TWI734908B - Manufacturing method of glass roll - Google Patents

Abstract

The manufacturing method of the glass roll includes: a glass film supply step of feeding the ribbon-shaped first glass film 2A in a predetermined direction; heating the transparent conductive film 3 on one surface 2a of the first glass film 2A to form a second glass film The film forming step of 2B; the protective film supply step of overlapping the tape-shaped protective film 4 with the adhesive surface on the other surface 2b of the second glass film 2B to form the third glass film 2C; and winding the third glass film 2C The winding step into a roll.

Description

Manufacturing method of glass roll

The present invention relates to a glass roll including a glass film on which a transparent conductive film is formed on the surface and a manufacturing method thereof.

As is well known, thin display devices such as liquid crystal displays or organic electroluminescence (EL) displays, and mobile devices such as smartphones or tablet-type personal computers (PCs), which have been rapidly spreading in recent years, require lightness. quantity. Therefore, as a glass substrate used in these devices, a glass film thinned into a film shape is being used. This glass film is considered to have a substantially rectangular shape or the like at the stage of the final product, but it has a belt-like shape at the stages such as the previous manufacturing steps or various processing steps.

Since such a glass film has appropriate flexibility, it is usually made into a form of a glass roll wound in a roll shape around a core or the like in consideration of convenience during storage or transportation. If the glass film is made into the form of a glass roll in advance, it is not only excellent in storage properties and the like, but also a glass film having a substantially rectangular shape or the like can be easily cut across a plurality of sheets.

In order to provide various functions in various devices, a functional film is formed on the surface of the glass roll. In order to make the functional film high performance, there are cases where the glass film is heated while forming a film. For example, Patent Document 1 discloses a method of heating a glass film (glass sheet) supplied from a substrate roll using a can heated to 300°C or higher, and sputtering on the surface of the glass film A transparent conductive film (for example, indium tin oxide) is formed. [Prior Art Document] [Patent Document]

Patent Document 1: Japanese Patent Laid-Open No. 2007-119322

[Problem to be Solved by the Invention] The glass film is superior in heat resistance compared to the resin film, and therefore is particularly suitable for the case where the film is formed by heating as described above. On the other hand, the mechanical strength of the glass film is low, and therefore, there is a risk of damage when the film-coated glass film is drawn out from the glass roll of the above-mentioned structure and the manufacturing steps of various machines are performed.

The present invention was made in view of the above-mentioned situation, and its technical problem is to prevent damage to a glass roll including a glass film on which a transparent conductive film is formed. [Means to solve the problem]

The present invention is intended to solve the above-mentioned problem, and is a method for manufacturing a glass roll formed by winding a ribbon-shaped glass film into a roll. The method for manufacturing the glass roll is characterized by comprising: A glass film supply step in which the first glass film is sent out in a predetermined direction; a film forming step in which a transparent conductive film is heated to form a second glass film on one side of the first glass film; A protective film supply step of overlapping a protective film on the other surface of the second glass film to form a third glass film; and a winding step of winding the third glass film into a roll.

As described above, the protective film is overlapped on the other side of the second glass film to form a third glass film, whereby the glass film can be protected by the protective film. The glass roll containing the third glass film can be subjected to various machine-related manufacturing processes in a state where the glass film is protected by a protective film. This can prevent damage to the glass film during processing.

The manufacturing method of the glass roll of the present invention may also include: a temporary winding step of winding the second glass film after the film forming step into a roll; A second glass film supply step in which the second glass film is temporarily drawn out of the glass roll and sent in a predetermined direction; and the protective film supply step in which the third glass film is formed after the second glass film supply step.

In addition, it is preferable that, in the winding step, the third glass film is wound into a roll shape so that the protective film becomes the outside. Thereby, the glass film in the glass roll state can be prevented suitably from breaking.

In addition, in the protective film supply step, it is desirable that the second glass film and the protective film are sandwiched between a core for winding the third glass film and a guide roller that guides the protective film, thereby The third glass film is formed. In this way, the second glass film and the protective film are clamped by the winding core of the third glass film and the guide roller, so that the protective film can be overlapped with the second glass film reliably and accurately. In addition, since the winding core is used in the formation of the third glass film, the structure of the guide roller can be simplified.

In the manufacturing method of the glass roll of the present invention, it is desirable that the film forming step is used to form the transparent conductive film on the first glass film by a sputtering method in a vacuum chamber. The transparent conductive film is heated and formed on the first glass film by a sputtering method, thereby forming a strong transparent conductive film that is not easily peeled off from the first glass film, and achieving low resistance of the transparent conductive film. That is, when the transparent conductive film includes a single layer, the sheet resistance can be set to a low resistance of 20 Ω/□ or less.

The present invention was made in order to solve the above-mentioned problem, and is characterized in that a glass roll formed by winding a band-shaped glass film into a roll shape includes: a transparent conductive film formed on one surface of the glass film; and A protective film overlapping the other side of the glass film and having an adhesive surface, the transparent conductive film is a single layer and the sheet resistance is 20 Ω/□ or less.

According to the above configuration, by overlapping the protective film on the other side of the glass film, the glass film can be protected. Therefore, the glass roll of the present invention can prevent damage to the glass film while performing prescribed manufacturing-related processing on the transparent conductive film of the glass film. In addition, the sheet resistance of the transparent conductive film when it contains a single layer is set to 20 Ω/□ or less, so it can be suitably used for electrodes and the like of various devices.

It is preferable that in the glass roll of the said structure, the said glass film is wound so that the said protective film may become an outer side. Thereby, the glass film in the state of the glass roll can be prevented from breaking. [Effects of the invention]

According to the present invention, damage to the glass roll including the glass film on which the transparent conductive film is formed can be prevented.

Hereinafter, a mode for implementing the present invention will be described with reference to the drawings. Fig. 1 to Fig. 3 show the first embodiment of the glass roll and its manufacturing method of the present invention.

As shown in Figure 1, the glass roll 1 is formed by forming a transparent conductive film 3 on one side of a belt-shaped glass film 2 (hereinafter referred to as the "first side") 2a, and overlaying a protective film 4 on the other side (hereinafter (Referred to as "second side") 2b, wound around the core 5 in a roll shape. In the glass roll 1 of this embodiment, it is comprised so that the 1st surface 2a of the glass film 2 may become an inner peripheral surface, and the 2nd surface 2b may become an outer peripheral surface. That is, the transparent conductive film 3 is formed on the inner side (first surface 2a) of the glass film 2, and the protective film 4 is overlapped on the outer side (second surface 2b).

The thickness of the glass film 2 is 500 μm or less, preferably 10 μm or more and 300 μm or less, and most preferably 30 μm or more and 200 μm or less.

As the material of the glass film 2, silicate glass and silica glass can be used, preferably borosilicate glass, soda lime glass, aluminosilicate glass, chemically strengthened glass, and most preferably alkali-free glass. As the glass film 2, by using alkali-free glass, a chemically stable glass can be made. Here, the alkali-free glass refers to a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically refers to a glass in which the weight ratio of the alkali component is 3000 ppm or less. The weight ratio of the alkali component in the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and most preferably 300 ppm or less.

The glass film 2 can be formed by the well-known float method, roll out method, slot down draw method, redraw method, etc., but it is preferably formed by overflow Flow down (overflow down draw) method to shape. The overflow down-draw method is to flow molten glass into an overflow groove provided on the upper part of a shaped body with a generally wedge-shaped cross-section, and make the molten glass overflowing from the overflow groove to both sides flow down along the side walls of both sides of the shaped body. It is fused and integrated at the lower end of the molded body, and is continuously molded into a glass film 2.

By the overflow down-draw method, the glass film 2 having a thickness of 300 μm or less can be produced in large quantities and inexpensively. The glass film 2 produced in this way does not require adjustment of the thickness of the glass film 2 by grinding, grinding, chemical etching, or the like. In addition, the overflow down-draw method is a molding method in which both sides of the glass film 2 are not in contact with the molded body during molding. Both sides (transmitting surfaces) of the obtained glass film 2 become forged surfaces, and a high surface can be obtained even without polishing. quality.

The thickness of the transparent conductive film 3 is preferably 10 nm or more and 1000 nm or less, more preferably 50 nm or more and 500 nm or less, and most preferably 100 nm or more and 300 nm or less. In addition, the sheet resistance of the transparent conductive film 3 formed on the glass film 2 is preferably 20 Ω/□ or less, more preferably 15 Ω/□ or less.

The material of the transparent conductive film 3 is not particularly limited as long as it has translucency and conductivity. The transparent conductive film 3 includes, for example, indium tin oxide (ITO), fluorine-doped tin oxide (FTO), indium zinc oxide (IZO), and aluminum-doped zinc oxide (aluminum tin oxide). -doped zinc oxide, AZO) etc.

One surface 4a of the protective film 4 is set as an adhesive surface. The adhesive surface is in contact with the second surface 2b of the glass film 2. The adhesive force of the adhesive surface is ideally set to the extent that the glass roll 1 can be peeled off from the glass film 2 after performing various machine-related manufacturing processes. The adhesive force is preferably set to 0.001 N/25 mm or more and 1.5 N/25 mm or less, but it is not limited to this range. In addition, the thickness of the protective film 4 is preferably 10 μm or more and 1000 μm or less, and more preferably 20 μm or more and 500 μm or less.

As the material of the protective film 4, for example, ionomer film, polyethylene film, polypropylene film, polyvinyl chloride film, polyvinylidene chloride film, polyvinyl alcohol film, polyester film, polycarbonate film, poly Styrene film, polyacrylonitrile film, ethylene vinyl acetate copolymer film, ethylene-vinyl alcohol copolymer film, ethylene-methacrylic acid copolymer film, nylon (registered trademark) film (polyamide film), polyamide For organic resin films (synthetic resin films) such as amine films and cellophanes (synthetic resin films), it is preferable to use a polyethylene terephthalate film (PET (polyethylene terephthalate) film).

The winding core 5 has a hollow cylindrical shape in this embodiment, but it may also be a solid cylindrical shape. The material of the core 5 is not particularly limited. For example, metals such as aluminum alloy, stainless steel, manganese steel, and carbon steel can be used; phenol resin, urea resin, melamine resin, unsaturated polyester resin, epoxy resin, and polyurethane Thermosetting resins such as esters and diallyl terephthalate resins; polyethylene, polypropylene, polystyrene, acrylonitrile-styrene (AS) resin, acrylonitrile-butadiene-styrene (Acrylonitrile-butadiene-styrene, ABS) resin, methacrylic resin, vinyl chloride and other thermoplastic resins; or reinforced plastics and paper made of these thermosetting resins or thermoplastic resins mixed with reinforcing fibers such as glass fibers or carbon fibers Tube and so on.

In addition, in the following description, the glass film used as a base material is called the 1st glass film 2A, and the transparent conductive film 3 formed on the 1st glass film 2A is called the 2nd glass film 2B. In addition, a laminate (a laminate including the glass film 2, the transparent conductive film 3, and the protection film 4) in which the protective film 4 is overlapped on the second glass film 2B is referred to as the third glass film 2C.

FIG. 2 shows the manufacturing apparatus 6 of the glass roll 1 in this embodiment. The manufacturing device 6 includes a film forming device 7 and a protective film supply device 8. The film forming apparatus 7 has a vacuum chamber 9. The vacuum chamber 9 has: a glass film supply chamber 9a; a film formation chamber 9b; and a glass film recovery chamber 9c.

The base material glass roll 1A in which the first glass film 2A is wound into a roll shape by the core 5A is arranged in the glass film supply chamber 9a. By the rotation of the core 5A, the first glass film 2A drawn out from the base material glass roll 1A is supplied from the glass film supply chamber 9a to the film formation chamber 9b.

In the film formation chamber 9b, the film formation part 10 which forms the transparent conductive film 3 on the 1st surface 2a of the 1st glass film 2A is arrange|positioned. The film forming part 10 can form the transparent conductive film 3 on the first glass film 2A by various film forming methods such as sputtering, vapor deposition, chemical vapor deposition (CVD). In this embodiment, a case where an ITO film as the transparent conductive film 3 is formed by a sputtering method will be described.

The film forming unit 10 includes an ion beam sputtering device, a magnetron sputtering device, or the like. The film forming section 10 as a sputtering device mainly includes a sputtering source 11 including a target material, and a heating roller 12 that supports the first glass film 2A.

The sputtering source 11 is arranged at regular intervals from the heating roller 12 such that sputtering particles (ITO particles) scattered from the target are attached to the first surface 2 a of the first glass film 2A.

The heating roller 12 includes a cylindrical roller body 13 that supports the first glass film 2A, and a heater 14 that heats the roller body 13. The roller body 13 contains glass or ceramics. The roller body 13 is rotatably supported by the shaft 15.

In order to heat the roller body 13, the heater 14 is arranged inside the roller body 13. The heater 14 includes, for example, an infrared heater or a near-infrared heater, but it is not limited to these.

The transparent conductive film 3 is formed on the first glass film 2A by the film forming section 10, thereby constituting the second glass film 2B. The second glass film 2B is transported to the glass film recovery chamber 9c, and thereafter, the protective film 4 is stacked to become the third glass film 2C.

In the glass film recovery chamber 9c of the vacuum chamber 9, the winding core 5 which winds the 3rd glass film 2C, and the protective film supply device 8 are arrange|positioned. The winding core 5 forms the glass roll 1 which is the final form by winding the 3rd glass film 2C. The base glass roll 1A and the glass roll 1 are configured to continuously convey each of the glass films 2A to 2C by a roll to roll (Roll to Roll) method.

The protective film supply device 8 includes: a protective film roll 16; a guide roller 17; and a support mechanism 18 of the guide roller 17.

Although the protective film roll 16 is arrange|positioned above the glass roll 1, it is not limited to this structure. The protective film roll 16 may be provided at a position on the downstream side or a position below the glass roll 1.

The guide roller 17 includes one roller. The guide roller 17 is configured to sandwich the third glass film 2C and the protective film 4 together with the core 5 of the glass roll 1. The guide roller 17 is arranged above the core 5 of the glass roll 1, but is not limited to this position. The roller surface 17a of the guide roller 17 includes a buffer material. The cushioning material desirably contains elastomers other than rubber.

The support mechanism 18 includes a support member 19 that rotatably supports the guide roller 17 and a support shaft 20 that rotatably supports the support member 19. The guide roller 17 acts on a moment around the support shaft 20 via the support member 19 and contacts a part of the glass roll 1 with a moderate pressing force. In addition, the guide roller 17 is supported by the support mechanism 18 so as to follow the expansion of the outer diameter of the glass roll 1 in the middle of manufacturing and move.

Hereinafter, the manufacturing method of the glass roll 1 of this embodiment is demonstrated. As shown in FIG. 3, this method includes: a glass film supply step; a film formation step; a protective film supply step; and a winding step.

In the glass film supply step, the first glass film 2A is drawn out from the base material glass roll 1A arranged in the glass film supply chamber 9a and sent to the film forming section 10 in the film forming chamber 9b on the downstream side.

In the film forming step, the transparent conductive film 3 is formed by the film forming section 10 on the first surface 2a of the first glass film 2A supplied from the glass film supply chamber 9a. The film forming chamber 9b is set to a predetermined degree of vacuum by a vacuum pump not shown, and an inert gas such as argon is supplied. The film forming chamber 10 causes sputtering particles (for example, ITO particles) to scatter from the sputtering source 11 and sequentially adhere to the first surface 2a of the first glass film 2A.

The shaft portion 15 is driven by a drive source not shown, whereby the roller body 13 of the heating roller 12 faces a predetermined direction (the direction of the arrow R in FIG. 2) along the conveying direction of the first glass film 2A Spin. A part of the roller body 13 contacts the second surface 2b of the first glass film 2A. The roller body 13 guides the first glass film 2A toward the downstream side (the glass film recovery chamber 9c side) by its rotation.

The roller body 13 is heated to a predetermined temperature by the heater 14. The temperature of the roll body 13 is set to 200° C. or more and 500° C. or less, for example, but is not limited to this range. Thereby, the roller body 13 guides the first glass film 2A toward the downstream side while heating. The first glass film 2A is heated to 150° C. or higher by the roller body 13. When the sputtered particles are ITO, the first glass film 2A is desirably heated to 200°C or higher, more desirably to be heated to 250°C, and most desirably to be heated to 300°C or higher. By being heated by the first glass film 2A, the ITO particles adhering to the first glass film 2A are crystallized, thereby forming a low-resistance (20 Ω/□ or less) transparent conductive film 3. Through the above, the second glass film 2B is formed.

In the protective film supply step, the protective film 4 is drawn out with the rotation of the core 21 of the protective film roll 16 in the protective film supply device 8. The protective film 4 and the second glass film 2B are sandwiched between the guide roller 17 and the core 5 of the glass roll 1. Thereby, one surface 4a (adhesive surface) of the protective film 4 adheres to the second surface 2b of the second glass film 2B as the outer peripheral surface. This starts to form the third glass film 2C.

In the winding step, the third glass film 2C formed through the protective film supply step is immediately wound by the rotation of the winding core 5. Thereby, the glass roll 1 is formed around the winding core 5. The glass roll 1 expands its outer diameter according to the rotation of the core 5.

At this time, the guide roller 17 of the protective film supply device 8 moves to the outside following the expansion of the outer diameter of the glass roll 1. The support member 19 of the support mechanism 18 rotates (clockwise) around the support shaft 20 in order to move the guide roller 17. That is, the guide roller 17 moves from the position indicated by the solid line in FIG. 2 to the position indicated by the two-dot chain line in accordance with the expansion of the outer diameter of the glass roll 1. Thereby, the guide roller 17 does not apply an excessive pressing force to the glass roll 1, and the protective film 4 can surely contact the 2nd glass film 2B.

The winding core 5 winds the third glass film 2C of a predetermined length, whereby the winding step is completed, and the glass roll 1 of the present embodiment is completed.

Furthermore, in the subsequent steps, the third glass film 2C is drawn out from the glass roll 1, and a predetermined circuit pattern (for example, an electrode pattern) is formed on the transparent conductive film 3 by means such as photolithography. When a predetermined manufacturing-related process is performed, the protective film 4 is removed (peeled) from the glass film 2.

According to the manufacturing method of the glass roll 1 of this embodiment demonstrated above, by overlaying the protective film 4 on the glass film 2, this glass film 2 can be protected. Thereby, damage to the glass film 2 in the steps related to the manufacture of various machines can be prevented. In addition, in the winding step, when the third glass film 2C is wound so that the protective film 4 becomes the outer side to form the glass roll 1, tensile stress acts on the second surface 2b of the glass film 2, but it can be The second surface 2b of the glass film 2 is appropriately protected by the protective film 4. Thereby, the glass film 2 in the state of the glass roll 1 can be effectively prevented from breaking. Furthermore, since the transparent conductive film 3 formed on the first surface 2a of the glass film 2 is heated to form a film, it can achieve a low resistance of 20 Ω/□ or less, and can be suitably used for electrodes and the like of various devices.

In addition, by performing the protective film supply step in the vacuum chamber 9, the manufacturing efficiency of the glass roll 1 can be improved. Furthermore, by disposing the protective film supply device 8 in the vacuum chamber 9 of the film forming device 7, the manufacturing device 6 can be miniaturized.

4 to 6 show a second embodiment of the glass roll and its manufacturing method.

The manufacturing apparatus 6 of the glass roll 1 is equipped with the film-forming apparatus 7 and the protective film supply apparatus 8 separately. As shown in FIG. 4, similarly to the first embodiment, the vacuum chamber 9 of the film forming apparatus 7 includes a glass film supply chamber 9a, a film forming chamber 9b, and a glass film recovery chamber 9c. As in the first embodiment, the base material glass roll 1A is arranged in the glass film supply chamber 9a, and the film forming section 10 is provided in the film forming chamber 9b.

The protective film supply device 8 is not installed in the glass film recovery chamber 9c. The winding core 5B which winds the 2nd glass film 2B is arrange|positioned in the glass film collection|recovery chamber 9c. The winding core 5B winds the second glass film 2B, thereby forming a temporary glass roll 1B around the second glass film 2B. The other structure of the film forming apparatus 7 is the same as that of the first embodiment.

The protective film supply device 8 is arranged outside the vacuum chamber 9 in the film forming apparatus 7 and is a position near the film forming apparatus 7. As shown in FIG. 5, the protective film supply device 8 includes a protective film roll 16 and a guide roller 17 that guides the protective film 4. The protective film roll 16 is configured by winding the protective film 4 with a winding core 21. The guide roller 17 includes a carrier roller, but is not limited to this configuration.

As shown in FIG. 5, the temporary glass roll 1B and the glass roll 1 are connected by a roll-to-roll method, and the protective film roll 16 is arranged between the temporary glass roll 1B and the glass roll 1. The protective film supply device 8 makes the protective film 4 drawn out from the protective film roll 16 contact the second glass film 2B drawn out from the temporary glass roll 1B along with the rotation of the winding core 5B via the guide roller 17. Thereby, the third glass film 2C is continuously formed on the downstream side of the guide roller 17. The winding core 5 forms the glass roll 1 around the third glass film 2C by winding the third glass film 2C.

Hereinafter, the method of manufacturing the glass roll 1 by the manufacturing apparatus 6 of the said structure is demonstrated.

As shown in FIG. 6, the method includes: a first glass film supply step for supplying the first glass film 2A; a film formation step for forming a transparent conductive film 3 on the first glass film 2A; and a second glass film is recovered after the film formation step The film 2B serves as the first winding step of the temporary glass roll 1B; the second glass film supply step in which the second glass film 2B is drawn and supplied from the temporary glass roll 1B; the protective film 4 is overlapped on the second glass film 2B to form the first The protective film supply step of the three glass film 2C; and the second winding step of recovering the third glass film 2C as the glass roll 1.

The first glass film supply step and the film formation step are the same as the glass film supply step and the film formation step of the first embodiment, and the first glass film 2A is supplied from the glass film in the vacuum chamber 9 arranged in the film formation device 7 The base material glass roll 1A of the chamber 9a is drawn out and supplied to the film forming chamber 9b, and the transparent conductive film 3 is formed on the first surface 2a of the first glass film 2A by the film forming section 10. Thereby, the second glass film 2B is formed.

The first winding step is a step of temporarily winding the second glass film 2B by another winding core 5B before winding the third glass film 2C by the winding core 5 (temporary winding step). In the first winding step, the second glass film 2B passing through the film forming chamber 9b is introduced into the glass film recovery chamber 9c, and is wound by the winding core 5B. The winding core 5B is rotatably driven by a driving source not shown in the drawing to wind the second glass film 2B. Thereby, a temporary glass roll 1B is formed around the winding core 5B. The temporary glass roll 1B gradually expands its outer diameter as the core 5B rotates. When the winding core 5B winds the second glass film 2B of a predetermined length, the first winding step ends. After that, the temporary glass roll 1B is taken out from the glass film recovery chamber 9c.

In the second glass film supply step, the second glass film 2B is drawn out from the temporary glass roll 1B taken out from the glass film recovery chamber 9c and supplied to the protective film supply device 8 on the downstream side.

In the protective film supply step, the protective film 4 is drawn out from the protective film roll 16. The protective film 4 and the second glass film 2B are sandwiched by the guide roller 17 (consignment roller). Thereby, one surface 4a (adhesive surface) of the protective film 4 is bonded to the second surface 2b of the second glass film 2B. By the above, the third glass film 2C is formed.

In the second winding step, the third glass film 2C is wound by the winding core 5. The winding core 5 is rotationally driven by a driving source not shown. Thereby, the glass roll 1 is formed around the winding core 5. The glass roll 1 gradually expands its outer diameter as the core 5 rotates. When the winding core 5 winds the third glass film 2C of a predetermined length, the second winding step ends, and the glass roll 1 is completed.

In addition, this invention is not limited to the structure of the said embodiment, and it is not limited to the said effect. The present invention can be variously modified within the scope not departing from the gist of the present invention.

In the above-mentioned embodiment, the base material glass roll 1A is arranged in the vacuum chamber 9 and the transparent conductive film 3 is formed on the first glass film 2A by the roll-to-roll method, but it is not limited to this configuration. For example, the glass film 2 (first glass film 2A) continuously formed by the overflow down-draw method may be introduced into the vacuum chamber 9 and the transparent conductive film 3 may be formed on the glass film 2. In this case, the second glass film 2B can be formed without using the base material glass roll 1A.

In the said embodiment, although the example which heated the 1st glass film 2A by the roller main body 13 heated by the heater 14 was shown, it is not limited to this structure. For example, the heater 14 may be arranged in the vicinity of the first glass film 2A in the film forming chamber 9b of the vacuum chamber 9, and the heater 14 may heat the first glass film 2A.

The above embodiment illustrates the glass roll 1 in which the transparent conductive film 3 is formed only on the first surface 2a of the glass film 2. However, it is not limited to this, and transparent conductive films may be formed on both surfaces 2a, 2b of the glass film 2. 3.

In the said embodiment, although the one surface 4a of the protective film 4 was used as an adhesive surface, the example which adhered to the 2nd surface 2b of the 1st glass film 2A was shown, but it is not limited to this structure. It is also possible to use both sides of the protective film 4 as adhesive surfaces, and to bond the other side of the protective film 4 to the transparent conductive film 3 in the glass roll 1. In this case, it is desirable to set the adhesive force of one side 4a of the protective film 4 to be greater than the adhesive force of the other side.

In the above-mentioned embodiment, the glass roll 1 in which the transparent conductive film 3 is formed on the inner side (first surface 2a) of the glass film 2 and the protective film 4 is overlapped on the outer side (second surface 2b) is illustrated, but it is not limited to this constitute. It may be a glass roll 1 in which a protective film 4 is stacked on the inner side of the glass film 2 and a transparent conductive film 3 is formed on the outer side of the glass film 2.

In the said embodiment, although the base material glass roll 1A containing only the 1st glass film 2A (glass film 2) was illustrated, it is not limited to this structure. The base material glass roll 1A may be formed by stacking a band-shaped cushion film containing a resin such as PET on the glass film 2 used as the base material and configured in a roll shape. In this case, it is desirable that in the glass film supply step, the first glass film 2A drawn from the base material glass roll 1A is separated from the buffer film in the glass film supply chamber 9a of the vacuum chamber 9 and supplied to the glass film The buffer film is wound in the chamber 9a by a core or the like. In addition, when producing the temporary glass roll 1B, a band-shaped cushion film containing resin such as PET may be appropriately stacked.

In addition, a leader (eg Ribbon-shaped resin film).

1‧‧‧Glass roll 1A‧‧‧Base material glass roll 1B‧‧‧Temporary glass roll 2‧‧‧Glass film 2a‧‧One side of the glass film (the first side of the glass film, the inner side of the glass film, the first The first side of the glass film) 2b‧‧‧The other side of the glass film (the second side of the glass film, the outside of the glass film, the second side of the first glass film, the second side of the second glass film) 2A‧‧ ‧First glass film 2B‧‧‧Second glass film 2C‧‧‧Third glass film 3. The core of the third glass film (the core of the glass roll) 5A, 5B, 21‧‧‧ Core 6‧‧‧Manufacturing device 7.‧‧Film forming device 8.‧‧Protective film supply device 9‧‧‧Vacuum Chamber 9a‧‧‧Glass film supply room 9b‧‧‧Film forming room 9c‧‧‧Glass film recovery room 10‧‧‧Film forming part 11‧‧‧Sputter source 12‧‧‧Heating roller 13‧‧‧Roll Body 14‧‧‧Heater 15‧‧‧Shaft 16‧‧‧Protective film roll 17‧‧‧Guide roller (consignment roller) 17a‧‧‧Roll surface 18‧‧‧Support mechanism 19‧‧‧Support member 20 ‧‧‧Support shaft R‧‧‧Arrow

Fig. 1 is a side view of the glass roll. Fig. 2 is a side cross-sectional view showing a manufacturing apparatus of a glass roll. Fig. 3 is a flowchart showing a method of manufacturing a glass roll. Fig. 4 is a side cross-sectional view showing a part of a glass roll manufacturing apparatus of another form. Fig. 5 is a side view showing a part of the manufacturing apparatus of the glass roll. Fig. 6 is a flowchart showing a method of manufacturing a glass roll.

1: glass roll

2: glass film

2a: One side of the glass film (the first side of the glass film, the inner side of the glass film, the first side of the first glass film)

2b: The other side of the glass film (the second surface of the glass film, the outside of the glass film, the second surface of the first glass film, the second surface of the second glass film)

3: Transparent conductive film

4: Protective film

4a: Adhesive surface (the side of the protective film)

5: The core of the third glass film (the core of the glass roll)

Claims (7)

A method for manufacturing a glass roll, which is a method for manufacturing a glass roll formed by winding a ribbon-shaped glass film into a roll. The method for manufacturing the glass roll is characterized by having: A step of supplying a glass film sent in a predetermined direction; a step of heating a transparent conductive film on one side of the first glass film to form a second glass film; A protective film supply step of overlapping a belt-shaped protective film on the other surface of the second glass film to form a third glass film; and a winding step of winding the third glass film into a roll. The manufacturing method of the glass roll of Claim 1 of the claim, wherein, in the winding step, the third glass film is wound into a roll so that the protective film becomes the outer side. The method for manufacturing a glass roll as described in item 1 or item 2 of the scope of the patent application, wherein the protective film supply step is performed by winding a core of the third glass film and a guide that guides the protective film A roller nips the second glass film and the protective film, thereby forming the third glass film. The method for manufacturing a glass roll as described in item 1 or item 2 of the scope of the patent application, wherein the film forming step is to form the transparent conductive film on the first glass by a sputtering method in a vacuum chamber membrane. Such as the manufacturing method of the glass roll described in item 4 of the scope of patent application, which In the vacuum chamber, the protective film supply step and the winding step are performed. The method for manufacturing a glass roll as described in item 1 or item 2 of the scope of the patent application, comprising: a temporary winding step of winding the second glass film after the film forming step into a roll; A second glass film supply step in which the temporary glass roll constituted by the temporary winding step draws out the second glass film and sends it out in a predetermined direction; and forms the third glass after the second glass film supply step The protective film supply step of the film. The method for manufacturing a glass roll as described in item 1 or item 2 of the scope of patent application, wherein the transparent conductive film is a single layer and the sheet resistance is 20Ω/□ or less.

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