TWI733140B - Thin object conveying device and equipment - Google Patents

Abstract

The present invention provides a sheet object conveying device and equipment. The conveying device includes: a rail frame provided with a conveying flow path, the conveying flow path is composed of a plurality of parallel and parallel rollers at intervals; and one side of the rail frame is arranged There are a plurality of side rollers in the Z axis that are spaced apart and parallel to each other in the X axis; a pusher is arranged between the two rollers in the conveying flow path, and the pusher is driven by a driving member to be conveyed toward the Displacement on one side of the flow path; thereby enabling the sheet objects to be automatically transported.

Description

Thin object conveying device and equipment

The present invention relates to an object conveying device and equipment, in particular to a sheet object conveying device and equipment for conveying sheet objects.

According to the general chip, there are a variety of manufacturing processes. One is to form a plurality of circuit sections arranged in a matrix on a thin rectangular substrate, so that the substrate is cleaned, sprayed with flux, and multiple solder balls are implanted in each of the circuit sections. After placing, after baking, the process of soldering and fixing the connection and positioning of the die on the solder ball in the circuit area is used by the industry. This process is usually required after the ball (solder ball) is planted and baked Go through a process of inspection to confirm whether the solder balls on the substrate are in the correct position.

The prior art uses sampling inspection for manual inspection. The reason is that the flaky substrate will be flexed and deformed after baking, and the direction of deformation has a variety of variables. There are longitudinal arcs and transverse arcs. There are curved upwards and downwards curved. It is difficult for the operator to perform automated ball planting inspection on the curved and deformed substrate. They can only choose to remove the substrate with a small amount of deformation for manual sampling inspection, which is lacking. For efficiency, defective products may be produced without being discovered; however, for automated inspections, automated transportation must be the first step.

The object of the present invention is to provide a sheet article conveying device suitable for conveying thin plate articles.

Another object of the present invention is to provide a device using the sheet object conveying device.

A sheet object conveying device according to the object of the present invention includes: a rail frame provided with a conveying flow path, the conveying flow path is composed of a plurality of parallel and parallel rollers; one side of the rail frame is provided with a plurality of phases The side roller shafts in the Z-axis are spaced parallel to the X-axis; a pusher is arranged between the two rollers on the conveying flow path. The pusher is driven by a driving member to move toward the conveying flow path. Displacement.

According to another object of the present invention, a sheet object conveying device uses the sheet object conveying device, wherein the selective displacement corresponds to each conveying path on a feeding device, and accepts the corresponding conveyance of the conveying path Thin objects.

According to another object of the present invention, another sheet object conveying device uses the sheet object conveying device, wherein the selective displacement corresponds to a conveying flow path of an inspection device, and a viewing unit is provided on the conveying flow path.

In the sheet object conveying device and equipment of the embodiment of the present invention, since the sheet object is pushed against one side in the conveying flow path to be conveyed, the sheet object can be transported in the conveying flow due to irregular deflection. The transportation in the unstable direction of the road is oriented, which facilitates the automation of the entire transportation process.

A: Feeding device

A1: Conveyor

A11: Transport flow path

A2: Roller

A3: Outlet

A4: Driver

A5: Gate

A6: Shield

A7: guide

A8: Detector

A9: Driver

A91: Belt

B: The first conversion device

B1: The first rail seat

B2: Loading the rail

B21: Conveying flow path

B211: discharge port

B22: roller

B221: Driver

B222: Belt

B23: Side roller

B24: shift piece

B241: Driver

B242: Slide rail

B243: Driver

B25: Gate

B251: Driver

B26: Shield

B261: guide

B27: Detector

B28: Pushing piece

B281: linkage frame

B282: Driver

B283: Belt

B284: Slide rail

C: Inspection device

C1: Rail frame

C11: Transport flow path

C111: Feeding area

C112: Inspection area

C113: Discharge area

C114: Entry side

C12: The first rail frame

C121: Side frame

C122: Driver

C123: Belt

C124: Channel

C125: Driver

C126: Relocation mechanism

C127: shift piece

C128: Driver

C129: Slide rail

C13: Second rail

C131: Side frame

C132: Driver

C133: Belt

C134: Channel

C135: Driver

C136: Relocation mechanism

C137: Clamping parts

C1371: Driver

C1372: Driver

C1373: Slide rail

C138: push parts

C1381: Arrival and Push Department

C1382: Driver

C1383: belt

C1384: Slide rail

C139: Outlet

C1391: Sensing part

C1392: Blocking piece

C1393: Blocking Department

C14: Pressing mechanism

C141: Driver

C142: Pressure roller

C143: Driver

C15: Viewer

C16: Fixture

C161: The first fixture seat

C162: The second fixture seat

C163: Pivot

C164: Spacer

C165: Base

C1651: hollow interval

C166: Driver

C1661: Cylinder rod

C167: Fastener

C168: Mould base

C169: Adsorption seat

C1691: Load mold

C1692: accommodating interval

C1693: gasket

C1694: Breathable seat

C1695: Stoma

C2: Viewing unit

C21: Rail seat

C211: Seat frame

C22: Rail seat

C23: fixed seat

C231: Slide rail

C24: lens

C241: light source base

C3: Leveling unit

C31: Rail seat

C32: Rail seat

C33: Fixed frame

C331: The first fixed seat

C3311: hollow interval

C332: second fixed seat

C3321: Suspension seat

C3322: end

C3323: stop

C3324: Fine tuning pieces

C3325: Sensing parts

C333: Pivot

C334: Spacing

C335: Shelf board

C336: Driver

C337: Fastener

C338: Elastic parts

C34: Pedestal

C341: Pad body

C4: coupling

D: The second conversion device

D1: The second rail seat

D2: Third rail seat

D21: X axis conveying flow path

D3: Remove the rail rack

D31: Side frame

D311: Pressure wheel

D312: Driver

D32: Driver

D33: Belt

D34: Channel

D35: Conveying flow path

D351: Export end

D36: Relocation mechanism

D361: Blocking Department

D371: Driver

D372: Belt

D373: Slide rail

E: Collection device

E1: Box holder

E11: Slot

E12: Roller

E2: Box

E21: Opening

E3: Seat frame

E31: light signal

E32: Detector

F: The first conversion device

F1: Load rail frame

G: Second conversion device

G1: Remove the rail rack

H: Inspection device

H1: Rail frame

H11: Fixture

H2: Rail seat

H3: Viewing unit

H4: Leveling unit

K: substrate

K1: Circuit section

K2: Front end

L: Ball planting inspection equipment

L1: Machine

L2: Countertop

L3: interval

M: Rail frame

M1: Conveying flow path

N: Feeding device

N1: The first conveying part

N11: Conveyor

N2: The second conveying part

N21: Conveyor

O: substrate

Fig. 1 is a schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment in the embodiment of the present invention.

Fig. 2 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment in the embodiment of the present invention.

Fig. 3 is a three-dimensional schematic diagram of the feeding device in the embodiment of the present invention.

Fig. 4 is a partial schematic diagram of one side of the feeding device in the embodiment of the present invention.

Fig. 5 is a three-dimensional schematic diagram of the first conversion device in the embodiment of the present invention.

FIG. 6 is a partial schematic diagram of one side of the first conversion device in the embodiment of the present invention.

Fig. 7 is a perspective view of one side of the rail of the inspection device in the embodiment of the present invention.

Fig. 8 is a perspective view of the other side of the rail of the inspection device in the embodiment of the present invention.

Fig. 9 is a schematic top view of the rail frame of the inspection device in the embodiment of the present invention.

Fig. 10 is a three-dimensional schematic diagram of the pressing mechanism of the inspection device in the embodiment of the present invention.

Fig. 11 is a three-dimensional schematic diagram of the erection of the inspection unit and the leveling unit of the inspection device in the embodiment of the present invention.

Fig. 12 is a three-dimensional exploded schematic diagram of the leveling unit and the jig in the embodiment of the present invention.

Fig. 13 is a three-dimensional schematic diagram of a second conversion device in an embodiment of the present invention.

Fig. 14 is a three-dimensional schematic diagram of the collecting device in the embodiment of the present invention.

FIG. 15 is a schematic diagram of the configuration relationship of each device on the ball planting inspection equipment according to the second embodiment of the present invention.

FIG. 16 is a three-dimensional schematic diagram of the configuration relationship of the devices on the ball planting inspection equipment according to the second embodiment of the present invention.

Please refer to FIG. 1, the sheet object conveying device and equipment of the embodiment of the present invention can be illustrated by the ball planting inspection device L shown in the figure as an example. The sheet object of the embodiment of the present invention can be the ball planting inspection device for carrying out the completion The substrate K after planting balls (tin balls) and baking. The substrate K is a rectangular thin object. The substrate K is provided with a plurality of circuit sections K1 arranged in a matrix. In each circuit section, a plurality of circuits have been planted according to the needs of the circuit. A solder ball for soldering dies (due to the large number and too fine, not shown in the figure).

Please refer to Figures 1 and 2. The ball planting inspection equipment L is equipped on the same machine L1 with: a feeding device A, which is equipped with a plurality of X-axis and provides a conveying path A1 of a conveying flow path A11 for receiving The substrate K, which has been ball-planted and baked in the previous process, is input into the ball-planting inspection equipment L; a first conversion device B is provided with a Y-axis first rail seat B1, and the first rail seat B1 is provided with a A loading rail frame B2 of the X-axis conveying flow path B21, the loading rail frame B2 can be driven by the first rail block B1 and selectively displaced on the first rail block B1 to selectively correspond Each conveying lane A1 on the feeding device A accepts the substrate K conveyed by the corresponding conveying lane A1; an inspection device C is provided with two rails C1 parallel to each other in the Y axis, each rail C1 respectively provide a X-axis linear transport flow path C11 so that the substrate K can be transported thereon, the transport flow path C11 is located behind the transport direction of the transport flow path B21; the loading on the first conversion device B The rails B2 can selectively correspond to one of the rails C1, and transfer the substrate K loaded on the rails B2 to the corresponding rails C1; the inspection device C is provided with a device that can be driven as X, Y , A viewing unit C2 and a leveling unit C3 displaced in the Z-axis, wherein the viewing unit C2 is located above the front section of the transport flow path C11 of the rail frame C1, and can selectively correspond to one of the rail frames C1; The flat unit C3 is located above the rear section of the conveying flow path C11 of the rail frame C1, and can selectively correspond to one of the rail frames C1; a second conversion device D is provided with a second rail seat D1 in the Y-axis direction. The second rail seat D1 is provided with a Z-axis third rail seat D2, and the third rail seat D2 is provided with a removal rail rack D3 that provides an X-axis conveying flow path D21, and the conveying flow path D21 is located in the conveying flow. The conveying direction of road C11 is forward; the second rail seat D1 can drive the third rail seat D2 to link the removal rail frame D3 for Y-axis displacement, and the removal rail frame D3 can be driven by the third rail seat D2 to move The second rail base D1 is moved up and down, and the move-out rail base D3 is selectively displaced by the second rail base D1 and the third rail base D2 to selectively correspond to the rails C1 on the inspection device C, and accept all the rails C1 on the inspection device C. Corresponding to the substrate K that has been inspected and transferred by the rail C1; the second conversion device D is located on the machine L1 relative to the table L2 of the feeding device A, the first conversion device B, and the inspection device C. In a recessed area L3; a collecting device E is provided with a box seat E1 with a plurality of X-axis slots E11 parallel to each other in the Y-axis, and each slot E11 can be accommodated and placed separately One box E2, second turn The rail removal rack D3 of the changing device D can respectively selectively correspond to one of the frame boxes E2, and the substrate K on the rail removal rack D3 can be transferred to the corresponding frame box E2.

Please refer to Figures 3 and 4, each conveying path A1 of the feeding device A on the horizontal conveying surface is respectively composed of a plurality of Y-axis rollers A2 that are spaced apart and arranged parallel to the X-axis, and each conveying path A1 is respectively provided at the discharge port A3 with a gate A5 that can be driven up and down by a driving member A4 composed of a pneumatic cylinder for blocking or opening control. The discharge port A3 is above the discharge port A3 and the inside of the gate A5 is provided There is a shield A6 that limits the height of the substrate K at the discharge port A3. Below the shield A6 is provided a guide A7 with a downwardly inclined surface toward the discharge port A3, so that the There may be, for example, that the front end portion K2 of the substrate K curved upward on both sides in the figure can be guided downward and blocked by the gate A5, so as to prevent the front end portion K2 from being left between the shielding member A6 and the gate A5. The gap protrudes outside; the discharge port A3 is equipped with a detector A8 to detect the discharge status; each roller A2 is driven by a driving member A9 composed of a motor and is linked by a belt A91 to act as an active Sexual rotation.

Referring to Figures 5 and 6, the loading rail B2 of the first conversion device B is formed on the horizontal conveying surface by a plurality of Y-axis rollers B22 that are spaced apart and arranged parallel to each other in the X-axis to form the conveying flow path B21. On one side of the loading rail B2, there are a plurality of Z-axis side rollers B23 arranged parallel to the X-axis. The conveying flow path B21 is provided with a Z-axis rod-shaped shift member B24. The shift member B24 can be driven by a driving member B241 on a slide rail B242 on the side of the side roller shaft B23 for X-axis displacement and driven by a driving member B243 for Z-axis upward and downward displacement, so as to be conveyed by the The upper part of the flow path B21 hangs down from the back end of the base plate K to push against the base plate K for X-axis displacement; the conveying flow path B21 loaded into the rail frame B2 is provided with a discharging port B211. A driving member B251 composed of a pneumatic cylinder drives a gate B25 that moves up and down for blocking or opening control. Above the discharge port B211 and inside the gate B25 is provided a shielding member B26, and the shielding member B26 restricts the substrate K at the height of the outlet B211, under the shield B26 A guide member B261 with a downwardly inclined surface facing the discharge port B211 is provided so that the front end portion K2 of the substrate K that may be curved upwards on both sides in the figure can be guided downwardly. The gate B25 blocks to prevent the front end portion K2 from protruding outside from the clearance between the shielding member B26 and the gate B25; the discharge port B211 is provided with a detector B27 to detect the discharging condition; each The roller B22 is driven by a driving member B221 constituted by a motor and can be actively rotated by a belt B222; the loading rail B2 is provided with a Z-axis rod at a distance from the other side of the side roller shaft B23 Two pushers B28 shaped like two pushers B28 are jointly arranged on both sides of a horizontally arranged linkage frame B281. The linkage frame B281 is driven by a driving element B282 formed by a motor and driven by a belt B283 to be linked to a sliding rail. B284 is displaced in the Y-axis direction, and by means of the linkage of the two pushing members B28, the Y-axis displacement between the two rollers B22 can be made to push the substrate K, so that the substrate K abuts against the side roller shaft B23 on one side Was transported.

Please refer to Figures 7-10. The conveying flow path C11 formed by any of the rails C1 respectively includes a feeding area C111, an inspection area C112, and a discharging area C113 according to the order of conveyance; , The feeding area C111 and the inspection area C112 are formed by a first rail frame C12, and the discharging area C113 is formed by a second rail frame C13, and the first rail frame C12 is longer than the second rail frame C13; The first rail frame C12 is provided with two side frames C121 spaced apart in parallel in the Y-axis direction. The two inner sides of the two side frames C121 facing each other are respectively provided with belts C123 driven by the driving member C122 to be synchronously linked. The second belts C123 An X-axis channel C124 recessed to the inner side of the side frame C121 is formed between the upper ends of the side frames C121 to which they are abutted, and the two belts C123 together form a part of the conveying flow path C11; two side frames C121 is also actuated by a moving mechanism C126 driven by a driving member C125 to change the distance between each other, so as to be suitable for conveying objects of different specifications; a Z-axis rod-shaped rod is provided in the feeding zone C111 The shift member C127 is driven by a driving member C128 outside the first rail frame C12 to be movable on a slide rail C129, And extend the rod-shaped part into the feeding area C111 for X-axis displacement to push the substrate K from one end to the other end and enter the inspection area C112; the entrance end C114 of the conveying flow path C11 is located at the One end of the feeding area C111 on the first rail frame C12, and the two side frames C121 of the first rail frame C12 at the entrance end C114 are respectively provided with a pressing mechanism C14, and the pressing mechanism C14 includes a motor The driving member C141 is formed to drive a rotating pressure wheel C142. The pressure wheel C142 can be moved up and down under the action of a driving member C143 formed by a pneumatic cylinder. The pressure wheel C142 is located above the belt C123 and the channel C124 A viewer C15 is provided below the entrance end C114 near the conveying flow path C11 to detect the bottom information of the substrate K, such as a barcode; the inspection area C112 is provided with a fixture C16; the second rail C13 is provided Two side frames C131 are spaced and arranged in parallel in the Y-axis. The two inner sides of the two side frames C131 facing each other are respectively provided with belts C133 that are driven by a driving member C132 and are synchronously linked. The two belts C133 are respectively attached to the corresponding belts. The upper end of the side frame C131 is formed with an X-axis channel C134 recessed to the inner side of the side frame C131, and the two belts C133 together form another part of the conveying flow path C11; the two side frames C131 are also driven by a driving member C135 A moving and leaning mechanism C136 is driven to change the distance between each other to be suitable for conveying objects of different specifications; a clamping member C137 is provided in the discharging area C113, and the clamping member C137 is affected by the second Driven by a drive member C1371 outside the rail frame C13, it can move up and down in the Z-axis, and is driven by another drive member C1372 to move on a slide rail C1373, whereby the clamping member C137 descends and moves into the discharge The transfer flow path C11 in the area C113 is displaced in the X-axis direction to clamp the substrate K in the inspection area C112 and move it into the discharge area C113. After the substrate K reaches the position, it is loosened and lifted away. The conveying flow path C11; the discharging area C113 is provided with a pusher C138 below the conveying flow path C11, the pusher C138 is provided with a pusher portion A1381 that can be lifted in the Z-axis, the pusher C138 Linked by a belt C1383 driven by a driving part C1382, it can make an X-axis displacement on an X-axis slide rail C1384 between the two side frames C131, and it will be located in the row. The substrate K in the material area C113 is pushed out to the removal rail D3 of the second conversion device D in FIG. 2; the discharge port C139 of the material area C113 is provided with a sensor C1391 and a stopper C1392. The sensor C1391 is used to detect the discharge information of the substrate K. The blocking member C1392 is provided with a blocking portion C1393 capable of moving up and down in the Z-axis to control the blocking or allow the substrate K to be discharged from the discharge port C139.

Please refer to FIG. 11, the inspection unit C2 of the inspection device C is set on a Y-axis rail seat C22 that is set on an X-axis rail seat C21 elevated by a frame C211, and the rail seat C22 can be The rail seat C21 is driven for X-axis displacement, the inspection unit C2 can be driven by the rail seat C22 for Y-axis displacement, and the inspection unit C2 can be mounted on a Z of a fixed seat C23 fixed on the rail seat C22. The sliding rail C231 in the axial direction is displaced in the Z axis; the viewing unit C2 can be a CCD lens C24, which is projected by a light source through a straight slit in the Y axis along the Y axis on the lower light source holder C241 (in the figure Not shown), and inspect the ball planting condition on the substrate K (Figure 1) below by a line scan; the leveling unit C3 of the inspection device C is set on an X-axis elevated by a frame C311 On the Y-axis rail seat C32 set on the rail seat C31, the rail seat C32 can be driven by the rail seat C31 for X-axis displacement, and the leveling unit C3 can be driven by the rail seat C32 for the Y-axis Displacement; the rail seat C22 in the Y axis of the inspection unit C2 and the rail seat C32 in the Y axis of the leveling unit C3 are provided with a coupling C4, the rail seat C22 and the rail seat C32 The displacement in the X-axis is synchronously displaced while keeping a certain distance apart. On the one hand, the coupling C4 ensures the synchronous displacement relationship, and on the other hand, prevents the rail seat C22 and the rail seat C32 from colliding with each other caused by the failure. happen.

11 and 12, the leveling unit C3 is provided with a fixing frame C33 for fixing and interlocking with the rail base C32, and a horizontally arranged rectangular first fixing base C331 is fixedly arranged under the fixing frame C33. A horizontally arranged rectangular second fixing seat C332 is arranged under a fixing seat C331, and a plurality of Z-axes are arranged between the first fixing seat C331 and the second fixing seat C332 A pivot rod C333; the fixed frame C33 includes two frame plates C335 separated by a distance C334 and parallel to each other, between the two frame plates C335 is provided a driving member C336 composed of a steam cylinder, the driving member C336 is a cylinder rod (Figure Not shown in the middle) stretches through the first fixing base C331 to link with the second fixing base C332, and can drive the second fixing base C332 to move up and down; the bottom of the second fixing base C332 is fastened by a fastener C337 A rectangular cushion C34 is provided. The bottom of the cushion C34 is provided with a cushion body C341 with appropriate flexibility. The two sides of the second fixing base C332 and the two sides of the fixing frame C33 are connected with elasticity composed of tension springs. C338, the driving member C336 accumulates elastic restoring force when driving the second fixing seat C332 downward; the first fixing seat C331 is provided with a hollow section C3311, and the second fixing seat C332 is convexly provided with Z A suspension seat C3321 in the axial direction. The suspension seat C3321 protrudes through the hollow section C3311, and on one end C3322 above the first fixing seat C331, a stopper C3323 having a width greater than the width of the hollow section is transversely provided, The stopper C3323 is provided with a fine adjustment member C3324 and a sensing member C3325. The stopper C3323 limits the vertical separation distance between the second fixing seat C332 and the first fixing seat C331, and uses the fine adjustment member C3324 to fine-tune the The distance travel, and use the sensor C3325 for proximity detection to execute the next motion signal control when it is in place.

7 and 12, the fixture C16 of the inspection area C112 of the rail frame C1 is provided with a horizontally arranged rectangular first fixture seat C161, and a horizontally arranged rectangular fixture seat C161 is provided above the first fixture seat C161 The second jig seat C162, the first jig seat C161 and the second jig seat C162 are provided with a plurality of Z-axis pivot rods C163; the first jig seat C161 is provided with a rod-shaped spacer C164 A base C165 is spaced apart, and a hollow section C1651 is provided on the base C165. A driving member C166 composed of a pneumatic cylinder is disposed under the first jig seat C161. The lower end of the driving member C166 extends through the hollow section C1611 of the base C165. The upper end of the cylinder rod C1661 extends through the first jig seat C161 to be linked with the second jig seat C162, and can drive the second jig seat C162 to move up and down; above the second jig seat C162 With fastener C167 The buckle is fixedly provided with a rectangular mold base C168, the mold base C168 is provided with a suction base C169, the suction base C169 is rectangular and is provided with a carrier mold C1691, and the carrier mold C1691 is provided with a concave rectangular housing In the interval C1692, the accommodating interval C1692 is provided with a substantially rectangular ring frame-shaped gasket C1693 composed of a flexible body, and the area enclosed by the ring frame-shaped gasket C1693 is provided with a rectangular plate-shaped air-permeable seat C1694, The ring-shaped periphery of the gasket C1693 is higher than the surface of the air-permeable seat C1694. The air-permeable seat C1694 is provided with a plurality of air holes C1695, and the air holes C1695 can provide adsorption force by negative pressure gas; the accommodating area on the mold carrier C1691 The number and shape of C1692 and the gasket C1693 and vent seat C1694 are determined by the specifications of the substrate K. The area of the substrate K is larger than the area of the rectangular ring frame of the gasket C1693, and it can be placed against the seal. The upper edge of the rectangular ring frame of the pad C1693 is tight; the area enclosed by the ring frame of the gasket C1693 is smaller than the area of the substrate K but covers most of the area of the substrate K. In different specifications of the substrate In the K design, the substrate K may be divided into two areas, left and right, and a hollow gap is formed in the middle part between the two areas. At this time, the gasket C1693 may be set in two ring-shaped frames with a spacing to avoid the hollow gap. The left and right two areas, so that the area enclosed by each ring frame is smaller than the area of the left or right area corresponding to the substrate K, but covers most of the area of the left or right area of the substrate K, so that the ring frame can be avoided. The enclosed area covers the hollowed-out gap, which causes deflation.

Referring to FIG. 12, the removal rail frame D3 of the second conversion device D is provided with two side frames D31 spaced in parallel in the Y-axis direction, and the two inner sides of the two side frames D31 facing each other are respectively driven by a driving member D32. And the synchronously linked belt D33, the two belts D33 respectively form an X-axis channel D34 recessed inside the side frame D31 between the two belts D33 and the upper end of the side frame D31 to which they are abutted, and the two belts D33 together form a conveyor Flow path D35; two side frames D31 and a moving mechanism D36 driven by a driving member (not shown in the figure) can change the spacing between the two sides to be suitable for conveying objects of different specifications; in the conveying flow The road D35 is provided with a Z-axis rod-shaped shifting piece D37, the shifting member D37 is linked by a belt D372 driven by a driving member D371 outside the two side frames D31 to move on a slide rail D373, and extends in the conveying flow path D35 for X-axis displacement to Push the substrate K in FIG. 2 from one end to the other end and discharge the removal rail D3; the two side frames D31 of the removal rail D3 at the outlet end D351 of the conveying flow path D35 are respectively provided with a pressing wheel D311, the resisting wheel D311, the resisting wheel D311 is located above the belt D33, each can be driven by a driving member D312 to rotate; the outlet end D351 is also provided with a stopper D36, which is provided with The lifting block D361.

Referring to Figures 7 and 13, each frame box E2 of the collecting device E has a front and a rear opening E21 respectively, wherein the upper and lower sides of the opening E21 at the feeding end are respectively provided with corresponding to each other and recessed from the end edge. There are a plurality of rollers E12 on both sides of each slot E11 on the box seat E1, and the frame box E2 is located between the rollers E12 on both sides; each frame box E2 is provided with a gantry type The seat frame E3, the seat frame E3 is provided with a light E31 for displaying the working status of the corresponding frame box E2, and is provided with a detector E32 corresponding to the hollow section E22 in each frame box E1 to detect the feeding situation.

After the substrate K of the embodiment of the present invention is input by the conveying path A1 of the feeding device A, it will be blocked in front of the gate A5, and wait for the selective displacement corresponding to the input or output object to transport the sheet object. After the conveying flow path B21 on the loading rail B2 of the first conversion device B selectively corresponds to the conveying path A1, the gate A5 is opened and the substrate K is released to be transferred to the loading rail B2; The substrate K loaded in the rail B2 is transported to the side of the side roller shaft B23 by the two pushing members B28 and is transported to the gate B25 to be blocked, and the loaded rail B2 is selectively After corresponding to one of the two rail racks C1 in the inspection device C, the gate B25 loaded in the rail rack B2 is opened and the substrate K is released and transported to the feeding area C111 of the rail rack C1; The substrate K in the feeding area C111 will be pressed from top to bottom by the pressing wheel C142 of the pressing mechanism C14, so that the curved surface with the front end upwards is restricted from being pressed down if it has a deflection. Forward to the corresponding channel C124 and be conveyed by the belt C123, and after the barcode is checked by the inspector C15, it is pushed down by the dial piece C127 and enters the inspection area C112 and is located above the fixture C16; C16 will cause the driving component C166 to drive the second jig seat C162 to link the mold seat C168 and the suction seat C169 to the bottom surface of the substrate K and transfer the substrate K to a predetermined height, and make the suction seat C169 The air hole C1695 is passed negative pressure to adsorb the substrate K, and the leveling unit C3 is displaced to a proper height above the substrate K of the jig C16 before the inspection unit C2, and the driving member C336 drives the pad The seat C34 presses down the substrate K with a cushion body C341 with appropriate flexibility at the bottom, so that the substrate K can be flatly pressed against the sealing gasket C1693 in the shape of the lower ring frame, so that the sealing gasket C1693 can fully seal the negative pressure gas, and the After the substrate K is smoothly adsorbed and positioned, the drive member C336 of the leveling unit C3 is then made to release the gas of the air cylinder, and the cushion C34 is acted on by the restoring force of the elastic member C338 together with the cushion body at the bottom. C341 is pulled back and lifted away from the substrate K and moved away, and then continues to move from the inspection unit C2 to a position at a proper height above the substrate K on the jig C16 that has been flatly positioned, so that the lens C24 is scanned in a line Check the ball planting condition on the lower substrate K; after the inspection is completed, the air hole C1695 on the suction seat C169 of the fixture C16 is relieved of negative pressure, and the driving member C166 drives the second treatment The base C162 moves the mold base C168 and the suction base C169 down to separate from the bottom surface of the substrate K. At this time, the clamping member C137 in the discharging area C113 will move into the conveying flow path C11 in the discharging area C113 for operation. X-axis displacement, and clamp the substrate K in the inspection area C112 and move it into the discharging area C113 until it is blocked and positioned by the blocking portion C1393 of the blocking member C1392. After the substrate K reaches the positioning, the clamp The holder C137 is released again and rises away from the conveying flow path C11. At this time, the conveying flow path of the moving rail D3 of the second conversion device D that can be selectively displaced corresponding to the input or output object to convey the sheet object D21 has corresponded to the discharge port C139 of the discharge area C113 of the rail frame C1, the blocking portion C1393 of the blocking member C1392 will descend, and the blocking member C138 will be located in the discharge area C113. The substrate K is pushed out to the second turn The shifting device D moves out of the rail D3 until it is blocked by the stop portion D361 of the stopper D36, and the exit end D351 of the shifting device D3 selectively corresponds to a predetermined one on the collecting device E When the frame box E2 is set, the stop portion D361 descends and causes the shift member D37 to push the base plate K through the pressure roller D311 at the outlet end D351 and the belt D33 to discharge the derailing frame D3 to the frame box. E2 is used for collection; because the sheet object of the substrate K can be pressed and pressed at the same time during adsorption and positioning, the perimeter of the sheet object is adsorbed to form a flat surface, which reduces the phenomenon of deflection and deformation, and makes subsequent inspections Accurate inspection results can be taken for operations, reducing misjudgments and defective rates.

裝置及設備，由於該第一轉換裝置B使該基板K之薄片物件被以該輸送流路B21進行傳送

，在該輸送流路B21使該薄片物件被靠推在朝一側靠抵下被輸送

，故可使該薄片物件因不規則撓曲而在該輸送流路B21不穩定方向的輸送獲得定向，方便整個搬送過程的自動化進行。 Transport of sheet objects according to embodiments of the present invention

Device and equipment, due to the first conversion device B, the sheet object of the substrate K is transported by the transport flow path B21

, In the conveying flow path B21, the sheet object is pushed to one side and is conveyed

Therefore, the sheet object can be oriented in the unstable direction of the conveying flow path B21 due to irregular deflection, which facilitates the automation of the entire conveying process.

Please refer to Figures 14 and 15, which are schematic diagrams of another embodiment of the present invention. The parts that are the same as the original embodiment will not be repeated, and only the exceptions will be explained. The same device uses the original number; mainly the first conversion The device F is equipped with two loading rail frames F1, and the second conversion device G is equipped with two moving out rail frames G1, and the inspection device H has a jig H11 on the first rail frame H1, and the machine L1 is additionally provided on it A rail frame M forming a conveying flow path M1; one side of the rail frame H1 is provided with an X-axis rail seat H2, and the rail seat H2 is provided with a common interval that can be driven by the rail seat H2 for X-axis synchronization A displacing inspection unit H3 and a leveling unit H4; the feeding device N is provided with a first conveying part N1 and a second conveying part N2, the first conveying part N1 includes two conveying channels N11, and the second conveying part N2 It includes two conveying lanes N21; wherein, the first conveying part N1 is used to convey the substrate K that has been planted and baked, and the second conveying part N2 is used to convey the substrate K that has been planted but not yet baked Substrate O; After the substrate K is input by one of the conveying lanes N11 of the first conveying part N1, after being selectively matched and accepted by the loading rail F1 on the side of the first conveying part N1 of the first conversion device F, Will be directly transferred to the rail frame H1 provided with the jig H11, and after being leveled by the leveling unit H4 and inspected by the inspection unit H3, the second conversion device G is moved out of the rail on the side of the rail frame H1 The rack G1 is received and transported to one of the preset frame boxes E2 of the collection device E for collection; the substrate O is transported by one of the transport lanes N211 of the second transport portion N2, and then is transported to the first conversion device F. After the loading rail frame F1 on the side of the second conveying part N2 is selectively corresponding and accepted, it will be directly transferred to the rail frame M provided with only the conveying flow path M1, and directly transferred to the second conversion device G The moving-out rail G1 on the side of the rail H2 is received and transferred to one of the preset frame boxes E2 on the box seat E1 of the collecting device E for collection.

However, the above are only preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the description of the invention, All are still within the scope of the invention patent.

B: The first conversion device

B1: The first rail seat

B21: Conveying flow path

B22: roller

B23: Side roller

B24: shift piece

B241: Driver

B242: Slide rail

B243: Driver

B25: Gate

B251: Driver

B28: Pushing piece

B281: linkage frame

K: substrate

Claims (8)

A sheet object conveying device includes: a rail frame provided with a conveying flow path, the conveying flow path is composed of a plurality of parallel and parallel rollers at intervals; one side of the rail frame is provided with a plurality of intervals at an X axis A side roller shaft parallel to the Z-axis; a pusher is arranged between the two rollers on the conveying flow path, and the pusher is driven by a driving member to move toward one side of the conveying flow path. According to claim 1, the sheet object conveying device, wherein, above the discharge port and inside the gate, a guide member having a downwardly inclined surface toward the discharge port is provided. For example, the sheet object conveying device of claim 1 further includes a shifting member that can be driven by the driving member to move to offset the displacement of the sheet object. The sheet object conveying device according to claim 1, wherein the conveying flow path is provided with a gate that can be driven to move up and down at the discharge port. The sheet object conveying device according to claim 1, wherein the rail is erected on a first rail seat in a Y-axis direction, and the rail rack can be driven by the first rail seat and can be selectively operated on the first rail seat Displacement. A sheet object conveying device using the sheet object conveying device according to claim 5, wherein the selective displacement corresponds to each conveying path on a feeding device, and accepts the sheet object conveyed by the corresponding conveying path. A sheet article conveying device uses the sheet article conveying device according to claim 5, wherein the selective displacement corresponds to a conveying flow path of an inspection device, and a viewing unit is provided on the conveying flow path. According to claim 7, the sheet object conveying equipment, wherein the inspection device is provided with a leveling unit, wherein the inspection unit is located above the front section of the conveying flow path; the leveling unit is located above the rear section of the conveying flow path.

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