[go: up one dir, main page]

TWI841032B - Testing system - Google Patents

Testing system Download PDF

Info

Publication number
TWI841032B
TWI841032B TW111141903A TW111141903A TWI841032B TW I841032 B TWI841032 B TW I841032B TW 111141903 A TW111141903 A TW 111141903A TW 111141903 A TW111141903 A TW 111141903A TW I841032 B TWI841032 B TW I841032B
Authority
TW
Taiwan
Prior art keywords
gate
test
transfer
transfer device
along
Prior art date
Application number
TW111141903A
Other languages
Chinese (zh)
Other versions
TW202419880A (en
Inventor
林源記
謝志宏
Original Assignee
亞克先進科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 亞克先進科技股份有限公司 filed Critical 亞克先進科技股份有限公司
Priority to TW111141903A priority Critical patent/TWI841032B/en
Application granted granted Critical
Publication of TWI841032B publication Critical patent/TWI841032B/en
Publication of TW202419880A publication Critical patent/TW202419880A/en

Links

Images

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

A testing system includes a first magazine transporting device, a second magazine transporting device, a feeding area, a feeding device, a transporting unit, a testing module and a discharging area. An end of the feeding area is corresponding to a clip of the first magazine transporting device. The feeding device is disposed at a side of the first magazine transporting device for discharging a strip from a magazine. An end of the transporting unit is connected to the other side of the first magazine transporting device for receiving and transporting the strip. The other end of the transporting unit is connected to the second magazine transporting device. The testing module includes two alignment units disposed on opposite sides of the transporting unit, a testing machine and a strip transporting device for transporting the strip between the alignment unit and the testing machine. An end of the discharging area is corresponding to the clip of the second magazine transporting device.

Description

測試系統Test system

本案與自動化系統有關,特別是關於一種自動化半導體測試系統。 This case is related to automation systems, and in particular to an automated semiconductor testing system.

按,隨著電子產業的發展越趨成熟,客戶端對於產品良率的要求也越來越高,因此,各種半導體元件出廠前都必須經過測試,測試後依測試結果進行分類(bin),最後再依分類別做出貨或其他的處置。 As the electronics industry matures, customers have higher and higher requirements for product yield. Therefore, all kinds of semiconductor components must be tested before leaving the factory. After testing, they are classified (bin) according to the test results, and finally shipped or otherwise disposed of according to the classification.

而半導體元件的種類眾多,除了功能上具有分別之外,其外觀型態上也不盡相同,而外觀型態不同的半導體元件在測試過程中就必須有不同的配置應對,本案即著眼於收容於料閘的試片之測試,以期提供一種高效率之試片測試系統。 There are many types of semiconductor components. In addition to their different functions, their appearances are also different. Different semiconductor components with different appearances must have different configurations during the testing process. This case focuses on the testing of the test piece contained in the gate, in order to provide a high-efficiency test piece testing system.

本案提供一種測試系統,適於複數試片之測試,複數試片沿Z方向彼此間隔地容置於料閘內,測試系統包括複數料閘移載裝置、入閘區、入料裝置、輸送單元、測試模組及出閘區。料閘移載裝置分別可沿垂直於Z方向的X方向位移並包括夾持器,夾持器可沿Z方向位移地設置於料閘移載裝置,複數料閘移載裝置包含第一料閘移載裝置及第二料閘移載裝置。入閘區沿X方向延伸且一端相對於第一料閘移載裝置的夾持器。入料裝置設置於第一料閘移載裝置的一側,用以沿垂直於X方向及Z方向的Y 方向自料閘卸載試片。輸送單元一端鄰接於第一料閘移載裝置的另一側以承接試片並沿Y方向輸送試片,且輸送單元的另一端鄰接於第二料閘移載裝置。測試模組包含設置於輸送單元兩側的規正單元、測試機以及移載試片於規正單元與測試機之間的測試片移載單元。出閘區一端相對於第二料閘移載裝置的夾持器,且出閘區沿X方向延伸。 The present invention provides a testing system suitable for testing a plurality of test pieces. The plurality of test pieces are placed in a gate spaced apart from each other along the Z direction. The testing system includes a plurality of gate transfer devices, a gate entry area, a feeding device, a conveying unit, a testing module and a gate exit area. The gate transfer devices can be displaced along the X direction perpendicular to the Z direction and include a clamp. The clamp can be displaced along the Z direction and arranged on the gate transfer device. The plurality of gate transfer devices include a first gate transfer device and a second gate transfer device. The gate entry area extends along the X direction and one end of which is opposite to the clamp of the first gate transfer device. The feeding device is arranged on one side of the first gate transfer device and is used to unload the test piece from the gate along the Y direction perpendicular to the X direction and the Z direction. One end of the conveying unit is adjacent to the other side of the first material gate transfer device to receive the test piece and transfer the test piece along the Y direction, and the other end of the conveying unit is adjacent to the second material gate transfer device. The test module includes a regularization unit arranged on both sides of the conveying unit, a test machine, and a test piece transfer unit for transferring the test piece between the regularization unit and the test machine. One end of the gate area is opposite to the clamp of the second material gate transfer device, and the gate area extends along the X direction.

藉此,裝載有待測試試片的料閘可集中於入閘區供第一料閘移載裝置取出,入料裝置自第一料閘移載裝置上的料閘卸載試片並輸入至輸送單元,測試片移載單元將輸送單元上的試片移載至規正單元規正位置後再移載入測試機進行測試,測試後的試片再由測試片移載單元取出重新輸入至輸送單元,輸送單元將測試後的試片輸送至第二料閘移載裝置內的料閘,第二料閘移載裝置收集測試後的試片完成後再將料閘集中至出閘區輸出料閘。測試系統可自動化地對收容於料閘內的複數試片進行入料、測試及出料,提高測試效率。 In this way, the gates loaded with the test pieces to be tested can be concentrated in the gate entry area for the first gate transfer device to take out. The feed device unloads the test pieces from the gate on the first gate transfer device and inputs them into the conveying unit. The test piece transfer unit transfers the test pieces on the conveying unit to the regular position of the regular unit and then transfers them into the test machine for testing. The tested test pieces are then taken out by the test piece transfer unit and re-input into the conveying unit. The conveying unit transports the tested test pieces to the gate in the second gate transfer device. After the second gate transfer device collects the tested test pieces, it concentrates the gates in the gate exit area to output the gates. The testing system can automatically feed, test and discharge multiple test pieces contained in the gates, thereby improving the testing efficiency.

一些實施例中,前述各料閘移載裝置分別包含底軌及立軌,底軌沿X方向延伸,立軌沿Z方向延伸並可沿X方向滑移地設置於底軌上,夾持器可沿Z方向滑移地設置於立軌上。 In some embodiments, each of the aforementioned material gate transfer devices includes a bottom rail and a vertical rail, the bottom rail extends along the X direction, the vertical rail extends along the Z direction and can be slidably arranged on the bottom rail along the X direction, and the clamp can be slidably arranged on the vertical rail along the Z direction.

一些實施例中,測試系統更包含機台,測試片移載單元包含基座、頂軌及移載裝置,基座沿Z方向延伸且一端固定於機台,頂軌固定於基座的另一端並沿X方向延伸,移載裝置可沿X方向位移地設置於頂軌上。 In some embodiments, the test system further includes a machine, and the test piece transfer unit includes a base, a top rail, and a transfer device. The base extends along the Z direction and one end is fixed to the machine. The top rail is fixed to the other end of the base and extends along the X direction. The transfer device can be displaced along the X direction and disposed on the top rail.

一些實施例中,前述頂軌於X方向上的範圍重疊於規正單元及測試機。 In some embodiments, the range of the aforementioned top rail in the X direction overlaps the regularization unit and the test machine.

一些實施例中,前述移載裝置包含第一移載頭及第二移載頭,第一移載頭及第二移載頭沿X方向並列設置。 In some embodiments, the aforementioned transfer device includes a first transfer head and a second transfer head, and the first transfer head and the second transfer head are arranged in parallel along the X direction.

一些實施例中,前述第一移載頭在X方向上的位置上相較於第二移載頭靠近規正單元,第二移載頭在X方向上相較於第一移載頭靠近測試機。 In some embodiments, the first transfer head is closer to the regularization unit than the second transfer head in the X direction, and the second transfer head is closer to the testing machine than the first transfer head in the X direction.

一些實施例中,測試系統更包含至少延伸輸送機構,且出閘區的數量為複數,第二料閘移載裝置的數量對應出閘區的數量,延伸輸送機構可沿Z方向滑移地設置於除了最遠離第一料閘移載裝置以外的其餘第二料閘移載裝置之立軌上。 In some embodiments, the test system further includes at least an extended conveying mechanism, and the number of gate-out areas is plural, the number of second gate transfer devices corresponds to the number of gate-out areas, and the extended conveying mechanism can be slidably disposed along the Z direction on the vertical rails of the remaining second gate transfer devices except the one farthest from the first gate transfer device.

一些實施例中,前述第二料閘移載裝置沿Y方向並列設置。 In some embodiments, the aforementioned second material gate transfer device is arranged in parallel along the Y direction.

一些實施例中,測試系統更包含機台,前述測試機的數量為二,二測試機沿Y方向並列設置,測試片移載單元包含基座、頂軌及移載裝置,基座沿Z方向延伸且一端固定於機台,頂軌固定於基座的另一端並沿X方向延伸,且二移載裝置分別可沿X方向位移地設置於頂軌的相對兩側。 In some embodiments, the test system further includes a machine, the number of the aforementioned test machines is two, the two test machines are arranged in parallel along the Y direction, the test piece transfer unit includes a base, a top rail and a transfer device, the base extends along the Z direction and one end is fixed to the machine, the top rail is fixed to the other end of the base and extends along the X direction, and the two transfer devices can be respectively arranged on opposite sides of the top rail so as to be displaceable along the X direction.

一些實施例中,前述入閘區包含二入閘容器,二入閘容器沿Z方向重疊設置。 In some embodiments, the aforementioned gate area includes two gate containers, and the two gate containers are overlapped along the Z direction.

S:試片 S:Test piece

M:料閘 M: material gate

M1:頂面 M1: Top surface

M2:底面 M2: bottom surface

M3:第一側面 M3: First side

M4:第二側面 M4: Second side

M5:插槽 M5: slot

10:料閘移載裝置 10: Gate transfer device

10A:第一料閘移載裝置 10A: First material gate transfer device

10B:第二料閘移載裝置 10B: Second material gate transfer device

11:底軌 11: Bottom rail

12:立軌 12: Vertical track

13:夾持器 13: Clamp

131:夾口 131: Clamping

14:滑座 14: Sliding seat

20:入閘區 20: Gate area

21:入閘容器 21: Gate container

21A:第一入閘容器 21A: First gate container

21B:第二入閘容器 21B: Second entry container

30:入料裝置 30: Feeding device

31:入料部 31: Feeding section

40:輸送單元 40:Transportation unit

50:測試模組 50:Test module

51:規正單元 51:Regular unit

52:測試機 52: Testing machine

53:測試片移載單元 53: Test piece transfer unit

531:基座 531: Base

532:頂軌 532: Top track

533:移載裝置 533:Transfer device

5331:第一移載頭 5331: First transfer head

5332:第二移載頭 5332: Second transfer head

60:出閘區 60: Exit area

60A:第一出閘區 60A: First exit gate area

60B:第二出閘區 60B: Second exit area

60C:第三出閘區 60C: The third exit area

61:出閘容器 61: Gate container

61A:第一出閘容器 61A: First outlet container

61B:第二出閘容器 61B: Second outlet container

70:機台 70: Machine

80:延伸輸送機構 80: Extended conveying mechanism

X,Y,Z:方向 X,Y,Z: Direction

圖1為本案測試系統之一實施例的立體示意圖。 Figure 1 is a three-dimensional schematic diagram of one embodiment of the test system of this case.

圖2為本案測試系統之一實施例的俯視圖。 Figure 2 is a top view of one embodiment of the test system of this case.

圖3為設置延伸輸送機構的第二料閘移載裝置之一實施例的局部示意圖。 Figure 3 is a partial schematic diagram of an embodiment of a second material gate transfer device with an extended conveying mechanism.

請配合參閱圖1至圖3,圖1為本案測試系統之一實施例的立體示意圖;圖2為本案測試系統之一實施例的俯視圖;圖3為設置延伸輸送機構的第二料閘移載裝置之一實施例的局部示意圖。本案測試系統適於複數試片S之測試,且試片S於測試前/後是沿Z方向彼此間隔地容置於料閘M內。 Please refer to Figures 1 to 3. Figure 1 is a three-dimensional schematic diagram of an embodiment of the test system of this case; Figure 2 is a top view of an embodiment of the test system of this case; Figure 3 is a partial schematic diagram of an embodiment of the second material gate transfer device with an extended conveying mechanism. The test system of this case is suitable for testing multiple test pieces S, and the test pieces S are placed in the material gate M at intervals along the Z direction before and after the test.

參閱圖1,料閘M(Magazine)為收容複數半導體試片S(Strip)的容器。一些實施例中,料閘M包括頂面M1、底面M2、第一側面M3及第二側面M4,頂面M1相對於底面M2,第一側面M3相對於第二側面M4並連接於頂面M1與底面M2之間。此些實施例中,第一側面M3及第二側面M4彼此相對的一面分別包括複數插槽M5,各插槽M5彼此相對沿伸於第一側面M3及第二側面M4的兩端間,且各插槽M5的兩端開放於第一側面M3及第二側面M4的兩端。藉此,各試片S可由第一側面M3及第二側面M4的兩端可滑移地插設入各插槽M5內。 Referring to FIG. 1 , the material gate M (Magazine) is a container for accommodating a plurality of semiconductor strips S (Strips). In some embodiments, the material gate M includes a top surface M1, a bottom surface M2, a first side surface M3, and a second side surface M4, wherein the top surface M1 is opposite to the bottom surface M2, and the first side surface M3 is opposite to the second side surface M4 and connected between the top surface M1 and the bottom surface M2. In these embodiments, the first side surface M3 and the second side surface M4 have a plurality of slots M5 on the sides opposite to each other, and each slot M5 extends between the two ends of the first side surface M3 and the second side surface M4 opposite to each other, and the two ends of each slot M5 are open at the two ends of the first side surface M3 and the second side surface M4. Thus, each test piece S can be slidably inserted into each slot M5 from both ends of the first side surface M3 and the second side surface M4.

參閱圖1,試片S為本測試系統之待測試物件(Device Under Test,DUT)。一些實施例中,試片S為薄片型態的半導體元件。此些實施例中,試片S為長矩形薄片結構。 Referring to FIG. 1 , the test piece S is the device under test (DUT) of the test system. In some embodiments, the test piece S is a semiconductor element in the form of a thin sheet. In these embodiments, the test piece S is a long rectangular thin sheet structure.

參閱圖1及圖2,測試系統包含複數料閘移載裝置10、入閘區20、入料裝置30、輸送單元40、測試模組50以及出閘區60。各料閘移載裝置10分別可沿垂直於Z方向的X方向位移並包括夾持器13,夾持器13 可沿Z方向位移地設置於料閘移載裝置10,複數料閘移載裝置10包含第一料閘移載裝置10A及第二料閘移載裝置10B。入閘區20沿X方向延伸且一端相對於第一料閘移載裝置10A的夾持器13。入料裝置30設置於第一料閘移載裝置10A的一側,用以沿垂直於X方向及Z方向的Y方向自料閘M卸載試片S。輸送單元40的一端鄰接於第一料閘移載裝置10A的另一側以承接試片S並沿Y方向輸送試片S,且輸送單元40的另一端鄰接於第二料閘移載裝置10B。測試模組50包含設置於輸送單元40兩側的規正單元51、測試機52以及移載試片S於規正單元51與該測試機52之間的測試片移載單元53。出閘區60的一端相對於第二料閘移載裝置10B的夾持器13,且出閘區60沿X方向延伸。 Referring to FIG. 1 and FIG. 2 , the test system includes a plurality of gate transfer devices 10, a gate entry area 20, a material feeding device 30, a conveying unit 40, a test module 50, and a gate exit area 60. Each gate transfer device 10 can be displaced in an X direction perpendicular to the Z direction and includes a clamp 13. The clamp 13 is disposed on the gate transfer device 10 so as to be displaceable in the Z direction. The plurality of gate transfer devices 10 include a first gate transfer device 10A and a second gate transfer device 10B. The gate entry area 20 extends in the X direction and one end thereof is opposite to the clamp 13 of the first gate transfer device 10A. The feeding device 30 is disposed on one side of the first gate transfer device 10A, and is used to unload the test piece S from the gate M along the Y direction perpendicular to the X direction and the Z direction. One end of the conveying unit 40 is adjacent to the other side of the first gate transfer device 10A to receive the test piece S and convey the test piece S along the Y direction, and the other end of the conveying unit 40 is adjacent to the second gate transfer device 10B. The test module 50 includes a regularization unit 51 disposed on both sides of the conveying unit 40, a test machine 52, and a test piece transfer unit 53 for transferring the test piece S between the regularization unit 51 and the test machine 52. One end of the gate area 60 is opposite to the clamp 13 of the second gate transfer device 10B, and the gate area 60 extends along the X direction.

藉此,裝載有待測試試片S的料閘M可集中於入閘區20供第一料閘移載裝置10A取出,入料裝置30自第一料閘移載裝置10A上的料閘M卸載試片S並輸入至輸送單元40,測試片移載單元53將輸送單元40上的試片S移載至規正單元51規正位置後再移載入測試機52進行測試,測試後的試片S再由測試片移載單元53取出重新輸入至輸送單元40,輸送單元40將測試後的試片S輸送至第二料閘移載裝置10B內的料閘M,第二料閘移載裝置10B收集測試後的試片S完成後再將料閘M集中至出閘區60輸出料閘M。由此可知,測試系統可自動化地對收容於料閘M內的複數試片S進行入料、測試及出料,提高測試效率。 Thereby, the material gate M loaded with the test piece S to be tested can be concentrated in the gate entry area 20 for the first material gate transfer device 10A to take out, the material feeding device 30 unloads the test piece S from the material gate M on the first material gate transfer device 10A and inputs it to the conveying unit 40, the test piece transfer unit 53 transfers the test piece S on the conveying unit 40 to the regular position of the standard unit 51 and then transfers it to the testing machine 52 for testing, the tested test piece S is taken out by the test piece transfer unit 53 and re-input into the conveying unit 40, the conveying unit 40 conveys the tested test piece S to the material gate M in the second material gate transfer device 10B, and after the second material gate transfer device 10B completes collecting the tested test piece S, it concentrates the material gate M in the gate exit area 60 to output the material gate M. It can be seen from this that the testing system can automatically load, test and discharge multiple test pieces S contained in the material gate M, thereby improving the testing efficiency.

參閱圖1及圖2,一些實施例中,測試系統包含機台70。此些實施例中,各零組件可以機台70為基礎地架構於機台70上,但本案並不以此為限。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the test system includes a machine 70. In these embodiments, each component can be constructed on the machine 70 based on the machine 70, but the present invention is not limited thereto.

參閱圖1至圖3,料閘移載裝置10用以沿Z方向及垂直於Z方向的X方向移載料閘M。一些實施例中,料閘移載裝置10包含底軌11、立軌12及夾持器13。此些實施例中,底軌11沿X方向延伸並固定設置於機台70上,立軌12沿Z方向延伸且可沿X方向滑移地設置於底軌11上,而夾持器13可沿Z方向滑移地設置於立軌12上。於此,夾持器13具有夾口131以夾持於料閘M的頂面M1及底面M2,且在料閘M被夾持於夾持器13時,料閘M內的插槽M5兩端連線沿Y方向延伸。 Referring to Figures 1 to 3, the gate transfer device 10 is used to transfer the gate M along the Z direction and the X direction perpendicular to the Z direction. In some embodiments, the gate transfer device 10 includes a bottom rail 11, a vertical rail 12, and a clamp 13. In these embodiments, the bottom rail 11 extends along the X direction and is fixedly arranged on the machine 70, the vertical rail 12 extends along the Z direction and can be slidably arranged on the bottom rail 11 along the X direction, and the clamp 13 can be slidably arranged on the vertical rail 12 along the Z direction. Here, the clamp 13 has a clamping mouth 131 to clamp the top surface M1 and the bottom surface M2 of the gate M, and when the gate M is clamped in the clamp 13, the two ends of the slot M5 in the gate M are connected along the Y direction.

參閱圖1及圖2,一些實施例中,第一料閘移載裝置10A是用以取置入閘區20內的料閘M;而第二料閘移載裝置10B是用以取置出閘區60內的料閘M。此些實施例中,第一料閘移載裝置10A的夾持器13之夾口131面向入閘區20,且第一料閘移載裝置10A的底軌11之一端延伸至入閘區20;而第二料閘移載裝置10B的夾持器13之夾口131面向出閘區60,且第二料閘移載裝置10B的底軌11之一端延伸至出閘區60。 Referring to Figures 1 and 2, in some embodiments, the first gate transfer device 10A is used to take the gate M in the gate area 20; and the second gate transfer device 10B is used to take the gate M in the gate area 60. In these embodiments, the clamping mouth 131 of the clamping device 13 of the first gate transfer device 10A faces the gate area 20, and one end of the bottom rail 11 of the first gate transfer device 10A extends to the gate area 20; and the clamping mouth 131 of the clamping device 13 of the second gate transfer device 10B faces the gate area 60, and one end of the bottom rail 11 of the second gate transfer device 10B extends to the gate area 60.

參閱圖1及圖2,一些實施例中,入閘區20包含複數入閘容器21,各入閘容器21為沿X方向延伸長度的長形空心容器用以容置料閘M。此些實施例中,各入閘容器21沿Z方向重疊設置,且各入閘容器21的一端在X方向上的位置鄰接於第一料閘移載裝置10A。藉此,第一料閘移載裝置10A的立軌12可於底軌11上沿X方向位移以帶動夾持器13至入閘容器21取出或置入料閘M。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the gate area 20 includes a plurality of gate containers 21, each of which is a long hollow container extending along the X direction for accommodating the gate M. In these embodiments, each gate container 21 is overlapped along the Z direction, and one end of each gate container 21 is adjacent to the first gate transfer device 10A in the X direction. Thus, the vertical rail 12 of the first gate transfer device 10A can be displaced along the X direction on the bottom rail 11 to drive the gripper 13 to the gate container 21 to take out or put in the gate M.

參閱圖1,一些實施例中,複數入閘容器21包含第一入閘容器21A與第二入閘容器21B,第一入閘容器21A用以容置裝載有待測試的試片S之料閘M,而第二入閘容器21B用以容置未裝載有試片S的空料閘 M。藉此,操作人員可在第一入閘容器21A內一次裝載複數裝載有待測試的試片S之料閘M供測試系統持續進行測試,而當第一料閘移載裝置10A取出的料閘M內之試片S均被入料裝置30輸入輸送單元40進入測試流程後,第一料閘移載裝置10A即能將空的料閘M置入第二入閘容器21B內供操作人員取走。如此一來,在測試過程中,不須等待空的料閘M被取走後才補充裝載有待測試的試片S之料閘M,而能提高測試速度及效率。 Referring to FIG. 1 , in some embodiments, the plurality of gate containers 21 include a first gate container 21A and a second gate container 21B. The first gate container 21A is used to accommodate a gate M loaded with a test piece S to be tested, and the second gate container 21B is used to accommodate an empty gate M without a test piece S. Thus, an operator can load a plurality of gates M loaded with test pieces S to be tested into the first gate container 21A at one time for the test system to continue testing. When the test pieces S in the gate M taken out by the first gate transfer device 10A are all input into the conveying unit 40 by the feeding device 30 to enter the test process, the first gate transfer device 10A can place the empty gate M into the second gate container 21B for the operator to take away. In this way, during the test process, there is no need to wait for the empty gate M to be taken away before refilling the gate M loaded with the test piece S to be tested, which can improve the test speed and efficiency.

值得說明的是,如圖1所繪示之實施例之入閘容器21的數量是以兩個入閘容器21為例進行說明,但本案並不以此為限。入閘容器21的數量可視需求及第一料閘移載裝置10A的夾持器13於Z方向的位移範圍而定。 It is worth noting that the number of gate containers 21 in the embodiment shown in FIG. 1 is illustrated by taking two gate containers 21 as an example, but the present invention is not limited to this. The number of gate containers 21 can be determined according to the demand and the displacement range of the clamp 13 of the first material gate transfer device 10A in the Z direction.

參閱圖1及圖2,一些實施例中,入料裝置30是能沿Y方向自料閘M內卸載試片S。此些實施例中,入料裝置30固定設置於機台70上並包含入料部31,入料部31可沿Y方向位移。於此,當料閘M夾持於第一料閘移載裝置10A時,入料裝置30的入料部31朝向料閘M的插槽M5之一端。如此一來,第一料閘移載裝置10A只要改變夾持器13於Z方向上的位置,入料裝置30就能相對應於料閘M內不同試片S的位置,只要驅動入料裝置30的入料部31沿Y方向伸縮,就能將料閘M內的試片S自料閘M內卸載並將試片S送入輸送單元40。一些實施例中,入料裝置30為氣/液壓缸帶動伸縮桿型態的入料部31伸縮以卸載試片S,但本案並不以此為限。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the feed device 30 is capable of unloading the test piece S from the material gate M along the Y direction. In these embodiments, the feed device 30 is fixedly mounted on the machine 70 and includes a feed portion 31, which can be displaced along the Y direction. Here, when the material gate M is clamped by the first material gate transfer device 10A, the feed portion 31 of the feed device 30 faces one end of the slot M5 of the material gate M. In this way, the first material gate transfer device 10A only needs to change the position of the clamp 13 in the Z direction, and the feed device 30 can correspond to the position of different test pieces S in the material gate M. As long as the feed portion 31 of the feed device 30 is driven to extend and retract along the Y direction, the test piece S in the material gate M can be unloaded from the material gate M and the test piece S can be sent to the conveying unit 40. In some embodiments, the feeding device 30 is a feeding part 31 of a telescopic rod type driven by a gas/hydraulic cylinder to extend and retract to unload the test piece S, but the present invention is not limited to this.

參閱圖1及圖2,輸送單元40沿Y方向輸送試片S以完成測試。一些實施例中,輸送單元40可以是輸送帶。此些實施例中,輸送單元40沿Y方向延伸於第一料閘移載裝置10A與第二料閘移載裝置10B之間。 Referring to FIG. 1 and FIG. 2 , the transport unit 40 transports the test piece S along the Y direction to complete the test. In some embodiments, the transport unit 40 may be a conveyor belt. In these embodiments, the transport unit 40 extends along the Y direction between the first material gate transfer device 10A and the second material gate transfer device 10B.

參閱圖1及圖2,一些實施例中,規正單元51設置於輸送單元40的一側用以規正試片S於X方向及Y方向的位置,使試片S於X方向及Y方向上的位置處於後續測試機52進行測試的位置。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the calibration unit 51 is disposed on one side of the conveying unit 40 to calibrate the position of the test piece S in the X direction and the Y direction, so that the position of the test piece S in the X direction and the Y direction is at the position for subsequent testing by the testing machine 52 .

參閱圖1及圖2,測試機52設置於輸送單元40的另一側用以對試片S進行測試。此些實施例中,規正單元51與測試機52位於相同的Y方向位置上,藉以便於測試片移載單元53的快速移載。 Referring to Figures 1 and 2, the test machine 52 is disposed on the other side of the conveying unit 40 for testing the test piece S. In these embodiments, the calibration unit 51 and the test machine 52 are located at the same Y-direction position, so as to facilitate the rapid transfer of the test piece transfer unit 53.

參閱圖1及圖2,測試片移載單元53設置於規正單元51與測試機52之間,用以將未測試的試片S由輸送單元40移載至規正單元51進行規正、將規正後的試片S由規正單元51移載至測試機52內進行測試,以及將測試機52內經過測試的試片S移載至輸送單元40。 Referring to Figures 1 and 2, the test piece transfer unit 53 is disposed between the calibration unit 51 and the test machine 52, and is used to transfer the untested test piece S from the transport unit 40 to the calibration unit 51 for calibration, transfer the calibrated test piece S from the calibration unit 51 to the test machine 52 for testing, and transfer the tested test piece S in the test machine 52 to the transport unit 40.

一些實施例中,測試片移載單元53包含基座531、頂軌532及移載裝置533,此些實施例中,基座531沿Z方向延伸且一端固定於機台70,頂軌532固定於基座531的另一端並沿X方向延伸,移載裝置533可沿X方向位移地設置於頂軌532上。 In some embodiments, the test piece transfer unit 53 includes a base 531, a top rail 532, and a transfer device 533. In these embodiments, the base 531 extends along the Z direction and one end is fixed to the machine 70, the top rail 532 is fixed to the other end of the base 531 and extends along the X direction, and the transfer device 533 can be disposed on the top rail 532 so as to be displaceable along the X direction.

參閱圖1及圖2,一些實施例中,頂軌532沿X方向延伸的範圍重疊於規正單元51及測試機52,藉此使移載裝置533可沿X方向位移至規正單元51或測試機52。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the range of the top rail 532 extending along the X direction overlaps the standard unit 51 and the test machine 52, so that the transfer device 533 can be moved along the X direction to the standard unit 51 or the test machine 52.

參閱圖1及圖2,一些實施例中,移載裝置533包含第一移載頭5331及第二移載頭5332,第一移載頭5331及第二移載頭5332分別可沿Z方向伸縮位移,且第一移載頭5331及第二移載頭5332是沿X方向並列設置。此些實施例中,在X方向上的位置上,第一移載頭5331相較於第二移載頭5332靠近規正單元51,而第二移載頭5332相較於第一移載頭5331靠 近測試機52,且第一移載頭5331用以移載未經測試的試片S,而第二移載頭5332用以移載經過測試的試片S。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the transfer device 533 includes a first transfer head 5331 and a second transfer head 5332, and the first transfer head 5331 and the second transfer head 5332 can be extended and displaced along the Z direction, and the first transfer head 5331 and the second transfer head 5332 are arranged in parallel along the X direction. In these embodiments, in terms of the position in the X direction, the first transfer head 5331 is closer to the regularization unit 51 than the second transfer head 5332, and the second transfer head 5332 is closer to the testing machine 52 than the first transfer head 5331, and the first transfer head 5331 is used to transfer the untested test piece S, and the second transfer head 5332 is used to transfer the tested test piece S.

一些實施例中,第一移載頭5331及第二移載頭5332可以是吸取頭而能透過真空吸取的方式移載試片S,但本案並不以此為限。 In some embodiments, the first transfer head 5331 and the second transfer head 5332 may be suction heads that can transfer the test piece S by vacuum suction, but the present invention is not limited thereto.

於此,當試片S由輸送單元40輸送至對應測試片移載單元53的位置時,測試片移載單元53的移載裝置533沿頂軌532位移至第一移載頭5331對應輸送單元40的位置,接著第一移載頭5331沿Z方向位移靠近輸送單元40將輸送單元40上的試片S取走,第一移載頭5331取走輸送單元40上未經測試的試片S後,移載裝置533沿頂軌532位移至第一移載頭5331對應規正單元51的位置,接著第一移載頭5331再將試片S置入規正單元51,規正單元51即能對試片S進行X方向與Y方向的位置規正,使規正後的試片S處於能於測試機52進行測試的位置。 Here, when the test piece S is transported by the transport unit 40 to the position corresponding to the test piece transfer unit 53, the transfer device 533 of the test piece transfer unit 53 moves along the top rail 532 to the position of the first transfer head 5331 corresponding to the transport unit 40, and then the first transfer head 5331 moves along the Z direction close to the transport unit 40 to take away the test piece S on the transport unit 40. After the first transfer head 5331 takes away the untested test piece S on the transport unit 40, the transfer device 533 moves along the top rail 532 to the position of the first transfer head 5331 corresponding to the standardization unit 51, and then the first transfer head 5331 puts the test piece S into the standardization unit 51. The standardization unit 51 can then standardize the position of the test piece S in the X direction and the Y direction, so that the standardized test piece S is in a position that can be tested by the test machine 52.

接著,當試片S於規正單元51內規正位置後,第一移載頭5331將規正位置後的試片S自規正單元51內取出,移載裝置533沿頂軌532位移至第一移載頭5331位置對應測試機52的位置並將規正位置後的試片S置入測試機52以進行測試。 Next, when the test piece S is aligned in the alignment unit 51, the first transfer head 5331 takes the aligned test piece S out of the alignment unit 51, and the transfer device 533 moves along the top rail 532 to the position of the first transfer head 5331 corresponding to the position of the test machine 52 and places the aligned test piece S into the test machine 52 for testing.

值得說明的是,由於測試系統是持續不斷地進行測試,因此,在循環測試的過程中,測試機52內可能已存在經過測試後的試片S,於此狀況下,在第一移載頭5331位移至測試機52的過程中,由於第二移載頭5332在X方向上的位置是相較於第一移載頭5331靠近測試機52,因此第二移載頭5332將早於第一移載頭5331位移至對應測試機52的位置,此時,第二移載頭5332便能先將測試機52內的試片S取出,接著第一移載頭 5331繼續位移靠近測試機52,在第一移載頭5331位移至對應測試機52的位置時,第一移載頭5331便能將未經測試的試片S置入測試機52進行測試。 It is worth noting that since the test system is continuously testing, during the cyclic test, there may be a tested specimen S in the test machine 52. In this case, during the process of the first transfer head 5331 moving to the test machine 52, since the position of the second transfer head 5332 in the X direction is closer to the test machine 52 than the first transfer head 5331, the second transfer head 533 2 will be moved earlier than the first transfer head 5331 to the position corresponding to the test machine 52. At this time, the second transfer head 5332 can first take out the test piece S in the test machine 52, and then the first transfer head 5331 continues to move closer to the test machine 52. When the first transfer head 5331 moves to the position corresponding to the test machine 52, the first transfer head 5331 can place the untested test piece S into the test machine 52 for testing.

接著,測試片移載單元53的移載裝置533沿頂軌532位移,在第二移載頭5332對應至輸送單元40的位置時,第二移載頭5332便能將經過測試的試片S重新載入輸送單元40,輸送單元40繼續將試片S沿Y方向進行輸送。經由前述可知,測試片移載單元53的移載裝置533可在取出已測試之試片S後不須往返輸送單元40就能再置入待測試之試片S,減少測試片移載單元53往返輸送單元40所耗費的時間,提高測試效率。 Then, the transfer device 533 of the test piece transfer unit 53 moves along the top rail 532. When the second transfer head 5332 corresponds to the position of the transport unit 40, the second transfer head 5332 can reload the tested test piece S into the transport unit 40, and the transport unit 40 continues to transport the test piece S along the Y direction. As can be seen from the above, the transfer device 533 of the test piece transfer unit 53 can take out the tested test piece S and then put in the test piece S to be tested without going back and forth to the transport unit 40, thereby reducing the time spent by the test piece transfer unit 53 to go back and forth to the transport unit 40 and improving the test efficiency.

參閱圖1及圖2,一些實施例中,測試模組50的測試機52之數量可以為二,二測試機52沿Y方向並列設置,此些實施例中,測試片移載單元53的頂軌532兩側分別設置一個移載裝置533,藉此即能適用於雙測試機52同時進行測試。 Referring to FIG. 1 and FIG. 2 , in some embodiments, the number of the test machines 52 of the test module 50 can be two, and the two test machines 52 are arranged in parallel along the Y direction. In these embodiments, a transfer device 533 is respectively arranged on both sides of the top rail 532 of the test piece transfer unit 53, thereby being applicable to the simultaneous testing of the two test machines 52.

一些實施例中,出閘區60包含複數出閘容器61,出閘容器61與入閘容器21的結構態樣相同而不再贅述。此些實施例中,各出閘容器61沿Z方向重疊設置,且各出閘容器61的一端再X方向上的位置鄰接於第二料閘移載裝置10B。藉此,第二料閘移載裝置10B的立軌12可於底軌11上沿X方向位移以帶動夾持器13至出閘容器61取出或置入料閘M。 In some embodiments, the gate-out area 60 includes a plurality of gate-out containers 61, and the gate-out containers 61 have the same structure as the gate-in container 21 and are not described in detail. In these embodiments, each gate-out container 61 is overlapped along the Z direction, and one end of each gate-out container 61 is adjacent to the second gate transfer device 10B in the X direction. Thus, the vertical rail 12 of the second gate transfer device 10B can be displaced along the X direction on the bottom rail 11 to drive the clamp 13 to the gate-out container 61 to take out or put in the gate M.

一些實施例中,複數出閘容器61包含第一出閘容器61A與第二出閘容器61B,第一出閘容器61A用以容置裝載有測試後的試片S之料閘M,而第二出閘容器61B用以容置未裝載試片S的空料閘M。藉此,操作人員可在第二出閘容器61B內一次裝載複數未裝載試片S之空料閘M供第二 料閘移載裝置10B取出空的料閘M以承接由輸送單元40送出的測試完成之試片S,而當第二料閘移載裝置10B取出的料閘M內承接測試完成之試片S滿載後,第二料閘移載裝置10B即能將已滿載測試完成之試片S的料閘M置入第一出閘容器61A內供操作人員取走。如此一來,在測試過程中,不須等待滿載的料閘M被取走後才能補充空的料閘M,而能提高測試速度及效率。 In some embodiments, the plurality of gate containers 61 include a first gate container 61A and a second gate container 61B. The first gate container 61A is used to accommodate the gate M loaded with the tested test piece S, and the second gate container 61B is used to accommodate the empty gate M without the test piece S loaded. Thus, the operator can load multiple empty gates M without test pieces S in the second gate container 61B at one time for the second gate transfer device 10B to take out the empty gates M to receive the test pieces S sent out by the conveying unit 40. When the gates M taken out by the second gate transfer device 10B are full of the test pieces S, the second gate transfer device 10B can put the gates M full of the test pieces S into the first gate container 61A for the operator to take away. In this way, during the test process, there is no need to wait for the full gates M to be taken away before replenishing the empty gates M, which can improve the test speed and efficiency.

一些實施例中,出閘區60的數量為複數而能作在輸出料閘M時同時進行分類,各出閘區60內容置裝載有不同特性(合格、不合格、未測)試片S的料閘M。此些實施例中,各出閘區60是沿Y方向並列設置,且各出閘區60的一端分別對應設有一個第二料閘移載裝置10B。 In some embodiments, the number of gate areas 60 is plural so that the gates M can be classified at the same time when they are output. Each gate area 60 contains a gate M with different characteristics (qualified, unqualified, untested) of the test piece S. In these embodiments, each gate area 60 is arranged in parallel along the Y direction, and a second gate transfer device 10B is provided at one end of each gate area 60.

在出閘區60及第二料閘移載裝置10B的數量為複數的一些實施例中,為使來自輸送單元40的測試完成之試片S能位移至對應特性的出閘區60,更包含延伸輸送機構80。此些實施例中,延伸輸送機構80可沿Z方向滑移地設置於除了最遠離第一料閘移載裝置10A以外的其餘第二料閘移載裝置10B之立軌12上(如圖2及圖3所示),也就是說,延伸輸送機構80的數量為第二料閘移載裝置10B之數量減一。 In some embodiments where the number of the gate area 60 and the second gate transfer device 10B is plural, an extended conveying mechanism 80 is further included to enable the tested specimen S from the conveying unit 40 to be displaced to the gate area 60 of the corresponding characteristics. In these embodiments, the extended conveying mechanism 80 can be slidably disposed along the Z direction on the vertical rails 12 of the remaining second gate transfer devices 10B except the one farthest from the first gate transfer device 10A (as shown in FIG. 2 and FIG. 3 ), that is, the number of extended conveying mechanisms 80 is the number of the second gate transfer devices 10B minus one.

參閱圖3,具體而言,在設有延伸輸送機構80的第二料閘移載裝置10B上,第二料閘移載裝置10B更包含滑座14,滑座14可沿Z方向滑移地設置於立軌12上,而延伸輸送機構80及夾持器13設置於滑座14上以同步位移,此些實施例中,在Z方向的位置上,延伸輸送機構80相較於夾持器13遠離底軌11。 Referring to FIG. 3 , specifically, on the second material gate transfer device 10B provided with the extension conveying mechanism 80 , the second material gate transfer device 10B further includes a slide 14 , which can be slidably disposed on the vertical rail 12 along the Z direction, and the extension conveying mechanism 80 and the clamp 13 are disposed on the slide 14 for synchronous displacement. In these embodiments, in the position in the Z direction, the extension conveying mechanism 80 is farther from the bottom rail 11 than the clamp 13.

參閱圖1及圖2,圖1及圖2所繪示之實施例中,出閘區60的數量以三組為例進行說明,但本案並不以此為限,此些實施例中,出閘區60包含沿Y方向依序並列設置的第一出閘區60A、第二出閘區60B及第三出閘區60C,第一出閘區60A相較於第三出閘區60C靠近入閘區20。 Referring to FIG. 1 and FIG. 2 , in the embodiments shown in FIG. 1 and FIG. 2 , the number of gate regions 60 is described as three groups, but the present invention is not limited thereto. In these embodiments, the gate region 60 includes a first gate region 60A, a second gate region 60B, and a third gate region 60C arranged in sequence along the Y direction. The first gate region 60A is closer to the gate region 20 than the third gate region 60C.

於此,當輸送單元40輸出的試片S經過測試後判斷其特性為對應第一出閘區60A的特性時,對應第一出閘區60A的第二料閘移載裝置10B之滑座14沿Z方向調整其上的料閘M之插槽M5於Z方向上的位置至對應輸送單元40的位置。如此一來,由輸送單元40輸出的試片S即能直接進入對應第一出閘區60A的第二料閘移載裝置10B所夾持之料閘M內,待對應第一出閘區60A的第二料閘移載裝置10B所夾持之料閘M滿載後,對應第一出閘區60A的第二料閘移載裝置10B即能將滿載之料閘M輸入至第一出閘區60A。 Here, when the test piece S output by the conveying unit 40 is tested and its characteristics are determined to be the characteristics corresponding to the first gate area 60A, the slide 14 of the second gate transfer device 10B corresponding to the first gate area 60A adjusts the position of the slot M5 of the gate M thereon in the Z direction to the position corresponding to the conveying unit 40 along the Z direction. In this way, the test piece S outputted by the conveying unit 40 can directly enter the gate M held by the second gate transfer device 10B corresponding to the first gate area 60A. After the gate M held by the second gate transfer device 10B corresponding to the first gate area 60A is fully loaded, the second gate transfer device 10B corresponding to the first gate area 60A can input the fully loaded gate M into the first gate area 60A.

當輸送單元40輸出的試片S經過測試後判斷其特性為對應第二出閘區60B的特性時,對應第一出閘區60A的第二料閘移載裝置10B之滑座14沿Z方向調整其上的延伸輸送機構80於Z方向上的位置至對應輸送單元40的位置(如圖1之狀態),而對應第二出閘區60B的第二料閘移載裝置10B之滑座14沿Z方向調整其上的料閘M於Z方向上的位置至對應延伸輸送機構80的位置。如此一來,由輸送單元40輸出的試片S即能通過延伸輸送機構80跨越第一出閘區60A進入對應第二出閘區60B的第二料閘移載裝置10B所夾持之料閘M內。 When the test piece S outputted by the conveying unit 40 is determined to have the characteristics corresponding to the second gate area 60B after testing, the slide 14 of the second gate transfer device 10B corresponding to the first gate area 60A adjusts the position of the extended conveying mechanism 80 on it in the Z direction to the position corresponding to the conveying unit 40 (as shown in FIG. 1 ), and the slide 14 of the second gate transfer device 10B corresponding to the second gate area 60B adjusts the position of the gate M on it in the Z direction to the position corresponding to the extended conveying mechanism 80. In this way, the test piece S outputted by the conveying unit 40 can enter the gate M clamped by the second gate transfer device 10B corresponding to the second gate area 60B through the extended conveying mechanism 80 across the first gate area 60A.

參閱圖1,而當輸送單元40輸出的試片S經過測試後判斷其特性為對應第三出閘區60C的特性時,對應第一出閘區60A及第二出閘區 60B的第二料閘移載裝置10B之滑座14沿Z方向調整其上的延伸輸送機構80於Z方向上的位置至對應輸送單元40的位置,而對應第三出閘區60C的第二料閘移載裝置10B之滑座14沿Z方向調整其上的料閘M之插槽M5於Z方向上的位置至對應延伸輸送機構80的位置。如此一來,由輸送單元40輸出的試片S即能通過延伸輸送機構80跨越第一出閘區60A、第二出閘區60B進入對應第三出閘區60C的第二料閘移載裝置10B所夾持之料閘M內。 Referring to FIG. 1 , when the characteristics of the test piece S outputted by the conveying unit 40 are determined to correspond to the characteristics of the third gate area 60C after being tested, the slide 14 of the second gate transfer device 10B corresponding to the first gate area 60A and the second gate area 60B adjusts the position of the extended conveying mechanism 80 thereon in the Z direction to the position corresponding to the conveying unit 40, and the slide 14 of the second gate transfer device 10B corresponding to the third gate area 60C adjusts the position of the slot M5 of the gate M thereon in the Z direction to the position corresponding to the extended conveying mechanism 80. In this way, the test piece S outputted by the conveying unit 40 can pass through the extended conveying mechanism 80 across the first gate area 60A and the second gate area 60B and enter the gate M held by the second gate transfer device 10B corresponding to the third gate area 60C.

雖然本揭露已以一些實施例揭露如上,然其並非用以限定本揭露,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神及範圍內,當可作些許更動及潤飾。因此本案之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。 Although the present disclosure has been disclosed as above with some embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the relevant technical field may make some changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of patent protection of this case shall be subject to the scope of the patent application attached to this specification.

S:試片 S:Test piece

M:料閘 M: material gate

M1:頂面 M1: Top surface

M2:底面 M2: bottom surface

M3:第一側面 M3: First side

M4:第二側面 M4: Second side

M5:插槽 M5: slot

10:料閘移載裝置 10: Gate transfer device

10A:第一料閘移載裝置 10A: First material gate transfer device

10B:第二料閘移載裝置 10B: Second material gate transfer device

12:立軌 12: Vertical track

13:夾持器 13: Clamp

131:夾口 131: Clamping

20:入閘區 20: Gate area

21:入閘容器 21: Gate container

21A:第一入閘容器 21A: First gate container

21B:第二入閘容器 21B: Second entry container

30:入料裝置 30: Feeding device

31:入料部 31: Feeding section

40:輸送單元 40:Transportation unit

50:測試模組 50:Test module

51:規正單元 51:Regular unit

52:測試機 52: Testing machine

53:測試片移載單元 53: Test piece transfer unit

531:基座 531: Base

532:頂軌 532: Top track

533:移載裝置 533:Transfer device

5331:第一移載頭 5331: First transfer head

5332:第二移載頭 5332: Second transfer head

60:出閘區 60: Exit area

60A:第一出閘區 60A: First exit gate area

60B:第二出閘區 60B: Second exit area

60C:第三出閘區 60C: The third exit area

61:出閘容器 61: Gate container

61A:第一出閘容器 61A: First outlet container

61B:第二出閘容器 61B: Second outlet container

70:機台 70: Machine

80:延伸輸送機構 80: Extended conveying mechanism

X,Y,Z:方向 X,Y,Z: Direction

Claims (9)

一種測試系統,適於複數試片之測試,該複數試片沿一Z方向彼此間隔地容置於一料閘內,該測試系統包括:複數料閘移載裝置,分別包含一底軌、一立軌及一夾持器,該底軌沿垂直於該Z方向的一X方向延伸,該立軌沿該Z方向延伸並可沿該X方向滑移地設置於該底軌上,該夾持器可沿該Z方向滑移地設置於該料閘移載裝置的立軌上,該複數料閘移載裝置包含一第一料閘移載裝置及一第二料閘移載裝置;一入閘區,沿該X方向延伸且一端相對於該第一料閘移載裝置的夾持器;一入料裝置,設置於該第一料閘移載裝置的一側,用以沿垂直於該X方向及該Z方向的一Y方向自該料閘卸載該試片;一輸送單元,一端鄰接於該第一料閘移載裝置的另一側以承接該試片並沿該Y方向輸送該試片,且該輸送單元的另一端鄰接於該第二料閘移載裝置;一測試模組,包含設置於該輸送單元兩側的一規正單元、一測試機以及移載該試片於該規正單元與該測試機之間的一測試片移載單元;以及一出閘區,一端相對於該第二料閘移載裝置的夾持器,且該出閘區沿該X方向延伸。 A testing system is provided, which is suitable for testing a plurality of test pieces. The plurality of test pieces are placed in a material gate at intervals along a Z direction. The testing system comprises: a plurality of material gate transfer devices, each comprising a bottom rail, a vertical rail and a clamp, wherein the bottom rail extends along an X direction perpendicular to the Z direction, the vertical rail extends along the Z direction and can be slidably arranged on the bottom rail along the X direction, the clamp can be slidably arranged on the vertical rail of the material gate transfer device along the Z direction, and the plurality of material gate transfer devices comprises a first material gate transfer device and a second material gate transfer device; a gate entry area, which extends along the X direction and has one end opposite to the clamp of the first material gate transfer device; an entry area; A material device is arranged on one side of the first material gate transfer device, and is used to unload the test piece from the material gate along a Y direction perpendicular to the X direction and the Z direction; a conveying unit, one end of which is adjacent to the other side of the first material gate transfer device to receive the test piece and convey the test piece along the Y direction, and the other end of the conveying unit is adjacent to the second material gate transfer device; a test module, including a regular unit arranged on both sides of the conveying unit, a test machine, and a test piece transfer unit for transferring the test piece between the regular unit and the test machine; and a gate exit area, one end of which is opposite to the clamp of the second material gate transfer device, and the gate exit area extends along the X direction. 如請求項1所述之測試系統,更包含一機台,且該測試片移載單元包含一基座、一頂軌及一移載裝置,該基座沿該Z方向延伸且一 端固定於該機台,該頂軌固定於該基座的另一端並沿該X方向延伸,該移載裝置可沿該X方向位移地設置於該頂軌上。 The test system as described in claim 1 further includes a machine, and the test piece transfer unit includes a base, a top rail and a transfer device, the base extends along the Z direction and one end is fixed to the machine, the top rail is fixed to the other end of the base and extends along the X direction, and the transfer device can be displaced along the X direction on the top rail. 如請求項2所述之測試系統,其中該頂軌於該X方向上的範圍重疊於該規正單元及該測試機。 A test system as described in claim 2, wherein the range of the top rail in the X direction overlaps the standard unit and the test machine. 如請求項2所述之測試系統,其中該移載裝置包含一第一移載頭及一第二移載頭,該第一移載頭及該第二移載頭沿該X方向並列設置。 The test system as described in claim 2, wherein the transfer device comprises a first transfer head and a second transfer head, and the first transfer head and the second transfer head are arranged in parallel along the X direction. 如請求項4所述之測試系統,其中該第一移載頭在該X方向上的位置上相較於該第二移載頭靠近該規正單元,該第二移載頭在該X方向上相較於該第一移載頭靠近該測試機。 A test system as described in claim 4, wherein the first transfer head is closer to the standard unit than the second transfer head in the X direction, and the second transfer head is closer to the test machine than the first transfer head in the X direction. 如請求項1所述之測試系統,更包含至少一延伸輸送機構,且該出閘區的數量為複數,該第二料閘移載裝置的數量對應該出閘區的數量,該延伸輸送機構可沿該Z方向滑移地設置於除了最遠離該第一料閘移載裝置以外的其餘第二料閘移載裝置之立軌上。 The test system as described in claim 1 further comprises at least one extended conveying mechanism, and the number of the gate-out areas is plural, the number of the second gate transfer devices corresponds to the number of the gate-out areas, and the extended conveying mechanism can be slidably disposed along the Z direction on the vertical rails of the second gate transfer devices except the one farthest from the first gate transfer device. 如請求項6所述之測試系統,其中該複數第二料閘移載裝置沿該Y方向並列設置。 A test system as described in claim 6, wherein the plurality of second material gate transfer devices are arranged in parallel along the Y direction. 如請求項1所述之測試系統,更包含一機台,且該測試機的數量為二,該二測試機沿該Y方向並列設置,該測試片移載單元包含一基座、一頂軌及二移載裝置,該基座沿該Z方向延伸且一端固定於該機台,該頂軌固定於該基座的另一端並沿該X方向延伸,該二移載裝置分別可沿該X方向位移地設置於該頂軌的相對兩側。 The test system as described in claim 1 further includes a machine, and the number of the test machines is two, the two test machines are arranged in parallel along the Y direction, the test piece transfer unit includes a base, a top rail and two transfer devices, the base extends along the Z direction and one end is fixed to the machine, the top rail is fixed to the other end of the base and extends along the X direction, and the two transfer devices can be respectively arranged on opposite sides of the top rail so as to be displaceable along the X direction. 如請求項1所述之測試系統,其中該入閘區包含二入閘容器,該二入閘容器沿該Z方向重疊設置。A test system as described in claim 1, wherein the gate area includes two gate containers, and the two gate containers are overlapped along the Z direction.
TW111141903A 2022-11-02 2022-11-02 Testing system TWI841032B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW111141903A TWI841032B (en) 2022-11-02 2022-11-02 Testing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111141903A TWI841032B (en) 2022-11-02 2022-11-02 Testing system

Publications (2)

Publication Number Publication Date
TWI841032B true TWI841032B (en) 2024-05-01
TW202419880A TW202419880A (en) 2024-05-16

Family

ID=92074040

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111141903A TWI841032B (en) 2022-11-02 2022-11-02 Testing system

Country Status (1)

Country Link
TW (1) TWI841032B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010051086A1 (en) * 2000-03-13 2001-12-13 Brian Blades Automated feed mechanism for electronic components of silicon wafer
TW201405152A (en) * 2012-07-27 2014-02-01 Hon Tech Inc Pneumatic testing apparatus and testing equipment implementing the same
TWI545075B (en) * 2015-12-31 2016-08-11 Hon Tech Inc Electronic component carrying device and its application equipment
TW202203334A (en) * 2020-07-03 2022-01-16 日商佳能股份有限公司 Article manufacturing device, article manufacturing method, program, and recording medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010051086A1 (en) * 2000-03-13 2001-12-13 Brian Blades Automated feed mechanism for electronic components of silicon wafer
TW201405152A (en) * 2012-07-27 2014-02-01 Hon Tech Inc Pneumatic testing apparatus and testing equipment implementing the same
TWI545075B (en) * 2015-12-31 2016-08-11 Hon Tech Inc Electronic component carrying device and its application equipment
TW202203334A (en) * 2020-07-03 2022-01-16 日商佳能股份有限公司 Article manufacturing device, article manufacturing method, program, and recording medium

Also Published As

Publication number Publication date
TW202419880A (en) 2024-05-16

Similar Documents

Publication Publication Date Title
KR101163628B1 (en) Electronic component testing apparatus and electronic component testing system
CN110554209A (en) Sample analysis equipment and sample rack transport device
KR20150118492A (en) X-ray Apparatus for Inspecting Object Automatically Using Controlled Transfer Structure
TW201834104A (en) Sorting apparatus for semiconductor device
KR101372240B1 (en) Pitch alteration apparatus, electronic component handling apparatus and electronic component test apparatus
KR20150109305A (en) Handler for semiconductor package
TWI841032B (en) Testing system
KR20150109132A (en) Handler for semiconductor package
KR20160105738A (en) X-ray Apparatus for Inspecting Object Automatically Using Controlled Transfer Structure
CN117699166A (en) A strip conveying device and conveying method
KR102249305B1 (en) Electronic device test handler
TWI733088B (en) Conveying device and equipment using carrier plate
CN220392571U (en) Chip feeding mechanism and chip detection device
JP2011068104A (en) Sealing device and sealing method
JP6462216B2 (en) Tube container transfer device
TWI551873B (en) Electronic components operating equipment
CN114131332A (en) Assembling equipment
TWI572410B (en) Method and device for applying liquid material of electronic component
CN112640075B (en) Component sorting device
KR20190095777A (en) Apparatus for handling semiconductor devices
CN113333334B (en) A classification device
KR102791121B1 (en) Apparatus for assembling dual diagnostic kit
CN110523659A (en) A kind of material selection conveying device
CN101167172A (en) Method and device for supplying and unloading carriers with electronic components
JP2625395B2 (en) IC handler and IC probing method