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TWI846112B - Non mid-mounted driving type rotation device - Google Patents

Non mid-mounted driving type rotation device Download PDF

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Publication number
TWI846112B
TWI846112B TW111140979A TW111140979A TWI846112B TW I846112 B TWI846112 B TW I846112B TW 111140979 A TW111140979 A TW 111140979A TW 111140979 A TW111140979 A TW 111140979A TW I846112 B TWI846112 B TW I846112B
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Taiwan
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driving
displacement
component
displacement component
components
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TW111140979A
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Chinese (zh)
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TW202418422A (en
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謝志宏
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亞克先進科技股份有限公司
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Abstract

A non mid-mounted driving type rotation device includes a base, a driving unit, four transmission components, a transmission member, and a chuck. The driving unit is disposed on the base. The transmission component includes a fixing portion and a shifting portion. The fixing portion is fixed on the base, the shifting portion is rotatably disposed on the fixing portion. A distance between the transmission components in a first direction or a second direction perpendicular to the first direction is the same. The transmission member is connected to the driving unit and the shifting portion of the transmission components and winded around the transmission components. The chuck is disposed the shifting portion of the transmission components.

Description

非中置驅動旋轉裝置Non-central drive rotary device

本案與旋轉裝置有關,特別是關於一種非於旋轉中心帶動的旋轉裝置有關。This invention relates to rotating devices, and more particularly to a rotating device that is not driven about a center of rotation.

隨著自動化概念的普及,各行各業無不導入自動化概念來提高效率,以生產製造業來說,自動化製程可大幅提高生產效率而顯著提高產能及產值。With the popularization of the concept of automation, all walks of life have introduced the concept of automation to improve efficiency. For the manufacturing industry, the automated process can greatly improve production efficiency and significantly increase production capacity and output value.

而在各領域的自動化製程中,移載裝置為攸關空間配置及效率的重要裝置之一,而移載裝置主要包含承載物件進行線性位移的線性移載裝置或是承載物件進行旋轉位移的旋轉裝置。以旋轉裝置來看,為了承載物件並進行旋轉位移通常都會直接使用旋轉驅動源直接連接於用於承載物件的承載台一側,透過驅動源設置於承載台的旋轉中心直接驅動承載台轉動。In the automation process of various fields, the transfer device is one of the important devices related to space configuration and efficiency. The transfer device mainly includes a linear transfer device that carries objects for linear displacement or a rotary device that carries objects for rotational displacement. In terms of the rotary device, in order to carry objects and perform rotational displacement, a rotary drive source is usually directly connected to one side of the carrier used to carry the objects, and the drive source is set at the rotation center of the carrier to directly drive the carrier to rotate.

然而,在一些自動化製程中,被承載物件除了具有旋轉的需求之外,可能於其兩側也還須配置其他周邊裝置以對被承載物進行其他自動化製程中的工作(例如特定半導體元件必須同時由其兩側進行測試),如此一來,一般的旋轉裝置將無法符合需求而有待改善。However, in some automated processes, in addition to the need to rotate the object, other peripheral devices may also need to be configured on both sides of the object to perform other tasks in the automated process on the object (for example, a specific semiconductor component must be tested from both sides at the same time). In this case, a general rotation device will not be able to meet the requirements and needs to be improved.

本案提供一種非中置驅動旋轉裝置,包含基座、驅動單元、四帶動組件、帶動件以及載台。驅動單元設置於基座上。各帶動組件分別包含固定部件及位移部件,固定部件固定於基座上,位移部件可轉動並可沿第一方向及垂直於第一方向的第二方向位移地設置於固定部件上;每一帶動組件彼此間於第一方向或第二方向上的間距相同。帶動件連接於驅動單元,且帶動件連接各帶動組件的位移部件並圈繞於各帶動組件。載台設置於各帶動組件的位移部件上。The present invention provides a non-centrally mounted driving and rotating device, comprising a base, a driving unit, four driving components, a driving member and a carrier. The driving unit is disposed on the base. Each driving component comprises a fixed component and a displacement component, respectively. The fixed component is fixed on the base, and the displacement component is rotatable and can be displaced along a first direction and a second direction perpendicular to the first direction and disposed on the fixed component; each driving component has the same distance in the first direction or the second direction. The driving member is connected to the driving unit, and the driving member is connected to the displacement component of each driving component and is wound around each driving component. The carrier is disposed on the displacement component of each driving component.

藉此,當驅動單元帶動帶動件位移時,帶動件帶動各帶動組件同步位移,每一帶動組件同時產生兩個方向的線性位移並伴隨旋轉動量,配合各帶動組件的位置配置致使載台轉動,於此,驅動單元不須設置於基座或載台的中心位置,載台或基座的兩側都能配置其他周邊裝置,提高使用適用性。Thereby, when the driving unit drives the driven member to displace, the driven member drives each driven component to displace synchronously, and each driven component simultaneously generates linear displacement in two directions accompanied by rotational momentum, and the position configuration of each driven component causes the carrier to rotate. Here, the driving unit does not need to be set at the center position of the base or the carrier, and other peripheral devices can be configured on both sides of the carrier or the base, thereby improving applicability.

一些實施例中,前述位移部件包含第一位移部件及第二位移部件,第一位移部件可位移地設置於固定部件上,第二位移部件可位移地設置於第一位移部件上,第一位移部件與該第二位移部件的位移方向彼此垂直。In some embodiments, the displacement component includes a first displacement component and a second displacement component. The first displacement component is displaceably disposed on the fixed component, and the second displacement component is displaceably disposed on the first displacement component. The displacement directions of the first displacement component and the second displacement component are perpendicular to each other.

一些實施例中,前述其中相鄰的二帶動組件之第一位移部件的線性位移方向彼此垂直,且相鄰的二帶動組件之第二位移部件的線性位移方向彼此垂直。In some embodiments, the linear displacement directions of the first displacement components of the two adjacent driving assemblies are perpendicular to each other, and the linear displacement directions of the second displacement components of the two adjacent driving assemblies are perpendicular to each other.

一些實施例中,前述載台可轉動地設置於各帶動組件的第二位移部件上。In some embodiments, the aforementioned carrier is rotatably disposed on the second displacement component of each driving assembly.

一些實施例中,前述帶動件為鋼帶或皮帶。In some embodiments, the driving member is a steel belt or a leather belt.

一些實施例中,前述驅動單元包含馬達、螺桿及螺帽,馬達固定於基座上,螺桿連接於馬達,螺帽可位移地設置於基座上並穿套於螺桿外,帶動件連接於螺帽。In some embodiments, the aforementioned driving unit includes a motor, a screw and a nut, the motor is fixed on the base, the screw is connected to the motor, the nut is displaceably arranged on the base and is sleeved on the outside of the screw, and the driver is connected to the nut.

一些實施例中,非中置驅動旋轉裝置更包含線性導軌組件,設置於基座上並連接於螺帽與帶動件之間。In some embodiments, the non-central drive rotation device further includes a linear guide rail assembly disposed on the base and connected between the nut and the driver.

一些實施例中,前述線性導軌組件包含滑軌及滑塊,滑軌固定於基座上,滑塊可滑移地穿套於滑軌,滑塊連接於螺帽與帶動件之間。In some embodiments, the linear guide rail assembly includes a slide rail and a slide block, the slide rail is fixed on the base, the slide block can be slidably inserted into the slide rail, and the slide block is connected between the nut and the driving member.

一些實施例中,前述帶動組件分別包含滑輪,帶動件抵靠於滑輪。In some embodiments, the aforementioned driving components respectively include pulleys, and the driving member abuts against the pulleys.

一些實施例中,前述基座具有通孔,四帶動組件位於通孔周圍,且四帶動組件中相距最遠的兩兩帶動組件之連線交會於通孔。In some embodiments, the base has a through hole, four driving components are located around the through hole, and the connection lines between two of the four driving components that are farthest apart intersect at the through hole.

一些實施例中,前述載台具有貫孔,貫孔與通孔相對。In some embodiments, the aforementioned carrier has a through hole, and the through hole is opposite to the through hole.

請配合參閱圖1至圖5,圖1為本案非中置驅動旋轉裝置之一實施例的立體外觀示意圖;圖2為本案非中置驅動旋轉裝置之一實施例的局部結構分解示意圖;圖3為圖2的局部結構放大示意圖;圖4為本案非中置驅動旋轉裝置之一實施例的俯視示意圖;圖5為本案非中置驅動旋轉裝置之一實施例的帶動組件之配置圖。本案非中置驅動旋轉裝置能帶動具有中央貫孔51的載台50轉動,且驅動單元20不須設置於載台50的旋轉中心O,亦不需於載台50的旋轉中心O設置軸承,便於周邊裝置能透過載台50的貫孔51進行配置,滿足不同的使用需求。Please refer to Figures 1 to 5. Figure 1 is a three-dimensional external view of an embodiment of the non-central drive rotating device of the present invention; Figure 2 is a partial structural decomposition diagram of an embodiment of the non-central drive rotating device of the present invention; Figure 3 is an enlarged partial structural diagram of Figure 2; Figure 4 is a top view of an embodiment of the non-central drive rotating device of the present invention; and Figure 5 is a configuration diagram of the driving assembly of an embodiment of the non-central drive rotating device of the present invention. The non-central drive rotating device of the present invention can drive the carrier 50 having a central through hole 51 to rotate, and the drive unit 20 does not need to be set at the rotation center O of the carrier 50, nor does it need to be set at the rotation center O of the carrier 50, so that the peripheral devices can be configured through the through hole 51 of the carrier 50 to meet different usage requirements.

參閱圖1至圖3,非中置驅動旋轉裝置包含基座10、驅動單元20、四帶動組件30、帶動件40以及載台50。驅動單元20設置於基座10上。各帶動組件30分別包含固定部件31及位移部件32,固定部件31固定於基座10上,位移部件32可轉動並可沿第一方向D1及垂直於第一方向D1的第二方向D2位移地設置於固定部件31上,每一帶動組件30彼此間於第一方向D1或第二方向D2上的間距相同。帶動件40連接於驅動單元20,且帶動件40連接各帶動組件30的位移部件32並圈繞於前述四帶動組件30。載台50設置於前述四帶動組件30的位移部件32上。Referring to FIGS. 1 to 3 , the non-centrally mounted driving rotating device includes a base 10, a driving unit 20, four driving components 30, a driving member 40, and a carrier 50. The driving unit 20 is disposed on the base 10. Each driving component 30 includes a fixed component 31 and a displacement component 32. The fixed component 31 is fixed on the base 10. The displacement component 32 is rotatable and can be displaced along a first direction D1 and a second direction D2 perpendicular to the first direction D1. The distance between each driving component 30 in the first direction D1 or the second direction D2 is the same. The driving member 40 is connected to the driving unit 20, and the driving member 40 is connected to the displacement component 32 of each driving component 30 and is wound around the aforementioned four driving components 30. The carrier 50 is disposed on the displacement component 32 of the aforementioned four driving components 30.

藉此,當驅動單元20帶動帶動件40位移時,帶動件40帶動各帶動組件30同步位移,每一帶動組件30同時產生兩個方向的線性位移並伴隨旋轉動量,配合各帶動組件30的位置配置致使載台50轉動,於此,驅動單元20不須設置於基座10或載台50的中心位置,載台50或基座10的兩側都能提供其他周邊裝置配置,提高使用適用性。Thereby, when the driving unit 20 drives the driving member 40 to move, the driving member 40 drives each driving component 30 to move synchronously, and each driving component 30 simultaneously generates linear displacement in two directions accompanied by rotational momentum, and cooperates with the position configuration of each driving component 30 to cause the carrier 50 to rotate. Here, the driving unit 20 does not need to be set at the center position of the base 10 or the carrier 50, and other peripheral device configurations can be provided on both sides of the carrier 50 or the base 10 to improve applicability.

參閱圖1及圖2,一些實施例中,基座10為具有通孔11的板體,通孔11貫穿基座10,而驅動單元20及四帶動組件30設置於基座10的其中一面上。此些實施例中,通孔11的形狀為長矩形,且基座10的通孔11相對於載台50的貫孔51,但本案並不以此為限。Referring to FIG. 1 and FIG. 2 , in some embodiments, the base 10 is a plate having a through hole 11, the through hole 11 passes through the base 10, and the driving unit 20 and the four driving components 30 are disposed on one side of the base 10. In these embodiments, the through hole 11 is in the shape of a long rectangle, and the through hole 11 of the base 10 is opposite to the through hole 51 of the carrier 50, but the present invention is not limited thereto.

參閱圖1及圖2,驅動單元20為可產生線性位移驅動力的結構,且不限於是單一結構或是複數結構的組合。一些實施例中,驅動單元20包含馬達21、螺桿22及螺帽23。此些實施例中,馬達21固定於基座10上,螺桿22連接於馬達21以受馬達21帶動而轉動,螺帽23可位移地設置於基座10上並螺合穿套於螺桿22外。當馬達21運轉時,馬達21驅動螺桿22轉動,而螺合於螺桿22的螺帽23即能沿螺桿22的延伸方向產生線性位移驅動力並得以帶動帶動件40線性位移。值得說明的是,驅動單元20的形態並不以此為限,在一些其他實施例中,可直接產生線性位移驅動力的氣/液壓缸,或是馬達與齒輪、齒條的組合結構亦可為驅動單元20的不同實施形態。Referring to FIG. 1 and FIG. 2 , the drive unit 20 is a structure that can generate a linear displacement driving force, and is not limited to a single structure or a combination of multiple structures. In some embodiments, the drive unit 20 includes a motor 21, a screw 22, and a nut 23. In these embodiments, the motor 21 is fixed on the base 10, the screw 22 is connected to the motor 21 to be driven by the motor 21 to rotate, and the nut 23 is displaceably arranged on the base 10 and threadedly sleeved on the outside of the screw 22. When the motor 21 is running, the motor 21 drives the screw 22 to rotate, and the nut 23 threaded on the screw 22 can generate a linear displacement driving force along the extension direction of the screw 22 and drive the driving member 40 to linearly displace. It is worth noting that the shape of the drive unit 20 is not limited to this. In some other embodiments, a gas/hydraulic cylinder that can directly generate a linear displacement drive force, or a combination structure of a motor and a gear or a rack can also be different implementation forms of the drive unit 20.

參閱圖2、圖4及圖5,圖5省略基座10而能更清楚顯示帶動組件30之配置。一些實施例中,四帶動組件30設置於基座10的通孔11周圍並排列為正方形。具體而言,各帶動組件30的外觀形態相同,此些實施例中,各帶動組件30為正方形柱體,各帶動組件30貼靠連接於基座10的一面之形狀為正方形,但本案並不以此為限。於此,各帶動組件30分別具有中心點C,各中心點C沿第一方向D1及第二方向D2的連線構成正方形(如圖5中中心點C的連線),也就是說,以如圖4、圖5之視角來看,每一帶動組件30彼此間於第一方向D1或第二方向D2上的間距都相同。Referring to FIG. 2 , FIG. 4 and FIG. 5 , FIG. 5 omits the base 10 to more clearly show the configuration of the driving assembly 30 . In some embodiments, four driving assemblies 30 are disposed around the through hole 11 of the base 10 and arranged in a square. Specifically, the appearance of each driving assembly 30 is the same. In these embodiments, each driving assembly 30 is a square cylinder, and the shape of one side of each driving assembly 30 that is attached to and connected to the base 10 is a square, but the present invention is not limited thereto. Here, each driving assembly 30 has a center point C, and the lines connecting each center point C along the first direction D1 and the second direction D2 form a square (such as the lines connecting the center points C in FIG. 5 ). That is to say, from the perspective of FIG. 4 and FIG. 5 , the distances between each driving assembly 30 in the first direction D1 or the second direction D2 are the same.

在四帶動組件30排列為正方形並設置於通孔11周圍的一些實施例中,位於對角位置(相距最遠的兩個)的兩兩帶動組件30之中心點C連線交會於旋轉中心O,且旋轉中心O位於基座10的通孔11範圍內。此些實施例中,旋轉中心O為載台50轉動的旋轉中心O。In some embodiments where four driving components 30 are arranged in a square and disposed around the through hole 11, the line connecting the center points C of two driving components 30 located at diagonal positions (the two farthest apart) intersects at the rotation center O, and the rotation center O is located within the through hole 11 of the base 10. In these embodiments, the rotation center O is the rotation center O of the carrier 50.

參閱圖1至圖3,為實現各帶動組件30的位移部件32可沿第一方向D1及第二方向D2線性位移的目的,一些實施例中,各帶動組件30的位移部件32包含第一位移部件321及第二位移部件322,第一位移部件321可位移地設置於固定部件31上,第二位移部件322可位移地設置於第一位移部件321上,且第一位移部件321與第二位移部件322的線性位移方向彼此垂直。如此一來,帶動組件30的位移部件32即能提供兩個方向的線性位移能力。Referring to FIGS. 1 to 3 , in order to realize the purpose that the displacement component 32 of each driving assembly 30 can be linearly displaced along the first direction D1 and the second direction D2, in some embodiments, the displacement component 32 of each driving assembly 30 includes a first displacement component 321 and a second displacement component 322, the first displacement component 321 is displaceably disposed on the fixing component 31, the second displacement component 322 is displaceably disposed on the first displacement component 321, and the linear displacement directions of the first displacement component 321 and the second displacement component 322 are perpendicular to each other. In this way, the displacement component 32 of the driving assembly 30 can provide linear displacement capabilities in two directions.

值得說明的是,在帶動組件30排列為正方形的一些實施例中,各帶動組件30的結構組態相同,只是設置於基座10上的方位不同。具體而言,四帶動組件30中每二相鄰的帶動組件30之第一位移部件321的線性位移方向彼此垂直,且每二相鄰的帶動組件30之第二位移部件322的線性位移方向彼此垂直。It is worth noting that in some embodiments where the driving assemblies 30 are arranged in a square, the structural configurations of the driving assemblies 30 are the same, but the orientations of the driving assemblies 30 on the base 10 are different. Specifically, the linear displacement directions of the first displacement components 321 of every two adjacent driving assemblies 30 among the four driving assemblies 30 are perpendicular to each other, and the linear displacement directions of the second displacement components 322 of every two adjacent driving assemblies 30 are perpendicular to each other.

以如圖2、圖4的視角來看,驅動單元20設置於基座10的左側,相對側為右側,且驅動單元20的馬達21靠近基座10的上側,反之為下側。From the perspective of FIG. 2 and FIG. 4 , the driving unit 20 is disposed on the left side of the base 10 , and the opposite side is the right side, and the motor 21 of the driving unit 20 is close to the upper side of the base 10 , and the opposite side is the lower side.

參閱圖2及圖4,在此,位於左下側的帶動組件30之第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,且左下側的帶動組件30之第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上;位於左上側的帶動組件30之第一位移部件321是可沿第二方向D2位移地設置於固定部件31上,且左上側的帶動組件30之第二位移部件322是可沿第一方向D1位移地設置於第一位移部件321上;位於右下側的帶動組件30之第一位移部件321是可沿第二方向D2位移地設置於固定部件31上,且右下側的帶動組件30之第二位移部件322是可沿第一方向D1位移地設置於第一位移部件321上;位於右上側的帶動組件30之第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,且右上側的帶動組件30之第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上。Referring to FIG. 2 and FIG. 4 , the first displacement component 321 of the driving assembly 30 located at the lower left side is displaceably disposed on the fixed component 31 along the first direction D1, and the second displacement component 322 of the driving assembly 30 located at the lower left side is displaceably disposed on the first displacement component 321 along the second direction D2; the first displacement component 321 of the driving assembly 30 located at the upper left side is displaceably disposed on the fixed component 31 along the second direction D2, and the second displacement component 322 of the driving assembly 30 located at the upper left side is displaceably disposed on the first displacement component 321 along the first direction D1. The first displacement component 321 of the driving assembly 30 located on the lower right side is displaceably disposed on the fixed component 31 along the second direction D2, and the second displacement component 322 of the driving assembly 30 on the lower right side is displaceably disposed on the first displacement component 321 along the first direction D1; the first displacement component 321 of the driving assembly 30 located on the upper right side is displaceably disposed on the fixed component 31 along the first direction D1, and the second displacement component 322 of the driving assembly 30 on the upper right side is displaceably disposed on the first displacement component 321 along the second direction D2.

如此一來,請配合參閱圖2、圖4及圖5,當驅動單元20運轉並帶動帶動件40朝順時針方向位移轉動時,各帶動組件30分別能產生兩個不同方向的線性位移並伴隨轉動動量,藉此順應帶動件40的轉動以帶動載台50能順利產生環繞旋轉中心O位移的轉動位移。具體而言,左下側的帶動組件30被帶動而朝左側及上側位移並伴隨順時針轉動,左上側的帶動組件30之第一位移部件321被帶動而朝上側及右側位移並伴隨順時針轉動;右上側的帶動組件30之第一位移部件321被帶動而朝右側及下側位移並伴隨順時針轉動;右下側的帶動組件30之第一位移部件321被帶動而朝下側及左側位移並伴隨順時針轉動。於此作用下,四帶動組件30的位移同步產生並帶動載台50產生環繞旋轉中心O位移的轉動位移。In this way, please refer to Figures 2, 4 and 5. When the driving unit 20 operates and drives the driving member 40 to rotate in the clockwise direction, each driving component 30 can generate linear displacements in two different directions accompanied by rotational momentum, thereby following the rotation of the driving member 40 to drive the carrier 50 to smoothly generate a rotational displacement around the rotation center O. Specifically, the driving assembly 30 on the lower left side is driven to move toward the left and upper sides and rotate clockwise, the first displacement component 321 of the driving assembly 30 on the upper left side is driven to move toward the upper and right sides and rotate clockwise; the first displacement component 321 of the driving assembly 30 on the upper right side is driven to move toward the right and lower sides and rotate clockwise; the first displacement component 321 of the driving assembly 30 on the lower right side is driven to move toward the lower and left sides and rotate clockwise. Under this action, the displacement of the four driving assemblies 30 is synchronously generated and drives the carrier 50 to generate a rotation displacement around the rotation center O.

參閱圖2及圖3,一些實施例中,為確保載台50穩定地沿所需方位位移,各帶動組件30更分別包含複數線性導引裝置33及轉動結構34,固定部件31與第一位移部件321之間以及第一位移部件321與第二位移部件322之間分別設置有線性導引裝置33以導引第一位移部件321及第二位移部件322線性位移,而第二位移部件322與載台50間設置轉動結構34以使載台50能相對於各第二位移部件322轉動。Referring to FIG. 2 and FIG. 3 , in some embodiments, in order to ensure that the carrier 50 stably displaces along the desired orientation, each driving assembly 30 further includes a plurality of linear guide devices 33 and a rotating structure 34. The linear guide devices 33 are respectively arranged between the fixed component 31 and the first displacement component 321 and between the first displacement component 321 and the second displacement component 322 to guide the linear displacement of the first displacement component 321 and the second displacement component 322, and the rotating structure 34 is arranged between the second displacement component 322 and the carrier 50 so that the carrier 50 can rotate relative to each second displacement component 322.

參閱圖2及圖3,一些實施例中,線性導引裝置33為線性滑軌。此些實施例中,線性導引裝置33包含固定軌331、滾動件332及滑動軌333,滾動件332可滾動地設置於固定軌331與滑動軌333之間,滑動軌333能抵靠於滾動件332相對於固定軌331線性位移。於此,固定軌331固定設置於固定部件31朝向第一位移部件321的一面以及第一位移部件321朝向第二位移部件322的一面,第一位移部件321朝向固定軌331的一面以及第二位移部件322朝向第一位移部件321的一面再分別連接於滑動軌333,藉此使第一位移部件321及第二位移部件322都能分別受到線性導引裝置33的導引以穩定線性位移。Referring to FIG. 2 and FIG. 3 , in some embodiments, the linear guide device 33 is a linear slide rail. In these embodiments, the linear guide device 33 includes a fixed rail 331, a rolling member 332 and a sliding rail 333. The rolling member 332 is rollably disposed between the fixed rail 331 and the sliding rail 333. The sliding rail 333 can be linearly displaced relative to the fixed rail 331 by leaning against the rolling member 332. Here, the fixed rail 331 is fixedly disposed on a side of the fixed component 31 facing the first displacement component 321 and a side of the first displacement component 321 facing the second displacement component 322. The side of the first displacement component 321 facing the fixed rail 331 and the side of the second displacement component 322 facing the first displacement component 321 are respectively connected to the sliding rail 333, so that the first displacement component 321 and the second displacement component 322 can be respectively guided by the linear guide device 33 to stably linearly displace.

一些實施例中,轉動結構34為軸承,但本案並不以此為限。此些實施例中,轉動結構34包含內環341及外環342,內環341固定設置於第二位移部件322朝向載台50的一面,外環342可轉動地套設於內環341外並固定於載台50朝向第二位移部件322的一面。In some embodiments, the rotating structure 34 is a bearing, but the present invention is not limited thereto. In these embodiments, the rotating structure 34 includes an inner ring 341 and an outer ring 342, wherein the inner ring 341 is fixedly disposed on a side of the second displacement component 322 facing the carrier 50, and the outer ring 342 is rotatably sleeved outside the inner ring 341 and fixed to a side of the carrier 50 facing the second displacement component 322.

參閱圖2及圖3,值得說明的是,此些實施例中,設置於固定部件31與第一位移部件321間的線性導引裝置33是為負責導引第一位移部件321線性位移,因此,設置於固定部件31與第一位移部件321間的線性導引裝置33之線性導引方向與第一位移部件321的線性位移方向相同;且設置於第一位移部件321與第二位移部件322間的線性導引裝置33是為負責導引第二位移部件322線性位移,因此,設置於第一位移部件321與第二位移部件322間的線性導引裝置33之線性導引方向與第二位移部件322的線性位移方向相同。以圖3繪示之帶動組件30之一實施例來說,圖3中之帶動組件30的第一位移部件321是可沿第一方向D1位移地設置於固定部件31上,因此固定部件31與第一位移部件321間的線性導引裝置33之固定軌331及滑動軌333亦是沿第一方向D1延伸長度;而圖3中之帶動組件30的第二位移部件322是可沿第二方向D2位移地設置於第一位移部件321上,因此第一位移部件321與第二位移部件322間的線性導引裝置33之固定軌331及滑動軌333亦是沿第二方向D2延伸長度。Referring to FIG. 2 and FIG. 3 , it is worth noting that in these embodiments, the linear guide device 33 disposed between the fixed component 31 and the first displacement component 321 is responsible for guiding the linear displacement of the first displacement component 321, and therefore, the linear guide direction of the linear guide device 33 disposed between the fixed component 31 and the first displacement component 321 is the same as the linear displacement direction of the first displacement component 321; and the linear guide device 33 disposed between the first displacement component 321 and the second displacement component 322 is responsible for guiding the linear displacement of the second displacement component 322, and therefore, the linear guide direction of the linear guide device 33 disposed between the first displacement component 321 and the second displacement component 322 is the same as the linear displacement direction of the second displacement component 322. Taking an embodiment of the driving assembly 30 shown in FIG. 3 as an example, the first displacement component 321 of the driving assembly 30 in FIG. 3 is displaceably disposed on the fixed component 31 along the first direction D1, so that the fixed rail 331 and the sliding rail 333 of the linear guide device 33 between the fixed component 31 and the first displacement component 321 also extend along the first direction D1; and the second displacement component 322 of the driving assembly 30 in FIG. 3 is displaceably disposed on the first displacement component 321 along the second direction D2, so that the fixed rail 331 and the sliding rail 333 of the linear guide device 33 between the first displacement component 321 and the second displacement component 322 also extend along the second direction D2.

參閱圖3,一些實施例中,為提高帶動組件30的位移穩定性,各帶動組件30的固定部件31與第一位移部件321間、第一位移部件321與第二位移部件322間分別設置兩組線性導引裝置33,且固定部件31與第一位移部件321間的兩組線性導引裝置33彼此平行,第一位移部件321與第二位移部件322間的兩組線性導引裝置33彼此平行。藉此,第一位移部件321可同時固定於固定部件31上兩組線性導引裝置33的滑動軌333,第二位移部件322可同時固定於第一位移部件321上兩組線性導引裝置33的滑動軌333,第一位移部件321及第二位移部件322分別受到兩組線性導引裝置33導引,提高位移穩定性。Referring to FIG. 3 , in some embodiments, in order to improve the displacement stability of the driving assembly 30, two sets of linear guide devices 33 are respectively provided between the fixed component 31 and the first displacement component 321 and between the first displacement component 321 and the second displacement component 322 of each driving assembly 30, and the two sets of linear guide devices 33 between the fixed component 31 and the first displacement component 321 are parallel to each other, and the two sets of linear guide devices 33 between the first displacement component 321 and the second displacement component 322 are parallel to each other. Thereby, the first displacement component 321 can be fixed to the sliding rails 333 of the two sets of linear guide devices 33 on the fixed component 31 at the same time, and the second displacement component 322 can be fixed to the sliding rails 333 of the two sets of linear guide devices 33 on the first displacement component 321 at the same time. The first displacement component 321 and the second displacement component 322 are respectively guided by the two sets of linear guide devices 33, thereby improving the displacement stability.

參閱圖3,在第一位移部件321與第二位移部件322分別受到兩組線性導引裝置33導引的一些實施例中,固定部件31與第一位移部件321間的兩組線性導引裝置33彼此間隔,第一位移部件321與第二位移部件322間的兩組線性導引裝置33彼此間隔,如此一來,固定部件31與第一位移部件321間的兩組線性導引裝置33間以及第一位移部件321與第二位移部件322間的兩組線性導引裝置33間分別構成導引通道35,而第一位移部件321朝向固定部件31的一面具有第一凸起部3211,第二位移部件322朝向第一位移部件321的一面具有第二凸起部3221,第一位移部件321的第一凸起部3211可滑移地容置於固定部件31與第一位移部件321間的導引通道35,第二位移部件322的第二凸起部3221可滑移地容置於第一位移部件321與第二位移部件322間的導引通道35,藉此,第一位移部件321及第二位移部件322能分別受到導引通道35的限位而減少偏移,提高位移穩定性。Referring to FIG. 3 , in some embodiments where the first displacement member 321 and the second displacement member 322 are guided by two sets of linear guide devices 33, the two sets of linear guide devices 33 between the fixed member 31 and the first displacement member 321 are spaced apart from each other, and the two sets of linear guide devices 33 between the first displacement member 321 and the second displacement member 322 are spaced apart from each other. In this way, the two sets of linear guide devices 33 between the fixed member 31 and the first displacement member 321 and the two sets of linear guide devices 33 between the first displacement member 321 and the second displacement member 322 respectively form a guide channel 35, and the first displacement member 321 is directed toward the fixed member 31. The fixed component 31 has a first protrusion 3211 on one side, and the second displacement component 322 has a second protrusion 3221 on one side facing the first displacement component 321. The first protrusion 3211 of the first displacement component 321 can be slidably accommodated in the guide channel 35 between the fixed component 31 and the first displacement component 321, and the second protrusion 3221 of the second displacement component 322 can be slidably accommodated in the guide channel 35 between the first displacement component 321 and the second displacement component 322. Thereby, the first displacement component 321 and the second displacement component 322 can be respectively limited by the guide channel 35 to reduce deviation, thereby improving displacement stability.

參閱圖2及圖3,一些實施例中,線性導引裝置33為交叉滾柱滑軌,但本案並不以此為限。此些實施例中,滾動件332為圓形滾柱,且相鄰的滾動件332是彼此間呈90度角地配置。藉此能提供多方向性的負荷,提高產品壽命。Referring to FIG. 2 and FIG. 3 , in some embodiments, the linear guide device 33 is a cross roller slide rail, but the present invention is not limited thereto. In these embodiments, the rollers 332 are round rollers, and adjacent rollers 332 are arranged at a 90-degree angle to each other. This can provide multi-directional loads and improve product life.

一些實施例中,帶動件40可以但不限於是皮帶或鋼帶。In some embodiments, the driving member 40 may be, but is not limited to, a belt or a steel belt.

參閱圖1至圖2,一些實施例中,為提高帶動件40帶動各帶動組件30位移的順暢性,各帶動組件30分別包含滑輪36,滑輪36可轉動地設置於基座10上。此些實施例中,滑輪36是鄰接於固定部件31,而帶動件40圈繞於各帶動組件30的滑輪36,藉此,當帶動件40位移時可抵靠於滑輪36,藉此提高帶動件40的位移順暢性。Referring to FIG. 1 and FIG. 2 , in some embodiments, in order to improve the smoothness of the displacement of each driven assembly 30 driven by the driving member 40, each driven assembly 30 includes a pulley 36, and the pulley 36 is rotatably disposed on the base 10. In these embodiments, the pulley 36 is adjacent to the fixed component 31, and the driving member 40 is wound around the pulley 36 of each driven assembly 30, so that when the driving member 40 is displaced, it can abut against the pulley 36, thereby improving the smoothness of the displacement of the driving member 40.

參閱圖2、圖4及圖5,一些實施例中,帶動件40包含對應帶動組件30數量的帶動塊41,帶動件40透過帶動塊41帶動帶動組件30。此些實施例中,帶動塊41的一端固定於帶動件40上,帶動塊41的另一端固定於各帶動組件30的第一位移部件321上。藉此,透過帶動塊41的配置而能提高帶動件40在空間配置上的自由度。值得說明的是,於此,帶動件40是圍繞四帶動組件30成為正方形輪廓,為使帶動件40帶動四帶動組件30的位移綜合作用成為環繞旋轉中心O位移的目的,帶動塊41是位於正方形帶動件40的每一邊上,藉此才能帶動各帶動組件30分別朝向不同方向位移,而綜合作用成為環繞旋轉中心O轉動的移載。Referring to FIG. 2 , FIG. 4 and FIG. 5 , in some embodiments, the driving member 40 includes driving blocks 41 corresponding to the number of driving components 30, and the driving member 40 drives the driving components 30 through the driving blocks 41. In these embodiments, one end of the driving block 41 is fixed to the driving member 40, and the other end of the driving block 41 is fixed to the first displacement component 321 of each driving component 30. Thus, the freedom of spatial configuration of the driving member 40 can be improved through the configuration of the driving blocks 41. It is worth mentioning that, here, the driving member 40 is formed into a square outline around the four driving components 30. In order to make the driving member 40 drive the four driving components 30 to move around the rotation center O, the driving block 41 is located on each side of the square driving member 40, so that each driving component 30 can be driven to move in different directions, and the combined effect becomes the transfer of rotation around the rotation center O.

參閱圖1,一些實施例中,為確保驅動單元20的驅動穩定性,非中置驅動旋轉裝置更包含線性導軌組件60設置於基座10上並連接於驅動單元20與帶動件40之間。此些實施例中,線性導軌組件60包含滑軌61及滑塊62,滑軌61固定設置於基座10上,滑塊62可滑移地穿套於滑軌61外,且滑塊62連接於驅動單元20的螺帽23與帶動件40之間。藉此,透過線性導軌組件60得以將驅動單元20的動力穩定傳遞予帶動件40,而能穩定帶動帶動件40位移。Referring to FIG. 1 , in some embodiments, in order to ensure the driving stability of the driving unit 20, the non-central driving rotating device further includes a linear guide rail assembly 60 disposed on the base 10 and connected between the driving unit 20 and the driving member 40. In these embodiments, the linear guide rail assembly 60 includes a slide rail 61 and a slider 62, the slide rail 61 is fixedly disposed on the base 10, the slider 62 is slidably inserted outside the slide rail 61, and the slider 62 is connected between the nut 23 of the driving unit 20 and the driving member 40. Thus, the power of the driving unit 20 can be stably transmitted to the driver 40 through the linear guide assembly 60, so that the driver 40 can be stably driven to move.

雖然本揭露已以一些實施例揭露如上,然其並非用以限定本揭露,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神及範圍內,當可作些許更動及潤飾。因此本案之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。Although the present disclosure has been disclosed as above with some embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the relevant technical field may make some changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of patent protection of this case shall be subject to the scope of the patent application attached to this specification.

10:基座 11:通孔 20:驅動單元 21:馬達 22:螺桿 23:螺帽 30:帶動組件 31:固定部件 32:位移部件 321:第一位移部件 3211:第一凸起部 322:第二位移部件 3221:第二凸起部 33:線性導引裝置 331:固定軌 332:滾動件 333:滑動軌 34:轉動結構 341:內環 342:外環 35:導引通道 36:滑輪 40:帶動件 41:帶動塊 50:載台 51:貫孔 60:線性導軌組件 61:滑軌 62:滑塊 D1:第一方向 D2:第二方向 O:旋轉中心 C:中心點 10: base 11: through hole 20: drive unit 21: motor 22: screw 23: nut 30: drive assembly 31: fixed component 32: displacement component 321: first displacement component 3211: first protrusion 322: second displacement component 3221: second protrusion 33: linear guide device 331: fixed rail 332: rolling element 333: sliding rail 34: rotating structure 341: inner ring 342: outer ring 35: guide channel 36: pulley 40: drive element 41: drive block 50: carrier 51: through hole 60: linear guide assembly 61: Slide rail 62: Slide block D1: First direction D2: Second direction O: Rotation center C: Center point

圖1為本案非中置驅動旋轉裝置之一實施例的立體外觀示意圖。 圖2為本案非中置驅動旋轉裝置之一實施例的局部結構分解示意圖。 圖3為圖2的局部結構放大示意圖。 圖4為本案非中置驅動旋轉裝置之一實施例的俯視示意圖。 圖5為本案非中置驅動旋轉裝置之一實施例的帶動組件之配置圖。 FIG. 1 is a three-dimensional schematic diagram of an embodiment of a non-central drive rotating device of the present invention. FIG. 2 is a schematic diagram of a partial structural decomposition of an embodiment of a non-central drive rotating device of the present invention. FIG. 3 is a schematic diagram of an enlarged partial structure of FIG. 2. FIG. 4 is a schematic diagram of a top view of an embodiment of a non-central drive rotating device of the present invention. FIG. 5 is a configuration diagram of a driving assembly of an embodiment of a non-central drive rotating device of the present invention.

10:基座 11:通孔 20:驅動單元 21:馬達 22:螺桿 23:螺帽 30:帶動組件 31:固定部件 32:位移部件 321:第一位移部件 322:第二位移部件 33:線性導引裝置 331:固定軌 332:滾動件 333:滑動軌 34:轉動結構 341:內環 342:外環 35:導引通道 36:滑輪 40:帶動件 41:帶動塊 50:載台 51:貫孔 D1:第一方向 D2:第二方向 10: base 11: through hole 20: drive unit 21: motor 22: screw 23: nut 30: drive assembly 31: fixed component 32: displacement component 321: first displacement component 322: second displacement component 33: linear guide device 331: fixed rail 332: rolling element 333: sliding rail 34: rotating structure 341: inner ring 342: outer ring 35: guide channel 36: pulley 40: drive element 41: drive block 50: carrier 51: through hole D1: first direction D2: second direction

Claims (11)

一種非中置驅動旋轉裝置,包括: 一基座; 一驅動單元,設置於該基座上; 四帶動組件,分別包含: 一固定部件,固定於該基座上;以及 一位移部件,可轉動並可沿一第一方向及垂直於該第一方向的一第二方向位移地設置於該固定部件上;每一該帶動組件彼此間於該第一方向或該第二方向上的間距相等; 一帶動件,連接於該驅動單元,且該帶動件連接各該帶動組件的位移部件並圈繞於該四帶動組件;以及 一載台,設置於該四帶動組件的位移部件上。 A non-centrally driven rotating device comprises: a base; a driving unit disposed on the base; four driving components, respectively comprising: a fixed component fixed on the base; and a displacement component rotatably and displaceably disposed on the fixed component along a first direction and a second direction perpendicular to the first direction; the distances between each of the driving components in the first direction or the second direction are equal; a driving member connected to the driving unit, and the driving member is connected to the displacement components of each of the driving components and encircles the four driving components; and a carrier disposed on the displacement components of the four driving components. 如請求項1所述之非中置驅動旋轉裝置,其中該位移部件包含一第一位移部件及一第二位移部件,該第一位移部件可線性位移地設置於該固定部件上,該第二位移部件可線性位移地設置於該第一位移部件上,該第一位移部件與該第二位移部件的線性位移方向彼此垂直。A non-center driven rotating device as described in claim 1, wherein the displacement component includes a first displacement component and a second displacement component, the first displacement component can be linearly displaced on the fixed component, the second displacement component can be linearly displaced on the first displacement component, and the linear displacement directions of the first displacement component and the second displacement component are perpendicular to each other. 如請求項2所述之非中置驅動旋轉裝置,其中相鄰的二該帶動組件之第一位移部件的線性位移方向彼此垂直,且相鄰的二該帶動組件之該第二位移部件的線性位移方向彼此垂直。A non-centrally driven rotating device as described in claim 2, wherein the linear displacement directions of the first displacement components of two adjacent driving assemblies are perpendicular to each other, and the linear displacement directions of the second displacement components of two adjacent driving assemblies are perpendicular to each other. 如請求項2所述之非中置驅動旋轉裝置,其中該載台可轉動地設置於各該帶動組件的第二位移部件上。A non-center driven rotating device as described in claim 2, wherein the carrier is rotatably disposed on the second displacement component of each of the driving assemblies. 如請求項1所述之非中置驅動旋轉裝置,其中該帶動件為鋼帶或皮帶。A non-centrally driven rotating device as described in claim 1, wherein the driving member is a steel belt or a leather belt. 如請求項1所述之非中置驅動旋轉裝置,其中該驅動單元包含一馬達、一螺桿及一螺帽,該馬達固定於該基座上,該螺桿連接於該馬達,該螺帽可位移地設置於該基座上並穿套於該螺桿外,該帶動件連接於該螺帽。A non-centrally driven rotating device as described in claim 1, wherein the driving unit includes a motor, a screw and a nut, the motor is fixed on the base, the screw is connected to the motor, the nut is movably arranged on the base and is inserted into the outside of the screw, and the driving member is connected to the nut. 如請求項6所述之非中置驅動旋轉裝置,更包含一線性導軌組件,設置於該基座上並連接於該螺帽與該帶動件之間。The non-centrally driven rotating device as described in claim 6 further includes a linear guide rail assembly disposed on the base and connected between the nut and the driving member. 如請求項7所述之非中置驅動旋轉裝置,其中該線性導軌組件包含一滑軌及一滑塊,該滑軌固定於該基座上,該滑塊可滑移地穿套於該滑軌,該滑塊連接於該螺帽與該帶動件之間。A non-center driven rotating device as described in claim 7, wherein the linear guide rail assembly includes a sliding rail and a sliding block, the sliding rail is fixed on the base, the sliding block can be slidably inserted into the sliding rail, and the sliding block is connected between the nut and the driving member. 如請求項1所述之非中置驅動旋轉裝置,各該帶動組件分別包含一滑輪,該帶動件抵靠於該滑輪。As described in claim 1, the non-centrally driven rotating device, each of the driving components includes a pulley, and the driving member rests against the pulley. 如請求項1所述之非中置驅動旋轉裝置,其中該基座具有一通孔,該四帶動組件位於該通孔周圍,且該四帶動組件中相距最遠的兩兩帶動組件之連線交會於該通孔中。A non-centrally driven rotating device as described in claim 1, wherein the base has a through hole, the four drive components are located around the through hole, and the connection lines between the two drive components that are farthest apart among the four drive components intersect in the through hole. 如請求項10所述之非中置驅動旋轉裝置,其中該載台具有一貫孔,該貫孔相對於該通孔。A non-centered driven rotating device as described in claim 10, wherein the carrier has a through hole, and the through hole is opposite to the through hole.
TW111140979A 2022-10-27 2022-10-27 Non mid-mounted driving type rotation device TWI846112B (en)

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US20020037460A1 (en) * 2000-08-02 2002-03-28 Nikon Corporation Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method
TW201115676A (en) * 2009-10-20 2011-05-01 Top Eng Co Ltd Substrate positioning apparatus and method of positioning substrate using the same
JP2012094770A (en) * 2010-10-28 2012-05-17 Olympus Corp Inspection device and substrate positioning method
TW202215568A (en) * 2020-06-22 2022-04-16 南韓商杰宜斯科技有限公司 Wafer processing apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020037460A1 (en) * 2000-08-02 2002-03-28 Nikon Corporation Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method
TW201115676A (en) * 2009-10-20 2011-05-01 Top Eng Co Ltd Substrate positioning apparatus and method of positioning substrate using the same
JP2012094770A (en) * 2010-10-28 2012-05-17 Olympus Corp Inspection device and substrate positioning method
TW202215568A (en) * 2020-06-22 2022-04-16 南韓商杰宜斯科技有限公司 Wafer processing apparatus

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