TWI848449B - Probe card - Google Patents

Abstract

The probe card according to various embodiments of the present invention includes: a probe electrically connected to a test object and a printed circuit board; and a guide portion, on which the probe is disposed, the probe including: a main body portion including a plurality of main body openings; a first extension portion extending from one side end of the main body portion in a lateral direction; a second extension portion extending from another side end of the main body portion in another lateral direction; a third extension portion spaced apart from the first extension portion, extending from one side end of the main body portion in a lateral direction, at least a portion of which is disposed on the guide portion; and a base portion extending from the main body portion in a second direction.

Description

Probe Card

Various embodiments of the present invention relate to a probe card.

A probe card is an interface that electrically connects the tester and the DUT in electrical die sorting (EDS) to test the DUT's electrical characteristics. The probe card includes probes that directly contact the DUT's pads (e.g., terminals for external signals) to send and receive electrical signals.

In order to detect the electrical characteristics of the object to be tested, a slit layout probe card and a MEMS binding probe card are used. In a slit layout probe card, the probe is arranged in a slit guide direction that can guide the position of the probe. The slit layout probe card has the advantage of being easy to replace the probe even if it is damaged. The MEMS binding probe card is a probe manufactured by a MEMS process and fixed by laser binding. The MEMS binding probe card has the advantage of a long pressing length of the probe.

Technical issues

The probe card of the slot arrangement method can be replaced when the probe is damaged, but it has the disadvantage that the pressing distance of the probe is short. If the pressing distance of the probe is short, the probe and the object to be measured may have poor contact.

The MEMS-binding probe card has a long pressing distance and less contact failure between the probe and the object under test. However, it has the disadvantage of being difficult to repair the probe when it is damaged. For example, when repairing the probe in the MEMS-binding probe card, it is necessary to scrape out the solder and align the flatness of the pad to which the probe is bound, and in order to place the probe, the laser binding process may be required again.

The probe card according to various embodiments of the present invention can provide a probe card that can easily maintain the probe while increasing the pressing distance.

Technical solutions

The probe card according to various embodiments of the present invention includes: a probe electrically connected to a test object and a printed circuit board; and a guide portion, on which the probe is disposed, the probe including: a main body portion including a plurality of main body openings; a first extension portion extending from one side end of the main body portion in a lateral direction; a first contact portion extending from one end of the first extension portion in a first direction and including a first needle tip contacting the test object; a second extension portion extending from the other side end of the main body portion in another lateral direction; a second contact portion extending from one end of the second extension portion in a second direction and including a second needle tip contacting the printed circuit board; A third extension portion is separated from the first extension portion and extends in a lateral direction at one side end of the main portion, at least a portion of which is arranged on the guide portion; and a base portion is extended from the main portion in a second direction, the guide portion comprising: a first guide, located in a lateral direction of the main portion, comprising a first guide groove arranged with the third extension portion; and a second guide, located in the other lateral direction of the main portion, comprising a second guide groove arranged with the second extension portion, when an external force is applied to the first contact portion, the first extension portion is elastically bent, and the first contact portion can move in the first direction or the second direction.

Invention Effect

The probe card according to various embodiments of the present invention includes an extension portion of the probe that is not disposed on the guide portion and is elastically bent, thereby being able to increase the pressing distance of the probe.

According to the probe card of various embodiments of the present invention, the probe can be fixed by disposing at least a portion of the probe in the guide groove of the guide portion, so that when the probe is damaged, it is easy to repair.

FIG. 1a is a perspective view showing a probe card 10 according to the prior art.

FIG. 1b is a diagram showing the first contact portion 110 of the probe card 10 according to the prior art illustrated in FIG. 1a.

1 a , a probe card 10 according to the prior art may include a probe 100 and a guide portion 200 .

When describing the probe card 10 according to the prior art, the first direction may refer to the positive z-axis direction, the second direction may refer to the negative z-axis direction, the third direction may refer to the positive x-axis direction, and the fourth direction may refer to the negative x-axis direction.

1a, a probe 100 according to the prior art may include a first contact portion 110 and a second contact portion 120. The probe 100 may contact a test object (e.g., a contact pad (not shown) of a display panel (not shown)) at the first contact portion 110, and may contact a printed circuit board (not shown) at the second contact portion 120.

1a, a probe 100 according to the prior art may be disposed on a guide portion 200. The guide portion 200 may include a guide groove 210 in which the probe 100 may be disposed. The guide portion 200 may include a plurality of guide grooves 210. The probe 100 may be disposed in the guide groove 210 of the guide portion 200.

1a, the guide groove 210 of the guide portion 200 according to the prior art may have a depth of a first length L1. The probe 100 according to the prior art may have a width of a second length L2. When the probe 100 according to the prior art is disposed in the guide groove 210, the first contact portion 110 of the probe 100 may move in a second direction (e.g., negative z-axis direction) to remove a length of a second length L2 from the first length L1.

Referring to FIG. 1b , when the first contact portion 110 of the probe 100 moves in the second direction (e.g., the negative z-axis direction), the probe 100 may contact the lower end portion 230 of the guide groove 210, thereby damaging the probe 100. In order to prevent the probe 100 from contacting the lower end portion 230 of the groove, the probe card 10 according to the prior art can keep the separation distance L3 between the probe 100 and the lower end portion 230 of the groove at a distance greater than a preset distance.

When the first contact portion 110 of the probe 100 moves in the second direction (e.g., the negative z-axis direction), the guide upper end portion 220 may directly contact the object to be tested (not shown). If the object to be tested (not shown) directly contacts the guide upper end portion 220, the object to be tested (not shown) may be damaged. Therefore, the first contact portion 110 may not move in the second direction (e.g., the negative z-axis direction) more than a preset distance.

The first needle tip 111 of the probe 100 may repeatedly contact the object to be tested (not shown), thereby causing wear. When the first needle tip 111 is worn, the distance that the first contact portion 110 can move in the second direction (eg, the negative z-axis direction) may be smaller.

According to the prior art probe card 10, the probe 100 is arranged on the guide groove 210, thereby limiting the movable distance of the first contact portion 110 in the second direction (e.g., negative z-axis direction). For example, the first contact portion 110 can only move a distance equal to the depth of the guide groove 210 (e.g., first length L1) minus the width of the probe 100 (e.g., second length L2), and the separation distance between the groove bottom end 230 and the probe 100 (e.g., third length L3) needs to be greater than a predetermined distance. The first contact portion 110 can only move a distance that the guide top end 220 and the object to be tested (not shown) may not directly contact each other, so it is difficult to form a longer movable distance of the first contact portion 110.

FIG. 2a is a diagram showing a detection block 40 configured to detect the first display panel D1.

FIG. 2b is a diagram showing a detection block 40 configured to detect the second display panel D2.

2a and 2b, the detection unit 50 may refer to a detection device connected to a plurality of detection blocks 40.

The probe block 40 according to various embodiments of the present invention may be used for electrical characteristics testing (EDS: electrical die sorting) of a test object (not shown). In various embodiments, the test object (not shown) that is the object of electrical characteristics testing may be the first display panel D1 or the second display panel D2.

The probe block 40 may include a plurality of probe cards 30 (see FIG. 3 ). For example, the probe block 40 may include a plurality of probe cards 30 (see FIG. 3 ), thereby including a plurality of probes 300 (see FIG. 3 ).

Each of the plurality of probes 300 (see FIG. 3 ) included in the probe block 40 can contact a contact pad (not shown) of the first display panel D1 or the second display panel D2 at one end of the probe 300 (see FIG. 3 ) to be electrically connected. Each of the plurality of probes 300 (see FIG. 3 ) can contact a printed circuit board (not shown) included in the test equipment (not shown) at the other end of the probe 300 (see FIG. 3 ) to be electrically connected.

The first display panel D1 shown in Fig. 2a may be a display panel used in a large television. The first display panel D1 may include contact pads (not shown) at the edge of the first display panel D1 (eg, one of the four sides of the first display panel D1).

2a, a plurality of detection blocks 40 and detection units 50 connected to the plurality of detection blocks 40 may be disposed on the sides of the first display panel D1. For example, when the first display panel D1 is formed in a rectangular shape, a plurality of detection blocks 40 and detection units 50 connected to the plurality of detection blocks 40 may be disposed on each side of the four sides of the rectangle.

The second display panel D2 shown in FIG. 2b may be a display panel used in a mobile phone or a laptop. The second display panel D2 may include a plurality of cell panels D21. Each of the plurality of cell panels D21 may include a contact pad (not shown). The detection block 40 may contact the contact pad (not shown) of the cell panel D21 to be electrically connected.

The position of the second display panel D2 can be moved, and the second display panel D2 can be moved to complete the contact between each unit cell panel D21 and the detection block 40.

FIG. 3 is a diagram showing a probe card 30 according to various embodiments of the present invention.

When describing the probe card 30 according to various embodiments of the present invention, the first direction may refer to the positive z-axis direction, the second direction may refer to the negative z-axis direction, the third direction may refer to the positive x-axis direction, and the fourth direction may refer to the negative x-axis direction.

3 , a probe card 30 according to various embodiments of the present invention may include a probe 300 and a guide portion 400 .

The probe 300 according to various embodiments of the present invention may include a main body 310, a first extension portion 320, a first contact portion 330, a second extension portion 340, a second contact portion 350, a third extension portion 360 and/or a base portion 370.

According to various embodiments, the main body 310 may be connected to the first extension portion 320 and the third extension portion 360 on one side (e.g., the negative x-axis side based on the main body 310), and connected to the second extension portion 340 on the other side (e.g., the positive x-axis side based on the main body 310). The main body 310 may be connected to the base portion 370 in the second direction (e.g., the negative z-axis direction).

According to various embodiments, the body portion 310 may include a plurality of body portion openings 311. The body portion openings 311 may be formed in a circular or elliptical shape, but are not limited thereto and may have various shapes.

According to various embodiments, the first extension portion 320 may be formed by extending in a lateral direction from one side end of the main body portion 310. The first extension portion 320 may be connected to the first contact portion 330 at one end and connected to the main body portion 310 at the other end.

The first extension portion 320 may include a plurality of elastic openings 321, 322. The plurality of elastic openings 321, 322 may provide elasticity to the probe 300 so that the first contact portion 330 may move in position. For example, when an external force is applied to the first contact portion 330 of the probe 300, the first extension portion 320 including the plurality of elastic openings 321, 322 is elastically bent, and the position of the first contact portion 330 may move in a first direction (e.g., a positive z-axis direction) or a second direction (e.g., a negative z-axis direction).

The elastic openings 321 and 322 may include a first elastic opening 321 and a second elastic opening 322 . The second elastic openings 322 may be spaced apart and located in a second direction (eg, negative z-axis direction) of the first elastic opening 321 . The first extension portion 320 may include a plurality of second elastic openings 322 .

The first elastic opening 321 and the second elastic opening 322 may be openings formed in the length direction of the first extension portion 320. The first elastic opening 321 and the second elastic opening 322 may be formed in a shape at least partially bent along the length direction of the first extension portion 320. The width of the second elastic opening 322 (for example, the length in a direction perpendicular to the length direction of the first extension portion 320) may be formed to be smaller than the width of the first elastic opening 321.

According to various embodiments, the first contact portion 330 may be formed at one end of the first extension portion 320. The first contact portion 330 may include a first needle tip 331 and/or a contact portion opening 332. The first contact portion 330 may extend from one end of the first extension portion 320 in the first direction (positive z-axis direction).

The probe 300 can be in contact with the object to be tested (not shown) at the first needle tip 331, thereby being electrically connected. The first contact portion 330 can include a first needle tip 331 capable of contacting the object to be tested (not shown). The first needle tip 331 can be located at one end of the first contact portion 330 (for example: an end located in the positive z-axis direction in the first contact portion 330). For example, the object to be tested (not shown) can be a display panel (not shown), and the first needle tip 331 can be in contact with a contact pad (not shown) of the display panel (not shown), thereby being electrically connected.

The first contact portion 330 may include a contact portion opening 332 at least in a portion. The contact portion opening 332 may be an opening having a length in a first direction (eg, a positive z-axis direction). When the first contact portion 330 moves in the first direction or the second direction, the contact portion opening 332 may provide elasticity.

According to various embodiments, the second extension portion 340 may be formed by extending from the other side end of the main body portion 310 to the other side direction (e.g., the positive x-axis direction). The second extension portion 340 may be formed to have a predetermined length and extend in the length direction (e.g., the positive x-axis direction). The width direction length of the second extension portion 340 (e.g., the positive z-axis direction length of the second extension portion 340) may be formed to be smaller than the length direction length of the second extension portion 340. The width direction length of the second extension portion 340 may be formed to gradually decrease from the second extension portion 340 to the third direction (e.g., the positive x-axis direction).

At least a portion of the second extension portion 340 may be disposed on the guide portion 400. The second extension portion 340 may be disposed on the second guide 420 of the guide portion 400 to fix the position of the probe 300.

The second contact portion 350 may be formed at one end of the second extension portion 340. For example, the second contact portion 350 may be formed by extending from one end of the second extension portion 340 toward the second direction (eg, the negative z-axis direction).

3 , the second contact portion 350 may include at least a portion of a second needle tip 351 capable of contacting the printed circuit board P. The second needle tip 351 may be located at one end of the second contact portion 350 (e.g., at the end of the second contact portion 350 located in the negative z-axis direction). The probe 300 may contact the printed circuit board P at the second needle tip 351, thereby electrically connecting.

According to various embodiments, the third extension portion 360 may be formed by extending in a lateral direction from a side end of the main body portion 310. The third extension portion 360 may be formed to have a predetermined length and extend in a longitudinal direction (e.g., a negative x-axis direction). The width direction length of the third extension portion 360 (e.g., the positive z-axis direction length of the third extension portion 360) may be formed to be smaller than the length direction length of the third extension portion 360.

The third extension portion 360 may be disposed to be spaced apart from the first extension portion 320. For example, referring to FIG3 , the third extension portion 360 may be spaced apart from the first extension portion 320 in the second direction (eg, the negative z-axis direction).

At least a portion of the third extension portion 360 may be disposed on the guide portion 400. At least a portion of the third extension portion 360 may be disposed in the first guide groove 411 of the first guide 410. At least a portion of the third extension portion 360 may be disposed in the first guide groove 411, thereby fixing the position of the probe 300.

3 , the base portion 370 may be extended in the second direction (e.g., negative z-axis direction) of the main body 310. The base portion 370 may be extended in the second direction from at least a portion of the main body 310, and contact at least a portion of the guide portion 400. For example, the base portion 370 may contact the support portion 423 of the second guide 420 located in the second direction (e.g., negative z-axis direction) based on the base portion 370. The base portion 370 of the probe 300 may contact the support portion 423, thereby supporting the probe 300 through the support portion 423. The length of the base portion 370 may be formed to be smaller than the length of the main body 310 based on the third direction (e.g., positive x-axis direction).

The base portion 370 may include a first base extension portion 371 and a second base extension portion 372. The first base extension portion 371 may extend from one side of the base portion 370 to one side direction (e.g., negative x-axis direction). The second base extension portion 372 may extend from another side of the base portion 370 to another side direction (e.g., positive x-axis direction).

The first base extension portion 371 and the second base extension portion 372 may have a length in a first direction (eg, a positive z-axis direction). Based on the first direction, the length of the first base extension portion 371 may be smaller than the length of the second base extension portion 372 .

A circular arc region 374 may be formed at one end of the first substrate extension portion 371 and the second substrate extension portion 372. The circular arc region 374 may refer to a portion of the first substrate extension portion 371 that is curved from the first direction to the third party direction and a portion that is curved from the second direction to the third direction. The circular arc region 374 may refer to a portion of the second substrate extension portion 372 that is curved from the first direction to the fourth direction and a portion that is curved from the second direction to the fourth direction.

When the probe 300 is disposed on one side of the first guide 410 and the second guide 420 , the arc region 374 can make the probe 300 and the first guide 410 and the probe 300 and the second guide 420 gently contact each other, thereby preventing the probe 300 from being damaged.

According to various embodiments of the present invention, the first contact portion 330 of the probe 300 can move in a first direction (positive z-axis direction) and a second direction (negative z-axis direction). The first contact portion 330 can move in the first direction to contact the object to be tested (not shown) to form an electrical connection.

The first contact portion 330 of the probe 300 according to various embodiments of the present invention can move further in the first direction and the second direction than the first contact portion 110 (see FIG. 1 a) of the probe 100 (see FIG. 1 a) according to the prior art. The probe 100 (see FIG. 1 a) according to the prior art is arranged in the guide groove 210 (see FIG. 1 a) of the guide portion 200 (see FIG. 1 a), so that the moving distance is limited. According to various embodiments of the probe 300 of the present invention, the first contact portion 330 and the first extension portion 320 are not in direct contact with the guide portion 400, and the moving distance of the first contact portion 330 is not restricted. Moreover, the first extension portion 320 connected to the first contact portion 330 can be elastically bent, so that the first contact portion 330 can move longer in the first direction and the second direction.

The guide portion 400 according to various embodiments of the present invention may play a role in fixing the position of the probe 300. For example, at least a portion of the probe 300 may be disposed on the guide portion 400, thereby fixing the position of the probe 300.

The guide portion 400 according to various embodiments of the present invention may include a first guide 410, a second guide 420 and/or a supporting member 430. The first guide 410 and the second guide 420 may be formed to be separable and may be located at one side and the other side of the probe 300, respectively. The first guide 410 may be located at one side direction (e.g., negative x-axis direction) of the main body 310 and the base 370 of the probe 300. The second guide 420 may be located at the other side direction (e.g., positive x-axis direction) of the main body 310 and the base 370 of the probe 300. The supporting member 430 may be located in a fourth direction (e.g., negative x-axis direction) based on the first guide 410.

According to various embodiments, the first guide 410 may include a first guide groove 411 at least in a portion. The first guide groove 411 may be formed at an upper end portion of the first guide 410 (e.g., an end portion of the first guide 410 located in the positive z-axis direction). The first guide groove 411 may be formed at the upper end portion of the first guide 410 along the length of the first guide 410 in a third direction (e.g., the positive x-axis direction). The height of the first guide groove 411 (e.g., the length of the first guide groove 411 in the positive z-axis direction) may be formed to be the same length as the height of the third extension portion 360 (e.g., the length of the third extension portion 360 in the positive z-axis direction). The third extension portion 360, which may be the probe 300, is disposed in the first guide groove 411 to fix the position of the probe 300.

The first guide 410 may include a first guide fixing portion 412 at least in a portion. The first guide fixing portion 412 may be formed to have a length and extend in a lateral direction (e.g., the positive x-axis direction based on the first guide 410) at least in a portion of one end of the first guide 410. The first guide fixing portion 412 may be located in a first direction (e.g., the positive z-axis direction) of the first base extension portion 371, thereby playing a role in fixing the position of the probe 300.

3 , the first guide fixing portion 412 may contact at least a portion of the probe 300. For example, the first guide fixing portion 412 may contact the base portion 370 of the probe 300 located in the third direction of the first guide fixing portion 412, and the first guide fixing portion 412 may contact the first base extension portion 371 of the probe 300 located in the second direction of the first guide fixing portion 412.

The second guide 420 may include a protruding region 424 in which at least a portion of an upper end portion (eg, an end portion of the second guide 420 located in the positive z-axis direction) is formed to protrude toward the first direction. For example, referring to FIG. 3 , two protruding regions 424 may be formed at the upper end portion of the second guide 420 .

According to various embodiments, the second guide 420 may include a second guide groove 421 (see FIG. 4 ) at at least a portion thereof. The second guide groove 421 (see FIG. 4 ) may be formed at a protruding region 424 of the second guide 420 .

3 , the height of the second guide groove 421 (see FIG. 4 ) (eg, the positive z-axis length of the second guide groove 421 (see FIG. 4 )) may be formed to be greater than the height of the second extension portion 340 (eg, the positive z-axis length of the second extension portion 340).

According to various embodiments, the second extension portion 340 of the probe 300 may be disposed in the second guide groove 421 (see FIG. 4 ) to fix the position of the probe 300 .

The second guide 420 may include a second guide fixing portion 422 at least in a portion. The second guide fixing portion 422 may be formed to have a length and extend in a side direction (e.g., negative x-axis direction based on the second guide 420) at least in a portion of one end of the second guide 420. The second guide fixing portion 422 may be located in a first direction (e.g., positive z-axis direction) of the second base extension portion 372, thereby playing a role in fixing the position of the probe 300.

3 , the second guide fixing portion 422 may contact at least a portion of the probe 300. For example, the second guide fixing portion 422 may contact the second base extension portion 372 of the probe 300 located in the second direction of the second guide fixing portion 422.

The second guide 420 may include a supporting portion 423 at least in a portion. The supporting portion 423 may be formed by extending from the lower end portion of the second guide 420 (e.g., an end portion of the second guide 420 located in the negative z-axis direction) in the fourth direction (e.g., the negative x-axis direction). The base portion 370 of the probe 300 may be disposed on one side of the supporting portion 423. The supporting portion 423 may play a role in supporting the probe 300.

The guide portion 400 may include a supporting member 430 for preventing the first guide 410 from moving. The supporting member 430 may be arranged in a fourth direction (e.g., a negative x-axis direction) based on the first guide 410. When an external force is applied to the probe 300, the force may be transmitted to the first guide 410 through the probe 300. When an external force is applied to the probe 300, the supporting member 430 may support the first guide 410, thereby preventing the first guide 410 from moving.

FIG. 4 is a perspective view showing a probe card 30 according to various embodiments of the present invention.

In describing the probe card 30 according to various embodiments of the present invention, the first direction may refer to the positive z-axis direction, the second direction may refer to the negative z-axis direction, the third direction may refer to the positive x-axis direction, the fourth direction may refer to the negative x-axis direction, the fifth direction may refer to the positive y-axis direction, and the sixth direction may refer to the negative y-axis direction.

4 , the probe card 30 according to various embodiments of the present invention may include a probe 300 and a guide portion 400 .

4 , the probe 300 may include a main body 310 , a first extension portion 320 , a first contact portion 330 , a second extension portion 340 , a second contact portion 350 , a third extension portion 360 and/or a base portion 370 .

According to various embodiments, the guide portion 400 may play a role in fixing the position of the probe 300. For example, at least a portion of the probe 300 may be disposed on the guide portion 400, thereby fixing the position of the probe 300.

4 , the guide portion 400 may include a first guide 410, a second guide 420, and/or a supporting member 430. The first guide 410 and the second guide 420 may be formed to be separable and may be located at one side and the other side of the probe 300, respectively. The first guide 410 may be located at one side direction (e.g., negative x-axis direction) of the main body 310 and the base 370 of the probe 300. The second guide 420 may be located at the other side direction (e.g., positive x-axis direction) of the main body 310 and the base 370 of the probe 300. The supporting member 430 may be located in a fourth direction (e.g., negative x-axis direction) based on the first guide 410.

4 , the first guide 410 and the second guide 420 may be formed to have a length and extend in a fifth direction (positive y-axis direction).

According to various embodiments, a plurality of guide grooves 411 and 421 may be included at the upper ends of the first guide 410 and the second guide 420 (for example, one end of the first guide 410 and the second guide 420 located in the positive z-axis direction). At least a portion of the plurality of probes 300 may be disposed in each of the plurality of guide grooves 411 and 421, thereby fixing the positions of the plurality of probes 300.

At least a portion of the plurality of probes 300 may be disposed in each of the plurality of guide grooves 411 and 421. Therefore, the width of each of the plurality of guide grooves 411 and 421 (e.g., the length of the guide grooves 411 and 421 in the positive y-axis direction) may be formed to be the same as or greater than the width of the probe 300 (e.g., the length of the probe 300 in the positive y-axis direction).

According to various embodiments, the probe 300 may include an elastic material. The probe 300 includes an elastic material, so that when an external force is applied to a portion of the probe 300, the portion of the probe 300 may be deformed and moved. For example, when an external force is applied to the first contact portion 330 of the probe 300, the first extension portion 320 may be elastically bent, and the position of the first contact portion 330 may be moved in a first direction (e.g., a positive z-axis direction) or a second direction (e.g., a negative z-axis direction).

According to various embodiments, when the probe 300 is arranged on the guide portion 400, the probe 300 may be arranged on one side of the second guide 420 (e.g., the negative x-axis direction side of the second guide 420) after the second guide 420 is arranged. The probe 300 may be arranged by the second extension portion 340 of the probe 300 being arranged in the second guide groove 421 of the second guide 420. After the position of the probe 300 is fixed by the second guide 420, the first guide 410 may be arranged on one side of the probe 300 (e.g., the negative x-axis direction side of the probe 300). After the first guide 410 is arranged, the third extension portion 360 of the probe 300 may be arranged in the first guide groove 411 of the first guide 410. After the first guide 410 is configured, a supporting component 430 for supporting the first guide 410 may be configured in a fourth direction (eg, negative x-axis direction) of the first guide 410 .

The probe card 30 according to various embodiments of the present invention does not fix the probe 300 on the guide portion 400 by laser binding, but can fix the probe 300 by placing at least a portion of the probe 300 in the guide grooves 411 and 421 of the guide portion 400. Since the probe 300 is not fixed by laser binding, when the probe 300 is damaged, it is easy to replace and repair the probe 300.

According to various embodiments, the probe 300 may be manufactured by a micro electro mechanical systems (MEMS) process or an etching process. When the probe 300 is manufactured by a MEMS process, the probe 300 may be manufactured by manufacturing a mold (not shown) having the shape of the probe 300 and then coating the mold (not shown) with a gold-plated material. The material of the probe 300 manufactured by the MEMS process may be composed of at least one of NiCo, NiP, NiB, NiPd, PdCo, and Pd.

When the probe 300 is manufactured by etching, the shape of the probe 300 is shown to a material (not shown) to be processed, and then the portion other than the probe 300 is removed. The material of the probe 300 manufactured by etching can be composed of at least one of BeCu and BNT.

The above embodiments are used to illustrate the present invention. However, the present invention is not necessarily limited thereto, and any modifications and variations can be made within the scope of the technical concept of the present invention.

10: probe card 100: probe 110: first contact part 111: first needle tip 120: second contact part 200: guide part 210: guide groove 220: guide upper end part 230: groove lower end part 30: probe card 300: probe 310: main body 311: main body opening 320: first extension part 321: elastic opening 322: elastic opening 330: first contact part 331: first needle tip 332: contact part opening 340: second extension part 350: second contact part 351: second needle tip 360: third extension part 370: base part 371: first base extension part 372: Second base extension 374: Arc area 40: Detection block 400: Guide part 410: First guide 411: Guide groove 412: First guide fixing part 420: Second guide 421: Guide groove 422: Second guide fixing part 423: Support part 424: Protruding area 430: Support component 50: Detection unit D1: First display panel D2: Second display panel D21: Cell panel L1: First length L2: Second length L3: Separation distance P: Printed circuit board

[Fig. 1a] and [Fig. 1b] are diagrams showing a probe card according to the prior art. [Fig. 2a] and [Fig. 2b] are diagrams showing a probe block configured to detect a display panel. [Fig. 3] is a diagram showing a probe card according to various embodiments of the present invention. [Fig. 4] is a three-dimensional diagram showing a probe card according to various embodiments of the present invention.

30: Probe card

300:Probe

310: Main body

311: Main body opening

320: First extension part

321: Elastic opening

322: Elastic opening

330: First contact part

331: First needle tip

332: Contact opening

340: Second extension

350: Second contact part

351: Second needle tip

360: The third extension

370: Base

371: First base extension

372: Second base extension

374: Arc area

400: Guidance Department

410: First Direction

411: Guide groove

412: First guide fixing part

420: Second Direction

422: Second guide fixing part

423: Support part

424:Highlight area

430: Support components

P:Printed circuit board

Claims (9)

A probe card, comprising: a probe, electrically connected to a test object and a printed circuit board; and a guide portion, on which the probe is disposed, wherein the probe comprises: a main body portion, comprising a plurality of main body openings; a first extension portion, extending from one side end of the main body portion in a lateral direction; a first contact portion, extending from one end of the first extension portion in a first direction perpendicular to the lateral direction, comprising a first needle tip in contact with the test object; a second extension portion, extending from the other side end of the main body portion in a lateral direction opposite to the lateral direction; a second contact portion, extending from one end of the second extension portion in a second direction opposite to the first direction, comprising a second needle tip in contact with the printed circuit board; A third extension portion is spaced apart from the first extension portion and extends in the one side direction at one side end of the main body, at least a part of which is arranged on the guide portion; and a base portion is formed by extending from the main body in the second direction, the guide portion comprises: a first guide, located in the one side direction of the main body, comprising a first guide groove arranged with the third extension portion; and a second guide, located in the other side direction of the main body, comprising a second guide groove arranged with the second extension portion, when an external force is applied to the first contact portion, the first extension portion is elastically bent, and the first contact portion can move in the first direction or the second direction. A probe card as described in claim 1, wherein the first extension portion includes a plurality of elastic openings that provide elasticity so that the first contact portion can move in position. The probe card as described in claim 2, wherein the elastic opening includes a first elastic opening and a second elastic opening, the first elastic opening and the second elastic opening extend in the length direction of the first extension portion, and are bent along the length direction of the first extension portion at least in part, the second elastic opening is arranged in the second direction of the first elastic opening, and the width of the second elastic opening is formed to be smaller than the width of the first elastic opening. A probe card as described in claim 1, wherein the base portion includes a first base extension portion extending from one side of the base portion toward the one side. A probe card as described in claim 1, wherein the base portion includes a second base extension portion extending from another side of the base portion toward the other side. The probe card as described in claim 4, wherein the first guide further includes a first guide fixing portion formed on one side of the first guide, located in the first direction of the first base extension portion, and in contact with the base portion and the first base extension portion to fix the probe. The probe card as described in claim 5, wherein the second guide further includes a second guide fixing portion formed on one side of the second guide, located in the first direction of the second base extension portion, and in contact with the second base extension portion to fix the probe. A probe card as described in claim 1, wherein the guide portion further includes a supporting component for preventing the position of the first guide from moving. A probe card as described in claim 1, wherein the guide portion is formed so that the first guide and the second guide are separable.

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