2 to the light guiding unit of the optical signal test component 210, wherein the first surface S1 is opposite to the second surface S2. In some embodiments, the positioning device 230 is used to align the control probes 240 (or the probe cards 245) and the light guiding units of the optical signal test components 210 with the micro-LEDs MLEDs. For example, the positioning device 230 independently controls the probes 240 to align with and contact the micro-LEDs MLEDs, or independently controls the light guiding units of the optical signal testing components 210 to align with the micro-LEDs MLEDs.
參考圖3,其係本揭露一些實施例之一光訊號處理裝置30的示意圖。光訊號處理裝置30用以量測多個微發光二極體MLED所發出的光訊號SP。光訊號處理裝置30包含多個光訊號測試元件310、光訊號感測裝置320與定位裝置330。3 is a schematic diagram of an optical signal processing device 30 according to some embodiments of the present disclosure. The optical signal processing device 30 is used to measure optical signals SP emitted by a plurality of micro-luminescent diodes MLED. The optical signal processing device 30 includes a plurality of optical signal testing components 310, an optical signal sensing device 320 and a positioning device 330.
在一些實施例中,定位裝置330用以將該些探針312與該些光引導單元311分別對齊該些微發光二極體MLED。如圖3所示,定位裝置330將探針312與光引導單元311對齊微發光二極體MLED的第一表面S1。相較於光訊號處理裝置20,在光訊號處理裝置30中,探針312與光引導單元311在量測時都位於微發光二極體MLED的同一側。In some embodiments, the positioning device 330 is used to align the probes 312 and the light guiding units 311 with the micro-LEDs MLEDs, respectively. As shown in FIG3 , the positioning device 330 aligns the probes 312 and the light guiding units 311 with the first surface S1 of the micro-LEDs MLEDs. Compared to the optical signal processing device 20 , in the optical signal processing device 30 , the probes 312 and the light guiding units 311 are both located on the same side of the micro-LEDs MLEDs during measurement.
每一個光訊號測試元件310包含一個光引導單元311與一個探針312,並對應一個微發光二極體MLED。光引導單元311與探針312位於微發光二極體MLED的同側表面。該探針312用來接觸該微發光二極體MLED,以傳送一個控制訊號SC至該微發光二極體MLED,使該微發光二極體MLED發出光訊號SP。該光引導單元311用以接收該微發光二極體MLED發出的光訊號SP,並將光訊號SP傳遞至光訊號感測裝置320。在一些實施例中,光引導單元311包含光纖。在一些實施例中,光訊號處理裝置30包含至少48、240、480或960個光訊號測試元件310。Each optical signal test element 310 includes a light guiding unit 311 and a probe 312, and corresponds to a micro-luminescent diode MLED. The light guiding unit 311 and the probe 312 are located on the same side surface of the micro-luminescent diode MLED. The probe 312 is used to contact the micro-luminescent diode MLED to transmit a control signal SC to the micro-luminescent diode MLED so that the micro-luminescent diode MLED emits a light signal SP. The light guiding unit 311 is used to receive the light signal SP emitted by the micro-luminescent diode MLED and transmit the light signal SP to the optical signal sensing device 320. In some embodiments, the light guiding unit 311 includes an optical fiber. In some embodiments, the optical signal processing device 30 includes at least 48, 240, 480, or 960 optical signal test components 310.
在一些實施例中,該些微發光二極體MLED為發光二極體,並設置在一晶圓W上。在一些實施例中,該些微發光二極體MLED為晶圓級的微發光二極體。換言之,光訊號處理裝置30用來直接對晶圓W上的微發光二極體進行光訊號量測。然本揭露不限於此,例如,微發光二極體MLED為其他種可產生光訊號的元件,及光訊號處理裝置30用以量測非晶圓級的微發光二極體MLED。In some embodiments, the micro-LEDs MLEDs are light-emitting diodes and are disposed on a wafer W. In some embodiments, the micro-LEDs MLEDs are wafer-level micro-LEDs. In other words, the optical signal processing device 30 is used to directly measure optical signals on the micro-LEDs on the wafer W. However, the present disclosure is not limited thereto, for example, the micro-LEDs MLEDs are other types of components that can generate optical signals, and the optical signal processing device 30 is used to measure non-wafer-level micro-LEDs MLEDs.
在另一些實施例中,微發光二極體MLED為RGB發光二極體。於此實施例中,每一個光訊號測試元件310用以接收多個微發光二極體MLED於一時間區間內所發出的RGB光訊號SP。其中,光訊號SP可包含RGB中單一顏色光訊號,例如:紅色光訊號、綠色光訊號或藍色光訊號。In other embodiments, the micro-LEDs MLEDs are RGB LEDs. In this embodiment, each optical signal testing element 310 is used to receive RGB optical signals SP emitted by a plurality of micro-LEDs MLEDs within a time period. The optical signal SP may include a single color light signal in RGB, such as a red light signal, a green light signal, or a blue light signal.
在一些實施例中,一個微發光二極體MLED包含三原色發光二極體的畫素(pixel),並設置在一顯示面板(未繪示)上。換言之,光訊號處理裝置30用來對顯示面板上的畫素進行光訊號量測。In some embodiments, a micro-LED MLED includes pixels of three primary color LEDs and is disposed on a display panel (not shown). In other words, the optical signal processing device 30 is used to measure optical signals of the pixels on the display panel.
在一些實施例中,光訊號感測裝置320耦接該些光訊號測試元件310,用以感測由該些光訊號測試元件310傳遞的該些光訊號SP,並根據該些光訊號SP產生複數個感測訊號SS。在一些實施例中,光訊號感測裝置320包含攝影機,用以擷取該些光訊號SP在攝影機內的成像面上的一成像,接著再依據該成像產生該些感測訊號SS。在一些實施例中,光訊號感測裝置320包含CIS,利用CIS上的光電二極體來感測該些光訊號SP並對應產生該些感測訊號SS。In some embodiments, the optical signal sensing device 320 is coupled to the optical signal test elements 310 to sense the optical signals SP transmitted by the optical signal test elements 310 and generate a plurality of sensing signals SS according to the optical signals SP. In some embodiments, the optical signal sensing device 320 includes a camera to capture an image of the optical signals SP on an imaging plane in the camera and then generate the sensing signals SS according to the image. In some embodiments, the optical signal sensing device 320 includes a CIS, and uses a photodiode on the CIS to sense the optical signals SP and generate the sensing signals SS accordingly.
在一些實施例中,該些感測訊號SS傳送至一分析儀器(未繪示),一個感測訊號SS代表一個微發光二極體MLED的效能。例如,分析儀器可分析感測訊號SS得到微發光二極體MLED的亮度、色差等。而當獲得所有微發光二極體MLED的亮度及/或色差後,便可依據亮度及/或色差對所有微發光二極體MLED進行分類,使亮度及/或色差相近的微發光二極體MLED分成同一類別。In some embodiments, the sensing signals SS are transmitted to an analysis instrument (not shown), and a sensing signal SS represents the performance of a micro-luminescent diode MLED. For example, the analysis instrument can analyze the sensing signal SS to obtain the brightness, color difference, etc. of the micro-luminescent diode MLED. After the brightness and/or color difference of all micro-luminescent diodes MLED are obtained, all micro-luminescent diodes MLED can be classified according to the brightness and/or color difference, so that micro-luminescent diodes MLED with similar brightness and/or color difference are classified into the same category.
參考圖4A,其係本揭露一些實施例之光訊號測試元件210之光引導單元之結構與操作示意圖。在一些實施例中,光訊號測試元件210之光引導單元用以接收光訊號SP的一端包含平面210A。當光訊號測試元件210之光引導單元接收光訊號SP時,為了使平面210A盡量涵蓋整個光訊號SP的發散範圍,光訊號測試元件210之光引導單元的位置與微發光二極體MLED的距離D1須依據微發光二極體MLED的發散角度θ1與光訊號測試元件210之光引導單元的軸向半徑R1做調整,其中距離D1藉由定位裝置230來調整。在一些實施例中,光引導單元的光訊號接收範圍可完整涵蓋(或稱「僅涵蓋」)對應的微發光二極體MLED的光訊號SP的發散範圍,且不含蓋相鄰的微發光二極體MLED的光訊號SP的發散範圍。在這樣的情形下,無論相鄰的微發光二極體MLED有沒有發出光訊號SP都不會影響光引導單元所接收的光訊號SP。在另一些實施例中,光引導單元的光訊號接收範圍僅部分整涵蓋對應的微發光二極體MLED的光訊號SP的發散範圍,因此該微發光二極體MLED的光訊號SP的發散範圍可能會有部分位於其他光引導單元的光訊號接收範圍。在此情形下,為了不使光引導單元的光訊號接收範圍所接收的光訊號受到其他訊號干擾,可以將相鄰或相近的微發光二極體MLED在不同的時間區間中分別點亮,使每次光引導單元在接收光訊號SP時可以盡量不受到相鄰或相近的微發光二極體MLED所發出的光訊號SP所干擾,據此可以降低失真。在一些實施例中,距離D1為微發光二極體MLED的第二表面S2與平面210A之間的最短距離。在一些實施例中,微發光二極體MLED的第二表面S2與平面210A相互平行。在其他實施例中,微發光二極體MLED的第二表面S2與平面210A相互不平行。Referring to FIG. 4A , it is a schematic diagram of the structure and operation of the light guiding unit of the optical signal test component 210 of some embodiments of the present disclosure. In some embodiments, one end of the light guiding unit of the optical signal test component 210 for receiving the optical signal SP includes a plane 210A. When the light guiding unit of the optical signal test component 210 receives the optical signal SP, in order to make the plane 210A cover the entire divergence range of the optical signal SP as much as possible, the position of the light guiding unit of the optical signal test component 210 and the distance D1 of the micro-luminescent diode MLED must be adjusted according to the divergence angle θ1 of the micro-luminescent diode MLED and the axial radius R1 of the light guiding unit of the optical signal test component 210, wherein the distance D1 is adjusted by the positioning device 230. In some embodiments, the optical signal receiving range of the light guiding unit may completely cover (or "only cover") the divergence range of the optical signal SP of the corresponding micro-LED MLED, and does not include the divergence range of the optical signal SP of the adjacent micro-LED MLED. In such a case, whether or not the adjacent micro-LED MLED emits the optical signal SP will not affect the optical signal SP received by the light guiding unit. In other embodiments, the optical signal receiving range of the light guiding unit only partially covers the divergence range of the optical signal SP of the corresponding micro-LED MLED, so the divergence range of the optical signal SP of the micro-LED MLED may be partially located in the optical signal receiving range of other light guiding units. In this case, in order to prevent the optical signal received by the optical signal receiving range of the light guiding unit from being interfered by other signals, the adjacent or close micro-luminescent diodes MLED can be lighted separately in different time periods, so that each time the light guiding unit receives the optical signal SP, it can be as little interfered by the optical signal SP emitted by the adjacent or close micro-luminescent diodes MLED as possible, thereby reducing distortion. In some embodiments, the distance D1 is the shortest distance between the second surface S2 of the micro-luminescent diode MLED and the plane 210A. In some embodiments, the second surface S2 of the micro-luminescent diode MLED and the plane 210A are parallel to each other. In other embodiments, the second surface S2 of the micro-luminescent diode MLED and the plane 210A are not parallel to each other.
平面210A與微發光二極體MLED第二表面S2的距離D1至少須滿足方程式(1): ;方程式(1) The distance D1 between the plane 210A and the second surface S2 of the micro-luminescent diode MLED must at least satisfy equation (1): ; Equation (1)
在一些實施例中,為了使平面210A涵蓋整個光訊號SP的發散範圍,當發散角度θ1增加時,距離D1需縮短,當發散角度θ1減少時,距離D1可增長。換言之,當發散角度θ1越大時,距離D1越小。In some embodiments, in order to make the plane 210A cover the entire divergence range of the optical signal SP, when the divergence angle θ1 increases, the distance D1 needs to be shortened, and when the divergence angle θ1 decreases, the distance D1 may be increased. In other words, when the divergence angle θ1 increases, the distance D1 decreases.
參考圖4B,其係本揭露一些實施例之光訊號測試元件210之光引導單元之結構與操作示意圖。在一些實施例中,光訊號測試元件210之光引導單元用以接收光訊號SP的一端包含凹面210B。相似的,光訊號測試元件210之光引導單元的位置與微發光二極體MLED的距離D2須依據微發光二極體MLED的發散角度θ2與光訊號測試元件210之光引導單元的軸向半徑R2做調整,其中距離D2藉由定位裝置230來調整。在一些實施例中,距離D2為微發光二極體MLED的第二表面S2與凹面210B之間的最短距離。在一些實施例中,光訊號測試元件210之光引導單元的側壁與凹面210B相交於交點C1,且距離D2為微發光二極體MLED的第二表面S2與交點C1之間的最短距離。Refer to FIG. 4B , which is a schematic diagram of the structure and operation of the light guiding unit of the optical signal test component 210 of some embodiments of the present disclosure. In some embodiments, the end of the light guiding unit of the optical signal test component 210 for receiving the optical signal SP includes a concave surface 210B. Similarly, the distance D2 between the position of the light guiding unit of the optical signal test component 210 and the micro-LED MLED must be adjusted according to the divergence angle θ2 of the micro-LED MLED and the axial radius R2 of the light guiding unit of the optical signal test component 210, wherein the distance D2 is adjusted by the positioning device 230. In some embodiments, the distance D2 is the shortest distance between the second surface S2 of the micro-LED MLED and the concave surface 210B. In some embodiments, the sidewall of the light guiding unit of the optical signal test device 210 intersects with the concave surface 210B at an intersection C1, and the distance D2 is the shortest distance between the second surface S2 of the micro-luminescent diode MLED and the intersection C1.
凹面210B與微發光二極體MLED第二表面S2的距離D2至少須滿足方程式(2): ;方程式(2) The distance D2 between the concave surface 210B and the second surface S2 of the micro-luminescent diode MLED must at least satisfy equation (2): ; Equation (2)
在一些實施例中,為了使凹面210B涵蓋整個光訊號SP的發散範圍,當發散角度θ2增加時,距離D2需縮短,當發散角度θ2減少時,距離D2可增長。換言之,當發散角度θ2越大時,距離D2越小。In some embodiments, in order to make the concave surface 210B cover the entire divergence range of the optical signal SP, when the divergence angle θ2 increases, the distance D2 needs to be shortened, and when the divergence angle θ2 decreases, the distance D2 may be increased. In other words, when the divergence angle θ2 increases, the distance D2 decreases.
參考圖4C,其係本揭露一些實施例之光訊號測試元件210之光引導單元之結構與操作示意圖。在一些實施例中,光訊號測試元件210之光引導單元用以接收光訊號SP的一端包含凸面210C。相似的,光訊號測試元件210之光引導單元的位置與微發光二極體MLED的距離D3須依據微發光二極體MLED的發散角度θ3與光訊號測試元件210之光引導單元的軸向半徑R3做調整,其中距離D3藉由定位裝置230來調整。在一些實施例中,光訊號測試元件210之光引導單元的側壁與凸面210C相交於交點C2,且距離D3為微發光二極體MLED的第二表面S2與交點C2之間的最短距離。Referring to FIG. 4C , it is a schematic diagram of the structure and operation of the light guiding unit of the optical signal test component 210 of some embodiments of the present disclosure. In some embodiments, the end of the light guiding unit of the optical signal test component 210 for receiving the optical signal SP includes a convex surface 210C. Similarly, the distance D3 between the position of the light guiding unit of the optical signal test component 210 and the micro-LED MLED must be adjusted according to the divergence angle θ3 of the micro-LED MLED and the axial radius R3 of the light guiding unit of the optical signal test component 210, wherein the distance D3 is adjusted by the positioning device 230. In some embodiments, the sidewall of the light guiding unit of the optical signal test component 210 intersects with the convex surface 210C at an intersection C2, and the distance D3 is the shortest distance between the second surface S2 of the micro-luminescent diode MLED and the intersection C2.
凸面210C與微發光二極體MLED第二表面S2的距離D3至少須滿足方程式(3): ;方程式(3) The distance D3 between the convex surface 210C and the second surface S2 of the micro-luminescent diode MLED must at least satisfy equation (3): ; Equation (3)
在一些實施例中,為了使凸面210C涵蓋整個光訊號SP的發散範圍,當發散角度θ3增加時,距離D3需縮短,當發散角度θ3減少時,距離D3可增長。換言之,當發散角度θ3越大時,距離D3越小。In some embodiments, in order to make the convex surface 210C cover the entire divergence range of the optical signal SP, when the divergence angle θ3 increases, the distance D3 needs to be shortened, and when the divergence angle θ3 decreases, the distance D3 may be increased. In other words, when the divergence angle θ3 increases, the distance D3 decreases.
在一些實施例中,半徑R1、半徑R2與半徑R3三者相等。在一些實施例中,發散角度θ1、發散角度θ2與發散角度θ3三者相等。在一些實施例中,半徑R1、R2、R3為光訊號測試元件210之光引導單元的光纖的核心(core)的軸向半徑。In some embodiments, the radius R1, the radius R2 and the radius R3 are equal. In some embodiments, the divergence angle θ1, the divergence angle θ2 and the divergence angle θ3 are equal. In some embodiments, the radii R1, R2 and R3 are the axial radii of the core of the optical fiber of the light guiding unit of the optical signal test element 210.
參考圖5A、圖5B與圖5C,光引導單元311之結構與操作相似圖4A至圖4C中所描述的光訊號測試元件210之光引導單元之結構與操作。亦即光引導單元311用來接收光訊號SP的一端在不同實施例中包含平面311A、凹面311B與凸面311C,以及其與微發光二極體MLED第一表面S1的距離至少需方程式(4): ;方程式(4) Referring to FIG. 5A, FIG. 5B and FIG. 5C, the structure and operation of the light guiding unit 311 are similar to the structure and operation of the light guiding unit of the optical signal test element 210 described in FIG. 4A to FIG. 4C. That is, the end of the light guiding unit 311 for receiving the optical signal SP includes a flat surface 311A, a concave surface 311B and a convex surface 311C in different embodiments, and the distance between the end and the first surface S1 of the micro-luminescent diode MLED is at least required to satisfy equation (4): ; Equation (4)
其中D代表光引導單元311用來接收光訊號SP的一端與微發光二極體MLED第一表面S1間的距離D4、D5、或D6,R代表光引導單元311的軸向半徑R4、R5或R6,以及θ代表微發光二極體MLED的發散角度θ4、θ5或θ6。Wherein D represents the distance D4, D5, or D6 between one end of the light guiding unit 311 for receiving the light signal SP and the first surface S1 of the micro-luminescent diode MLED, R represents the axial radius R4, R5, or R6 of the light guiding unit 311, and θ represents the divergence angle θ4, θ5, or θ6 of the micro-luminescent diode MLED.
在一些實施例中,距離D4為微發光二極體MLED的第一表面S1與平面311A之間的最短距離。在一些實施例中,距離D5為微發光二極體MLED的第一表面S1與凹面311B之間的最短距離。在一些實施例中,光引導單元311的側壁與凹面311B相交於交點C3,且距離D5為微發光二極體MLED的第一表面S1與交點C3之間的最短距離。在一些實施例中,光引導單元311的側壁與凸面311C相交於交點C4,且距離D6為微發光二極體MLED的第一表面S1與交點C4之間的最短距離。在一些實施例中,半徑R4、R5、R6為光引導單元311的光纖的核心(core)的軸向半徑。In some embodiments, the distance D4 is the shortest distance between the first surface S1 of the micro-luminescent diode MLED and the plane 311A. In some embodiments, the distance D5 is the shortest distance between the first surface S1 of the micro-luminescent diode MLED and the concave surface 311B. In some embodiments, the side wall of the light guiding unit 311 intersects with the concave surface 311B at the intersection C3, and the distance D5 is the shortest distance between the first surface S1 of the micro-luminescent diode MLED and the intersection C3. In some embodiments, the side wall of the light guiding unit 311 intersects with the convex surface 311C at the intersection C4, and the distance D6 is the shortest distance between the first surface S1 of the micro-luminescent diode MLED and the intersection C4. In some embodiments, the radii R4, R5, and R6 are the axial radii of the core of the optical fiber of the light guiding unit 311.
在一些實施例中,為了使平面311A涵蓋整個光訊號SP的發散範圍,當發散角度θ4、θ5或θ6增加時,對應之距離D4、D5或D6需縮短,當發散角度θ4、θ5或θ6減少時,對應之距離D4、D5或D6可增長。換言之,當發散角度θ4、θ5或θ6越大時,對應之距離D4、D5或D6越小,當發散角度θ4、θ5或θ6越小時,對應之距離D4、D5或D6越大。In some embodiments, in order to make the plane 311A cover the entire divergence range of the optical signal SP, when the divergence angle θ4, θ5 or θ6 increases, the corresponding distance D4, D5 or D6 needs to be shortened, and when the divergence angle θ4, θ5 or θ6 decreases, the corresponding distance D4, D5 or D6 can be increased. In other words, when the divergence angle θ4, θ5 or θ6 is larger, the corresponding distance D4, D5 or D6 is smaller, and when the divergence angle θ4, θ5 or θ6 is smaller, the corresponding distance D4, D5 or D6 is larger.
參考圖6A至圖6C,其係本揭露一些實施例之光纖陣列區塊FAB與晶圓W之操作示意圖。在一些實施例中,光纖陣列區塊FAB包含的光訊號測試元件210的數量小於晶圓W上微發光二極體陣列的微發光二極體MLED的數量。需特別說明,為了圖式簡潔且可方便進一步瞭解本發明,,圖6A至圖6E所示的光訊號測試元件210與微發光二極體MLED的數量與尺寸僅為示意,其所演示的實施例中,光纖陣列區塊FAB的光纖數量及其所對應之MLED的數量以16個做為例示,惟並非實際的數量;在一些實施例中,一個晶圓W可包含更多的微發光二極體MLED,而光纖陣列區塊FAB可包含不同數量的光訊號測試元件210;例如光訊號處理裝置20包含至少48、240、480或960個光訊號測試元件210,相對地微發光二極體MLED包含至少48、240、480或960個。Refer to FIG. 6A to FIG. 6C , which are schematic diagrams of the operation of the optical fiber array block FAB and the wafer W of some embodiments of the present disclosure. In some embodiments, the number of optical signal test components 210 included in the optical fiber array block FAB is less than the number of micro-LEDs MLEDs in the micro-LED array on the wafer W. It should be specially noted that, for the sake of simplicity of the drawings and for a further understanding of the present invention, the number and size of the optical signal test components 210 and the micro-LEDs MLEDs shown in FIG. 6A to FIG. 6E are only for illustration. In the embodiments demonstrated therein, the number of optical fibers in the optical fiber array block FAB and the number of MLEDs corresponding thereto are 16 as an example, but this is not the actual number; in some embodiments, In one example, a wafer W may include more micro-luminescent diodes MLEDs, and the fiber array block FAB may include different numbers of optical signal test components 210; for example, the optical signal processing device 20 includes at least 48, 240, 480 or 960 optical signal test components 210, and correspondingly, the micro-luminescent diodes MLEDs include at least 48, 240, 480 or 960.
請參考如圖6A所示,光纖陣列區塊FAB包含16個光訊號測試元件210,微發光二極體陣列分為複數個測試區塊B1、B2、B3及B4(圖中各虛線方塊劃分之範圍)。光訊號處理裝置之光纖陣列區塊FAB一次測試單一測試區塊,換言之,一次選定測試區塊進行測試。於圖6A之範例中,選定測試區塊B1進行測試,因此,在定位裝置230執行的一次對齊中(例如圖6A對齊的位置),光纖陣列區塊FAB對齊測試區塊B1包含之16個微發光二極體MLED。As shown in FIG. 6A , the optical fiber array block FAB includes 16 optical signal test elements 210, and the micro-luminescent diode array is divided into a plurality of test blocks B1, B2, B3, and B4 (the ranges divided by the dashed blocks in the figure). The optical fiber array block FAB of the optical signal processing device tests a single test block at a time, in other words, the test block is selected for testing at one time. In the example of FIG. 6A , the test block B1 is selected for testing, so in one alignment performed by the positioning device 230 (e.g., the alignment position of FIG. 6A ), the optical fiber array block FAB aligns the 16 micro-luminescent diodes MLED included in the test block B1.
再請參考圖6B所示,光纖陣列區塊FAB包含16個光訊號測試元件210,於圖6B之範例中,選定測試區塊B4進行測試,而在定位裝置230執行的一次的對齊中(例如圖6B對齊的位置),光纖陣列區塊FAB對齊測試區塊B4包含之的微發光二極體MLED之數量可能小於16。Please refer to FIG. 6B , the optical fiber array block FAB includes 16 optical signal test elements 210. In the example of FIG. 6B , the test block B4 is selected for testing. In one alignment performed by the positioning device 230 (e.g., the alignment position of FIG. 6B ), the number of micro-luminescent diodes MLED included in the alignment test block B4 of the optical fiber array block FAB may be less than 16.
再請參考圖6C所示,光纖陣列區塊FAB包含16個光訊號測試元件210,於圖6C之範例中,選定測試區塊B1進行測試,而在定位裝置230執行的一次的對齊中(例如圖6C對齊的位置),光纖陣列區塊FAB對齊測試區塊B1包含之16個微發光二極體MLED。LED的光源具有發光角度,也就是LED光線的散射角度,尤其微發光二極體MLED的晶粒更小、排列更密,鄰近的微發光二極體MLED同時發光的時候,彼此間會產生光線干擾而影響光訊號測試元件210接收單一微發光二極體MLED的光訊號。為了降低光線干擾的情形,測試區塊B1之微發光二極體MLED可間隔地分成兩組或更多組,不同組的微發光二極體MLED在不同的時間區間點亮,而光訊號測試元件210也相對應於測試區塊B1之微發光二極體MLED分成兩組或更多組。Please refer to FIG. 6C , the fiber array block FAB includes 16 optical signal test components 210. In the example of FIG. 6C , the test block B1 is selected for testing, and in one alignment performed by the positioning device 230 (e.g., the alignment position of FIG. 6C ), the fiber array block FAB aligns the 16 micro-LEDs MLEDs included in the test block B1. The light source of the LED has a light emission angle, that is, the scattering angle of the LED light. In particular, the micro-LED MLED has smaller grains and is more densely arranged. When adjacent micro-LEDs MLED emit light at the same time, light interference will be generated between them, which will affect the optical signal test component 210 receiving the light signal of a single micro-LED MLED. In order to reduce light interference, the micro-LEDs MLEDs in the test block B1 can be divided into two or more groups at intervals. Different groups of micro-LEDs MLEDs light up at different time intervals, and the optical signal test element 210 is also divided into two or more groups corresponding to the micro-LEDs MLEDs in the test block B1.
如圖6C所示光訊號測試元件210分成以兩組為例示,圓形虛線代表第一組,方形虛線代表第二組。第一組光訊號測試元件210分別對應於第一組的微發光二極體MLED,第二組光訊號測試元件210分別對應於第二組的微發光二極體MLED。第一組微發光二極體MLED與第二組微發光二極體MLED係交錯設置(例如圖6C所繪示,第一組微發光二極體MLED係上下左右間隔一單位設置,第二組微發光二極體MLED係上下左右間隔一單位設置,第一組微發光二極體MLED與第二組微發光二極體MLED係交錯設置),並且第一組微發光二極體MLED與第二組微發光二極體MLED不具重複之微發光二極體。於一些實施例中,光纖陣列區塊FAB的光訊號測試元件210的數量至少須能涵蓋所有微發光二極體之數量,換言之,兩組微發光二極體的數量總和等於或小於光纖陣列區塊FAB的光訊號測試元件210的數量。As shown in FIG6C , the optical signal test components 210 are divided into two groups, where the circular dashed line represents the first group and the square dashed line represents the second group. The first group of optical signal test components 210 respectively corresponds to the first group of micro-luminescent diodes MLEDs, and the second group of optical signal test components 210 respectively corresponds to the second group of micro-luminescent diodes MLEDs. The first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED are arranged alternately (for example, as shown in FIG. 6C , the first group of micro-luminescent diodes MLED are arranged with a unit interval up and down and left and right, and the second group of micro-luminescent diodes MLED are arranged with a unit interval up and down and left and right, and the first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED are arranged alternately), and the first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED do not have repeated micro-luminescent diodes. In some embodiments, the number of optical signal test components 210 in the fiber array block FAB must at least cover the number of all micro-LEDs. In other words, the total number of two groups of micro-LEDs is equal to or less than the number of optical signal test components 210 in the fiber array block FAB.
於本實施例中,第一組的8個微發光二極體MLED於第一時間區間內點亮,光訊號測試元件210於第一時間區間內進行第一次量測,對對應的8個微發光二極體MLED進行收光,第二組的8個微發光二極體MLED於第二時間區間內點亮,光訊號測試元件210於第二時間區間內進行第二次量測,對對應的8個微發光二極體MLED進行收光。並且,在第一次量測及第二次量測的過程中,光纖陣列區塊FAB不需要重新和微發光二極體MLED重新定位,換言之,在第一時間區間以及第二時間區間內,光訊號感測裝置220的位置不變。In this embodiment, the eight micro-LEDs MLEDs of the first group are lit in the first time period, and the optical signal test component 210 performs the first measurement in the first time period, and collects the light from the corresponding eight micro-LEDs MLEDs. The eight micro-LEDs MLEDs of the second group are lit in the second time period, and the optical signal test component 210 performs the second measurement in the second time period, and collects the light from the corresponding eight micro-LEDs MLEDs. In addition, during the first measurement and the second measurement, the optical fiber array block FAB does not need to be repositioned with the micro-LEDs MLEDs. In other words, the position of the optical signal sensing device 220 remains unchanged in the first time period and the second time period.
如圖7A所示光訊號測試元件210分成以兩組為例示,圓形虛線代表第一組,方形虛線代表第二組。第一組光訊號測試元件210分別對應於第一組的微發光二極體MLED,第二組光訊號測試元件210分別對應於第二組的微發光二極體MLED。第一組微發光二極體MLED與第二組微發光二極體MLED係交錯設置(例如圖7A所繪示,第一組微發光二極體MLED係上下左右間隔三單位設置,第二組微發光二極體MLED係上下左右間隔三單位設置,第一組微發光二極體MLED與第二組微發光二極體MLED係交錯設置),並且第一組微發光二極體MLED與第二組微發光二極體MLED不具重複之微發光二極體。於一些實施例中,光纖陣列區塊FAB的光訊號測試元件210的數量至少須能涵蓋所有微發光二極體之數量,換言之,兩組微發光二極體的數量總和等於或小於光纖陣列區塊FAB的光訊號測試元件210的數量。As shown in FIG7A , the optical signal test components 210 are divided into two groups, where the circular dashed line represents the first group and the square dashed line represents the second group. The first group of optical signal test components 210 respectively corresponds to the first group of micro-luminescent diodes MLEDs, and the second group of optical signal test components 210 respectively corresponds to the second group of micro-luminescent diodes MLEDs. The first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED are arranged alternately (for example, as shown in FIG. 7A , the first group of micro-luminescent diodes MLED are arranged at intervals of three units in the vertical direction and the horizontal direction, and the second group of micro-luminescent diodes MLED are arranged at intervals of three units in the vertical direction and the horizontal direction, and the first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED are arranged alternately), and the first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED do not have repeated micro-luminescent diodes. In some embodiments, the number of optical signal test components 210 in the fiber array block FAB must at least cover the number of all micro-LEDs. In other words, the total number of two groups of micro-LEDs is equal to or less than the number of optical signal test components 210 in the fiber array block FAB.
於本實施例中,第一組的8個微發光二極體MLED於第一時間區間內點亮,光訊號測試元件210於第一時間區間內進行第一次量測,對對應的8個微發光二極體MLED進行收光,第二組的8個微發光二極體MLED於第二時間區間內點亮,光訊號測試元件210於第二時間區間內進行第二次量測,對對應的8個微發光二極體MLED進行收光。並且,在第一次量測及第二次量測的過程中,光纖陣列區塊FAB不需要重新和微發光二極體MLED重新定位,換言之,在第一時間區間以及第二時間區間內,光訊號感測裝置220的位置不變。In this embodiment, the eight micro-LEDs MLEDs of the first group are lit in the first time period, and the optical signal test component 210 performs the first measurement in the first time period, and collects the light from the corresponding eight micro-LEDs MLEDs. The eight micro-LEDs MLEDs of the second group are lit in the second time period, and the optical signal test component 210 performs the second measurement in the second time period, and collects the light from the corresponding eight micro-LEDs MLEDs. In addition, during the first measurement and the second measurement, the optical fiber array block FAB does not need to be repositioned with the micro-LEDs MLEDs. In other words, the position of the optical signal sensing device 220 remains unchanged in the first time period and the second time period.
須說明,前述間隔單位並非用以限制本發明之實施態樣,本領域具有通常知識者得依據實際需求,調整第一組微發光二極體MLED與第二組微發光二極體MLED係交錯設置之方式及間隔單位。It should be noted that the aforementioned spacing units are not intended to limit the implementation of the present invention. A person skilled in the art can adjust the staggered arrangement and spacing units of the first group of micro-luminescent diodes MLED and the second group of micro-luminescent diodes MLED according to actual needs.
再請參考圖7B所示,光纖陣列區塊FAB包含36個光訊號測試元件210,而在定位裝置230執行的一次的對齊中(例如圖7B對齊的位置),光纖陣列區塊FAB對齊36個微發光二極體MLED。LED的光源具有發光角度,也就是LED光線的散射角度,尤其微發光二極體MLED的晶粒更小、排列更密,鄰近的微發光二極體MLED同時發光的時候,彼此間會產生光線干擾而影響光訊號測試元件210接收單一微發光二極體MLED的光訊號。為了降低光線干擾的情形,微發光二極體MLED可間隔地分成兩組或更多組,不同組的微發光二極體MLED在不同的時間區間點亮,而光訊號測試元件210也相對應於微發光二極體MLED分成兩組或更多組。Referring to FIG. 7B , the fiber array block FAB includes 36 optical signal test components 210, and in one alignment performed by the positioning device 230 (e.g., the alignment position in FIG. 7B ), the fiber array block FAB aligns 36 micro-LEDs MLEDs. The LED light source has a light emission angle, that is, the scattering angle of the LED light. In particular, the micro-LEDs MLEDs have smaller grains and are more densely arranged. When adjacent micro-LEDs MLEDs emit light at the same time, light interference will be generated between them, which will affect the optical signal test component 210 receiving the light signal of a single micro-LED MLED. In order to reduce light interference, the micro-luminescent diodes MLED can be divided into two or more groups at intervals. Different groups of micro-luminescent diodes MLED are lit at different time intervals, and the optical signal test components 210 are also divided into two or more groups corresponding to the micro-luminescent diodes MLED.
如圖7B所示光訊號測試元件210分成以三組為例示,圓形虛線代表第一組,方形虛線代表第二組,三角形虛線代表第三組。第一組光訊號測試元件210分別對應於第一組的微發光二極體MLED,第二組光訊號測試元件210分別對應於第二組的微發光二極體MLED,第三組光訊號測試元件210分別對應於第三組的微發光二極體MLED。第一組微發光二極體MLED、第二組微發光二極體MLED以及第三組微發光二極體MLED係交錯設置(例如圖7B所繪示,第一組微發光二極體MLED於同一排或同一列間隔二單位設置,第二組微發光二極體MLED於同一排或同一列間隔二單位設置,第三組微發光二極體MLED於同一排或同一列間隔二單位設置),並且第一組微發光二極體MLED、第二組微發光二極體MLED與第三組微發光二極體MLED不具重複之微發光二極體。於一些實施例中,光纖陣列區塊FAB的光訊號測試元件210的數量至少須能涵蓋所有微發光二極體之數量,換言之,三組微發光二極體的數量總和等於或小於光纖陣列區塊FAB的光訊號測試元件210的數量。As shown in FIG. 7B , the optical signal test components 210 are divided into three groups for example, the circular dashed line represents the first group, the square dashed line represents the second group, and the triangular dashed line represents the third group. The first group of optical signal test components 210 respectively correspond to the first group of micro-luminescent diodes MLEDs, the second group of optical signal test components 210 respectively correspond to the second group of micro-luminescent diodes MLEDs, and the third group of optical signal test components 210 respectively correspond to the third group of micro-luminescent diodes MLEDs. The first group of micro-luminescent diodes MLED, the second group of micro-luminescent diodes MLED and the third group of micro-luminescent diodes MLED are arranged alternately (for example, as shown in Figure 7B, the first group of micro-luminescent diodes MLED are arranged in the same row or the same column with two units interval, the second group of micro-luminescent diodes MLED are arranged in the same row or the same column with two units interval, and the third group of micro-luminescent diodes MLED are arranged in the same row or the same column with two units interval), and the first group of micro-luminescent diodes MLED, the second group of micro-luminescent diodes MLED and the third group of micro-luminescent diodes MLED do not have repeated micro-luminescent diodes. In some embodiments, the number of optical signal test components 210 in the fiber array block FAB must at least cover the number of all micro-LEDs. In other words, the total number of three groups of micro-LEDs is equal to or less than the number of optical signal test components 210 in the fiber array block FAB.
於本實施例中,第一組的12個微發光二極體MLED於第一時間區間內點亮,光訊號測試元件210於第一時間區間內進行第一次量測,對對應的12個微發光二極體MLED進行收光,第二組的12個微發光二極體MLED於第二時間區間內點亮,光訊號測試元件210於第二時間區間內進行第二次量測,對對應的12個微發光二極體MLED進行收光,第三組的12個微發光二極體MLED於第三時間區間內點亮,光訊號測試元件210於第三時間區間內進行第三次量測,對對應的12個微發光二極體MLED進行收光。並且,在三次量測的過程中,光纖陣列區塊FAB不需要重新和微發光二極體MLED重新定位,換言之,在第一時間區間、第二時間區間以及第三時間區間內,光訊號感測裝置220的位置不變。In this embodiment, the 12 micro-luminescent diodes MLEDs of the first group are lit in a first time period, the optical signal test component 210 performs a first measurement in the first time period, and collects light from the corresponding 12 micro-luminescent diodes MLEDs; the 12 micro-luminescent diodes MLEDs of the second group are lit in a second time period, the optical signal test component 210 performs a second measurement in the second time period, and collects light from the corresponding 12 micro-luminescent diodes MLEDs; the 12 micro-luminescent diodes MLEDs of the third group are lit in a third time period, the optical signal test component 210 performs a third measurement in the third time period, and collects light from the corresponding 12 micro-luminescent diodes MLEDs. Furthermore, during the three measurement processes, the fiber array block FAB and the micro-luminescent diode MLED do not need to be repositioned. In other words, the position of the optical signal sensing device 220 remains unchanged during the first time period, the second time period, and the third time period.
在圖6A至圖7B所示的實施例中,因為電路距離或是設計者刻意為之的關係,一次對齊中,光纖陣列區塊FAB對齊的該些微發光二極體MLED在同一時間區間內的不同時點發出光訊號SP,而光纖陣列區塊FAB在該時段內傳遞多個不同時點發出光訊號SP。在另一些實施例中,該些微發光二極體MLED同時發出光訊號SP,光纖陣列區塊FAB同時傳遞該些光訊號SP。In the embodiments shown in FIG. 6A to FIG. 7B , due to the circuit distance or the intentional intention of the designer, in one alignment, the micro-LEDs MLED aligned by the fiber array block FAB emit light signals SP at different time points in the same time period, and the fiber array block FAB transmits multiple light signals SP emitted at different time points in the time period. In other embodiments, the micro-LEDs MLED emit light signals SP at the same time, and the fiber array block FAB transmits the light signals SP at the same time.
參考圖8,其係本揭露一些實施例之光訊號量測方法800之流程圖。在一些實施例中,量測方法800利用一光訊號處理裝置(例如前述實施例之光訊號處理裝置)來實施,光訊號處理裝置包含複數光訊號測試元件以及一光訊號感測裝置,光訊號處理裝置用以測試一微發光二極體陣列的光訊號,微發光二極體陣列分為複數個測試區塊,每一測試區塊包含複數個微發光二極體,光訊號處理裝置一次測試單一測試區塊。詳細步驟說明如下。Referring to FIG. 8 , it is a flow chart of an optical signal measurement method 800 of some embodiments of the present disclosure. In some embodiments, the measurement method 800 is implemented using an optical signal processing device (e.g., the optical signal processing device of the aforementioned embodiment), the optical signal processing device includes a plurality of optical signal test elements and an optical signal sensing device, the optical signal processing device is used to test an optical signal of a micro-LED array, the micro-LED array is divided into a plurality of test blocks, each test block includes a plurality of micro-LEDs, and the optical signal processing device tests a single test block at a time. The detailed steps are described as follows.
具體而言,執行步驟S801,將複數光訊號測試元件對齊一晶圓上之一選定測試區塊的複數微發光二極體。其中,複數微發光二極體包含複數第一發光二極體以及複數第二發光二極體。執行步驟S802,複數光訊號測試元件傳遞複數第一微發光二極體在一第一時間區間內發出之複數第一光訊號。其中,一個光訊號測試元件傳遞一個第一微發光二極體發出的光訊號。執行步驟S803,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第一光訊號,並根據複數第一光訊號產生複數第一感測訊號。Specifically, step S801 is performed to align a plurality of optical signal test components with a plurality of micro-LEDs in a selected test area on a wafer. The plurality of micro-LEDs include a plurality of first LEDs and a plurality of second LEDs. Step S802 is performed to transmit a plurality of first optical signals emitted by a plurality of first micro-LEDs within a first time period by the plurality of optical signal test components. One optical signal test component transmits an optical signal emitted by a first micro-LED. Step S803 is performed to sense the plurality of first optical signals transmitted by the plurality of optical signal test components by the optical signal sensing device, and generate a plurality of first sensing signals based on the plurality of first optical signals.
執行步驟S804,複數光訊號測試元件傳遞複數第二微發光二極體在一第二時間區間內發出之複數第二光訊號。其中,一個光訊號測試元件傳遞一個第二微發光二極體發出的第二光訊號。執行步驟S805,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第二光訊號,並根據複數第二光訊號產生複數第二感測訊號。Execute step S804, the plurality of optical signal test components transmit the plurality of second optical signals emitted by the plurality of second micro-LEDs in a second time period. Among them, one optical signal test component transmits the second optical signal emitted by one second micro-LED. Execute step S805, the optical signal sensing device senses the plurality of second optical signals transmitted by the plurality of optical signal test components, and generates a plurality of second sensing signals according to the plurality of second optical signals.
於一些實施例中,步驟S802執行完畢後無需移動晶圓或光訊號處理裝置,即在第一時間區間以及第二時間區間內,複數光訊號測試元件的位置不變。於一些實施例中,複數第一微發光二極體及複數第二微發光二極體中的每一個微發光二極體,分別對應一個光訊號測試元件,且每一個光訊號測試元件分別傳遞一個對應的微發光二極體發出的光訊號。於一些實施例中,複數第一微發光二極體與複數第二微發光二極體係交錯地設置於晶圓上。於一些實施例中,第一時間區間與第二時間區間互不交疊。於一些實施例中,每一個光訊號測試元件對應的微發光二極體不重複。In some embodiments, after step S802 is completed, there is no need to move the wafer or the optical signal processing device, that is, the positions of the plurality of optical signal test components remain unchanged during the first time interval and the second time interval. In some embodiments, each of the plurality of first micro-LEDs and the plurality of second micro-LEDs corresponds to a light signal test component, and each light signal test component transmits a light signal emitted by a corresponding micro-LED. In some embodiments, the plurality of first micro-LEDs and the plurality of second micro-LEDs are arranged on the wafer in an alternating manner. In some embodiments, the first time interval and the second time interval do not overlap. In some embodiments, each optical signal test element corresponds to a non-repetitive micro-LED.
參考圖9,其係本揭露一些實施例之光訊號量測方法900之流程圖。在一些實施例中,量測方法900利用一光訊號處理裝置(例如前述實施例之光訊號處理裝置)來實施,光訊號處理裝置包含複數光訊號測試元件以及一光訊號感測裝置,光訊號處理裝置用以測試一微發光二極體陣列的光訊號,微發光二極體陣列分為複數個測試區塊,每一測試區塊包含複數個微發光二極體,光訊號處理裝置一次測試單一測試區塊。詳細步驟說明如下。Referring to FIG. 9 , it is a flow chart of an optical signal measurement method 900 of some embodiments of the present disclosure. In some embodiments, the measurement method 900 is implemented using an optical signal processing device (e.g., the optical signal processing device of the aforementioned embodiment), the optical signal processing device includes a plurality of optical signal test elements and an optical signal sensing device, the optical signal processing device is used to test an optical signal of a micro-LED array, the micro-LED array is divided into a plurality of test blocks, each test block includes a plurality of micro-LEDs, and the optical signal processing device tests a single test block at a time. The detailed steps are described as follows.
具體而言,執行步驟S901,將複數光訊號測試元件對齊一晶圓上之一選定測試區塊的複數微發光二極體。其中,複數微發光二極體包含複數第一發光二極體、複數第二發光二極體以及複數第三發光二極體。執行步驟S902,複數光訊號測試元件傳遞複數第一微發光二極體在一第一時間區間內發出之複數第一光訊號。其中,一個光訊號測試元件傳遞一個第一微發光二極體發出的第一光訊號。執行步驟S903,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第一光訊號,並根據複數第一光訊號產生複數第一感測訊號。Specifically, step S901 is performed to align a plurality of optical signal test components with a plurality of micro-LEDs in a selected test area on a wafer. The plurality of micro-LEDs include a plurality of first LEDs, a plurality of second LEDs, and a plurality of third LEDs. Step S902 is performed to transmit a plurality of first optical signals emitted by the plurality of first micro-LEDs in a first time interval. One optical signal test component transmits a first optical signal emitted by a first micro-LED. In step S903, the optical signal sensing device senses a plurality of first optical signals transmitted by a plurality of optical signal test elements, and generates a plurality of first sensing signals according to the plurality of first optical signals.
執行步驟S904,複數光訊號測試元件傳遞選定測試區塊的複數第二微發光二極體在一第二時間區間內發出之複數第二光訊號。其中,一個光訊號測試元件傳遞一個第二微發光二極體發出的第二光訊號。執行步驟S905,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第二光訊號,並根據複數第二光訊號產生複數第二感測訊號。Execute step S904, the plurality of optical signal test components transmit the plurality of second optical signals emitted by the plurality of second micro-LEDs in the selected test block within a second time period. Among them, one optical signal test component transmits the second optical signal emitted by one second micro-LED. Execute step S905, the optical signal sensing device senses the plurality of second optical signals transmitted by the plurality of optical signal test components, and generates a plurality of second sensing signals according to the plurality of second optical signals.
執行步驟S906,複數光訊號測試元件傳遞複數第三微發光二極體在一第三時間區間內發出之複數第三光訊號。其中,一個光訊號測試元件傳遞一個第三微發光二極體發出的光訊號。執行步驟S907,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第三光訊號,並根據複數第三光訊號產生複數第三感測訊號。Execute step S906, the plurality of optical signal test components transmit the plurality of third optical signals emitted by the plurality of third micro-LEDs in a third time period. Among them, one optical signal test component transmits the optical signal emitted by one third micro-LED. Execute step S907, the optical signal sensing device senses the plurality of third optical signals transmitted by the plurality of optical signal test components, and generates a plurality of third sensing signals according to the plurality of third optical signals.
於一些實施例中,步驟S902、S904執行完畢後無需移動晶圓或光訊號處理裝置,即在第一時間區間、第二時間區間及第三時間區間內,複數光訊號測試元件的位置不變。於一些實施例中,複數第一微發光二極體、複數第二微發光二極體以及複數第三微發光二極體係交錯地設置於晶圓上。於一些實施例中,第一時間區間、第二時間區間以及第三時間區間互不交疊。於一些實施例中,每一個光訊號測試元件對應的微發光二極體不重複。In some embodiments, after steps S902 and S904 are completed, there is no need to move the wafer or the optical signal processing device, that is, the positions of the plurality of optical signal test components remain unchanged during the first time period, the second time period, and the third time period. In some embodiments, the plurality of first micro-luminescent diodes, the plurality of second micro-luminescent diodes, and the plurality of third micro-luminescent diodes are arranged on the wafer in an alternating manner. In some embodiments, the first time period, the second time period, and the third time period do not overlap. In some embodiments, the micro-luminescent diodes corresponding to each optical signal test component are not repeated.
參考圖10,其係本揭露一些實施例之光訊號量測方法1000之流程圖。在一些實施例中,量測方法1000利用一光訊號處理裝置(例如前述實施例之光訊號處理裝置)來實施,光訊號處理裝置包含複數光訊號測試元件以及一光訊號感測裝置,詳細步驟說明如下。Referring to FIG. 10 , it is a flow chart of an optical signal measurement method 1000 of some embodiments of the present disclosure. In some embodiments, the measurement method 1000 is implemented using an optical signal processing device (such as the optical signal processing device of the aforementioned embodiment), and the optical signal processing device includes a plurality of optical signal test elements and an optical signal sensing device. The detailed steps are described as follows.
具體而言,執行步驟S1001,將複數光訊號測試元件對齊一晶圓上之一選定測試區塊的複數第一微發光二極體。執行步驟S1002,複數光訊號測試元件傳遞複數第一微發光二極體在一第一時間區間內發出之複數第一光訊號。其中,一個光訊號測試元件傳遞一個第一微發光二極體發出的光訊號。執行步驟S1003,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第一光訊號,並根據複數第一光訊號產生複數第一感測訊號。Specifically, step S1001 is performed to align a plurality of optical signal test components with a plurality of first micro-luminescent diodes in a selected test area on a wafer. Step S1002 is performed to transmit a plurality of first optical signals emitted by a plurality of first micro-luminescent diodes in a first time period by the plurality of optical signal test components. Among them, one optical signal test component transmits an optical signal emitted by a first micro-luminescent diode. Step S1003 is performed to sense the plurality of first optical signals transmitted by the plurality of optical signal test components by the optical signal sensing device, and generate a plurality of first sensing signals according to the plurality of first optical signals.
執行步驟S1004,將複數光訊號測試元件對齊晶圓上之另一選定測試區塊的複數第二微發光二極體。執行步驟S1005,複數光訊號測試元件傳遞複數第二微發光二極體在一第二時間區間內發出之複數第二光訊號。其中,一個光訊號測試元件傳遞一個第二微發光二極體發出的光訊號。執行步驟S1006,光訊號感測裝置感測複數光訊號測試元件傳遞之複數第二光訊號,並根據複數第二光訊號產生複數第二感測訊號。Execute step S1004, align the plurality of optical signal test components with the plurality of second micro-luminescent diodes of another selected test block on the wafer. Execute step S1005, the plurality of optical signal test components transmit the plurality of second optical signals emitted by the plurality of second micro-luminescent diodes in a second time interval. Among them, one optical signal test component transmits the optical signal emitted by one second micro-luminescent diode. Execute step S1006, the optical signal sensing device senses the plurality of second optical signals transmitted by the plurality of optical signal test components, and generates a plurality of second sensing signals according to the plurality of second optical signals.
於一些實施例中,前述對齊方式主要係透過移動晶圓之方式完成。舉例而言,步驟S1001中,主要係移動晶圓以將複數光訊號測試元件對齊晶圓上之複數第一微發光二極體;步驟S1004中,主要係移動晶圓以將複數光訊號測試元件對齊晶圓上之複數第二微發光二極體。In some embodiments, the alignment is mainly accomplished by moving the wafer. For example, in step S1001, the wafer is mainly moved to align the plurality of optical signal test components with the plurality of first micro-luminescent diodes on the wafer; in step S1004, the wafer is mainly moved to align the plurality of optical signal test components with the plurality of second micro-luminescent diodes on the wafer.
在一些先前技術中,發光元件因其尺寸隨著需求不斷的縮小(例如微發光二極體),造成測試單位面積的發光元件所需的時間大幅上升。透過前述本揭露之光訊號處理裝置,利用光訊號測試元件傳遞微發光二極體的光訊號,使其可在一次的測試中直接量測多個微發光二極體,增加量測的效率。更進一步來說,本揭露之光訊號測試元件利用光纖來接收光訊號,因光纖的尺寸可匹配微發光二極體的尺寸與間距,使得可在光訊號測試元件中設置多個光纖。而一個光纖對應一個微發光二極體,所以當光纖數量提高時,測量的效率亦提高。再者,若微發光二極體發光的發散角度大,在擷取光訊號時必須盡量靠近微發光二極體以避免光訊號處理裝置佔用太多空間。而光纖的尺寸小,正好可以貼近微發光二極體,並將光訊號完全接收,提高測量的精確度以及減少光訊號處理裝置的體積。In some prior arts, as the size of light-emitting elements continues to shrink as demand increases (e.g., micro-LEDs), the time required to test a unit area of light-emitting elements increases significantly. By using the aforementioned optical signal processing device disclosed herein, the optical signal test element is used to transmit the optical signal of the micro-LED, so that multiple micro-LEDs can be directly measured in one test, thereby increasing the efficiency of the measurement. Furthermore, the optical signal test element disclosed herein uses optical fibers to receive optical signals. Since the size of the optical fibers can match the size and spacing of the micro-LEDs, multiple optical fibers can be arranged in the optical signal test element. One optical fiber corresponds to one micro-LED, so when the number of optical fibers increases, the efficiency of the measurement also increases. Furthermore, if the divergence angle of the light emitted by the micro-LED is large, the light signal must be captured as close to the micro-LED as possible to avoid the optical signal processing device taking up too much space. The small size of the optical fiber can be close to the micro-LED and fully receive the light signal, thereby improving the measurement accuracy and reducing the size of the optical signal processing device.
雖然已詳述本揭露及其優點,然而應理解可進行各種變化、取代與替代而不脫離申請專利範圍所定義之本揭露的精神與範圍。例如,可用不同的方法實施上述的許多製程,並且以其他製程或其組合替代上述的許多製程。Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and replacements can be made without departing from the spirit and scope of the present disclosure as defined by the scope of the patent application. For example, many of the above processes can be implemented in different ways, and other processes or combinations thereof can be used to replace many of the above processes.
再者,本申請案的範圍並不受限於說明書中所述之製程、機械、製造、物質組成物、手段、方法與步驟之特定實施例。該技藝之技術人士可自本揭露的揭示內容理解可根據本揭露而使用與本文所述之對應實施例具有相同功能或是達到實質上相同結果之現存或是未來發展之製程、機械、製造、物質組成物、手段、方法、或步驟。據此,此等製程、機械、製造、物質組成物、手段、方法、或步驟係包括於本申請案之申請專利範圍內。Furthermore, the scope of this application is not limited to the specific embodiments of the processes, machines, manufactures, material compositions, means, methods, and steps described in the specification. A person skilled in the art can understand from the disclosure of this disclosure that existing or future developed processes, machines, manufactures, material compositions, means, methods, or steps that have the same functions or achieve substantially the same results as the corresponding embodiments described herein can be used according to this disclosure. Accordingly, such processes, machines, manufactures, material compositions, means, methods, or steps are included in the scope of the patent application of this application.
10:光訊號處理裝置 20:光訊號處理裝置 30:光訊號處理裝置 110:光訊號測試元件 120:光訊號感測裝置 210:光訊號測試元件 210A:平面 210B:凹面 210C:凸面 220:光訊號感測裝置 230:定位裝置 240:探針 245:探針卡 310:光訊號測試元件 311:光引導單元 311A:平面 311B:凹面 311C:凸面 312:探針 320:光訊號感測裝置 330:定位裝置 800:光訊號量測方法 900:光訊號量測方法 1000:光訊號量測方法 B1:測試區塊 B2:測試區塊 B3:測試區塊 B4:測試區塊 C1:交點 C2:交點 C3:交點 C4:交點 D1:距離 D2:距離 D3:距離 D4:距離 D5:距離 D6:距離 FAB:光纖陣列區塊 MLED:微發光二極體 R1:半徑 R2:半徑 R3:半徑 R4:半徑 R5:半徑 R6:半徑 S1:第一表面 S1001:步驟 S1002:步驟 S1003:步驟 S1004:步驟 S1005:步驟 S1006:步驟 S2:第二表面 S801:步驟 S802:步驟 S803:步驟 S804:步驟 S805:步驟 S901:步驟 S902:步驟 S903:步驟 S904:步驟 S905:步驟 S906:步驟 S907:步驟 SC:控制訊號 SP:光訊號 SS:感測訊號 θ1:發散角度 θ2:發散角度 θ3:發散角度 θ4:發散角度 θ5:發散角度 θ6:發散角度 10: Optical signal processing device 20: Optical signal processing device 30: Optical signal processing device 110: Optical signal test element 120: Optical signal sensing device 210: Optical signal test element 210A: Plane 210B: Concave surface 210C: Convex surface 220: Optical signal sensing device 230: Positioning device 240: Probe 245: Probe card 310: Optical signal test element 311: Light guiding unit 311A: Plane 311B: Concave surface 311C: Convex surface 312: Probe 320: Optical signal sensing device 330: Positioning device 800: Optical signal measurement method 900: Optical signal measurement method 1000: Optical signal measurement method B1: Test block B2: Test block B3: Test block B4: Test block C1: Intersection C2: Intersection C3: Intersection C4: Intersection D1: Distance D2: Distance D3: Distance D4: Distance D5: Distance D6: Distance FAB: Fiber Array Block MLED: Micro-LED R1: Radius R2: Radius R3: Radius R4: Radius R5: Radius R6: Radius S1: First surface S1001: Step S1002: Step S1003: Step S1004: step S1005: step S1006: step S2: second surface S801: step S802: step S803: step S804: step S805: step S901: step S902: step S903: step S904: step S905: step S906: step S907: step SC: control signal SP: light signal SS: sensing signal θ1: divergence angle θ2: divergence angle θ3: divergence angle θ4: divergence angle θ5: divergence angle θ6: divergence angle
參閱實施方式與申請專利範圍合併考量圖式時,可得以更全面了解本申請案之揭示內容,圖式中相同的元件符號係指相同的元件。 圖1例示本揭露一些實施例之光訊號處理裝置之示意圖。 圖2例示本揭露一些實施例之光訊號處理裝置之示意圖。 圖3例示本揭露一些實施例之光訊號處理裝置之示意圖。 圖4A例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖4B例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖4C例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖5A例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖5B例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖5C例示本揭露一些實施例之光引導單元之結構與操作示意圖。 圖6A例示本揭露一些實施例之光纖陣列區塊與晶圓之操作示意圖。 圖6B例示本揭露一些實施例之光纖陣列區塊與晶圓之操作示意圖。 圖6C例示本揭露一些實施例之光纖陣列區塊與晶圓之操作示意圖。 圖7A例示本揭露一些實施例之光纖陣列區塊與晶圓之操作示意圖。 圖7B例示本揭露一些實施例之光纖陣列區塊與晶圓之操作示意圖。 圖8例示本揭露一些實施例之量測方法之流程圖。 圖9例示本揭露一些實施例之量測方法之流程圖。 圖10例示本揭露一些實施例之量測方法之流程圖。 When referring to the embodiments and the scope of the patent application together with the drawings, a more comprehensive understanding of the disclosure of the present application can be obtained. The same element symbols in the drawings refer to the same elements. FIG. 1 illustrates a schematic diagram of an optical signal processing device of some embodiments of the present disclosure. FIG. 2 illustrates a schematic diagram of an optical signal processing device of some embodiments of the present disclosure. FIG. 3 illustrates a schematic diagram of an optical signal processing device of some embodiments of the present disclosure. FIG. 4A illustrates a schematic diagram of the structure and operation of a light guiding unit of some embodiments of the present disclosure. FIG. 4B illustrates a schematic diagram of the structure and operation of a light guiding unit of some embodiments of the present disclosure. FIG. 4C illustrates a schematic diagram of the structure and operation of a light guiding unit of some embodiments of the present disclosure. FIG. 5A illustrates a schematic diagram of the structure and operation of a light guiding unit of some embodiments of the present disclosure. FIG. 5B illustrates a schematic diagram of the structure and operation of the light guiding unit of some embodiments of the present disclosure. FIG. 5C illustrates a schematic diagram of the structure and operation of the light guiding unit of some embodiments of the present disclosure. FIG. 6A illustrates an operation schematic diagram of the optical fiber array block and the wafer of some embodiments of the present disclosure. FIG. 6B illustrates an operation schematic diagram of the optical fiber array block and the wafer of some embodiments of the present disclosure. FIG. 6C illustrates an operation schematic diagram of the optical fiber array block and the wafer of some embodiments of the present disclosure. FIG. 7A illustrates an operation schematic diagram of the optical fiber array block and the wafer of some embodiments of the present disclosure. FIG. 7B illustrates an operation schematic diagram of the optical fiber array block and the wafer of some embodiments of the present disclosure. FIG. 8 illustrates a flow chart of the measurement method of some embodiments of the present disclosure. FIG. 9 illustrates a flow chart of a measurement method of some embodiments of the present disclosure. FIG. 10 illustrates a flow chart of a measurement method of some embodiments of the present disclosure.
10:光訊號處理裝置 10: Optical signal processing device
110:光訊號測試元件 110: Optical signal test components
120:光訊號感測裝置 120: Optical signal sensing device
MLED:微發光二極體 MLED: Micro-luminescent diode
SP:光訊號 SP: Optical signal
SS:感測訊號 SS: Sensing signal
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| TW201743045A (en) * | 2016-06-01 | 2017-12-16 | 致茂電子股份有限公司 | Testing device and testing method |
| TW201909300A (en) * | 2017-07-12 | 2019-03-01 | 美商菲絲博克科技有限公司 | Substrate for mounting light emitting diodes with testing capabilities and testing method thereof and computer readable medium |
| US20190172964A1 (en) * | 2016-07-29 | 2019-06-06 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
| TW202135184A (en) * | 2020-03-03 | 2021-09-16 | 台灣積體電路製造股份有限公司 | Structure and method for testing semiconductor devices |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TW201743045A (en) * | 2016-06-01 | 2017-12-16 | 致茂電子股份有限公司 | Testing device and testing method |
| US20190172964A1 (en) * | 2016-07-29 | 2019-06-06 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
| TW201909300A (en) * | 2017-07-12 | 2019-03-01 | 美商菲絲博克科技有限公司 | Substrate for mounting light emitting diodes with testing capabilities and testing method thereof and computer readable medium |
| TW202135184A (en) * | 2020-03-03 | 2021-09-16 | 台灣積體電路製造股份有限公司 | Structure and method for testing semiconductor devices |
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