TWI846112B - Non mid-mounted driving type rotation device - Google Patents
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Abstract
Description
本案與旋轉裝置有關,特別是關於一種非於旋轉中心帶動的旋轉裝置有關。This invention relates to rotating devices, and more particularly to a rotating device that is not driven about a center of rotation.
隨著自動化概念的普及,各行各業無不導入自動化概念來提高效率,以生產製造業來說,自動化製程可大幅提高生產效率而顯著提高產能及產值。With the popularization of the concept of automation, all walks of life have introduced the concept of automation to improve efficiency. For the manufacturing industry, the automated process can greatly improve production efficiency and significantly increase production capacity and output value.
而在各領域的自動化製程中,移載裝置為攸關空間配置及效率的重要裝置之一,而移載裝置主要包含承載物件進行線性位移的線性移載裝置或是承載物件進行旋轉位移的旋轉裝置。以旋轉裝置來看,為了承載物件並進行旋轉位移通常都會直接使用旋轉驅動源直接連接於用於承載物件的承載台一側,透過驅動源設置於承載台的旋轉中心直接驅動承載台轉動。In the automation process of various fields, the transfer device is one of the important devices related to space configuration and efficiency. The transfer device mainly includes a linear transfer device that carries objects for linear displacement or a rotary device that carries objects for rotational displacement. In terms of the rotary device, in order to carry objects and perform rotational displacement, a rotary drive source is usually directly connected to one side of the carrier used to carry the objects, and the drive source is set at the rotation center of the carrier to directly drive the carrier to rotate.
然而,在一些自動化製程中,被承載物件除了具有旋轉的需求之外,可能於其兩側也還須配置其他周邊裝置以對被承載物進行其他自動化製程中的工作(例如特定半導體元件必須同時由其兩側進行測試),如此一來,一般的旋轉裝置將無法符合需求而有待改善。However, in some automated processes, in addition to the need to rotate the object, other peripheral devices may also need to be configured on both sides of the object to perform other tasks in the automated process on the object (for example, a specific semiconductor component must be tested from both sides at the same time). In this case, a general rotation device will not be able to meet the requirements and needs to be improved.
本案提供一種非中置驅動旋轉裝置,包含基座、驅動單元、四帶動組件、帶動件以及載台。驅動單元設置於基座上。各帶動組件分別包含固定部件及位移部件,固定部件固定於基座上,位移部件可轉動並可沿第一方向及垂直於第一方向的第二方向位移地設置於固定部件上;每一帶動組件彼此間於第一方向或第二方向上的間距相同。帶動件連接於驅動單元,且帶動件連接各帶動組件的位移部件並圈繞於各帶動組件。載台設置於各帶動組件的位移部件上。The present invention provides a non-centrally mounted driving and rotating device, comprising a base, a driving unit, four driving components, a driving member and a carrier. The driving unit is disposed on the base. Each driving component comprises a fixed component and a displacement component, respectively. The fixed component is fixed on the base, and the displacement component is rotatable and can be displaced along a first direction and a second direction perpendicular to the first direction and disposed on the fixed component; each driving component has the same distance in the first direction or the second direction. The driving member is connected to the driving unit, and the driving member is connected to the displacement component of each driving component and is wound around each driving component. The carrier is disposed on the displacement component of each driving component.
藉此,當驅動單元帶動帶動件位移時,帶動件帶動各帶動組件同步位移,每一帶動組件同時產生兩個方向的線性位移並伴隨旋轉動量,配合各帶動組件的位置配置致使載台轉動,於此,驅動單元不須設置於基座或載台的中心位置,載台或基座的兩側都能配置其他周邊裝置,提高使用適用性。Thereby, when the driving unit drives the driven member to displace, the driven member drives each driven component to displace synchronously, and each driven component simultaneously generates linear displacement in two directions accompanied by rotational momentum, and the position configuration of each driven component causes the carrier to rotate. Here, the driving unit does not need to be set at the center position of the base or the carrier, and other peripheral devices can be configured on both sides of the carrier or the base, thereby improving applicability.
一些實施例中,前述位移部件包含第一位移部件及第二位移部件,第一位移部件可位移地設置於固定部件上,第二位移部件可位移地設置於第一位移部件上,第一位移部件與該第二位移部件的位移方向彼此垂直。In some embodiments, the displacement component includes a first displacement component and a second displacement component. The first displacement component is displaceably disposed on the fixed component, and the second displacement component is displaceably disposed on the first displacement component. The displacement directions of the first displacement component and the second displacement component are perpendicular to each other.
一些實施例中,前述其中相鄰的二帶動組件之第一位移部件的線性位移方向彼此垂直,且相鄰的二帶動組件之第二位移部件的線性位移方向彼此垂直。In some embodiments, the linear displacement directions of the first displacement components of the two adjacent driving assemblies are perpendicular to each other, and the linear displacement directions of the second displacement components of the two adjacent driving assemblies are perpendicular to each other.
一些實施例中,前述載台可轉動地設置於各帶動組件的第二位移部件上。In some embodiments, the aforementioned carrier is rotatably disposed on the second displacement component of each driving assembly.
一些實施例中,前述帶動件為鋼帶或皮帶。In some embodiments, the driving member is a steel belt or a leather belt.
一些實施例中,前述驅動單元包含馬達、螺桿及螺帽,馬達固定於基座上,螺桿連接於馬達,螺帽可位移地設置於基座上並穿套於螺桿外,帶動件連接於螺帽。In some embodiments, the aforementioned driving unit includes a motor, a screw and a nut, the motor is fixed on the base, the screw is connected to the motor, the nut is displaceably arranged on the base and is sleeved on the outside of the screw, and the driver is connected to the nut.
一些實施例中,非中置驅動旋轉裝置更包含線性導軌組件,設置於基座上並連接於螺帽與帶動件之間。In some embodiments, the non-central drive rotation device further includes a linear guide rail assembly disposed on the base and connected between the nut and the driver.
一些實施例中,前述線性導軌組件包含滑軌及滑塊,滑軌固定於基座上,滑塊可滑移地穿套於滑軌,滑塊連接於螺帽與帶動件之間。In some embodiments, the linear guide rail assembly includes a slide rail and a slide block, the slide rail is fixed on the base, the slide block can be slidably inserted into the slide rail, and the slide block is connected between the nut and the driving member.
一些實施例中,前述帶動組件分別包含滑輪,帶動件抵靠於滑輪。In some embodiments, the aforementioned driving components respectively include pulleys, and the driving member abuts against the pulleys.
一些實施例中,前述基座具有通孔,四帶動組件位於通孔周圍,且四帶動組件中相距最遠的兩兩帶動組件之連線交會於通孔。In some embodiments, the base has a through hole, four driving components are located around the through hole, and the connection lines between two of the four driving components that are farthest apart intersect at the through hole.
一些實施例中,前述載台具有貫孔,貫孔與通孔相對。In some embodiments, the aforementioned carrier has a through hole, and the through hole is opposite to the through hole.
請配合參閱圖1至圖5,圖1為本案非中置驅動旋轉裝置之一實施例的立體外觀示意圖;圖2為本案非中置驅動旋轉裝置之一實施例的局部結構分解示意圖;圖3為圖2的局部結構放大示意圖;圖4為本案非中置驅動旋轉裝置之一實施例的俯視示意圖;圖5為本案非中置驅動旋轉裝置之一實施例的帶動組件之配置圖。本案非中置驅動旋轉裝置能帶動具有中央貫孔51的載台50轉動,且驅動單元20不須設置於載台50的旋轉中心O,亦不需於載台50的旋轉中心O設置軸承,便於周邊裝置能透過載台50的貫孔51進行配置,滿足不同的使用需求。Please refer to Figures 1 to 5. Figure 1 is a three-dimensional external view of an embodiment of the non-central drive rotating device of the present invention; Figure 2 is a partial structural decomposition diagram of an embodiment of the non-central drive rotating device of the present invention; Figure 3 is an enlarged partial structural diagram of Figure 2; Figure 4 is a top view of an embodiment of the non-central drive rotating device of the present invention; and Figure 5 is a configuration diagram of the driving assembly of an embodiment of the non-central drive rotating device of the present invention. The non-central drive rotating device of the present invention can drive the
參閱圖1至圖3,非中置驅動旋轉裝置包含基座10、驅動單元20、四帶動組件30、帶動件40以及載台50。驅動單元20設置於基座10上。各帶動組件30分別包含固定部件31及位移部件32,固定部件31固定於基座10上,位移部件32可轉動並可沿第一方向D1及垂直於第一方向D1的第二方向D2位移地設置於固定部件31上,每一帶動組件30彼此間於第一方向D1或第二方向D2上的間距相同。帶動件40連接於驅動單元20,且帶動件40連接各帶動組件30的位移部件32並圈繞於前述四帶動組件30。載台50設置於前述四帶動組件30的位移部件32上。Referring to FIGS. 1 to 3 , the non-centrally mounted driving rotating device includes a
藉此,當驅動單元20帶動帶動件40位移時,帶動件40帶動各帶動組件30同步位移,每一帶動組件30同時產生兩個方向的線性位移並伴隨旋轉動量,配合各帶動組件30的位置配置致使載台50轉動,於此,驅動單元20不須設置於基座10或載台50的中心位置,載台50或基座10的兩側都能提供其他周邊裝置配置,提高使用適用性。Thereby, when the
參閱圖1及圖2,一些實施例中,基座10為具有通孔11的板體,通孔11貫穿基座10,而驅動單元20及四帶動組件30設置於基座10的其中一面上。此些實施例中,通孔11的形狀為長矩形,且基座10的通孔11相對於載台50的貫孔51,但本案並不以此為限。Referring to FIG. 1 and FIG. 2 , in some embodiments, the
參閱圖1及圖2,驅動單元20為可產生線性位移驅動力的結構,且不限於是單一結構或是複數結構的組合。一些實施例中,驅動單元20包含馬達21、螺桿22及螺帽23。此些實施例中,馬達21固定於基座10上,螺桿22連接於馬達21以受馬達21帶動而轉動,螺帽23可位移地設置於基座10上並螺合穿套於螺桿22外。當馬達21運轉時,馬達21驅動螺桿22轉動,而螺合於螺桿22的螺帽23即能沿螺桿22的延伸方向產生線性位移驅動力並得以帶動帶動件40線性位移。值得說明的是,驅動單元20的形態並不以此為限,在一些其他實施例中,可直接產生線性位移驅動力的氣/液壓缸,或是馬達與齒輪、齒條的組合結構亦可為驅動單元20的不同實施形態。Referring to FIG. 1 and FIG. 2 , the
參閱圖2、圖4及圖5,圖5省略基座10而能更清楚顯示帶動組件30之配置。一些實施例中,四帶動組件30設置於基座10的通孔11周圍並排列為正方形。具體而言,各帶動組件30的外觀形態相同,此些實施例中,各帶動組件30為正方形柱體,各帶動組件30貼靠連接於基座10的一面之形狀為正方形,但本案並不以此為限。於此,各帶動組件30分別具有中心點C,各中心點C沿第一方向D1及第二方向D2的連線構成正方形(如圖5中中心點C的連線),也就是說,以如圖4、圖5之視角來看,每一帶動組件30彼此間於第一方向D1或第二方向D2上的間距都相同。Referring to FIG. 2 , FIG. 4 and FIG. 5 , FIG. 5 omits the
在四帶動組件30排列為正方形並設置於通孔11周圍的一些實施例中,位於對角位置(相距最遠的兩個)的兩兩帶動組件30之中心點C連線交會於旋轉中心O,且旋轉中心O位於基座10的通孔11範圍內。此些實施例中,旋轉中心O為載台50轉動的旋轉中心O。In some embodiments where four
參閱圖1至圖3,為實現各帶動組件30的位移部件32可沿第一方向D1及第二方向D2線性位移的目的,一些實施例中,各帶動組件30的位移部件32包含第一位移部件321及第二位移部件322,第一位移部件321可位移地設置於固定部件31上,第二位移部件322可位移地設置於第一位移部件321上,且第一位移部件321與第二位移部件322的線性位移方向彼此垂直。如此一來,帶動組件30的位移部件32即能提供兩個方向的線性位移能力。Referring to FIGS. 1 to 3 , in order to realize the purpose that the
值得說明的是,在帶動組件30排列為正方形的一些實施例中,各帶動組件30的結構組態相同,只是設置於基座10上的方位不同。具體而言,四帶動組件30中每二相鄰的帶動組件30之第一位移部件321的線性位移方向彼此垂直,且每二相鄰的帶動組件30之第二位移部件322的線性位移方向彼此垂直。It is worth noting that in some embodiments where the
以如圖2、圖4的視角來看,驅動單元20設置於基座10的左側,相對側為右側,且驅動單元20的馬達21靠近基座10的上側,反之為下側。From the perspective of FIG. 2 and FIG. 4 , the
參閱圖2及圖4,在此,位於左下側的帶動組件30之第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,且左下側的帶動組件30之第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上;位於左上側的帶動組件30之第一位移部件321是可沿第二方向D2位移地設置於固定部件31上,且左上側的帶動組件30之第二位移部件322是可沿第一方向D1位移地設置於第一位移部件321上;位於右下側的帶動組件30之第一位移部件321是可沿第二方向D2位移地設置於固定部件31上,且右下側的帶動組件30之第二位移部件322是可沿第一方向D1位移地設置於第一位移部件321上;位於右上側的帶動組件30之第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,且右上側的帶動組件30之第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上。Referring to FIG. 2 and FIG. 4 , the
如此一來,請配合參閱圖2、圖4及圖5,當驅動單元20運轉並帶動帶動件40朝順時針方向位移轉動時,各帶動組件30分別能產生兩個不同方向的線性位移並伴隨轉動動量,藉此順應帶動件40的轉動以帶動載台50能順利產生環繞旋轉中心O位移的轉動位移。具體而言,左下側的帶動組件30被帶動而朝左側及上側位移並伴隨順時針轉動,左上側的帶動組件30之第一位移部件321被帶動而朝上側及右側位移並伴隨順時針轉動;右上側的帶動組件30之第一位移部件321被帶動而朝右側及下側位移並伴隨順時針轉動;右下側的帶動組件30之第一位移部件321被帶動而朝下側及左側位移並伴隨順時針轉動。於此作用下,四帶動組件30的位移同步產生並帶動載台50產生環繞旋轉中心O位移的轉動位移。In this way, please refer to Figures 2, 4 and 5. When the driving
參閱圖2及圖3,一些實施例中,為確保載台50穩定地沿所需方位位移,各帶動組件30更分別包含複數線性導引裝置33及轉動結構34,固定部件31與第一位移部件321之間以及第一位移部件321與第二位移部件322之間分別設置有線性導引裝置33以導引第一位移部件321及第二位移部件322線性位移,而第二位移部件322與載台50間設置轉動結構34以使載台50能相對於各第二位移部件322轉動。Referring to FIG. 2 and FIG. 3 , in some embodiments, in order to ensure that the
參閱圖2及圖3,一些實施例中,線性導引裝置33為線性滑軌。此些實施例中,線性導引裝置33包含固定軌331、滾動件332及滑動軌333,滾動件332可滾動地設置於固定軌331與滑動軌333之間,滑動軌333能抵靠於滾動件332相對於固定軌331線性位移。於此,固定軌331固定設置於固定部件31朝向第一位移部件321的一面以及第一位移部件321朝向第二位移部件322的一面,第一位移部件321朝向固定軌331的一面以及第二位移部件322朝向第一位移部件321的一面再分別連接於滑動軌333,藉此使第一位移部件321及第二位移部件322都能分別受到線性導引裝置33的導引以穩定線性位移。Referring to FIG. 2 and FIG. 3 , in some embodiments, the
一些實施例中,轉動結構34為軸承,但本案並不以此為限。此些實施例中,轉動結構34包含內環341及外環342,內環341固定設置於第二位移部件322朝向載台50的一面,外環342可轉動地套設於內環341外並固定於載台50朝向第二位移部件322的一面。In some embodiments, the rotating
參閱圖2及圖3,值得說明的是,此些實施例中,設置於固定部件31與第一位移部件321間的線性導引裝置33是為負責導引第一位移部件321線性位移,因此,設置於固定部件31與第一位移部件321間的線性導引裝置33之線性導引方向與第一位移部件321的線性位移方向相同;且設置於第一位移部件321與第二位移部件322間的線性導引裝置33是為負責導引第二位移部件322線性位移,因此,設置於第一位移部件321與第二位移部件322間的線性導引裝置33之線性導引方向與第二位移部件322的線性位移方向相同。以圖3繪示之帶動組件30之一實施例來說,圖3中之帶動組件30的第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,因此固定部件31與第一位移部件321間的線性導引裝置33之固定軌331及滑動軌333亦是沿第一方向D1延伸長度;而圖3中之帶動組件30的第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上,因此第一位移部件321與第二位移部件322間的線性導引裝置33之固定軌331及滑動軌333亦是沿第二方向D2延伸長度。Referring to FIG. 2 and FIG. 3 , it is worth noting that in these embodiments, the
參閱圖3,一些實施例中,為提高帶動組件30的位移穩定性,各帶動組件30的固定部件31與第一位移部件321間、第一位移部件321與第二位移部件322間分別設置兩組線性導引裝置33,且固定部件31與第一位移部件321間的兩組線性導引裝置33彼此平行,第一位移部件321與第二位移部件322間的兩組線性導引裝置33彼此平行。藉此,第一位移部件321可同時固定於固定部件31上兩組線性導引裝置33的滑動軌333,第二位移部件322可同時固定於第一位移部件321上兩組線性導引裝置33的滑動軌333,第一位移部件321及第二位移部件322分別受到兩組線性導引裝置33導引,提高位移穩定性。Referring to FIG. 3 , in some embodiments, in order to improve the displacement stability of the driving
參閱圖3,在第一位移部件321與第二位移部件322分別受到兩組線性導引裝置33導引的一些實施例中,固定部件31與第一位移部件321間的兩組線性導引裝置33彼此間隔,第一位移部件321與第二位移部件322間的兩組線性導引裝置33彼此間隔,如此一來,固定部件31與第一位移部件321間的兩組線性導引裝置33間以及第一位移部件321與第二位移部件322間的兩組線性導引裝置33間分別構成導引通道35,而第一位移部件321朝向固定部件31的一面具有第一凸起部3211,第二位移部件322朝向第一位移部件321的一面具有第二凸起部3221,第一位移部件321的第一凸起部3211可滑移地容置於固定部件31與第一位移部件321間的導引通道35,第二位移部件322的第二凸起部3221可滑移地容置於第一位移部件321與第二位移部件322間的導引通道35,藉此,第一位移部件321及第二位移部件322能分別受到導引通道35的限位而減少偏移,提高位移穩定性。Referring to FIG. 3 , in some embodiments where the
參閱圖2及圖3,一些實施例中,線性導引裝置33為交叉滾柱滑軌,但本案並不以此為限。此些實施例中,滾動件332為圓形滾柱,且相鄰的滾動件332是彼此間呈90度角地配置。藉此能提供多方向性的負荷,提高產品壽命。Referring to FIG. 2 and FIG. 3 , in some embodiments, the
一些實施例中,帶動件40可以但不限於是皮帶或鋼帶。In some embodiments, the driving
參閱圖1至圖2,一些實施例中,為提高帶動件40帶動各帶動組件30位移的順暢性,各帶動組件30分別包含滑輪36,滑輪36可轉動地設置於基座10上。此些實施例中,滑輪36是鄰接於固定部件31,而帶動件40圈繞於各帶動組件30的滑輪36,藉此,當帶動件40位移時可抵靠於滑輪36,藉此提高帶動件40的位移順暢性。Referring to FIG. 1 and FIG. 2 , in some embodiments, in order to improve the smoothness of the displacement of each driven
參閱圖2、圖4及圖5,一些實施例中,帶動件40包含對應帶動組件30數量的帶動塊41,帶動件40透過帶動塊41帶動帶動組件30。此些實施例中,帶動塊41的一端固定於帶動件40上,帶動塊41的另一端固定於各帶動組件30的第一位移部件321上。藉此,透過帶動塊41的配置而能提高帶動件40在空間配置上的自由度。值得說明的是,於此,帶動件40是圍繞四帶動組件30成為正方形輪廓,為使帶動件40帶動四帶動組件30的位移綜合作用成為環繞旋轉中心O位移的目的,帶動塊41是位於正方形帶動件40的每一邊上,藉此才能帶動各帶動組件30分別朝向不同方向位移,而綜合作用成為環繞旋轉中心O轉動的移載。Referring to FIG. 2 , FIG. 4 and FIG. 5 , in some embodiments, the driving
參閱圖1,一些實施例中,為確保驅動單元20的驅動穩定性,非中置驅動旋轉裝置更包含線性導軌組件60設置於基座10上並連接於驅動單元20與帶動件40之間。此些實施例中,線性導軌組件60包含滑軌61及滑塊62,滑軌61固定設置於基座10上,滑塊62可滑移地穿套於滑軌61外,且滑塊62連接於驅動單元20的螺帽23與帶動件40之間。藉此,透過線性導軌組件60得以將驅動單元20的動力穩定傳遞予帶動件40,而能穩定帶動帶動件40位移。Referring to FIG. 1 , in some embodiments, in order to ensure the driving stability of the driving
雖然本揭露已以一些實施例揭露如上,然其並非用以限定本揭露,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神及範圍內,當可作些許更動及潤飾。因此本案之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。Although the present disclosure has been disclosed as above with some embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the relevant technical field may make some changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of patent protection of this case shall be subject to the scope of the patent application attached to this specification.
10:基座 11:通孔 20:驅動單元 21:馬達 22:螺桿 23:螺帽 30:帶動組件 31:固定部件 32:位移部件 321:第一位移部件 3211:第一凸起部 322:第二位移部件 3221:第二凸起部 33:線性導引裝置 331:固定軌 332:滾動件 333:滑動軌 34:轉動結構 341:內環 342:外環 35:導引通道 36:滑輪 40:帶動件 41:帶動塊 50:載台 51:貫孔 60:線性導軌組件 61:滑軌 62:滑塊 D1:第一方向 D2:第二方向 O:旋轉中心 C:中心點 10: base 11: through hole 20: drive unit 21: motor 22: screw 23: nut 30: drive assembly 31: fixed component 32: displacement component 321: first displacement component 3211: first protrusion 322: second displacement component 3221: second protrusion 33: linear guide device 331: fixed rail 332: rolling element 333: sliding rail 34: rotating structure 341: inner ring 342: outer ring 35: guide channel 36: pulley 40: drive element 41: drive block 50: carrier 51: through hole 60: linear guide assembly 61: Slide rail 62: Slide block D1: First direction D2: Second direction O: Rotation center C: Center point
圖1為本案非中置驅動旋轉裝置之一實施例的立體外觀示意圖。 圖2為本案非中置驅動旋轉裝置之一實施例的局部結構分解示意圖。 圖3為圖2的局部結構放大示意圖。 圖4為本案非中置驅動旋轉裝置之一實施例的俯視示意圖。 圖5為本案非中置驅動旋轉裝置之一實施例的帶動組件之配置圖。 FIG. 1 is a three-dimensional schematic diagram of an embodiment of a non-central drive rotating device of the present invention. FIG. 2 is a schematic diagram of a partial structural decomposition of an embodiment of a non-central drive rotating device of the present invention. FIG. 3 is a schematic diagram of an enlarged partial structure of FIG. 2. FIG. 4 is a schematic diagram of a top view of an embodiment of a non-central drive rotating device of the present invention. FIG. 5 is a configuration diagram of a driving assembly of an embodiment of a non-central drive rotating device of the present invention.
10:基座 11:通孔 20:驅動單元 21:馬達 22:螺桿 23:螺帽 30:帶動組件 31:固定部件 32:位移部件 321:第一位移部件 322:第二位移部件 33:線性導引裝置 331:固定軌 332:滾動件 333:滑動軌 34:轉動結構 341:內環 342:外環 35:導引通道 36:滑輪 40:帶動件 41:帶動塊 50:載台 51:貫孔 D1:第一方向 D2:第二方向 10: base 11: through hole 20: drive unit 21: motor 22: screw 23: nut 30: drive assembly 31: fixed component 32: displacement component 321: first displacement component 322: second displacement component 33: linear guide device 331: fixed rail 332: rolling element 333: sliding rail 34: rotating structure 341: inner ring 342: outer ring 35: guide channel 36: pulley 40: drive element 41: drive block 50: carrier 51: through hole D1: first direction D2: second direction
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| TW111140979A TWI846112B (en) | 2022-10-27 | 2022-10-27 | Non mid-mounted driving type rotation device |
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| US20020037460A1 (en) * | 2000-08-02 | 2002-03-28 | Nikon Corporation | Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method |
| TW201115676A (en) * | 2009-10-20 | 2011-05-01 | Top Eng Co Ltd | Substrate positioning apparatus and method of positioning substrate using the same |
| JP2012094770A (en) * | 2010-10-28 | 2012-05-17 | Olympus Corp | Inspection device and substrate positioning method |
| TW202215568A (en) * | 2020-06-22 | 2022-04-16 | 南韓商杰宜斯科技有限公司 | Wafer processing apparatus |
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- 2022-10-27 TW TW111140979A patent/TWI846112B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020037460A1 (en) * | 2000-08-02 | 2002-03-28 | Nikon Corporation | Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method |
| TW201115676A (en) * | 2009-10-20 | 2011-05-01 | Top Eng Co Ltd | Substrate positioning apparatus and method of positioning substrate using the same |
| JP2012094770A (en) * | 2010-10-28 | 2012-05-17 | Olympus Corp | Inspection device and substrate positioning method |
| TW202215568A (en) * | 2020-06-22 | 2022-04-16 | 南韓商杰宜斯科技有限公司 | Wafer processing apparatus |
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