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TWI847106B - Manufacturing method of anisotropic conductive film - Google Patents

Manufacturing method of anisotropic conductive film Download PDF

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TWI847106B
TWI847106B TW111109301A TW111109301A TWI847106B TW I847106 B TWI847106 B TW I847106B TW 111109301 A TW111109301 A TW 111109301A TW 111109301 A TW111109301 A TW 111109301A TW I847106 B TWI847106 B TW I847106B
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conductive
conductive adhesive
film
conductive particles
adhesive film
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TW202336192A (en
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鍾承麟
周弘海
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瑋鋒科技股份有限公司
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Abstract

The invention relates to a manufacturing method of anisotropic conductive film. In particular, the manufacturing method uses a magnetic attraction device to generate a magnetic force to attract the conductive core of the conductive particles, so that the conductive particles are adsorbed on the transfer surface of the transfer substrate after leaving the accommodating groove. Realize the transfer of conductive particles without contacting the wafer to form a continuous anisotropic conductive adhesive, which is very suitable for mass production.

Description

異方性導電膠的製作方法Method for preparing anisotropic conductive glue

本發明係有關於一種異方性導電膠的製作方法,尤其是利用晶圓上設置有複數呈陣列排列之容置槽,供導電粒子容置於容置槽中,同時透過磁吸裝置產生磁力吸引導電粒子的導電核心體,在不接觸晶圓的情況下轉印導電粒子,因而達到依據容置槽的排列方式而安置導電粒子以製成連續式異方性導電膠的目的。The present invention relates to a method for manufacturing anisotropic conductive glue, in particular, utilizing a plurality of array-arranged receiving grooves on a wafer for receiving conductive particles in the receiving grooves, and at the same time, using a magnetic attraction device to generate a magnetic force to attract the conductive core of the conductive particles, and transferring the conductive particles without contacting the wafer, thereby achieving the purpose of placing the conductive particles according to the arrangement of the receiving grooves to manufacture a continuous anisotropic conductive glue.

隨著電子工業及半導體技術的進步,許多終端電子產品不僅在功能上已愈加強大,而且在外觀上也不斷追求輕、薄、短、小,藉以改善實用性。With the advancement of the electronics industry and semiconductor technology, many terminal electronic products have not only become more powerful in terms of functionality, but also have been continuously pursuing lighter, thinner, shorter and smaller appearances to improve practicality.

以採用陰極射線管的傳統顯示器為例,不但會佔據太多寶貴的桌面空間,而且相當笨重,更會耗費太多電力,尤其是大尺寸的顯示器。近年來,業界利用先進電子、半導體技術製作的液晶顯示器(LCD)可大幅減輕重量,同時縮小整體尺寸大小,因此已幾乎完全取代陰極射線管顯示器。For example, traditional monitors using cathode ray tubes not only take up too much valuable desktop space, but are also quite bulky and consume too much power, especially for large-sized monitors. In recent years, liquid crystal displays (LCDs) made using advanced electronic and semiconductor technologies have been able to significantly reduce weight and overall size, thus almost completely replacing cathode ray tube monitors.

再以智慧型手機為例,不僅提高可攜式,具有通話、互傳簡訊的功能,還能拍照影像、播放高畫質影片,同時省電效率強大,大幅延長電池的續航能力,目前已幾乎是人手一機的普遍程度,稱得上是最成功的消費性電子產品。Take smartphones as an example. They are not only portable and have the functions of making calls and sending text messages, but also can take pictures and play high-definition videos. At the same time, they are highly power-saving and can greatly extend the battery life. Now, almost everyone has one, and they can be said to be the most successful consumer electronic product.

上述的電子產品都需要將不同的電子元件電氣連接至電路板上的電子線路。傳統上,使用焊料以達成焊接目的的製程即使是使用具低溫熔化特性且具有較佳導電度的鉛錫合金焊料也無法滿足輕、薄、短、小的需求,尤其是對於尺寸大小已大幅縮小的積體電路(Integrated Circuit,  IC)的電子元件。雖然表面黏著元件(Surface Mount Device, SMD)的技術可解決尺寸縮小的挑戰,但卻需要使用高溫爐以加速焊接處理,進而提高產量,對電子元件會產生潛在性的破壞風險。The above-mentioned electronic products all require that different electronic components be electrically connected to the electronic circuits on the circuit board. Traditionally, the process of using solder to achieve the purpose of welding cannot meet the requirements of lightness, thinness, shortness and smallness even if lead-tin alloy solder with low-temperature melting characteristics and better conductivity is used, especially for electronic components of integrated circuits (ICs) whose sizes have been greatly reduced. Although the technology of surface mount devices (SMD) can solve the challenge of size reduction, it requires the use of high-temperature furnaces to accelerate the welding process and thus increase production, which will produce potential damage risks to electronic components.

因此,業者開發出異方性導電膜(Anisotropic Conductive Film, ACF),用於玻璃覆晶封裝(Chip on Glass, COG)或薄膜覆晶封裝(Chip on Film, COF)的製程中,利用ACF以達成特定方向的電氣連接,比如在垂直方向上可導電,而在水平方向上不導電。例如,可藉以連接驅動IC (Driver IC)的接腳至面板的每個像素,滿足顯示面板的微細間距(Fine Pitch)之需求。Therefore, the industry has developed anisotropic conductive film (ACF) for use in the manufacturing process of chip on glass (COG) or chip on film (COF). ACF is used to achieve electrical connection in a specific direction, such as being conductive in the vertical direction but not conductive in the horizontal direction. For example, it can be used to connect the pins of the driver IC to each pixel of the panel to meet the fine pitch requirements of the display panel.

簡言之,異方性導電膜是以樹脂及導電粒子(或導電粉體)組合而成,可用以連接二種不同基材和線路,而且異方性導電膜具有上下(Z軸)電氣導通的特性,且左右平面(X、Y軸)具有絕緣性,通常可在加熱下並利用Z軸方向上的外部加壓處理,使所包含的分離導電粒子相互接觸而達到Z軸方向的電氣導通且同時平面方向電氣絕緣之目的,可避免相鄰接腳發生短路。In short, anisotropic conductive film is composed of resin and conductive particles (or conductive powder), which can be used to connect two different substrates and circuits. In addition, anisotropic conductive film has the characteristics of vertical (Z-axis) electrical conductivity and horizontal (X, Y-axis) insulation. It can usually be heated and treated with external pressure in the Z-axis direction to make the separated conductive particles contained in it contact with each other to achieve the purpose of electrical conductivity in the Z-axis direction and electrical insulation in the plane direction at the same time, thereby avoiding short circuits between adjacent pins.

在製作異方性導電膜的習知技術中,需要將多個導電粒子包埋在非導電膠膜中,且每個導電粒子包含絕緣膜以及導電核心體,其中絕緣膜包覆導電核心體的外表面。並在使用時,將需要連接的電子元件或電路放置在製作異方性導電膜的上下二側,接著施以上下外力而擠壓異方性導電膜,使得異方性導電膜的絕緣膜破裂而露出所包覆的導電核心體,因而電子元件或電路藉接觸導電核心體以達到電氣傳導目的。由於相鄰的導電粒子可配置成非常靠近,所以能滿足微細間距的需求。In the conventional technology of making anisotropic conductive film, a plurality of conductive particles need to be embedded in a non-conductive gel film, and each conductive particle includes an insulating film and a conductive core body, wherein the insulating film covers the outer surface of the conductive core body. When in use, the electronic components or circuits to be connected are placed on the upper and lower sides of the anisotropic conductive film, and then the anisotropic conductive film is squeezed by applying external forces from top to bottom, so that the insulating film of the anisotropic conductive film is broken to expose the coated conductive core body, so that the electronic components or circuits can achieve electrical conduction by contacting the conductive core body. Since adjacent conductive particles can be arranged very close, the requirements of fine spacing can be met.

進一步,要將多個導電粒子包埋在非導電膠膜中且以適當分散方式排列一般是使用轉印的技術,比如先將導電粒子安置在配置盤或配置膜上,且配置盤或配置膜具有特定排列方式的多個凹洞,用以容置導電粒子,接著貼附非導電膠膜以覆蓋導電粒子,並移除配置盤或配置膜,最後再貼附第二非導電膠膜以覆蓋導電粒子,進而包埋所有的導電粒子。Furthermore, to embed multiple conductive particles in a non-conductive adhesive film and arrange them in an appropriately dispersed manner, a transfer technique is generally used. For example, the conductive particles are first placed on a configuration plate or a configuration film, and the configuration plate or the configuration film has multiple recesses in a specific arrangement to accommodate the conductive particles. Then, a non-conductive adhesive film is attached to cover the conductive particles, and the configuration plate or the configuration film is removed. Finally, a second non-conductive adhesive film is attached to cover the conductive particles, thereby embedding all the conductive particles.

然而,習知技術的缺點在於配置盤或配置膜的凹洞對導電粒子的貼附力不易控制,導致在移除配置盤或配置膜時,仍有部分的導電粒子仍貼附在配置盤或配置膜上,而未轉移到非導電膠膜,影響異方性導電膠的整體電氣連接功能。此外,習知技術的配置盤或配置膜一般藉由接觸的方式轉印導電粒子,導致配置盤或配置膜上容易殘留殘膠,使得異方性導電膠的品質不佳,進而必須經常更換或清理配置盤或配置膜,造成成本上的增加且十分不便。However, the disadvantage of the prior art is that the adhesion of the concave holes of the configuration plate or configuration film to the conductive particles is difficult to control, resulting in that when the configuration plate or configuration film is removed, some of the conductive particles are still attached to the configuration plate or configuration film, and are not transferred to the non-conductive adhesive film, affecting the overall electrical connection function of the anisotropic conductive adhesive. In addition, the configuration plate or configuration film of the prior art generally transfers the conductive particles by contact, resulting in residual adhesive residues on the configuration plate or configuration film, making the quality of the anisotropic conductive adhesive poor, and the configuration plate or configuration film must be frequently replaced or cleaned, resulting in increased costs and great inconvenience.

有鑑於上述缺點,發明人乃針對該等缺點研究改進之道,終於有本發明產生。In view of the above shortcomings, the inventor has studied ways to improve these shortcomings and finally came up with the present invention.

本發明之主要目的在於提供一種異方性導電膠的製作方法,其係藉由晶圓上設置有複數容置槽,且該等容置槽呈陣列排列,使得相鄰的導電粒子配置成非常靠近,以滿足微細間距的需求。此外,透過磁吸裝置產生磁力吸引導電粒子的導電核心體,使得導電粒子離開容置槽後吸附於轉印基板的轉印表面,實現在不接觸晶圓的情況下轉印導電粒子,形成連續式異方性導電膠,非常適合大量生產,同時解決配置盤或配置膜上容易殘留殘膠的問題,實現降低成本以及增加產量等功效。The main purpose of the present invention is to provide a method for manufacturing anisotropic conductive adhesive, which is to provide a plurality of receiving grooves on a wafer, and the receiving grooves are arranged in an array, so that adjacent conductive particles are arranged very close to each other to meet the requirements of fine spacing. In addition, a magnetic attraction device is used to generate a magnetic force to attract the conductive core of the conductive particles, so that the conductive particles are adsorbed on the transfer surface of the transfer substrate after leaving the receiving grooves, so that the conductive particles are transferred without contacting the wafer, forming a continuous anisotropic conductive adhesive, which is very suitable for mass production, and at the same time solves the problem of residual adhesive easily remaining on the configuration plate or configuration film, thereby reducing costs and increasing production.

為達成上述目的及功效,本發明提供一種異方性導電膠的製作方法,其係包含有:一排列準備步驟,係設置一晶圓於一傳輸裝置中,該晶圓上設置有一複數容置槽,且該等容置槽呈陣列排列,該傳輸裝置包含多個滾輪以及一驅動器,該等滾輪是連結至該驅動器,且經該驅動器驅動而朝一前進方向滾動,並帶動該晶圓往該前進方向移動;一鋪灑導電粒子步驟,鋪設或噴灑複數導電粒子於該晶圓,且每個該等容置槽最多只容置單一個該導電粒子,其中,每個該等導電粒子具有一外徑,且包含一絕緣膜以及一導電核心體;一移除多餘導電粒子步驟,利用一粒子移除裝置而移除未容置於該容置槽的多餘該等導電粒子;一磁吸步驟,該晶圓移動至與一轉印基板平行處,該轉印基板耦接於一磁吸裝置,該磁吸裝置透過產生一磁力吸引該等導電粒子的該導電核心體,使得該等導電粒子離開該等容置槽後吸附於該轉印基板的一轉印表面;一轉印步驟,一第一非導電膠膜(Non-Conductive Film,NCF)移動至與該轉印基板平行處,並且該磁吸裝置解除該磁力;一分離步驟,該等導電粒子與該轉印基板分離,並且該等導電粒子留在該第一非導電膠膜的一對貼表面上;一對貼模組,貼附一第二非導電膠膜於該第一非導電膠膜的該對貼表面上以覆蓋該等導電粒子而形成一連續式異方性導電膠。In order to achieve the above-mentioned purpose and effect, the present invention provides a method for manufacturing anisotropic conductive glue, which includes: an arrangement preparation step, which is to place a wafer in a transmission device, wherein a plurality of receiving slots are arranged in an array, and the transmission device includes a plurality of rollers and a driver, wherein the rollers are connected to the driver and are driven by the driver to roll in a forward direction and drive the wafer to move in the forward direction; a conductive particle sprinkling step, which is to spread or spray a plurality of conductive particles on the wafer, wherein each of the receiving slots can accommodate at most a single conductive particle, wherein wherein each of the conductive particles has an outer diameter and includes an insulating film and a conductive core body; a step of removing excess conductive particles, using a particle removal device to remove excess conductive particles not contained in the containing groove; a magnetic attraction step, wherein the wafer is moved to a position parallel to a transfer substrate, the transfer substrate is coupled to a magnetic attraction device, the magnetic attraction device generates a magnetic force to attract the conductive core body of the conductive particles, so that the conductive particles leave the containing grooves and are adsorbed on a transfer surface of the transfer substrate; a transfer step, wherein a first non-conductive adhesive film (Non-Conductive The invention discloses a method for preparing a non-conductive adhesive film and a method for preparing a non-conductive adhesive film. The method comprises the steps of: moving a non-conductive adhesive film (NCF) to a position parallel to the transfer substrate, and releasing the magnetic force of the magnetic attraction device; a separation step, separating the conductive particles from the transfer substrate, and leaving the conductive particles on a pair of pasting surfaces of the first non-conductive adhesive film; and a pair of pasting modules, pasting a second non-conductive adhesive film on the pair of pasting surfaces of the first non-conductive adhesive film to cover the conductive particles and form a continuous anisotropic conductive adhesive.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該轉印基板的該轉印表面具有黏性,且該第一非導電膠膜的該對貼表面之黏性大於該轉印表面之黏性。Preferably, according to the method for manufacturing anisotropic conductive adhesive of the present invention, the transfer surface of the transfer substrate is sticky, and the sticking surface of the first non-conductive adhesive film has a greater stickiness than the transfer surface.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該異方性導電膠的製作方法進一步包含:一貼附步驟,將該第一非導電膠膜貼附於該轉印基板,並且該第一非導電膠膜是藉接觸而貼附到留在該轉印表面上的該等導電粒子;其中,該分離步驟進一步透過剝離將該轉印基板而與該第一非導電膠膜相互分離,由於該第一非導電膠膜的黏性大於該轉印表面的黏性,使得該等導電粒子是留在該第一非導電膠膜上。Preferably, according to the method for making anisotropic conductive adhesive of the present invention, the method for making anisotropic conductive adhesive further comprises: an attaching step, attaching the first non-conductive adhesive film to the transfer substrate, and the first non-conductive adhesive film is attached to the conductive particles remaining on the transfer surface by contact; wherein the separating step further separates the transfer substrate from the first non-conductive adhesive film by peeling, and since the viscosity of the first non-conductive adhesive film is greater than the viscosity of the transfer surface, the conductive particles remain on the first non-conductive adhesive film.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該轉印表面包含一中等黏性膜,該中等黏性膜本身具有黏性,且該中等黏性膜的黏性是該第一非導電膠膜的黏性的40%至80%之間,該中等黏性膜是在該貼附步驟中與該第一非導電膠膜的該對貼表面相互貼附,該對貼表面覆蓋而接觸該等導電粒子,接著剝離該導電膠膜而與該中等黏性膜分離,該導電粒子會留在該導電膠膜的該對貼表面。Preferably, according to the method for making anisotropic conductive adhesive of the present invention, the transfer surface comprises a medium-viscosity film, the medium-viscosity film itself has viscosity, and the viscosity of the medium-viscosity film is between 40% and 80% of the viscosity of the first non-conductive adhesive film. The medium-viscosity film is adhered to the counter-attaching surface of the first non-conductive adhesive film in the attaching step, and the counter-attaching surface covers and contacts the conductive particles. Then, the conductive adhesive film is peeled off and separated from the medium-viscosity film, and the conductive particles remain on the counter-attaching surface of the conductive adhesive film.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該轉印基板係由非金屬材料製成,該非金屬材料係選自聚碳酸酯、聚對苯二甲酸乙二酯、聚甲基丙烯酸甲酯、聚醯亞胺、以及聚萘二甲酸乙二醇酯其中之一。Preferably, according to the method for making anisotropic conductive adhesive of the present invention, the transfer substrate is made of a non-metallic material, and the non-metallic material is selected from one of polycarbonate, polyethylene terephthalate, polymethyl methacrylate, polyimide, and polyethylene naphthalate.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該轉印基板係由金屬材料製成,該金屬材料係選自鎳、銅、鋁、以及鋅其中之一。Preferably, according to the method for manufacturing anisotropic conductive paste of the present invention, the transfer substrate is made of a metal material, and the metal material is selected from one of nickel, copper, aluminum, and zinc.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該等容置槽具有一寬度,該寬度介於該導電粒子之直徑的1.1倍至1.9倍之間。Preferably, according to the method for making anisotropic conductive adhesive of the present invention, the receiving grooves have a width ranging from 1.1 times to 1.9 times the diameter of the conductive particles.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該等容置槽具有一深度,該深度介於該導電粒子之直徑的0.5倍至1.1倍之間。Preferably, according to the method for making anisotropic conductive paste of the present invention, the receiving grooves have a depth ranging from 0.5 times to 1.1 times the diameter of the conductive particles.

較佳地,根據本發明之異方性導電膠的製作方法,其中,該驅動器包含至少一電動馬達。Preferably, according to the method for manufacturing anisotropic conductive adhesive of the present invention, the driver includes at least one electric motor.

較佳地,根據本發明之異方性導電膠的製作方法,其中該第二非導電膠膜以及該第一非導電膠膜是由相同的一材料所構成,該材料係選自聚胺酯(Polyurethane,PU)以及環氧樹脂其中之一。Preferably, according to the method for manufacturing anisotropic conductive adhesive of the present invention, the second non-conductive adhesive film and the first non-conductive adhesive film are made of the same material, which is selected from one of polyurethane (PU) and epoxy resin.

爲使熟悉該項技藝人士瞭解本發明之目的、特徵及功效,茲藉由下述具體實施例,並配合所附之圖式,對本發明詳加說明如下。In order to enable persons familiar with the art to understand the purpose, features and effects of the present invention, the present invention is described in detail as follows through the following specific embodiments and in conjunction with the attached drawings.

現在將參照其中示出本發明概念的示例性實施例的附圖 在下文中更充分地闡述本發明概念。以下藉由參照附圖更詳細地闡述的示例性實施例,本發明概念的優點及特徵以及其達成方法將顯而易見。然而,應注意,本發明概念並非僅限於以下示例性實施例,而是可實施為各種形式。因此,提供示例性實施例僅是為了揭露本發明概念並使熟習此項技術者瞭解本發明概念的類別。在圖式中,本發明概念的示例性實施例並非僅限於本文所提供的特定實例且為清晰起見而進行誇大。The inventive concept will now be more fully explained below with reference to the accompanying drawings in which exemplary embodiments of the inventive concept are shown. Advantages and features of the inventive concept and methods of achieving the same will become apparent from the exemplary embodiments explained in more detail below with reference to the accompanying drawings. However, it should be noted that the inventive concept is not limited to the following exemplary embodiments, but can be implemented in various forms. Therefore, the exemplary embodiments are provided only to disclose the inventive concept and to enable those skilled in the art to understand the category of the inventive concept. In the drawings, the exemplary embodiments of the inventive concept are not limited to the specific examples provided herein and are exaggerated for clarity.

本文所用術語僅用於闡述特定實施例,而並非旨在限制本發明。除非上下文中清楚地另外指明,否則本文所用的單數形式的用語「一」及「該」旨在亦包括複數形式。本文所用的用語「及/或」包括相關所列項其中一或多者的任意及所有組合。應理解,當稱元件「連接」或「耦合」至另一元件時,所述元件可直接連接或耦合至所述另一元件或可存在中間元件。The terms used herein are used only to describe specific embodiments and are not intended to limit the present invention. Unless the context clearly indicates otherwise, the singular forms of the terms "a", "an" and "the" used herein are intended to include the plural forms as well. The term "and/or" used herein includes any and all combinations of one or more of the relevant listed items. It should be understood that when an element is said to be "connected" or "coupled" to another element, the element may be directly connected or coupled to the other element or there may be intermediate elements.

相似地,應理解,當稱一個元件(例如層、區或基板)位於另一元件「上」時,所述元件可直接位於所述另一元件上,或可存在中間元件。相比之下,用語「直接」意指不存在中間元件。更應理解,當在本文中使用用語「包括」、「包含」時,是表明所陳述的特徵、整數、步驟、操作、元件、及/或組件的存在,但不排除一或多個其他特徵、整數、步驟、操作、元件、組件、及/或其群組的存在或添加。Similarly, it should be understood that when an element (such as a layer, region, or substrate) is said to be "on" another element, the element may be directly on the other element, or there may be intervening elements. In contrast, the term "directly" means that there are no intervening elements. It should be further understood that when the terms "include" and "comprising" are used herein, they indicate the presence of the stated features, integers, steps, operations, elements, and/or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

此外,將藉由作為本發明概念的理想化示例性圖的剖視圖來闡述詳細說明中的示例性實施例。相應地,可根據製造技術及/或可容許的誤差來修改示例性圖的形狀。因此,本發明概念的示例性實施例並非僅限於示例性圖中所示出的特定形狀,而是可包括可根據製造製程而產生的其他形狀。圖式中所例示的區域具有一般特性,且用於說明元件的特定形狀。因此,此不應被視為僅限於本發明概念的範圍。Furthermore, exemplary embodiments in the detailed description will be illustrated by cross-sectional views that are idealized exemplary views of the inventive concept. Accordingly, the shapes of the exemplary views may be modified according to manufacturing techniques and/or tolerable errors. Therefore, exemplary embodiments of the inventive concept are not limited to the specific shapes shown in the exemplary views, but may include other shapes that may be produced according to the manufacturing process. The areas illustrated in the drawings are of general nature and are used to illustrate specific shapes of the elements. Therefore, this should not be considered as limiting the scope of the inventive concept.

亦應理解,儘管本文中可能使用用語「第一」、「第二」、「第三」等來闡述各種元件,然而該些元件不應受限於該些用語。該些用語僅用於區分各個元件。因此,某些實施例中的第一元件可在其他實施例中被稱為第二元件,而此並不背離本發明的教示內容。本文中所闡釋及說明的本發明概念的態樣的示例性實施例包括其互補對應物。本說明書通篇中,相同的參考編號或相同的指示物表示相同的元件。It should also be understood that although the terms "first", "second", "third", etc. may be used herein to describe various elements, these elements should not be limited to these terms. These terms are only used to distinguish between various elements. Therefore, the first element in some embodiments may be referred to as the second element in other embodiments without departing from the teachings of the present invention. The exemplary embodiments of the aspects of the inventive concept explained and illustrated herein include their complementary counterparts. Throughout this specification, the same reference numerals or the same indicators represent the same elements.

此外,本文中參照剖視圖及/或平面圖來闡述示例性實施例,其中所述剖視圖及/或平面圖是理想化示例性說明圖。因此,預期存在由例如製造技術及/或容差所造成的相對於圖示形狀的偏離。因此,示例性實施例不應被視作僅限於本文中所示區的形狀,而是欲包括由例如製造所導致的形狀偏差。因此,圖中所示的區為示意性的,且其形狀並非旨在說明裝置的區的實際形狀、亦並非旨在限制示例性實施例的範圍。Furthermore, exemplary embodiments are described herein with reference to cross-sectional views and/or plan views, wherein the cross-sectional views and/or plan views are idealized exemplary illustrations. Therefore, deviations from the illustrated shapes due to, for example, manufacturing techniques and/or tolerances are expected. Therefore, the exemplary embodiments should not be considered limited to the shapes of the regions shown herein, but are intended to include shape deviations due to, for example, manufacturing. Therefore, the regions shown in the figures are schematic, and their shapes are not intended to illustrate the actual shapes of the regions of the device, nor are they intended to limit the scope of the exemplary embodiments.

請參閱圖1至圖2B所示,圖1為根據本發明之異方性導電膠的製作方法的處理流程示意圖;圖2A-2B為根據本發明異方性導電膠的製作方法的系統示意圖。如圖1至圖2A-2B所示,根據本發明之異方性導電膠的製作方法包含:排列準備步驟S10、鋪灑導電粒子步驟S20、移除多餘導電粒子步驟S30、磁吸步驟S40、轉印步驟S50、分離步驟S60、以及對貼步驟S70,用以製作連續式的異方性導電膠,可方便大量生產,並能控制品質。Please refer to FIG. 1 to FIG. 2B , FIG. 1 is a process flow diagram of the method for making anisotropic conductive glue according to the present invention; FIG. 2A-2B are system diagrams of the method for making anisotropic conductive glue according to the present invention. As shown in FIG. 1 to FIG. 2A-2B , the method for making anisotropic conductive glue according to the present invention includes: an arrangement preparation step S10, a conductive particle sprinkling step S20, a step of removing excess conductive particles S30, a magnetic attraction step S40, a transfer step S50, a separation step S60, and a bonding step S70, for making a continuous anisotropic conductive glue, which is convenient for mass production and can control quality.

具體而言,本發明之異方性導電膠的製作方法是由排列準備步驟S10開始,主要是設置晶圓10於傳輸裝置20中,晶圓10上設置有容置槽11,傳輸裝置20包含多個滾輪21以及驅動器22,滾輪21是連結至驅動器22,比如可經由鏈條、齒輪組或傳動桿,且該等滾輪21是在驅動器22的驅動下而朝前進方向D滾動,並帶動晶圓10往前進方向D移動,藉以連續饋入晶圓10以供後續處理。舉例而言,驅動器22可包含至少一電動馬達。Specifically, the manufacturing method of the anisotropic conductive adhesive of the present invention starts with an arrangement preparation step S10, which mainly includes placing a wafer 10 in a transmission device 20. A receiving groove 11 is provided on the wafer 10. The transmission device 20 includes a plurality of rollers 21 and a driver 22. The rollers 21 are connected to the driver 22, such as by a chain, a gear set or a transmission rod, and the rollers 21 are driven by the driver 22 to roll in a forward direction D and drive the wafer 10 to move in the forward direction D, so as to continuously feed the wafer 10 for subsequent processing. For example, the driver 22 may include at least one electric motor.

具體地,如圖3及圖4所示,圖3為根據本發明之異方性導電膠的製作方法的晶圓示意圖;圖4為根據本發明之異方性導電膠的製作方法的晶圓又一示意圖。在一些實施例中,該等容置槽11是特別配置成不相互接觸而分隔開,而較佳的,該等容置槽11是以陣列方式分佈。此外,每個容置槽11的形狀可為圓點,並具有特定的面積大小。要注意的是,在陣列方式分佈中,水平橫方向上相鄰的二容置槽11之間的橫向間距可為相同於或不同於垂直方向上相鄰的二容置槽11之間的垂直間距,亦即,橫向間距及垂直間距可依據實際需要而分別設計。Specifically, as shown in FIG3 and FIG4, FIG3 is a schematic diagram of a wafer according to the method for making anisotropic conductive paste of the present invention; FIG4 is another schematic diagram of a wafer according to the method for making anisotropic conductive paste of the present invention. In some embodiments, the receiving grooves 11 are specially configured to be separated without contacting each other, and preferably, the receiving grooves 11 are distributed in an array. In addition, each receiving groove 11 can be in the shape of a dot and have a specific area size. It should be noted that in the array arrangement, the lateral distance between two adjacent accommodating grooves 11 in the horizontal direction may be the same as or different from the vertical distance between two adjacent accommodating grooves 11 in the vertical direction, that is, the lateral distance and the vertical distance may be designed separately according to actual needs.

具體地,如圖3及圖4所示,在一些實施例中,晶圓10之容置槽11具有寬度W,寬度W介於導電粒子30之直徑的1.1倍至1.9倍之間,較佳地,寬度W介於導電粒子30之直徑的1.3倍至1.8倍之間。在一些實施例中,晶圓10之容置槽11具有深度h,深度h介於導電粒子30之直徑的0.5倍至1.1倍之間,較佳地,深度h介於導電粒子30之直徑的0.5倍至1.1倍之間。如此一來,本發明之晶圓10藉由調整容置槽的大小,防止容置槽重複容置多餘的導電粒子30,以保證多餘導電粒子30在隨後的移除多餘導電粒子步驟S30中被移除,提升本發明異方性導電膠的製作方法所產出的連續式異方性導電膠之品質,且容易執行,非常適合大量生產。Specifically, as shown in FIG. 3 and FIG. 4 , in some embodiments, the receiving groove 11 of the wafer 10 has a width W, and the width W is between 1.1 times and 1.9 times the diameter of the conductive particle 30. Preferably, the width W is between 1.3 times and 1.8 times the diameter of the conductive particle 30. In some embodiments, the receiving groove 11 of the wafer 10 has a depth h, and the depth h is between 0.5 times and 1.1 times the diameter of the conductive particle 30. Preferably, the depth h is between 0.5 times and 1.1 times the diameter of the conductive particle 30. In this way, the wafer 10 of the present invention adjusts the size of the receiving groove to prevent the receiving groove from repeatedly accommodating excess conductive particles 30, so as to ensure that the excess conductive particles 30 are removed in the subsequent excess conductive particle removal step S30, thereby improving the quality of the continuous anisotropic conductive adhesive produced by the manufacturing method of the anisotropic conductive adhesive of the present invention, and is easy to implement and very suitable for mass production.

接著在鋪灑導電粒子步驟S20中,鋪設或噴灑多個導電粒子30於晶圓10,比如可經由粒子噴灑器40進行,且部分的該等導電粒子30是容置於該等容置槽11中,尤其,容置槽11中最多只能容置單一個導電粒子30。Next, in the conductive particle spraying step S20 , a plurality of conductive particles 30 are sprayed or laid on the wafer 10 , for example, by a particle sprayer 40 , and some of the conductive particles 30 are accommodated in the receiving grooves 11 . In particular, the receiving groove 11 can accommodate only a single conductive particle 30 at most.

導電粒子30的結構為一般的習知技術,並非本發明的重點,因而在此只作簡單描述。每個等導電粒子30具有外徑,且包含絕緣膜(圖未示)以及導電核心體(圖未示),其中絕緣膜包覆導電核心體的外表面,尤其,絕緣膜是配置成在受外力的擠壓下會破裂而露出所包覆的導電核心體,所以在外力的方向上會因導電核心體的接觸而形成電氣導通,達到導電的目。The structure of the conductive particles 30 is a common known technology and is not the focus of the present invention, so it is only briefly described here. Each conductive particle 30 has an outer diameter and includes an insulating film (not shown) and a conductive core (not shown), wherein the insulating film covers the outer surface of the conductive core. In particular, the insulating film is configured to rupture under the pressure of an external force to expose the coated conductive core, so that electrical conduction is formed in the direction of the external force due to the contact of the conductive core, thereby achieving the purpose of conduction.

需要進一步說明的是,如圖3所示,雖然該等容置槽11已配置成不相互接觸而分隔開,但是為了避免該等導電粒子30在該等容置槽11上過度密集而造成相鄰二導導電粒子30相互影響,所以晶圓10中該等容置槽11的橫向間距及垂直間距是特別配置成使得該等容置槽11中相鄰的二容置槽11之間的間距L可以大於該導電粒子30的外徑的10%至200%之間。It should be further explained that, as shown in FIG. 3 , although the receiving grooves 11 are configured to be separated without contact with each other, in order to avoid the conductive particles 30 being overly densely packed on the receiving grooves 11 and causing two adjacent conductive particles 30 to affect each other, the lateral spacing and vertical spacing of the receiving grooves 11 in the wafer 10 are specially configured so that the spacing L between two adjacent receiving grooves 11 in the receiving grooves 11 can be greater than 10% to 200% of the outer diameter of the conductive particle 30.

接著進入移除多餘導電粒子步驟S30,利用粒子移除裝置50而移除未容置於容置槽11的多餘該等導電粒子30,亦即,晶圓10上只有容置槽11容置的導電粒子30。Then, the step S30 of removing excess conductive particles is performed, and the excess conductive particles 30 not contained in the containing grooves 11 are removed by using the particle removing device 50. That is, only the conductive particles 30 contained in the containing grooves 11 remain on the wafer 10.

舉例而言,粒子移除裝置50可包含刷子或吹氣裝置,而圖中是以刷子當作示範性實例。本質上,刷子是以刮除方式移除多餘該等導電粒子30,而吹氣裝置是藉吹氣方式而吹掉多餘該等導電粒子30,比如利用吹風機產生噴射氣流而達成,然而本發明不限於此。For example, the particle removal device 50 may include a brush or a blower, and the figure uses a brush as an exemplary example. In essence, the brush removes the excess conductive particles 30 by scraping, and the blower blows away the excess conductive particles 30 by blowing, such as using a blower to generate a jet of air, but the present invention is not limited thereto.

在磁吸步驟S40中,是將晶圓10移動至與轉印基板60平行處,該轉印基板60耦接於一磁吸裝置70,該磁吸裝置70透過產生磁力F吸引該等導電粒子30的導電核心體,使得導電粒子30離開容置槽11後吸附於轉印基板60的轉印表面61上。In the magnetic attraction step S40, the wafer 10 is moved to a position parallel to the transfer substrate 60. The transfer substrate 60 is coupled to a magnetic attraction device 70. The magnetic attraction device 70 generates a magnetic force F to attract the conductive cores of the conductive particles 30, so that the conductive particles 30 leave the accommodating groove 11 and are adsorbed on the transfer surface 61 of the transfer substrate 60.

具體地,在一些實施例中,轉印基板60係由非金屬材料製成,該非金屬材料係選自聚碳酸酯、聚對苯二甲酸乙二酯、聚甲基丙烯酸甲酯、聚醯亞胺、以及聚萘二甲酸乙二醇酯其中之一,上述之非金屬材料具有穩定的化學性質、良好的彈性、及延展度,使得轉印基板60可用捲帶或捲筒的方式設置而便連續拉出以饋入,供後續處理,具有廣泛適用性。具體地,在一些實施例中,轉印基板60由金屬材料製成,該金屬材料係選自鎳、銅、鋁、以及鋅其中之一,上述之金屬材料皆具有高導磁性,在外磁場作用下,其內部的磁感應強度會大大增強,使得磁吸裝置70產生的磁力F可以有效傳導至該等導電粒子30,穩定吸引該等導電粒子30的導電核心體,防止導電粒子30掉落的風險,藉此進一步確保本發明製成的連續式異方性導電膠之品質,然而本發明不限於此。Specifically, in some embodiments, the transfer substrate 60 is made of a non-metallic material, and the non-metallic material is selected from one of polycarbonate, polyethylene terephthalate, polymethyl methacrylate, polyimide, and polyethylene naphthalate. The above-mentioned non-metallic material has stable chemical properties, good elasticity, and ductility, so that the transfer substrate 60 can be arranged in the form of a tape or a reel so that it can be continuously pulled out and fed in for subsequent processing, and has wide applicability. Specifically, in some embodiments, the transfer substrate 60 is made of a metal material, and the metal material is selected from one of nickel, copper, aluminum, and zinc. The above metal materials all have high magnetic permeability. Under the action of an external magnetic field, the internal magnetic induction intensity will be greatly enhanced, so that the magnetic force F generated by the magnetic attraction device 70 can be effectively transmitted to the conductive particles 30, stably attracting the conductive core bodies of the conductive particles 30, and preventing the risk of the conductive particles 30 falling, thereby further ensuring the quality of the continuous anisotropic conductive glue made by the present invention, but the present invention is not limited to this.

具體地,磁吸裝置70可以是具有電磁鐵之裝置,其中,電磁鐵係為一種可以透過電流來產生磁力F的裝置,以透過電流控制磁力F的產生。需要進一步說明的是,磁吸裝置70所產生的磁力F的大小與轉印基板60相關聯,可以理解的是,當轉印基板60使用非金屬材料製成時,由於非金屬材料為非導磁材料,磁吸裝置70必須產生較強的磁力F以吸引該等導電粒子30的導電核心體,該磁力F可以介於2萬高斯(Gs)至3萬高斯之間。反之,當轉印基板60使用金屬材料製成時,由於金屬材料的導磁性較佳,因此磁吸裝置70可以產生較弱的磁力F以吸引該等導電粒子30的導電核心體,該磁力F可以介於5000高斯至2萬高斯之間,較佳地,該磁力F可以介於1萬高斯至2萬高斯之間,然而本發明不限於此。Specifically, the magnetic attraction device 70 may be a device having an electromagnet, wherein the electromagnet is a device that can generate a magnetic force F through an electric current, so as to control the generation of the magnetic force F through the electric current. It should be further explained that the magnitude of the magnetic force F generated by the magnetic attraction device 70 is related to the transfer substrate 60. It can be understood that when the transfer substrate 60 is made of non-metallic material, since the non-metallic material is a non-magnetic material, the magnetic attraction device 70 must generate a stronger magnetic force F to attract the conductive core body of the conductive particles 30. The magnetic force F may be between 20,000 Gauss (Gs) and 30,000 Gauss. On the contrary, when the transfer substrate 60 is made of metal material, since the metal material has better magnetic permeability, the magnetic attraction device 70 can generate a weaker magnetic force F to attract the conductive core body of the conductive particles 30. The magnetic force F can be between 5000 Gauss and 20,000 Gauss. Preferably, the magnetic force F can be between 10,000 Gauss and 20,000 Gauss, but the present invention is not limited to this.

在轉印步驟S50中,第一非導電膠膜(Non-Conductive Film,NCF)81透過傳輸裝置20移動至與轉印基板60平行處,並且該磁吸裝置70解除該磁力F。In the transfer step S50 , the first non-conductive film (NCF) 81 is moved to a position parallel to the transfer substrate 60 via the transmission device 20 , and the magnetic attraction device 70 releases the magnetic force F.

舉例而言,上述的第一非導電膠膜81可由非金屬的材料所構成,比如所使用的材料是包含聚胺酯(Polyurethane,PU)或環氧樹脂。For example, the first non-conductive adhesive film 81 may be made of a non-metallic material, such as polyurethane (PU) or epoxy resin.

接著進入分離步驟S60,導電粒子30與轉印基板60相互分離,並且導電粒子30留在第一非導電膠膜81的對貼表面811上。具體地,在一些實施例中,第一非導電膠膜81的對貼表面811可以具有黏性,使得該等導電粒子30固定在第一非導電膠膜81的對貼表面811上,然而本發明不限於此。Then, the separation step S60 is entered, the conductive particles 30 and the transfer substrate 60 are separated from each other, and the conductive particles 30 remain on the facing surface 811 of the first non-conductive adhesive film 81. Specifically, in some embodiments, the facing surface 811 of the first non-conductive adhesive film 81 may be adhesive, so that the conductive particles 30 are fixed on the facing surface 811 of the first non-conductive adhesive film 81, but the present invention is not limited thereto.

此外,由於在上述之轉印步驟S50時,轉印基板60平行於第一非導電膠膜81設置,因此進入分離步驟S60後,當導電粒子30轉印基板60相互分離後落至第一非導電膠膜81上時,導電粒子30在第一非導電膠膜81上的排列方式將與晶圓10之容置槽11的排列方式一致,如此一來,使用者可以藉由調整晶圓10之容置槽11的排列方式控制導電粒子30在第一非導電膠膜81上的排列方式,進而使導電粒子30是以預設特定圖案排列,不須另外藉由人力調整導電粒子30在第一非導電膠膜81上的排列,非常適合大量生產,同時確保品質穩定,非一般的批次生產方式所能達成。In addition, since the transfer substrate 60 is arranged parallel to the first non-conductive adhesive film 81 during the transfer step S50, after entering the separation step S60, when the conductive particles 30 are separated from the transfer substrate 60 and fall onto the first non-conductive adhesive film 81, the arrangement of the conductive particles 30 on the first non-conductive adhesive film 81 will be consistent with the arrangement of the receiving grooves 11 of the wafer 10. In this way, the user can control the arrangement of the conductive particles 30 on the first non-conductive adhesive film 81 by adjusting the arrangement of the receiving grooves 11 of the wafer 10, thereby arranging the conductive particles 30 in a preset specific pattern without having to manually adjust the arrangement of the conductive particles 30 on the first non-conductive adhesive film 81. This is very suitable for mass production and ensures stable quality, which cannot be achieved by ordinary batch production methods.

最後在對貼步驟S60中,將第二非導電膠膜82貼附於第一非導電膠膜81上,藉以覆蓋該等導電粒子30,形成所需的連續式異方性導電膠90,其中該等導電粒子30是被第二非導電膠膜82以及第一非導電膠膜81包夾住而形成單一層分佈的配置方式。具體地,上述的第二非導電膠膜82以及第一非導電膠膜81可由相同的材料所構成,然而本發明不限於此。Finally, in the laminating step S60, the second non-conductive adhesive film 82 is attached to the first non-conductive adhesive film 81 to cover the conductive particles 30, forming the desired continuous anisotropic conductive adhesive 90, wherein the conductive particles 30 are sandwiched by the second non-conductive adhesive film 82 and the first non-conductive adhesive film 81 to form a single-layer distribution configuration. Specifically, the second non-conductive adhesive film 82 and the first non-conductive adhesive film 81 can be made of the same material, but the present invention is not limited thereto.

由於轉印基板60、第一非導電膠膜81及第二非導電膠膜82,都可用捲帶或捲筒的方式設置而便連續拉出以饋入,供後續處理,所以可持續產生連續式異方性導電膠90,非常適合大量生產,確保品質穩定,而不是一般的批次生產方式所能達成。Since the transfer substrate 60, the first non-conductive adhesive film 81 and the second non-conductive adhesive film 82 can be arranged in the form of a tape or a reel so as to be continuously pulled out and fed in for subsequent processing, a continuous anisotropic conductive adhesive 90 can be continuously produced, which is very suitable for mass production and ensures stable quality, which cannot be achieved by a general batch production method.

整體而言,本發明是藉由晶圓10上設置容置槽11,並利用磁吸方式而將所有導電粒子30排列在第一非導電膠膜81的特定位置,並包夾在第一非導電膠膜81以及第二非導電膠膜82之間,達到精確且嚴格控制異方性導電膠90之導電粒子30排列位置的目的。In general, the present invention arranges the receiving groove 11 on the wafer 10 and uses magnetic attraction to arrange all the conductive particles 30 at specific positions of the first non-conductive adhesive film 81 and sandwiched between the first non-conductive adhesive film 81 and the second non-conductive adhesive film 82, so as to achieve the purpose of accurately and strictly controlling the arrangement position of the conductive particles 30 of the anisotropic conductive adhesive 90.

以下提供異方性導電膠的製作方法的其他示例,以使本發明所屬技術領域中具有通常知識者更清楚的理解可能的變化。以與上述實施例相同的元件符號指示的元件實質上相同於上述參照圖1至圖2B所敘述者。與先前異方性導電膠的製作方法相同的元件、特徵、和優點將不再贅述。Other examples of methods for making anisotropic conductive adhesive are provided below so that those skilled in the art can more clearly understand possible variations. Elements indicated by the same element symbols as in the above-mentioned embodiments are substantially the same as those described above with reference to FIGS. 1 to 2B. The same elements, features, and advantages as in the previous methods for making anisotropic conductive adhesive will not be described in detail.

請參閱圖5至圖6B所示,圖5為根據本發明又一實施例之異方性導電膠的製作方法的處理流程示意圖;圖6A-6B為根據本發明又一實施例之異方性導電膠的製作方法的系統示意圖。如圖5及圖6B所示,根據本發明又一實施例之異方性導電膠的製作方法包含:排列準備步驟S10'、鋪灑導電粒子步驟S20'、移除多餘導電粒子步驟S30'、磁吸步驟S40'、轉印步驟S50'、貼附步驟S60'、分離步驟S70'、以及對貼步驟S80'。Please refer to FIG. 5 to FIG. 6B , FIG. 5 is a process flow diagram of a method for making anisotropic conductive glue according to another embodiment of the present invention; FIG. 6A-6B are system diagrams of a method for making anisotropic conductive glue according to another embodiment of the present invention. As shown in FIG. 5 and FIG. 6B , the method for making anisotropic conductive glue according to another embodiment of the present invention includes: an arrangement preparation step S10 ', a conductive particle sprinkling step S20 ', a step of removing excess conductive particles S30 ', a magnetic attraction step S40 ', a transfer step S50 ', a pasting step S60 ', a separation step S70 ', and a pasting step S80 '.

具體地,在本實施例中,由於轉印基板60的該轉印表面61具有黏性,因此於轉印步驟S50'中磁吸裝置70解除該磁力F後,導電粒子30將固定在轉印表面61上,以減少導電粒子30掉落的風險。具體地,轉印表面61可以包含中等黏性膜(圖未示),該中等黏性膜本身是具有黏性,且中等黏性膜的黏性是第一非導電膠膜81的原有黏性的40%至80%之間,亦即,第一非導電膠膜81的該對貼表面811之黏性大於該轉印表面61之黏性。Specifically, in this embodiment, since the transfer surface 61 of the transfer substrate 60 is sticky, after the magnetic attraction device 70 releases the magnetic force F in the transfer step S50', the conductive particles 30 will be fixed on the transfer surface 61 to reduce the risk of the conductive particles 30 falling. Specifically, the transfer surface 61 may include a medium-viscosity film (not shown), which is sticky and has a viscosity between 40% and 80% of the original viscosity of the first non-conductive adhesive film 81, that is, the viscosity of the counter-attachment surface 811 of the first non-conductive adhesive film 81 is greater than the viscosity of the transfer surface 61.

在貼附步驟S60'中,將第一非導電膠膜81貼附於轉印基板60之轉印表面61,並且第一非導電膠膜81是藉接觸而貼附到留在該轉印表面61上的該等導電粒子30。需要進一步說明的是,由於轉印基板60的該轉印表面61具有黏性,因此導電粒子30無法單純藉由解除磁力F的方式與轉印表面61相互分離,在本實施例中,第一非導電膠膜81的該對貼表面811之黏性大於該轉印表面61之黏性,並搭配接觸的方式而貼附到留在該轉印表面61上的該等導電粒子30。In the attaching step S60', the first non-conductive adhesive film 81 is attached to the transfer surface 61 of the transfer substrate 60, and the first non-conductive adhesive film 81 is attached to the conductive particles 30 remaining on the transfer surface 61 by contact. It should be further explained that, since the transfer surface 61 of the transfer substrate 60 is sticky, the conductive particles 30 cannot be separated from the transfer surface 61 simply by removing the magnetic force F. In this embodiment, the stickiness of the counter-attachment surface 811 of the first non-conductive adhesive film 81 is greater than the stickiness of the transfer surface 61, and the conductive particles 30 remaining on the transfer surface 61 are attached by contact.

在本實施例中,分離步驟S70'進一步透過剝離將轉印基板60而與第一非導電膠膜81相互分離,由於第一非導電膠膜81的黏性大於轉印表面61的黏性,使得導電粒子30是留在第一非導電膠膜81上。In this embodiment, the separation step S70 ′ further separates the transfer substrate 60 from the first non-conductive adhesive film 81 by peeling. Since the viscosity of the first non-conductive adhesive film 81 is greater than the viscosity of the transfer surface 61 , the conductive particles 30 remain on the first non-conductive adhesive film 81 .

具體而言,在實際操作上,是先將第一非導電膠膜81的該對貼表面811貼附到轉印表面61,並覆蓋而接觸導電粒子30,接著剝離第一非導電膠膜81而與該轉印表面61分離。顯而易見的是,由於轉印表面61對導電粒子30的黏貼力是第一非導電膠膜81的40%至80%,所以被第一非導電膠膜81及轉印表面61同時黏住的導電粒子30,在轉印基板60及導電膠膜81相互剝離時,導電粒子30會留在第一非導電膠膜81的對貼表面811,而不會留在轉印表面61。Specifically, in actual operation, the counter-attachment surface 811 of the first non-conductive adhesive film 81 is first attached to the transfer surface 61 to cover and contact the conductive particles 30, and then the first non-conductive adhesive film 81 is peeled off to separate from the transfer surface 61. Obviously, since the adhesion of the transfer surface 61 to the conductive particles 30 is 40% to 80% of that of the first non-conductive adhesive film 81, the conductive particles 30 adhered to both the first non-conductive adhesive film 81 and the transfer surface 61 will remain on the counter-attachment surface 811 of the first non-conductive adhesive film 81 when the transfer substrate 60 and the conductive adhesive film 81 are peeled off from each other, and will not remain on the transfer surface 61.

可以理解的是,本發明所屬技術領域中具有通常知識者能夠基於上述示例再作出各種變化和調整,在此不再一一列舉。It is understandable that a person having ordinary knowledge in the technical field to which the present invention belongs can make various changes and adjustments based on the above examples, which will not be listed one by one here.

以上係藉由特定的具體實施例說明本發明之實施方式,所屬技術領域具有通常知識者可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。The above is an explanation of the implementation of the present invention by means of specific embodiments. A person having ordinary knowledge in the relevant technical field can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

以上所述僅為本發明之較佳實施例,並非用以限定本發明之範圍;凡其它未脫離本發明所揭示之精神下所完成之等效改變或修飾,均應包含在下述之專利範圍內。The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention; any other equivalent changes or modifications that are accomplished without departing from the spirit disclosed by the present invention should be included in the following patent scope.

10:晶圓 11:容置槽 20:傳輸裝置 21:滾輪 22:驅動器 30:導電粒子 40:粒子噴灑器 50:粒子移除裝置 60:轉印基板 61:轉印表面 70:磁吸裝置 81:第一非導電膠膜 82:第二非導電膠膜 811:對貼表面 90:異方性導電膠 D:前進方向 F:磁力 h:深度 W:寬度 L:間距 S10:排列準備步驟 S20:鋪灑導電粒子步驟 S30:移除多餘導電粒子步驟 S40:磁吸步驟 S50:轉印步驟 S60:分離步驟 S70:對貼步驟 S10':排列準備步驟 S20':鋪灑導電粒子步驟 S30':移除多餘導電粒子步驟 S40':磁吸步驟 S50':轉印步驟 S60':貼附步驟 S70':分離步驟 S80':對貼步驟 10: Wafer 11: Receiving slot 20: Conveying device 21: Roller 22: Driver 30: Conductive particles 40: Particle sprayer 50: Particle removal device 60: Transfer substrate 61: Transfer surface 70: Magnetic device 81: First non-conductive adhesive film 82: Second non-conductive adhesive film 811: Attachment surface 90: Anisotropic conductive adhesive D: Forward direction F: Magnetic force h: Depth W: Width L: Spacing S10: Arrangement preparation step S20: Conductive particle spraying step S30: Removal of excess conductive particles step S40: Magnetic attraction step S50: Transfer step S60: Separation step S70: Attachment step S10': Arrangement preparation step S20': Sprinkling conductive particles step S30': Removing excess conductive particles step S40': Magnetic attraction step S50': Transfer step S60': Attachment step S70': Separation step S80': Attachment step

圖1為根據本發明之異方性導電膠的製作方法的處理流程示意圖; 圖2A-2B為根據本發明之異方性導電膠的製作方法的系統示意圖; 圖3為根據本發明之異方性導電膠的製作方法的晶圓示意圖; 圖4為根據本發明之異方性導電膠的製作方法的晶圓又一示意圖; 圖5為根據本發明又一實施例之異方性導電膠的製作方法的處理流程示意圖; 圖6A-6B為根據本發明又一實施例之異方性導電膠的製作方法的系統示意圖。 FIG1 is a schematic diagram of a processing flow of a method for making anisotropic conductive glue according to the present invention; FIG2A-2B are schematic diagrams of a system of a method for making anisotropic conductive glue according to the present invention; FIG3 is a schematic diagram of a wafer of a method for making anisotropic conductive glue according to the present invention; FIG4 is another schematic diagram of a wafer of a method for making anisotropic conductive glue according to the present invention; FIG5 is a schematic diagram of a processing flow of a method for making anisotropic conductive glue according to another embodiment of the present invention; FIG6A-6B are schematic diagrams of a system of a method for making anisotropic conductive glue according to another embodiment of the present invention.

S10:排列準備步驟 S10: Arrange preparation steps

S20:鋪灑導電粒子步驟 S20: Step of sprinkling conductive particles

S30:移除多餘導電粒子步驟 S30: Step of removing excess conductive particles

S40:磁吸步驟 S40: Magnetic suction step

S50:轉印步驟 S50: Transfer step

S60:分離步驟 S60: Separation step

S70:對貼步驟 S70: Pasting steps

Claims (10)

一種異方性導電膠的製作方法,其係包含有: 一排列準備步驟,係設置一晶圓於一傳輸裝置中,該晶圓上設置有複數容置槽,且該等容置槽呈陣列排列,該傳輸裝置包含多個滾輪以及一驅動器,該等滾輪是連結至該驅動器,且經該驅動器驅動而朝一前進方向滾動,並帶動該晶圓往該前進方向移動; 一鋪灑導電粒子步驟,鋪設或噴灑複數導電粒子於該晶圓,且每個該等容置槽最多只容置單一個該導電粒子,其中,每個該等導電粒子具有一外徑,且包含一絕緣膜以及一導電核心體,該絕緣膜包覆該導電核心體的外表面; 一移除多餘導電粒子步驟,利用一粒子移除裝置而移除未容置於該容置槽的多餘該等導電粒子; 一磁吸步驟,該晶圓移動至與一轉印基板平行處,該轉印基板耦接於一磁吸裝置,該磁吸裝置透過產生一磁力吸引該等導電粒子的該導電核心體,使得該等導電粒子離開該等容置槽後吸附於該轉印基板的一轉印表面; 一轉印步驟,一第一非導電膠膜(Non-Conductive Film,NCF) 移動至與該轉印基板平行處,並且該磁吸裝置解除該磁力; 一分離步驟,該等導電粒子與該轉印基板分離,並且該等導電粒子留在該第一非導電膠膜的一對貼表面上; 一對貼步驟,貼附一第二非導電膠膜於該第一非導電膠膜的該對貼表面上以覆蓋該等導電粒子而形成一連續式異方性導電膠。 A method for making anisotropic conductive glue includes: An arrangement preparation step, which is to place a wafer in a transmission device, the wafer is provided with a plurality of receiving slots, and the receiving slots are arranged in an array, the transmission device includes a plurality of rollers and a driver, the rollers are connected to the driver, and are driven by the driver to roll in a forward direction, and drive the wafer to move in the forward direction; A step of sprinkling conductive particles, laying or spraying a plurality of conductive particles on the wafer, and each of the containing grooves can only contain a single conductive particle at most, wherein each of the conductive particles has an outer diameter and includes an insulating film and a conductive core body, and the insulating film covers the outer surface of the conductive core body; A step of removing excess conductive particles, using a particle removal device to remove the excess conductive particles not contained in the containing groove; A magnetic attraction step, the wafer moves to a position parallel to a transfer substrate, the transfer substrate is coupled to a magnetic attraction device, and the magnetic attraction device generates a magnetic force to attract the conductive core body of the conductive particles, so that the conductive particles leave the containing grooves and are adsorbed on a transfer surface of the transfer substrate; A transfer step, a first non-conductive film (NCF) moves to a position parallel to the transfer substrate, and the magnetic attraction device releases the magnetic force; A separation step, the conductive particles are separated from the transfer substrate, and the conductive particles remain on a pair of pasting surfaces of the first non-conductive film; A pair pasting step, a second non-conductive film is pasted on the pair of pasting surfaces of the first non-conductive film to cover the conductive particles to form a continuous anisotropic conductive adhesive. 如請求項1所述之異方性導電膠的製作方法,其中,該轉印基板的該轉印表面具有黏性,且該第一非導電膠膜的該對貼表面之黏性大於該轉印表面之黏性。The method for manufacturing anisotropic conductive adhesive as described in claim 1, wherein the transfer surface of the transfer substrate is sticky, and the stickiness of the opposing surface of the first non-conductive adhesive film is greater than the stickiness of the transfer surface. 如請求項2所述之異方性導電膠的製作方法,其中,該異方性導電膠的製作方法進一步包含: 一貼附步驟,將該第一非導電膠膜貼附於該轉印基板,並且該第一非導電膠膜是藉接觸而貼附到留在該轉印表面上的該等導電粒子; 其中,該分離步驟進一步透過剝離將該轉印基板而與該第一非導電膠膜相互分離,由於該第一非導電膠膜的黏性大於該轉印表面的黏性,使得該等導電粒子是留在該第一非導電膠膜上。 The method for making anisotropic conductive adhesive as described in claim 2, wherein the method for making anisotropic conductive adhesive further comprises: an attaching step, attaching the first non-conductive adhesive film to the transfer substrate, and the first non-conductive adhesive film is attached to the conductive particles remaining on the transfer surface by contact; wherein the separation step further separates the transfer substrate from the first non-conductive adhesive film by peeling, and since the viscosity of the first non-conductive adhesive film is greater than the viscosity of the transfer surface, the conductive particles remain on the first non-conductive adhesive film. 如請求項2所述之異方性導電膠的製作方法,其中,該轉印表面包含一中等黏性膜,該中等黏性膜本身具有黏性,且該中等黏性膜的黏性是該第一非導電膠膜的黏性的40%至80%之間,該中等黏性膜是在該貼附步驟中與該第一非導電膠膜的該對貼表面相互貼附,該對貼表面覆蓋而接觸該等導電粒子,接著剝離該導電膠膜而與該中等黏性膜分離,該導電粒子會留在該導電膠膜的該對貼表面。A method for making anisotropic conductive adhesive as described in claim 2, wherein the transfer surface includes a medium-viscosity film, the medium-viscosity film itself is sticky, and the viscosity of the medium-viscosity film is between 40% and 80% of the viscosity of the first non-conductive adhesive film. The medium-viscosity film is adhered to the counter-attachment surface of the first non-conductive adhesive film during the attachment step, and the counter-attachment surface covers and contacts the conductive particles. The conductive adhesive film is then peeled off and separated from the medium-viscosity film, and the conductive particles remain on the counter-attachment surface of the conductive adhesive film. 如請求項1所述之異方性導電膠的製作方法,其中,該轉印基板係由非金屬材料製成,該非金屬材料係選自聚碳酸酯、聚對苯二甲酸乙二酯、聚甲基丙烯酸甲酯、聚醯亞胺、以及聚萘二甲酸乙二醇酯其中之一。A method for producing anisotropic conductive adhesive as described in claim 1, wherein the transfer substrate is made of a non-metallic material, and the non-metallic material is selected from one of polycarbonate, polyethylene terephthalate, polymethyl methacrylate, polyimide, and polyethylene naphthalate. 如請求項1所述之異方性導電膠的製作方法,其中,該轉印基板係由金屬材料製成,該金屬材料係選自鎳、銅、鋁、以及鋅其中之一。The method for manufacturing anisotropic conductive paste as described in claim 1, wherein the transfer substrate is made of a metal material, and the metal material is selected from one of nickel, copper, aluminum, and zinc. 如請求項1所述之異方性導電膠的製作方法,其中,該等容置槽具有一寬度,該寬度介於該導電粒子之直徑的1.1倍至1.9倍之間。A method for manufacturing anisotropic conductive adhesive as described in claim 1, wherein the receiving grooves have a width ranging from 1.1 times to 1.9 times the diameter of the conductive particles. 如請求項1所述之異方性導電膠的製作方法,其中,該等容置槽具有一深度,該深度介於該導電粒子之直徑的0.5倍至1.1倍之間。A method for manufacturing anisotropic conductive paste as described in claim 1, wherein the receiving grooves have a depth ranging from 0.5 times to 1.1 times the diameter of the conductive particles. 如請求項1所述之異方性導電膠的製作方法,其中,該驅動器包含至少一電動馬達。A method for manufacturing anisotropic conductive adhesive as described in claim 1, wherein the driver includes at least one electric motor. 如請求項1之異方性導電膠的製作方法,其中,該第二非導電膠膜以及該第一非導電膠膜是由相同的一材料所構成,該材料係選自聚胺酯(Polyurethane,PU)以及環氧樹脂其中之一。The method for manufacturing anisotropic conductive adhesive as claimed in claim 1, wherein the second non-conductive adhesive film and the first non-conductive adhesive film are made of the same material, which is selected from one of polyurethane (PU) and epoxy resin.
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TW200839985A (en) * 2007-03-30 2008-10-01 Int Semiconductor Tech Ltd Method for disposing conductive particles on contacts of a substrate
TW201909359A (en) * 2017-07-11 2019-03-01 瑋鋒科技股份有限公司 Anisotropic conductive film manufacturing method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200839985A (en) * 2007-03-30 2008-10-01 Int Semiconductor Tech Ltd Method for disposing conductive particles on contacts of a substrate
TW201909359A (en) * 2017-07-11 2019-03-01 瑋鋒科技股份有限公司 Anisotropic conductive film manufacturing method

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