TWI723686B - Measuring device and measuring method - Google Patents

Abstract

The present invention relates to a measuring device and a measuring method. It is a measuring device and a measuring method for measuring the wind speed of the wind knife structure, and the amount of deformation or flatness of the hardware; the invention includes a measuring method. Measuring platform, a wind speed measuring unit, a deformation measuring unit, and a driving device; the present invention is mainly based on the design of an automated driving device to effectively drive and carry the linear sliding of the wind speed measuring unit and the deformation measuring unit The seat carries out the measurement of the wind speed and the hardware deformation of the air knife structure with a length of 4000mm, and it does achieve the main advantages of using the automatic measurement method to complete the measurement of the wind speed and the uniformity of the deformation of the air knife structure.

Description

Measuring device and measuring method

The invention relates to a measuring device and a measuring method, in particular to a measuring device and a measuring method for measuring the wind speed of the wind knife structure, and the amount of deformation or flatness of the hardware.

Press, with the highly developed semiconductor process technology and optoelectronic technology, the functions of electronic products such as liquid crystal displays, personal computers or notebook computers have become more mature and more diversified, and these electronic products are in the process of manufacturing. All need to go through multiple precise manufacturing processes to manufacture light, thin, short, high-precision electronic products; in the common liquid crystal display panel or semiconductor device manufacturing process, glass substrates or semiconductor wafers usually go through multiple wet processes and other processes Alternately, to produce the final liquid crystal display panel or semiconductor device; however, in the conversion between the wet process and other processes, it is often necessary to completely remove the water or chemical liquid remaining on the substrate from the wet process, otherwise it will According to the yield rate of subsequent processes, the air knife is one of the devices used to blow the liquid medicine on the substrate. Since the above-mentioned liquid crystal display panels or semiconductor components are all in the nanometer size, the air knife is used The amount and angle of the gas out of the liquid to be blown out is highly valued; therefore, how to effectively use innovative hardware design to achieve the original effect of removing the liquid, while achieving the use of semi-automatic or automated measurement to complete the wind The measurement of the uniformity of the wind speed and the deformation of the knife is still a problem that the wet etching machine and other related industry developers and related researchers need to continue to work hard to overcome and solve.

Today, the inventor is based on the tireless spirit of the traditional wind-knife structure that cannot be measured in actual implementation, and is assisted by his wealth of professional knowledge and years of practical experience. To improve, and based on this research and creation of the present invention.

The main purpose of the present invention is to provide a measuring device and measuring method, especially a measuring device and measuring method for measuring the wind speed of the wind knife structure, and the amount of deformation or flatness of the hardware. With the hardware design of the automated driving device, it can effectively drive and take the linear slide of the wind speed measuring unit and the deformation measuring unit to measure the wind speed and the hardware deformation of the wind knife structure with a length of 4000mm. It does achieve the main advantages of using semi-automatic or automated measurement methods to complete the measurement of the uniformity of the wind speed and deformation of the air knife structure.

In order to achieve the above-mentioned implementation objectives, the inventor proposes a measuring device for measuring the wind speed and deformation of a wind knife structure. The measuring device includes at least a measuring platform, a base, and a device. A linear transfer device above the base and a platform set on the linear transfer device; a wind speed measuring unit includes a fixed frame of the platform set on the linear transfer device, and a fixed frame set on the fixed An anemometer at the upper end of the frame, a set of pitot tubes arranged at the upper end of the fixing frame and connected to the anemometer, and a butting member arranged at the lower end of the fixing frame and abutting against the air knife structure, wherein the pitot tube An air inlet port is arranged opposite to a knife edge of the air knife structure at a distance to measure the wind speed value of the wind out of the knife edge, and transmit the wind speed value to the anemometer for display, and the abutting piece is Adjusted by an adjuster set on the fixed frame to resist the air knife structure; a deformation measuring unit is arranged on the linear transfer device and located at an end of the wind speed measuring unit, the deformation The measuring unit includes a measuring piece, and the measuring piece is close to the side of the air knife structure and measures its deformation; and a driving device that drives the linear transfer device to slide on the base to Drive the wind speed measuring unit and the deformation measuring unit to measure the wind speed and deformation of the wind knife structure.

The measuring device as described above, wherein the base is further provided with two supporting members in sequence, and one end of the supporting member is provided with the linear transfer device, and the other supporting member is provided with the Wind knife structure.

In the measuring device as described above, an upper surface of the support member is further provided with a milling plane to provide a horizontal reference surface or a vertical reference surface.

The measuring device as described above, wherein the linear transfer device is slid on the auger plane by at least two sliding rails.

In the above-mentioned measuring device, an angle fixing block having an inclined plane for fixing the air knife structure is further provided on the milling plane.

In the measuring device as described above, the fixing frame is further provided with an angle fixer to adjust the angle of the air inlet of the pitot tube to the knife edge of the air knife structure.

In the measuring device as described above, the measuring component can be one of a measuring meter, an optical displacement meter, a laser displacement meter, and the like.

The measuring device as described above, wherein the measuring piece is a measuring meter, and the measuring meter further includes a measuring probe and a measuring meter connected to the measuring probe, the measuring probe being close to the air knife Measure the deformation of the side of the structure.

The measuring device as described above, wherein the measuring device may be further provided with an alarm device which is electrically connected to the anemometer of the wind speed measuring unit and the gauge of the deformation measuring unit, when the anemometer and the gauge display the value When a preset value is exceeded, the alarm device sends out an alarm signal.

The measuring device as described above, wherein the driving device is any one of a servo motor, a sliding rail, a belt or a ball screw.

The measuring device as described above, wherein the driving device further includes a servo motor, at least two rotating wheels connected to the servo motor, and a set of the rotating wheels and the lower end of the linear transfer device Transmission belt, the servo motor drives the rotation wheel to rotate to drive the transmission belt to rotate and drive the linear transfer device to slide back and forth on the support.

As mentioned above, the measuring device further includes a human-machine interface.

In the measuring device as described above, the measuring probe emits and receives a light, and the deformation of the air knife structure is calculated by the time of light reflection and transmitted to the man-machine interface.

The measuring device as described above, the measuring device further includes an air supply filter device.

In the above-mentioned measuring device, the linear transfer device is a linear sliding seat or a ball screw.

In the above-mentioned measuring device, the measuring device can be a measuring meter, a meter displacement meter, an optical displacement meter or a laser displacement meter.

The above-mentioned measuring device is semi-automatic transmission or automatic configuration.

Furthermore, in order to achieve the above-mentioned implementation objectives, the inventors have developed a measurement method for measuring the wind speed and deformation of an air knife structure. The measurement method includes the following steps: Step 1: Setting a A measuring platform, wherein the measuring platform includes a base, two supporting parts arranged on the base, and a linear transfer device arranged on one of the supporting parts; step two: setting a driving device to connect The linear transfer device is driven by the linear transfer device to move back and forth on the support; Step 3: Set an air knife structure on the other support, wherein the air knife structure includes a knife edge; Step 4 : A wind speed measuring unit is arranged on the linear transfer device, wherein the air inlet port of the pitot tube of the wind speed measuring unit is at a distance from the knife edge, and the abutting piece of the wind speed measuring unit is the top Retract the air knife structure; Step 5: Use the air inlet interface to receive the air output of the knife edge and measure the wind speed, and transmit it to an anemometer for display; and Step 6: Set a deformation measurement unit on the linear transfer device Above, the measuring probe of the deformation measuring unit is close to the side of the air knife structure to measure its deformation, and transmit the deformation to a gauge (132) for display.

The above-mentioned measurement method further includes the following steps: Step 7: Set an alarm device to electrically connect the anemometer and the gauge, and when the value displayed by the anemometer and the gauge exceeds a preset value, The alarm device sends out an alarm signal.

In the measurement method as described above, the deformation measurement unit is a semi-automatic or automatic transmission of the measurement value.

Thereby, the measuring device and measuring method of the present invention are mainly based on the hardware design of the automated driving device, which effectively drives and carries the linear sliding seat of the wind speed measuring unit and the deformation measuring unit to carry out the wind with a length of 4000mm. The measurement of the wind speed of the knife structure and the measurement of the hardware shape variables does achieve the main advantages of using the automatic measurement method to complete the measurement of the wind speed and the uniformity of the deformation of the air knife structure.

(1): Measuring device

(11): Measurement platform

(111): Pedestal

(1111): support

(1112): moving wheel

(1113): support frame

(1114): upper surface

(112): Linear transfer device

(1121): Slide

(113): Platform

(114): Long milling plane

(1141): Horizontal datum

(1142): vertical reference plane

(115): Angle fixed block

(1151): inclined plane

(12): Wind speed measurement unit

(121): fixed frame

(1211): adjuster

(12111): adjustment board

(12112): elastomer

(12113): Slider

(1212): Angle Fixer

(1213): front and rear adjusters

(1214): height adjuster

(122): Anemometer

(123): Pitot tube

(1231): Inlet port

(124): Abutment

(13): Deformation measurement unit

(130): Measuring parts

(131): Measuring probe

(132): Scale

(14): Drive

(141): Servo motor

(142): Turn the wheel

(143): Transmission belt

(2): Air knife structure

(21): Knife

(3): Air supply filter device

(31): gas source

(32): Pressure regulating valve

(33): Flow pressure display

(34): Inlet air filter device

(35): Pressure gauge

(36): Gas branch pipe

(37): Ball valve switch

(38): Hose

(S1): Step one

(S2): Step two

(S3): Step three

(S4): Step Four

(S5): Step 5

(S6): Step 6

(S7): Step 7

Figure 1: A schematic diagram of the overall structure of a preferred embodiment of the measuring device of the present invention.

Figure 2: A schematic diagram of the measurement platform setting of a preferred embodiment of the measurement device of the present invention.

Figure 3: A schematic diagram of the linear sliding seat and the air knife structure of a preferred embodiment of the measuring device of the present invention.

Figure 4: A schematic diagram of the wind speed measurement unit arrangement of a preferred embodiment of the measurement device of the present invention.

Figure 5: A schematic diagram of the arrangement of the abutment member and the Pitot tube in a preferred embodiment of the measuring device of the present invention.

Fig. 6: A schematic diagram of the arrangement of the abutting member and the adjuster of a preferred embodiment of the measuring device of the present invention.

Fig. 7: A schematic diagram of the arrangement of the wind speed measuring unit of the second preferred embodiment of the measuring device of the present invention.

Figure 8: A schematic diagram of the wind speed measurement unit arrangement of the three preferred embodiments of the measurement device of the present invention.

Figure 9: A schematic diagram of the configuration of the deformation measuring unit of a preferred embodiment of the measuring device of the present invention.

Figure 10: A schematic diagram of the driving device arrangement of a preferred embodiment of the measuring device of the present invention.

Figure 11: A flowchart of a preferred embodiment of the measurement method of the present invention.

Figure 12: A step flow chart of the second preferred embodiment of the measurement method of the present invention.

In order to help your examiners understand the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail with the accompanying drawings and in the form of embodiment expressions. The drawings used therein are as follows: The subject matter is only for the purpose of illustration and auxiliary description, and may not be the true proportions and precise configuration after the implementation of the invention. Therefore, it should not be interpreted in terms of the proportions and configuration relationships of the accompanying drawings, and should not limit the scope of rights of the invention in actual implementation. Hexian stated.

First of all, please refer to Figures 1 and 3, which are schematic diagrams of the overall structure of a preferred embodiment of the measurement device of the present invention, in which the measurement device (1) of the present invention is used to measure a length of 4000 The wind speed and deformation of the millimeter (millimeter, abbreviated as mm) wind knife structure (2). The measuring device (1) includes a measuring platform (11), a wind speed measuring unit (12), and a deformation measuring device. Unit (13), and a driving device (14); the measuring device and measuring method of the present invention are mainly based on the hardware design of the automated driving device (14) to effectively drive and carry the wind speed measuring unit ( 12) With the linear transfer device (112) of the deformation measuring unit (13) to measure the wind speed and the hardware deformation of the air knife structure (2) with a length of 4000mm, the automatic measurement method is indeed achieved. Complete the main advantages of the air knife structure (2), such as the measurement of the uniformity of the wind speed and the deformation.

Please refer to Figures 2 and 3 together, which are schematic diagrams of the measurement platform setting of a preferred embodiment of the measurement device of the present invention, and the measurement platform setting of a preferred embodiment of the measurement device of the present invention In the schematic diagram, the measurement platform (11) consists of a base (111), two supports (1111), a linear transfer device (112), and a platform (113) set on the linear transfer device (112) The base (111) is used to support the overall measuring device (1); in addition, the lower end of the base (111) can be further provided with a plurality of moving wheels (1112), the The moving wheel (1112) is mainly used by a user to conveniently move the measuring device (1); in addition, the lower end of the base (111) can also be further provided with a plurality of support frames (1113), the The supporting frame (1113) mainly stabilizes the measuring device (1), and avoids the shaking of the base (111) from affecting the measurement accuracy of the wind speed measuring unit (12) and the deformation measuring unit (13) , The measuring device (1) further includes an air supply filter device (3), the air supply filter device (3) is used to filter an inlet air source (31), wherein the air supply The filter device (3) further includes at least one pressure regulating valve (32) connected to the air inlet source (31), at least one flow indicator (33) connected to the pressure regulating valve (32), and at least one pressure regulating valve (32) connected to the pressure regulating valve (32). 33) The connected gas filter device (34), at least one pressure gauge (35) connected with the gas filter device (34), at least one gas branch pipe (36) connected with the pressure gauge (35), at least A ball valve switch (37) connected to the gas branch pipe (36), and a hose (38) connected to the ball valve switch (37), through the arrangement of the pipeline, the incoming gas source is filtered and filtered through layers Monitoring, so that it can achieve the advantages of stable quality and flow. In an embodiment of the present invention, the supporting member (1111) is any one of an I-beam, an H-beam, a U-beam, and a U-beam.

The supports (1111) are arranged on the upper surface (1114) of the base (111). Since the measurement of the wind speed or deformation of the wind knife structure (2) is extremely important to the level, each The upper surface (1114) of the support (1111) is provided with a milling plane (114) to provide a horizontal reference surface (1141) or a vertical reference surface (1142) for the linear transfer device (112) and the The air knife structure (2) is set. As shown in Figures 2 and 3, the linear transfer device (112) is set on the milling plane (114) of the left support (1111), and the linear transfer The carrying device (112) slides on the auger plane (114) through at least two slide rails (1121), and the air knife structure (2) is the auger plane (1111) provided on the right side of the support (1111). On 114), the air knife structure (2) and the linear transfer device (112) are both completely horizontal or completely vertical by the milling plane (114).

Please also refer to Figures 4 to 5, which are a schematic diagram of the wind speed measurement unit arrangement of a preferred embodiment of the measuring device of the present invention, and a schematic diagram of the arrangement of the abutment member and the pitot tube, in which the platform (113) The wind speed measuring unit (12) is further provided on the upper side, and the wind speed measuring unit (12) is composed of a fixing frame (121), an anemometer (122), a pitot tube (123) and a supporting member ( 124), wherein the fixing frame (121) is set on the linear transfer device (112), and the anemometer (122) and the pitot tube (123) are simultaneously set on the fixing frame (121) ), and the air inlet port (1231) of the pitot tube (123) is opposite to the knife edge (21) of the air knife structure (2) and is separated by a distance, and the air inlet port (1231) is used to receive The gas blown out by the knife edge (21) and measure its wind speed to be transmitted to the anemometer (122) for display, and the abutment piece (124) is It is arranged at the lower end of the fixing frame (121) and abuts against the side of the air knife structure (2), wherein the abutting member (124) is provided by an adjuster ( 1211) Adjust the state of the air knife structure (2); that is to say, please also refer to Fig. 6, which is the abutment member and adjuster of a preferred embodiment of the measuring device of the present invention A schematic diagram of the arrangement, where the adjuster (1211) is composed of an adjusting plate (12111), an elastic body (12112), and a sliding block (12113), and the sliding block (12113) is connected to the abutting piece (124), the adjusting plate (12111) is used to compress the elastic body (12112) so that the abutting member (124) is close to the air knife structure (2), if the air knife structure (2) is deformed , The abutting member (124) can move along the outline of the air knife structure (2), so that the air inlet port (1231) of the pitot tube (123) can be connected with the knife edge (21) of the air knife structure (2) ) Keep the same distance without affecting the measurement of the wind speed measuring unit (12); wherein the elastic body (12112) can be any one of spring, elastic rubber, oil pressure element, etc.; wherein the abutting member (124) ) Can be either roller or slider. Thereby, the adjuster (1211) can adjust the softness and hardness of the elastic body (12112) through a screw (not shown in the figure) behind the adjusting plate (12111), so that it can pass through the abutment member and the elastic body. It is configured to achieve elastic pressing force, so that the elastic body can move according to the side profile of the air knife structure (2); and the wind speed measuring unit (12) further includes a front and rear adjuster (1213) and a height adjustment The device (1214), and by adjusting the overall position height or front-to-back distance of the wind speed measuring unit, it can effectively improve the accuracy of the wind speed value by shortening the distance.

In addition, please refer to Figs. 7 and 8, which are schematic diagrams of the wind speed measurement unit arrangement of the second preferred embodiment of the measuring device of the present invention, and the wind speed of the third preferred embodiment of the measuring device of the present invention The schematic diagram of the measurement unit setup, in which the wind knife structure (2) is a vertical blade (21) with a 30-degree or 40-degree blow angle. The present invention has two different implementation aspects, one of which is the seventh As shown in the figure, the angle of the air inlet (1231) of the pitot tube (123) is changed, that is, the fixing frame (121) is provided with an angle holder (1212) to adjust the air inlet of the pitot tube (123) The angle between the interface (1231) and the knife edge (21) of the air knife structure (2) is an included angle of 30 degrees or 40 degrees to completely receive and measure the wind speed of the gas blown by the knife edge (21) and transmit it to The anemometer (122) shows; the other is the knife edge (21) of the air knife structure (2) shown in Figure 8 The angle of the milling plane (114) is provided with an angle fixing block (116) with an inclined plane (1151) to fix the air knife structure (2), when the air knife structure (2) is set on When the inclined plane (1151) is on, the knife edge (21) and the air inlet port (1231) of the pitot tube (123) have an angle of 30 degrees or 40 degrees to receive and measure the knife edge (21) completely The wind speed of the blown gas is transmitted to the anemometer (122) for display.

Please also refer to Fig. 9, which is a schematic diagram of the configuration of the deformation measuring unit of a preferred embodiment of the measuring device of the present invention, wherein the deformation measuring unit (13) is arranged on the linear transfer device (112) And located at one end of the wind speed measuring unit (12). The deformation measuring unit (13) includes a measuring probe (131) and a meter (132) connected to the measuring probe (131) The measuring probe (131) approaches the side of the wind knife structure (2) and measures its deformation. The deformation is transmitted to the gauge (132) for display, and the measuring device (1) further It also includes a man-machine interface. The measuring probe (131) emits a signal and calculates the deformation of the air knife structure (2) by receiving the reflection of the signal and transmits it to the man-machine interface. The signal is a microwave Or light, that is, the measuring probe (131) mainly emits a signal toward the side of the wind knife structure (2), for example: a laser light, when the measuring probe (131) ) After receiving the laser light to reflect on the side of the wind knife structure (2), the round-trip time of the laser light can be used to determine the side of the wind knife structure (2) and the measuring probe (131) Generally speaking, if the side of the air knife structure (2) is not deformed, the round-trip time of the laser light at each position of the side of the air knife structure (2) is fixed or in error Within the range, when the round-trip time of the laser light received by the measuring probe (131) is greater or less than the error range, it means that the side of the wind knife structure (2) has been deformed, such as concave or convex.

In addition, the measuring device (1) is provided with an alarm device that electrically connects the anemometer (122) of the wind speed measuring unit (12) and the gauge (132) of the deformation measuring unit (13), respectively, When the values displayed by the anemometer (122) and the gauge (132) exceed a preset value, the alarm device sends out an alarm signal.

Please refer to Figure 10 again, which is a schematic diagram of the driving device arrangement of a preferred embodiment of the measuring device of the present invention, wherein the driving device (14) is arranged on a side of the base (111) to drive The linear transfer device (112) slides on the support (1111) to drive the wind speed measuring unit (12) and the deformation measuring unit (13) to measure the wind speed and deformation of the wind knife structure (2) In other words, the driving device (14) includes a servo motor (141), at least two rotating wheels (142) connected to the servo motor (141), and a set of the rotating wheels (142) and A transmission belt (143) arranged at the lower end of the linear transfer device (112), wherein the servo motor (141) automatically drives the rotating wheel (142) to rotate to drive the transmission belt (143) to rotate and drive the linear The transfer device (112) slides back and forth on the support (1111), so that the wind speed measurement unit (12) and the deformation measurement unit (13) can measure from the beginning to the end a 4000mm long air knife structure ( 2) The wind speed and the amount of deformation.

In addition, in order for your reviewer to have a more in-depth and specific understanding of the present invention, please also refer to Figure 11, which is a flow chart of the steps of the measurement method of the present invention, in which the measurement method of the present invention is mainly used Measuring the wind speed and deformation of a wind knife structure (2) includes the following steps:

Step one (S1): Set up a measurement platform (11), wherein the measurement platform (11) includes a base (111), two supports (1111) arranged on the base (111), and a A linear transfer device (112) arranged on one of the supports (1111); in a preferred embodiment of the present invention, the measurement platform (11) is supported by a base (111) and two The part (1111) is combined with a linear transfer device (112), wherein the base (111) is used to support the overall measuring device (1); in addition, the lower end of the base (111) is A plurality of moving wheels (1112) can be further provided, and the moving wheels (1112) are mainly used by a user to conveniently move the measuring device (1); in addition, the lower end of the base (111) is also A plurality of supporting frames (1113) can be further provided, and the supporting frames (1113) are mainly used to stabilize the measuring device (1) and avoid the influence of the shaking of the base (111) on the wind speed measuring unit (12) and The measurement accuracy of the deformation measuring unit (13); in addition, the supports (1111) are arranged on the upper surface (1114) of the base (111), due to the wind speed or shape of the air knife structure (2) The measurement of variables is extremely important to the level requirements. Therefore, the upper surface (1114) of each support (1111) A dragon milling plane (114) is provided to provide a horizontal reference surface (1141) or a vertical reference surface (1142) for the linear transfer device (112) and the air knife structure (2) to be set, as shown in Figure 2 As shown in Figure 3, the linear transfer device (112) is set on the milling plane (114) of the left support (1111), and the linear transfer device (115) is driven by at least two slide rails (1121) slides on the dragon milling plane (114), and the air knife structure (2) is set on the dragon milling plane (114) of the support member (1111) on the right side, and the air knife structure (2) and The linear transfer device (112) achieves a completely horizontal or completely vertical state by the auger milling plane (114).

Step two (S2): Set up a driving device (14) connected to the linear transfer device (112) to drive the linear transfer device (112) to move back and forth on the support (1111); in the first aspect of the present invention In a preferred embodiment, the driving device (14) is arranged on a side of the base (111) to drive the linear transfer device (112) to slide on the support (1111) to drive the wind speed The measuring unit (12) and the deformation measuring unit (13) measure the wind speed and deformation of the air knife structure (2); that is, the driving device (14) includes a servo motor (141), at least two The rotating wheels (142) connected to the servo motor (141), and a set of transmission belts (143) set on the rotating wheels (142) and arranged at the lower end of the linear transfer device (112), wherein the servo The motor (141) automatically drives the rotating wheel (142) to rotate to drive the transmission belt (143) to rotate and drive the linear transfer device (112) to slide back and forth on the support (1111) to make the wind speed The measuring unit (12) and the deformation measuring unit (13) can measure the wind speed and the deformation amount of the air knife structure (2) with a length of 4000 mm from the beginning to the end.

Step three (S3): Set an air knife structure (2) on the other support member (1111), wherein the air knife structure (2) includes a knife edge (21).

Step 4 (S4): Set a wind speed measuring unit (12) on the linear transfer device (112), wherein the air inlet port (1231) of the pitot tube (123) of the wind speed measuring unit (12) is opposite to The knife edges (21) are separated by a distance, and the abutting member (124) of the wind speed measuring unit (12) is pressed against the wind knife structure (2).

Step 5 (S5): Use the air inlet port (1231) to receive the air volume of the knife edge (21) and measure the wind speed, and transmit it to an anemometer (122) for display; in a preferred embodiment of the present invention , The wind speed The measuring unit (12) is composed of a fixed frame (121), an anemometer (122), a pitot tube (123) and a butt member (124), wherein the fixed frame (121) is set in The linear transfer device (112), and the anemometer (122) and the pitot tube (123) are set on the fixing frame (121) at the same time, and the air inlet port (1231) of the pitot tube (123) It is opposite to the knife edge (21) of the air knife structure (2) and is separated by a distance. The gas inlet port (1231) is used to receive the gas blown from the knife edge (21) and measure the wind speed to transmit it to the air knife. The anemometer (122) shows that the abutment member (124) is arranged at the lower end of the fixing frame (121) and abuts against the side of the air knife structure (2), wherein the abutment member (124) The adjuster (1211) set on the fixed frame (121) adjusts the state of the air knife structure (2); that is, the adjuster (1211) is made of an adjusting plate (12111). ), an elastic body (12112), and a sliding block (12113), the sliding block (12113) is connected to the abutting piece (124), and the adjusting plate (12111) is used to compress the elastic body (12112), so that the abutting member (124) is close to the air knife structure (2), if the air knife structure (2) is deformed, the abutting member (124) can follow the air knife structure (2) ) The appearance is moved so that the air inlet (1231) of the pitot tube (123) can keep the same distance from the knife edge (21) of the air knife structure (2) without affecting the wind speed measuring unit (12) The measurement.

Step 6 (S6): Set a deformation measuring unit (13) on the linear transfer device (112), wherein the measuring probe (131) of the deformation measuring unit (13) is close to the air knife structure (2) ) And measure the amount of deformation, the amount of deformation is displayed through a transmission to the gauge (132); in a preferred embodiment of the present invention, the deformation measurement unit (13) is set on the linear On the transfer device (112) and located at one end of the wind speed measuring unit (12), the deformation measuring unit (13) includes a measuring piece (130), wherein the measuring piece (130) is further It includes a measuring probe (131) and a gauge (132) connected to the measuring probe (131). The measuring probe (131) is close to the side of the wind knife structure (2) and measures its deformation , The deformation amount is displayed through a transmission to the gauge (132), wherein the measuring probe (131) emits a signal, and by receiving the reflection of the signal, the deformation amount transmission of the wind knife structure (2) is calculated To the human-machine interface, the signal is one of microwave or light, that is, the measuring probe (131) mainly emits a signal toward the side of the wind knife structure (2), for example: a Laser light, when the measuring probe (131) receives the laser light to the wind After the side of the knife structure (2) is reflected, the distance between the side of the wind knife structure (2) and the measuring probe (131) can be judged by the round-trip time of the laser light. Generally speaking, if the When the side of the air knife structure (2) is not deformed, the round-trip time of the laser light at each position of the side of the air knife structure (2) is fixed or within the error range, when the measuring probe (131 ) When the round-trip time of the received laser light is greater than or less than the error range, it means that the side of the wind knife structure (2) has undergone deformation, such as deformation such as cavities or protrusions.

In addition, please also refer to Figure 12. The measurement method further includes a step 7 (S7): setting an alarm device to electrically connect the anemometer (122) and the gauge (132), when the When the value displayed by the anemometer (122) and the gauge (132) exceeds a preset value, the alarm device sends out an alarm signal.

Furthermore, in an embodiment of the present invention, the deformation measurement unit is a semi-automatic or automatic transmission of the measurement value. Wherein, when the deformation measuring unit is a semi-automated embodiment, the measuring device measures the deformation by the measuring piece of the deformation measuring unit and then directly displays the information on the display table of the measuring piece On top, and arrange manpower for real-time inspection next to the deformation measurement unit to achieve a fast and accurate semi-automatic measurement method.

In addition, in another embodiment of the present invention, when the deformation measuring unit is an automated embodiment, the measuring device directly measures the deformation by the measuring piece of the deformation measuring unit. The information is displayed on the display table of the measuring device. The measuring device is the measuring table ten. The measuring probe emits a signal and calculates the shape of the wind knife structure by receiving the reflection of the signal. Variables, and then send the deformation information to the human-machine interface, through the human-machine interface real-time verification, to achieve a fast and accurate automatic measurement method.

As can be seen from the above implementation description, compared with the prior art, the measuring device and measuring method of the present invention have the following advantages:

1. The measuring device and measuring method of the present invention are mainly based on the hardware design of the automated driving device, which effectively drives and rides the linear sliding seat of the wind speed measuring unit and the deformation measuring unit for lengthening. The measurement action of the wind speed and the hardware deformation of the air knife structure with a degree of 4000mm does achieve the main advantages of using the automatic measurement method to complete the measurement of the wind speed and the uniformity of the deformation of the air knife structure.

In summary, the measuring device and measuring method of the present invention can indeed achieve the expected use effect through the above-disclosed embodiments, and the present invention has not been disclosed before the application, and it is in full compliance with the patent law. The regulations and requirements. If you file an application for a patent for invention in accordance with the law, you are kindly requested to review and grant a quasi-patent.

However, the figures and descriptions disclosed above are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Anyone familiar with the art will do other things based on the characteristic scope of the present invention. Equivalent changes or modifications should be regarded as not departing from the design scope of the present invention.

(1): Measuring device

(11): Measurement platform

(12): Wind speed measurement unit

(3): Air supply filter device

(31): gas source

(32): Pressure regulating valve

(33): Flow pressure display

(34): Inlet air filter device

(35): Pressure gauge

(36): Gas branch pipe

(37): Ball valve switch

(38): Hose

Claims (22)

A measuring device for measuring the wind speed and deformation of an air knife structure (2). The measuring device (1) at least includes: a measuring platform (11), which includes a base (111) ), a linear transfer device (112) arranged above the base (111) and a platform (113) arranged on the linear transfer device (112); a wind speed measuring unit (12), including a The fixed frame (121) of the platform (113) arranged on the linear transfer device (112), an anemometer (122) arranged on the upper end of the fixed frame (121), and a set of fixed frame ( 121) The upper end of the Pitot tube (123) connected to the anemometer (122), and an abutment piece (124) arranged at the lower end of the fixing frame (121) and abutting against the air knife structure (2), wherein An air inlet port (1231) of the pitot tube (123) is arranged opposite to a knife edge (21) of the air knife structure (2) and a distance away to measure the wind speed value of the knife edge (21), And send the wind speed value to the anemometer (122) for display, and the abutment piece (124) is adjusted by an adjuster (1211) arranged on the fixing frame (121) to resist the wind knife structure ( 2); A deformation measuring unit (13) is set on the linear transfer device (112) and located at one end of the wind speed measuring unit (12), the deformation measuring unit (13) includes a The measuring piece (130), and the measuring piece (130) is close to the side of the air knife structure (2) and measuring its deformation; and a driving device (14) which drives the linear transfer device ( 112) Sliding on the base (111) to drive the wind speed measuring unit (12) and the deformation measuring unit (13) to measure the wind speed and deformation of the wind knife structure (2). For the measurement device described in the first item of the scope of patent application, wherein the base (111) is further provided with two support members (1111) in sequence, and one end of the support member (1111) is provided with the linear The transfer device (112), and the other support (1111) is provided with the air knife structure (2). For the measurement device described in item 2 of the scope of patent application, an upper surface (1114) of the support (1111) is further provided with a milling plane (114) to provide a horizontal reference surface (1141) or a Vertical reference plane (1142). As for the measurement device described in item 3 of the scope of patent application, the linear transfer device (112) is slid on the milling plane (114) by at least two slide rails (1121). The measuring device described in item 3 of the scope of patent application, wherein the milling plane (114) is further provided with an angle fixing block (115) having an inclined plane (1151) to fix the air knife structure (2) . The measuring device described in the first item of the scope of patent application, wherein the fixing frame (121) is further provided with an angle fixing device (1212) to adjust the alignment of the air inlet port (1231) of the pitot tube (123) The angle of the knife edge (21) of the air knife structure (2). For the measuring device described in item 1 of the scope of patent application, the measuring element (130) can be one of a measuring meter, an optical displacement meter, a laser displacement meter, etc. For example, in the measurement device described in item 1 of the scope of patent application, the measurement component (130) is a measurement meter, and the measurement meter further includes a measurement probe (131) and a measurement probe ( The gauge (132) of 131), the measuring probe (131) is close to the side of the air knife structure (2) and measures its deformation. The measuring device described in item 1 of the scope of patent application, wherein the measuring device (1) is further provided with an anemometer (122) and the deformation variable which are respectively electrically connected to the wind speed measuring unit (12) The alarm device of the measuring piece (130) of the measuring unit (13), when the value displayed by the anemometer (122) and the measuring piece (130) exceeds a preset value, the alarm device sends out an alarm signal . For the measuring device described in item 1 of the scope of patent application, the driving device (14) is any one of a servo motor (141), a slide rail, a belt or a ball screw. As for the measuring device described in the first item of the scope of patent application, the driving device (14) further includes a servo motor (141), at least two rotating wheels (142) connected to the servo motor (141), and a set A transmission belt (143) arranged on the rotating wheels (142) and arranged at the lower end of the linear transfer device (112). The servo motor (141) drives the rotating wheel (142) to rotate to drive the transmission The belt (143) rotates and drives the linear transfer device (112) to slide back and forth on the two supports (1111). Such as the measurement device described in item 1 of the scope of patent application, the measurement device (1) further includes a human-machine interface. For example, the measuring device described in item 12 of the scope of patent application, wherein the measuring device (130) is a measuring meter, and the measuring meter further includes a measuring probe (131) and a measuring probe ( The gauge (132) of 131), the measuring probe (131) is close to the side of the air knife structure (2) and measures its deformation. Such as the measurement device described in item 13 of the scope of patent application, wherein the measurement probe (131) emits a signal, and by receiving the reflection of the signal, the deformation of the wind knife structure (2) is calculated and transmitted to the person Machine interface. For the measurement device described in item 14 of the scope of patent application, the signal is one of microwave or light. As for the measuring device described in item 12 of the scope of patent application, the driving device (14) further includes a servo motor (141), at least two rotating wheels (142) connected to the servo motor (141), and a set Transmission belts arranged on the rotating wheels (142) and arranged at the lower end of the linear transfer device (112) (143), the servo motor (141) drives the rotating wheel (142) to rotate to drive the transmission belt (143) to rotate and drive the linear transfer device (112) to slide back and forth on the support (1111). Such as the measuring device described in item 1 of the scope of patent application, the measuring device (1) further includes an air supply filter device (3). For the measuring device described in item 1 of the scope of patent application, the linear transfer device (112) is a linear slide or a ball screw. As for the measuring device described in item 1 of the scope of patent application, the abutting member (124) can be either a roller or a sliding block. A measurement method is used to measure the wind speed and deformation of a wind knife structure (2). The measurement method includes the following steps: Step 1 (S1): Set up a measurement platform (11), wherein the The measuring platform (11) includes a base (111), two supports (1111) arranged on the base (111), and a linear transfer device arranged on one of the supports (1111) (112); Step two (S2): set a driving device (14) connected to the linear transfer device (112) to drive the linear transfer device (112) to move back and forth on the support (1111); step Three (S3): Set an air knife structure (2) on the other support (1111), wherein the air knife structure (2) includes a knife edge (21); Step 4 (S4): Set a wind speed The measuring unit (12) is on the linear transfer device (112), wherein the air inlet port (1231) of the pitot tube (123) of the wind speed measuring unit (12) is opposite to the knife edge (21) and a distance away , And the abutting member (124) of the wind speed measuring unit (12) is pressed against the wind knife structure (2); Step 5 (S5): Use the air inlet port (1231) to receive the output of the knife edge (21) The wind volume and its wind speed are measured and transmitted to an anemometer (122) for display; and Step 6 (S6): Set a deformation measuring unit (13) on the linear transfer device (112), wherein the measuring probe (131) of the deformation measuring unit (13) is close to the air knife structure (2) ) And measure its deformation, and send the deformation to a gauge (132) for display. For example, the measurement method described in item 20 of the scope of patent application further includes the following steps: Step 7 (S7): Set an alarm device to electrically connect the anemometer (122) and the gauge (132), when the wind speed When the value displayed by the meter (122) and the meter (132) exceeds a preset value, the alarm device sends out an alarm signal. The measurement method described in item 20 of the scope of the patent application further includes the following steps: wherein the deformation measurement unit (13) is a semi-automatic or automatic transmission of the measurement value.

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