TWI847311B - Probe card pin insertion control device - Google Patents

Abstract

The present invention relates to an insertion control device for a probe card pin. The insertion control device for a probe card pin of an embodiment of the present invention comprises: one or more pins, which are bent and have both ends facing the same direction, and are inserted into a probe card including a first layer and a second layer; a socket assembly, which is provided with a pin socket portion for accommodating one or more pins, and is used to provide pins arranged in the pin socket portion; a transfer assembly, which comprises a clamp portion, and the clamp portion can clamp and transfer the pins arranged in the socket assembly, and the transfer assembly sequentially transfers the pins clamped by the socket assembly to a measuring assembly and an insertion assembly; a measuring assembly, which comprises a first displacement measuring portion, and the first displacement measuring portion is used to measure the displacement of the pins clamped by the clamp portion; The measuring assembly measures the displacement and bending inclination of the pin, and determines whether the pin clamped by the clamping part is a pin that can be inserted into the insertion assembly; the insertion assembly is provided with a probe card, and receives the pin measured by the measuring assembly through the transfer assembly and inserts the pin into the probe card; and the control unit controls the transfer assembly and the insertion assembly in order to insert the pin clamped by the clamping part into the probe card set in the insertion assembly. After the control unit makes the pin transferred by the clamping part pass through the first layer and is located near the hole formed in the second layer, the control unit positions the fastening part on the upper part of the pin and presses the pin downward to make the pin pass through the second layer, thereby setting the pin in the probe card.

Description

Insertion control device for probe bayonet

The present invention relates to an insertion control device for a probe card pin. More specifically, it relates to an insertion control device for a probe card pin capable of controlling the insertion of a bent pin into a probe card in a manner that prevents the pin from being broken or damaged.

Generally, semiconductor devices are manufactured through a fabrication process of forming a circuit pattern and contact pads for inspection on a wafer, and an assembly process of assembling the wafers with the circuit pattern and contact pads into semiconductor chips.

However, between the manufacturing process and the assembly process, an inspection process is required to detect the electrical characteristics of the wafer by applying an electrical signal to the contact pads formed on the wafer. The above inspection process is a process for detecting defective wafers and is used to remove some wafers that have defects during the assembly process.

In the inspection process, the inspection equipment mainly uses a tester that applies an electrical signal to the wafer and a probe card that serves as an interface between the wafer and the tester. The probe card includes: a circuit board for receiving the electrical signal applied from the tester; and a plurality of probe pins that contact the contact pads formed on the wafer or other chips.

Recently, with the high integration of semiconductor chips, the circuit patterns formed on the wafer through the manufacturing process are also highly integrated, so the distance between adjacent contact pads, that is, the pitch, will become very narrow, and the probe card is also formed by a highly integrated form of multiple probe pins.

Therefore, it is particularly important to accurately position the probe pins at the intended locations on the circuit board.

Existing technical literature

Patent Literature

Patent document 0001: Korean Patent Gazette No. 10-1534828

The object of the present invention is to provide a probe card pin insertion control device capable of controlling the insertion of a bent pin into a probe card in a manner that prevents the pin from being broken or damaged.

In order to achieve the above-mentioned purpose, an insertion control device for a probe card pin of an embodiment of the present invention comprises: one or more pins, which are bent and have both ends facing the same direction, and are inserted into a probe card including a first layer and a second layer; a socket assembly, which is provided with a pin socket portion for accommodating the above-mentioned one or more pins, and is used to provide a pin set in the above-mentioned pin socket portion; a transfer assembly, which comprises a clamping portion and a fastening portion, the above-mentioned clamping portion can clamp and transfer the pin set in the above-mentioned socket assembly, the above-mentioned fastening portion is used to insert the above-mentioned pin into the above-mentioned probe card and fasten the above-mentioned pin, and the transfer assembly sequentially transfers the above-mentioned pin clamped by the above-mentioned socket assembly to the measuring assembly and the insertion assembly; the measuring assembly, which comprises a first displacement measuring portion, and the above-mentioned first displacement measuring portion is used to measure the above-mentioned clamping portion. The displacement and bending inclination of the clamped pin are measured by the measuring assembly to determine whether the pin clamped by the clamping part is a pin that can be inserted into the insertion assembly; the insertion assembly is provided with the probe card, receives the pin measured by the measuring assembly through the transfer assembly and inserts the pin into the probe card; and the control unit controls the transfer assembly and the insertion assembly to insert the pin clamped by the clamping part into the probe card set in the insertion assembly, and the control unit makes the pin transferred from the clamping part pass through the first layer and be located near the hole formed in the second layer, and then positions the fastening part on the upper part of the pin and presses the pin downward to make the pin pass through the second layer, thereby the pin can be set in the probe card.

Furthermore, in the insertion control device of the probe pin of an embodiment of the present invention, the pin may include: a curved portion, which is curved along one direction; an entry portion, which is formed at the lower part of the curved portion, first contacts the first layer and the second layer, and penetrates the first layer and the second layer; and a cover portion, which is formed at the lower part of the curved portion, and has a first protrusion and a second protrusion respectively formed in one direction.

Furthermore, in the insertion control device of the probe card pin of an embodiment of the present invention, the insertion assembly includes a second displacement measuring part, which is used to respectively measure the current displacement of the pin clamped by the clamp part and the displacement of the probe card, and the second displacement measuring part may include: an X displacement part, which is used to measure the X-axis displacement of the probe card and the pin; a Y displacement part, which is used to measure the Y-axis displacement of the probe card and the pin; and a Z displacement part, which is used to measure the Z-axis displacement of the probe card and the pin.

Furthermore, in the insertion control device of the probe pin of an embodiment of the present invention, the entry portion includes a reflective surface and a cutting surface, and the insertion assembly includes a lower pin located at the lower part of the first layer and the second layer for detecting the reflective surface. When the entry portion is located at a hole formed in the second layer, as the lower pin detects the reflective surface, the pin can make the hole formed in the second layer and the lower pin located on the same line.

Furthermore, the insertion control device of the probe card pin of an embodiment of the present invention includes a fastening groove, which is polygonal and formed in the shape of a groove at the lower part of the above-mentioned fastening part. After the above-mentioned fastening groove is placed on the upper part of the above-mentioned cover, as the above-mentioned fastening part descends, the above-mentioned pin can be inserted and fastened to the above-mentioned probe card.

Furthermore, the probe card pin insertion control device of an embodiment of the present invention includes a fastening hole formed in the shape of a hole inside the fastening part, which is relatively larger than the diameter of the cover part, so that the cover part is inserted into the inside of the hole. When the cover part is inserted into the fastening hole, the second protrusion prevents the pin from escaping to the outside of the fastening hole by locking the fastening part. As the fastening part descends, the pin can be inserted into the probe card.

Furthermore, in the probe card pin insertion control device of an embodiment of the present invention, the transfer assembly may include: a first transfer part, which can move left and right, and move between the socket assembly, the measuring assembly, and the insertion assembly; and a second transfer part, which can move up and down in order to enable the transfer assembly to clamp the pin provided in the socket assembly or insert the pin into the probe card provided in the insertion assembly.

The technical solution described above can be made clearer based on the specific implementation method described in detail below with reference to the attached drawings.

Prior to this, the terms or words used in this specification and the scope of the patent application should not be limited to the meanings in commonly used dictionaries, but should be interpreted as the meanings and concepts that conform to the technical ideas of the invention based on the principle that the inventor appropriately defines the concepts of terms in order to explain his own invention in the best way.

According to an embodiment of the present invention, the present invention has the following effect, that is, the position and displacement of the pin can be measured by the first displacement measuring part and the second displacement measuring part so that the pin clamped by the clamp part can be easily inserted into the probe card through the transfer assembly.

Furthermore, according to an embodiment of the present invention, the present invention also has the following effect, that is, by adjusting the angle and displacement of the transfer assembly, the bent pin can be easily inserted into the probe card, and after the first insertion, the pin can be inserted into the lower part of the probe card by pressing the pin with the fastening part.

10: Sales

11: Cover

12: Curved part

13:Entry Department

14: First protrusion

15: Second protrusion

20: Transfer components

21: Clamping part

22: First transfer unit

23: Second transfer unit

24: Fastening part

24a: Fastening groove

24b: Fastening hole

30: Socket assembly

31: Pin socket

40: Measurement components

41: Position measurement unit

42: First displacement measuring unit

50: Insert component

51: X displacement part

52:Y displacement part

53: Z displacement unit

54: Lower Bi needle

P: Probe card

P1: First floor

P2: Second floor

h1: hole

h2: hole

Figure 1 is an overall three-dimensional diagram showing an insertion control device for a probe pin according to an embodiment of the present invention.

FIG2 is a three-dimensional diagram showing a measuring assembly of a probe pin insertion control device according to an embodiment of the present invention.

FIG3 is a three-dimensional diagram showing the insertion assembly of the insertion control device of the probe pin of an embodiment of the present invention.

FIG4 is a front view of a pin of an insertion control device for a probe pin according to an embodiment of the present invention.

Figures 5 to 7 are flow charts showing the sequence of inserting the pin into the probe card by the probe card pin insertion control device of an embodiment of the present invention.

FIG8 is a front view showing the use status of the fastening portion and the pin formed with a fastening hole of the insertion control device of the probe pin of one embodiment of the present invention.

The special viewpoints and specific technical features of the present invention can be made clearer based on the following specific descriptions with reference to the attached drawings and an embodiment. It should be noted that in this specification, when assigning the figure marks to the structural elements of each figure, the same figure marks are assigned to the same structural elements as much as possible even if they are shown on different figures. Moreover, in the process of describing an embodiment of the present invention, when it is judged that the specific description of the known structure or function may confuse the main purpose of the present invention, its detailed description will be omitted.

Furthermore, in describing the structural elements of the present invention, terms such as "first", "second", A, B, (a), (b) and the like may be used. Such terms are only used to distinguish one structural element from other structural elements, and such terms do not limit the nature, order or sequence of the corresponding structural elements. When a structural element is said to be "connected", "combined" or "connected" to other structural elements, although it may be directly connected, combined or in contact with other structural elements, it should also be understood that other structural elements may be "connected", "combined" or "connected" between the structural elements.

Below, an embodiment of the present invention is described in detail with reference to the attached drawings.

As shown in FIG1 , the probe pin insertion control device of an embodiment of the present invention may include a transfer assembly 20, a socket assembly 30, a measuring assembly 40, an insertion assembly 50 and a control unit (not shown).

The transfer assembly 20 may include: a clamping part 21, which can clamp the pin 10; a first transfer part 22, which can move the clamping part 21 left and right, and move between various components (wherein each component refers to the socket component 30, the measuring component 40, and the insertion component 50); and a second transfer part 23, which can move the clamping part 21 up and down.

The clamping part 21 can clamp the pin 10 provided in the socket assembly 30 and transfer it to the measuring assembly 40 and the inserting assembly 50. As an option, the transfer assembly 20 may also include a pressure adjustment part (not shown) for adjusting the pressure of clamping the pin 10, so as to prevent the pin 10 from being damaged due to clamping the pin 10 with a pressure exceeding a specified value, but the present invention is not limited thereto.

Furthermore, the transfer assembly 20 further includes a displacement measuring unit (not shown) for measuring the current position and displacement of the clamping unit 21, and by respectively measuring the current position and displacement of the clamping unit 21 and the position and displacement of the pin 10 provided on the socket assembly 30, the clamping unit 21 can accurately clamp the pin located on the socket assembly 30. In this case, the displacement measuring unit (not shown) for measuring the position and displacement of the clamping unit 21 can transmit the measurement data to the control unit, so that the control unit (not shown) can calculate the position coordinate value and the displacement value.

The socket assembly 30 is provided with a pin socket portion 31, which can accommodate one or more pins 10, so that the upper portion of the pin 10 can be clamped by the clamp portion 21 and a portion (or upper portion) of the pin 10 accommodated in the pin socket portion 31 is exposed.

The pin 10 may include: a bent portion 12, formed along a direction (formed in an arcuate shape); an entry portion 13, formed at the lower portion of the pin 10, first entering the hole formed in the probe card P; and a cover portion 11, formed at the upper portion of the pin 10, including a first protrusion 14 and a second protrusion 15 formed on one side.

The probe card P includes: a first layer P1 located at the upper part so that the pin 10 can enter first; and a second layer P2 located at the lower part, and a space can be formed between the first layer P1 and the second layer P2.

The entry portion 13 is a partially protruding "┐" shape, and may include: a reflective surface 13b, located inside the "┐" shape, so that the light output from the lower pin 54 (or set near the lower pin) is reflected; and a cutting surface 13a, located outside the "┐" shape (protruding position). In this case, the cutting surface 13a is a surface formed by cutting the upper and lower parts of the pins 10 formed in a row by a large number of ejections.

The first protrusion 14 is inserted into the inside of the probe card P to prevent the pin 10 from making a minute movement in the probe card P, and to prevent a part of the pin 10 from being damaged or broken due to the movement or vibration of the probe card P. Specifically, when the first protrusion 14 is inserted into the hole of the first layer P1, since it is inserted and fixed in the hole of the first layer P1, even if the probe card P moves due to minute movement or vibration, the pin 10 can be fixed by forming a fixed structure.

If the pin 10 is inserted into the hole formed in the second layer P2, the second protrusion 15 can prevent the pin 10 from escaping downward due to the hole formed in the second layer P2. Therefore, the second protrusion 15 can play the role of a locking shoulder on the upper part of the first layer P1.

As an option, the first protrusion 14 and the second protrusion 15 may be formed in the same direction, but are not limited thereto.

The measuring assembly 40 performs the function of measuring the displacement of the pin 10 clamped by the clamping part 21, and may include: a measuring position part 41 for indicating the position of the displacement of the measuring pin 10; and a first displacement measuring part 42 for measuring the displacement and bending inclination of the pin 10 positioned at the measuring position part 41.

The first displacement measuring unit 42 measures the bending inclination (curvature) of the bending portion 12 formed on the pin 10, the position and shape of the first protrusion 14 and the second protrusion 15, and can collect information about the pin 10 clamped by the clamping unit 21 by further measuring the length and inclination of the entry portion 13 and transmit the collected information to the control unit.

The insertion assembly 50 is provided with a probe card P for inserting the pin 10, which may include a second displacement measuring unit for measuring the current position coordinates of the pin 10 and the position coordinates of the holes arranged in the probe card P.

The second displacement measuring unit measures the current position of the pin 10 clamped by the clamping unit 21 and calculates it as a three-dimensional coordinate, and can further calculate the coordinates of the hole formed in the probe card P provided in the insertion assembly 50 and transmit the calculated information to the control unit.

In order to determine the current position of the pin 10, the second displacement measuring unit may include: an X displacement unit 51 for collecting X coordinates; a Y displacement unit 52 for collecting Y coordinates; and a Z displacement unit 53 for collecting Z coordinates.

The control unit inserts a portion of the pin 10 clamped by the clamp unit 21 into the probe card P based on the information measured by the first displacement measuring unit 42 and the second displacement measuring unit, thereby fastening the pin 10 to the probe card P through the fastening unit 24.

Specifically, as shown in FIGS. 5 to 7, after the control unit inserts the pin 10 into the hole h1 formed in the first layer P1 and enters the lower part of the first layer P1, if it reaches the vicinity of the second layer P2, based on the position and displacement of the pin measured by the first displacement measuring unit 42 and the second displacement measuring unit, and the bending inclination of the pin 10, the position and angle of the transfer assembly 20 to be adjusted are calculated so that the transfer assembly 20 enters the position of the hole h2 formed in the second layer P2.

In this case, as the transfer assembly 20 operates, the pin 10 allows the reflective surface 13b to pass through the hole h2 formed in the second layer P2 and be detected by the lower pin 54 (more specifically, the transfer assembly allows the reflective surface 13b, the hole h2, and the lower pin 54 to be located on the same line).

In this case, if the lower probe 54 detects the reflective surface 13b, it is determined that the pin 10 is in the correct position and inserted into the hole h2 formed in the second layer P2, so that the fastening groove 24a formed at the lower part of the fastening part 24 is placed on the upper part of the cover 11, and the fastening part 24 is lowered to the lower part to move the pin 10 downward, and as the entry part 13 passes through the hole h2, the pin 10 can be inserted into the fastening probe card P.

Furthermore, the fastening portion 24 may be formed alone inside the clamp portion 21, or formed in the transfer assembly 20 and disposed separately from the clamp portion 21.

Although the above-mentioned fastening portion 24 forms a structure for inserting the fastening pin 10 into the probe card P through the fastening groove 24a, it is not limited to this. As shown in FIG8 , the structure for inserting the fastening pin 10 into the probe card P can also be formed through the fastening hole 24b.

Instead of the fastening groove 24a, the fastening portion 24 may be formed with a fastening hole 24b. The fastening portion 24 allows the cover 11 to be inserted into the fastening hole 24b, and the diameter of the fastening hole 24b may be relatively larger than the diameter of the cover 11. For example, if the structure as described above is formed, the pin 10 can be detached to the outside through the fastening hole 24b, so the second protrusion 15 can play a locking role in the fastening hole 24b.

When the fastening portion 24 having the above structure is lowered downward so that the pin 10 is set in the hole h2 formed in the second layer P2, the fastening portion 24 can press the second protrusion 15 downward to form a structure in which the pin 10 is set in the hole h2.

That is, the fastening portion 24 can set the pin 10 on the probe card P by forming at least one of the shapes of the fastening groove 24a or the fastening hole 24b.

Although an embodiment of the present invention is described in detail above, this is only used to specifically describe the present invention, and the probe pin insertion control device of the present invention is not limited thereto. Moreover, unless there is a special contrary record, the terms "including", "consisting of" or "having" used above mean that the corresponding structural elements are built-in, and should be interpreted as also including other structural elements, rather than excluding other structural elements. Unless otherwise defined, all terms including technical terms or scientific terms have the same meaning as those generally understood by ordinary technicians in the technical field to which the present invention belongs.

Moreover, the above description is only an illustrative description of the technical idea of the present invention. Ordinary technicians in the technical field to which the present invention belongs can make various modifications and variations within the scope of the basic characteristics of the present invention. Therefore, the one embodiment disclosed in the present invention is only used for illustration and does not limit the technical idea of the present invention. The scope of the technical idea of the present invention is not limited to this one embodiment. The scope of protection of the present invention should be interpreted based on the scope of the patent application, and all technical ideas within the equivalent scope belong to the scope of the patent application of the present invention.

20: Transfer assembly 21: Clamp section 22: First transfer section 23: Second transfer section 30: Socket assembly 31: Pin socket section 40: Measurement assembly 50: Insertion assembly

Claims (7)

A probe card pin insertion control device, wherein, includes: one or more pins, bent and with both ends facing the same direction, inserted into a probe card including a first layer and a second layer; a socket assembly, provided with a pin socket portion for accommodating the one or more pins, for providing a pin disposed in the pin socket portion; a transfer assembly, including a clamping portion and a fastening portion, the clamping portion being capable of clamping and transferring the pin disposed in the socket assembly, the fastening portion being used to insert and fasten the pin into the probe card, and the transfer assembly sequentially transferring the pin clamped by the socket assembly to the measuring assembly and the insertion assembly; The measuring assembly includes a first displacement measuring unit, the first displacement measuring unit is used to measure the displacement and bending inclination of the pin clamped by the clamping unit, and the measuring assembly measures whether the pin clamped by the clamping unit is a pin that can be inserted into the insertion assembly; The insertion assembly is provided with the probe card, and the pin measured by the measuring assembly is received by the transfer assembly and inserted into the probe card; and The control unit controls the transfer assembly and the insertion assembly in order to insert the pin clamped by the clamping unit into the probe card provided in the insertion assembly, After the control unit makes the pin transferred from the clamp unit pass through the first layer and be located near the hole formed in the second layer, the control unit positions the fastening unit on the upper part of the pin and presses the pin downward to make the pin pass through the second layer, thereby setting the pin on the probe card. As in claim 1, the probe pin insertion control device, wherein the pin comprises: a curved portion, formed by bending in one direction; an entry portion, formed at the lower portion of the curved portion, first contacting the first layer and the second layer, and penetrating the first layer and the second layer; and a cover portion, formed at the lower portion of the curved portion, having a first protrusion and a second protrusion respectively formed in one direction. As in claim 2, the insertion control device for the probe card pin, wherein, the insertion assembly includes a second displacement measuring unit for respectively measuring the current displacement of the pin clamped by the clamping unit and the displacement of the probe card, the second displacement measuring unit includes: an X displacement unit for measuring the X-axis displacement of the probe card and the pin; a Y displacement unit for measuring the Y-axis displacement of the probe card and the pin; and a Z displacement unit for measuring the Z-axis displacement of the probe card and the pin. As in claim 3, the probe pin insertion control device, wherein, the entry portion includes a reflective surface and a cutting surface, the insertion assembly includes a lower pin located at the lower portion of the first layer and the second layer for detecting the reflective surface, when the entry portion is located at a hole formed in the second layer, as the lower pin detects the reflective surface, the pin causes the hole formed in the second layer and the lower pin to be located on the same line. As in claim 2, the probe card pin insertion control device includes a polygonal fastening groove formed in the lower part of the fastening part in a groove shape, and after the fastening groove is placed on the upper part of the cover, the fastening part descends so that the pin is inserted and fastened to the probe card. As in claim 2, the probe card pin insertion control device includes a fastening hole formed in the shape of a hole inside the fastening portion, which is relatively larger than the diameter of the cover portion so that the cover portion is inserted into the inside of the hole. When the cover portion is inserted into the fastening hole, the second protrusion prevents the pin from escaping from the fastening hole by locking the fastening portion. As the fastening portion descends, the pin is inserted into the probe card. As in claim 1, the probe card pin insertion control device, wherein the transfer assembly comprises: A first transfer part, which can move left and right, and move between the socket assembly, the measuring assembly, and the insertion assembly; and A second transfer part, which can move up and down so that the transfer assembly can clamp the pin provided in the socket assembly or insert the pin into the probe card provided in the insertion assembly.